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1. 5 03 54e 17 8 52112e 17 9 42125e 17 3 36878e 18 9 OneArray poly metal 0 44 8 63129e 17 5 42286e 17 8 533 13e 17 7 98708e 17 2 6056e 18 8 5 OneArray poly metal 0 513333 8 9178 1e 17 5 67424e 17 8 79593e 17 6 9387e 17 2 32045e 18 6 l6 OneArray poly metal 0 586667 9 06651e 17 5 9698e 17 9 0067e 17 6 0751e 17 2 24586e 18 7_ OneArray poly metal 0 66 9 07842e 17 6 30906e 17 9 17255e 17 5 39683e 17 2 06968e 18 5 I8 OneArray poly metal 0 733333 9 16044e 17 6 49553e 17 9 309e 17 4 93778e 17 2 0023e 18 OneArray metal 0 806667 9 37161e 17 6 72949e 17 9 40862e 17 4 5173e 17 1 9723e 18 10 OneArray metal 0 88 9 52077e 17 7 06899e 17 9 60046e 17 4 05624e 17 2 07349e 18 3 8 11 OneArray poly metal2 0 22 5 5972 1e 17 2 80814e 17 5 60189e 17 1 51817e 16 6 62864e 18 1 112 OneArray poly metal2 0 293333 5 70343e 17 2 91774e 17 5 5332e 17 1 20472e 16 6 137 16e 18 1 13 OneArray metal2 0 366667 5 86382e 17 3 0159e 17 5 49949e 17 1 01743e 16 5 56901e 18 1 OneArray metal2 0 44 5 8256e 17 3 29999e 17 5 6073e 17 8 81606e 17 4 9742 9e 18 8 115 OneArray poly metal2 0 513333 5 97601e 17 3 39124e 17 5 79716e 17 Z772936 17 4 49516e 18
2. 7 116 OneArray poly metal2 0 586667 OneArray metal2 0 66 6 09285e 17 3 51995e 17 5 9577e 17 6 85946e 17 4 21036e 18 7 06442e 17 6 1861 1e 17 3 55972e 17 5 97112e 17 6 31358e 17 4 48088e 18 6 42818e 17 18 OneArray metal2 0 733333 6 22332e 17 3 80557e 17 6 05117e 17 5 83862e 17 3 55816e 18 5 85933e 17 OneArray metal2 0 806667 6 33814e 17 3 8895e 17 6 11998e 17 5 3345 1e 17 3 52759e 18 5 46181e 17 20 OneArray poly metal2 4 11291le 17 6 19433e 17 4 92721e 17 5 04595e 17 21 ParallelPla poly metal 0 88 6 4072 1e 17 3 0411 1e 1 8 22 ParallelPla poly metal2 eat 1 fonera poly p metal OneArra oly metal 3 OneArrapoly metal 4 OneArrapoly metal OneArra poly metal OneArra poly metal Z OneArrapoly metal 8 OneArra poly metal OneArra poly metal OneArra poly metal Mi OneArrapoly metal2 l 0 22 8 09936e 17 4 53592e 17 8 13098e 17 1 46186e 16 4 62311e 18 1 44305e 16 0 293333 8 33744e 17 4 73698e 178 14279e 17 1 1424e 16 0 366667 8 46604e 17 5 0354e 17 8 52112e 179 42125e 17 3 36878e 18 9 40497e 17 0 44 8 63129e 17 5 42286e 17 8 533 13e 17 7 98708e 17 2 6056e 18 8 15223e 17 0 513333 8 91781e 17 5 67424e 17 8 79593e 17 6 9387e 17 2 32045e 18 6 9
3. table3 Cgnd v 1015 a Ha Predefined model for NEARBODY cap equation2 CCOUPLI CexpCno 0 5 Nt to She ne pe N2 0 1 C ELAVYER1SPACE34N3 2 N4 0 5 ELAVERIWIDTH34N5 0 1 IES Bring up Optmiser GUI and perform interactive optimisation res_opti gui Ccalculate_fitCequation2 Ctable3 Cpoly_combinations size C opti_gui GUI Save Results save_table res_opti_batch csv gigs _opti_batch csv save_table table3 CSV table3 vi LAVERI SPACE save_table table3 TONYPLOT tablez str PADS ee Data FOr Ing CMSs heer POEET ORAR Figure 5 EXACT script for performing the analysis on the experi ment data in the script the capacitance database is loaded and various selections are made that result in a table of variables and data that we wish to work with which in this case is the NEARBODY capacitance which is the capacitance effect between two conductors edge to edge The capacitance data from EXACT is in the units of Farads but for the purposes of fitting the script scales these values into units of femtoFarads In step 2 we define an equation that will be used to fit the data to and in step 3 we force the optimiser to come up in interactive mode Figure 6 shows the Optimser window that appears within which the user can modify the equation set up the optimization Control paramters and view the results of the ptimisation In this case we show the variations of the equation coefficients
4. select certain data as shown in Figure 3 which we wish to view Once selected the Worksheet pulldown menu option Selection gt Tonyplot will then worksheet mes T iwon onon eo Analysis Here the simulated data may be analysed using a script and manipulated to TT a i Rao provide extemal interfaces a Figure 1 Once the EXACT experiment has been run the data may be accessed through the Worksheet send this data to TonyPlot Figure 4 shows the selected data from Figure 3 where the measured capacitance values B_Gnd_L1l B_Gnd_Llp B_Gnd_L1r L11_L1p LU_Lir and Lip_L1r have been plotted against the lay out variable LAYERISPACE Many other features are available through this Work sheet which shall be described in future publications Q EXACT allows the measured data to be fitted to poly nomial expressions using the scripting utilities Is there a way to instead optimise the fitting interactively A Figure 5 shows a script which performs an interactve optimization A detailed description of the syntax in this script is available in the EXACT User s Manual In step 1 M OneArray poly metal 0 22 8 0993 6e 17 4 53592e 17 8 13098e 17 1 46186e 16 4 62311e 18 1 44305e 16 OneArray poly metal 0 293333 8 33744e 17 4 73698e 17 8 14279e 17 1 1424e 16 3 625e 18 1 OneArray poly metal 0 366667 8 46604e 17
5. 277 1e 17 0 586667 9 0665le 17 5 9698e 17 9 0067e 17 6 0751e 17 2 24586e 18 6 0611e 17 0 66 9 07842e 17 6 30906e 17 9 17255e 17 5 39683e 17 2 06968e 18 5 45628e 17 0 733333 9 16044e 17 6 49553e 17 0 22 5 5972 1e 17 2 80814e 17 3 625e 18 1 15889e 16 9 309e 17 4 93778e 17 2 0023e 18 4 9456e 17 0 806667 9 3716 1e 17 6 72949e 17 9 40862e 17 4 5173e 17 1 9723e 18 4 4352e 17 0 88 9 52077e 17 7 06899e 17 9 60046e 17 4 05624e 17 2 07349e 18 3 89669e 17 1 51817e 16 6 5 60189e 17 12 OneArrdpoly metal2 0 293333 5 70343e 17 2 91774e 17 5 5332e 17 1 20472e 16 6 OneArra poly metal2 0 366667 5 86382e 17 3 0159e 17 5 49949e 17 1 01743e 16 5 5690 1e 18 1 02954e 16 OneArra poly metal2 0 44 5 8256e 17 3 29999e 17 5 6073e 17 8 81606e 17 4 97429e 18 8 923 13e 17 115 OneArrapoly metal2 0 513333 5 97601e 17 3 39124e 17 5 797 16e 17 7 77293e 17 4 49516e 18 7 85324e 17 116 OneArra poly metal2 0 586667 6 09285e 17 3 51995e 17 5 9577e 17 6 85946e 17 4 21036e 18 7 06442e 17 OneArra poly metal2 0 66 6 1861 1e 17 3 55972e 17 5 97112e 17 6 31358e 17 4 48088e 18 6 42818e 17 18 OneArrapoly metal2 0 733333 6 22332e 17 3 80557e 17 6 05117e 17 5 83862e 17 3 55816e 18 5 85933e 17 19 OneArrapoly metal2 0 806667 6 33814e 17 3 8895e 17 6 11
6. 998e 17 5 33451e 17 3 52759e 18 5 46181e 17 OneArra poly metal2 0 88 6 4072 1e 17 4 11291e 17 6 19433e 17 4 92721e 17 3 0411 1e 18 5 04595e 17 Parallel poly metal Parallel poly metal2 Figure 2 The EXACT Worksheet showing the data from the Figure 3 Selection of data in the Worksheet to be sent to TonyPlot experiment August 2003 Page 13 The Simulation Standard Text Editor V3 6 2 FCS optimiser lisa dir home willf prodt 14 select the data that we want to use db DatabaseLoad optimizer_db B_Gnd_Lil B_Gnd_Lip B_Gnd_Lir LiL_Lip LiLLir Lip_Lir extract_name Carea B_Gnd extract_name Ccoupli Lip extract_name Cgnd B Gnd tsubstrate_combinations 1 poly_combinations 1 Table for parallel plate for all other combinations table1 select db ParallelPlate poly_combinations PlateWidth 3 Carea 3 save_table table1 CSV table1 csv save_table table1 TONYPLOT tablet Stas table 3 for onearray for all other layers combination table3 select db OneArray poly_combinations Layer1Space LayertWidth 3 Ccoupli Cgnd 3 Scale data to fF multiply capacitance values by 1e15 column scalar_op table1 Carea table1 Carea 1615 column_scalar_op table3 Ccoupli A table3 PECOUT an eran OD column_scalar_op table3 Cgnd
7. Hints Tips and Solutions William French Ph D Applications and Support Manager Q EXACT has powerful scripting utilities for manipulat ing the final capacitance data and variables but is there an easier graphical front end that would also allow me to view the data A Recent improvements to EXACT have included the addition of the Worksheet utility When an experiment has been completed within EXACT the Worksheet may be accessed from the View gt Data pulldown menu of the main EXACT window shown in Figure 1 All the data from the experiment including selected layers process variables layout variables and extracted capaci tance data will be sent to the Worksheet An example of this is shown in Figure 2 where columns are shown for the test structure name the chosen process layer names the layout parameter that has been varied and finally the calculated capacitance values from EXACT The worksheet allows a number of operations to be performed which include e column row selection e inter column or inter row calculations into new columns or rows respectively e selection of data for plotting in TonyPlot e selection of data that can then be sent to SPAYN for statistical analysis e equation fitting through the use of the Silvaco Optimiser The Worksheet allows a graphical approach to viewing the variables and data that otherwise would be accessed only through the EXACT script utilities As an example of this we can
8. NO N1 N2 N3 N4 N5 during the optimisation iterations When the optimisation has finished the original data i tavern space from EXACT and the fitted equation with the optimised parameters may be plotted in TonyPlot As shown in Figure 7 an excellent fit is obtained Figure 7 Comparison of the original EXACT capacitance data and the equation used to fit the data which has the optimised coefficents Acknowledgments to Eric Guichard and his team for this Hints and Tips Call for Questions If you have hints tips solutions or questions to contribute please contact our Applications and Support Department Phone 408 567 1000 Fax 408 496 6080 e mail support silvaco com Hints Tips and Solutions Archive Check our our Web Page to see more details of this example plus an archive of previous Hints Tips and Solutions www silvaco com Figure 6 The Optimizer window that allows interactive control of the fitting process The Simulation Standard Page 14 August 2003

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