User Manual MS199E - Physik Instrumente
Contents
1. gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the H 811 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the H 811 after having read and understood this user manual Personnel qualification The H 811 may only be started up operated maintained and cleaned by authorized and qualified staff 2 2 2 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the Hexapod attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the Hexapod is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the Hexapod with powder free gloves gt f necessary wipe the Hexapod clean after unpacking 2 2 3 Safety Measures during Transport An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the base plate 6 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 2 Safety A cable break leads2. 03 Al OO LA NG ra D136 0 20 Figure 16 H 811 Hexapod front view dimensions in mm The 0 0 0 coordinates refer to the origin of the XYZ coordinate system When the default settings of the Hexapod controller are used the origin of the XYZ coordinate system in the reference position corresponds to the pivot point Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING 10 Technical Data WWW PI WS T II R44 0 15 3x 04 5 0 05 120 Figure 17 H 811 Hexapod side view dimensions in mm 3x M4 120 3x 4 5 0 05 120 ZA GE DH50 0 15 Figure 18 H 811 Hexapod top view dimensions in mm H 811 Hexapod Microrobot MS199E Version 1 1 0 10 Technical Data pP I INFORMATION Only three of the six mounting holes in the base plate are visible in the figure Dimensions and position of the non visible mounting holes 3x 4 5 0 05 120 on a circle with 88 0 15 mm arrangement on the circle corresponds to the positions of the three visible mounting holes All six mounting holes are visible in the figure in Mounting the Hexapod on a Surface p 26 10 4 Pin Assignment 10 4 1 Power Source Connection Not for the vacuum version power supply of the motors via 4 pin A coded M12 connector Only for the vacuum version power supply via 2 pin LEMO connector type FFA 15 302 CLLC52 50 Version 1 1 0 M
3. gt Only hold the Hexapod by the base plate NOTICE Oa Damage from applying high forces eo Hexapod struts with direct drive can be carefully moved by hand in the case of an error Blocked struts can be damaged by the use of force gt If one or more struts of the Hexapod are blocked do not move the Hexapod by hand gt If you move the Hexapod by hand do not use high forces NOTICE Cable break 6 A cable break leads to a failure of the Hexapod gt Pack the Hexapod as to ensure that the cables are not bent or squeezed too severely Accessories Original packaging p 12 4 cable ties Packing the Hexapod 1 Command a motion of the Hexapod to the transport position X Y Z U V W 0 2 Uninstall the Hexapod system a Remove the load from the moving platform of the Hexapod b Power down the Hexapod controller 38 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 7 Maintenance c Remove the data transmission cable and the power supply cable from the Hexapod controller d Loosen the six M4x25 screws with which the Hexapod is mounted on the surface e Remove the six M4x25 screws Prepare the cables on the Hexapod for packing Avoid forming a kink in the cables Wind the power supply cable with a diameter of approx 23 cm and secure it with two cable ties Wind the data transmission cable with a diameter of approx 23 cm and secure it with two c
4. 1 3 Specifications for Vacuum Compatible Versions cooncccccnnncnncn 47 10 2 Ambient Conditions and Classifications oooncccncccoconnconcnononncnnnnonannnnnononanenns 48 103 DIMEO rotos pps 48 192 PIE ASSIOHMON orbitando 50 10 4 1 Power Source Connection ccccccconccnnccccconccnncononnnnnncnnnancnnnnnnnanonononnnos 50 10 4 2 Data Transmission CONNECTION ooccccccoccnccccncnnccnonnncnnoncnnononnnnconanennos 51 Old Equipment Disposal 55 Glossary 57 Appendix 61 13 1 Explanations of the Performance Test Sheet cccccccccssseeeeeeceeeeeeeeessaeeeeees 61 13 2 EC Declaration of Conformity ccccccccccooconnncconoccconononnnonnnnnnnononnnononononononannnnnnnnnoss 62 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual oooocccnnncccnconnnnccnnnccnnnnnonnncnnnnnnnononanonnnns 1 Symbols and Typographic Conventions cccccccccccconnccnnnccnnonononccnnnnnnnonnnnnnonononononenanennnos 1 Other Applicable DOCUMENTS cccccccnccconnccnnnnccccononnccnnnnnononononononnnonononnnnnnnnnnononananennnnnnnss 2 LOW MIC AGING Maas rennt tarros 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the H 811 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The late
5. 4 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 43 The current versions of the manuals are found on our website To download a manual proceed as follows 1 2 3 4 Open the website http www pi portal ws Click Downloads Click the corresponding category e g H Hexapods Click the corresponding product code e g H 811 An overview of the available file types is shown for the selected product If 0 Files is shown in the Documents line log in as follows to display and download the documents a Insert the product CD in the corresponding PC drive b Openthe Manuals directory c Open the Release News e g C 887_Releasenews_V_x_x_x pdf on the CD of the product d Findthe user name and password in the User login for software download section in the Release News e Inthe User login area on the left margin in the website enter the user name and the password in the corresponding fields f Click Login lf Documents 0 Files is still being displayed no manuals are available Contact our customer service department p 48 Click Documents Click the desired manual and save it on the hard disk of your PC or on a data storage medium H 811 Hexapod Microrobot MS199E Version 1 1 0 3 PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter apo IS nn o yn 5 Gene
6. The dimensional drawing p 48 contains the following Alignment of the XYZ coordinate system Position of the pivot point after the reference move when the standard settings of the Hexapod controller are used Example Consecutive rotations INFORMATION For a clearer view the figures have been adapted as follows Round platform replaced by T shaped platform XYZ coordinate system shown shifted Pivot point in the top left corner of the platform 1 The U axis is commanded to move to position 10 The rotation around the U axis tilts the rotational axes V and W Figure 3 Rotation around the U axis E Platform in reference position Platform position U 10 U parallel to spatially fixed X axis H 811 Hexapod Microrobot MS199E Version 1 1 0 15 3 Product Description P J 2 The V axis is commanded to move to position 10 The rotation takes place around rotational axis V which was tilted during the previous rotation The rotation around the V axis tilts the rotational axes U and W a Figure 4 Rotation around the V axis DU Platform in reference position Platform position U 10 V 10 U and V parallel to the platform level 16 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 The W axis is commanded to move to position 10 The rotation takes place around the rotational axis W which was tilted during the previous rotations The
7. W axis is always vertical to the platform level The rotation around the W axis tilts the rotational axes U and V W A Figure 5 Rotation around the W axis U Platform in reference position Platform position U 10 V 10 W 10 U and V parallel to the platform level W vertical to the platform level For more data on the travel ranges see the Specifications section p 45 H 811 Hexapod Microrobot MS199E Version 1 1 0 17 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking The Hexapod is delivered in a special packaging with adapted foam inserts NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the base plate INFORMATION When handling the vacuum version of the Hexapod attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the Hexapod is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the Hexapod with powder free gloves gt If necessary wipe the Hexapod clean after unpacking Unpacking the Hexapod 1 Open the outer box Figure 6 Outer box with inner box H 811 Hexapod Microrobot MS199E Version 1 1 0 19 4 Unpacking 2 Lift the inner box with the side pads out of the ou
8. controller see user manual of the Hexapod controller 2 2 6 Safety Measures during Maintenance The Hexapod can become misaligned as a result of improper maintenance The specifications p 45 can change as a result gt Do not loosen any screws 8 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Features and AppliCatiONS cooccccccnnccccnncconnnoconononanononannnnnnnnnnonnnnnannnonannnnnnnnononenenonos 9 Model OV CIVIC Wo cascara acicate latencia 10 OUST VIS raices aci Sateenaaras 11 COME 0 e A nn e 12 Technical Features an ds 13 3 1 Features and Applications Two models of the H 811 Hexapod are available The directly driven H 811 D1 model is not vacuum compatible The directly driven H 811 DV model is vacuum compatible Both models achieve a velocity of up to 10 mm s and a load capacity of 5 kg in vertical orientation and 2 5 kg in any orientation The parallel kinematics structure and the free choice of the pivot point offer the following advantages Positioning operations in six independent axes three translation axes three rotation axes with short settling times Pivot point is maintained for rotations and moves along with linear motions High accuracy and step resolution in all axes No addition of the errors of individual axes No friction and torques from moving cables The Hexapod
9. i e base plate struts moving platform AIMgSi 3 2315 and AlMg4 5Mn 3 3547 chemically nickel plated stainless steel type 303 1 4305 Remaining parts e g coupling elements Various vacuum compatible materials Bearing Stainless steel Drivetrain elements Stainless steel drive screw Electrical components Cable insulation PTFE FEP Shrink tubing Kynar Solder Sn95 5Ag3 8Cu0 7 PCB main board Flexible printed circuit board limit switch pulse width modulation Aramid insulating paper Polyimide film strip Connector DD78 Positronic type FFA LEMO Grease Brayco 815Z Micronic sealing compound Torr seal Varian TRA CAST 3145 Araldite 2014 1 and adhesive Huntsmann 5 Minute Epoxy Devcon Bakeout temperature 80 C 176 F H 811 Hexapod Microrobot MS199E Version 1 1 0 47 10 Technical Data PI 10 2 Ambient Conditions and Classifications Degree of pollution 2 Transport temperature 25 C to 85 C Storage temperature 0 C to 70 C Humidity Maximum relative humidity of 80 at temperatures of up to 31 C linearly decreasing until relative humidity of 50 at 40 C Degree of protection IP20 according to IEC 60529 Area of application For indoor use only Maximum altitude 2000 m 10 3 Dimensions 48 All figures show the Hexapod in the reference position Dimensions in mm Note that the decimal places are separated by a comma in the drawings Pivot Point 0 0 0 114 3
10. the snap on ferrite suppressor a Align the cable so that it is not squeezed when the snap on ferrite suppressor is closed b Carefully press the two halves of the snap on ferrite suppressor around the cable until the lock engages H 811 Hexapod Microrobot MS199E Version 1 1 0 25 5 Installation P J 5 4 Grounding the Hexapod If a functional grounding is required for potential equalization 1 Connect the base plate to the grounding system For connection use the supplied accessories p 12 and the M4 hole with an 8 mm depth marked with the ground connection symbol p 48 2 Connect the moving platform to the grounding system Use one of the mounting holes in the moving platform p 48 for connection or If the moving platform and the load are conductively connected with each other connect the load to the grounding system 5 5 Mounting the Hexapod on a Surface NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only hold the Hexapod by the base plate NOTICE Warping of the base plate Incorrect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the Hexapod on an even surface The recommended evenness of the surface is 200 um 26 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 11 Mounting holes in the base plate Prerequisi
11. to a failure of the Hexapod gt Pack the Hexapod as to ensure that the cables are not bent or squeezed too severely 2 2 4 Safety Measures during Installation Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only hold the Hexapod by the base plate gt Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 24 gt Before installing the load determine the work space of the Hexapod with a simulation program p 24 gt Make sure that the installed load observes the limit value determined with the simulation program gt Avoid high forces and torques on the moving platform during installation of the Hexapod and the load gt Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system and resulting unintentional position changes of the Hexapod gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod Incorrect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the Hexapod on an even surface The recommended evenness of the surface is 200 um The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform p 48 or the depth of the
12. IVeriMove software for collision checking can be used to mathematically check possible collisions between the Hexapod the load and the environment The use of the software is recommended when the Hexapod is located in a limited installation space and or operated with a spatially limiting load For details regarding the activation and configuration of the PlVeriMove software for collision checking see Technical Note C887T0002 included in the scope of delivery of the software 5 2 Determining the Permissible Load and Working Space Tools and accessories PC with Windows operating system on which the simulation program Hexapod Simulation Software is installed For more information see the manual of the Hexapod controller Determining the working space and permissible load of the Hexapod gt Follow the instructions in the manual of the Hexapod controller to determine the working space and the limit value for the load of the Hexapod with the simulation program The limit values in the following table are for orientation They only apply when the center of mass is at the origin of the XYZ coordinate system 0 0 0 Servo mode switched on Servo mode switched off for for Hexapod Hexapod max load capacity max holding force Mounting position of Mounted Mounted as Mounted Mounted as the base plate horizontally desired horizontally desired If you need help in determining the limit value for the load or determining the work sp
13. PI MS199E H 811 Hexapod Microrobot User Manual Version 1 1 0 Date 04 06 2013 This document describes the following products H 811 D1 Miniature Hexapod Microrobot Direct Drive 10 mm s 5 kg Load 2 m Cable H 811 DV Miniature Hexapod Microrobot Direct Drive 10 mm s 5 kg Load Vacuum Compatible to 10 hPa 2 m Vacuum Side Cable Feedthrough 3 m Air Side Cable Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany _ Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2013 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 04 06 2013 Document number MS199E BRo version 1 1 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About thi
14. S199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 2 Data Transmission Connection Not for the vacuum version data transmission between the H 811 and Hexapod controller via MDR68 connector lr O cc All signals TTL Zn Fi M EHTB amp S H 811 Hexapod Microrobot MS199E Version 1 1 0 51 10 Technical Data pP I 52 Only for the vacuum version data transmission between the H 811 and Hexapod controller connection of the Hexapod to the vacuum feedthrough via HD Sub D 78 connector male Positronic All signals GND GND GND Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Pn fmen H 811 Hexapod Microrobot MS199E Version 1 1 0 53 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage fre
15. W PI WS 7 Maintenance 7 Maintenance In this Chapter Carrying out a Maintenance RUN ccccconccnncccccnncnnnccnonnnnnnnnnonnnnnnononnnnnnnononnnnnnnononnnnnnnnnnns 37 Packing the Hexapod for Transport occccccccccncoconcnncconcnnnononcnnononcnnononnnnnonannnnonanennnnoness 38 Cleaning the Hexapod cccccccccccccocccononccocononoconnnnnononononnnonnnnnononnnnnnnnnnnnnnnnnnnrnnnnnnnnnnnnannens 40 NOTICE Damage due to improper maintenance The Hexapod can become misaligned as a result of improper maintenance The specifications can change as a result p 45 gt Only loosen screws according to the instructions in this manual Depending on the operational conditions and the period of use of the Hexapod the following maintenance measures are required 7 1 Carrying out a Maintenance Run Frequent motions over a limited travel range can cause the lubricant to be unevenly distributed on the drive screw gt Carry out a maintenance run over the entire travel range at regular intervals see user manual of the Hexapod controller The more often motions are carried out over a limited travel range the shorter the time between the maintenance runs has to be H 811 Hexapod Microrobot MS199E Version 1 1 0 37 7 Maintenance pP I 7 2 Packing the Hexapod for Transport NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging
16. able ties Pack the Hexapod in a plastic film to protect it against dirt Pack the cables of the vacuum version in a plastic film to protect them against dirt Open the outer box Lift the inner box with the side pads out of the outer box Remove the side pads from the inner box Open the inner box Remove the foam cover Hold the Hexapod by the base plate and place the Hexapod and the cables in corresponding recesses in the foam insert of the inner box Figure 15 Hexapod and cables in the inner box 12 13 Insert the foam cover in the inner box Close the inner box 14 Slide the side pads onto the inner box H 811 Hexapod Microrobot MS199E Version 1 1 0 39 7 Maintenance P I 15 Place the inner box with the side pads in the outer box 16 Close the outer box 17 Secure the box on the pallet 7 3 Cleaning the Hexapod Prerequisites v You have disconnected the Hexapod from the controller Cleaning the Hexapod gt Do not use any organic solvents Only when the Hexapod is not used in vacuum gt When necessary clean the surfaces of the Hexapod with a cloth slightly dampened with a mild cleanser or disinfectant Only when the Hexapod is used in vacuum gt Only touch the Hexapod with powder free gloves gt f necessary wipe the Hexapod clean 40 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Unex
17. ace gt Contact our customer service department p 43 24 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Attaching the snap on ferrite suppressor Figure 10 Power supply cable of the Hexapod with snap on ferrite suppressor 1 Power supply cable of the Hexapod 2 Snap on ferrite suppressor 000015165 3 Connector M 12 for connection to the controller INFORMATION The snap on ferrite suppressor 000015165 is included in the scope of delivery of the Hexapod system The snap on ferrite suppressor is for permanent attachment to the power supply cable of the Hexapod The snap on ferrite suppressor ensures the electromagnetic compatibility of the Hexapod system gt When attaching the snap on ferrite suppressor make sure that it is correctly positioned on the cable The snap on ferrite suppressor can only be removed with special tools not included in the scope of delivery gt Attach the snap on ferrite suppressor to the power supply cable of the Hexapod before you connect the Hexapod to the Hexapod controller for the first time Tools and accessories Snap on ferrite suppressor 000015165 in the scope of delivery p 12 Permanently attaching the snap on ferrite suppressor 1 Place the power supply cable of the Hexapod close behind the M12 connector that is intended for connection to the controller into the opened Snap on ferrite suppressor see figure 2 Close
18. ally oriented base plate and is not in the reference position As a result of unintentional position changes the actuators in the Hexapod struts can be damaged and collisions between the Hexapod the load to be moved and the environment are possible Collisions can damage the Hexapod the load to be moved or the environment gt Suitably support the moving platform or the load when the servo mode or the Hexapod controller is switched off 34 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 6 Start Up 6 2 Starting Up the Hexapod System Prerequisite v You have read and understood the General Notes on Start Up p 33 v You have correctly installed the Hexapod i e you have mounted the Hexapod on a surface and affixed the load to the Hexapod according to the instructions in Installation p 23 v You have read and understood the user manual of the Hexapod controller Accessories Hexapod controller belonging to the Hexapod system PC with suitable software see user manual of the Hexapod controller Starting up the Hexapod system 1 Connect the Hexapod to the Hexapod controller see user manual of the Hexapod controller 2 Start up the Hexapod controller see user manual of the Hexapod controller 3 Operate a few motion cycles for testing purposes See user manual of the Hexapod controller H 811 Hexapod Microrobot MS199E Version 1 1 0 35 PIEZO NANO POSITIONING WW
19. ch and Limit SwitChes ooocccnccccccncnnccnnos 13 3 5 3 BONO A eo ee 13 3 5 4 NO OD ee po 14 4 Unpacking 19 5 Installation B 5 1 General Notes on Installation ooooncccnnccccccnonnncnnnononononanncnnnnnnonononanenonnnonnss 23 5 2 Determining the Permissible Load and Working Space cccccsseeeeeeeeeeeeeeees 24 5 3 Attaching the snap on ferrite SUPPFESSOT euennnnneennsnnnennennnnnennnnennnnnnnnennne nenne 25 5 4 Grounding the Hexapod mexica dra 26 5 5 Mounting the Hexapod on a SurfaCe oooocccccccccnnconccononnconnnononnnonnnononnronnnononnnnnnnss 26 5 6 Affixing the Load to the Hexapod oooccccccccoocconccononccononononcconcnonnnncnnnnnnnnnnnnononanenns 28 5 7 Connecting the Cable Set for the Vacuum Compatible Version H 811 DV 30 10 11 12 13 Start Up 33 6 1 General Notes on Start UP oooncccnnnccccccccnncccnnnncnnononnnononononononnnnnnnnnnnnnnnnannnnnnnonns 33 6 2 Starting Up the Hexapod System cccocooccncccccnnccnncconnnncnnnnnnnnncnnonononncnnonononnnanennnnns 35 Maintenance 37 7 1 Carrying out a Maintenance RUN cccccconccnncccccnccnncconnnncnnnnononnnnnonononncnnononannnnnononnns 37 7 2 Packing the Hexapod for TranSport ccoooonncnncccconccnncccnoncconononanenonononanennnnnnnanennnoss 38 7 3 Cleaning ne Hexapod een 40 Troubleshooting 41 Customer Service 43 Technical Data 45 10 1 S SOS CINCATIONS een einer ee 45 10 1 1 Data Table ses ee are 45 10 1 2 MI A 46 10
20. e to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany H 811 Hexapod Microrobot MS199E Version 1 1 0 55 PIEZO NANO POSITIONING WWW PI WS 12 Glossary 12 Glossary Work space The entirety of all combinations of translations and rotations that the Hexapod can approach from the current position is referred to as the work space The work space can be limited by the following external factors Installation space Dimensions and position of the load Pivot point The pivot point describes the center of rotation intersection of the rotational axes U V and W When the standard settings for the pivot point coordinates are used the pivot point is located at the origin of the XYZ coordinate system after a reference move see the dimensional drawing p 48 for more information The pivot point is shifted along with the platform during translations Rotations do not change the position of the pivot point The pivot point coordinates remain unchanged in both cases The pivot point coordinates can be changed in the Hexapod controller XYZ coordinate system The position and orientation of the Cartesian XYZ coordinate system cannot be changed which is why the system is referred to as spatially fixed The axes X Y and Z are referred to as translational axes The intersection of the axes of the spatially fixed Cartesian XYZ coordinate system 0 0 0 is ref
21. ed in gt Only mount the Hexapod and the load on the mounting fixtures holes intended for this purpose 28 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 12 Mounting holes in the moving platform Prerequisites v You have read and understood the General Notes on Installation p 23 v You have determined the permissible load and the work space of the Hexapod p 24 v You have designed the load and the environment of the Hexapod so that the permissible load of the Hexapod is observed and no collisions can occur Tools and accessories 3 suitably long M4 screws Suitable tools for fastening the screws Affixing the Load 1 Choose the mounting position so that the selected through holes in the moving platform See upper figure and p 48 can be used for affixing the load 2 Affix the load to the moving platform using the screws H 811 Hexapod Microrobot MS199E Version 1 1 0 29 5 Installation P I 5 7 Connecting the Cable Set for the Vacuum Compatible Version H 811 DV Figure 13 Dimensions of the vacuum feedthrough for data transmission 4668 dimensions in mm B 4 holes 45 X 6 for M3 countersunk screw 30 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation Prerequisites v The cable set is not connected to the Hexapod controller Tools and accessories Vacuum feedthroughs and cabl
22. erred to as the origin The Z axis is always perpendicular to the base plate of the Hexapod H 811 Hexapod Microrobot MS199E Version 1 1 0 57 12 Glossary P J The following example figures of the H 810 Hexapod show that the XYZ coordinate system does not move along with motions of the platform Figure 19 H 810 Hexapod in the reference position 1 Cable outlet 58 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 12 Glossary Figure 20 H 810 Hexapod the platform of which has been moved in X 1 Cable outlet H 811 Hexapod Microrobot MS199E Version 1 1 0 59 PIEZO NANO POSITIONING WWW PI WS 13 Appendix 13 Appendix In this Chapter Explanations of the Performance Test Sheet cccccccssscceeeeeeeeeeeeseeeseeeeeesaeeeeeesaees 61 EC Declaration Of C hlormily nu nennen ee ne ee ee 62 13 1 Explanations of the Performance Test Sheet The Hexapod is tested for the positioning accuracy of the translational axes before delivery The performance test sheet is included in the scope of delivery The following figure shows the test setup used 1 F _ 3 Figure 21 Test setup for measuring the X or Y axis 1 Laser interferometer 2 Mirror 3 Bench The following test cycles are performed Movement over the entire travel range with at least 20 measuring points in at least five cycles Movement over partial sections e g 1 mm in increments of e g 10
23. es on the air side that belong to the Hexapod system p 10 Suitable tools for installing the vacuum feedthroughs Installing vacuum feedthroughs 1 Install the vacuum feedthrough for data transmission 4668 a See the above figure for the dimensions of the vacuum feedthrough b Provide the vacuum chamber with a suitable opening c Install the vacuum feedthrough so that the HD Sub D socket 78f is in the vacuum chamber Install the vacuum feedthrough for the power source C887B002 a Provide the vacuum chamber with an opening of 12 mm in diameter The flange must not be more than 28 mm thick b Install the vacuum feedthrough so that the LEMO connection is in the vacuum chamber Connecting the Hexapod to vacuum feedthroughs gt Connect the cables that belong to the Hexapod system p 10 and the vacuum feedthroughs with each other as shown in the connection diagram below Observe the assignment that is specified by the labeling on the sockets conneciors and cables Observe the mechanical coding of connectors and sockets Do not use force Do not connect the cables to the Hexapod controller yet H 811 Hexapod Microrobot MS199E Version 1 1 0 31 5 Installation pP I Controller f M12 4 pin MOR 68 pin K060B0112 K040B0092 C887B0002 4668 1 32 C887B0002 TA K060B0112 3 m y xapod m M12 LEMO LEMO 4 pin 2 pin 2 pin HE FPS m M12 M12 4 p
24. has six adjustable length struts Each strut carries out linear motions Each set of settings of the six struts defines a position of the moving platform in six degrees of freedom three translational axes and three rotational axes Each strut is equipped with the following components One actuator Reference and limit switches Joints for connecting to the base plate and moving platform The actuator contains a direct drive consisting of DC motor with rotary encoder and drive screw 3 5 2 Reference Point Switch and Limit Switches The reference point switch of a strut functions independently of the angular positions of the strut ends and the lengths of the other struts When a limit switch is activated the power source of the motor is switched off to protect the Hexapod against damage from malfunctions 3 5 3 Control The Hexapod is intended for operation with the Hexapod controller which belongs to the Hexapod system The Hexapod controller makes it possible to command motion of individual axes combinations of axes or all six axes at the same time in a single motion command The Hexapod controller calculates the settings for the individual struts from the target positions given for the translational and rotational axes The velocities and accelerations of the struts are calculated in such a way that all struts start and stop at the same time After the Hexapod controller has been switched on or restarted the Hexapod has to c
25. he following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for downloading p 3 on our website H 811 Hexapod Microrobot MS199E Version 1 1 0 43 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter GIO CHING LO INS cante nee Ambient Conditions and Classifications ccccccecceceeeceeceeeceeceeceeceecueceecuseeseuseaseaeeas DIMENSIONS nun ch niemand han Panne re nd an Deine ee ren FAAS SIC MIMI ee Earth 10 1 Specifications 10 1 1 Data Table H 811 D1x Unit Active axes X Y Z Ox By Oz Motion and positioning Travel range X Y Z 17 16 6 5 mm Travel range Ox Oy 8z 10 10 21 2 Single actuator design resolution 40 nm Min incremental motion X Y 0 5 um Min incremental motion Z 0 2 um Min incremental motion 6x Oy Oz 3 5 urad Backlash X Y 1 um Backlash Z 0 2 um Backlash 6x Oy 10 urad Backlash 8z 15 urad Repeatability X Y 0 3 um Repeatability Z 0 1 um Repeatability Ox Oy 4 urad Repeatability Oz 8 urad Max velocity X Y Z 10 mm s Max velocity 8x Oy z 250 mrad s Typ velocity X Y Z 5 mm s Typ velocity Ox Oy z 120 mrad s H 811 Hexapod Microrobot MS199E Version 1 1 0 Tolerance typ typ typ t
26. her the Hexapod controller matches the Hexapod A label on the rear panel of the controller indicates for which Hexapod the controller is intended gt When you have established the communication via TCP IP or RS 232 or use the user interface of the C 887 send the CST command The response shows the Hexapod to which the controller is adapted gt Only operate the Hexapod with a Hexapod controller whose configuration data is adapted to the Hexapod H 811 Hexapod Microrobot MS199E Version 1 1 0 33 6 Start Up pP J NOTICE Damage from collisions Collisions can damage the Hexapod the load to be moved and the environment gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod gt Do not place any objects in areas where they can get caught by moving parts gt lf the Hexapod controller malfunctions stop the motion immediately NOTICE Damage from unintentional position changes The self locking of the Hexapod struts is very low Although the installed load observes the limit value resulting from the load test p 24 it can cause an unintentional position change of the Hexapod when the servo mode or the Hexapod controller is switched off and one of the following conditions is also fulfilled The Hexapod is not mounted with a horizontally oriented base plate but in any other orientation The Hexapod is mounted with a horizont
27. in 4 pin 4668 K040B0092 3 m m f m f 68 pin SUB 78 SUB 78 SUB 78 SUB 78 Figure 14 Cable set connection diagram for vacuum compatible version Power supply cable on the air side M12m to M12f 3 m Data transmission cable on the air side HD Sub D 78f to MDR68m 3 m Vacuum feedthrough for power supply LEMO 2 pin to M12m Vacuum feedthrough for data transmission HD Sub D 78m f Vacuum chamber Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 6 Start Up 6 Start Up In this Chapter General Notes on Start Up oooonncnnnnccccccconcccnnncconononnncnnnnnonononannnnnnnnnononnnnnennnnnnnnnonanennnns 33 Starting Up the Hexapod System oocoooocccccccccoccnnncoconononnnononnnnnnononnnnnnnnnnnnnnnnnnnnanennnnnnnns 35 6 1 General Notes on Start Up Risk of crushing by moving parts A There is a risk of minor injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep your fingers away from areas where they can get caught by moving parts NOTICE Incorrect configuration of the Hexapod controller The configuration data used by the Hexapod controller e g geometrical data and servo control parameters must be adapted to the Hexapod If incorrect configuration data is used the Hexapod can be damaged by uncontrolled motions or collisions The configuration data is adapted before delivery gt Check whet
28. is controlled with the Hexapod controller which is part of the Hexapod system The position commands to the Hexapod controller are entered in Cartesian coordinates H 811 Hexapod Microrobot MS199E Version 1 1 0 9 3 Product Description P J 3 2 Model Overview Hexapod and Hexapod controller are only available together as a system Possible system components Standard versions of the H 811 Hexapod H 811 D1 Miniature Hexapod Microrobot Direct Drive 10 mm s 5 kg Load 2 m Cable permanently installed H 811 DV Miniature Hexapod Microrobot Direct Drive 10 mm s 5 kg Load Vacuum Compatible to 10 hPa 2 m Cable on the Vacuum Side permanently installed Vacuum Feedthrough 3 m Cable on the Air Side Details on vacuum feedthroughs and cables on the air side Vacuum feedthrough for data transmission HD Sub D 78m f 4668 Vacuum feedthrough for power source LEMO 2 pin to M12m C887B0002 Data transmission cable on the air side HD Sub D 78f to MDR68m 3 m K040B0092 Power supply cable on the air side M12m to M12f 3 m K060B01 12 Standard versions of the C 887 Hexapod controller C 887 11 6 D Hexapod Controller Control of 2 Additional Servo Motor Axes Included TCP IP and RS 232 Interface 19 Chassis C 887 21 6 D Hexapod Controller TCP IP and RS 232 Interface Bench Top 10 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description Available Hexapod s
29. mounting holes together with the load to be mounted gt Only use screws that do not project under the moving platform after being screwed in gt Only mount the Hexapod and a load on the mounting fixtures holes intended for this purpose H 811 Hexapod Microrobot MS199E Version 1 1 0 7 2 Safety pP J 2 2 5 Safety Measures during Start Up There is a risk of minor injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep your fingers away from areas where they can get caught by moving parts The geometrical data used by the Hexapod controller must be adapted to the Hexapod If incorrect geometrical data is used the Hexapod can be damaged by uncontrolled motions or collisions The geometrical data is adapted before delivery gt Check whether the Hexapod controller matches the Hexapod A label on the rear panel of the controller indicates for which Hexapod the controller is intended gt Only operate the Hexapod with a Hexapod controller whose geometrical data is adapted to the Hexapod Collisions can damage the Hexapod the load to be moved and the surroundings gt Make sure that no collisions between the Hexapod the load to be moved and the surroundings are possible in the working space of the Hexapod Do not place any objects in areas where they can get caught by moving parts Immediately stop the motion if a malfunction occurs in the Hexapod
30. nncnnnnnnnancnnnnnnnns 28 5 1 General Notes on Installation The Hexapod can be mounted in any orientation NOTICE Impermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only hold the Hexapod by the base plate gt Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 24 The limit values determined with the simulation program are only valid when the Hexapod controller has the servo mode switched on for the axes of the moving platform of the connected Hexapod gt Before installing the load determine the working space of the Hexapod with a simulation program p 24 The limits of the working space vary depending on the current position of the Hexapod translation and rotation coordinates and the current coordinates of the pivot point gt Avoid high forces and torques on the moving platform during installation gt Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system and resulting unintentional position changes of the Hexapod gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the working space of the Hexapod H 811 Hexapod Microrobot MS199E Version 1 1 0 23 PI 5 Installation INFORMATION The optionally available P
31. omplete a reference move in which each strut moves to its reference point switch After the reference move the moving platform is in the reference position and can be commanded to move to absolute target positions For more information see the user manual of the Hexapod controller H 811 Hexapod Microrobot MS199E Version 1 1 0 13 3 Product Description P J 3 5 4 Motion The platform moves along the translational axes X Y and Z and around the rotational axes U V and W Figure 2 XYZ coordinate system and rotations to the rotation coordinates U V and W The coordinate system is depicted above the platform for better clarity Translation Translations are described in the spatially fixed XYZ coordinate system The translational axes meet at the origin of the XYZ coordinate system 0 0 0 For more information see the glossary p 57 Rotation Rotations take place around the rotational axes U V and W The rotational axes meet at the pivot point For more information on the pivot point see the glossary p 57 In contrast to the spatially fixed translational axes the rotational axes and thus the pivot point as well move along with the platform see also the example below for consecutive rotations A given rotation in space is calculated from the individual rotations in the sequence U gt V gt W 14 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description INFORMATION
32. pected Hexapod behaviour The Hexapod does not achieve the specified accuracy The Hexapod does not move Cable broken Connector or soldered joints loosened Warped base plate Increased wear due to small motions over a long period of time Worn drive screw Foreign body has entered the drive screw Faulty motor Blocked or broken joint Dirty encoder Check the data transmission and power supply cables Replace the cables by cables of the same type and test the function of the Hexapod Contact our customer service department p 43 Mount the Hexapod on an even surface p 26 The recommended evenness of the surface is 200 um Carry out a maintenance run over the entire travel range p 37 Carry out a strut test see user manual of the Hexapod controller The strut test should be carried out in the reference position unless the malfunction occurs with maximum or minimum displacement of the platform in Z Contact our customer service department p 43 If the problem with your Hexapod is not listed in the table or cannot be solved as described contact our customer service department p 43 H 811 Hexapod Microrobot MS199E Version 1 1 0 41 PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have t
33. ral Safety Instructions ccccccccccoconnnccnnnnononononnncnnnnnonononanenononononnnnnnnnnnnnnnnonenannnnnns 5 2 1 Intended Use The Hexapod microrobot in short Hexapod is a laboratory device in accordance with DIN EN 61010 1 It is intended to be used in interior spaces and in an environment that is free of dirt oil and lubricants Based on its design and realization the Hexapod is intended for positioning adjusting and shifting of loads in six axes at various velocities The Hexapod is part of a Hexapod system The intended use of the Hexapod is only possible in connection with the Hexapod controller which is part of the Hexapod system and coordinates all motions of the Hexapod 2 2 General Safety Instructions The H 811 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the H 811 gt Only use the H 811 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the H 811 H 811 Hexapod Microrobot MS199E Version 1 1 0 5 2 Safety P J 2 2 1 Organizational Measures User manual gt Always keep this user manual available by the H 811 The latest versions of the user manuals are available for download p 3 on our website
34. s Document 1 1 1 Goal and Target Audience of this User Manual cccccseseeceeeeeesseeeeeeeeeeeeees 1 1 2 Symbols and Typographic CONVENTIONS ccooocccncccncnccnnccononccnnnnononnnononononnnnnononanenos 1 1 3 Other Applicable DOCUMENTS ccccccccccocnnccnnncccconononccnnnononononanonnnnnnononnnnnnnnnnnnononenans 2 1 4 Downloading Manuals ccccseeeeccceesececaeeeeeeneeeeeeceaeeesseeeesseaseeessueeessaneesenaeees 3 2 Safety 5 2 1 WS TOS USE ee tee nee 5 2 2 General Safety Instructions ccccccoccccnnnccnnnccncononnncnnnnnonononannnnnnnnnononnnnnnnnnnnononenans 5 2 2 1 Organizational NI CASUGES surcar 6 2 2 2 Measures for Handling Vacuum Compatible Products 6 2 2 3 Safety Measures during Transport cccseeeeeeeeeeeeeseeeeeeeeeeeeeeaeeeeees 6 2 2 4 Safety Measures during Installation oooonncccnnnncnnocannccnnnncnnnonnnos 7 2 2 5 Safety Measures during Start Up oooccccccccccccconnccnnnncnonnonnncnonononononans 8 2 2 6 Safety Measures during Maintenance cccccceeecseeeeeeeeeeeeeaeeeeees 8 3 Product Description 9 3 1 Features and Applications cccccsssccccssseeecessscecceeseeesseseeeceageeeeseueeeessaseeessaeees 9 3 2 POC LEO achat o oa 10 3 3 FTOQUEL VIS We coman ee ee ee od 11 3 4 SCOBEOL DENVENN MEP PCO0UPe P P aa ieroa i a na iea E a Aaa oa aaie 12 3 5 TEEHNICA FEO S rita anecdotario 13 3 5 1 TIES EEE e E E EE 13 3 5 2 Reference Point Swit
35. st versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation H 811 Hexapod Microrobot MS199E Version 1 1 0 1 About this Document gt I INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning Action consisting of several steps whose sequential order o must be observed gt Action consisting of one or several steps whose sequential order is irrelevant a List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals das se PTAS C 887 Hexapod controller MS204E User Manual C 887 Hexapod controller MS204Equ User Manual Short Version 2 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1
36. te v You have read and understood the General Notes on Installation p 23 Tools and accessories Allen wrench 3 0 and six of the supplied M4x25 screws p 12 Mounting the Hexapod 1 Provide six M4 threaded holes in the support for mounting with M4x25 screws The arrangement of the six mounting holes can be found in the upper figure or in the dimensional drawing p 48 2 Mount the Hexapod on the six mounting holes in the base plate using the included M4x25 screws H 811 Hexapod Microrobot MS199E Version 1 1 0 27 5 Installation P J 5 6 Affixing the Load to the Hexapod NOTICE Impermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Make sure that the installed load observes the limit value resulting from the load test p 24 gt Avoid high forces and torques on the moving platform during installation gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod NOTICE Screws that are too long The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform or the depth of the mounting holes p 48 together with the load to be mounted gt Only use screws that do not project under the moving platform after being screw
37. ter box Figure 7 Inner box with side pads 3 Remove the side pads 4 Open the inner box Figure 8 Foam cover in the inner box 5 Remove the foam cover Figure 9 Hexapod and cables in the inner box 20 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 6 Hold the Hexapod by the base plate and take it out of the foam insert 7 Compare the contents against the items covered by the contract and against the packing list If parts are incorrectly supplied or missing contact PI immediately 8 Inspect the Hexapod for signs of damage If you notice signs of damage contact Pl immediately 9 Keep all packaging materials in case the product needs to be transported again later H 811 Hexapod Microrobot MS199E Version 1 1 0 21 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ooooncccnnccconononnncnnnnnononononncnnnnononononanennnnnonononanncnnns 23 Determining the Permissible Load and Working Space cccccceccsseeeeeeeeeeeeeeneeeeees 24 Attaching the snap on ferrite SUPPrESSOFr cccccoccnncccncnnconononcnnnncnnonnncnnconancnnnnanrnnononcnnnnnas 25 Grounding the Hexapod AAA 26 Mounting the Hexapod on a Surface esnnneesnnnneeessnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnne nn 26 Affixing the Load to the Hexapod oooccccncccconcconccononccnconononncnnnnononncnnnnonn
38. um H 811 Hexapod Microrobot MS199E Version 1 1 0 61 13 Appendix P I 13 2 EC Declaration of Conformity PI Declaration of Conformity according to DIN EN ISO IEC 17050 1 Manufacturer Physik Instrumente Pl GmbH amp Co KG Manufacturer s Auf der Roemerstra e 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Miniature Hexapod Microrobot Direct Drive Model Numbers H 811 Product Options all complies with all relevant provisions of the Machinery Directive 2006 42 EC Furthermore it complies with all provisions of the EMC Directive 2004 108 EC The applied standards certifying the conformity are listed below Safety of Machinery EN 12100 1 2011 03 EN 12100 2 2011 03 Electromagnetic Emission EN 61000 6 3 2007 09 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 10 The person authorized to compile the technical file is Dr Christian Rudolf Address see manufacturer s address March 02 2012 Karlsruhe Germany Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstra e 1 76228 Karlsruhe Germany PIEZO MANO POSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws vaww pi ws et KK 62 Version 1 1 0 MS199E H 811 Hexapod Microrobot
39. yp typ typ typ typ typ typ typ 45 10 Technical Data P I Mechanical properties Stiffness X Y 0 2 N um Stiffness Z 3 6 N um Load base plate horizontal any orientation 5 25 kg max Holding force de energized base plate horizontal 15 2 5 N max any orientation Motor type Brushless DC motor Miscellaneous Operating temperature range 0 to 50 C Material Stainless steel aluminum Mass 2 2 kg 5 Cable length 2 m 10 mm Order as a system including controller and software Add number 1 or 2 to the order number H 811 xx1 for C 887 11 H 811 xx2 for C 887 21 Technical data specified at 20 3 C Ask about custom designs The travel ranges of the individual coordinates X Y Z 8x Oy 8z are interdependent The data for each axis in this table shows its maximum travel where all other axes are at their zero positions If the other linear or rotational coordinates are not zero the available travel may be less 10 1 2 Maximum Ratings The Hexapod is designed for the following operating data Maximum l Maximum Maximum operatin operating P g current Pequeney consumption unloaded P voltage 46 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Specifications for Vacuum Compatible Versions Drive and sensor vacuum compatible version with gold plated pin contacts Machine made parts gt 95 of the machine made parts
40. ystems The following Hexapod systems are available as combinations of Hexapod and Hexapod controller Figure 1 Product view 1 Moving platform 2 Strut 3 Base plate 4 Power supply cable 5 Data transmission cable H 811 Hexapod Microrobot MS199E Version 1 1 0 11 3 Product Description P J 3 4 Scope of Delivery The following table contains the scope of delivery of the Hexapod The scope of delivery of the Hexapod controller is listed in the user manual of the Hexapod controller eae H 811 Hexapod according to your order p 10 Cable Set See list of standard versions of the H 811 Hexapod in Model Overview p 10 000015165 Steward snap on ferrite suppressor Packaging consisting of m Outer box Inner box Two pads for sliding onto the inner box Internal cushion bottom Internal cushion cover Pallet Documentation consisting of H811T0001 Technical Note on unpacking the Hexapod MS199E User manual for the Hexapod this document Screw sets 000020110 Mounting accessories 6 M4x25 hex head cap screws ISO 4762 1 Allen wrench 3 0 DIN 911 000036450 Accessories for connection to the grounding system 1 flat head screw with cross recess M4x8 ISO 7045 2 washers form A 4 3 DIN 7090 2 safety washers Schnorr Y 4 mm N0110 12 Version 1 1 0 MS199E H 811 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 5 Technical Features 3 5 1 Struts The Hexapod
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