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Contents
1. 3 Conferma Password a i CONFERMA ANNULLA F5 ESC Simply insert the old password in the first line then the new one in the second and confirm it in the last one When done press CONFIRM F5 or DISCARD Esc to accept or reject new password Semicon Synapsis iS a division of Astel Via Torino 253 10015 Ivrea TO Italy 14 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com wo s Droteus Macro Inspection 7 Parameters Please note in the following area each parameter of DEFAULT recipe for both 5 and 6 configurations before making any modification PARAMETER NAME VALUE 5 VALUE 6 COMMENTS Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 15 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com ae s Droteus Macro Inspection Synapse 8 Errors and malfunctions There are some conditions which can result in errors These conditions are especially related with sensor verification and especially vacuum sensor and position sensors Basically when an expected sensor is not activated or deactivated within a given time timeout an error occurs In this case a dialog box with the error message will be displayed There are two possibilities ERROR IS NOT RECOVERABLE click on YES or press Enter and program will be quit and machine must be restarted preferably2. TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com ae se Droteus Macro Inspection Sgnapela When mapping is finished machine will proceed extracting the first wafer starting from cassette top and found wafers will be colored jellow into the cassette status section Wafer will be extracted and placed on the inspection chuck At this point there are two different options TILT button is in the default position disabled TILT is pressed enabled If TILT is disabled wafer stops on inspection chuck and machine remains waiting for the response of operator about wafer quality If wafer is accepted operator must press the black button on the inspection keyboard to send it back into the cassette If wafer is rejected the operator must press the red button on the inspection keyboard Wafer is then released from machine by removing vacuum and operator must remove it manually from inspection chuck in double cassette machines wafer will be automatically driven to the rejected wafers cassette To proceed operator must then press the black key on operator keyboard If wafer have not been removed and operator presses the black key machine will give an error message Remove wafer and press ENTER key on computer keyboard If TILT is enabled wafer is not only placed on the inspection chuck but is also tilted and starts rotating Rotation speed can be adjusted by mo
3. by switching controller OFF and then ON and verifying if error conditions are solved e g if vacuum or air pressure are present if mechanics is free and so on In this case restart program by double clicking its icon on computer desktop ERROR IS RECOVERABLE OR HAVE BEEN ALREADY SOLVED this condition can happen for example in case of a momentary loss in vacuum or other similar conditions click on NO to make the program continue WARNING BEFORE CONTINUING IN CASE OF ERROR BE ABSOLUTELY SURE THAT MACHINE IS IN A SAFE CONDITION TO AVOID WAFER BREAKAGE IN CASE OF DOUBT QUIT PROGRAM AND RESTART If arm is in a dangerous position such a s inside a full cassette it can be manually moved In this case RESTART MACHINE For a complete troubleshooting refer to SERVICE MANUAL Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 16 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com gi P Bremia Siynapais TABLE OF CONTENTS 1 Introduction 2 Installation and Facilities 3 System startup 4 Running machine cycle 4 1 Single cycle operation 4 2 Step by step operation 4 3 Ending a cassette 4 4 Emergency stop 4 5 Changing a configuration 4 6 Going back to startup menu 5 Editing Configurations 5 1 Choosing inspection strategies 5 2 Changing motion parameters 5 3 Creating a new configuration 5 4 Deleting a configuration 6 Password Chan
4. inspected and these wafers must be selected in a further screen as follows by selecting it with up down arrows and by pressing the ENABLE or DISABLE key only clicking Selected wafer will then be marked and will remain until deselected Semicon Synapsis iS a division of Astel Via Torino 253 10015 Ivrea TO Italy 10 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com ae sa Droteus Macro Inspection Synaps Proteus Ver 1 0 2 E3 IMPOSTAZIONI Slot n 20 DISABILITA ii CONFERMA F5 ANNULLA ESC When done press CONFIRM F5 or CLOSE ESC If confirmed modifications will be recorded into the recipe data base If the RANDOM F8 option is selected the user can define a number of wafers to be inspected and each time the recipe is run for each cassette the given number of wafers will be randomly selected within the 25 cassette slots If a selected slot is empty wafer will not be inspected The number of wafers to be inspected will be given in the following dialog box Inserire il numero di slot che devono essere abilitati casualmente 1 25 Input wafer number and click OK or press ENTER Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 11 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com b d ahr Proteus Macto Inspecti
5. 125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com a 4 Proteus Macto Inspection Peg rap 4 Running machine cycle This will be the screen displayed when accessing the normal cyle run interface Proteus Yer 1 0 2 _Configurazione Ciclo singolo Cambia F2 ABILITATO F3 Me Ispezionati Buoni Scartati INCH 5 CONFIGURAZIONE I jet This screen has five different parts a button section where all the functional button are placed acassette display section where the current cassette is represented giving information about its status acounter bar where three counters inspected good and discarded give the status of inspection an information bar where are given wafer size and configuration recipe name a message line where is displayed a message with machine status or operator recommendations Buttons can be accessed by clicking with mouse trackball by pressing the display if touch screen optoin is included or by pressing the Fxx button on the keyboard To start machine cycle place a cassette with wafers on the indexer platform and press START F5 Platform will then be driven to home position and wafer mapping will be started to identify present wafers Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea
6. F5 ESC Input the correct password and then the configuration selectoin display will appear Proteus Yer 1 0 2 CONFIGURAZIONE SELEZIONA LA CONFIGURAZIONE DA MODIFICARE Configurazioni disponibili ee I jet 5 INCH ee cat F2 DEL INCH CONFIGURAZIONE CONFERMA F5 ANNULLA ESC This menu is similar to the one which can be accessed from the CHANGE key on the user interface but in this case it is possible to act with editing capabilities Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 9 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com sa Drotens Macro Inspection To select a configuration select before wafer size and then configuration name by clicking on it When configuration is selected press CONFIRM F5 to edit There are two sections inside editor The first one is about inspection strategies and the second is about motion parameters Inspection strategies can be selected from the following given options Proteus Ver 1 0 2 CONFIGURAZIONE PARAMETRI Slot Abilitati FISSI CASUALI F7 F8 CONFERMA F5 ANNULLA ESC 5 1 Choosing inspection strategies It is then possible to program ALL F6 wafers for inspection and this option will not imply any further choice If the FIXED F7 mode is selected only specified wafers will be
7. ation when accessing in edit mode to the configuration menu press NEW F2 key This will access the dialog box where the name of new configuration can be given Nuova Configurazione Inserisci il nome per la nuova configurazione D CONFERMA F5 ANNULLA ESC Write the name and press CONFIRM F5 to accept DISCARD Esc will abort new configuration creation After this access the Strategies and parameters sections Values will be at this point the same than DEFAULT configuration and can be modified according to needs 5 4 Deleting a configuration To delete a configuration select configuration to delete by clicking on the list and then choose DELETE DEL on the configuration selection screen Semicon Synapsis iS a division of Astel Via Torino 253 10015 Ivrea TO Italy 13 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com id a Proteus Macto Inspection Synaps 6 Password change Password is required to access recipe editing menu There is a simple system to manage password change When accessing to the password request box Password Per accedere alla sezione modifiche configurazioni Immettere la password a CAMBIA CONFERMA ANNULLA F2 F5 ESC press CHANGE F2 key to access the password change dialog box as follows Cambio Password 1 Password 2 Nuova Password a
8. bd USER MANUAL Rev 1 0 Jan 2002 S emtcon Synapsis Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 1 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com wy sa Droteus Macro Inspection Synaps AUTOMATIC WAFER MACRO INSPECTION MACHINE Proteus Macro Inspection is a simple and effective tool for wafer visual control It have been especially studied for all that cases where it is required a simple fast and cost effective solution in wafer inspection An inspection unit featuring wafer tilt and rotation is provided for the proper inspection phase It is possible to provide versions with single or double cassette laser mapping and centering aligning system with optical edge detection The system is computer controlled and its use and programming is really easy and user friendly It is possible if needed to edit and recall recipes and each recipe includes inspection strategies all wafers fixed wafers and random access for statistical inspection and handling parameters Proteus Macro Inspection is mounted on a vibration free granite base and can be supplied also with different kinds of inspection lamps for any different need Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 2 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com ae se Dro
9. ge 7 Parameters 8 Errors and malfunctions Semicon Synapsis iS a division of Astel Via Torino 253 10015 Ivrea TO Italy Page 3 Page 3 Page 4 Page 5 Page 6 Page 7 Page 7 Page 7 Page 8 Page 8 Page 9 Page 10 Page 12 Page 13 Page 13 Page 14 Page 15 Page 16 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com a Proteus Macro Inspection 17 ae se Droteus Macro Inspection Synapse NOTE Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com 18
10. hed and then machine stops If a mapping is running it will be finished before stopping 4 3 Ending a cassette If a cassette inspection must be aborted simply press the END F6 key Machine will stop after the end of the current wafer and will be ready for a new cassette 4 4 Emergency STOP It is possible in case of severe malfunction to stop machine by pressing the EMERGENCY button placed on the front panel of motion controller This will force the machine to completely and immediately STOP This will also produce a vacuum loss which can result in wafer breakage Machine will detect within about 10 seconds the emergency condition giving a message and then stopping the program from runnig In this case program must be lauched again manually by double clicking on its icon on computer desktop WARNING USE EMERGENCY STOP BUTTON ONLY IN CASE OF REAL NEED SINCE ITS IMPROPER USE CAN RESULT IN WAFER BREAKAGE Semicon Synapsis iS a division of Astel Via Torino 253 10015 Ivrea TO Italy 7 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com We ahe Proteus Macto Inspection Synaps 4 5 Changing a configuration It is possible to run a different recipe for inspection Basically differences from a recipe configuration to another can be in wafer size motion parameters or inspection strategies We will describe in the proper section how to modify a configuration but sw
11. itching from one configuration to another can be done by pressing CHANGE F2 key The configuration selection screen will then be displayed Proteus Ver 1 0 2 CONFIGURAZIONE SELEZIONA LA CONFIGURAZIONE DA MODIFICARE Configurazioni disponibili I jet 5 INCH E saat F2 DEL INCH CONFIGURAZIONE CONFERMA F5 ANNULLA ESC Select before wafer size and then the recipe by clicking its name then press CONFIRM F5 to load The previous interface will then be displayed and recipe can now be run 4 6 Going back to startup menu It is possible to access the startup menu from operator interface screen This can be useful if it is needed to access the recipe editing section To do so press the MENU Esc key The startup menu will then be displayed Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 8 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com ae sa Droteus Macro Inspection Synaps 5 Editing Configurations From the Main menu it is possible to access configuration menu To do this press CONFIGURATION F1 key To access the configuration menu in EDIT mode a password will be required A dialog box as showed will then be displayed Password Per accedere alla sezione modifiche configurazioni Immettere la password CAMBIA CONFERMA ANNULLA F2
12. on Synaps 5 2 Changing motion parameters From the parameters section of recipe editing it is possible to change motion parameters This section can be accessed by clicking on the PARAMETERS folder bar from the default editing screen When selected this screen will appear as follows CONFIGURAZIONE i Lista Quote Proprieta WaferPitch WaferPitch FirstWaferPos Wafer Angle Cassette Center Position Absolute Top Absolute Bottom Passo in step tra una fetta e la successiva Valore 542 Descrizione MODIFICA F4 CONFERMA F5 ANNULLA ESC It is strongly recommended not to change any value if machine is correctly running Configurazione On any machine each value isdescribed ito the description section to allow a correct understanding of its meaning To change it select by clicking then click MODIFY F4 input new value and then ckick MODIFY F4 again to accept modifications When done click CONFIRM F5 to accept or DISCARD Esc Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 12 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com 4 e 4 Proteus Macto Inspection Synapsis IF THERE ARE DOUBTS IN MODIFYING PARAMETERS CREATE A COPY OF THE ORIGINAL CONFIGURATION AND ACT ON THIS ONE BEFORE ERRORS MAY RESULT 5 3 Creating a new configuration To create a new configur
13. pins male female cable inspection unit to controller standard 15 pins male female cable arm up down limits to controller mini din 3 pins cable pneumatics and vacuum follow numbers air intake 4 to 6 bar 6 mm tubing Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 3 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com b d atue Proteus Macto Inspection Agnapaia vacuum line 6 mm tubing Inspection keyboard with its cable After connections switch on computer and verify if controller is switched on main switch is in the rear section aside supply connector and that the emergency stop button is released if needed turn the button clockwise to release Proteus control program will be automatically run at startup wait for its introductory screen 3 System startup After having switched on computer Proteus program is automatically run The first screen displayed is the following one Proteus Ver 1 0 2 Ea PROTEUS MENU _ CONFIGURAZIONE F1 ISPEZIONE F4 ESCI F6 Info su A Ss F To run machine with the last configuration used press the INSPECTION button or the F4 key on the keyboard Machine will then run the next interface which is the proper user interface Semicon Synapsis iS a division of Astel Via Torino 253 10015 Ivrea TO Italy 4 Tel 39 0
14. teus Macro Inspection Synapse 1 Introduction Proteus Macro Inspection system have been especially designed to be used as a tool for silicon wafer macro inspection It is composed of three different parts Mechanical part Motion and I O controller Computer with display and keyboard The whole system have been designed to be easy to use and maintain and in particular the provided computer interface have been studied to allow a simple use and configuration In the following we will introduce the basic use of Proteus System i e the basic installation procedure the operator interface and the use of its configuration software 2 Installation and Facilities Installing Proteus system can be done in three simple steps First of all place the three parts mechanics control and computer in its place In doing so pay attention to respect the lenght of tubing and connection cables between controller and mechanics Following the indications on the rear panel of controller and numbers placed on tubes connect each unit into the proper position Basically there will be the following connections to do serial connection to PC standard 9 pins male female cable 220 AC mains supply to PC and from PC to controller Monitor supply cable Standard PC connections keyboard mouse display indexer serial connection to controller standard 9 pins male female cable arm connection to controller standard 9
15. ving the potentiometer aside the inspectoin unit connections The operation is the same than before by pressing black or red key if wafer is accepted or rejected Before releasing vacuum in case of rejection of course wafer will be put in horizontal position There are some additional features which can be accessed from this screen during operation 4 1Single Cycle operation It is possible to enable SINGLE CYCLE operation by pressing its button or the correspondent F3 key Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 6 Tel 39 0125 230105 Fax 39 0125 633482 WWW SEMICONSYNAPSIS COM e mail info semiconsynapsis com ae se Droteus Macro Inspection Algnapaia This will force the machine to process a wafer at a time waiting for a START F1 key before proceeding with the next one SINGLE CYCLE can be disabled by pressing again its key or F3 and then START to proceed 4 2 Step by step operation It is possible for example for setup purposes to run machine in step by step mode To do so simply press Fl key during operation It can be seen that START button changes to PAUSE when machine is running Pressing PAUSE F1 during operation forces machine to stop at the end of the current phase or movement Pressing again the key which will turn to START starts again the operation It is important to remember that this key is not an instant stop key The current movement is anyway finis
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