Home

E-625 Piezo Servo Controller

1. so 205 Figure 16 E 625 dimensions in mm E 625 Piezo Servo Controller PZ166E Version 1 7 0 81 12 Technical Data P I 12 4 Block Diagrams 12 4 1 E 625 CR Block Diagram Sensor peas 1 sir Polarity Jp107 x19 1 R143 fl y Sensor Monitor Sensor r m Wen SMB Con I aa ao R144 ILS vY Network 6 gt g o OnTarget 100kHz sine i Y 8 AO A 2 ZeroR13 amp Syne Volt Range L L 5 IB Matuita d Joias r 3 2 MHz z s2 Master Slave Servo x3 DC In 81 sw 30FF up open e X1 2 Voo O GND a sabe xt ven o Network 124 3 e Mabe Network 3 oS Network 4 o S24 816 00 Computer Interface Submodule Figure 17 E 625 CR block diagram S1 sw 4 S1 sw 1 S1 sw 2 and S1 sw 3 refer to the switches 4 1 2 and 3 on the Settings DIP switch block on the E 625 front panel The pin numbers 2a to 32c refer to an internal 32 pin connection and are only used for informational purposes 82 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 12 Technical Data 12 4 2 E 625 C0 Block Diagram Sensor nn 1 Gain Polap107 Polarity Jp107 x19 Sensor R143 22a Sensor Monitor Sensor Monitor Sensor N SMB Gon Linearization R144 ILS en l v g 100kHz sine ery K Zero S 100kHz AN R13 s Network7 O van L L Sync Oscillator Jp109 BA Jp108 Network 8 3 2 MHz g 2 200kHz z Master Slave Power Sup
2. macros 5 to 50 C Deactivation at 75 C 205 mm x 105 mm x 60 mm 1 05 kg 12 to 30 V DC stabilized 2A The E 625 is designed for the following operating data Maximum Operating Operating Maximum Current Frequency Consumption Switchcraft 30 V 2A panel plug 3 pin 78 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 12 Technical Data 12 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the E 625 Area of application For indoor use only Maximum altitude Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Storage temperature 0 C to 70 C Transport temperature 25 C to 85 C Overvoltage category Protection class Degree of pollution Measurement category Degree of protection according to IEC 60529 E 625 Piezo Servo Controller PZ166E Version 1 7 0 79 12 Technical Data P I 12 2 Operating Limits The following diagram shows the operating limits in open loop operation for various piezo loads The curve values are capacitance values in pF 160 140 120 100 80 Amplitude V peak peak 20 Frequency Hz Figure 15 Operating limits 80 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 12 Technical Data 12 3 Dimensions
3. 46 ILS adjust potentiometer on the main board using the trimmer adjustment tool so that the stage position changes as linearly as possible as a function of the target position Adjusting the ILS adjust potentiometer also changes the sensor gain 3 After setting the optimal linearity repeat the adjustment of the static sensor gain for the closed loop operation p 63 4 Disconnect the E 625 from the power source by removing the power cord of the wide range input power supply from the power socket 5 Close the E 625 8 6 4 Digital Corrections only E 625 CR In addition to the adjustments described in this user manual the E 816 computer interface submodule can be used to digitally correct the following values Sensor coefficient Ks um V When the sensor signal changes by 1 V the stage position changes by Ks um Sensor offset Os When the sensor signal is 0 V the stage position is Os um Coefficient of the piezo V V When the DA converter output changes by 1 V the voltage amplifier Kpzt piezo voltage on the amplifier changes by Kpzt V Offset of the piezo V When the DA converter output is O V the piezo voltage amplifier Opzt voltage on the amplifier is Opzt V gt Only make changes to these settings if you have replaced the stage and or have recalibrated the stage displacement as described in this user manual For additional information consult the Calibration section in the user manual for the E 816 computer interf
4. 7 A 996mV I 992mV JA 20 0ms 14 9ms ch2 Pk Pk 1 07 V am 200mV ECEE Soomv M TO Oms al Chi 7 320mv 21 Oct 2010 11 1500ms 13 20 15 Figure 14 Closed loop operation conservative setting of P term and I term stable system with relatively long settling time E 625 Piezo Servo Controller PZ166E Version 1 7 0 57 8 Adjustment of Internal Settings P I 8 6 Calibrating the Stage Displacement A recalibration of the displacement is only necessary when the stage or parts of it or the E 625 was replaced in a calibrated system A calibrated external measurement device is used to re calibrate the position sensor back to the accuracy specified in the original measurement protocol NOTICE Stage damage from oscillations Oscillations can be detected by a humming of the stage and indicate incorrect adjustment of the notch filter and or the P I controller gt Switch the servo mode off immediately and optimize the notch filter frequency and the P I controller settings in the E 625 p 52 The calibration of the stage displacement includes the following steps Adjust the sensor range open loop operation p 59 Adjust the static sensor gain closed loop operation p 63 Adjust the sensor linearization closed loop operation p 66 gt Perform these steps immediately in sequence INFORMATION All stages ordered together with a E 625 are delivered with measurement protocols as evidence o
5. Controller PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 8 2 Interlinking the Controllers INFORMATION The individual devices are interlinked using an I C bus This connects lines 3 and 4 on the Network socket and a ground wire 1 2 or 5 to the corresponding wire Furthermore for all interlinked E 625 CRs the sensors must be synchronized over the lines 7 and 8 on the Network socket Using E 625 CN network cables from PI ensures that all stated connections exist for details see the pin assignment of the cable p 85 INFORMATION The capacity of the 1 C bus is 400 pF The larger the number of devices to be interlinked the shorter the lines between the devices have to be The maximum length of the bus must not exceed 1 m gt When you use E 625 CN network cables you can interlink a maximum of 4 devices gt If you need to interlink more than 4 devices use the E 621 piezo servo control modules from PI Up to 12 of these modules can be installed in one case where they are interlinked over the backplane of the case INFORMATION The E 625 which is connected to the PC over the RS 232 or USB connection communication master forwards the commands to the other E 625 communication slaves in the network The responses from the communication slaves are returned to the PC via the communication master Prerequisites v All devices to be interlinked are switched off i e for all E 625 the wide range input power su
6. a Disconnect the E 625 from the power source by removing the power cord of the wide range input power supply from the power socket b Close the E 625 If the system test was successful you can work with the E 625 and the connected stage A renewed system test is only necessary in the following cases The conditions of use have changed load installation ambient temperature The E 625 or the stage was replaced In this case first the axis displacement must be recalibrated p 63 INFORMATION gt In regular intervals check the position of the stage at 0 V input voltage and adjust the sensor zero point if necessary This can extend the lifetime of the piezo actuator in the stage INFORMATION When the yellow overflow LED comes on the amplifier is near its range limit piezo voltage outside the range of 20 V to 120 V gt In open loop analog mode do not exceed the recommended input voltage range of 2 to 12 V gt Perform a zero point adjustment of the sensor when the overflow LED comes on in closed loop operation servo mode ON p 32 E 625 Piezo Servo Controller PZ166E Version 1 7 0 31 6 Start Up P I 6 3 Adjust the Sensor Zero Point Changes in temperature or changes in the mechanical load can cause small deviations of the sensor zero point Goal of the zero point adjustment Make the entire travel range available When the sensor zero point is set correctly the complete output voltage range of the a
7. a genuine RS 232 interface Using an USB to RS 232 adapter can result in data loss during communication especially when larger amounts of data are transmitted When using the USB interface gt The first time the USB interface is used make sure that you are logged onto the PC with administrator rights Once the E 625 has been switched on a message will appear that new hardware has been detected gt Follow the instructions on the screen and insert the E 816 CD The necessary hardware drivers are located in the USB_Driver directory PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 10 Troubleshooting Problem Possible Causes The controller With USB connections the communication cannot be maintained was switched off after the E 625 has been switched off and on again or once the E and on againor 816 computer interface submodule has been reset was restarted gt Disconnect and then reconnect A different gt Close the other program program is accessing the interface Problems with gt Check whether the system works with different software such special software as a terminal program or a development environment You can test the communication by starting a terminal program such as PI Terminal and entering IDN gt Make sure that you end the commands with an LF line feed A command is not executed until the LF has been received Unsatisfac The sensor Switch the E 625 on at lea
8. already have the corresponding sensors Other sensors can only be used with PI approval 2 2 General Safety Instructions The E 625 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the E 625 gt Only use the E 625 for its intended purpose and only use it if it is in a good working order Read the user manual gt Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the E 625 E 625 Piezo Servo Controller PZ166E Version 1 7 0 5 2 Safety PI Install the E 625 near the power source so that the power plug can be quickly and easily disconnected from the mains Use the supplied components power supply adapter and power cord p 15 to connect the E 625 to the power source If one of the supplied components for connecting to the power source has to be replaced use a sufficiently dimensioned component If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the E 625 in the case of malfunction or failure of the system If touch voltages exist touching the E 625 can result in serious injury or death from electric shock gt gt gt Connect the E 625 to a protective earth conductor before start up p 20 Do not remove the protective earth conductor during operation If th
9. range input power supply from the power socket and close the E 625 Adjusting the Sensor Range in Computer Controlled Mode only E 625 CR 1 Select computer controlled mode and open loop operation servo mode OFF using the Settings DIP switch block 1 OFF up 2 ON down 3 OFF up 4 ON down Optional Connect the voltmeter to the SENSOR MONITOR SMB socket using the adapter cable Install the external measurement device so that it can measure the stage displacement If the measurement device shows a value other than zero note the offset and subtract this from the values read in the following measurements Connect the power cord on the wide range input power supply to the power socket The E 625 is ready for operation when the green Power LED comes on Establish communication between the PC and the E 625 e g with PIMikroMove E 625 Piezo Servo Controller PZ166E Version 1 7 0 61 8 Adjustment of Internal Settings P I 10 11 12 13 14 Send the SVO A 0 command A indicates the axis to ensure that the servo mode is switched off Increase the piezo voltage using the SVA command in increments of 10 volts from 0 V up to the value where the upper travel range limit for the stage is reached approximately Send the SVA A 0 command to set the piezo voltage to 0 V Read the other sensor signal Use the voltmeter on the SENSOR MONITOR SMB socket or Send the Pos A command A ind
10. set the servo mode over the E 816 computer interface submodule with the SVO command the DIP switch 3 must be set to open loop operation up gt Send the corresponding axis specific SVO command via the communication interface or by using a macro running on the E 816 computer interface submodule The svo command can be used to get the last sent SVO settings for each axis svo does not show the settings of the DIP switch 3 for the servo mode Closed loop operation can also be activated by a start up macro see the user manual for the E 816 computer interface submodule E 625 Piezo Servo Controller PZ166E Version 1 7 0 41 PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 8 Adjustment of Internal Settings In this Chapter General Notes on the Adjustment of Settings ooonnocccnnnnnicnninncccccnnonnccnnnanncncnn rca nnnnos 43 Openingithe Case iaa ld 45 Adjustment Elements Inside the Case oooonncccnnninicinnnoncccnnnonccnnnnorc cnn ronca cnn 46 Synchronizing the Sensors a lll sail 50 Adjusting Notch Filter and P I Controller oooocooonnnnccccnnnnoconnnonocannnanccnn ronca ccnnnnncns 52 Calibrating the Stage DisplaceMent ooocoonocccccnnoccccnononcccnanoncncnanoncnn nano nc nrrnnn nc nn cana rca 58 8 1 General Notes on the Adjustment of Settings DANGER A Risk of electric shock during operation with open case If the E 625 is operated with an open case live parts are accessible Touching the l
11. the wide range input power supplies are not connected to power sockets over the power cords v You have opened the cases for the E 625 to be synchronized p 45 Tools and Accessories Trimmer adjustment tool or alternatively a thin bladed screwdriver 50 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings Synchronizing the Sensors O O O O O O O 3 00 Y o l DO a o Figure 10 Settings for the master slave switch 1 Select an E 625 as the sensor master and check the position of the master slave switch The master position see top figure is the default setting 2 If the master slave switch on the selected sensor master is not in the master position use the trimmer adjustment tool to turn it to the master position 3 Set all other E 625 to sensor slave To do this turn the master slave switches to the slave position see top figure using the trimmer adjustment tool 4 Close the cases 5 Make sure that all devices have the synchronization lines pin 7 and 8 on the Network socket and at least one ground wire pin 1 2 or 5 on the Network socket connected to the corresponding wire for details see pin assignment of the E 625 CN network cable p 85 E 625 Piezo Servo Controller PZ166E Version 1 7 0 51 8 Adjustment of Internal Settings P I 8 5 Adjusting Notch Filter and P I Controller The E 625 is equipped with a notch fi
12. 2440unssnsnnnnennnnnnennnnnnnennnn nenn 23 Connect a PC for the Computer Controlled Mode only E 625 CR sses 24 5 1 General Notes on Installation gt Install the E 625 near the power source so that the power plug can be quickly and easily disconnected from the mains gt Only use cables and connections that meet local safety regulations 5 2 Ensuring Ventilation High temperatures can overheat the E 625 gt Set up the E 625 with a distance of at least 10 cm to the top and rear sides and at least 5 cm to the sides If this is not possible make sure that the area is cooled sufficiently Ensure sufficient ventilation at the place of installation Keep the ambient temperature to a non critical level lt 50 C E 625 Piezo Servo Controller PZ166E Version 1 7 0 19 5 Installation PI 5 3 Connecting the E 625 to the Protective Earth Conductor INFORMATION gt Observe the applicable standards for mounting the protective earth conductor Prerequisite Y Y You have read and understood the General Notes on Installation p 19 The E 625 is switched off i e the power supply is not connected to the power socket via the power cord Tools and Accessories Suitable protective earth conductor Cable cross section 20 75 mm Contact resistance lt 0 1 ohm at 25 A at all connection points relevant for mounting the protective earth conductor Fastening material for the protective earth conductor sits on the prot
13. 3 8 Adjustment of Internal Settings P I 10 11 12 If you do not know the resonant frequency for the stage determine it as follows a Set the notch filter frequency range as high as possible using the DIP switch block on the E 802 55 servo control submodule all DIP switches to OFF b Generate a 1 V square wave signal peak peak with 2 to 5 Hz using the function generator c Read the resonant frequency and its level on the oscilloscope Y t or FFT display Adapt the notch filter frequency range to the stage resonance frequency using the DIP switch block on the E 802 55 servo control submodule Adjust the notch filter damping To do this turn the S1 switch on the E 802 55 servo control submodule using the trimmer adjustment tool Possible damping settings of the notch filter 20 dB or 25 dB If the resonance frequency level is between 15 and 20 dB Set damping to 25 dB If the resonance frequency level is lt 15 dB Set damping to 20 dB Generate a 1 V square wave signal peak peak with 2 to 5 Hz using the function generator Read the resonance frequency on the oscilloscope Y t or FFT display Turn the P4 potentiometer on the E 802 55 servo control submodule using the trimmer adjustment tool to optimally adapt the notch filter frequency to the stage resonance frequency Repeat the last steps until the stage resonance frequency has the best damping Improve the settings of the P I controller
14. 5 1 Adjusting the Notch Filter Prerequisite v You have read and understood the General Notes on the Adjustment of Settings p 43 v You have read and understood the user manual for the E 802 55 servo control submodule v The E 625 has been disconnected from the power source i e the wide range input power supply is not connected to the power socket using the power cord The E 625 has been installed properly p 19 You have installed the stage in the same manner as it will be used in your application corresponding load and orientation v You have opened the E 625 p 45 Tools and Accessories Oscilloscope recommended Digital storage oscilloscope p 23 Function generator for the output of square and sine wave functions in the range of 1 Hz to 1 kHz 2 SMB BNC adapter cables in scope of delivery Trimmer adjustment tool Adjusting the Notch Filter in Analog Mode 1 Select analog mode and open loop operation servo mode OFF using the Settings DIP switch block 1 ON down 2 OFF up 3 OFF up 4 OFF up 2 Connect the function generator to the ANALOG IN WTT SMB socket using an adapter cable 3 Connect the oscilloscope to the SENSOR MONITOR SMB socket using an adapter cable 4 Connect the power cord on the wide range input power supply to the power socket The E 625 is ready for operation when the green Power LED comes on E 625 Piezo Servo Controller PZ166E Version 1 7 0 5
15. 625 Piezo Servo Controller PZ166E Version 1 7 0 13 3 Product Description P I Protective Earth Connection The protective earth connection threaded bolt marked with the symbol for the protective earth conductor has to be connected to a protective earth conductor since the E 625 is not grounded via the power supply connector DC IN 12 30 V Panel plug for power supply connector p 85 The C 890 PS wide range input power supply must be connected via a barrel to Switchcraft adapter p 21 3 4 Scope of Delivery 14 C 890 PS Separate 15 V wide range input power supply for use with line voltages from 100 to 240 V AC and voltage frequencies of 50 or 60 Hz with barrel connector K050B0002 Barrel to Switchcraft adapter for the power supply connector E 692 SMB SMB BNC adapter cable 1 5 m 2 pcs PZ166E User manual for the E 625 CR and the E 625 C0 this document PZ150E User manual for the E 802 servo controller submodule Only with E 625 CR C 815 34 Null modem cable for the connection to the PC 000014651 USB cable USB A m USB Mini B m for the connection to the PC PZ116E User manual for the E 816 computer interface submodule E 816 CD CD with software and documentation Only with E 625 C0 E500T0011 Technical note for the LabVIEW analog driver Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 5 Accessories Order Description N
16. PI PZ166E E 625 Piezo Servo Controller User Manual Version 1 7 0 Date 20 06 2013 This document describes the following products E 625 CR Piezo servo controller single channel for capacitive sensors E 625 C0 Piezo servo controller single channel for capacitive sensors only analog control Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI wS PI Physik Instrumente PI GmbH 8 Co KG is the owner of the following trademarks PIO PICO PICMA Picoactuator PIFOC PlLine Plnano PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation 2013 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 20 06 2013 Document number PZ166E BRo version 1 7 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual 0 cccceeee
17. PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 6 Start Up 6 Start Up In this Chapter General Notes on Start UPp 22244440annnnnnnennnnnnnnannnnnnnnnnnnnnnannnnnnn namen nannten nn 27 Perform System TOS dcir idilio 28 Adjust the Sensor Zero Point ocociicccninncononnnniconnnndc cra 32 6 1 General Notes on Start Up DANGER A Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the E 625 in the case of malfunction or failure of the system If touch voltages exist touching the E 625 can result in serious injury or death from electric shock gt Connect the E 625 to a protective earth conductor before start up p 20 gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the E 625 to the protective earth conductor before starting it up again NOTICE Stage damage from oscillations Oscillations can be detected by a humming of the stage and indicate incorrect adjustment of the notch filter and or the P I controller gt Atthe first start up run a system test and if necessary correct the notch filter frequency and the P I controller settings in the E 625 gt If oscillations occur during closed loop operation switch th
18. R and on the E 802 55 servo control submodule The servo control submodule is inserted vertically on the main board The E 625 C0 components are identical with the exception of the E 816 computer interface submodule The adjustment elements are shown in the default position L141 R143 Gain R144 ILS Adjust a 1 la 1 Sensor JP yA settings JP 188 S2 m s X17 PZT Sensor ser vo contr module Computer Interface E 816 88 gr ON TARGET ye OFL gr POWER ON Figure 6 E 625 CR Positions of the components and adjustment elements Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 8 3 1 Jumper Jumper X4 The X4 jumper is located on the main board p 46 The E 802 servo control submodule is activated default settings The servo mode can be controlled with switch 3 on the Settings DIP switch block and only for E 625 CR over the E 816 computer interface submodule The slew rate limiter for the piezo voltage and the notch filter remain active even when the servo mode is switched off The E 802 servo control submodule is bypassed independent of all other settings The slew rate limiter for the piezo voltage and the notch filter are inactive Jumper X8 The X8 jumper is located on the main board p 46 Position Function 1 2 DC offset potentiometer is activated Only activate whe
19. Signal on ANALOG IN WTT not used as the trigger for the wave table output or triggered motion The switches 1 2 and 4 determine the control mode for the E 625 and consequently the usable control sources Switch Analog Mode Computer Conirolled Mode only E 625 CR Setting the switches 1 2 and 4 in an incompatible manner can result in unpredictable behavior Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 3 Product Description Zero Potentiometer A trimmer adjustment tool can be used on the Zero potentiometer for a zero point adjustment of the sensor A zero point adjustment can be necessary after longer operation changes in temperature or if the load is changed PZT amp SENSOR A Sub D Mix 7W2 socket for connecting the stage p 84 Voltage output for the piezo actuator in the stage The piezo voltage is between 30 and 130 V Input for the sensor signal from the stage 3 3 2 Rear Panel DC IN Network Figure 2 E 625 rear panel Network Sub D socket 9 pin female p 84 for the network connection only E 625 CR C bus the synchronization of the sensor and the on target signal from the E 802 servo controller submodule The on target signal shows that the distance from the target position is less than 0 19 of the travel range The signal TTL active low is also applied to the On Target LED on the front panel of the E 625 E
20. Specifications 12 1 1 Data Table Function Channels Sensor Servo characteristics Sensor type Amplifier Control input voltage Output voltage min Peak current lt 50 ms Average current Current limitation Noise 0 to 100 kHz Voltage gain Input impedance E 625 Piezo Servo Controller EET AE AE A ee AS T 77 Ai A O bs 80 E AA AA A AE 81 E EA AA E A 82 E EE A AE AE A E 84 E 625 CR E 625 C0 Servo controller with integrated piezo amplifier 1 P I analog notch filter Capacitive 2 to 12 V 30 to 130 V 120 mA 60 mA Short circuit proof 0 8 MV ms 10 0 1 100 kQ PZ166E Version 1 7 0 77 12 Technical Data Interface and operation Interface communication Piezo connector Sensor connection Control Input socket Sensor monitor socket Controller network E 625 CR only Command set E 625 CR only User software E 625 CR only Software drivers E 625 CR only Supported functionality E 625 CR only Miscellaneous Operating temperature range Overtemp protection Dimensions Mass Operating Voltage Current consumption 12 1 2 Maximum Ratings PI USB RS 232 9 pin Sub D connector 9 6 115 2 kBaud 24 bit A D and 20 bit D A E 625 C0 without interface Sub D special Sub D special SMB SMB up to 12 channels PI General Command Set GCS PIMikroMove LabVIEW drivers dynamic libraries for Windows DLL and Linux Wave table 256 data points external trigger up to 16
21. ace submodule E 625 Piezo Servo Controller PZ166E Version 1 7 0 67 PIEZO NANO POSITIONING WWW PI WS 9 Maintenance 9 Maintenance In this Chapter Cleaning the E 628 enrii il la dl la 69 Updating Firmware ana and anna sa dorada ida cons 69 9 1 Cleaning the E 625 NOTICE Short circuits or flashovers The E 625 contains electrostatic sensitive devices that can be damaged by short circuits or flashovers when cleaning fluids enter the case gt Before cleaning remove the E 625 from the power source by pulling the power plug gt Prevent cleaning fluid from entering the case gt When necessary clean the surfaces of the E 625 case with a towel that has been lightly dampened with a mild cleanser or disinfectant gt Do not use any organic solvents 9 2 Updating Firmware The E 625 CR module is equipped with an E 816 computer interface submodule whose firmware can be updated gt For updating the firmware of the E 816 computer interface submodule follow the instructions in the E 816 user manual E 625 Piezo Servo Controller PZ166E Version 1 7 0 69 PIEZO NANO POSITIONING WWW PI WS 10 Troubleshooting 10 Troubleshooting Problem Possible Causes The cable is not gt Check the cable connections connected correctly The stage or the gt If available replace the defective stage with a new stage of the stage cable is same type and test the new combination Since the stage and defe
22. all and operate the E 625 after having read and understood this user manual Personnel qualification Only authorized and qualified personnel must install operate maintain and clean the E 625 E 625 Piezo Servo Controller PZ166E Version 1 7 0 7 PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Features and Applications oian raritne aiaiai iaai aada aaa 9 Model OvVervieW iii is 10 Product View 222 222 A A it 10 Scope OT DeliVery iii li a li 14 ACCESSOMES uni illa 15 3 1 Features and Applications The E 625 piezo servo controller is a bench top device that provides closed loop and open loop control of the stage displacement The models E 625 CR and E 625 C0 work with capacitive sensors that measure the stage position directly and without contact direct metrology The integrated E 802 servo control submodule contains the the slew rate limiter the notch filter and the servo loop The notch filter improves the stability and enables a wider broad band operation closer to the mechanical resonance frequency of the piezo system The E 625 CR module is equipped with an E 816 computer interface submodule This enables it to offer the following additional functions Multi axis network Several E 625 CR can be controlled from one single interface A special network cable sets up the communication between the individual controllers Waveform memory The user can save any functi
23. asenews_x_x_x pdf on the CD of the product d Find the user name and password in the User login for software download section in the Release News e Inthe User login area on the left margin in the website enter the user name and the password in the corresponding fields f Click Login If Documents 0 Files is still being displayed no manuals are available Contact our customer service department p 75 Click Documents Click the desired manual and save it on the hard disk of your PC or on a data storage medium E 625 Piezo Servo Controller PZ166E Version 1 7 0 3 PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter INTOMASG A le a line len 5 General Safety Instructions essiri lininiai aAA Nna PANANET AA AAE 5 Organizational Measures oansnien aaa aa anila AAN aa Aa aE 7 2 1 Intended Use The E 625 is a laboratory device according to DIN EN 61010 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Corresponding to its design the E 625 is intended for driving capacitive loads e g piezo ceramic actuators The E 625 must not be used for purposes other than those named in this user manual In particular the E 625 must not be used to drive ohmic or inductive loads The E 625 can be used for static as well as dynamic applications Capacitive sensors must be used for closed loop operation PI stages intended for closed loop operation
24. ce on the PC E 625 SR or E 665 piezo servo controller can also be connected to this network Consult the user manual for the E 816 computer interface submodule for additional information The recommended range for the commanded piezo voltage is 20 to 120 V The range can be extended to 30 to 130 V However this can shorten p 89 the lifetime of the piezo actuator in the stage and causes the overflow LED to light up 7 2 2 Servo Mode The servo mode determines whether the motion is performed in open loop operation servo mode OFF or in closed loop operation servo mode ON The control and servo modes can be combined at will Closed Loop Operation Control input signals input signal on ANALOG IN WTT or E 816 inputs over commands and wave table output are interpreted as the target position The servo loop of the E 802 servo control submodule determines the piezo voltage on the basis of the target position and the feedback from the position sensor in the stage This is how the servo loop regulates the stage position The positioning in closed loop operation is free of drift and hysteresis and independent of changes in load Open Loop Operation Control input signals input signal on ANALOG IN WTT or E 816 inputs over commands and wave table output are interpreted as a direct specification for the piezo voltage In open loop operation the servo loop for the E 802 servo control submodule is not considered When the jumpe
25. cifications eind AAA iia 12 1 1 Data Tables cria e a a a 12 1 2 Maximum RAtinGS sessies 142 0 ae 12 1 3 Ambient Conditions and Classifications ne 122 Operating LIMIS eosa a Ea anime 123 Dimensions ii ee ner En aaia E E aaa 12 4 Block DiagraMS ee a ee in 12 4 1 E 625 CR Block Diagram c ocoooonoccccnonoccccnononcccnononccnnnnnn iiaia 12 4 2 E 625 C0 Block Diagram ooooonncccccnonococonononcccnnnoncccnn arc cnn nennen 12 5 E A ea nun 12 5 1 PZT 8 SENSOR cccccccceesceeeceeeceeecsneeeeeceneeeeeseneeeeeseneaeessensaeesseesaeess 12 5 2 NETWORK nase ee leeren 12 5 3 E 625 CN Network Cable 4444000ssn nn nnnnnnnnennnnennennen nenne 12 5 4 Power Supply Connector 24244444444nennnnennnnnnnnennnnnnnennen nenne Old Equipment Disposal Appendix 14 1 Lifetime of PICMA Actuators 200u00442444nnennnnennnnennnnnnnennnnnnennnnne namen nenn 14 2 EC Declaration of Conformity nssernnnesennnnnnennnnnnnennnnnnnnnnnnnnnnnnnnnnnnnn nn PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ooococccnniniciconococccononancnnnananann nana ncnnnnnn 1 Symbols and Typographic Conventions oococinncccccnnococcnonononcnnnnnoncnnnnno cnn nro cnn rra rca 1 Other Applicable DOCUMENTS oooooooccccnccccoconononononononnnononccnnnnnnnnnnnnnnnnnnnnnannnnn nn nn nn nn tenannn nent 2 Do
26. ctive the E 625 must always be calibrated with each other the system will probably be less exact with the new stage than with the original stage If you want to continue using the new stage for your application you must calibrate the system again p 43 Control mode for Select p 40 the control mode analog or in computer the piezo voltage controlled mode according to the control source used for the is set incorrectly axis motion Only E 625 CR In the analog mode motion commands from the computer interface or from running macros trigger input and wave table output are ignored and can provoke an error message gt Remember the priority of the individual control sources see the user manual for the E 816 computer interface submodule The input voltage gt In the analog mode connect an analog signal to the ANALOG is not present or IN WTT SMB socket to command the axis motion exceeds the per If you generate the analog signal with a data acquisition board missible range using the LabVIEW analog drivers gt Check that the analog drivers and the data acquisition board are working correctly Incorrect Send the ERR command and check the error code this command or returns Please note that only the error code for the incorrect syntax communication master is displayed The user manual for the E 816 computer interface submodule contains a detailed description of the ERR command and the error codes E 625 Piezo Serv
27. e and the open loop operation servo mode OFF using the Settings DIP switch block 1 OFF up 2 ON down 3 OFF up 4 ON down Optional Connect the voltmeter to the SMB socket SENSOR MONITOR using the adapter cable Connect the power cord on the wide range input power supply to the power socket The E 625 is ready for operation when the green Power LED comes on Establish communication between the PC and the E 625 e g with the PIMikroMove Send the svo A 0 command A indicates the axis to ensure that the servo mode is switched off Increase the piezo voltage using the SVA command in increments of 10 volts from 0 V up to the value where the upper travel range limit for the stage is reached approximately Send the SVA A 0 command to set the piezo voltage to 0 V A indicates the axis Read the sensor signal Use the voltmeter on the SENSOR MONITOR SMB socket or Send the Pos A command A indicates the axis Adjust the Zero potentiometer using the trimmer adjustment tool until the sensor shows 10 of the travel range The voltmeter on the SENSOR MONITOR SMB socket shows 1 V or The response to the POS A command is approx 10 of the travel range in um 34 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 6 Start Up Was the Zero Point Adjustment Successful After the successful zero point adjustment the overflow LED wi
28. e protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the E 625 to the protective earth conductor before starting it up again If the E 625 is operated with an open case live parts are accessible Touching the live parts can result in serious injury or death from electric shock gt Only open the E 625 case when you are authorized and have the corresponding qualifications gt Before opening the case remove the E 625 from the power source by pulling the power plug gt When operating with an open case do not touch any components in the case aside from the adjustment elements described in this user manual Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 3 Organizational Measures User manual gt Always keep this user manual available by the E 625 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt Ifyou pass the E 625 on to other users also turn over this user manual as well as all other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing important information serious or fatal injury as well as property damage can result gt Only inst
29. e servo mode off immediately gt If oscillations occur during open loop operation stop the stage immediately E 625 Piezo Servo Controller PZ166E Version 1 7 0 27 6 Start Up P I INFORMATION The E 625 performance can be reduced directly after power on due to thermal instability gt Switch the E 625 on at least one hour before starting work gt If the device is not used but should remain switched on to ensure the temperature stability Make sure that the servo mode is switched off open loop operation and the piezo output voltage is set to 0 V Analog mode The input voltage for the target value is 0 V Computer controlled mode Corresponding commanding 6 2 Perform System Test gt During the first start up perform a system test under conditions typical to your application This ensures that the E 625 and the stage are optimally adapted to your conditions of use INFORMATION If you perform the system test in the computer controlled mode you will not require a function generator or a voltmeter You can then use the wave table output to generate a square wave signal to determine the resonant frequency and the settling behavior of the stage and read out the position and output voltage via query commands gt For more information see the user manual for the E 816 computer interface submodule Prerequisites v You have read and understood the General Notes on Start Up p 27 v The E 625 was installed
30. ection of motion Increase the input voltage on the ANALOG IN WTT SMB socket in increments of 1 volt from 0 V to 10 V and read the stage position from the external measurement device For the linearization of the negative direction of motion Reduce the input voltage stepwise from 10 V to 0 V Adjust the R144 p 46 ILS adjust potentiometer on the main board using the trimmer adjustment tool so that the stage position changes as linearly as possible as a function of the input voltage Adjusting the ILS adjust potentiometer also changes the sensor gain After setting the optimal linearity repeat the adjustment of the static sensor gain for closed loop operation p 63 Disconnect the E 625 from the power source by removing the power cord of the wide range input power supply from the power socket Close the E 625 66 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings Adjusting the Sensor Linearization in Computer Controlled Mode 1 For the linearization of the positive direction of motion Increase the target position using the MOV command stepwise from O um to the upper travel range limit of the stage while reading the stage position on the external measurement device For the linearization of the negative direction of motion Reduce the target position using the MOV A command stepwise from the upper travel range limit to O um 2 Adjust the R144 p
31. ective earth connector threaded bolt in the following order upon delivery of the E 625 starting from the case Safety washer Nut Flat washer Toothed washer Nut Suitable wrench Connecting the E 625 to the Protective Earth Conductor 1 2 If necessary fasten a suitable cable lug to the protective earth conductor Remove the outer nut from the protective earth connector on the rear panel of the E 625 threaded bolt p 10 marked with 20 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 5 Installation 3 Connect the protective earth conductor a Push the cable lug of the protective earth conductor onto the threaded bolt b Screw the nut onto the threaded bolt In this way the cable lug of the protective earth conductor is wedged between the toothed washer and the nut c Tighten the nut with at least three rotations and a torque of 1 2 Nm to 1 5 Nm 5 4 Connecting the Power Supply to the E 625 Prerequisites v The power cord is not connected to the power socket Tools and Accessories The included 15 V wide range input power supply for line voltages between 100 and 240 volts alternating current voltage at 50 or 60 Hz Alternatively Sufficiently dimensioned power supply Barrel to Switchcraft adapter for the power supply KO50B0002 in scope of delivery a Alternatively Sufficiently dimensioned adapter Included po
32. eeeeeeenteeeeeeneeeeeeaaes 1 1 2 Symbols and Typographic Conventions cccceeeceeeeeeeeeeeeeeeeeeeeeeenaeeeeeenaeeeeeeaaes 1 1 3 Other Applicable DOCUMENIS cececeecceceeeeeeeeeceaeceeeeeeesecaeaeeeeeeeseeeenesaeeeeeess 2 1 4 Downloading Manuals escicn 3 2 Safety 5 2 1 intended USE WERIOBRPRUNEERPRONEERFFEITTEUREGEEFERFUREETFEREGELTEFFRFESTTERBOBELEFFERTELTEIE aE aa 5 2 2 General Safety Instructions ooooonncccionniccconnncccconnrnncccnn nr cnn 5 2 3 Organizational Measures 4444400onsnnsnnnnnnnnnnennnnnnnnnnnnnnnnnnnnennnnnn sonen nnnn nn 7 3 Product Description 9 3 1 Features and Applications 4 0ssrs4sesnnnnnnnennnnnnennnnnnnnannnnnnnnnnennnnannnnn nenn 9 3 2 Model Overview u ouceennnsnssennnnssnennnnnnennnnnnnnnnennnnennnnernnnnnnnanennnnn nenne sennnnr nn 10 3 3 NS nenne EEEn aene 10 3 3 1 Front Panel 222444444400snnnnennnnnnnnennnnnnnnnnnnnnnennnnnnnennen nenne 10 3 3 2 Rear Panel 2444444400040Hnnnnnnnnnnennnnnnnnnnnnnnnennnnnnnennnnn nenne 13 3 4 Scope of Delivery 0uss2s4nnennnsnnnnnnsnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn ann 14 3 5 Accessories MEE 15 4 Unpacking 17 5 Installation 19 5 1 General Notes on Installation 44444444440Rennnnnnnnnnnnnnnnnnnnnnnnnnnn nennen 19 5 2 Ensuring Ventilati n 2 4 een nein 19 5 3 Connecting the E 625 to the Protective Earth Conduc
33. ems with several capacitive sensors the master slave switch makes the master slave settings The master slave switch is located on the printed circuit board which is soldered vertically on the main board see the circle in the following figure near the R 143 gain potentiometer Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings R 144 ILS R 143 Gain Master Slave Figure 9 Master slave switch in default setting master 8 3 3 Potentiometers Potentiometers to adapt settings are located at the following places p 46 R143 for the sensor gain Main board R144 for the linearization ILS Main board Potentiometers for setting the notch filter P4 and the P I controller P2 P3 E 802 servo control submodule see the user manual for the servo control submodule 8 3 4 E 802 Servo Control Submodule The E 802 servo control submodule contains the slew rate limiter the notch filter and the servo loop In closed loop operation the servo loop of the E 802 servo control submodule determines the piezo voltage on the basis of the target position and the feedback from the position sensor in the stage This uses an analog proportional integral P I algorithm The E 802 servo control submodule is explained in detail in a separate user manual E 625 Piezo Servo Controller PZ166E Version 1 7 0 49 8 Adjustment of Internal Settings P I 8 4 Synchroni
34. ents Connect the power cord on the wide range input power supply to the power socket The E 625 is ready for operation when the green Power LED comes on Increase the input voltage on the ANALOG IN WTT SMB socket in increments of 1 volt from O V up to the value where the upper travel range limit for the stage is reached approximately Reduce the input voltage on the ANALOG IN WTT SMB socket to 0 V Read the sensor signal on the SENSOR MONITOR SMB socket using the voltmeter If necessary perform p 32 a zero point adjustment of the sensor 60 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 10 Increase the input voltage on the ANALOG IN WTT SMB socket slowly up to the value where the external measurement device shows the nominal displacement of the stage upper travel range limit 11 Adjust the R143 on the main board p 46 sensor gain potentiometer on the main board with the trimmer adjustment tool until the until the voltage on the SENSOR MONITOR SMB socket is 10 V 12 If necessary repeat the last steps until stable values are displayed on the measurement devices Do you want to use your system in closed loop operation gt gt If so For the highest positioning accuracy in closed loop operation adjust p 63 the static gain factor If not Disconnect the E 625 from the power source by pulling the power cord of the wide
35. erpreted as voltage or as position see below The input voltage should always be in the range of 2 to 12 V The range can be expanded to 3 to 13 V However this can shorten p 89 the lifetime of the piezo actuator in the stage and causes the overflow LED to light up The input voltage can also be a computer generated analog signal e g from a data acquisition board You can use the PI LabVIEW analog driver from the E 816 CD to generate the analog signal see the driver documentation on the E 816 CD Computer ANALOG IN WTT is used as the trigger input signal for the wave table controlled mode _ output and triggered motion active HIGH LOW 0 to 0 5 V HIGH 3 0 to only E 625 CR 5 0 V maximum 10 V max frequency 400 Hz min pulse width 5 us See the user manual for the E 816 computer interface submodule SENSOR MONITOR SMB socket coaxial output line with grounded outer conductor and 0 to 10 V on the inner conductor Filtered and converted sensor output value with O to 10 V for the nominal travel range The output impedance is 10 KQ RS 232 only E 625 CR Sub D panel plug 9 pin male for the serial connection to the PC See the user manual for the E 816 computer interface submodule USB Socket only E 625 CR Universal serial bus interface USB mini B m socket for the serial connection to the PC See the user manual for the E 816 computer interface submodule On Target LED Green On target signal fro
36. ervo Mode uu nusunnnnnnnnnnnnnnnnnnnnnnnnnnnn nenn 40 Adjustment of Intemal Settings 43 8 1 General Notes on the Adjustment of Settings 44442s4400nsnsnnnnnnnnnnnennn nn 43 8 2 Opening the Case un anime 45 8 3 Adjustment Elements Inside the Case sunsesnnnnnennnnnnnnnnnnennnn nenn 46 8 3 1 JUN Pri da td 47 8 3 2 SO u een 48 8 3 3 Potentiometers italian a a 49 8 3 4 E 802 Servo Control Submodule oococcconinncccinnnococcnononcccnnnanccnnnnnncnnno 49 8 4 Synchronizing the SensSOrS niara nn 50 8 5 Adjusting Notch Filter and P I Controller 2u0snnnnnnnnnnnennnnnnnennnnn 52 8 5 1 Adjusting the Notch Filter 20 44440004442400RR nenn on nennen nn 53 8 5 2 Setting the P I Controller in Analog Mode su nennen 56 8 6 Calibrating the Stage Displacemernt 444ussssnnnnnnnnnnnnnnnnnnnnnnnnn nenne 58 8 6 1 Adjusting the Sensor Range 444ssssnnnnennsnnnnnnnnnnnnnnennn nn 59 8 6 2 Adjusting the Static Sensor Gain for Closed Loop Operation 63 8 6 3 Adjusting the Sensor Linearization ss4244444nsn nennen 66 8 6 4 Digital Corrections only E 625 CR 2204srs nennen nn 67 PIEZO NANO POSITIONING WWW PI WS 10 11 12 13 14 Maintenance 9 1 Cleaning the E 625 main 9 2 Updating Firmware EE klei Troubleshooting Customer Service Technical Data 12 1 Spe
37. f the system performance INFORMATION The calibration of the stage displacement applies only to the control mode analog or computer controlled mode in which the settings were made In the other control modes you must expect a deviation of 1 With E 625 models that can be operated computer controlled E 625 CR Pl performs the calibration in the computer controlled mode by default 58 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 8 6 1 Adjusting the Sensor Range The sensor range adjustment ensures that the sensor reports the nominal displacement position upper travel range limit when the stage has reached the nominal displacement The adjustment is made in open loop operation servo mode OFF INFORMATION The piezo voltage required to deflect the stage to the upper travel range limit is not exactly 100 V but lies in the range of 85 to 105 V Prerequisites v You have read and understood the General Notes on Start Up p 27 Y Only for the computer controlled mode You have read and understood the user manual for the E 816 computer interface submodule The required software has been installed on the PC from the E 816 CD The E 625 was installed p 19 properly You have installed the stage in the same manner as it will also be used in your application corresponding load and alignment v The E 625 is switched off i e the w
38. following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 Safety Low Voltage Directive EN 61010 1 2010 E 625 Piezo Servo Controller PZ166E Version 1 7 0 93
39. hanges 9 If necessary repeat the last steps until stable values are displayed on the measurement devices Is the non linearity of the sensor signal more than 0 05 of the nominal travel range gt If so Linearize the sensor signal p 66 gt If not Disconnect the E 625 from the power source by pulling the power cord of the wide range input power supply from the power socket and close the E 625 E 625 Piezo Servo Controller PZ166E Version 1 7 0 65 8 Adjustment of Internal Settings P I 8 6 3 Adjusting the Sensor Linearization The sensor linearization should minimize the non linear contributions of the 2nd order to the sensor signal INFORMATION The sensor linearization can only be optimized for one direction of motion Pl by default makes the optimization for the positive direction of motion i e for the motion from the zero position to the upper travel range limit Prerequisites Y Y Y You have correctly adjusted the sensor range p 59 You have correctly adjusted the static sensor gain for the closed loop operation p 63 You have not changed anything on the system set up that was used for the adjustment of the sensor range and the static sensor gain All devices are still ready for operation The servo mode is switched on Tools and Accessories As for the adjustment of the sensor range p 59 Adjusting the Sensor Linearization in Analog Mode 1 For the linearization of the positive dir
40. icates the axis If necessary perform p 32 a zero point adjustment of the sensor Send the SVA A 90 command to set the piezo voltage to 90 V Resent SVR A1 to slowly increase the piezo voltage until the external measurement device shows the nominal displacement of the stage upper travel range limit Adjust the R143 on the main board p 46 sensor gain potentiometer with the trimmer adjustment tool until the sensor shows the nominal displacement The voltmeter on the SENSOR MONITOR SMB socket shows 10 V or The response to the POS A command shows the upper travel range limit in um If necessary repeat the last steps until stable values are displayed on the measurement devices Do you want to use your system in closed loop operation gt If so For the highest positioning accuracy in closed loop operation adjust p 63 the static static gain factor If not Disconnect the E 625 from the power source by pulling the power cord of the wide range input power supply from the power socket and close the E 625 62 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 8 6 2 Adjusting the Static Sensor Gain for Closed Loop Operation The adjustment of the static sensor gain ensures that in closed loop operation the stage moves precisely to the upper travel range limit when this position is commanded The setting is made in closed loop operat
41. ice so that it shows the zero position exactly Send the MOV A pos command whereby pos corresponds to the upper travel range limit in um Check the stage position measured by the sensor a Sendthe Pos A command A indicates the axis The response must show the upper travel range in um or b Read the sensor signal on the SENSOR MONITOR SMB socket using the voltmeter It must be exactly 10 0000 V 64 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 6 Ifthe sensor signal deviates from the upper travel range limit the response to the POS A command does not correspond to the upper travel range limit or the sensor signal on the SENSOR MONITOR SMB socket is not 10 0000 V Adjust the GAIN fine adjust potentiometer P6 on the E 802 55 servo control submodule using the trimmer adjustment tool until the sensor signal corresponds exactly to the upper travel range limit see the E 802 user manual 7 Read the measured value on the external measurement device The value must correspond exactly to the upper travel range limit 8 If the measurement value on the external measurement device deviates from the upper travel range limit Adjust the R143 on the main board p 46 sensor gain potentiometer on the main board using the trimmer adjustment tool until the external measurement device shows exactly the upper travel range limit the stage displacement c
42. ide range input power supply is not connected to the power socket over the power cord v You have opened the E 625 p 45 Tools and Accessories Only in analog mode High precision analog signal source p 22 SMB BNC adapter cable in scope of delivery Only in computer controlled mode PC with RS 232 or USB interface for commanding and installed software from the E 816 PC E 625 Piezo Servo Controller PZ166E Version 1 7 0 59 8 Adjustment of Internal Settings P I High precision voltmeter p 23 necessary in analog mode not necessary but helpful in computer controlled mode only E 625 CR If the voltmeter is used an additional SMB BNC adapter cable is necessary in scope of delivery High precision external measurement device e g interferometer to measure the stage displacement Trimmer adjustment tool Adjusting the Sensor Range in Analog Mode 1 Select analog mode and open loop operation servo mode OFF using the Settings DIP switch block 1 ON down 2 OFF up 3 OFF up 4 OFF up Connect the signal source to the ANALOG IN WTT SMB socket using an adapter cable Connect the voltmeter to the SENSOR MONITOR SMB socket using the adapter cable Install the external measurement device so that it can measure the stage displacement If the measurement device shows a value other than zero note the offset and subtract this from the values read in the following measurem
43. ion servo mode ON Prerequisites v You have adjusted the sensor range correctly p 59 v You have not changed anything on the system set up that was used for the adjustment of the sensor range All devices are still ready for operation v You have read and understood the user manual for the E 802 55 servo control submodule Tools and Accessories As for the adjustment of the sensor range p 59 Adjusting the Static Sensor Gain in Analog Mode 1 Switch the servo mode on by moving switch 3 on the Settings DIP switch block to ON down If an oscillation stage humming can be heard after switching on a Switch the servo mode off immediately b Optimize the notch filter frequency and the P I controller settings in the E 625 p 52 c Make sure that the servo mode is switched on 2 Apply 0 0000 V input voltage to the ANALOG IN WTT SMB socket 3 Adjust the external measurement device so that it exactly shows the zero position 4 Apply exactly 10 0000 V input voltage to the ANALOG IN WTT SMB socket 5 Check the stage position a Read the sensor signal on the SENSOR MONITOR SMB socket using the voltmeter It must be exactly 10 0000 V b Read the measured value on the external measurement device The value must correspond exactly to the upper travel range limit 6 If the sensor signal on the SENSOR MONITOR SMB socket deviates from 10 0000 V Adjust the GAIN fine adjust potentiometer P6 on the E 802 55 se
44. itching on the servo mode a Switch the servo mode off immediately b Adjust the P term for the P I controller by turning the P2 potentiometer on the E 802 55 servo control submodule with the trimmer adjustment tool fully counter clockwise Typically you will hear a click c Switch the servo mode on again 2 Generate a 5 V square wave signal peak peak with 5 to 10 Hz using the function generator 3 Observe the stage step response on the oscilloscope sensor monitor signal over time 4 Alternatingly turn P2 and P3 I term potentiometers on the E 802 55 servo control submodule using the trimmer adjustment tool until the step response is optimal minimal overshot settling time not too long 5 Disconnect the E 625 from the power source by removing the power cord of the wide range input power supply from the power socket 6 Close the E 625 The two figures below have examples for step response measurements with a digital storage oscilloscope for improvement of the P I controller The input voltage and the sensor signal are shown 56 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings Tok Run F Trig d 16 8ms jo 2 05ms ch2 Pk Pk 1 07 Y Cn 200mV ERE 500mV M 10 0ms rn chi 7 320mv 21 Oct 2010 ivy 11 1500ms 13 21 47 Figure 13 Closed loop operation P term set too large strong overshoot Tok tun j
45. ive parts can result in serious injury or death from electric shock gt Only open the E 625 case when you are authorized and have the corresponding qualifications gt Before opening the case remove the E 625 from the power source by pulling the power plug gt When operating with an open case do not touch any components in the case aside from the adjustment elements described in this user manual E 625 Piezo Servo Controller PZ166E Version 1 7 0 43 8 Adjustment of Internal Settings P I NOTICE Damage to the E 625 from electrostatics Sh The E 625 contains electrostatic sensitive devices that can be damaged if handled improperly gt Wear an antistatic wrist strap if you have to touch electrostatic components in the E 625 gt If there is no antistatic wrist strap available Before touching electronic components quickly touch a conducting grounded object gt Make sure that no conductive parts such as metallic dust metal shavings broken pencil leads loose screws have contact with the PCB tracks NOTICE Loss of system settings when internal components are adjusted When the system settings are changed the original settings will be lost Unfavorable settings can cause stage oscillation worse settling behavior and reduced positioning accuracy gt Only change the internal system settings for the E 625 if necessary gt Contact our customer service department p 75 if you are not sure
46. k with 2 to 5 Hz using the funciton generator d Read the stage resonance frequency on the oscilloscope Y t or FFT diagram If the resonance frequency is not dampened sufficiently peak too high e Open the E 625 p 45 f Adjust p 52 the notch filter accordingly on the E 802 servo control submodule Determine the stage position at O V input voltage a Remove the oscilloscope from the SENSOR MONITOR SMB socket E 625 Piezo Servo Controller PZ166E Version 1 7 0 29 6 Start Up PI b Connect the voltmeter to the SENSOR MONITOR SMB socket using the adapter cable c Use the funtion generator DC mode to increase the input voltage on the ANALOG IN WTT SMB socket in increments of 1 volt from O V up to the value where the upper travel range limit for the stage is reached approximately d Reduce the input voltage on the ANALOG IN WTT SMB socket to 0 V e Read the sensor signal on the SENSOR MONITOR SMB socket using the voltmeter If with O V input voltage the sensor monitor signal is larger than 1 V 1 V corresponds to 10 of the travel range f Perform p 32 a zero point adjustment of the sensor When the system test in open loop operation was successful or if you have adapted the notch filter and or zero point 5 Switch the servo mode on by moving switch 3 on the Settings DIP switch block to ON down If an oscillation stage humming can be heard after switching on a Switch the servo mode
47. ll no longer light up in closed loop operation When the overflow LED light is on constantly in spite of the zero point adjustment there can be a hardware error INFORMATION To prevent an overflow in open loop operation gt Do not exceed the recommended input voltage range of 2 to 12 V analog mode gt Do not command any piezo voltage outside of the recommended range of 20 to 120 V computer controlled mode E 625 Piezo Servo Controller PZ166E Version 1 7 0 35 PIEZO NANO POSITIONING WWW PI WS 7 Operation 7 Operation In this Chapter General Notes on OperatiON ooooooccccnnnncinonoconcccnnnccnonannnnncnnnnncnnnnn nn nnnnnnnnnnnnnnnnnnnnnnnnnnnns 37 Operating ModeS iii li di a tides 38 Selecting the Operating Mode oocoonocccccnnocccccononcccnononcnccnno conc nano cnn n cano nn nc rnnn nn nn cnnnncnrnnnn 40 7 1 General Notes on Operation DANGER A Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the E 625 in the case of malfunction or failure of the system If touch voltages exist touching the E 625 can result in serious injury or death from electric shock gt Connect the E 625 to a protective earth conductor before start up p 20 gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed tempo
48. lly correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany E 625 Piezo Servo Controller PZ166E Version 1 7 0 87 PIEZO NANO POSITIONING WWW PI WS 14 Appendix 14 Appendix In this Chapter Lifetime of PICMA Actuators u nesensnnennennnnnnnnnnnnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nn 89 EC Declaration of Conformity esras EAN AAAA A EANAN 93 14 1 Lifetime of PICMA Actuators The lifetime of a PICMA piezo actuator can be influenced by the following factors Applied voltage Temperature Relative humidity The following diagrams show how the individual factors influence the lifetime of the actuator Lifetime Factor Au 4 deldddisi ds EERE LSS sipigdios dd GbE Figure 20 Dependency of the mean time between failure MTTF of a PICMA actuator on the applied voltage E 625 Piezo Servo Controller PZ166E Version 1 7 0 89 I 14 Appendix lt Figure 21 Dependency of the mean time between failure MTTF of a PICMA actuator on the ambient temperature Lifetime Factor Ax eben EEE ESOS Herten H H H i H H i pi H H 7 i H i H gt t Figure 22 Dependency of the mean time betwee
49. ltage can also be a computer generated analog signal e g from a data acquisition board You can use the Pl LabVIEW analog drivers from the E 816 CD to generate the analog signal These drivers also include the HyperBit drivers that enable a higher position resolution than that of the data acquisition board The newest Pl LabVIEW analog drivers can be downloaded from the Pl website Installation instructions are in the Technical Note E500T0011 and on the E 816 CD For information on the Hyper Bit Upgrade please contact our customer service department p 75 Computer Controlled Mode only E 625 CR The E 816 computer interface submodule that is integrated into the E 625 CR controls the generation of the piezo voltage The target value position or piezo voltage depending on the servo mode can be set by commands sent from the PC or from a running macro Furthermore the motion of the stage can also be triggered by wave table output or a trigger input on the ANALOG IN WTT SMB socket INFORMATION The E 816 computer interface submodule accepts all commands in analog mode as well as in computer controlled mode The only difference between the two control modes is in the selection of the control source for the piezo voltage 38 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 7 Operation INFORMATION Several devices can be networked together and commanded from one single RS 232 or USB interfa
50. lter with which the oscillations at the mechanical resonance frequency can be suppressed in dynamic operation Adjusting the P I controller improves the dynamic properties of the system overshoot and settling time The goal is a compromise between the best stability avoid stage oscillation and the highest speed The optimum P I controller settings depends on your application and your requirements gt Ifthe load to be moved has changed or PI had no information about your system when shipped perform the following steps immediately in sequence 1 Adjust p 52 the notch filter 2 Improve the settings of the P I controller p 56 All adjustment elements are located on the E 802 55 servo control submodule INFORMATION If the X4 jumper on the main board is in the default setting p 47 the notch filter and the slew rate limiter for the piezo voltage will be active when the servo mode is switched off Readjusting the notch filter frequency in open loop operation can lead to a change in the piezo voltage of up to 5 INFORMATION If you make the settings in the computer controlled mode you will not require a function generator You can then use the wave table output to generate a square wave signal gt For more information see the user manual for the E 816 computer interface submodule 52 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 8
51. m E 802 servo control submodule When the On Target LED comes on the distance from the target position is less than 0 19 of the travel range The signal TTL active low is also applied to pin 6 of the Network sub D socket on the rear panel of the E 625 p 84 E 625 Piezo Servo Controller PZ166E Version 1 7 0 11 3 Product Description P I 12 Overflow LED Yellow When the Overflow LED comes on the amplifier is near its range limit piezo voltage outside the range of 20 V to 120 V When the Overflow LED comes on in closed loop operation servo mode ON a zero point adjustment p 32 can be necessary Power LED Green When the Power LED is lit permanently the E 625 has been switched on Settings DIP Switch Block 1 left ON down Signal on ANALOG IN WTT used as the analog input voltage for specifying the target value OFF up Signal on ANALOG IN WTT not used as the analog input voltage for specifying the target value ON down Target value specified by the E 816 computer interface submodule OFF up Target value not specified by the E 816 computer interface submodule ON down Servo mode switched on closed loop operation OFF up Servo mode switched off open loop operation Only E 625 CR The servo mode can be switched on on the E 816 computer interface submodule with the SVO command ON down Signal on ANALOG IN WTT used as the trigger for the wave table output or triggered motion OFF up
52. measurement device with the necessary input capacitance SMB BNC adapter cable in scope of delivery Connecting the Measurement Device gt Use the adapter cable to connect the measurement device to the SENSOR MONITOR SMB socket on the E 625 E 625 Piezo Servo Controller PZ166E Version 1 7 0 23 5 Installation P I 5 8 Connect a PC for the Computer Controlled Mode only E 625 CR INFORMATION In the computer controlled mode p 38 the target value is given among other things by motion commands sent from the PC to the E 625 CR via the RS 232 or USB interface These commands are processed by the E 816 computer interface submodule on the E 625 CR INFORMATION Several devices can be interconnected and commanded from one single RS 232 or USB interface on the PC E 625 SR or E 665 piezo servo controllers can also be connected to this network 5 8 1 Connect the E 625 CR to the PC Prerequisites v You have read and understood the user manual for the E 816 computer interface submodule v The required software has been installed on the PC from the E 816 CD Tools and Accessories PC with a Windows or Linux operating system Null modem cable or USB cable USB A m USB mini B m for the connection to the PC cable in the scope of delivery Connecting the E 625 CR to the PC gt Connect the RS 232 socket using the null modem cable or the USB socket using the USB cable to the PC 24 Version 1 7 0 PZ166E E 625 Piezo Servo
53. ments The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website Component E 802 Servo Control Submodule PZ150E User Manual Analog Controller LabView Driver Library PZ181E Software Manual Only with E 625 CR E 816 Computer Interface Submodule INFORMATION The E 625 S0 and E 625 SR models for operation with strain gauge sensors are described in a separate manual PZ167E 2 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 75 The current versions of the manuals are found on our website To download a manual proceed as follows 1 2 3 Open the website http www pi portal ws Click Downloads Click the corresponding category e g E Piezo Drivers amp Nanopositioning Controllers Click the corresponding product code e g E 625 An overview of the available file types is shown for the selected product If 0 Files is shown in the Documents line log in as follows to display and download the documents a Insert the product CD in the corresponding PC drive b Open the Manuals directory c Open the Release News e g E 816_Rele
54. mplifier can be used in closed loop operation Prevent the piezo actuators from damage In open loop operation the stage displacement with 0 V piezo voltage should already be about 10 of the travel range sensor monitor signal is 1 V Then the average applied voltage is reduced which lengthens the lifetime of the piezo actuator in the stage without reducing the nominal travel range INFORMATION The physical zero position of the stage in closed loop operation is changed by the zero point adjustment of the sensor Prerequisites v You have read and understood the General Notes on Start Up p 27 v Only for the computer controlled mode You have read and understood the user manual for the E 816 computer interface submodule The required software has been installed on the PC from the E 816 CD v You have installed the stage in the same manner as it will also be used in your application corresponding load and alignment The E 625 was installed p 19 properly The E 625 is switched off e the wide range input power supply is not connected to the power socket over the power cord Tools and Accessories Only in analog mode Suitable analog signal source p 22 SMB BNC adapter cable in scope of delivery 32 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 6 Start Up Only in computer controlled mode PC with RS 232 or USB interface for commanding and in
55. n a DC offset potentiometer not in scope of delivery is connected DC offset potentiometer is deactivated Jumper JP101 to JP106 The jumpers JP101 to JP106 are used to adjust the sensor range The figure below shows the jumper layout on the main board p 46 3 3 900 000 F 335 TEHE g p Figure 7 Settings for the sensor range jumpers The extension factors are set according to in the connected stages If the stage is not known to PI the extension factor of 1 0 is set E 625 Piezo Servo Controller PZ166E Version 1 7 0 47 8 Adjustment of Internal Settings P I Jumper JP107 JP109 The jumpers JP107 to JP109 shift the voltage range on the sensor processing circuitry These must remain set for the use with an E 802 servo control submodule positive polarity O to 10 V default settings Position of the Jurrper P JP107 ol Polarity of Output Using with Pl s position Using as a position Typical Application control electronics detector Special application Position of Jumpers JP108 and JP109 Voltage range of output Figure 8 Settings for the sensor evaluation range 8 3 2 Switches 48 Switches on the E 802 55 Servo Control Submodule The mini DIP switches and the S1 switch for the notch filter setting of the E 802 55 servo control submodule are described in the E 802 servo control submodule user manual Master Slave Switch for the Sensor Synchronization In syst
56. n failure MTTF of a PICMA actuator on the relative humidity E 625 Piezo Servo Controller PZ166E 1 7 0 Version 90 PIEZO NANO POSITIONING WWW PI WS 14 Appendix The calculated lifetime in hours results from the product of the values for the individual contributions MTTF Ay Ar x Af Au Contribution of the applied voltage Ar Contribution of the ambient temperature Ar Contribution of the relative humidity The contribution of the applied voltage is especially important for applications The lifetime increases exponentially with decreasing voltage The recommended maximum range for the input voltage of the E 625 is therefore 2 to 12 V This results in a piezo voltage range of 20 to 120 V in open loop operation The input voltage range can be expanded from 3 to 13 V the piezo voltage is then in the range of 30 to 130 V which however reduces the lifetime of the actuator Example see markings in the diagrams Applied voltage 100 VDC gt Ay 75 Ambient temperature 45 C gt Ar 100 Relative humidity 715 gt Af 14 MTTF 14 x 75 x 100 h 105000 h approx 12 years Details are located in the Pl catalog under Tutorials Piezoelectrics in Positioning E 625 Piezo Servo Controller PZ166E Version 1 7 0 91 PIEZO NANO POSITIONING WWW PI WS 14 Appendix 14 2 EC Declaration of Conformity For the E 625 an EC Declaration of Conformity has been issued in accordance with the
57. o Controller PZ166E Version 1 7 0 71 10 Troubleshooting PI Problem Possible Causes Communica tion with the controller fails 72 Incorrect axis commanded gt Make sure that the correct axis identifier is used and that the commanded axis belongs to the correct stage An axis identifier is even required on systems with only one axis Incorrect gt Use the SPA command to check the E 816 computer configuration interface submodule parameter settings The E 625 voltage output is deactivated The wrong communication cable is used or it is defective The communi cation interface is not configured correctly Version 1 7 0 When the internal temperature reaches 275 C the E 625 voltage output is deactivated and the stage stops moving When the internal temperature then drops to lt 60 C the voltage output is switched on again automatically gt Ensure sufficient ventilation at the place of installation p 19 gt When using the wave table output reduce the frequency and or the amplitude and or the output duration Check the cable The RS 232 connection requires a null modem cable Check whether the cable works on a fault free system When using the RS 232 interface gt Check the port settings and the baud rate can be set with the BDR command The serial port on the E 816 computer interface submodule is set as follows 115200 baud 8 data bits 1 stop bit No parity RTS CTS gt Use a PC with
58. off immediately b Open the E 625 p 45 c Adjust the P term for the P I controller by turning the P2 potentiometer on the E 802 55 servo control submodule p 46 with the trimmer adjustment tool fully counterclockwise Typically you will hear a click d Reconnect the power cord on the wide range input power supply to the power socket e Switch the servo mode on again Check the notch filter setting in closed loop operation a Measure the stage resonance frequency again see step 3 b If necessary improve the setting of the notch filter on the E 802 55 servo control submodule p 52 Determine the settling behavior of the stage in closed loop operation a Make sure that the servo mode is switched on switch 3 on the Settings DIP switch block to ON down b Generate a 1 V square wave signal peak peak with 2 to 5 Hz using the function generator c Observe the stage step response on the oscilloscope sensor monitor signal over time 30 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 6 Start Up If the sensor monitor signal shows an unsatisfactory adjustment of the P I controller for example overshoot or settling time too long d Open the E 625 p 45 e Adjust the P term and the l term of the controller with the corresponding adjustment elements p 52 until the stage shows the optimal settling behavior for your application 8 When the case is open
59. on values in an internal table and output these with a trigger This makes it possible to reliably repeat and simply control motion profiles General Command Set GCS For uniform control of nano and micropositioning systems the universal command set from PI is used With GCS control is independent of the hardware used so that various positioning systems can be controlled together or new systems can be used with minimum programming effort E 625 Piezo Servo Controller PZ166E Version 1 7 0 9 3 Product Description P I 3 2 Model Overview There are 2 standard versions of the E 625 They differ in regards to the available control modes and the possibilities for use in network operation A AAA Piezo servo controller single channel for capacitive sensors analog mode and computer controlled mode network operation of several devices E 625 C0 Piezo servo controller single channel for capacitive sensors only analog mode no network operation 3 3 Product View 3 3 1 Front Panel Figure 1 E 625 CR front panel ANALOG IN WTT SMB socket coaxial input line grounded on the outer conductor The use depends on the control mode which is set up with the Settings DIP switch block see below 10 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 3 Product Description Analog mode ANALOG IN WTT is used as the input voltage for the target value depending on the servo mode int
60. p 19 properly v You have installed the stage in the same manner as it will be used in your application corresponding load and alignment v The E 625 is switched off i e the wide range input power supply is not connected to the power socket over the power cord v Have the user manual for the E 802 computer interface submodule within reach 28 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 6 Start Up Tools and Accessories Oscilloscope recommended Digital storage oscilloscope p 23 Function generator for the output of a 1 V square wave signal with 2 to 5 Hz Voltmeter 2 SMB BNC adapter cables in scope of delivery Only if the case needs to be opened for the adjustment of internal settings Phillips head screwdriver size PH1 Timmer alignment tool Performing a System Test in Analog Mode 1 Select analog mode and open loop operation servo mode OFF using the Settings DIP switch block 1 ON down 2 OFF up 3 OFF up 4 OFF up Connect the power cord on the wide range input power supply to the power socket The E 625 is ready for operation when the green Power LED comes on Determine the stage resonance frequency a Connect the function generator to the ANALOG IN WTT SMB socket using an adapter cable b Connect the oscilloscope to the SENSOR MONITOR SMB socket using an adapter cable c Generate a 1 V square wave signal peak pea
61. p 56 The two figures below have examples for resonance frequency measurements with a digital storage oscilloscope They show the input voltage and the sensor signal as well as the FFT Fast Fourier Transform of the sensor signal 54 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings Tek Run M 20 8 dB 27 6 dB 119 H2 120 Hz ch2 Pk Pk 1 06 V 21 Oct 2010 BE 10 0 dB 62 5 H2 fi y 11 1500ms 12 58 41 Figure 11 Open loop operation notch filter not adjusted first resonant frequency at 119 Hz Tek Run my y 46 8 dB 51 8 dB 119 Hz 120 Hz ch2 Pk Pk 1 06 V 21 Oct 2010 BE 10 0 dB 62 5 H2 fi y 11 1500ms 13 17 43 Figure 12 Open loop operation first resonant frequency damped by the notch filter E 625 Piezo Servo Controller PZ166E Version 1 7 0 55 8 Adjustment of Internal Settings P I 8 5 2 Setting the P I Controller in Analog Mode Prerequisites v You have adjusted the notch filter correctly p 52 v You have not changed anything on the system set up that was used for the adjustment of the notch filter v All devices are still ready for operation Tools and Accessories As for the adjustment of the notch filter p 52 Setting the P I Controller 1 Switch the servo mode on by moving switch 3 on the Settings DIP switch block to ON down If an oscillation stage humming can be heard after sw
62. ply 7 r Ivo Dein qe 3 1 sw 3OFF up open O X1 2 Vee O 39 2 GND 4 i sage X1 1 Vec O Network 1 2 amp 5 o E Make PZT Ext X18 Analog In SMB Figure 18 E 625 C0 block diagram S1 sw 4 S1 sw 1 S1 sw 2 and S1 sw 3 refer to the switches 4 1 2 and 3 on the Settings DIP switch block on the E 625 front panel The pin numbers 2a to 32c refer to an internal 32 pin connection and are only used for informational purposes E 625 Piezo Servo Controller PZ166E Version 1 7 0 83 12 Technical Data P I 12 5 Pin Assignment 12 5 1 PZT amp SENSOR Special Sub D Mix 7W2 socket for the transmission of the piezo voltage and the sensor signals PZT output 30 to 130 V Sensor probe om ID chip not supported 2 OO 1 2 AGND target and ID ground 3 PZT ground connected with case 4 Not connected Sensor target 000983 12 5 2 Network 84 E a E Sub D socket 9 pin female SCL Pc network operation not for E 625 C0 SDA re network operation not for E 625 C0 On target signal TTL active low Shows that the distance from the target position is less than 0 19 of the travel range 100 kHz sensor synchronization 3 2 MHz sensor synchronization Not connected The SCL and SDA bus connections are limited to a maximum length of 1 m and a maximum capacitance of 400 pF N The E 625 CN network cable is available for the operation of several E 625 in a ne
63. pply is not connected to the power socket over the power cord v The piezo servo controller that serves as the communication master is connected to the PC over the RS 232 or USB connection Y For the E 625 CR to be interlinked and all other piezo server controllers for capacitive sensors to be added to the network e g E 665 CR the master slave setting has been made for the sensor synchronization see Synchronizing the Sensors p 50 or the E 665 user manual E 625 Piezo Servo Controller PZ166E Version 1 7 0 25 5 Installation P I Tools and Accessories One E 625 CN network cable for each device to be connected to the network available as an optional accessory p 15 Alternatively Suitable connection cables with the same pin assignment as the E 625 CN p 85 Interlinking the Controllers Controller 1 Controller 2 Controller 3 etc Figure 4 Interlinking via E 625 CN network cable gt Interlink the Network sockets on the rear panels of the cases using the E 625 CN cables see figure or other suitable connection cables The interlinking can be in a series or as a star The E 625 CN cables have Sub D special connectors with which several E 625 CN cables can be plugged into one E 625 The communication master can be selected as desired Details on the network operation e g for setting the channel names are located in the user manual for the E 816 computer interface submodule 26 Version 1 7 0
64. rarily e g in the case of modifications reconnect the E 625 to the protective earth conductor before starting it up again NOTICE Damage to the piezo ceramic The constant application of high voltage to the piezo actuators in the stage can lead to leakage currents and flashovers that destroy the ceramic If the device is not used but should remain switched on to ensure the temperature stability gt Switch the servo mode off open loop operation gt Set the piezo voltage to 0 V Analog mode The input voltage for the target value is O V Computer controlled mode Corresponding commanding E 625 Piezo Servo Controller PZ166E Version 1 7 0 37 7 Operation P I 7 2 Operating Modes 7 2 1 Control Mode The E 625 CR and the E 625 C0 can be run in analog mode Alternatively the E 625 CR can be run in computer controlled mode The active control mode determines the applicable control sources for the output voltage Analog Mode The piezo voltage depends on the input voltage applied to the ANALOG IN WTT SMB socket Depending on the servo mode the input voltage is interpreted p 39 as a direct specification for the piezo voltage or as a specification for the target position The recommended range for the input voltage is 2 to 12 V The range can be extended to 3 to 13 V However this can shorten p 89 the lifetime of the piezo actuator in the stage and causes the overflow LED to light up The input vo
65. rs are set accordingly the slew rate limiter and the notch filter remain active p 47 The sensor electronics works independent of the servo mode and if a sensor is connected reports the current position of the stage even in open loop operation Since the stages even of the same model differ slightly the voltage required to achieve nominal displacement differs E 625 Piezo Servo Controller PZ166E Version 1 7 0 39 7 Operation P I 7 3 Selecting the Operating Mode 7 3 1 Selecting the Control Mode The control mode is set with the Settings DIP switch block on the front panel of the E 625 Analog Mode The analog mode is active when the DIP switch setting is as follows Computer Controlled Mode only E 625 CR The computer controlled mode is active when the DIP switch setting is as follows 7 3 2 Selecting the Servo Mode The closed loop control uses the E 802 55 servo control submodule that is installed in the E 625 The use of the E 802 servo control submodule is set p 47 with an on board jumper In the default position the E 802 servo control submodule is active and the servo mode can be set as follows Settings DIP Switch Block E 625 CR and E 625 C0 gt Move the DIP switch 3 on the front panel of the E 625 to the corresponding position 40 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI ws 7 Operation SVO Command only E 625 CR INFORMATION To be able to
66. rvo control submodule using the trimmer adjustment tool until the sensor signal is exactly 10 0000 V see the E 802 user manual E 625 Piezo Servo Controller PZ166E Version 1 7 0 63 8 Adjustment of Internal Settings P I 7 If the measurement value on the external measurement device deviates from the upper travel range limit Adjust the R143 on the main board p 46 sensor gain potentiometer on the main board using the trimmer adjustment tool until the external measurement device shows exactly the upper travel range limit the stage displacement changes If necessary repeat the last steps until stable values are displayed on the measurement devices Is the non linearity of the sensor signal more than 0 05 of the nominal travel range gt gt If so Linearize the sensor signal p 66 If not Disconnect the E 625 from the power source by pulling the power cord of the wide range input power supply from the power socket and close the E 625 Adjusting the Static Sensor Gain in Computer Controlled Mode only E 625 CR 1 Send the svo A 1 command A indicates the axis to switch on the servo mode If an oscillation stage humming can be heard after switching on a Switch the servo mode off immediately b Optimize the notch filter frequency and the P I controller settings in the E 625 p 52 c Make sure that the servo mode is switched on Send the MOV A 0 command Adjust the external measurement dev
67. service department The Incorrect gt Check whether the system works with a terminal program customer combination of If so software driver does not run routines Vis with the Pl drivers gt Read the information in the corresponding software manual and compare the sample codes on the E 816 CD with your program code If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 75 74 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 11 Customer Service 11 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website E 625 Piezo Servo Controller PZ166E Version 1 7 0 75 PIEZO NANO POSITIONING WWW PI WS 12 Technical Data 12 Technical Data In this Chapter Specifications Operating Limits Dimensions Block Diagrams Pin Assignmernt 12 1
68. st one hour before starting work tory system values are While the E 625 is not used performance unreliable Make sure that the servo mode is switched off open loop and the operation and the piezo voltage is set to 0 V entire system Analog mode The input voltage for the target value is 0 V is instable Computer controlled mode Corresponding commanding The system is not temperature stable The stage The load was Readjust the system according to the changed load p 43 starts changed oscillating or positions inaccurately E 625 Piezo Servo Controller PZ166E Version 1 7 0 73 10 Troubleshooting P I Problem Possible Causes Overflow The amplifier gt Perform p 32 a zero point adjustment LED comes output is near its Changes in temperature or changes in the mechanical load can on range limit cause small deviations of the sensor zero point threshold value After the successful zero point adjustment the overflow LED will no longer light up during closed loop operation gt To prevent an overflow in open loop operation do not exceed the recommended control input voltage range of 2 to 12 V analog mode or do not command any piezo voltage outside of the recommended range of 20 to 120 V computer controlled mode When the overflow LED is on constantly in closed loop operation in spite of the zero point adjustment there can be a hardware error gt In this case contact p 75 our customer
69. stalled software from the E 816 CD Appropriate voltmeter p 23 necessary in analog mode not necessary but helpful in computer controlled mode only E 625 CR If the voltmeter is used an additional SMB BNC adapter cable is necessary in scope of delivery Trimmer adjustment tool Performing the Zero Point Adjustment in Analog Mode 1 Select analog mode and open loop operation servo mode OFF using the Settings DIP switch block 1 ON down 2 OFF up 3 OFF up 4 OFF up Connect the signal source to the ANALOG IN WTT SMB socket using an adapter cable Connect the voltmeter to the SENSOR MONITOR SMB socket using the adaptor cable Connect the power cord on the wide range input power supply to the power socket The E 625 is ready for operation when the green Power LED comes on Increase the input voltage on the ANALOG IN WTT SMB socket in increments of 1 volt from O V up to the value where the upper travel range limit for the stage is reached approximately Reduce the input voltage on the ANALOG IN WTT SMB socket to 0 V Read the sensor signal on the SENSOR MONITOR SMB socket using the voltmeter Adjust the Zero potentiometer using the trimmer adjustment tool until the sensor signal is 1 V E 625 Piezo Servo Controller PZ166E Version 1 7 0 33 6 Start Up PI Performing the Zero Point Adjustment in Computer Controlled Mode only E 625 CR 1 Select the computer controlled mod
70. to generate this analog signal See the driver documentation on the E 816 CD For the use as trigger input signal for wave table output and triggered motion in the computer controlled mode Active HIGH LOW 0 to 0 5 V HIGH 3 0 to 5 0 V maximum 10 V max frequency 400 Hz min pulse width 5 us SMB BNC adapter cable in scope of delivery Connecting the Signal Source gt Use the adapter cable to connect a suitable signal source to the ANALOG IN WTT SMB socket 22 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 7 Connect a Measurement Device to the E 625 INFORMATION The filtered and converted sensor output value with 0 to 10 V for the nominal travel range is on the SENSOR MONITOR SMB socket The signal is directly proportional to the expansion of the piezo actuator in the stage Tools and Accessories Suitable device for measuring the sensor monitor signal The output impedance of the SENSOR MONITOR SMB socket is 10 KQ This is why the input resistance of the measurement device must be at least 1 MQ for reliable measurement results The input capacitance of the electronics must be sufficiently high to suppress high frequency interferences If necessary the measurement device input must be provided with a 4 7 nF capacitor NPO or COC ceramic capacitor User Electronics Sensor Monitor Output Figure 3 Electronic connection of the
71. tor u ne 20 5 4 Connecting the Power Supply to the E 625 uussssnneensssnnnennnsnnnnnnnnnnnnnnnnn 21 5 5 Connect a Stage to the E 625 uusmnnasunsnnannonennannonennnnnonnnnnnnunsnnnnnennnnnnnnnennnnn 22 5 6 Connect a Signal Source to the E 625 uure2s2seuesssnnnennnsnnnnnnnnnnnnnnnnnnn nenne 22 5 7 Connect a Measurement Device to the E 625 uu 2s2nuessssnnnnnensnnnnnnnnnnnnnn nn 23 5 8 Connect a PC for the Computer Controlled Mode only E 625 CR 24 5 8 1 Connect the E 625 CR to the PC oonciccccncococcnocononcnonanonanonananannnnnn nos 24 5 8 2 Interlinking the Controllers oooooocoonnncccnonnccccnnnaccccnnnoncccnnnancccnnnnccninnn 25 Start Up 27 6 1 General Notes on Start Up 222444000onnnnnnennnnnnnnennnnnnnnnnnnnnennnnnnnennen nn 27 6 2 Perform System Test ae nissen 28 6 3 Adjust the Sensor Zero Point uussrssnesnensnnnnnnnnnnnnnnnnnnnennnnnnnennnnnnn mann 32 Operation 37 7 1 General Notes on Operation 44444ssnsnsnnennnnnnnnennnnnnnennnnnnnennnnnnnennennen nn 37 72 Operating Modes 2 1 u ee a podi ccda 38 7 2 1 Control Mode coccion iii 38 7 2 2 servo MOdE u ae lee did 39 7 3 Selecting the Operating Mode 2uus422200nmnnan0onnnnnnnonnnnnnnannnnnnnnnnnnnnnennn nn 40 7 3 1 Selecting the Control Mode u244snnnnnnnnnnnnnnnnnnnnnnnnennnen 40 7 3 2 Selecting the S
72. twork for details see the pin assignment of the cable p 85 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 12 5 3 E 625 CN Network Cable 12 Technical Data GND 10 10 i 18 1 GND GND 20 205 1729 20 GND SCL Clock 30 30H t 13930 SCL Clock SDA Data 40 497 HH 40 40 SDA Data GND 50 5G 50 5C N On Target 60 6 69 60 On Target 100 kHz 70 218 IT 72 70 100 kHz 3 2MHz 80 80 130 80 3 2MHz NC 90 90 99 38 NG Schirm verbunden mit Stecker shield connected to connector shell Ay Schirm verbunden mit Stecker _ _ shield connected to connector shell Figure 19 Pin assignment of E 625 CN network cable 12 5 4 Power Supply Connector Switchcraft panel plug 3 pin male 1 GND 2 12 to 30 VDC 15 V recommended stabilized 3 Not connected E 625 Piezo Servo Controller PZ166E Version 1 7 0 85 PIEZO NANO POSITIONING WWW PI WS 13 Old Equipment Disposal 13 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmenta
73. umber E 625 CN Network cable 0 3 m for interlinking two E 625 piezo servo controllers l C bus sensor synchronization for details see the pin assignment of the cable p 85 gt To order contact our customer service department p 75 E 625 Piezo Servo Controller PZ166E Version 1 7 0 15 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking 1 Unpack the E 625 with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact Pl immediately 4 Keep all packaging materials in case the product needs to be returned E 625 Piezo Servo Controller PZ166E Version 1 7 0 17 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation oooonnnniccnnniccnonnncccnnoncccnnnannncnnnancnr nano nn iinnat aaan 19 Ensuring VentilatiOn ardid ita tala adi een 19 Connecting the E 625 to the Protective Earth Conductor ocooooccccconocicccononcncnnnancncnanons 20 Connecting the Power Supply to the E 625 ooooccccnoccccnnnocccccononcnncnnancnc nano ncn conan nn 21 Connect a Stage to the E 628 iocicioniicnni nicciiinacia tirarte dineral lideradas 22 Connect a Signal Source to the E 625 oooiccccnnoccccconoccccnanoncnccnnancnncnno nc nc rana rca ncnnn rca 22 Connect a Measurement Device to the E 625
74. wer cord Alternatively Sufficiently dimensioned power cord Connecting the Power Supply to the E 625 1 Connect the Switchcraft connector f of the adapter to the DC IN 12 30 V Switchcraft panel plug m of the E 625 2 Connect the barrel connector of the adapter to the barrel connector socket of the power supply 3 Connect the power cord to the power supply E 625 Piezo Servo Controller PZ166E Version 1 7 0 21 5 Installation P I 5 5 Connect a Stage to the E 625 Prerequisites v The E 625 is switched off i e the wide range input power supply is not connected to the power socket over the power cord Tools and Accessories The stage with which the E 625 was calibrated Connecting the Stage gt Connect the stage to the PZT amp SENSOR socket If your system was calibrated by PI the piezo servo controller and the stage must not be replaced Take note of the assignment indicated by the serial numbers on the calibration label on the piezo servo controller 5 6 Connect a Signal Source to the E 625 Prerequisites v The signal source is switched off or the output is 0 V Tools and Accessories Suitable signal source For use as the input voltage for specifying the target value in analog mode The analog signal must always be in the range of 2 to 12 V The input voltage can also be a computer generated analog signal e g from a data acquisition board You can use the Pl LabVIEW analog driver on the E 816 CD
75. whether a change to the system settings is necessary If necessary you can adjust the following settings in the inside of the E 625 case m Notch filter and P I controller for optimal settling behavior p 52 Sensor settings for the highest positioning accuracy after the replacement of the stage or the controller p 58 Master slave setting for the sensor synchronization p 50 44 Version 1 7 0 PZ166E E 625 Piezo Servo Controller PIEZO NANO POSITIONING WWW PI WS 8 Adjustment of Internal Settings 8 2 Opening the Case Only the Settings DIP switch block and the Zero potentiometer can be accessed from the outside All other E 625 adjustment elements are located inside the case Prerequisite v You have read and understood the General Notes on the Adjustment of Settings p 43 v The E 625 is switched off i e the wide range input power supply is not connected to the power socket using the power cord Tools and Accessories Phillips head screwdriver size PH1 Opening the Case 1 Remove the two upper cross head screws on the front and rear panel 2 Lift off the top of the case Figure 5 E 625 with top of the case removed E 625 Piezo Servo Controller PZ166E Version 1 7 0 45 8 Adjustment of Internal Settings P I 8 3 Adjustment Elements Inside the Case 46 The following figure shows the position of the components and adjustment elements jumpers switches on the main board of the E 625 C
76. wnloading Manuals ici tic een 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the E 625 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual DANGER A Imminently hazardous situation If not avoided the hazardous situation will result in death or serious injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation ho E 625 Piezo Servo Controller PZ166E Version 1 7 0 1 About this Document P I INFORMATION Information for easier handling tricks tips etc Symbol Meaning Label 1 Action consisting of several steps whose sequential order must 2 be observed gt Action consisting of one or several steps whose sequential order is irrelevant n List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual 1 3 Other Applicable Docu
77. zing the Sensors The sensors can be synchronized in systems with several capacitive sensors For this the master slave switch configures one system as the sensor master The other systems are set as slaves Switch in master position default settings The excitation frequency of the sensors is provided internally Switch in slave position The excitation frequency of the sensors is provided externally The master slave switch is located on the printed circuit board which is soldered p 48 vertically on the main board Furthermore for all E 625 CR to be synchronized wires 7 and 8 as well as a ground wire 1 2 or 5 of the Network socket must be connected to the corresponding wire INFORMATION Several E 625 CR can be networked together and commanded from one individual RS 232 or USB interface on the PC In this case all sensors must be synchronized Using E 625 CN network cables from PI ensures the necessary connection of the wires 7 8 and a ground wire for details see the pin assignment of the cable p 85 INFORMATION If a E 625 CR is to be interlinked with at least one E 665 CR piezo servo controller for capacitive sensors 1 Configure the E 625 CR as sensor master 2 Configure all E 665 CR as sensor slaves see E 665 user manual Prerequisite v You have read and understood the General Notes on the Adjustment of Settings p 43 v All E 625s to be synchronized are disconnected from the power source i e

E-625 Piezo Servo Controller

Contents

Download Pdf Manuals

Related Search

Related Contents