Oxford EDS Getting Started Guide
Contents
1. General safety information The system must be earthed grounded in accordance with the Oxford Instruments installation guidelines Do not use the equipment if any cable is damaged Do not operate the equipment if failure or damage is suspected Do not use a supply voltage that is outside the specified range Do not operate the equipment with the covers removed Do not operate the equipment in damp or wet conditions Do not immerse the equipment in liquids Do not use and store the equipment in corrosive or explosive atmospheres Do not operate the equipment outside the specified temperature range of 10 C to 30 Provide proper ventilation to prevent overheating Only use cables and parts provided by the manufacturer Use a proper earth ground to connect to the equipment Installation and service work must be performed by Oxford Instruments qualified personnel only Electrical power and safety earth Any interruption of the protective conductor inside or outside the host PC the monitor and the electrical power supply for the x stream unit or disconnection of the protective earth terminal could render the equipment dangerous Electrical power outlets are classified as a hazardous voltage The power connection to OINA equipment must be made to an accessible power outlet within reach of the operator So power can be easily disconnected if necessary Replace power cords if they are damaged Contact yo2. Tokyo 1350047 Japan Email oikkma oxinst com Tel 81 3 5245 3251 Fax 81 3 5245 4475 www oxford instruments com USA South America 300 Baker Avenue Suite 150 Concord MA 01742 USA Email ccc oia oxinst com Tel 1 978 369 9933 Fax 1 978 369 8287 China Asia 1 E Building 1 Xiangzhang Garden No 248 Donglan Road Shanghai 201102 China Email china nacs oxinst com Tel 86 21 60732929 Fax 86 21 60732949 A5O ND INSTRUMENTS The Business of Science e
3. Instruments for repair Please pack it correctly in the original transportation box To protect the detector use the protective cover and transport cover provided even if you think the part is already damaged Further damage may occur if the detector is not packed correctly Ask for the correct packaging if it has been mislaid Do not force the detector into the box it will fit neatly if packed correctly When shipping a NanoAnalysis WDX spectrometer the detector set MUST be removed prior to shipping The spectrometer and the detector set must be placed in the dedicated shipping boxes Items can only be returned to Oxford Instruments using the prevailing Returns RMA procedure Contact you local OINA office for further details Complete the RMA form in full to ensure that faults in the detector can be assessed quickly and precisely and to speed up the repair time e July 2011 51 1624 135 Issue 1A Page 20 Original Instructions X RAY DETECTORS Getting Started Guide MicroAnalysis System This page is intentionally blank r Original Instructions Page 21 July 2011 51 1624 135 Issue 1A Getting Started Guide MicroAnalysis System Technical support United Kingdom Halifax Road High Wycombe Bucks HP12 3SE United Kingdom Support email na techsupport oxinst com Training email na training oxinst com Tel 44 0 1494 442255 Fax 44 0 1494 524129 Japan Haseman Building 2 11 6 Tomioka Kotoku
4. RISK OF CRUSH INJURY Take care when operating the slide of the X Max detector There is a risk of crush injury when the motion of the detector is ENNS activated by remotely operated software The slide of the X Max detector is motor driven Two buttons on the body of the detector control the slide movement 1 To nudge the X Max detector in tap the IN button 2 To insert the X Max detector slowly press and hold the IN button 3 To retract the X Max detector press the OUT button 4 Press the IN or OUT button to stop retraction or software controlled insertion e July 2011 51 1624 135 Issue 1A Page 16 Original Instructions X RAY DETECTORS Getting Started Guide MicroAnalysis System The maximum insertion distance and the Stop position are set by stop nuts that are adjusted by the engineer during installation Automatic retraction of the X Max detectors CRUSH INJURY The slide of the X Max detector may move without warning There is a risk of crush injury when the motion of the detector is WARNING activated by remotely operated software The X Max detector retracts automatically under software control when selecting the Move Out command on the Slide tab in Detector Control See Detector control in INCA and Detector control in AZtec Getting started with X Max TEM detectors Cooling and warming X Max TEM detectors The cooling and warming of X Max TEM detectors operates in the same way as in X Max dete
5. Switch ON electrical power at the wall socket 2 Switch ON the x stream unit using the rocker switch at the rear of the unit 3 Switch ON the host PC and launch the software When x stream power is ON the detector warms and cools under software control as required Switching the detector OFF 1 Retract the x act X Max or X Max TEM detector until it reaches the end of travel 2 Close the software application and the Windows operating system and shut down the host PC 3 Switch OFF the x stream unit using the rocker switch at the rear of the unit switch OFF electrical power at the wall socket When power is removed from x stream the detector warms up 0 July 2011 51 1624 135 Issue 1A Page 14 Original Instructions X RAY DETECTORS Getting Started Guide MicroAnalysis System Getting started with x act detectors Cooling the x act detector The x act detector is a cool on demand device Unless in STANDBY mode the detector cools when electrical power is ON and the microscope column is at vacuum The detector is fully operational within 5 minutes of column evacuation For optimum Quant results it is recommended that the x act detector and x stream are ON for at least 30 minutes before use See Detector control in INCA and Detector control in AZtec Warming the x act detector The x act detector warms when the microscope column is evacuated or electrical power is switched OFF LEDs on the x act detector There ar
6. XAG COTO CIO agate seen ce P EA AEE AE A E E 15 LEDs on the x act detector nnannnannnennnsnnennnnonnnosrrnsrnrnnrrrrnrenrrronrerreosnrrrnrennrrnnrernnrrnnrrnnrernne 15 Inserting and retracting the x act detector ceeecccsecccceeecceeececeseeceeeesseueecsaeeeseueeessueesseeegas 15 Getting started with X Max detectors cccscsseccesseeceesseeesenseeeeesseeseeesseseoeneeseenseessonseesonas 16 Cooling the X Max detector cccccccccccsecccceseceeeeeeceeceeeeeeseeeeeeseeeeeeseeeeeeseeseeeseeeessaaeeeesaaeeessanes 16 Warmng ING X IWVIAX CCTCCION serioena nnan e EE EEA ERARE 16 LEDC ONA MX ATE COS se E E E E 16 Inserting and retracting the X Max detector manually nannnnnnnnnnnnnnnnannnnnnnnnnnnnnnnnnnnsnnnnennnne 16 Automatic retraction of the X Max detectors ccccccceecceeeeceeeeceeeeeeeeeneeeseueesaeeeneeesaeeesaeeeeaes 17 Getting started with X Max TEM detectors ccccccssseecsesseeecesseesensseeseesseesenseeseoeseessoaes 17 Cooling and warming X Max TEM detectors ccccccccccsesececeeseeeeeeeeeeceeeeessaeeeesseeeeeseaeeeesaaees 17 Best practice ccccceccesccceecccesecceeccceeeceueeecsececeecsueeseueeseusesaueesseeeseecsueeseusessueeesseesseeeseeessaeessgees 17 XM TIS AC OD er E E E E E 18 LEDs on X Max TEM detectors cccccecccccccsccscccseeceeecneceueesaeesaeeceeecauecsueeseeseeseeessuesaaeeges 18 July 2011 51 1624 135 Issue 1A Page 2 Original Instructions Getting S
7. be vented in a slow controlled manner If venting is too rapid or the pressure is too high the detector window may break Do not force the chamber door open after venting and shut the door gently before pump down Remove any loose material particles from the chamber which on venting may impact and damage the detector window Retract the detector before venting NanoAnalysis products to minimise the risk of breakage Suitable venting should take at least 30 seconds to reach atmospheric pressure Take special care on chambers fitted with Nitrogen back fill and make sure that the back fill does not exceed the atmospheric pressure To minimise potential damage ensure that the venting line is not in direct line of sight with the detector window lf your vacuum system uses oil filled diffusion pumps take care to ensure that oil vapour does not enter the microscope chamber Oil vapour condensing on the detector window will reduce system performance and may damage the window Detector operation All OINA detectors are designed for thermal recycling using appropriate cool down and warm up routines within the software Do not attempt to cool the detector in any way except as explained in Cooling the x act detector Cooling the X Max detector and Cooling and warming X Max TEM detectors Detector use with a hot stage fitted Only specially designed detectors can be used for analysis at high temperatures Please consult your Oxford Instruments repre
8. detector This dialogue box opens automatically whenever the operational state of the detector changes The tabs in the dialogue box depend on the type of x ray detector in use For x act detectors only the Thermal tab is available For X Max detectors the Thermal and Slide tabs are available For X Max TEM detectors the Thermal Slide and Flux Protection tabs are available Use the Thermal tab to switch the operational state of the x act or X Max detector between Standby and Operate L Detector Control Options Help In Standby mode the detector warms up Detector State Cold In Operate mode the detector cools down Standby Operate e July 2011 51 1624 135 Issue 1A Page 8 Original Instructions GETTING STARTED Getting Started Guide MicroAnalysis System 4 Use the Slide tab to change the position of the F ET X Max or X Max TEM detector Datertor Conten Options Heip Slide Thermal Flux Protection Click Move In to insert the detector Click Move Out to retract the detector Postion Auto reirected Click Stop to halt the movement of the detector wn NOTE X Max TEM retracts automatically in the presence of high flux To re insert the detector click Move In or use the manual push button 5 Use the Flux Protection tab to protect the X Max TEM detector from excessive x ray flux Select Enabled to automatically retract the detector when excessive x ray flux is sensed Enter a value in
9. occur July 2011 51 1624 135 Issue 1A Page 6 Original Instructions GETTING STARTED Getting Started Guide MicroAnalysis System GETTING STARTED This section provides getting started information for the INCA and AZtec MicroAnalysis software applications Switch ON the MicroAnalysis System 1 Switch the x stream unit ON by using the ON OFF switch on the rear panel of the unit When switching x stream on from cold allow 30 minutes for the system to stabilize 2 Switch ON the host PC and launch Microsoft Windows The Windows Logon window opens 3 Press Ctrl Alt Delete to log on to the PC For the INCA application the default Username is INCA and the Password is INCA For the AZtec application the default Username is Oxford and the Password is oxford If you do not know your Username and Password ask your system administrator NOTE Usernames are not case sensitive Passwords are case sensitive The default password INCA is all upper case and the default password oxford is all lower case When you are logged on a green light should be visible on the front of the mics and x stream units Software licensing The AZtec and INCA software must be licensed To see the licence status go to All Programs gt Oxford Instruments NanoAnalysis gt Tools gt License Manager A limited number of starts are allowed before a licence must be activated For more information about software licensing refer to the OINA Software Lic
10. serer EE E E E E EA 8 Detector control in INCA aannaannnannnnnnnnnnnnnnnnnnnnnnrnnnnnnnnsnnnnnrennrnnrnnnrrnrrnnrrnnrnnrrnnrrnnrnnrrnnrrnrrrnrrerennni 8 INGA OTTO SV STCIM CCCI isei a E E 9 Getting started with AZtec assssnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nnnm nnnm nnmnnn mnnn 10 VNO AZOO on E E E E scene 10 Microscope control in AZtec 2 cceccceccccsececececeeeeseeeeceeeeneeeeseeeceueeseueeseeeesaueeseeesaueesseeessasenses 11 CISION COMTOLNAZIOC cnp ka ron EE EE EE EEEE E AREE 12 ceting PREDIT AZ NCC serri iann E S 13 Troubleshooting in AZtec 20 ccecccceeccceeeeceeeeeceeeeeseeeeeseeeeeeueeseeecesseueeseeeesageessaeeeseeeeesaeeesseeeeas 13 Software updates ain cece ssc ce ees ecules esa rea ces ies a ease coeen en vedsneteemcnereueeeceeuannuescueentecetsuceueaus 13 Data DICK UD aac ose e eet eames EE E Jose sveueenemecateiucsveeseseeuecsvecsss 13 WPA DETECTOR aonr E Eas 14 General information about the detectors ccccssscecsesseeeeenseeecenseesenseeeeeenseesenseessonseessoaes 14 Switching the detector ON eccceecccccssseeeceeeecaeeeeeeceeeeeseeeeeesseaeeeseeueeeessseessaeeesseeeessaeeeesaaes 14 PWEN MEASC OIE peanae e E EE E E E S E E 14 Getting started with x act GEteCtOIs ccccceseseeceesseeseenseeceeseeeseeseeseoseeseneseeseensessonseessones 15 Cooling the x act detector ee ccccecccccceeceeceeeeeeeseeeeeseeeeeeeeeeeeeseeeeesseeeeesseeeessaeeeesaeeeesaaeeesaaes 15 AU IG
11. the Threshold MeV s field to set the flux level at which the detector retracts Wee fo eaa bo Enter a value in the Delay s field to set the time delay in seconds between the detection of Restore detauts aw excessive flux and retraction of the detector i Detector Control Options Help Slide Thermal Flux Protection NOTE The threshold and delay values are set by the engineer during installation It is strongly recommended that you do not change the default delay or threshold values Doing so may reduce the life of your detector INCA Monitor system check lf a problem occurs use this software feature with its comprehensive help guide The purpose of the system check utility is to confirm that the mics and x stream units are operating correctly When run the process cycles through a series of checks measurements and questions to validate the system s performance This procedure identifies faults and if possible diagnoses the probable cause Launch Monitor by double clicking this icon on the task bar El lf a hardware problem is suspected double click on the icon and click the System Check step Detector thermal cycling and calibration are accessible via INCA Monitor Detector slide shutter and LN alarm controls are available in MicroAnalysis System Microanalysis under Options gt Detector Control E Original Instructions Page 9 July 2011 51 1624 135 Issue 1A Getting Started Guide GETTING STARTED M
12. Getting Started Guide Oxford Instruments NanoAnalysis MicroAnalysis System Issue 1A July 2011 Original Instructions www oxford instruments com The Business of Science 2011 Oxford Instruments Nanotechnology Tools Limited All rights reserved Getting Started Guide MicroAnalysis System Contents Section Page ABOUT THIS GUIDE neocse eana aa aaa e aeeai A SUID DOM and UE AINING svete cecscerscceseratee cence obese Ea EEE aE E aaen Saa 4 aa Ae LEi g PE E A E 4 SAFETY INFORMATION ssaannnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nenna mnnn 5 G n ral Safety IMPOFIMAUO MN isc scasiccie ni vewestesivesesecneeavevedeesevancuessveceustavessskiueussesecususnussxsvecsustvcesseies 5 Electrical power and Safety Carth ccccccssscessseeseeseesenseecenseeeesseeenseeeenseeeeneeseenseoenseesensesoess 5 PAZ ANC Ba o ile CS cscs E te scee aces cas case E E enna ee cceuseusevescensaswcteueeslauesseeesenececes sateen 6 Beryllium precautions sccasnrecdaiwacncninnaevanznammbanmentawatieuneuunicowmiantanrtaxensiek omeniewiduaaesauneeierauadtaunnduesenes 6 GETTING STARTED irina EEA 7 Switch ON the MicroAnalysis System cccccssseecsssseeecenseeeeenseeseenseeeeesseesenseeseenseessonnees 7 DOM Ware NIC CTSING siirron a E Eaa ainsa 7 Getting started with INCA assssannnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nnmnnn nnmnnn nnna 8 QSTHIC IASON AING A
13. c Help can be obtained from the Help menu Use the search function to find the topic you want Type your Click here to question here start the search Alternatively press F1 in any screen for context sensitive Help The User Manual in PDF form can be launched from the main Help menu Troubleshooting in AZtec In the event of a problem 1 Goto All Programs gt Oxford Instruments NanoAnalysis gt Tools WP TidyUp The Tidy Up function clears and restarts the hardware modules 2 Restart the host PC 3 Launch Monitor 4l from the Task Bar and run the System Check utility Software updates To re install the software ensure that your data is archived then refer to the instructions on the MicroAnalysis System compact disk CD Data backup The installation engineer will make a backup of the entire system after installation and calibration are finished The backup must be kept in a safe place It is your responsibility to back up your data as appropriate E Original Instructions Page 13 July 2011 51 1624 135 Issue 1A Getting Started Guide X RAY DETECTORS MicroAnalysis System X RAY DETECTORS This section provides getting started information for the x act X Max and X Max TEM detectors of the MicroAnalysis System General information about the detectors This information applies to all three detector models Switching the detector ON There is no ON OFF switch on the x act X Max or X Max TEM detector 1
14. ctors See Cooling the X Max detector and Warming the X Max detector Best practice Some operating conditions on TEMs scatter high energy electrons which can potentially harm the X ray detector over its lifetime To optimise detector life the following precautions are recommended Retract the detector behind the protective flap when it is not being used for EDS work On some microscopes the detector retracts automatically when the microscope operates in low magnification mode As a precaution always retract the detector before entering this mode Do not leave the beam on a grid bar for longer than necessary If flux remains high for an extended period typically 5 seconds the detector retracts automatically but it is better to avoid auto retractions if possible Avoid very high beam currents and consequent high electron flux when routinely scanning a sample in normal TEM imaging mode In some positions this may damage the detector over time When possible retract the detector Do not operate the detector with the objective aperture in place unless it is the high contrast objective aperture in JEOL Ltd TEMs as this will cause major artefacts in the X ray spectrum E Original Instructions Page 17 July 2011 51 1624 135 Issue 1A Getting Started Guide X RAY DETECTORS MicroAnalysis System X Max TEM retraction The X Max TEM detector retracts automatically under software control in these conditions When s
15. e two LEDs on the cover of the x act detector They indicate the status of the device as shown below A message is displayed by the software if an error occurs Inserting and retracting the x act detector Turn the handle at the rear of the x act detector to insert and retract the device A Stop position on the manual slide is set by the engineer at installation E Original Instructions Page 15 July 2011 51 1624 135 Issue 1A Getting Started Guide X RAY DETECTORS MicroAnalysis System Getting started with X Max detectors Cooling the X Max detector The X Max detector begins to cool when electrical power is switched ON or the Operate button in the detector control panel is selected When the detector has finished cooling the blue light emitting diode LED on the detector cover illuminates steadily The detector cools and is fully operational within 5 minutes For optimum Quant results it is recommended that the detector and x stream are ON for at least 30 minutes before use Warming the X Max detector 1 Select Standby at the Detector Control dialogue box or remove the electrical power supply to the detector See Detector control in INCA and Detector control in AZtec LEDs on X Max detectors There are two LEDs on the cover of X Max They indicate the status of the device as shown below A message is displayed by the software if an error occurs Inserting and retracting the X Max detector manually
16. electing the Move Out command on the Slide tab in Detector Control f the flux exceeds the preset threshold shown on the Flux Protection tab in Detector Control On some microscopes when the low magnification setting is selected during setup Flux protection and Low Mag protection protect the X Max TEM detector from excessive flux which could potentially harm the detector over it s lifetime When the X Max TEM retracts automatically click Move In on the Slide tab of Detector Control or use the manual push button to re insert the detector LEDs on X Max TEM detectors The LEDs on X Max TEM detectors are identical to those on X Max detectors See LEDs on X Max detectors Detector handling This section provides important instructions for handling Oxford Instruments NanoAnalysis X ray detectors It applies to x act X Max and X Max TEM detectors THIS DOCUMENT IS FOR GUIDANCE ONLY IT DOES NOT CONSTITUTE A SPECIFICATION OR ADMIT ANY LIABILITY FOR PRODUCT PERFORMANCE Obeying the guidelines suggested here will help to extend the life of the detector Fragile components The components of OINA detectors are very fragile exercise great care when handling any part Never touch the window of a detector The detector window is usually highly stressed and even the light brush of a human hair can cause failure You must not attempt to clean the window The detector must be returned to the manufacturer to be cleaned The windows of s
17. ensing User Guide 51 1720 061 and the Software Licensing Quick Guide 51 1624 129 a Original Instructions Page 7 July 2011 51 1624 135 Issue 1A Getting Started Guide GETTING STARTED MicroAnalysis System Getting started with INCA i 2 Start the MicroAnalysis System application by going to Start gt Programs gt Oxford Instruments gt INCA or double click on the desktop icon Select Getting Started Tutorial from the Help option on the menu bar Use Analyzer for analysis from the image on the SEM screen Energy 250 350 and 450 Use Mapping for elemental maps Energy 250 350 and 450 Use Point amp ID for analysis from the digital image on the EDS screen Energy 350 and 450 Getting help in INCA 1 At each step you can open help bubbles by pressing the 2 button The bubbles are numbered to indicate sequential operations at each step in the analysis Press F within the bubble to obtain more detailed help and advice The full MicroAnalysis System Help encyclopedia can be accessed from the MicroAnalysis System menu bar Press 2 on the work area to see tutorials of the sequence of operations The full MicroAnalysis System Help encyclopedia is also available when the tutorial is running Detector control in INCA 1 2 View and control the operational state of the detector by choosing Detector Control from the Options menu The Detector Control dialogue box opens showing the status of the
18. gy Dispersive Spectroscopy EDS applications A MicroAnalysis System consists of an OINA X ray detector x act X Max or X Max TEM an x stream module for X ray acquisition and detector control amics module for sample image capture ahost personal computer PC OINA AZtec and or INCA software running on the host PC Support and training For technical support or training contact your system vendor If the vendor is not known details of your local Oxford Instruments NanoAnalysis office are available on the Oxford Instruments Customer Support web site Go to http www oxford instruments com then navigate to Support gt NanoAnalysis Further information Full instructions for using your MicroAnalysis System are given in the MicroAnalysis System User s Manual A portable document format PDF edition of the manual is supplied on the system software DVD the OINA User s Manual for your detector model a portable document format PDF edition is supplied on the system software DVD the OINA x stream and mics Installation and Users Guide 51 1720 001 Please read these documents and this Getting Started Guide before using your MicroAnalysis System e July 2011 51 1624 135 Issue 1A Page 4 Original Instructions SAFETY INFORMATION Getting Started Guide MicroAnalysis System SAFETY INFORMATION Read these safety instructions before installing and using Oxford Instruments NanoAnalysis Systems
19. icroAnalysis System Getting started with AZtec Using AZtec 1 Click the 6 shortcut AZTEC 2 The AZtec welcome screen opens O Welcome to AZtec fhe Business of Science Create a new project Open recent Nene O pees toning Aftec training Kie ukoiak3s02 jroot My Documents Sulfide Ore EDS Maps amp Linescans Quantitative Analysis EDS Spectra Sulfide Ore Sample amp Getting Started gt Browse Help Show this screen at start up 3 Create a new project and enter the project Name and Location or click Open recent to open a recent project Then click OK Optimize J Analyzer Jh E Ae i Eee LF FL e TA lt y Linescan z 3 a Acie Confirm Calculate Spectra Elements Composition Navigator selector 4 AdZtec is controlled by using horizontal navigators at the top of the screen Click a navigator selector to choose the respective function You can switch between navigators for EDS and EBSD by using the EDS and EBSD buttons to the left of the navigator July 2011 51 1624 135 Issue 1A Page 10 Original Instructions GETTING STARTED Getting Started Guide MicroAnalysis System Microscope control in AZtec Microscope operating conditions are monitored on the status bar Mag 131x HV 20 0 kV WD 24 70 mm Input Rate 63890 cps Click the microscope tab to open a dialogue box where you can control the microscope Microscope Control Magnification Working Dis
20. ome detectors contain beryllium metal which is a hazardous substance To avoid fatal or serious injury always obey the precautions given in SAFETY INFORMATION Keeping the detector clean The detector and interface components have been thoroughly cleaned by a multi bath cleaning process in the factory and are sealed in protective covers to prevent contamination during transportation KEEP ALL PARTS CLEAN AND FREE FROM GREASE Always wear powder free nitrile gloves when handling detector parts Never place the components on the floor or a dirty surface Do not attempt to clean the detector window The detector must be returned to the manufacturer to be cleaned July 2011 51 1624 135 Issue 1A Page 18 Original Instructions X RAY DETECTORS Getting Started Guide MicroAnalysis System Unpacking packing the detector The detector has been carefully transported in dedicated packaging A protective cover and a transport cover shield the detector window the most fragile part of the device KEEP ALL PACKAGING SUPPLIED WITH THE DETECTOR It is important to keep the protective cover and cover shield clean and dry preferably stored in a new sealed polythene bag If the detector is returned to the manufacturer use all the packaging supplied Badly packed detectors often incur further damage which will void the product warranty Venting the column chamber of the electron microscope The column chamber of the microscope must
21. sentative for more detailed information and advice Until verified by OINA detectors cannot be used in combination with hot stages even if the hot stage is shielded or the detector is retracted Field servicing by qualified engineer technician The system contains no user serviceable parts Service must be done by an Oxford Instruments qualified engineer only E Original Instructions Page 19 July 2011 51 1624 135 Issue 1A Getting Started Guide X RAY DETECTORS MicroAnalysis System Protecting the detector when it is not in use The detector must be removed from the microscope column by trained personnel only using correct handling procedures to avoid contamination or damage When the detector is not attached to the microscope column it must be stored in the protective cover provided and handled using powder free nitrile gloves See Unpacking packing the detector above Electron trap The detector may be equipped with an electron trap If so the electron trap must be fitted by an Oxford Instruments qualified engineer only CARELESS MANIPULATION OF THE ELECTRON TRAP CAN BREAK THE DETECTOR WINDOW Collimators The detector may be equipped with a collimator If so the collimator must be fitted by an Oxford Instruments qualified engineer only CARELESS MANIPULATION OF A COLLIMATOR CAN BREAK THE DETECTOR WINDOW Returning items to Oxford Instruments In the unlikely event that a detector must be returned to Oxford
22. tance mm High Voltage kV Unblank Beam Beam On Auto Contrast Bightness Beam Current 0 000E 000 v aa Auto Focus uo iii OXFORD lIHSTEU MEATS Microscope tab On most microscopes these parameters are read automatically C a Original Instructions Page 11 July 2011 51 1624 135 Issue 1A Getting Started Guide GETTING STARTED MicroAnalysis System Detector control in AZtec Click the EDS detector tab to open a dialogue box where you can control the detector The tabs and details on the Detector Control dialogue box depend on the type of detector installed lf an EDS detector is installed the EDS Detector tab is displayed lf an EBSD detector is installed the EBSD Detector tab is also displayed For EBSD detectors refer to the EBSD Getting Started Guide Detector control in AZtec is similar to INCA See Detectc t For x act detectors only the Thermal tab is available and for X Max detectors the Thermal and Position tabs are available X Max TEM is not currently supported so there is no detector control Flux Protection tab EDS Detector Control Operating Status Cold Position Operate EDS detector tab EDS Detector Tanio Thermal State Fully Inserted P tion Activity Not Moving e July 2011 51 1624 135 Issue 1A Page 12 Original Instructions GETTING STARTED Getting Started Guide MicroAnalysis System Getting Help in AZte
23. tarted Guide MicroAnalysis System Contents continued Section Page DOCIO DANN acio ces cee sicecec scan ecte aces ered E 18 FRACS COMDOMCINS sesser e E E E 18 Keeping the detector COON sssrinin inoran En ee AEA E aE Stat Naa 18 Unpacking packing the detector ccccccccccccseeeeceeeecseeeeseeeeseseeseueeseeeeessaeessaeeesseeeesseeeeas 19 Venting the column chamber of the electron MICrosScope cccseeceseeeceeeeceeeeseeeseeeeseesaaees 19 PCT SCION OO CGA rsisi pee tenai Ene RN OESR 19 Detector use with a hot stage fitted ee ccecceeeceseeeceeeceeeeceseeceeesaeessaeesegeeseeessueeneeseseeeens 19 Field servicing by qualified engineer technician ssssssesssssrsssrrssrrensnrrsrrrsrrrssrrrsrrrsrrrerrrrerre gt 19 Protecting the detector when It iS NOt IN use 2 0 ceeeccceecccceeeceaeeeeseeeeeaeeeeseeeeeseeeseaeeesaeeeeas 20 PIECON WO cipsroteres cc cathe aes ot nt castes ot nod uay tae banad Sapp inaunctumie tee Dev ecaisaaeenecdadeoreisaveducamncdnaderits 20 OL ONS E A E E E E A A E E T E E I 20 Returning items TO Oxford INSiuUmenis ssersrsrninenn dE a 20 a oe Original Instructions Page 3 July 2011 51 1624 135 Issue 1A Getting Started Guide ABOUT THIS GUIDE MicroAnalysis System ABOUT THIS GUIDE This guide provides basic information for using the Oxford Instruments NanoAnalysis OINA MicroAnalysis System for Scanning Electron Microscopes SEM and Transmission Electron Microscopes TEM in Ener
24. ur system vendor to ensure that the correct replacement part for your country is used Only Oxford Instruments qualified personnel should install OINA products Contact your system vendor if hardware problems occur a Original Instructions Page 5 July 2011 51 1624 135 Issue 1A Getting Started Guide SAFETY INFORMATION MicroAnalysis System Hazard notices Beryllium precautions The windows of some detectors are made of Beryllium metal The windows are safe unless broken but are hazardous if the window breaks and beryllium dust forms Exercise extreme care to avoid damage to the window If a window is damaged always obey these precautions Do not touch the window of an X ray detector Avoid breathing dust or powder when in the vicinity of the detector f you suspect that a detector is damaged wear safety glasses protective gloves a face mask and a respirator when in the vicinity of the detector Ensure that the area is well ventilated lf you inhale ingest or make skin contact with Beryllium particles seek immediate medical assistance Electron Trap The electron trap must be fitted to the detector at all times when installed on an SEM microscope column Failure to fit the electron Caution trap will invalidate the warranty Adjustment of Slide Movement Stop Nuts Do not adjust the position of the movement stop nuts on detectors fitted with a slide mechanism otherwise damage to the detector Caution damage may
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