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TPS-mobile - Agilent Technologies

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1. Slika 6 Zagon rpanja TPS mobile User Manual 87 901 005 01 B 219 362 15 Priro nik za Navodila Modeli 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 niso opremijeni z izbirnim stikalom poimenovanim Pumping enako funkcijo opravlja gumb Start Stop name en na kontrolerju Izklop TPS mobile a Sistem je mogo e izklopiti s pomo jo izbirnega stikala Pumping s pomikom slednjega v polo aj 0 kontroler ostane vklju en in e je na sistem priklju en merilnik se merjenje tlaka lahko nadaljuje tudi z izklopljenima rpalkama a Drugi na in za izklop sistema je uporaba glavnega stikala s pomikom slednjega v polo aj 0 Sistem se v celoti ugasne in ne merjenje tlaka ne druge funkcije niso ve mogo e Zaustavitev v sili Za ustavitev sistema TPS mobile v sil izvlecite napajalni kabel iz omre ne vti nice s tem se rpalka in kontroler izklopita 280 362 TPS mobile User Manual 87 901 005 01 B Priro nik za Navodila 15 Posebne enote Platformo TPS mobile lahko prikrojite lastnim potrebam in eljam z izdelavo posebnih tevilk modelov Z izjemo posebnih primerov s prilo eno specifi no dokumentacijo je ta priro nik uporaben pri vseh posebnih enotah z oznako MXXXX na primer 969 842
2. I U 5 EEE f KF 40 2 09 53 00 T y CFF 8 ISO 160 ln CFF 6 ISO 100 DIMENSIONS inches mm 0 47 12 00 Figure 13 TPS mobile User Manual 87 901 005 01 B 321 362 17 Technical Information High Vaccum Flange Connection To connect the Turbo pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure Figure 14 Then fix the two flanges with the clamps or claws as shown in the figure N N Z i RY TURE maan SZ 7 PROTECTIVE V AN EDGE Figure 15 For ConFlat flange connections we recommend using Agilent hardware 322 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Turbo Pumping System Connection To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units and tighten each one in turn Repeat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the
3. Kuva 6 Pumppauksen k ynnist minen TPS mobile User Manual 87 901 005 01 B 189 362 10 Ohjek sikirja Malleja 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 ei ole varustettu Pumping nimisell valitsimella sama toiminto suoritetaan ohjaimelle asetetun Start Stop painikkeen kautta TPS mobile n pys ytt minen a J rjestelm voidaan sammuttaa Pumping valitsimen kautta siirt m ll se asentoon 0 ohjain jaa p lle ja jos mittauslaite on kytketty j rjestelm n paineenarvon lukemista voidaan jatkaa my s pumput sammutettuina a Vaihtoehtoinen tapa sammuttaa j rjestelm on k ytt p katkaisinta siirt m ll se asentoon 0 J rjestelm sammuu kokonaan eik paineiden luenta eiv tk muut toimenpiteet ole mahdollisia H t pys ytys H t tilanteessa TPS mobile voidaan pys ytt kytkem ll virtajohto irti verkosta joka saa aikaa pumpun ja ohjaimen sammumisen 190 362 TPS mobile User Manual 87 901 005 01 B Ohjek sikirja 10 Erityisyksik t Huolto TPS mobile arkkitehtuuri voidaan yksil llist erilaisten vaatimusten perusteella saamalla aikaan erityisi mallinumeroita Lukuun ottamatta erityisell dokumentaatiolla varustettuja m r ttyj tapauksia tata kaytt ohjetta voidaan soveltaa kaikissa erityisissa yksik iss jotka on merkitty MXXXX esimerkiks
4. Postava4 Aktiv cia syst mu a Po zapnut syst mu prostredn ctvom hlavn ho vyp na a bude riadiace zariadenie v vevy turbo nap jan ale v veva turbo ako aj v veva foreline zostan vypnut Aktiv cia syst mu umo uje riadiacemu zariadeniu zah ji tanie daja o tlaku prostredn ctvom volite n ho pr slu enstva Full Range Gauge FRG 700 ak je toto pripojen k spojovaciemu portu gauge na zadnej strane syst mu 260 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 Port m c ho pr stroje Postava 5 Pripojenie meracieho pr stroja a Je mo n spusti syst m prostredn ctvom voli a nazvan ho Pumping Po prepnut voli a Pumping do polohy 1 sa spust v veva turbo a v veva foreline Voli Pumping 5 o T Le o o Postava 6 Zah jenie erpania TPS mobile User Manual 87 901 005 01 B 261 362 14 N vod na Obsluhu I modely 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 nie s vybaven voli om Pumping ta ist funkcia je ovl dan tla idlom Start Stop ktor sa nach dza na riadiacom zariaden
5. Installera och eller anv nd inte pumpsystemet i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar over atmosf riskt tryck a temperatur fran 5 C till 35 C a relativ luftfuktighet 0 95 utan kondens TPS mobile skall placeras p en plan yta St ll TPS mobile p en stabil position och koppla turbopumpens ing ngsfl ns till ett kontrafl ns som kan motst ett tdragningsmoment p 50 Nm runt den egna axeln direkt eller med hj lp av en flexible koppling Turbopumpen med ISO ing ngsfl ns skall kopplas till kontrafl nset med hj lp av kl mmor Tabellen nedan beskriver f r varje typ av kl mma antalet kl mmor som beh vs och med vilket tdragningsmoment de skall dras t 146 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning 8 Tab 1 FL NS TYP AV KLAMMER ANT TDRAGNINGSMOMENT ISO 63 Dubbel klammer g nga M10 4 22 Nm ISO 100 K Dubbel klammer g nga M10 4 22 Nm ISO 160K Dubbel klammer ganga M10 4 22 Nm Turbopumparna med intagsflins ConFlat ska f stas vid vakuumkammaren med hj lp av Agilent f stdelar F r detaljer h nvisas till bilaga Technical Information TPS mobile systemet kan inte fastsp nnas med sin egen bas Installation av tillbeh rsutrustning beskrivs i Technical Informati
6. Gauge poort Figuur 5 Aansluiting van de gauge Het systeem kan worden gestart via de keuzeschakelaar Pumping Nadat de keuzeschakelaar Pumping in de stand 1 is gezet worden de turbopomp en de foreline pomp gestart Selector Pumping Figuur 6 Pompen starten TPS mobile User Manual 87 901 005 01 B 117 362 6 Bedrijfshandleiding De modellen 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 hebben geen keuzeschakelaar Pumping de knop Start Stop op de controller heeft dezelfde functie Afzetten van de TPS mobile Het systeem kan worden gestopt via de keuzeschakelaar Pumping door hem in de stand 0 te zetten de controller blijft ingeschakeld en indien een gauge op het systeem is aangesloten kan de druk ook worden afgelezen als de pompen uit staan Het systeem kan ook worden uitgeschakeld door middel van de hoofdschakelaar door hem in de stand 0 te zetten Het systeem wordt dan volledig uitgeschakeld zodat geen drukmetingen of andere bewerkingen meer mogelijk zijn Noodstop Om de TPS mobile onder noodomstandigheden te stoppen kan de voedingskabel uit de contactstop worden gehaald waardoo
7. Huomio merkinn t varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vaurioitumiseen Huomautukset sis lt v t t rke tekstiss k sitelty tietoa 178 362 TPS mobile User Manual 87 901 005 01 B Ohjek sikirja 10 Varastointi Noudata seuraavassa annettuja ohjeita Agilent pumppausjarjestelmien parhaan ja luotettavan toiminnan takaamiseksi Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt a l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st HUOMIO Jos varastointiaika on jostain syyst pidempi pumppausj rjestelm tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta TPS mobile User Manual 87 901 005 01 B 179 362 10 Ohjek sikirja Valmistelut asennusta varten TPS mobile toimitetaan erityisessa suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TPS mobile n putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymparist n Pakkausmateriaali
8. Vypnutie TPS mobile Syst m je mo n vypn voli om Pumping jeho prepnut m do polohy 0 riadiace zariadenie zostane zapnut a ak je do syst mu pripojen mera bude mo n pokra ova v od tavan tlaku aj pri vypnut ch v vev ch Alternativne je mo n syst m vypn hlavn m vyp na om jeho prepnut m do polohy 0 D jde k pln mu vypnutiu syst mu a nebude mo n od ta tlak ani vykon va in oper cie N dzov zastavenie TPS mobile je mo n bezpe n n dzovo zastavi vytiahnut m nap jacieho k bla zo z str ky o sp sob vypnutie v vevy a riadiaceho zariadenia 262 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 Speci lne jednotky Udr ba Platforma TPS mobile m e byt u vate sky prisp soben v z vislosti na pecifick ch potreb ch kedy bude modelu pridelen peci lne slo S v nimkou pecifick ch pr padov ktor maj pecifick dokument ciu tento n vod je aplikovate n na peci lne jednotky ozna en MXXXX napr klad 969 8420M2001 V v va TPS compact nevy aduje dnou dr bu s v jimkou vym ny Tip seal pre verzie s v vevami scroll alebo s dopl ovan m v menou oleja pre verzie s v vevami Rotary Vane Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l NEBEZPE IE Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvet
9. ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe N NY NZ VA 4 ZN be N TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 284 General Information 285 Storage 287 Preparation for Installation 288 Installation 290 Use 292 witching on and Use of TPS mobile 293 TPS mobile Switching off 298 Emergency Stop 298 Modified Standard299 Maintenance 299 Disposal 300 Original Instructions 222 Agilent Technologies 263 362 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 284 362 TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be he
10. If a system is to be scrapped it must be disposed of in accordance with the specific national standards TPS mobile User Manual 87 901 005 01 B 299 362 16 Instructions for Use Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale ES 4 SZ ZN LX pI 300 362 TPS mobile User Manual 87 901 005 01 B Go 17 Technical Information TPS mobile User Manual Description of the TPS mobile 303 1 Turbopump Description 306 2 Front Panel 307 3 Electrical Devices Box 308 4 5 m TMP and Fan Cables 308 5 Wheels 308 6 Foreline Pumps Description 309 Technical Specification 311 Conformity Certificate 318 TPS Mobile Outline 319 Vaccum Inlet Flange 320 Inlet Screen Installation 320 High Vaccum Flange Connection 322 High Vaccum Flange Connection Configurations 324 Electrical Connections 325 Input Power Connector
11. NEBEZPE gt PI PI Predch zejte n raz m i posun m turbomolekul rni vyv vy b hem jejiho chodu Mohlo by dojit k po kozeni lo isek a tak ke zran amp ni osob i kod m na v cech 238 362 TPS mobile User Manual 87 901 005 01 B N vod k Pouziti 13 POZOR Pro odv tr n v v vy pou vejte inertn plyn bez prachu stic a vlhkosti nap dus k Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rickym tlakem VI3 194 418108 Pokud pou v te erpac syst m pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn Zapnut a pou v n v v vy TPS mobile Po vybalen TPS mobile se vizu ln kontrolou ujist te e se syst m b hem p epravy nepo kodil kritick mi stmi jsou p ruby v v vy konzoly pro upevn n v v vy Foreline eln panel a kola syst mu a Zkontrolujte vstupn nap t uveden na t tku Agilent p ilepen m na r mu elektronick jednotky syst mu TPS mobile User Manual 87 901 005 01 B 239 362 13 N vod k Pou it slo modelu PN V robn slo SN daje elektrick ho rozvodu Postava 2 Kdy je nap t v elektrick s ti vhodn pro nap jen syst mu je mo n p ipojit nap jac kabel elektrick ho nap
12. Suministrar la tensi n correcta al sistema mediante el cable de alimentaci n a El sistema est equipado con un Interruptor Principal interruptor t rmico capaz de proteger los componentes del sistema contra sobrecargas o cortocircuitos Colocar el interruptor en la posici n 1 para comenzar a operar con el TPS m vil TPS mobile User Manual 87 901 005 01 B 79 362 4 Manual de istrucciones Interruptor principal con protecci n t rmica Turns Figura 4 Activaci n del sistema a La activaci n del sistema mediante el Interruptor Principal suministra la alimentaci n al controlador de la turbobomba pero tanto sta como la bomba de apoyo permanecen apagadas La activaci n del sistema permite al controlador comenzar con la lectura del dato de presi n mediante el Full Range Gauge FRG 700 opcional si este ultimo esta conectado a la tapa de conexi n del indicador ubicada en la parte trasera del sistema 80 362 TPS mobile User Manual 87 901 005 01 B Manual de istrucciones 4 Puerto del gauge Puerto serial Figura 5 Conexi n del gauge Se puede poner en marcha el sistema mediante el selector denominado Pumping Despu s de colocar el selector Pumping en la posici n 1 la bomba y la bomba d
13. Communication failure Degas not working Failed to start Other Error cade on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purc
14. Istruzioni per l uso 1 Immagazzinamento Per garantire il massimo livello di funzionalit ed affidabilit dei sistemi di pompaggio Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da O a 95 non condensante a il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione mia dan al Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre rinviare il sistema di pompaggio in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent TPS mobile User Manual 87 901 005 01 B 17 362 1 Istruzioni per uso Preparazione per l installazione ATTENZIONE II TPS mobile viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TPS mobile e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85
15. 2 Rack Controller 3 3 Figure 23 RS 232 Connection TPS mobile User Manual 87 901 005 01 B 329 362 17 Technical Information PC HOST TURBO CONTROLLER B CONTROLLER B 2 Figure 24 RS 485 Connection The communication port mating connector is supplied with the RS 232 PCB AMP Cannon or equivalent 15 pin D type male connector For example the Transmit data signal from controller pin 2 must be connected to the host computers receive data line pin 2 and vice versa Consult the host computers instruction manual for its serial port connections Agilent cannot guarantee compliance with FCC regulations for radiated emissions unless all external wiring is shielded with the shield being terminated to the metal shroud on the 0 subconnector The cable should be secured to the connector with screws 330 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Serial Communication Description This unit can comunicate by two different protocol protocol old system letter Window protocol new system These two protocols can be used as well with 232 or 485 media Please use Window protocol for new development Letter Protocol Description The default protocol is Window Communication format 8 data bit a no parity 1 stop bit The baud rate is programmable via front panel from 600 to 9600 baud The controller is
16. 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada AVV UI Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 68 362 TPS mobile User Manual 87 901 005 01 B Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales especificas El TPS mobile es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vacio integrada por el respectivo controlador y la bomba primaria El sistema puede bombear cualquier tipo de gas o de composici
17. Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 342 362 TPS mobile User Manual 87 901 005 01 B Command READ PUMP STATUS Source PC Destination Controller with address 3 Technical Information 17 02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command REAL SERIAL TYPE Source PC Destination Controller with address 3 in 485 mode 02 8 35 30 34 30 03 38 31 STX ADDR WINDOW RD ETX CRC Source Controller Destination PC 02 83 35 30 34 30 31 03 42 30 STX ADDR WINDOW RD DATA ETX CRC TPS mobile User Manual 87 901 005 01 B 343 362 Window Meanings N Read Write R W 001 R W R W R W 101 R W R W R W R W R W R W R W R W 344 362 Data Description Type Start Stop in remote Front mode the window is a read only Low Speed Activation Soft Start write only in Stop condition R1 Set Point type R1 Set Point valve expressed in Hz W or s Set Point delay time between the pump start and the set point check second
18. Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpesystemet returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon TPS mobile User Manual 87 901 005 01 B 161 362 9 instruksjon Manual Klargj re til installasjon TPS mobile leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TPS mobile pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig mate Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse Figur 1 Se Fora unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr 162 362 TPS mobile User Manual 87 901 005 01 B Instruksjon Manual 9 Normale milj messige belastninger kan ikke delegge TPS mobile Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedst ving Modellene som angis i denne bruksanvisningen baserer seg p plattformen av pumpesystemer fra Agilent kalt TPS mobile Forskjellene som inntroduseres av de forskjellige modellnumrene gjelder for den turbomolekyl re pumpen og for den innebygde foreline pumpen i d
19. Kabel zasilajacy Posta 3 Pod czenie zasilania PRZYPIS Model 969 8433 jest wyposa ony w zintegrowany kabel zasilajacy w zwiazku z czym operacja ta nie jest konieczna Doprowadzi prawid owe napi cie do systemu za pomoc kabla zasilaj cego a System jest wyposa ony w wy cznik g wny wy cznik termiczny kt ry zapewnia ochron element w systemu przed przeci eniem lub zwarciem Ustawi wy cznik w po o eniu 1 w celu rozpocz cia pracy z TPS mobile TPS mobile User Manual 87 901 005 01 B 223 362 12 Podrecznik Instrukcji Wy cznik g wny z zabezpieczeniem termicznym Posta 4 Uruchomienie systemu a Uruchomienie systemu za pomoc wy cznika g wnego powoduje doprowadzenie zasilania do sterownika turbopompy ale zar wno turbopompa jak i pompa foreline pozostaj wy czone Uruchomienie systemu umo liwia sterownikowi rozpocz cie odczytu ci nienia przez opcjonalny Full Range Gauge FRG 700 je eli przyrz d ten jest pod czony do portu przyrz du pomiarowego znajduj cego si w tylnej cz ci systemu 224 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 Port przyrzadu pomiarowego Port szeregowy Posta 5 Pod czenie przyrz du p
20. Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will e
21. including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater tha
22. ngigt af forskellige krav med specifikke modelnumre Med undtagelse af specifikke tilf lde der er ledsaget med en specifik dokumentation kan denne manual anvendes til alle de specielle enheder m rket med MXXXX for eksempel 969 8420M2001 Vedligeholdelse TPS compact beh ver ikke nogen vedligeholdelse med undtagelse af Tip seal pakningen for de versioner der er udstyret med scroll pumper eller med p fyldning udskiftning af olie til de versioner med Rotary Vane pumper Ethvert indgreb skal foretages af autoriseret personale Inden der foretages noget som helst indgreb p systemet skal str mmen f rst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted Inden systemet sendes til reparationsv rkstedet skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal foreg i overensstemmelse med det p g ldende lands s rlige love TPS mobile User Manual 87 901 005 01 B 137 362 7 Istruktionsbog Bortskaffelse Betydningen af WEEE logoet p m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g lden
23. o tlaku prost ednictv m voliteln ho p slu enstv Full Range Gauge FRG 700 je li toto p ipojeno ke spojovac mu portu gauge na zadn stran syst mu 242 362 TPS mobile User Manual 87 901 005 01 B N vod k Pouziti 13 Port m c ho pr stroje Postava 5 P ipojen m ic ho p stroje System je mo n spustit prost ednictv m voli e nazvan ho Pumping Po p epnut voli e Pumping do polohy 1 se spust v v va turbo a v v va foreline Voli Pumping 5 o T Le o o Postava 6 Zah jen erp n TPS mobile User Manual 87 901 005 01 B 243 362 13 N vod k Pou it Modely 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 nejsou vybaveny voli em Pumping stejn funkce je ovl d na tla tkem Start Stop kter se nach z na dic m za zen Vypnut v v vy TPS mobile Syst m je mo n vypnout voli em Pumping jeho p epnut m do polohy 0 dic za zen z stane zapnuto a kdy bude do syst mu p ipojen m i bude mo n pokra ovat v ode t n tlaku i p i vypnut ch v v v ch Alternativn je mo n syst m
24. vitt tavallisen kotitalous tai teollisuusjatteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot NY M N 4 OY ABBE 192 362 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 11 Felhasznaloi Kezik nyv Biztons gi tmutat Turb molekul ris szivatty khoz 194 ltal nos inform ci 195 Tarolas 197 El k szit s telepit sre 198 Telepit s 200 Haszn lat 202 A TPS mobile bekapcsol sa s haszn lata 203 A TPS mobile kikapcsol sa 208 V szleallitas 208 Speci lis egys g 209 Karbantart s 209 Megsemmis t s 210 Az eredeti utasitas forditasa ii Agilent Technologies 193 32 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben a
25. zat tartalmazza szor t t pusonk nt hogy h ny szor t sz ks ges s milyen z r nyomat kkal kell z rni 200 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 Tab 1 KARIMA R GZIT ESZK Z N R GZ TO NYOMATEK ISO 63 M10 kapcsok 4 22 Nm ISO 100K M10 kapcsok 4 22 Nm po ISO 160 K MIO kapcsok 4 22 Nm A ConFlat bemeneti karim s turb szivatty t a megfelel Agilent hardverrel kell r gz teni a v kuumkamr hoz R szletes le r s rt l sd Technical Information ATPS mobile nem r gzithet az alapj n kereszt l Opcion lis tartoz kok telep t s hez v lassza a Technical Information TPS mobile User Manual 87 901 005 01 B 201 362 11 Felhaszn l i K zik nyv Haszn lat Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat Miel tt a rendszert haszn lja ellen rizze hogy valamennyi elektromos s hidraulikus csatlakoz s megfelel en k sz lt A v kuumkamra meleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot VESZELY Soha ne haszn lja a szivatty z rendszert amikor a bemeneti karima nincs VESZELY Ne rintse meg a turb szivatty t vagy annak tartoz kait a melegit si folyamat k zben Magas h m rs klet g st okozhat csatlakoztatva a v kuumkamr hoz vagy nincs kiiktatva VESZELY Ne mozditsa el s vigy zzon ne tk zz n semmi a turb szivatty hoz
26. 01 B 351 362 17 Technical Information PN 969 8433 is already supplied with an integrated power cord so you don t need to perform this step 4 Provide the correct voltage to the system through the power cord 5 The system is equipped with a main switch thermal breaker able to protect the system components against overload or short circuits Move the breaker switch to the position 1 to start operating with the TPS mobile Main switch with thermal protection Figure 30 System activation 6 The system activation by means of the Main Switch provides voltage to TMP controller but both TMP and Foreline pump continue to be switched off The system activation allows the TMP controller to start reading the pressure data through the optional FRG 700 Full Range Gauge if it is connected to the gauge connection port on the rear side of the system 352 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Gauge port a N Serial port Figure 31 Gauge connection 7 Itis possible to start pumping by means of the selector named Pumping As soon as the Pumping selector is moved to the position 1 the TMP and Foreline pu
27. 362 TPS mobile User Manual 87 901 005 01 B Bedrijfshandleiding 6 an vala ue Gebruik voor de luchttoevoer naar de pomp inert gas zonder stof vaste deeltjes of vocht bijv stikstof De inlaatdruk via de hiervoor bestemde poort moet minder van 2 bar boven de atmosferische druk bedragen Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik het pompsysteem niet in aanwezigheid van explosieve gassen Inschakeling en gebruik van de TPS mobile a Controleer de TPS mobile na het uitpakken visueel op transportschade van het systeem kritieke onderdelen zijn flens van de pomp bevestigingssteunen van de Foreline pomp voorpaneel en wielen van het systeem Controleer de ingangsspanning op het Agilent etiket dat op de behuizing van de elektronische unit van het systeem is geplakt TPS mobile User Manual 87 901 005 01 B 113 362 6 Bedrijfshandleiding Modelnummer PN Seriennummer SN Elektrische gegevens Figuur 2 Als de spanning van het elektrische voedingsnet compatibel is met die van het systeem kan de elektrische voedingskabel op het contact type IEC320 op het achterpaneel van het systeem worden aangesloten zie figuur Het aansluitcontact is voorzien van een borgveer om onvoorziene afkoppeling van de voedingskabel te voorkomen gebruik de veer om
28. 399 per la tutela dell ambiente Figura 1 Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata 18 362 TPS mobile User Manual 87 901 005 01 B Istruzioni per l uso 1 Il TPS mobile non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere I modelli indicati in questo manuale d istruzioni sono basati sulla piattaforma sistemi di pompaggio Agilent denominata TPS mobile le differenze introdotte dai vari numeri di modello sono relative alla pompa turbomolecolare ed alla pompa di foreline integrata nello specifico modello oltre alla tensione applicabile al sistema Le differenze tra i diversi modelli del TPS mobile riguardano solo le prestazioni del sistema mentre il funzionamento e le procedure d uso sono le medesime per tutti i TPS mobile Le informazioni riportate sono applicabili all intera piattaforma tutti i modelli indipendentemente dalla specifica pompa turbomolecolare pompa di foreline o alimentazione elettrica TPS mobile User Manual 87 901 005 01 B 19 362 1 Istruzioni per uso Installazione Faith Staccare l adesivo e togliere il tappo di protezione solo al momento del c
29. 4 Unidades especiales La plataforma TPS m vil se puede personalizar de acuerdo con las distintas necesidades obteniendo n meros de modelo espec ficos A excepci n de casos especiales provistos de documentaci n especifica este manual se puede aplicar a todas las unidades especiales con marcado MXXXX por ejemplo 969 842M2001 Mantenimiento El TPS mobile no necesita ning n mantenimiento a excepci n de la sustituci n del Tip seal para las versiones eguipadas con bombas scroll o con llenado cambio de aceite para las versiones con bombas de paleta rotativa Toda intervenci n deber ser realizada por personal autorizado ADVERTENCIA Antes de realizar cualquier operaci n en el sistema desconectarlo de la alimentaci n disponer la bomba en presi n atmosf rica abriendo la v lvula respectiva y esperar hasta que el rotor se pare completamente y que la temperatura superficial de la bomba se reduzca a menos de 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent Antes de enviar al fabricante un sistema para su reparaci n es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales espec ficas TPS mobile User M
30. 901 005 01 B Istruzioni per l uso 1 Molla di ritenzione Cavo di alimentazione Figura 3 Collegamento del alimentazione NOTA Il modello 969 8433 fornito con un cavo d alimentazione integrato quindi non necessario eseguire questa operazione a Fornire la tensione corretta al sistema mediante il cavo d alimentazione a Il sistema equipaggiato con un interruttore principale interruttore termico in grado di proteggere i componenti del sistema contro sovraccarichi o corto circuiti Porre l interruttore in posizione 1 per cominciare ad operare con il TPS mobile TPS mobile User Manual 87 901 005 01 B 25 362 1 Istruzioni per uso Interruttore principale con protezione termica i Figura 4 Attivazione del sistema L attivazione del sistema mediante I Interruttore Principale fornisce alimentazione al controller della pompa turbo ma sia la pompa turbo sia la pompa di foreline restano spente L attivazione del sistema permette al controller d iniziare la lettura del dato di pressione attraverso il Full Range Gauge FRG 700 opzionale se quest ultimo collegato alla porta di connessione gauge posta nella parte posteriore del sistema 26 362 TPS mobile User Manual 87 901 005 01 B Is
31. B Ohjek sikirja 10 Yleisi tietoja Tama laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnista ammattitaidottoman henkil n virheellisesta laitteen k yt st valtuuttamattomista toimenpiteista tai kansallisen lains d nn n vastaisesta k yt st TPS mobile on kokonaisj rjestelm joka muodostuu valvojalla ja p pumpulla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen sihk moottori Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TPS mobile User Manual 87 901 005 01 B 177 362 10 Ohjek sikirja Tama k sikirja k ytt seuraavanlaisia merkint j WU Vaara merkinn t saavat k ytt j n huomion kiinnittym n erityisiin toimintotapoihin joiden seuraamatta j tt minen voi aiheuttaa vakavia henkil vaurioita
32. Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 901 005 01 B Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support 8 Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl raQagilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
33. ISO 63 Dobbelt klemme med M10 gevind 4 22 Nm ISO 100K Dobbelt klemme med M10 gevind 4 22 Nm ISO 160K Dobbelt klemme med M10 gevind 4 22 Nm Turbopumpen med ConFlat indl bsflange skal tilsluttes p vakuumkammeret ved hj lp af Agilent monteringsudstyret I bilaget Technical Information findes yderligere detaljer TPS mobile kan ikke fastg res i fundamentet Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret TPS mobile User Manual 87 901 005 01 B 129 362 7 Istruktionsbog Anvendelse Dette afsnit beskriver de vigtigste driftsprocedurer F r systemet tages i brug kontroller at alle elektriske og pneumatiske tilslutninger er korrekt udf rt I forbindelse med opvarmning af vakuumkammeret m indl bsflangens temperatur ikke overstige 120 C ADVARSEL A Pumpen m aldrig aktiveres hvis indlobsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen ADVARSEL A Ror aldrig turbopumpen eller dens tilbehor i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer ADVARSEL A Undg st d eller pludselige bev gelser af turbopumpen mens den er aktiveret Der er risiko for beskadigelse af lejerne og det kan medfore skader p personer eller ting 130 362 TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 FORSIGTI
34. Mode d emploi Installation Marine Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me Ne pas installer et ou utiliser le syst me de pompage dans des milieux expos s aux agents atmosph riques pluie gel neige la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression max 2 bars au del de la pression atmosph rique temp rature de 5 C 35 C a humidit relative 0 95 non condensante En pr sence de champs magn tiques le systeme de pompage doit tre prot g e a l aide d crans appropri s Le TPS mobile doit tre install sur une surface plane Placez le TPS mobile en position stable en reliant la bride d entr e de la turbopompe une contrebride capable de r sister un couple de 50 Nm autour de son axe directement ou au moyen d un raccord flexible La turbopompe bride d entr e ISO doit tre reli e la contrebride au moyen de mors Le tableau ci dessous indique pour chaque type de mors le nombre de mors et le couple de serrage 56 362 TPS mobile User Manual 87 901 005 01 B Mode d emploi 3 Tab 1 COUPLE DE BRIDE TYPE DE COLLIER N SERRAGE ISO 63 Collier double filet M10 4 22 Nm ISO 100 K Collier double a filet M10 4 22 Nm ISO 160 K Collie
35. O 95 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist das Pumpensystemdie Pumpe entsprechend abzuschirmen Das System TPS mobile in eine stabile Position stellen und den Eingangsflansch der Turbopumpe mit einem Gegenflansch verbinden der einem Drehmoment von 50 Nm um die Achse widersteht direkt oder uber ein flexibles Anschlussst ck Die Turbopumpe mit Eingangsflansch ISO muss mit Klemmen an den Gegenflansch geschlossen werden Die folgende Tabelle beschreibt fir jede Klemmenart die Anzahl der notwendigen Klemmen und mit welchem Anzugsmoment sie angezogen werden miissen TPS mobile User Manual 87 901 005 01 B Gebrauchsanleitung 2 Tab 1 FLANSCH KLEMMSCHELLE ANZ ANZUGSMOMENT ISO 63 Doppelschelle mit Gewinde M10 4 22 Nm ISO 100 K Doppelschelle mit Gewinde M10 4 22 Nm ISO 160 K Doppelschelle mit Gewinde M10 4 22 Nm Turbopumpen mit ConFlat Eingangsflansch sind mit dem speziellen Agilent Befestigungsmaterial an die Vakuum kammer anzuschliefen Fur ausfiihrliche Informationen siehe im Anhang Technical Information Modell TPS mobile kann nicht mittels seines Sockels befestigt werden Fur die Installation der Optionsteile siehe im Anhang Technical Information TPS mobile User Manual 87 901 005 01 B 39 362 2 Gebrauchsanleitung Gebrauch In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Bevor das System ben tzt wird prufen ob alle Strom und
36. Per arrestare in condizioni di emergenza il TPS mobile possibile staccare il cavo di alimentazione dalla presa di rete ci provocher lo spegnimento della pompa e del controller 28 362 TPS mobile User Manual 87 901 005 01 B Istruzioni per l uso 1 Unit Speciali La piattaforma TPS mobile pu essere personalizzata in funzione delle diverse esigenze ottenendo specifici numeri di modello Ad eccezione di casi specifici forniti di specifica documentazione questo manuale applicabile a tutte le unit speciali marcate con MXXXX ad esempio 969 8420M2001 Manutenzione Il TPS mobile non richiede alcuna manutenzione ad eccezione della sostituzione del Tip seal per le versioni equipaggiate con pompe scroll o il rabbocco cambio olio per le versioni con pompe Rotary Vane Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo I apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent Prima di rispedire al costruttore un sistema per riparazioni e indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa
37. Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalnega sistema ne uporabljajte v prisotnosti eksplozivnih plinov Vklop in uporaba TPS mobile a Potem ko ste TPS mobile vzeli iz embala e vizualno preverite ali so na njem prisotne morebitne po kodbe ki bi nastale med prevozom kriti ni deli so prirobnica rpalke stremena za pritrditev rpalke foreline prednja plo a in kolesa sistema a Preverite vhodno napetost ki je navedena na nalepki Agilent prilepljeni na ohi je elektronske enote sistema TPS mobile User Manual 87 901 005 01 B 215 362 15 Priro nik za Navodila tevilka modela PN Serijska tevilka SN Elektri ni podatki Slika 2 e je elektri na napetost zdru ljiva z napetostjo sistema lahko elektri ni napajalni kabel vtaknete v vti nico tipa IEC320 na zadnji plo i sistema glej sliko Vti nica ima zaporno vzmet ki prepre uje nenamerni odklop napajalnega kabla uporabite vzmet za priklop napajalnega kabla 216 362 TPS mobile User Manual 87 901 005 01 B Priro nik za Navodila 15 Uporaba Zaporna vzmet Napajalni kabel Slika 3 Priklop napajanja OPOMBA Model 989 8433 ima vgrajen napajalni kabel zato ta postopek ni potreben S pomo jo napajalnega k
38. Tilf rsels ledning Figur 3 Tilkobling av tilf rsel MERK Den leverte modellen 989 8433 er utstyrt med en integrert tilforselsledning dermed er det ikke n dvendig utfgre dette inngrepet a S rg for rett spenning til systemet ved hjelp av el kabelen a Systemet er utstyrt med en hovedbryter overlastbryter som er i stand til beskytte systemets deler mot overlast og kortslutninger Sett velgeren i posisjon 1 for a starte med bruk av TPS mobile TPS mobile User Manual 87 901 005 01 B 169 362 9 instruksjon Manual Hovedbryter med beskyttelse mot Figur 4 Aktivering av systemet a Innkoblingen av systemet ved bruk av Hovedbryteren s rger for str mtilf rsel til turbopumpens controller men b de turbopumpen og Foreline pumpen forblir vsl tte Aktiveringen av systemet gj r det mulig for controlleren starte avlesning av trykkets data gjennom Full Range Gauge FRG 700 ekstrautstyr hvis denne er koblet til koblingsporten for gauge som befinner sge p baksiden av systemet 170 362 TPS mobile User Manual 87 901 005 01 B Instruksjon Manual 9 Gauge port Seriell port Figur 5 Gauge tilkobling a Det er mulig sette systemet i gang ved hjelp av valgbryteren kalt Pumping Etter a ha
39. a MASTER SLAVE type where Host MASTER a Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt Where When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character 338 362 a lt STX gt Start of transmission 0x02 a lt ADDR gt Unit address 0x80 for RS 232 a lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x81 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present TPS mobile User Manual 87 901 005 01 B Technical Information 17 The field length is variable according to the data type as per the following table Tab 20 Data Type Field Length Valid Characters Logic L 1 0 OFF 1 ON Numeric N 6 JI 0 9 right justified with 0 Alphanumeric A 10 from blank to ASCII lt ETX
40. an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Die in dieser Gebrauchsanleitung angegebenen Modelle unterliegen dem Angebot der Agilent Pumpensymsteme TPS mobile die durch die verschiedenen Modellnummern aufgef hrten Unterschiede beziehen sich auf die Turbomolek lpumpe und die Foreline Pumpe die im spezifischen Modell integriert ist sowie auf die im System vorhandene Spannung Die Unterschiede zwischen den verschiedenen Modellen des TSP mobile beziehen sich nur auf die Leistungen des Systems w hrend der Betrieb und das Anwendungsverfahren bei allen TPS mobile gleich sind Die aufgef hrten Informationen sind im ganzen Angebot anwendbar alle Modelle unabh ngig von der spezifischen Turbomolek lpumpe Foreline Pumpe oder mit Stromspeisung TPS mobile User Manual 87 901 005 01 B 37 362 2 Gebrauchsanleitung Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei AnschluB der Turbopumpe an das System abnehmen 38 362 Das Pumpensystem darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgefahrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb miissen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C Relative Luftfeuchtigkeit
41. cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TPS mobile est un syst me int gr constitu d une pompe turbomol culaire con ue pour des applications de vide pouss et ultrapouss et dot e d un contr leur et d une pompe primaire Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e mue par un moteur lectrique triphas haut rendement Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information TPS mobile User Manual 87 901 005 01 B 51 362 3 Mode d emploi Cette notice utilise les signes conventionnels suivants NEA AN Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale qui effectu e de fa on impropre risque de provoquer de graves l sions Fait Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareil
42. d emploi 3 Pour le refoulement l air de la pompe utiliser un gaz inerte d pourvu de poussi re particules ou humidit Ex azote La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bars au del de la pression atmosph rique NNN Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures typigues de chaque gaz Ne pas utiliser le syst me de pompage en pr sence de gaz explosifs Mise en marche et utilisation du TPS mobile a Apres avoir d ball le TPS mobile v rifiez visuellement que le syst me n a pas subi de d gats pendant le transport les parties critigues sont la bride de la pompe les pattes de fixation de la pompe primaire foreline facade avant et roues du syst me V rifiez la tension alimentation indiqu e sur tiguette Agilent coll sur le ch ssis de unit lectronique du syst me TPS mobile User Manual 87 901 005 01 B 59 362 3 Mode d emploi Num ro du modele PN Num ro de s rie SN Caract ristigues lectrigues Figure 2 Sila tension de l alimentation lectrique est compatible avec celle du syst me vous pouvez brancher le c ble d alimentation dans la prise lectrique de type IEC320 situ e a l arri re du syst me cf figure La prise est dot e d un ressort de maintien vitant les d branchements accidentels du c ble lectrique utiliser
43. de voedingskabel vast te zetten 114 362 TPS mobile User Manual 87 901 005 01 B Bedrijfshandleiding 6 Gebruik Borgveer Voedingskabel Figuur 3 Aansluiting van de voeding OPMERKING Het model 969 8433 wordt met een voedingskabel geleverd dus hoeft deze handeling niet uitgevoerd te worden a Sluit de juiste spanning op het systeem aan door middel van de voedingskabel a Het systeem is uitgerust met een hoofdschakelaar thermische schakelaar die dient om de componenten van het systeem tegen overbelasting of kortsluiting te beschermen Zet de schakelaar in de stand 1 om met de TPS mobile te gaan werken TPS mobile User Manual 87 901 005 01 B 115 362 6 Bedrijfshandleiding Hoofdschakelaar met thermische beveiliging Figuur 4 Inschakeling van het systeem Bij inschakeling van het systeem via de hoofdschakelaar wordt de controller van de turbopomp gevoed maar zowel de turbopomp als de foreline pomp blijven uit Door inschakeling van het systeem kan de controller beginnen met het aflezen van de drukwaarde via de optionele Full Range Gauge FRG 700 als deze op de gauge poort aan de achterkant van het systeem is aangesloten 116 362 TPS mobile User Manual 87 901 005 01 B Bedrijfshandleiding 6
44. ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen a l mp tila 5 C 35 C suhteellinen kosteus O 95 ei tiivist v Mik li lisna on magneettikentti tulee pumppausjarjestelmi suojata t h n tarkoitukseen olevilla suojilla TPS mobile on asetettava tasaiselle pinnalle Aseta TPS mobile vakaaseen asentoon kytkem ll turbopumpun sis nmenon laippa vastalaippaan joka kest 50 Nm v nt momentin akselinsa ymp rill suoraan tai joustavan liitoksen kautta Sis nmenossa olevalla ISO laipalla varustettu turbopumppu on liitett v vastalaippaan liittimien avulla Seuraavassa taulukossa kuvataan jokaista liitintyyppi kohti tarvittavien liittimien m r ja niiden kiristysmomentit 182 362 TPS mobile User Manual 87 901 005 01 B Ohjek sikirja 10 Tab 1 LAIPPA KIINNIKE M R KIRISTYS MOMENTTI ISO 63 Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 100K Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 160 K Kaksoiskiinnike kierteitys M10 4 22 Nm Turbopumppu ConFlat sis ntulolaipalla tulee kiinnitt tyhji kammioon sopivien Agilentin mekaanisten varusteiden avulla Lis tietoja l ytyy Te
45. f r die Ausf hrungen mit Rotary Vane Pumpen Eventuelle Eingriffe d rfen nur durch autorisiertes Fachpersonal ausgef hrt werden WARNUNG Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber Offnung des entsprechenden Ventils beliiften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service Bevor Fa Agilent ein System zur Reparatur das diesem Handbuch beiliegt ausgefullt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TPS mobile User Manual 87 901 005 01 B 47 362 2 Gebrauchsanleitung Entsorgung 48 362 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugefiihrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepruft hat A a p N 4 NA A TPS mobi
46. gt End of transmission 0x08 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt TPS mobile User Manual 87 901 005 01 B 339 362 17 Technical Information The controller can answers with the following response types Tab 21 Response Type Logic Numeric Alphanumeric ACK NACK Unknown Window Data Type Error Out of Range Win Disabled Response Length 1 byte Response Value Start when the Pump is running Description after a read instruction of a logic window after a read instruction of a numeric window after a read instruction of an alphanumeric window the command execution has been successfully completed the command execution has been failed the specified window in the command is not a valid window the data type specified in the command Logic Numeric or Alphanumeric is not accorded with the specified Window the value expressed during a wr
47. i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TPS mobile User Manual 87 901 005 01 B 123 362 7 Istruktionsbog I brugsanvisningen anvendes f lgende standardrubrikker VEZA Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne I modsat fald er der risiko for sv re personskader dose Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader Dette g r opm rksom p vigtig information i teksten 124 362 TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 Opbevaring For at sikre maksimal sikkerhed og driftssikkerhed af Agilent pumpe systemerne er det n dvendigt at overholde f lgende forskrifter a S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra O til 95 ikke kondenserende a Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for forste gang De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen diste e Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpeanl gget tilbage til fabrikken Yderligere oplysninger
48. k p ekro en skladovac lh ty erpac syst m mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent TPS mobile User Manual 87 901 005 01 B 233 362 13 N vod k Pou it Pr prava k instalaci V v va Mini Task se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n muZ mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 Postava 1 POZOR Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu TPS mobile User Manual 87 901 005 01 B N vod k Pouziti 13 V norm ln m prost edi se vyv va TPS mobile nem e po kodit Presto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem Modely uveden v tomto n vodu vych zej z platformy erpac ch syst m Agilent nazvan TPS mobile p i em rozd ly zaveden r zn mi sly model se vztahuj na turb
49. le ressort pour accrocher le cable d alimentation 60 362 TPS mobile User Manual 87 901 005 01 B Mode d emploi 3 Utilisation Ressort de maintien C ble d alimentation Figure 3 Raccordement de I alimentation NOTE Le mod le 969 8433 tant dot d un c ble d alimentation int gr cette op ration n est pas n cessaire a Alimenter la machine la tension prescrite l aide du cable d alimentation Le syst me est dot d un interrupteur principal disjoncteur thermique destin a prot ger les composants lectriques contre les surcharges ou les court circuit Placez interrupteur en position 1 pour commencer utiliser le TPS mobile TPS mobile User Manual 87 901 005 01 B 61 362 3 Mode d emploi Interrupteur principal protection thermique Figure 4 Mise en marche du systeme La mise en marche du syst me avec interrupteur principal alimente galement le contr leur de la turbopompe mais la pompe turbo et la pompe primaire restent l arr t La mise en marche du systeme permet au contr leur de commencer a lire la valeur de pression du manometre Full Range Gauge FRG 700 optionnel si ce dernier est reli au port de raccordement situ l arri re du syst me 62 362 TPS mobile
50. m s turbov vevou pre ur en pre aplik cie pou vaj ce vysok alebo ve mi vysok v kuum spojen s pr slu n m kontroln m modulom a v vevou prim rneho v kua Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turb na poh an vysokov konn m 3 f zov m elektrick m motorom Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information TPS mobile User Manual 87 901 005 01 B 249 362 14 N vod na Obsluhu N vod na pou itie obsahuje tieto tandardn ozna enia 3 34J4H 4 Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Pozn mky upozor uj na d le it inform cie z textu 250 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 Uchov vanie Aby sa zaistila maxim lna funk nost a spolahlivost erpacich sustav Agilent je potrebn dodr iava nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah
51. ma behandles som vanlig hus industriavfall men ma legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverand ren av anordningen som kan v re et firma eller en forhandler som s rger for oppsamling og kassering etter ha kontrollert avtaler og betingelser i kj pekontrakten ES 4 L SZ ZN LX JA A 174 362 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 176 Yleisi tietoja 177 Varastointi 179 Valmistelut asennusta varten 180 Asennus 182 Kaytt 184 TPS mobile n k ynnistys ja k ytt 185 TPS mobile n pys ytt minen 190 H t pys ytys 190 Erityisyksik t 191 Huolto 191 H vitt minen 192 Alkuper isen ohjeiden k nn s 05 Agilent Technologies 175 32 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea maara kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia saattaa vapautua VAROITUS T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 176 362 laitteiston vaurioitumisen ja kayttajien vahingoittumisen v ltt miseksi TPS mobile User Manual 87 901 005 01
52. mobile no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta el momento de la instalaci n en el sistema para evitar su posible contaminaci n por polvo Los modelos citados en este manual de instrucciones se basan en la plataforma para sistemas de bombeo Agilent denominada TPS m vil las diferencias aportadas por los distintos n meros de modelo corresponden a la bomba turbomolecular y a la bomba de previo integrada al modelo espec fico como as tambi n a la tensi n aplicable al sistema Las diferencias entre los distintos modelos del TPS m vil respectan s lo a las prestaciones del sistema mientras que el funcionamiento y los procedimientos de uso son los mismos para todos los TPS m vil La presente informaci n es aplicable a toda la plataforma todos lo modelos independientemente de la bomba turbomolecular espec fica de la bomba de previo o de la alimentaci n el ctrica TPS mobile User Manual 87 901 005 01 B 73 362 4 Manual de istrucciones Instalacion ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo en el momento de conectar la turbobomba al sistema 74 362 No instalar ni o utilizar el sistema de bombeo en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos ni en ambientes sujetos a riesgo de explosi n o incendio Durante el funcionamiento es necesario que s
53. poh n n vysoce v konn m trojf zov m elektromotorem N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TPS mobile User Manual 87 901 005 01 B 231 362 13 N vod k Pou it Tento manu l pou v n sleduj c standardn protokol 4 1743 HM V stra n hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v pfipad nedodr eni mohly zp sobit v n raz POZOR Varovna hl en jsou uvedena pied postupy kter by v pripad nedodr en mohly po kodit za izeni Pozn mky obsahuj d le it informace p evzat z textu 232 362 TPS mobile User Manual 87 901 005 01 B N vod k Pouziti 13 Uskladn ni Pro zaru en maxim ln rovn funk nosti a spolehlivosti vyvevovych syst m Agilent je treba respektovat nasledujici predpisy P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti O a 95 bez sr en turbomolekul rni vyv vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln a skladovatelnost turbomolekul rni vyv vy je 10 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu
54. pru n ho spoje Turbov v va se vstupn p rubou ISO mus b t pripojena k protip rub prost ednictv m svorek N sleduj c tabulka popisuje pro ka d druh svorky pot ebn po et svorek a p slu n utahovac moment 236 362 TPS mobile User Manual 87 901 005 01 B N vod k Pouziti 13 Tab 1 PR RUBA PRICHYTNE ZARIZENI PO ET UTAHOVAC MOMENT ISO 63 Spony M10 4 22 Nm ISO 100K Spony M10 Ne 22Nm ISO 160K Spony M10 4 22 Nm Turbomolekul rni vyv va se vstupni p rubou ConFlat se mus pripevnit k vakuov komo e pou it m pr slu n ho materi lu firmy Agilent Viz podrobn popis v priloze Technical Information V v vu TPS mobile nelze p ipevnit pomoc jej podstavy Chcete li informace o dopl kov m p slu enstv viz Technical Information TPS mobile User Manual 87 901 005 01 B 237 362 13 N vod k Pou it Pou it Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup Pred pou it m syst mu zkontrolujte zda byla spr vn zrealizovana v echna elektrick a pneumatick zapojen P i zah v n vakuov komory teplota vstupn p ruby nesm p ekro it 120 C NEBEZPE erpac syst m nikdy nepou vejte nebude li vstupni pfiruba pripojen k vakuov komore NEBEZPE B hem zahrivani se turbov v vy ani jejiho prislu enstvi nedot kejte Vysok teplota m e zp sobit pop leniny
55. result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature 1 1 1 1 21 2 1111 Pg 2 3 s Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Fareline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Salenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode
56. satt velgeren Pumping i posisjon 1 vil turbopumpen og Foreline pumpen starte Bryter for pumping Figur 6 Start av pumping TPS mobile User Manual 87 901 005 01 B 171 362 9 instruksjon Manual Modellene 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 er ikke utstyrt med valgbryteren kalt Pumping den samme funksjonen utfgres av knappen Start Stop som befinner seg pa controlleren Stoppe TPS mobile a Deter mulig a sl av systemet ved hjelp av valgbryteren Pumping ved a sette den i stillingen 0 controlleren vil forbli paslatt og hvis en gauge er tilkoblet systemet vil det v re mulig a fortsette a lese av trykkket ogs n r pumpene er sl tt av En annen mate sl av systemet p er bruke Hovedbryteren ved sette den i posisjonen 0 Systemet vil sl seg fullstendig av og det vil ikke v re mulig hverken lese av trykk eller utfgre andre inngrep Nodstopp For a stanse TPS mobile i nadstopp er det mulig koble fra str mkabelen fra nettets stikkontakt dette vil medf re at pumpen og controlleren sl s av 172 362 TPS mobile User Manual 87 901 005 01 B Instruksjon Manual 9 Spesialenheter Pla
57. scroll ou o abastecimento troca de leo para as vers es com bombas Rotary Vane Todas as operac es devem ser efectuadas por pessoal autorizado ADVERTENCIA Antes de executar qualquer operac o no sistema deslig lo da rede de alimentac o introduzir ar na bomba abrindo a v lvula espec fica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assistencia Agilent Antes de reenviar ao fabricante um sistema para as reparac es indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguranca e Sa de anexa ao presente manual de instruc es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedic o Caso uma bomba deva ser eliminada actue em conformidade com as normas nacionais espec ficas TPS mobile User Manual 87 901 005 01 B 101 362 5 Manual de Istruc es Eliminacao 102 362 Significado do log tipo WEEE presente nos r tulos O simbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este s mbolo v lido apenas para os paises da Comunidade Europeia indica que o produto no qual est aplicado NAO deve ser eliminado juntamente com os residuos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo
58. seconds long coded in 4 bytes 6 Deat time 0 NO 1 YES 7 Reserved TPS mobile User Manual 87 901 005 01 B 335 362 17 Technical Information When the Request is I Status readings the Answer will contain a string of 2 characters with the following parameters Tab 17 BYTES MEANING 1 MSB LSB XXX XXX 0 STOP 1 WAITING INTERLOCK 2 STARTING 3 NORMAL OPERATION 4 5 HIGH LOAD 6 FAILURE 1 APPROACHING LOW SPEED R2 status 0 OFF 1 0N R1 status 0 OFF 1 0N 2 When the Request is J Numerical readings the Answer will contain a string of 5 characters with the following parameters Tab 18 BYTES MEANING 1 Current 0 255 scaled i Fer kes ee 3 Rotational speed KRPM i Pump temperature C 0 254 temperature reading 255 fil 5 336 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 When the Request is K Counters readings the Answer will contain a string of 11 characters with the following parameters Tab 19 BYTES MEANING 1 4 Cycle time 5 8 Pump life 9 10 Cycle number On request a sample program in QBasic language is available by Agilent Window Protocol Description Communication Format 8 data bit a no parity 1 stop bit a baud rate 600 1200 2400 4800 9600 programmable TPS mobile User Manual 87 901 005 01 B 337 362 17 Technical Information Communication Protocol The communication protocol is
59. seja este o fabricante ou um revendedor para encaminhar o processo de recolha e elimina o ap s a oportuna verificac o dos termos e condic es do contrato de venda NY M N 4 OY ABBE TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 104 Algemene informatie 105 Opslag 107 Uitpakken 108 Installatie 110 Gebruik 112 Inschakeling en gebruik van de TPS mobile 113 Afzetten van de TPS mobile 118 Noodstop 118 Speciale units 119 Onderhoud 119 Afvalverwerking 120 Vertaling van de originele instructies EE Agilent Technologies 103 362 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen VNG EIS UNIES Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 104 362 TPS mobile User Manual 87 901 005 01 B Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aanda
60. sistema por meio de uma inspecc o visual Verificar a tens o de entrada informada na etiqueta Agilent colada no chassi da unidade electr nica do sistema TPS mobile User Manual 87 901 005 01 B 95 362 5 Manual de Istruc es Numero de modelo PN N mero de s rie SN Dados el ctricos Figura 2 Sea tens o fornecida pela alimentac o el ctrica for compat vel com a do sistema poss vel conectar o cabo de alimenta o el ctrica na tomada el ctrica do tipo IEC320 presente no painel traseiro do sistema ver figura A tomada eguipada com uma mola de reten o posicionada para evitar desconex es acidentais do cabo de alimenta o usar a mola para enganchar o cabo de alimenta o 96 362 TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 Utilizac o Mola de retenc o Cabo de alimentac o Figura 3 Conex o da alimentac o NOTA O modelo fornecido 989 8433 entregue com um cabo de alimentac o integrado portanto n o necess rio realizar esta operac o Fornecer a tens o correcta ao sistema por meio do cabo de alimentac o O sistema equipado com um interruptor principal interruptor t rmico capaz de proteger os componentes do sistema contra sobrecargas ou curtos circuitos Colocar o interruptor na posic o 1 para comecar a operar com o TPS movel TPS mobile User Manual 87 901 005 01 B 97 362 5 Manual de Is
61. tepl t 20 C a 70 C rozsah relat vnej vlhkosti O a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy postupova pomaly a postupne a skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te erpac syst m do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis TPS mobile User Manual 87 901 005 01 B 251 362 14 N vod na Obsluhu Priprava na inStalaciu Zariadenie TPS mobile je dodan v peci lnom ochrannom obale Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na zast penie spolo nosti Agilent Po as vyba ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spl a po iadavky smernice EEC 85 399 Postava 1 Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu 252 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 Be n vystavenie okolit m podmienkam nem e TPS mobile po kodi Napriek tomu je v
62. through the optional FRG 700 Full Range Gauge if it is connected to the gauge connection port on the rear side of the system 296 362 TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 Gauge port Serial port Figure 5 Gauge connection Itis possible to start pumping by means of the selector named Pumping As soon as the Pumping selector is moved to the position 1 the TMP and Foreline pump will be switched on Pumping selector Figure 6 Start pumping TPS mobile User Manual 87 901 005 01 B 297 362 16 Instructions for Use PNs 9698404 9698405 9698406 9698419 9698430 9698431 9698432 9698433 are not equipped with the selector named Pumping the same function is provided by the pushbutton Start Stop on the TMP controller TPS mobile Switching off You can switch the pumps off by using the pumping selector moving it to position 0 the TMP controller will remain ON and if a gauge is connected to the system it will be possible to continue reading the pressure even if pumps are off An alternative mode for switching the pumps off is the use of Main Switch move it to position 0 The system will be com
63. ts g vel ha ez ut bbi r van csatlakoztatva a rendszer h ts r sz n l v gauge csatlakoz portra 206 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 Gaugeport Serialport bra 5 Gaugecsatlakoztat s Ellehet ind tani a rendszert az un Pumping kapcsol val A Pumping kapcsol 1 helyzetbe hoz s t k vet en a turb szivatty s a Foreline szivatty beindul Pumping kapcsol Abra 6 A szivatty z s elindul sa TPS mobile User Manual 87 901 005 01 B 207 362 11 Felhaszn l i K zik nyv A 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 t pusok nem rendelkeznek n Pumping kapcsol val ezt a funkci t a vez rl n elhelyezett Start Stop gomb l tja el A TPS mobile kikapcsol sa A rendszert ki lehet kapcsolni a Pumping kapcsol val 07 helyzetbe hoz ssal a vez rl bekapcsolva marad s ha a gauge a rendszerhez van csatlakoztatva kikapcsolt szivatty k mellett tov bbra is le lehet olvasni a nyom st A rendszer kikapcsol s nak m sik m dja a f kapcsol haszn lata 0 helyzetbe hoz ssal A rendszer teljesen kikapcsol s
64. turbina rotativa de alta velocidade movida por um motor el ctrico trif sico de alto rendimento Nos seguintes par grafos est o descritas todas as informac es necess rias para garantir a seguranca do operador durante o uso da aparelhagem Informac es detalhadas s o fornecidas no ap ndice Technical Information TPS mobile User Manual 87 901 005 01 B 87 362 5 Manual de Istru es Este manual utiliza as seguintes convenc es ATENCAO As mensagens de atencao chamam a atenc o do operador para um procedimento ou uma pr tica especifica que se n o efectuada correctamente pode provocar graves les es pessoais CUIDADO As mensagens de cuidado s o visualizadas antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem As notas cont m informac es importantes destacadas do texto 88 362 TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 Armazenagem Para garantir o nivel Maximo de funcionalidade e fiabilidade dos sistemas de bombagem Agilent devem ser observadas as seguintes prescric es a durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de O a 95 2 n o condensante a ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activa las sempre em modalidade Soft Start 0 tempo m ximo de armazenagem de
65. virtakaapelin kautta a J rjestelm on varustettu p katkaisimella l mp katkaisin joka suojaa j rjestelm n osia ylikuormituksilta tai oikosuluilta Aseta katkaisin asentoon 1 aloittaaksesi TPS mobilen k yt n TPS mobile User Manual 87 901 005 01 B 187 362 10 Ohjek sikirja Paakatkaisin l mp suojauksella Kuva 4 J rjestelm n aktivoiminen Kun j rjestelm kytket n p lle p katkaisimella virtaa sy tet n turbopumpun ohjaimelle mutta sek turbopumppu ett foreline pumppu pysyv t pois p lt J rjestelm n aktivoinnin my t ohjain aloittaa painearvon luennan valinnaisen Full Range Gaugen FRG 700 avulla jos se on kytketty mittauslaitteen liit nt porttiin j rjestelm n takaosassa 188 362 TPS mobile User Manual 87 901 005 01 B Ohjek sikirja 10 Mittauslaitteen portti Sarjaportti Kuva5 Mittauslaitteen liitt minen Voit k ynnist j rjestelm n Pumping nimisen valitsimen kautta Kun olet asettanut Pumping valitsimen asentoon 1 turbopumppu ja foreline pumppu k ynnistyv t Pumping valitsin
66. your TPS mobile will be showed beside the picture For each component PN component name and user manual reference are reported For specific information about one of integrated components please contact Agilent Service department ask ing for the specific user manual 969 8400 969 8401 969 8402 969 8403 969 8404 969 8405 969 8406 969 8411 969 8412 969 8413 969 8416 969 8417 969 8418 969 8419 969 8420 969 8421 969 8422 969 8423 969 8424 969 8425 969 8426 969 8427 969 8428 969 8429 969 8430 969 8431 969 8432 969 8433 TV301 150100 969 8918 87 900 946 01 TV301 AG 969 8991 DS402 87 900 982 01 949 9330 87 900 937 01 348 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Accessories and Spare Parts Tab 24 Description Part number Serial cable and Navigator Software 969 9883 Inlet screen 180100 9 69 9302 A E E CC 0 JS su Me oO Heater band 220V 969 9803 Vibration isolator CF 6 Vibration isolator ISO 160 Vibration isolator CF 8 Vent flange NW 10 KF M8 969 9108 TPS mobile User Manual 87 901 005 01 B 349 362 17 Technical Information Appendix 1 The following three pages gathered in the Appendix 1 are intended as a Guick Reference Manual of the product they contain the basic information needed to start operating with TPS mobile These pages are intended as a separate document and if needed can be printed separately and attached in pap
67. z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym a temperatura od 5 C do 35 C wzgl dna wilgo 0 95 bez opar W obecno ci p l elektromagnetycznych zesp pompyj cy musi by odpowiednio zabezpieczony przez odpowiednie ekranowanie TPS mobile nale y ustawi na p askiej powierzchni Ustawi TPS mobile w pozycji stabilnej cz c ko nierz wej ciowy turbopompy z przeciwko nierzem kt rego wytrzyma o na moment wok w asnej osi wynosi co najmniej 50 Nm bezpo rednio lub za pomoc z czki elastycznej Turbopompa z ko nierzem wej ciowym ISO musi by po czona z przeciwko nierzem za pomoc zacisk w W poni szej tabeli podano dla ka dego typu zacisku ilo koniecznych zacisk w oraz moment potrzebny do ich zamocowania 218 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 Tab 1 KO NIERZ TYP ZACISKU Nr MOMENT DOKR CENIA ISO 63 Podw jny zacisk z gwintem M10 4 22 Nm ISO 100K Podw jny zacisk z gwintem M10 4 22 Nm ISO 160 K Podw jny zacisk z gwintem M10 4 22 Nm Turbopompa z ko nierzem wej ciowym ConFlat musi by zamocowana do komory pr niowej poprzez odpowiednie drobne uk ady mechaniczne firmy Agilent W celu dodatkowych informacji na
68. 0M2001 Vzdr evanje Zariadenie TPS compact nevy aduje iadnu dr bu sv nimkou v meny Tip seal pri izvedbah s spiralnimi rpalkami ali dolivanja zamenjave olja pri izvedbah z rotacijskimi rpalkami Vane Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru napake kontaktirajte va lokalni Agilent servisni center Preden vrnete sistem v popravilo morate izpolniti in dodati Health and Safety obrazec ki je prilo en tem navodilom ter ga poslati v lokalno prodajno pisarno Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi TPS mobile User Manual 87 901 005 01 B 281 362 15 Priro nik za Navodila Odlaganje opadkov 282 362 Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov
69. 120 C Never use the pumping system when the turboinlet flange is not connected to the vacuum chamber or is not blanked Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts or harsh movements of the pump when in operation The bearings may become damaged and damages to the persons or the things could be taken place TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 CAUTION Use inert gas free from dust particles or humidity like Nitrogen for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pumping system in presence of explosive gases Switching on and Use of TPS mobile a After TPS mobile unpacking perform a brief visual analysis of the system to be sure that no sign of damages due to transportation is present critical parts are TMP flange Forepump fastening brackets system front panel and the system wheels a Check the system voltage on the Agilent label stuck on the system electronic units case TPS mobile User Manual 87 901 005 01 B 293 362 16 Instructions for Use Part Number PN Serial Number SN Electrical Data Figure 2 If the vo
70. 172 Spesialenheter 173 Vedlikehold 173 Kassering 174 Oversetting av den opprinnelige samsvarserkl ringen 158 2 Agilent Technologies 157 352 9 instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Turbomolekyl rpumpene som er beskrevet i den f lgende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt AVON IE For unng skader p utstyret og forebygge operat rskader ma installasjonsanvisningene beskrevet i denne manualen f lges n ye 158 362 TPS mobile User Manual 87 901 005 01 B Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren b r lese denne brukerveiledningen og all annen informasjon fra Agilent f r utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer pa grunn av manglende oppfalging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som pa noen mate er i strid med nasjonale bestemmelser TPS mobile systemet best r av en turbo molekul r pumpe for bruk i hgy eller ultrahgye vakuumanlegg en styreenhet og en hovedpumpe Systemet kan pumpe nesten alle typer gass
71. 2 Gebrauchsanleitung Hauptschalter mit Thermoschalter Abbildung 4 Aktivierung des Systems a Die Aktivierung des Systems durch den Hauptschalter liefert dem Controller der Turbopumpe Speisung aber die Turbopumpe wie die Forelnepumpe bleiben ausgeschaltet Die Aktivierung des Systems erm glicht dem Controller das Lesen des Druckwerts ber den zus tzlichen Full Range Gauge FRG 700 zu beginnen wenn dieser an dem Anschlusstor des Gauge im hinteren Teil des Systems angeschlossen ist 44 362 TPS mobile User Manual 87 901 005 01 B Gebrauchsanleitung 2 Gauge Halter Serielles Tor Abbildung 5 Anschluss des Gauge Es ist m glich das System ber den Wahlschalter Pumping zu starten Nachdem der Wahlschalter Pumping auf die Position 1 gestellt wurde starten die Turbopumpe und die Forelinepumpe Pumping Wahlschalter ecnore Abbildung 6 Pumpenstart TPS mobile User Manual 87 901 005 01 B 45 362 2 Gebrauchsanleitung Die Modelle 969 8404 969 8405 969 8406 969 8419
72. 325 Gauge Serial Line Connection 326 Gauge Connector 327 J2 Serial Connector 328 Connector Examples 329 Serial Communication Description 331 Original Instructions o Agilent Technologies 301 362 17 Technical Information Letter Protocol Description 331 Window Protocol 337 Description 337 Communication Format 337 Communication Protocol 338 Examples 341 Window Meanings 344 Pumping System Component Info 348 Accessories and Spare Parts 349 Appendix 1 350 TPS mobile switching off 354 Appendix 2 355 302 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Description of the TPS mobile The TPS mobile pumping system consists of a turbomolecular pump with an integrated controller and a forepump It is available in twenty eight models which differ in the TPM size high vacuum flange foreline pump and voltage The models are Tab 2 TPS mobile 220 V P N TMP Flange Foreline 969 8413 TV81M IS063 DS42 969 8411 TV81M IS063 DS102 zi i af ae zi 51110 u gt 969 8403 TV301 180100 DS102 i EE KRAN m i A O 969 8418 TV301 IS0100 IDP3 m i ENA eee R 969 8401 TV301 IS0100 TS300VPI 969 8405 TV551 CFF8 DS302 969 8419 TV551 CFF8 DS402 ze A a GE DO AA 969 8406 TV551 CFF8 TS600 TPS mobile User Manual 87 901 005 01 B 303 362 17 Technical Information Tab 3 TPS mobile 110 V P N TMP Flange Foreline 969 8420 969 8421 969 8422 TV81M 15063 IDP3 969 8423 T
73. 4 Format X X E XX TPS mobile User Manual 87 901 005 01 B Technical Information 17 Impulse 0 Continuous 1 0 frequency 1 power default 1 2 Pump temperature 3 Pressure 250 to Maximum rotational frequency win 121 default 700 900 to Maximum rotational frequency win 121 default 963 On 1 Off 0 default 1 Automatic 0 see note 1 On command 1 see note 0 to 65535 corresponding to 0 to 13107 sec 0 infinite 1 bit 0 2 sec watt 0 N 1 Av 0 to 10 0 0 10 1 N2 Where X 0 to 9 s or 345 362 167 346 362 R W RW R W R W R W R W R W Pressure unit of measure Stop speed reading Activates deactivates the pump speed reading after Stop command R2 Set Point Type R2 Set Point Value Hz W s R2 Set Point Mask sec R2 Set front Mysteresis in of R2 Valve 0 disable 1 enable 0 Freq 1 Power 2 Time 3 Normal 4 Pressure high level active 1 low level active R2 Set Point Pressure Valve Valid in win 171 4 Format XX E X X Where X 0 to 9 s or Pump current in mA dc Pump voltage in Vdc Pump power in W pump current x pump voltage duty cycle Driving frequency in Hz Pump temperature in C Pump status Controller Heatsink Temperature C 0 to 70 Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 B
74. 69 8430 969 8431 969 8432 969 8433 n o s o equipados com o selector denominado Pumping a mesma func o desenvolvida pelo bot o Start Stop posicionado no controller Paragem do TPS mobile possivel desligar o sistema por meio do selector Pumping deslocando o para a posic o 0 o controller permanecer aceso e se um medidor estiver conectado ao sistema ser possivel continuar a leitura da press o mesmo com a bomba desligada Um modo alternativo de desligar o sistema usar o interruptor Principal deslocando o para a posic o 0 O sistema se desligar completamente e n o ser possivel nem leituras de press o nem outras operac es Paragem de Emergencia Para parar em condic es de emerg ncia o TPS m vel poss vel desconectar o cabo de alimenta o da tomada de rede isto provocar o desligamento da bomba e do controller 100 362 TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 Unidade especial A plataforma TPS m vel pode ser personalizada em fun o das diferentes exig ncias obtendo n meros especificos de modelo Com excep o de casos espec ficos fornecidos de documenta o espec fica este manual pode ser aplicado a todas as unidades especiais marcadas com MXXXX por exemplo 969 8420M2001 Manutenc o O TPS compact n o reguer qualquer manutenc o com excep o da substitui o do Tip seal para as vers es eguipadas com as bombas
75. 9 362 6 Bedrijfshandleiding Afvalverwerking 120 362 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd Ny N X A 4 zn LX TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper Generel Information 123 Opbevaring 125 Forberedelse f r installation 126 Installation 128 Anvendelse 130 Start og anvendelse af TPS mobile 131 Stop af TPS mobile 136 N dstop 136 Specielle enheder 137 Vedligeholdelse 137 Bortskaffelse 138 Overs ttelse af originalinstruktionerne 122 ir Agilent Technologies 121 502 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den h je omdrejnings
76. 901 005 01 B Instruksjon Manual i Bruk fukt st v og partikkelfri inaktiv gass f eks kvelstoff ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk INP ESAS N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene f lges Pumpesystemet skal ikke brukes i eksplosjonsfarlige milj er Starte og bruke TPS mobile a Etter ha pakket ut TPS mobile sjekk at systemet ikke har spor etter skader grunnet transport de kritiske delene er pumpens flense festeb yle for Foreline pumpen frontdeksel og systemhjulene gjennom en visuell kontroll Kontrollere inngangsspenningen som st r p etiketten Agilent og som er klistret fast til chassis p systemets elektroniske enhet TPS mobile User Manual 87 901 005 01 B 167 362 9 instruksjon Manual Modelnummer PN Seriennummer SN Elektriske data Figur 2 Hvis spenningen til str mtilf rselen er forenlig med systemets er det mulig koble den str mf rende kabelen til til el uttaket av typen IEC320 som finnes p systemets bakre del se figuren Uttaket er utstyrt med en koblingsfj r som er satt p for unng uhensiktsmessige frakoblinger av str mkaleben Bruk fj ren for hekte el kabelen fast 168 362 TPS mobile User Manual 87 901 005 01 B Instruksjon Manual 9 Bruk Holdefj r
77. 969 8430 969 8431 969 8432 969 8433 sind nicht mit dem Wahlschalter Pumping ausgestattet dieselbe Funktion wird durch den Druckknopf Start Stopp am Controller ausgef hrt Stoppen des TPS mobile a Es ist m glich das System durch den Wahlschalter Pumping abzuschalten indem er auf 0 gestellt wird der Controller bleibt eingeschaltet und wenn ein Gauge am System angeschlossen ist kann das Lesen des Drucks auch bei abgeschalteter Pumpe fortgef hrt werden a Eine alternative Methode zum Abschalten des Systems ist die Anwendung des Hauptschalters durch Verstellen auf 0 Das System schaltet sich vollst ndig ab und es sind keine Druckablese noch andere Vorgange m glich Not Aus Um das TPS mobile im Notfall abzuschalten kann das Stromkabel aus der Netzsteckdose gezogen werden das ruft das Abschalten der Pumpe und des Controllers hervor 46 362 TPS mobile User Manual 87 901 005 01 B Gebrauchsanleitung 2 Spezialeinheiten Das Angebot TPS mobile kann je nach Wunsch und Bedarf individuell gestaltet werden wodurch spezifische Modellnummern erhalten werden Auf er in den durch die spezifische Dokumentation genannten F llen ist dieses Handbuch fur alle speziellen Einheiten geeignet die mit MXXXX gekennzeichnet sind zum Beispiel 969 8420M2001 Wartung TPS mobile ist wartungsfrei auf er der Austausch des Tip seal bei den Ausfiihrungen mit Scroll Pumpen oder I auff llen Wechsel
78. Box is eguipped with a Main socket IEC 320 electrical socket for pumping system power cable connection except the model 969 8433 equipped with an integrated power cable Gauge Port Fireware connector for active gauge FRG 700 connection see Chapter Gauge Connector 4 5 m TMP and Fan Cables On the rear side of Electrical Box 5 m long TMP and Fan cables are wrapped up They are useful for the TMP and its fan and operation far from the pumping system 5 Wheels TPS mobile is provided with four wheels allowing the system to be moved and located where vacuum is needed Two out of four wheels are provided with a breaking system to avoid accidental moving of the pumping system during operation 308 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 6 Foreline Pumps Description TPS mobile can be equipped both with a dry pump scroll type or with an oil sealed Rotary Vane Pump TPS mobile versions equipped with a scroll pump are free of contaminating agents and therefore are suitable for applications requiring clean vacuum TPS mobile versions equipped with scroll pumps are 969 8416 969 8412 969 8418 969 8402 969 8401 969 8404 969 8406 969 8422 969 8423 969 8427 969 8428 969 8429 969 8432 and 969 8433 The scroll pump principle of operation is described here following Scroll pump creates vacuum using a simple dual scroll mechanism in which one of the nested sc
79. G Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader OKB For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning Start og anvendelse af TPS mobile a Efter at have udpakket TPS mobile udf r en visuel kontrol for at udelukke at systemet viser tegn p skader der kan v re opst et under transporten de kritiske punkter er pumpeflangen Foreline pumpens fastsp ndingsb jler frontpanelet og anl ggets hjul Kontroller indgangsspendingen der er angivet p Varain skiltet der sidder p stellet af systemets elektroniske enhed TPS mobile User Manual 87 901 005 01 B 131 362 7 Istruktionsbog Modelnummer PN Seriennummer SN Elektriske specifikationer Figur 2 Hvis netforsyningens sp nding stemmer med anl ggets forsyning er det muligt at tilslutte forsyningsledningen til den elektriske stikd se af IEC320 type der sidder p systemets bagpanel jf figuren Stikd sen er udstyret med en l sefjeder der har som form l at undg utilsigtede frakoblinger af forsyningsledningen fjederen bruges til at tilkoble forsyningsledningen 132 362 TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 ANVENAUEISE Holdefjeder Forsyningsledning Figur 3 Tilslutning af stramforsyning Den leve
80. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istruc es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 901 005 01 B 05 2011 TPS mobile Models 969 8400 8402 8404 8406 8412 8416 8418 8420 8422 8424 8426 8428 8430 8432 8401 8403 8405 8411 8413 8417 8419 8421 8423 8425 8427 8429 8431 8433 Instruksjon manual Ohjek sikirja Felhasznal i kezik nyv Podrecznik instrukcji N vod k pou it N vod na obsluhu Priro nik za navodila User Manual E Agilent Technologies Notices O Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 901 005 01 B Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein
81. Oil is used in these pumps for a variety of purposes to effect a seal between the inlet and discharge areas to lubricate to fill the space under the discharge valve to serve as a heat transfer medium and keep the rotor temperature within acceptable range to flush particulate matter out of the pump TPS mobile User Manual 87 901 005 01 B Technical Information 17 Technical Specification Tab 4 Characteristic 969 8412 969 8416 969 8411 969 8413 T Forepump SH110 IDP3 DS102 DS42 Voltage 220 V 50 Hz Base Pressure 1x10 8mbar 7 5x10 9 Torr N2 Pumping Speed L s 17 He Pumping Speed L s 65 Hz Pumping Speed L s 50 80000 rpm lt 1 min On a flat floor 5 C to 35 C max 80 C on Inlet Flange 14A SEE CE CERTIFICATE OF CONFORMITY Il TPlus OO 20 C to 70 C TPS mobile User Manual 87 901 005 01 B 311 362 17 Technical Information Tab 5 Characteristic 969 8423 969 8422 969 8421 969 8420 Turbo Pump TV81M TV81M TV81M TV81M i TMP Flange 18068 18063 IS063 15063 Forepump OO SHITO IDP3 DS102 DS4 Voltage 110 V 60 Hz Base Pressure OOOO 1x10 mbar 7 5x10 Tor Hz Pumping Speed L s 50 E TMP Rotational Speed s0000mm Start up time ming OO Operating Position Onafato W Ambient Temperature 45900430 Bakeout Temperature max 80 Con Inlet Flange Oooo Protection Breaker MA OO Compliance with Oooo SEE CE CERTIFICATE OF CONFO
82. Pneumatikanschlusse korrekt ausgefuhrt wurden W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 120 C nicht uberschreiten Das Pumpensystem darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlu flansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch eventuelle hei e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr Die Turbopumpe darf w hrend des Betriebes keinen St en oder ruckartigen Bewegungen ausgesetzt werden Die Lager k nnten besch digt werden und Personen oder Gegenst nden Schaden zugef gt werden 40 362 TPS mobile User Manual 87 901 005 01 B Gebrauchsanleitung 2 Te bp Fur die Bel ftung der Pumpe staub partikel und feuchtigkeitsfreies Inertgas z B Stickstoff verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar uber dem atmosph rischen Druck betragen WARNUNG Wenn das Pumpensystem zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die fiir das jeweilige Gas vorgeschriebenen Vorgange und MaBnahmen zu befolgen Das Pumpensystem darf niemals bei Vorhandensein von explosionsfahigen Gasen verwendet werden Einschaltung und Gebrauch von Modell TPS mobile Nachdem das TPS mobile ausgepackt wurde mit dem Auge prifen ob das System Beschadigungen aufgrund
83. RMITY Installation category a Pollution Degree 2 Serial Communication kit A ooo Storage Temperature 20 Cto 70 According to standard DIN 28 428 the base pressure is that measured in a leakfree test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange When the TPS mobile has been stored at a temperature less than 5 C wait until the TPS mobile has reached the above mentioned temperature 312 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Tab 6 Characteristic 969 8406 969 8404 969 8419 969 8405 Turbo Pump TV551 TV551 TV551 TV551 TMP Flange CFF8 CFF8 CFF8 CFF8 Forepump TS600 TS300 DS402 DS302 Voltage 220 V 50 Hz Base Pressure 1x10 mbar 7 5x10 10 Torr N2 Pumping Speed L s 550 TMP Rotational Speed 40000 rpm Start up time lt 5 min Ex A NE BY ANNY ee E B akeout Temperature max 120 C on Inlet Flange nn SEE CE CERTIFICATE OF CONFORMITY Installation category Il Pollution Degree 2 Serial Communication kit None Storage Temperature 20 C to 70 C TPS mobile User Manual 87 901 005 01 B 313 362 17 Technical Information Tab 7 Characteristic 969 8433 969 8432 969 8431 969 8430 Turbo Pump TV551 TV551 TV551 TV551 i TMP Flange O OB CFFB CFFB CFFB TSGO0 OO TS300 DS402 DS302 Voltage 8 110 V 60 Hz Base Pressure I 1x109 mbar 75x100Tor 0 Hz Pumpi
84. TPS mobile257 Vypnutie TPS mobile 262 N dzov zastavenie 262 peci lne jednotky 263 dr ba 263 Likvid cia 264 Preklad origin lneho n vodu 83 Agilent Technologies 247 362 14 N vod na Obsluhu Bezpe nostn n vod pre Turbomolekul rne v vevy Turbomolekul rne v vevy ak s n sledovne popisovan obsahuj velk mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora sa mo e uvolni rota n energia 3372115088 Pokyny k in tal cii uveden v tomto n vode musia by d sledne dodr ovan aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 248 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 V eobecn inform cie Toto zariadenie je ur en pre profesion lnych pracovn kov Sk r ne za nete zariadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny TPS mobile je integrovan syst
85. User Manual 87 901 005 01 B Mode d emploi 3 Port manom tre Port s rie Figure 5 Branchement du manometre a Il est alors possible de d marrer le syst me l aide du s lecteur d nomm Pumping en position 1 La pompe turbo et la pompe primaire d marrent S lecteur Pumping e ecnore Figure 6 Demarrage du pompage TPS mobile User Manual 87 901 005 01 B 63 362 3 Mode d emploi Les modeles 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 ne sont pas dot s du s lecteur Pumping cette fonction est assur e par le bouton Start stop situ sur le contr leur Arret du TPS mobile a Pour arr ter le pompage placez le s lecteur Pumping en position 0 Le contr leur reste sous tension et si un manom tre a t reli au syst me il est possible de lire la valeur de pression m me lorsque les pompes sont l arr t a Une autre mani re d arr ter le pompage consiste placer l interrupteur principal sur la position 0 Le syst me s arr te compl tement et il n est plus possible ni de lire la pression ni d effectuer une autre op ration Arr t d urgence Pour arr ter l
86. V81M 15063 SH110 i 5 n n S cia 969 8426 TV301 150100 DS402 E tt 170 RE 5 E _ nn a mem 969 8429 TV301 150100 TS300VPI i 5 Dili ci o ku NR Nica 3 AO 969 8432 TV551 CFF8 TS300 AE 11 I NO dla 304 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Description of the TPS mobile Handle 2 Front Panel 1 TMP N Main Switch TMP Controller Pumping Selector Gauge Control Unit TMP fan Optional TMP Height N Setting Up System 3 Electrical Devices Box 6 Foreline Pump 4 5 m long TMP and Fan Cables 5 Wheels with brake Figure 7 TPS mobile User Manual 87 901 005 01 B 305 362 17 Technical Information 1 Turbopump Description The turbopump consists of a high freguency motor driving a turbine fitted with many bladed stages and Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength light aluminum alloy and is machined from a single block of aluminum The turbine blades have five different angles from 44 to 12 while the Macrotorr stages are in the form of discs The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stator are fabricated in stainless steel These are supported and accurately positioned by spacer rings The Mac
87. Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045
88. Vor der Installation 36 Installation 38 Gebrauch 40 Spezialeinheiten 47 Wartung 47 TPS mobile User Manual 87 901 005 01 B 5 362 Contents 6 362 Entsorgung 48 Mode d emploi 49 Normes de s curit pour Pompe Turbomol culaires 50 Indications g n rales 51 Stockage 53 Pr paration pour l installation 54 Installation 56 Utilisation 58 Unites speciales 65 Entretien 65 Mise au rebut 66 Manual de istrucciones 67 Indicaciones de Seguridad para Bombas Turbomoleculares 68 Informaci n general 69 Almacenamiento 71 Preparaci n para la instalaci n 72 Instalaci n 74 Uso 76 Unidades especiales 83 Mantenimiento 83 Eliminaci n 84 TPS mobile User Manual 87 901 005 01 B Contents 5 Manual de Istruc es 85 Indicac es de Seguranca para Bombas Turbomoleculares 86 Informac es gerais 87 Armazenagem 89 Preparac o para a instalac o 90 Instalac o 92 Utilizac o 94 Unidade especial 101 Manutenc o 101 Eliminac o 102 6 Bedrijfshandleiding 103 Veiligheidsinstructies voor Turbomoleculaire pompen 104 Algemene informatie 105 Opslag 107 Uitpakken 108 Installatie 110 Gebruik 112 Speciale units 119 Onderhoud 119 Afvalverwerking 120 7 Istruktionsbog 121 Sikkerhedsanvisninger for Molekyl re turbopumper 122 TPS mobile User Manual 87 901 005 01 B 1 362 Contents 8 362 Generel Information 123 Opbevaring 125 Forberedelse f r installation 126 Installation 128 Anvendelse 130 S
89. Zatrzymanie Alarmowe 226 Jednostki specjalne 227 Konserwacja 227 Przetworstwo odpadow 228 T umaczenie instrukcji oryginalnej pige Agilent Technologies 211 32 12 Podrecznik Instrukcji Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obs ugi posiadaj wysok energi kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona ZAGROZENIE Aby unikn uszkodzenia aparatury i zapobiec uszkodzeniom cia a operator w nale y obowi zkowo przestrzega zalece dotycz cych instalacji opisanych w niniejszej instrukcji obs ugi 212 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 Og lne informacje Ta aparatura jest przeznaczona do u ytku zawodowego U ytkownik musi przeczyta bardzo uwa nie niniejsz instrukcj ka d dodatkow informacj dostarczon przez firm Agilent przed u ytkowaniem aparatury Firma Agilent uchyla si od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm kraj
90. abla vzpostavite pravilno napetost sistema a Sistem je opremljen z glavnim stikalom termi no stikalo ki komponente sistema iti pred preobremenitvami in kratkimi stiki Stikalo pritisnite v polo aj 1 da za nete delo s TPS mobile TPS mobile User Manual 87 901 005 01 B 277 362 15 Priro nik za Navodila Glavno stikalo s termi no za ito Slika 4 Vklop sistema Ob vklopu sistema s pomo jo glavnega stikala vzpostavite napetost kontrolerja turbomolekularne rpalke toda tako turbomolekularna rpalka kot rpalka foreline ostaneta ugasnjeni Z vklopom sistema lahko pri ne kontroler brati podatke o tlaku s pomo jo merilnika Full Range Gauge FRG 700 ki je na voljo kot dodatna oprema e je slednji povezan z merilnim priklju kom ki se nahaja na zadnji strani sistema 218 362 TPS mobile User Manual 87 901 005 01 B Priro nik za Navodila 15 Priklju ek za merilnik Serijski priklju ek Slika 5 Sistem je mogo e zagnati s pomo jo izbirnega stikala Priklop merilnika poimenovanega Pumping Po obratu stikala Pumping v polo aj 1 se turbo rpalka in rpalka foreline za eneta Izbirno stikalo za rpanje
91. ador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 140 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning 8 Allm n Information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador som helt eller delvis beror p sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala foreskrifter Systemet TPS mobile best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar en styrenhet och en huvudpump Systemet kan anvandas f r pumpning av alla typer av gas eller gasf reningar Dock limpar sig inte systemet for pumpning av v tskor eller fasta partiklar Pumpningen astadkoms med hj lp av en h gvarvig turbin som drivs av en elektrisk trefas h geffektmotor De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical Information TPS mobile User Manual 87 901 005 01 B 141 362 8 Bruksanvisning I bruksanvisningen anv nds foljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller e
92. an vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Figuur 1 Mud dee Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacuiim in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming 108 362 TPS mobile User Manual 87 901 005 01 B Bedrijfshandleiding 6 De TPS mobile kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen De in deze handleiding aangegeven modellen zijn gebaseerd op het pompsysteem platform van Agilent dat TPS mobile wordt genoemd de verschillen van de diverse modelnummers hebben betrekking op de turbomoleculaire pomp en de foreline pomp die in het specifieke model is ingebouwd evenals de op het systeem toegepaste spanning De verschillen tussen de TPS mobile modellen hebben alleen betrekking op de prestaties van het systeem terwijl de werking en de gebruiksprocedures voor alle TPS mobile modellen hetzelfde zijn De vermelde informatie is van toepassing op het hele platform alle modellen onafhankelijk van de specifieke turbomoleculaire pomp foreline pomp of elek
93. anual 87 901 005 01 B 83 362 4 Manual de istrucciones Eliminaci n Significado del logotipo WEEE presente en las etiguetas El s mbolo gue se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica gue el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y gue por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta K N pe 4 X L N 84 362 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 86 Informac es gerais 87 Armazenagem 89 Preparac o para a instalac o 90 Instalac o 92 Utilizac o 94 Acendimento e Utilizac o do TPS mobile 95 Paragem do TPS mobile 100 Paragem de Emerg ncia 100 Unidade especial 101 Manutenc o 101 Eliminac o 102 Traduc o das instruc es originais 5 Agilent Technologies 85 362 5 Manual de Istru es Indicac es de Seguranca para B
94. ballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement Figure 1 Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e 54 362 TPS mobile User Manual 87 901 005 01 B Mode d emploi 3 Le TPS mobile ne peut s endommager en restant simplement expos I atmosphere Toutefois afin d viter toute pollution due a la poussiere il est conseill de le garder dans son emballage clos jusqu au moment de l installation Les mod les d crits dans ce manuel d instructions sont bas s sur la plateforme des syst mes de pompage Agilent d nomm e TPS mobile les diff rences entre les diff rents mod les concernent la pompe turbomol culaire et la pompe primaire int gr e dans le mod le ainsi que la tension lectrique du syst me Les diff rences entre les mod les de TPS mobile concernent uniquement les prestations du syst me tandis que le fonctionnement les proc dures d utilisation sont les m mes pour tous les TPS mobile Les informations donn es sont applicables l ensemble de la plateforme tous les mod les ind pendamment de la pompe turbomol culaire de la pompe primaire ou de l alimentation lectrique TPS mobile User Manual 87 901 005 01 B 55 362 3
95. bile User Manual 87 901 005 01 B Priro nik za Navodila 15 Tab 1 PRIROBNICA NAPRAVA ZA PRITRJEVANJE N NAVOR ISO 63 M10 dr ala 4 22 Nm ISO 100 K M10 dr ala 4 _22 Nm a ISO 160 K M10 drzala 4 22 Nm Turbo rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information TPS mobile a ni mo pritrditi s svojo osnovo Za namestitev opcijski dodatkov glej Technical Information TPS mobile User Manual 87 901 005 01 B 213 362 15 Priro nik za Navodila Uporaba Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema preverite ali so vse elektri ne in pnevmatske povezave pravilno izvedene Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C SVARILO rpalnega sistema ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline SVARILO Prepre iti udarce ali premike turbo rpalke ko le ta deluje LeZaji se namre lahko po kodujejo kar lahko povzro i kodo loveku in predmetom 274 362 TPS mobile User Manual 87 901 005 01 B Priro nik za Navodila 15 POZOR Za prezra evanje rpalke uporabljajte ist plin brez prahu del kov ali vla nosti kot du ik
96. cal Information Gauge Serial Line Connection E o 2 o o 5 o Serial port Gauge Connection Figure 19 TPS mobile User Manual 87 901 005 01 B 326 362 Technical Information 17 Gauge Connector TPS mobile is equipped with new generation gauge reading card able to drive read a Agilent Full Range Gauge FRG 700 The FRG 700 Full Range Gauge is a combined technologies gauge Inverted Magnetron plus Pirani Gauge FRG 700 measure from 5x109 mbar to atmos phere 3 8x10 Torr to atmosphere and its tem perature range goes from 5 C to 55 C 41 131 F Pressure data is available on two independent reading channels 1 Serial communication line Win 224 2 TMP controller display Pressure gauge can be connected disconnected from the TPS mobile during normal operation IDENTIFICATION IMON SIGNAL Figure 20 Gauge Connector TPS mobile User Manual 87 901 005 01 B 327 362 17 Technical Information 328 362 Figure 21 FRG 700 gauge dimension J2 Serial Connector This connector provides the connection for RS 232 and serial line J2 Pin out 9 ooo gt O S ig CO EJ EG Figure 22 TPS mobile User Manual 87 901 005 01 B Technical Information 17 PIN N SIGNAL NAME 5 V OUT Reserved TX RS232 5 5 TV 301 AG PC
97. chnical Information liitteest TPS mobile ei voida kiinnitt perustansa kautta Ks Technical Information liitett lis varusteiden asentamista varten TPS mobile User Manual 87 901 005 01 B 183 362 10 Ohjek sikirja K ytt T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Ennen j rjestelm n kaytt6a tarkista ett kaikki s hk ja paineilmaliit nn t on tehty oikein Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 120 C tta VAROITUS lk k ytt k pumppausj rjestelm ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla VAROITUS lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia VAROITUS gt P gt V ltt k turbopumppuun kohdistuvia iskuja tai sen kkin ist liikuttamista sen ollessa k ynniss Laakerit voisivat vahingoittua joka saattaisi johtaa henkil tai omaisuusvahinkoihin 184 362 TPS mobile User Manual 87 901 005 01 B Ohjek sikirja 10 P stett ess pumppuun ilmaa tulee k ytt jalokaasua jossa ei ole p ly hiukkasia tai kosteutta esim typpi Sis njohtavan paineen siihen sopivan aukon l pi t ytyy olle alle 2 baaria paitsi atmosf rinen paine Kun pumppua k ytet n myrkyllisten paloherkkien tai
98. chtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TPS mobile is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacuiimtoepassingen en een primaire pomp bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine die aangedreven wordt door een elektrische draaistroommotor met hoog rendement In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical Information TPS mobile User Manual 87 901 005 01 B 105 362 6 Bedrijfshandleiding Deze handleiding maakt van de volgende symbolen gebruik MESA MING Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken VOORZICHTIG Bij dit symbool staat tekst met proc
99. crocomputer and is composed of a PCB which includes a power supply with a 3 phase AC output analogical and input output section microprocessor and digital section The controller recognizes the mains presence and converts the single phase AC mains supply into a 3 phase medium frequency output which is required to power the pump a Pumping Selector TPS mobile versions equipped with TV81M or TV301 include an electrical selector named Pumping on the left side of the front panel Itis aimed to pumps management ON OFF By means of Pumping selector you are able to start pumping activating the pumping effect of TMP an Foreline pump TPS mobile equipped with TV551 is not provided with the Pumping selector the same function is provided by the ON button of the TMP controller TPS mobile User Manual 87 901 005 01 B 307 362 17 Technical Information Gauge Control Unit optional If needed is possible to order a special version of TPS mobile eguipped with an optional gauge controller named Agilent XGS 600 By means of XGS 600 is possible to manage a couple of gauges to monitor pressure on system foreline by means of a convector gauge 1x10 Torr to atm and high vacuum pressure by means of a IMG 100 1x10 to 5x10 Torr 3 Electrical Devices Box It is a metal box containing all the electrical eguipments useful to manage the vacuum components integrated in the TPS mobile The rear panel of the Electrical
100. de for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten 138 362 ey S lt XI N N TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar 140 Allman Information 141 F rvaring 143 F rberedelser f r installationen 144 Installation 146 Anv nding 148 Start och anv ndning av TPS mobile 149 Att st nga av TPS mobile 154 N dstopp 154 Speciella enheter 155 Underh ll 155 Bortskaffning 156 vers ttning av originalinstruktionerna o Agilent Technologies 139 362 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att sk
101. des Transports aufweist die kritischen Teile sind Pumpenflansch Befestigungsbiigel der Foreline Pumpe vorderes Abdeckung und die Rader des Systems Die Eingangsspannung auf der Etikette Agilent am Geh use der Elektronik des Systems priifen TPS mobile User Manual 87 901 005 01 B 41 362 2 Gebrauchsanleitung Modellnummer PN Seriennummer SN Elektrische Daten Abbildung 2 Wenn die durch die Stromspeisung gelieferte Spannung mit der Spannung des Systems kompatibel ist kann man das Stromkabel an die Steckdose IEC320 am hinteren Paneel des Systems anschlief en siehe Abbildung Die Steckdose ist mit einer R ckhaltefeder ausgestattet um pl tzliche Trennung des Speisekabels zu vermeiden die Feder beniitzen um das Stromkabel zu befestigen 42 362 TPS mobile User Manual 87 901 005 01 B Gebrauchsanleitung 2 Gebrauch Riichhaltefeder Speisekabel Abbildung 3 Anschluss der Speisung Das gelieferte Modell 898 8433 wird mit einem integrierten Speisekabel geliefert somit ist dieser Vorgang nicht notwendig a Dem System mittels Speisekabel die korrekte Spannung geben Das System ist mit einem Hauptschalter Thermoschalter ausgestattet der die Bestandteile des Systems gegen Uberlastungen oder Kurzschliisse schiitzt Den Schalter auf die Position 1 stellen um mit dem TPS mobile arbeiten zu k nnen TPS mobile User Manual 87 901 005 01 B 43 362
102. deve essere inserita nell imballo del sistema prima della spedizione Qualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TPS mobile User Manual 87 901 005 01 B 29 362 1 Istruzioni per uso Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunita Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita Ney T A 4 AN 30 362 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual Gebrauchsanleitung Sicherheitshinweise fur Turbomolekularpumpen 32 Allgemeine Informationen 33 Lagerung 35 Vor der Installation 36 Installation 38 Gebrauch 40 Einschaltung und Gebrauch von Modell TPS mobile 41 Stoppen des TPS mobile 46 Not Aus 46 Spezialeinheiten 47 Wartung 47 Entsorgung 48 Ubersetzung der Originalanleitungen Agilent Technologies 31 362 2 Gebrauchsanleitung Siche
103. die F rderung von Flissigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine erreicht die von einem Hochleistungsdrehstrommotor angetrieben wird In den folgenden Abschnitten sind alle erforderlichen Informationen fiir die Sicherheit des Bedieners bei der Anwendung des Gerits aufgefiihrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TPS mobile User Manual 87 901 005 01 B 33 362 2 Gebrauchsanleitung In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermaf en hervorgehoben WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausfiihrungsweise die bei unkorrekter Ausfiihrung schwere Verletzungen hervorrufen k nnten VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 34 362 TPS mobile User Manual 87 901 005 01 B Lagerung VORSICHT Gebrauchsanleitung 2 Zur Garantie der h chsten Funktionstuchtigkeit und Zuverl ssigkeit der Agilent Pumpsysteme m ssen die folgenden Vorschriften eingehalten werden W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C a Relative Feuchtigkeit v
104. dott telep t si utas t sokat szigor an be kell tartani 194 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 Altal nos informaci A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TPS mobile egy integr lt rendszer turb molekul ris szivatty val nagy s rendkiv l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina biztositja A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TPS mobile User Manual 87 901 005 01 B 195 362 11 Felhaszn l i K zik nyv Ez a k zik ny
105. e TPS mobile en cas d urgence il est possible de d brancher le cable d alimentation de la prise lectrique Ceci entra ne l arr t de la pompe et du contr leur 64 362 TPS mobile User Manual 87 901 005 01 B Mode d emploi 3 Unites speciales Entretien La plateforme TPS mobile peut tre personnalis e en fonction des exigences en obtenant des num ros de modele sp cifigues A exception de cas particuliers accompagn s d une documentation sp ciale ce manuel s applique toutes les machines estampill es MXXXX exemple 969 8420M2001 Le TPS mobile nexige aucun entretien particulier A exception du remplacement du Tip seal pour les versions quip es de pompes scroll ou le remplissage vidange de huile pour les versions avec pompe Rotary Vane Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent Avant de renvoyer une pompe au constructeur pour reparation remplir et faire parvenir au bureau Agilent de votre r gion la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emba
106. e apoyo se pondran en marcha Selector Pumping remore van KG Figura 6 Puesta en marcha del bombeo TPS mobile User Manual 87 901 005 01 B 81 362 4 Manual de istrucciones Los modelos 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 y 969 8433 no est n equipados con el selector denominado Pumping la misma funci n es llevada a cabo por el pulsador Start Stop ubicado en el controlador Parada del TPS mobile Se puede apagar el sistema mediante el selector Pumping desplaz ndolo a la posici n 0 el controlador permanecer encendido y si hay un indicador conectado al sistema se podr continuar con la lectura de la presi n incluso con el sistema apagado Una manera alternativa para apagar el sistema es utilizar el Interruptor Principal desplaz ndolo a la posici n 0 El sistema se apagar completamente y no se podr leer la presi n ni realizar otras operaciones Parada de Emergenica Para parar el TPS m vil en condiciones de emergencia se puede desconectar el cable de alimentaci n de la toma de la red esto apagar la bomba y el controlador 82 362 TPS mobile User Manual 87 901 005 01 B Manual de istrucciones
107. e respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos el sistema de bombeo ha de protegerse mediante pantallas adecuadas El TPS mobile puede ser instalado en cualquier posici n El TPS m vil se debe colocar sobre una superficie plana Colocar el TPS m vil en una posici n estable uniendo la brida de entrada de la turbobomba a una contrabrida capaz de resistir a un par de 50 Nm alrededor de su eje directamente o mediante un racor flexible La turbobomba con brida de entrada ISO debe estar unida a la contrabrida mediante tornillos La siguiente tabla describe para cada tipo de brida la cantidad de tornillos necesarios y el par de apriete para ajustarlos TPS mobile User Manual 87 901 005 01 B Manual de istrucciones 4 Tab 1 BRIDA TIPO DE MORDAZA N PAR DE APRIETE ISO 63 Mordaza doble con rosca M10 4 22 Nm ISO 100 K Mordaza doble con rosca M10 4 22 Nm ISO 160 K Mordaza doble con rosca M10 4 22 Nm La turbobomba con brida de entrada ConFlat ha de fijarse a la camara de vacio mediante los accesorios mec nicos espec ficos Agilent Para m s detalles v ase el anexo Technical Information El TPS mobile no puede fijarse utilizando su base Para instalar los accesorios opcionales v ase Technical Information TPS mobi
108. ection System doesn t start Move the Main Switch on position 1 Main switch placed on position 0 Check the vacuum system critical points valves flanges plastic pipes Leak on vacuum system connected to the inlet flange Turbo pump is not able to reach heck if th t valve i the Normal Operation Status TMP Vent Valve not properly closed DARA mie verf valve 1 screwed completely down Check the Vent valve sealing o Leak on Vent Valve z Ne ring positioning and intactness TMP stopped and the Controller shows the message Pump Room temperature higher than 35 C 95 F Overtemp TPS mobile User Manual 87 901 005 01 B 355 362 17 Technical Information Appendix 2 356 362 TPS mobile User Manual 87 901 005 01 B Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timel
109. edures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht 106 362 TPS mobile User Manual 87 901 005 01 B Opslag VOORZICHTIG Bedrijfshandleiding 6 Om een zo goed mogelijke werking en betrouwbaarheid van de pompsystemen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum Indien om een willekeurige reden de opslagtijd langer is moet het pompsysteem weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent TPS mobile User Manual 87 901 005 01 B 107 362 6 Bedrijfshandleiding Uitpakken De TPS mobile wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TPS mobile niet k
110. eller gassforening Det er ikke beregnet for a pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin koplet til en trefaset elektrisk motor De f lgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TPS mobile User Manual 87 901 005 01 B 159 362 9 instruksjon Manual Denne manualen bruker f lgende standardprotokoll WONINGEN Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader Sale Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan fore til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten 160 362 TPS mobile User Manual 87 901 005 01 B Instruksjon Manual 9 Lagring For a garantere maksimalt niva for funksjonalitet og driftssikkerhet til pumpesystemet Agilent ma en f lge forskriftene nedenfor a Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra O til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato FORSIKTIG
111. en Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd Figur 1 OBSERVER Komponenter som ska uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd 144 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning 8 Normal p verkan fr n atmosf ren kan inte skada TPS mobile Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den Modellerna i denna instruktionsbok grundar sig p plattformen med Agilent pumpsystem som kallas TPS mobile Skillnaderna som inf rts pa de olika modellnumren motsvarar den turbomolekyl r pumpen och foreline pumpen som integrerats i den specifika modellen ut ver spanningen som tillimpas f r systemet Skillnaderna mellan de olika modellerna pa TPS mobile galler endast systemets prestanda medan funktionen och anv ndningsproceduren ar de samma f r samtliga TPS mobile Informationen som ges galler f r hela plattformen alla modeller oberoende av den specifika turbomolekylir pumpen foreline pumpen eller str mf rs rjningen TPS mobile User Manual 87 901 005 01 B 145 362 8 Bruksanvisning Installation OBSERVER Ta bort tejpen och dra ut skyddsproppen f rst n r turbopumpen ska anslutas till systemet
112. en spesifikke modellen foruten spenningen som kan benyttes i systemet Forskjellene mellom de forskjellige modellene i TPS mobile gjelder bare systemets ytelser mens driften og fremgangsm tene ved bruk forblir de samme for alle TPS mobile Opplysningene som gis gjelder hele plattformen alle modeller uavhengig av den spesifikke turbomolekyl re pumpen foreline pumpen eller str mtilf rselen TPS mobile User Manual 87 901 005 01 B 163 362 9 Instruksjon Manual Installasjon SST ere Tapen og beskyttelsesproppen skal fjernes f rst nar turbopumpen koples til systemet Ikke installer eller bruk pumpesystemet i milj er som utsettes for regn sn eller is st v aggressive gasser eksplosjonsfarlige milj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 35 C a relativ fuktighet 0 95 uten kondens Ved magnetfelt m pumpesystemet beskyttes av dertil egnede skjermer TPS mobile m plasseres p en jevn rett overflate Sett TPS mobile i stabil stilling ved koble turbopumpens inngangsflense til en motflense som er i stand til motst et dreiemoment p 50 Nm rundt sin egen akse direkte eller ved et dreibart koblingsstykke Turbopumpen med ISO inngangsflense m kobles til motflensen ved hjelp av klemskruer F lgene tabell beskriver for hver type klemskrue antallet p krevde klemskrue
113. envelope as this may cause the pump rotor to lock TPS mobile User Manual 87 901 005 01 B 323 362 17 Technical Information High Vaccum Flange Connection Configurations 324 362 LAM im a oo gt FF 4 2 ASEPLATE z o NE BEER lt ITH TAPPED HOLE IA TT NO l for i L z H tin Figure 16 x pr TESSERE um JE UT de F Gun a ma a 7 EE VE 3 L AL 1 A L mi E HI jer MES ES HY EJ GENE 17 ED d p AL Figure 17 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Electrical Connections Electrical Connections Input Power Connector The following figure shows the input power connector Retention Spring Power cord plug Figure 18 Connection to Main NOTE PN 969 8433 is already supplied with an integrated power cord so you don t need to perform this step TPS mobile User Manual 87 901 005 01 B 325 362 17 Techni
114. er format to the TPS mobile for a guick reference work in the field The Appendix 1 is applicable to following models Tab 25 INT m gt r 969 8402 969 8403 969 8422 969 8423 Lr oz 969 8406 969 8411 969 8426 969 8427 969 8412 969 8416 969 841 7 969 8430 969 8431 969 8418 969 8419 969 8432 969 8433 Basic information about the system activation and system components management is reported here following 1 After TPS mobile unpacking perform a brief visual analysis of the system to be sure that no sign of damages due to transportation is present critical parts are TMP flange Forepump fastening brackets system front panel and the system wheels 2 Check the system voltage on the Agilent label stuck on the system electronic units case 350 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Appendix 1 Part Number PN Serial Number SN Electrical Data Figure 28 3 If the voltage provided by your electrical supplier is compatible with the system voltage you can connect the provided power cord to the IEC320 electrical socket on the rear side of the system see picture The socket is provided with a retention spring to avoid accidental disconnection of power cord plug use the spring to fasten the power cord plug Retention Spring Power cord plug Figure 29 Connection to main TPS mobile User Manual 87 901 005
115. er to guarantee the maximum level of performance and reliability of Agilent pumping systems the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range O to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer a the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pumping system has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations TPS mobile User Manual 87 901 005 01 B 287 362 16 Instructions for Use Preparation for Installation CAUTION The TPS mobile is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Figure 1 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves
116. erpac syst m chr nen feromagnetick m t tom TPS mobile mus by umiestnen na rovn povrch Umiestnite TPS mobile do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k protipr rube schopnej odol va kr tiacemu momentu 50 Nm vo svojej osi priamo alebo nepriamo prostredn ctvom pru n ho spoja Turbov veva so vstupnou pr rubou ISO mus by pripojen k protipr rube prostredn ctvom svoriek Nasleduj ca tabu ka popisuje pre ka d druh svorky potrebn po et svoriek a pr slu n u ahovac moment 254 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 Tab 1 PR RUBA UPEV OVAC MECHANIZMUS PO ET UBEVNOVAGTKRUTIAGI MOMENT ISO 63 Svorky M10 4 22 Nm M gt uu 0 OE ISO 160K Svorky M10 4 22 Nm Turbov veva so vstupnou pr rubou ConFlat mus by pripojen k v kuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nach dzaj v dodatku Technical Information TPS mobile nemo no upevni pomocou jej z kladnej dosky O in tal cia doplnkovej v bavy pozri pr ru ku Technical Information TPS mobile User Manual 87 901 005 01 B 255 362 14 N vod na Obsluhu Pouzitie T to as popisuje z kladn sp soby pou itia zariadenia Pred pou it m syst mu skontrolujte i boli spr vne zrealizovan v etky elektrick a pneumatick zapojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory
117. esign Part 2 technical principles 318 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 TPS Mobile Outline The following figure shows the TPS mobile outline Elevation Width 395 15 5 Dimensions mm inches Figure 10 TPS mobile User Manual 87 901 005 01 B 319 362 17 Technical Information Turbo Pumping System Connection Vaccum Inlet Flange Inlet Screen Installation Figure 11 Figure 12 The inlet screens mod 969 9300 969 9309 969 9802 and 969 9308 prevent the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 320 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 The inlet screen is fitted in the upper part of the pump TPS mobile is always provided with inlet screen fitted on Agilent suggest not to remove the TMP inlet screen to avoid accidents involving the pumping system tool and or pumping system users The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange dimensions are in inches mm ISO 63 CFF 2 75 CFF 4 5 2 76 70 00 0 1 2 50 0 35 9 00 He
118. f s ved henvendelse til den lokale Agilent repr sentant TPS mobile User Manual 87 901 005 01 B 125 362 7 Istruktionsbog Forberedelse for installation FORSIGTIG TPS mobile leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at TPS mobile ikke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse Figur 1 Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse 126 362 TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 Normal atmosf risk p virkning kan ikke skade TPS mobile Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer st v i pumpen Modellerne der er beskrevet i denne instruktionsbog stammer fra Agilent pumpesystem serien ben vnt TPS mobile Forskellene som de forskellige modelnumre indf rer henviser til foreline pumpen der er indbygget i den specifikke model ud over sp ndingen der er kr vet for anl gget Forskellene mellem de forskellige TPS mobile modeller vedr rer derfor udelukkende systemets ydelser derimod er funktionen og brugsm den de samme
119. factory set for 9600 baud operation Communication protocol Host Master Turbo V 301 Controller Slave The communication is performed in the following way Host Turbo V 301 Controller TPS mobile User Manual 87 901 005 01 B 331 362 17 Technical Information Request CRC Answer CRC Figure 25 Request is an ASCII character identifying the action that must be performed by the controller or the requested information Allowed ASCII characters A START B STOP CI Low Speed ON D Low Speed OFF JE Reguest for operational parameters F Pump times zeroing G Parameters reading H Parameters writing U Request for operating status JT Request for numerical reading K Reguest for counters reading CRC corresponds to the sum with inverted sign of all the preceding bytes 332 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 e g the START command A in ASCII code 41 inverted it will be FF 1 41 BF Tab 13 CHARACTER ASCII CONVERTED ASCII FOR CRC CALCULATION A 41h CRC i BFh B Bh CRC BEh u Bh CRC BDh p Mh CRC BCh EE CRC BBh mmm BA CRC BAh Na BA CRC Boh a AN m 49h CRC B7h SE CRC B6h Kn mh MMM CRC B5h ACK Oh ooo La CRC FAh NACK Eh aes eee CRC EBh Answer after a request from the host the Turbo V 301 controller will answer in
120. flins Foreline pumpens fistkonsoler frampanel och hjul genom att g ra en synkontroll Kontrollera insp nningen p Agilents etikett som sitter p den elektroniska enhets ram TPS mobile User Manual 87 901 005 01 B 149 362 8 Bruksanvisning Modelnummer PN Seriennummer SN Eldata Figur 2 Om sp nningen fr n elf rs rjningen r kompatibel med systemets kan elkabeln kopplas till eluttaget av typ IEC320 som sitter p systemets bakre panel se figuren Uttaget har en f stkl mma f r att undvika oavsiktliga fr nkopplingar av elkabeln Anv nd kl mman f r att f sta elkabeln 150 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning 8 Anvanding Fastklimma Elkabel Figur 3 Anslutning av f rs rjningen 303770 Modellen 989 8433 som erh lls levereras med en integrerad elkabel och d rmed beh vs inte denna tg rd utf ras a Tillf r r tt spanning till systemet med hj lp av elkabeln a Systemet r utrustat med en huvudstr mbrytare termisk brytare som kan skydda systemets komponenter mot verbelastningar eller kortslutningar St ll brytaren p l get 1 f r att s tta ig ng TPS modellen TPS mobile User Manual 87 901 005 01 B 151 362 8 Bruksanvisning Huvudbrytare med termiskt skydd 5 6 1
121. for alle TPS mobile modellerne De angivne oplysninger g lder for hele serien alle modeller uanset den specifikke molekyl re turbopumpe foreline pumpen eller den elektriske str mforsyning TPS mobile User Manual 87 901 005 01 B 127 362 7 Istruktionsbog Installation mile Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet 128 362 Install r og anvend ikke pumpeanl gget i milj er der uds ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift a max tryk 2 bar over det atmosf riske tryk a temperatur fra 5 C til 35 C a relativ luftfugtighed 0 95 ikke kondenserende Hvis pumpeanl gget er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes TPS mobile skal hvile p en j vn overflade Anbring TPS mobile i stabil position og forbind turbopumpens indtagsflange til en modflange der er i stand til at modst et tilsp ndingsmoment 50 omkring aksen direkte eller ved brug af en b jelig kobling Turbopumpen med ISO indtagsflange skal tilsluttes modflangen ved hj lp af klemmer F lgende tabel beskriver for hver type klemme antallet klemmer der skal bruges samt deres tilsp ndingsmoment TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 Tab 1 FLANGE KLEMMETYPE ANT DREJNINGS MOMENT
122. gresso ConFlat deve essere fissata alla camera da vuoto per mezzo dell apposita minuteria meccanica Agilent Per ulteriori dettagli vedere l appendice Technical Information Il TPS mobile non pu essere fissato tramite la sua base Per l installazione degli accessori opzionali vedere Technical Information TPS mobile User Manual 87 901 005 01 B 21 362 1 Istruzioni per uso Uso In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema verificare che tutti i collegamenti elettrici e pneumatici siano stati realizzati correttamente Durante eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C AUTU Non far funzionare mai il sistema di pompaggio se la turboflangia di ingresso E non collegata alla camera a vuoto o non chiusa con la flangia di chiusura VALAN Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare lesioni alle persone NU ALI ZN Evitare urti o spostamenti della turbopompa quando in funzione cuscinetti potrebbero danneggiarsi e potrebbero verificarsi danni alle persone o alle cose 22 362 TPS mobile User Manual 87 901 005 01 B Istruzioni per l uso 1 nania alla Perla mandata all aria della pompa utilizzare gas inerte esente da polvere particelle o umidit e
123. hase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies
124. hastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes HODY RYSA For at undg materielle skader samt at operatorerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 122 362 TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 Generel Information Dette udstyr er beregnet til professionel anvendelse Brugeren b r l se denne brugsanvisning og anden yderligere information fra Agilent f r udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler TPS mobile systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed og hovedpumpe Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine Turbinen drives af en elektrisk trefasemotor med h j effekt De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren
125. hodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom Modely uveden v tomto n vode vych dzaj z platformy erpac ch syst mov Agilent nazvanej TPS mobile pri om rozdiely zaveden r znymi slami modelov sa vz ahuj na turbomolekul rnu v vevu a na v vevu foreline integrovan v pecifickom modeli a na nap tie aplikovate n na syst m Rozdiely medzi r znymi modelmi TPS mobile sa vz ahuj len na v konnos syst mu zatia o innos a postupy pre pou itie s rovnak pre v etky TPS mobile Uveden inform cie s aplikovate n na cel platformu v etky modely nez visle od technick ch dajov turbomolekul rnej v vevy v vevy foreline alebo elektrick ho nap jania TPS mobile User Manual 87 901 005 01 B 253 362 14 N vod na Obsluhu Instal cia POZOR Neodstra ujte lepiacu pasku a ochrann kryt sk r ne pripoj te turbov vevu k syst mu erpac syst m nein talujte ani nepou vajte v prostred vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny tlak 2 bary nad rov ou atmosf rick ho tlaku a teplota od 5 C do 35 C a relativna vlhkos 0 95 bez kondenz cie V pr tomnosti magnetick ho po a mus by
126. i sze od 2 bar w ponad ci nienie atmosferyczne ZAGROZENIE Kiedy pompa jest zastosowana do pompowania gaz w toksycznych tatwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa zespo u pompuj cego w obecno ci gaz w wybuchowych W czenie i obs uga systemu TPS mobile Po rozpakowaniu TPS mobile sprawdzi czy nie ma lad w uszkodzenia systemu spowodowanych przez transport cz ci krytyczne to ko nierz pompy wsporniki do mocowania pompy Foreline panel przedni oraz ko a systemu przeprowadzaj c kontrol wzrokow Sprawdzi napi cie wej ciowe podane na etykiecie Agilent naklejonej na podstawie jednostki elektronicznej systemu TPS mobile User Manual 87 901 005 01 B 221 362 12 Podrecznik Instrukcji Numer modelu PN Numer seryjny SN Dane elektryczne Posta 2 Je eli napi cie zasilania elektrycznego jest zgodne z podanym dla systemu mo na pod czy kabel zasilania elektrycznego do gniazda typu IEC320 kt re znajduje si na tylnym panelu systemu patrz rysunek Gniazdo posiada spr yn blokuj c kt rej celem jest uniemo liwienie przypadkowego od czenia kabla zasilania spr yn wykorzysta do zamocowania kabla zasilaj cego 222 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 Uzytkowanie Sprezyna zabezpieczajac
127. i 969 8420M2001 TPS compact ei vaadi lainkaan huoltoa tip seal tiivisteen vaihtamista lukuun ottamatta malleissa jotka on varustettu scroll pumpuilla tai ljyn lis yksell vaihdolla Rotary Vane pumpuilla varustetuissa malleissa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla TPS mobile User Manual 87 901 005 01 B 191 362 10 Ohjek sikirja Havittaminen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lisatty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin jisenmaita tarkoittaa ett tuotetta El saa h
128. i K zik nyv El k sz t s telepitesre FIGYELEM A TPS mobile ot k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak bra 1 G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet 198 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TPS mobile ot Megis ajanlatos z rva tartani a rendszerbe val telep t sig igy megakad lyozva a por ltali szennyez d s barmely form j t Az ebben a haszn lati k zik nyvben szerepl t pusok az un TPS mobil Agilent szivatty rendszer azonoss g n alapulnak a kiil nb z sz m t pusok k z tti k l nbs gek a turbomolekul ris szivatty ra s az adott t pusba integr lt foreline szivatty ra valamint a rendszerhez haszn lhat fesz lts gre vonatkoznak A TPS mobil k l nb z t pusai k z tti k l nbs gek csak a rendszer te
129. ia od gniazda sieciowego spowoduje to wy czenie pompy oraz sterownika 226 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 Jednostki specjalne Platforma TPS mobile mo e by dostosowana do potrzeb odpowiednio do r nych wymaga uzyskuj c w ten spos b specjalne numery modelu Z wyj tkiem szczeg lnych przypadk w podanych w specjalnej dokumentacji niniejsza instrukcja ma zastosowanie do wszystkich zespo w specjalnych z oznaczeniem MXXXX na przyk ad 969 8420M2001 Konserwacja System TPS compact nie wymaga adnej konserwacji z wyj tkiem wymiany Tip seal dla wersji wyposa onej w pompy scroll lub uzupe nienia wymiany oleju w przypadku wersji z pompami Rotary Vane Jakakolwiek interwencja musi by wykonana przez upowa niony personel Przed wykonaniem jakiejkolwiek interwencji na systemie nale y od czy go od zasilania otworzy odpowiedni zaw r dla wlotu powietrza odczeka a do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie wynosi a poni ej 50 C W przypadku uszkodzenia mo liwe jest skorzystanie z serwisu naprawczego firmy Agilent Przed wysy k do konstruktora systemu do naprawy nale y obowi zkowo wype ni i przekaza do miejscowego biura sprzeda y kart Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz kopia karty musi by w o ony do opakowania systemu przed jego wy
130. ilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR L HAS pumped or been exposed ta the following toxic or hazardous materials If this box is checked the follawing information must also be filled out Check boxes for all materials to which product s pumped or was exposed C Toxic Gorrosive Reactive 1 Flammable El Explosive 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a
131. it description see the following figure TPS mobile User Manual 87 901 005 01 B Technical Information 17 226 R N Rotation Frequency rpm 300 R N Cycle time in minutes zeroed by the reset 0 to 999999 command 301 R N Cycle number zeroed by the reset 0 to 9999 command 302 R N Pump life in hours zeroed by the reset 0 to 999999 command 320 Reserved to Agilent service 400 R A CRC EPROM QE QE8XXXX where XXXX are variable 402 R A CRC Param PA PA8XXXX where XXXX are variable 404 R A CRC Parameter structure XXXX 503 RW N RS 485 address 0 to 31 default 0 504 R W L Serial type select m 0 RS232 1 RS 485 default 0 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 26 Windows N 206 Bit Description TPS mobile User Manual 87 901 005 01 B 347 362 17 Technical Information Pumping System Component Info Here following the complete list of the TPS mobile Part numbers By clicking on the PN referred to your system specific information about single components integrated in
132. ite command is out of the range value of the specified window the specified window is Read Only or temporarily disabled for example you can t write the Soft TPS mobile User Manual 87 901 005 01 B Examples Command START Source PC Destination Controller Technical Information 17 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC TPS mobile User Manual 87 901 005 01 B 341 362 Command SOFT START ON Source PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source
133. jen do z suvky elektrick ho rozvodu typu IEC320 kter se nach z na zadn m panelu syst mu viz obr zek Z suvka m p idr ovac pru inu aby se zabr nilo n hodn mu odpojen nap jec ho kabelu pou ijte pru inu pro p ipojen nap jec ho kabelu 240 362 TPS mobile User Manual 87 901 005 01 B N vod k Pou it 13 Pou it Pridr ovac pru ina Nap jec kabel Postava 3 Napajeci p vod ra Dodany model 989 8433 je vybaven nap jec m kabelem kter je jeho sou st a proto tato operace nen potrebna a P ipojte syst m k vhodn mu nap t prost ednictv m nap jec ho kabelu Syst m je vybaven hlavn m vyp na em tepeln m jisti em schopn m chr nit sou sti syst mu p ed p et en m nebo zkratem P ed zah jen m innosti s TPS mobile p epn te vyp na do polohy 1 TPS mobile User Manual 87 901 005 01 B 241 362 13 N vod k Pou it Hlavn vyp na s tepelnou ochranou Postava 4 Aktivace syst mu Po zapnut syst mu prost ednictv m hlavn ho vyp na e bude dic za zen v v vy turbo nap jen ale v v va turbo a tak v v va foreline z stanou vypnut Aktivace syst mu umo uje dic mu za zen zah jit ten daje
134. kej jednotky syst mu TPS mobile User Manual 87 901 005 01 B 257 362 14 N vod na Obsluhu slo modelu PN V robn slo SN daje elektrick ho rozvodu Postava 2 a Akje nap tie v elektrickej sieti vhodn pre nap janie syst mu je mo n pripoji nap jac k bel elektrick ho nap jania do z suvky elektrick ho rozvodu typu IEC320 ktor sa nach dza na zadnom paneli syst mu vi obr zok Z suvka m pridr iavaciu pru inu aby sa zabr nilo n hodn mu odpojeniu nap jacieho k bla pou ite pru inu pre pripojenie nap jacieho k bla 258 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 Pouzitie PridrZiavacia pruZina Nap jaci k bel Postava 3 Nap jac pr vod ra Dodan model 989 8433 je vybaven nap jac m k blom ktor je jeho s as ou a preto t to oper cia nie je potrebn a Pripojte system ku vhodn mu nap tiu prostredn ctvom nap jacieho k bla Syst m je vybaven hlavn m vyp na om tepeln m isti om schopn m chr ni s asti syst mu pred pre a en m alebo skratom Pred zah jen m innosti s TPS mobile prepnite vyp na do polohy 1 TPS mobile User Manual 87 901 005 01 B 259 362 14 N vod na Obsluhu Hlavn vyp na s tepelnou ochranou
135. l e 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 20 Uso 22 Accensione ed Uso del TPS mobile 23 Arresto del TPS mobile 28 Arresto diEmergenza 28 Unita Speciali 29 Manutenzione 29 Smaltimento 30 Traduzione delle istruzioni originali o Agilent Technologies 13 362 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantita di energia cinetica dovuta alla alta velocita di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore energia di rotazione potrebbe essere rilasciata VAU ALV Per evitare danni al apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 14 362 TPS mobile User Manual 87 901 005 01 B Istruzioni per l uso 1 Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza t
136. l v IEC320 t pus elektromos konnektorba l sd az br t A konnektor visszatart rug val van ell tva a t pk bel v letlen sz tcsatlakoz s nak megakad lyoz s ra Haszn lja a rug t a t pk bel csatol s hoz 204 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 Haszn lat Visszatart rug Tapkabel Abra 3 A tapcsatlakoztatas Manda va A 989 8433 t pus integr lt t pk bellel van ell tva teh t ezt a m veletet nem kell elv gezni A t pk belen kereszt l biztos tsa a megfelel fesz lts get a rendszernek a A rendszer olyan f kapcsol val h kapcsol val rendelkezik amely k pes a rendszer elemeit a t lterhel st l vagy a r vidz rlatt l meg vni A kapcsol t tegye 1 es helyzetbe ahhoz hogy m k dtetni kezdhesse a TPS mobilet TPS mobile User Manual 87 901 005 01 B 205 362 11 Felhaszn l i K zik nyv F kapcsol h v delemmel bra 4 A rendszer bekapcsol sa A rendszer f kapcsol val t rt n bekapcsol sa t pot biztos t a turb szivatty vez rl j nek de a turb szivatty s a Foreline szivatty kikapcsolva maradnak A rendszer bekapcsol s val a vez rl elkezdi a nyom sadatok olvas s t a v laszthat Full Range Gauge FRG 700 seg
137. lage Les notes contiennent des renseignements importants extrapol s du texte 52 362 TPS mobile User Manual 87 901 005 01 B Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des syst mes de pompage Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 a 95 non condensante a Ala premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start a Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition f r in En cas de d passement du temps de stockage le syst me de pompage doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone TPS mobile User Manual 87 901 005 01 B 53 362 3 Mode d emploi Preparation pour installation ATTENTION Le TPS mobile est livr dans un emballage de protection sp cial en cas endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TPS mobile et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l em
138. ld responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TPS mobile is an integrated system with a turbo molecular pump for high and ultra high vacuum applications associated with its relevant controller and its primary pump The system can pump any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine driven by a high performance 3 phase electric motor The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information TPS mobile User Manual 87 901 005 01 B 285 362 16 Instructions for Use This manual uses the following standard protocol The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 286 362 TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 Storage In ord
139. le y zapozna sie z dodatkiem Technical Information System TPS mobile nie mo e by mocowany poprzez w asn podstaw Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information TPS mobile User Manual 87 901 005 01 B 219 362 12 Podrecznik Instrukcji U ytkowanie W tym paragrafie zosta y przedstawione g wne procedury operacyjne Przed rozpocz ciem korzystania z uk adu nale y sprawdzi czy wszystkie pod aczenia elektryczne i pneumatyczne s wykonane poprawnie Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 120 C ZAGROZENIE Absolutnie nie wolno uruchamia zespo u pompuj cego w przypadku gdy ko nierz wej ciowy nie jest pod czony do komory lub nie jest zamkni ty z ko nierzem zamkni cia ZAGRO ENIE Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia cia a na osobach ZAGROZENIE Podczas funkcjonowania turbopompy nale y unika uderze i jej przemieszczania o yska mog ulec uszkodzeniu i mo e doj do uszkodzenia Os b lub rzeczy 220 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 Dla wlotu do powietrza pompy zastosowa oboj tny gaz bez py u lub innych cz stek i bez wilgoci np Azot Ci nienie wej ciowe poprzez odpowiedni wlot musi by n
140. le User Manual 87 901 005 01 B TPS mobile User Manual 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires 50 Indications g n rales 51 Stockage 53 Pr paration pour l installation 54 Installation 56 Utilisation 58 Mise en marche et utilisation du TPS mobile 59 Arret du TPS mobile 64 Arr t d urgence 64 Unites speciales 65 Entretien 65 Mise au rebut 66 Traduction de la mode d emploi originale e Agilent Technologies 49 362 3 Mode d emploi Normes de s curit pour Pompe Turbomoleculaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e a la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e NEA TAN Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 50 362 TPS mobile User Manual 87 901 005 01 B Mode d emploi 3 Indications g n rales Cet appareillage a t con u en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d
141. le User Manual 87 901 005 01 B 15 362 4 Manual de istrucciones Uso En este apartado se citan los procedimientos operativos principales Antes de usar el sistema controlar gue todas las conexiones el ctricas y neum ticas se hayan realizado correctamente Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 120 C ADVERTENCIA No hacer funcionar nunca el sistema de bombeo si la brida de entrada no est conectada a la c mara de vac o o no est cerrada con la brida de cierre ADVERTENCIA No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ADVERTENCIA gt gt gt Evitar los golpes o bruscos desplazamientos de la turbobomba cuando esta en marcha Los rodamientos se podrian da ar y se podrian verificar da os a las personas o a las cosas 76 362 TPS mobile User Manual 87 901 005 01 B Manual de istrucciones 4 CUS Para el envio al aire de la bomba utilizar gas inerte exento de polvo part culas y humedad por ej nitr geno La presi n de entrada a trav s de la respectiva puerta debe ser inferior a 2 bares por encima de la presi n atmosf rica LIBRARY Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No u
142. lem w odgazowywania nale y nie dotyka go ymi r koma cz ci przeznaczonych do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie 216 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 System TPS mobile nie moze by uszkodzony poprzez wystawienie go na dzia anie atmosfery Mimo to zaleca si aby pompa do momentu jej instalacji na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em Modele przedstawione w niniejszej instrukcji bazuj na platformie system w pompowania Agilent o nazwie TPS mobile r ne numery modelu dotycz pompy turbomolekularnej oraz pompy foreline wbudowanej w specjalny model a tak e napi cia jakie mo na stosowa w systemie R nice pomi dzy modelami TPS mobile dotycz tylko parametr w systemu natomiast dzia anie i procedury obs ugi s takie same dla wszystkich TPS mobile Podane informacje maj zastosowanie dla ca ej platformy wszystkie modele niezale nie od tego czy jest to pompa turbomolekularna pompa foreline czy o zasilaniu elektrycznym TPS mobile User Manual 87 901 005 01 B 217 362 12 Podrecznik Instrukcji Instalacja UWAGA Usun ta m klej c i zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu Nie instalowa i lub u ytkowa zespo u pompuj cego w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr
143. liente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver el sistema de bombeo al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent TPS mobile User Manual 87 901 005 01 B 71 362 4 Manual de istrucciones Preparacion para la instalacion El TPS mobile se suministra en un embalaje especial de protecci n si se observan da os que podrian haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de gue no se caiga el TPS mobile y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con lo dispuesto por la directiva CEE 85 399 para la preservaci n del medio ambiente Figura 1 ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada 12 362 TPS mobile User Manual 87 901 005 01 B Manual de istrucciones 4 El TPS
144. ljes tm ny re vonatkozik a m k d s s a haszn lati m d azonos minden TPS t pusn l Az ismertetett inform ci k a teljes sk l ra alkalmazhat k valamennyi tipusra a turbomolekul ris szivatty foreline szivatty vagy elektromos tap specifikumokt l f ggetlen l TPS mobile User Manual 87 901 005 01 B 199 362 11 Felhaszn l i K zik nyv Telepit s FIGYELEM Ne t vol tsa el az ntapad s v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt Ne telep tse valamint ne haszn lja a szivatty z rendszert atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s Z bar a l gk ri nyom s felett h m rs klet 5 C t l 35 C ig relativ p ratartalom 0 95 nem kondenz l M gneses mez k jelenl t ben a szivatty z rendszert v deni kell ferrom gneses pajzs seg ts g vel A TPS mobilet v zszintes s kra kell helyezni Tegye a TPS mobilet stabil helyzetbe csatlakoztassa a turb szivatty bemeneti karim j t egy 50 Nm nyomat knak ellen ll ellenkarim hoz a saj t tengelye k r l k zvetlen l vagy egy flexibilis csatlakoz seg ts g vel Az ISO bemeneti karim s turb szivatty t szor t kkal kell az ellenkarim hoz csatlakoztatni Az al bbi t bl
145. llage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets TPS mobile User Manual 87 901 005 01 B 65 362 3 Mode d emploi Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appligu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appligu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apres avoir v rifi les termes et conditions du contrat de vente utilisateur final est donc pri de contacter le fournisseur du dispositif maison mere ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut NY M N 4 OY ABBE 66 362 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 68 Informaci n general 69 Almacenamiento 71 Preparaci n para la instalaci n 72 Instalaci n 74 Uso 76 Encendido y Uso del TPS mobile 77 Parada del TPS mobile 82 Parada de Emergenica 82 Unidades especiales 83 Mantenimiento 83 Eliminaci n 84 Traducci n de las instrucciones originales ote Agilent Technologies 67 362
146. ltage provided by your electrical supplier is compatible with the system voltage you can connect the provided power cord to the IEC320 electrical socket on the rear side of the system see picture The socket is provided with a retention spring to avoid accidental disconnection of power cord plug use the spring to fasten the power cord plug 294 362 TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 Use Retention Spring Power cord plug Figure 3 Connection to main NOTE PN 969 8433 is already supplied with an integrated power cord so you don t need to perform this step a Provide the correct voltage to the system through the power cord a The system is equipped with a main switch thermal breaker able to protect the system components against overload or short circuits Move the breaker switch to the position 1 to start operating with the TPS mobile TPS mobile User Manual 87 901 005 01 B 295 362 16 Instructions for Use Main switch with thermal protection Figure 4 System activation The system activation by means of the Main Switch provides voltage to TMP controller but both TMP and Foreline pump continue to be switched off The system activation allows the TMP controller to start reading the pressure data
147. m nu za repasovan za zen mus te vyplnit list Health and Safety Zdrav a bezpe nost p ilo en k tomuto n vodu a zaslat jej m stn prodejn kancel i P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami TPS mobile User Manual 87 901 005 01 B 245 362 13 N vod k Pou it Likvidace V znam loga WEEE nachazejiciho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovan m WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do patfi nych provozn ch sb ren kde mus b t tf d n a likvidov n odd len od m stsk ho odpadu U ivateli kter mini v robek likvidovat doporu ujeme aby se nakontaktoval primo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku RE A G a LA 246 362 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 14 N vod na Obsluhu Bezpe nostn n vod pre Turbomolekul rne v vevy 248 V eobecn inform cie 249 Uchov vanie 251 Pr prava na in tal ciu 252 In tal cia 254 Pou itie 256 Zapnutie a pou itie zariadenia
148. miik des k zben A csapagyak megs riilhetnek s anyagi kar vagy szem lyi 4 s r l s t rt nhet 202 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 FIGYELEM Haszn ljon port l szemcs kt l vagy nedvess gt l mentes semleges g zt pl nitrog nt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Amikor a szivatty t m rgez gy l kony vagy radioaktiv g zok szivatty z s ra haszn lja k rem k vesse az egyes g zok artalmatlanitasahoz sz ks ges elj r sokat Ne haszn lja a szivatty z rendszert robban g zok jelenl t ben A TPS mobile bekapcsol sa s haszn lata Miut n kicsomagolta a TPS mobilet gy z dj k meg gondos megtekint ssel arr l hogy a rendszer nem szenvedett k rosod st a sz ll t s sor n a kritikus r szek az al bbiak a szivatty karima a Foreline szivatty r gzit kengyelei a frontlemez s a rendszer kerekei a Ellen rizze a rendszer elektromos egys g nek v z ra ragasztott Agilent c mk n szerepl bemeneti fesz lts get TPS mobile User Manual 87 901 005 01 B 203 362 11 Felhaszn l i K zik nyv Tipussz m PN Sorozatsz m SN Elektromos adatok bra 2 Ha az elektromos h l zat feszults ge megfelel a rendszer nek az elektromos t pk bel csatlakoztathat a rendszer hats panelj n
149. mp will be switched on Pumping selector Figure 32 Start pumping TPS mobile User Manual 87 901 005 01 B 353 362 17 Technical Information PNs 9698404 9698405 9698406 9698419 9698430 9698431 9698432 9698433 are not equipped with the selector named Pumping the same function is provided by the pushbutton Start Stop on the TMP controller TPS mobile switching off You can switch the pumps off by using the pumping selector moving it to position 0 the TMP controller will remain ON and if a gauge is connected to the system it will be possible to continue reading the pressure even if pumps are off a An alternative mode for switching the pumps off is the use of Main Switch move it to position 0 The system will be completely switched off and no reading or operation will be possible If an emergency situation occurs is possible to switch the pumps and the controller off even disconnecting the mains cable emergency stop Technical Information 17 Appendix 2 Tab 26 Troubleshooting Table Symptom Possible cause Action Check the connection of main plug Check possible fuses on main line Problems on main conn
150. n Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TPS mobile User Manual 87 901 005 01 B TPS mobile TPS mobile TPS mobile User Manual 87 901 005 01 B 3 362 TPS mobile 4 362 TPS mobile User Manual 87 901 005 01 B Contents 1 Contents Istruzioni per uso 13 Indicazioni di Sicurezza per Pompe Turbomolecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 20 Uso 22 Unita Speciali 29 Manutenzione 29 Smaltimento 30 Gebrauchsanleitung 31 Sicherheitshinweise fur Turbomolekularpumpen 32 Allgemeine Informationen 33 Lagerung 35
151. n f rblir t nd och om m taren r kopplad till systemet g r det att forts tta avl sningen av trycket ven med sl ckta pumpar Ett alternativt s tt att sl cka systemet r att anv nda huvudstr mbrytaren genom att st lla den p l get 0 Systemet sl cks helt och det g r inte att l sa av trycket eller utf ra andra operationer N dstopp F r ett n dstopp av TPS mobile g r det att koppla fr n elkabeln fr n str muttaget vilket medf r att pumpen och kontrollenheten sl cks 154 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning 8 Speciella enheter Plattformen TPS mobile kan anpassas i funktion till olika krav och f specifika modellnummer Med undantag av s rskilda fall som gesien specifik dokumentation g ller denna handbok f r alla speciella enheter som markerats med MXXXX t ex 969 8420M2001 Underh ll TPS compact r underh llsfritt f rutom bytet av Tip seal f r versioner utrustade med scroll pumpar eller pafyllning byte av olja f r versionerna med pumparna Rotary Vane Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad Innan systemet l mnas in till
152. n gaseosa pero no es adecuado para bombear liquidos o particulas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad movida por un motor el ctrico trif sico de alto rendimiento A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TPS mobile User Manual 87 901 005 01 B 69 362 4 Manual de istrucciones Este manual utiliza las convenciones siguientes UM VH Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una ejecuci n espec fica que de no realizarse correctamente podr a provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaci n importante extra da del texto 70 362 TPS mobile User Manual 87 901 005 01 B Manual de istrucciones 4 Almacenamiento ATENCI N Para garantizar el nivel m ximo de funcionalidad y fiabilidad de los sistemas de bombeo Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el c
153. n viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r svara personskador GID Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk for maskinskada ska uppst Detta visar p viktig information i texten 142 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning 8 F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och driftsakerhet f r Agilent turbomolekylara pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rhallanden respekteras Temperaturomrade 20 C till 70 C a Relativ fuktighet O till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och satts i drift f r f rsta gangen a De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet TA Om lagringstiden av n gon anledning r l ngre m ste pumpsystemet skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information TPS mobile User Manual 87 901 005 01 B 143 362 8 Bruksanvisning Forberedelser for installationen TPS mobile levereras i ett s rskilt skyddande emballage Kontakta det lokala f rsaljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TPS mobile inte tappas eller uts tts f r st tar vid uppackning
154. nem lehet sem a nyom st leolvasni sem m s m veletet v gezni Veszleallitas V sz eset n a TPS mobilet gy lehet le ll tani hogy kih zza a t pvezet ket a h l zati dug b l ami a szivatty s a vez rl kikapesol s t fogja eredm nyezni 208 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 Speci lis egys g A TPS mobile alapot a kiil nb z ig nyeknek megfelel en testre lehet szabni ez ltal specifikus t pussz mok nyerhet k A specifikus dokument ci val rendelkez specifikus esetek kiv tel vel ez a k zik nyv az sszes MXXXX jelz s speci lis egys gre alkalmazhat MXXXX p ld ul 969 8420M2001 Karbantart s A TPS compact nem ig nyel karbantart st kiv ve a Tip seal cser j t a scrollszivatty val felszerelt v ltozatokn l vagy az olajadagol cser l cser j t a Rotary Vane szivatty s v ltozatn l A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n forduljon a Agilent szervizk zponthoz Miel tt jav t sra visszak ldi a rendszert a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni
155. nesmie prekro i 120 sC NEBEZPE IE Nikdy nepou vajte erpac syst m ak vstupn pr ruba nie je pripojen k v kuovej komore alebo nie je zablendovan NEBEZPE IE V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny NEBEZPE IE gt PIP Nepremiest ujte turbov vevu ak je v innosti a chr te ju pred n razmi aby nedo lo k po kodeniu lo sk o my mohlo vies k razom alebo k majetkov m kod m 256 362 TPS mobile User Manual 87 901 005 01 B N vod na Obsluhu 14 POZOR Pre vyplach vyvevy pou ivajte inertny plyn zbaveny prachu astic a vlhkosti napr dus k Tlak na ventila nom vstupe mus by ni ne 2 bary pretlakov WAJZZZTH 4M Ak erpac syst m pou vate na vy erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov Zapnutie a pou itie zariadenia TPS mobile Po odbaleni TPS mobile sa vizu lnou kontrolou uistite e sa syst m po as prepravy nepo kodil kritick mi as ami s pr ruby v vevy konzoly pre upevnenie v vevy Foreline eln panel a koles syst mu prostredn ctvom vizu lnej kontroly a Skontrolujte vstupn nap tie uveden na t tku Agilent prilepenom na r me elektronic
156. ng In the presence of magnetic fields the pumping system must be protected using a ferromagnetic shield The TPS mobile have to be placed on a flat floor Place the TPS mobile in a stable position connecting the inlet flange of the turbopump to a counter flange capable of withstanding a torque of 50 Nm around its axis directly or by means of a flexible hose The turbopump with ISO inlet flange must be connected to the counter flange by means of clamps The following table shows for each fixing device the necessary number of clamps and the relevant fixing torque 290 362 TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 Tab 1 FLANGE FIXING DEVICE N FIXING TORQUE ISO 63 M10 clamps 4 22 Nm ISO 100 K M10 clamps 4 _22Nm M ISO 160 K M10 clamps 4 22 Nm The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TPS mobile cannot be fixed by means of its base For installation of optional accessories see Technical Information TPS mobile User Manual 87 901 005 01 B 291 362 16 Instructions for Use Use 292 362 This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections are properly connected before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed
157. ng Speed L s 510 E TMP Rotational Speed Owm Start up time min iO Operating Position Onafato Ambient Temperature 45 t048 _Bakeout Temperature max 120 C on Inlet Flange Protection Breaker BA Compliance with Oooo SEE CE CERTIFICATE OF CONFORMITY Installation category Pollution Degree 2 Serial Communication kit None OO Storage Temperature 2 Cto 70 According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange When the TPS mobile has been stored at a temperature less than 5 C wait until the TPS mobile has reached the above mentioned temperature 314 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Tab 8 Characteristic 969 8401 969 8402 969 8418 969 8417 Turbo Pump TV301 TV301 TV301 TV301 TMP Flange 150100 150100 150100 150100 Forepump TS300VPI SH110 IDP3 DS402 Voltage 220 V 50 Hz Base Pressure 1x10 8mbar 7 5x10 STorr N2 Pumping Speed L s 250 TMP Rotational Speed 56000 rpm Start up time lt 3 min Ex A MO eee um AA bb ee E B akeout Temperature max 80 C on Inlet Flange PE SEE CE CERTIFICATE OF CONFORMITY Installation category Il Pollution Degree 2 Serial Communication kit T Plus Storage Temperature 20 C to 70 C TPS mobile User Manual 87 901 005 01 B 315 362 17 Tech
158. nical Information Tab 9 Characteristic 969 8400 969 8403 969 8429 969 8428 Turbo Pump TV301 TV301 TV301 TV301 TMP Flange IS0100 IS0100 IS0100 IS0100 Forepump DS302 DS102 TS300VPI SH110 Voltage 220V 50Hz 220V 50Hz 110V 60Hz 110V 60Hz Base Pressure 1x10 8 mbar 7 5x109 Torr N2 Pumping Speed L s 250 He Pumping Speed L s 220 Hz Pumping Speed L s 200 TMP Rotational Speed 56000 rpm Start up time lt 3 min Ambient Temperature 5 C to 35 C Bakeout Temperature max 80 C on Inlet Flange Protection Breaker 14A K Aaaama m U N Serial Communication kit T Plus 20 C to 70 C According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange When the TPS mobile has been stored at a temperature less than 5 C wait until the TPS mobile has reached the above mentioned temperature 316 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 Tab 10 Characteristic 969 8427 969 8426 969 8425 969 8424 Turbo Pump TV301 TV301 TV301 TV301 a p ui A ar E Forepump IP DS402 DS302 DSIO Voltage MOV 60H O E Base Pressure tx10 mbar 75xd0 Tom 1 Nz Pumping Speed L s BD E He Pumping Speed L s MO E Hz Pumping Speed L s mm OO IMP Rotational Speed 56000mm o ooo E Start up time mi E Operating Position Onaflatfloo SS Ambien
159. njsko dobo je treba rpalni sistem vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum TPS mobile User Manual 87 901 005 01 B 269 362 15 Priro nik za Navodila Priprava za monta o POZOR TPS mobile je dobavljen v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 Slika 1 Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito 270 362 TPS mobile User Manual 87 901 005 01 B Priro nik za Navodila 15 Normalna izpostavljenost na okolje ne more po kodovati TPS mobile a Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom Modeli navedeni v tem uporabni kem priro niku temeljijo na platformi rpalnih sistemov Agilent imenovani TSP mobile Razlike med razli nimi tevilkami modelov se poleg napetosti sistema nana ajo na turbomolekularno rpalko in rpalko foreline vgrajeno pri dolo enem modelu Razlike med posameznimi modeli TPS mobile se nana ajo samo na izkoristke si
160. nostn n vod pro Turbomolekularni v vevy Turbomolekul rn vyv vy jak jsou popisov ny v nasledujicim n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V pripad syst mov nefuk nosti napf kontaktu rotoru anebo statoru nebo pri zhroucen rotoru m e doj t k uvoln ni rota n energie A 174234180 Pokyny k instalaci uveden v tomto n vodu musi byt p sn dodr ov ny za elem prevence po kozen za izeni a zran n obsluhy 230 362 TPS mobile User Manual 87 901 005 01 B N vod k Pouziti 13 VSeobecn informace Toto zarizeni je ur eno pro odborn ky U ivatel by si m l p ed pou it m zarizeni precist tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do zarizeni nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v pr slu n ch st tn ch norm ch TPS mobile je integrovan syst m pro aplikace vyzadujici vysok a velmi vysok vakuum vybaven hlavn turbomolekul rn vyv vou a p slu n m regul torem Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na
161. nova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine ki jo vodi visoko u inkovit 3 fazni elektri ni motor Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information TPS mobile User Manual 87 901 005 01 B 267 362 15 Priro nik za Navodila Navodila so napisana po naslednjem standardnem protokolu SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo vse najbolj pomembne informacije iz besedila 268 362 TPS mobile User Manual 87 901 005 01 B Priro nik za Navodila 15 Shranjevanje Da bi jam ili najve ji mo ni nivo uporabnosti in zanesljivosti rpalnih sistemov Agilent je potrebno upo tevati slede a pravila a Pripo iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti O do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivlje
162. nsure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pe 1 3 A sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only LI Taxable L Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Ag
163. o O Q Figur 4 Aktivering av systemet Aktiveringen av systemet med huvudstr mbrytaren f rs rjer turbopumpens kontrollenhet men b de turbopumpen och Foreline pumpen f rblir sl ckta Aktiveringen av systemet g r att kontrollenheten b rjar att l sa av trycket genom Full Range Gauge FRG 700 tillval om m taren r kopplad till uttaget f r m tare som sitter bak p systemet 152 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning 8 M tarens port Serieport Figur 5 Anslutning av m taren a Det gar att starta systemet med v ljaren som kallas Pumping Efter att v ljaren Pumping st llts p l get 1 starta turbopumpen och Foreline pumpen V ljaren Pumping Figur 6 Start av pumpningen TPS mobile User Manual 87 901 005 01 B 153 362 8 Bruksanvisning Modellerna 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 r inte utrustade med v ljaren Pumping Knappen Start Stop som sitter p kontrollenheten har samma funktion Att st nga av TPS mobile Det g r att sl cka systemet med v ljaren Pumping genom att flytta den till l get 0 Kontrollenhete
164. o baseados na plataforma de sistema de bombagem Agilent denominada TPS m vel as diferencas introduzidas pelos diferentes n mero de modelo sao relativas a bomba turbomolecular e a bomba de foreline integrada no modelo especifico al m da tensao aplicavel ao sistema As diferencas entre os diferentes modelos do TPS m vel dizem respeito apenas aos rendimentos do sistema enquanto que o funcionamento e o procedimento de uso s o os mesmos para todos os TPS m vel As informac es apresentadas s o aplic veis em toda a plataforma todos os modelos independentemente da bomba turbomolecular especifica da bomba de foreline ou da alimenta o el ctrica TPS mobile User Manual 87 901 005 01 B 91 362 5 Manual de Istruc es Instalacao Remover a etiqueta autocolante e retirar a tampa de protecc o somente no momento de ligar a turbobomba ao sistema 92 362 N o instalar e ou usar o sistema de bombeamento em ambientes expostos a agentes atmosf ricos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condic es ambientais a press o maxima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C a humidade relativa 0 95 n o condensante Na presenca de campos electromagn ticos o sistema de bombeamento deve ser protegida atrav s de blindagens adeq
165. ollegamento della turbopompa al sistema Non installare e o utilizzare il sistema di pompaggio in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C a umidit relativa 0 95 non condensante In presenza di campi elettromagnetici il sistema di pompaggio deve essere protetto tramite opportuni schermi Il TPS mobile deve essere posizionato su una superficie piana Porre il TPS mobile in posizione stabile collegando la flangia di ingresso della turbopompa ad una controflangia capace di resistere ad una coppia di 50 Nm attorno al proprio asse direttamente o per mezzo di un raccordo flessibile La turbopompa con flangia di ingresso ISO deve essere collegata alla controflangia per mezzo di morsetti La seguente tabella descrive per ogni tipo di morsetto il numero di morsetti necessari e con quale coppia di serraggio stringerli 20 362 TPS mobile User Manual 87 901 005 01 B Istruzioni per l uso 1 Tab 1 COPPIA DI FLANGIA TIPO DI MORSETTO N SERRAGGIO ISO 63 Morsetto doppio con filettatura M10 4 22 Nm ISO 100 K Morsetto doppio con filettatura M10 4 22 Nm ISO 160 K Morsetto doppio con filettatura M10 4 22 Nm La turbopompa con flangia di in
166. ombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida a massa especifica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rota o pode ser liberada ATENCAO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instruc es de instalac o descritas neste manual 86 362 TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instruc es e todas as informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobservancia total ou parcial das instru es pelo uso indevido por parte de pessoas n o treinadas por operac es n o autorizadas ou pelo uso contr rio s normas nacionais espec ficas O TPS mobile um sistema integrado constitu do por uma bomba turbomolecular para aplicac es de alto e ultra alto v cuo equipado com os respectivos controller e bomba prim ria O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o apropriado para bombear liquidos ou part culas s lidas O efeito da bomba obtido atrav s de uma
167. omiarowego gauge System mo na uruchomi za pomoc prze cznika Pumping pompowanie Po ustawieniu prze cznika Pumping w po o eniu 1 uruchamia sie turbopompa oraz pompa foreline Prze cznik Pumping Posta 6 Uruchomienie pompowania TPS mobile User Manual 87 901 005 01 B 225 362 12 Podrecznik Instrukcji Modele 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 nie s wyposa one w prze cznik Pumping ta sama funkcja jest realizowana przez przycisk Start Stop znajduj cy sie na sterowniku Zatrzymanie TPS mobile System mo na wy czy za pomoc prze cznika Pumping ustawiaj c go w po o eniu 0 sterownik pozostanie w czony i je eli do systemu pod czony jest przyrz d pomiarowy mo liwy b dzie dalszy odczyt ci nienia nawet przy wy czonym pompa a Alternatywnym sposobem wy czenia systemu jest wykorzystanie wy cznika g wnego ustawiaj c go w po o eniu 0 System wy czy si ca kowicie i nie b dzie mo liwy ani odczyt ci nienia ani inne operacje Zatrzymanie Alarmowe W celu wy czenia TPS mobile w warunkach zagro enia mo na od czy kabel zasilan
168. omolekul rn v v vu a na v v vu foreline integrovanou ve specifick m modelu a na nap t aplikovateln na syst m Rozd ly mezi r zn mi modely TPS mobile se vztahuj pouze na v konnost syst mu zat mco innost a postupy pro pou it jsou stejn pro v echny TPS mobile Uveden informace jsou aplikovateln na celou platformu v echny modely nez visle na technick ch daj ch turbomolekul rn v v vy v v vy foreline nebo elektrick ho nap jen TPS mobile User Manual 87 901 005 01 B 235 362 13 N vod k Pou it Instalace POZOR Pred p ipojen m turbomolekul rn vyv vy do syst mu nesund vejte adhezn a ochrann v ko erpac syst m neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat nasledujici podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem a teplota od 5 C do 35 C a relativni vlhkost 0 95 bez sr en V pr tomnosti magnetick ch pol se erpac syst m mus chr nit feromagnetickym stin nim TPS mobile mus b t um st n na rovn povrch Um st te TPS mobile do stabiln polohy p ipojen m vstupn p ruby turbovyv vy k protip rub schopn odol vat kroutic mu momentu 50 Nm ve sv ose p mo nebo nep mo prost ednictv m
169. on TPS mobile User Manual 87 901 005 01 B 147 362 8 Bruksanvisning Anv nding Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan systemet anv nds kontrollera att alla el och tryckluftsanslutningar genomf rts riktigt Om vakuumkammaren uppvarms f r temperaturen vid inloppet aldrig verstiga 120 C VARNING Satt aldrig ig ng pumpsystemet om intagsflansen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VARNING Undvik st tar eller pl tsliga r relser av pumpen under drift Lagren skulle kunna f rst ras och skador p personer eller pa f rem l kan intr ffa 148 362 TPS mobile User Manual 87 901 005 01 B Bruksanvisning OBSERVER Anv nd delgas fri fr n damm partiklar och fukt t ex kv ve f r luftning av pumpen Trycket vid inloppet far vara h gst 2 bar ver atmosf riskt tryck VARNING D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de sarskilda anvisningarna f r varje enskild gas Anvand ej pumpsystemet i n rheten av explosiva gaser Start och anv ndning av TPS mobile a Efter att ha packat upp TPS modellen se till att det inte uppst tt skador p systemet under transporten kritiska delar r pumpens
170. on 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start ingangzusetzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum Falls die Lagerdauer aus verschiedentlichen Griinden die genannte Frist berschreiten sollte ist das Pumpensystem an das Werk zuriickzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter TPS mobile User Manual 87 901 005 01 B 35 362 2 Gebrauchsanleitung Vor der Installation Modell TPS mobile wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TPS mobile ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St Ben und Vibrationen zu schutzen ist Das Verpackungsmaterial ist vorschriftsgem fs zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz Abbildung 1 VORSICHT Um Entgasungen zu vermeiden diirfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefa t werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden 36 362 TPS mobile User Manual 87 901 005 01 B Gebrauchsanleitung 2 Modell TPS mobile kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation
171. one of the following ways TPS mobile User Manual 87 901 005 01 B 333 362 17 Technical Information a ACK NACK a Message When the Request is A B C D F the Turbo V 301 controller will Answer the ACK or NACK When the Request is E the Answer will contain the complete set of the following parameters Tab 14 BYTES MEANING 1 MSB LSB XXXX 0 STOP 1 WAITING INTERLOCK 2 STARTING 3 NORMAL OPERATION 4 5 HIGH LOAD 6 FAILURE ZO o nais 2 5 Cycle Time 6 9 10 11 12 Current ea Voltage Tr __________ 14 17 Frequency 18 19 Cycle gt AM 21 N R2 Status 22 The values for current and voltage are given as numbers scaled from 0 to 255 where 0 corre sponds to 0 V and 255 to the full scale voltage 130 V or current 2 5 A 334 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 When the Request is G the Answer will contain a string of 11 characters with the following parameters Tab 15 BYTES MEANING 1 2 Pump cycles number integer coded in 2 bytes 3 Speed threshold 4 7 Run up time in seconds long coded in 4 bytes 8 Deat time 0 NO 1 YES 9 Reserved When the configuration parameters have to be changed send a Request string a string with 9 characters of the following type H data CRC The following parameters can be changed Tab 16 BYTES MEANING 1 Speed threshold 2 5 Run up time in
172. or other appropriate protection 288 362 TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 Normal exposure to the environment cannot damage the TPS mobile Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust The models reported on this User Manual are based on the Agilent pumping system platform named TPS mobile differences introduced by different PNs are related to TMP and Forepump integrated in the specific system and to the main voltage applicable to the system The differences between the different TPS mobile PNs affect just systems performance operation and using procedure is the same for every TPS mobile The information reported is applicable to the entire platform all PNs apart from specific TMP Forepump or main voltage TPS mobile User Manual 87 901 005 01 B 289 362 16 Instructions for Use Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system Do not install or use the pumping system in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C relative humidity O 95 non condensi
173. osition 1 starter b de turbopumpen og Foreline pumpen Pumping kontakt Figur 6 Start af pumping TPS mobile User Manual 87 901 005 01 B 135 362 7 Istruktionsbog Modellerne 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 er ikke udstyret med Pumping afbryderen den samme funktion er sikret med Start Stop knappen der sidder p styreenheden Stop af TPS mobile a Det er muligt at slukke anl gget ved brug af Pumping afbryderen ved at flytte den i position 0 styreenheden vedbliver t ndt og hvis der er et m leinstrument der er tilsluttet systemet er det muligt at forts tte afl sningen selv hvis pumperne er slukket En anden m de at slukke for systemet er at bruge Hovedafbryderen ved at flytte den til position 0 Systemet slukkes fuldst ndigt og afl sning af trykv rdier samt andre operationer er ikke l ngere mulige Nodstop For at aktivere nadstoppet med TPS mobile enheden er det muligt at fjerne forsyningsledningen fra stikdasen det medf rer slukning af pumpe og af styreenhed 136 362 TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 Specielle enheder TPS mobile serien kan tilpasses afh
174. otale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TPS mobile un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto integrata dal relativo controller e dalla pompa primaria Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit mossa da un motore elettrico trifase ad alto rendimento Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information TPS mobile User Manual 87 901 005 01 B 15 362 1 Istruzioni per uso Questo manuale utilizza le seguenti convenzioni NIN messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali f r messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 16 362 TPS mobile User Manual 87 901 005 01 B
175. ou iti 229 Bezpe nostni navod pro Turbomolekularni vyv vy 230 V eobecn informace 231 Uskladn n 233 P prava k instalaci 234 Instalace 236 Pou it 238 Speci ln jednotky 245 TPS mobile User Manual 87 901 005 01 B Contents dr ba 245 Likvidace 246 14 N vod na Obsluhu 247 Bezpe nostn n vod pre Turbomolekul rne v vevy 248 V eobecn inform cie 249 Uchov vanie 251 Pr prava na in tal ciu 252 In tal cia 254 Pou itie 256 peci lne jednotky 263 dr ba 263 Likvid cia 264 15 Priro nik za Navodila 265 Varnostna navodila za Turbomolekularne rpalke 266 Splo ne informacije 267 Shranjevanje 269 Priprava za monta o 270 Montaza 272 Uporaba 274 Posebne enote 281 Vzdr evanje 281 Odlaganje opadkov 282 TPS mobile User Manual 87 901 005 01 B 11 362 Contents 12 362 16 Instructions for Use 283 Safety Guideline for Turbomolecular Pumps 284 General Information 285 Storage 287 Preparation for Installation 288 Installation 290 Use 292 Modified Standard 299 Maintenance 299 Disposal 300 17 Technical Information 301 Description of the TPS mobile 303 Technical Specification 311 TPS Mobile Outline 319 Turbo Pumping System Connection 320 Electrical Connections 325 Letter Protocol Description 331 Pumping System Component Info348 Accessories and Spare Parts 349 Appendix 1 350 Appendix 2 355 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manua
176. owych TPS mobile jest zintegrowanym systemem sk adaj cym si z pompy turbomolekularnej dla zastosowania wysokich i ultra wysokich pr ni odpowiedniego sterownika i z g wnej pompy System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TPS mobile User Manual 87 901 005 01 B 213 362 12 Podrecznik Instrukcji W tej instrukcji zastosowano nast puj ce umowne znaczenia ZAGRO ENIE Komunikaty niebezpiecze stwa przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mog oby spowodowa powa ne uszkodzenia cia a Komunikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury S to wa ne informacje wyci gni te z tekstu 214 362 TPS mobile User Manual 87 901 005 01 B Podrecznik Instrukcji 12 Magazynowanie By zagwarantowa maksymalny p
177. oziom funkcjonalno ci i dzia ania system w pompuj cych Agilent powinny by przestrzegane nast puj ce zasady podczas transportu przesuni cia i magazynowania pomp nie mog by przekroczone nast puj ce warunki rodowiskowe temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesi cy od daty wysy ki Je eli z jakiegokolwiek powodu czas magazynowania jest d u szy nale y odes a zesp pompuj cy do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa si z miejscowym przedstawicielem firmy Agilent TPS mobile User Manual 87 901 005 01 B 215 362 12 Podrecznik Instrukcji Przygotowanie do instalacji System TPS mobile jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TPS mobile ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska Posta 1 Aby unikn prob
178. pecielle enheder 137 Vedligeholdelse 137 Bortskaffelse 138 Bruksanvisning 139 S kerhetsanvisningar f r Molekyl ra turbopumpar140 Allm n Information 141 F rvaring 143 F rberedelser f r installationen 144 Installation 146 Anvanding 148 Speciella enheter 155 Underhall 155 Bortskaffning 156 Instruksjon Manual 157 Sikkerhetsanvisninger for Turbomolekyleere pumper 158 Generell informasjon159 Lagring 161 TPS mobile User Manual 87 901 005 01 B Contents Klargj re til installasjon 162 Installasjon 164 Bruk 166 Spesialenheter 173 Vedlikehold 173 Kassering 174 10 Ohjek sikirja 175 Turbomolekyylipumppujen Turvaohjeet 176 Yleisi tietoja 177 Varastointi 179 Valmistelut asennusta varten180 Asennus 182 K ytt 184 Erityisyksik t 191 Huolto 191 H vitt minen 192 11 Felhasznal i Kezik nyv 193 Biztons gi tmutat Turb molekul ris szivatty khoz 194 ltal nos inform ci 195 T rol s 197 El k szit s telepit sre 198 Telepit s 200 TPS mobile User Manual 87 901 005 01 B 9 362 Contents 10 362 12 13 Haszn lat 202 Speci lis egys g209 Karbantart s 209 Megsemmisit s 210 Podrecznik Instrukcji 211 Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych 212 Og lne informacje 213 Magazynowanie 215 Przygotowanie do instalacji 216 Instalacja 218 U ytkowanie 220 Jednostki specjalne 227 Konserwacja 227 Przetworstwo odpadow 228 Navod k P
179. pletely switched off and no reading or operation will be possible Emergency Stop If an emergency situation occurs is possible to switch the pumps and the controller off even disconnecting the mains cable emergency stop 298 362 TPS mobile User Manual 87 901 005 01 B Instructions for Use 16 Modified Standard TPS mobile platform is suited to be tailored in according to many different needs so special TPS mobile PNs can be released Except some specific cases provided with a specific documentation this User Manual is applicable to all special unit marked as MXXXX i g 969 8420M2001 Maintenance The TPS mobile does not require any maintenance except Tip seal replacement for versions equipped with scroll pumps and oil filling up change for versions with Rotary Vane Pumps Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center Before returning the system to the constructor for repairs the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping
180. r de pomp en de controller worden uitgeschakeld 118 362 TPS mobile User Manual 87 901 005 01 B Bedrijfshandleiding 6 Speciale units Het TPS mobile platform kan op verschillende behoeften worden aangepast waardoor specifieke modelnummers worden verkregen Met uitzondering van specifieke gevallen voorzien van specifieke documentatie is deze handleiding van toepassing op alle speciale units aangeduid met MXXXX bijvoorbeeld 969 8420M2001 Onderhoud De TPS mobile is onderhoudsvrij behalve de vervanging van de Tip seal bij de uitvoeringen met scroll pompen of het olie bijvullen verversen bij de uitvoeringen met Rotary Vane pompen Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij de pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TPS mobile User Manual 87 901 005 01 B 11
181. r double a filet M10 4 22 Nm La turbopompe bride d entr e ConFlat doit tre fix e la chambre vide l aide des l ments m caniques Agilent pr vus cet effet Pour tout autre d tail se reporter a appendice Technical Information Le TPS mobile ne peut tre fix par sa base Pour l installation des accessoires en option se reporter Technical Information TPS mobile User Manual 87 901 005 01 B 57 362 3 Mode d emploi Utilisation Ce paragraphe pr sente les principales proc dures op rationnelles Avant de sortir v rifiez que tous les raccordements lectriques et pneumatiques ont t correctement effectu s Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C AVERTISSEMENT Ne jamais faire fonctionner le syst me de pompage si la bride entr e est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture AVERTISSEMENT viter de toucher la turbopompe ainsi gue ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre a origine de l sions graves AVERTISSEMENT gt gt PI Eviter tout choc ou d placement de la turbopompe lorsgu elle est en marche Cela pourrait endommager les paliers et provoguer de graves dommages aux personnes et aux choses 58 362 TPS mobile User Manual 87 901 005 01 B Mode
182. r og hvilken momentn kkel som skal brukes for stramme dem 164 362 TPS mobile User Manual 87 901 005 01 B Instruksjon Manual 9 Tab 1 FLENS TYPE KLEMME ANT STRAMME MOMENT ISO 63 Dobbel klemme gjenge M10 4 22 Nm ISO 100K Dobbel klemme gjenge M10 4 22 Nm ISO 160K Dobbel klemme gjenge M10 4 22 Nm Turbopumpen med ConFlat inngangsflens skal festes til vakuumkammeret ved hjelp av de spesielle l sedelene fra Agilent For detaljer henvises det til Technical Information TPS mobile m ikke festes gjennom fundamentet For installasjon av tilleggsutstyr vises det til Technical Information TPS mobile User Manual 87 901 005 01 B 165 362 9 instruksjon Manual Bruk Alle instruksjoner for korrekt bruk finnes i dette avsnittet Fer bruk av systemet kontroller at alle de elektriske og pneumatiske koblingene er blitt korrekt utfert Mens oppvarmingen av kammeret p g r ma temperaturen ved inngangsflensen ikke overskride 120 C WONINGEN Ikke start pumpesystemet hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen HODY RYSA Ikke beror turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan fore til brannskader WONINGEN Unng st t eller br bevegelser av turbopumpen nar den er i bruk Lagrene kan kunne skades og det kan kunne oppsta skade pa personer eller gjenstander 166 362 TPS mobile User Manual 87
183. radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa Alkaa k ytt k pumppausjarjestelmaa rajahdysherkkien kaasujen lahella TPS mobile n kaynnistys ja kaytt Kun TPS mobile on purettu pakkauksesta varmista silm m r isen tarkistuksen avulla ett j rjestelm ss ei n y kuljetuksesta syntyneit vikoja kriittiset osat ovat pumpun laippa Foreline pumpun kiinnityskannattimet etupaneeli ja j rjestelm n renkaat Tarkista sis nmenon j nnite joka lukee j rjestelm n elektronisen yksik n runkoon kiinnitetyssa Agilent tarrassa TPS mobile User Manual 87 901 005 01 B 185 362 10 Ohjek sikirja Mallin numero PN Sarjanumero SN Sahk tiedot Kuva 2 Jos s hk j rjestelm n sy tt m j nnite sopii yhteen j rjestelm n jannitteen kanssa kytke s hk johto IEC320 tyyppiseen sahk pistokkeeseen joka sijaitsee jarjestelman takapaneelissa katso kuva Pistoke on varustettu pidatysjousella joka on asennettu est m n virtajohdon satunnaista irtoamista kayta jousta johdon kiinnittamista varten 186 362 TPS mobile User Manual 87 901 005 01 B Ohjek sikirja 10 Kaytt Pidatys jousi Virtajohto Kuva 3 Virtaliit nt HUOM Malli 969 8433 on varustettu integroidulla virtajohdolla joten t m n toimenpiteen suorittaminen ei ole tarpeen Sy t j rjestelm n j nnitteelt n oikeaa virtaa
184. rajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 sC V pr pade poruchy zariadenia vyh adajte servisn stredisko spolo nosti Agilent Pred odoslan m zariadenia v robcovi treba vyplni dotazn k Zdravie a Bezpe nos pripojen k n vodu na pou itie a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn v s lade so pecifick mi predpismi danej krajiny TPS mobile User Manual 87 901 005 01 B 263 362 14 N vod na Obsluhu Likvid cia V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu EU s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja F R b 264 362 TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke 266 Splo ne informacije 267 Shranjevanje 269 Priprava za mon
185. rede model 980 8433 er udstyret med en indbygget forsyningsledning og det er derfor ikke n dvendigt at udf re denne operation a Forsyn anl gget med den korrekte sp nding ved hj lp af forsyningsledningen a Anl gget er udstyret med hovedafbryder termisk afbryder som er i stand til at beskytte systemets bestanddele mod overbelastninger eller kortslutninger Stil afbryderen i position 1 for at begynde operationerne med TPS mobile anordningen TPS mobile User Manual 87 901 005 01 B 133 362 7 Istruktionsbog Hovedafbryder med termisk beskyttelse Figur 4 Aktivering af system Systemets aktivering ved brug af hovedafbryderen forsyner turbopumpens styreenhed med str m men turbopumpen og Foreline pumpen vedbliver slukket Systemets aktivering giver styreenheden mulighed for at starte afl sning af trykv rdien ved hj lp af Full Range Gauge FRG 700 anordningen ekstraudstyr hvis dette er tilsluttet gauge forbindelsesporten der sidder bag p anl gget 134 362 TPS mobile User Manual 87 901 005 01 B Istruktionsbog 7 M leinstrument Seriel port Figur 5 Tilslutning af m leinstrument a Det er muligt at starte anl gget ved hj lp af Pumping afbryderen Efter at have stillet afbryderen Pumping i p
186. rheitshinweise fir Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verfugen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Schaden am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 32 362 TPS mobile User Manual 87 901 005 01 B Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist fur den fachmannischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mifsachtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell TPS mobile ist ein integriertes System das aus einer Turbomolekularpumpe fiir Hoch und H chstvakuumanwendungen integriert mit einem entsprechenden Controller und der Prim rpumpe besteht Das System eignet sich fur die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch fiir
187. roefdraad 4 22 Nm ISO 100 K Dubbele klem met M10 schroefdraad 4 22 Nm ISO 160 K Dubbele klem met M10 schroefdraad 4 22 Nm De turbopomp met ConFlat inlaatflens moet aan de vacuiimpomp worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical Information De TPS mobile kan niet met behulp van zijn eigen basis worden bevestigd Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn TPS mobile User Manual 87 901 005 01 B 111 362 6 Bedrijfshandleiding Gebruik In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Controleer alvorens het systeem te gebruiken of alle elektrische en pneumatische aansluitingen correct tot stand zijn gebracht Tijdens de eventuele verwarming van de vacuumkamer mag de temperatuur op de inlaatflens niet meer dan 120 C bedragen WAARSCHUWING Laat het pompsysteem nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is WAARSCHUWING Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken WAARSCHUWING gt gt gt Vermijd stoten of bruuske verplaatsingen wanneer de turbopomp in werking is De lagers kunnen beschadigen en er kunnen letsels aan personen of schade aan voorwerpen worden veroorzaakt 112
188. rolls orbits about the other creating moving zones of captured gas Gas enters the scroll set at the perimeter and is displaced and compressed toward the center hub where it is exhausted Gas enters scroll set Gas is displaced and compressed toward Gas exhausted center hub at center hub Figure 8 TPS mobile User Manual 87 901 005 01 B 309 362 17 Technical Information 310 362 TPS mobile versions equipped with RVPs are 969 8413 969 8411 969 8403 969 8400 969 8417 969 8405 969 8419 969 8420 969 8421 969 8424 969 8425 969 8426 969 8430 and 969 8431 INTERSTAGE INLET RELIEF INTERSTAGE VALVE VOLUME DISCHARGE VALVE EAN y Figure 9 A metal rotor is located eccentric into a round pumping chamber Two sliding vanes are placed in the rotor The vanes are pushed toward the stator wall either by springs To make high pressure ratios achievable the principal requirement of these pumps is that the inlet and discharge always remain separated This separation is achieved placing the rotor in close proximity to the stator the near contact line being placed between the inlet and discharge and spring loading the blades so that they remain in contact with the stator In addition oil is used to seal the end surfaces of the vanes and along the entire length of the two vanes as well as across the ends of the rotor As said the rotor in such pumps are placed inside the stator
189. rotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are fabricated in aluminum alloy During normal operation the motor functions with a power feed at 54 Vac three phase at 1330 Hz TV81M 963 Hz TV301 or 700 Hz TV551 To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage freguency ratio A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um 306 362 TPS mobile User Manual 87 901 005 01 B Technical Information 17 2 Front Panel The TPS mobile front Panel is the system user interface where all controller elements are located In particular it contains a Main Switch It is a protection thermal switch able to provide electrical power to the system protecting all the devices integrated in the system against overcurrents or shortcircuits The nominal current of the switch is fitted in according to the system configuration see configuration tables By means of the Main Switch you provide power to the system activating the TMP controller and its ability to read pressure by means of an optional gauge if connected a TMP Controller The integrated controller is a solid state frequency converter which is driven by a single chip mi
190. s Set Point signal activation type the signal can be high level active or low level active Set point hysteresis in of value Water cooling Active Stop write only in stop Baud rate Pump life cycle time cycle number reset Admitted Values Start 1 Stop 0 No 0 Yes 1 default 0 Remote 1 Serial 0 default 1 YES 1 NO 0 0 Frequency 1 Power 2 Time 3 Normal 4 Pressure default 3 default 900 0 to 99999 default 0 0 high level active 1 low level active default 0 0 to 100 default 2 0 NO 1 YES 0 NO 1 YES 600 0 1200 1 2400 2 4800 3 9600 4 default 4 To reset write 1 TPS mobile User Manual 87 901 005 01 B 125 R W R W R W Reserved to Agilent service R W R W R W R W R W L N Interlock type default 1 Analog output type output voltage signal proportional to frequency or power Low Speed frequency Hz Rotational frequency setting Hz Set vent valve on off on closed Set the vent valve operation Vent valve opening delay expressed in 0 2 sec Reserved to Agilent service Vent open time See vent connector paragraph Power limit applied Read the maximun allowable power Gas load type Select the gas load to the pump Pressure Reading Connection Factor See GAUGE CONNECTOR for more details R1 Set Point Pressure Valve Valid if min 101
191. s Azoto La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica AVATA LI Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare il sistema di pompaggio in presenza di gas esplosivi Accensione ed Uso del TPS mobile Dopo aver disimballato il TPS mobile assicurarsi che il sistema non abbia tracce di danneggiamenti dovuti al trasporto parti critiche sono flangia della pompa staffe di fissaggio della pompa di Foreline pannello frontale e ruote del sistema mediante un ispezione visiva Verificare la tensione d ingresso riportata sul etichetta Agilent incollata alla chassis dell unit elettronica del sistema TPS mobile User Manual 87 901 005 01 B 23 362 1 Istruzioni per uso Numero di modello PN Numero di serie SN Dati elettrici Figura 2 Sela tensione fornita dal alimentazione elettrica compatibile con quella del sistema si pu procedere a collegare il cavo d alimentazione elettrica alla presa elettrica di tipo IEC320 presente sul pannello posteriore del sistema vedi figura La presa dotata di una molla di ritenzione posta al fine d evitare disconnessioni accidentali del cavo d alimentazione usare la molla per agganciare il cavo d alimentazione 24 362 TPS mobile User Manual 87
192. s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz ll t s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkr t nemzeti szabv nyoknak megfelel en TPS mobile User Manual 87 901 005 01 B 209 362 11 Felhaszn l i K zik nyv Megsemmis t s 210 362 A c mk n jelenl v WEEE logo jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad wer No x TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual Podrecznik Instrukcji Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych 212 Og lne informacje213 Magazynowanie 215 Przygotowanie do instalacji 216 Instalacja 218 U ytkowanie 220 W czenie i obs uga systemu TPS mobile 221 Zatrzymanie TPS mobile 226
193. sar el sistema de bombeo cuando haya gases explosivos Encendido y Uso del TPS mobile a Despu s de desembalar el TPS m vil asegurarse de que el sistema no presente signos de da os debidos al transporte las piezas cr ticas son la brida de la bomba los soportes de fijaci n de la bomba de previo el panel frontal y las ruedas del sistema realizando una inspecci n visual Controlar la tensi n de entrada presente en la etiqueta Agilent fijada al chasis de la unidad electr nica del sistema TPS mobile User Manual 87 901 005 01 B 77 362 4 Manual de istrucciones Numero de modelo PN Numero de serie SN Datos el ctricos Figura 2 Sila tensi n suministrada por la alimentaci n el ctrica es compatible con la tensi n del sistema se puede conectar el cable de alimentaci n el ctrica a la toma de corriente tipo IEC320 presente en el panel trasero del sistema v ase la figura La toma cuenta con un muelle de retenci n para evitar la desconexi n accidental del cable de alimentaci n utilizar el muelle para enganchar el cable de alimentaci n 78 362 TPS mobile User Manual 87 901 005 01 B Manual de istrucciones 4 Uso Muelle de retenci n Cable de alimentaci n Figura 3 Conexi n de la alimentaci n NOTA El modelo suministrado 989 8433 se provee con un cable de alimentaci n integrado por lo tanto no es necesario realizar esta operaci n
194. sible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 120 C ATENCAO Nunca activar o sistema de bombeamento se o flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com o flange de fecho ATENCAO Nao tocar a turbobomba e os seus eventuais acess rios durante as operac es de aguecimento A elevada temperatura pode causar les es s pessoas ATENCAO Evitar colis es ou deslocamentos bruscos da turbobomba guando est a funcionar Os rolamentos poderiam sofrer danos e poderia verificar se les es 4 s pessoas ou s coisas 94 362 TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 CUIDADO Para a saida de ar da bomba utilizar gas inerte sem poeiras particulas ou humidade p ex Azoto A press o de entrada atrav s da porta especifica deve ser inferior a 2 bars al m da press o atmosf rica ATENCAO Ouando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adeguados tipicos para cada gas Nao usar o sistema de bombeamento na presenca de gases explosivos Acendimento e Utilizacao do TPS mobile Ap s ter desembalado o TPS m vel certificar se de que o sistema n o tenha marcas de danos devido ao transporte s o partes cr ticas flange da bomba estribos de fixac o da bomba de Foreline painel dianteiro e rodas do
195. stema medtem ko so delovanje in postopki uporabe enaki pri vseh modelih TPS mobile Navedene informacije veljajo za celotno platformo vsi modeli ne glede na specifi no turbomolekularno rpalko rpalko foreline ali elektri no napajanje TPS mobile User Manual 87 901 005 01 B 271 362 15 Priro nik za Navodila Monta a POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem rpalni sistem name ajte in uporabljajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere temperatura od 5 C od 35 C a Relativna vla nost 0 95 brez kondenza V prisotnosti magnetnih polje za ite rpalni sistem s feromagnetnim itom Sistem TPS mobile postavite na ravno povr ino Namestite ga tako da bo stabilen pri emer vhodno prirobnico na turbomolekularni rpalki pove ite s protiprirobnico ki lahko prenese navor 50 Nm okrog lastne osi neposredno ali s pomo jo fleksibilnega spoja Turbomolekularna rpalka z vhodno prirobnico ISO mora biti povezana s protiprirobnico s pomo jo sponk Slede a preglednica opisuje tevilo potrebnih sponk za vsako vrsto sponke in zatezni moment za vija enje slednjih 212 362 TPS mo
196. sy k Je eli system musi by poddany rozbi rce nale y przyst pi do jego eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy TPS mobile User Manual 87 901 005 01 B 227 362 12 Podrecznik Instrukcji Przetworstwo odpadow 228 362 Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu er d JA Oh 5 x TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 13 N vod k Pouziti Bezpe nostni n vod pro Turbomolekul rni vyv vy 230 VSeobecn informace 231 Uskladn ni 233 Priprava kinstalaci 234 Instalace 236 Pou iti 238 Zapnut a pou v n v v vy TPS mobile 239 Vypnuti vyv vy TPS mobile 244 Nouzov zastaveni 244 Specialni jednotky 245 dr ba 245 Likvidace 246 Preklad originalniho n vodu 25 Agilent Technologies 229 362 13 N vod k Pou it Bezpe
197. t Temperature 5 t0 5 00S Compliance with SEE CE CERTIFICATE OF CONFORMITY Storage Temperature 20 C to 70 C According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange When the TPS mobile has been stored at a temperature less than 5 C wait until the TPS mobile has reached the above mentioned temperature TPS mobile User Manual 87 901 005 01 B 317 362 17 Technical Information Conformity Certificate Agilent S p A declares under its own responsibility that this product complies with the essential safety reguirements indicated by the Machinery Directive 2006 42 CE by Electromagnetic Compatibility Directive 2004 108 CE and by the Low Voltage Directive 2006 95 CE The compliance of the above mentioned product with the standards of Table 11 is hereby guaranteed Tab 11 EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements EN 1012 2 2009 Compressors and vacuum pumps Safety requirements Part 2 vacuum pumps Safety of machinery Basic concepts general EN 12100 1 2009 principles for design Part 1 basic terminology methodology EN 12100 2 2009 Safety of machinery Basic concepts general principles for d
198. ta o 270 Monta a 212 Uporaba 274 Vklop in uporaba TPS mobile a 275 Izklop TPS mobile a 280 Zaustavitev v sili 280 Posebne enote 281 Vzdr evanje 281 Odlaganje opadkov 282 Prevod navodil v izvirniku 5 Agilent Technologies 265 362 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 266 362 TPS mobile User Manual 87 901 005 01 B Priro nik za Navodila 15 Splo ne informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TPS mobile je integriran sistem s turbomolekularno rpalko za visoko in ultravisoko vakuumsko uporabo ki je povezana s pripadajo im upravljaleem in primarno rpalko Sistem lahko rpa vse tipe pli
199. tillverkaren f r reparation m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med systemet Skrotning av systemet ska ske enligt g llande lagstiftning TPS mobile User Manual 87 901 005 01 B 155 362 8 Bruksanvisning Bortskaffning 156 362 Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor er d JA i ZU U TPS mobile User Manual 87 901 005 01 B TPS mobile User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Generell informasjon 159 Lagring 161 Klargj re til installasjon 162 Installasjon 164 Bruk 166 Starte og bruke TPS mobile 167 Stoppe TPS mobile 172 N dstopp
200. trische voeding TPS mobile User Manual 87 901 005 01 B 109 362 6 Bedrijfshandleiding Installatie UNGE bre Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden Het pompsysteem mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuv stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn max druk 2 bar boven de atmosferische druk a temperatuur van 5 C tot 35 C a relatieve vochtigheid 0 95 niet condenserend In aanwezigheid van magnetische velden moet het pompsysteem op passende wijze afgeschermd worden De TPS mobile moet op een vlakke ondergrond geplaatst zijn Bevestig de TPS mobile in een stabiele positie en monteer de inlaatflens van de turbopomp op een contraflens die tegen een koppel van 50 Nm rond de eigen as bestand is direct of door middel van een flexibele aansluiting De turbopomp met ISO inlaatflens moet met behulp van klemmen aan de contraflens worden bevestigd Onderstaande tabel geeft voor elk klemtype het aantal benodigde klemmen en het aanhaalkoppel waarmee ze vastgezet moeten worden 110 362 TPS mobile User Manual 87 901 005 01 B Bedrijfshandleiding 6 Tab 1 FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 63 Dubbele klem met M10 sch
201. truc es Interruptor principal com protecc o t rmica Figura 4 Activac o do sistema A activa o do sistema por meio do interruptor Principal fornece alimenta o ao controller da bomba turbo mas tanto a bomba turbo quanto a bomba de foreline permanecem desligadas A activa o do sistema permite ao controller iniciar a leitura do dado de press o por meio do Full Range Gauge FRG 700 opcional se este ltimo estiver conectado na porta de conex o do medidor colocada na parte traseira do sistema 98 362 TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 Porta do gauge Porta serial Figura 5 Conex o do gauge possivel arrancar o sistema por meio do selector denominado Pumping Ap s ter colocado o selector Pumping na posic o 1 a bomba turbo e a bomba de foreline s o activadas Selector Pumping Figura 6 Arranque da bombagem TPS mobile User Manual 87 901 005 01 B 99 362 5 Manual de Istruc es Os modelos 969 8404 969 8405 969 8406 969 8419 9
202. truzioni per uso 1 Porta gauge Porta seriale Figura 5 Collegamento del gauge E possibile avviare il sistema mediante il selettore denominato Pumping Dopo aver portato il selettore Pumping nella posizione 1 la pompa turbo e la pompa di foreline si avvieranno Selettore Pumping Turbo V ZAL KG Figura 6 Avvio del pompaggio TPS mobile User Manual 87 901 005 01 B 21 362 1 Istruzioni per uso I modelli 969 8404 969 8405 969 8406 969 8419 969 8430 969 8431 969 8432 969 8433 non sono equipaggiati con il selettore denominato Pumping la stessa funzione svolta dal pulsante Start Stop posto sul controller Arresto del TPS mobile E possibile spegnere il sistema mediante il selettore Pumping spostandolo in posizione 0 il controller rester acceso e se un gauge e collegato al sistema sara possibile continuare la lettura della pressione anche a pompe spente Un modo alternativo di spegnere il sistema quello usare l Interruttore Principale spostandolo in posizione 0 Il sistema si spegner completamente e non saranno possibili n letture di pressione n altre operazioni Arresto di Emergenza
203. ttformen TPS mobile kan brukertilpasses i henhold til de enkelte behov og dermed oppna spesifikke modellnummere Med unntak av spesifikkke tilfeller utstyrt med spesifikk dokumentasjon kan dette handboken brukes for alle spesialenheter merket med MXXXX for eksempel 969 8420M2001 Vedlikehold TPS compact er vedlikeholdsfri bortsett fra utskifting av Tip seal for versjonene utstyrt med scrollpumper og etterfylling oljeskift for versjonene med pumper Rotary Vane Alt arbeid pa systemet ma kun utfgres av autorisert personell OKB For noearbeid gj res p systemet m det frakoples tilf rselen pumpen m luftes ved a apne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser ma du ta kontakt med Agilents F r systemet returneres til produsenten for reparasjon ma det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket ma vedlegges systemet som sendes tilbake Dersom et system skal kasseres ma dette skje i henhold til nasjonale bestemmelser TPS mobile User Manual 87 901 005 01 B 173 362 9 instruksjon Manual Kassering Betydningen av symbolet pa logo WEEE pa etikettene Symbolet som vises nedenunder er anvendt i henhold til EC direktivet kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det star pa IKKE
204. uadas O TPS m vel dever ser posicionado sobre uma superficie plana Colocar o TPS m vel em posic o est vel conectando a flange de entrada da turbo bomba a uma contra flange capaz de resistir a um torque de 50 Nm ao redor do pr prio eixo directamente ou por meio de uma conex o flex vel A turbo bomba com flange de entrada ISO deve ser conectada contra flange por meio de terminais A tabela a seguir descreve para cada tipo de terminal o n mero de terminais necess rios e com qual torque de aperto devem ser apertados TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 Tab 1 FLANGE TIPO DE GRAMPO N TORQUE DE APERTO ISO 63 Grampo duplo com rosca M10 4 22 Nm ISO 100 K Grampo duplo com rosca M10 4 22 Nm ISO 160 K Grampo duplo com rosca M10 4 22 Nm A turbobomba com flange de entrada ConFlat deve ser fixada c mara de v cuo atrav s de parafusos especificos da mec nica Agilent Para ulteriores detalhes consultar o ap ndice Technical Information 0 TPS mobile n o pode ser fixado por interm dio da sua pr pria base Para a instalac o dos acess rios opcionais consultar Technical Information TPS mobile User Manual 87 901 005 01 B 93 362 5 Manual de Istru es Utilizacao En este apartado se citan los procedimientos operativos principales Antes de usar el sistema controlar que todas las conexiones el ctricas y neum ticas se hayan realizado correctamente Durante el po
205. uma bomba turbomolecular de 10 meses a contar da data da expedi o CUIDADO Se por uma raz o qualquer o periodo de armazenagem for superior sera necess rio enviar o sistema de bombeamento para o fabricante Para mais informac es contactar o representante local da Agilent TPS mobile User Manual 87 901 005 01 B 89 362 5 Manual de Istru es Preparac o para a instalacao O TPS mobile fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remoc o da embalagem tomar muito cuidado para nao deixar cair o TPS mobile e para n o submet lo a chogues ou vibrag es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente Figura 1 Para evitar problemas de perdas de gas n o tocar com as m os os componentes destinados exposic o do v cuo Utilizar sempre luvas ou outra protecc o adequada 90 362 TPS mobile User Manual 87 901 005 01 B Manual de Istruc es 5 TPS mobile n o pode ser danificado permanecendo simplesmente exposto a atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumulac es de p Os modelos indicados neste manual de instru es est
206. v a k vetkez szabv nyos protokollt haszn lja VESZ LY A figyelmeztet zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet died A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak 196 362 TPS mobile User Manual 87 901 005 01 B Felhaszn l i K zik nyv 11 T rol s A Agilent szivatty rendszerek maxim lis m k d si szintj nek s megbizhat s g nak biztos t s hoz tartsa be a k vetkez el r sokat szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C relativ p ratartalom O 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap a sz ll t s d tum t l FIGYELEM Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty z rendszert vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez TPS mobile User Manual 87 901 005 01 B 197 362 11 Felhaszn l
207. voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta Kuva 1 da Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina kasineita tai muuta sopivaa suojausta 180 362 TPS mobile User Manual 87 901 005 01 B Ohjek sikirja 10 TPS mobile ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen T ss kaytt ohjeessa osoitetut mallit perustuvat Agilent pumppausj rjestelm arkkitehtuuriin jota kutsutaan nimell TPS mobile Eri malleihin liittyv t numerot viittaavat turbomolekyyliseen pumppuun ja foreline pumppuun joka on integroitu erityiseen malliin j rjestelm ss k ytetyn j nnitteen lis ksi TPS mobilen eri mallien v liset erot koskevat ainoastaan j rjestelm n suorituskyky toiminnan ja k yt n ollessa samat kaikissa TPS mobile malleissa Annettuja tietoja voidaan soveltaa koko arkkitehtuuriin kaikki mallit erityisesta turbomolekyylisest pumpusta foreline pumpusta tai virransy t st riippumatta TPS mobile User Manual 87 901 005 01 B 181 362 10 Ohjek sikirja Asennus HUOMIO Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n Pumppausj rjestelm
208. vypnout hlavn m vyp na em jeho p epnut m do polohy 0 Dojde k pln mu vypnut syst mu a nebude mo n ode tat tlak ani vykon vat dal operace Nouzov zastaven TPS mobile je mo n bezpe n nouzov zastavit vyta en m nap jec ho kabelu ze z suvky co zp sob vypnut v v vy a dic ho za zen 244 362 TPS mobile User Manual 87 901 005 01 B N vod k Pouziti 13 Specialni jednotky Udr ba Platforma TPS mobile m e b t uZivatelsky prizp sobena v z vislosti na specifick ch pot eb ch kdy bude modelu prid leno speci ln slo S v jimkou specifick ch p pad kter maj specifickou dokumentaci Ize tento n vod aplikovat na speci ln jednotky ozna en MXXXX napr klad 969 8420M2001 V v va TPS compact nevy aduje dnou dr bu s v jimkou vym ny Tip seal pro verze s v v vami scroll nebo s dopl ov nim v m nou oleje pro verze s v v vami Rotary Vane Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby NEBEZPE Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte va e m stn servisn st edisko spole nosti Agilent Ne vr t te za zen v robci na opravu nebo v
209. y manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Vla F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc I Agilent Technologies Agilent Technologies

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