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ROBO Control Manual

1. e Name The name the Eurotherm is given in Eurotherms the Edit Eurotherm Setup Screen If there is a Mame Temp C Working SP_ Setpoint Ramp Rate Power Power RR Mode Gallium 100 00 100 00 1 00 communication error the background color will Aluminum 129 78 ona am 500 S be Red and the Eurotherm will no longer be 0 00 1 00 A polled 100 00 1 00 A Stage 2 940 00 100 00 1 00 As Stage 2 940 00 e Temp Shows the current temperature Colors Indum 23 96 om 2397 5 00 M are based on previously defined colors in the 960 00 H Edit Eurotherm dialog box screen In this ad E S scenario if the temperature is in a Warning state the background color will be Orange If D the Temperature is in an Alarm state the background color will be Red Figure 9 Eurotherms e Working SP This is the current Setpoint as set by the Eurotherm This is the value the Eurotherm is actively trying to reach If the current temperature is below the Working SP it will tell the power supply to output more power to reach that Setpoint e Setpoint To change the Setpoint type the desired temperature into the cell and hit ENTER or click a different cell This tells the Eurotherm that you want to reach that Setpoint The Eurotherm MUST BE IN AUTO MODE changing Auto Manual mode is explained in Mode explanation of Controlling Eurotherms e Ramp Rate This tells the Eurotherm how fast you want it to
2. SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 10 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION we Edit Eurotherms Name JEurothermi Comra 3 ei Type J Eurotherm 24X Units C Poll CI Display on Chamber lv Display Name C Display on Plot Warmg Range Range Min Temp Min Temp Normal Color Baud Rate 119200 Name Name of the Eurotherm that will be displayed in the Device Recipe Control Section of the Main Screen Comm Serial Port Number Address Address of the Eurotherm Type Type of Eurotherm Serial Config Baud Rate 19200 Parity O Break Length 15 Poll When checked allows Robo to poll the Eurotherm Display on Plot When checked the Eurotherm temperature will display on the Trend Charts 10 C D gt Plot Color Maz Temp I waming Color e Display on Chamber When checked the Eurotherm temperature indicator will display in Chamber View e Display Name When checked the name of the Eurotherm will display in Chamber View Warning Range e Min Temp The minimum temperature at which the software will indicate whether the Eurotherm temperature enters a Warning State e Max Temp The maximum temperature at which the software will i
3. in Ba zem inva After you choose a step a new dialog box will appear or PREPA deg related to the step you chose to add Figure 45 ipe Time Time Remaining Total Steps Steps a Ce bowa RS x shows the Add Set Temperature Step box ion Time Left 51 52 53 op For 200 iterations ee E de JU a IA dee G30 SEC rop Step Or DOSES Delete Step 2 oop Add Step After Add Step Before ej Clear Recipe i ae Can Figure 44 Adding Deleting Steps SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 31 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Add Set Temperature Step Temperature so0 Je Ada Shen Figure 45 Interlocks Device Interlocks Robo has the ability to create interlocks on instruments such as Eurotherms Pressure Gauges Digital Analog Inputs and many other devices These interlocks allow you to create watchdogs on vital devices so when a value is out of its normal range an alarm will sound alerting you and can load run a safety recipe Creating Device Interlocks To create a Device Interlock navigate to Interlocks gt Device Interlocks as shown in Figure 46 Left clicking on Device Interlocks opens the Edit Interlocks d
4. Fie EXE chamber view LogFile interlocks i iNi Eurotherms that use 24V TTL logic These digital controls can be suites d SC EE used to take control over rough pumps turbo pumps f Pressures fare Working SP Setpoint Ramp Rate Poner RA monitor analog pressure devices and any other device ot E ODA CM el LCA orm nalog Lontro Device Drivers gt with 24V I O Digital Controls Editing Digital Controls Before controlling monitoring a digital device you must first create and edit them To do this navigate to Figure 35 Navigate to Digital Devices Setup gt Digital Control Click Edit Digital Controls as shown in Figure 35 The Edit Digital Controls dialog box will appear as shown in Figure 36 allowing you to add and edit digital devices SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 25 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION s Name Name of the Digital Device e Shared Variable In The physical input of the digital line ared Variable ln ni var psp 192 188 1 17 RT RecipeVariables lterationsLeft 00000 2DO 3DO 4AIO 00 0 0 E 1 E 2 E 3 o Hae KE URL e Shared Variable Out The physical line in which the 24V log
5. Figure 29 Navigate to Edit Pressures SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 22 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION 7 Edit Pressure Gauges e Name The name given to that Pressure Gauge ES ESTI e Comm The physical Communication Port ame ressure Comm E E e Address The Address of the Gauge e Type A pull down box of available gauges Type 2op 307 e Position Positions the Pressure Gauge in Chamber Position View You can also move Pressure Gauges by left Left O clicking and dragging the Pressure Gauge to be relocated Edit Chamber must be enabled for this function to work e Warning Alarm levels Warning and Alarm levels to notify you of pressures that have exceeded the specified ranges e Poll When checked the software polls the gauge e Display on Chamber When checked the gauge is displayed in Chamber View e Comm Ok Tells you if the communication between the gauge and software is ok green Normal Color PlotColor MW di 9 Alarm Color MN warming Color iil e Pressure Warning Ok Tells you if the pressure is in a warning state orange e Pressure Alarm Ok Tells you if the pressure is in an alarm state red e Normal Ala
6. o a 33 Creating Digital lte eler 34 Recipe Son tol ODIN oie 36 CRnamber VIEW ccoo neto pace 36 EGU SRO ZE 37 MOVING Device INdICatorS evocaci n A E A diaria 37 Saving the Chamber VIEW a coooociciosiiimtosis crac caricia 37 Controlling the System via Chamber View 37 Chamber ee 38 Customization of the Device Control Tab 40 Setting the Visibility Of Tables 0 0 0 0 cccccccccseeceeeceeeceeecaeeeeeeeseeecseessaeesaeesaueesaeeseessuessaeesaeeseessueesaeesseessusegeeeses 40 e nn Pa 40 O o PP A E A T E T 41 Devica Re 41 SVT Associates RE Al 41 User Created Device Der 42 Transfering Values from Robo into LabVIEW created Software ooccoocccocnccococcnncocnnonnononncncnnnnnnnnnncnnnnnnnonononos 42 Warranty and Limitations Of Remedies cece eee eeese esse cess eeeseeeseeesaeeesaeeseeesaeeeaeeseesaeesaneeaeeeees 43 BS CUI UEC E 43 Returning Equipment for Repair Or Gervicnmg 44 PROPRIETARY INFORMATION ee A SAAT SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 4 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION A Installation If an installation was not preconfigured for the intended user a CD DVD media will be provided Alternatively a set of Installation discs may be provided pending the terms of agreement From Disc 1 of the installation CD DVD execute Setup exe and follow the instructions on the screen If multiple n
7. File Setup Chamber View Log bie Interlocks S Eurotherms Pending Eurotherm Commands o Eurotherms Pressure Analog Controls Name Temperature Working SP Setpoint Ramp Rate Power Power R R Mode LA Auto Scale l Clear History l H D ti GO G Cetin Gi Ire A oF MS 8 o 7 pr ii et 6 mm em mm o D mm 5 A E le ek ch 4 oe It E para a vz Z a Pressures gt Name Value Setpoint 1 Setpoint 2 A LEI M ye R A 0 i 1 1 1 i i Linear Log 16 00 00 PM 06 00 01 PM 06 00 02PM 06 00 03PM 06 00 04PM 06 00 05 PM 06 00 06 PM 06 00 07 PM 06 00 08 PM 8 0 Y 5 0 Digital Controls Name Value Setpoint A 0 0 0 a 5 00E 0 Auto Scale l Clear History l L 7 00E 0 e Analog Controls i 7 6 00E 0 Name value Setpoint A MFC 0 117 sccm 0 100 3 5 00E 0 ge 4 00E 0 he Y 3 00E 0 t Devices WO gt SCH Cem TS 2 00 0 A 1 00E 0 d a 9 i 54 KL 2 0 00E 0 i i i n n r n Linear Log _ eeneg ES 06 00 00 PM 06 00 01 DM 06 00 02 PM 06 00 03PM 06 00 04PM 06 00 05PM 06 00 06PM 06 00 07 PM 06 00 08 PM 8 0 d Stage Spinner 5 0 0 0 Device Control Recipe Control Pressure Analog Controls Device Drivers 51 52 53 ai ei ei ST saj so sioj siz TGsder5 testi cFP Idle Trend charts Chamber Edt chamber neve enabled Current Date Mon Feb 27 2012 4
8. SAAT SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 40 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION a A Settings You have the ability to tell the software the interval between consecutive logs and the maximum size of the log file Once the size of the current log file is greater than the max size a new log file is automatically created The log file settings are found by navigating to Log File gt Settings Figure 57 Device Drivers Robo allows you to add new device drivers to the software These new device drivers are written in LabVIEW graphical programming language and can be created and added by the end user This allows Robo to be ever expanding and very flexible to fit your needs SVT Associates Device Drivers SVT Associates has numerous Device Drivers that can be added to the system allowing for better control safety and over all greater functionality Below is a small list of current device drivers e Stage Spinner e Cygnus Rate Controller e Throttle Valve e Substrate Cassette Elevator e Annealing Stage e Substrate Cooling System e Re circulating Water System e Current Size Indicates the size in Kb of the currently generated Log File e Max Size This control sets the maximum size in Kb of the current Log File If the Current Size exceeds the Max Size a new Log File is created e Idle Log Start Input for generat
9. age am rer ee Se 39 Figure 25 Navigate to Multiple SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 20 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Decke mr Freck Eurotherm Cumbre 0 ka Tesco ature Wett P Setport Ramp Rate Power Power RS Ka e Ki st Ire y Jeane aay gt dica ora d A A A Name ES Setzer Deg A OFF CTE Mo inguk Specttiad D D LEDS O AM IUES AM 10 20 19 AN 160016 401 EE e 52 RE ss Le E EE aerea ser Admin Ide o a Wp Sci Wio On Bae BOE Figure 26 Open Multiple Shutters Select the shutter s to open by clicking the associated indicator After the desired shutters are selected click Open the shutters will now open at the same time File Chamber View Log Pie Interlocks Gate Valves Eurotherms b i Gate Valves are the barriers that separate different D Shutters A A z IN prking SP i R R P P BR parts of the physical vacuum system Most systems will gg _ Pressures etpoiot Ramp Bate TN eem have Gate Valves between the growth chamber and PR load lock chamber between various pumps and se
10. Chamber check box Figure 52 Saving the Chamber View To save the current layout navigate to Chamber View gt Save layout click Save Layout Robo will save the locations of the indicators and will load their positions at startup Figure 53 Controlling the System via Chamber View Charts Chamber iv lEdi crac Figure 52 Chamber Recipes gt Device Control Figure 53 Robo allows you to take control of the system in Chamber View In Chamber View you can e Open Close Shutters by holding the lt Shift gt key and Right Clicking e Open Close Gate Valves by holding the lt Shift gt key and Right Clicking e Change Eurotherm Temperature Ramp Rate e Control Device Drivers Control Digital Controls e Control Analog Controls 7620 Executive Drive Eden Prairie MN 55344 3677 USA ROBO Control Manual 4 13 SAAT SVT Associates Inc SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved Page 37 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS Chamber Recipes Robo allows you to implement one click recipe load and execution from Chamber View To add a Chamber Recipe navigate to Chamber View gt Chamber Recipes gt Edit Chamber Recipes Figure 54 Reto SVT Associates RoboMBE File Setup KaM EA Log File Interlocks Load bmp Run Save Layout i
11. Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 i E ke 56 966400000C 0 0000000000 Throttle Valve Control Pressur 23 9 Tip 6 0 A Throttle Valve Pressure FS 123 7 C Base 19 O0000000C L n Dm 24 4 C Base Current Date Thu Jul 21 2011 6 20 03 PM SAAT SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 36 of 44 Engines for Thin Film Innovation Oz 0 00LLLL Loading bmp PROPRIETARY INFORMATION At any point during the operation of Robo you can load a custom bmp file of the system To load a custom bmp file navigate to Chamber View gt Load bmp A dialog box will appear prompting you to load the bmp This custom bmp can be 850 x 690 pixels The images can be larger than 850 x 690 pixels however Chamber View will only display 850 x 690 pixels Moving Device Indicators To move the device indicators click and hold on the indicator you want to move then drag the indicator to the desired final location and release the mouse The indicator will move to that location Some of the indicators available on the Chamber View are Eurotherms Pressure Gauges Gate Valves Valves Sources Stage Spinner and many more After you have loaded the custom bmp you can move the device indicators around by selecting the Edit
12. This permission should only be granted to the administrator or other highly trusted users e Add Edit Motion Reserved for future use e Control Motion Reserved for future use e Edit Device Drivers When checked allows you to edit driver parameters by making tabs appear at the bottom of each driver e Valid Until Sets the date at which the user profile is no longer valid SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 7 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION User Timeout Auto Log Out Robo has a built in feature that will automatically log out if the software is inactive for a specified length of time This ensures that even if you forget to log out the software will not allow an unauthorized user to run it and cause harm to your system When the specified inactivity time has been reached you will be logged out and a user will be automatically logged in with no permissions You will need to log off and then log back in with your unique user name and password by going to File Menu gt Log Off Log OFF Create New User Edit Users EXE tx Navigation of the Robo Software Before you begin using the Robo software you need to ga
13. 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 30 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION A Save Load Recipe These two buttons are what allows you to save and load a recipe script Recipe Time Steps This section tells you how long a script will take time remaining steps and steps remaining Recipe Script This is where you create edit monitor the recipe script Each Script is made up of multiple steps These steps are added edited deleted in this section Adding Steps to a Script Choose step to add To add a step to a recipe script navigate to the Recipe Script ma section of the Recipe Tab DOUBLE CLICK the first empty cell in the recipe script doing this will bring up the Choose step to add box See Figure 43 You then have two ways to s enter the command One way is to use the up down arrows dat Shutter Status and choose a step to add After you have chosen the appropriate step click Continue The second way is to click on the Name Field to expand the list of steps select the step you want to add and the recipe popup menu will appear Figure 44 Figure 43 Choose Step to Add Choose step to add A eaa a You can choose to Add Step After or Add Step Ip Chamber View Log File Interlocks Before
14. Edit Analog Controls as shown in Figure 32 The Edit Analog Controls dialog box will appear as shown in Figure 33 allowing you to edit the analog devices Edit Analog Controls e Name Name of the Device E mmm e Analog Input Variable The physical location of the Analog ni var psp 192 168 1 17 FP 4A10 04 e Analog Output Variable The physical location of the Analog voltage out e Input Voltage Range The voltage range e Value Range The Value range of the device s Output Voltage Range The value range of the device output e Position Positions the Analog Control in Chamber View You can also move Analog Controls by left clicking and dragging the Analog Control to be relocated Edit Chamber must be enabled for this function to work e Plot Color Sets the plot color for the control e Units The units of measurements the device can accept i e Figure 33 SCCM kPa e Display on Chamber When checked the software displays the device in Chamber View e Save Saves and closes the window Note The horizontal scroll is used to navigate to all of the available analog controls for editing Enter the desired analog controls programming parameters and click the Save button to close the window SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012
15. must be returned in the condition originally received by the CUSTOMER and free from damage use or modification which would render the product unusable for resale by SVT Associates VI All applicable taxes duties insurance and shipping charges shall be the sole responsibility of the CUSTOMER Goods being returned for other than warranty repair shall be subject to a restocking charge of twenty 20 percent of the original sales price of the returned item SVT Associates Inc VIL 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 43 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Returning Equipment for Repair or Servicing Before shipping equipment for repair or servicing obtain a Return Authorization Number assigned by SVT Associates Liability Disclaimer SVT Associates Inc takes steps to assure that its published specifications and manuals are correct however errors do occur SVT Associates Inc reserves the right to correct any such errors and disclaims liability resulting therefrom No Liability for Consequential Damage In no event shall SVT Associates Inc or anyone else involved in the creation production or delivery of the accompanying product including hardware and s
16. reach the given Setpoint If you want the temperature to slowly reach the Setpoint enter in a small ramp rate say 1 degrees per minute Now the Eurotherm will ramp to the Working Setpoint at 1 deg per minute e Power This tells the Eurotherm what percent of full power you want The Eurotherm MUST BE IN MANUAL MODE e Power RR Similar to the Ramp Rate except the Eurotherm is now limiting the Power Ramp Rate and units are in percent sec e Mode You can change the mode of the Eurotherm to either Manual enter in the letter M mode or Auto Enter in the Letter A mode In Auto mode you can change the Setpoint While in Manual Mode you can change Power This is case sensitive You set this value Note When the cells are YELLOW this means that you are able to actively change the values SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 12 of 44 Engines for Thin Film Innovation _ A Edit Eurotherm PID Values Robo allows you to change the PID settings of the Eurotherm within the software From the Eurotherm table click on the name of the Eurotherm you want to change right click on that Eurotherm Once you right click on the Eurotherm Name a Menu will appear as shown in Figure
17. 00 Oat Aen Space bar toggles color selection 0 4 0 2 0 0 Figure 20 Plot Legend SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 18 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Shutters Shutters allow or block the flux of the sources from reaching the stage For accurate precise and repeatable growth you have the ability to control the shutters via Robo manually and in Recipe See Recipes Editing Shutters Before controlling the shutters the properties must be set To set the shutter properties navigate to Setup gt Shutters gt Edit Shutters shown in Figure 21 The edit shutter dialog box Figure 22 will appear After the shutter properties have been set you will have the ability to change the properties 2 Edit Shutters Name 512 Abbreviation E 12 Display on Chamber v On Color S Off Color Figure 22 Edit Shutters 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 gt SVT Associates SmartMBE File RENA Chamber view Log File Interlocks LE d Eurotherms gt i 3 gt el shutters Esser Pres
18. 07 14 PM User admin Ide ERRORONTESti Dewce Tntetlocks 0k Loggng Feb 27 2012 16 hrs 04 mb Size 17 Engines for Thin Film Innovation 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 PROPRIETARY INFORMATION Terms and Conditions SVT Associates Inc SVTA hereby grants to you a license to use Robo Software subject to the terms that follow Your purchase possession and or use of Robo Software will constitute your acceptance of such terms The Robo Software compilation is the property of SVTA unless otherwise indicated and is protected by copyright law to SVTA and or other embedded copyright owner s You are hereby granted a single user license for your exclusive use of Robo Software You may not reproduce sell distribute publish circulate or commercially exploit the Software or any portion thereof without the written consent of SVTA and the specific copyright owner s of any embedded component software included In the event that Robo Software and or embedded components include specific license requirements or end user agreements statements of condition disclaimers limitations or warranties End User License those End User Licenses supersede the terms and conditions herein as to the particular Software component Your purchase possession or use of Robo Software will constitute your acceptance or
19. 10 Choose Set EUROTHERM NAME PID Values Edit PID Propotional A O Integral Timefseconds Ho Derivative Timefseconds Figure 11 Edit PID Creating Eurotherm Programs Robo allows you to create Eurotherm Programs to control ramp sequences To create programs for a Eurotherm click on the Eurotherm name you want to create a program for right click on Program and select the action you want to do from the available options The Eurotherm Program Menu will appear as shown in Figure 12 To edit create a Eurotherm program Choose Create The Create Program for window will appear as shown in Figure13 7620 Executive Drive Eden Prairie MN 55344 3677 USA ROBO Control Manual 4 13 PROPRIETARY INFORMATION Eurotherms Temp C Working SP Setpoint Ramp Rate Power Power RR Mode Al Ge Set Gallium s PID Values 100 00 1 00 A kl 100 00 1 00 0 0 00 1 00 A 1050 00 100 00 1 00 A 100 00 1 00 A Indium 1150 00 100 00 1 00 Pa Copper 1200 00 100 00 1 00 A 100 00 1 00 A Y Figure 10 Eurotherm Right Click Menu In Figure 10 for example the user was changing Gallium s PID values as seen by the popup menu Once Set EUROTHERM NAME PID Values is chosen the Edit Eurotherm PID Values dialog box will appear Figure 11 and then you can enter the desired values Caution The PID Valu
20. 4 Engines for Thin Film Innovation PROPRIETARY INFORMATION e Device The device type you want to create an interlock on 0 E TT Eurotherm Pressure Analog Controls Device Drivers e ri Eurotherm Device Name Device 1 wel e Device Name The name of the device to put an interlock on Case Greater than e Case Greater than or less than Na J D D Tee S Eer e Value The value to trigger the interlock on Recipe Control Option e Recipe Control When checked if the interlock fails the specified Recipe Control v recipe will be loaded and run Soft Fault e S Soft Fault When checked if the interlock fails the current recipe Recipe Path will be paused and a dialog box will appear asking user to resume Gei recipe or abort Recipe Control must be checked for this to be enabled Upon interlock Failure if Recipe Control is Saint Yate aad Ipod otek Racker e Priority You can set the priority of the Interlock with 0 as Wil be PAUSED and a popup wil appear highest priority ee in Oe e Recipe Path Location of recipes that will run upon triggering an interlock e OK Displays status of the device e Error No Error Displays error status of the interlock e Sound Lit color will sound an alarm e Digital Output Variable The output path for the given Interlock is selected here e Position Positions the Interlock in Chamber View You can also move Interlocks by left clicking and dragging the Interlock to be relo
21. 4 13 Page 14 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Edit Program Parameters You can edit the program parameters such as ramp rate units for each of the programs To edit program parameters follow the instructions on how to Create a Program but instead of clicking Program number Create choose Edit Prog Param refer to Figure 12 The x Edit Program Parameters window will appear as shown in Program Cycles Jo Figure 14 i Holdback Yalue 0 000 e Program Number The program number being edited Usually one Ramp Time Units aer e Program Cycles Defines the amount of repetitions of the program Dwell Time Units ES e Holdback Value The range of holdback e Ramp Time Units Defines the ramp units sec min hour e Dwell Time Units Defines the dwell wait units sec min hour Figure 14 Edit Program Parameters e Edit Edits program and closes window Enter the desired programming parameters click Edit to send the program to the Eurotherm Controlling Eurotherm Programs Eurotherms Pending Eurotherm Commands 0 Run created Eurotherm programs by following the steps to EE EE a access the Eurotherm Program Menu Program function refer EEN E Prog param 3 to Figure 12 Select Start to run the program It must be noted L ang that the Ramp Rate and Power Ramp Rate will be set to Zero en SS After Start is clicked
22. Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 16 of 44 Trend Chart Figure 18 shows the Eurotherm Trend Chart There is an Auto Scale and Clear History button at the top right corner In Auto Scale the trend chart will be automatically scaled in both X and Y directions regardless of the location of the yellow and red warp markers located just below the trend chart Pressing the Auto Scale button will allow you to switch to Tools mode Figure 15 which allows you to zoom in on the trend chart with the warp markers In Tools mode you can also make use of additional navigation tools that are located right below the list of Eurotherms These allow you to zoom in on the trend chart as well as the option to click and drag the plot You also have the option of viewing the plots on either a Linear or a Log scale The Clear History button will clear all data on the trend chart To display or hide the plot of any given Eurotherm click the check box next to the Eurotherm name Eurotherms Pressure i 12 00 00 PM OL 00 00 PM 02 00 00PM 3 03 00 00 PM 04 00 00 PM 05 00 00 PM bitte 1000 04 500 01 0 04 emm Warp Markers Additional ek Ve Analog Controls TOOLS Cle lv MFC ap Analog Controls Auto Scale de Jager Clear History J Al Bub E IV LA Tip fi IV Ga
23. Associates manufacturing facility This warranty is subject to SVT Associates equipment being installed maintained and operated in accordance with the operating and maintenance instructions accompanying each item manufactured by SVT Associates Warranty shall be void if SVT Associates equipment is modified by the CUSTOMER or used in other than the recommended manner or applications Purchased equipment incorporated into any item supplied by SVT Associates will be covered by said manufacturer s warranty SVT Associates warrants that at the time of delivery any other products processed or manufactured and sold by it hereunder are free of defects in material and workmanship and conform to COMPANY specifications No warranty is provided by SVT Associates for products sold hereunder which are not manufactured or processed by SVT Associates but the manufacturer s warranty for such products if any shall be assigned to the CUSTOMER without recourse to SVT Associates The foregoing warranties are in lieu of and exclude all other warranties not expressly set forth herein whether expressed or implied by law or otherwise including without limitation any warranty of merchantability or fitness for a particular purpose In no event will SVT Associates be liable for any consequential damages IN THE EVENT OF SVT ASSOCIATES LIABLITY WHETHER BASED ON CONTRACT TORT INCLUDING BUT NOT LIMITED TO NEGLIGENCE AND STRICT LIABLITY OR OTHERWISE THE CUSTOMER S SOLE AND
24. Bul D v Ga Tip 1 Era g 5i HAN Linear Log 07 00 00 PM Engines for Thin Film Innovation PROPRIETARY INFORMATION ee LL Eurotherms Pressure Analog Controls Auto Scale Clear History 5 eo E Time Cursors i X l Y Jampitude if cr Lal Copy Data Description and Tip Visible Items F z Plot Legend Export Simplified Image y Scale Legend Graph Palette Clear Graph whe ih y Cursor Legend Y Create Annotation x Scrollbar J EG Linear Log _ 048120 36 00 948120 38 00 948120 40 00 948120 42 00 ae y Scale Jf AutoScale d Jf y Scale LAIT 0 2 J AutoScale Y g p Y Smooth Updates x y Autosize Plot Legend 0 2 E Optional Plane Figure 19 Eurotherm Trend Chart Change Plot Properties To change plot properties right click on the trend chart plot as shown in Figure 19 From View Items you have access to view several Legends The Plot Legend allows you to choose Color and other properties such as Line Style and Line Width Right click the Plot Legend as shown on Figure 20 to change plot properties Eurotherms Pressure l Common Plats gt L Y m So Time mg TT Line Style gt Bar Plots gt User FilBaseLine gt 0 0 0 0 0 0 ss Y Interpolation gt History System Point Style gt BBRSIRl 77711 MOMO 4 Scale MO ros 0 SAF Y Scale E 0481 z 36
25. ESUME the recipe check the Soft Fault option In order for Soft Fault to work Recipe Control must be ENABLED Chamber View PROPRIETARY INFORMATION Robo allows you to create a graphical representation of the system This Chamber View is a simplified picture of the system and gives you a general overview and status of the system SVT Associates Robo File Setup Chamber View r Log File Interlocks Temperature C I main GP356 5P2 Interlock L Main GP356 SP1 Interlock 24 4 23 8 23 7 24 0 22 3 MFC1 0 000 SCCM Setpoint 1 Setpoint 2 7 12E 8 torr 1 00E 0 1 00E 0 Main Chamber 6 38E 8 torr 1 00E 0 iM Pressure Digital Controls Value 1 00E 0 Setpoint Ind DP Gate Yalve Intlk Bypass DP GV Bypass Ind Main Chamber Rough Valve Intlk MC Rough Yent Bypass Ind RGA Valve Intlk Bypass RGA Intlk Bypass QCM 151 Q Open 151 OCH 152 Q Open 152 QCM 251 Name Q Open 251 Setpoint Transpector2 Transpector3 Transpector4 Transpectori 10 077 Name Transpector2 ip 71575 Chiller Temp ORPM Transpector3 Current Speed 56 9664 Degree Stage Spinner Throttle Valve 5 071 Transpector4 0 066 rage meet Ka i i Trend Charts Chamber E Idle 7620 Executive Drive
26. EXCLUSIVE REMEDY WILL BE LIMITED SVT ASSOCIATES HAS THE FOLLOWING OPTIONS TO REPAIR OR REPLACEMENT F O B SVT ASSOCIATES MANUFACTURING PLANT BY THE COMPANY OF ANY NON CONFORMING ITEM FOR WHICH CLAIM IS MADE BY THE CUSTOMER OR TO REPAYMENT OF THE PORTION OF THE PURCHASE PRICE PAID BY THE CUSTOMER ATTRIBUTABLE TO THE NON CONFORMING ITEM SVT ASSOCIATES WILL NOT BE LIABLE FOR ANY OTHER DAMAGES WHETHER DIRECT INCIDENTAL CONSEQUENTIAL OR OTHERWISE Return Policy Any request by the CUSTOMER for return of standard products other than for warranty claims under warranty hereof for all or any part of purchase order accepted by SVT Associates shall be subject to the following conditions The CUSTOMER must make notification to SVT Associates within thirty 30 days of original shipping date II A RETURN GOODS AUTHORIZATION number must be assigned to and accompany all goods or materials being returned by the CUSTOMER to SVT Associates SVT Associates must assign said number prior to any and all returns Goods not accompanied by a RETURN GOODS AUTHORIZATION number will be refused by SVT Associates and returned at the CUSTOMER S expense Il CUSTOMER shall prepay shipping charges for products being returned to SVT Associates IV Products being returned to SVT Associates should be properly crated for shipment and the CUSTOMER shall bear the risk of loss until delivered to SVT Associates V Products being returned to SVT Associates
27. Pressure Gauge falls below the target value Open Gate Valve Opens the specified Gate Valve Close Gate Valve Closes the specified Gate Valve Set Digital Control Output Sets the specified digital control output to the target state Set Analog Control Output Set the specified analog control output to the target voltage Prompt User Displays a message to you in a popup prompt The recipe will pause until you acknowledge the message Control Device Driver Sends the specified Remote Command RC to the specified Device Driver Wait for Digital Control Pauses the Recipe until the Digital Device is at the target state Wait for Analog Control Pauses the Recipe until the Analog Control is less than greater than the target value Wait for Device Driver Pauses the Recipe until the specified Device Driver Value is greater than less than equal to the target value Wait for Clock Starts the Recipe after the specified time SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 29 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION e gt TT Robo allows for one level of nested loops Below is a quick example of nesting loops Begin Loop for 3 iterations Begi
28. RE 10 Controlling A 12 Edit Eurotherm TRA 13 Creating Eurotheim PrograiiS sesionar 13 Edit Program ee ug 15 Controlling Eurotherm PROGINS escena ii 15 Eurotherm C ET e BEE 16 A eneen bereet 17 Change POCO CIS EE 18 EE eege EE deeg 19 Selfie Eat 19 Ao a a a aaa a TEE Eaa ea E a Aa A a aa Rae Taaa E ieai 20 Simultaneously Open Multiple Shutters o cooccccccocncocccoccocnconncococonononnonnnnnncnnonnnnnconononnnnonnnnnnnononannnnnnoninannnns 20 EE 21 Fauno EI 21 Controlling Gate ValWVeS cuco iii 22 EE pocas o ic ida tias 22 Fat SS GAMES E 22 le inf te et Pre E 23 ARNOT A EE A EE E E E EE E EAE AEE 23 Editing Analog CONTO EE 24 Controlling Analog N RTE 25 Beji Eee aige E 25 Eating Ble A on 25 Controlling and Monitoring Digital Control Devices cooocccocccccncccnncocnconnnnnnononnnnnnnoncnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnos 27 Monitoring Device Drivers 21 Seet 29 o e A 30 PANG Steps t0 a e E 31 Editing Deleting a Script Gren 32 Running RECIPES ne 32 PROPRIETARY INFORMATION SS AA SAAT SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 3 of 44 Engines for Thin Film Innovation 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 MOCT EE ER Reen leie ER Creating Device at Nee ER Interlock Device Names EE 33 cs e eo
29. Robo for monitoring and controlling Add On instruments For example Stage Spinner is an Add On Instrument option to the Robo Software This particular device driver rotates and positions a stage with motor control To Setup and or Edit Device Drivers navigate to Setup Device Driver gt Edit Device Driver Figure 38 The Edit Device Driver dialog box will appear as shown in Figure 39 SAAT SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 27 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION e Driver Name This is the top folder name of the instrument To view the folder name browse to c Program Files SVT A pr ver 1 Associates Robo Control Drivers In here you can view the names 4 of instruments already loaded or the location where drivers can IR be loaded I Cti lt i e Control Name in Driver This is the information from the Device Precision lt 3 bicia visible Driver you want Robo to log and monitor e doe 0 e Label This is the name the Robo Interface will represent the Warning Color BM Warning Low 0 Control in the Driver Alarm Color F o Alarm Low lo Stage Spinner Position 290 34 Deg Current Position 0 Annealing Temperature Ee Main er Figure 40 Figure 39 e Units This text field allows you to add notation to the value coming in e Precision Sets the value of precision past the decima
30. SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 24 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS EE Controlling Analog Devices After you setup the analog devices you can now begin to control them Navigate to the Analog Control Table Figure 34 This table contains 3 columns Name Value and Setpoint You are able to change the analog voltage output by editing the SetPoint value The Value cell automatically changes the voltage to the wanted value based on the Voltage Range and Value Range Analog Controls Nam ale Sep MFC 1 805 57 Pa 850 00 MFC 2 352 09 SCCM Error writing voltage Figure 34 Analog Control Table The image shown is representing MFC s this Device control can be used for a wide variety of instruments that utilize Analog Monitoring and Control Example use of an Analog Device You have a Mass Flow Control that has an input voltage range of 0 to 5 volts and outputs a Flow range of O to 100 SCCM Say the flow meter is reading 50 SCCM and thus sends an output voltage of 2 5V to the analog channel The Analog Device Table will display 50 not 2 5 Say you want the mass flow control to maintain 100 SCCM To do this enter 100 in the Setpoint cell The software will automatically change the 100 SCCM to 5V and then send it to the mass flow control Digital Controls too SVT Associates Robo Robo has the capability to monitor and control devices
31. SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 39 of 44 Engines for Thin Film Innovation Customization of the Device Control Tab Robo allows you the ability to customize the layout of the Device Control Tab to fit your needs The Device Control Tab can be found on the left side of the Robo software and is where the majority of device control and data display occurs The Device Control tab contains six major tables Eurotherm Pressure Power Supply Analog Controls Digital Controls and Devices Setting the Visibility of Tables If your Robo configuration doesn t include Pressure communication or Analog Control capability you might want to hide the associated tables To do this navigate to File gt Set Table Visibility Figure 56 The Set Table Visibility dialog box will appear Now you can set the visibility of all the tables To make a table visible check the box otherwise they will be hidden Log File The log file saves the systems vital information into a tab delimited text file This file is automatically created whenever the Robo software is running Figure 57 The location of this created file is C Robo Log Files The naming of the log file is as follows MONTH DAY YEAR HOUR hrs MINUTE min Say you start the Robo software on June 11 2009 at 1 20PM the autom
32. al Interlocks window will appear Figure 49 File Setup Chamber View Log File Interincks D Help Device Interlocks Cor Ter ruben Sms E i EN INoA A lt _ Digital Interlocks e a Name Temp C Working SP pome nemp reneyy ewer Power RR Mode A Era Ger te HE am y aa 0 0 0 00 0 0 0 00 33 C S qa 32 C A an 31 C 00 8 AS A 30 C 0 0 A 297C 0 0 A 28 C 0 0 iA g 27 C A 2 26 C ressures _ E bits ee Name Value Setpoint 1 Setpoint 2 24 C 0 00 0 00 0 00 0 00 e 0 00 om ek 0 00 0 00 e ZE d AG 1 1 I 1 1 i 1 1 Ke Controls Get b 5 14 33 PM 5 15 00 PM 5 15 20PM 5 15 40PM 5 16 00PM 5 16 20PM 5 16 40PM 5 17 00PM 5417 20 PM Name Value Setpoint MFC 1 0 00 SCCM s fma Ha Du Bro BY Plot 4 Bou Bur Bn y aa Te ni 55 Devices Name Value Shutters Gate Valves Valved Source Stage Spin Stage Z 0 i r y m 7 e e 5 14 30 PM 5 15 00 PM 5 15 20PM 5 1540PM 5 16 00PM 5 16 20PM 5 16 40PM 5 17 00PM 5 17 20 PM 5 17 46 PM Introd Tuto GMa LL GV cl Speed j1 ei O S Pressure QCM AccuFlux AccuTemp Analog Controls LL turbo Speed 1 Locationfos J fuser RoboAdmin Idle 7620 Executive Drive Eden Prairie MN 55344 3677 USA Figure 48 Navigating to Edit Digital Interlocks SAAT SVT Associate
33. at is called in Chamber Recipes Alternatively you can save as a new name and call the new recipe for the Chamber Recipe being created SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 38 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION s Name Name of the Recipe this name will appear on the button e Recipe Path The path of the recipe to be loaded and ran e Visible When checked this button will be visible in Chamber view C UsersiMichael Wenger d e Button Size Size of the button that appears in Documents Hello rcpx Chamber View in pixels e Position Positions the Chamber Recipe in Chamber View You can also move Chamber Recipes by left clicking and dragging the Chamber Recipe to be relocated Edit Chamber must be enabled for this function to work s Remote Start Variable The digital input line that will load and run a recipe An external source would be used to set the Digital Input bit high however this will only be excepted if the system is equipped with Digital Input control to start and stop recipes e Save Edits the Recipe and closes the window Figure 55 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA
34. atic log file will be named June 11 2009 13 hrs 20 min Items that are logged Eurotherm Temperature Pressure Gauge Readings Analog Values Logged in User Log file creates new entry when ever a new user logs in Interlock Failure Log file creates new entry whenever an interlock failure occurs Recipe Start and End Any opening of the edit windows 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 Current Path PROPRIETARY INFORMATION File Setup Chamber View LogFile Interlocks Set Table Visibilit Shutters Gate Valves Valved Source StageSpin StageZ intro ad Turbo Ll pe spim A foo LL turbo Set Home _GotoHome J Figure 56 Set Table Visibility Log File Settings Max Size 45000 0 kb ET Log Speed y 2 Samples Sec Pressure Log Speed 3 Ji Samples Sec Analog Log Speed Current Size 11 3 kb Tdle Log Start FieldPoint FP Target cFP DI 304 1 H 3600 00 sec Idle Log Speed Operating Log Start E FieldPoint FP Target cFP DI 304 1 e SI 1 Samples Sec A 2 00 sec Operating Log Speed Shutter Log Spee Log File Location J3 Samples Sec 4 E Robo Log Files la a Log Speed 3 1 Samples Sec RAE SS AC EAIN Peta EE E Robo Log Files Jul 21 2011 13 hrs 04 min Device Log Speed J Ji Samples Sec Figure 57 Log File Settings
35. capabilities described in Edit Shutters on vJEdit Analog Controls Page 18 Control Analog Controls v Edit Digital Controls vw Control Digital Controls Biere e Edit Pressure Allows you to edit the properties of the pressure Disabling this viueadifun Redees feature removes capabilities described in Edit Pressure Gauges on Page 21 Vv Create Edit Recipes vicreate New Users e Edit Gate Valves Allows you to edit Gate Valves add Edit Motion a 4 Control Motion edit Device Drivers e Edit Analog Controls Allows you to edit the analog devices e Control Shutters Allows you to open and close shutters Disabling this feature removes capabilities described in Control Shutters on Page 19 Control Gate Valves Allows you to open and close Gate Valves Valid Until e Control Analog Controls Allows you to send different voltages to the porem BS devices 12 31 2015 os 1 e Edit Digital Controls Allows you to edit the Digital Controls e Control Digital Controls Allows you to send 24V logic to the digital devices Figure 4 e Edit Interlocks Allows you to edit digital and device interlocks e Load Run Recipes Allows you to load and run previously created recipes e Create Edit Recipes Allows you to create new recipes and edit recipes This is an advanced function and should be done only by trained users e Create New Users This will allow you to create new users
36. cated Edit Chamber must be enabled for this function to work e Save Saves and closes the window Figure 47 Edit Interlocks Allowed devices for interlocks e Eurotherms Uses thermocouple temperatures as interlock values e Pressures Uses pressure readings as interlock values e Analog Devices Uses any analog Input as interlock values e Device Drivers Uses ANY value in drivers created in LabVIEW as interlock values Interlock Device Names In order to create valid interlocks you must enter a correct name for an associated Device If you want to create an interlock on the Pressures or Eurotherms in the Device Name field enter the appropriate name of the device Digital Interlocks Robo allows the implementation of Digital Interlocks Digital Interlocks work on 12 24V logic You can add these digital interlocks to devices that have a sourcing output of 12 24V such as a flow meter or pressure gauges SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 33 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS EE Creating Digital Interlocks To create edit Digital Interlocks navigate to Interlocks gt Digital Interlocks as shown in Figure 48 The Edit Digit
37. ciates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 Page 11 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION A No Power e Value Value is zero when the temperature value falls below the specified value e Color Color of the text background in the Eurotherm Setup when power is not available Running Range e Value Deviation from expected value that indicates temperature is not ramping as expected e Color Text background color in the Eurotherm Setup when ramp rate is within normal range Warning Range e Value Deviation from expected value that indicates temperature is in warning range e Color Text background color in the Eurotherm Setup when ramp rate is in warning range Alarm Range e Value Deviation from expected value that indicates temperature is in alarm range e Color Text background color in the Eurotherm Setup when ramp rate is in alarm range Controlling Eurotherms The Robo software allows you to control the Eurotherms All control of the Eurotherms takes place on the Eurotherm Table found in the Device Recipe Control Section of the Main Screen The Eurotherm table consists of eight columns as shown in Figure 9
38. ctions of the system and other locations Robo allows you to control theses gate valves Analog Control Pressures Name Value Setpoint 1 Setpoint 2 a 0 00 0 00 0 00 om D 0 00 10 00 Xx LL nan LANA Editing Gate Valves Before controlling the Gate Valves you must first edit them to make sure all appropriate parameters are set To edit the parameters of the Gate Valves navigate to Setup gt Edit Gate Valves shown in Figure 27 The Edit Gate Valves dialog box will appear as shown in Figure Figure 27 Navigate to Edit Gate Valves 28 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 21 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Edit Gate Valves s Name Name of the Gate Valve e Display on Chamber When checked the Gate Name test Valve displays in Chamber View Display on Chamber v e Size Pixels Set the size of the Gate Valve that Size Pixels Position displays in Chamber View On Color ZE e Position Positions the Gate Valve in Chamber View You can also move Gate Valves by left clicking and dragging the Gate Valve to be relocated Edit Chamber must be enabled for this function to work Off Color 2 e On Off Colo
39. e To edit a user navigate to File gt Edit Users The Edit User window will appear Figure 4 SAAT SVT Associates Inc SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 6 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Edit User Permissions User Names ad H In order to ensure that each user has access to the appropriate functions the following permissions have been implemented User Name bat e s Edit Chamber View Allows you to move indications and load a bmp file for a Password visual view of the system e Edit Eurotherms Allows you to edit the properties of the Eurotherms Password check Disabling this feature removes access to the Edit Eurotherms screen ie described on Page 10 in the Edit Eurotherms section a ae e Control Eurotherms Allows you to have complete control of the Eurotherms Ree Entes in the software change Setpoints Ramp Rates Modes Power Output and Y contral Eurotharnis more Disabling this feature removes capabilities described in Eurotherms on v Edit Shutters Page 12 Se e Edit Shutters Allows you to edit shutter properties such as the name and Eat Gate Valves physical line output Once the System is setup no one should have to edit this Control Gate valves Disabling this feature removes
40. e green If one of the Interlocks is not satisfied the text box flashes Red and displays the name of the interlock that has failed Device Interlock Status Same functionality as Digital Interlock Status except it displays the status of the Device Interlocks Log File Status Displays the current log file name and size File Chamber View Log File Interlocks Eurotherms ETA Eurotherms are one of the main components in the A EE Eege evaporative system The Eurotherms monitor the CN EEC A 2319 06 30 53 Stage Stage 2 Indium Selenium temperatures of the cells nozzle annealing stage substrate and LN baffle Along with reading the temperatures they also control the power supplies that feed power to the various heaters 24 61 900 00 32 53 900 00 32 64 5 00 900 00 24 68 5 00 Pressures Setpoint 1 Setpoint 2 Growth 1 0 00 Fo 00 0 00 0 00 0 00 Load Lock 0 00 0 00 Growth B 0 00 0 00 Edit Eurotherms Before controlling each Eurotherm you must edit them so they work correctly and display the correct properties To edit the Eurotherms navigate to Setup gt Eurotherms gt Edit Eurotherms as shown in Figure 7 Navigation to Edit Eurotherms Figure 7 The Edit Eurotherms dialog box Figure 8 will appear allowing you to edit Eurotherm information
41. es are not read back into Robo To view current Eurotherm PID Values you must navigate to the Eurotherm Table found in the Device Recipe Control Section of the Main Screen Eurotherms Pending Eurotherm Commands O Set Copper s PID Values Create Figure 12 Eurotherm Program Menu SAAT SVT Associates Inc SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved Page 13 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION e Selected Program Number The program you want to edit usually 1 e Selected Segment Number The segment within the program you are editing s Target Setpoint Wanted temperature e Ramp Rate Rate at which to ramp the temperature Units are defined later e Segment Type Pull down menu of option types e Holdback Type Typically None s End Segment Type Typically Reset e Create Creates program and closes window Enter the desired programming parameters click Create to send the program to the Eurotherm Figure 13 Create Eurotherm Program SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual
42. etwork sources are configured this would apply to all configurations i e Main and Load Lock computers Certain installation requirements may be accompanied by multiple disc sets or a separate set of installation instructions Welcome to Robo 7 FR r Users S Robo gives the administrator the ability to control access to vital functions of the software such as system setup and permission control for users ASSOCIATES K SSEN been When Robo is opened the Welcome to Robo Control dialog box Figure 1 will Welcome to Robo Control appear prompting you to Log in The Log in Screen contains two fields Users Name and Password Users Name The Users Name field is a pull down menu and contains all the users that have been created In order to be able to log in the correct combination of user name and password must be entered Creating New Users To create new users go to the Menu bar while running the Robo software and click on File gt Create New Users as shown in Figure 2 SVT Associates Ro The Create New User dialog box shown in Figure 3 will appear File Setup Chamber View Set Table Visibility Log Off Create New User Edit Users SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Contro
43. i eS Load Recipe f Chamber Recipes kl Edit Chamber Recipes pe Chart History Window al El Total Beck v dp Steps Remaining 00 03 00 00 las _ Timetefe In st Ga cu al as nar se ni we 4 Description Temperature 65C ia 1 1 1 1 1 i 1 H j 9 56 42 AM 10 00 00 AM 10 03 00 4M 10 06 00 AM 10 09 00 AM 10 12 00 AM 10 15 00 AM 10 15 00 AM 10 22 20 AM mci MB wec2 Bu ON rts ui Bros BB et MB ttl 50 45 40 35 D 1 1 RER 9 56 39 4M 10 00 00 AM 10 03 00 4 10 06 00 AM 10 09 00 AM 10 12 00 Af 10 15 00 Af 10 18 00 AM 10 22 20 Ab Devices Recipe DEE I CE intros Turba GW oo LLG tubo User Admin Pressure Analog Controls Device Drivers Figure 54 Chamber Recipes The Edit Chamber Recipes box will appear Figure 55 After you have finished editing the Chamber Recipes it is now possible to have one click control of those recipes To run the recipes go to Chamber View and the configured Chamber Recipes will appear as buttons To start the recipes hold SHIFT and right click the wanted recipe once done a prompt will appear confirming your action In order to edit the Recipes setup for Chamber Recipes you will need to Load Recipe from the Recipe tab Make your changes then Save Recipe when saving make sure you save as the same name th
44. ialogue window as shown in Figure 47 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 Editing Deleting a Script Step To edit a step DOUBLE CLICK the step you want to edit To delete a step single left click the step to be deleted then right click the step to bring up the popup menu then choose Delete Step Running Recipes To run a recipe click the Run button found on the recipe control sub section of the recipe tab This will cause the current recipe script to be started The Recipe Script will highlight green to indicate which step it is currently executing At any point you can pause or stop the recipe by clicking the respective buttons File Setup Chamber View Log File NETA Ze U Seschoet Digital Interlocks Name Temp CH Working SP camera er Power RR Mode e 0 00 0 00 0 00 0 00 3 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 7 00 1 D Y Ag Figure 46 Navigate to Create Device Interlock gt 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 gt gt gt j d Pl O Le O lt d Ole Ol O i oo co od 700 0 00 0 00 SAAT SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 32 of 4
45. ic will be sent to the device e Description when Low The text you want to have display on the Digital Device Table when the inputted value is low 0 Vdc e Description when High The text you want to have display on the Digital Device Table when the inputted value is high 24 Vdc e Button Height The vertical size of the button in pixels e Button Width The horizontal size of the button in pixels e Off Color The color of the button when in the OFF position e On Color The color of the button when in the ON position e Visible on Chamber When checked allows the Figure 36 Edit Digital Devices button to be seen on the Chamber graphical view e Save Saves and closes the window e Position Positions the Digital Control in Chamber View You can also move Digital Controls by left clicking and dragging the Digital Control to be relocated Edit Chamber must be enabled for this function to work Note The horizontal scroll is used to navigate to all of the available digital controls for editing Enter the desired digital controls programming parameters click Save to close the SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 26 of 44 Engines for Thin Film Inno
46. in familiarity with the terminology and layout of the User Interface UI Main Screen Layout The Robo software implements various tabs and sections to help the flow of the UI The Ul contains two main sections and two minor sections The two main sections are 1 Device Recipe Control 2 Charting Chamber View The two minor sections are 1 Shutter Gate Valve cFP Status section 2 User Status Interlocks Logging section as shown in Figure 5 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 8 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION Charting Chamber View 04 61009 20 E oo Ah e Se y r i MORPH GAR PM GROG RM mut PY DIE D n DIO nm CDEN tom ng Aral Contras Tica Drivers 5 D 3 SEBEEEEEEESE inr Les Kreg Date Mion Pei 27 2017 Figure 5 Robo Main Screen Layout Device Recipe Control Section You can control and monitor most devices such as Eurotherms Pressure Gauges and Mass Flow Controls in this section Adding Removing rows in the Device Section To add a row to the device table hold the lt CTRL gt key and left click where you want the row to be added To remove a row from the device table hold
47. in the Main vi that you want Robo to monitor and place in the Device table This file is a single line with entries that are tab separated Note There cannot be more than one 1 vi and one txt file in this folder All drivers must be created in LabVIEW 8 6 or earlier Transfering Values from Robo into LabVIEW created Software Robo allows you to create your own software in LabVIEW to read all values being generated by Robo Some values that can be read are Eurotherm Temperatures Pressure Readings Shutter Positions Mass Flow Readings Gate Valve Locations Interlock Errors Recipe Run Status o Time Step Remaining A simple vi can be created to allow you to read the values and do real time analysis and many other applications If you would like to learn how to do this please contact SVT Associates SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 42 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS Warranty and Limitations of Remedies SVT Associates warrants that all equipment manufactured by it shall be free from defects in materials and workmanship under normal use and service for a period of twelve 12 months from the date of shipment from SVT
48. ing Idle Log Start data e Idle Log Speed The duration of time between generated values for all logged variables in Idle Log Start e Operating Log Start Input for generating Operating Log Start data e Operating Log Speed The duration of time between generated values for all logged variables in Operating Log start mode e Log File Location The directory where all Log Files are stored e Current Path The directory path of the currently generated Log File e ET Pressure Analog Shutter GV Device Log Speed These controls allow the user to specify the digital sampling rate for each of the populated variables e Create New File Creates a new Log File SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 41 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS If you are in need of new device drivers for your system contact SVT Associates User Created Device Driver To add a new device driver you must have three items 1 Main Virtual Instrument This is the vi that Robo will open and run control 2 LLB This is a library of vis that your Main vi needs to run Without this LLB Robo can t open the main vi 3 Control txt This is a text file that contains the names of indicators
49. l Manual 4 13 Page 5 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION loto Create New User User Name Password Password check lt Permissions v Edit Chamber View v Edit Eurotherms v control Eurotherms 4 Edit Shutters v Control Shutters Edit Pressure v Edit Gate Valves 4 Control Gate Valves v Edit Analog Controls v Control Analog Controls v Edit Digital Controls 4 Control Digital Controls 4 Edit Interlocks Load Run Recipes v Create Edit Recipes v Create New Users v add Edit Motion v Control Motion _ Edit Device Drivers Valid Until 46 28 781 pranm D Figure 3 7620 Executive Drive Eden Prairie MN 55344 3677 USA This dialog box will not appear if you do not have Create New User permissions Only the administrator has the ability to create a new user with the proper permissions and set the date when the new user becomes inactive It is suggested after all of the permissions Eurotherms Shutters Gate Valves have been properly set up created users other than the administrator should not be given the ability to edit the permissions of other users This will ensure that no one can inadvertently change the properties and damage the system Edit Users Any user that has the Create New Users permission can also edit each user This allows the administrator to change the users name password permissions and valid until dat
50. l point e Decimal Scientific Notation Allows you to switch between Decimal and Scientific Notation e Visible Enables visibility in Chamber View e Warning Alarm Levels Set Warning and Alarm levels to notify you if the Device Driver value has exceeded its specific ranges as demonstrated below in Red and Amber color fields Devices TES ae Stage Spinner Position Current Current Position et Poton o aaae Temperature Ze Main Temp Figure 41 e Normal Alarm Warning colors Sets the colors of the Device Control displayed e Plot Color Sets the color of the plot on the Trend Chart e Position Positions the Device Driver in Chamber View You can also move Device Drivers by left clicking and dragging the Device Driver to be relocated Edit Chamber must be enabled for this function to work e Indicator Width Sets the displayed width of the indicator in Chamber View Note Operators of the system may receive a list of control points for their Device Drivers by contacting SVT Associates Device Drivers are modified and sometimes specialized for each customer and may need supplementary information to complete SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 28 of 44 Engines for Thin Film Innova
51. n Interlock trigger has the ability to produce sound through the computers system speakers e Visible e Priority Priority sets the particular interlocks importance level 0 being the greatest and 99 being the least If 2 interlock triggers occur the interlock with the higher priority will overtake the lower priority e Digital Output Variable This is a Digital Output bit option Typical setups are wired into a Light tree to indicate an Interlock has occurred e Save Saves and closes the window Once the Digital Interlocks have been created the software will automatically look at the physical line and check the status If a Digital Interlock fails a dialog box will appear to warn you of the failure SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 35 of 44 Engines for Thin Film Innovation ee A Recipe Control Option If you want an interlock to execute or pause a recipe you must check the Recipe Control option in the Edit Digital Interlocks window By checking this option anytime the interlock fails it will STOP the current recipe LOAD the Safety Recipe and START it If you would like the interlock failure to only pause the recipe and display a prompt asking you to ABORT or R
52. n Loop for 3 iterations Set Shutter Status 1 Set Shutter Status 2 End Loop Set Shutter Status 3 Begin Loop for 2 iterations Set Shutter Status 4 End Loop Set Shutter Status 5 End Loop Creating Recipes Before you can create a recipe you must first understand the Recipe tab The recipe tab is found on the Device Recipe Control Section of the Main Screen as shown in Figure 42 Valid Invalid Save Load Recipe Recipe ns SYT Associates Robo Ha Seto Chamber View Logit Irtekche Recipe Control _ rr p a a et ccoo Promo Analog Contra l Recipe Time Steps _ ictal Recpe time Tmefemanng Total steps Steps Remaning ers mana C E lo ie jo fo ET RE EECH REESEN Recipe Script LOL TEG OKRCRERERERE Dee A Setters bor 5 00 zer Wat for BIA 1147 pa 24 MN 4 2 In AAA ITAM KIR AM IDO AM 36 00 AM ADAM 9 42 00 AM OAM PABM AN OSANA AITAN 4 Recipe Tab Owe cae A CT 00000000 o ACEN or Ide Judge Oe EEN SID current Date fn Sep 24 2010 956 19AM e ER E Sarde ei Ze A Figure 42 Recipe Tab This tab contains everything you need to create run and monitor recipe execution There are five sub sections on this tab Recipe Control Contains three buttons Run Pause and Stop Controls the status of the recipe Valid Invalid Recipe This status LED tells you if the recipe script you have created is valid SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN
53. ndicate whether the Eurotherm temperature enters a Warning State Alarm Range e Min Temp The minimum temperature at which the software will indicate whether the Eurotherm temperature enters an Alarm State e Max Temp The maximum temperature at which the software will indicate whether the Eurotherm temperature enters Alarm State e Comm Ok Error Notifies you if there is a Communication Error e No Warning Warning Notifies you if the Eurotherm is in Warning Range Orange Green respectively e No Alarm Alarm Notifies you if the Eurotherm is in Alarm Range Red Green respectively e Normal Color Sets the color of the Temperature C of the Table List under Eurotherms when temperature is in between Warning and Alarm Range e Plot Color Sets the color of the plot In the Eurotherm Trend Chart If this color is modified you need to restart the software for changes to take affect e Warning Color Sets what color the plot will be on the Trend Chart when in Error limits e Alarm Color Tells what color the plot will be on the Trend Chart when in Alarm limits Figure 8 Edit Eurotherms e Ranges Measures temperatures while ramping Software will indicate if rate is within normal warning or error limits e Position Positions the Eurotherms in Chamber View You can also move Eurotherms by left clicking and dragging the Eurotherm to be relocated Edit Chamber must be enabled for this function to work SAAT SVT Asso
54. oftware be liable for any damages whatsoever including without limitation damages for loss of business profits business interruption loss of business information or other pecuniary loss arising out of the use of or the results of use of or inability to use such product even if SVT Associates Inc has been advised of the possibility of such damages SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 44 of 44
55. r Defines the color of the control e Save Saves your changes and closes the window Note The horizontal scroll is used to navigate to all of the avallable Gate Valves for editing Enter the desired Gate Valve Figure 28 Edit Gate Valves programming parameters and click Save to close the window Controlling Gate Valves To control the Gate Valves via Robo go to the Shutter Gate Valve cFP Status section of the Main Screen look at the bottom left hand side of the screen Once there Hold the lt SHIFT gt key and click the Gate Valve you want to open close If the interlock isn t satisfied for that Gate Valve a window will appear telling you the Gate Valve cannot be opened Pressures SVT Associates Robo Robo allows you to keep track of the various pressures File ERS Chamber view Log File Interlocks f y Se l h l within the system by having the ability to communicate ree DE EE with the pressure controllers gauges Edit Pressure int Ramp Rate Power Power R R Mode a Gate Valves gt Re Init Pressure Cimin sec A or M Analog Control gt Digital Control Edit Pressure Gauges Device Drivers _ gt To edit pressure gauges navigate to Setup gt Pressures gt Edit Pressures as shown in Figure 29 After clicking Edit Pressure the Edit Pressure Gauges dialog box will appear as shown in Figure 30 You then have the ability to change the pressure properties
56. rm Warning Colors Sets the colors of the control displayed e Plot Color Sets the color of the plot on the Trend Chart e Save Saves and closes the window Figure 30 Edit Pressure Gauges Monitor Pressures Pressures You can monitor the pressure gauges by viewing the Value column in the Table labeled Pressures as shown in Figure 31 Figure 31 Pressure Readings Analog Controls SVT Associates Robo File ATA Chamber View Log File Interlocks Robo allows you to gain control of Devices that implement ka en Kee Analog voltage inputs and outputs An example of this would d Zur gt Ree ressures ure Working etpoint Ramp Rate Power Power D PB Mode be a mass flow controller or a pressure gauge You are able to Gate eS E E OEE set and read these analog voltages Digtal Control gt Device Drivers gt Figure 32 Navigate to Edit Analog Controls SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 23 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION gt To Editing Analog Controls Before you control your analog device you must first edit the settings To edit the Analog Control Settings navigate to Setup gt Analog Control gt
57. rtWi Controlling Shutters After the shutters have been properly setup you can es control them by navigating to the Shutter Gate sitas tas Valve cFP Status section on the Main Screen at the fee 50 sg Ss 72 4 q M bottom you will see the shutters shown in Figure 23 15787103 Pending Furethem Commanos D ke Power Power BR Mode 4 M al Figure 24 shows a closer view of the shutter control Ene 1204134 Hold the lt SHIFT gt key and click the shutter you want to open When the shutters are open the corresponding indicator will be green when closed the indicator will be gray In this example In Sr Ga As NaF Se and Fe are closed while Cu Al and Ni are open Gate Valve Heros 1 Gata Valve irirelori gt Dergrme Nore Fees Corrected Tercera een Ee PEDI TEPEE E Let bl Jena Load keet Figure 23 Navigate to Shutters Simultaneously Open Multiple Shutters If you want to open multiple shutters at the exact same time but don t want to create a recipe to do this you can use the Open Multiple option Right click on the first shutter control Figure 25 and choose Open Multiple Figure 26 will appear IPEF LEPLE E Cryo GY Turbo Ion el Load Lock Gi Figure 24 Shutters SVT Msociares Smart MBE Fi Sup Crvete Yew Log tenis L Lae Asem a oeo tae 1 0 om oe ee ee rr a ar are n Is Admin ii Cod tris OF Gens Freien
58. s Inc SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 34 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION e Name The name of the Interlock e Digital Variable Input The digital input line of the interlock e Fail on High Low Logic value in which Interlock will Fail For Example The logic will strictly depend on the logic of the instrument however most Pressure Gauges send a 1 or High Bit value to indicate pressure has been reached or is lower than its intended Setpoint If the pressure were to rise above its Setpoint the logic would be lost and would typically interlock on a Fail on Low e Recipe Control When checked if the interlock fails the specified recipe will be loaded and run e Soft Fault When checked if the interlock fails the current recipe will be paused and a dialog box will appear asking user to resume recipe or abort Recipe Control must be checked for this to be enabled e Recipe Path Location of recipe that will run if an interlock is triggered e Satisfied Red indicates there is an interlock triggered Green indicates interlock has not been triggered e No Error Red indicates that Digital Input conditions are unknown Gray indicates there is No Error e Play Sound This option is not applicable to all setups but a
59. such End User Licenses By purchase possession or use of Robo Software you further agree to comply with all existing export laws and regulations of the United States Disclaimer SVTA makes no warranty or representation either expressed or implied with respect to Robo Software or its contents quality performance merchantability or fitness for a particular purpose In no event will SVTA its distributors or dealers be liable to you or any other party for direct indirect special incidental consequential or other damages arising out of the use of or inability to use Robo Software or its contents even if advised of the possibility of such damage In the event that Robo Software includes an online update feature SVTA further disclaims any obligation to provide this feature for any specific duration other than the initial posting The exclusion of implied warranties is not permitted by some states Therefore the above exclusion may not apply to you This warranty provides you with specific legal rights there may by other rights that you may have that vary from state to state The pricing of Robo Software by SVTA reflects the allocation of risk and limitations on liability contained in this agreement of Terms and Conditions Copy Protection The Robo Software in whole or in part may or may not be copy protected or encrypted However in all cases no part of the Robo Software or the contents of this publication may be stored in a retrieval
60. sures Working Sp Setpoint Ramp Rate Power Power RR Mode al E 68 98 1 00 A 100 00 1 00 A 0 00 1 00 A 0 00 1 00 A 100 00 1 00 A M M M 24 51 32 56 Indium Copper Selenium e Name The name of the shutter Usually named after the evaporation material type e g Indium or device e g Stage e Abbreviation The abbreviated name of the shutter This name will appear on the shutter indicators both in Chamber View and on the Device tab keeping the abbreviation to two letters is recommended e Display on Chamber When checked the software will display this shutter in Chamber View e Shutter Size Defines the width and height of the control in pixels e On Color Off Color Defines color of control created to represent the shutter e Position Positions the Shutter in Chamber View You can also move shutters by left clicking and dragging the shutter to be relocated Edit Chamber must be enabled for this function to work e Save Saves and closes the window Note The horizontal scroll is used to navigate to all of the available shutters for editing Enter the desired shutter programming parameters click Save to close the window SAAT SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 19 of 44 PROPRIETARY INFORMATION Engines for Thin Film Innovation OE SFT Associates Sma
61. system transmitted or reproduced in any manner including but not limited to photocopying photography magnetic or other manner of record without written prior permission of SVTA Reselling or redistributing these files without authorization is expressly forbidden except as specifically provided for by SVTA No Modification or Reverse Engineering You may not modify adapt translate or create derivative works based upon the Software You will not reverse engineer decompile disassemble or otherwise attempt to discover the source code of the Software except to the extent you may be expressly permitted to reverse engineer or decompile under applicable law PROPRIETARY INFORMATION SAAT PROPRIETARY INFORMATION SS EE SVT Associates Inc SVT Associates Proprietary Information 2012 SVT Associates Inc All Rights Reserved Page 2 of 44 Engines for Thin Film Innovation 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 Contents MING ANON E 5 BCI Ni EE 5 Creating A o e Pe 5 Sinne 6 Rene siii ei EE olaaa T User Timeout Auto Lo OUt saisine A A ee ee eee eee 8 Navigation of the Robo Software cc cccccccc cece eccceeeeeeeeeeeeeeeeeee eee eeeeeeee esse eeeeeeeeeeeseeeseeeeeeeeseeeseeeseeeeseeesseeseeeeseeeseeees 8 NTIS Cie RE e 8 EE EE 10 An 10 AA NE E NEEE Ei EUREEN EEE ENOTE A ENE EEEE EE ORE
62. the lt ALT gt key and left click the row you want removed To move a device table up or down in the device tab hold the lt SHIFT gt key and left click and drag table to the new location table will move to new location when mouse is released Shutter Gate Valve cFP Section You can open and close the Shutters and Gate Valves in this area without going to the Chamber tab in the Charting Chamber View section Trend Chart Chamber View Section Trend Charts of the devices setup and Chamber View are monitored here Status Bar See next section SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 9 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS Status Bar The Status Bar shown in Figure 6 gives a quick overview of the system Current User Recipe Status Digital Interlock Status Device Interlock Status Log File Status Figure 6 Status Bar At the bottom of the screen you will see the following text boxes Current User The user that is logged in Recipe Status Displays Idle if no recipe is running otherwise displays the name of the running recipe Digital Interlock Status Tells you if the Digital Interlocks are satisfied If satisfied the text box will b
63. the program will begin At any point you can stop or hold pause the program To Stop or Hold a C T ZZ pu program follow the steps to access the Eurotherm Program t Ee L a deg AECH Menu Program function refer to Figure 12 Choose Stop or Hold as desired Figure 15 Controlling Eurotherm Programs SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2012 SVT Associates Inc All Rights Reserved ROBO Control Manual 4 13 Page 15 of 44 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS Eurotherm Charting Charting of the Eurotherm Temperatures is automatically done in the Charting Chamber View section of the Main Screen as shown in Figure 16 This chart will hold up to 24 hours of data W Rake Control ea Se iL H Eurotherm Charting KL 0 i A i ENTRA MOIN MOM Bee frm ONY Lee eee LOA so o Lower 3 L cme d r e J Lear G MOLD GPs Pa PY tut MORPH emp 08 1007 PY Pern M Trend Charts d ol apor a Dras Covru Roge Cane ZEEEEEEEEBE Leat n a a omel ncmo REENEN o Mor Feb 27 2012 407 14 PW t Figure 16 Controlling Eurotherm Programs SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT
64. tion PROPRIETARY INFORMATION SOFT Recipes Listed below are the commands available for writing Robo recipes Set Eurotherm Temperature Sets the specified Eurotherms Setpoint Celsius Set Eurotherm Ramp Rate Sets the specified Eurotherms Ramp Rate degrees Celsius Sec Set Eurotherm Power Output Sets the specified Eurotherms Power Output 0 100 Set Eurotherm Power Ramp Rate Sets the specified Eurotherms Power Ramp Rate sec Set Eurotherm to Manual Mode Sets the specified Eurotherm to Manual Mode Set Eurotherm to Auto Mode Sets the specified Eurotherm to Auto Mode Set Eurotherms PID Values Sets the specified Eurotherms PID Values Set Shutter Status Sets each shutter to Open or Close based on user option Use this when writing a growth recipe Wait Waits for the specified amount of time sec Begin Loop Sets the beginning of a loop structure End Loop Sets the end of a loop structure All steps between Begin Loop and End Loop will be repeated the amount specified in the Begin Loop step Wait for Eurotherm Temperature Pauses the recipe until the Eurotherm reaches the targeted temperature Wait for Eurotherm Temperature Below Pauses the recipe until the Eurotherm falls below the target temperature Wait for Pressure Above Pauses the recipe until the Pressure Gauge rises above the target value Wait for Pressure Below Pauses the recipe until the
65. vation Sc Controlling and Monitoring Digital Control Devices PROPRIETARY INFORMATION The Digital Control Device Table shown in Figure 37 is a means of monitoring and controlling instruments and devices whose logic is ON or OFF The items listed in this table are populated through the Setup gt Digital Control Edit Digital Control option also described in previous section This table contains 3 columns Name Value and Setpoint The Value is what shows the current state of the digital input You can send an output to the Digital Control Device by either typing a 1 or a 0 in the Setpoint column 1 represents a True Logic or ON and 0 represents a False Logic or OFF command Digital Controls Name ae Rough Pump LL Turbo Figure 37 Digital Controls Device Table File Setup Chamber View LogFile Interlocks Eurotherms gt Eur Shutters N p Working SH Setpoin Ramp Rate Pov ressures b e d e LL C C min Gate Valves b Analog Control p Digital Control gt O 2 CD Se lt m wi y rr a a O d ui cl lt CH Current Position Annealing Temperature Chiller Main Temp Figure 38 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com ROBO Control Manual 4 13 Monitoring Device Drivers Device Drivers are software instruments Interfaced through

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