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1. Figure 3 50 Taking a Scan Click Scan button to take a scan The images of the selected channels will build up line by line in the displays If no data is generated the detector may be out of alignment In this case click Tip Retract from the toolbar re align the red dot Page 12 and try another scan To adjust the Z scale of the images left click and drag the bar to the left of each display to select a Z height range To view a single line scan hold down the SHIFT key and left click in either image display to define a horizontal line across the image Make sure the line includes the square features The line scan profile for the Z SEN channel should resemble the shape and size of the 10 m i i features Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever 47 To take additional scans click Scan again or check Repeat Scan to take continuous scans of the same region To zoom to a new scan region Left click and drag in the image display to define a scan area Pa Pacific a SPM baskoi Scanned Image Scanned Image 2533 52 Zoom In YD x offset 2000m Y offset 3804mV Zoom 23 aseni EA ee oreereite EE 35 aai v Histogram correction i fusto leweling OK cancel _ s Hh E Shading Line 253 Line 253 Figure 3 52 Zooming to a new scan region Right click OK to confirm the new scan region tg Pacific Nanotechnology SPM Cockpit File Devi2. Offset 4885 mw Offset Jass2 5 mv F Device Directory C pscan pci Free memory coreleft 2236288666 farcoreleft 56064 10 55 42 AM sa Figure 3 45 Scan Image Window Revision 1 1 PID Tip Exchange Scanner Controls Sean Size um 73333 5 a 1 aul Resolution 256 fp o 90 180 270 Acg Channels p a Zoom Extra Zoom Topography Gain f 4x 2x Sean Rate Hz Scan Angle Repeat Scan Setpoint p Bain p Proportional 40 Integral Derivative Status Lines Remaining Time Remaining 50165 comtTA LLCfg Set the scanner controls as follows can Size Leave as is the default size which is entered by the system when the calibration routine is performed is the maximum scan area for our scanner Scan Range 1 Hz Resolution 256 Scan Angle O Acq Channels 4 Topography Gain 1x e Set the feedback controls as follows Setpoint O Gain e2 Proportional 5 Integral 5 Derivative O Chapter 3 Tutorial Close Contact EZMode Light Lever 45 Scanner Controls Scan Size pm Sees a Scan Rate Hz q Resolution 256 T Scan Angle fo o mf Acq Channels ja Zoom Extra Zoom D Spi Topography Gain 2 ix 2x Repeat Scan Gain 5 Froporti onal fi g a Integral Deriwatiwe o Figure 3 47 Feedback Controls Select the Z SEN and Z ERR channels from the drop down menus beneath the
3. Focus on the Cantilever Click Tip Approach button Start Select i ii i bl Scan gt Image Gj Tip Mode Laser sample Processin Retract Figure 3 43 EZMode Toolbar CAUTION Once the Tip Approach is complete and the tip is in contact with the sample surface do not exit the SPM Cockpit software or turn off the Controller without first retracting the tip Doing SO may cause damage to the tip scanner and sample Revision 1 1 44 Nano R AFM User Manual Tip 4pproach Tip Approach Eg Complete Figure 3 44 Tip Approach SCAN THE SAMPLE The PID indicator at the bottom of the window will turn green to indicate that the probe tip is in contact with the sample surface and the instrument is now ready to perform a scan e Click the Scan Sample button on the toolbar Select kl Align start p i Pacific Nanotechnology SPM Cockpit Scanned Image E File Device Settings Tools Process Display Window Help Select Align Frequency gt Tip PRO start m Mode LIAL Sweep staye Approach ge Scanned Image 39 67 um 73 33 pm 79 33 um 0 00 pm 0 00 pm 33 67 pm 73 33 pm 73 33 pm z sEN x f Forward Reverse 100 a J Histogram correction Jw Autoleveling Jao ah I Shading z ERR z For E Histogram correction P Shading ar AA 79 33 ym Channel z ERR Half Range f4 Full autotevel x V Auto Channel SEN autotevel Half Range 9 gt mv V Auto
4. Extra Zoom Select Source Image for Proce x E E Acquisition Direction ieee E tos f Forward Repeat Scan E SEN Y Forward f Reverse qty SEN Pirar j Acquisition Channel zen 66 Iw Histogram correction Iw Auto eweling i e 4e VT shading Z Sensor Cancel Feedback Controls Setpoint bo Gain b A Proportional 40 Integral mo o Derivative ic Line 256 Figure 3 55 Image Processing Module e Select the desired acquisition channel and direction for the image to be processed The raw image data will not resemble the image in the scan image window as some basic realtime image processing was applied as it was being acquired e Click to apply a plane correction Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever Plane Correction 9 Scan Data 7 SEN rev Z range 337 43 nm Select Correction Model 3 Point Plane Correction Average data inthe proximity of f pixels Polynomial surface leveling C Polynomial surface X leveling Polynomial surface X leveling C Polynomial surface Y leveling f Polynomial X line leveling Polynomial line leveling Polynomial order f4 Figure 3 56 Plane Leveling Tool Under Select Correction Model select Polynomial X line leveling Polynomial order 1 Under Select Area to Analyze select Exclude Area Area Marker Rectangle Z range 159 37 nm Image tit
5. features on the PNI AFM reference The measurements displayed to the right confirm a pitch of 20 xm and a Z height of approximately 70 nm NOTE These measurements should not be used to calibrate your instrument select histogram tool and use the slider bars to mark the middle of the two ranges where the Z data points are clustered K Revision 1 1 V 2 Chapter 3 Tutorial Close Contact EZMode Light Lever 51 m Histogram 11 Scan Data Z SEN rev Color Correction 148 55 nm 78 59 nm 0 _ Undo Cancel Figure 3 58 Histogram Tool The Z Diff measurement on the vertical bar confirms the 70 nm height of the PNI AFM reference features e To save any of your processed images select File Save Image s e To view 3 D images of the topography select 3D button 80 3D View 11 Scan Data 7 SEN rev Color Correction Pacific Nanotechnology ae Color Gradient a Gray i 3 96 um Mone lw aspect ratio Light Rotate lw Light On Intensity J Pl Figure 3 59 3D View CAUTION To prevent damage to your scanner probe and sample be sure to retract the tip before exiting SPM Cockpit software or turning off the Controller e Click Tip Retract It is now safe to exit SPM Cockpit software Revision 1 1
6. 0 000 deg toward 0 0 deg Select Area to Analyze Entire Scan Area Area marker Exclude Area Include Area Rectangle hd Correction Scope Correct All Keep original data in excluded area Assign mean value to excluded area Z Offset Do not change Z offset Subtract plane offset Set minimum Z to zero 49 To exclude the features on the PNI AFM reference use the mouse to left click and drag in the image display so that every feature both whole and partial is completely covered Click Apply and the leveled image appears in the right hand display Revision 1 1 50 Nano R AFM User Manual To do Line Profile measurements select button as shown Profile Mode Protiles Horizontal Ea d Vertical W Oblique Polygonal Circular Average Display Mode Apa lv Fit vertical Scale 7 Fit Horizontal Scale Invert Z data Z range 159 37 nm Line Roughness 1792 um Figure 3 57 Line Profile Tool e Under Profile Mode select Horizontal e Under Display Mode Check Fit Vertical Scale e Left click in the image display to select a line e Left click in the line display to make measurement markers Markers dl T Diff 2 1 7 622 63 031 Diff 4 3 Marker 1 Marker 2 2 202 g 824 2 940 70 970 Marker 3 Marker 4 um nm In the example above measurements are made between the edges of two consecutive
7. Chapter 3 Tutorial Close Contact EZMode Light Lever 29 Tutorial Close Contact EZMode Light Lever ee BEFORE YOU BEGIN This tutorial details the steps for taking a close contact AFM image of the PNI AFM reference in EZMode WARNING Before operating the Nano R AFM make sure you are familiar with the safety information on page iv POWERING UP THE SYSTEM 1 Turn onthe Master Computer 2 Launch the SPM Cockpit software 3 Turn on the Controller 4 Turn onthe video monitor SOFTWARE SETUP E Pacific Nanotechnology SPM Cockpit File Device Settings Tools Process Display Window Help 1 Select EZMode Toolbar Mode Riv E mode Expert Input Selects to ADC Shift F 7 Figure 3 1 SPM Cockpit 2 Click the Start button from the EZMode toolbar i bl Align lel Frequency gt Tip gt Scan Image gt Tip seat Mode Swee ane Approach Sample Processin Retract Figure 3 2 EZMode Toolbar 3 Click Retract Tip and click OK when complete Tip Retract if Start Eg Tip Retract X Complete Load Configuration Figure 3 3 Retracting the Tip Revision 1 1 30 Nano R AFM User Manual 4 Click Load Configuration select the PNl supplied contact mode configuration file and click Open This file should be located in the ConfigFiles folder in the SPM Cockpit directory It has the format xxxxcontact LLcfg where xxxx is the serial number of your Light Lever Nano R syst
8. Close Contact EZMode Light Lever 4 e Grasp the metal substrate and carefully rotate the tweezers so the cantilever side of the substrate lifts up off the magnetic strip first as shown in Figure 2 30 e Place the probe onto the magnetic mount so the side of the substrate opposite the cantilever fits into the L e Use tweezers to push the substrate flush against the L as shown in Figure 3 36 e Hold the scanner head by the handles and rotate it back to the level position e Gently slide the scanner back towards the stage until you feel some resistance e Turn the probe exchange knobs up 1 4 turn to lock the scanner head into place Now you can replace the Sample Puck as described on page 14 Once the probe is replaced click the Restore button It will restore Focus and Z motor positions to their initial settings Figure 3 36 Push the probe substrate flush against the L mount Figure 3 37 SPM Cockpit Revision 1 1 42 Nano R AFM User Manual COARSE APPROACH Optical Assistance Coarse approach is very helpful to bring the probe into close proximity of the sample surface AFM Stage Controls Focus Zoom X Y Motors co Ted Samah e Click Coarse Approach on Stage Control v 4 Motor Positions Window Z Motors a aoga i Y 4 982 77 pm zjm or F z 688 75 pm Set D ugu Al ww Trackball J 77 AFM Stage Controls Focus e Click Next on Coarse Approach Wizard
9. and Jp the focus first for the tip and then for the sample With this z i ee ee follow instructions as shown below IE Click Next to begin Si in preparation for tip approach this Wizard will guide you in adjusting Wit re Device Directory C pscan pci el 30165 comTA LLCig Figure 3 39 Coarse Approach Wizard Coarse Approach Wizard ix Coarse Approach Wizard x w Coarse Approach Wizard Please use the controls below to Now please focus on the sample focus on the tip Click Next when ary by moving the focus down Click Click Next to bring the tip close to the sample done 1 Next when done s Focus H Focus as PA Figure 3 40 Coarse Approach Wizard Screens First focus on Probe then focus on Sample and click Next Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever 43 Locating Features of the Interest After Coarse Approach Features of the Interest can be located by using the X Y steps to facilitate both coarse and fine movements AFM Stage Controls maf X Y Motors i Load Sample Cosrse Approach Motor Positions x RATAT pm Focus Step ng a7 pm Tripod E p TE 4 982 77 ym all to limits wg Trackball Figure 3 41 X Y Stage Controls Figure 3 42 Positioning the Probe over the Scan Area 10um squares 20um pitch If necessary you can orient the Sample by simply rotating the Puck by hand
10. ce Settings Tools process Display Window Help Scanned Image 17 92 um 0 00 pm Forwerd Reverse Z ERR ad Forward f Reverse i E Histogram correction V Auto leveling 30 r M Histogram correction M Auto leveling fa aahi Shading fiz auhi Shading Line 52 Line 52 Figure 3 53 Confirming the new scan region Scanner Controls Scan Size um 76 351 Scan Rate Hz fi 2 Resolution 256 kd Scan Angle H sd wil Acq Channels a Zoom Extra Zoom D Spi Topography Gaim 2 ix 2x Repeat Scan Feedback Controls Setpoint bo Gain 5 Proportional co Integral ho Derivstive bO Scanner Controls Scan Size um 17 9195 eal Scan Rate Hz 4 Resolution Sean Angle a simi Acq Channels ra Zoom Extra Zoom e pE Topography Gain 1 2x Repeat Scan Feedback Controls Setpoint hz Gain mz Proportional hz Integral io e Derivative b Revision 1 1 48 Nano R AFM User Manual IMAGE PROCESSING e Click Image Processing on the EZMode toolbar Frequency Sweep Figure 3 54 EZMode Toolbar e Click Select Source to open an image for processing g Pacific Nanotechnology SPM Cockpit Fie Device Settings Tools Process Scanned Image Scanned Image Scanned Image Scanner Controls Sean Size um 417 913 Scan Rate Hz fa Resolution 256 k Scan Angle o 2 20 Ag Channels ja Zoom
11. e frequency fi o oo a Choe Phase shift deg 109 98 99 Setpoint offset below peak fio o0 2 2 Setpoint 9375 i Figure 3 19 Frequency Sweep Set Drive LOAD A SAMPLE e Click Stage from the EZMode toolbar e Use the focus controls to bring the sample surface into focus on the video monitor Figure 3 20 EZMode Toolbar Revision 1 1 36 Nano R AFM User Manual CAUTION Whenever you engage the motorized X Y stage be sure the probe is a safe distance above the sample puck e Use the X Y stage controls to navigate to the largest of the four patterns on the PNI AFM reference 10 xm squares 20 xm pitch e Before approaching the same you need load the sample and locate the features of the interest to Image with AFM e Click Up button to raise the Z motor until there is at least a few millimeters of clearance between the probe and the sample surface or puck if no sample is loaded monitor by eye Figure 3 21 A AFM Stage Controls E X Y Motors jos ym lt E hl Ad A Motor Positions Sn ate l Sete He 11 771 77 Hri Focus Step Z Motors ug urm j 3 7 a Z Tripod v 14 982 77 urn all to limits g Trackball Figure 3 21 AFM Stage Controls Raise the probe tip away from the sample e Click Load Sample and then Start button The motorized X Y stage will move the puck towards you to the limit of it s range Figure 3 22 w Load Sample x Click Start to begin the sam
12. ector alignment knobs to bring the red dot into the center of the green box The red dot should be positioned as shown in Figure 3 14 Make sure the Z SUM value signal intensity is above the minimum If it is not you need to re seat or replace the probe Red Dot Alignment Laser and Detector Focus J te ome cn Oe ge IT Mttr ght D stata Ps Re RRM 97 num Focus Step Lamp ASUM go To a ee LASER ZS UM 1 56 t ON OFF 2 T B 0 03 Y Z L Ft 0 18 Figure 3 14 Aligning the Detector Revision 1 1 34 Nano R AFM User Manual FREQUENCY SWEEP After aligning the detector the resonant frequency for the installed cantilever must be set e Click Frequency Sweep from the EZMode toolbar to open the Frequency Sweep window Select a A Mode I Laser 7 TEN Figure 3 15 EZMode Toolbar e Make sure settings for autofunction are as shown in Figure 3 16 below ae Frequency sweep EJ Acquired Data Auto Functions al Find Peak Half Range rei To Adjust Offset Amplitude l my 5449 Taj a aa hs Set Oriwe auto E Previous E Current lt Sweep Parameters Parameters for Auto Functions Start F r Adjust Amplitude pm m End Frequency sa7 Full Range Desired oscillation amplitude jiso m Sweep Rate 5 rosea rit l l per Set Driwe C ab abowe E Drive Amplitude Offset of drive frequenc Oy F ee q y i fio oo feb nf Pha
13. em F Open Configuration File Look in ConfigFiles te f s0165 cc genTA LLCFg s0165 contTA LLCFO My Recent 501189 retune LLCFg Dacumens stateck cc LLCFg 2 test1 LLChg CloseContact LLcfg Desktop CloseContactTA Licfg Contact LLcFg ContactTA LLcFg cross osc LLCfg naise LLCg osc tria s01189 LLCFq prizer s0189 LLCKg s 1165 cc FFTA LLCFg My Documents Mu Computer M A etwork File name CloseContactTA LLofg aces Files of type Light Lever Sensor Configuration Cancel A Figure 3 4 Loading a Configuration File 5 Click Linearize check both boxes and click OK 3t Linearize Calibrate Check Connection confirms communication between controller and user PC Scanner Auto Limearity checks X amp Y full scale linearity Figure 3 5 Initiate Connection Confirm and Calibration Routines 6 Click OK when the communication between the Master Computer and the Controller is confirmed If there is no connection you need to exit the SPM Cockpit software and restart both the Master Computer and the Controller Ping the Controller PING Waiting for Controller s response Figure 3 6 Connection Confirmed Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever 31 7 Click Start to proceed with the linearization procedure w Automatic Linearizer Range w Automatic Linearizer Range Acquired sensor values Current range This procedure wall mo
14. indow Controls Ge to 0 If you cannot find the probe on the monitor e The probe may not have been installed properly Repeat the probe screws installation procedure to make sure the probe is seated squarely in the L mount e The objective s field of view may need to be adjusted in X Y using the adjust screws This is usually necessary when switching between a contact and close contact probe due to the difference in size You can confirm that you have installed a contact cantilever by noting the difference in length between contact and close contact cantilevers as shown in Figure 3 12 Figure 3 11 Probe Installation __ Sie t Close Contact Cantilever Contact Cantilever Figure 3 12 Contact vs Close Contact Probes Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever 33 The red dot alignment procedure has 3 goals e position the laser spot on the back of the cantilever e position the photodetector in the center of the reflected laser beam e achieve a maximum minimum overall measured signal strength Watch the video monitor as you adjust the laser alignment knobs on the scanner head to bring the laser spot onto the back of the cantilever The laser spot should be centered on the cantilever not too close to the end as shown in Figure 3 13 f i jr Figure 3 13 Centering the Laser Spot on the Cantilever Watch the red dot in the Red Dot Alignment window as you turn the det
15. ple load procedure Figure 3 22 Load Sample Window Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever 37 e Being careful not to touch the probe slide the sample puck towards you and then lift it up out of the groove Figure 3 23 Figure 3 24 The sample disk is held in place magnetically e Replace the puck on the stage by setting It down so the protruding piece on the bottom fits into the wide part of the groove and then slide it into position Figure 3 25 e Rotate the puck so that the PNI reference Sample is square with the scanner head w Load Sample When the motors stop you can load the new sample Click Restore when you re ready to scan Figure 3 26 Return sample puck to initial X Y position Figure 3 23 Remove Puck e Use tweezers to mount the PNI AFM reference on the center of the puck Figure 3 24 PA ttn suts b Figure 3 25 Fit the sample puck into the groove on the X Y stage e Click RestoreX Y button on Load sample window The motorized X Y stage will return the puck to its original position Figure 3 26 Revision 1 1 38 Nano R AFM User Manual CHANGE A PROBE To operate in contact mode you need to use a contact probe Probes should be stored in the supplied boxes marked Contact and Close contact as the difference between the two types of probes is not easily visible to the naked eye e First remove the sample puck as desc
16. ribed in the section above e Click Stage from the EZMode toolbar and click Change Tip in the AFM Stage Controls dialog AFM Stage Controls X Y Motors Focus Loom Coarse Approach l Y 4 Motor Positions 94 774 77 pm SE 2 Motors T um 1 g7 Z Tripod Y 14 982 77 pm all to limits g A M F 1 688 75 um a Set Tt gm Al W sco Trackball J Figure 3 27 Change Tip will put the scanner head into appropriate position to replace the tip ES Pacific Nanotechnology SPM Cockpit ttings Tools Process Display Window Help Ei fice Sel ot rrr Select Align Frequency Tip Scan gt Image gt Tip 1 start i Mode ion Sweep Approach Sam Processin Retract ile Dev 7 AFM Stage Controls Focus Click Start to begin the tip exchange procedure re Device Directory C pscan pci 27 st 03 LLCfig Figure 3 28 Start Button will raise the probe tip away from the Sample Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever 39 Turn the probe exchange knobs on the side of the scanner head down away from you 1 4 turn Figure 3 29 The scanner head will slide out about an inch Figure 3 29 Turn the knobs to disengage the scanner head Grasp the handles on the front of the scanner head Figure 3 30 and gently slide the scanner head all the way towards you Figure 3 30 Slide the scanner head toward you Carefully rotate the scanner head
17. se shitt 30 02 a 286 99 kHz 306 99 kHz Setpoint offset below peak fio oo Z Setpoint a i 4375 z Mh 2j Figure 3 16 Frequency Sweep Window e Click Find Peak Frequency sweep x Acquired Data Auto Functions zerR gt Find Peak hee Half Range Ee my Full automation of peak dety Adjust Offset Amplitude d m 1569 2536 99 kHz j 306 99 kHz E Previous E Current e Figure 3 17 Frequency Sweep Window Revision 1 1 Chapter 3 Tutorial Close Contact EZMode Light Lever 35 e When the sweep is complete click Tune Amplitude Frequency sweep Ed Acquired Data Auto Functions 7662 zeRR Z ERR E Find Peak Half Range my 786 m al Adjust Offset Amplitude 8448 my Full m Ato 9234 256 55 kHz 306 93 kHz E Prewious E Current Te Figure 3 18 Tuned Frequency Peak e Click Set Drive po Frequency sweep Eg Acquired Data Auto Functions 2 RR El Find Peak Half Range att my 756 l Adjust Offset Amplitude Po s448 m Full Frequency Synthesizer Selects 286 99 kHz m QD Apply Frequency 297 72 kHz Amplitude 117 1875 mv Pre os mel pee Sweep Paramt c I AI ANGLE J IWI MALY I MI tions Start Frequence ai kHz Eoee Adiust Amplitude End Frequency korn kHz Full Range Desired oscillation amplitude fisop mY Sweep Rate E poin Set Drive above Driwe Amplitude 117 13 a mi Offset of driv
18. two image displays and for each display select Forward Histogram Correction and Auto Leveling Scanned Image 76 35 um 0 00 pm 35 18 um 2 SEN r C Forward Reverse ie ib lw Histogram correction lw Auto leveling E gt n Shading Figure 3 48 Image Display Settings TESS pm 0 00 um 36 45 um a mers vl a Z ERF f Forward f Reverse fe sai Iw Histogram correctian fw Auto leweling hy Shading Revision 1 1 46 Nano R AFM User Manual Line 124 Line 124 Figure 3 49 Line Scan Settings select the Z SEN and Z ERR channels from the drop down menus of the two corresponding line scan displays i Pacific Nanotechnology SPM Cockpit MEE File Device Settings Tools Process Display Window Help Pal Align Frequency Tip 5 Image Tip PROC start mD Mode a gt Sweep a Approach Processin Retract Scanned Image Scanned Image Scanned Image Scanner Controls Scan Size um 76 351 Scan Rate Hz f Resolution 256 Scan Angle lo 0 30 180 270 38 18 pm Acq Channels fa H Zoom Extra Zoom laa m nm ii Topography Gain 4x 2x Repeat Scan i 38 18 um 2 SEN are C Forward Reverse ZERRI x C Forward Reverse 73 gt m M Histogram correction M Auto leveling 30 hh Iw Histogram correction Iw Auto leweling faa i Shading fiz hs Shading Line 124 Line 124 Setpoint o Gain 5 Proportional f4o Integral fio Derivative lo
19. up about 90 degrees as shown in Figure 3 31 Jt A 3 N Figure 3 31 Rotate the Scanner Head Revision 1 1 40 Nano R AFM User Manual CAUTION Handle AFM probes with care The cantilever can break off easily if it touches anything or snaps down too forcefully on the magnetic mounting surface on either the scanner or in the probe box Probe handling When loading or removing a probe pivot the substrate on the edge opposite the cantilever as shown below This will protect the cantilever from striking the magnetic mounting surface and it will prevent the substrate from snapping down too forcefully which may damage the probe Figure 3 33 Mounted Probe To install a new probe e Use tweezers to nudge a probe so that the substrate extends over the edge of the magnetic strip in the probe box Figure 3 34 Revision 1 1 Figure 3 34 Nudge the Probe into Position Figure 3 32 Probe Exchange Position To remove a probe Use tweezers to grasp the metal substrate as indicated in Figure 3 33 Carefully rotate the tweezers so the cantilever side of the substrate lifts up off the magnetic mount first Set the probe down onto the magnetic strip in the probe box so that the side of the substrate opposite the cantilever makes contact first Figure 3 34 Carefully rotate the tweezers so the cantilever side of the substrate comes down onto the magnetic surface as gently as possible Chapter 3 Tutorial
20. we the scanner to find the maxi mum range for Postion 1 linearized Scanner operation Minimum X Offset 863 m s 699 1 mv Minimum Y Offset 2000 m s Yi 7763 5 mY Maximum Zoom 102 Postion 2 Hew range n 5487 1 mY Yi 7698 5 mY Mini mum Offset 1255 mw Mini mum Y Offset 2392 m Postion 3 Maximum Zoom 100 4 5638 2 mY Y 2099 6 mw Check New Range Discard Accept Postion 4 xi 967 1 my Yi 2074 6 my Cancel E EE Figure 3 7 Proceed with Linearization Routine Click Accept when the calibration process is complete and then click Check New Range if desired m Linearizer Range Check X SEN 4917 8 mY Acquiring 34 5 mY oO 82 41 um x Offset 22 Y Offset 34 Zoom 102 Figure 3 8 Checking Linear Range 9 Click Select Mode on the toolbar select Contact in the dialog and click OK Frequency Sweep Select Mode Contact Close Contact i Cancel Adwanced gt Figure 3 9 Select Mode Revision 1 1 32 Nano R AFM User Manual ALIGN THE DETECTOR Select l Align el Frequency gt Tip Ld Scan gt mage gt Tip start p Select Frequency gi sine Approach Sample Processin Retract x l rd Red Dot Alignment See Laser and Detector Focus p Senn ym Focus Step 7 all to limits Lamp z SUM Va V E Scale ix e UE 0 4x LASER z SU M 1 98 a ON FF 2 T B 0 03 Co Coe Z L R 0 48 Figure 3 10 Red Dot W
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