RFG 2000 2V Generator
Contents
1. For returns and repairs please call Global Support to get the correct shipping address Telephone Phone 800 446 9167 or 970 221 0108 or 970 221 0156 Fax 970 407 5981 Email technical support aei com AE California 491 Montague Expressway Milpitas CA 95035 USA Phone 408 263 8784 Fax 408 263 8992 AE Austin Phone 512 231 4200 8900 Cameron Road Fax 512 719 9042 Suite 100 Austin TX 78754 AE GmbH Phone 49 711 77927 0 Raiffeisenstrasse 32 Fax 49 711 7778700 70794 Filderstadt Bonlanden Germany AE Japan KK Phone 81 3 32351511 TOWA Edogawabashi Fax 81 3 32353580 Bldg 347 Yamabuki cho Shinjuku ku Tokyo Japan 6 2 Troubleshooting and Global Support 5705064 C RFG 2000 2V Generator Table 6 1 Global Support Locations Continued Office Telephone AE Korea Ltd Phone 82 31 705 1200 Gongduk Building 4th floor Fax 82 31 705 276 272 6 Seohyun Dong Bundang Gu Sungam Si Kyunggi 463 050 Korea AE United Kingdom Phone 44 1869 320022 Unit 5 Minton Place Fax 44 1869 325004 Market Court Victoria Road Bicester Oxon OX6 7QB UK AE Taiwan Ltd Phone 886 2 82215599 10F 6 No 110 Chung Shan Rd Fax 886 2 82215050 Sec 3 Chungho City Taipei Hsien Taiwan 235 AE China Phone 86 755 3867986 Rm 910 Anhui Building Fax 86 755 3867984 No 6007 Shennan Road Shenzhen China 518040 RETURNING UNITS FOR REPAIR2. 3 cooling medium 3 3 electrical 3 1 environmental 3 4 full rated output power 3 2 input power 3 1 line current 3 1 line voltage 3 1 output connector 3 1 output frequency 3 2 output power range 3 2 overcurrent protection 3 2 physical 3 1 RF output 3 2 size 3 1 source frequency 3 1 weight 3 1 standards 47 CFR Part 18 1 5 EN 55011 1 5 SEMI S2 0200 1 6 symbols in user manual 1 1 on unit 1 2 U user manual icons used 1 1 S symbols used 1 2 safety type conventions 1 1 checks 6 1 User port 25 pin 4 1 conditions of use 1 7 analog inputs 4 1 directives 1 5 analog outputs 4 1 see also directives cable requirements 4 2 i i i connector illustration 4 2 installation requirements 1 6 ke ARI recautions 1 3 digital inputs 4 2 armen 1 5 digital outputs 4 2 electrical characteristics 4 1 Index ii 5705064 C RFG 2000 2V Generator interlock 4 2 pin descriptions 4 3 user port interface schematics 4 5 V views see illustrations voltage line voltage specifications 3 1 W warranty authorized returns 6 4 filing a claim 6 4 returning units 6 4 statement 6 4 water connecting cooling water 5 3 weight 3 1 5705064 C Index iii Advanced Energy Index iv 5705064 C
3. Before returning any product for repair and or adjustment first follow all troubleshooting procedures If after following these procedures you still have a problem or if the procedure instructs you to contact AE Global Support and discuss the problem with a representative Be prepared to give the model number and serial number of the unit as well as the reason for the proposed return This consultation call allows Global Support to determine whether the problem can be corrected in the field or if the unit needs to be returned Such technical consultation is always free of charge If you return a unit without first getting authorization from Global Support and that unit is found to be functional you will be charged a re test and calibration fee plus shipping charges To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide 5705064 C Troubleshooting and Global Support 6 3 Advanced Energy WARRANTY Advanced Energy AE products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any
4. EEC EC Council directive on the approximation of the laws of the Member States relating to electromagnetic compatibility EMC Directive Table 1 2 Electromagnetic Compatibility EMC Standards Standard Description 47 CFR Part 18 Code of Federal Regulations Limits and methods of measurement of radio interference characteristics of industrial scientific and medical equipment EN 55011 Limits and methods of measurement of radio disturbance characteristics of industrial scientific medical ISM radio frequency equipment Class A Group 2 CISPR 11 EN 61000 6 2 Electromagnetic Compatibility Generic Standards Immunity for Industrial Environments Table 1 3 Safety Directives Directive Description 73 23 EEC EC Council directive on the harmonization of the laws of the Member States relating to electrical equipment designed for use within certain voltage limits LVD Low Voltage Directive 5705064 C Introduction 1 5 Advanced Energy Table 1 4 Safety Standards Standards Description EN 50178 Electronic Equipment for use in power installations Overvoltage Category III Pollution Degree 3 Table 1 5 SEMI Guidelines Standard Description SEMI 2 0200 Environmental health and safety guidelines for semiconductor manufacturing equipment SEMI S8 0600 Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing T
5. PHYSICAL SPECIFICATIONS Table 3 1 describes the physical specifications of the generator Table 3 1 Physical Specifications Description Specification Size 4 9 H x 7 0 W x 15 0 D 12 5cm x 17 8cm x 38 1cm Weight 26 pounds 11 8 Kg maximum Connector Cable specifications AC input power 3 meter 4 wire 14 AWG shielded line cord with NEMA type L15 30P power connector 3155053 007 3 meter 4 wire 14 AWG shielded line cord with Harting Han Q 5 pin male power connector 2 5 inches in length 3155053 005 Chassis EMI Ground Achieved through the MFA mounting or Fixed Match Network RF output Custom connector for use with an AE MultiFunction Adapter or Fixed Match Network User Port Connector 25 pin D subminiature female Coolant Connector 0 25 inch female NPT ELECTRICAL SPECIFICATIONS Table 3 2 describes the electrical specifications of the generator Table 3 2 Electrical Specifications Description Specification Input power specifications Line voltage 178 to 229 VAC 3 phase with ground no neutral required Source frequency 47 to 63 Hz Line current 15 A Q maximum at full rated RF output power 5705064 C Specifications 3 1 Advanced Energy Table 3 2 Electrical Specifications Continued Description Continued Specification Continued Overcurrent protection 15 A breaker AC Line Regulation 0 1 change in RF output for a 0 change
6. converting the MFA s output impedance back to 50 Ohms The Counter Match allows a user to then use standard RF power measurement devices such as AE s GenCal system to verify the output of the RF delivery system The following test sequence assumes that such power measurement capability is available 5705064 C Installation Setup and Operation 5 1 Advanced Energy Before applying ac power to the unit verify that the User Port signals are set as follows e RF PWR ON must be disabled pin 4 must be open or grounded The SETPOINT input pin 5 must be set to zero volts The INTERLOCK pins on the User Port pins 10 and 23 must be connected together maximum contact resistance of 15 Ohms Apply 208 Vac power to the generator and activate the circuit breaker on the RFG 2000 2V Verify that the green AC ON indicator is lit on the generator and that the AC ON status signal is active on the User Port low impedance between pins 24 and 11 All other LED indicators should be extinguished at this time The LEDs on the generator are viewable through the holes provide in the MFA housing e Enable the RF output by applying a 4 30 Vdc signal to pin 4 RF PWR ON Verify that the RF ON indicator lights on the generator and that the RF STATUS signal on the User Port is active low impedance between pins 20 and 7 e Verify that the analog readback signals from the generator are indicating zero watts of forward delivered p
7. pal hia Cea Sas eee ae eee 1 1 Interpreting the Manual Ak kk kk kk kK KK KK KK KI KK KK KK K K K K K K Ree KIKIK KK 1 1 Type Conventions kk kk kk kK KK KK KK KK KK KK KK KK KK KK KK KK kK kk 1 1 IONS SYMDONS ovenoed hiss ode Gus edhe ew 5i an 4 15j 1100 0 AC B jen Menge 8 1 1 Safely a ee ee ee ee eee ee eee 1 3 UIMENOOKS 4 gt 3 sp k ns Sek RA peewee ESS BOSSE A Ai Coe Paes EEE HERON 1 4 Product Safety Compliance kk kk kK kk KK KK KK KK KK KK KK KK KK KK KK 1 5 Directives and Standards 2 242 06stc00044 400es0iehtg eb KK K KK K K KK KK 1 5 Certification i kk kK kk KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK en 1 6 Installation Requirements kk kk kk kk KK KK KK KI KK ee 1 6 Conditions of Use v5 20 01 kk kk kk KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK SS 1 7 Chapter 2 Theory General Description sacres Sn bez kn bi KA E na bra ea E Eae f d ak AI a al Swed 2 1 Chapter 3 Specifications Physical Specifications kk kk kK kK kK KK KK KK KK kK KK KK KK KK KK KK KK KK KK 3 1 Electrical Specifications nannan kK KK KK KK KK KK KK KK KK KK dee teens 3 1 Cooling Specifications kk kk kK KK KK KK KK KK KK KK KK KK KK KK KK KK kk 3 3 Environmental Specifications anaa a kk KK kK KK KK KK KK KK KK KK KK KK KK 3 4 Chapter 4 Controls Indicators and Interfaces User Port 25 Pin Jk kk kk kk kk KK KK KK KK KK KK we KK KK KK KK KK KK KK KK KK kk 4 1 Us
8. to hear the ac contactor relay inside the generator open Verify that the RF ON indicator extinguishes and that there is no RF power being produced by the generator DELV PWR MONITOR signal should go to zero 5 2 Installation Setup and Operation 5705064 C RFG 2000 2V Generator e Close the interlock loop again by reconnecting pins 10 and 23 on the User Port Verify that the RF ON indicator lights and that RF power is once again present reference step 6 e Return the DELV PWR MONITOR signal to zero volts disable the RF output by clearing the RF PWR ON signal pin 4 and then turn off the generator s circuit breaker Connecting Cooling Water A WARNING If you connect the cooling water on multiple units in series be sure that input water temperature to all units is less than the maximum input water temperature WARNING Do not use de ionized water for cooling purposes De ionized water causes both corrosion and erosion of cooling manifolds DANGER Before making any input line power connection turn off circuit breakers supplying input power to the generator 5705064 C Installation Setup and Operation 5 3 Advanced Energy INPUT CONNECTORS 1172 Figure 5 1 Input connector for Option 005 Table 5 1 Pin Descriptions for Option 005 connector Pin Description Number 1 Phase 2 Phase 3 Phase GND Ground Figure 5 2 Input connector
9. 3 1 or less Up to 2000 watts may be supplied into load impedances with a VSWR of 2 1 or less The unit is controlled through a 25 pin analog digital User Port connector with no provision for manual operator control of the unit The RFG 2000 2V requires a 4 wire 3 phase plus ground 208 volt ac input no neutral connection is required The unit is water cooled permitting use in clean room environments The RFG 2000 2V provides connections via the 25 pin user port interface for a single loop through interlock string A contact resistance of less than 15 Ohms between the interlock pins is required to enable the RF output of generator The RFG 2000 2V is configured for direct mounting to an Advanced Energy MultiFunction Adapter MFA or a fixed impedance matching network The RFG 2000 2V or fixed impedance matching network and MFA combination allow the user to mount the entire RF delivery system directly to the chamber eliminating all interconnecting cables and associated signal losses The MFA or fixed impedance match network matches the generator s 50 Q output to the nominal center impedance of the chamber for the given process Using the delivered power capability of the RFG 2000 2V the generator compensates for variations in the actual load impedance by keeping the delivered power to the process constant 5705064 C Theory 2 1 Advanced Energy 2 2 Theory 5705064 C RFG 2000 2V Generator Chapter 3 Specifications
10. 60 mbar to 1060 mbar approximately 3265 m above sea level 15 C Note 1 Non condensing Note 2 Maximum relative humidity when the unit temperature slowly increases or when the unit temperature directly increases from 25 C to 30 C Note 3 Maximum absolute humidity when the unit temperature directly decreases from 70 C to 3 4 Specifications 5705064 C RFG 2000 2V Generator Chapter 4 Controls Indicators and Interfaces USER PORT 25 PIN The 25 pin User port on the RFG 2K 2V provides analog and digital signals for controlling and monitoring the unit This section describes the User port on the RFG 2K 2V It includes the electrical characteristics cabling requirements and pin descriptions for the interface The figures following the pin descriptions show the electrical diagrams for the interface circuitry in the unit User Port 25 pin Electrical Characteristics Table 4 1 describes the signal types used in the RFG 2K 2V Table 4 1 Remote Interface Connector Signal Types Signal Type Description Analog inputs The setpoint signal from the user pin 5 is a 0 to 10 volt signal scaled to represent the desired forward power from the generator refer to the signal description table for details The driver circuit must be capable of operating into a high capacitance load condition cable capacitance plus 1000 pF at the EMI filter in the generator Analog outputs The analog readback
11. L C LR 108911 xx 1154 Do not attempt to install or operate this equipment without proper training Ensure that this unit is properly grounded Ensure that all cables are properly connected Verify that input line voltage and current capacity are within specifications before turning on the power supplies Use proper electrostatic discharge ESD precautions BE CAREFUL AROUND THIS EQUIPMENT INTERLOCKS The RFG 2K 2V generator provides the interlock capabilities listed below This series wired loop is provided to shut down the RF output in the case of an equipment malfunction or improper system configuration A series resistance of less than 15 ohms is required to satisfy the interlock criteria RF connector interlock mounting plate Shuts off or prevents turn on of the RF output power if the RF mating connector cover is not present or is not fully seated on the rear of the unit Generator User Port Interlock These pins may be used to tie the generator s interlock loop to a system interlock string Introduction 5705064 C RFG 2000 2V Generator PRODUCT SAFETY COMPLIANCE Certain options of this unit have been tested for and comply with the following Electromagnetic Compatibility EMC standards Directives and Standards The following tables list the electromagnetic EMC and safety directives and standards Table 1 1 Electromagnetic Compatibility EMC Directives Directive Description 89 336
12. MANUAL RFG 2000 2V Generator 5705064 C February 19 2003 Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins CO 80525 USA m 800 446 9167 E technical support aei com User Manual RFG 2000 2V Generator 5705064 C Aca ADA NOED Advanced Energy COPYRIGHT This manual and the information contained herein is the proprietary property of Advanced Energy Industries Inc No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries Inc Any unauthorized use of this manual or its contents is strictly prohibited Copyright 2003 Advanced Energy Industries Inc All Rights Reserved DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Advanced Energy Industries Inc without prior notice Advanced Energy Industries Inc makes no warranty of any kind whatsoever either expressed or implied with respect to the information contained herein Advanced Energy Industries Inc shall not be liable in damages of whatever kind as a result of the reliance on or use of the information contained herein PRODUCT USAGE STATEMENT A WARNING Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can cause persona
13. Units that are returned without authorization from AE Global Support and that are found to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibration fee and all shipping charges Warranty Statement The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that 6 4 Troubleshooting and Global Support 5705064 C RFG 2000 2V Generator the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are installed started in operation and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all other warranties express or implied unless otherwise agreed to in writing The warranty period is 12 months after the date the goods are shipped from AE In all cases the seller has sole responsibility for determining the cause and nature o
14. anced Energy Table 4 2 User Port Pin Descriptions Continued Signal Pin 6 Related Pin 19 21 Name 24V DC Signal Type Reference Voltage Description This dc voltage may be used for controlling the RF power via pin 4 pin 6 may be tied to pin 4 to enable the RF power The maximum current capacity for this signal is 50 milliamperes The voltage on this pin may vary between 22 and 26 volts 20 RF STATUS Digital Output A low impedance path between these pins indicates that the RF power is present at the output of the generator The interlock loop must be closed and the RF PWR ON signal must be active to enable RF power 19 21 NOT USED Input Pin 8 is not used in this product 22 OVERTEMP Digital Output A low impedance path between these pins indicates that an over temperature condition has been detected by the generator Refer to the troubleshooting section of the user manual for detailed information on this fault condition 10 23 INTERLOCK Input These pins are part of a series interlock string which must be closed to enable ac power in the generator A contact resistance of 15 ohms or less across these pins will close the loop Pin 10 is connected to 30V in the generator via a 5 ampere fuse 24 11 AC ON Digital Output A low impedance path between these two pins indicates that ac power is available within the generator AC powe
15. cal Specifications nnana kk kk kK kK KK KK KK KK KK KI KK KK KK KK KK K KK KK SORE 3 1 Cooling Specifications kk kk kk kK kK KK KK KK KK KK KK KK KK KK KK KK kk k k 3 3 Climatic Specifications kk kk kk kK kK KK KK KK KK KK KK KI KK KK KK KK KK KK KK k 3 4 Remote Interface Connector Signal Types kK kK KK KK KK KK KK KK KK KK 4 1 User Port Pin Descriptions Ak kk kk kk kK kK kK KK KK KK KK KK KK KK KK KK KK KK KK KK k 4 3 Pin Descriptions for Option 005 connector kK KK KK KK KK eee 5 4 Global Support Locations kk kK kK KK KK KK KK KK KK eee 6 2 5705064 C List of Tables xiii Advanced Energy xiv List of Tables 5705064 C RFG 2000 2V Generator Chapter 1 Introduction READ THIS SECTION To ensure safe operation read and understand this manual before attempting to install or operate this unit At a minimum read the safety instructions and follow the safety practices under the heading Safety on page 1 3 INTERPRETING THE MANUAL The following sections explain the type conventions icons and symbols that appear in this manual Type Conventions To quickly identify certain words and phrases in type that differ from the rest of the text please note the following type conventions e Pin and signal names appear in capitalized italics DUTY CYCLE A Technical terms appear in italicized text when first introduced Unit labels switches indi
16. cators etc generally appear in boldface letters as they are labeled on the unit MODIFY Commands 162 and command names setpoint appear in boldface lowercase letters Icons Symbols This symbol represents important notes concerning potential harm to N people this unit or associated equipment Advanced Energy includes this symbol in Danger Warning and Caution boxes to identify specific levels of hazard seriousness A DANGER This box identifies hazards that could result in severe personal injury or death 5705064 C Introduction 1 1 Advanced Energy WARNING This box identifies hazards or unsafe practices that could result in personal injury A CAUTION This box identifies hazards or unsafe practices that could result in product or property damage The following symbols may appear on labels on the unit 1 2 Introduction 5705064 C RFG 2000 2V Generator SAFETY Hazardous voltage Short circuit protected High voltage Protective Earth ground Earth ground CE label Non ionizing radiation HAZARDOUS VOLTAGE Risk of death or bodily injury Disconnect all sources of input power before working on this unit or anything connected to it 1332 2 a gt 3 Y 1029 RE 1069 AN N 1020 gt 1030 5705064 C Introduction 1 3 Advanced Energy Hot surface 1309 Warning refer to manual NRTL 1027 NRT
17. ce in an overvoltage category III or better installation e Install and operate this device only in a pollution degree 3 or better environment which means an indoor location such as a factory floor where conductive pollution or non conductive pollution occurs and becomes conductive due to condensation which is to be expected e Bolt this device to the floor to prevent toppling To prevent against condensation install and operate this device with an external water solenoid valve so that water flow is interrupted when the device is not operating e Install and operate this device with an external water solenoid valve Connect the solenoid control wires to the water leak detect signal from this device as described in the Installation section of this User manual e Install this device so that it is fully enclosed by a rack or other enclosure The rack or enclosure must be metal and either reinforced or of sufficient thickness to resist the following tests 4 A steady force of 445 N applied through a steel hemisphere 12 7 mm in diameter and 5705064 C Introduction 1 7 Advanced Energy 4 An impact of 7 J applied by dropping or swinging a 0 53 kg 50 mm diameter steel sphere Note Following the tests there must still be a minimum clearance of 12 7 mm between the rack or enclosure and the power supply There shall be no deformation of the power supply Install and operate this device with an approved isolation transf
18. ced Energy for assistance A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Checks With the Power Off 1 Ensure the power to the unit is off 2 Check for visible damage to the unit cables and connectors 3 Ensure all unit connectors are installed correctly and are fastened tightly 4 Check to determine whether any system related circuit breakers have been tripped 5 Ensure there is input power to the unit and ensure the input power meets specifications 6 Ensure ground connections are adequate and secure Checks With the Power On 1 Check the unit s input and remote power connections to ensure the proper power is being supplied to the unit 2 Check the LEDs on all units to determine that the proper ones are lit 5705064 C Troubleshooting and Global Support 6 1 Advanced Energy AE WORLD WIDE WEB SITE For additional product information and troubleshooting procedures consult Advanced Energy s World Wide Web site e http www advanced energy com AE GLOBAL SUPPORT Please contact one of the following offices if you have questions part number These numbers are available on unit labels Table 6 1 Global Support Locations Note When calling AE Global Support make sure to have the unit serial number and Office AE World Headquarters 1625 Sharp Point Drive Fort Collins CO 80525 USA Note
19. damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must Be made within the applicable warranty period e Include the product serial number and a full description of the circumstances giving rise to the claim Have been assigned a return material authorization number see below by AE Global Support All warranty work will be performed at an authorized AE service center see list of contacts at the beginning of this chapter You are responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized AE service center AE will return the repaired unit freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the unit either you or AE is responsible for properly packaging and adequately insuring the unit Authorized Returns Before returning any product for repair and or adjustment call AE Global Support and discuss the problem with them Be prepared to give them the model number and serial number of the unit as well as the reason for the proposed return This consultation call will allow Global Support to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge
20. er Port 25 pin Electrical Characteristics kk kK KK RR KK 4 1 User Port 25 pin Interface Cabling Requirements 4 2 User Port 25 pin Pin Descriptions KK KK KK KK KK KK KK eee 4 3 User Port Interface Schematics KK KK cee eee 4 5 Side VIEW sacaxe hen dd ied aU XH A WR SLRS Ged i KE REO Ay Wi dln RES HOA RS 4 8 Side ViOW 24002cue sees peek ee orate hee a r de 4 9 Chapter 5 Installation Setup and Operation UNPACKING a 4 acerca dada Dees ta Seb dj di y W dk kk dah ck d Wi Qa di Gees AR 5 1 Grounding S n m mm m 5 1 Rasan Reape ee eee were i a E aa E a E a gg A 5 1 5705064 C Table of Contents vii Advanced Energy Connecting Cooling Water 0 c eee 5 3 Input Connectors toc sce sce chew ete KK KK KK kK KK KK KK KK kK KK kK KK kK kK Rae ase 5 4 Connecting I O and Auxiliary Connectors 00000 e ee eee 5 5 Chapter 6 Troubleshooting and Global Support Before Calling AE Global Support kK KK KK KK KK KK KK KK KK KK KK KK 6 1 Checks With the Power Off JA kk KK KK KK KK KK KK KK KK KK KK KK KK IK 6 1 Checks With the Power On Ju kK kK KK KK KK KK KK KK KK KK KK KK KK IK 6 1 AE World Wide Web Site A kk kk kK KK kK KK KK KK KK eee 6 2 AE Global SUDDOT gt sn coe a eee bet 4 815 eet we 2 4 3 4252 erst eens 6 2 Returning Units for Repair kk kk kk kk KK KK KK KK eee 6 3 Wel 22 a a a a 6 4 Authorized R
21. ergy Industries Inc DeviceNet is a trademark of Open Vendor Association Inc Boca Raton FI Electra Endura E Wave is a trademark of Advanced Energy Industries Inc FixedMatch is a registered trademark of Advanced Energy Industries Inc FTMS is a trademark of Advanced Energy Industries Inc Ford Ford Motor Company GenCal is a trademark of Advanced Energy Industries Inc Hercules is a trademark of Advanced Energy Industries Inc IBM Intel Matchless is a registered trademark of Advanced Energy Industries Inc Mercury is a trademark of Advanced Energy Industries Inc Microsoft is a registered trademark of Microsoft Corporation Microsweep is a registered trademark of Advanced Energy Industries Inc Motorola MRC not Materials Research Society Navigator Netscape and Netscape Navigator are registered trademarks of Netscape Communications Corporation OCLI not Optical Coating Laboratory Inc Optima Pinnacle is a trademark of Advanced Energy Industries Inc Power View is a trademark of Advanced Energy Industries Inc RFEP is a trademark of Advanced Energy Industries Inc RFMS is a trademark of Advanced Energy Industries Inc RF Suite is a trademark of Advanced Energy Industries Inc Smith The Smith chart shown is produced under a copyright license from Analog Instruments Company New Providence New Jersey 07974 Sparc is a registered trade
22. eturns kk kk kk kk kK KK KK KK KK KK KK KK KK KOK KK KK KK KK 8 6 4 Warranty Statement kk kk kK kK KK KK KK KK KK KK KK KK KK KI KK KK IK KK 6 4 viii Table of Contents 5705064 C RFG 2000 2V Generator 5705064 C Table of Contents Advanced Energy x Table of Contents 5705064 C RFG 2000 2V Generator List of Figures User port connector kk kk kk kK kK KK kk KK kk kk kk kk lk kk kk kk kk kk kk kk kk 4 2 Bide VIEW sarirane karera a eaaa E need ake atest ena ee eee ask tae eee tee 4 8 Bide Saw cece pieces setae e tee esaeaee Led Goos cede teens se costae 4 9 Input connector for Option 005 kk kk kk KK KK KK KK KK ee 5 4 Input connector for Option 007 kk kk kk KK KK KK KK KK eee 5 4 5705064 C List of Figures xi Advanced Energy xii List of Figures 5705064 C RFG 2000 2V Generator List of Tables Electromagnetic Compatibility EMC Directives KK KRE KK KK eee 1 5 Electromagnetic Compatibility EMC Standards 0 RR KK KK KK 1 5 Safety DiIr G lV Sis 2s c d s mesta pinha a Q la e ay 3 Ada ah n a w ul e t n 1 5 Safety StandardS a wis ars kk kk kk kk KK KK KK KK KK KK KK KK KK KK KK Ae KK KK kK kk k 1 6 SEMI Guidelines k kk kk kK kK kK KK KK kK KK KK KK KK KK KK KK KK KK KK KK KK KK 1 6 Physical Specifications naana kk kk kk kK KK KK KK KK KK KK KK KK KK KK KK kK kk kk 3 1 Electri
23. f the failure and the seller s determination with regard thereto shall be final 5705064 C Troubleshooting and Global Support 6 5 Advanced Energy 6 6 Troubleshooting and Global Support 5705064 C RFG 2000 2V Generator A ac input power see input power AE World Wide Web site 6 2 authorized returns 6 4 C cables see also connectors specifications 3 1 User port 25 pin requirements 4 2 CE marking 1 6 certification 1 6 climatic specifications 3 4 conditions of use 1 7 connecting cables 3 1 cooling water 5 3 connecting I O and auxiliary connectors 5 5 connectors input power specifications output connector specifications 3 1 specifications 3 1 User port 25 pin 4 1 see also User port 25 pin coolant connecting 5 3 contaminates specifications 3 3 flow rate specifications 3 3 pressure specifications 3 3 temperature specifications 3 3 cooling specifications 3 3 current line current specifications 3 1 customer service see global support D description general 2 1 diagrams see illustrations directives 73 23 EEC 1 5 89 336 EEC 1 5 drawings see illustrations Index E electrical characteristics User port 25 pin 4 1 electrical specifications 3 1 electromagnetic compatability EMC directives and standards 1 5 electromagnetic compatibility EMC certification 1 6 EMC see electromagnetic compatibility environmental specifications 3 4 F frequency output specifications 3 2 source specificati
24. for Option 007 5 4 Installation Setup and Operation 5705064 C RFG 2000 2V Generator Connecting I O and Auxiliary Connectors A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it A WARNING Do not connect any power to this unit without first connecting cooling water and ensuring there are no leaks Connect and secure all interface connectors as well as any auxiliary connectors Note Either cable connectors or interlock covers must be installed to allow the generator to operate 5705064 C Installation Setup and Operation 5 5 Advanced Energy 5 6 Installation Setup and Operation 5705064 C RFG 2000 2V Generator Chapter 6 Troubleshooting and Global Support BEFORE CALLING AE GLOBAL SUPPORT The RFG 2000 2V is designed for direct mounting to the plasma chamber using a MultiFunction Adapter fixed impedance matching network This integrated RF delivery system is intended for operation on the system and does not easily accommodate component level testing off the system If a problem arises with the RF delivery system refer to the Operating Overview section in this manual for a sequence of tests that can be performed while the components are installed on the chamber If these tests do not help in isolating the cause of the problem refer to the system tests provided by the equipment manufacturer or contact Advan
25. his device must be installed and used only in compliance with the directives and standards listed in addition to VDE 0113 EN 60204 IEC 204 and applicable requirements Certification Certain options of this product are certified by e CE marking self addressed by AE Compliance Engineering e EMC measurements verified by T V Product Services For more information refer to the letter of conformance US or declaration of conformity EU accompanying the product Installation Requirements Install this unit according to the following requirements 1 6 Introduction 5705064 C RFG 2000 2V Generator WARNING Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Conditions of Use To be in compliance with the stated directives and standards you must meet the following conditions of use Before making any other connection to this device connect the auxiliary Protective Earth ground terminal to a local earth ground with a copper wire that is sized according to the applicable requirements e Install and operate this devi
26. ified all analog signals are 0 to 10 V while all digital signals are 5 to 24 V opto coupled open collector signals with return lines non referenced to ground Table 4 2 provides the connector pin descriptions for the User port interface Table 4 2 User Port Pin Descriptions Signal Pin 14 Related Pin 1 Name SETPOINT STATUS Signal Type Digital output Description When RF power is enabled a high impedance path between these pins indicates the generator is at setpoint 15 RFL PWR Analog output This 0 to 10V signal represents the reflected power as measured at the output of the generator This signal is scaled to represent 0 to 2000 watts Note Pin 15 must be grounded 16 DEL PWR MONITOR Analog output This 0 to 10V signal provides a linearly scaled readback of forward power when the RFG 2K 2V is operated in forward power regulation mode or the load power when operated in the load power regulation mode 1 V 1000 W Note Pin 16 must be grounded 17 RF PWR ON Digital input When a positive voltage of between 4 and 30 V is applied to this pin the RF output is enabled A voltage of 1 5 Vdc or less disables the RF output 18 SETPOINT Analog Input This 0 10V signal defines the desired setpoint for the generator s RF output It is scaled to represent 0 2000 watts 5705064 C Controls Indicators and Interfaces 4 3 Adv
27. in AC line voltage at full rated power RF output specifications Output frequency 13 56 MHz 0 005 Full rated output power 2000 watts nominal into loads of 2 1 VSWR 1500 watts nominal into loads of 3 1 VSWR See Graphic Below Output Power Range 30 watts to 2000watts Power Regulation 1 or 3 watts of setpoint whichever is greater into a 50 ohm resistive load 2 5 or 3 watts of setpoint whichever is greater into 3 1 VSWR load into low 17 ohms and high 150 ohms resistance non reactive loads Load Impedance Range Up to a 3 1 VSWR circle centered at 50 ohms real Harmonics 50 dBc at full rated power into 50 ohms Spurious Signals 45 dBc at full rated power into 50 ohms Transient Response Less than 0 1 change in output power for a 10 step change in the AC line voltage RFG 2000 2V Power Derating 2500 l Maximum Power 180 Degree Phase Angle 2000 1500 1000 Guaranteed Power 500 All Phase Angles 0 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 1 Delivered Power Watts Magnitude of the Reflection Coefficient 3 2 Specifications 5705064 C RFG 2000 2V Generator COOLING SPECIFICATIONS Table 3 3 describes the cooling specifications of the generator A WARNING Do not use de ionized water for cooling purposes De ionized water causes both corrosion and erosion of cooling manifolds Table 3 3 Co
28. l injury and or property damage If the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Advanced Energy Industries Inc AE provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high current radio frequency RF energy NEVER DEFEAT INTERLOCKS OR GROUNDS 1 iv 5705064 C RFG 2000 2V Generator TRADEMARKS ADVANCED is a registered trademark of Advanced Energy Industries Inc ENERGY Advanced Energy is a registered trademark of Advanced Energy Industries Inc AE is a registered trademark of Advanced Energy Industries Inc Apex is a trademark of Advanced Energy Industries Inc Aspect is a trademark of Advanced Energy Industries Inc Applied Materials Arc Check is a trademark of Advanced Energy Industries Inc Arc Out is a trademark of Advanced Energy Industries Inc Astral is a trademark of Advanced Energy Industries Inc Atlas is a trademark of Advanced Energy Industries Inc Automatch Centura Centura HDP Crystal is a trademark of Advanced En
29. mark of Advanced Energy Industries Inc 5705064 C Advanced Energy Sparc le is a registered trademark of Advanced Energy Industries Inc Sparc vs is a trademark of Advanced Energy Industries Inc SQ is a trademark of Tru Match Connector Corporation Peabody MA SQS is a trademark of Tru Match Connector Corporation Peabody MA Starburst is a trademark of Advanced Energy Industries Inc SWAMI is a trademark of Advanced Energy Industries Inc SwitchMatch is a trademark of Advanced Energy Industries Inc Teflon is a registered trademark of E I du Pont de Nemours and Company Windows is a registered trademark of the Microsoft Corporation Windows NT is a registered trademark of the Microsoft Corporation Z Scan is a trademark of Advanced Energy Industries Inc Z Ware is a trademark of Advanced Energy Industries Inc 3Com CUSTOMER FEEDBACK Advanced Energy s technical writing staff has carefully developed this manual using research based document design principles However improvement is ongoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this user manual to e tech writing aei com To order a manual please contact Technical Support e technical support aei com 1 vi 5705064 C RFG 2000 2V Generator Table of Contents Chapter 1 Introduction Read This Section css states ete eee
30. nterfaces 5705064 C RFG 2000 2V Generator Signal W k BRA 1000 pF Return lt 1 17 2302 Typical Digital Input 5V 1K j lt VVV 6 5 Signal 12 14 20 22 or 24 lt a4 2 1000 pF 4N37 2 Return gt 25 1 7 9 or 11 2303 Interlock Circuit 5705064 C Controls Indicators and Interfaces Advanced Energy SIDE VIEW Figure 4 2 shows the side view of the RFG 2K 2V for water connections and user port connection I O Water Out top Water In bottom fom Patent 5187580 O Other Patents Pending O Figure 4 2 Side view 1408 4 8 Controls Indicators and Interfaces 5705064 C RFG 2000 2V Generator SIDE VIEW Figure 4 3 shows the opposite side view of the RFG 2K 2V for input connections that need to be made for operation Cl O o J amp A O l o Dq ja ADVANCED IE ENERGY MODEL RFG 2000 2V O 3 PE 208 V 50 60 Hz 5 kW O O O Input O QO U 1409 Figure 4 3 Side view 5705064 C Controls Indicators and Interfaces 4 9 Advanced Energy 4 10 Controls Indicators and Interfaces 5705064 C RFG 2000 2V Generator Chapter 5 Installation Setup and Operation Unpacking Unpack and inspect the unit ca
31. ock The interlock signals pins 10 and 23 provide the dc power to close the ac contactor in the generator Pin 10 is tied to the generator s 30V supply via a 5 ampere fuse Pin 23 is series wired with the interlock switch on the RF output connector and then ties to the contactor coil driver circuit Connecting pin 10 to pin 23 closes the contactor enabling ac power to the RF circuits assuming that an RF output cable is properly installed User Port 25 pin Interface Cabling Requirements The cable used to connect the RFG 2K 2V s 25 pin User port to the system controller must be a shielded 25 wire I O cable Twisted pair wiring may be used but is not mandatory Signal losses should be minimized by keeping the cable length as short as possible The maximum recommended cable length between the RFG 2K 2V and the controller is 10 meters 33 To minimize interference from adjacent electrical equipment the EMI shield in the cable must be terminated to the metal shells of the cable s connectors Additionally the chassis of the RFG 2K 2V must be tied to a local earth ground through an adequately sized copper grounding strap Pin 1 OOOOOOOO00000 OOOOO0O000000 1045 Figure 4 1 User port connector 4 2 Controls Indicators and Interfaces 5705064 C RFG 2000 2V Generator User Port 25 pin Pin Descriptions The User port has a 25 pin shielded female subminiature D connector Unless otherwise spec
32. oling Specifications Description Specification Cooling medium Water Temperature 5 C to 27 C 41 F to 81 F inlet temperature Flow rate 7 57 lpm 2 gpm Pressure Maximum pressure 6 9 Bar 100 psi maximum inlet pressure rating Contaminates The following specifications are recommended for the water used to cool the generator pH between 7 and 9 e Total chlorine lt 20 ppm e Total nitrate lt 10 ppm e Total sulfate lt 100 ppm e Total dissolved solids lt 250 ppm e Total hardness expressed as calcium carbonate equivalent less than 250 ppm e Specific resistivity of 2500 cm or higher at 25 C e Total dissolved solids TDS as estimated by the following TDS lt 640 000 specific resistivity Q cm 5705064 C Specifications 3 3 Advanced Energy ENVIRONMENTAL SPECIFICATIONS Table 3 4 Climatic Specifications Temperature Relative Humidity Air Pressure Operating Class 3K3 Class 3K2 Class 3K3 5 C to 40 C 10 to 85 Note 1 80 kPa to 106 kPa 41 F to 104 F 2 g m to 25 g m 800 mbar to 1060 mbar approximately 2000 m above sea level Storage Class 1K4 Class 1K3 Class 1K4 25 C to 55 C 5 to 95 80 kPa to 106 kPa 13 F to 131 F 1 g m to 29 g m 800 mbar to 1060 mbar approximately 2000 m above sea level Transportation Class 2K3 Class 2K3 Class 2K3 25 C to 70 C 959Note 2 66 kPa to 106 kPa 13 F to 158 F 60 g m Note 3 6
33. ons 3 1 full rated output power specifications 3 2 G general description 2 1 global support 6 2 before calling 6 1 contact information 6 2 graphics see illustrations grounding 5 1 icons in user manual 1 1 on unit 1 2 illustrations front view 4 8 rear view 4 9 User port 25 pin connector 4 2 input connector pin description 5 4 input connector for option 005 5 4 input connector for option 007 5 4 input power specifications 3 1 installation safety requirements 1 6 safety warning 1 7 5705064 C Index i Advanced Energy L line current specifications 3 1 line voltage specifications 3 1 M manual see user manual marking CE 1 6 O output connector specifications 3 1 output frequency specifications 3 2 overcurrent protection specifications 3 2 P photos see illustrations physical specifications 3 1 pin descriptions input connector 5 4 User port 25 pin 4 3 ports see connectors power full rated output 3 2 input specifications 3 1 R repair 6 3 returning units for repair 6 3 returns authorized 6 4 returning units for repair 6 3 warranty statement 6 4 RF output specifications 3 2 rf output connector see output connector see also standards size 3 1 source frequency specifications 3 1 spacing requirements 5 3 specifications cable 3 1 climatic 3 4 connectors 3 1 coolant contaminates 3 3 coolant flow rate 3 3 coolant pressure 3 3 coolant temperature 3 3 cooling 3
34. ormer on the ac input If this device does not have a circuit breaker you must install and operate it with a 15A max circuit breaker switch on the ac input The circuit breaker switch must be easily accessible and near the device You must install and operate this device with a disconnect switch that conforms to the applicable requirements The switch must be easily accessible and near the device Use only a shielded cable on the input power connector Use only a shielded power cable on the output power connector Use only shielded cables on the Host RS 232 and User analog control port connectors Install this device so that the input power connection is inaccessible to the user Install this device so that the output power connection is inaccessible to the user Install the ac line cord so that it is fixed The ac cord must be terminated according to the applicable requirements Introduction 5705064 C RFG 2000 2V Generator Chapter 2 Theory GENERAL DESCRIPTION This document describes the Advanced Energy Industries Inc AE model RFG 2000 2V plasma generator The RFG 2000 2V is a CE Marked 13 56 MHz RF generator designed specifically for use with an AE fixed impedance matching network The unit regulates its output power based on the delivered power forward power minus reflected power as measured at the generator s output The unit is designed to provide up to 1500 watts into load impedances with a VSWR of
35. ower pin 3 and zero watts of reflected power pin 2 The voltages on these pins should not exceed 0 010 volts when the requested setpoint pin 5 is zero e Increase the SETPOINT signal pin 5 to 1 0 volts equivalent to 200 watts of RF power Verify that the DELV PWR MONITOR signal pin 3 indicates the existence of RF power and that no error conditions are reported check the LED indicators as well as the status signals on the User Port If the generator is being operated into a near 50 Ohm resistive load the DELV PWR MONITOR signal should track the setpoint signal within 10 millivolts and the REFL PWR MONITOR signal pin 2 should remain essentially at zero e Continue to increase the SETPOINT signal while verifying that no error conditions are reported and that the DELV PWR MONITOR signal tracks the setpoint value The maximum allowable setpoint voltage is 10 volts representing a full scale RF output of 2000 watts e Temporarily inhibit the RF output by clearing the RF PWR ON signal pin 4 Verify that the RF ON indicator extinguishes the RF STATUS signal pins 20 and 7 goes inactive and the RF output power goes to zero as measured at the readback signal pin 3 Re enable the RF output by activating the RF PWR ON signal pin 4 The generator should return to the conditions defined in step 6 above Temporarily open the interlock loop by removing the contact closure between pins 10 and 23 on the User Port You should be able
36. r cannot be enabled unless the interlock loop is closed 12 25 RESERVED N A Reserved for future use 4 4 Controls Indicators and Interfaces 5705064 C RFG 2000 2V Generator Table 4 2 User Port Pin Descriptions Continued Signal Related Name Signal Description Pin Pin Type 13 19 21 15V DC Reference This dc voltage has a maximum Voltage current capacity of 50 milliamperes This signal can be used for controlling RF power pin 13 can be jumpered to pin 4 The voltage on this pin may vary between 13 16 volts 19 21 N A GROUND Ground These two pins are referenced to Reference the signal and chassis grounds in the generator USER PORT INTERFACE SCHEMATICS 10 K 10K v 6 j OP200GP 7 Signal eT 10 K z Return 2298 vv gt 15 or 16 10 K 100 pF V Typical Analog Output read backs 5705064 C Controls Indicators and Interfaces 4 5 Advanced Energy 100 K 100 K Return s gt V 1000 pF AD708 V 5 Signal z 100 K 1000 pF V S100 K Typical Analog Input setpoint JW1EN DC24V 5 1 2299 RF Connector Interlock Switch 3 2 2 Interlock Q 4 1N4148 3 1 1000 pF 5A lt 4 gt 10 To contactor coils 30 V Interlock 2300 Interlock Circuit 15V 24 V A 24 V 6 1A 1000 pF 2301 DC Reference Voltages 4 6 Controls Indicators and I
37. refully Inspect the unit looking for obvious physical damage If no damage is apparent proceed with the installation If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately see AE Global Support on page 6 2 Save the shipping container for submitting necessary claims to the carrier Grounding WARNING Do not attempt to turn on power until the generator is grounded The unit provides two threaded grounding holes one is a metric A 6 the other is a 5 16 x 18 US A suitable chassis ground connection made to either of these holes prevents or minimizes radio frequency interference INSTALLING After the generator is properly installed on the system and all power interface and cooling water connections have been verified the following series of tests can be performed to verify proper operation of the unit If at any point during this test sequence the generator does not perform as specified an attempt should be made to identify and resolve the problem If the problem cannot be resolved contact AE Customer Service for assistance The RFG 2000 2V is designed for direct mounting to an Advanced Energy Multi Functional Adapter MFA or fixed impedance matching network In this configuration the 50 Ohm output of the generator is not directly accessible AE provides a test instrument known as a Counter Match or a fixed match network that may be attached to the chamber for
38. signals from the generator pins 2 and 3 are driven by precision low offset operational amplifiers industry type OP200GP These devices are capable of driving high capacitance loads such as those expected in shielded interface applications The user s receiver must present a 10k ohm or greater impedance to these signals The readback signals which represent the forward and reflected power as measured at the output of the generator are scaled as defined in the signal description table above 5705064 C Controls Indicators and Interfaces 4 1 Advanced Energy Table 4 1 Remote Interface Connector Signal Types Continued Signal Type Digital outputs Description The status signals provided by the generator pins 14 20 22 24 and 12 are opto coupled with NPN transistor outputs industry type 4N37 The collector and emitter of each transistor are provided to the user interface Each transistor can provide a minimum of 8 milliamperes of collector current and may be operated with a collector to emitter voltage of up to 30 volts Refer to the attached signal description table for signal definitions Digital Inputs The RF PWR ON control signal pin 4 and the PWR REG MODE signal pin 8 are opto coupled industry type 4N37 The user s signal drives the LED in the opto coupler through a 510 Ohm resistor A signal level of 4 volts to 30 volts applied to the input pin activates the signal Interl
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