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Agilent 4UHV Ion Pump Controller

1. 68 104 Agilent AUHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Pin 14 CH2 NC Set point Relay 4 CH Common Relay Pin16 CH2NOSetpointRelay 3 Input E HB ONO _ I Pin 25 CH3 step Pin22 Digital Gad 050594000 INS Tee e m 572 IM MR _ LN TL Digital Output 000000000000 a 2 Pin36 CH3 Common Relay 2 24 Input I Pin27 _ CHA protect 000000000 Pin28 CH4 step mE le Analog Qutput Amalog Pin3 _ Analog Gnd _ Digital Output 00000 000 i MEN 20 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 69 104 5 Technical Information gt CN CN M 78S gt T_T O Fr 2j Q 2 5 ac Lul Q Lul ar O LAT 1X10 al 1X10 1X10 1X10 PRESSURE Torr Figure 13 Recorder Output Pressure Analog remote vs Pressure 5 0 Analog remote Volt 3 0 20 E A TA 0 0 4l 1 0E 12 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 Pressure kPa
2. Figure 14 Analog remote vs Pressure kPa 70 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Analog remote vs Pressure Analog remote Volt 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0 05 1 0 04 Pressure mbar Figure 15 Analog remote vs Pressure mbar Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 71 104 5 Technical Information Connection of Input remote In order to activate the inputs remote CH on off Ch protect CH Step connect the pins as following 5 Customer device s Controller Figure 16 Input 72 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Technical Information 5 Serial The following figure shows the 4UHV interconnections Figure 17 4UHV interconnections This is a 9 pin D type serial input output connector that allows the to be controlled via an RS232 or RS485 connection Table 5 PIN No Signal Name 1 5 V OUT mms OO E 5 em 2220 RS485 80 85485 Reserved Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 73 104 5 Technical Information Connector Exam
3. _ 97 104 Agilent lon Pump Controller User Manual 87 900 137 01 5 Technical Information Orderable Parts Part Description Controllers 00 0 929 9010 4UHV with 1 channel 200W Negative 929 501 AUHV with 1 channel 200W Positive 02 3 929 9020 AUHV with 2 channels 200W Negative 929 9021 _ AUHV with 2 channels 200W Positive 929 9100 AUHV with 1 channel 120W Negative 1 E 929 9101 4UHV with 1 channel 120W Positive 3 929 9200 7 AUHV with 2 channels 80W Negative E 929 9201 4UHV with 2 channels 80W Positive _ 929 9400 _ with 4 channels 80W Negative E 929 3401 4UHV with 4 channels 80W Positive 929 9210 with 2 channels 80W Negative 1 channel 200W Negative 02 929 9211 with 2 channels 80W Positive 1 channel 200W Positive 929 9022 AUHV with 1 channel 200W Positive A 1 channel 200W Negative 929 9402 with 2 channels 80W Positive eee 2 channels 80W Negative 0 929 9212 with 2 channels 80W Positive ne 1 channel 200W Negative 929 9213 with 2 channels 80W Negative 1 channel 200W Positive 02524 HV Cables 0 nn n 929 0705 HV bakeable cable radiation resistant 4 meter 02 929 0707 HV bakeable cable radiation resistant meter E 929 0708 7 cable radiation resistant
4. FAN 0 200 C HV1 0 200 C __ _ _ LEURS 803 A Interlock Status see below 44 R Status SetPoint eeebelow 808 R N Temperature 809 N Temperature 00000000000 AE Li Ma a EN ee rs step 100 V ORA I measured CHI NEMO SEA E a Pressure CHI 820 measured CH2 0 10000 EE step 100 V 1 RA measured 1E 10 9E 1 A Pressure OR A Li E oum Ph eee step 100 V E C MEN NM ni 220 E NNNM 2 step 100 V CS E Pressure CHA 80 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Technical Information 5 Example Turn ON Channel 1 PC gt Controller fo wo s ale Controller gt PC so Io slo Turn OFF Channel 1 PC Controller m m w eee Controller gt PC so e Jule Read Pressure win 812 Channel 1 PC Controller 38 31 32 30 38 38 srx aonn wnoow Controller gt m 32 20 20 20 2e 36 a5 86 Data 1 5E 8 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 81 104 5 Technical Information Read Voltage win 810 Channel 1 PC gt Controller fo m
5. Local remote Z0 _ F0 Protect CO 2 w 0 power JO 12 Iprotect KO HV ON OFF 0 I E se rr 111 14 V meas 0 16 meas U0 LN a 10 19 Error status 70 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Hex bAh 30h 0 7Ah 30h 89 104 5 Technical Information Table 14 Interlock Status Coding Bit Field Interlock Coding active if 1 01h HV3 Cable Interlock 04h Reserved 08h HV1 Cable Interlock 10h HV4 Cable Interlock 20h Reserved Value Error Status Coding active if 1 33h Cable Interlock 36h Excess temperature 38h FAN Error 90 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Technical Information 5 Display and Menus Switching on the unit the initial screen that appears is as follows Figure 20 Afterwards a screen of the following type appears which displays for each channel the name of the ion pump selected Figure 21 Displaying Channel Related Information The display can be configured easily to display different information depending on the needs of the customer Information on All Channels The voltage on all the four channels can be displayed simultaneously or the current of all four channels or the pressure To do this press the V I P key the following screens appear cyclically Agilent 4UHV lon Pump Controller User Man
6. ela snx wmoow Lao en om Controller gt PC m a ala Data 3000 Read Current win 811 Channel 1 PC Controller Foo m lue ADDA winoow Ro em Controller gt PC m feo 20 20 20 32 2 39 45 20 30 35 19 45 33 Data 2 9E 5 Operating mode Win 601 Autostart ON PC gt Controller v 80 36 31 30_ 30 0 30 30 30 30 30 30 31 03 38 34 snx aor woow wa om Jen om Controller gt PC so Ju o Jule Autostart OFF PC gt Controller v 80 36 30 31 31_ 30 30 30 30 30 30 30 30 30 03 38 35 82 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 5 Controller gt PC STX ACK CRC Protect Win 602 PC Controller m m 38 32 38 37 Wmbow Ro nc om c N Controller gt o s 36 30 32 30 30 30 30 30 30 30 30 31 30 30 03 38 36 Fixed Step 603 PC gt Controller 02 80 36 30 33 30 38 36 sr wow noen om Controller gt PC 36 30 33 30 30 30 30 30 30 30 30 30 30 31 03 38 37 aom wow ww om cr Status Set Point 804 PC Controller Foa m o us snx ADDA wmoow ao en Controller gt
7. 10 meter 929 0709 HV bakeable cable radiation resistant 20 meter 98 104 Agilent AUHV lon Pump Controller User Manual 87 900 137 01 A gt Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Q
8. PC 80 38 30 34 30 30 30 30 30 30 30 30 30 31 03 38 45 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 83 104 5 Technical Information Error Description Controller errors can be displayed in two windows WIN 505 where the user writes the channel whose error is to be viewed WIN 206 where the controller shows the error code of the channel written in window 505 If the value 0 is written in window 505 the errors of all the channels remain displayed in window 206 Table 9 WIN 505 value Channel 0 All channels Error Code The error code is displayed in decimal format Binary representation of this number provides indications regarding the type of error that has occurred The error table is shown below Table 10 Error code in decimal Binary Description format 0 0000000000000 No error en 1 0000000000001 FAN error 2 0000000000010 Power input error from HV 8 0000000001000 Overtemp PFC 16 0000000010000 Error communication CPU HV r V 84 104 Agilent AUHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Error code in decimal Binary Description format 32 0000000100000 Interlock cable 64 0000001000000 OvertempHV T 2000010000000 Protet 256 0000100000000 Measuremente
9. Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met WARNING notice denotes hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond WARNING notice until the indicated conditions are fully understood and met Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 4UHV lon Pump Controller lon Pump Controller Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 3 104 lon Pump Controller 4 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Contents Contents 1 Istruzioni per l uso 7 Informazioni Generali 8 Immagazzinamento 9 Preparazione per l installazione 10 Installazione 11 Uso 13 Manutenzione 18 2 Gebrauchsanleitung 19 Allgemeines 20 Lagerung 21 Vor der Installation 22 Installation 23 Gebrauch 25 Wartung 30 3 Mode d emploi 31 Indications Generales 32 Emmagasinage 33 Preparation pour l installation 34 Installation 35 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 5 104 Contents 6 104 D Utilisatio
10. rieur de l armoire m me voir tableau des pi ces d tach es Le panneau frontal du contr leur n est pas pr vu pour supporter le poids de l unit Ne pas installer ou utiliser le contr leur dans des milieux expos s aux agents atmosph riques pluie neige glace En pr sence de poussi re de gaz corrosifs ou dans des milieux explosifs ou fort risque d inflammabilit Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 35 104 3 Mode d emploi ATTENTION ATTENTION 36 104 Le contr leur 4UHV appartient a la seconde cat gorie d installation ou surtension pr vue par la norme EN 61010 1 II est donc n cessaire de brancher le dispositif une ligne d alimentation qui soit adapt e cette cat gorie d appareils Le contr leur 4UHV dispose de connecteurs pour entr es sorties et pour la communication en s rie qui doivent tre branch s des circuits externes de facon ce qu aucune des parties sous tension ne soitaccessible Veiller ce que le syst me d isolation du dispositif branch au contr leur 4UHV soit adapt m me en cas de pannes individuelles et ce tel que pr vu par la norme EN 61010 1 Si le contr leur est install dans une armoire enlever les quatre pieds de mani re ce qu il soit plac avec au moins 30 mm d espace en haut et en bas Dans quelques rares cas de panne il est possible que le contr leur d gage de la fum e Si l unit est utilis e dans des enviro
11. 01 A 87 104 5 Technical Information The commands have a read and a write mode By specifying the type of read operation being performed the Host queries the Splitter Box that in turn replies in a format that is compliant with the command sent As long as a write operation can be carried out the write and read formats for the same command coincide Host to Dual controller command format header command length command channel data checksum Dual controller to Host reply format header response length command channel data checksum Table 12 Field No Value Description of Bytes Header 1 81h Header for the RS232 and RS422 serial command 81h A0h Header and address for the RS485 129 160 serial Header 01h Header for the serial RS232 RS422 response 01h 20h Header and address for the RS485 serial Length 2 Data packet length in BCD command channel data fields only Command See description of commands byte 0 command byte 1 subcommand Channel 1 30h No channel 31h High Voltage 1 32h High Voltage 2 33h High Voltage 3 34h High Voltage 4 Data N See description of commands Command Listing It is not possible to implement all the Binary Dual protocol commands on the 4UHV controller The commands that are implemented on the 4UHV controller are the following 88 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 5 Table 13 No Description ASCII
12. 6 4 UHV Controllers The controller contains one or two high voltage modules Each high voltage module can have one 200 W channel or one 120 W channel or two 80 W channels Some examples of how HV channels can be configured are given below for details see the Orderable Parts table Four independent channels with a maximum of 80 W power per channel Two independent channels with a maximum of 200 W power per channel Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 57 104 5 Technical Information AUHV Controller Description 200 W channel and two 80W channels 120 W channel The 4UHV controller can be operated in the modes LOCAL SERIAL or REMOTE 58 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Specifications Table 1 Specifications Component Description Input Voltage 100 240 Vac 10 Input Frequency 50 60 Hz Input Power 600 VA Output HV Short 40 mA for 80W channels 100 mA for 200 W channels circuit current max TT 22 Storage 20 C to 70 C Fuse 5x20 T6 3A 250V Voltage Resolution 100V measurement Accuracy 5 E Current Measurement range 10 nA to 100 mA logarithmic scale measurement Resolution 2 digit of the mantissa maximum 10 nA Accuracy 6 CE RANE Compliance with EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326
13. Controller in einem Gestell installiert werden soll m ssen alle vier F e abmontiert und ber und unterhalb wenigstens 30 mm 1 2 Zoll Platz gelassen werden In seltenen F llen k nnte der Controller bei St rungen Rauch aussto en Wenn der Controller in sauberen R umlichkeiten verwendet wird muss er mit angebrachten Schutzvorrichtungen versehen werden um zu verhindern dass die R umlichkeiten durch den Rauch verschmutzt werden W hrend des Betriebs m ssen folgende Umgebungsbedingungen eingehalten werden Temperatur 0 C to 40 Rel Luftfeuchtigkeit 0 90 nicht kondensierend Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Gebrauchsanleitung 2 Gebrauch In diesem Kapitel sind die wichtigsten Betriebsvorgange aufgefuhrt Fur weitere Hinweise bezuglich Anschlufs und Montage des bestellbaren Zubeh rs verweisen wir auf das Kapitel Gebrauch im Anhang zu Technical Information Vor Benutzung des Controllers m ssen s mtliche elektrischen Anschl sse ausgef hrt und die Betriebsanleitung der angeschlossenen Pumpe durchlesen werden WARNUNG Schalten Sie die Hochspannungsleitungen erst ein wenn diese mit Hilfe der daf r bestimmten Hochspannungskabel des Interlock Kabels an die lonenpumpen angeschlossen sind Der Gebrauch des Controllers muss unter Verwendung eines Hochspannungskabels mit Interlock erfolgen AUHV PUMPE e PUMPEN ERDE Abbildung 2 E
14. Modalit LOCAL Pour allumer la haute tension HV il faut que l interlock du cable HV c ble interlock soit ferm connecteur branch Proc der comme suit pour alimenter le contr leur et habiliter la tension au niveau des connecteurs de haute tension H V Eteindre le contr leur Brancher le cable HV et l interlock du cable sur les connecteurs correspondants situ s sur le panneau arri re Appuyer bri vement sur la touche MODE pour s lectionner la modalit LOCAL jusqu ce que l inscription LOCAL s affiche sur l cran Maintenir le bouton HV ON OFF 2 enfonc tout en appuyant sur le bouton HV x 3 4 5 6 x correspond au num ro du canal allumer ou teindre VACUUM TECHNOLOGIES FIXED STEP R Figure 4 Panneau avant 4UHV sur le contr leur de pompe 40 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Mode d emploi 3 O O Fei En QO e _ _ ge p o FUSE T6 34 250V J2 SERIAL J1 REMOTE 1 0 JE _ Figure 5 Panneau arri re 4UHV sur le contr leur de pompe Pour teindre les canaux HV Maintenir le bouton HV ON OFF 2 enfonc tout en appuyant sur le bouton HV x 3 4 5 6 x correspond au num ro du canal allumer ou teindre Pour plus de renseignements sur l u
15. ad agenti atmosferici pioggia neve ghiaccio nella presenza di polvere gas corrosivi o in ambienti esplosivi o ad alto rischio di infiammabilit Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 11 104 1 Istruzioni per l uso ATTENZIONE ATTENZIONE 12 104 controller 4UHV appartiene alla seconda categoria di installazione sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria controller 4UHV ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al controller 4UHV abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Nel caso in cui il controller viene installato in un rack rimuovere i quattro piedini in modo che venga posizionato con almeno 30 mm di spazio sotto e sopra In casi rari di guasto il controller potrebbe emettere fumo Se il cliente usa il controller in camere pulite necessario prevedere adeguate protezioni per evitare di contaminare l ambiente con l eventuale fumo Durante il funzionamento occorre che siano rispettate le seguenti condizioni ambientali Temperatura da 0 a 40 Umidit relativa 0 90 senza condensa Agilent 4UHV lon Pump Cont
16. cables pour interlocks pr assembl s L utilisation de ces accessoires provoque la perte des fonctions de s curit offertes par l utilisation de l interlock Consulter la figure ci dessous pour monter correctement le cable d interlock contenu dans le sachet d accessoires en cas de non utilisation du cable de haute tension quip d un interlock RONDELLE DENTEE RONDELLE PLATE RONDELLE ELASTIQUE VIS CABLE D INTERLOCK v 1 ou 2 pi ces PANNEAU ARRIERE Figure 3 L interlock du cable est serr sur la masse de la pompe Si le branchement est coup la haute tension est interrompue L interlock du cable est serr sur la masse de la pompe Si le branchement est coup la haute tension est interrompue Pour relier le contr leur la pompe utiliser un cable HV quip d un interlock voir le bordereau de commande des pi ces Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Mode d emploi 3 Utilisation Les branchements corrects des masses du cable HV entre le controleur et la pompe ainsi que du cable d interlock sont report s sur la figure Connexions des masses En cas d utilisation du c ble d interlock contenu dans le sachet d accessoires il faut veiller en particulier ce qu aucune pi ce ne tombe l int rieur du contr leur Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 39 104 3 d emploi Allumage du Contr leur du Panneau Frontal
17. coded and represented by two ASCII characters The SLAVE addressed responds with an ANSWER whose structure depends on the MESSAGE type When the MESSAGE is a read command the SLAVE responds transmitting a string with the same structure as the MESSAGE Using the RS485 interface the message structure is identical to that used for the RS232 interface the only difference being the value assigned to the ADDRESS lt ADDR gt Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 77 104 5 Technical Information The controller can reply with the following types of response Table 7 Type Length Value Description read INSIUGHONDI logie window Numeric Gbytes After a read instruction of a numeric window Alphanumeric 1Obytes After a read instruction of a alphanumeric window pe aE A 5 ps Sn 4 ee crei NACK 045 Execution of the command has failed E KU commen En Data Type Error 1 byte 0x33 data type specified in the command Logic Numeric Alphanumeric is not in agreement with the Window specified TT e ui nn the range value for the specified window Win Disabled 1 byte 0x35 The window specified is Read Only or is temporarily disabled Table 8 Windows Description WIN R W Type Description Range 11 R W L HV ON OFF 0 OFF def 1 ON usi i ella C 12 RW L 0 OFF def ION 2 0 ee 13 R W L HV ON O
18. direttiva CEE 85 399 per la tutela dell ambiente Figura 1 Imballo del controller 10 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Istruzioni per l uso 1 Installazione Per la sicurezza dell operatore il controller deve essere alimentato con un cavo di alimentazione a 3 fili dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensione che si sviluppano nel controller possono provocare gravi lesioni o la morte Dopo lo spegnimento dell unit rimane dell energia residua all interno del controller per un di tempo Attendere circa 1 minuto per essere sicuri che l energia residua sia stata dissipata ATTENZIONE Il controller pu essere utilizzato sia come unit da tavolo che come modulo installato in un rack In ogni caso deve essere posizionato in modo tale che l aria possa circolare liberamente attraverso i fori di areazione presenti sulla copertura Nel caso in cui il controller viene utilizzato come modulo rack DEVE essere installato in un adattatore alto quattro unit rack per evitare che cada all interno del rack stesso vedere la tabella delle parti ordinabili Il pannello frontale del controller 4UHV non previsto per reggere il peso dell unit Non installare o utilizzare il controller in ambienti esposti
19. gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS485 lt WIN gt Window a string of 3 numerics indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 75 104 5 Technical Information lt gt Command 0x30 to read the window 0x31 to write the window lt DATA gt an alphanumeric ASCII string with the data to be written in the window In the case of a read command this field is not present The field length varies according to the data type as shown in the following table 76 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Technical Information 5 Table 6 Data Type Field Length Valid Characters Logic L 1 0 OFF 1 ON M V Alphanumeric 10 Fromblank to _ ASCII M lt gt End of transmission 0x03 lt CRC gt of all characters following lt STX gt and including the lt ETX gt terminator The value is hexadecimal
20. mode to the next can be done either via the Front Panel or a serial command Change from one mode to another can be done with the high voltage switched on However the channels switch off f Remote mode is selected but no commands for switching on are present on the remote connector Selecting Operating Mode from Front Panel To display the current mode press the Mode key briefly less than 2 seconds To change mode press the Mode key again The three modes will be displayed in a cyclic fashion Local Serial Remote After selecting the required mode wait approximately 5 seconds to return to the previous Screen Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 65 104 5 Technical Information Selecting Operating Mode via Serial Using serial communications via the protocol WIN protocol see chapter SERIAL Window Protocol write the chosen value in window 8 Table 3 Keys Value Description 66 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Technical Information 5 Start Up This chapter explains how to switch on and off the unit and the high voltage channels In the following chapters all the functions of the controller are explained in detail 1 Put the main power switch situated on the front panel to OFF 2 Insert the power cable into the correct connector on the rear panel Connect the HV cables to the controller and to the ion pumps
21. 1 2006 Electrical equipment for measurement control and laboratory use EMG requirements Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 59 104 5 Technical Information Output curve 200W Output curve BOW Figure 7 Output voltage vs Output current Controller Outline The outline dimensions for the 4UHV controller are shown in the following figures Front View 211 40 141 20 AUHV lon Pump Controller Rear View Figure 8 Controller Model Dimensions 60 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Front Panel Description lon Pump Controller Figure 9 Front Panel Table 2 Keys HV ON OFF switch high voltage channel on or off keep the HV ON OFF key pressed while you press the HV x key where x 1 the number of the channel you want to switch on or off Fixed Step change the output voltage choosing between 7 5kV Step Mode and Fixed Mode keep the Fixed Step key pressed while you press the HV x key where x is the number of the channel for which you want to change the output voltage The output voltage will change cyclically between STEP 7kV 5kV 3kV Protect To activate or disactivate Protect mode k
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24. Agilent 4UHV lon Pump Controller Models 929 9010 929 9011 929 9020 929 9021 929 9022 929 9101 929 9200 929 9201 929 9210 929 9211 929 9212 929 9213 929 9400 929 9401 929 9402 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 137 01 A 03 2011 EP Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 137 01 A Edition Edition 03 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as 15 and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or per
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26. FF 0 0 FF def 1 ON ci E C 3 TON 108 R W N Baudrate 1 4 1200 2400 4200 9600 4 00000000 39 Controller Model 53 R W ON 15485 Serial Address 00 0 31 1 def 00 54 R W L Serial Type Select 0 RS232 def 78 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A WIN R W 600 R W 601 R W 602 R W 603 R W 610 R W 612 R W 613 R W 614 R W 615 R W 620 R W 622 R W 623 R W 624 RW 625 630 R W 632 R W 633 R W Agilent AUHV lon Pump Controller User Manual 87 900 137 01 A Type 222 gt gt gt gt rliz Description Unit di misura Pressione Set Point CH1 MEM 939 Power max CH 2W 8W 00 V target CH2 q 3000700 V protect CH3 _ Device Number CH4 V target CH4 Technical Information 1 RS485 Channel Selection 0 Torr 1 mBar def ME 2 Pa Operating Mode D see below see below 3000 7000 V step 1000 def 7000 Rio O see below 3000 7000 V step 1000 def 7000 CL 3000 7000 V step 1000 1 100 step 1 mA 1 100 step 1 mA 3000 7000 V 79 104 5 Technical Information WIN R W Type Description Range step 1000 def 7000 N I protect CH4 1 100 step 1 mA 0000 E 645 RW A SePontCH XXEXX REA
27. IORE Figura 3 L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento interrotto l alta tensione viene disabilitata L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento interrotto l alta tensione viene disabilitata Per collegare il controller alla pompa utilizzare un cavo HV dotato di interlock vedere nelle parti ordinabili Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Istruzioni per l uso 1 Nella figura Collegamenti delle masse sono riportati i corretti collegamenti delle masse del cavo HV tra il controller e la pompa e del cavo di interlock 117121711112 Se si monta il cavo di interlock fornito nel sacchetto accessori fare molta attenzione affinch nessuna parte cada accidentalmente all interno del controller Accensione del controller dal pannello frontale modalit LOCAL Per accendere l alta tensione HV occorre che l interlock del cavo HV cable interlock sia chiuso connettore inserito Procedere come segue per alimentare il controller e abilitare la tensione sui connettori di alta tensione Spegnere il controller Collegare il cavo HV e l interlock del cavo nei relativi connettori sul pannello posteriore Selezionare la modalit LOCAL premendo per breve tempo il tasto MODE fino a quando appare sul display la scritta LOCAL Tenere premuto il pulsante HV ON OFF 2 mentre si preme il pulsan
28. Make sure that Interlock of HV cable is connected To switch on the unit put the main power switch to ON Select Local for the Operating mode Press the keys HV ON OFF keys and HV x where x is the number of the channel you want to switch on PR Key HV ON OFF HV 1 PROTECT 1 HV 2 PROTECT 2 HV 3 PROTECT 3 PROTECT 4 FIXED STEP HV ON OFF PROTECT VIVP MOD AES CJ rl 7 esc enter gt 7 gt LJL Az L 2 m HV 1 HV 2 HV HV4 4UHV lon Pump Controller men Main power switch Keys HV x Figure 12 Front Panel Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 67 104 5 Technical Information Table 4 Component Remote 1 0 Signal Listing Pin 4 Pin 5 Fault LOT Analog Output Digital Output Pin 17 Description 24V 10 max current 60mA Reserved A unique fault relay for all channels and for all Pin 12 Pin 13 NC Fault Relay NO Fault Relay Common Fault Relay CHI protect Digital Gnd Aa rr rr EL rt CH1 NC Set point Relay CH1 Common Relay CH2 on off CH2 protect 0 u CH2 step Digital Gnd Analog 2 Analog Gnd
29. OFF 2 gedr ckt und dr cken Sie gleichzeitig die Taste HV x 8 4 5 6 wobei x die Nummer der Leitung ist die ein oder ausgeschaltet werden soll Weitere Einzelheiten zum Gebrauch des Controllers und zur Beschreibung der Display Angaben entnehmen Sie bitte dem Abschnitt Technical Information Bei Not Aus schalten Sie den Hauptschalter 1 auf dem vorderen Bedienfeld aus um das Gerat und samtliche Hochspannungsleitungen auszuschalten Wenn Sie den Hauptschalter auf Off stellen wird das HV Gerat ausgeschaltet Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 29 104 2 Gebrauchsanleitung Wartung Die 4UHV Controller sind wartungsfrei Eventuell erforderliche Eingriffe mussen von dazu befugtem Fachpersonal ausgefuhrt werden Bei Storungen kann der Agilent Reparaturdienst in Anspruch genommen werden oder schlie en Sie einen Vertrag fur Agilent Advanced Exchange Service ab mit dem ein defekter Controller gegen einen general berholten ausgetauscht wird Eine eventuelle Verschrottung mu unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen Entsorgung 30 104 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EURichtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf son
30. Originalanleitungen Agilent Technologies 19 104 2 Gebrauchsanleitung Allgemeines VORSICHT 20 104 Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen Bei Nichtbeachtung auch teilweise der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Missachtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Firma Agilent keinerlei Haftung In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam dass bei Nichteinhaltung Sch den an der Anlage entstehen k nnen Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte Vorg nge oder Praktiken die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen Die HINWEISE enthalten wichtige Informationen die im Text hervorgehoben werden Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Gebrauchsanleitung 2 Lagerung Bei Transport und Lagerung der Controller m ssen folgende Umgebungs
31. S NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable 1 Explosive Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for costs incurred to ensure the safe handling of the product and is liahle for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD next Detailed Description of Malfunction Please provide the error message Application system and model RES Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does not start Noise Vertical Does not spin f
32. ation der K hlluft durch die im Geh use vorne und unten eingelassen Luft ffnungen gew hrleistet sein Wenn der Controller in einem Gestell montiert wird MUSS er in einer vier Rackeinheiten hohen Adapter Einheit installiert werden um zu vermeiden da der Controller nicht in das Gestell f llt siehe dazu Tabelle der bestellbaren Zubeh rteile Die vordere Schalttafel des 4 HV Controllers ist nicht geeignet das gesamte Gewicht der Einheit zu tragen Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions und erh hte Brandgefahr besteht Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 23 104 2 Gebrauchsanleitung VORSICHT VORSICHT 24 104 Der Controller AUHV geh rt zu der zweiten Einbaukategorie oder auch berspannung die von der Norm EN 61010 1 geregelt ist Schlie en Sie daher das Ger t an eine Stromleitung an die dieser Kategorie gerecht wird Der Controller 4UHV hat Anschl sse f r die Ein Ausg nge und die Serienkommunikation die an externe Kreisl ufe angeschlossen sein m ssen so dass man zu keinem unter Strom stehenden Teil Zugriff hat Vergewissern Sie sich dass die Isolierung des Ger tes das an den Controller 4UHV angeschlossen ist auch bei Einzelst rungen wie sie von der Vorschrift EN 61010 1 vorgesehen sind angemessen isoliert ist Wenn der
33. bedingungen eingehalten werden Temperatur 20 C bis 70 C Rel Luftfeuchtigkeit 0 95 nicht kondensierend Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 21 104 2 Gebrauchsanleitung Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transportschaden mussen sofort der zustandigen rtlichen Verkaufsstelle gemeldet werden Das Verpackungsmaterial muss korrekt entsorgt werden Es ist vollstandig recyclebar und entspricht der EG Richtlinie 85 399 fur Umweltschutz Abbildung 1 Verpackung des Controllers 22 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Gebrauchsanleitung 2 Installation WARNUNG Zur Sicherheit des Controller Bedieners muss der AUHV an 3 Draht Speisekabel mit einem international anerkannten Stecker angeschlossen sein Dieses Kabel und dieser Stecker miissen an eine angemessen geerdete Steckdose angeschlossen sein um Stromschlage zu vermeiden und den Anforderungen der CE Normen gerecht zu werden Die Hochspannungen die im Controller entstehen konnen schwere Verletzungen oder den Tod verursachen Nach Ausschalten des Gerats bleibt noch einige Zeit lang Reststrom im Controller Warten Sie etwa 1 Minute um sicher zu sein dass der restliche Strom dissipiert ist VORSICHT Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden F llen mu eine ungehinderte Zirkul
34. checking the contractual terms and conditions of sale 54 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Go 5 Technical Information Agilent 4UHV lon Pump Controller User Manual Controller Description 57 Specifications 59 Controller Qutline 60 Front Panel Description 61 Keys 61 Rear Panel Description 63 Operating Mode 65 Selecting Operating from Front Panel 65 Selecting Operating via Serial 66 Start Up 67 Connection of Input remote 72 Serial 73 Connector Examples 74 Window Protocol 74 Error Description 84 Error Code 84 Old Serial Protocol Binary Protocol 87 Original Instructions gt lt Agilent Technologies 55 10 5 Technical Information Display and Menus 91 Displaying Channel Related Information 74 Commands93 Menu 94 Orderable Parts 98 56 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Controller Description The 4UHV controller is a power supply for ion pumps It supplies a high voltage on output selectable as 3kV 5kV or 7kV and measures the output current The controller has the following features Front panel with keypad and a 4 row display 4x20 146 x 62 mm for displaying the operating values voltage current pressure Remote I O card with DB37 connector 15252 65485 serial communications Figure
35. chnical Information 5 Old Serial Protocol Binary Protocol The Binary Protocol serial protocol used by some old controllers is no longer supported For new projects Agilent advises that the new protocol Window protocol be used Nevertheless for compatibility with the old systems some commands of the Binary Dual have been implemented The 4UHV controller cannot implement all the commands of the Dual but only a subset Communications Format These protocols have the following formats Table 11 Type No of Description Bytes i M 5 TN Status 1 0 30h false off rr Integer 5 represented in BCD with 5 digits always positive BitField 8 Like integer type but meanings are associated with the single MEER bits of the number Exponential 7 x xEsxx where x is BCD digits E is the 45h character and s is the or sign I String n Sequence of n characters included within the 20h and 7Fh range J The h notation following a number indicates that the number is expressed in hexadecimal format BCD The number is represented by digits included within the 0 and 9 range ASCII 30h 39h Status can also assume values greater than 1 Agilent 4UHV lon Pump Controller User Manual 87 900 137
36. ck cable furnished in the accessories bag make sure that no parts drop accidentally inside the controller Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 51 104 4 Instructions for Use Powering On the Controller from the Front Panel LOCAL Mode To switch on the High Voltage HV the interlock of the HV cable cable interlock must be closed connector inserted Proceed as follows to power the controller and apply voltage to the high voltage HV connectors Switch off the controller Connect the HV cable and the interlock of the HV cable in the related connectors on the rear panel Select LOCAL mode briefly pressing the MODE key until LOCAL is shown on the display Hold down the HV ON OFF button 2 while pressing the HV x 3 4 5 6 button where x is the number of the channel to be switched on off Figure 4 Front Panel 4UHV lon Pump Controller 52 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Instructions for Use 4 O O Fei En QO e _ _ ge o 5 J2 SERIAL J1 REMOTE 1 0 ES eS mg Figure 5 Rear Panel 4UHV lon Pump Controller To switch off the HV channels Hold down the HV ON OFF 2 button while pressing the HV x 3 4 5 6 button where x is the number of the channel to be switched on off For further details on using the
37. controller and for a description of the information appearing on the display refer to the section Technical Information In situations of emergency to switch off the unit and all the high voltage channels turn off the main power switch 1 situated on the front panel When the main switch 1 turned off the HV unit is switched off Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 53 104 4 Instructions for Use Maintenance The 4UHV controller does not require any maintenance Any form of servicing on the unit must be performed by authorized personnel If servicing is needed contact Agilent Technical Support or subscribe to the Agilent Advanced Exchange Service where the faulty controller is replaced by a refurbished one If the controller needs to be scraped proceed to do so in compliance with the specific national norms Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after
38. could cause damage to the equipment if not complied with Warning messages call the operator s attention to a specific procedure or operation that could cause serious injury if not performed correctly Notes provide you with important information extracted from the text Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Instructions for Use 4 Storage The following environmental conditions must be met when transporting and storing the controller Temperature 20 C to 70 C Relative humidity 0 95 non condensing Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 45 104 4 Instructions for Use Prior to Installation The controller comes in special protective packaging if there is any sign of damage that could have been caused during transportation contact your local sales office immediately When unpacking the controller be particularly careful to avoid dropping it or knocking it against anything The packaging material is totally recyclable and complies with EEC directives 85 399 for the safeguard of the environment Figure 1 Controller Packaging 46 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Instructions for Use 4 Installation WARNING For the safety of the operator the controller must be powered with a 3 wire power cable connected to a plug approved at international level Use this cable and plug together with an ade
39. ctionality Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 93 104 5 Technical Information 94 104 Changing the Output Voltage To change the output voltage choosing between 7KV 5 3KV Step Mode and Fixed Mode keep the Fixed Step key pressed while you press the HV x key where x is the number of the channel for which you want to change the output voltage The output voltage changes cyclically between STEP 7 5 3 KV Menu Keeping the Mode key pressed for a long time gt 2 sec you enter the Menu In the Menu you can configure some parameters of the controller These configurable parameters can be divided into two groups Controller general parameters Specific parameters for each channel The general parameters of the controller are the following Pressure measurement unit mbar torr pascal Serial baud rate 1200 4800 9600 Serial RS232 RS485 RS485 Address from 0 to 31 Auto start Yes No Fan Always on switches on if the current descends below Point The set point can be associated with the channels and a value set Analog output Analog output is associated with the channels The specific parameters for each channel are the following Pump Select the type of pump I Protect Set the Protect current Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 5 Power max Set the
40. dern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Agilent 4UHV lon Pump Controller User Manual ee 3 Mode d emploi Indications Generales 32 Emmagasinage 33 Preparation pour l installation 34 Installation 35 Utilisation 37 Allumage du Contr leur Panneau Frontal Modalit LOCAL 40 Entretien 42 Mise au Rebut 42 Traduction de la mode d emploi originale Agilent Technologies 31 104 3 Mode d emploi Indications Generales ATTENTION AVERTISSEMENT 32 104 Cet appareillage a t concu en vue d une utilisation professionnelle est conseill a l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant l utilisation de l appareillage Agilent d cline par cons quent toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rat
41. ectives CEE 85 399 en mati re de protection de l environnement Figure 1 Emballage du contr leur 34 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Installation Mode d emploi 3 Pour la s curit de l op rateur le contr leur doit tre aliment par ATTENTION un c ble d alimentation 3 fils dot d une prise m le approuv e a un niveau international Brancher le c ble avec prise m le une prise femelle raccord e la terre de facon ad quate afin d viter tout risque d electrocution et de pouvoir remplir les conditions de conformit prescrites par les normes CE Les hautes tensions qui se d veloppent a l int rieur du contr leur peuvent tre susceptibles de provoquer des blessures graves voire de causer la mort Apr s l extinction de l unit il reste de l nergie l int rieur du contr leur pendant quelques instants Attendre environ 1 minute pour tre s r que l nergie r siduelle s est dissip e Le contr leur peut tre utilis soit comme unit de table que comme module install dans une armoire De toute facon il doit tre plac de mani re ce que l air puisse circuler librement travers les trous d a ration pr sents dans la couverture Lorsque le contr leur est utilis comme module armoire il DOIT tre install dans un adaptateur d une hauteur de quatre unit s armoire afin d viter qu il ne tombe l int
42. eep the Protect key pressed while you press the HV x key where x is the number of channel for which you want to activate or disactivate the Protect functionality Mode By pressing this key briefly 2 sec the operating mode changes cyclically between Serial Front Remote You exit from this display automatically after 5 seconds By keeping this key pressed for a long time 2 sec you enter the menu To exit from the menu press the Mode key again for a long time Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 61 104 5 Technical Information Graphic Signals Four black squares are present for each channel indicating respectively the 4 states of the channel The meaning of the 4 indicators 1 the following HV x Square lit black on Square not lit HV off Square flashing Error 2 Protect x Square lit black Protect on Square not lit Protect off Square flashing Protect error 3 SP X Square lit black Set point activate Square not lit Set point not active 4 Step x Square lit black Step Square not lit Fixed 62 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Rear Panel Description HV Connectors Interlock connector Serial Remote 1 0 Port Figure 10 Rear Panel The following are present on the rear panel The HV connectors 1 2
43. eur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions Les notes contiennent des renseignements importants isol s du texte Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Mode d emploi 3 Emmagasinage Pour transporter et emmagasiner le contr leur il faut observer les conditions suivantes d environnement temp rature de 20 C 70 C humidit relative 0 95 non condensante Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 33 104 3 Mode d emploi Preparation pour I Installation Le contr leur est fourni dans un emballage de protection sp cial si l on constate des dommages pouvant s tre produits pendant le transport contacter tout de suite le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Le mat riel est enti rement recyclable et il est conforme aux dir
44. formance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation
45. he Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the R was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements R
46. i necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Nel appendice Technical Information vengono fornite delle informazioni dettagliate Questo manuale utilizza le seguenti convenzioni messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Le note contengono informazioni importanti estrapolate dal testo Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Istruzioni per l uso 1 immagazzinamento Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali Temperatura da 20 C a 70 C Umidit relativa da 0 a 95 senza condensa Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 9 104 1 Istruzioni per l uso Preparazione per l installazione Il controller viene fornito in un imballo protettivo speciale nel caso in cui si presentassero segni di danni che potrebbero essere stati causati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti Il materiale dell imballo completamente riciclabile e risponde alla
47. interlock cable It is assumed that the controller will be used together with the high voltage cable having a safety interlock AUHV zu rien Ground Figure 2 Ground Connections Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 49 104 4 Instructions for Use If an HV cable without interlock is to be used the accessories bag contains a 50 104 specific kit of preassembled interlock leads However with this type of use the safety capability furnished using the interlock is lost Refer to the figure below for correct assembly of the interlock cable furnished in the accessories bag in the case in which an HV cable with interlock is not used TOOTHED WASHER FLAT WASHER SPRING WASHER SCREW mm LA INTERLOCK CABLE 1 or 2 pz REAR PANEL Figure 3 The cable interlock closes on pump ground The high voltage is disabled if the connection Is interrupted The cable interlock closes on pump ground The high voltage is disabled if the connection is interrupted To connect the controller to the pump use a HV cable with interlock see parts that can be ordered Correct connection of masses of the HV cable between the controller and pump and of the interlock cable is illustrated in the Connections figure Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Instructions for Use 4 Usage CAUTION When using the interlo
48. ision 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 03 2011 Publication Number 87 900 137 01 A P Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 5521 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 2
49. maximum power Scrolling Through the Menus The 4UHV controller menu has a three level structure scroll through the menus remaining on the same level press the keys 4 go to submenu press Enter in the transition menus escape to go back press Esc at any time In multiple choice menus the symbol m appears next to the value currently in use and the value currently used will flash change the value in each menu press the key or This causes the symbol to move but the old value continues to flash save the new value you must press Enter As you press Enter the new value is saved and starts to flash If it is not possible for all the choices to be displayed simultaneously the values will scroll across the titles of the menus remain fixed Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 95 104 5 Technical Information Menu Screens Examples of all the screens that appear in the Menu are provided below Table 16 Menu Screens give llli HIV 0078 96 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 D Technical Information Third Level ee TM First Level an __ E Ef e n
50. must be connected to the external circuits in such way that no powered part is accessible Make sure that the insulation of the device connected to the 4UHV controller provides an adequate insulation even in the case of a single fault condition as stipulated in the EN 61010 1 normative If the controller is installed in a rack remove its four feet and place it so as to leave at least 30 mm 1 2 inches of free space above and below CAUTION In rare circumstances a controller fault could result in the emission of smoke If the customer is using the controller in clean environments they should take adequate measures to avoid the environment being contaminated by any eventual smoke The controller must be used in the following environmental conditions Temperature 0 C to 40 C Relative humidity 0 90 non condensing 48 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Instructions for Use 4 Usage This section provides you with the major operating procedures For more information and for the procedures that concern connections or specific options refer to the section USAGE in the Technical Information appendix Before using the controller perform all electrical connections and refer to the manual of the connected pump WARNING Switch on the high voltage channels only if they are connected to the tonic pumps by means of the special purpose high voltage cables equipped with
51. n 37 Entretien 42 Instructions for Use 43 General Information 44 Storage 45 Prior to Installation 46 Installation 47 Usage 49 Maintenance 54 Technical Information 55 Controller Description 57 Specifications 59 Operating Mode 65 Start Up 67 Serial 13 Display and Menus 91 Orderable Parts 98 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Agilent 4UHV lon Pump Controller User Manual Istruzioni per l uso Informazioni Generali8 Immagazzinamento 9 Preparazione per l installazione 10 Installazione 11 Uso 13 Accensione del controller dal pannello frontale modalit LOCAL 15 Manutenzione 18 Smaltimento 18 Traduzione delle istruzioni originali Agilent Technologies 7 104 1 Istruzioni per l uso Informazioni Generali ATTENZIONE AVVERTENZA 8 104 Questa apparecchiatura destinata ad uso professionale L utente deve leggere attentamente il presente Manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent declina ogni responsabilita dovuta alla mancata osservanza totale anche parziale delle istruzioni fornite in questo documento all uso improprio dell apparecchiatura da parte di personale non addestrato all esecuzione di interventi non autorizzati alla mancata osservanza delle specifiche normative nazionali Nei paragrafi seguenti sono riportate tutte le informazion
52. nnements propres il est n cessaire de pr voir la mise en place de protections ad quates afin d viter que la fum e ne puisse contaminer la pi ce Pendant le fonctionnement il est n cessaire de respecter les conditions d environnement suivantes temp rature de 0 C 40 C humidit relative 0 90 non condensante Agilent AUHV lon Pump Controller User Manual 87 900 137 01 A Mode d emploi 3 Utilisation Dans ce paragraphe on indique les principales proc dures op rationnelles Pour tous autres d tails et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe Usage de l appendice Technical Information Avant d utiliser le contr leur effectuer toutes les connexions lectriques et se reporter la notice de la pompe connect e N allumer les canaux haute tension que s ils ont t branch s aux pompes ioniques par l interm diaire des cables haute tension pr vus a cet effet et dotes de cable Interlock L usage du contr leur est subordonne l usage d un cable haute tension dot d Interlock AUHV POMPE STE gt gt BRANCHEMENT DE TERRE DE LA POMPE Figure 2 Connexions des masses Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 37 104 3 Mode d emploi 38 104 Si l op rateur veut utiliser un cable HV sans interlock le sachet d accessoires contient un kit sp cial de
53. or 4 according to model The interlock connectors associated to each channel The fuses The DB connector for RS232 and RS485 serial communication The DB37 connector for Remote I O signals Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 63 104 5 Technical Information Fuse Holder The following figure shows the location of this assembly O O EA ER e 5 e Oo a pe MAINS fe 4 N FUSE TYPE T6 3A 2504 J2 SERIAL Ji REMOTE 1 0 Figure 11 Rear Panel as follows to replace one both fuses 1 Disconnect the mains cable 2 Waiting for 15 second 3 Remove the fuse with a small screwdriver 4 Replace the fuse 5 Use only 5x20 T6 3A 250V fuses 64 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 8 Operating Mode The controller 4UHV for ion pumps can be operated in three different modes Local Serial Remote The commands sent to the controller for example HVON OFF Target voltage etc can only be given in the mode chosen while the data for example current pressure voltage etc can be read in all the modes E g If you select Local mode the HV channels can only be switched on via the keys on the Front Panel but the current supplied can be read via the Front Panel Serial and Remote Change from one
54. ples Controller AUHV Figure 18 RS 232 Connection TURBO CONTROLLER B 9 5nd lon controller 2 1200 VW Figure 19 RS 485 Connection Window Protocol Both RS232 and the RS485 interfaces are available on the 9 pin D type serial input output connector The communications protocol is the same see the structure below but only the RS485 handles the address field Therefore to enable the RS485 you need to select both the type of communication and the device address using the front panel menu or the Navigator software 14 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Technical Information 5 The Window Protocol is the same of the Turbo Pump but the meaning of the Window is different see the below chapter Windows Description Communications Format 8 data bit No parity I stop bit Baud rate 9600 Communications Protocol The communications protocol is of MASTER SLAVE type where Host MASTER Controller SLAVE The communication takes place as follows 1 The host MASTER sends a MESSAGE CRC to the controller SLAVE 2 The controller answers with an ANSWER CRC to the host The MESSAGE is a string in the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt When data is indicated between two quotes it implies that the data indicated is the corresponding ASCII character Where lt STX
55. quately earthed socket so as to prevent electrical shocks and satisfy the requirements of EC norms The high voltages that develop in the controller can provoke serious injuries or death After switching off the unit residual energy is present inside the controller for some time Wait approx 1 minute to be sure that the residual energy has been dissipated CAUTION The controller can be used either as a desktop unit or as a rack module In any case It must be positioned in a way that the air can circulate freely through the ventilation slots on the cover If the controller is used as a rack module it MUST be inserted into a four rack high adapter to prevent it from falling inside the rack itself see the table of orderable parts The 4UHV controller front panel is not designed to support the weight of the unit Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice in the presence of dust corrosive gases or in a highly flammable or explosive environment Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 47 104 4 Instructions for Use CAUTION The 4UHV controller belongs to the second installation category or overvoltage as provided for in normative EN 61010 1 Therefore the device must be connected to a power supply line satisfying the requirements for this category The 4UHV controller has connectors for inputs outputs and for serial communications that
56. rat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut 42 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 Ge 4 Instructions for Use Agilent 4UHV lon Pump Controller User Manual General Information 44 Storage 33 Prior to Installation 46 Installation 47 Usage 49 Powering On the Controller from the Front Panel LOCAL Mode 52 Maintenance 54 Disposal 54 Original Instructions di Agilent Technologies 43 104 4 Instructions for Use General Information 44 104 This equipment is intended for professional use Prior to using this equipment the user must carefully read this Instruction Manual in its entirety and any additional information provided by Agilent Agilent declines all responsibility for damage caused by the total or partial misuse of the instructions provided herein by the improper use of the equipment by untrained personnel by unauthorized interventions or by negligence in complying with any specific national rule or regulation The following sections provide you with all the information needed to guarantee the operator s safety when using the equipment Detailed information is provided in the appendix entitled Technical Information The following conventions are used in this manual Caution messages are provided before procedures that
57. rdung Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 25 104 2 Gebrauchsanleitung 26 104 WARNUNG Soll HV Kabel ohne Interlock zum Einsatz kommen befindet sich in dem Zubeh rbeutel ein daf r bestimmtes Kabelset f r vormontierte Interlock Teile Bei diesem Gebrauch geht die Sicherheitsfunktion verloren die man bei der Interlock Verwendung hat Sehen Sie sich folgende Abbildung genau an um das im Zubehorbeutel mitgelieferte Interlock Kabel richtig zu montieren wenn auf das Hochspannungskabel mit Interlock verzichtet werden soll ZAHNSCHEIBE _ UNTERLEGSCHEIBE ZEN SCHRAUBE pz 7 gt INTERLOCK KABEL 1 oder 2 Stk _RUCKSEITE Abbildung 3 Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Beim Anschluss des Controller an die Pumpe ist ein HV Kabel mit Interlock siehe Bestellteile zu verwenden Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Gebrauchsanleitung 2 Auf der Abbildung Anschl sse sind die richtigen Anschl sse der Erdungen des HV Kabels des Controller an die Pumpe und des Interlock Kabels ersichtlich MIT Beim Montieren des im Zubeh rbeutel mitgeliefer
58. reely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Cantact vertemperature PARAMETEHS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMIPS CONTROLLERS Poar vacuum High voltage prablem Bad feedthrough Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum Over temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Reg
59. roller User Manual 87 900 137 01 Istruzioni per l uso 1 Uso In questo paragrafo vengono riportate le principali procedure operative Per ulteriori informazioni e per le procedure riguardanti collegamenti o particolari opzioni fare riferimento al paragrafi UTILIZZO nell appendice Technical Information Prima di utilizzare il controller effettuare tutti i collegamenti elettrici e fare riferimento al manuale della pompa collegata 1741 Accendere i canali di alta tensione solo se connessi alle pompe ioniche tramite gli appositi cavi di alta tensione dotati del cavo di interlock L uso del controller inteso con cavo di alta tensione provvisto di interlock AUHV menage O O Ground Figura 2 Collegamenti delle masse Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 13 104 1 Istruzioni per l uso 14 104 Se si vuole utilizzare un cavo HV senza interlock nel sacchetto accessori fornito un apposito kit di cavetti per interlock preassemblati Con questo utilizzo si perde la funzionalit di sicurezza offerta dall utilizzo dell interlock Fare riferimento alla seguente figura per montare correttamente il cavo di interlock fornito nel sacchetto accessori qualora si voglia rinunciare al cavo di alta tensione dotato di interlock RONDELLA DENTATA RONDELLA PIATTA RONDELLA ELASTICA VITE CAVO DI INTERLOCK 10 2 pz PANNELLO POSTER
60. ror 1 512 0001000000000 TE SENS 28 0100000000000 HV disabled Example Interlock cable Error code 32 decimal gt 0000000010000 binary gt Interlock cable error Interlock cable Overtemp HV Error code 96 decimal 0000000110000 binary gt Interlock cable error Overtemp HV Error code Win 206 Error interlock o so w s snx DA an Foa m ws sw fo Channel selection Win 505 Read m 5 o sss snx wnoow mo er om m m 35 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 85 104 5 Technical Information Write 1 s ss Cu w ss Error code Win 206 Interlock error so s w s w uw ue snx ADDA wow mo fem om Foa m s s s s sss o sss Channel selection Win 505 Write 2 s s s s ss ss ss o sus Cu STX ADDR ACK ETX CRC Error code Win 206 Interlock not present error because channel 2 has been selected m so tx anor an en om Foa m s ss sw ela 86 104 Agilent AUHV lon Pump Controller User Manual 87 900 137 01 A Te
61. rvento sull unit deve essere eseguito da personale tecnico autorizzato In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto Qualora un controller dovesse essere rottamato procedere nel rispetto delle normative nazionali specifiche Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 18 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Agilent 4UHV lon Pump Controller User Manual E e 000 e 2 Gebrauchsanleitung amp e Allgemeines 20 Lagerung 21 Vor der Installation 22 Installation 23 Gebrauch 25 Einschalten des Controllers von der vorderen Schalttafel LOKAL Modus 28 Wartung 30 Entsorgung 30 bersetzung der
62. sage du contr leur et sur la description des informations de l cran consulter la section Technical Information PULSER En cas de situation d urgence n cessitant un arr t imm diat de l unit et de tous les canaux haute tension d sactiver l interrupteur g n ral 1 situ sur le panneau avant En placant l interrupteur g n ral sur OFF l unit H T s arr te Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 41 104 3 Mode d emploi Entretien Le contr leur 4UHV n a besoin d aucun entretien N importe quel entretien sur l unit doit tre effectu par un personnel technique autoris En cas de panne contacter le Support technique Agilent ou bien s abonner au Agilent Advanced Exchange Service o le contr leur endommag est remplac par un contr leur reconditionn En cas de mise au rebut du contr leur proc der son limination conform ment aux r glementations nationales en la mati re Mise au Rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du cont
63. te HV x 8 4 5 6 dove il numero del canale che si vuole accendere o spegnere Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 15 104 1 Istruzioni per l uso HV 1 PROTECT 1 HV 2 PROTECT 2 PROTECT3 PROTECT 4 VAGUUM TECHNOLOGIES FIXED STEP HV ON OF lon Controller Figura 4 Front Panel 4UHV lon Pump Controller ee A FUSE TYPE TE 3A 2504 J2 SERIAL Ji REMOTE 1 0 er um je Figura 5 Rear Panel AUHV lon Pump Controller Per spegnere i canali HV Tenere premuto il pulsante HV ON OFF 2 mentre si preme il pulsante HV x 3 4 5 6 dove il numero del canale che si vuole accendere o spegnere Per ulteriori dettagli sull uso del controller e sulla descrizione delle informazioni del display fare riferimento alla sezione Technical Information 16 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Istruzioni per l uso 1 WAYS In condizioni di emergenza per spegnere l unit e tutti i canali alta tensione disattivare l interruttore generale 1 posto sul pannello anteriore Mettendo in off l interruttore generale si spegner l unita HV Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 17 104 1 Istruzioni per l uso Manutenzione Il controller 4UHV non richiede alcun intervento di manutenzione Qualsiasi tipo di inte
64. ten Interlock Kabels gehen Sie sehr vorsichtig vor damit dabei kein Teil in den Controller fallt Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A 27 104 2 Gebrauchsanleitung 28 104 Einschalten des Controllers von der Schalttafel LOKAL Modus Um die Hochspannung HV einzuschalten muss der Interlock des HV Kabels Kabel linterlock geschlossen sein Verbinder eingesteckt Gehen Sie wie folgt vor um den Controller mit Strom zu versorgen und die Spannung an den Hochspannungsverbindern H V freizugeben Schalten Sie den Controller aus Schlie en Sie das HV Kabel und den Interlock des H V Kabels an die jeweiligen Verbinder am Ruckenteil Wahlen Sie die Modalitat LOCAL indem Sie kurz die Taste MODE drucken bis auf dem Display die Aufschrift LOCAL erscheint Halten Sie die Taste HV ON OFF 2 gedr ckt und dr cken Sie gleichzeitig die Taste HV x 8 4 5 6 wobei x die Nummer der Leitung ist die ein oder ausgeschaltet werden soll Abbildung 4 Vorderteil 4UHV lonenpumpen Controller Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Gebrauchsanleitung 2 O O Fei En QO e _ _ ge o 5 J2 SERIAL J1 REMOTE 1 0 ES eS mg Abbildung 5 R ckenteil 4UHV lonenpumpen Controller Um die HV Leitungen auszuschalten Halten Sie die Taste HV ON
65. ual 87 900 137 01 A 91 104 5 Technical Information Table 15 Meee fetal Display the pump type for each MESS 515 5 TE a 2 8 Press 22 Display the pressure for each channel Display the voltage and operation mode Step Mode Fixed mode for each channel 92 104 Agilent 4UHV lon Pump Controller User Manual 87 900 137 01 A Technical Information 5 Information on a Single Channel You can display all the information voltage current pressure and pump type for each single pump To do this press the HV x key where x corresponds to the channel to display 515 2 fe bier P Figure 22 In this case the pump type pressure current and voltage of channel 3 are being displayed Commands You can give the controller three types of commands Switch on off channels Activate disactivate Protect mode Change output voltage Switching Channels On Off To switch a high voltage channel on or off keep the HV ON OFF key pressed while you press the HV x key where x is the number of the channel you want to switch on or switch off Activating Disactivating Protect Mode To activate or disactivate Protect mode keep the Protect key pressed while you press the HV x key where x is the number of channel for which you want to activate or disactivate the Protect fun
66. uality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase may be required at the time t
67. ulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118

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