C 206H
Contents
1. ams01581 doc Edition 10 October 06 Chiller alarm control HTR6T Check this option if your machine is equipped with a chiller giving HTR6T feedback information chiller OK Alcatel Vacuum Technology France AMS 200 User s manual 10 14 ams01581 doc Edition 10 October 06 C 206H The System presets sara a Ti Parameters M BE Item Designation O Gas ballast DEMO D Param None D process None User 1 Signification Check this option to perform gas ballast during a transfer in automatic mode If you check this option click on the Parameters button The following window is opening Gas ballast presets Flow 100 sccm 3 use for ballast and its corresponding flow Gas ballast stopping mode Monsal Stoponuserreqest z choose the way you want to as the end of batch processing atter the stop delay you have to stop the function in semi automatic mode Gasname 1 SF6 v choose which gas you want to fae gas ballast either manually al ad ayfomin 2 your request or automatically at Note if you choose the Manual Stop on user request option stop on Alcatel Vacuum Technology France AMS 200 User s manual 11 14 C 206H The System presets 3 2 The PC soft settings tab 0 n Sa ptem presets Hardware config ration Communication Software configurati2. C 206H The System presets 2 5 Hardware configuration Communication Software configuration Database backup i py ms a Yi m z le DEMO D Param None D process None User 1 Item Designation Signification O Characteristic parameters of the HVS 2000C ESC power supplies Swing temporization Duration of the polarity change It lets the voltage fall down because the polarity cannot be changed if the ESC voltage is present Start polarity Supply 1 Initial polarity of the ESC power supply 1 Start polarity Supply 2 Initial polarity of the ESC power supply 2 m Cycle start supply example Status of ESC ON me a o rr Cr as power supply 1 Eo 4 Status of ESC power supply 2 Polarity of the ESC power supply 1 Polarity of the ESC power supply 2 i swing ising i Swing Alternation time time Alternation time time Alternation time time Alternation time Alcatel Vacuum Technology France AMS 200 User s manual 4 14 ams01581 doc Edition 10 October 06 C 206H The System presets 1 2 The Process Settings tab ai Item Designation Signification 1 Hardware Selection of the hardware parameters related to the process LF configuration tab generator Heated Liner Working temperature Pressure Tolerance and Process Settings tab Alcatel Vacuum
3. C 206H The System presets Only the system administrator has access to the system configuration presets These presets correspond to the hardware and software configuration of your machine 1 The hardware parameters 1 1 The ESC Settings tab System presets i LULL aie Item Designation Signification O Hardware Selection of the hardware parameters related to the chuck configuration tab and ESC Settings tab ams01581 doc Edition 10 October 06 Chuck type Selection of the type of chuck fitted on your machine a Mecha mechanical chuck m ESC F ESC finger chuck m ESC P ESC PIN chuck Alcatel Vacuum Technology France AMS 200 User s manual 1 14 C 206H The System presets n i joss 2l v a bss a supet z le DEMO Item Designation ESC power supply D Param None D process None User 1 Signification Selection of the model of ESC power supplies fitted on your machine m None if your machine is not equipped with a ESC chuck HVS 1500 if your machine is equipped with a HVS 1500 ESC power supply HVS 2000C if your machine is equipped with a HVS 2000C ESC power supply ams01581 doc Edition 10 October 06 O ESC alternation time When you select a ESC power supply HVS 1500 or HVS 2000C model you have to adjust the ESC alternation time Whenever
4. of the throttle valve does not change ams01581 doc Edition 10 October 06 Alcatel Vacuum Technology France AMS 200 User s manual 7 14 C 206H The System presets 2 The communication parameters 00n System presets Hardware configuration Communication Software configuration Database backup Ti Parameters M k Signification 1 Communication Selection of the communication parameters configuration tab ams01581 doc Edition 10 October 06 2 Bar code reader Check this option if you want to use a bar code reader to automatically enter the batch name of your cassette only for the machines equipped with an atmospheric robot Communication Check this option if the link between the EPD system and PC is a SECSII EPD SECSII link If you check this option you must configure the communication parameters as follows m serial port COM3 m 9 600 bauds m Retry limit 2 m Device ID O m Tl ls T2 5 s T3 30 s and T4 25s Alcatel Vacuum Technology France AMS 200 User s manual 8 14 C 206H The System presets Hardware configuration Communication Software configuration Database backup T Parameters M Ti Parameters M BE Item Designation Signification 4 EPD with pattern Check this option if your machine is equipped with an EPD system recognition using pattern recognition
5. 5 Communication Check this option if you want to use a Host computer SECS II Host When this option is unchecked NO HOST is displayed in the status bar at the right bottom of the screen When this option is checked communication with Host computer is active The state displayed in the status bar depends of the communication state between the Host computer and AMS200 application ams01581 doc Edition 10 October 06 O Semisysco EPD Check this option if your machine is equipped with an integrated EDP Communication system controller If you check this option you must configure the communication parameters as follows m IP 10 1 0 10 m Port 5000 Alcatel Vacuum Technology France AMS 200 User s manual 9 14 C 206H The System presets 3 The software parameters 3 1 The PLC soft settings tab o iParameters M aie DEMO Item Designation Software configuration tab and PLC soft settings tab Stop process on He alarm Alarm 1249 D Param None D process None User 1 Signification Selection of the software parameters related to the PLC Check this option if you want to stop the current process if an anomaly has been detected about the He backside cooling pressure In this case a fault is triggered N2 heater control CZ42 HTR3T Check this option if your machine is equipped with a liquid nitrogen bottle
6. Technology France AMS 200 User s manual 5 14 ams01581 doc Edition 10 October 06 C 206H The System presets ae Item Designation LF generator run mode Signification If your machine is equipped with a LF type generator you have to choose its operating mode a Normal mode the incident power delivered by the generator is constant a Pulsed mode the incident power delivered by the generator is pulsed as follows Incident power in W High level Low level _ _ Time in ms 1 High level duration 2 Low level duration Note the high and low levels for power and duration are set in the step edition window Alcatel Vacuum Technology France AMS 200 User s manual 6 14 C 206H The System presets ae Item Designation Temperature range Signification m if your machine is equipped with a liquid nitrogen bottle set Min 180 C and Max 60 C m if your machine is equipped with a chiller set Min 30 C and Max 60 C Heated liner Check this option if your machine is equipped with a heated liner on the reactor Pressure tolerance for process position mode The position of the throttle valve is adjusted to reach the pressure preset value As long as the pressure value is equal to this preset value the pressure tolerance value in percentage the position
7. ers configuration tab Backup frequency Specifies how often you want to automatically save the AMS 200 database Backup directory Selection of the directory in which the AMS 200 database file will be saved Backup presets at When this option is checked the AMS 200 database is automatically startup saved whenever the AMS 200 application is launched O00 ams01581 doc Edition 10 October 06 Alcatel Vacuum Technology France AMS 200 User s manual 14 14
8. ng recipe is automatically carried out after each etching recipe and after the dechucking recipe if it has been selected m when you want to run a batch processing you must select a cleaning recipe in the Run Process screen otherwise you cannot launch the batch processing execution order O Mandatory Important this option is available only if your machine is equipped dechucking with an ESC PIN chuck process When this option is checked m a dechucking recipe is automatically carried out after each etching recipe and before the cleaning recipe if it has been selected m when you want to run a batch processing you must select a dechucking recipe in the Run Process screen otherwise you cannot launch the batch processing execution order User s manual This combo box allows you to define the directory in which the path machine user s manual will be saved Defect data sheets This combo box allows you to define the directory in which the defect path data sheets will be saved Alcatel Vacuum Technology France AMS 200 User s manual 13 14 C 206H The System presets 4 Database backup 72 10 2006 ALCATEL FACIE B Hardware configuration Communication Software configuration Database baci kid Back Lang User DEMO D Param None D process None User 1 Item Designation Signification Database backup Selection of the backup paramet
9. on Constructor Database backup et PC soft settings W Vv aie DEMO D Param None D process None User ALCATEL DRIER cepstop Moa Item Designation Signification 1 Software Selection of the software parameters related to the PC configuration tab and PC soft settings tab CSV separator Selection of the CSV separator type used when exporting the data uu logging files Default value is 3 Data logging When this option is checked the data logging curves are automatically curves automatic saved to a text file csv extension at the end of batch processing in export the directory selected in the combo box item 4 So they can be used by a standard spread sheet software ams01581 doc Edition 10 October 06 O Back up directory Combo box available only if the Data logging curves automatic export option item 3 has been checked It allows you to select the directory in which the data logging curves will be saved at the end of batch processing Alcatel Vacuum Technology France AMS 200 User s manual 12 14 ams01581 doc Edition 10 October 06 C 206H The System presets n S Ptem presets PC soft settings aie DEMO D Param None D process None User ALCATEL Dp erostop MDAs Item Designation Signification O Mandatory When this option is checked cleaning between wafers m a cleani
10. this time has elapsed the power supplies polarity is inverted on the ESC chuck Notes m this value is a default value applied only when there is no process in progress i e during a semi automatic transfer m during a process this value is not used and the system sets the ESC alternation time set in the current step edition window Alcatel Vacuum Technology France AMS 200 User s manual 2 14 ams01581 doc Edition 10 October 06 C 206H The System presets 2 5 Hardware configuration Communication Software configuration Database backup yes JS Process Settings i ss a pv a pss 2 E E sunen An DEMO D Param None D process None User 1 Item Designation Signification O Analog command Check this option if your machine is equipped to manage the ESC of electro static voltage In that case you have to adjust the power supplies voltage chuck ESC voltage parameter ESC voltage Notes m this option is automatically selected if the ESC power supply is a HVS 2000C type m this value is a default value applied only when there is no process in progress i e during a semi automatic transfer m during a process this value is not used and the system sets the ESC alternation time set in the step in progress Alcatel Vacuum Technology France AMS 200 User s manual 3 14 ams01581 doc Edition 10 October 06
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