User Manual PZ72E - Physik Instrumente
Contents
1. See Computer Control amp Hyperbit p 5 for information on PI support of external operation with a DAC card in a PC 3 3 External Operation with DC Offset WWVW pi ws For external operation with offset the offset potentiometer or equivalent must be activated jumper X4 see Section 6 3 2 and attached and an external DC signal applied to Control IN The position of the potentiometer wiper voltage is added to the analog control input signal The result must be in the 2 to 12 V range Excursions below 0 V and above 10 V should be of minimal duration to assure maximum piezo life With for E 610 CO0 PZ 72E Release 6 1 0 Page 8 Operating Modes Piezo Nano Positioning PI example an offset setting of 5 V the control input could range from 7 to 7 V 23 4 Open Loop Voltage Controllecl Operation In open loop mode there is no position servo control In this mode the PZT drive voltage is proportional to the control signal input in combination with the DC offset potentiometer if installed and activated The sensor electronics works independently and outputs the current piezo position on sensor monitor even though that value is not used internally in open loop mode provided a sensor is connected The PZT output voltage can be monitored either directly in parallel with the PZT or on main connector pin 8a which carries a high impedance output of 1 100th the voltage of the PZT The analog input is2. Driver E 500 ACD is free of charge but requires the LabVIEW environment from National Instruments for operation In addition Die patented Hyperbit technology for providing position resolution higher than that of the D A board is available for purchase as an option E 500 HCD The PI Analog Controller and Hyperbit drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards Instructions for downloading the Analog Controller drivers is given in a Technical Note 1 3 Safety Precautions DANGER Read This Before Operation E 610 modules are OEM amplifiers generating HIGH VOLTAGES for driving LVPZTs The output power may Cause serious injuries When working with these devices or using PZT products from other manufacturers we strongly advise you to follow the General Accident Prevention Regulations All work done with and on the modules described here requires adequate knowledge and training in handling High Voltages Be sure to connect pin 32a c to a Protective Ground CAUTION Electrostatic Hazard Electronic components are sensitive to electrostatic electricity Take appropriate electrostatic protection measures when removing modules www pi ws E 610 C0 PZ 72E Release 6 1 0 Page 5 Piezo Nano Positioning PI Introduction CAUTION Equipment Damage Most piezo stages that can be connected to this cont
3. ILS for minimizing second order polynomial non linearity To adjust the ILS proceed as follows see Main Board and E 802 55 Submodule on p 21 for location of the ILS adjustment 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application In multi axis systems make sure the PZTs are always connected to the same controller modules 2 Mount an external gauge to measure the PZT displacement Only if the external measurement system offers higher precision than the capacitive sensor the maximum performance can be achieved E 610 CO0 PZ 72E Release 6 1 0 Page 16 E 610 Calibration Piezo Nano Positioning PI With PZT power amplifier powered down the external gauge should read O0 if it does not note the offset and subtract it from subsequent readings A Scan the control input voltage at from 0 V to 10 V and read the PZT displacement using an external gauge 4 Adjust the Integrated Linearization System ILS by turning the ILS potentiometer TR103 and observe the linearity of the PZT displacement 5 6 Static Gain Adjustment WWVW pi ws It should only be necessary to readjust the static gain if system components have been interchanged or altered Before doing so reading the detailed description of the sensor processing system is recommended Capacitive Sensor User Manual The objective of static gain adjustment is to ensure
4. This document is available as PDF file Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings DANGER Indicates the presence of high voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The E 802 Servo Control Submodule which comes with the E 610 CO LVPZT Controller is described in its own manual Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws E 802 User Manual PZ150E The E 610 versions with LVDT and strain gauge sensor processing as well as the E 610 amplifier only version are described in a separate manual PZ 7OE Contents Introduction 3 Mi Preschbed S c r 3 12 General Descrpton na 4 121 OerVOSG OD Ol EE 4 E el ele e EE 4 123 Computer Control amp Hyperbit oo eccccecceeseeeeeaeeeeeeeeeees 5 49 Salley PrECAUNOMS EE 5 Description 7 2p Mam WIOG UN EE T 22 NMCIUGEE GCONNECIOR neea 7 Operating Modes 8 31 Manual Offset Operation 8 232 Extemal ODpS
5. To avoid such non linearities a slew rate limitation is added to the control circuit This feature guarantees wide signal bandwidth without overdriving the power amplifier There are additional potentiometers for optimizing closed loop operation See the E 610 Calibration Section for details 4 3 User Electronics and Sensor Monitor Signal WWVW pi ws If you are connecting your own electronics to the sensor monitor signal on main connector p 28 and JP 202 make sure it has sufficient input capacitance to eliminate high frequency interference It may be necessary to add a 4 7 nF ceramic NPO or COC type to the input connector Use shielded cable if possible otherwise make sure the lead pair is tightly twisted User Electronics Sensor Monitor Output Fig 2 Electronics on Sensor Monitor line with required input capacitance E 610 CO0 PZ 72E Release 6 1 0 Page 13 E 610 Calibration Piezo Nano Positioning PI 5 E 610 Calibration NOTE If your unit is delivered with the PZT actuator that it is to drive it will have been configured and calibrated with that actuator at the factory Be careful not to interchange actuators and controllers if you have more than one It should not be necessary to recalibrate the system unless hardware changes are made It may be necessary to adjust the zero point if operating conditions such as load or temperature change greatly All piezo positioning systems with a PZT tran
6. external gauge should show the PZT at about nominal expansion Adjust with the sensor gain trim potentiometer TR101 see Fig 4 Sensor gain is now close enough to allow switching servo ON 8 Setservo ON 9 Agjust the sensor monitor signal to exactly 10 000 V using the gain adjustment potentiometer on the E 802 servo submodule different versions of this submodule exist see the E 802 User Manual for gain adjustment on your unit 10 Adjust the PZT position to the nominal expansion value using the sensor gain adjustment Now because servo ON the sensor monitor value will not change 11 Repeat the last two steps until you get stable readings If the gain settings have been changed the zero point adjustment starting with section 5 4 should be repeated and then the static gain rechecked 5 7 Dynamic Calibration Dynamic performance of the PZT system is determined by the maximum output current of the amplifier and by the mechanical properties of the PZT mechanics like moving mass damping and resonant frequencies Dynamic calibration optimizes step response and suppresses resonance overshoot and oscillation These servo loop notch filter and slew rate limitation setting procedures are all described in detail in the E 802 Servo Control Submodule User Manual WWVW pi ws E 610 CO PZ 72E Release 6 1 0 Page 18 Electronics Piezo Nano Positioning PI G Electronics The basic circuit design of the amplifier and controller m
7. fluctuations of up to 10 of the line voltage B Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 B Degree of pollution 2 E 610 C0 amplifier controller modules are designed to drive and to control low voltage piezoelectric translators LVPZTs with capacitive sensor position feedback E 610 modules for use Any more stringent specifications in the Technical Data table are of course also met E 610 CO0 PZ 72E Release 6 1 0 Page 3 Introduction Piezo Nano Positioning PI with SGS or LVDT sensors are described in a separate manual 1 2 General Description The E 610 CO is a single channel amplifier and position controller with an average output power of 6 watts The design is based on a controllable DC DC converter optimized for driving capacitive loads The E 610 CO can be operated from a single DC voltage from 12 to 30 V 1 2 1 Servo Control Position feedback is the most effective way to suppress hysteresis and creeping effects The E 610 CO includes excitation and readout electronics for capacitive position sensors with which the piezo translators can be controlled to sub nanometer resolution E 610 versions for use with strain and inductive sensors are also available and are described in a separate manual The analog input signal control signal can either driv
8. that the PZT actuator expands to its nominal expansion when a control signal input of 10 V is applied DC offset set to 0 or disabled by jumper X4 rear The zero point must be appropriately set before the static gain adjustment can be performed This is an iterative process The static gain adjustment procedure is as follows location of adjustment elements on the E 802 submodule is described in the E 802 Servo Submodule User Manual location of mainboard elements in Section 6 3 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application 2 Mount an external gauge to measure the PZT displacement with PZT power amplifier powered down the external gauge should read 0 if it does not note the offset and subtract it from subsequent readings 3 Setservo mode to SERVO OFF 4 Make sure the DC Offset potentiometer if installed and activated is still set to zero or deactivate it 5 Setcontrol input to O V E 610 CO0 PZ 72E Release 6 1 0 Page 17 PI E 610 Calibration Piezo Nano Positioning 6 Connect 15 V and GND to the E 610 module NOTE For starting the module a current of at least 1500 mA is required otherwise the internal oscillator will not start Only 400 mA are required after start up 7 Scan the control input voltage from 0 V to 10 V and read the PZT displacement using the external gauge With 10 V the
9. EClO EE 28 Appendix Piezoelectric Positioning Topics 29 9 1 Low Voltage Piezoelectric Translators LVPZT 29 92 Sensors for Low Voltage PZT Translators 0nn00n0nnaaanaan 30 Introduction Piezo Nano Positioning PI 1 Introduction 1 1 www pi ws Prescribed Use Based on their design and realization the E 610 CO LVPZT Controllers are intended to drive capacitive loads in the present case piezoceramic actuators The E 610 CO must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads E 610 CO0s can be operated in closed loop mode using capacitive position sensors Appropriate sensors are provided by PI and integrated in the mechanics according to the mechanics product specifications Other sensors may be used as position sensors only with permission of PI Observe the safety precautions given in this User Manual E 610 CO0s conform to Measurement Category CAT I and may not be used for Measurement Categories ll Ill or IV Other use of the device i e operation other than instructed in this Manual may affect the safeguards provided E 610 C0s meet the following minimum specifications for operation B Indoor use only m Altitude up to 2000 m B Ambient temperature from 5 C to 40 C B Relative humidity up to 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C B Line voltage
10. Front Panel Indicators The green LED indicates that the module is powered up and in operation The amber LED lights when an overflow condition occurs Le an attempt to drive the PZT voltage under 20 or over 120 V 6 3 Adjustment Elements and Gonnectors 6 3 1 Main Board and E 802 55 Submodule d IP20 II 3 enable DC offset BIRO X4 DC DC Controller a bypass E 802 Sal X3 yes no PZT Amplifier PZT out Jumpers for meas range wid PEE ai H f ue a JP107 arge a 5 Bs E 802 Kb tt LPL fy y o P1P2 P3 P6 P4 P5 JP203 JP202 L Fig 4 E 610 CO component layout top view through cover plate Main Board J P107 Sensor polarity 1 2 default positive increasing gap results in increasing voltage at Sensor Monitor 2 3 negative J P202 3 pin header connector with signals also on main connector Pins Function 1 PZT monitor Sensor monitor GND www pi ws E 610 C0 PZ 72E Release 6 1 0 Page 21 Electronics WWVW pi ws Piezo Nano Positioning PI J P203 Jumper Connects internal Vcc to GND If open bipolar operation enabled Default closed J P201 3 pin connector for external offset potentiometer Pin 2 wiper for increasing displacement with clockwise motion connect Pin 1 to pot CCW side Pin 3 to pot CW side TR10I sensor Gain TR102 sensor Zero adjust TR103 ILS 2nd order linearization SWI1OL 3 position switch for sensor bandwidth P
11. Piezo Nano Positioning PI PZ 72E User Manual E 6 11 C CC cvpzt Controller Release 6 1 0 Date 2006 11 30 This document describes the following product s B F 610 CO LVPZT Controller OEM for Capacitive Sensors Strain gauge and LVDT sensor E 610 versions are described in a separate manual PZ 7OE O Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG C Manufacturer s Auf der R merstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Low Voltage Piezo Amplifier Controller Module Model Numbers E 610 Product Options all conforms to the following EMC Standards and normative documents Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Electrical equipment which is intended to be integrated in other electrical equipment only conforms to the cited EMC Standards and normative documents if the user ensures a compliant connection when implementing the total system Possible necessary measures are installation of the component in a suitable shielded enclosure and usage of suitable con
12. V and GND to the E 610 module Note that for starting the module a current of at least E 610 CO0 PZ 72E Release 6 1 0 Page 15 E 610 Calibration Piezo Nano Positioning PI 1500 mA is required otherwise the internal oscillator will not start Only 400 mA are required after start up 5 Ifyou use your own capacitive sensors adjust the sensor mechanical zero position For details see Section 5 3 on page 15 6 Set the module to voltage controlled servo OFF open loop by opening jumper S101 AND making sure that pin 28a is not connected to ground 7 Adjust the offset by tuning potentiometer TR102 zero adjust on the module main board accessible from the front panel 8 Now exercise the PZT over the nominal expansion range by applying analog signals 0 10 V to pin 10c Then set the PZT to O with O V at 10c 9 Read the voltage at pin 22a or JP 202 sensor monitor Use the zero potentiometer to adjust the reading to zero The zero point is now close enough to allow going into servo mode 10 Setthe unit to servo ON 11 Again using the zero potentiometer adjust until the PZT monitor out main connector or JP 202 or the PZT voltage itself is 0 V Because servo control is now active the sensor monitor signal will not change the servo controller will move the PZT and hence the sensor until its output is again zero 5 5 Second Order Polynomial Linearization WWVW pi ws The capacitive sensor electronics includes a trim pot
13. e the power amplifier input directly or be fed through a slew rate limiter and notch filter and or a position servo control circuit The maximum output voltage ranges from 20 to 120 V so as to support the full extension capability of PI low voltage translators 7 2 2 Applications WWVW pi ws E 610 modules can be used for static and dynamic applications High output stability and low noise assures stable micropositioning Because LVPZT translators have high capacitances the amplifiers are designed to supply appropriate high peak currents for dynamic applications Excellent linearity and stability allows the use of E 610 modules in precision measurement and control systems omall size and compact design combined with excellent specifications make the E 610 series controller a preferred module for OEM users Although the modules were designed to drive PZT positioning elements they can also be used to drive other systems which require controlled operating voltages E 610 CO0 PZ 72E Release 6 1 0 Page4 Piezo Nano Positioning PI Introduction 1 2 3 Computer Control amp Hyperbit Computer control of an E 610 can be realized using a DAC board in a PC to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The Analog Controller LabVIEW
14. entiometer Deactivating the pot when none is attached may reduce noise imperceptibly X4 outer jumper Toward rear DC offset potentiometer deactivated default Toward front panel DC offset pot activated The inner jumper X3 more difficult to access controls bypassing the E 802 Servo Control Submodule X3 inner jumper Toward rear Use E 802 default Toward front panel Bypass E 802 servo control not possible notch filter amp slew rate limiting also off www pi ws E 610 C0 PZ 72E Release 6 1 0 Page 23 Electronics Piezo Nano Positioning PI 6 4 Servo Control Electronics WWVW pi ws Servo control is implemented in a plug in submodule the E 802 It should not be necessary to remove or replace the submodule but if you ever do so note the submodule component side direction as shown in Fig 4 The E 802 submodule processes the control signal for the amplifier driving the piezoelectric translators Slew rate limitation notch filter and servo control loop are all implemented on the E 802 The servo control section of the E 802 55 can be switched off by an electrical signal jumper S101 opened AND main connector pin 28a not connected to ground but notch filter and slew rate limiting remain active The E 802 can be completely bypassed by placing the inner jumper of the PZT amplifier section in the front position see p 23 The servo loop logic compares the control voltage input target and the sensor sig
15. iezoelectric Positioning Topics Low Voltage Piezoelectric Translators LVP2ZT Low voltage piezoelectric translators are micropositioning elements operated within a nominal voltage range from O to 100 V Expansion values given in PI main catalog are based on this nominal voltage range Due to the excellent manufacturing quality including sophisticated insulation techniques LVPZ translators made by Physik Instrumente can be used beyond their nominal operating voltage range The maximal allowed voltage range covers 20 to 120 V This extended operating range gives 40 more expansion than the nominal values LVPZTs specified with 40 um nominal expansion can thus be used with a range of 56 um Positive voltages cause the PZT to expand negative voltages cause it to contract The maximum test voltage in the positive direction is 150 VDC Applying negative voltages to the LVPZT cause an electrical field opposed to the polarization direction The PZT contracts Depolarization can occur if the negative voltage exceeds 40 V Although in many cases the LVPZT can be repolarized by applying an electric field in the right direction we recommend not exceeding the allowed operating voltage range Physik Instrumente will refuse any warranty claim after over voltage operation The negative voltage with maximum allowable magnitude is 20 V If you are working with original Physik Instrumente electronics the LVPZTs always will be driven in thei
16. ing Modes E 610 CO0 units can be operated as simple power amplifiers i e in voltage controlled mode where the PZT output voltage depends directly on the input control voltage and DC offset This is also known as open loop or servo off operation They can also be operated in position controlled closed loop mode In position controlled mode the control input plus DC offset is interpreted as a target position and the signal from the position sensor is used as input to a servo control feedback loop Position controlled mode permits elimination of drift and hysteresis In both open and closed loop modes the units can be operated manually or via an external analog control input voltage or by a combination of the two 3 7 Manual Offset Operation In manual operation the target voltage or position is controlled manually with an external 10 kQ DC offset potentiometer not included This potentiometer must be connected to pins 12a 10 V 14a GND and the wiper to pin 12c and it must be activated by placing jumper X4 toward the front panel The factory default for X4 is toward the rear see Section 6 3 2 3 2 External Operation For external operation the offset potentiometer should be deactivated jumper X4 toward rear default see Section 6 3 2 and the target voltage or position is controlled by an external DC signal of 2 to 12 V Excursions below 0 V and above 10 V should be of minimal duration to assure maximum piezo life
17. nal actual position to generate the amplifier control signal using an analog proportional integral DJ algorithm For calibration procedures see Section 5 and the E 802 Servo Control Submodule User Manual E 610 CO0 PZ 72E Release 6 1 0 Page 24 PI Technical Data Piezo Nano Positioning 7 Technical Data 7 1 Specifications Channels Output voltage range Peak output current Max average output current Max average output power Control input voltage range Voltage gain Input impedance DC offset adjustment range Bandwidth Ripple of Uout Piezo output connector on front panel Main connector Sensor input connectors on front panel Front panel LED Sensor monitor output Overflow signal Max Power consumption Operating voltage range Operating current Dimensions E 610 CO0 PZ 72E Release 6 1 0 Single channel 20 to 120 V 140 mA 5 ms max 60 mA 6 W with forced air cooling gt 10 m3 h 2 to 12 V shiftable with DC offset 10 1 gt 100 kQ 100 volts wide adds 0 to 10 V to Control In See frequency response curves Figure below 20 mVpp at low frequencies 40 mVpp spikes at 30 kHz Lemo EPK 00 DIN 41612 D Eurocard connector 2x LEMO EPL 00 2 conductor target and probe individually shielded Green power on Red overflow attempt to drive PZT out 120 V or 20 V 0 to 10 V for nominal expansion Pin 26a TTL active high for cont
18. nectors September 2005 e yo Karlsruhe Germany Dr Karl Spanner President Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI Hyperbit U S Patent 6 950 050 The following designations are protected company names or registered trademarks of third parties Windows LabVIEW Copyright 1999 2006 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2006 11 30 Document Number PZ 72E Release 6 1 0 E 610C0O User PZ72E610 doc This manual has been provided for information only and product specifications are subject to change without notice About this Document Users of this Manual This manual is designed to help the reader to install and operate the E 610 CO LVPZT Controller with capacitive sensor processing It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts piezoelectric drives and applicable safety procedures The manual describes the physical specifications and dimensions of the E 610 CO LVPZT Controller as well as the installation procedures which are required to put the associated motion system into operation
19. nstructions DANGER Read This Before Operation E 610 modules are OEM amplifiers generating HIGH VOLTAGES for driving LVPZTs The output power may Cause serious injuries When working with these devices or using PZT products from other manufacturers we strongly advise you to follow the General Accident Prevention Regulations All work done with and on the modules described here requires adequate knowledge and training in handling High Voltages Be sure to connect pin 32a c to a Protective Ground On the main board of the E 610 modules a DC DC converter is installed with a 12 to 30 VDC input voltage range The converter generates 25 and 125 V for the power amplifier and 15 V for the sensor and servo controller NOTE When powering up the module the DC DC converter needs a peak current of about 1 5 A to start oscillating The power supply should have a buffer capacitor or the external power supply should be able to supply the 1 5A for at least 1 second The inputs and outputs of the DC DC converter are not connected internally Using an unipolar power supply we recommend connecting the negative supply at pin 18a c with the Test GND at pin 20a c This provides a defined GND level and helps to minimize noise WWVW pi ws E 610 CO PZ 72E Release 6 1 0 Page 11 Piezo Nano Positioning PI Installation and Operation NOTE Calibration If your unit is delivered with the PZT actuator that it is to drive it
20. odules is shown in the drawings on the following pages Input signals at main connector pin 10c and the signal from the external DC offset potentiometer are combined in the preamplifier stage Depending on the model configuration the resultant signal will be used either as input for the amplifier or as input signal for the position servo control circuit WWVW pi ws E 610 CO PZ 72E Release 6 1 0 Page 19 Piezo Nano Positioning PI Electronics 6 1 Block Diagram E 80 2 Sensor 22a Servo C ontrol Montor i JP 202 Su bme dule Pin ensor 2a IT EE 7 Sei i 7 CH l 7 Probe Sensor Sensor in EE Band E e Servo ON OFF Ext Target S Target Value p on i EES e e zi M rrr ran m e 1da amp c22c Aake Sync SUE 3 External Servo ON OFF pin 28a is only Sensor Excitation S effective if jumper X3 is properly set In and at older E 802 versions 28a switches notch 26a Readout p ue dm er ES filter and slew rate limiter as well as Servo control Contreller eut Power Suppl e 125V E SEA 2 tor PZT 15Vv Moniter 25W Power Amp adhi Ba ac lez PZT Gut g Ge i Ch i E Ref 10 v x4 9 l NE 2 JOK e Pieze d Ext Amplifier in put L XV 12 Fig 3 E 610 CO0 block diagram WWW pi ws E 610 CO0 PZ 72E Release 6 1 0 Page 20 Piezo Nano Positioning PI Electronics 6 2
21. offset potentiometer activated by jumper X4 Connect any monitoring instruments you want to use See Section 4 3 if you will be using the Sensor Monitor signal CAUTION Equipment Damage Most piezo stages that can be connected to this controller can be damaged or destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately and check the settings and servo control parameters www pi ws E 610 C0 PZ 72E Release 6 1 0 Page 12 Installation and Operation Piezo Nano Positioning PI Insert the module in the main connector and power up the system With O DC offset and servo control ON an analog input signal of 10 V should cause the PZT to expand to its nominal value At zero input the sensor monitor voltage at main connector 22a also on JP 202 should also measure zero If not perform the Electrical Zero Point Calibration described on p 15 At the nominal PZT expansion pin 22a should measure around 10 V Most dynamic applications require the power amplifier to deliver a short peak current higher than the average value Because of the limited power of the transistors this peak is limited to about 5 ms in length After this time the current decreases to the average value There may be cases where the control signal calls for an even higher peak current but the required current cannot be supplied
22. on pin 10c With DC offset at zero the nominal input voltage range is O to 10 V for a O to 100 V output voltage range For some applications where the full expansion capability of the piezo translators is needed the full output voltage range of 20 to 120 V can be used The corresponding input voltage range is then 2 to 12 V If the input signal available is bipolar adjust the external DC offset potentiometer or an equivalent divider to the appropriate setting When set for example to provide a 50 V output with 0 V input a Control input in the 5 to 5 V range will cover the full nominal output range O to 100 V 3 5 Closed Loop Position Gontrolled Operation WWW pi ws E 610 CO0s have position sensor processing electronics for closed loop operation Closed loop operation differs from open loop operation in that the analog control input plus any DC offset is interpreted as a target position rather than a target voltage Closed loop operation offers both drift free and hysteresis free positioning The servo control electronics is implemented on a plug in submodule the E 802 See the E 802 User Manual for The entire E 802 Servo Control submodule including notch filter and slew rate limiter can be bypassed with Jumper X3 see Section 6 3 2 or the servo control section on the E 802 can be switched off electrically with jumper 101 or by shorting main connector pins 28a and 20a In this case with E 802 55s the slew
23. operations in the application In multi axis systems make sure the PZTs are always connected to the same controller modules 5 3 Mechanical Zero Point Adjustment Capacitive sensors have a mechanical zero point adjustment The mechanical zero point adjustment procedure is discussed in the Capacitive Sensor User Manual 5 4 Electrical Zero Point Calibration WWVW pi ws Electrical zero point calibration has the goal of making the point of zero expansion coincide with the point of zero control input voltage There might be some small deviation of the electrical zero point caused by thermal drift or changes in mechanical loading Let the system warm up for several minutes before setting the zero point If the electrical zero point is adjusted properly the full output voltage range of the amplifier can be used and only a small offset is required to get a zero reading This prevents overflow conditions from arising due to improper match of actual and desired expansion windows The adjustment procedure is as follows see Section 6 3 for location of adjustment elements 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application 2 Make sure the control input is O V 3 If there is a DC Offset potentiometer installed and activated make sure it is in the O V position usually full counterclockwise or deactivate it 4 Turnon the 15
24. osition 4 300 Hz Position 2 3000 Hz Position 3 1500 Hz J P101tojJP106 Sensor Measurement Range Measurement range No meas Jumper Positions The jumper group is shown as arranged on the main board see component map Fig 4 Units are delivered set as required for the attached stage With no information on the stage PI sets units to 1 0 J P1 1 2 Internal Synchron master default 2 3 External Synchronization slave J P2 1 2 DC DC converter clock 200 kHz default 2 3 DC DC converter clock 100 kHz should not be used S101 Jumper not installed open loop Installed closed loop default E 610 CO0 PZ 72E Release 6 1 0 Page 22 Piezo Nano Positioning PI Electronics E 802 55 Servo Control Submodule P1 Slew rate of control input P2 Gain of servo loop P3 Integral term of servo loop PA Notch filter frequency P5 Drift compensation 6 3 2 PZT Amplifier Section Jumpers oN Fig 5 Bottom view of PZT Amplifier section with jumpers circled color may differ X3 inner here blue and X4 outer here white shown in default positions toward rear of module The PZT Amplifier section is on small PCB soldered to the main board It carries the two barely accessible 3 pin jumpers X3 and X4 see Fig 5 which can be positioned either toward the front panel or toward the main connector at the rear default Jumper X4 closest to the edge of the board controls activation of the DC offset pot
25. r safe operating area and cannot be damaged LVPZT stages however may sustain other damage if driven at their mechanical resonant frequency E 610 CO0 PZ 72E Release 6 1 0 Page 29 Piezo Nano Positioning PI Appendix Piezoelectric Positioning Topics 9 2 Sensors for Low Voltage PZT Translators Low voltage piezoelectric translators are available with integrated position sensors Most of the piezo driven stages and tip tilt mirror systems are also equipped with internal sensors Three main classes of sensors are used strain gauge sensors SGS linear variable differential transformers LVDT and Capacitive sensors The E 610 CO is for use with capacitive sensors only These sensors provide the highest degree of accuracy See the Capacitive Sensor User Manual for more information WWVW pi ws E 610 CO PZ 72E Release 6 1 0 Page 30
26. ralon sauer tado teta ae e ERO MEE 8 33 External Operation with DC Offset eseeeeeueseeess 8 34 Open Loop Voltage Controlled Operation 9 35 Closed Loop Position Controlled Operation 9 Installation and Operation 11 41 General Instr ctlofis is t ET c o ber ben ia e Dr hot ida 11 EE ge 18 TEENS 12 43 User Electronics and Sensor Monitor Gonal 13 E 610 Calibration 14 51 Equipment Needed for Calibration 14 92 e e de EE 15 o3 Mechanical Zero Point Adjustment sse 15 54 Electrical Zero Point Calibration eese 15 55 Second Order Polynomial Linearization 16 56 Static Gain Adjustment esee 17 o HEIEREN 18 Electronics 19 Gl Eet BI QAI TEE ZU 6 2 Front Panel Indicators 5 Eeer 21 Contents 63 Adjustment Elements and Connectors ssnsenonnsnnorrerrerennne 21 631 Main Board and E 802 55 Submodule 21 632 PZT Amplifier Section Jumpers 23 64 Servo Control Electonce 24 Technical Data 25 ee leie mxtbucirmisnttsen cH UD rU EI 25 L2 Jreduency RESPONSE EE 26 S SN e e ee EE 26 Pin Assignments 27 8 1 System Connection Summary esseeseeesseeeenneene 27 O2 2 Pih Mall GOHDeclol ipo dtr CA Pes tprv dia biuP E cEa opu uova tiU 28 83 Sensor COnNnN
27. rate limiter and notch filter remain active E 610 CO0 PZ 72E Release 6 1 0 Page 9 Operating Modes WWVW pi ws Piezo Nano Positioning PI details In position controlled mode it is the output of the P I proportional integrated controller that is used as input to the amplifier The piezo position is refined until the final position is reached In this controlled mode the PZT position is directly proportional to the module s input signal while the PZT supply voltage may not be The operating voltage for the PZT must remain in the range from 20 to 120 V If one of these limits is reached and the resulting expansion of the PZT does match that specified by the control signal a TTL signal overflow is output on pin 26a Die standard calibration procedure assures that the PZT reaches its nominal expansion value when the control input signal is 10 V To enable closed loop mode perform both of the following steps 1 Set jumper X3 to the use E 802 position i e toward the rear of the module default 2 Provide the Servo ON signal to the E 802 by EITHER connecting rear connector pins 28a and 20a OR closing jumper S101 The notch filter and slew rate limiter are also active Disabling servo mode will not always deactivate them See the E 802 User Manual for details E 610 CO0 PZ 72E Release 6 1 0 Page 10 Piezo Nano Positioning PI Installation and Operation 4 Installation and Operation 4 1 General I
28. re pins the 32 pins of the D version all carry even number 5 6 mI designations and are in rows a and c only PZT output a 2 c PZT output PZT GND a 4 c PZT GND nc a 6 c nc Monitor PZT out 100 1 a 8 c internal use Internaluse a 10 c Amplifier input 10 kOhm pot 10V a 12 c Pot wiper 10 kOhm pot GND amp a 14 c Pot 10 kOhm GND amp test GND test GND VCC supply a 16 c VCC supply VCC supply a 18 c VCC supply connect to 20c for minimum noise Test GND a 20 c Test GND Sensor monito a 22 c Sensor monitor GND Test GND nc a 24 c nc Overflow TTL a 26 c nc Servo OFF ON select a 28 c Internal use Internal use a 30 c Cap sensor excitation external clock sync Protective GND a 32 c Protective GND Sensor Monitor and PZT Monitor are also available on JP 202 86 3 Sensor Connectors E 610 CO modules have two 2 pin LEMO sockets on the front panel for the sensor connection Because of the high accuracy of capacitive sensors and hence their sensitivity to noise these lines are not duplicated on the main connector Probe and target lines are individually shielded Do not interchange the probe and target connectors See the Capacitive Sensor User Manual for more information on capacitive sensors Internally grounded by jumper JP203 as default WWVW pi ws E 610 CO PZ 72E Release 6 1 0 Page 28 Appendix Piezoelectric Positioning Topics WWVW pi ws Piezo Nano Positioning PI Appendix P
29. rol voltage lt 2V or gt 12V 15 W 12 to 30 VDC max ripple 50 mV pp 15 V recommended 2 A max EURO board 160 x 100 x 35 6 mm Page 25 Technical Data Piezo Nano Positioning PI 7 2 Frequency Response Amplitude V 10 Frequency Hz Fig 6 E 610 open loop frequency response with various PZT loads Values shown are capacitance in uF measured in actual PZT 7 2 Dimensions 4x M2 5x6 1807045 Fig 7 E 610 CO0 dimensions in millimeters WWwW pi ws E 610 CO PZ 72E Release 6 1 0 Page 26 Piezo Nano Positioning PI Pin Assignments amp Pin Assignments 8 1 System Connection Summary For operation at least the following elements must be connected cree Eeee P pe Connector Somme cies ooo 12 30 VDC 18a amp c et out A I PZT GND aus Bu mE closed am Pens dametm JL Lemasonneotr Gaston Cowoin ic o O PFP o DC offsetpot_ 12a12c amp 1dac 1 1 GND J2088c14a amp C Protective GND 32a amp c_ Syncinorout er TI multiaxis The DC offset pot may be missing deactivate with X4 or the Control In signal shorted but not both WWVW pi ws E 610 CO PZ 72E Release 6 1 0 Page 27 Piezo Nano Positioning PI Pin Assignments S 2 32 Pin Main Connector Because the DIN 41612 connector standard includes types with mo
30. roller can be damaged or destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately and check the settings and servo control parameters www pi ws E 610 C0 PZ 72E Release 6 1 0 Page 6 Piezo Nano Positioning PI Description e Description 2 1 Main Module E 610 CO0 controllers are designed as EURO board plug in modules which can be installed in a desktop chassis as well as in a 19 rack mount chassis They feature sensor excitation and processing for capacitive sensors including demodulator various filters and ILS 2 2 Included Connector Included with the E 610 CO module is a connector matching the main connector of the module This socket is designed for installation completely inside the user housing If the controlled piezo actuator is outside the user housing the E 610 CO0 should be installed so as to make the front panel sensor and PZT drive voltage sockets accessible Inserting additional connectors in the sensor lines would require special care to avoid excessive noise introduction and such connectors are not usually provided e LE PF P j a EC Fig 1 Included DIN 41612D connector mates with Eurocard main connector See 32 Pin Main Connector p 28 for pinouts WWVW pi ws E 610 CO PZ 72E Release 6 1 0 Page 7 Operating Modes Piezo Nano Positioning PI 3 Operat
31. slator are delivered with performance test documents to verify the system performance The servo controller is calibrated prior to shipment in our labs Normally there is no need for the customer to perform a full calibration Only if the PZT the sensor extension cable or the mechanical setup is changed may new calibration be necessary The system is ready for operation upon delivery PZTs and their assigned controllers are matched and should be considered as a unit The serial numbers of the PZTs installed are marked on the individual modules Some calibration steps however must be performed in any case either to compensate different loading and mounting details or to tune dynamic behavior for stable operation NOTE For some calibration steps the cover plate has to be removed to make certain test points or components on the add on PCB accessible 5 1 Equipment Needed for Calibration WWVW pi ws Zero point adjustment requires a voltmeter Static displacement calibration requires an external expansion gauge with appropriate resolution e g 0 01 um for a P 841 30 actuator and a precision voltmeter Access to adjustment elements on the submodules while the system is in operation is necessary so an extension connector may be required E 610 CO0 PZ 72E Release 6 1 0 Page 14 E 610 Calibration Piezo Nano Positioning PI 5 2 Preparations Mount the PZT actuator in the same way and with the same load as during normal
32. will have been configured and calibrated with that actuator at the factory Be careful not to interchange actuators and controllers if you have more than one It should not be necessary to recalibrate the system unless hardware changes are made It may be necessary to adjust the zero point if operating conditions such as load or temperature change greatly For details see section E 610 Calibration beginning on page 14 4 2 System Setup First decide on an initial operating mode either voltage controlled open loop see Section 3 4 or position controlled closed loop Section 3 5 and set the system jumpers and switches to the corresponding positions see Section 6 3 Note that with E 802 55 model servo control submodules the notch filter and slew rate limiter stay on in open loop unless the submodule is bypassed jumper X3 See the E 802 User Manual for details If multiple E 610s are to be operated as part of the same system it will probably be necessary to synchronize the sensor excitation clocks to avoid interference This is done by setting the master slave jumpers JP1 to slave position 2 3 on all units except one and connecting the synchronization line pin 30c main connector of all units together Connect the actuator and sensor to the front panel connectors For best accuracy never interchange the target yellow and probe blue sensor connectors Also connect the control input signal and if any connect the
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