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MS-631FL High Capacity Rotary Vane Pumps

1. M SS I RE ES ES EN RE EN EEE RE EN Us EA DI CA D FT aaa T JUN e mm mm PT FT mum um mbar abs RPS1401 631FL Graph of delivery capacity vs inlet pressure with 50 Hz motor Figure 11 with gas ballast without gas ballast valve mbar abs RPS1401 631FL Graph of delivery capacity vs inlet pressure with 60 Hz motor Figure 12 with gas ballast without gas ballast valve Roots pump RP1401 de Vane Pump MS 631FL 71 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 5 Technical Information Dimensions The following drawing show the pumps layout and dimensions relevant to the RPS3001 631FL pumps 2 DN150 Pn16 EN1092 2 aa L Ter HH e EE LL I H Figure 13 Dimension of RPS3001 631FL pumps Dimensions subject to changes depending on motor brand 72 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 n Yi ne pump MS 631FL u 2 Roots pump RP3007 ass E ee B o D Vibration damper No Gas ballastvave I EA0 Ilj U Vacuum port MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 73 129 Technical Information Dimensions
2. 50 129 Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected temperature from 5 C to 40 C relative humidity 0 95 non condensing To ensure short circuit or overload protection an automatic circuit breaker of appropriate capacity must be installed on the main power line towards the pump The capacity of the switch must be compatible with the rating plate data of the motor actually installed and must be chosen by the installer Connect by adopting all the current applicable rules and regulations Fill the pump with lubricating oil before starting it The pump is supplied empty Take out the protective caps on the suction and exhaust flanges before doing anything else In the event of an accidental start up the air inside the pump could violently expel the protective caps and harm the operator MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Instructions forUse 4 WARNING During installation pay maximum attention that the suction flange is connected to the vacuum chamber and the exhaust flange is not closed see figures below Be very careful not to invert exhaust and suction Maximum pressure inside the oil container must not exceed 1 5 bar abs Non observance of these pr
3. Figure 23 _ MS 631FL Pump parts Exploded View 2 of 4 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 107 129 5 Technical Information Servicing Figure 24 MS 631FL Pump parts Exploded View 3 of 4 108 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Figure 25 MS 631FL Pump parts Exploded View 4 of 4 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 109 129 5 Technical Information Servicing i Figure 26 MS 631FL Pump accessories Exploded View 110 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Pump Parts for MS 631FL Tab 11 Pump Parts for MS 631FL Pos Spare Parts P N Description 0 Ty 1 Body of pump 1 2 06x30 Pin 4 3 BG O Ring 41050 2 4 External side cover 1 5 M12x60 Hex Screw flanged and knurled 11 6 0100 Space washer 1 1 B 6309 Ball bearing 2 8 Rotor 1 9 B Vane 3 10 B IR 45x50x35 Bushing 1 11 Motor side cover 1 12 Shim ring 1 13 Oil seal ring cover 1 14 B G BABSL 50x65x7 Seal ring 1 15 BG BAB 50x65x7 Seal ring 1 16 068x2 5 Seeger 1 17 B G O Ring 4400 1 18 M8x40 Hex Screw flanged and knurled 3 19 Plate 4 20 Plate support 4 21 06 Washer 12 22 06 Lock washer 12 23 M6x16 Hex Socket head screw 12 24 Mbx12 Hex Socket screw 4 25 02 5mm Adapter 4 26 1 8 G Al Washer 5 27 1 8 G Plug 5 28 A 12x8x70 Key 1
4. UE Agilent Technologies 9 129 1 Istruzioni per l uso Informazioni Generali Informazioni Generali 10 129 Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le MS 631FL High Capacity Rotary Vane Pumps sono delle pompe rotative monostadio a palette a tenuta in bagno d olio azionate da un motore elettrico trifase Queste pompe da alto vuoto sono adatte esclusivamente al pompaggio di aria e piccole quantit di vapore d acqua Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Istruzioni per l uso 1 Questo manuale utilizza le seguenti convenzioni A2 messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni p
5. 100 101 102 103 104 105 106 107 108 109 110 111 112 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 139 Spare Parts P N B RG B gt gt gt gt gt G Technical Information 5 Description Oil filter O Ring 4512 Inlet valve body Helicoidal spring Inlet valve plate DN150 Intake manifold Loop compensator Support filtering Inlet filtering baffle 0110 4 Seeger O Ring 4362 M16x110 Stud bolt 016 Washer 016 Lock washer M16 Nut 3 8 G Al Washer 1 8 G Plug Oil cooler support Rubber sealing float valve O Ring 108 M8x16 Hex Screw flanged and knurled Oil cooler Fan cover sleeve Upper safety mesh Frontal safety mesh Lower safety mesh M20 Threaded bushing M6x12 Hex Screw flanged and knurled M20 Eyebolt M14x90 Hex Socket head screw Motor flange M12x35 Hex Screw flanged and knurled Motor side coupling half Fan cover sleeve Fan hub M8x20 Hex Screw flanged and knurled M8 Nut flanged and knurled Electric motor M16x67 Stud bolt MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 0 Ty 113 129 5 Technical Information Servicing Pos Spare Parts P N Description 0 Ty 140 M10x25 Hex Sock Stud bolt 1 141 Vibration damping foot extension long 4 142 Vibration damping foot 6 143 Vibration damping foot extension short 2 144 Casing 1 145 06 Washer 6 146 M6x12 Hex head screw fully thre
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7. 5 IE a NU LIE 2 IA A n EL SEEN 108 Mo BO Se im with gas ballast HE Lol dod RME Sm I ssi Sash Se SSS 1 SERS eee Eee e mum crum cm um unc II I 7 RSS Re KS CELLULE RRS Li without gas ballast valve 50 Hz motor mbar abs mbar abs Figure 14 RPS3001 631FL Graph of delivery capacity vs inlet pressure with Roots pump RP3001 with gas ballast 2 RPS3001 631FL Graph of delivery capacity vs inlet pressure with 60 Hz motor without gas ballast valve Vane Pump MS 631FL MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Figure 15 1 74 129 Technical Information 5 Safety Precautions CAUTION Despite of all the precautions adopted when designing the equipment there are some risk elements that arise during operation and servicing WARNING The temperature of the pump surfaces may exceed 80 C Install the pump in a protected area accessible only by authorized personnel to prevent possible personal injures due to contact with hot surfaces The pump can be placed inside other machines
8. 86 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Figure 20 Positioning It must be accessible to suitable lifting equipment Air change in the room or inside the machine where the pump has been installed must be ensured Avoid exceeding 40 C ambient temperature The pump must be protected against jets or sprays of water that may penetrate the tank through the exhaust port Whenever the pump is installed outside it must be protected against atmospheric agents MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 87 129 5 Technical Information MS 631 to MS 631FL Transformation WARNING Do not let hot air coming from the exhaust or cooling fans causing discomfort to personnel WARNING Do not install the pump in a dusty area or where other materials may block or quickly cover the cooling surfaces 88 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Connection to the Vacuum System The connection to the chamber to be pumped down must be carried out by means of pipes of the same diameter as the inlet port Pipe weights and expansions if any must not rest on the pump It is advisable to make the final connection to the pump with flexible pipes or fittings It is important that all the pipes and the different fittings are tight and if possible check with
9. 1 u u fas ballast pipe rear side 1 _ 202 BI recovery pipe Inn Gasket 25X17 5 L 825 Gasket 1 204 en Gasket 9X6 L 1200 lu 209 ne Gasket 25X17 5 L 819 n 206 Gasket 22X10 L 28 lu E 207 OA SRE 22X10 Bla Di 208 nn Gasket 9X6 L 345 n u 2098 ne Gasket 22X10 L 7135 lu me 240 Gasket 29X1 7 9 290 0 0 0 a nn Gasket 22X10 EDG ne Cu _ DE ne Gasket 22X10 162959 n DI DIOR Rivet 214 Pump name plate 1 A Connection Kit Dn160 ISO K B Major maintenance kit R Minor maintenance kit G Gasket MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 115 129 Technical Information Servicing 5 Pumps with full options Figure 27 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 116 129 Spare Parts Technical Information 5 Spares Necessary for Normal Servicing Agilent recommends the use of spare parts as follows 1 Spare parts included in the Minor Maintenance Kit listed on pages 111 to 115 with R and indicated in the relevant Pump Parts tables These parts are needed for ordinary maintenance operations to be performed by users or by Agilent personnel Spare parts included in the Major Maintenance Kit listed on pages 111 to 115 with B and indicated in the relevant Pump Parts tables These parts are needed for more complex maintenance operations to be performed mostly by Agilent personnel Other spare parts listed with S
10. A 65 129 5 Technical Information Dimensions k blet mui _____________ ______ co Cooling air inlet E D _Cooling air outlet ____ Ee Ofllingplg E PF Oil level sight glass GT QOldenpug Ho mp mame plate 00000 E Le Rotation plate i Mo Lifting eyebolt 000 i M Sas ballast valve 0000000 Oo Hot surfaces name plate nn i Vibration damper 000000 66 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Figure 5 MS 631FL Graph of delivery capacity vs inlet pressure with 50 Hz motor without gas ballast valve with gas ballast Figure 6 MS 631FL Graph of delivery capacity vs inlet pressure with 60 Hz motor without gas ballast valve with gas ballast MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 67 129 5 Technical Information Dimensions The following drawing show the pumps layout and dimensions relevant to the RPS2001 631FL pumps 2 DN150 Pn16 EN1092 2 Figure Dimension of
11. Eingriffen und Benutzung unter Missachtung der nationalen Bestimmungen ber nimmt Firma Agilent keinerlei Haftung Die Pumpen MS 631FL High Capacity Rotary Vane Pumps sind dichte Olbadgeschmierte einstu fige Fl gelzellenpumpen die von einem Dreipha senstrommotor betatigt werden Diese Hochvakuumpumpen eignen sich fur das Pumpen von nicht korrosiven Gasen In den folgenden Abschnitten sind alle erforderlichen Informationen fur die Sicherheit des Bedieners bei der Verwendung des Gerats aufgefuhrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Gebrauchsanleitung 2 In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben WARNUNG Diese Warnung weist auf gef hrliche Arbeitsschritte hin die bei unsachgem er Durchf h rung das Risiko von Personensch den bergen VORSICHT Diese Warnung weist auf Arbeitsschritte hin die das Risiko von Sch den am Ger t bergen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 23 129 2 Gebrauchsanleitung Lagerung Lagerung Wahrend des Transports und der Lagerung der Pumpen sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 15 C bis 50 C Relative Feuchtigkeit 0 95 niederschlagsfrei Vor der Install
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14. an Agilent leak detector Very long or small diameter pipes will decrease the pump performances Discharge Air Pipe Line Installation When required it is possible to pipe the pump discharge air to other rooms or outside Use pipes with the same diameter as the tank discharge port with a maximum length of 15 m For longer pipes increase pipe diameter Pipe weights must not rest on the pump In the final length use flexible pipes or pipe fittings WARNING This pipe must be descending to avoid the condensate going back to the tank CAUTION Do not connect ball valves to this pipeline MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 89 129 5 Technical Information MS 631 to MS 631FL Transformation Electrical Connection WARNING The control panel and electrical connections must be carried out by skilled personnel and conform to the EN 62204 1 rules or any other local regulations in the country of use CAUTION The electrical equipment must comply with EN 61000 6 4 and 61000 6 2 standards concerning electromagnetic compatibility emission standard and immunity for industrial environments Check the main voltage and frequency in use to correspond to the data stamped on the motor name plate The electrical motor must be protected against overload The full amperage on the motor name plate must be considered when sizing the electrical components and motor protection against overload
15. appareil a t concu en vue d une utilisation professionnelle Il est conseill a l utilisateur de lire attentivement cette notice ainsi que toute autre information fournie par Agilent avant de l utiliser Agilent d cline toute responsabilit en cas de non respect total ou partiel des instructions fournies d utilisation incorrecte de la part du personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les MS 631FL High Capacity Rotary Vane Pumps sont des pompes rotatives mono tages a palettes tanches en bain d huile actionn es par un moteur lectrique triphas Ces pompes haut vide sont adapt es au pompage de gaz non corrosifs Les paragraphes suivants fournissent toute l information n cessaire pour garantir la s curit de l op rateur pendant l utilisation de l appareil Des renseignements plus d taill s se trouvent dans l appendice Technical Information 34 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Mode d emploi 3 Cette notice utilise les signes conventionnels suivants NT EESTI Les messages d avertissement attirent l attention de l op rateur sur une procedure ou une man uvre sp ciale dont la mauvaise execution risque de provoquer de graves lesions Ia Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareil Les notes contie
16. by adopting the necessary safeguards Before carrying out any maintenance on the pump be sure the pump is cold WARNING The discharged air contains part of traces of oil mist Check the compatibility with the environment A failure of the seal wear can cause an oil leakage Avoid the dispersion to the ground and the pollution of other materials In case that any air containing dangerous substances must be pumped down for example biological or microbiological agents make sure to adopt filtering systems before introducing air in the work environment Used discharged oil from the pump must be disposed in accordance with the regulations in force in the Country of use Avoid any contact with the pump inlet port during the pump operation Introduce air through the inlet port before every operation cycle Any contact with parts under vacuum can cause injuries MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 75 129 5 Technical Information Safety Precautions 76 129 WARNING The pump tank is pressurized Do not open the oil filling and discharge plugs during operation All maintenance operations must be carried out by skilled personnel with the pump idle disconnected from the electrical supply Make sure to cold and vented to atmospheric pressure and prevent unexpected start up e g block the power switch with a lock Some components of the electrical equipment are electrical
17. deve essere scelto da chi effettua l installazione Il collegamento deve essere effettuato adottando tutte le vigenti norme applicabili Prima di avviare la pompa occorre procedere al rifornimento di olio lubrificante poich la pompa viene fornita scarica Togliere i tappi di protezione posti sulle flange di aspirazione e scarico prima di ogni operazione L aria contenuta all interno della pompa in caso di accensione involontaria pu proiettarli violentemente contro l operatore e ferirlo MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Istruzioni per l uso 1 Durante l installazione prestare la massima attenzione che la flangia di aspirazione sia collegata alla camera da evacuare e che la flangia di scarico non sia tappata vedere le figure seguenti Prestare la massima attenzione a non invertire lo scarico con la mandata La massima pressione interna al contenitore dell olio non deve superare 1 5 bar assoluta L inosservanza di queste precauzioni pu causare danni alla pompa ed all operatore Flangia di scarico 2 s Flangia di aspirazione Figura 2 MS 631FL 2 Controllare che la tensione di alimentazione corrisponda al campo di valori indicati sulla targhetta del motore Collegare la pompa all alimentazione MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 15 129 1 Istruzioni per l uso Trasformazione MS 631 in MS 631FL Trasformazione MS 631 in MS 631FL La pomp
18. distance between the fan Item 133 and the sleeve Item 122 is approximately 6mm WARNING Failure to observe the installation dimensions can cause serious damage to operators and or the pump MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 81 129 5 Technical Information Installation and Operation Teer CAPE UOI i Dre US E 1 din Irre PEUT id L Figure 17 Electric motor assembling 82 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 MS 631 to MS 631FL Transformation The pump MS 631 can be transformed in the version MS 631FL designed for the installation of a Roots pump by means of a conversion kit available from Agilent From the MS 631 pump disassemble the inlet flange Item 108 by removing 4 socket head screws Item 109 Remove the Inlet valve disk assembly Item 106 and its O Ring Item 102 107 Protect the pump inlet from accidental entrance of impurities Remove the four Vibration damping feet Item 179 removing the nuts Item 107 and washers Item 105 106 Replace the Vibration damping foots Item 179 on the two Vibration damping feet extensions Pos 177 included in the Transformation kit re using nuts Item 107 and washers Item 105 106 previously removed Install the Vibration damping feet extensions Item 177 under the
19. e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Istruzioni per l uso 1 Preparazione per l installazione NOTA La pompa non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere Figura 1 Imballo MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 13 129 1 Istruzioni per l uso Installazione Installazione AVVERTENZA ATTENZIONE AVVERTENZA 14 129 Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali temperatura da 5 C a 40 C umidit relativa 0 95 non condensante Per proteggere contro cortocircuiti o sovraccarichi necessario installare un interruttore automatico sulla linea d alimentazione principale verso la pompa di capacit adeguata La capacit dell interruttore deve essere compatibile con i dati indicati sulla targhetta del motore effettivamente installato e
20. good practice to run it with the gas ballast open and the inlet line closed for a few minutes before switching off in order to limit the risk of corrosion or scaling due to pollution of the oil by condensed vapors 96 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Safety Rules Personnel responsible for pump operation and maintenance must be well trained and must be aware of the accident prevention rules The accident prevention precautions contained in this section must be respected at all times during operation and maintenance of the pump to avoid damage to operators and to the pump These precautions are provided in the form of WARNING and CAUTION notes Operating procedures technical information and precautions which if not respected and or implemented correctly may cause body harm to operators CAUTION Operating procedures technical information and precautions which if not respected and or implemented correctly may cause damage to the pump MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 97 129 5 Technical Information Warning Notes Warning Notes Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force Always disconnect the power supply to the pump before maintenance work Place a special warning signs over the power supply breaker switch MACHINE UNDERGOING
21. has been exposed to the following substances i uu i e explosive substances or dioxins PCB s without written evidence of decontamination by selecting YES you MUST complete the table to the right Toxic o LLL Harmful __ I Corrosive Reactive o Flammable Ovs Ono j p Explosive o ee Radioactive 7 po Biological Owo j O Oxidizing Sensitizer PO Other dangerous substances Ow Goods preparation If you have replied YES to one of the above questions Has the product been purged YES L NO If yes which cleaning agent method Has the product been drained from oil YES NOT APPLICABLE confirm to place this declaration on the outside of the shipping box I declare that the above information is true and complete to the best of my knowledge and belief I understand and agree to the terms and conditions on page 2 of this document Authorized Signature Position NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Page 3 of 3 Agilent VPD Request for Return United States Agilent Technologies
22. per la presenza di parti in movimento e di alta tensione 1411174 Nel caso si debba procedere ad operazioni di manutenzione della pompa al termine di un prolungato periodo di esercizio necessario lasciarla A raffreddare poich la temperatura esterna pu superare gli 80 C 18 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A AVVERTENZA AVVERTENZA Istruzioni per l uso 1 Escludere sempre l alimentazione della pompa prima di compiere operazioni di manutenzione Apporre specifici cartelli di avvertenza APPARECCHIATURA IN MANUTENZIONE NON INSERIRE L ALIMENTAZIONE in corrispondenza dell interruttore di alimentazione Al termine ripristinare i dispositivi di sicurezza Non effettuare la sostituzione dell olio subito dopo l arresto della macchina in quanto la temperatura dello stesso pu essere elevata Prima di rispedire al costruttore una pompa per riparazioni indispensabile compilare e far pervenire al locale ufficio vendite la scheda Request for Return allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo della pompa prima della spedizione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 19 129 1 Istruzioni per l uso Smaltimento Smaltimento Significato del logo WEEE present
23. pump using the bolts supplied in the kit Item 178 105 106 107 Tighten the four captive screws M16 Item 104 on the inlet side of the pump Fit the O ring Item 94 103 in the headquarters of the intake manifold Item 98 Push the inlet manifold assembly Item 98 99 100 101 102 over the four studs Item 104 previously implanted on the pump Close the intake manifold by tightening the nuts Item 107 and washers Item 106 105 supplied with the kit Transformation The maximum torque of the nuts is 32nm MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 83 129 5 Technical Information MS 631 to MS 631FL Transformation Mount the plug Item 109 and washer Item 108 on the intake manifold Place the bolts provided to anchor the roots Item 195 196 19 198 Place the O Ring Item 199 in place in the intake manifold Item 98 MS631FL 9991007101712 TIT 104 7 ail 1 Figure 18 LEGENDA Components supplied in the kit Transformation Item referenced to the exploded view of the MS 631 pump refer to the specific manual code 87 900 136 01 Assembly of the pumping monobloc The pump MS 631FL is designed to support Roots pumps with flanged DN150 Pn16 EN1092 so as to compose a group of volumetric pumping see following table 84 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A T
24. that all joints and couplings are locked correctly before starting the pump again after repair work J Do not wear any objects that may become entangled in the mechanisms and or act as conductors chains bracelets etc k Ensure that the tools to be used are in perfect working condition and have insulating grips where necessary Check that the insulating material of the cables and that the conductors of the test equipment do not show any signs of damage Do not replace the oil immediately after stopping the machine as the oil may still be at high temperature m Perform repairs in clean and where possible dust free areas Protect all the clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again n Do not start the pump if the fan cover sleeve reference 122 of fig MS 631FL Pump parts Exploded View is not properly in place MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 99 129 5 Technical Information Caution Notes Caution Notes a Before putting the pump back into operation after a breakdown inspect it and check carefully for any other signs of damage b Use only tools that are in perfect working order and specially designed for the job use of inappropriate or ineffective tools may cause serious damage Perform repairs in clean and where possible dust free areas Protect all th
25. the lubrication procedures MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Section Ill Servicing Technical Information 5 General Information Before every maintenance operation Ensure that the pump motor is disconnected from the electrical network so that it can t automatically start Make sure the pump has reached an ambient temperature Introduce air in the inlet port In order to keep the pump operating at a high efficiency level it is mandatory to follow all periodical service foreseen in the User Manual of the MS Vane pump or RP Roots pump used However more frequent service operations may be necessary depending on what the pump is used for suction of condensable vapours suction of powders or polluting substances For such cases only direct experience can indicate the correct service frequency needed Please contact Agilent Technical Support for further details The exhausted oil and replaced spare parts must be considered as special waste products and handled according to the local regulations in the country of use MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 105 129 5 Technical Information Servicing XS S N J 101 C3 Figure 22 MS 631FL Pump parts Exploded View 1 of 4 106 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 SS lt was 2 ZA P IH WIN
26. types of gas vapor contact Agilent to obtain the authorization to the specific use Operation in automatic mode For an automatic control is necessary to obtain a signal from a vacuum switch or absolute pressure transducer placed in the chamber to be evacuated In the event of continuous working cycles is necessary to install an automatic shut off valve on the suction circuit At its closure the Roots pump shall be automatically stopped to prevent the overloading of the next cycle In the event of longer pauses between one cycle and the next one you can also stop the MS vane pump It is necessary to stop the RP Roots pump in case of blocking of the MS vane pump Operation in manual mode It is necessary to turn the pumps manually for the setup and maintenance phases In this mode it is recommended to predict the block operation of the RP Roots pump when the MS vane pump is not already running MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 95 129 5 Technical Information Stopping the Pump Stopping the Pump There are no special procedures for switching the pump off it needs only to be disconnected from the electric power When the pump is stopped the anti suckback device makes it possible to maintain vacuum in the vessel connected on the inlet flange of the pump If the pump is expected to be stopped for a lengthy period or in any case if it has pumped in large amounts of vapors it is
27. 29 5 Technical Information Technical Data The following table lists the main technical data of RPS2001 631FL pumps Tab 2 Technical Data Technical Data Units RPS2001 631FL N TTT T s ll TU BALLAST VALVE CLOSED absolute Pascal lt 7 101 na ao 7 E BALLAST VALVE OPEN absolute Pascal lt a _ TT n Mi e un According to UNI EN ISO 2151 standard dB A at 60 Hz 78 vi tne miei T PA i gom n BOR According to PNEUROP standard 6602 Valid for temperature up to 40 C and altitudes lower than 1000 m 62 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 The following table lists the main technical data of RPS1401 631FL pumps Tab 3 Technical Data Technical Data Units RPS1401 631FL NOMINAL SPEED m3 h at 50 Hz 1430 m3 h at 60 Hz 1720 ULTIMATE TOTAL PRESSURE WITH GAS mbar lt 7 103 BALLAST VALVE CLOSED absolute m Prev ULTIMATE TOTAL PRESSURE WITH GAS mbar 2 102 BALLAST VALVE OPEN absolute i gt ar _ 5 START UP PRESSURE RP1401 absolute mbar lt 130 FITTED MOTOR POWER MS RP kW at 50 Hz 15 5 5 400 V kW at 60 Hz 18 5 5 5 460 V NOISE PRESSURE LEVEL dB A at 50 Hz 75 According to UNI EN ISO 2151 standard i OIL C
28. 29 Coupling half pump side 1 30 B R Elastic coupling insert 1 40 B G Body of pump spacer gasket 1 41 Pump tank spacer 1 42 M10x70 Hex Socket head screw 10 43 M10x35 Stud bolt 10 44 M10 Nut flanged and knurled 10 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 111 129 5 Technical Information Servicing Pos Spare Parts P N Description 0 Ty 45 B G Tank spacer gasket 1 46 Tank 1 4 1 4 G Al Washer 1 48 1 4 G Plug 1 49 3 4 G Al Washer 1 50 3 4 G Plug 1 51 Motor side upper cover 1 52 B RG Upper cover gasket 2 53 M10x30 Hex Socket head screw 36 54 Demister support mesh 1 55 Tank demister 1 56 Stay bolt for exhaust filter 5 57 B G O Ring 4200 10 58 B RG Exhaust filter 5 59 Exhaust filter stay bolt sleeve 5 60 Disk for exhaust filter 5 61 08 24 Washer 5 62 Al 98 4 13x1 Washer 5 63 M8x25 Hex Socket head screw 5 64 1 1 2 G Al Washer 6 65 1 1 2 G Plug 6 66 External side upper cover 1 67 Tank mesh 1 68 Tank micro stretched sheet 1 69 Motor side lower cover 1 70 BG Gasket for lower cover 2 80 R 1 G Oil sight glass 2 81 1 G Fibre washer 4 82 1 1 4G Al Washer 1 83 1 1 4G Plug 1 84 Ext side tank cover 1 85 1 G Filling discharge plug 2 86 Float valve 1 87 Float port 1 88 B G O Ring 4093 1 89 M4x8 Hex Sock Stud bolt 1 90 05 Washer 2 91 Mbx16 Hex Socket head screw 2 92 1 1 4G Nipple 1 112 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Pos 93 94 95 96 97 98 99
29. 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 59 129 5 Technical Information Technical Description The separated oil is recovered automatically by the pump A standard gas ballast valve prevents condensation inside the pump even when pumping down small quantity of vapour Here after are shown symbols used to identify the threaded ports SD This symbol identifies the inlet port ZF This symbol identifies the exhaust threaded port 60 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Technical Data The following table lists the main technical data of MS 631FL pumps Tab 1 Technical Data Technical Data Units MS 631 UN ace TTT on ees O gt ui uS BALLAST VALVE CLOSED Pascal lt 10 ULTIMATE TOTAL PRESSURE WITH GAS mbar 05 ___ BALLAST VALVE OPEN Pascal 50 i TT TT DO ibe RPS MIDI bdo en ME A valve According to UNI EN ISO 2151 standard dB A at 60 Hz 73 Ben mm Ha 7 a verba m z n E LX E A NS Em m n Tr ani iii mo n m t c II gt According to PNEUROP standard 6602 Valid for temperature up to 40 C and altitudes lower than 1000 m Depending from motor MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 61 1
30. APACITY MS RP nominal 22 1 5 WEIGHT with 3 ph 50 Hz motor Kg Ib 868 1911 94 with 3 ph 60 Hz motor Kg Ib 937 2063 92 According to PNEUROP standard 6602 Valid for temperature up to 40 C and altitudes lower than 1000 m MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 63 129 5 Technical Information Technical Data The following table lists the main technical data of RPS3001 631FL pumps Tab 4 Technical Data Technical Data Units RPS3001 631FL N ww Tana m a s ll BALLAST VALVE CLOSED absolute Pascal lt 7 101 na a 3 BALLAST VALVE OPEN absolute Pascal lt en _ er o aa TT n TENET e Li 11 7 NS According to UNI EN ISO 2151 standard dB A at 60 Hz 78 5 via tte mio e PA wu oo 8 gom luce min According to PNEUROP standard 6602 Valid for temperature up to 40 C and altitudes lower than 1000 m 64 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Dimensions The following drawing show the pumps layout dimensions and rotational direction relevant to the MS 631FL pump 1436 SOHZ 1479 60Hz DN150 Pn16 EN1092 Figure 4 Dimension of MS 631FL pumps Dimensions subject to changes depending on motor brand MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01
31. Ablass nicht mit der Ansaugung verwechselt wird Der Druck im lbeh lter darf nicht gr er als 1 5 bar abs sein Bei Nichtbeachtung dieser Anweisungen besteht Schadensgefahr f r die Pumpe und die Bedienperson Ablassflansch Saugflansch Abbildung 2 MS 631FL VORSICHT Vergewissern Sie sich dass die Versorgungsspannung mit dem Wertbereich auf dem Typenschild des Motors bereinstimmt Die Pumpe an das Versorgungsnetz anschlie en MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 27 129 2 Gebrauchsanleitung Umwandlung MS 631 in MS 631FL Umwandlung MS 631 in MS 631FL Die Pumpe MS 631 kann in die Version MS 631FL umgewandelt werden Dabei wird sie durch ein von Agilent zu lieferndes Kit fur die Installation einer Rootspumpe eingerichtet Detaillierte Informationen finden sich im Anhang Technische Informationen 28 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Gebrauchsanleitung 2 Gebrauch Das Einschalten der Pumpe fordert keine besonderen Vorgange es ist ausreichend diese mit Strom zu verbinden damit sie zu pumpen beginnt Fur den korrekten Anschluss beziehen Sie sich bitte auf den mit der Pumpe gelieferten Schaltplan Die Pumpe ist fiir den Betrieb mit neutralen und nicht korrosiven Fluiden konzipiert Der Einsatz mit potentiell explosions oder feuergefahrlichen Substanzen ist streng verboten In den Dreiphasenmotoren ruft eine Polar
32. MAINTENANCE DO NOT POWER ON If you are performing maintenance after the pump has been operating for a considerable time allow sufficient time for it to cool as the external surface temperature may be in excess of 80 C Failure to provide the pump with an earth connection may cause serious damage to operators Always ensure that there is an earth connection and that it complies with the standards When cleaning the pump and its component parts avoid the use of flammable or toxic solvents such as benzin benzol ether or alcohol The recommendation is to use a soap and water solution preferably in ultrasound washing machines taking care to dry all the cleaned parts at temperatures under 100 C in order to eliminate residual moisture Prolonged overloads or breakdowns may cause the electric motor to overheat and to release noxious smoke remove the power immediately as a precaution and do not approach the pump at least until you have provided ventilation to drive out the smoke Take care not to breathe in the fumes remaining inside the pump in the course of repair work In case of fire do not throw water on the pump Switch the power off and use CO extinguishers Carefully inspect the flanges to ensure that there is no dust oil dirt or defects of the mating surfaces before making the required connections 98 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 i Ensure
33. MS 631FL High Capacity Rotary Vane Pumps Models X3753 64000 X3753 64002 X3753 64004 X3753 64006 X3753 64090 X3753 64091 X3753 64092 X3753 64093 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 142 01 A 01 2014 RES Agilent Technologies Notices Agilent Technologies Inc 2013 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 142 01 A Edition Edition 01 2014 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any info
34. R on the Pump Parts tables at pages 111 to 115 are available for sales to Agilent customers How to Order Spare Parts When ordering spare parts always state the pump model type serial number year of production electric motor characteristics three phase power voltage frequency position reference on the spare parts list description and quantity needed MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 117 129 5 Technical Information Spare Parts Orderable Parts 118 129 Tab 12 Description X3753 64000 X3753 64002 X3753 64004 X3753 64006 X3753 64090 X3753 64091 X3753 64092 X3753 64093 X3753 64094 X3753 64089 X3760 64003 949 5087 949 5088 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Orderable parts Part number MS 631FL 15kW 400 690V 50Hz DN150 MS 631FL 18 5kW DN150 MS 631FL 18 5kW 230 460V 60Hz DN150 MS 631FL 18 5kW 220 380V 60Hz DN150 MS 631FL 400 690V 50Hz Full Optional MS 631FL Heavy Duty Full Optional MS 631FL 230 460V 60Hz Full Optional MS 631FL 220 380V 60Hz Full Optional MS 631FL without Motor Full Optional Frameless upgrade kit for MS 631 MS 01 Oil 22 It Minor Spare Part Kit Major Spare Part Kit Technical Information 5 De Commissioning Drain the oil from the pump prior to the removal If the oil is polluted flush the pump with fresh oil see Oil change procedure paragraph on the User Manu
35. RPS2001 631FL pumps Dimensions subject to changes depending on motor brand 1 Vane pump MS 631FL E Pont pump ean nr UU rr B Exhaust Bo Metin damper _______ E U Vacuum port 68 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 5 Technical Information Dimensions mbar abs RPS2001 631FL Graph of delivery capacity vs inlet pressure with 50 Hz motor Figure 8 with gas ballast without gas ballast valve mbar abs RPS2001 631FL Graph of delivery capacity vs inlet pressure with 60 Hz motor Figure 9 with gas ballast without gas ballast valve Roots pump RP2001 D Vane Pump MS 631FL 1 69 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 5 Technical Information Dimensions The following drawing show the pumps layout and dimensions relevant to the RPS1401 631FL pumps DN160 ISO K DN150 Pn16 wee 3 Gas NPT Figure 10 Dimension of RPS1401 631FL pumps Dimensions subject to changes depending on motor brand 1 Vane pump MS 631FL BB pump RPA _____ A Inlet es nn ig 95 Vibration damper 00000000 _ QM tt U Vacuum port 70 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 5 Technical Information Dimensions O E SY YC SC
36. a MS 631 pu essere trasformata nella versione MS 631FL ovvero predisposta per l installazione di una pompa Roots mediante un Kit di trasformazione fornibile da Agilent Informazioni dettagliate sono fornite nell appendice Technical Information 16 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Istruzioni per l uso 1 Uso L accensione della pompa non richiede particolari manovre sufficiente collegarla all alimentazione elettrica perch la pompa inizi ad operare Per il corretto collegamento fare riferimento allo schema elettrico fornito con la pompa A353 r4 La pompa progettata per operare con fluidi neutri o non corrosivi assolutamente vietato l impiego con sostanze potenzialmente esplosive o infiammabili Nei motori trifase un inversione di polarit provoca l inversione del senso di rotazione della pompa con conseguenti possibili danni di natura meccanica MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 17 129 1 Istruzioni per l uso Manutenzione Manutenzione Il personale addetto alla condotta ed alla manutenzione della pompa deve essere ben addestrato e deve avere un approfondita conoscenza delle norme antinfortunistiche ANSATZ Le alte tensioni possono causare morte al contatto Operare sempre con la massima cautela secondo le norme antinfortunistiche in vigore AU 3 d3 r4 Quando la macchina alimentata prestare attenzione
37. aded 6 147 Casing cover 1 148 3 4 G Cu Washer 4 149 Oil cooler tank oil pipe 1 150 Screw for 3 4 G fittings 2 160 3 8 G Cu Washer 18 161 Motor side lubrication pipe 1 162 Screw for 3 8 G fittings 9 163 Ext side lubrication pipe 1 164 1 4 G Cu Washer 2 165 Central lubrication pipe 1 166 Screw for 1 4 G fittings 1 167 1 8 G Cu Washer 8 168 Oil pipe outlet seal ring 1 169 Screw for 1 8 G fittings 4 170 Pump body support 2 171 M12x60 Hex Socket head screw 4 172 Base plate 1 173 R G 042 8x4 felt disk for gas ballast valve 2 174 012 Washer 6 175 012 Lock washer 6 176 M12x30 Hex head screw fully threaded 6 177 Vibration damping foot extension 2 178 M16x45 Hex Socket head screw 4 179 0100 Vibration damping foot 4 180 Eyebolt extension 1 181 M14x120 Hex Socket head screw 1 182 Distributor for gas ballast valve 1 183 1 2 G Al Washer 3 184 M F 1 2 G Extension 2 185 1 2 G Cul Washer 4 186 1 2 G Banjo male 2 187 1 2 G Ball valve 2 114 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Pos Spare Parts P N Description 0 Ty NE 1 2 G Gas ballast valve n N Screw for 1 2 G fittings lu NO V2 GPlug 1 IN G sess O Ring 3075 2192 nn Gi Viton disk 0 s 2199 O Ring 3143 s N 20 80 Hex head screw fully threaded n _ qij yg aa 020 Lock washer nn NT 020 37 Washer 16 NE M20 Nut _ LE A O Ring 6670 1 uM 200 u gas ballast pipe front side
38. al of the relevant pump Drain the oil from the tank plug the inlet and the exhaust ports and store the pump without oil In case of pump disposal separate the pump parts by materials and trash the parts in accordance with the local regulations in the Country of use Return for Repair In case of pump return for repair to Agilent please provide a list of substances which have come in contact with the pump and advice the risks involved in handling if any Drain the lubricant from the pump prior to shipping the pump back Fill in the form Request for Return before shipping the pump Before shipping the vacuum pump must be decontaminated The contamination degree of the pumps must be declared The pumping unit can not be shipped mounted Separate the Vane pump from the Roots pump before shipping MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 119 129 5 Technical Information Return for Repair Protect the inlet and exhaust flanges of the pumps with the relevant plugs see figure below Item 11 12 13 before shipping the pumps In the case of returning the pump Roots reassemble the feet see following figure Item 8 and fasten the pump on a pallet Figure 28 120 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 rn hlachnnt nrn irou b esnootng Troubleshooting Refer to the MS Vane pumps and RP Roots pumps User Manuals for troubles
39. ation 24 129 WARNUNG Die Pumpe MS 631FL wurde so entwickelt dass ber den Saugflansch die Rootspumpen von Agilent vom Typ RP1401 RP2001 und RP3001 angeschlossen werden k nnen Der Anschluss von Rootspumpen mit anderen Abmessugen oder anderen Bezeichnungen am Saugflansch der RVP Pumpe stellt eine Gefahr f r Menschen und Material dar Die Pumpe wird in einer Schutzverpackung gelie fert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Das Verpackungsgewicht h ngt vom Typ der Pumpe ab 600 kg bei einem 50 Hz Motor 650 kg bei einem 60 Hz Motor 430 kg ohne Motor Beim Auspacken ist darauf zu achten dass die Pumpe nicht fallengelassen oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgemafs zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umwelt schutz MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Gebrauchsanleitung 2 Vor der Installation Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht beschadigt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Abbildung 1 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 25 129 2 Gebrauchsanleitung Installation Installation VORSICHT 26 129 Die Pumpe darf ni
40. cht in Umgebungen installiert und oder benutzt werden die ungeschutzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions oder erhohte Brandgefahr besteht Wahrend des Betriebs sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 5 C bis 40 C Relative Feuchtigkeit 0 95 niederschlagsfrei Um vor Kurzschliissen oder Uberlastungen zu schiitzen muss ein automatischer Schalter an der Hauptspeisungsleitung zur Pumpe hin mit einer geeigneten Kapazitat installiert werden Die Kapazitat des Schalters muss mit den auf dem Schild des effektiv installierten Motors angegebenen Daten bereinstimmen und von dem Installateur gew hlt werden Der Anschluss muss bei Einhaltung aller geltenden diesbez glichen Vorschriften erfolgen Vor dem Pumpenstart muss die Pumpe mit Schmier l gef llt werden da sie ohne geliefert wird Vor Aufnahme jeglicher Arbeiten sind die Schutzkappen an den Saug und Druckflanschen zu entfernen Die im Pumpeninnern enthaltene Luft k nnte diese bei unbeabsichtigter Einschaltung gegen den Bediener schleudern MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Gebrauchsanleitung 2 WARNUNG Bei der Installation ist unbedingt darauf zu achten dass der Saugflansch an die zu entleerende Kammer angeschlossen ist und der Ablassflansch nicht verschlossen ist siehe folgende Abbildungen Bitte sehr darauf achten dass der
41. denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A MS 631FL High Capacity Rotary Vane Pumps MS 631FL High Capacity Rotary Vane Pumps MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 3 129 MS 631FL High Capacity Rotary Vane Pumps 4 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Contents 1 Contents Istruzioni per l uso 9 Informazioni Generali 10 Immagazzinamento 12 Preparazione per l installazione 12 Installazione 14 Trasformazione MS 631 in MS 631FL 16 Uso 17 Manutenzione 18 Smaltimento 20 Gebrauchsanleitung 21 Allgemeine Informationen 22 Lagerung 24 Vor der Installation 24 Installation 26 Umwandlung MS 631 in MS 631FL 28 Gebrauch 29 Wartung 30 Entsorgung 32 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 5 129 Co
42. dling Tab 9 WEIGHT UNITS MS 631FL With 3 ph 50 Hz motor approx Kg Ib 600 132 61 depending from motor mounted With 3 ph 60 Hz motor approx Kg Ib 650 1431 75 depending from motor mounted Without motor Kg Ib 430 947 16 During handling clear the area of operations in order to avoid injury to peolple or damage to property The personnel should use the most appropriate personal rotective equipment Unpacking and Components Control When receiving the pump check that the packaging is intact or shows any signs of damages occurred during transportation If there is no damage proceed to the unpacking and check the pump further In case of damages are found inform immediately Agilent and the carrier A representative will contact you or may be dispatched to the site to inspect and file full damage report 78 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Storage The pumps must be stored or transported without any oil and protected from the atmospheric agents at temperature between 15 C and 50 C humidity rate 95 non condensing The inlet flange and the threaded connection to the exhaust must be protected against dust entry The pump is shipped from Agilent equipped with special protective plugs sealing the input of the pump inlet and outlet CAUTION Pay attention to perform all operation indicated in the following paragraphs bef
43. e clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again d Always check the lubricant and that it is properly distributed through the pump inadequate lubrication may damage the pump seriously e Give the parts some form of marking as you strip them down to ensure that you reassemble them again in the proper order f Check that there are no scratches or grooves on the machined shafts in their seats inside the pump or on machine ground surfaces Slight scratches and abrasions may be eliminated with very fine emery paper or by a little light grinding g Before putting a group together always spread a little oil over inner parts and mating surfaces Replace all seals with original spare parts before reassembling components 100 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Maintenance Actions Maintenance may be seen as the totality of all scheduled and unscheduled maintenance work Maintenance includes 1 SCHEDULED MAINTENANCE Maintaining the nominal state of operation 2 UNSCHEDULED MAINTENANCE Restoring the nominal state of operation The frequency with which repairs are performed depends on the process and presence of substances that shorten pump life dust abrasives solvents water chemically aggressive substances The pump must be cleaned at regula
44. e sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 20 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A MS 631FL High Capacity Rotary Vane Pumps User Manual 2 Gebrauchsanleitung Allgemeine Informationen 22 Lagerung 24 Vor der Installation 24 Installation 26 Umwandlung MS 631 in MS 631FL 28 Gebrauch 29 Wartung 30 Entsorgung 32 Ubersetzung der Originalanleitungen gt Agilent Technologies 21 129 e 2 Gebrauchsanleitung Allgemeine Informationen Allgemeine Informationen 22 129 Dieses Gerat ist fur den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzinformationen genau lesen Bei vollstandiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten
45. ecautions may be dangerous for the pump and the operator Outlet Flange gt Inlet Flange Figure 2 MS 631FL CAUTION Check that your electrical mains voltage corresponds to the range indicated on motor label Connect the pump to the power supply MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 51 129 4 Instructions for Use MS 631 to MS 631FL Transformation MS 631 to MS 631FL Transformation MS 631 pumps may be turned into MS 631FL units i e they are ready for installing a Roots pump using a transformation kit supplied by Agilent See Technical Information for detailed information 52 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Instructions for Use 4 Use There are no special procedures for switching the pump on Simply connect to the electrical power supply to start it running Refer to the wiring diagram supplied with the pump for correct connection WARNING The pump is designed for operation with neutral or non corrosive fluids It is absolutely forbidden to use potentially explosive or flammable substances CAUTION In three phase motors reversing the phase will reverse the sense of rotation of the pump This may cause mechanical damage MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 53 129 4 Instructions for Use Maintenance Maintenance Personnel responsible for pump operation and maintenance must be we
46. echnical Information 5 Tab 10 nin E ai ee MS 631FL RPT4OT l RPST401 631FL n RP3001 RPS3001 631FL The Roots pump is connected in series to MS631FL which rises through a collector disk The suction is realized by the Roots pump the sucked air then passes to the vane pump from which it is discharged The pumping unit must be assembled on site by the user following the instructions below 1 Remove the caps of the pumps Pos 11 12 13 2 With suitable lifting equipment see manual pump Roots raise the Roots pump Item 7 and remove the feet Item 8 by unscrewing the 4 screws Item 9 3 the Roots pump Item 7 on the vane pump Item 1 Make sure that the O ring item 6 is positioned in its groove on the flange of the vane pump 4 Insert the 8 screws M20 Item 2 3 4 in the bottom flange and tighten the nuts Pos 5 4 on the upper flange Tighten the torque for each screw M20 250 Nm MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 85 129 5 Technical Information MS 631 to MS 631FL Transformation Figure 19 Assembling of the pump monoblock Positioning The pumping unit must be installed in a protected area see SAFETY PRECAUTIONS It must be fastened with support feet on horizontal surface It must be accessible for correct ands easy maintenance by respecting the minimum distances from possible obstructions see following figure
47. ersonali 2 messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 11 129 1 Istruzioni per l uso Immagazzinamento Immagazzinamento Durante il trasporto e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 15 C a 50 C umidit relativa 0 95 non condensante Preparazione per l installazione 14 412172 La pompa MS 631FL progettata per sostenere mediante la propria flangia di 12 129 aspirazione le pompe Root Agilent denominate RP1401 RP2001 e RP3001 Il posizionamento di pompe root di taglia diversa o con diversa denominazione sulla flangia di aspirazione della pompa RVP pu generare condizioni di pericolo per le apparecchiature e gli operatori La pompa viene fornita in un imballo protettivo se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Il peso dell imballo dipende dal tipo di pompa e puo essere di circa 600 Kg se presente il motore a 50Hz di circa 650 Kg se presente il motore a 60Hz di circa 430 Kg se non presente il motore Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa
48. hen City Tao Yuan Hsien 32450 Taiwan R 0 C Tel 886 3 4959004 Toll free 0800 018 768 vpw customerservice agilent com UK and Ireland Agilent Technologies UK Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Other Countries Agilent Technologies Italia S p A Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com chem vacuum Worldwide Web Site Catalog and Order On line www agilent com chem vacuum Representatives in most countries 12 13
49. hooting information MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 121 129 5 Technical Information Troubleshooting 122 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A it Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Reques
50. ible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The MS 631FL High Capacity Rotary Vane Pumps are single stage rotary vane pumps oil sealed driven by a three phase electric motor These high vacuum pumps are suitable for pumping non corrosive gases The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Instructions for Use 4 This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 47 129 4 Instructions for Use Storage Storage When transporting and storing the pumps the following environmental requirements should not be exceeded temperature from 15 to 50 C relat
51. ing Make sure the grounding is correctly done Carry out the electric connection following the diagram shown on the motor terminal box Check direction of rotation by starting the pump for a short time 2 or 3 seconds The correct direction is shown by the arrow on the pump see figure below In case of wrong rotation it is necessary to change the motor rotation by exchanging position of two of the three connections in the motor terminal box 90 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Figure 21 Direction of rotation When the motors are equipped with protective devices such as temperature thermostats thermal protectors thermistors etc connect the leads to the device adjusted to obtain the correct operation Wwe Run motors under nominal load for a certain period of time and compare the operating current with the one of the plates on the engines The detected current must be less than the one reported on the data plate MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 91 129 5 Technical Information MS 631 to MS 631FL Transformation WARNING The pump is supplied without lubricating oil CAUTION The operation without oil causes big damages to the pump CAUTION An amount of oil higher than necessary can cause oil separators clogs and damages to the vane pump or its electric motor Carry out the first oil filling followi
52. it tsumkehrung die Umkehrung der Pumpendrehrichtung hervor und kann somit eventuelle mechanische Schaden verursachen MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 29 129 2 Gebrauchsanleitung Wartung Wartung Das fur den Betrieb und die Wartung zustandige Personal soll geschult sein und uber eine solide Kenntnis der Unfallschutzvorschriften verf gen Hochspannungen k nnen bei Kontakt t dliche Folgen haben Es ist stets mit gr ter Vorsicht und gem den geltenden Unfallschutzvorschriften vorzugehen Bei eingeschaltetem Ger t ist auf Bewegungs und Hochspannungsteile zu achten Falls die Pumpe im Anschluss an den Betrieb gewartet werden soll ist abzuwarten bis sie abgek hlt ist da ihre Oberfl che eine Temperatur von 80 C berschreiten kann 30 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Gebrauchsanleitung 2 WARNUNG Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu schalten Am Netzschalter sind spezielle Warnschilder INSTANDHALTUNG AM GER T NICHT EINSCHALTEN anzubringen Nach Abschluss der Arbeiten sind die Sicherheitseinrichtungen wieder zu aktivieren Keine lwechsel unmittelbar nach Stillsetzung des Ger tes vornehmen da die ltemperatur sehr hoch sein kann Bevor dem Hersteller eine Pumpe zur Reparatur zur ckgesandt wird ist das Formular Request for Return in der Anlage zum vorliegenden Handbuch auszuf l
53. ive humidity 0 95 non condensing Preparation for Installation 48 129 WARNING MS 631FL pumps are designed to support Root Agilent RP1401 RP2001 and RP3001 pumps by means of its intake flange Positioning Root pumps of other size or different denomination on the RVP pump intake flange may be dangerous for devices and operators The pump is supplied in a protective packing If this shows signs of damage which may have occurred during transport contact your local sales office The weight of the packing depends on the pump type and may be approximately 600 kg if a 50Hz motor is fitted approximately 650 kg if a 60Hz motor is fitted approximately 430 kg if no motor is present When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Instructions forUse 4 Preparation for Installation NOTE Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust Figure 1 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 49 129 4 Instructions for Use Installation Installation WARNING
54. l installation d une pompe Roots avec un kit de transformation fourni par Agilent Les informations techniques d taill es sont fournies dans l annexe Technical Information Informations techniques 40 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Mode d emploi 3 Utilisation La mise en marche de la pompe ne requiert au cune man uvre particuli re il suffit de la brancher l alimentation lectrique pour que la pompe d marre Pour un branchement correct consultez le sch ma lectrique fourni WES Sees La pompe a t con ue pour fonctionner avec des fluides neutres ou non corrosifs L emploi de substances potentiellement explosives ou inflammables est strictement interdit Paint Sur les moteurs triphas s une inversion des polarit s entra ne une inversion du sens de rotation de la pompe et comporte des risques de dommages m caniques MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 41 129 3 Mode d emploi Maintenance Maintenance AVERTISSEMENT A AVERTISSEMENT AVERTISSEMENT 42 129 Le personnel charg de la conduite et de la maintenance de la pompe doit avoir la formation n cessaire et poss der une connaissance approfondie des normes de pr vention des accidents du travail Les hautes tensions peuvent entra ner la mort par contact Veiller toujours op rer avec le maximum de prudence et dans le
55. len und der lokalen Verkaufsstelle zuzustellen Eine Kopie des Formulars ist der Pumpenverpackung vor dem Versand beizulegen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 31 129 2 Gebrauchsanleitung Entsorgung Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmull entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Gerats d h die Muttergesellschaft oder den Wiederverkaufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepruft hat 32 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A MS 631FL High Capacity Rotary Vane Pumps User Manual 3 Mode d emploi Information G n rale 34 Emmagasinage 36 Preparation pour l installation 36 Installation 38 Transformation de la MS 631 en MS 631FL 40 Utilisation 41 Maintenance 42 Mise au rebut 44 Traduction de la mode d emploi originale 2 Agilent Technologies 33 129 3 Mode d emploi Information G n rale Information G n rale Cet
56. ll trained and must be aware of the accident prevention rules Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force When machine is powered take care on account of moving parts and high voltages If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 80 C 54 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Instructions forUse 4 WARNING Always disconnect the power supply to the pump before starting maintenance work Place a special warning signs over the power supply breaker switch MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON When finished remove the safety warning Do not change the oil immediately after stopping the machine as the oil temperature may still be high Before returning the pump to the constructor for repairs the Request for Return sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the pump package before shipping If a pump is to be scrapped it must be disposed of in accordance with the specific national standards MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 55 129 4 Instructions for Use Disposal Disposal Meaning of the WEEE logo found in labels The f
57. ly charged during operation Any contact may cause serious injuries to persons or objects Connections and controls of the electrical system must be carried out by skilled personnel only The electrical equipment must comply with the EN 60204 1 standard and with any other laws in force in the Country of use Besides electrical equipment must comply with EN 61000 6 4 and EN 61000 6 2 standards concerning electromagnetic compatibility and electromagnetic immunity for industrial environment The use of the pump in situations unforeseen or not recommended by this manual as well as lack of correct maintenance may create high risks for overheating or fire In case of a fire do not use water to extinguish but use a powder C0 extinguisher or other means compatible with the electric equipment and lubricating oil MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Transport and Handling Lifting The orientation of the packed components must correspond to the instructions given by the pictograms on the external covering of the packaging For loading and unloading use lifting equipment suitable for the pump weight Use the suitable lifting eyebolts to lift the pump see figure below AAA CHA i i N LL Lei gr 23 u Figure 16 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 71 129 5 Technical Information Transport and Han
58. nating the water and the ground Therefore never pour lubricating products on to the ground into water or in the sewage system All violations of these rules are liable to persecution as provided for by law When using lubricants always keep oil can nearby Take care in draining off waste oils In disposal of these products respect all regulations in force concerning waste oil disposal The recommended lubricating oil for MS Vane pumps and RP Roots pumps are reported in the relevant User Manual MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 103 129 5 Technical Information Lubricants 104 129 It is absolutely necessary to continue using the lubricants initially used to fill the tank If this is not possible for organizational or business reasons use only products with the same characteristics as the previous oils Only use of lubricants of suitable quality will guarantee safe operation of the pumps Mineral oils and the PFPE oil are incompatible To change from one type to another the pump must be stripped down completely and all parts washed carefully to eliminate all oil residues If you expect to have to use other lubricants first find out if the two products are compatible In cases of doubt the lubricant used up to that time must be flushed out by way of a pump flushing procedure To avoid the risk of contaminating the oil absolute cleanliness of the pump and surrounding area must be ensured during
59. ng the instruction reported in the Instruction Manual of the relevant pump Suggestions for Use When the room temperature is lower than 10 C it is a good practice to let the pump operate at maximum vacuum level for about 5 minutes During this period the pump may not reach the stated pressure limits CAUTION Avoid operating the pump for long periods with inlet port vented to atmospheric pressure This will cause a heavy oil loss 92 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 CAUTION Avoid frequent stop start cycles as this will lead to premature coupling elastic element wear It is advisable not to exceed 10 cycles hour For more frequent cycles it is recommended to install a progressive starter soft starter or a star delta starter When using a star delta starter the vacuum pump can start exclusively with the inlet vented to atmospheric pressure Water Vapour Suction In order to pump down any water vapour it is essential to bring the pump temperature to its operating value In case there are other condensates in the oil let the pump run for at least thirty minutes with the gas ballast valves in position open at the end of the working cycle It is advisable to carry out this operation before stopping the pump for a long time The gas ballast valve will allow the elimination of water condensate from lubricating oil For repetitive work cycles wi
60. nnent des renseignements importants isol s du texte MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 35 129 3 Mode d emploi Emmagasinage Emmagasinage Pendant le transport et l emmagasinage des pompes veiller a respecter les conditions environnementales suivantes temp rature de 15 C a 50 C humidit relative 0 95 sans condensation Preparation pour l installation WIS eS La pompe MS 631FL est con ue pour soutenir les pompes Root Agilent 36 129 RP1401 RP2001 et RP3001 travers la bride d aspiration L installation de pompes Root de taille ou de designation differente sur la bride d aspiration de la pompe RVP comporte des risques de dommage aux equipements et de blessure aux operateurs La pompe est fournie dans un emballage de protection si l on constate des marques de dommages pouvant s tre produites pendant le transport contacter aussit t le bureau de vente local Le poids de l emballage depend du type de pompe il est d environ 600 Kg avec le moteur de 50Hz d environ 650 Kg avec le moteur de 60Hz d environ 480 Kg sans moteur Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas jeter l emballage dans la nature Le mat riel est entierement recyclable et il est conforme la directive CEE 85 399 en mati re de protec
61. ntents 6 129 3 5 Mode d emploi 33 Information G n rale 34 Emmagasinage 36 Preparation pour l installation 36 Installation 38 Transformation de la MS 631 en MS 631FL 40 Utilisation 41 Maintenance 42 Mise au rebut 44 Instructions for Use 45 General Information 46 Storage 48 Preparation for Installation 48 Installation 50 MS 631 to MS 631FL Transformation 52 Use 53 Maintenance 54 Disposal 56 Technical Information 57 Section 59 Technical Description 59 Technical Data 61 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Contents Dimensions 65 Safety Precautions 75 Transport and Handling 77 Section ll 80 Installation and Operation 80 MS 631 to MS 631FL Transformation 83 Use 94 Stopping the Pump 96 Safety Rules 97 Warning Notes 98 Caution Notes 100 Maintenance Actions 101 Lubricants 103 Section III 105 Servicing 105 Spare Parts 117 De Commissioning 119 Return for Repair 119 Troubleshooting 121 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 7 129 Contents 8 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A MS 631FL High Capacity Rotary Vane Pumps User Manual Istruzioni per l uso Informazioni Generali 10 Immagazzinamento 12 Preparazione per l installazione 12 Installazione 14 Trasformazione MS 631 in MS 631FL16 Uso 17 Manutenzione 18 Smaltimento 20 Traduzione delle istruzioni originali
62. ollowing symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 56 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A MS 631FL High Capacity Rotary Vane Pumps User Manual Technical Information Section 59 Technical Description 59 Technical Data 61 Dimensions 65 Safety Precautions 15 Transport and Handling 77 Lifting 7 Unpacking and Components Control 78 Storage 79 Section Il 80 Installation and Operation 80 Assembling 80 MS 631 to MS 631FL Transformation 83 Assembly of the pumping monobloc 84 Positioning86 Connection to the Vacuum System 89 Discharge Air Pipe Line Installation 89 Electrical Connection 90 Suggestions for Use 92 Water Vapour Suction 93 Original Instructions s Agilent Technologies 57 129 5 Technical Information Disposal Use 94 Intended use 94 Operation in automatic mode 95 Operation in manual mode 95 Stopping the Pump 96 Safety Rules 97 Warning Notes 98 Ca
63. ore starting the pump in order to prevent serious damages MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 79 129 5 Technical Information Section Il Section Il Installation and Operation Assembling If the pump is supplied without any electrical motor install a motor whose characteristics are the same as stated on the technical sheet constructive form IM B5 1 Mount the motor flange Item 130 on the electric motor Item 137 using the 4 stud bolts Item 139 the nuts Item 107 and the relevant washers Item 105 106 2 Mount the fan coupling Item 132 133 134 135 136 120 on the shaft of the electric motor using a hydraulic press or similar equipment that will not damage the motor bearings WARNING Check that the distance between the fan and the motor flange is about 7mm 3 Tighten the sock stud bolt Item 140 in the driver coupling half 4 Insert the elastic coupling insert Item 30 into the coupling half pump side Item 29 5 Mount the motor Item 132 133 134 135 136 120 131 137 on the fan cover sleeve Item 122 using the 8 screws TE Item 131 making sure that the elastic coupling insert Item 30 remains in place 80 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 WARNING Check that the distance between the two coupling halves is 3 5 1 mm WARNING Through the window on the sleeve verify that the
64. r intervals of time Do not clean with Alcohol the plastic or rubber components of the pump Use only the strictly necessary amount of lubricant an excess of lubricating oil like when there is none may sometimes compromise proper operation of the pump Only the recommended lubricants or lubricating oils with similar characteristics and known and experimented quality should be used Oil changes must be made with the oil at a sufficiently high temperature after leaving the pump to cool for a few minutes following operation The drain and filler plugs must not be left open any longer than is strictly necessary When performing maintenance look out for all signals that may precede a breakdown in particular traces of corrosion oil leaks slack joints or couplings MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 101 129 5 Technical Information Maintenance Actions Maintenance technicians must be aware of all applicable national directives concerning accident prevention during work on motor driven pumps and should know how to apply them have read and understood all the sections on Safety Rules be familiar with the essential design features and operation of the pump know how to use and consult the pump documentation be concerned about proper operation of the pump make a note of any irregularities in operation of the pump and take the necessary action where appropria
65. respect des normes en vigueur Avant toute utilisation de la pompe celle ci doit tre ravitaill e en huile car elle est livr e vide Avant toute autre op ration retirer les bouchons de protection plac s sur les brides d aspiration et de vidange En cas de mise en marche inopin e de l appareil l air contenu l int rieur de la pompe peut les projeter contre l op rateur et le blesser MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Mode d emploi 3 Pendant l installation faire tr s attention a ce que la bride d aspiration soit reliee a la chambre a vider et que la bride de vidange ne soit pas bouchee voir les figures ci apr s Veiller attentivement ne pas inverser l entr e et la sortie de la pompe La pression maximale l int rieur du r servoir d huile ne doit pas d passer 1 5 bar abs Le non respect de ces pr cautions peut entrainer un danger pour l op rateur et endommager la machine Bride de vidange Bride d aspiration Figure 2 MS 631FL Pate Contr ler que la tension d alimentation correspond la gamme de tensions indiqu es sur la plaquette du moteur Brancher la pompe la source d alimentation MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 39 129 3 Mode d emploi Transformation de la MS 631 en MS 631FL Transformation de la MS 631 en MS 631FL La pompe MS 631 peut tre transform e en pompe MS 631FL c est a dire prepar e pour
66. respect des normes de pr vention des accidents du travail en vigueur Lorsque la machine est sous tension faire attention la pr sence d organes en mouvement et de haute tension En cas de devoir proc der des op rations de maintenance de la pompe au terme d une longue p riode de fonctionnement il est indispensable de la laisser refroidir car sa temp rature ext rieure peut d passer 80 C MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Mode d emploi 3 WITHERS A IAE Avant toute op ration de maintenance il est imp ratif de toujours couper AVERTISSEMENT l alimentation de la pompe Placer les panneaux sp cifiques d avertissement APPAREIL EN COURS DE MAINTENANCE NE PAS BRANCHER L ALIMENTATION pr s de l interrupteur d alimentation Au terme des op rations de maintenance restaurer les dispositifs de s curit Ne pas effectuer la substitution d huile immediatement apres l arr t de la machine car la temp rature de celle l peut tre lev e Avant de retourner une pompe au constructeur pour r paration il est indispensable de remplir et d adresser au bureau local de vente la fiche Request for Return jointe a la pr sente notice Une copie de celle ci devra tre mise dans l emballage de la pompe avant exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales en la mati re MS 631FL High Capacity Ro
67. rmation contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice
68. t for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Agilent Technologies 25 Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to include the completed Health and Safety declaration Section No work can be started on your unit until we receive a completed copy of this form After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as req
69. tary Vane Pumps User Manual 87 900 142 01 A 43 129 3 Mode d emploi Mise au rebut Mise au rebut 44 129 Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment a la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en ceuvre le processus de collecte et mise au rebut N T M N D ity MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A MS 631FL High Capacity Rotary Vane Pumps User Manual Instructions for Use General Information 46 Storage 48 Preparation for Installation 48 Installation 50 MS 631 to MS 631FL Transformation52 Use 53 Maintenance 54 Disposal 56 Original Instructions si Agilent Technologies 45 129 4 Instructions for Use General Information General Information 46 129 This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held respons
70. te Use original spare parts wherever possible and repair a broken part as best as possible on site or send it back to the manufacturer for repairs For all problems arising or to order spare parts refer to Agilent service department 102 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Lubricants Technical Information 5 It will be readily understood how important adequate lubrication is to high technology pumps like the Agilent vacuum pumps Correct use of appropriate lubricants makes a significant contribution to achieving best performance and warding off defects When handling lubricants the following sanitary protection measures should be observed at all times Avoid prolonged excessive or repeated contact of the skin with products for lubrication and also avoid directly inhaling the fumes or vapors of such products Protect the skin by wearing appropriate clothes and equipment e g special suits glasses or where permitted by the safety regulations gloves or by applying a special protective product Clean the skin carefully after contact with the lubricants by washing freely with water and soap Apply a skin cream after washing Take off and change clothes or shoes on which oil has been spilled Never put rags dripping with oil into the pockets of your clothes When disposing of waste lubricants observe the following environment protection regulations The lubricants risk contami
71. th brief time intervals in between it is better not to stop the pump MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 93 129 5 Technical Information Use Use Carefully follow these instructions for proper management of the pumps The RP roots pump can not work alone The RP roots pump should be initiated only after the MS vane pump reached the volume to be evacuated and the cut in pressure shown on the data sheet of the pumping unit RPS In the range between the atmospheric pressure and the pressure of insertion exclusively the MS vane pump must be operative Check the insertion pressure of the Roots pump in the Technical data paragraph Intended use 94 129 Vacuum pumps MS 631FL described in this manual can aspire only small amounts of air and water vapor RP Roots should be connected to the MS 631FL pumps in series in order to compose a pumping unit volumetric RPS suitable evacuation of closed systems or to operate at a constant pressure of less than 5 mbar absolute to be verified The pumping units RPS are suitable only for emptying medium long cycles where the time of operation at an absolute pressure of less than 5 mbar preveals The ambient temperature and the inlet temperature must be between 5 and 40 C MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 WARNING In case of doubt or use over the limits or sucks of other
72. tion de l environnement MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Mode d emploi 3 Preparation pour l installation NOTE La pompe ne peut tre endommagee en restant simplement exposee a l atmosph re Il est de toute facon conseill de la garder dans son emballage jusqu au moment de sa mise en place sur le syst me afin d viter toute pollution due la poussi re Figure 1 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A 37 129 3 Mode d emploi Installation Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige a des poussi res a des gaz agressifs ainsi que dans des milieux explosifs ou a risque lev d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes Temp rature de 5 C 40 C Humidit relative 0 95 sans condensation MISERIS Afin de pr venir les risques de courts circuits ou de surcharge il est ATTENTION AVERTISSEMENT 38 129 n cessaire d installer un interrupteur automatique sur la ligne d alimentation principale de la pompe d une capacit appropri e La capacit de l interrupteur doit tre compatible avec les donn es figurant sur la plaque signal tique du moteur effectivement install et doit tre s lectionn par l installateur Le branchement doit tre effectu dans le
73. ucts subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number Units returned for evaluation will be evaluated and quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced Products returned that have not been drained from oil will be disposed A Special Cleaning fee will apply to all exposed products O If requesting a calibration service units must be functionally capable of being calibrated Page 2 of 3 Agilent VPD Request for Return chi Agilent Technologies Vacuum Products Division Request for Return Form Customer information Company Address Fax Product description Agilent PartNo Agilent Serial No Original Purchasing Reference Failure description Type of process for which the equipment was used Type of return Non Billable L Billable New PO hard copy must be submitted with this form C Exchange Repair J Upgrade Demo LJ Calibration J Evaluation J Return for Credit Health and safety Substances please refer to MSDS forms Agilent will not accept delivery of any product that is exposed to radioactive biological The product
74. uested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Product preparation Remove all accessories from the core product e g inlet screens vent valves Prior to shipment and if applicable for your product drain any oils or other liquids purge or flush all gasses and wipe off any excess residue If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit Include a copy of the Health and Safety Declaration in the shipping documentation on the outside of the shipping box of your returning product Clearly label package with RA number Using the shipping label provided will ensure the proper address and number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Shipping Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with
75. ution Notes 100 Maintenance Actions 101 Lubricants 103 Section Ill 105 Servicing 105 General Information 105 Pump Parts for MS 631FL 111 Spare Parts 117 Spares Necessary for Normal Servicing 117 How to Order Spare Parts 117 Orderable Parts 118 De Commissioning 119 Return for Repair 119 Troubleshooting 121 58 129 MS 631FL High Capacity Rotary Vane Pumps User Manual 87 900 142 01 A Technical Information 5 Section Technical Description The MS 631FL pumps series are single stage rotary vane vacuum pumps lubricated with oil recirculation driven by a flanged electrical motor coupled by means of an elastic coupling Figure 3 MS 631FL MS 631FL pumps are designed for installing a Roots pump using a transformation kit by means of its intake flange RPS to compose a Root Agilent compact pumping unit volume monobloc called RP1401 RP2001 and RP3001 pumps These Agilent vacuum pumps are suitable for pumping non corrosive gases Cooling is achieved by means of an air oil cooler cooled with a centrifugal fan At the pump inlet there is a mesh filter in order to protect it from solid parts having diameter larger than 1 5 mm Furthermore an integrated non return valve prevents the oil coming back and the return of air in the chamber to be pumped down during the stop phase In the tank there is a system of oil smokes separation from the discharged air maximum residual 2 PPM weight corresponding to 2 4 mg m MS

MS-631FL High Capacity Rotary Vane Pumps

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