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Motorized Z User Manual

1. One 1 Power Cord specified at time of ordering is included with each set System Components System Overview This page is intentionally left blank 2 2 820 0096 Section 3 Installation X4115 X4116 Inker Installation The X4115 X4116 pneumatic inker installs directly onto the insert ring on an Electroglas model 10XX 20XX or 40 0 series prober The X 4115 X 4116 inker sets are identical except for pneumatic controller software The X4116 inker set for EG probers comes with a pneumatic controller that incorporates the Half Puff software option X4115 Standard Motor Z controller 1 Ifyou are currently using another inker remove it from the prober AN carrion Move the chuck wafer from underneath the inker when installing inker to prevent damage 2 Lift the inker swing arm to the up position The mounting holes in the inker base will now be visible X4115 INKER ASSEMBLY WITH SWING ARM IN UP POSITION 2X 4 40 x 3 8 INSTALLATION SCREW 3 Install inker using two 2 4 40 x 3 8 screws supplied into existing mounting holes on the prober insert ring 4
2. movement This fast precise method POWER INKON of setting inker Z height simplifies operator inker interface and shortens Ree initial setup time Minor adjustment of BODNEE BIS King Z height may also be necessary after x Z N JZ changing an ink cartridge due to slight manufacturing variations between cartridges The Z UP and Z DOWN buttons can be used to quickly move the inker up or down by depressing and holding down either button This function is useful to quickly raise inker Z height when changing cartridges but great care should be taken not to run the inker down into the wafer in this mode Note The specifications for the bipolar stepper motor installed on the Motorized Z inkers are listed in Section 7 The manufacturer s specification of 0 001 linear movement per step is correct The motor is driven in steps to achieve 0 0005 linear movement per activation NI Z SHUTTLE External Switch Input There is a second input on the rear of the unit for use with a foot switch Upon activation the foot switch sends a gt m w 50mSec switch closure signal across C nn pins 1 amp 3 to the controller enabling an inking sequence There is a 50 NA millisecond delay between the end of the sequence and the recognition of the next switch closure No other adjustments or settings need to be made This input is not used with
3. e i eie uie dS Li Po uu bei PER 7 3 aun as 7 4 Dot Size Standard Mode in MIS iret etre re eate 7 5 Dot Size Standard Mode in Mlicrons ctr in 7 6 Dot Size Small Dot Mode in Mils 7 7 Dot Size Small Dot Mode in Microns este ieee ea 7 8 Systemi a ceto teo ae Mm MA TN asa 7 9 820 0096 Section 1 Introduction Theory of Operation SE WI 4115 4116 X4215 X4217 pneumatic Motorized Z inkers are designed for use as cabled in in line and off line 2 inkers on Electroglas and KLA probers The innovative O motorized Z design combines operator friendly motorized Z movement capability which provides fast precise Z adjustment with a dual air regulation system to provide the first dependable high speed small dot capability available in a pneumatic inker The Motorized Z series inker also incorporates the convenience of DieMark cartridges with the reliability of a microprocessor controlled pneumatic dispensing system for the ultimate inking solution Ink dots are deposited via pneumatic actuation of the inker shuttle me
4. MOTORIZED Z SERIES PNEUMATIC INKER with SMALL DOT FEATURE INSTALLATION AND OPERATION MANUAL Models X4115 X4116 EG X4215 X4217 KLA 820 0096 Revision R EE Tn Fr ud X4115 X4116 Pneumatic IMPORTANT OPERATION NOTICE The Model 350 0018 Motorized Z Pneumatic Controller is designed to operate at 80 5 PSI FAILURE TO SET THE REGULATOR PROVIDING AIR TO THE CONTROLLER AT 80 PSI WILL RESULT IN INCONSISTENT SYSTEM OPERATION QUALITY NSAI Certified Document 820 0096 Motorized Z Inking System Installation and Operation Revision R November 2013 Service and Support Information Y Telephone 707 763 7799 UR 1360 Redwood Way Suite A FAX 707 763 2631 Petaluma 94954 Internet www xandexsemi com Email info xandex com International Distributors China PREMTEK HOLDING CO LTD Shanghai 2F No 1077 ZuChongZhi Rd Zhang Jiang Hi Tech Park PuDong New Area Shanghai 201203 Peoples Republic of China Telephone 86 21 50275859 Fax 86 21 50275877 Contact Jason Huang Email ptis all premtek com tw Web Site www premtek com tw Japan HUGLE ELECTRONICS INC 4 5 7 lidabashi Chiyoda Ku Tokyo Japan 102 0072 Telephone 8
5. AE 6 6 Controller MaI te ange ei deri ees us a ved Te accede a ks 6 8 Controller Sequence of Operation ba equa Quse pb V IR Nn 6 8 Controller DI8enoStICS22 u it 6 9 Controller Troubleshooting toe annus 6 11 820 0096 Internal Maintenance x usun ettet enint Miei 6 13 Controller Logic Board Removals uites etit an eade iens ute 6 13 Turn Audible Alarm ON OFF aite tor etate eee bee A 6 13 Before returning the unit to service ener 6 14 Preventive Maintenance es deos ADAN pk du rtm p rid d 6 15 Pneumatic Controller Preventive Maintenance Schedule and Kits 6 15 Cartridge V1 or Shuttle V2 and Pressure Valve Replacement 6 16 Controller Internal Regulator Adjustment essere 6 17 Section 7 System 1 bp sa S EUN Eee bua a span Fee Poe Co RENE E Musae 7 1 Controller Specifications ooo ute ba ua ed pa as GU 7 1 TAKE Specifications u s a fe pu a a bi u QS u aes 7 2 Stepper Motor Specifications Part No 158 0010 7 2 Ink Cartridge Specifications z n deos peace 7 3 Ink and Cartridge Avallabiltty
6. DOT SIZE x Z DOTS Xx 1000 Z Depending on the type of ink cartridge A5 A6 or A8 and ink used Markem 6990 6993 6997 Xandex 8103 8104 7824 or 7824T 14 mil to 50 mil dot is possible It is recommended that the proper dot size for the die be selected to maximize cartridge usage and minimize problems with too large or too small dots Refer to Section 7 for dot size specification tables 4 2 820 0096 System Operation Controller Operation Mode Selection Switches There are two mode selection mode switches located on the front panel for selecting different inker operating modes The following is a description of the functions of each switch position Z Top Mode Switch Positions XZANDEX 2 O e SETUP Shuttle air valve S T enabled for coarse Z height o LARGE DOT setup Q SMALLDOT _ e RUN Normal Operation e DISABLE Shuttle air valve disabled troubleshooting aid INK ON POWER When placed in SET UP position RESET STATUS the shuttle air valve V2 is enabled te eee ee moving the shuttle to the lower position N Z N Z for Z set up adjustment While in the SET UP mode perform coarse Z height adjustment as detailed in the Set Up and Alignment procedure After five minutes In the SET UP mode the microprocessor will disable the shuttle air valve retu
7. 12192 36 YI YI N N N 0 05 10 15 2 20 2 25 3 30 3 35 4 40 4 45 5 50 5 55 65 70 85 N b NIN col oo p 1 736 6 1244 6 1270 1295 4 1320 8 863 6 1346 2 NI 947 NI Nn oo 15 0 5 0 5 0 5 0 5 65 70 85 95 7 6 820 0096 System Specifications Dot Size Small Dot Mode in Mils Dot Size Small Dot Mode in Mils INK TYPE 8103 Small Dot Toggle DOT SIZE DOT SIZE SETTING NJN 30 5 _ a O 5 70 0 Pg 1 c Oo ss ee d pL 99 Ks pO Nl orn INK 6993 Small Dot Toggle DOT SIZE DOT SIZE SETTING S A S A ABR B R ej uv uoj uojuo l jololo KS NO INK TYPE 7824 Small Dot Toggle DOT SIZE DOT SIZE SETTING A5 Not Recommended 10 10 11 11 12 12 13 13 14 14 14 14 15 15 15 INK TYPE 6990 Small Dot Toggle DOT SIZE DOT SIZE SETTING A5 NOTE Characterization testing performed at ambient temperature of 70 degrees F relative humidity of 50 on polished unetched silicon wafers no passivation Air pressure 80 PSI minimum with standard 60 inch long air hose Con
8. 5 65 Ll 990 6 1016 1016 609 1041 4 1041 4 787 4 1066 8 o 889 2 990 6 CA 4 8 8 8 8 8 2 2 3 wj 00 N IN N B B 05 10 15 20 25 30 35 40 45 50 55 65 70 75 85 95 INK TYPE 6993 Large Dot Toggle DOT SIZE DOT SIZE SETTING 5 5 457 2 508 584 2 660 4 36 6 1117 6 366 1143 762 11684 762 1168 4 874 1193 8 87 4 1193 8 12 8 12192 12 8 12192 8382 1244 6 838 2 1270 63 6 1295 4 762 863 6 1320 8 863 6 13462 889 1346 2 1346 2 889 1371 6 1371 6 NOTE Characterization testing performed at ambient temperature of 70 degrees F relative humidity of 50 on polished unetched silicon wafers no passivation Air pressure 80 PSI minimum with standard 60 inch long air hose Controller to Shuttle Dot size may be set at any value between 1 and 99 Table dot size settings and resulting dot sizes are given in increments of 5 When a range of thumbwheel settings indicate the same dot size choosing a thumbwheel setting in the middle of the range will provide the most consistent dot size INK TYPE 6990 Large Dot Toggle DOT SIZE DOT SIZE SETTING A5 457 2 508 8 736 6 787 4 939 8 041 4 8 736 6 787 4 939 8 1041 4 584 2 660 4 36 6 1117 6 36 6 1143 762 1168 4 762 1168 4 874 1193 8 874 1193 8 8 12192 8
9. 5 cartridge type Tables are provided in Section 7 that show average dot size results for different ink types in thumbwheel setting increments of 5 These tables indicate average results from testing preformed on unetched wafers with no passivation and are intended for use as guidelines only All controller functions UP and DOWN buttons LED dot counter programmable dot counter and dot size thumbwheels SETUP RUN and DISABLE toggle positions have the same function in SMALL DOT mode as they do in LARGE DOT mode For more information or assistance in optimizing small dot production using the Motorized Z small dot feature contact Xandex Customer Service at 707 763 7799 or Toll Free in the U S 800 767 9543 FAX 707 763 2631 Internet www xandexsemi com or email info xandex com 820 0096 4 13 Motorized Z Small Dot Configuration System Operation This page is intentionally left blank 4 14 820 0096 General Information Semiconductor manufacturers use the vision system of automatic pick and place equipment during the assembly process to detect damaged and or rejected die This is done by shining a combination of different lights on the wafer surface to create a white background Ink dots and defects such as chipped corners are easily recognizable against this background Xandex 8103 8104 7824 7824T and Markem 6993 inks are opaque and easily recognizable under all lighting conditions Xandex Glycol Free 8103 ink is th
10. Dots X 1000 thumbwheel switches and STATUS load those values the AA microprocessor If the RESET N Z N JZ button is not pressed a second time and the 5 second flash time is exceeded the INK ON LED will stop flashing and the current set points and internal counts will not be changed Note If the prober is running and the RESET button is pushed the INK ON LED will flash intermittently After 5 seconds the INK ON LED will stop flashing and the unit will continue with the current programming If the prober is running and the RESET button is depressed a second time within the 5 second reset time INPUT SIGNALS FROM THE PROBER WILL BE INHIBITED AND THE UNIT WILL RESET AND RE PROGRAM ITSELF The RESET button is also used to enter the diagnostic mode when power is applied to the controller with the RESET button depressed For details and descriptions of controller diagnostic tests see Controller Diagnostics in Section 6 820 0096 4 1 Controller Operation System Operation 7 SETUP RUN DISABLE LARGE DOT Q SMALL DOT Q INK ON RESET STATUS DOT SIZE DOTS 1000 O DOWN Dot Counter A separate LCD dot counter is located on the front panel above the thumbwheels This counter has an internal Lithium battery with a nominal life of 10 years and an integral reset b
11. Proceed to the Controller Installation portion of this Installation Section 3 and install the pneumatic controller per instructions for your application 820 0096 3 1 X4115 X4116 Inker Installation Installation 5 With the controller and inker installed connect the fitting on the controller to shuttle air hose into the pneumatic connection on the rear of the pneumatic controller labeled SHUTTLE 6 Plug the jack from the inker stepper motor into the mating jack on the rear of the controller labeled MOTOR 7 Proceed to Section 4 System Operation for ink cartridge installation inker setup alignment and controller operation instructions A CAUTION After an ink cartridge is installed the inker arm should NOT be lowered back into operating position with the Z height adjusted completely down The cartridge may be positioned too low and the Teflong tube in the cartridge needle will smash into the wafer when the arm is lowered This will stop the ink flow and possibly ruin the cartridge or damage the wafer Z ADJUST MOTOR ASSEMBLY CONTROLLER TO SHUTTLE AIR HOSE CARTRIDGE FITTING RED HOSE DM 2 PNEUMATIC X Y POSITION LOCK INK CARTRIDGE INKER BASE ASSEMBLY STEPPER MOTOR CABLE CONNECTOR TO CONTROLLER PNEUMATIC SHUTTLE ASSEMBLY S _ WAFER SURFACE 3 2 820 0096 Installation X4215 X4217 Motor Z Inker Assembly Installation X4215 X4217 Motor Z Inker Assembly Installatio
12. break down the ink such that its viscosity and surface tension are altered permanently Z height adjustment is incorrect After cartridge replacement minor Z height adjustment may be re quired See Section 4 Inker Assembly Setup and Alignment Chuck top or wafer surface not planar Verify planarity of both After changing the 1 The cartridge tip may be damaged Examine controller dot size settings cartridge and replace if necessary the dots are too small or the ink blobs at the tip of 2 Whenever dot size is changed there may be minor the needle Z height adjustments required The inker should be set so that just the bottom of the ink drop touches the wafer 820 0096 6 1 Ink Troubleshooting Maintenance amp Troubleshooting Problem Solution Small inconsistent or no 1 Soft Teflong tip of the cartridge tube is clogged or ink dots damaged Change ink cartridge The dot size setting may be too low Increase dot size setting Wrong cartridge type Change cartridge type Air pressure too low Verify that controller regulator setting is 80 5 PSI Z height adjustment is incorrect After cartridge replacement occasional Z height adjustment may be required due to the unavoidable incidence of slight manufacturing variations from cartridge to cartridge It is recommended that at setup several rows of dots be placed and inspected for consistency See Section 4 Inker Assembly Setup and Alignmen
13. etc replace the cylinder assembly Inspect the spring Item 8 for fatigue or physical deformation Free length of the spring is 0 250 nominal Replace as needed Remove the Allen screws Item 6 that lock the cylinder adapter Items 3 4 amp 9 in place from the bracket Item 1 Replace with new screws Inspect the cartridge fitting Item 4 on 320 4215 and the red cartridge air hose Item 14 on 320 4215 for ink contamination Clean fitting as necessary and replace the washer Item 12 on 320 4215 on the cartridge fitting Item 4 Replace the hose if necessary Inspect the spring clip Item 7 Remove and replace the spring clip Item 7 if it is bent or deformed Shuttle Re Assembly 1 Apply a light coating of lubrication Item 12 Magnalube G P N 520 0208 supplied with maintenance kit to the pneumatic holder Item 2 and bracket Item 1 as detailed in Note 2 on Drawing 216 0005 Install the spring Item 8 in the bottom of the pneumatic holder Item 2 then carefully install the pneumatic holder Item 2 in the bracket Item 1 Verify that the spring Item 8 is in the proper position and the pneumatic holder Item 2 moves freely in the bracket Item 1 820 0096 Maintenance amp Troubleshooting Shuttle Maintenance 3 Install the cylinder adapter assembly Items 3 4 amp 9 into the bracket Item 1 Using a Dial Caliper measure the stroke of the holder Item 2 from normal to extended position Adju
14. 1 e a controller to shuttle air hose length exceeding 60 for example is required The procedure for adjusting the internal regulator is detailed below It is recommended that only qualified maintenance personnel perform this procedure LN nox Use appropriate ESD precautions when working inside of the controller 1 Disconnect the controller from main air and power supply 2 Remove the two screws located on each of the left and right sides of the controller four total and remove the controller cover 3 Reference drawing 350 0018 and the figure below and locate the internal regulator item 40 4 Carefully remove the hose from the output side of the regulator and attach a graduated pressure gauge to the output fitting 5 Reconnect main air and adjust internal regulator pressure by using a screwdriver at the indicated adjustment point Factory default setting is 10 1 psi Clockwise adjustment of the screw increases pressure counter clockwise decreases pressure REMOVE HOSE AND ATTACH GAUGE TO 350 0018 OUTPUT FITTING CONTROLLER WITH COVER REMOVED INTERNAL REGULATOR FACTORY SETTING IS H 10 PSI FRONT CONTROLLER m USE SCREWDRIVER 9 13 181121615 ADJUST REGULATOR OUTPUT PRESSURE e 6 When regulator adjustment is complete first disconnect controller main air supply and then remove the gauge from the regulator Reconnect the regulator to the internal air hose and re
15. A Test Thumbwheels 1 Place the mode switch on the front panel to SETUP set the DOTS X1000 thumbwheels to 12345 then reset the LCD Counter 2 Press the RESET button and verify that the counter increments 15 counts 3 Place the toggle switch to RUN set the thumbwheels to all 1 s reset the LCD Counter and press RESET The counter should increment one count 4 Repeat the procedure for the rest of the digits 2 through 9 With the thumbwheels set for 00000 the counter increments 10 counts B Test Cartridge Valve To test fire the Cartridge Valve 20 times 1 Set the DOT SIZE thumbwheels to 02 2 Place the mode switch to DISABLE 3 Reset the LCD Counter 4 Press RESET The cartridge valve fires 20 times each time incrementing the LCD Counter C Test Shuttle Valve To test fire the Shuttle Valve 20 times 1 Setthe DOT SIZE thumbwheels to 03 2 Place the mode switch to DISABLE 3 Reset the LCD Counter 4 Press RESET The shuttle valve fires 20 times each time incrementing the LCD Counter 820 0096 6 9 Controller Maintenance Maintenance amp Troubleshooting D Test Pressure Valve To test fire the Pressure Valve 20 times 1 Setthe DOT SIZE thumbwheels to 09 2 Place the mode switch to DISABLE 3 Reset the LCD Counter 4 Press RESET The pressure valve fires 20 times each time incrementing the LCD Counter E Alarm Test Pressing the reset button will toggle the state of the alarm signal This sign
16. Os UI UI 4 aJo UI A gt o UI UI UI Nn UI 3 N O cof 2 o o NG n ra r2 r2 ro a kang NOTE Characterization testing performed at ambient temperature of 70 degrees F relative humidity of 50 on polished unetched silicon wafers no passivation Air pressure 80 PSI minimum with standard 60 inch long air hose Controller to Shuttle Dot size may be set at any value between 1 and 99 Table dot size settings and resulting dot sizes are given in increments of 5 When a range of thumbwheel settings indicate the same dot size choosing a thumbwheel setting in the middle of the range will provide the most consistent dot size 820 0096 7 5 Dot Size Standard Mode in Microns System Specifications Dot Size Standard Mode in Microns INK TYPE 8103 Large Dot Toggle DOT SIZE DOT SIZE SETTING A5 6 A8 0 INK TYPE 7824 Large Dot Toggle DOT SIZE DOT SIZE SETTING A5 6 A8 6 874 14 4 65 2 l 660 4 787 736 6 NI 838 2 863 6 5 ES N 1143 1143 oo 2 1168 4 1193 8 1219 2 1244 6 1295 4 39 39 74 939 39 39 65 965 914 4 2 812 8 1 8 9144 609 6 939 8 939 8 965 2 965 2 6 6 0 2 2 3 3 4 4 5 5 1346 2 5 10 15 0 5 0 5 0 5 0
17. Shuttle Valve Xandex Auto Z and Motorized Z controllers contain a third valve V3 that is identical to the Shuttle and Cartridge valves The Auto Z controller uses this valve only when the Auto Z function is engaged The Motorized Z uses this valve to change the air pressure supplied to the cartridge valve when inking in small dot mode In normal operation the third valve V3 in either the Auto Z or Motorized Z controller will not need replacement for the life of the unit Preventive maintenance for Xandex pneumatic controllers requires replacement of just the Cartridge Valve or of both the Cartridge and Shuttle valves at the intervals specified below Controller Model Replace Interval Continuous High Speed Small Dot All Models Cartridge Valve Use 6 months All other applications 12 months Cartridge Valve Shuttle All Models Valve and internal tubing Every 24 months Two valve replacement sets are available from Xandex to facilitate controller preventive maintenance e Cartridge Valve Set containing a single valve assembly electrical connectors and replacement instructions This set is used for 6 12 month cycle controller preventive maintenance Order part number 370 0100 e Dual Valve Set containing two valve assemblies electrical connectors adequate tubing to replace all internal controller pneumatic routes in all Xandex pneumatic controllers and replacement instructions Replacement of the p
18. air connection on the rear of controller Note The air hose connectors are spring locked If the air hose connectors do not insert easily make sure the spring lock is in the open position by pushing the metal snap lock down until it clicks 3 6 5 10 Turn on the main air and adjust the regulator until it reads 80 5 PSI on the dial To make regulator adjustments pull up on the knob on the top of the regulator to unlock then rotate the knob clockwise to increase or counter clockwise to decrease Push down on the knob after adjustment to lock it into position Check all connections for air leaks If required turn off the main air and make necessary repairs Install the cable connector P N 210 0109 or 210 0110 to the inker port on the prober and the connector on the rear of the controller unit Move the toggle switch on front of the controller to RUN mid position The controller is factory set at 120 VAC 50 60 Hz If your AC input voltage is different than 120V follow the instructions in this Section 3 Voltage Selection and Fuse Replacement to change the controller to your requirement Install the AC power cord into the back of the controller Plug the power cord into an AC supply outlet At this point the INK ON LED will flash once while the STATUS LED will stay on Proceed to Section 4 System Operation for ink cartridge installation inker setup alignment and controller opera
19. and Xandex 7824T inks have a 4 month shelf life and will give consistent flow for 3 days after cartridge opening Xandex 7824 and 7824T can be air or heat set cured Xandex Glycol Free 8103 and 8104 inks are thermally stable at temperatures up to 150 C and can be used in hot chuck or oven drying applications without cracking or loss of adhesion Use of either Markem 6990 6993 and 6997 or Xandex 7824 and 7824T inks in hot chuck applications is not recommended as the elevated ambient temperature in the probing area can reduce cartridge life and cause inconsistent ink flow However use of a hot chuck to heat set dots during offline inking has reportedly been successful when employed by some customers All of the inks offered by Xandex are non magnetic Material Safety Data Sheets MSDS are available for all inks offered by Xandex To obtain MSDS or information about choosing the appropriate ink for your application please contact your local distributor or Xandex Customer Service test results are dependant on test method 820 0096 5 1 Ink Curing Ink Ink Curing The procedure for curing will depend on the type of ink used Markem 6990 6993 and 6997 should be cured baked within 2 hours of inking due to the evaporation of solvents in the ink over time If a wafer or boat of wafers is left uncured for an extended period of time the dots may crack and or flake after the baking process Markem 6990 6993 and 6997 inks whic
20. cartridge air hose connector is installed 820 0096 6 3 Inker Troubleshooting Maintenance amp Troubleshooting Problem Solution Motorized Z not working Inker produces dots during puff pulse or ink flows out of cartridge with toggle switch in SETUP Cartridge crashes into wafer surface after setup 6 4 1 Verify that the inker stepper motor is plugged into the MOTOR connection on the back of the Controller Verify that there is power connected to the controller and that the voltage setting is correct Verify that the air hoses from the controller to the inker are connected properly RED AIR HOSE connects to the ink cartridge BLUE AIR HOSE connects to the shuttle connection on the shuttle mechanism Controller SETUP mode switch which extends the cartridge to inking depth was not used when the inker was initially setup Replace cartridge and repeat inker setup per Inker Assembly Setup and Alignment in Section 4 Chuck was not set to Z up position when the inker was initially setup Replace cartridge and repeat inker setup per Inker Assembly Setup and Alignment in Section 4 820 0096 Maintenance amp Troubleshooting Shuttle Maintenance Shuttle Maintenance Schedule and Preventive Maintenance Kits Periodic preventive maintenance of the shuttle mechanism is recommended to insure continued trouble free operation of your Xandex pneumatic inking system T
21. the unit Most questions you may have will be answered in this manual If you would like further assistance please contact your local Xandex distributor or call us at 707 763 7799 or Toll Free in the U S 800 767 9543 FAX 707 763 2631 For more information about Xandex and our complete line of quality inking and interfacing products visit us on the Internet at www xandexsemi com or email us at info xandex com 820 0096 1 1 Theory of Operation Introduction This page is intentionally left blank 1 2 820 0096 Section 2 System Overview System Components Set Part No 340 4115 340 4116 X4115 X4116 EG Set Part No 340 4215 340 4217 X4215 X4217 KLA 1 Regulator Assembly Part No 220 0076 2 Cable Connector Assembly AC Part No 210 0109 4115 4116 Type CC Part No 210 0110 X4215 X4217 3 Air Hose Regulator gt Controller Part No 210 2001 4 A AC Power Cord USA Part No 158 0051 B AC Power Cord UK Part No 158 0408 C AC Power Cord Europe Part No 158 0407 5 Motorized Z Pneumatic Controller Includes AC Power Cord Part No 350 0018 6 Pneumatic Inker Assembly Part No 320 4215 All Models A Inker Base Part No 220 0031 All Models B Pneumatic Shuttle Part No 216 0005 C 7 Pin Plug Stepper Motor Part No 158 0008 7 Inker Mounting Plate Part No 120 0019 X4215 X4217 820 0096
22. verify Controller operation See Section 6 Controller Diagnostics Unit powers up okay responds to Check that shuttle toggle switches on prober input but the shuttle does not the front of the controller are in the move RUN position Check that the air hose quick disconnects on the back of the controller are correctly oriented and connected Place top mode switch to SETUP The shuttle should extend If it does not and all air hose connections are correct the problem may be that the shuttle mechanism is binding See Shuttle Maintenance in this section 6 820 0096 6 11 Controller Troubleshooting Maintenance amp Troubleshooting Problem Solution STATUS amp INK ON LED s Verify that there is air input to the Flashing controller Unacceptable mode switch combination Review Controller Operation in Section 4 Dot size does not change with 1 Verify that the air hoses from the adjustment of Dot Size Thumbwheels controller to the inker are connected properly RED AIR HOSE connects to the ink cartridge BLUE AIR HOSE connects to the shuttle connection on the shuttle mechanism 2 Run diagnostic test A Test Thumbwheels described in Controller Diagnostics in this section 6 If test results are not within parameters consult Xandex Customer Service Replace ink cartridge 6 12 820 0096 Maintenance amp Troubleshooting Internal Maintenance Internal Maintenan
23. with different ink varieties in dot size thumbwheel increments of 5 are included in Section 7 When the bottom switch is placed in SMALL DOT position the controller operates the cartridge valve V1 at an air pressure determined by a second internal regulator which is factory set at 10 psi This regulator is not operator adjustable but may be reset if necessary to optimize small dot production See Small Dot Configuration later in this section 4 for detailed instructions on small dot mode 820 0096 4 3 Controller Operation System Operation Bottom Mode Selection Switches cont d Dot Size Thumbwheels Dot Counter and Motorized Z UP and Z DOWN buttons do not change function in SMALL DOT mode Small dot production requires the use of the A5 cartridge type Typical small dot size parameters for the A5 cartridge with available ink types are included in Chapter 7 For more information on the small dot capabilities of the motorized Z controller see Motorized Z Small Dot Configuration later in this section 4 Z UP and Z DOWN Buttons Z UP and Z DOWN buttons allow motorized adjustment 2 of the inker Z height in 0 0005 5mil KANDEX s O increments each time either button is j DISABLE depressed The buttons should be Rm UP LARGE DOT pressed no faster than one time per Q MUR second as the unit cannot react to faster DOWN use and such use will result in zero
24. 1 3 3263 6661 Fax 81 3 3263 6668 Email Xandex hugle co jp Web Site www hugle co jp Korea HUGLE ELECTRONICS INC Br Office 2FL Hugle Bldg 86 14 Garak Dong Songpa Ku Seoul Korea 138 803 Telephone 82 02 431 7477 Fax 82 02 449 6295 Email huglek kornet net Taiwan PREMTEK INTERNATIONAL 4F No 47 Lane 2 Kuang Fu Road Sec 2 Hsinchu City Taiwan R O C Telephone 886 35 722000 Fax 886 35 725000 Email pii premtek com tw Web Site www premtek com tw 820 0096 XANDEX IMPORTANT OPERATION INFORMATION The Model 350 0018 Motorized Z Pneumatic Controller is designed to operate at 80 5 PSI This setting is 10 PSI higher than the 70 PSI setting recommended for all other Xandex pneumatic controller units FAILURE TO SET THE REGULATOR PROVIDING AIR TO THE CONTROLLER AT 80 PSI WILL RESULT IN INCONSISTENT SYSTEM OPERATION LIFT KNOB TO UNLOCK TURN KNOB TO ADJUST PRESSURE SETTING AND PUSH KNOB DOWN TO LOCK SET AIR PRESSURE TO 80 PSI For more information contact Xandex Customer Service at 707 763 7799 or Toll Free in the U S at 800 767 9543 FAX 707 763 2631 or visit us on the Internet at www xandexsemi com 820 0096 This page is intentionally left blank 820 0096 Table of Contents Section 1 OC UC m 1 1 Theory of AA 1 1 Section 2 SYSTEM OVELVIEW Pete 2 1 Systemi COMPONENT a cor ce i RE Mace a t b 2 1 Set Part No 340
25. 4115 340 4116 X4115 X4116 EG Set Part No 340 4215 340 4217 ADV SADT KLA sede n D Rt petit dive alosa sa 2 1 Section 3 Installatfi9 n u 3 1 X4115 X4116 Inker Installation 3 1 4215 4217 Motor Z Inker Assembly Installation 3 3 Controller Installation ertet rata rq a ba einer FARA EQ dpa apas 3 5 Voltage Selection amp Fuse Replacement sessi 3 8 Section 4 System acea uu eee eee KONG eue ey REL CER EUER RENT BEAR 4 1 Controller Operations o sae L Sat ad datio Oben sae meu as R ce d 4 1 Programmable Thumbwheel Counter sess 4 1 Cartridge aimed bd ada sued ax e asl qu taut 4 5 Cartridee Prepardtiongis us o eren mate E tren 4 5 Installation aa nA aaa niodo esent tae dios 4 6 Changing the nan pabaon lakan Laan 4 7 ay a eet au ER ie e Ie UE RN nien 4 7 Cartridee PTGS SNS ed EE s 4 8 Tips to avoid common problems with DieMark Pneumatic Ink Cartridges 4 8 Ink Cartridge Labelime ette irt dee disti cie quud i 4 9 DieMark Cartridge Type Babel o ANN GN 4 9 DieMark Cartridge Expiration Date Label sse 4 9 Cartridge Type Labe
26. DieMark CARTRIDGE LABEL WITH CARTRIDGE TYPE DieMark Cartridge Expiration Date Label This label indicates the ink type and batch number of the ink contained in the cartridge and the cartridge expiration date Expiration dates shown are for unopened cartridges Markem 6990 6993 6997 and Xandex 8103 8104 Four 4 months Xandex 7824 and 7824T Four 4 months After the cartridge 1s opened consistent ink flow can only be expected for up to five 5 days for Markem 6990 6993 6997 and three 3 days for Xandex 7824 7824T 8103 and 8104 INK BATCH NUMBER GF9801 30 EXPIRATION DATE MONTH DAY amp YEAR I E OCTOBER 01 2001 INK TYPE 820 0096 4 9 Cartridge Type Label Color Code System Operation Cartridge Type Label Color Code DM 2 amp DM 2 3 PNEUMATIC CARTRIDGE LABELS NEW LABEL DESCRIPTION A5 RED A6 BLUE A8 YELLOW Inker Assembly Setup amp Alignment 1 Prepare Install and prime an ink cartridge per the instructions in this section 2 2 Once priming is completed verify that the inker is at maximum Z height adjustment set the top mode switch to RUN then lower the inker arm and snap into place 3 Position the chuck wafer under the inker and set the prober chuck Z Up UTION If the inker height is adjusted with the forcer stage 2 Down the cartridee will be positioned too low and the cartridee needle will smash
27. LEN SCREWS MOTOR 9 x SHUTTLE ASSEMBLY 820 0096 6 5 Shuttle Maintenance Maintenance amp Troubleshooting 6 6 Shuttle Disassembly Reference Drawing 216 0005 1 Loosen the two Allen Screws Item 6 at the top corners of the bracket Item 1 then unscrew the cylinder adapter assembly Items 3 4 amp 9 from the bracket Item 1 and remove it from the bracket Item 1 Carefully lift and remove the pneumatic holder Item 2 from the bracket Item 1 paying close attention to the spring Item 8 located in the bottom of the pneumatic holder Item 2 Shuttle Inspection and Cleaning With the Shuttle removed and disassembled perform the following checks to verify condition operation Clean both the pneumatic holder Item 2 and bracket Item 1 with Isopropyl Alcohol and a clean lint free cloth Inspect the pneumatic holder Item 2 and bracket Item 1 for wear or physical deformation Replace as necessary Inspect the cylinder adapter assembly Items 3 4 amp 9 Apply remove 40 80 PSI to the cylinder adapter Items 3 4 amp 9 and verify operation The cylinder should extend retract as the air signal is applied removed If problems are noted in operation air leak cylinder sticking
28. T THE REGULATOR PROVIDING AIR INPUT TO THE CONTROLLER AT 80 PSI WILL RESULT IN INCONSISTENT SYSTEM PERFORMANCE Remove the bracket from the regulator filter assembly by removing the plastic retaining nut Mount the regulator filter bracket in a convenient location mounting screws are not supplied The regulator can be mounted to the bracket with the supplied nut after the bracket is installed LIFT KNOB TO UNLOCK TURN KNOB TO ADJUST PRESSURE SETTING AND PUSH KNOB DOWN TO LOCK MOUNTING BRACKET AIR FLOW ARROW LOCATED ON ONE PLASTIC NUT RETAINS BRACKET REGULATOR FILTER ASSEMBLY P N 220 0076 SIDE ONLY BEHIND GAUGE INSTALL REGULATOR TO CONTROLLER AIR HOSE HERE P N 210 2001 2 2 Install 1 4 O D x 0 170 I D polyethylene tubing not supplied to the main air 820 0096 source and then connect to the input fitting on the regulator The left side when facing the gauge Connect the regulator to pneumatic controller air hose P N 210 2001 supplied to the output fitting on the regulator The right side when facing the gauge 3 5 Controller Installation Installation Note The regulator to pneumatic controller air hose supplied by Xandex is 6 feet long If the distance hose length requirement exceeds this length use 1 4 O D x 0 170 LD polyethylene tubing 4 Plug the regulator to controller air hose into the small
29. X 707 763 2631 www xandexsemi com email info xandex com 7 4 820 0096 System Specifications Dot Size Standard Mode in Mils Dot Size Standard Mode in Mils INK TYPE 8103 Large Dot Toggle DOT SIZE DOT SIZE SETTING INK TYPE 7824 Large Dot Toggle DOT SIZE DOT SIZE SETTING A5 NI NI 10 15 NI gt nl orn WININ WM Go WIN le nN CA Nl orn NI nin AJA 8 0 140 15 20 20 2 3 30 ERE EN 40 40 aa 355 6 6 65 65 54 70 70 54 og 80 85 8 20 56 9 BE 95 37 NO NO N INK TYPE 6993 Large Dot Toggle DOT SIZE DOT SIZE SETTING A5 05 10 INK TYPE 6990 Large Dot Toggle DOT SIZE DOT SIZE SETTING A5 05 10 NI N NI WIN o o o 43 143 42 NO N9 N IN 2 HI O NO NO 9999 Nn DID ni Nn nl oln 13 43 3 wv V NINININININININININININ LIHAM Ol OlLO CO DI DAD NA A Cn UI N on O o rol ro a oo 2 alr alalalalalalalalalalololy e NO 3 99 UI N wj u NIN Os
30. al controls the red STATUS LED and the LOUD audio alarm 1 Setthe DOT SIZE thumbwheels to 06 2 Place the mode switch to DISABLE 3 Press RESET to change the state of the alarm The alarm alternately is on and off F Life Test This test will continuously fire the Cartridge Shuttle and Pressure valves for a predetermined number of cycles as set on the thumbwheels 1 Setthe DOT SIZE thumbwheels to 10 2 Place the mode switch to DISABLE 3 Set the DOTS X1000 thumbwheels for the desired number of cycles X1000 1 250 Equals 250 000 cycles If the thumbwheel count is zero the valves cycle 6 553 600 times 4 Reset the LCD Counter 5 Press RESET The Controller begins continuous firing incrementing the LCD Counter each cycle To discontinue the Life Test prior to reaching the set amount remove power 6 10 820 0096 Maintenance amp Troubleshooting Controller Troubleshooting Controller Troubleshooting The Unit is plugged in but the Power Make sure that the outlet has power The LED is off requirement is 100 120 220 240 volts Check controller fuse to be sure it is still good See Section 3 Fuse Replacement Unit powers up okay but will not Verify input cable is plugged into the respond to prober signal prober input on the Controller Verify input cable is plugged into inker jack on prober Check continuity of cable Replace repair if defective Perform system diagnostics checks to
31. annot react to faster use and such use will result in zero movement Pressing and holding down either of the Z UP or Z DOWN buttons will cause the motor to RUN moving the inker rapidly up or down The Z UP and Z DOWN buttons should be used in this manner only when it becomes necessary to quickly move the mechanism up or down a considerable distance i e cartridge replacement 820 0096 4 11 Inker Assembly Setup amp Alignment System Operation TEFLON 4 12 TUBE CARTRIDGE NEEDLE WAFER SURFACE NO Tube too close to wafer NO Tube too far away from wafer YES Ink drop is deposited on wafer surface UTION Do not let the Teflone cartridge tube contact the wafer surface This may crush the tip preventing ink flow and damaging the cartridge 7 Set the top mode switch to RUN to retract the shuttle Index and test fire the inker a few times and check the dots for size and roundness Each time the inker fires the INK ON LED flashes Using the DOT SIZE thumbwheels change the setting until the desired dot size 1s achieved see the tables in Section 7 If you have problems refer to Inker Troubleshooting in Section 6 Maintenance amp Troubleshooting of this manual It is recommended that during initial setup several rows of dots be placed and inspected for consistency If skipped dots are detected lower inker Z height until consistent dots are achieved Note Due to t
32. any value between 1 and 99 Table dot size settings and resulting dot sizes are given in increments of 5 When a range of thumbwheel settings indicate the same dot size choosing a thumbwheel setting in the middle of the range will provide the most consistent dot size 7 8 820 0096 System Specifications System Drawings System Drawings The drawings in the list below are available in Adobe PDF format on the CD included with this manual Description X4115 Motorized Z Pneumatic Inker Kit EG X4116 Motorized Z Pneumatic Inker Kit EG X4215 Motorized Z Pneumatic Inker Kit KLA X4217 Motorized Z Pneumatic Inker Kit KLA Harness Pneumatic Controller Motor Z X4115 X4116 Motorized Z Pneumatic Inker Kit EG Dimensions X4215 X4217 Motorized Z Pneumatic Inker Kit KLA Dimensions Pneumatic Controller Assy Controller Logic Board PC Assy Schematic Logic Board PCA Pneumatic Controller Daughter Card 2 Schematic Daughter Card Inker Assembly Motorized Z Pneumatic Inker Base Assembly 4000 Series Pneumatic Shuttle Overhead 820 0096 Drawing Number 340 4115 340 4116 340 4215 340 4217 240 0408 900 0202 900 0203 350 0018 250 1166 950 1166 250 1219 950 1219 320 4215 220 003 1 216 0005 7 9 System Drawings System Specifications This page is intentionally left blank 7 10 820 0096
33. ate JP7 on the 250 1219 daughter card mounted on the 250 1166 printed circuit board In the default factory condition JP7 is populated with a jumper on pin 1 and pin 2 This is the default audio alarm enabled condition 2 To disable the audio alarm remove the jumper from pin 1 and 2 on JP7 and install the jumper onto pin 1 only This is the audio disabled condition 820 0096 6 13 Internal Maintenance Maintenance amp Troubleshooting 3 After enabling disabling the alarm re install the ogic board by reversing the procedure outlined in the Controller Logic Board Removal above Before returning the unit to service 1 Install the cover apply power and main air and perform controller diagnostics as documented in this chapter to verify operation If problems are noted review the installation of the audio alarm jumper to insure installation is correct none of the component leads are bent and verify connection of JI through J7 connectors on the logic board 6 14 820 0096 Maintenance amp Troubleshooting Preventive Maintenance Preventive Maintenance Pneumatic Controller Preventive Maintenance Schedule and Kits The two solenoid driven air valves used in Xandex pneumatic controllers to drive the Pneumatic Shuttle and Ink Cartridge are identical Valve one V1 supplies air to the ink cartridge and is also referred to as the Cartridge Valve Valve two V2 supplies air to the pneumatic shuttle and is also called the
34. ce Controller Logic Board Removal LN nox Use appropriate ESD precautions when working inside of the controller Note Making any modifications to the controller circuitry or components other than Xandex recommended maintenance procedures might void your controller warranty These instructions are provided for replacement of the microcontroller for upgrade purposes and to enable disable the audible alarm only With Power and Main Air removed Remove the cover of the Controller 2 Disconnect the Molex connectors from J2 through J7 on the top of the controller logic board See controller drawing 350 0018 on the Drawings CD included with this manual 3 Push back both locking devices on the card guides to unlock position then lift the ogic board from the mounting location 4 Disconnect the connector from JI on the face of the logic board and remove the board from the controller 5 Place the ogic board on an ESD protective surface or store in ESD protective anti static bag Reverse this procedure for installation of ogic board Turn Audible Alarm ON OFF Motor Z controller units P N 350 0018 with serial numbers higher than 3000 are equipped with an audible alarm feature When enabled an audio alarm will sound in addition to the INK ON LED illuminating when the programmed number of dots set point is reached The Motor Z controller is shipped with the audio alarm feature enabled With the logic board removed 1 Loc
35. chanism and a simultaneous pulse of air into the cartridge reservoir There is no filament and no direct contact with the wafer surface A prober signal to the controller initiates the inking sequence actuating the shuttle mechanism downward and sending an air pulse to the cartridge As the shuttle extends to the downward position the air pulse to the cartridge forces ink out of the cartridge barrel and forms a drop at the end of the needle tip When the shuttle is at its lowest position the drop makes contact with the wafer surface and forms a dot After 25 2 milliseconds the shuttle returns to the normal position After completion of each dot a small amount of vacuum is developed in the cartridge by the closure of the valve causing the ink to back up into the cartridge reservoir preventing dripping If another dot sequence is not initiated within 10 seconds a puff pulse of air equal to 1 2 the dot setting duration 6 7 13 mS will displace a small amount of ink back into the Teflon tube to aid in maintaining proper dot size after long delays between dots The dot size is determined by cartridge air pulse duration Adjust the controller setting to change the dot size without changing the cartridge Pneumatic cartridges are factory tuned ensuring consistent dots and contain 40 more ink than standard DieMark cartridges Thank you for selecting Xandex as your inking choice Please spend a few minutes familiarizing yourself with
36. connect main air and power 7 Verify controller operation and replace the controller cover 820 0096 6 17 Preventive Maintenance Maintenance amp Troubleshooting This page is intentionally left blank 6 18 820 0096 Section 7 System Specifications Controller Specifications Size 10 5 x 6 25 x 4 25 267mm x 159mm x 108mm Weight 8 0 lbs 3 7 kg Input Power Requirement 100 120 220 240 volts AC 50 60 hz approx 30W Foot Switch Input Contact Closure gt 50 msec Air Consumption 80 PSI 5 PSI Instrument Air per ISA 7 3 specification lt 0 5 cfm 10 dots second Cycle Rate Exceeds 750 cycles minute On Time Range Cartridge Air Feed Continuously Variable Pulse Dot Size 6 85 27 mS Shuttle Air Feed Fixed 25 2 ms Control Circuits Atmel Corporation ATMEGA325 16AU Microprocessor Counters Six Digit with External Reset Independent of Microprocessor External Regulator Filter 5 0 micron Air Filtration Prober Input 12 59 volts minimum 30 ms pulse width The input circuit presents approximately 1 700 Q input resistance Typical current as a function of input voltage is listed in the following table 10 10 mA 15 25 mA 20 45 mA 40 V 65 mA 59 V 85 mA Maximum input Environmental Range Indoor use Altitude up to 4 000 m Temperature range 5 C to 40 C Maximum relative humidity 80 Yo for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Mains su
37. ctive valve by depressing the colored fitting collar and pulling on the pneumatic hose simultaneously Disconnect the two snap in connectors that connect the valve wires to the controller 4 Remove the two Phillips mounting screws and two stand off s 504 1404 securing the valve to the Controller base and remove the valve Installation 1 Remove appropriate fittings from old valve and install on new valve assembly using Teflon thread sealant tape not supplied Install the replacement valve assembly P N 240 0261 in the controller base securing with the two Phillips screws previously removed Connect the two snap in connectors on the valve wires to the receptacle connectors on the controller Polarity does not matter Install the pneumatic lines accordingly insuring that each hose is firmly seated in the valve fitting Apply power and main air Refer to Controller Diagnostics in this section and perform appropriate valve functional and diagnostic tests Re install the controller cover 820 0096 Maintenance amp Troubleshooting Preventive Maintenance Controller Internal Regulator Adjustment The internal regulator steps down the air pressure to the Pressure Valve V3 that feeds the Cartridge Valve when the unit is in small dot mode The regulator is factory set at 10 psi and should only be adjusted after all other options have failed to provide adequate small dot performance or when non standard installation
38. e Resist Remover Methyl Ethyl Ketone MEK N Methy1 2 Pyrrolidone 999 9 9 5 4 820 0096 Section 6 Maintenance amp Troubleshooting This Troubleshooting section for the Motorized Z Pneumatic Inker is divided into three parts The first part covers Ink and the DM 2 ink cartridge The second part covers the Inker Assembly and the third part covers the Pneumatic Controller More troubleshooting information is available in the Support section at www xandexsemi com Ink Troubleshooting Some ink dots tend to This occurrence is related to the ink surface tension crack after baking using the wafer surface conditions and too long a delay time Xandex recommended cure between inking and curing To remedy this situation cycles the curing cycle has to be modified reduce time and temperature See Section 5 Ink Curing Runny blobbing ink or Check ink shelf life Markem 6990 6993 6997 skipping dots inks should be used within 4 months or 5 days of cartridge opening Xandex 8103 and 8104 air dry glycol free inks should be used within 4 months or 3 days of cartridge opening Xandex 7824 and Xandex 7824T air dry ink within 4 months or 3 days after cartridge opening Check for exposure to extreme temperatures Cartridges should be stored at 25 C DO NOT refrigerate the cartridges Occasionally ink is subjected to much higher temperatures 40 50 C for an extended time during transport This could
39. ent to the Shuttle Valve V2 while at the same time a 6 85 27 ms pulse depending on position of Dot Size knob is sent to the Cartridge Valve V1 Signal from Prober 12 60V AC DC Shuttle Valve V2 25 2ms Cartridge Valve V1 6 85 27 mS As the shuttle extends to the lower position the air pulse from Valve 1 forces ink out of the cartridge barrel and forms a drop at the end of the needle tip When the shuttle is at its lowest position the drop makes contact with the wafer surface and forms a dot The shuttle then returns to the normal position At the completion of each dot a small amount of vacuum is developed in the cartridge by the closure of the valve preventing dripping If another dot sequence is not initiated within 10 seconds a short puff pulse equal to 1 2 the dot size duration 6 7 13ms is sent to the cartridge to displace a small amount of ink back into the tube to aid in maintaining proper dot size after a long delay between dots 6 8 820 0096 Maintenance amp Troubleshooting Controller Maintenance Controller Diagnostics There are four internal diagnostic tests available for testing the Controller To enter the Diagnostics mode apply power to the Controller with the RESET button to the right of the thumbwheels depressed All references to mode switch in the following tests refer to the top mode toggle switch The bottom mode switch should be set to RUN during testing
40. figuration 0 Not yet qualified by Xandex Available as a special order subject to limited warranty conditions T with Tungsten filament F with Mono Filament X Not available in filament cartridge configurations 820 0096 7 3 Inker Warranty System Specifications Inker Warranty Seller warrants as follows All material supplied will conform to the description stated All products will be free of defects in materials and workmanship under normal use for the following periods Stated shelf life of DM 2 Ink Cartridges Markem 6990 6993 6997 Four 4 months Five 5 days after cartridge opening Xandex 8103 and 8104 Four 4 months Three 3 days after cartridge opening Xandex 7824 and 7824T Four 4 months Three 3 days after cartridge opening Pneumatic Controller One 1 year only when clean dry filtered air is used and when product is installed and operated per manufacturer s recommendations and instructions Ninety 90 days from the date of delivery to the customer for all other products Xandex makes no other warranty express or implied including without limitation any warranty of merchantability or of fitness for a particular purpose Customer OEM or Distributor s exclusive warranty shall be at Xandex s option to have defective product repaired or replaced or to receive a refund of purchase price Xandex may upon request furnish to buyer such technical advice as it may be able to
41. h are air dried will not smear when touched They are not permanent however and will not withstand most post probe handling or processes Conversely Xandex 7824 and 7824T inks air cure within 2 5 hours lt 20 mil up to 8 hours for gt 20 mil dots Xandex 7824 and 7824T may also be heat set at 120 C for 10 minutes Xandex 8103 and 8104 Glycol Free inks hard cure under ambient conditions in the least time of any of the inks offered by Xandex Ink dots of lt 25 mil air dry to a hard cure in 45 minutes Dot sizes gt 25 mil may require significantly longer to cure An ambient cure time of up to 6 hours may be needed for larger dot sizes Continuous air flow across the wafer surface will reduce the amount of time required for curing The following table provides specifics for each type of ink INK CURING TEMPERATURE CURE TIME RESULT TYPE Markem 6990 6993 and 6997 Soft 100 150 C 5 15 minutes Ink is semi permanent and Cure will not withstand wash of alcohol acetone or photoresist removers Cure resistant to wash process Xandex 7824 7824T Hard Air dry ambient 2 5 hours 0 25 hrs for lt 20 Ink is permanent and may Cure conditions mil up to 8 hrs gt 20 mil only be removed with great difficulty 150 watt heat lamp 5 10 minutes Ink is permanent and may at 5 6 inches only be removed with great OR difficulty oven at 110 120 C Xandex 8103 and 8104 Glycol Free Air dry ambient 5 15 minutes for 5 15 mil Ink is per
42. he recommended maintenance schedule is as follows e Off line use 6 month intervals In Line Post Probe use Once per year Shuttle preventive maintenance kits are available which include all parts necessary for one normal shuttle maintenance procedure These kits may be ordered direct from Xandex or through your local Xandex distributor All Motorized Z model inkers require kit number 370 0001 Maintenance Procedure The following describes the procedure for disassembly and reassembly of the Pneumatic Shuttle for maintenance purposes Reference Drawing 320 4215 and 216 0005 on the Drawings CD included with this manual for part identification and associated part numbers Shuttle Removal Reference Drawing 320 4215 1 Remove the ink cartridge from the inker and remove the inker from the prober retaining all mounting screws and hardware if necessary see Section 4 Changing the Cartridge and Section 3 Installation 2 Disconnect the twin pneumatic hose at the shuttle connection grasp do not crush the hose with needle nose pliers over the fitting point and pull gently to disconnect being careful not to damage hose 3 Remove the three Allen screws Item 9 securing the shuttle assembly Item 6 to the shuttle mounting arm Item 1 and remove the shuttle for maintenance SHUTTLE SHUTTLE 3 MOUNTING ARM REMOVE TWIN AIR HOSE AT CARTRIDGE SHUTTLE CONNECTION AIR HOSE IE AL
43. he unavoidable incidence of slight manufacturing variations from 10 11 cartridge to cartridge additional Z height adjustment of the inker may be necessary after changing cartridges If the dots are round and of proper size basic installation is complete If adjustment is required use the Z UP and Z DOWN buttons on the front of the controller to make the final adjustments until round dots are achieved Pressing either the Z UP or Z DOWN button results in a movement of approximately 0 0005 inches up or down for each time pressed The INK ON LED will flash each time either button is pressed only when the unit is not placing dots inking If the unit fails to operate as specified please contact Xandex Customer Service for assistance at 707 763 7799 or toll free in the United States at 800 767 9543 820 0096 System Operation Motorized Z Small Dot Configuration Motorized Z Small Dot Configuration When the mode switch on the front of the controller is switched to SMALL DOT the air supplied to the cartridge valve V1 is routed through a second internal regulator which reduces the air pressure sent to the cartridge This regulator is not operator adjustable but may be internally reset to optimize controller small dot performance See Controller Internal Regulator Adjustment in Section 6 Maintenance and Troubleshooting Small dot production with the Motorized Z pneumatic inking system requires use of the
44. ic controller operating at MIDDLE dot size setting standard controller dot size knob centered between MIN and MAX Auto Z Motor Z Controller dot size thumbwheel setting of 50 Dot production figures represent an average of results for multiple ink types Your yield may be higher or lower depending on the ink type and dot size setting you use Average figures are based on complete cartridge use within cartridge open shelf life periods 5 days maximum or 3 days maximum as stated for each specific ink type Cartridge Preparation 1 Place the cartridge into the cartridge preparation tool Xandex Part No 200 0001 as shown exercising care to avoid damaging Teflong tip The cartridge cap should be seated in the tool hinge with the needle resting in the slot 2 Firmly squeeze the tool fully closed with a smooth quick motion This will push the cartridge body forward causing the needle to puncture the internal membrane NEEDLE PUNCTURES MEMBRANE NEEDLE COLLAR FLUSH WITH NECK ZA 3 Open tool and remove cartridge The needle should be straight and the needle collar flush with the cartridge neck 820 0096 4 5 Ink Cartridge System Operation LN nox Do not shake the cartridge at any time as air bubbles may be introduced into the reservoir and restrict the flow of ink If mixing of the ink in the reservoir is desired roll the cartridge be
45. ick in viscosity and delivers opaque dots ranging from 6 to 40 mils Xandex 8104 is not as viscous as 8103 and provides thinner dots with excellent geometry and adhesion in a larger dot range up to 86 mils Markem 6990 and 6997 are less opaque and may not offer sufficient contrast under all lighting conditions Xandex 8103 ink is certified to contain less than 10 ppm of Sodium Na and Chloride Cl Xandex 8104 ink is certified to contain less than 20 ppm of Sodium Na and Chloride Cl Both 8103 and 8104 premium inks are free of glycol ethers which are identified reproductive hazards and carcinogens Xandex 7824 and 7824T inks are certified by Xandex to contain less than 10 ppm of Na and Cl Markem 6990 is certified by Markem to contain less than 25 ppm of Na and Cl Analysis reports are available upon request from Xandex Customer Service Although Markem 6993 and 6997 are not contaminant controlled periodic test data indicates that these inks typically contain less than 100 ppm of Sodium Na and 300 ppm of Chloride These levels are not certified or guaranteed by Markem or by Xandex Glycol Free 8103 and 8104 inks have a 4 month shelf life rapidly air dry at ambient conditions and will give consistent flow for 3 days after cartridge opening Markem 6990 6993 and 6997 inks have a 4 month shelf life require heat curing to be permanent and will give consistent flow for 5 days after cartridge opening Xandex 7824
46. into the wafer when you begin inking This will stop the ink flow and possibly ruin the cartridee or damage the wafer 4 Move the top mode switch to SETUP The shuttle will extend to its lowest position Create a droplet of ink at the needle tip by pressing the prober TEST INKER button twice Note The Controller can remain in the SETUP mode for a maximum of 5 minutes After 5 minutes the Controller will disable the shuttle air valve returning the shuttle to normal position the inker will fire but the shuttle will not move preventing damage to the valve caused by extended operation If this happens move the toggle switch to RUN then back to SETUP to complete alignment 4 10 820 0096 System Operation Inker Assembly Setup amp Alignment 5 Loosen the X Y lockdown knob on the inker sufficiently to allow X Y movement of the cartridge tip when the joystick is manipulated The X Y lockdown knob should be tightened to give spring tension to the joystick at all times to maintain X Y position Use the joystick to adjust the X Y position of the cartridge tip to the center of the die 6 Press the Z DOWN button once per second to lower the shuttle until the ink droplet at the needle tip touches the wafer surface The Teflone tube will be 1 2 mil from the wafer surface UTION Extreme care should be taken when using the Z UP and 7 DOWN buttons The buttons should be pressed no faster than one time per second The switch c
47. ion Controller Operation Programmable Thumbwheel Counter f I Individual thumbwheel settings are YANDEX Qs Q available to monitor the number of UP Dots placed by an ink cartridge Dots X LARGEDOT O 1000 These three thumbwheels can O Q SMALL DOT SAN be set to any number of dots between 1 and 999 000 A red STATUS LED will be illuminated and an audible POWER INK ON 5 alarm will sound when the programmed limit is exceeded For example if you RESET STATUS select 30 000 dots turning the DOTS X 1000 thumbwheel to 30 the Z NC uf STATUS LED will light when 30 000 dots have been deposited Upon installation of a new ink cartridge it is recommended that the thumbwheels be reset to alert the operator when a cartridge is nearing replacement The Dots X 1000 setting is programmed by using the RESET button f Reset Button A RESET button is XANDEX RUE O located to the right of the thumbwheels l DISABLE for resetting the counters in the LARGE DOT O microprocessor When the RESET SA button is depressed once the INK ON LED will flash for 5 seconds If it is pressed a second time within 5 ig al 4 seconds it will read the setting on the
48. l Color 4 10 Inker Assembly Setup amp Alignment 4 10 Motorized Z Small Dot Configuration decet ett aad 4 13 Section 5 M 5 1 AN 5 1 DOS naala DOS S 5 2 Removal Information ee rie nn add tad EN 5 3 DieMark Remover S0DQ top Rea tacite ed 5 3 Ink Removal Procedures uia ee sterio esed etu br sederet Ns 5 3 Section 6 Maintenance amp Troubleshooting 6 1 Ink Troubleshooting eom tM S oa ats 6 1 Inker Troubleshooting a t ee eee Do bere rette led dede e eoe d ti dn 6 3 Shuttle IWATE TAT uuu unus et M ATI tco base us 6 5 Schedule and Preventive Maintenance sess 6 5 Maintenance Procedure tee Ee mies E xau Causa antena ees 6 5 Shuttle Removal Reference Drawing 320 4215 6 5 Shuttle Disassembly Reference Drawing 216 0005 6 6 Shuttle Inspection and Cleaning a ge tero na 6 6 Shuttle RE ASSEMDIY uu reet ep eis
49. manent and may conditions 15 45 minutes for 15 25 mil only be removed with great 45 min 6 hours for 25 40 mil difficulty Note Longer drying times are required for larger dot sizes Note Markem is a registered trademark of Markem Corporation Keene NH 5 2 820 0096 Ink Ink Removal Information Ink Removal Information A rinse with isopropyl alcohol or acetone generally removes ink completely if the wafer is washed shortly after inking within 5 minutes An ultrasonic bath is recommended to ensure complete removal of ink residue Ink dots which have been air dried or hard cured require the application of an ink remover DieMark Remover 8000 Xandex has developed DieMark Remover 8000 specifically for the semi conductor industry DieMark Remover 8000 thoroughly removes all inks supplied by Xandex including oven baked ink dots DieMark Remover 8000 has very low levels of organic and inorganic contaminants and is an efficient and thorough ink remover when used in simple bench top cleaning methods Due to its high flash point DieMark Remover 8000 is also safe and effective when used in ultrasonic temperature pressure cycling under vacuum and deep bath heating and agitation ink removal processes DieMark Remover 8000 is carcinogen free NTP OSHA and all ingredients used are TSCA listed For an MSDS or more information on using DieMark Remover 8000 in your specific ink removal process contact Xandex Customer Service I
50. n The X4215 X4217 pneumatic inker is for use with KLA 1007 1011 1200 and 1220 model probers The X4215 X4217 installs directly onto the head plate of a KLA TEL prober using a mounting plate P N 120 0019 supplied The X 4215 X 4217 inker sets are identical except for pneumatic controller software The X4217 inker set for KLA probers comes with a pneumatic controller that incorporates the Half Puff software option X4215 Standard Motor Z controller 1 Ifyou are currently using another inker remove it from the prober AN uox Move the chuck wafer from underneath the inker when installing inker to prevent damage 2 Align the mounting plate P N 120 0019 over the existing inker mounting holes on the prober 3 Install the mounting plate using two M3 X 0 5 X 6mm screws P N 510 9201 supplied 4 Liftthe inker swing arm into the up position The inker base mounting screws should now be accessible 5 Install the inker base onto the mounting plate using 2 4 40 x 1 4 screws P N 510 3104 Tin INKER BASE 2X 4 40 X 1 4 SCREWS MOUNTING PLATE T 120 0019 2X M3 X 0 5 X 6mm screws l MOUNTING SURFACE X4215 INKER ASSEMBLY WITH SWING ARM IN UP POSITION 820 0096 3 3 X4215 X4217 Motor Z Inker Assembly Installation Installation 6 Proceed to the Controller Installation portion of this Installation Section 3 and Install the pneumatic contr
51. nk Removal Procedure The following is the recommended bench top procedure for removing ink from wafers using DieMark Remover 8000 UTION All procedures should be performed under laboratory hood following the proper safety precautions protective goggles gloves and clothing 1 Apply sparingly with an eyedropper to a localized area of the wafer 2 Allow 2 3 minutes for the DieMark Remover 8000 to begin solvating Time required will vary depending on the degree that the ink was cured 3 For highly cured ink dots use longer soak times then wipe gently with a clean lint free cloth to facilitate removal If necessary repeat steps 1 and 2 4 For large areas or removal of ink from entire wafer soak a clean lint free cloth with DieMark Remover 8000 then lay the wet cloth over the entire surface and allow time to soak solvate ink then remove wet cloth Repeat as necessary 5 After dots are removed clean wafer via standard procedures such as vapor degreasing and or rinse with a clean solvent Isopropyl Alcohol followed by a bake cycle at 65 C to dry 820 0096 5 3 Ink Removal Information Ink The following ink removers may be substituted for DieMark Remover 8000 however Xandex does not guarantee that satisfactory results will be obtained None of the following solvents or ink removers are available from Xandex Aptek 6515 Ink Remover Markeme 540 P 300 Resist Remover 712 D Resist Remover Uresolv
52. oller per instructions for your application 7 With the controller installed connect the fitting on the controller to shuttle air hose into the pneumatic connection on the rear of the pneumatic controller labeled SHUTTLE 8 Plug the jack from the inker stepper motor into the mating jack on the rear of the controller labeled MOTOR 9 Proceed to Section 4 System Operation for ink cartridge installation inker setup alignment and controller operation instructions UTION After an ink cartridge is installed the inker arm should NOT be lowered back into operating position with the Z height adjusted completely down The cartridge may be positioned too low resulting in the Teflong tube in the cartridge needle smashing into the wafer when the arm is lowered This will stop the ink flow and possibly ruin the cartridge or damage the wafer Z ADJUST MOTOR ASSEMBLY CONTROLLER TO SHUTTLE AIR HOSE CARTRIDGE FITTING RED HOSE X Y ADJUSTMENT JOYSTICK X Y POSITION LOCK INKER BASE ASSEMBLY MOUNTING PLATE P N 120 0019 STEPPER MOTOR CABLE CONNECTOR TO CONTROLLER PNEUMATIC SHUTTLE ASSEMBLY WAFER SURFACE 3 4 820 0096 Installation Controller Installation Controller Installation Note The Model 350 0018 Motorized Z controller is designed to operate at 80 1 5 PSI This is 10 PSI higher than the 70 PSI setting recommended for all other Xandex pneumatic controllers FAILURE TO SE
53. olyurethane tubing is recommended as the internal operating temperature within the controller enclosure can cause the tubing to shrink slightly over time This can result in leaking connections at the valve and coupling connections This set is used for 24 month controller preventive maintenance Order part number 370 0101 For more information or to order pneumatic controller PM sets contact Xandex Customer Service at 707 763 7799 800 767 9543 toll free in the US FAX 707 763 2631 email info xandex com or order online at www xandexsemi com 820 0096 6 15 Preventive Maintenance Maintenance amp Troubleshooting Cartridge V1 or Shuttle V2 and Pressure V3 Valve Replacement 87 This procedure is to be used for replacement of all three valves as they are identical Note Controller units manufactured before June 1999 used a soldered wire splice covered by heat shrink tubing for valve electrical connections instead of the snap plug connectors used in the current build The replacement valve assembly P N 240 0261 is shipped with post end snap plug connectors To order crimp on receptacle connectors to retrofit an older controller unit contact Xandex Customer Service and order snap on receptacle connector P N 519 0031 With Power and Main Air removed 1 Remove the four 4 cover screws from each side of the controller and remove the controller cover Disconnect the input and output pneumatic hoses from the defe
54. on this unit If the unit loses power memory of any hour or dot count programmed into the unit will be lost 2 Swing open the fuse cover door by lifting on tab on the right side of the door A small screwdriver may be necessary ROTATE THUMB WHEEL UNTIL CORRECT VOLTAGE SHOWS THROUGH SLOT IN DOOR TOP SLOT NOT EN E FUSE HOLDER L IN 2910 20 02 INSTALL WITH ARROW DOWN IN LOWER SLOT cA i 9 es 7 NEZ ay s o 135 SWING DOOR OPEN SNAP CORRECT FUSE INTO HOLDER 3 To change voltage setting rotate the thumbwheel until correct voltage listed on the thumbwheel is facing out visible through the slot in the door when the door is closed 4 To change the fuse remove the fuse holder from the module by pulling is straight out Carefully pry the fuse from the holder and replace see fuse rating chart below 5 Insert the fuse holder into the bottom lower slot in the module with the arrow on the fuse holder pointed down 6 CAREFULLY close fuse cover door Verify that the correct voltage shows through the window on the module door Reconnect power cord and verify controller power INPUT VOLTAGE FUSE RATING FUSE TYPE XANDEX PART AT 50 60HZ 250 V T or Time Delay NUMBER 100 120VAC 0 75A 3AG 0 25 x 1 25 158 0032 220 240VAC 0 375A 3AG 0 25 x 1 25 158 0479 3 8 820 0096 Section 4 System Operat
55. pecifications Ink Cartridge Specifications Ink Cartridge Specifications Models DM 2 Type A5 A6 A8 Teflon Tube I D A5 0 005 A6 0 006 A8 0 008 Reservoir Capacity 1 0 grams minimum Available Inks 6990 6993 6997 7824 7824T 8103 8104 Dot Sizes Dot sizes 1096 consistent for speeds of 12 dots second to 1 dot 2 minutes Ink and Cartridge Availability The following table illustrates ink and cartridge configurations Configurations designated with a 0 are available as a Customer Specific Product CSP but have not been tested by Xandex and are subject to limited warranty conditions The information in this table is accurate as of the time of publication but is subject to change without notice Pneumatic Cartridge Types Filament Cartridge Types Ink Type DM 1 DM 1 25 T SEP 6990 Black LF 6990 Red T 6993 Black 6993 Green 6993 Red 6997 Black 6997 Red Empty no ink Xandex Inks 7824 Black 7824T Black 8103 Black 8103 Red 8103 White 8104 Black TF TF InkType 6990 Black 6990 Red 6993 Black 6993 Green 6993 Red 6997 Black 6997 Red f EIE 7824 Black 7824T Black 8103 Black f 8103 Red 8103 White 8104 Black KAI Available standard cartridge ink con
56. pply voltage fluctuations not to exceed 10 of the nominal values Transient overvoltages according to INSTALLATION CATEGORY II POLLUTION DEGREE 2 On our sole responsibility we declare this product is in conformity to the following EU directives MABE gt EMC Directive 89 336 EEC gt Low Voltage Directive 73 23 EEC Standards to which conformity is declared EN50081 2 EN50082 2 EN61010 1 v v v v v 820 0096 7 1 Inker Specifications System Specifications Inker Specifications Ink Cartridge Model DM 2 Ink Cartridge Type A5 A6 A8 Available Inks Standard Xandex Inks Dot Sizes Dot sizes 1096 consistent for speeds of 10 dots second to 1 dot 2 minutes Dot Size Range 6 mil to 50 mil with currently available inks Shuttle Stroke Length 0 050 0 060 factory set user adjustable Z Adjustment Resolution 0 0005 motorized adjustment Z Adjustment Range 10 18 motorized adjustment X Adjustment Range 0 093 manual joystick Y Adjustment Range 0 125 manual joystick Stepper Motor Specifications Part No 158 0010 Operating Voltage 12 VDC Resistance Per Phase 118 O Insulation Resistance 20 MQ Power Consumption 2 4 Watts Nominal Force at 100 PPS 26 oz minimum Linear Travel Per Step 0 001 Direction of Travel Bidirectional Bearings Ball Thrust Weight 1 0 oz Operating Temperature 40 C to 65 C Storage Temperature 40 C to 100 C Maximum Travel 1 875 7 2 820 0096 System S
57. rformance Please note Xandex does not warranty refilled cartridges Handling Tips Handle cartridges with care to avoid damaging the exposed Teflon tube at the tip of the needle When removing the cartridges from the clamshell package lift the cartridge straight up to avoid bending the needle or damaging the Teflon tube Allow the cartridge to reach optimal temperature of 18 25C 65 78F before priming the cartridge Never attempt to prime and use cartridges that are not at optimal temperature Priming Tips Wipe off any excess ink on the outside of the needle using a lint free cloth or swab before use DO NOT use the cartridges beyond the recommended open time for the ink type in the cartridge Recommended open time is three 3 days for 7824 7824T 8103 and 8104 and five 5 days for 6990 6993 and 6997 4 8 820 0096 System Operation Ink Cartridge Labeling Ink Cartridge Labeling DieMark ink cartridges are individually labeled with two distinct labels One label shows the cartridge type and the other label indicates the ink batch number ink type and expiration date of the cartridge Do not remove the labels from the cartridges as this can cause cartridge type and ink types to be confused at cartridge installation resulting in improper performance Removal of cartridge labels will also void the cartridge warranty DieMark Cartridge Type Label This label contains the cartridge type either A5 A6 or A8
58. rning the shuttle to the normal position If set up was not completed return the switch to the RUN position then back to SET UP In the RUN position the system operates normally The switch is placed in the RUN position for inking When the toggle switch is placed in the DISABLE position the shuttle air valve V2 is disabled and the shuttle does not extend during inking This mode is used in controller diagnostics to place dots in hand inking applications with the optional foot switch or when utilizing the prober Z function without actuating the shuttle Bottom Mode Switch Positions f N SETUP O RUN DISABLE LARGE DOT Q SMALL DOT O m L DOWN LARGE DOT Controller operates at external regulator pressure e SMALL DOT Cartridge valve operates at internal regulator pressure POWER INK ON bbb Tm O Dot size is determined by the cartridge RESET STATUS type A5 A6 or A8 ink viscosity air poe NA pressure supplied to the cartridge valve s and the dot size thumbwheel setting which regulates the duration of the air pulse to the cartridge When the bottom switch is placed in LARGE DOT position the controller operates at the air pressure setting of the external regulator 80 psi nominal Average large dot size parameters for the three available cartridge types
59. st the cylinder adapter assembly Items 3 4 amp 9 until the holder Item 2 stroke is between 0 050 and 0 060 ADJUST CYLINDER ADAPTER ASSEMBLY 1 EIE PERECESEN Nes TOP FITTING NORMAL SHUTTLE USE DIAL CALIPER POSITION BETWEEN THESE TWO NOT EXTENDED POINTS EXTEND SHUTTLE TO MEASURE TRAVEL EXTENDED SHUTTLE POSITION DOTTED LINE SET TRAVEL BETWEEN 0 050 0 060 4 Tighten the two Allen screws Item 6 in the bracket to lock down the cylinder adapter assembly Apply 40 80 PSI air signal to the pneumatic connection on shuttle assembly and verify operation of shuttle 5 Re install the shuttle assembly on the shuttle mounting arm using the three Allen screws previously removed Apply a dab of threadlocker Loctite to the screws before installation 6 Reconnect the twin pneumatic air hose install a cartridge and test to verify operation The red side of the twin air hose connects to the cartridge fitting on the shuttle mounting arm The blue side connects to the top fitting on the shuttle 820 0096 6 7 Controller Maintenance Maintenance amp Troubleshooting Controller Maintenance Controller Sequence of Operation To initiate an ink dot the Prober sends a 12 60 V AC DC unregulated active low signal to the Controller After receipt of the signal the microcontroller performs various checks of system status prior to firing the pneumatic valves Upon completion of the status checks a 25 2 ms pulse is s
60. supply with reference to the use by buyer of any materials delivered Xandex assumes no liability for the advice given or results obtained Buyer expressly agrees that it will implement any advice thus given at its own risk and agrees to indemnify and hold Xandex harmless against any liabilities costs or expense resulting therefrom Xandex makes no warranty for performance service or support of any products unless they are purchased directly from Xandex or through an authorized Xandex Distributor Exclusions This warranty shall not apply to defects or damage resulting from Improper or inadequate maintenance by customer including failure to perform preventive maintenance per manufacturer s specified schedule Misuse or unauthorized modification Operation outside the environmental specifications for the product Improper site preparation and maintenance Some states and provinces do not allow limitations on how long an implied warranty lasts so the limitation or exclusion contained in this warranty may not apply to you However any implied warranty of merchantability or fitness is limited to the duration period of this written warranty If you have any questions or need further assistance please contact your authorized Xandex distributor or contact our Customer Service Group XANDEX Customer Service 1360 Redwood Way Suite A Petaluma California 94954 U S A Toll Free in the United States 800 767 9543 or 707 763 7799 FA
61. t Verify that the inker swing arm is all the way down and locked in position Shuttle mechanism may be binding See Shuttle Maintenance in this section 6 2 820 0096 Maintenance amp Troubleshooting Inker Troubleshooting Inker Troubleshooting Cartridge tip does not 1 Check Z height by switching the controller into reach wafer surface SETUP mode which will extend the shuttle downward into the inking position The cartridge tip should be 1 2 mil from the wafer surface Adjust Z height per Inker Assembly Setup and Alignment in Section 4 System Operation of this manual SETUP mode switch was not used when inker was initially aligned See Inker Assembly Setup and Alignment in Section 4 Unit functions normally Verify that the Controller to Shuttle air hose no dots no shuttle connector is plugged into the controller movement Verify that the Controller to shuttle air hose is not kinked clogged or pinched closed Check Main Air pressure setting verify 80 5 PSI air input Unit functions normally Check air hose to top of cartridge to be sure it is shuttle moves no dots connected and not clogged kinked or pinched Verify cartridge preparation insuring Needle Collar is flush with the Cartridge Neck and the internal membrane is broken See Section 4 Ink Cartridge Check the Teflong tip of cartridge tube to confirm that it is not clogged or damaged Verify rubber washer on
62. the X4000 Series inkers 4 4 820 0096 System Operation Ink Cartridge Ink Cartridge The ink cartridge used with the X4000 Series Inkers is a N cap DM 2 available in A5 A6 and A8 types designating INTERNAL 0 005 0 006 and 0 008 Teflone tube I D MEMBISANE respectively DM 2 cartridges have a polypropylene reservoir sealed at the bottom by a thin membrane and a small tube encased in a stainless steel needle When the cartridge is opened the needle punctures the membrane to provide ink flow through the Teflon tube CARTRIDGE NECK l NEED COLLAR Each cartridge holds 1 0 grams minimum of ink and can produce a wide range of dot sizes Dot size is controlled by changing the duration of the air pulse into the cartridge reservoir which determines how much ink is forced through the tube to create the ink drop at the needle tip A5 and A6 cartridge types will produce an average of 30 000 dots while the A8 averages 10 000 dots For more information see Section 5 Ink and Ink Cartridge Specifications in Section 7 System Specifications Averages exclude 8104 ink type Dot production figures are averages and as such are not guaranteed Testing is performed at ambient temperature of 70 degrees F relative humidity of 50 on polished unetched silicon wafers no passivation and based on pneumat
63. tion instructions 820 0096 Installation Controller Installation CONNECT CONTROLLER TO SHUTTLE AIR HOSE HERE CONNECT MOTOR CABLE CONNECTOR HERE CONNECT REGULATOR TO CONTROLLER AIR HOSE HERE CONNECT SUPPLIED AC POWER CORD HERE X AN PNEUMATIC CONTROLLER MOTORIZED Z L INDEX MODEL NUMBER 6 POWER 30w SERIAL NUMBER 2 INPUT VOLTAGE AT 50 60 2 FUSE RATING 260v FUSE TYPE T 22 2201240 VAC 3754 938 138 BAS SEE MANUAL TO CHANGE FUSE 2201240 VAG 0 375 DISCONNECT INPUT POWER BEFORE SERVICING CAUTION VADE susa x C MAXIMUM AIR PRESSURE IS 85 PSI 600 kPa PROBER o Y FUSE ACCESS VOLTAGE SELECTION DOOR 820 0096 CONTROLLER CONNECT CABLE CONNECT ASSEMBLY P N 210 0109 X4115 X4116 P N 210 0110 X4215 X4217 HERE FOR USE WITH OPTIONAL FOOT SWITCH P N 350 0010 3 7 Voltage Selection amp Fuse Replacement Installation Voltage Selection amp Fuse Replacement Note This unit is shipped with the voltage set for 120VAC Two fuse types are included one for 100 120VAC and one for 220 240VAC however the controller unit is shipped without a fuse installed Select the correct fuse for your voltage rating from the chart below and install per instructions Discard unused fuse 1 Disconnect power cord from rear of controller if connected Note There is no power switch
64. troller to Shuttle Dot size may be set at any value between 1 and 99 Table dot size settings and resulting dot sizes are given in increments of 5 When a range of thumbwheel settings indicate the same dot size choosing a thumbwheel setting in the middle of the range will provide the most consistent dot size 820 0096 7 7 Dot Size Small Dot Mode in Microns System Specifications Dot Size Small Dot Mode in Microns INK TYPE 8103 Small Dot Toggle DOT SIZE DOT SIZE SETTING o 152 4 177 8 177 8 177 8 203 2 203 2 203 2 203 2 228 6 228 6 228 6 228 6 228 6 54 254 254 254 254 254 C N N0 S alala ASA gt gt Nn INK TYPE 6990 Small Dot Toggle DOT SIZE DOT SIZE SETTING 203 2 228 6 254 254 254 279 4 279 4 279 4 279 4 279 4 330 2 330 2 330 2 330 2 330 2 330 2 355 6 355 6 355 6 B 9 2 N9 O S tA nb O ulo ID Cn A aJo Os INK TYPE 7824 Small Dot Toggle DOT SIZE DOT SIZE SETTING AS INK TYPE 6993 Small Dot Toggle DOT SIZE SETTING DOT SIZE NOTE Characterization testing performed at ambient temperature of 70 degrees F relative humidity of 50 on polished unetched silicon wafers no passivation Air pressure 80 PSI minimum with standard 60 inch long air hose Controller to Shuttle Dot size may be set at
65. tween thumb and forefinger or between palms for 1 2 minutes prior to installation Cartridge Installation wn Move the inker arm to the UP position when installing or changing cartridges to prevent damaging the cartridge tip 1 Use the slotted section of the cartridge preparation tool and a counter clockwise motion to remove cap 2 Thread the cartridge onto the brass air fitting of the RED AIR HOSE turning the cartridge clockwise until snug 3 Press top of cartridge into shuttle spring clip 4 Press cartridge body into shuttle forks until the neck fully snaps into place Cartridge is now ready for priming See Cartridge Priming later in this Section 4 for instructions 4 6 820 0096 System Operation Ink Cartridge Changing the Cartridge 1 Lift the inker swing arm to the UP position 2 Place thumb and forefinger on each side of the cartridge and gently pull up to remove cartridge 3 Unthread the cartridge from the air fitting and discard in the proper manner 4 Inspect the air fitting and air hose for ink contamination and clean or replace as necessary 5 Install a new cartridge per installation instructions Cartridge Priming LN uox Always wear protective eyeglasses when handling an active pneumatic inking system 1 Prepare a cartridge per the Cartridge Preparation section of this manual 2 Install a cartridge to the inker per the Cartridge Installation section of this man
66. ual 3 Liftthe inker swing arm to the UP position Note Cartridge priming is done with the inker arm in the UP position 4 Move the controller switch to RUN 5 Push the RESET button on the controller for at least 3 seconds and hold down until ink appears at the needle tip Note When the RESET button is initially pushed the INK ON LED will begin to flash At the end of 3 seconds the INK ON LED will light continuously and the air valve will begin to pulse priming the cartridge 6 Once priming is completed clean excess ink from the needle tip with a lint free cloth Cartridge is now ready for operation Proceed to Inker Assembly Setup and Alignment in this section 4 to prepare the inker Note Always use the RESET button to pulse the cartridge valve when priming a cartridge with the inker swing arm in the up position The RESET button fires only the inker s cartridge valve If the shuttle valve is fired with the swing arm in the up position by using the prober s test inker function for example ink may be forced into the cartridge air fitting and air hose contaminating both 820 0096 4 7 Cartridge Priming Tips System Operation Cartridge Priming Tips Tips to avoid common problems with DieMark Pneumatic Ink Cartridges DO NOT attempt to refill Xandex DieMark Ink Cartridges Cartridges are disposable and designed for single use only Using a refilled cartridge will have an adverse effect on functionality and pe
67. utton Pressing the small red reset button next to the LCD window will reset the counter display only It will have no effect on the counter circuits within the microprocessor Upon installation of a new ink cartridge it is recommended that the counter be reset to accurately record the numbers of dots produced by that cartridge Audible Alarm An audible alarm is activated along with the STATUS LED whenever the DOTS X 1000 thumbwheel setting has been reached The alarm is silenced and reset by pausing the prober resetting the DOTS X 1000 thumbwheels if desired and depressing the RESET button twice within five seconds The audio alarm may be disabled by means of an internal jumper on the controller PCA See Section 6 Maintenance and Troubleshooting Controller Internal Maintenance for detailed instructions Dot Size Thumbwheels The adjustable Dot Size Thumbwheels on f N o LARGE DOT SMALL DOT SETUP Wu 0 1 DISABLE DOWN the front panel are used to vary the size of the dot produced without affecting set up or requiring additional operator steps The microprocessor reads the thumbwheel settings and outputs a signal to enable the associated air valve for a predetermined amount of time igher settings enable the cartridge air valve for a longer time producing a larger dot RESET STATUS o o i

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