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Varian DS302 Rotary Vane Vacuum Pump User`s Installation Manual

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1. 60 Special screw 61 End plate SR03700285 SR03700285 SR03700285 SR03700391 SR03700391 62 Tongue 63 Washer 64 Nut 69A External oil pump gear SR03700281 SR03700281 SR03700281 SR03700281 SR03700281 69B Internal oil pump gear SR03700277 SR03700277 SR03700277 SR03700277 SR03700277 70 Oil pump cover 71 73 Screw Plate 74 Filter 75 Casing 76 Exhaust flange 77 OR gasket 4 1 4 2 4 2 5 3 5 3 78 Oil fill plug 03 701218 03 701218 03 701218 03 701218 03 701218 79 Oil drain plug SR03700256 SR03700256 SR03700256 SR03700256 SR03700256 80 drain plug gasket SR03700256 SR03700256 SR03700256 SR03700256 SR03700256 81 Left sideplate 83 Spring 84 Filter 85 Flange 86 Sight glass 03 701326 03 701326 03 701326 03 701326 03 701326 87 99 OR gasket Special screw 4 1 4 2 4 2 5 3 5 3 100 Piston 101 Arm 102 Spring 103 OR gasket 104 OR gasket 105 Sleeve 106 Spring 107 Ring 108 Arm 109 Insert 110 Special washer 111 Screw NOTES 2 3 5 1 Part of DS 102 Major Ma
2. Cannot reach test mode LI Communication failure Degas not working Failed to start LI Other L Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS L Pump doesn t start L Noisy pump describe Heater failure O Electrical problem TT Doesn t reach vacuum L Over temperature L Doesn t reach vacuum LI Cooling coil damage L Pump seized L Other L Vacuum leak LI Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich United States and Canada Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Varian Vacuum Technologies Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 China Varian Technologies China Ltd Rm 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 6310 8550 Fax 86 10 6310 0141 Toll Free 800 820 655
3. 53 63 87 900 937 01 1 TECHNICAL INFORMATION 1 Drain off all the oil from the pump NOTE For a description of how to drain off the oil see the Unscheduled Maintenance Card No 102 2 Disconnect the discharge flange from its piping 3 Disconnect the electric motor 1 complete with half joint NOTE For a description of how to disassemble the electric motor see the Unscheduled Maintenance Card No 105 4 On DS402 1Ph DS402 3Ph DS602 1Ph and DS602 3Ph remove the screw 111 and remove the seal 110 Slacken the nut locking the half joint 20 to the shaft of the rotor 39 and take out the half joint Remove the tongue 37 with it as well 5 Unscrew the securing screw 47 and remove the valve screen 49 6 Slacken the four nuts 64 and take out the tie rods 44 and the complete functional block 76 lifting it from the pump support 34 and take out the OR gaskets 27 and 45 from the gas ballast line and suc tion line respectively ES CAUTION Be careful not to cut the lip of the oil seal with the sharp edges of the shaft key seat 7 Reassemble by proceeding in the inverse order NOTE When reassembling replace all the gaskets stripped down CAUTION When reassembly is complete proceed to fill the pump with oil again following the instructions of Unsched uled Maintenance Card No 102 54 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenan
4. zi _ On off switch Voltage Selector Orange label 100 to 120 V IEC 320 main socket Motor Electrical box 87 900 937 01 1 Three phase universal motors They are world wide motors in accordance with major international standards UL CSA CE On the table below are shown the technical specifica tions of the different motors ES CAUTION Before starting the pump give a short activation to the power switch in order to check that the motor turns in the direction indicated by the arrow on the motor body Should it rotate in the opposite direc tion invert the connection of any two phases on the motor terminals TECHNICAL INFORMATION HIGH VOLTAGE CONNECTION for power supply 380V to 460V 50 60 Hz STAR CONNECTION LOW VOLTAGE CONNECTION Electrical Connections of Three Phase World for power supply of 220V to 230 V Wide Motors 50 60 Hz DELTA CONNECTION To connect the motor to the three phase mains follow the wiring diagram on the motor plate or on T the inside of the terminal strip Install a multipolar switch on the power line with A wa contact spacing of at least 3 mm A magneto thermal switch must be installed downstream of ata Qu this switch tripping at 130 140 of the nominal we vo te T current R 2 d S R S T CONNECTION FREQ NOMINAL POWER START UP CURRENT MAX FUSE Hz VOLTAGES V KW CURRENT A A RATING A STAR 50 380 to
5. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem Agilent Technologies DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Dual Stage Rotary Vane Pumps I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI INSTRUCTION MANUAL load Downloadey 99 On TEEN products 505 872 0037 PLEASE NOTE We do sell the related products within this literature but we are not connected in any way with the manufacture of your product We provide this literature for the products we sell and service They are intended to provide users with the Model 949 9315 Model 949 9320 Model 949 9325 Model 949 9330 Model 949 9331 Model 949 9335 Model 949 9336 manufactures instructions to operate the equipment in a safe manner www idealvac com 87 900 937 01 1 JULY 2009 DS102 DS202 DS302 DS402 DS602 A AR VARIAN vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report lo us any problem you may have had with the purchase or operation of our product On the back sid
6. 105 sleeve Remove the two OR gaskets 104 from the rod 108 using a screwdriver if necessary Be careful not to bend the rod in doing so 10 Remove the sleeve 105 and remove it from the support 34 together with its OR gasket 103 11 Remove the hydraulic piston 100 from its seat in the body 12 Reassemble by proceeding in the inverse order 51 63 87 900 937 01 1 TECHNICAL INFORMATION NOTE When reassembling replace all the gaskets stripped down CAUTION When reassembly is complete proceed to fill the pump with oil again following the instructions of Unsched uled Maintenance Card No 102 52 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action DISASSEMBLY Item PUMP BODY ACTION AREA Materials required Equipment required e Gaskets kit e Mechanical tools A EE Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON from the main breaker switch When finished remove the safety warning N ELITE If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60
7. Europe only VAT reg Number USA only Taxable 7 Non taxable Customer Ship To Customer Bill To PRODUCT IDENTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair L Warranty Exchange Warranty Repair LI Loaner Return TT Credit LI Shipping Error L Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one LI HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name see Customer Authorized Signature 2 Print Fille 2 eost sete tr arnie Date ues NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer wi
8. TECHNICAL INFORMATION SYMPTOM PROBABLE CAUSE SUGGESTED REMEDY CARD REF 6 The pump is very noisy even at A Exhaust valves damaged Inspect the valves 106 steady operating conditions B High suction pressure or gas Check the system and the gas ballast ballast device is open valve see items 4 A and 4 B C Elastic star of joint is dam Check and replace if necessary aged D A screw of the joint has be Lock the screw after application of Loctite come loose 222 for slack threads 7 When the pump is stopped the A The anti suckback device is Disassemble and check the anti suckback 108 inlet pressure rises rapidly defective device B The cause of the problem is See Note not with the pump 8 The pump does not produce a A Not enough oil or oil con Check level and appearance of the oil 01 sufficient vacuum taminated Open the Gas Ballast for half an hour at 102 least change the oil whenever necessary Se 4 B Oil ducts clogged inside Proceed as at 3 B DEN C Direction of rotation inverted Proceed as at 3 C D OR gaskets communicating Replace the gaskets 109 with the inlet line defective E Exhaust valves damaged or Proceed as at 6 A out of place F Insufficient oil pressure in the Inspect the gears of the oil pump and 107 lubricating circuit preventing the check that it is working anti suckback device from opening G Internal moving parts worn Disassemble the pump and
9. Therefore never pour lubricat ing products on to the ground into water or in the sewage system All violations of these rules are liable to persecution as provided for by law When using lubricants always keep an oil can nearby e Take care in draining off waste oils In dis posal of these products respect all regulations in force concerning waste oil disposal 24 63 TECHNICAL INFORMATION The recommended lubricating oil is the Varian Ro tary Vane Fluid DS19 Type The Rotary Vane Fluid DS19 Type is a general purpose mechanical pump fluid specifically engineered to provide superior performance in high speed direct drive mechanical pumps These precisely distilled fluids 100 solvent re fined neutral paraffinic oil deliver lower base pres sure capability faster pump down cycles and reduced maintenance requirements on both the pump and the fluid It is absolutely necessary to continue using the lu bricants initially used to fill the tank If this is not possible for organizational or business reasons use only products with the same characteristics as the previous oils Only use of lubricants of suitable quality will guar antee safe operation of the pumps ES CAUTION Mineral oils and the PFPE oil are incompatible To change from one type to another the pump must be stripped down completely and all parts washed carefully to eliminate all oil residues If you expect to have to use other lubricants first find out
10. from the main breaker switch When finished remove the safety warning 38 63 87 900 937 01 1 TECHNICAL INFORMATION N If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 1 Drain off the oil from the pump NOTE For a description of how to drain off the oil see the Unscheduled Maintenance Card No 102 2 Unscrew the securing screws 71 and disconnect the flange 85 from the casing 3 Take out the OR gasket 87 and the sight glass 86 NOTE When reassembling replace the gaskets that you have stripped down 08 CAUTION When reassembly is complete proceed to fill the pump with oil again following the instructions of Unsched uled Maintenance Card No 102 39 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action REPLACEMENT Item ANTI SUCKBACK DEVICE SHUTTER ACTION AREA Materials required Equipment required e Shutter e Mechanical tools A WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON from the main breaker switch When finish
11. 26 UNSCHEDULED MAINTENANCE CARD 31 TROUBLESHOOTING AND CORRECTIVE ACTION 61 SPARE E KEE 63 INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L uti lizzatore deve leggere attentamente il presente manuale di i struzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell utilizzo dell apparecchiatura La Varian si ritie ne sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le pompe DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph e DS602 3Ph sono delle pompe rotati ve bistadio a palette a tenuta in bagno d olio azionate da mo tore elettrico mono o trifase Queste pompe da alto vuoto sono adatte al pompaggio di gas non corrosivi Nei paragrafi seguenti sono riportate tutte le informazioni ne cessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nel l appendice Technical information Questo manuale utilizza le seguenti convenzioni A EE messaggi di pericolo attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE messaggi di attenzione sono visualizzati prima di proc
12. 33 63 87 900 937 01 1 TECHNICAL INFORMATION Lock without forcing the nuts on the four tie rods 44 connecting the parts of the pump block Before locking check that all parts are touching as required Before putting the springs and shutters of the discharge valves back in pour a little oil into the stators through the holes in the valves ES CAUTION Before hooking the recall spring to the anti suckback command bar make sure you have put the bar all the way into the sleeve of the rotary feedthrough to avoid bending the tapered part of the bar NOTE On DS102 1Ph DS202 1Ph and DS302 1Ph pumps fit the joint on the motor shaft after careful removal of grease from the surfaces and application of LOCTITE 242 34 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency AS REQUIRED Time Machine status E Type of action CHANGING OIL Item LUBRICANT 949 9390 ACTION AREA Materials required Equipment required e Varian Rotary Vane Fluid DS19 Type e Fixed wrench for oil exhaust 1 liter P N 949 9390 e Tank to collect oil e Cotton or other suitable material rags for cleaning e Soap and water solution for cleaning N Do change the immediately after stopping the machine as th
13. 415 0 75 15 2 6 4 STAR 60 460 0 90 14 24 4 DELTA 50 200 to 240 0 75 26 4 4 6 DELTA 60 200 to 230 0 90 21 4 8 6 20 63 87 900 937 01 1 ES CAUTION It is recommended to connect the pump to the power supply through a dedicated switch on the main electrical panel of the installation or in prox imity of the power supply connection point Before starting the pump give a short activation to the power switch in order to check that the motor turns in the direction indicated by the arrow on the motor body Should it rotate in the opposite direc tion invert the connection of any two phases on the motor terminals One of the most effective method to verify the rota tional way of the motor it is to start the pump with a sheet of paper on the pump inlet If the paper is sucked by the pump then the motor runs in the right way CONNECTIONS TO THE INLET AND EXHAUST FLANGES Remove the protective caps from both flanges Connect the system to be evacuated to the inlet flange using a centering ring with OR and a lock ing collar NOTE For guaranteed reliable sealing use an OH gasket in Perbunan or Viton The inlet duct is equipped with a sieve filter pre venting solid particles from entering and damaging the pump NOTE When the gases to be pumped out contain dust it is advisable to insert a dust filter before the inlet flange NOTE When the gases to be pumped out contain large quantities of vapor it is advisable t
14. N WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ONT from the main breaker switch When finished remove the safety warning N ELITE If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 29 63 87 900 937 01 1 TECHNICAL INFORMATION 1 Remove the filter 26 from the inlet flange 28 2 Clean the filter using an aqueous solution and dry with hot air 3 Putthe filter back in place ES CAUTION The filter element is designed to prevent solid particles in the air from entering the inside of the pump and if it is not working properly serious damage could be caused the pump s inner parts In such cases it may be worthwhile installing a large surface area filter in the pump s suction line to improve effectiveness and reduce maintenance frequency If the pump sucks in gases and vapors that contain large quantities of solid particles the filter must be checked and cleaned more often than indicated here 30 63 87 900 937 01 1 TECHNICAL INFORMATION UNSCHEDULED MAINTENANCE CARDS No SUBJECT FREQUENCY 102 Whenever necessary 107 Disassembly of oil circulating pump When damaged 108 Disassembly of anti suckback valve When damaged 109 Disassembly of pump body When damaged 110 Replacement of oil seal ring wear bushing Wh
15. and minimum levels for proper pump operation NOTE The amount of oil consumed depends on the type of work particularly on the volume being evacuated and on the frequency of the vacuum cycles 2 If necessary open the pump filling plug on the top plane of the pump and add oil NOTE Before starting the procedure check that the quality and type of oil used corresponds to the indications of Ta ble Varian Rotary Vane Fluid DS19 Type characteristics of this manual ES CAUTION Take great care to avoid oily residues or dust from entering the pump and jeopardizing proper operation 3 Close the fill plug and using cotton or other suitable material rags clean thoroughly the outer surface of the top plane of the pump ES CAUTION Never mix lubricants of different brands or quality To change from one oil to another the pump must be stripped down and all parts washed carefully taking care to eliminate oil residues 4 Openthe gas ballast valve to purify the oil 28 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Scheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency TWICE YEARLY Time Machine status s Type of action CLEANING Item INLET FILTER No Description Time Equipment Materials 1 Clean the suction filter 10 min e Compressed air gun
16. if the two products are compatible In cases of doubt the lubricant used up to that time must be flushed out by way of a pump flushing procedure ES CAUTION To avoid the risk of contaminating the oil absolute cleanliness of the pump and surrounding area must be ensured during the lubrication proce dures 87 900 937 01 1 TECHNICAL INFORMATION Varian Rotary Vane Fluid DS19 Type characteristics PROPERTY Vapor pressure 9 25 Boiling point 0 01 torr Viscosity 40 Viscosity 100 Pour point Flash point Fire point Density 25 UNIT OF MEASURE Torr EC EC C F ROTARY VANE FLUID DS19 Type 1410 112 233 55 258 8 1 52 7 15 5 213 415 244 472 0 87 Varian Rotary Vane Fluid DS19 Type vapor pressure curve VAPOR PRESSURE VS TEMPERATURE E Fei Ree 1906 Vapor Pressure 2 pcm 5 100 TERR a ES D LLLA M reem li 10 20 30 40 9 60 70 90 100 110 120 130 140 150 160 9 Temperature C 25 63 22 2 Ei RE sa ae Benz EE ELIO elc RS Varian Rotary Vane Fluid DS19 Type viscosity curve VISCOSITY VS TEMPERATURE 8 BK LUE L i TSt Lg 50 Temperature 87 900 937 01 1 TECHNICAL INFORMATION SCHEDULED MAI
17. necessary to replace when overhauling the pump completely These parts have a life of approx two years under conditions of normal operation ES PUMP TYPE ORDER DS102 1Ph DS202 1Ph DS302 1Ph SE 53 Ge CODE GASKETS KIT 949 9370 GASKETS KIT 949 9371 MAINTENANCE KIT 949 9380 MAINTENANCE KIT 949 9381 MAINTENANCE KIT 949 9382 2 Before reassembling the pump all parts must be cleaned thoroughly with a soap and water solution and rinsed with demineralized water ES CAUTION Particular care must be taken in cleaning the lubrication ducts and oil passage nozzles which must always be kept free of impurities ES CAUTION Take care that the soap and water solution does not remain in the various cavities and recesses of the pump in the blind holes in particular 3 Then dry the parts by heating where possible but without using compressed air it generally contains pol luting substances taking care not to exceed a temperature of 80 4 The sequence of reassembly is the inverse of the disassembly operation Take the same precautions Spread some clean oil of the same type as used to lubricate the pump over the different parts in par ticular the inner lip of the oil seal the bushings and vanes f the oil seal has the dust block lip 2 3 fill the area between the two lips with ISOFLEX TOPAS NB5051 grease ES CAUTION Do not allow the grease into the area of the circumferential spring
18. plus the vanes 63 63 87 900 937 01 1 Ar gt lt ar Request for Return BIN 9001 VARIAN REGISTERED 1 A Return Authorization Number RA WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION COMPANY EE Contact person Name 00222 Tel e EE Do te cnet po P E Mail ve Ship Method Shipping Collect c
19. time ES CAUTION Do not clean with Alcohol the plastic or rubber components of the pump Use only the strictly necessary amount of lubricant an excess of lubricating oil like when there is none may sometimes compromise proper opera tion of the pump Only the recommended lubricants or lubricating oils with similar characteristics and known and ex perimented quality should be used Oil changes must be made with the oil at a suffi ciently high temperature after leaving the pump to cool for a few minutes following operation The drain and filler plugs must not be left open any longer than is strictly necessary When performing maintenance look out for all sig nals that may precede a breakdown in particular e traces of corrosion e Oilleaks e Slack joints or couplings Maintenance technicians must e be aware of all applicable national directives concerning accident prevention during work on motor driven pumps and should know how to apply them e have read and understood all the sections on Safety Rules e be familiar with the essential design features and operation of the pump e know how to use and consult the pump docu mentation e concerned about proper operation of the pump e make a note of any irregularities in operation of the pump and take the necessary action where appropriate Use original spare parts wherever possible and repair a broken part as best as possible on site or s
20. unmittelbar nach Stillsetzung des Ger tes vornehmen da die Oltemperatur sehr hoch sein kann p ACHTUNG Bei Ersatz von Teilen ist mit Vorsicht vorzugehen Insbesondere bei der Version mit Dreiphasenstrommotor bewirkt eine Polumkehrung die Umkehrung des Drehsinns der Pumpe was Sch den an der Mechanik zur Folge haben kann ANMERKUNG Bevor dem Hersteller eine Pumpe zur Reparatur zur ckgesandt wird ist das Formular Sicherheit und Gesundheit in der Anlage zum vorliegenden Handbuch auszuf llen und der lokalen Verkaufsstelle zuzustellen Eine Kopie des Formulars ist der Pumpenverpackung vor dem Versand beizulegen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmill entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontak tieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat 87 900 937 01 1 INDICATIONS G N RALES Cet appareillage a t con u en v
21. y d A S N 4 kk o d q 6 2 E im e o o o o _ ZH 06 y w peeds 942543 Typical Performance Curves 16 63 87 900 937 01 1 SAFETY PRECAUTIONS Always carry the pump by means of the han dles provided pump must be set in position taking the upmost care in order to avoid accidental falls N Fraen In case of a need to handle the pump after a pe riod of operation it must be left to cool first as the external surface temperature may be in excess of 60 C TRANSPORT AND INSTALLATION The pumps are shipped to the customer inside cardboard boxes Total weight of the pack including the pump is be tween 30 Kg and 40 Kg according to the different pump models The case must be handled with care using appro priate lifting equipment ES CAUTION When moving the case ensure that it is securely bound to the lifting equipment and that the equip ment is strong enough to support the weight The pump s working environment is a traditional industrial environment Naturally sites with corro sive vapors or excessive heat are best avoided Room temperature should ideally be between 12 and 40 If the temperature is not inside this range consult Varian technical service for the changes required Setting the pump in position should be performed as follows Pump laid on the ground There are no special in
22. 5KF 25 25 25 ON 25 25 ae 25 25 I rea Mo sero po 9 me fa fa NN NN NN LT 200 240 ES 100 120 100 120 100 120 200 230 200 230 200 230 200 230 200 230 5 4 54 54 6 2 60 A 8 8 8 8 8 8 12 8 18 44 44 44 64 64 According to PNEUROP 6602 At ultimate total pressure 20 C 68 F room temperature For more details about the electrical motors see pages from 17 to 20 14 63 87 900 937 01 1 TECHNICAL INFORMATION DIMENSIONS MODEL UNITS B D H L M N P R DS102 mm 30 30 35 3 212 430 250 100 105 165 132 inch 1 18 1 18 1 38 0 12 8 3 16 9 98 3 9 4 1 6 5 5 2 DS202 mm 30 30 35 3 212 467 250 100 105 205 132 inch 1 18 1 18 1 38 0 12 8 3 18 4 98 3 9 4 1 8 1 5 2 DS302 mm 30 30 35 3 212 467 250 100 105 205 132 inch 1 18 1 18 1 38 0 12 8 3 18 4 98 3 9 4 1 8 1 5 2 DS402 mm 40 40 40 6 242 541 261 130 100 230 164 inch 1 57 1 57 1 57 0 24 9 5 21 3 10 3 5 1 3 9 9 1 6 5 DS602 mm 40 40 40 6 242 541 261 130 100 230 164 inch 1 57 1 57 1 57 0 24 9 5 21 3 10 3 5 1 3 9 9 1 6 5 Pump dimensions 15 63 87 900 937 01 1 TECHNICAL INFORMATION 100 N N N e e e e e N st e Ka Ka o qa
23. 6 France Varian s a 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 84 Fax 33 1 69 86 29 88 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT Ltd 205 A A wing of Galleria 2nd floor Hiranandani Gardens Powai Mumbai 400 076 India Tel 91 22 2570 8595 8597 Fax 91 22 2570 8599 Italy Varian S p A Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 02 09 Sales and Service Offices Japan Varian Technologies Japan Ltd Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 South East Asia Varian Vacuum Technologies South East Asia SEA Tel 601 2213 1253 Fax 603 6733 8121 Singapore Varian Vacuum Technologies Singapore Unit 10 04 Helios Biopolis one north 11 Biopolis Way 138667 Singapore Tel 65 92364988 Fa
24. 9980301 SR8999980301 38 First stage vane 1 2 2 3 3 39 first stage rotor SR03700273 SR03700319 SR03700319 SR03700371 SR03700371 40 Spring 4 1 4 2 4 2 5 3 5 3 41 Tongue SR8999980001 SR8999980001 SR8999980001 SR8999980401 SR8999980401 42 Second stage vane 1 2 2 3 3 43 Second stage rotor SR03700269 SR03700269 SR03700269 SR03700367 SR03700367 44 Tie rod SR03700209 SR03700308 SR03700308 SR03700335 SR03700335 45 OR gasket 4 1 4 2 4 2 5 3 5 3 46 Bracket 47 Screw 49 Valve cover plate 50 spring 4 1 4 2 4 2 5 3 5 3 12 63 87 900 937 01 1 N Description DS 102 DS202 DS302 TECHNICAL INFORMATION DS402 DS602 51 Valve gasket 4 1 4 2 4 2 5 3 5 3 52 First stage stator SR03700261 SR03700316 SR03700495 SR03700363 SR03700419 53 Middle plate SR03700262 SR03700262 SR03700262 SR03700421 SR03700421 56 GasBallast Valve shutter 4 1 4 2 4 2 5 3 5 3 57 GasBallast Valve spring 4 1 4 2 4 2 5 3 5 3 58 Second stage stator SR03700321 SR03700321 SR03700321 SR03700364 SR03700364 59 Oil pump joint SR03700280 SR03700280 SR03700280 SR03700390 SR03700390
25. NTENANCE CARDS No FREQUENCY PUMP STATUS OPERATION 01 MONTHLY OIL LEVEL CHECKING 02 TWICE YEARLY S CLEANING THE INLET FILTER RERUNNING S STOPPED NOTE When the pump is equipped with e a filter for dust on the inlet side e acondensation separator on the inlet side these items must also be maintained by following the Manufacturer s instructions NOTE The numbers used in the drawings on the Scheduled Maintenance Cards are those used in Figure View of the pump 26 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Scheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency MONTHLY Time Machine status sH Type of action LUBRICATION Item LUBRICATING OIL 949 9390 No Description Time Equipment Materials 1 Check the oil level and top 5 min e Cleaning rags Oil P N 949 9390 up if necessary e Liquid detergent A WARNING Machine powered take care on account of moving parts and high voltages A ELITE If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 27 63 87 900 937 01 1 TECHNICAL INFORMATION 1 Check the oil level through the sight glass there are two clearly visible arrows indicating maximum
26. OTE For assembly of the new oil shaft seal a special tool is needed 5 After applying silicone grease to the external diameter of the oil seal engage it on the tool and push it into its seat 6 Reassemble by proceeding in the inverse order NOTE When reassembling replace all the gaskets stripped down ES CAUTION When reassembly is complete proceed to fill the pump with oil again following the instructions of Unsched uled Maintenance Card No 102 57 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies m Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action DISASSEMBLY Item FUNCTIONAL BLOCK ROTORS ACTION AREA Materials required Equipment required e Oil shaft seal ring e Mechanical tools e Anti wear bushing e OR gaskets e ist stage vanes e 2nd stage vanes e Gas Ballast shutter the above items of material are included in the Major Maintenance kit 58 63 87 900 937 01 1 TECHNICAL INFORMATION A WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON from the main breaker switch When finished remove the safety warning A If you have to perform maintenance on the pump after a considerable time i
27. R03700704 2 Rubber foot Screw Screw Spacer 3 4 5 Screw 7 8 Motor support 9 Handle 10 Screw 11 Right sideplate 12 Board 14 Screw 15 Support plate 16 Cylindrical pin 4 1 4 2 4 2 5 3 5 3 17 Screw 18 Rubber crown 4 1 4 2 4 2 5 3 5 3 19 Half joint with fan 20 Half joint pump side 21 Oil seal ring 4 1 4 2 4 2 5 3 5 3 22 Special screw 23 OR gasket 4 1 4 2 4 2 5 3 5 3 24 Gas Ballast Valve knob SR03700219 SR03700219 SR03700219 SR03700219 SR03700219 25 Half plate 26 Inlet screen SR03700237 SR03700237 SR03700237 SR03700237 SR03700237 27 OR gasket 4 1 4 2 4 2 5 3 5 3 28 Suction flange 29 Anti suckback shutter 4 1 4 2 4 2 5 3 5 3 30 Piston 31 gasket 4 1 4 2 4 2 5 3 5 3 32 Casing gasket 4 1 4 2 4 2 5 3 5 3 33 Inner plate SR03700260 SR03700260 SR03700260 SR03700362 SR03700362 34 Pump support 35 Anti wear bushing SR03700370 SR03700370 36 OR gasket 4 1 4 2 4 2 5 3 5 3 37 motor side SR8999980101 SR8999980101 SR8999980101 SR899
28. TENZIONE Controllare che la tensione di alimentazione corrisponda a quel la indicata sul cartellino del motore Collegare la pompa all alimentazione ES ATTENZIONE Nel caso di motore trifase una inversione di polarit provoca l inversione del verso di rotazione della pompa con conseguen ti possibili danni di natura meccanica ISTRUZIONI PER L USO A EI Nel caso si debba procedere ad operazioni di manutenzione della pompa al termine di un periodo di esercizio necessario lasciarla raffreddare poich la temperatura esterna pu supe rare i 60 A EI Escludere sempre l alimentazione della pompa prima di com piere operazioni di manutenzione Apporre specifici cartelli di avvertenza APPARECCHIATURA IN MANUTENZIONE NON INSERIRE L ALIMENTAZIONE in corrispondenza dell interrut tore di alimentazione Al termine ripristinare i dispositivi di sicu rezza USO Prima di mettere la pompa in servizio effettivo amp necessario per il raggiungimento del vuoto limite far marciare per circa un ora la pompa con zavorra aperta allo scopo di eliminare l umidit nell olio L accensione della pompa non richiede particolari manovre amp sufficiente collegarla all alimentazione elettrica agendo sull interruttore bipolare versione con motore monofase o on nipolare versione con motore trifase A EXT La pompa progettata per operare con fluidi neutri o non cor rosivi E assolutamente vieta
29. The required flow of oil under pressure passes through ducts that are drilled in the walls of the pump and lubricates the bushings and the inside parts 87 900 937 01 1 VACUUM SEALS A special feature of this pump is the low number of gaskets that are employed The seals in the circuit are obtained by means of VITON gaskets The careful surface finish of the various parts of the pump means that vacuum sealing of the func tional block is ensured by the film of oil separating metal surfaces Sealing of the rotor shaft is guar anteed by a rotating gasket with dust guard lip The suction flange and duct are sealed by mean of OR gaskets GAS BALLAST VALVE When the pump sucks in vapors these condense during compression and mix with the oil forming an emulsion an aqueous vapor for example or a solution organic solvent vapors for example A number of problems arise from this such as the impossibility of obtaining high vacuums the altera tion of the properties of the oil could cause scaling on parts of the pump To avoid this during compression at the second stage atmospheric air is let into the pump through an adjustable valve or gas ballast valve located at the top of the pump In this way the discharge valve of the second stage opens through the effect of the atmospheric air before the partial pressure of the vapor reaches saturation point thus preventing condensation from occurring The vapors are expell
30. a special protective packing If this shows signs of damage which may have occurred during trans port contact your local sales office Total weight of the pack including the pump is approx 32 Kg When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 NOTE Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust INSTRUCTION MANUAL 3 VARIAN fe Dam 4 CE 72 INSTALLATION Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk Dur ing operation the following environmental conditions must be respected temperature from 12 C to 40 C relative humidity 0 95 non condensing A RIZ Protect against short circuits and overload by installing on Var ian Device electrical main line an automatic circuit breaker of proper capacity see table here below P N 110 Vac 220 Vac 380 Vac 949 9315 949 9320 949 9325 949 9330 949 9331 949 9335 949 9336 6A 4A ES CAUTION Before starting the p
31. al oil again 4 After all the oil has been drained close the drain plug tight take the tank of waste oil away and clean thoroughly using rags of cotton or other suitable material to dry 5 Clean thoroughly the pourer lip of the new oil tin pour the oil slowly into the pump through the filler plug 78 36 63 87 900 937 01 1 TECHNICAL INFORMATION NOTE Monitor through the sight glass at the front of the pump that you are not exceeding the maximum oil level per mitted ES CAUTION For disposal of waste oil it is strictly necessary to respect the currently applicable legislation on this matter 6 To achieve a good vacuum level again run the pump for one hour with the gas ballast open 37 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action DISASSEMBLY Item SIGHT GLASS ACTION AREA Materials required Equipment required e OR gaskets e Mechanical tools for pumps DS102 1Ph DS202 1Ph and DS302 1Ph Gaskets kit p n 949 9370 for pumps DS402 1Ph DS402 3Ph DS602 1Ph and DS602 3Ph Gaskets kit p n 949 9371 e Sight glass A WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON
32. ative nazionali specifi che N EXT Quando la macchina alimentata prestare attenzione per la presenza di parti in movimento e di alta tensione SMALTIMENTO Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla di rettiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Eu ropea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del di Spositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 87 900 937 01 1 ALLGEMEINE HINWEISE Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Varian mitgelieferten Zusatzinformationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Benutzung unter Mi achtung der nationalen Bestimmungen bernimmt Firma Varian keinerlei Haftung Die Pumpen DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph und DS602 3Ph sind dichte lbadgeschmierte zweistufige F
33. ce vacuum technologies Pump type DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time 1hourand 15 Machine status R Type of action REPLACEMENT Item OIL SHAFT SEAL ANTI WEAR BUSHING ACTION AREA Materials required Equipment required e Oil shaft seal e Mechanical tools e Anti wear bushing e Gaskets kit N ELITE Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON from the main breaker switch When finished remove the safety warning N If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 55 63 87 900 937 01 1 TECHNICAL INFORMATION 1 Drain off all the oil from the pump NOTE For a description of how to drain off the oil see the Unscheduled Maintenance Card No 102 2 Separate the functional block from the pump support NOTE For a description of how to separate the functional block from the support see the Unscheduled Maintenance Card No 109 3 Remove the worn out oil shaft seal 21 from the pump support 34 using a screwdriver for leverage and taking care not to scratch the seat 4 Take the anti wear bushing 35 off the shaft and take out the OR Gasket 36 56 63 87 900 937 01 1 TECHNICAL INFORMATION N
34. d Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action DISASSEMBLY Item ANTI SUCKBACK DEVICE ACTION AREA Materials required Equipment required e Gaskets kit e Mechanical A WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ONT from the main breaker switch When finished remove the safety warning N ELITE If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 50 63 87 900 937 01 1 TECHNICAL INFORMATION 1 Drain off all the oil from the pump NOTE For a description of how to drain the oil see the Unscheduled Maintenance Card No 102 Disconnect the discharge flanges from their piping Remove the locking nuts 3 and remove the casing 75 from the pump Remove the securing screw 47 and remove the splash guard 49 Remove the shutter from the anti suckback device NOTE For more details on how to remove the anti suckback device see Unscheduled Maintenance Card No 104 Remove the screw 102 take out the arm 101 from the rod Release the spring 106 from the rod arm 108 Pull the rod 108 out of the rotary feedthrough
35. doit avoir recu la formation n cessaire et poss der une connaissance approfondie des normes de pr vention des acci dents du travail N DANGER Les hautes tensions peuvent entra ner la mort par contact Veil ler toujours op rer avec le maximum de prudence et dans le respect des normes de pr vention des accidents du travail en vigueur A DANGER Lorsque la machine est sous alimentation faire attention la pr sence d organes en mouvement et de haute tension MODE D EMPLOI A DANGER En cas de n cessit de proc der des op rations de mainte nance de la pompe au terme d une p riode de fonctionnement il est indispensable de la laisser refroidir car sa temp rature ext rieure peut tre sup rieure a 60 C A DANGER Avant toute op ration de maintenance il est imp ratif de tou jours couper l alimentation de la pompe Placer les pancartes sp cifiques d avertissement APPAREILLAGE EN COURS DE MAINTENANCE NE PAS BRANCHER L ALIMENTATION pr s de l interrupteur d alimentation Au terme des op rations de maintenance restaurer les dispositifs de s curit A DANGER Ne pas effectuer la substitution d huile imm diatement apr s l arr t de la machine car la temp rature de cette derni re peut tre lev e ATTENTION En phase de substitution de pi ces op rer avec le maximum d attention En particulier en cas de moteur triphas une in version de polarit provoqu
36. e you find a Corrective Action Request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions lo eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Bincerely er e _ Me f F Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or lo your nearest VARIAN representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Lein Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TEENS E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after in
37. e Pumpe nicht fallengelassen oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umweltschutz ANMERKUNG Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden GEBRAUCHSANLEITUNG 3 VARIAN Dam 4 27 LISTE ZIEL INSTALLATION Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions oder erh hte Brandgefahr besteht W hrend des Betriebs sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 12 C bis 40 C Relative Feuchtigkeit 0 95 niederschlagsfrei A EEE Zum Schutz vor Kurzschl ssen oder berlastungen muss ein automatischer Schalter in die Hauptspeisungsleitung zu den Varian Vorrichtungen installiert werden siehe folgende Tabel le P N 110 Vac 220 Vac 380 Vac 949 9315 949 9320 949 9325 949 9330 949 9331 949 9335 949 9336 6A 4A IS ACHTUNG Die Pumpe ist vor ihrer Inbetriebnahme mit Schmier l zu f llen da sie leer geliefert wird A EEE Vor Aufnahme jeglicher Arbeiten sind die Schutzka
38. e accident prevention regulations in force Always disconnect the power supply to the pump before maintenance work Place a spe cial warning signs over the power supply breaker switch MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON If you are performing maintenance after the pump has been operating for a considerable time allow sufficient time for it to cool as the external surface temperature may be in ex cess of 60 Failure to provide the pump with an earth con nection may cause serious damage to opera tors Always ensure that there is an earth connection and that it complies with the stan dards When cleaning the pump and its component parts avoid the use of flammable or toxic sol vents such as benzin benzol ether or alco hol The recommendation is to use a soap and water solution preferably in ultrasound wash ing machines taking care to dry all the cleaned parts at temperatures under 100 C in order to eliminate residual moisture Prolonged overloads or breakdowns may cause the electric motor to overheat and to release noxious smoke remove the power immediately as a precaution and do not ap proach the pump at least until you have pro vided ventilation to drive out the smoke Take care not to breathe in the fumes remaining in side the pump in the course of repair work In case of fire do not throw water on the pump Switch the power off and use CO ex tinguishers Carefully inspect the flanges
39. e air is allowed back into the stator chambers The air entering the pump after the anti suckback device has closed prevents the oil in the casing from filling the stator chambers The inner seals are achieved by the lubricating oil thanks to the close machining tolerances There is only one oil seal on the rotor shaft the one preventing oil from seeping out of the pump This seal acts on a bushing fitted onto the shaft Simple replacement of this seal grants the rotor a practically unlimited life pumps DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph On the DS102 1Ph DS202 1Ph and DS302 1Ph pumps this seal acts on a surface hardened area of the shaft guaranteeing long rotor life The vacuum pumps are connected directly to the electric motor through a flexible coupling so that motion is transmitted even in case of poor align ment A fan fitted on the joint and housed in the pump support produces a forced air flow over the finned surfaces of the casing to avoid oil overheating LUBRICATION The pump s lubricating system is force feed type Oil circulation is obtained by means of a gear pump connected to the rotor shaft The oil is drawn through a gauze filter to prevent any foreign bodies from entering the pump Shunt mounted on the delivery line is a hydraulic piston which besides actuating the anti suckback device see ANTI SUCKBACK DEVICE also regulates pressure by discharging excess oil flow directly into the tank
40. e dans des milieux explosifs ou risque lev d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes Temp rature de 12 C 40 Humidit relative 0 95 non condensante A DANGER Pour prot ger contre les court circuits ou les surintensit s il faut installer un disjoncteur automatique sur la ligne d alimentation principale vers les dispositifs Varian de bonne capacit voir tableau ci dessous P N 949 9315 949 9320 949 9325 949 9330 949 9331 949 9335 949 9336 380 Vac ES ATTENTION Avant toute utilisation de la pompe il est imp ratif de proc der son remplissage en huile de lubrification car elle est livr e vide A DANGER Avant toute autre op ration retirer les bouchons de protection plac s sur les brides d aspiration et de vidange En cas de mise en marche inopin e de l appareillage l air contenu l int rieur de la pompe peut les projeter contre l op rateur AN Pendant l installation faire tr s attention que la bride d aspira tion soit reli e la chambre vider et que la bride d vacuation ne soit pas bouch e voir la figure ci apr s La pompe ne doit pas tre utilis e comme un compresseur La pression maximale l int rieur du r servoir d huile ne doit pas d passer 1 5 bar abs Le non respect de ces pr cautions peut entrainer un danger p
41. e l inversion du sens de rotation de la pompe et peut entrainer des dommages de nature m cani que NOTE Avant de retourner une pompe au constructeur pour r paration il est indispensable de remplir et d adresser au bureau local de vente la fiche S curit et Sant jointe la pr sente notice d instructions Une copie de celle ci devra tre mise dans l em ballage de la pompe avant exp dition En cas de mise au rebut de la pompe proc der son limina tion conform ment aux r glementations nationales en la ma ti re MISE AU REBUT Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la direc tive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Com munaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en ceuvre le processus de collecte et mise au rebut 87 900 937 01 1 GENERAL INFORMATION This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Varian before operating the e
42. e oil temperature may still be high A WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON from the main breaker switch When finished remove the safety warning 35 63 87 900 937 01 1 TECHNICAL INFORMATION N If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 NOTE The oil has to be replaced 1 when it has become particularly dirty due to the presence of contaminants in the environments being evacuated 2 when the degree of vacuum achieved by the pump is no longer satisfactory even after running for one hour with the gas ballast device open 1 Placeatank for the waste oil under the oil drain plug 79 NOTE You are advised to empty the pump before it cools down completely so that the oil flows out more easily NOTE The pump contains up to 1 liter of oil make sure the tank you use for the waste oil can hold this amount 2 Open the oil drain plug 79 slowly let the oil flow out by opening the fill plug 78 located at the top of the pump In the meantime clean the inside of the drain plug magnetic plug 3 After closing the drainage hole with its plug make the pump perform a number of turns giving it a brief current pulse so as to let residual oil in the pump chambers flow out Then drain off the residu
43. ed remove the safety warning A If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 40 63 87 900 937 01 1 TECHNICAL INFORMATION 1 Disconnect the flange 28 from the inlet pipe line 2 Remove the 6 securing screws 17 and remove the two half plates 25 pressing the suction flange 28 into its seat 3 Remove the flange 28 and take out the piston 30 with the shutter 29 of the anti suckback device dis engage it by exerting force on arm 101 Separate the shutter 29 from the piston rod 30 simply by pulling ES CAUTION Be careful not to scratch the sealing surface of the shutter 29 4 Reassemble by proceeding in the inverse order 41 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action REPLACEMENT Item ELECTRIC MOTOR AND JOINT ACTION AREA Materials required Equipment required e Electric motor e Mechanical tools A WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON from the main breaker switch When finished remove the
44. ed mixed with air 10 63 TECHNICAL INFORMATION ANTI SUCKBACK DEVICE The pump is equipped with a special anti suckback device to avoid air pressure rises and or oil backflow towards the evacuated vessel when the pump is switched off This device has a shutter which automatically closes the suction duct In this way the pump and vacuum system are completely isolated from each other and air can enter the pump without any risk for the vacuum produced in the system The device features namely includes some special drive obtained avoiding any form of contami nation of the inlet duct by fluids oil and or air used to command the shutter Thanks to this when the pump is started again the pump down to vacuum conditions is extremely fast as these contaminants are not present and no degassing is therefore required suction flange maintained closed even when the pump is idle so that pollutants cannot en ter from the environment and no oil can over flow from the pump 87 900 937 01 1 TECHNICAL INFORMATION View of the pump 11 63 87 900 937 01 1 TECHNICAL INFORMATION Legend cf figure View of the pump N Description DS 102 DS202 DS302 DS402 DS602 1 Electric motor SR03700702 SR03700702 SR03700702 SR03700703 SR03700703 1A motor 370 450W SR03700865 SR03700865 SR03700865 1B Three phase electric motor SR03700922 SR03700922 SR03700922 SR03700704 S
45. edure che se non osservate potrebbero causare danni all apparec chiatura NOTA Le note contengono informazioni importanti estrapolate dal te sto IMMAGAZZINAMENTO Durante il trasporto e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 a 70 umidit relativa 0 95 non condensante PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati du rante il trasporto contattare l ufficio vendite locale Il peso dell imballo comprensivo della pompa al massimo di circa 32 Kg Durante l operazione di disimballaggio prestare particolare at tenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale comple tamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente NOTA La pompa non pu essere danneggiata rimanendo semplice mente esposta all atmosfera Si consiglia comunque di mante nerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere 1 63 ISTRUZIONI PER L USO ER 3 VARIAN Por 22 27 ALE Ps INSTALLAZIONE Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in amb
46. en damaged 111 Disassembly of functional block rotors When damaged NOTE The numbers used in the drawings on the Unscheduled Maintenance Cards are those used in Figure View of the pump 31 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Type of action GENERAL WARNINGS Item 1 Pump disassembly and reassembly require some basic operations and use of tools found in most work shops 32 63 87 900 937 01 1 TECHNICAL INFORMATION NOTE The pump s component parts are modular and therefore fully interchangeable Whenever parts have to re placed please specify in the order Pump type Serial number marked on pump identification plate Reference number on the detailed diagram name and part number as indicated on the spare parts and accessories list section SPARE PARTS LIST of this manual To simplify maintenance work two kits have been devised The Gaskets Kit containing all the gaskets recommended for substitution after disassembly of the pump and the most commonly used removable parts You are advised to keep this kit in a dry room away from heat and light sun and UV rays in order to prevent hardening of the elastomer parts The Maintenance Kit including as well as the Gaskets Kit the 1st and 2nd stage vanes and other parts that it may be
47. end it back to the manufacturer for repairs 87 900 937 01 1 For all problems arising or to order spare parts refer to our service department Varian S p A Vacuum Technologies Via Varian 54 10040 Leini Torino Italy Telephone 39 011 9979111 Fax 39 011 9979344 LUBRICANTS It will be readily understood how important ade quate lubrication is to high technology pumps like the Varian vacuum pumps Correct use of appro priate lubricants makes a significant contribution to achieving best performance and warding off de fects When handling lubricants the following sanitary protection measures should be observed at all times e Avoid prolonged excessive or repeated con tact of the skin with products for lubrication and also avoid directly inhaling the fumes or vapors of such products e Protect the skin by wearing appropriate clothes and equipment e g special suits glasses or where permitted by the safety regulations gloves or by applying a special protective product e Clean the skin carefully after contact with the lubricants by washing freely with water and soap e Apply askin cream after washing e Take off and change clothes or shoes on which oil has been spilled e Never put rags dripping with oil into the pock ets of your clothes When disposing of waste lubricants observe the following environment protection regulations e The lubricants risk contaminating the water and the ground
48. equired Equipment required e Oil circulating pump P N 949 9390 e Mechanical tools A WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON from the main breaker switch When finished remove the safety warning N If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 47 63 87 900 937 01 1 TECHNICAL INFORMATION e S g N 1 Drain off all the oil from the pump NOTE For a description of how to drain the oil from the pump see the Unscheduled Maintenance Card No 102 Disconnect the discharge flange from its piping Remove the nuts 3 and remove the casing from the pump 75 Remove the three screws 71 connecting the closing plate 70 to the side and take it out Remove the pump gear wheels 69 48 63 87 900 937 01 1 TECHNICAL INFORMATION NOTE A magnet may be used to remove the gear wheels 6 Reassemble by proceeding in the inverse order NOTE When reassembling replace all the gaskets you have stripped down ES CAUTION When reassembly is complete proceed to fill the pump with oil again following the instructions of Unsched uled Maintenance Card No 102 49 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unschedule
49. ible dust free areas Protect all the clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again d Always check the lubricant and that it is prop erly distributed through the pump inadequate lubrication may damage the pump seriously e Give the parts some form of marking as you strip them down to ensure that you reassem ble them again in the proper order f Check that there are no scratches or grooves on the machined shafts in their seats inside the pump or on machine ground surfaces Slight scratches and abrasions may be elimi nated with very fine emery paper or by a little light grinding g Before putting a group together always spread a little oil over inner parts and mating surfaces Replace all seals with original spare parts before reassembling components MAINTENANCE ACTIONS Maintenance may be seen as the totality of all scheduled and unscheduled maintenance work Maintenance includes 1 SCHEDULED MAINTENANCE Maintaining the nominal state of operation 2 0NSCHEDULED MAINTENANCE Restoring the nominal state of operation 23 63 TECHNICAL INFORMATION NOTE The frequency with which repairs are performed de pends on the process and presence of substances that shorten pump life dust abrasives solvents water chemically aggressive substances The pump must be cleaned at regular intervals of
50. ienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali temperatura da 12 C a 40 umidit relativa 0 95 non condensante A EI Per proteggere contro corto circuiti o sovraccarichi si deve in stallare un interruttore automatico sulla linea d alimentazione principale verso i dispositivi Varian di capacit adeguata vede re la tabella seguente P N 949 9315 949 9320 949 9325 949 9330 949 9331 949 9335 949 9336 380 Vac ATTENZIONE Prima di avviare la pompa occorre procedere al rifornimento di olio lubrificante poich la pompa viene fornita scarica A EI Togliere i tappi di protezione posti sulle flange di aspirazione e Scarico prima di ogni successiva operazione L aria contenuta all interno della pompa in caso di accensione involontaria pu proiettarli contro l operatore A EI Durante l installazione prestare la massima attenzione che la flangia di aspirazione sia collegata alla camera da evacuare e che la flangia di scarico non sia tappata vedere la figura se guente La pompa non deve essere usata come compressore La massima pressione interna al contenitore dell olio non deve superare 1 5 bar abs L inosservanza di queste precauzioni pu causare danni alla macchina ed all operatore 87 900 937 01 1 VARIAN ES AT
51. il temperature may still be high ES CAUTION When replacing a part take great care Pay special attention to the three phase motor where an inversion of polarity causes inversion of the direction of rotation of the pump with conse quent possibilities of mechanical damage NOTE Before returning the pump to the constructor for repairs the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the pump package before shipping If pump is to be scrapped it must be disposed of in accor dance with the specific national standards DISPOSAL Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Com munity indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 87 900 937 01 1 SECTION I TECHNICAL DESCRIPTION The DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph and DS602 3Ph pumps are dual stage rotar
52. intenance Kit P N 9499380 Part of DS 202 302 Major Maintenance Kit P N9499381 Part of DS 402 602 Major Maintenance Kit P N 9499382 4 Part of DS 102 202 302 Minor Maintenance Kit P N 9499370 Part of DS 402 602 Minor Maintenance Kit P N 9499371 13 63 87 900 937 01 1 TECHNICAL DATA TECHNICAL INFORMATION The following table lists the main technical data of the DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph and DS602 3Ph pumps TECHNICAL DATA FREE AIR DISPLACEMENT PUMPING SPEED ULTIMATE PARTIAL PRESSURE ULTIMATE TOTAL PRESSURE ULTIMATE TOTAL PRESSURE WITH GAS BALLAST WATER VAPOR TOLERANCE WATER VAPOR CAPACITY OIL CAPACITY min max MOTOR RATING 1ph MOTOR RATING 3ph NOMINAL ROTATION SPEED OIL TEMPERATURE pump operating Installation category Pollution degree OPERATING TEMPERATURE RANGE WEIGHT INLET FLANGE EXHAUST FLANGE Dimensions cf also next table length 1ph width height Input single phase versions Nominal voltages Maximum currents Hz UNITS DS102 DS202 DS302 DS402 DS602 so am os se se ws ws Can s ome Dew peer mbe Dew peer ee ne ee gt Foe o poe fe o om osos vans ex ser so em oe en cem e Is 8 7 MEME E 2 v 12 40 12 40 2 Ca 36 RE 79 DN 2
53. ion with single phase motor or of the multipolar switch version with three phase motor N WARNING The pump is designed for operation with neutral or non corrosive fluids It is absolutely forbidden to use potentially ex plosive or flammable substances There are no special procedures for switching the pump off it needs only to be disconnected from the electric power by means of the bipolar switch version with single phase motor or of the multipolar switch version with three phase motor MAINTENANCE Personnel responsible for pump operation and maintenance must be well trained and must be aware of the accident preven tion rules A WEENIE Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force N ET When machine is powered take care on account of moving parts and high voltages A Fraen If you have to perform maintenance on the pump after a con siderable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 8 63 INSTRUCTION MANUAL A EX Always disconnect the power supply to the pump before start ing maintenance work Place a special warning signs over the power supply breaker switch MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON When finished re move the safety warning N WARNING Do not change the oil immediately after stopping the machine as the o
54. l gelzellenpumpen die von einem Ein oder Dreiphasenstrommotor bet tigt werden Diese Hochvakuumpumpen eignen sich f r das Pumpen von nicht korrosiven Gasen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Verwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben N EEE Die Gefahrenhinweise richten die Aufmerksamkeit des Bedie ners auf eine spezielle Prozedur oder Praktik die bei unkorrek ter Ausf hrung schwere Personensch den zur Folge haben k nnte IS ACHTUNG Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG W hrend des Transports und der Lagerung der Pumpen sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 20 C bis 70 C Relative Feuchtigkeit 0 95 niederschlagsfrei VOR DER INSTALLATION Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Das Verpackungsgewicht betr gt einschlie lich der Pumpe maximal 32 Kg Beim Auspacken ist darauf zu achten da di
55. ll be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA Customer ID Equipment A Ar forR equest jor Keturn VARIAN RI 9001 FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Does not start O Noise Vertical Power Rotational Speed Does not spin freely Vibrations O Horizontal Current Inlet Pressure TT Does not reach full speed O Leak O Upside down Temp 1 Foreline Pressure Mechanical Contact LI Overtemperature Other Temp 2 Purge flow Cooling defective o G te tee ees OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS L Bad feedthrough L Poor vacuum Main seal leak L Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange L Error code on display LI Other LI Damaged sealing area Other Customer application Customer application LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable
56. n operation leave it to cool as temperature of the outer surface may be in excess of 60 C 1 Drain off all the oil from the pump NOTE For a description of how to drain the oil from the pump see the Unscheduled Maintenance Card No 102 2 Detach the entire functional block from the pump support NOTE For a description of how to detach the functional block see the Unscheduled Maintenance Card No 109 59 63 87 900 937 01 1 TECHNICAL INFORMATION 3 Disassemble the discharge valves NOTE For a description of how to disassemble the discharge valves see the Unscheduled Maintenance Card No 106 4 Detach the end plate 61 from the rest of the pump body exerting leverage if necessary on the reference notches between the parts This will give you access to the retaining valve 56 and associated spring 57 at the gas ballast inlet 5 Disconnect the 2nd stage stator 58 remove the two vanes 42 take the 2nd stage rotor 43 off the shaft and take out the key 41 Remove the partition wall 53 from between the 1st and 2nd stages Detach the 1st stage stator 52 from the inner side 33 pressing back on the springs 40 of the vanes 38 to avoid the vanes from touching against the sharp corners of the body and becoming damaged Take out the 1st stage rotor 39 the vanes 38 and the springs 40 Reassemble by proceeding in the inverse order NOTE When reassembling replace all the gaskets s
57. n with three phase motor see section MODELS WITH THREE PHASE UNIVERSAL MOTORS When the pump is stopped the anti suckback de vice makes it possible to maintain vacuum in the vessel connected on the inlet flange of the pump If the pump is expected to be stopped for a lengthy period or in any case if it has pumped in large amounts of vapors it is good practice to run it with the gas ballast open and the inlet line closed for a few minutes before switching off in order to limit the risk of corrosion or scaling due to pollution of the oil by condensed vapors SAFETY RULES Personnel responsible for pump operation and maintenance must be well trained and must be aware of the accident prevention rules The accident prevention precautions contained in this section must be respected at all times during operation and maintenance of the pump to avoid damage to operators and to the pump These precautions are provided in the form of WARNING and CAUTION notes N WARNING Operating procedures technical information and precautions which if not respected and or imple mented correctly may cause body harm to opera tors ES CAUTION Operating procedures technical information and precautions which if not respected and or imple mented correctly may cause damage to the pump 22 63 TECHNICAL INFORMATION WARNING NOTES A a Death may result from contact with high volt ages Always take extreme care and observe th
58. o fill up see Scheduled Main tenance Card 01 ES CAUTION Oil must be poured into the casing through the special threaded plughole and NOT through the suction line N WARNING Take out the protective caps on the suction and exhaust flanges before doing anything else In the event of an accidental start up the air inside the pump could violently expel the protective caps and harm the operator 87 900 937 01 1 SECTION II ELECTRICAL MOTORS Single phase universal motors They are world wide motors dual voltages and dual frequencies and they are in accordance with major international standards UL CSA CE On the table below are shown the technical specifica tions of the different motors ES CAUTION Before connecting to the mains check the position of the voltage selector situated inside the electrical box see next paragraph HIGH VOLTAGE 200 to 240 V 50 60 Hz LOW VOLTAGE 100 to 120 V 50 60 Hz Voltage selector TECHNICAL INFORMATION The motor has a main on off bipolar switch The motor includes a thermal protection against overloads If the motor is switched off by this relay it can be started again after a few minutes Consult the trouble shooting section in order to understand and remove the overload cause NOTE If fuses are installed on the power line they must be in accordance with the table below If you start a pump at low temperature the cu
59. o include a con dense separator before the inlet flange To make best use of the pump s capacity use only short straight piping with a diameter not smaller than that of the inlet flange NOTE If rigid piping is used it is good practice to use a flexible joint in order to avoid undue forcing of the connection on the pump The exhaust duct must be connected to a pipe that will take away the pumped out gases 21 63 TECHNICAL INFORMATION NOTE Application of an oil trap filter is necessary to avoid pollution of the surrounding atmosphere by the oil present in the exhaust duct during pump opera tion ES CAUTION Never block the pump exhaust line This would cause overpressure in the casing with the risk of breaking the glass window of the level indicator and or expelling the oil seal gasket STARTING AND RUNNING THE PUMP Before being put into service in order to reach maximum vacuum the pump must be left running for about an hour with the gas ballast valve open This will eliminate any humidity from the oil N EX The pump is designed for operation with neutral or non corrosive fluids It is absolutely forbidden to use potentially explosive or flammable substances NOTE If the pump is started with cold oil initially more than normal noise will be heard this will last for a few minutes only until the oil reaches its working temperature There are no special instructions for normal opera tion
60. of the pump which is delivered to you after completion of a running in cycle in the factory The maintenance operations for a pump in working condition may be found on the Scheduled Mainte nance Cards If the pump is sucking in environments with liquids or vapors it is important to leave it to run with the gas ballast open so as to avoid condensation of the vapors and contamination of the lubricating oil as a result When there is no danger of the oil be ing contaminated the gas ballast valve should be closed to reduce the pump s power absorption The gas ballast valve will prove useful in the cold season when due to the lower room tempera tures it takes longer for the pump to reach rated temperature when switched on Compression of the air forced in by the gas ballast valve develops heat which in turn increases temperature of the oil faster NOTE If gases without vapors are sucked in you are ad vised to open the gas ballast device from time to time in order to eliminate the traces of humidity they contain 87 900 937 01 1 NOTE For repetitive work cycles with brief time intervals in between it is better not to stop the pump STOPPING THE PUMP There are no special procedures for switching the pump off it needs only to be disconnected from the electric power by means of the bipolar switch version with single phase motor see section MODELS WITH SINGLE PHASE UNIVERSAL MOTORS or of the multipolar switch versio
61. ontiennent des renseignements importants extrapo l s du texte EMMAGASINAGE Pendant le transport et l emmagasinage des pompes il faut veiller respecter les conditions environnementales suivantes temperature de 20 70 humidit relative 0 95 non condensante PR PARATION POUR L INSTALLATION La pompe est fournie dans un emballage de protection sp cial si l on constate des marques de dommages pouvant s tre pro duits pendant le transport contacter aussit t le bureau de vente local Le poids total de l emballage et de la pompe est au maximum de 32 Kg Pendant l op ration d ouverture de l emballage veiller tout par ticuli rement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas jeter l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l environnement NOTE La pompe ne peut tre endommag e en restant simplement expos e l atmosph re Il est de toute facon conseill de la garder dans son emballage jusqu au moment de sa mise en fonction afin d viter toute pollution due la poussi re 5 63 MODE D EMPLOI 3 VARIAN Dam 4 d Es INSTALLATION Ne pas installer et ou utiliser la pompe dans des milieux expo ses aux agents atmosph riques pluie gel neige des pous si res des gaz agressifs ainsi qu
62. our l op rateur et l endommagement de la machine 87 900 937 01 1 VARIAN ATTENTION Contr ler que la tension d alimentation correspond la tension indiqu e sur la plaquette du moteur Brancher la pompe la source d alimentation ATTENTION En cas de moteur triphas une inversion de polarit provoque l inversion du sens de rotation de la pompe et peut entrainer des dommages de nature m canique UTILISATION Avant la mise en service de la pompe il est n cessaire pour atteindre le vide maximum de faire fonctionner la pompe pen dant environ une heure avec le reniflard ouvert afin de suppri mer l humidit de l huile La mise en marche de la pompe ne requiert aucune manoeuvre particuliere il suffit de la brancher l alimentation lectrique et d agir sur l interrupteur bipolaire version avec moteur mono phas ou unipolaire version avec moteur triphas A DANGER La pompe a t con ue pour fonctionner avec des fluides neu tres ou non corrosifs L emploi de substances potentiellement explosives ou inflammables est strictement interdit L arr t de la pompe ne requiert aucune man uvre particuli re il suffit de la d brancher de l alimentation lectrique en agissant sur l interrupteur bipolaire version avec moteur monophas ou unipolaire version avec moteur triphas MAINTENANCE Le personnel charg de la conduite et de la maintenance de la pompe
63. ppen an den Saug und Druckflanschen zu entfernen Die im Pumpeninnern enthaltene Luft k nnte diese bei unbeabsichtigter Einschaltung gegen den Bediener schleudern A EEE Bei der Installation ist unbedingt darauf zu achten dass der Saugflansch an die zu entleerende Kammer angeschlossen ist und der Ablassflansch nicht verschlossen ist siehe nachste hende Abbildung Die Pumpe darf nicht als Verdichter verwendet werden Der Druck im Olbeh lter darf nicht gr Ber als 1 5 bar abs sein Bei Nichtbeachtung dieser Anweisungen besteht Schadensgefahr f r das Ger t und die Bedienperson 87 900 937 01 1 ES ACHTUNG Kontrollieren da die Versorgungsspannung mit der Spannungsangabe auf dem Typenschild des Motors bereinstimmt Die Pumpe an das Versorgungsnetz anschlie en IS ACHTUNG Bei Dreiphasenstrommotoren bewirkt eine Polumkehrung die Umkehrung des Drehsinns der Pumpe was Sch den an der Mechanik zur Folge haben kann GEBRAUCH Vor der eigentlichen Inbetriebnahme der Pumpe ist es zur Erreichung des Grenzvakuums erforderlich die Pumpe ungef hr eine Stunde mit ge ffnetem Ballast laufen zu lassen um die Feuchtigkeit aus dem OI zu entfernen Die Einschaltung der Pumpe erfordert keine speziellen Schritte sie braucht nur durch Bet tigung des zweipoligen Version mit Einphasenstrommotor oder des allpoligen Trennschalters Version mit Dreiphasenstrommotor an die elektrische Ene
64. quipment Varian will not be held responsible for any events occurring due to non compliance even partial with these instructions im proper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph and DS602 3Ph pumps are dual stage rotary vane pumps oil sealed driven by a single phase or three phase electric motor These high vacuum pumps are suitable for pumping non corro sive gases The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equip ment Detailed information is supplied in the appendix Techni cal Information This manual uses the following standard protocol N ETE The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not fol lowed correctly could lead to serious injury ES CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text STORAGE When transporting and storing the pumps the following envi ronmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing PREPARATION FOR INSTALLATION The pump is supplied in
65. replace any 111 worn parts H Pump working with gas bal Close the gas ballast device last device open I Anti suckback valve fails to Disassemble the suction flange and check 104 open the device 108 J Parts of the functional block not in perfect contact because of deposits of dirt or failure to put a plug on the service holes K The cause of the problem is not with the pump Disassemble and check condition of the 111 part surfaces and that plugs have been used See Note 62 63 87 900 937 01 1 TECHNICAL INFORMATION SPARE PARTS LIST OTHER SPARE PARTS DS402 1Ph DS602 1Ph DS402 3Ph DS602 3Ph MINOR MAINTE 949 9370 NANCE KIT MINOR MAINTE 949 9371 NANCE KIT MAJOR MAINTE 949 9380 NANCE KIT MAJOR MAINTE NANCE KIT MAJOR MAINTE NANCE KIT 949 9381 x 949 9382 ACCESSORY ITEM PN ON EXHAUST DS402 1Ph DS602 1Ph DS402 3Ph DS602 3Ph OIL MIST ELIMINA 949 9395 TOR KF25 OIL MIST CAR X X X X X 949 9394 TRIDGE Q ty 2 RECOMMENDED OIL Q TY Varian Rotary Vane Fluid DS19 Type Europe 949 9390 1 liter Varian Rotary Vane Fluid DS19 Type USA K7516301 1 liter Varian Rotary Vane Fluid DS19 Type USA K7516302 1 gallon Contains all the valves O rings and seals to refurbish the pump to vacuum integrity Includes all the items of the minor maintenance kit
66. rgieversorgungsquelle angeschlossen werden A EEE Die Pumpe ist f r den Betrieb mit neutralen und nicht korrosiven Fluiden konzipiert Der Einsatz mit potentiell explosions oder feuergef hrlichen Substanzen ist streng verboten Die Ausschaltung der Pumpe erfordert keine speziellen Schritte sie braucht nur durch Bet tigung des zweipoligen Version mit Einphasenstrommotor oder des allpoligen Trennschalters Version mit Dreiphasenstrommotor von der elektrischen Energieversorgungsquelle getrennt zu werden WARTUNG Das f r den Betrieb und die Wartung zust ndige Personal soll geschult sein und ber eine solide Kenntnis der Unfallschutzvorschriften verf gen A EEE Hochspannungen k nnen bei Kontakt t dliche Folgen haben Es ist stets mit gr ter Vorsicht und gem der geltenden Unfallschutzvorschriften vorzugehen A EEE Bei eingeschaltetem Ger t ist auf Hochspannungsteile zu achten Bewegungs und 4 63 GEBRAUCHSANLEITUNG A EEE Falls die Pumpe im Anschlu an den Betrieb gewartet werden soll ist abzuwarten bis sie abgek hlt ist da ihre Oberfl che eine Temperatur von 60 C berschreiten kann A EEE Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu schalten Am Netzschalter sind spezielle Warnschilder INSTANDHALTUNG AM GERAT NICHT EINSCHALTEN anzubringen Nach Abschlu der Arbeiten sind die Sicherheitseinrichtungen wieder zu aktivieren A EEE Keine lwechsel
67. rrent absorbed by the motors will be for several seconds higher than the nominal one for this reason the fuse on the line must be of the slow blow type Motor specifications for different pumps PUMP NOMINAL Hz RPM kW START UP FULL LOAD MAXIMUM FUSE VOLTAGE V CURRENT A CURRENT A RATING A 100 50 1450 0 45 44 8 8 10 DS 102 100 to 120 60 1730 0 55 42 8 8 10 DS 202 DS 302 200 to 240 50 1450 0 45 27 5 4 8 200 to 230 60 1730 0 55 24 4 4 6 100 50 1450 0 75 75 11 8 16 DS 402 100 to 120 60 1730 0 90 82 12 8 16 9525 200 10 240 50 1450 0 75 43 6 2 8 200 to 230 60 1730 0 90 39 6 4 8 87 900 937 01 1 Single Phase Universal Motors Voltage Setting CAUTION Before connecting to the mains check that your electrical mains voltage corresponds to the motor voltage setting N EX Disconnect the motor from the mains before open ing the electrical box The motors are factory set to operate at 200 240 V 50 60 Hz nominal voltages TECHNICAL INFORMATION To modify the voltage setting change the position of the voltage selector situated inside the motor electrical box To confirm the change of the voltage setting from High Voltage to Low Voltage glow the orange la bel above the yellow label positioned on the elec trical box cover N WARNING Close the motor electrical box cover before con necting to the main
68. safety warning A If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 42 63 87 900 937 01 1 TECHNICAL INFORMATION Disconnect the motor bearing plate 8 from the support 34 by removing the four screws 4 Remove the half joint fan 19 from the support together with the motor 1 the plate 8 and the plate 12 for the DS402 1Ph DS402 3Ph DS602 1Ph and DS602 3Ph only Slacken the nut blocking the half joint 19 to the motor shaft and take it out using leverage between the plate 8 and the back of the joint Remove the four screws 5 and separate the plate 8 from the motor 1 Reassemble by proceeding in the inverse order Extractor 43 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN 2 Unscheduled Maintenance vacuum technologies Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action DISASSEMBLY Item DISCHARGE VALVES ACTION AREA Materials required Equipment required e Valves Gaskets kit e Mechanical tools N WARNING Machine safety disconnect all power lines Hang the card MACHINE UNDERGOING MAINTENANCE DO NOT POWER ONT from the main breaker switch When finished remove
69. stallation etc CORRECTIVE ACTION PLAN ACTUATION by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc db AK VARIAN ISTRUZIONI PER L USO u 1 GEBRAUCHSANLELTUNG qui ame 3 IEN 5 INSTRUCTIONS FOR USE essen sel Be 7 TEG NICALINFORMA TION nase 9 SECTION HR 9 TECHNICAL DESGCHIDTION trn trennen nnns 9 EUBRICA TION 5 unt width tet ene et mate 9 VAGUUM SEALS cu elt t pete er aa Hie e e e de et dete das 10 GAS BALLAST EEN 10 ANTIESUCGCKBAGK DEVICE cani Me rte Foie IRE a IRE EENS 10 Re elle ER EE 14 DIMENSIONS vis te tid itera emt re sash teat E RD FREE eu aUa S Rada 15 SAFETY PREGAUTIONS tete ettet eese 17 TRANSPORT AND INGTALLATION enne nnne nnne nennen en 17 PRELIMINARY OPERATIONS ii 17 SECTION emm 18 EEECTRICAE MOTORS acerbi terree asi ee cede dea 18 Single phase universal motors 18 Three phase universal MOtOTS nennen nnnm nenne 20 CONNECTIONS TO THE INLET AND EXHAUST FLANGES sse 21 STARTING AND RUNNING THE PDUMP nennen ense trennen nnns 21 STOPPING THE PUMP hs p tn eer nd edad ea 22 SAFETY RULES s tenants emn d tex d 22 WARNING NOTES A A EA 22 EIERE 23 MAINTENANCE ACTIONS atta el t redet avi as Pa dead eda ae eee 23 IBElzIeLU lE 24 SCHEDULED MAINTENANCE CARDS i
70. structions for this type of installation except that the floor should be as flat as possible and suited to bear the weight of the pump it should ideally be a concrete floor and of any accessories mounted on it Note that the pump is stable on its base plate and it should not be necessary to anchor it to the floor with bolts and screws also vibrations to and from the pump are greatly reduced by the use of rubber feet 17 63 TECHNICAL INFORMATION Pump off the ground In this case the user must design a suitable support structure re membering the following points the plane supporting the pump must be perfectly horizontal the structure should be adequately rigid the relevant safety precautions should be applied Note also that the pump should be attached to the supporting structure after replacing the rubber feet with special anti vibration feet which should be screwed to the pump base and to the supporting plane After taking the pump out of its packing case you are advised to make the following checks a Ensure that the pump has not suffered any damage during shipping b Check that the guards are mounted correctly side plates refs 11 and 81 in fig View of the pump and that there are no uncovered or loose parts PRELIMINARY OPERATIONS Before starting the pump fill up with lubricating oil as the pumps are delivered empty NOTE A tin of oil is included in the packing For details on how t
71. the safety warning N If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 44 63 87 900 937 01 1 TECHNICAL INFORMATION e S g N 1 Drain off all the oil from the pump NOTE For a description of how to drain off the oil see the Unscheduled Maintenance Card No 102 2 Disconnect the discharge flange from its piping 3 Remove the nuts 3 and remove the pump casing 75 4 Remove the securing screw 47 holding the splash guard 49 and remove it 45 63 87 900 937 01 1 TECHNICAL INFORMATION 5 Remove the two screws 47 on the valve press bracket 46 and remove the bracket 46 the springs 50 and the shutters 51 6 Reassemble by proceeding in the inverse order NOTE When reassembling replace all the gaskets stripped down CAUTION When reassembly is complete proceed to fill the pump with oil following the instructions of Unscheduled Maintenance Card No 102 46 63 87 900 937 01 1 TECHNICAL INFORMATION Card No ap VARIAN Unscheduled Maintenance vacuum technologies 107 Pump type DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph DS602 3Ph Frequency WHEN DAMAGED Time Machine status E Type of action DISASSEMBLY Item OIL CIRCULATION PUMP 949 9390 ACTION AREA Materials r
72. to ensure that there are no dust oil dirt or defects of the mating surfaces before making the required connections Ensure that all joints and couplings are locked correctly before starting the pump again after repair work Do not wear any objects that may become en tangled in the mechanisms and or act as con ductors chains bracelets etc Ensure that the tools to be used are in perfect working condition and have insulating grips where necessary Check that the insulating material of the cables and that the conductors of the test equipment do not show any signs of damage 87 900 937 01 1 I Do not replace the oil immediately after stop ping the machine as the oil may still be at high temperature Perform repairs in clean and where possible dust free areas Protect all the clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again n Do not start the pump if the protective side plates refs 11 and 81 of fig View of the pump are not properly in place CAUTION NOTES 2 a Before putting the pump back into operation after a breakdown inspect it and check care fully for any other signs of damage b Use only tools that are in perfect working or der and specially designed for the job use of inappropriate or ineffective tools may cause serious damage c Perform repairs in clean and where poss
73. to l impiego con sostanze poten zialmente esplosive o infiammabili Lo spegnimento della pompa non richiede particolari manovre sufficiente scollegarla dall alimentazione elettrica agendo sull interruttore bipolare versione con motore monofase o on nipolare versione con motore trifase MANUTENZIONE Il personale addetto alla condotta ed alla manutenzione della pompa deve essere ben addestrato e deve avere un approfon dita conoscenza delle norme antinfortunistiche A EE Le alte tensioni possono causare morte al contatto Operare sempre con la massima cautela e secondo le norme antinfortu nistiche in vigore A EI Non effettuare la sostituzione dell olio subito dopo l arresto del la macchina in quanto la temperatura dello stesso pu essere elevata ATTENZIONE In fase di sostituzione di pezzi operare con attenzione In parti colare nel caso di adozione di motore trifase una inversione di polarit provoca l inversione del verso di rotazione della pompa con conseguenti possibili danni di natura meccanica NOTA Prima di rispedire al costruttore una pompa per riparazioni indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo della pompa prima della spedizione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle norm
74. tripped down 08 CAUTION After reassembly is complete proceed to fill the pump again with oil following the instructions of Unscheduled Maintenance Card No 102 60 63 87 900 937 01 1 TECHNICAL INFORMATION TROUBLESHOOTING AND CORRECTIVE ACTION NOTE If the pump breaks down or does not work well first check thoroughly that all the standards rules listed in the sections relevant installation and operation are currently observed If you cannot get sufficiently low pressure the problem may lie with the system connected to the pump i e the vacuum chamber and inlet line Even when the design sizes are correct the problems listed below are still fairly frequent a faulty seals check that the seals are fitted are in good working order and are clean check all joints taps sight glasses weld joints etc b unsuitable materials avoid the use of rubber plastic or even metal parts that are porous or permeable C volatile substances as far as possible eliminate humidity grease dirt rust solvents even small traces SYMPTOM PROBABLE CAUSE SUGGESTED REMEDY CARD REF The pump does not start or A The motor pump coupling is Check state of the elastic joint and replace 105 stops immediately defective the parts as needed B Viscosity of the oil has in Examine the oil and change if necessary 102 creased find out why it has deteriorated C Excessive friction inside Test the resistance to rotation by t
75. ue d une utilisation profes sionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication four nie par Varian avant d utiliser l appareil Varian d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions fournies d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifi ques Les pompes DS102 1Ph DS202 1Ph DS302 1Ph DS402 1Ph DS402 3Ph DS602 1Ph e DS602 3Ph sont des pompes rotati ves deux stades palettes tanches en bain d huile action n es par un moteur lectrique mono ou triphas Ces pompes vide pouss sont adapt es au pompage de gaz non corrosifs Les paragraphes suivants fournissent toutes les indications n cessaires pour garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical information Cette notice utilise les signes conventionnels suivants A DANGER Les messages de danger attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale dont la mauvaise ex cution risque de provoquer de graves l sions ES ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect peut endommager s rieusement l appareillage NOTE Les notes c
76. ump fill up with lubricating oil as the pump is delivered empty N WARNING Take out the protective caps on the suction and exhaust flanges before doing anything else In the event of an acciden tal start up the air inside the pump could violently expel the protective caps and harm the operator N WEENIE During installation pay maximum attention that the suction flange is connected to the vacuum chamber and the exhaust flange is not closed see the following figure The pump must not be used as a compressor Maximum pressure inside the oil container must not exceed 1 5 bar abs Non observance of these precautions may be dangerous for the machine and the operator 87 900 937 01 1 KE VARIAN ES CAUTION Check that your electrical mains voltage corresponds to that indicated on the motor s plate Connect the pump to the power supply 08 CAUTION Pay special attention to the three phase motor where an inver sion of polarity causes inversion of the direction of rotation of the pump with consequent possibilities of mechanical damage USE Before being put into service in order to reach maximum vac uum the pump must be left running for about an hour with the gas ballast valve open This will eliminate any humidity from the oil There are no special procedures for switching the pump on it needs only to be connected to the electric power by means of the bipolar switch vers
77. urning 111 n the joint by hand If the rotors are blocked disassemble the pump body and check state of the parts inside Po D Electrical protections not set Adjust the protections E Oil too viscous because of Heat the oil up to a temperature of 20 102 low room temperature or use an oil recommended for low tem peratures F Direction of rotation inverted Change over two phase wires of the elec only 3 phase motors tric power supply 2 The pump stops stalls A Seizure of some internal Proceed as at 1 C B Oil very dirty Proceed as at 1 B 3 pump overheats A Too much friction inside Proceed as at 1 C B Oil ducts clogged inside Try changing the oil otherwise disassem 102 ble the pump and clean it well 111 Too much oil drained off by the A Gas Ballast device broken Check the device to ensure the gas ballast 111 exhaust Ge open is properly adjusted B Heavy duty work high suc Check condition of the oil trap filter tion pressures or very frequent cycles C Leak in system Check the system see Note 5 The pump is loosing oil A Seal on shaft defective Replace the oil seal and the anti wear 110 bushing B Other gaskets defective Identify the areas where seeping occurs Refer to the and check the associated gaskets card related to involved item C Oil level window broken Replace the oil level window 61 63 87 900 937 01 1
78. x 465 64789603 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 Toll Free 0800 051 342 UK and Ireland Varian Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU England Tel 44 0 1865 291570 Fax 44 0 1865 291571 Other Countries Varian S p A Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 439 011 997 9350 Customer Support amp Service North America Toll Free 1 800 882 7426 vtl variancare 2varianinc com Europe Toll Free 00 800 234 234 00 vit variancare varianinc com China Toll Free 800 820 8266 vtc technical support varianinc com Japan Toll Free 0120 655 040 vtj technical support varianinc com Korea Toll Free 080 222 2452 vtk technical support varianinc com Taiwan Toll Free 0 800 051 342 vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries ap VARIAN
79. y vane pumps oil sealed driven by a single phase or three phase electric motor OUTLET PORT INLET PORT These vacuum pumps are suitable for pumping non corrosive gases The main features are A all parts in direct contact with the fluid pumped are free of copper alloys all materials are carefully selected to provide extended life high capacity gas ballast device allow to pump condensable vapors all the parts composing the pump are fully re placeable due to the close machining toler ances and to the centering obtained by using reference pins due to its design features and low number of gaskets the pump requires little maintenance disassembly and reassemble are easy and require minimal time The pump works with force feed lubrication pro vided by an auxiliary gear pump driven by the rotor of the vacuum pump itself This ensures proper lu brication even when pressures are close to at mospheric The entire pump functional block is immersed in the oil contained in the casing The oil guar3antees perfect sealing of the discharge valves enters the pump to ensure lubrication and sealing of the parts inside facilitates heat dissipa tion and reduces pump noise 9 63 TECHNICAL INFORMATION The pump is equipped with a special anti suckback device which automatically isolates the vacuum system when the pump stops This avoids rises in pressure or oil flow in the vacuum system whil

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