GateKeeper Hydrogen Gas Purifiers
Contents
1. 45MH Note Not all models are available with all gas series or fittings contact your salesperson for more information Note For Mykrolis replacement specify 30K 75K or 300K for model Note This product is considered a dangerous good for shipping purposes under IATA ICAO regulations For dimensional drawings pressure drop curves and more refer to the user manual or go to www entegris com click on Products and Services and click on the link to Gas Microcontamination An online Product Wizard is available to help you specify the ideal purifier for your application or you can contact our Gas Purification Specialists directly at 1 858 452 0124 or 1 800 511 9761 toll free in the U S All products with the exception of the 45M model meet CE Directive 97 23 EC requirements CE es Contact Customer Service to learn about our regeneration service For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit www entegris com and select Regional Customer Service Centers for the center nearest you Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale To view and print this information visit Entegris website at www entegris com and select the Legal Notices link from the footer found on the home page Entegris Mykrolis Waferpure and GateKeeper are registered trademarks of Entegris2. e Uses ambient temperature purification technology no power or heat required e No moving parts General Specifications Materials of construction 316L stainless steel electropolished 10 Ra except for the 45M model Cr Mo steel SA 372 Grade F Class 70 Gases purified H3 H inert gas mixtures Outlet purity lt 1 ppb 0 CO CO H20 the 45M model is lt 100 ppb for all contaminants Outlet particle filtration 30KF to 75KF 300KF to 10MH 0 003 um 316L stainless steel 100KF 0 003 um nickel 45M 20 um 316L stainless steel Media Nickel metallic metal oxide Maximum differential pressure 1379 kPa 200 PSID Minimum operating pressure 101 kPa 14 7 PSIA Leak rating Maximum inlet challenge of contaminant to maintain product efficiency Lifetime 30KF to 10MH 110 9 atm cc sec 45M 110 3 atm cc sec 10 ppm part per million One year at nominal flow rate with 1 ppm inlet challenge of 0 Maximum operating temperature 65 C 149 F Operating Specifications Maximum Nominal Maximum Maximum Flow Rate Flow Rate Operating Pressure Operating Pressure Model SLPM SLPM Purifier Only Purifier with Options Pressure Drop 35KF 1 0 5 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 3 4 kPa 0 5 PSID 70KF 3 1 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 4 8 kPa 0 7 PSID 100KF 20 2 6895 kPa 1000 PSIG 1724 kPa 250 PSIG 27
3. 6 kPa 4 PSID 300KF 50 55 4826 kPa 700 PSIG 1724 kPa 250 PSIG 34 5 kPa 5 PSID 500KF 60 11 4826 kPa 700 PSIG 1724 kPa 250 PSIG 48 3 kPa 7 PSID 500KFHP 60 11 19995 kPa 2900 PSIG 19995 kPa 2900 PSIG 48 3 kPa 7 PSID 7OOKF 120 15 4826 kPa 700 PSIG 1724 kPa 250 PSIG 48 3 kPa 7 PSID 2500KH 300 50 1724 kPa 250 PSIG 1724 kPa 250 PSIG 17 2 kPa 2 5 PSID 10MH 1000 200 1724 kPa 250 PSIG 1724 kPa 250 PSIG 1 2 62 kPa 9 PSID 3 4 36 5 kPa 5 3 PSID 45M4 5000 950 20684 kPa 3000 PSIG 20684 kPa 3000 PSIG lt 655 kPa lt 95 PSID Drop in Replacements for Waferpure Purifiers 30KF Micro 1 0 5 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 3 4 kPa 0 5 PSIG 75KF Mini XL 5 1 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 10 3 kPa 1 5 PSIG 300KF Megaline 50 5 5 4826 kPa 700 PSIG 1 Do not use under vacuum Minimum pressure should be 1 atm 14 7 PSIA 1724 kPa 250 PSIG 2 Pressure limited by standard valves higher pressures available please consult your local sales representative 34 5 kPa 5 PSIG 3 Pressure drop at maximum flow rate and 90 PSIG 620 kPa inlet pressure For a detailed pressure drop curve and other pressures or flows please consult your local sales representative or visit www entegris com 4 Model only available for countries that recognize ASTM US standards and certifications not CE certified not a UHP product All product information
4. Inc ENTEGRIS INC Corporate Headquarters 3500 Lyman Boulevard Chaska Minnesota 55318 USA Customer Service Tel 952 556 4181 Customer Service Fax 952 556 8022 www entegris com The materials integrity management company 2007 Entegris Inc All rights reserved Printed in USA 4506 5150ENT 0807
5. d Entegris GATEKEEPER HYDROGEN GAS PURIFIERS Cost effective environmentally friendly gas purification oR SSE VATH Na ee Re Ke AP ANOCARSONS LONT HYDROCARBONS BO NON USE Yam 02 CDA IRL MPD SFS aua me Fees Brive San Diega CA SAIZI INS LONT 2 Wor us wr 02 CA A tein USA 53 Fader vive Sn in CA GATEKEEPER HYDROGEN GAS PURIFIERS Overview Available for point of use area and bulk appli cations GateKeeper hydrogen gas purifiers are designed for use with Hy and H inert gas mixtures The purifiers remove 0 CO CO and H O to sub ppb part per billion levels Features and Benefits Cost effective e Regenerable for low cost of ownership e Gas purification improves process consistency increases product yields and lengthens tool life e Transforms low purity gas into UHP grade reducing process costs Environmentally Friendly e Regenerable eliminates disposal issues Process Protection e Consistently delivers ultrapure gas e Guards against bulk gas purifier break through impurity spikes from liquid storage tanks cylinder changeouts and unexpected contaminants in the process e Does not release hydrocarbons that may contaminate the process e Low pressure drop across purifiers e CE certified to the Pressure Equipment Directive PED and manufactured in an ISO 9001 2000 facility e Backed by global service and support staff Safe and Simple to Use e Easy to install
6. is subject to change without notice Facility Specifications Configuration Approximate Model Fitting Sizes inlet outlet Weight Length Diameter Fitting Offset 35KF J4 face seal male male 0 3 kg 0 66 lb 8 4 cm 3 31 3 8 cm 1 5 Centered 70KF J4 face seal male male 0 4 kg 0 88 lb 11 4 cm 4 5 3 8 cm 1 5 Centered 100KF J4 face seal male male 0 5 kg 1 1 Ib 8 4 cm 3 31 15 2 cm 6 5 1 12 cm 0 44 300KF J4 face seal male male 1 8 kg 4 lb 20 8 cm 8 2 5 1 cm 2 Centered 500KF J4 face seal male male 1 6 kg 3 5 lb 20 2 cm 7 94 7 6 cm 3 Centered 500KFHP J4 face seal male male 2 5 kg 5 5 lb 25 4 cm 10 7 6 cm 3 Centered 700KF J4 face seal male male 1 6 kg 3 5 lb 25 4 cm 10 7 6 cm 3 Centered 2500KH l4 face seal male male 9 5 kg 20 9 lb 43 9 cm 17 3 10 2 cm 4 Centered h face seal male male 9 5 kg 20 9 lb 44 7 cm 17 6 10 2 cm 4 Centered 10MH h2 face seal female male 27 kg 59 5 lb 97 4 cm 38 36 15 2 cm 6 Centered 3 4 face seal female female 41 kg 90 3 lbo 143 3 cm 56 4 15 2 cm 6 Centered 45M 2 NPT female female 360 kg 794 lb 147 3 cm 58 24 4 cm 9 6 Centered Drop in Replacements for Waferpure Purifiers 30KF Micro J4 face seal male male 0 3 kg 0 66 lo 8 4 cm 3 31 3 8 cm 1 5 0 97 cm 0 38 75KF Mini XL J4 face seal ma
7. le male 0 4 kg 0 88 Ib 12 7 cm 5 3 8 cm 1 5 0 97 cm 0 38 300KF Megaline 1 4 face seal male male 1 8 kg 4 lb 20 8 cm 8 2 5 1 cm 2 Centered 5 Height Options 3 Valve 5 Valve 4 Valve 8 Valve Moisture Isolation GC 300 Bypass Bypass Changeover Changeover Breakthrough Model Valves Manifold Manifold Manifold Manifold Manifold Indicator 8 35KF Yes Yes Yes Yes 70KF Yes Yes Yes Yes 100KF Yes 300KF Yes Yes Yes 500KF Yes Yes Yes Yes 500KFHP Yes 700KF Yes Yes 2500KH Yes Yes Yes Yes Yes Yes 10MH included Yes Yes Yes 45M Drop in Replacements for Waferpure Purifiers 30KF Micro Yes Yes Yes Yes 75KF Mini XL Yes Yes Yes Yes 300KF Megaline Yes Yes Yes 6 External to purifier for models 30KF 700KF Ordering Information GateKeeper Gas Purifiers Part Number CE XXXXX X XX XXX R Additional Processing R Regeneration Fitting 4R 1 4 face seal male to male 8R 1 2 face seal male to male 8Y 1 2 face seal female to male Gas Series 12W 3 4 face seal female to female C Corrosive H Hydrogen Inert Filter N Nonreactive Example CE2500KHH8RR F 0 003 um 0 Optics Model 2500K H 0 003 um SK Hydride low ese IK eae renee Filter 0 003 um low pressure drop drop Gas series Hydrogen ee Fitting 1 2 face seal male to male 300K Additional processing Regeneration 500K 700K 2500K 10M For all models except 45M To order 45M
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