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CV-6SLX TECHNICAL MANUAL

1. 3 Emitter damaged 3 Follow instructions in gun manual to troubleshoot emitter issues 4 No HV relay control voltage On FPSB check pins J 103 6 for 24 V DC If signal is present replace HV relay else replace FPSB 5 Defective HV relay in FPS 5 Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present 6 System improperly grounded for 6 Follow grounding instructions provided in e gun manual HV If the preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable 3 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 If the symptom is not in evidence during Step 3 troubleshoot the HV path and emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J101 switch the power supply back on and proceed with the troubleshooting steps described below 7 HV Resistor Capacitor damaged or defective 7 Remove
2. RESET IN Momentary 15 24 V DC input to reset faults RESET 11 11 BLU 11 RESETIN RESET signal return If ext sourced HVONINDOUT 12 12 BRN 12 HVON IND OUT 15 24 VDC HV IS ON AUNO OUt 9e VIO 13 FAULT IND OUT 15 24 VDC FAULT OCCURED READY IND OUT 14 14 GRY 14 READY IND OUT 15 24 VDC HVPS READY OUTOFREGINDOUT 15 15 BLK WHT 15 OUTOF REG IND OUT 15 24 VDC HV OUT of REG INTERLOCK OK IND OUT 16 16 GRN 16 INTERLOCK OK IND OUT 15 24 VDC Interlock OK HVOFFIN 17 17 NAT 17 HVOFFIN 18 18 RED 18 BLK SPARE 19 19 19 YEL SPARE 20 20 20 ORG SPARE 21 21 ERIT 21 SPARE 22 22 22 7 SPARE 23 23 GRN WHT 233 REMOTE INTERLOCK 24 24 PNK 24 External interlock string user supplied and defined REMOTE INTERLOCK 25 25 TAN 25 Must be jumpered if no external interlocks are supplied SHELL SHIELD SHELL NOTE The interlocks are internally supplied with 24 V dc Only contact closure need be supplied The application of voltages to the interlock circuits will cause them serious damage In addition care must be taken not to allow voltages from other sources to affect these signals as safety could thereby be compromised Making Connections via the FPS System I O Cable PN 6388 2884 0 The FPS system I O cable plugs into connector 101 on the FPS Table 2 4 shows the pinout for that cable and cross r
3. 3 3 3 5 Routine Power Supply Operation on Standard Units 3 7 36 Routine Power Supply Operation on Units Without a Remote Gun Soci c S 3 10 3 7 Responding to Out Of Regulation Conditions and Power Supply Faults 3 12 4 Theory of Operation 4 Section Overvlew essssseseseenn enne enne ern rne nnns 4 1 4 2 Power Module Theory of Operation een 4 1 4 3 Filament Power Supply Theory of Operation 4 15 5 Troubleshooting 51 Section OVOeLbVIe Wanted inaudita d vitac 5 1 52 Troubleshooting Procedures menm 5 2 5 4 Filament Power Supply Fuse Replacement Procedure 5 22 5 9 Suggested Spare PartS ssmutintsentzaqids nequis dua tac rao sa laa ut Quq ua hah 5 24 Attached Drawings Pinout Table for Power Module Diagnostic Port Rear Panel Connector 3 0101 8241 0 Rev F i CV 6SLX Technical Manual This page has been intentionally left blank for pagination purposes 0101 8241 0 Rev F ii CV 6SLX Technical Manual SUMMARY OF TERMS AND CONDITIONS OF SALE MECHANICAL WARRANTY For a period of twelve 12 months from the date of original shipment to Purchaser thereof the apparatus and each part or component manufactured by Temescal a part of Edwards Vacuum Inc hereinafter known as Seller is warranted to be free from functional defects in materia
4. CV 6SLX Technical Manual 3 6 0101 8241 0 Rev F Section 3 Power Supply Operation 3 5 Routine Power Supply Operation on Standard Units e H20 LED Illuminated when the customer supplied input for the H20 interlock is closed indicating that cooling water is flowing to the e beam source If this interlock is open neither the POS nor the AUX interlock LED will be lit e POS LED A contact closure designed to be supplied by a beam sweep controller The position interlock should be closed when the position of the beam is within the limits preset on the optional beam sweep controller e AUX LED The auxiliary interlock is a customer supplied contact closure If the contact is open none of the interlock LEDs that follow will be illuminated 5 Meter Displays either emission current 0 600 mA or filament current 0 75 A depending on the position of the adjacent EMI I FIL I POS switch 6 EMI I FIL I POS switch Position of this switch determines whether the Gun Control panel s meter displays emission current or filament current NOTE The Gun Control meter displays nothing when the EMI I FIL I POS switch is in the POS position as position control is not implemented on the CV 6SLX 7 BIAS control If the Gun Control panel s LOC REM switch is set to LOCAL adjusting this pot varies the filament bias current 0 50 A on units with FPS PN 0620 6604 0 0 100A on units with FPS PN 0620 6604 2 8 POSIITON dial Not implemented
5. comparator U20 24VDC control power connected directly to the Auxiliary supply through the Inverter on J8 is scaled 10VDC 24VDC filtered and buffered by U16 E and fed to the Diagnostics connector via J1 through current limiting resistor R77 A Square wave signal representing the effective duty cycle of the PSM chip gate outputs is created by U27 B which Is then averaged scaled and buffered by U16 C to create a signal where 10VDC 100 effective duty cycle This signal is routed to the Diagnostics connector through current limiting resistor R83 and out on J1 The isolated and scaled rail voltage signal on J 8 from the Inverter is slightly filtered and buffered by U16 D so that 10VDC 1000VDC to feed to the Diagnostics connector through current limiting resistor R93 and out on J 1 Arc Monitoring and Management High voltage output arcs are detected by comparator U8 B by comparing the buffered output voltage feedback signal KV CAL through jumper J 11 to ground R16 and R27 create a small positive DC reference approximately 0 12VDC which is briefly driven below ground through C6 by the steep negative slope of KV CAL during an output arc This triggers U8 B to pull its output low which pulls the Arc Bus low through ORing diode CR10 The Arc Bus is also pulled low by comparator U8 C through CR11 if the Inverter current signal coming through J 13 RAIL CURR exceeds the calibrated value set by R20 Sometimes HV ar
6. 9 EMISSION CURRENT dial When the gun and the high voltage are both ON and when this panel s LOCAL REMote switch is set to LOCAL this dial enables the user to adjust the emission current When the high voltage is on the impedance of the load is determined by the filament temperature 3 5 Routine Power Supply Operation on Standard Units 3 5 1 Switching Main Power On Off To switch on three phase input power to the power module set the front panel s main power breaker labeled AC MAINS to the ON position i e all the way up To switch off main input power set that breaker to the OFF position i e all the way down NOTE The main power breaker on the power module front panel also controls power to the filament power supply FPS module 3 5 2 High Voltage Control Switching on the High Voltage If the power module s main breaker switch is in the ON position and if immediately previously you have not switched off the high voltage by pressing the HV OFF button on the power module front panel you can switch on the high voltage by performing these steps 0101 8241 0 Rev F 3 7 CV 6SLX Technical Manual 3 5 Routine Power Supply Operation on Standard Units Section 3 Power Supply Operation Step Action 1 If the keyswitch on the HV control panel see Figure 3 4 is not in the ON position turn it to that position The HV Ready light inside the HV control panel s OFF button should then light 2 If the HV Ready light
7. A1 Inverter Two versions of the Inverter board P N 9150035 014 and 9150035 012 are used in the 208VAC and 400VAC units respectively however they are virtually identical The three AC line phases are fed to the Inverter board through three pins of J 32 which is a Molex Mini Fit Sr series connector Two phases of the AC are distributed to the primary of the step down transformer through slow blow AC fuses F1 and F2 which protect the transformer from over current 1A for the 208VAC unit and 12A for the 400VAC J24 connects the fuses to the transformer CV 6SLX Technical Manual 4 2 0101 8241 0 Rev F Section 4 Theory of Operation 4 2 Power Module Theory of Operations Rail Capacitor Charging To limit AC inrush current during charging of the rail capacitors thermistors R97 and R129 act as a Series resistance between the AC line and the bridge rectifier At high line the peak inrush current is approximately 16A for both AC input voltage units The rail capacitors are charged to 97 of their final voltage level through these thermistors and two phases of the three phase bridge rectifier formed by CR17 23 and 28 before the 24VDC auxiliary power supply starts delivering its output Once the 24VDC supply has energized and the rail voltage exceeds its minimum value as determined on the Regulator board 220VDC and 430VDC for the 208VAC and 400VAC units respectively three phase relay K1 is activated through J 31 and a connecting
8. 1 Check to see whether that interlock is made If not make appropriate corrections until it is made On HVRB measure TP10 for 24 V DC If voltage is not present proceed to next step of this procedure 3 Check fuse F2 0 2 A on HVRB 4 Check interlocks Doors Tank Vacuum Water Position Auxiliary and FPS cover switch On HVRB check pins J 1 58 and J 1 60 to ensure all external interlocks have been made 5 On HVRB check pins J 1 11 and J 1 13 If return signal is not present confirm switch operation Replace top cover switch and or harness and or connector Table 4 General Condition PS fails to achieve HV Ready state Symptoms TCS PSU1 RDY ALM Power Supply Control Not Ready Timeout Alarm Remote Control HV Ready LED Fails to glow Yellow Possible Causes 1 Confirm that the Power ON HV and Gun Interlocks are made Procedure 1 Refer to Table 3 2 Faulty or loose cable connections Make sure that all power module and FPS cable connections are correctly and securely made On HVRB check TP2 for 15 V DC HV ready signal 3 HV Ready Signal output incorrect 4 Confirm control voltages 4 On HVRB check pins J 13 2 for 15 V DC J 13 14 for 15 V DC J 13 10 for 10 15 V DC 10 V DC and 5 V V DC and J 13 6 for 5 V DC Replace HVRB if any of the control voltages are DC missing 5 One or more faults still active 5
9. 1 Fan is defective 1 Check fan for mechanical operation 2 Fan is mechanically stuck Check to see whether fan is clogged with dust or dirt Excessive dust build up around edges of fan will prevent it from moving Clean and blow out dust Restart 3 Fuses on Inverter board blown 3 Check fuses F1 F2 and F3 on Inverter board 4 AC Control transformer faulty 4 Check input to control transformer H1 and H4 for 480 V AC and output at X1 and X4 for 240 V ac 5 24 V DC power supply faulty 5 Check 24 V DC power supply input at pins 1 and 3 for 240 V ac and output at pins 3 and 4 for 24 V dc 6 Fuse on HVRB blown 6 Check fuse F1 0 2 A on HVRB 7 Fan s electrical are faulty 7 Check both wires leading out from inverter board at pins J 4 1 and J 4 2 for 24 V dc 0101 8241 0 Rev F 5 5 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 3 General Condition One or more PS interlocks not made Symptoms TCS PSU1 RDY ALM Power Supply Control Not Ready Timeout Alarm Remote Control One or More Interlock Indicator LEDs Fail to Light Power Module Interlocks OK LED lights RED Possible Causes Procedure 1 Interlock indicated by the unlit LED farthest to the left is not made Interlock Voltage 24 V DC not present Fuse on HVRB blown 4 24 V DC interlock signal interrupted external to power supply 5 FPS interlock top cover switch failed
10. 4 Ifthe symptom is not in evidence during Step 3 troubleshoot the emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J104 switch the power supply back on and proceed with the troubleshooting steps described below Possible Cause Procedure 9 HV Overcurrent state or HV 9 On HVRB check TP59 for Overvoltage and TP69 for Overcurrent Overvoltage state Refer to Tables 16 and 17 0101 8241 0 Rev F 5 17 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 21 ARC OUT OF REGULATION LED Lights Yellow Symptom Output is arcing or is not regulating to setpoint Possible Cause Procedure 1 Incorrect or fluctuating line voltage Confirm input line voltage 2 Faulty or loose connections Make sure that all HV and FPS connections are correctly and securely made 3 Emitter damaged Follow instructions in gun manual to troubleshoot emitter issues 4 No HV relay control voltage On FPSB check pins J103 6 for 24 V DC If signal is present replace HV relay else replace FPSB 5 Defective HV relay in FPS 5 Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present 6 System improperly grounded for HV
11. the apparatus must be found not to comply with the specifications Return trip transportation charges for the apparatus or any part or component shall be paid by Purchaser This performance warranty shall be void and the apparatus shall be deemed to be purchased AS IS in the event that the entire purchase price has not been paid within thirty 30 days of original shipment of the apparatus THERE ARE NO EXPRESS OR IMPLIED WARRANTIES THAT EXTEND BEYOND THE WARRANTY HEREINABOVE SET FORTH THERE IS NO WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE WITH RESPECT TO THE APPARATUS OR ANY PART OR COMPONENT THEREOF AND NO WARRANTY SHALL BE IMPLIED BY LAW DISCLAIMER OF LIABILITY IN NO EVENT SHALL SELLER BE LIABLE FOR DIRECT INDIRECT SPECIAL INCIDEN TAL OR CONSEQUENTIAL DAMAGES ARISING FROM ANY SOURCE such as but not limited to the manufacture use delivery including late delivery or transportation of any apparatus part or component sold to Purchaser whether such damages are caused by Seller s negligence or otherwise Without limiting the generality of the foregoing sentence Seller shall not be liable for the cost of capital the cost of substitute apparatus services repairs components or parts loss of profit or revenue the cost of power whether purchased or produced by the consumer thereof loss of use of the apparatus or any part thereof or of any other property owned by Purchaser claims or costs of
12. HV circuit out of regulation for more than 2 seconds Inverter Overload LED Inverter current exceeds maximum allowable 100 A Overtemperature LED Inverter temperature above 67 C or cooling fan failure Aux Supply Low LED Nominal 24 V dc control voltage is below 19 5 V dc Filament Load Fault LED Open circuit in filament load filament broken or burnt out External Control Fault LED Short circuit in 24 V dc supplied by filament power supply for external interlock string CV 6SLX Technical Manual 3 2 0101 8241 0 Rev F Section 3 Power Supply Operation 3 3 Switches and Indicators on Filament Power Supply Front Panel 3 3 Switches and Indicators on Filament Power Supply Front Panel Figure 3 2 shows the switches and LED indicators on the FPS front panel Figure 3 2 Filament Power Supply Front Panel M EG Ty P HIGH VOLTAGE ONLED OCK Emission Current JE Selection Switch POWER ON LED 4 EE EN 6 MM ha 1500 POWER tno ON i J 102 J 101 EMISSION CURRENT SELECT SWITCH mA 1 1 I j f 1 P HIGH VOLTAGE IN The switches and indicators on the FPS front panel are e Power ON Off switch Must be switched ON in order for unit to operate POWER ON LED When lit indicates that unit is being supplied with input power HIGH VOLTAGE ON LED When lit both the power module and the FPS indicate that the HV is on For fur
13. On HVRB check TP33 for clear SUM FLT signal If TP33 is high repeat Step 1 of this procedure and or replace HVRB Table 5 General Condition PS fails to achieve Gun Ready state Symptoms TCS SRC1 GON ALM Source 1 Gun Control GO ON Timeout Alarm Remote Control Gun Ready LED Fails to glow Yellow Possible Causes Procedure 1 Confirm Power ON HV and Gun Interlocks 2 Faulty or loose cable connections Refer to Table 3 Make sure that all power module and FPS cable connections are correctly and securely made 3 Gun Ready signal disrupted on FPSB 3 Perform the procedures described in Tables 28 and 29 CV 6SLX Technical Manual 5 6 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 6 General Condition HV does not switch on Symptoms TCS PSU1_GON_ALM Power Supply Control Go On Timeout Alarm Remote Control HV Enable Go On LED Fails to glow Green Power Module HV ON LED Fails to glow Green Possible Causes Procedure 1 Confirm Power ON HV and 1 Refer to Table 3 Gun Interlocks 2 Faulty or loose cable 2 Make sure that all power module and FPS cable connections are correctly and connections securely made 3 HV Ready signal not 3 Refer to Table 4 present 4 HV Enable signal from 4 On HVRB check pins J 1 26 and J 1 28 for HV Enable signal If signal is missing check Interface not present interface connect
14. Purchaser s customers injury to persons or death or damages to any property In the event that any limited warranty or disclaimer of liability is found to be unlawful or inapplicable or to have failed of its essential purpose Seller s liability shall be limited to the amount paid by Purchaser for the apparatus CV 6SLX Technical Manual 0101 8241 0 Rev F SAFETY INSTRUCTIONS FOR OPERATING AND SERVICE PERSONNEL Operators and service personnel should always wear safety glasses Operators shall not enter areas Intended for service access only Only experlenced service personnel should enter such areas and only after taking the preliminary precautions described in paragraphs 1 through 6 below DANGER Potentially lethal voltages may exist within this unit even with the line power switched off Service should only be attempted by qualified personnel Failure to observe all safety precautions may result in personal injury This component is designed to operate as part of a system containing high voltage equipment Observe the precautions described below when servicing this system especially when servicing components where high voltages may be present l 10 11 Before servicing or operating this equipment read all the component manuals supplied with the system paying special attention to safety instructions Post HIGH VOLTAGE WARNING signs in conspicuous locations within the service area Remove rings watches br
15. while the turret is rotating If no external input is supplied this input must be jumpered ON GUN WATER 20 BL Prevents the gun from being switched on unless it is receiving sufficient cooling water Signal INTERLOCK 2 R to be supplied by a customer installed flow switch POSITION 22 Y If supplied by a beam sweep controller this input switches off the gun if the beam travels INTERLOCK 23 R beyond the sweeper s programmed position limits If signal is not supplied by a sweep controller these pins must be jumpered Analog Control Input Wire Signal Name Colors REMOTE EMISSION 56 O If the gun control unit s REMote RANGE switch is in the REMOTE position this input linearly CURRENT REQUEST 57 R controls emission current 0 V min current 10 V full scale On standard FPS units i e PN 0620 6604 0 full scale 600 mA On units equipped with FPS PN 0620 6604 2 full scale 1 A NOTE In both cases the actual maximum emission current output is 600 mA Digital Control Inputs Wire Signal Name Colors REMOTE 5 G A momentary open pulse switches off the gun If all gun control interlocks are made the gun GUN GO OFF 6 BK can be switched on again NOTE If these pins are not connected to a remote contact closure 7 BL ENABLE they must be jumpered together or the gun cannot be switched on REMOTE If all gun control interlocks are made and the GUN GO OFF ENABLE loop is closed a 2 sec GUN GO ON contact closure acros
16. 3 EMISSION CURRENT 1 Gun ON button and Gun ON indicator light When the Gun Ready indicator light inside the Gun Control panel s OFF button Is illuminated pressing the Gun ON button switches on the gun The Gun ON indicator light inside the Gun ON button is illuminated when the gun Is on 2 Gun OFF button and Gun Ready indicator light When the gun Is on pressing this button switches it off When the gun is off and the TANK VAC AUX and H50 interlock LEDs are lit the Gun Ready indicator light inside the this button is also lit 3 REMote LOCAL selector switch When this switch is in the LOCAL position the user can set the emission current request and bias current request manual via the Gun Control panel When the REM LOCAL switch is set to REM these functions are controlled by remote inputs normally from a host computer The GUN ON and GUN OFF buttons are always active regardless of the position of the REM LOCAL switch 4 Indicator LEDs e TANK LED Illuminated when the customer supplied input for the TANK interlock is closed If the Tank interlock is open none of the other interlock LEDs will be lit as Tank is the first in the interlock series e VAC LED Illuminated when the customer supplied input for the Vacuum interlock is closed If this interlock is open the LEDS for the H20 POS if used and AUX if used interlocks will not be lit e REM LED Illuminated when the REM LOCAL switch is in the REM position
17. 3 phase wye 5 wire with neutral High Voltage Output 6 kW at 10 kV max Fully adjustable 0 10 kV Regulated to within 5 Beam Current Fully adjustable 0 600 mA dc Regulated to within 5 Environmental Requirements Must be free of corrosive vapors Ambient temperature 104 F 40 C maximum Humidity 1096 90 noncondensing 1 1 2 Filament power supply Figure 1 2 shows the filament power supply a stand alone assembly that must be installed near the vacuum chamber Figure 1 2 Filament Power Supply Front Panel CV 6SLX Technical Manual 1 2 0101 8241 0 Rev F Section 1 Product Description and Specifications 1 1 Product Description 1 1 3 1 1 4 Filament Power Supply Specifications Dimensions 6 5 in H x 6 5 in W x 11 in D Weight 14 Ibs Input Power 220 V ac 10 6 25 A 50 60 Hz single phase Power Output 10 V ac 50 A 40 kHz max Remote Control Unit Figure 1 3 shows the half rack remote control unit whose dimensions are 5 24 in high x 9 5 in wide For a detailed description of this unit s control and display features see section 3 4 Figure 1 3 Remote Control Unit H V CONTROL GUN CONTROL REM LOG REG DOORS PWR REM FAULT i TANK VAC REM p LOCAL d iin POSITION HO POS AUX p 3 CURRENT Interconnection Cables The CV 6SLX is available in a GUl driven only version which does not include a remote control unit That version has a different cable set
18. 4 3 CV 6SLX Technical Manual 4 2 Power Module Theory of Operations Section 4 Theory of Operation the HV Transformer primary through J8 Capacitor C2 and the leakage inductance of the HV Transformer form part of a resonant tank that allows zero current switching ZCS of the IGBTs under most conditions ZCS reduces power dissipation in the IGBTs and lowers EMI from the Inverter The output and supply terminals of current sensor U15 link back to the Inverter through a connecting cable to J 1 and are electrically isolated from the input terminals and the IGBT current U15 has a 75 1 current to voltage transfer ratio on its output terminal which is buffered by op amp gate U3 C This buffered representative signal of the IGBT current is sent directly to the Regulator on J11 and is also compared to 1 24V by U9 after going through an RC low pass filter with a gain of approximately 0 8 at 25kHz When the signal exceeds 1 24V approximately 116A peak U9 pulls the SET pin of U10 B to ground thereby latching its output high This signal RAIL FAULT gets passed to the Regulator on J 11 and triggers an Inverter Overload indicator Temperature Sensing Two temperature measuring devices are connected to the Inverter a thermostat switch connected to J2 and an active temperature sensor connected to J6 The thermostat switch contacts remain closed as long as the temperature of the Inverter heat sink where it is mounted stays below 77 C but open w
19. Action Obtain a length of 1 wide copper strap user supplied that will easily extend from the filament power supply to the vacuum cubicle s central grounding point Secure one end of this strap to the grounding stud labeled RF GND on the FPS front panel see Figure 2 5 CV 6SLX Technical Manual 2 6 0101 8241 0 Rev F Section 2 Installation 2 7 Cable Installation on Standard Units Figure 2 5 Grounding Studs on FPS Front Panel RF Ground Connect to vacuum cubicle s central gounding point using 1 wide copper strap Chassis Ground Connect to vacuum cubicle s central gounding point using 10 AWG wire 3 Secure a length of 10 AWG wire to the other grounding lug on the FPS front panel 4 Secure the free ends of the 1 copper strip and the 10 AWG ground wire to the vacuum cubicle s central grounding point 2 6 5 Electron Beam Source Ground To ensure a good ground between the electron beam source and the vacuum cubicle the following conditions must be met e The base of the source and the surface on which it is mounted usually the upper surface of the source tray must be clean and free of evaporated material e The mounting surface must be made of nonmagnetic material e The source must be securely bolted to the mounting surface 2 6 6 Mounting the Grounding Hook If your are installing the CV SLX unit in a system that does not already have a properly mounted grounding hook install the grou
20. CV 6SLX is switched OFF and locked out with an appropriate lockout tagout device Also make sure that the FPS ON OFF switch and the circuit breaker switch labeled AC MAINS on the power module front panel are both in the OFF position The facility breaker must remain locked and tagged out during the entire installation procedure Likewise the power module s main circuit breaker switch and the FPS ON OFF switch must both remain in the OFF position during the entire installation procedure The Initial Power Up Maintenance Power Up Procedure see section 2 9 specifies the exact sequence in which the power is to applied to the unit List of Components and Cables Supplied with the Unit Standard Units With Remote Controller The components and cables listed below are supplied with standard units i e units with a remote controller These units will have the top level PN 0620 9600 2 for 208 volt units or PN 0620 9600 3 for 400 volt units e CV 6SLX power module PN 6024 7110 0 208 volt unit or 6024 7120 0 400 volt unit e Filament power supply PN 0620 6604 0 or 0620 6604 2 e Remote control unit PN 0620 9750 0 e Rack mounting kit for remote control unit PN 0411 6183 2 e FPS input power cable PN 6622 0100 20 e Power module FPS cable PN 6338 2884 0 e HV control cable PN 0620 9840 0 e Gun control cable PN 0620 9730 0 0101 8241 0 Rev F 2 1 CV 6SLX Technical Manual 2 3 Rack Mounting the Power Module Section 2 I
21. Gun Controller Switching Main Power On Off To switch on three phase input power to the power module set the front panel s main power breaker to the ON position i e all the way up To switch off main input power set the main power breaker to the OFF position i e all the way down NOTE The main power breaker on the power module front panel controls power to the filament power supply FPS module Switching the HV On OFF and Adjusting the HV Level High Voltage Control Switching On the High Voltage Under Normal Operating Conditions The control system can switch on the high voltage by asserting the HV GO ON signal 15 24 V dc for two seconds at Pin 8 of power module rear panel connector J4 see Table 2 3 Switching On the High Voltage Following a Latching Fault Condition Switching off the HV by pressing the HV OFF button on the power module front panel triggers a latching Power Supply Fault In that event or when any other latching fault has occurred the following signals must supplied in the order given below to switch the HV back on NOTE If a Power Supply fault has occurred because of a latching fault condition and not because the user has pressed the power module s HV OFF button the underlying fault that triggered the latching fault must be corrected before the HV can be reset For detailed troubleshooting instructions see Section 5 2 1 The RESET signal must be supplied This can be accomplished in eit
22. HV OFF Button 3 2 2 Front Panel Indicators Display Meters Output Voltage meter 0 10 kV Emission Current meter 0 600 mA Status LEDs Power ON LED HV ON LED I nterlocks OK LED External interlocks including power supply covers are satisfied Power Supply Fault LED Turns red when one or more of the following latching faults has occurred Rail Undervoltage HV Overcurrent HV Overvoltage Setpoint Overvoltage Output Arcing Inverter Overload Overtemperature Aux Supply Low External Control Fault Arc Out of Regulation LED Flashes yellow when arcs occur and when the HV is momentarily out of regulation for any other reason Filament Power LED Filament power supply is powered up Fault Indicator LEDs The following LEDs indicate latching faults which necessitate the application of the Reset signal before the power supply can be restarted Unless otherwise noted all of these LEDs turn red when the fault condition in question occurs Rail Undervoltage LED Inverter rail voltage is below 80 of nominal range 540 V to 565 V HV Overcurrent LED HV output current is more than 105 of its maximum 600 mA HV Overvoltage LED HV output voltage is more than 105 of its maximum 10 kV Setpoint Overvoltage LED HV output voltage is more than 105 of its setpoint value Output Arcing LED Arc rate exceeds 200 arcs sec or continuous arcing persists for more than 120 sec HV Out of Regulation LED
23. LF1 then creates high frequency filtering to minimize conductive emissions from the unit as well as provides immunity to common levels of AC line transients The load side of the line filter then feeds three phase circuit breaker CB1 as well as auxiliary filtered IEC outlet J2 This AC connector is fused at 6 3A by F1 and F2 which are accessible on the rear panel through panel mounted fuse holders The IEC outlet is sourced differently depending on the unit s line voltage range the 208VAC unit connects the IEC outlet between phases while the 400VAC unit connects it between a phase and neutral This is intended to maintain the I EC outlet voltage between 187VAC and 254VAC considering the 10 tolerance of voltages applied to TB1 Grounding to the unit is provided through two external fasteners One threaded stud in the lower center of the rear panel must be connected to an earth ground for safety Another threaded stud on the rear panel near HV output connector J 1 and labeled RF GND provides a ground return for the HV output Internally ground wires are connected together with a ground block mounted to the bottom panel Mounted to the front panel and shielded from inadvertent operation by a kick guard circuit breaker CB1 provides over current protection of the three AC line phases The load side of the circuit breaker feeds Inverter board A1 whose functions are discussed in a section below Several other components and assemblies connec
24. Light displays are dark Possible Causes Procedure Loss of main line power Check circuit protection devices i e either circuit breakers or fuses for input power to ensure they are not tripped or blown 2 Power supply s front breakers are 2 Reset front breakers and proceed with normal power up of unit If tripped breakers trip again further troubleshooting is required UJ 3 Loose or faulty line power Check for secure connections on main three phase line power connector connection on rear of unit ce 4 Connections components or Verify that all boards and connectors are securely mounted or boards have come loose connected 5 Unit s internal line filters or Turn off line power at wall main Remove top cover of power module connections are faulty and check connections from incoming line voltage line filter 6 Power On indicator lamp is blown 6 Check for correct bulb operation 7 Fuse on HVRB blown 7 Check fuse F1 0 2 A on HVRB 8 Fuses on Inverter board blown 8 Check fuses F1 F2 and F3 on Inverter board 9 AC Control transformer faulty 9 Check input to control transformer H1 and H4 for 480 V ac and output at X1 and X4 for 240 V ac 10 24 V DC power supply faulty 10 Check 24 V DC power supply input at pins 1 and 3 for 240 V ac and Ul output at pins 3 and 4 for 24 V dc Table 2 General Condition Fan not rotating Symptom Fan Does Not rotate when PS powers up Possible Causes Procedure
25. Supply Front Panel Section 3 4 Control and Display Features on Remote Gun Controller Section 3 5 Normal Power Supply Operation Standard Units Section 3 6 Normal Power Supply Operation Units Without the Remote Gun Controller Section 3 7 Responding to Out Of Regulation Conditions and Power Supply Faults Sections 3 2 through 3 5 and section 3 7 apply to standard CV 6SLX units Sections 3 2 3 3 3 6 and 3 7 apply to units without a remote gun controller Power Module Controls and Indicators Figure 3 1 shows the controls and indicators on the front panel of the CV 6SLX power module Those features are described in detail below Figure 3 1 Power Module Front Panel Meter Emission i RE ARA Current Meter EMSION CORRENT HV OFF F LI mA Button HV OFF Hv ON CV 6SLX POWER ON 9 INTERLOCKS OK POWER SUPPLY FAULT 9 ARC OUT OF REGULATION Status and Fault RAIL UNDERVOLTAGE B INVERTER OVERLOAD Indicator LEDs HV OVERCURRENT E D OVERTEMPERATURE HV OVERVOLTAGE 5 AUX SUPPLY LOW SETPOINT OVERVOLTAGE FILAMENT LOAD FAULT OUTPUT ARCING 3 FILAMENT POWER AC MAINS HV OUT OF REGULATION EXTERNAL CONTROL FAULT Main Power Breaker 0101 8241 0 Rev F 3 1 CV 6SLX Technical Manual 3 2 Power Module Controls and Indicators Section 3 Power Supply Operation 3 2 1 Front Panel Controls Main Circuit Breaker Switch Labeled AC MAI NS High Voltage Adjustment Pot labeled Output kV Adjust
26. Table 5 4 Emitter damaged 4 Follow instructions in gun manual to troubleshoot emitter issues 5 Confirm HV IS ON signal 5 Refer to Table 6 6 Confirm GUN IS ON signal 6 Refer to Table 7 7 Confirm Emission request 7 On FPSB check TP3 for emission request 1 2 V 1 2 A 8 Confirm HV request 8 On HVRB check TP30 in remote mode and TP36 in local mode for 1V 1KV 9 No HV relay control voltage On FPSB check pins J 103 6 for 24 V DC If signal is present replace HV relay else replace FPSB 10 Defective HV relay in FPS 10 Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present 11 Emission Power Control 11 On FPSB check pins J 103 9 for 24 V DC Voltage not OK 12 Faulty Emission feedback 12 On FPSB check pins J 103 8 for scaled DC voltage 0 5V 0 24 13 Defective FPSB 13 Replace FPSB 0101 8241 0 Rev F 5 9 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 10 General Condition HV output unstable Symptom HV Fluctuates or Sags From Requested Level Possible Causes Procedure 1 Incorrect or fluctuating line Confirm input line voltage voltage 2 Faulty or loose cable Make sure that all power module and FPS cable connections are correctly connections and securely made
27. Technical Manual 4 16 0101 8241 0 Rev F Section 4 Theory of Operation 4 3 FPS Theory of Operation Figure 4 4 Component Location in Standard FPS Units PN 0620 6604 2 Filament Supply PCB Mounted to Heat Sink HV Connector Filament Transformer Output to Filament Interlocks Figure 4 5 Top Level Block Diagram for FPS Units with PN 0620 6604 2 Filament Power Supply Module Filament Output Section HV ctl and data signals including the Emission Current Monitor signal Filament Filament Supply PCB Transformer CV 6SLX Power Module E Beam Gun s Filament HV Related Gun Related I O Signals I O Signals to from System to from System 0101 8241 0 Rev F 4 17 CV 6SLX Technical Manual 4 3 FPS Theory of Operation Section 4 Theory of Operation 4 3 2 Filament Supply PCB 208 220 VAC AUTO BIAS ACTIVATE IN Figure 4 6 is a top level block diagram for the Filament Supply PCB whose circuits are described in detail below Figure 4 6 Filament Supply PCB Overview Block Diagram Filament Joy Filament y DC Voltage Switch Mode PRIMARY FILAMENT VOLTAGE Supply x Supply M gt mE 424 V Low DV Voltage gt FILAMENT CURRENT MONITOR 5V DC Supplies DV EMISSION MONITOR OUT Gun Control GUN IS READY OUT FILAMENT BIAS SET IN Monitor GUN IS ON OUT EMISSION REQUESTIN Filament Ou
28. approximately 10 V rms at the filament There are no rectifiers on the output of the transformer as the filament input is high frequency AC The filament circuit is current regulated There are two modes of filament operation One with HV OFF and one with HV ON A HV OFF Filament Reference Filament Bias Set Filament Feedback Filament Primary Current B HV ON Filament Reference Autobias if active Emission Current Set Filament Feedback High Voltage Current The filament switch mode supply IGBT switches Q 10 and Q 11 switch the primary of the filament transformer between the voltage rails at a frequency of approximately 34 kHz The filament transformer connects to the center point of the rail capacitors Thus half of the rail voltage is impressed alternately on the transformer by the IGBT inverters Gate driver ICs U 10A and U 10B in conjunction with transformer T 101 provide the gate drive for the IGBT switches Inductor T 103 has a dual function of adding impedance in the primary and a sensing circuit for fault currents Capacitors C 20 through C 24 are tuning capacitors for the output circuit The IGBT switches are driven from the PWM modulator chip U 101 This IC has two outputs One output drives IGBT switch Q 10 and the other drives IGBT switch Q 11 The PWM is controlled by the filament current control circuits The filament current feedback circuit utilizes transformer CT 10 to measure the filament transformer primary current The
29. cable to J 3 by signal AC RLY ON from the Regulator With the contacts of relay K1 closed all three phase currents are rectified by CR17 23 and 28 and somewhat filtered for high frequency noise by C64 and C61 The resulting DC biased current passes through high speed fuse F3 which protects downstream components from over current 40A for the 208VAC unit and 20A for the 400VAC AC power factor is passively improved with the DC link choke 1 2mH for the 208VAC unit and 4 8mH for the 400VAC which connects to the Inverter through J 25 Two extra pins on J25 are used for the additional current in the 208VAC unit The last constituent of the Inverter rail is formed by bulk electrolytic capacitors C46 57 arranged in a series parallel matrix The series capacitor banks are voltage balanced by R65 67 68 and 71 which also serve as discharge resistors when power is removed from the unit It is important to note that circuit nodes on the schematic connected to the symbol used for the negative side of the Inverter ground with a C attached to it e are floating at a high voltage with respect to ground and should never be connected to anything earth ground referenced Schematic symbol s is also connected to this floating node and should never be connected to earth ground as well Full Bridge IGBT Inverter I GBTs Q6 7 10 and 11 form the heart of the Inverter switching on and off at 25kHz to drive current through the primary of
30. cable to J5 on power module rear panel as shown in Figure 2 4 Action Plug the power module FPS cable into J5 on the power module rear panel and into FPS connector J 102 see Figure 2 13 Plug the gun control cable PN 0620 9730 0 into connector G1J1 on the remote controller and into J 101 on the FPS see Figure 2 13 FPS Cabling Detail on Standard Units Connect male end of FPS Gun Controller cable PN 620 9730 0 to J101 Connect the female end of that cable to G1J1 on the remote control unit as shown in Figure 2 4 Connect the power module FPS cable and the gun control cable exactly as described above Incorrect connection of these cables will result in damage to the power supply CAUTION 3 Plug the single male D connector on one end of the HV control cable PN 0620 9840 0 into power module connector J 4 see Figure 2 4 Plug the female D connector on the other end of the HV control cable into HVJ 2 on the remote controller see Figure 2 12 The remaining connector on the end of the HV control cable is a 28 pin circular connector Plug this connector into HVJ 1 on the remote controller rear panel see Figure 2 12 2 7 5 Making I O Connections to the Control System The installer must make connections 1 between the control system and gun control system 1 0 cable PN 0620 9730 1 and 2 between the control system and the HV control system 1 0 cable PN 0620 9840 0 Control inputs and status ou
31. emission current loop compensation circuit of U106A via R52 As above the output of U106A feeds the PWM U101 2 via buffer U106B to drive the switch mode power inverter Emission Current Request Ramp Figure 4 8 is a block diagram for the emission current ramp circuit which allows the graceful assertion of emission current in 255 steps With the following conditions Emission Request Gun On HV On and HV In Reg signals asserted the clock U104 begins clocking the 8 bit counter U11 from its cleared state When the counter reaches 255 the AND of its outputs stops the clock oscillator The eight outputs of the counter drive the 8 bit digital to analog converter U103 The output of the D A is the count times the Emission Current Request Signal divided by 256 CV 6SLX Technical Manual 4 20 0101 8241 0 Rev F Section 4 Theory of Operation 4 3 FPS Theory of Operation Figure 4 8 Emission Current Ramp Circuit Emission Buff mu I Request uller Emission Request Signa Gun _ ON 8 Bit To emission current In Up loop compensation Counter summing junction Remove Clear Auto Bias Circuit Figure 4 9 shows the Auto Bias circuit which is designed to maintain the filament current at a level just below the zero emission current point To do so the Auto Bias circuit gradually increases the filament until emission current begins to flow When this is detected the emission current is scaled back to a point just below emission threshold The
32. ku e h b A JS MN fl 9 S RAN FOE d OE X m a OW WOO CN W FILAMENT I O i lt l f Kf PE SENA A ek P i I ia Ji ji y if Seer gt x Ww ay M X s LA SERNIN T M H H E WR I e CES J D at ixl o ler pi Ww J J ili t OW MES eet J og i d i Ar M W M 2 i il int J H lI At W AE iN S S P M od a y H W W WO AA M NW S wee VAL d P dM F1 F2 W N W WAR OR Se Puff Jy if i L L A pn Ts Er y i re F 8 3A 250VAC SLOW iN NS T SAS em 9pm y T f ws Me dA uu Fog j Wo rw E E PC T J N x n E a a T x aa Eum oc NN ul za ie vy TBi SK ee T p 4 x i AC INPUT WS T e gt 22 Z 3 380 440V 15A 50 00 HZ een Rod m Li L2 L9 SSS SOS _s ge ad a a E F af 55 T T Set ue leer Nm QD w Secure a length of 10 AWG wire to the grounding lug labeled GND on the power module rear panel Secure the loose end of the 3 copper strip and the loose end of the 10 AWG ground wire to a clear bare patch of metal on the operator station s frame The same fastener that secures the above copper strip to the frame should also secure one end of a length of 3 copper strap that connects to the vacuum cubicle s central grounding point as shown in Figure 2 3 2 6 4 Filament Power Supply Grounding Make connections to the grounding lugs on the FPS front panel as shown in attached drawing 620 9692 following the procedure described below Step 1
33. line voltage 1 Confirm input line voltage 2 Faulty or loose connections 2 Make sure that all HV and FPS connections are correctly and securely made If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply Disconnect HV output cable from J104 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 Ifthe symptom is not in evidence during Step 3 troubleshoot the emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J104 switch the power supply back on and proceed with the troubleshooting steps described below Possible Cause Procedure Rail voltage incorrect 3 Perform the procedure described in Table 15 Rail sensor is defective 4 Replace rail sensor HAS 300 S on Inverter board Inverter Board defective 5 Replace Inverter Board HVRB defective 6 Replace HVRB o St E cad Bee Table 23 OVERTEMPERATURE LED Lights Red Symptoms One or more temperature faults are present IGBT Temp gt 67 C or Heatsink Temp gt 77 C or Fan Stopped Possible Cause Procedure 1 Incorrect or fluctuating line voltage 1 Con
34. maDC 0 24 VDC 0 VDC Fault 0 VDC Fault 0 VDC Fault 0 VDC OFF 0 VDC Fault 0 VDC Fault 0 VDC Fault 0 VDC Fault 0 VDC Fault 0 VDC Fault N A Description Fault at above 10 5 KVDC Fault at above 630 maDC Fault at above 67C Fault at below 430 VDC Fault at above 1208 continuous arcing at above allowable rate Fault at below 19 5 VDC Inverter temperature overload above 67C or cooling fan failure HV output current above 10596 of nominal nominal 600 MA HV output voltage above 10596 of maximum maximum 10 KV Arc rate or duration exceeds maximum programmed limits 200 second or continuous arcing for more than 120 seconds HV output voltage out of voltage regulation mode for over 2 seconds duration Fault Open filament Fault Filament Power Supply OFF
35. on HV Control Panel H V CONTROL CV 6SLX Technical Manual 3 4 0101 8241 0 Rev F Section 3 Power Supply Operation 3 4 Control and Display Features on Remote Gun Controller 1 Key switch Must be turned to the ON position in order to enable the HV When key switch is in the OFF position the HV is disabled 2 High voltage ON button and HV ON indicator light When the HV Ready light inside the High Voltage OFF is illuminated pressing this button switches on the high voltage When the high voltage is on the HV ON indicator light inside this button is illuminated 3 HV OFF HV Reset button and HV Ready indicator light When the HV is ON pressing this button switches off and resets the high voltage When the HV is off and the HV interlock chain is made the HV Ready light inside this button is illuminated Pressing this button when both conditions are true switches the high voltage ON 4 LED Indicators e REG LED Illuminated when HV circuit is out of regulation for more than 2 seconds mimics the HV Out of Regulation LED on the power module s front panel e POWER LED Illuminated when all dc power supplies are operating correctly mimics the operation of the Aux Supply Low LED on the power module s front panel e DOORS LED Illuminated when the interlocks for power module and FPS covers and any customer defined and supplied external interlocks are all made e FAULT LED Illuminated when any latching power module i e
36. power from power module Remove top cover and visually inspect HV Output section Check resistors R6 and R7 and capacitors C36 and C38 8 HV Voltage divider resistors Check voltage divider circuit resistors R1 and R6 faulty CV 6SLX Technical Manual 5 10 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 11 General Condition Gun out of regulation Symptom When Gun And HV Are Switched On Filament Current Ramps Up and Goes Out of Regulation Possible Causes Procedure 1 Faulty orloose connections Make sure that all HV and FPS connections are correctly and securely made Short in HV path 2 Check emitter feethroughs and cables for signs of shorts Emitter damaged 3 Follow instructions in gun manual to troubleshoot emitter issues 4 No HV relay control voltage On FPSB check pins J103 6 for 24 V DC If signal is present replace HV relay else replace FPSB 5 Defective HV relay in FPS Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present If the preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable 3 Switch on the power supply and the HV and leave them switched on for no more
37. power supply the RF matching network or the RF electrodes or shielding inside the product chamber are moved or changed in any way the RF energy may be radiated outside the equipment Monitor the equipment to assure that external RF radiation is below the levels prescribed by any and all applicable safety codes CV 6SLX Technical Manual 0101 8241 0 Rev F Special Amendment for United Kingdom Users All Electrical Power Sources Safety Precautions This component is designed to be used in an extra high voltage system Only authorized personnel should be permitted to carry out work on this system Prior to any servicing grounding hooks should be used to short out all high voltage parts and conductors in both the vacuum system and the high voltage power supply Screens protecting extra high voltage conductors should be removed only if appropriate action has been taken to ensure that extra high voltage conductors are dead and cannot be reenergized inadvertently In addition all personnel should be aware of 1 The Electricity Factories Act Special Regulations 1908 and 1944 in particular Regulations 18 d and 28 of the 1980 Regulations as amended and 2 The employer s responsibility to set up suitable systems to safeguard the health and safety of employees according to the Health amp Safety at Work etc Act 1974 CV 6SLX Technical Manual 0101 8241 0 Rev F USER RESPONSIBILITY This equipment will perform in accor
38. process begins with Gun ON and HV ON asserted and with Auto Bias invoked As noted above switches A104A and A104B form an SBDT switch that selects either the filament current request or the Auto Bias signal as the input to the filament current loop compensation summing point Selection by this SBDT switch of the Auto Bias signal also removes the clear from counter U101 and clears the stop from clock oscillator U203 allowing it to clock the counter The counter outputs drive the 8 bit D A converter U202 The D A output is Ref times the count divided by 256 volts This count up process continues until Emission Current is above the threshold as determined by comparator U102C The comparator output sets the latch U16B Auto Bias Set The latch output stops clock U203 and slightly reduces the gain of scaling amplifier U105B via analog switch A104C setting the autobias level just below the emission point Figure 4 9 Autobias Circuit Block Diagram Autobias ON In Gun ON In HV Is ON Emission Monitor In Comparator HV Gun OFF Ref Threshold Filament Autobias Set Remove Clea Remove Clea 8 Bit To emission current Up pu loop compensation Clock Counter P summing junction Stop SEE Clock Analog Request OFF 0101 8241 0 Rev F 4 21 CV 6SLX Technical Manual 4 3 FPS Theory of Operation Section 4 Theory of Operation 4 3 3 4 3 4 Filament Output Section The filament output section of the FPS conn
39. provide visual status indications of various circuits within the HVPS The underlying function and appropriate illumination color are discussed in the preceding Regulator theory section as well as in Section 7 of this manual The actual circuit method for illuminating all but one of the LEDs is discussed here using the Sum Fault LED as an example The logic level SUM_FLT status signal comes in through J1 and connects to the input of inverter U5 B This creates the condition where NPN arrays U1 B and U1 C receive inverse signals from each other thereby conversely illuminating the dual color LED CR2 If the input to U1 B is high its output is pulled to ground by its internal transistor consequently shunting current away from turning off the green LED element Conversely U1 C then receives a low input deactivating its output transistor and allowing current to flow in turning on the red LED element Fifteen other bicolored LEDs are driven in the same manner however the Power On LED is illuminated differently The green LED element of CR1 is illuminated as soon as the 24VDC supply bus comes up indicating that AC power has been applied to the HVPS and the auxiliary power supply is functioning properly Two LCD displays are used to show the magnitude of the output voltage and current M1 displays the actual HV output voltage in kV e g 10 00 10kVDC output and M2 displays the actual output emission current in mA e g 600 2 600mA output Fed by
40. second delay Switching Off the Filament Current The operator can switch off the filament current by simply pressing the OFF button on the gun control panel see Figure 3 5 The control system can also switch off he filament current by momentarily de asserting the REMOTE GUN GO OFF ENABLE signal which is supplied via G1J 2 Pins 5 and 6 see Figure 2 16 3 5 4 Adjusting the Filament Bias Current and the Emission Current Adjusting the Filament Bias Current The filament bias current can be adjusted in either of two ways 1 The operator can adjust the BIAS pot on the gun control unit s front panel see Figure 3 5 or 2 The externally supplied FILAMENT BIAS SET signal can be varied That signal is supplied via Pins 26 and 27 on remote gun controller rear panel connector G1J 2 see Figure 2 16 Adjusting the Emission Current The emission current can also be adjusted in either of two ways 1 The operator can adjust the EMISSION CURRENT dial on the gun control unit s front panel see Figure 3 5 or 2 he externally supplied REMOTE EMISSION REQUEST signal can be varied That signal is supplied via G1J2 Pins 26 and 27 on the remote gun controller s rear panel see Figure 2 16 0101 8241 0 Rev F 3 9 CV 6SLX Technical Manual 3 6 Routine Power Supply Operation on Units Without a Remote Gun Controller Section 3 Power Supply Operation 3 6 3 6 1 3 6 2 Routine Power Supply Operation on Units Without a Remote
41. temperature fault if the fan is not connected Comparator U7 D transitions when the 24VDC auxiliary supply bus drops below 19 5VDC indicating the auxiliary supply is either failing or is being loaded down This sets the output of latch U25 C AUX FLT high turning front panel AUX SUPPLY LOW LED red through J 13 Similarly comparator U8 E switches when the fused 24VDC interface supply bus 24V_FUS drops below 20VDC indicating the current draw on the User Interface 24VDC supply pin has exceeded 0 2ADC and self resetting PTC fuse F1 has opened This sets the output of latch U2 C CNT PWR FLT high turning front panel EXTERNAL CONTROL FAULT LED red through J 13 Typically this reveals that the User Interface 24VDC supply pin is inadvertently shorted to ground or another interface pin Two interlock pins on the User Interface connector two interlock pins on the Filament connector and the top cover interlock switch all must be shorted closed to prevent the interlock fault from activating If this interlock loop opens in any location the emitter diode of optocoupler U17 B stops conducting thereby turning off its output transistor Note Self resetting PTC fuse F2 is used to prevent pulling down the 24VDC supply bus if any of the external interlock pins are unintentionally shorted to ground When the optocoupler turns off the output of latch U2 B is set high creating an interlock fault This turns the front panel INTERLOCKS OK LED red thro
42. than 100 Hz has exceeded 120s in duration This determination is made by divider and filter R100 R225 and C138 and comparator U29 The output of latch U25 E is set high when U29 toggles making ARC FLT go high through the other input of OR gate U5 B and turning front panel OUTPUT ARCING LED red through J 13 0101 8241 0 Rev F 4 11 CV 6SLX Technical Manual 4 2 Power Module Theory of Operations Section 4 Theory of Operation Three sensor inputs from the Inverter are brought in over J8 and used to trip the over temperature fault If the IGBT temperature sensor signal IGBT TEMP exceeds 67 C U20 a TL431 comparator pulls the input SET pin of S R latch U25 B to ground thereby latching its output high and tripping an over temperature fault TEMP FLT high through OR gate U37 D TEMP FLT turns the OVERTEMPERATURE LED red on the front panel through J 13 and via Q17 and J 1 pulls the open collector status pin low on the Diagnostics connector TEMP FLT is similarly tripped through OR gate U37 D by HTSNK FLT which is latched high on the Inverter when the heat sink thermostat temperature exceeds 77 C Finally the fan s failed rotation detector output signal FAN ALARM maintains MOSFET Q13 in the off state when it is shorted to ground during normal fan rotation If the fan blades stop spinning FAN ALARM opens with respect to ground Q13 turns on and U25 B latches TEMP FLT high Jumper J9 is used during test to prevent an over
43. the inverse of SUM FLT from inverter gate U13 F This will immediately terminate the PSM chip s gate outputs In addition when SUM FLT transitions high one shot U39 C will produce a 100us wide output pulse which resets the flip flop output to low through OR gate U37 C Assuming that either a Reset or HV Off command has been issued to clear the Sum Fault bus another HV Enable command is then required to cycle the flip flop output high again The HV Off command will also reset the flip flop output to low setting HY ON low The READY signal is high when the SUM FLT bus is high fed through jumper J 18 and into one input of AND gate U12 B indicating no faults when the User Interface HV OFF IN pins are Shorted i e HV OFF IN is high fed into one input of AND gate U27 E and when HV EN is high fed into the other input of AND gate U27 E indicating a User Interface HV Enable command has not been requested To prevent the customer s system from tripping itself off CV 6SLX Technical Manual 4 10 0101 8241 0 Rev F Section 4 Theory of Operation 4 2 Power Module Theory of Operations prematurely during the duration of an HV Enable command the HV_EN signal is OR ed with the HV_EN_IN signal by gate U37 B whose output only goes low after the HV Enable command has been latched and the User Interface HV ON IN pins have opened again Status indicators for READY HV_ON and SUM_FLT are created by Q29 Q1 Q30 Q25 Q26 Q27 and Q23 and sen
44. the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 Ifthe symptom is not in evidence during Step 3 troubleshoot the emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J104 switch the power supply back on and proceed with the troubleshooting steps described below Possible Cause Procedure 4 Faulty or loose cable connections 4 Make sure that all power module and FPS cable connections are correctly and securely made 5 Short in HV path 5 Check emitter feedthroughs and cables for signs of shorts Emitter damaged 6 Follow instructions in gun manual to troubleshoot emitter issues Table 13 FILAMENT POWER LED does not light 1 Loss of main line AC power from 1 a Check 220V AC voltage at connector J104 power module 1 b Check AC line fuses F1 and F2 2 No control voltage 2 Check Filament control power 24 V DC at pin J101 8 3 Control Voltage power supply fault 3 On FPSB check TP11 for 24 V DC TP10 for 15 V DC TP9 for 15 V DC and TP14 for 5 V DC If anyone of the voltages is not present replace FPS CV 6SLX Technical Manual 5 12 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 14 General Condition LED s indicate out of regu
45. through J 13 which momentarily shorts the input of one shot U18 C high activating a retriggerable 470us long output pulse This output pulse turns Q24 on shorting the anode of optocoupler U19 B to ground shunting current away from it and turning its output transistor off momentarily The HV Enable command is used to activate the HV On command when several conditions are met To begin with the reset R pin of flip flop U24 B must be low which requires that the HV Off command pins on the User Interface connector be shorted HV_OFF_IN is low and the Sum Fault bus signal SUM FLT be low These two conditions allow the output of OR gate U37 C to be low Then a momentary closure of the User Interface HV ON IN pins creates a rising edge trigger on the clock pin of U24 B HV EN IN latching the high state of HV OFF IN inverse of HV OFF IN by definition onto the flip flop s Q output pin Since HV OFF IN is high and if SUM FLT is high indicating no faults in the HVPS HV ON will also go high since the inputs of AND gates U27 C and U12 C are all high With HV ON high the output of AND gate U27 D SHUTDOWN will go high and the PSM chip will allow its gate outputs to start switching as discussed in the Arc Monitoring and Management section above If the Sum Fault bus signal SUM FLT transitions high indicating there is a serious fault somewhere in the HVPS HV ON will go low as a result of the input to AND gate U12 C going low which receives
46. 0 6ADC HV output current when the HVPS is in current control mode Differential amplifier U32 B takes the current feedback signal from the HV Output board connected across pins 1 and 3 of J 12 through some RC filtering and scales it with R174 and R132 The scaling equation for the output pin of U32 B is equal to 1 50500 R174 R132 which allows potentiometer R132 to calibrate the output pin to 6VDC when the HV output current is 0 6ADC This voltage then creates a current in R192 and R193 that is equal but opposite to the flow in R79 81 and 204 CV 6SLX Technical Manual 4 6 0101 8241 0 Rev F Section 4 Theory of Operation 4 2 Power Module Theory of Operations when current error amplifier U30 D is closing the control loop Components R180 R193 R203 C105 C112 and C123 form a two pole and two zero frequency compensation network which is optimized for output current control CR34 CR39 and R160 are configured so that the lower magnitude output between the voltage and current error amplifiers is connected to the error amplifier bus signal ERR_AMP and enables the HVPS to switch to constant 0 6ADC current control mode only when the voltage error amplifier can no longer maintain the requested HV output voltage Test jumper J 10 is used to switch between open and closed loop control modes which is only utilized during troubleshooting Normally the unit is in closed loop mode with the jumper across pins 2 and 3 but with the jumper
47. 0101 8241 0 lemegcal CV 6SLX TECHNICAL MANUAL pi OFT e HV OM POWER OH B L Ee ARCIOUTOF RELATE i POWER SUPPLY FAULT 1S di INVERTER OVERLOAD CNERTEMPERATURE dw AUX SUPPLY LOW pd RAL UNDER WoL TAGE amp Hy CIVERCURRENT i HV OVERVOLTAGE SETPOINT OVERVOLTAGE amp OUTPUT ARCIMG wy gut OF REGULATION CS FLAMENT POWER dh EXTERNAL CONTROL FAULT w EDWARDS Revision F July 2008 Temescal a part of Edwards Vacuum Inc 4569 C Las Positas Road Livermore CA 94551 Tel 1 800 522 1215 Fax 925 449 4096 Revision History 0101 8241 0 Change Description Reason Application Date Approved First preliminary version of To support initial installation March 2007 manual Second preliminary version of manual Minor revisions to Sections 1 April 2007 and 2 Added sections 3 and 4 Appended Pinout Table for rear panel diagnostic port J3 and Interconnect Diagram 0620 9502 0 Added Section 5 Minor Internal review only Dec 2007 changes to Sections 1 4 Added sections 4 2 and 5 3 Revised section 5 2 Minor corrections to Section 1 3 Internal review only May 2008 n Minor corrections to all Pursuant to technical review June 2008 sections of Rev D Inserted new sections 2 2 and 2 4 plus Figures 2 6 2 18 4 2 and 4 4 Minor text revisions in Sections 1 4 and 5 Section 2 revisions made at July 2008 request of Temescal Sales Marketing Sec
48. 02 and is routed to the Filament Supply PCB The FPS consists of two major functional sections the Filament Supply PCB and the Filament Output section The Filament Supply Board supplies and controls the filament power The filament output section combines the filament power with the negative HV from the power module and routes the combination to the filament As Figure 4 3 shows the Filament Output section on standard FPS units consists of an HV vacuum relay and a filament transformer On FPS units with PN 0620 6604 2 the Filament Output section consists only of the filament transformer see Figure 4 5 Section 4 3 3 describes the Filament output section in greater detail 0101 8241 0 Rev F 4 15 CV 6SLX Technical Manual 4 3 FPS Theory of Operation Section 4 Theory of Operation Figure 4 2 Component Location in Standard FPS Units PN 0620 6604 0 Filament Supply PCB Mounted to Heat Sink HV Connector HV Vacuum Filament Transformer Output to Filament Interlocks Figure 4 3 Top Level Block Diagram for Standard FPS Units PN 0620 6604 0 Filament Power Supply Module HV Control Vacuum Relay lt Filament Output Section HV ctl and data signals including the Emission Current Monitor signal Filament Filament Supply PCB med Transformer CV 6SLX Power Module E Beam Gun s Filament Gun Related I O Signals HV Related I O Signals to from System to from System CV 6SLX
49. 18v2 amp dd 31n0M H3AOd FHHC HEEB 318v2 IOHLNOOD AH 0 0FB6 02390 aunoss IMNIOg 319MNIs d3liddns wasn 31899 HaMOdg LNdnNl e m ONE TETLT 1 dNi 2 Val JHM OMY OL F e 00 L2885 Cul LAI p or o GRINGA BdAH PT i SSNISONPVIU Er en w ee LL AH JINON HAMOd X189 A2 J18 9 H3 Od LIOA B0e 02 00L0 cc988 J18 2 IwviIxvoo 29VLIOA HOIH rella teos 2 8 0101 8241 0 Rev F CV 6SLX Technical Manual Section 2 Installation 2 7 Cable Installation on Standard Units 2 7 1 Connecting the Input Power Cables Connecting the Power Module Input Power Cable The CV 6SLX is available for the following input voltages e 208 V Model CV 6SLX PN 6024 7110 0 50 60 Hz 3 Phase delta 4 wire Connect using AWG 10 stranded UL1015 wire e 400 V Model CV 6SLX PN 6024 7120 0 50 60 Hz 3 Phase wye 5 Wire with neutral Connect using AWG 12 stranded UL1015 wire The input power cable is user supplied and must conform to the specifications listed above Connect the power cable s conductors as shown in Figure 2 5 Figure 2 5 Input Power Connections on Power Module Rear Panel 208 Volt CV 6SLX TB1 AC INPUT 3 360 440V 15A 50 60 HZ 400 Volt CV 6SLX TB1 AC INPUT 3 360 440V 15A 50 60 HZ L1 L2 L3 TT amp ERE o r z N N 0101 8241 0 Rev F 2 9 CV 6SLX Technical Manual 2 7 Cable Installation on Standard Units Section 2 Installation Connect
50. 2 and J1 If this OOR transition occurs when HV is on one shot U21 B will create a retriggerable two second long output pulse The active high output Q pulse OUT OF REG feeds several circuits Via J13 it flashes the HV OUT OF REGULATION LED yellow for two seconds to give a visual indication of the condition It controls a status pin on the Diagnostics connector via Q10 and J 1 and on the User Interface connector via jumper J 17 Q21 and J1 Power Up and Manual Resets When the HVPS is first powered up from the AC line connection the 15VDC auxiliary supply line will slowly rise from OVDC to its final value Two RC timers formed by R39 R43 R44 C18 and C27 are compared by U7 E to create a reliable active low reset signal approximately 120ms after the 15VDC supply starts rising This ensures that all latches one shots and flip flops from PUP RST and RESET via Q11 and Q12 are reset properly before they fully power up Latches that must be cleared either manually or automatically during normal HVPS operation receive that reset via RESET This signal is created from either of two sources A manual reset is brought in from the User Interface connector via J1 as two pins RESET IN and RESET IN which require momentary shorting to initiate the reset When these two pins are shorted current flows through the emitter diode of optocoupler U10 B which turns on its output transistor and causes the input of one shot U21 C through OR g
51. 3 for 240 V AC and output at pins 3 and 4 for 24 V DC CV 6SLX Technical Manual 5 20 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 27 FILAMENT POWER FAULT LED Lights Red Symptom Filament Power supply module power not present 1 Control voltage not present 1 On HVRB check TP10 for 24 V DC 2 Check fuse F1 on HVRB 3 Control supply voltage not present 3 On HVRB check pins J8 26 for 24 V DC 4 5 2 Control voltage fuse blown 4 Fuses on Inverter board blown Check fuses F1 F2 and F3 5 AC Control transformer faulty Check input to control transformer H1 and H4 for 480 V AC and output at X1 and X4 for 240 V AC 6 24 V DC power supply faulty 6 Check 24 V DC power supply input at pins 1 and 3 for 240 V AC and output at pins 3 and 4 for 24 V DC Table 28 POWER ON LED on FPS front panel does not light 1 No input AC power 1 Verify that the unit s power switch see Figure 5 4 is is in the ON position If O K make sure that the FPS input power cable is securely plugged in at both ends If O K make sure that power module main breaker is switched on If O K check and replace fuse s as described in section 5 3 If O K then try replacing input power cable If FPS cannot be powered up return it to Temescal 2 No control voltage 2 Check filament control power 24 V DC at pin J 101 8 3 Control voltage power supply 3 On the FPSB check the following test poi
52. 6 Follow grounding instructions provided in e gun manual 7 Chamber Pressure too high 7 Chamber pressure should be less than 1 x 10 mtorr 8 HV feedthrough shorted 8 Check copper bus bars and HV feedthroughs for shorts coatings cracks or arc marks If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from J104 3 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 Ifthe symptom is not in evidence during Step 3 troubleshoot the emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J104 switch the power supply back on and proceed with the troubleshooting steps described below Possible Cause Procedure 9 HV Overcurrent state HV Overvoltage 9 Perform the procedures described in Tables 15 20 in that state or Arc state order CV 6SLX Technical Manual 5 18 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 22 INVERTER OVERLOAD LED Lights Red Symptom Inverter current gt 150Apk Possible Cause Procedure 1 Incorrect or fluctuating
53. 9 No beam emitted after filament current is switched on Table 10 HV output unstable Table 11 Gun out of regulation Table 12 Power supply out of regulation Table 13 FILAMENT POWER LED does not light Table 14 LED s indicate an out of regulation condition Table 15 RAIL UNDERVOLTAGE LED lights red Table 16 HV OVERCURRENT LED lights red Table 17 HV OVERVOLTAGE LED lights red 0101 8241 0 Rev F 5 1 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 18 Table 19 Table 20 Table 21 Table 22 Table 23 Table 24 Table 25 Table 26 Table 27 Table 28 Table 29 SETPOINT OVERVOLTAGE LED lights red OUTPUT ARCING LED lights red OUT OF REGULATION LED lights yellow ARC OUT OF REGULATION LED lights yellow INVERTER OVERLOAD LED lights red OVERTEMPERATURE LED lights red AUXILIARY SUPPLY LOW LED lights red EXTERNAL CONTROL FAULT LED lights red FI LAMENT LOAD FAULT LED lights red FI LAMENT POWER FAULT LED lights red POWER ON LED on FPS front panel does not light HI GH VOLTAGE ON LED on FPS front panel does not light Required Pre Troubleshooting Procedure for Power Module The following procedure must be performed prior to any troubleshooting procedure that requires removal of the power module s top cover Step 1 6 Action Switch off the circuit breaker labeled AC MAINS on the power module front panel Open the vacuum cubicle doors and touch the source tray
54. HV related fault occurs mimics the operation of the Power Supply Fault LED on the power module s front panel e REM LED Illuminated when REM LOC switch is set to REM 5 Meter This 3 5 digit LCD meter displays either of two readouts e Power supply total current 0 600 mA e High voltage 0 10 0 kV 6 Meter select switch This switch enables the user to select either high voltage and power supply total current for display on the adjacent meter 7 REMote LOCal switch When this switch is in the LOCal position the user can adjust the HV manually from the HV control panel When this switch is in the REMote position the HV request is controlled either by a remote input usually from a control system or via the OUTPUT kV ADJUST pot on the power module front panel The HV ON and HVOFF buttons are always active regardless of the position of the REM LOCAL switch 8 HV ADJ pot When the REM LOC switch is set to LOC this 3 turn pot enables the user to set the high voltage level It is normally set to 10 kV Control Display Features on Gun Control Panel Figure 3 5 shows the following control display features on the front panel of the Gun Control panel The control display features on that panel are described below 0101 8241 0 Rev F 3 5 CV 6SLX Technical Manual 3 4 Control and Display Features on Remote Gun Controller Section 3 Power Supply Operation Figure 3 5 Control Display Features on Gun Control Panel GUN CONTROL
55. O FPS REAR PANEL CV 6SLX POWER MODULE amp 5 DIAGNOSTICS C Z J4 HVPS CONTROL I O olf Jo 5 F ILAME NT I O E fo 3 AC INPUT L1L2L3 4 RF GND 1 HV OUTP FO Bg e d g Q rm X AN QN lt lt T7 amy lt ZA SS E Rc Mi S t M S WY d SS x A O OS h 5621 0032 3 INPUT POWER CABLE USER SUPPLIED 6338 2886 0 POWER MODULE SYSTEM I O CABLE 6338 2884 0 POWER MODULE FPS CABLE FPS SYSTEM 1 0 CABLE 10 AWG WIRE SINGLE POINT GROUND r1 HV CONTROL I O TO FROM SYSTEM SEE TABLE 2 3 TO FROM SYSTEM SEE TABLE 2 4 GUN CONTROL I O 6338 2884 0 AS DESCRIBED IN SECT 2 5 2 E 7 SINGLE POINT 0620 9654 0 HV CONDUIT GROUND CONNECT AT SOURCE TRAY AS DESCRIBED IN SECT 2 5 2 6024 6112 1 HIGH VOLTAGE COAXIAL CABLE CV 6SLX Technical Manual 2 18 0101 8241 0 Rev F Section 2 Installation 2 8 Cable Connections on Units Without a Remote Controller 2 8 1 Connecting Cables on Units Without a Remote Controller Step Action 1 Connect the input power cables for the power module and the FPS as described in section 2 5 1 2 Connect the HV coaxial cable as described in section 2 5 2 3 Connect the HV output cables and conduit as described in section 2 5 3 4 Plug the male end of the power module sy
56. RNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present 6 System improperly grounded 6 Follow grounding instructions provided in e gun manual for HV If preceding steps have failed to correct the fault perform the following procedure 1 10 Switch off the power supply Disconnect HV output cable from J104 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out If the symptom is not in evidence during Step 3 troubleshoot the emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J104 switch the power supply back on and proceed with the troubleshooting steps described below Possible Cause Procedure HV Current over maximum 7 Confirm HV current on HVRB at TP17 If voltage is greater than 6 36 V value of 636mA DC proceed to next step else skip to step 9 HV current set point 8 Adjust R37 to the set point indicated on the test data sheet provided with tampered changed this unit HV Current sense resistors 9 On HV Output board confirm high HV current on pi
57. The power supply delivers up to 10 kV at 600 mA making it possible to achieve substantial deposition rates in production environments The CV 6SLX provides stable output at all voltage levels rapid arc recovery ease of integration and safety and convenience for operating as well as service personnel The main components of the CV 6SLX power supply are the power module see Fig 1 1 the filament power supply see Fig 1 2 and the control and high voltage cables required to connect them to each other and to the system control computer Standard units also include a remote control unit see Fig 1 3 For a detailed list of the components and cables included with each power supply see section 2 2 For complete installation instructions see Section 2 1 1 1 Power Module Figure 1 1 shows the front panel of the CV 6SLX power module For a detailed description of its control and display features see section 3 2 Figure 1 1 CV 6SLX Power Module Front Panel Clemeacal gt CV 6SLX won D INTERLOCKS OK ARC I OUT OF REGULATION 0101 8241 0 Rev F 1 1 CV 6SLX Technical Manual 1 1 Product Description Section 1 Product Description and Specifications Power Module Specifications Dimensions 8 75 in H x 19 in W x 23 in D Weight 61 Ibs Input Power 208 V Model CV 6SLX 208 V ac 10 5 50 60 Hz 27 A 60 Hz 3 phase delta 4 wire 400 V Model CV 6SLX 400 V ac 10 5 50 60 Hz 15 A 50 Hz
58. acelets and any other metal jewelry before working around high voltage DO NOT WORK ALONE Be sure that all equipment is connected to a power receptacle having the correct polarity and grounding as prescribed by the local electrical codes Refer to the power supply portion of the documentation to determine the proper electrical ground for high voltage components Before servicing any high voltage component switch off the electrical power at the component s main power switch This switch should have a lockout feature Lock the power off and keep the key with you while you are working on the equipment Certain electrical parts e g electrolytic capacitors hold a lethal voltage even after the power is switched off Before entering any service area use a grounding hook to discharge such parts Be sure that these parts are discharged before starting any repairs DO NOT touch high voltage leads unless power is off and a grounding hook is connected to the parts to be serviced The high voltage components of the system should be equipped with electrical interlocks to protect personnel from injury DO NOT ATTEMPT TO DEFEAT OVERRIDE OR BYPASS THESE PROTECTIVE DEVICES Never leave loose ends on high voltage connections Observe the following warning if the system employs Radio Frequency RF power DANGER RF radiation even at modest power levels can cause serious injury If any of the RF components e g the RF
59. across pins 1 and 2 the output voltage is manually controlled with potentiometer R98 Phase Shift Modulator R135 and C73 form a low pass filter on the error amplifier bus to minimize switching noise A voltage limiter is created by R125 R133 and U23 which limits the error amplifier bus to approximately 4 9VDC and protects the input pin of phase shift modulator PSM chip U26 This chip is also damaged by negative voltages on its pins so CR26 is used to clamp negative spikes The PSM chip creates the correctly timed gate waveforms for the Inverter IGBTs relative to the level of the error amplifier bus i e increasing bus creates increasing phase shift The internal error amplifier in the PSM chip is effectively bypassed by being configured as a voltage follower and slightly filtered by C84 Potentiometer R121 R163 and C99 set the PSM chip s internal oscillator frequency which is double the IGBT switching frequency by definition R121 is calibrated so that the switching frequency is set for 25kHz Potentiometer R45 R162 and C98 together set the slope of the comparator voltage ramp which permits adjusting the maximum phase shift or effective duty cycle Currently R45 is set at test for 100 duty cycle R137 and R159 set the delays between the C D and A B gate drive outputs respectively which not only assures no IGBT cross conduction current but also enables zero voltage switching ZVS of the IGBTs under certain conditions The four gate o
60. ains one active IC U1 a 24VDC driver array The driver s gates buffer certain output status signals to the Filament and User Interface connectors providing a CV 6SLX Technical Manual 4 14 0101 8241 0 Rev F Section 4 Theory of Operation 4 3 FPS Theory of Operation 4 3 4 3 1 OVDC or 24VDC output signal depending on the polarity of the gate s input Power for U1 comes from one of three sources selected by the combination of jumpers J6 and J7 Jumper J6 selects between an internal or external source of 24VDC for the driver chip default is internal while jumper J 7 selects between the fused or unfused internal 24VDC supplies default is unfused If J6 is positioned for the external supply the position of J 7 is irrelevant FPS Theory of Operation Overview of FPS Operation The filament power supply module see Figure 4 1 provides emission current control and measurement filament power and control and high voltage switching The filament circuit utilizes high frequency switch mode technology similar to that of the high voltage circuit The filament circuit requires single phase power of approximately 208 230 V Figure 4 1 Filament Power Supply FPS Module Figures 4 2 and 4 4 show the locations of the major components in the standard FPS unit i e with PN 0620 6604 0 and for FPS units with PN 0620 6604 2 Figures 4 3 and 4 5 are top level block diagrams for the same units Primary power enters the FPS via J 3
61. ance with the specifications Purchaser shall be entitled to witness the testing and the results of the testing Upon demonstration of compliance with the specifications by factory testing Seller s liability for failure to comply with the specifications shall terminate In the event that the purchase order does not describe a comprehensive test program for demonstration of compliance with the specifications Seller s test program which may incorporate extrapolation of data or test results based upon similarity of criteria established by Seller shall be used for such purpose If the purchase order does not expressly provide for factory testing compliance with the specifications shall be demonstrated by field testing which shall be conducted by Purchaser at Purchaser s expense Seller shall have the right to a witness the field testing and to verify the results of such field testing b have free access to all data compiled by Purchaser in connection 0101 8241 0 Rev F CV 6SLX Technical Manual with any field test and c conduct its own field test at its own expense during any fourteen day 14 day consecutive period which may be mutually agreed upon by Seller and Purchaser provided however that Seller shall have the right to field test within six 6 months of receipt from Purchaser of any notice of failure to comply with the specifications If compliance with the specifications is to be demonstrated by field testin
62. and both high voltage feedthroughs with a properly connected grounding hook Disconnect the HV coaxial cable from connector J1 on the power module rear panel Wait at least 10 minutes before proceeding to Step 5 Remove the power module s top cover and lay it across the rear of the unit so that it covers approximately 25 of its rear area Switch on the power module s main circuit breaker Required Pre Troubleshooting Procedure for Filament Power Supply The following procedure must be performed prior to any troubleshooting procedure involving removal of the FPS top cover Step 1 2 3 4 5 Action Perform Steps 1 3 of the procedure described in section 5 2 1 Wait at least 10 minutes before performing Step 3 of this procedure Remove the FPS top cover Remove the FPS left side cover If you are troubleshooting a standard FPS unit i e with PN 0620 6604 0 touch a properly connected grounding hook to the HV vacuum relay inside the FPS If you are troubleshooting an FPS unit with PN 0620 6604 2 touch a properly connected grounding hook to the connection for either of the two HV output leads CV 6SLX Technical Manual 5 2 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Figures 5 1 and 5 2 show the front panel controls and indicators on the CV 6SLX power module and the remote control unit Figure 5 3 shows the major power module components that are referred to in the troubleshoot
63. are connected to the Diagnostics and Filament connectors jumpers J5 and J 6 respectively can be changed The default positions for the jumpers are for the ground Miscellaneous Two active high 15VDC to 24VDC signals from the Filament connector indicate whether the customer s Filament module power and load are OK The Regulator buffers those signals with Q5 and Q4 respectively so that the FILAMENT POWER and FILAMENT LOAD FAULT LEDs on the front panel are illuminated red when a not OK condition is present Low leakage diodes are used to protect sensitive signal lines that are connected to circuits off the Regulator These center tapped diodes CR27 29 31 33 37 38 41 and 49 clamp each signal line to the 15VDC or 15VDC supplies when an arc or ground bounce induces an excessive voltage onto that line Pins on J1 unused by the Regulator are connected to open pad holes and referenced with a W designator e g W2 W8 etc These are used to support prototyping changes that require tying previously unconnected signals to the Regulator Finally op amp U30 E and its adjacent components are not used on the current version of the HVPS but can be activated in the future through jumper J 11 0101 8241 0 Rev F 4 13 CV 6SLX Technical Manual 4 2 Power Module Theory of Operations Section 4 Theory of Operation A4 Display and Control Board LEDs and LCD Displays Seventeen LEDs which protrude through the front panel
64. ate U5 C to transition high 0101 8241 0 Rev F 4 9 CV 6SLX Technical Manual 4 2 Power Module Theory of Operations Section 4 Theory of Operation This creates a retriggerable 100 us long output pulse which briefly drives RESET low and clears all the latches This reset one shot is also triggered by an HV Off command routed through jumper J 16 which can be moved so that the one shot triggers from an HV Enable command and OR gate U5 C HV Enable On and Off Commands Functioning as an HV Enable command two pins on the User Interface connector HV ON IN and HV ON IN are brought in via J1 and require momentary shorting to initiate the enable Just like the reset when these two pins are shorted current flows through the emitter diode of optocoupler U10 A which turns on its output transistor and causes HV_EN_IN to transition high Originating an HV Enable command Similarly for the HV Off command two pins on the User Interface connector HV OFF IN and HV OFF IN are brought in via J 1 and require momentary opening to initiate the off request When these two pins are opened current stops flowing through the emitter diode of optocoupler U19 B which turns off its output transistor and causes HV_OFF_IN to transition low HV_OFF_IN transitions high due to inverter gate U13 B Originating an HV Off command The HV Off command can also be initiated locally using the front panel HV OFF pushbutton switch routed onto the Regulator
65. contact closures rated at 2 A 9 220 V ac or at 2A 30 V dc Making Connections to the Power Module System I O Cable PN 6388 2886 0 The power module system I O cable plugs into connector J4 on the power module s rear panel Table 2 3 shows the pinout for control system end of that connector cross references signal names to wire colors and provides additional information about most of the inputs and outputs Table 2 3 Signals Exchanged via the Power Module System I O Cable PN 6338 2886 0 CV 16SLX POWER MODULE 6338 2886 0 DB 25 J4 KV SET IN 1 1 WHT GRN KV SET IN 0 10 VDC in for 0 10 kV ANALOG COMMON 2 WHT ORG gt ANALOG COMMON KV MONITOR OUT 3 3 WHT RED 3 KV MONITOR OUT 1 10 VDC for 0 10 kV mA MONITOR OUT 4 4 ORG WHT 4 mA MONITOR OUT 0 10 VDC for 0 2 0 A REM LCL IN 5 5 WHT BRN 5 REM LCL IN 10 24 V DC high selects remote HV control O SWITCHES POWER 6 6 r 6 MO SWITCHES POWER DIGITAL COMMON 7 7 7 DIGITAL COMMON HV ON IN g 9 WHT BLK 8 HVONN 15 24 V DC input maintained for HV ON HV ON IN 9 9 WHT BLU 9g HVONIN HV ON signal return if externally sourced RESET 10 10 BLU WHT 10
66. cs reveal themselves by high currents in the Inverter When the Arc Bus goes low this triggers the input of one shot U18 B creating a retriggerable 2 21ms long output pulse The active low output Q pulse creates signal SHUTDOWNY its inverse SHUTDOWN through inverter U13 E and a 14VDC pulse SHTDN NEG created by U14 C configured as a bipolar output inverter Signal SHUTDOWN turns MOSFET Q14 off which allows the voltage divider created by R126 and R136 to apply 3 33VDC to the CS Current Sense pin of the PSM chip Since the CS pin is greater than 2 5VDC the PSM chip immediately disables its gate output pins until the CS is pulled once again to OVDC by Q14 when SHUTDOWN goes high after 2 21ms During this 2 21ms the Inverter I GBTs stop switching and providing power to the HV Rectifier which allows the HV arc that started this sequence to clear before the Inverter is reactivated SHUTDOWN turns MOSFET Q15 on which pulls the error amplifier signal to the PSM chip to ground thereby initiating another method of Inverter shutdown SHTDN NEG activates yet another shutdown method by turning both Q18 and Q19 on which short the current and voltage references to ground respectively By requesting no current and no voltage the Inverter switching is effectively shut down here too However Q18 and Q19 have a secondary function as soft starts since the reference signals will slowly charge using R79 C129 and R194 C124 respectively over
67. d a momentary BK contact closure switches on the high voltage Analog Control Input Wire Signal Name Colors REMOTE HV 18 W If the HV control unit s VOLTAGE REQUEST REMote RANGE switch is in the REMOTE position this REQUEST 19 R input linearly controls the high voltage NOTE This input must be 0 V dc to 10 V dc The HV circuit cannot be controlled by a 10 V dc input Digital Outputs HVJ 2 Wire Signal Name Pins Colors Function HV 1S READY 1 R Indicates that all HV control interlocks are made and that the HV GO OFF ENABLE loop is closed 5 BK the HV is ready to be switched on HV IS ON Indicates that the high voltage is on 6 BK Analog Outputs Wire Signal Name Colors ACTUAL HIGH Linearly represents the load gun voltage 0 V 0 Kv 10 V 10 kV VOLTAGE ie a H TOTAL POWER 22 O Linearly represents the total power supply s total current output 0 V 0 A 10 V 1A SUPPLY 23 BK CURRENT 0101 8241 0 Rev F 2 15 CV 6SLX Technical Manual 2 7 Cable Installation on Standard Units Section 2 Installation Making Connections to the Gun Control System I O Cable PN 0620 9730 1 To make I O connections between the control system and the remote controller s gun control panel perform the procedure described below Step 1 Action Plug the circular connector on end of the system I O gun control cable PN 0620 9730 1 into remote controller rear panel connector G1 2 see Figure 2 12 Ma
68. d on the Regulator A 15VDC supply bus referenced to the analog ground is created from the 24VDC bus by DC DC converter U36 which powers circuits on the Regulator as well as on the Inverter through noise filtering inductor L2 and J8 The 24VDC bus is filtered by L3 and C71 before being regulated down to a 5VDC supply by U31 and a 15VDC supply by U28 The 5VDC supply bus referenced to the ground powers circuits on the Regulator as well as on the Display and Control board through J13 The 15VDC supply bus referenced to the analog ground powers circuits on the Regulator as well as on the Inverter through noise filtering inductor L1 and J8 and on the Display and Control board through J13 The output of precision 10VDC reference U22 10V_REF feeds op amp U16 B configured as a voltage follower This provides a slightly less precise 10VDC reference 10 but with much more current capability than the U22 reference The 10 reference is used on the Regulator and the Display and Control board through J13 Jumper J15 can be used to change the voltage level of status signals fed to the active driver on the Interface board which is set to 24VDC by default Two sources of 24VDC power are supplied to the Interface board through J1 The 24VDC supply bus is directly connected through pin 56 while a current limited version is provided through self resetting 0 2ADC fuse F1 through pin 22 To select between which grounds
69. dance with the instructions and Information contained in the user s manual and its referenced documents when such equipment is installed operated and maintained in compliance with such instructions The equipment must be checked periodically Defective equipment shall not be used Parts that are broken missing plainly worn distorted or contaminated shall be replaced immediately Should such repair or replacement become necessary a telephone or written request for service should be made to Temescal Livermore CA a part of Edwards Vacuum Inc The equipment or any of its parts shall not be altered without the prior written approval of Temescal The user and or purchaser of this equipment shall have the sole responsibility for any malfunction which results from improper use faulty maintenance damage improper repair or alteration by any party other than Temescal GUIDELINES AND GOOD PRACTICES 1 Follow applicable clean room procedures smocks masks gloves etc 2 Do not expose the vent and purge valves to excessive pressures The nitrogen line regulator is factory set at 15 psi and must not be adjusted above 20 psi 3 Prevent oil grease water sweat etc from getting into the vacuum chamber 4 Replace the source tray shield correctly to ensure that the ceramic parts or the high voltage feedthroughs are protected from being coated 5 Clean all mechanical parts and seals with lint free paper cloth soaked with isopropyl alco
70. dc Semi 6024 7351 0 Diode 1600 V 56A 6024 7364 0 Power Entry Module 6024 7312 0 Power Supply 24 V dc 2 7A 6024 7352 0 IGBT 6024 7330 0 Aux Transformer 480 VCT In 240 VCT Out 6024 7319 0 Choke 1 2 mH 4 8 mH 6024 7307 0 Circuit breaker 15 A 600 V ac 3 Pole 6024 7383 0 Fan 24 V dc 325 cfm 6024 7379 0 Line Filter 6024 7310 0 HV Transformer 6024 7355 0 Display and Controls PCB 6024 7345 0 Interface PCB 6024 7346 0 HV PCB 6024 7390 0 Regulator PCB 6024 7344 0 Inverter PCB 6024 7350 0 CV 6SLX Technical Manual 5 24 0101 8241 0 Rev F REAR PANEL DIAGNIOSTICS DB37 Cable Shield Analog Controls 0 10 VDC HV Output Voltage HV Output Current HV Inverter IGBT Temperature HV Inverter Rail Voltage Arc Counter Integrator HV Inverter PWM Duty Cycle EG Filament Current EG Emission Current Analog Common Digital Controls 0 24 VDC 24VDC Control Power Over Temp Trip External Interlocks HV Enable ready HV Go ON Over Current Trip Over Voltage Trip Arc Counter Active Out of Regulation EG Filament Status EG Filament Power Status Digital Common Pin Range 1 MOON DOF O N 18 19 20 23 N A 0 10 VDC 0 10 VDC 0 10 VDC 0 10 VDC 0 10 VDC 0 5 VDC 0 10 VDC 0 10 VDC N A 0 10 VDC 0 24 VDC 0 24 VDC 0 24 VDC 0 24 VDC 0 24 VDC 0 24 VDC 0 24 VDC 0 24 VDC 0 24 VDC 0 24 VDC N A Proportion N A 0 10 KVDC 0 1 000 maDC 0 160C 0 1 000 VDC 0 480S 0 100 0 50 AAC 0 2 000
71. ects the filament power with the negative HV and connects the combination with the filament via a two conductor cable The high voltage 0 10 kV from the HV Power Supply enters the FPS via J301 On standard FPS units PN 0620 6604 0 the high voltage is routed to the vacuum relay K101 On such units K101 either connects the negative HV to the secondary of the filament transformer or applies a ground to the secondary of the filament transformer The relay is driven from the Filament Supply PCB via J103 pins 5 and 6 FPS units with PN 0620 6604 0 omit the vacuum relay On those units the high voltage is connected to the secondary of the filament transformer T1 which has a 10 1 ratio The filament transformer connects the high voltage low current output of the FPS to the filament with low voltage high current filament current superimposing the negative DC HV on the AC filament current Safety Interlocks The safety interlocks insure that circuits are safely connected and that the box is closed before operation can continue Safety interlocks are provided by switches S101 and S102 in the filament output section of the FPS These interlocks are routed to the Filament Supply PCB via J103 pins 3 and 4 and are connected in series with the cover interlocks on the CV 6SLX power module Therefore in order for FPS operation to take place the FPS covers and the power module covers must be in place closing the interlock switches and the FPS cover inter
72. eferences signal names to wire colors CV 6SLX Technical Manual 2 20 0101 8241 0 Rev F Section 2 Installation 2 9 Initial Power Up Maintenance Power Up Procedure Table 2 4 Signals Exchanged via the FPS System I O Cable PN 6388 2884 0 FILAMENT POWER SUPPLY DB 15 J101 6338 2884 0 CONTROL PWR GND 1 1 BLU 1 To power ground REQUEST SIGNALS COM 2 2 GRN 2 To analog ground MONITOR SIGNALS COM 3 3 ORG 3 To analog ground FIL OK GUN IS ON 4 4 BRN 4 Outputs 24 V dc when filamentis OK and gun is on FIL BIAS SET SELECT 5 5 BRIT 5 24 V dc input activates Filament Bias Set input GUN ENABLE 6 6 ORG WHT 6 24 Vdc input enables FPS functions GUN IS READY OUT 7 7 GRNAWHT 7 Outputs 24 V dc when gun is enabled CONTROL DC PWR 24V 8 8 RED 8 Provides 24 V dc to external control circuits EMISSION MONITOR OUT 9 9 RED WHT 9 0 10 V dc output 0 to max emission current readout EMISSION REQUEST IN 10 10 BLUIWHI 10 0 10 V dc input 0 to max emission current request FILAMENT CURRENT MON 11 11 VIO 11 0 10 V dc output 20 50 A on 0 and 1 model FPS units 0 100 A on 2 FPS units FILAMENT Blas SETIN 12 12 VO WHT _ 12 9 10 y gc input 0 50 A on 0 and 1 model FPS units 0 100 A on 2 FPS units AUTO BIAS INDCR HI 13 19 BEN 13 24 V dc output Auto B
73. el 2 Insert the threaded end of the conduit elbow into the hole in the conduit panel and secure the elbow with the nut provided as shown In Figure 2 8 Figure 2 8 Conduit Properly Secured to FPS Conduit Panel 3 Figure 2 9 shows a portion of the FPS rear panel with the conduit panel removed Plug the banana connectors on the ends of the HV cables into the receptacles shown in the illustration 0101 8241 0 Rev F 2 11 CV 6SLX Technical Manual 2 7 Cable Installation on Standard Units Section 2 Installation Figure 2 9 FPS Receptacles for Banana Plugs on HV Output Cables 4 Replace the conduit panel taking care to secure it in place with all four screws Connecting the HV Ouput Cables and Conduit at the Source Tray Connect the other end of the HV output cables to the HV feedthroughs in the source tray following the instructions provided below CAUTION If the vacuum system has previously been in use with a high voltage power supply then before performing this procedure touch the source tray and the terminals on both HV feedthroughs with a properly connected grounding hook Step Action 1 Remove the nut that secures one of the feedthroughs to the underside of the source tray 2 Install the HV conduit bracket PN 0040 9982 0 supplied with the unit and secure it with the nut removed in Step 1 as shown in Figure 2 10 Figure 2 10 HV Conduit Bracket Properly Installed on HV Feedthrough 3 Using the nut su
74. en a latching Power Supply fault has occurred e the RESET signal supplied via Pins 10 and 11 on power module rear panel connector J 4 e the HV ON signal supplied via Pins 8 and 9 on the same connector If the Out of Regulation condition occurred because of intermittent arcing the HV should come back on The same applies to Power Supply faults that occur because the operator has switched off the high voltage by pressing the HV OFF button on the power module front panel In the case of an Out Of Regulation state triggered from a dead short it will be necessary to identify and eliminate the source of the short which may be due to a flake in the vacuum chamber or to a defect or fault in the HV circuit Power Supply faults triggered by latching faults other than Out Of Regulation will also require troubleshooting For troubleshooting instructions covering these Cases see Section 5 CV 6SLX Technical Manual 3 12 0101 8241 0 Rev F 4 Theory of Operation 4 1 Section Overview This section provides separate theories of operations for the major modules of the CV 6SLX power supply Section 4 2 contains a theory of operation for the power module and section 4 3 covers the FPS in detail 4 22 Power Module Theory of Operations 4 2 1 Top Level Theory Several physical and functional assemblies form the HVPS Referring to the top level schematic Figure 6 1 above AC line power is connected to the HVPS through terminal block TB1 Line filter
75. er interface 0101 8241 0 Rev F 3 11 CV 6SLX Technical Manual 3 7 Responding to Out of Regulation Conditions and Power Supply Faults Section 3 Power Supply Operation 3 7 Adjusting the Emission Current On units without a remote gun controller the emission current can be adjusted only by varying the EMISSION REQUEST IN signal which is supplied via Pin 10 FPS rear panel connector J 101 see Table 2 4 Responding to Out of Regulation Conditions and Power Supply Faults During normal operation the Out of Regulation LED on the power module front panel will flash intermittently as arcs occur The flashing will increase in frequency as arcs increase in frequency If arcs become too frequent are persist at too high a rate for too long the internal OUT OF REGULATION is asserted latching off the HV and triggering a Power Supply fault The Out of Regulation LED will then glow steadily To switch the HV back on when a the power supply is in an Out Of Regulation state or when a latching Power Supply fault has been triggered by any other condition the RESET signal and the HV ON signal must be asserted in that order On standard units the operator can simply press the HV OFF button which supplies the RESET signal when the HV is off and then press the ON button on the HV control unit s front panel see Figure 3 4 On units without a remote gun controller the following signals must be supplied in order for the HV to be switched on wh
76. firm input line voltage 2 Faulty or loose connections 2 Make sure that all HV and FPS connections are correctly and securely made 3 Inverter temperature fault 3 On HVRB check TP16 for a maximum of 10V 60 If TP16 gt 10 V DC proceed to next step else skip to step 5 4 Temperature sensor above maximum 4 Replace temperature sensor or provide adequate cooling Clean value or defective any dirt collected near the sensor 5 Heat sink temperature fault 5 On HVRB check TP65 for 15 V DC to confirm heat sink fault If TP65 15 V DC proceed to next step else skip to step 7 6 Heat sink overheated or thermostat 6 Provide adequate cooling for heat sink Clean any dirt collected on faulty or near the heat sink Replace thermostat if necessary 7 Cooling fan fault 7 Visually verify operation of fan Clean any dirt or clog near the fan Cooling fan fault alarm 8 On HVRB check pin J8 6 for 24 V DC to confirm fan fault Fan drive voltage not present 9 See Table 2 0101 8241 0 Rev F 5 19 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 24 AUXILIARY SUPPLY LOW LED Lights Red Symptom Control Supply voltage is below minimum value 1 Confirm low auxiliary power On HVRB check pin J8 27 for 24 V DC Inverter Auxiliary power fault 3 Check fuses F1 F2 and F3 on Inverter board 4 AC Control transformer faulty 4 Check input to control transforme
77. from the standard CV 6SLX power supply which comes with a remote controller For a detailed list of the components and cables included with each version of the power supply see section 2 2 0101 8241 0 Rev F 1 3 CV 6SLX Technical Manual 1 1 Product Description Section 1 Product Description and Specifications CV 6SLX Technical Manual 1 4 0101 8241 0 Rev F 2 INSTALLATION 2 1 2 2 2 2 1 Section Overview This section describes the installation procedures required for proper operation of the CV 6SLX power supply The topics covered are Section 2 2 List of Components and Cables Supplied with the Unit Section 2 3 Rack Mounting the Power Module Section 2 4 Rack Mounting the Remote Control Unit Section 2 5 Mounting the Filament Power Supply Section 2 6 Grounding Requirements Section 2 7 Cable Installation on Standard Units Section 2 8 Cable Connections on Units Without a Remote Controller Section 2 9 Initial Power Up Maintenance Power Up Procedure To install a standard CV 6SLX unit i e a unit equipped with the remote gun controller follow the instructions in sections 2 3 through 2 7 plus those in section 2 9 skipping section 2 8 To Install a CV 6SLX unit without a remote controller follow the instructions in sections 2 3 2 5 2 6 2 8 and 2 9 skipping sections 2 4 and 2 7 CAUTION Before beginning the installation procedure make sure that the facility circuit breaker supplying power to the
78. g Purchaser shall conduct and complete all field testing within sixty 60 days of the original shipment of the apparatus and shall promptly notify Seller of any failure to comply with the specifications Seller shall not be liable for any failure to comply with the specifications demonstrated by field testing unless it receives notice thereof within sixty seven 67 days of the date of original shipment of the apparatus In the event that factory testing or field testing does not demonstrate compliance with the specifications Purchaser s sole and exclusive remedy under the above warranty is limited to at Seller s option repair or replacement of defective parts or components or return to Purchaser of the purchase price of the apparatus In the event that Seller elects to refund the purchase price the apparatus shall be the property of Seller Any obligations on Seller s part under this performance warranty are subject to the following requirements x the nature of the failure of the apparatus to comply with the specifications must be promptly reported to Seller in writing y if the apparatus has been delivered and field tested Purchaser must return the apparatus or any part or component to Seller upon its request not later than sixty seven 67 days after initial shipment to Purchaser to the address designated by Seller during normal business hours transportation charges prepaid and z upon examination and testing by Seller
79. g all 120s If the arcing frequency drops below 100Hz the capacitors are discharged to ground by Q16 and will start the charge sequence from OVDC the next time the frequency exceeds 100Hz ARC DUR is fed to the Diagnostics connector through current limiting resistor R97 via J 3 and J 1 Another outcome of the Arc Bus going low is the creation of a retriggerable two second output pulse produced by one shot U39 B This two second signal is fed to the Diagnostic connector via Q28 and J 1 Out of Regulation Monitoring Since there are separate voltage and current error amplifiers these can be used to determine if the HVPS is able to regulate its output to the requested voltage setpoint When the HV output voltage has not reached or cannot reach its given setpoint the voltage error amplifier will go to its positive rail to try and force the Inverter to its maximum duty cycle During this condition if the Inverter and HV Rectifier can achieve 600mA of output current the current error amplifier will be some fixed value much lower than its positive rail and the railed voltage error amplifier This will create current through R104 and the emitter diode of U19 A thereby turning on the optocoupler s output transistor and switching OOR high OOR going high briefly flashes the ARC OUT OF REGULATION LED yellow on the front panel via OR gate U37 E and J13 and it briefly flips its status pin on the Filament Interface connector via Q2
80. ge Power Module t ce s a a 1 wide copper strap 035 050 0 9 1 3 mm thick user supplied Viol gm rm pe c tmm a TT iin apesxsucene 3 wide copper strap I PN 5621700922 if lt yr 3 wide copper strap PN 5621 0032 2 Bolt copper straps to clean bare metal on frame member To facililty low Z grounding point see Figure 2 6 2 6 3 Power Module Grounding Make connections to the power supply s grounding lugs as shown in attached drawing 620 9692 following the procedure described below 0101 8241 0 Rev F 2 5 CV 6SLX Technical Manual 2 6 Grounding Requirements Section 2 Installation Step Action A roll of 3 wide copper strap PN 5621 0032 3 is supplied with the unit Cut off a length of this strap that will easily extend from the grounding lugs on the power module s rear panel to the operator station s frame Secure one end of this strap to the grounding stud labeled RF GND on the power module s rear panel see Figure 2 4 Figure 2 4 Power Module Rear Panel J1 r woe J 3 FILAMENT POWER SUPPLY a 65 5g Li DIAGNOSTICS 1 208 54VAC RF GND nup 3 r 1 BA 50 00 HZ m o Ls w Q D B UEM D o B EE EET Ee T i JA m sss Qy A HVPE CONTROL I O E SEE uum p TT Sk N JN PM NN ERN SS 4 b aff Jo E Je a e m e ka N29 PN p k w x Z Pook E L n SN S a i p LUN a mE
81. he symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out If the symptom is not in evidence during Step 3 troubleshoot the emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J104 switch the power supply back on and proceed with the troubleshooting steps described below Possible Cause Procedure HV Voltage over maximum 7 Confirm HV voltage on HVRB at TP12 for 1V 1KV If voltage is less value 10596 of set point than 10596 of setpoint proceed to next step else skip to step 9 HV voltage set point 8 Adjust R7 to the set point indicated on the test data sheet provided with tampered changed this unit Monitor TP1 to while adjusting R7 HV Voltage sense resistors 9 On HV Output board confirm high HV overvoltage on pins J5 4 and J5 damaged 6 Turn the power off measure resistors R8 HV Output circuit faulty 10 Replace HV Output Board 0101 8241 0 Rev F 5 15 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 18 SETPOINT OVERVOLTAGE LED Lights Red Symptom HV Output voltage setpoint is above 10 5KV Possible Cause Procedure 1 HV set point is above 10 5KV 1 Using the potentiometer on the front panel of the power module or HV Gun Remote controller adj
82. hen that trip point is exceeded When the contacts are open the SET pin of U10 C falls to ground thereby latching its output high This signal THERMO FAULT gets passed to the Regulator on 11 and triggers an Overtemperature indicator All latches on the Inverter board are reset by the Regulator through signal RESET on J11 The active temperature sensor is also mounted to the Inverter heat sink but is closer to the IGBTs and produces a linearly scaled output voltage relative to its temperature 10mV C This analog temperature signal TEMP OUT is passed directly to the Regulator for processing Auxiliary Power and Rail Voltage Monitor Auxiliary 24VDC power is fed to the Inverter board on J5 as power signal AUX 24 which along with being passed directly to the Regulator then powers two items the 24V bus through CR2 and the DC fan through low pass filter L1 and C20 to J4 If the rotor of the fan becomes jammed its alarm output on J4 is sent to the Regulator and triggers an Overtemperature indicator The 24V bus is connected back to the Regulator on J11 and also powers 24V to 15V DC DC converter U1 This isolated 15V supply powers the rail voltage sense circuitry Since the Inverter rail is not ground referenced and floats several hundred volts from it some form of isolation barrier is needed to scale and convert the rail voltage magnitude to the ground referenced Regulator R157 165 R176 and C96 form a filtered 89 1 voltage divider ne
83. her of two ways Either the operator can press the HV OFF button or the control system can assert the RESET signal at Pins 8 9 of power module rear panel connector J 4 see Table 2 3 If the RESET attempt is successful all status and interlock LEDs on the power module should be green except for HV ON 2 If the reset attempt has been successful the control system must assert the HV GO ON signal at Pin 8 of power module rear panel connector J 4 If this sequence of operations fails to restart the HV further troubleshooting will be required to clear the underlying fault condition Adjusting the High Voltage Level The HV level is adjusted by varying the external kV SET IN signal 0 10 V dc 2 0 10 kV which is supplied via Pin 1 of power module rear panel connector J 4 see Table 2 3 CV 6SLX Technical Manual 3 10 0101 8241 0 Rev F Section 3 Power Supply Operation 3 6 Routine Power Supply Operation on Units Without a Remote Gun Controller Switching Off the High Voltage The high voltage is automatically switched off if e any internal or external interlock is no longer made e the power supply goes into an HV Out Of Regulation state e alatching Power Supply Fault occurs The high voltage can be switched off by the control system in either of two ways 3 The control system can momentarily de assert the HV GO ON signal supplied via Pins 8 9 of power module rear panel connector J 4 see Table 2 3 4 The control system ca
84. hol IPA Dispose all IPA exposed cleaning paper cloth in a fireproof container while ensuring proper safety precautions are being followed Polish scratched surfaces with Scotch Brite taking care not to produce any cross scratches Shaft seals are all ferromagnetic No lubrication is required Check the chamber door s seal and sealing surfaces each time before closing it Oe ae SON Check and clean with IPA the source tray seals and sealing surfaces each time before raising the source tray into place 10 Train staff by competent personnel DO NOT allow staff to operate or do maintenance and recovery work on the machine until they are trained by competent personnel 11 Document all alarms deviations breakdowns and servicings done on either a hardcopy or an electronic equipment log system CV 6SLX Technical Manual 0101 8241 0 Rev F HEALTH HAZARD The condensates deposited on the tank walls of a vacuum system are generally in the form of extremely fine particles The nature as well as the form of the materials poses the following potential health hazards a b c d Inhaling fine particles powder may cause damage to the lungs To help prevent this wear a protective respirator mask with fine filter that has been approved by the National Institute for Occupational Safety and Health NIOSH and the federal Mine Safety and Health Administration MSHA Some substances are toxic and inhaling them should be av
85. ias sequence is complete GUN IS ON OUT 14 14 BLKWHT 14 Outputs 24 V dc when gun is on GUN GO ON IN 15 15 YELLOW 15 24 V dc input switches on the gun SHELL 9HIELD sHELL 2 9 InitialPower Up Maintenance Power Up Procedure Follow the procedure described below when powering up the unit for the first time and whenever it has been powered down and lock tagged out at the facility breaker e g for maintenance Step Action 1 Remove the lockout tagout device from the facility circuit breaker supplying power to the CV 6SLX 2 Set the facility breaker switch to the ON position 3 Set the circuit breaker switch labeled AC MAINS on the power module front panel to the ON position 4 Set the FPS ON OFF switch see Figure 2 6 to the ON position Follow the normal operating instructions to switch on and control the HV the filament bias current and the emission current For operating instructions for standard units see section 3 5 For operating instructions for units without a remote gun controller see section 3 6 0101 8241 0 Rev F 2 21 CV 6SLX Technical Manual 2 9 Initial Power Up Maintenance Power Up Procedure Section 2 Installation CV 6SLX Technical Manual 2 22 0101 8241 0 Rev F 3 3 1 3 2 Power Supply Operation Section Overview This section covers the following topics Section 3 2 Power Module Controls and Indicators Section 3 3 Switches and Indicators on Filament Power
86. ils to glow Green Possible Causes Procedure 1 Faulty or loose cable connections Make sure that all power module and FPS cable connections are correctly and securely made 2 Confirm Gun Ready signal Refer to Table 5 3 Emitter damaged Follow instructions in gun manual to troubleshoot emitter issues 4 No HV relay control voltage On FPSB check pins J 103 6 for 24 V DC If signal is present replace HV relay else replace FPSB 5 Defective HV relay in FPS 5 Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present 6 Gun Enable Go On signal not present 6 On FPSB check J 101 Pin 15 for 24 V DC If signal is present replace FPSB 7 Confirm GUN IS ON signal 7 On FPSB check J 101 Pin 14 for 24 V dc If signal is present replace FPSB If the preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable 3 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 f the symptom is n
87. ing tables Figure 5 1 Control Display Features on CV 6SLX Power Module Front Panel OUTPUT VOLTAGE 500 CV 6SLX worl HVON POWERON 8 INTERLOCKSOK POWER SUPPLY FAULT 4 gt ARC OUT OF REGULATION RAIL UNDERVOLTAGE i INVERTER OVERLOAD HV OVERCURRENT 8 OVERTEMPERATURE HV OVERVOLTAGE B AUXSUPPLYLOW SETPOINT OVERVOLTAGE M 8 FILAMENT LOAD FAULT OUTPUTARCING FILAMENT POWER HV OUT OF REGULATION EXTERNAL CONTROL FAULT GUN CONTROL wee sl Y yx 44 52 Son VAC REM LOCAL o o 2 POSITION POS AUX 4 4 EMISSION CURRENT OFF ON 0101 8241 0 Rev F 5 3 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Figure 5 3 Major Components Inside CV 6SLX Power Module r ku HV Output Transformer Control Transformer T2 y 3 i f Capacitor Fa Voltage Divider Resistors CV 6SLX Technical Manual 5 4 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Abbreviations TCS Temescal Control Software HVRB High Voltage Regulator Board FPSB Filament Power Supply Board FPB Front Panel Board FPS Filament Power Supply Table 1 General Condition No input power indicated Symptoms TCS PSU1_RDY_ALM Power Supply Control Not Ready Timeout Alarm Remote Control PWR LED fails to Light displays are dark Power Module POWER ON LED Fails to
88. ing the FPS Input Power Cable PN 6622 0100 20 The FPS power cable PN 6622 0100 20 is provided with the unit Plug one end of this cable Into rear panel connector J2 on the CV 6SLX power module see Figure 2 4 Plug the other end Into the power receptacle on the FPS front panel see Figure 2 6 CAUTION Make sure that the ON OFF switch on the FPS front panel see Figure 2 6 remains in the OFF position until instructed otherwise in section 2 9 Figure 2 6 Input Power Receptacle on FPS Front Panel lem eace tc s ACU HIE v TEE EET GE FPS P ON OFF Switch gt Plug in 208 V power cable PN 6622 0100 20 here 2 7 2 Connecting the HV Output Cables and Conduit PN 0620 9654 0 The cables that conduct the high voltage from the FPS to the source tray are contained in a length of flexible conduit The part number of the HV cable conduit assembly is 0620 9654 0 In connecting this assembly to the FPS and to the source tray follow the instructions provided below Connecting the HV Output Cables and Conduit to the FPS Connect the HV cable conduit assembly to the FPS rear panel see Figure 2 7 following the procedure described below CV 6SLX Technical Manual 2 10 0101 8241 0 Rev F Section 2 Installation 2 7 Cable Installation on Standard Units Step Action 1 Remove four screws that secure the conduit panel to the FPS rear panel as shown below Figure 2 7 Removing the FPS Conduit Pan
89. ions and or troubleshoot HV Gun remote controller 5 HV Enable signal on HVRB 5 On HVRB check TP26 for HV Enable signal If signal is missing replace HVRB else disrupted hard reset power supply If the preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable 3 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 f the symptom is not in evidence during Step 3 troubleshoot the HV path and emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J101 switch the power supply back on and proceed with the troubleshooting steps described below 6 HV Resistor damaged or 6 Remove power from power module Remove top cover and visually inspect HV defective Output section Check resistors R6 and R7 for short or open circuit 0101 8241 0 Rev F 5 7 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 7 General Condition Gun does not switch on Symptoms TCS SRC1 GON ALM Source 1 Control Go On Timeout Alarm Remote Control Gun Enable Go On LED Fa
90. ircuit with the primary leakage inductance of the HV Transformer The resonant circuit both smoothes HV Transformer primary current wave shapes and enables zero current switching in the Inverter IGBTs which reduces EMI and switching losses respectively HV Rectification A full wave voltage doubler is employed on the HV Output board to produce a rectified output voltage that is double the peak to peak voltage across the HV Transformer secondary winding Two series strings of high speed diodes CR1 13 and CR14 26 as well as C28 and C29 form this doubler circuit Capacitors C1 26 are used to evenly distribute the reverse AC voltage across the diodes Each diode is subjected to less than 6296 of its rated reverse voltage High voltage film capacitor C27 is used as a storage element reducing the output ripple voltage High power wire wound resistors R9 14 carry all of the output current and are used to limit the current delivered from output capacitors C27 29 in the event of a single load arc or time limited continuous arcing The Regulator will actively terminate the HV output before these resistors overheat from their arc limiting duty The final output is connected to the rear panel HV cable well through J 3 Voltage and Current Feedback Scaled voltage and current feedback are supplied to the Regulator through connector J5 R1 C36 and C38 form a frequency compensated voltage feedback network to the Regulator which coupled with a low side res
91. ire any routine maintenance aside from the cleaning of the screens Air Flow Requirements The inverters have a temperature sensor that will shut down and latch out further operation if an overtemperature condition should occur The customer must ensure a free flow of air is maintained through the cabinet and keep the ambient air temperature at the input to the power supply below 104 F 40 C All air passages must be unobstructed If air filters are used on the cabinet air input they should be checked on a regular schedule for dirt and dust accumulation CAUTION Cabinet doors and panels must not block air vents located on the unit s front and rear panels providing at least 2 of clearance from these vents A fan located on the rear panel pulls air in through the vents on the front panel and exhausts warmer air through the rear vent 2 4 2 5 Rack Mounting the Remote Control Unit A mounting kit PN 0411 6183 2 is provided with the unit to facilitate rack mounting the remote controller in a standard 19 electronics rack First assemble the kit s mounting hardware inside the rack Then secure the remote controller to the mounting hardware Mounting the Filament Power Supply Install the FPS module in the vacuum cubicle within 6 feet of the high voltage feedthoughs that supply power to the e beam gun To do so first drill four holes at the installation location in the pattern shown in Figure 2 1 Then place the holes in
92. is lit press the HV control panel s ON button to switch on the high voltage Switching off the high voltage by pressing HV OFF button on the power module front panel triggers a latching Power Supply fault In that event or if a latching Power Supply fault has occurred for any other reason you must perform the following procedure to switch on the HV Step Action 1 Press the HV OFF button on the power module front panel again When the HV is off pressing that button asserts the RESET signal 2 If the keyswitch on the HV control panel see Figure 3 4 is not in the ON position turn it to that position The HV Ready light inside the HV control panel s OFF button should then light 3 If the HV Ready light is lit press the HV control panel s ON button to switch on the high voltage Adjusting the High Voltage The high voltage can be adjusted in either of two ways depending on whether the REM LOC switch on the HV control panel is in the REMote or the LOCal position 1 Switch in LOCal position Using a flat bladed screwdriver turn the H V ADJ pot 2 Switch in REMote position Vary the REMOTE HV REQUEST signal which is supplied via G1J 2 Pins 18 and 19 on the remote gun controller s rear panel see Figure 2 15 Switching Off the High Voltage The high voltage is automatically switched off if e any internal or external interlock is no longer made e the power supply goes into an latched HV Out Of Regulation state e a latching Po
93. istance of approximately 96kQ on the Regulator produces an equal DC and AC voltage division ratio of roughly 200 1 Resistor R6 protects the voltage feedback capacitors from damage induced during HV output arcing by inherently limiting the arc current to 0 33A peak Spark gap E2 protects the Regulator input from over voltage in the event of a feedback network component failure Parallel resistors R2 and R3 along with noise filtering components R4 R5 and C37 create a voltage signal relative to the current delivered by the HV Output board to the load This ratio 3 75V 1A provides a voltage signal to the Regulator for processing Similarly to E2 E1 protects the Regulator input from over voltage should a current feedback component fail Chassis ground is solidly connected to the HV Output board through a conductive standoff attached to the bottom side of the board which helps reduce noise and ground bounce in the control circuits Terminal J4 is also connected to this ground plane Pin 6 of J5 is not connected on this version of the HV Output board and has no functionality despite its node name 0101 8241 0 Rev F 4 5 CV 6SLX Technical Manual 4 2 Power Module Theory of Operations Section 4 Theory of Operation A3 Regulator kV Feedback and Control Output voltage control of the HVPS is the primary function of the Regulator and starts with the user programming the desired voltage setpoint This is accomplished either locally or remo
94. ke the required I O connections between the control system and the unterminated end of the system I O gun control cable For detailed information about these I O connections see Figure 2 15 and Table 2 2 Figure 2 15 Signals Exchanged via the Gun Control System I O Cable PN 0620 9730 1 GUN IS READY GUN IS ON ACTUAL EMISSION CURRENT 0 to 10 V dc Pin No Wire Color R BK W BK G O I BK BR R Shield Shield HERES 9 1 REMOTE GUN GO OFF ENABLE REMOTE GUN GO ON TANK INTERLOCK VACUUM GAUGE INTERLOCK AUXILIARY INTERLOCK if not used jumper Pins 18 and 19 GUN WATER INTERLOCK POSITION INTERLOCK 0 to 10 V dc FILAMENT CURRENT MONITOR FILAMENT BIAS SET 0 to 10 V dc REMOTE EMISSION CURRENT REQUEST 0 to 10 V dc CV 6SLX Technical Manual 2 16 0101 8241 0 Rev F Section 2 Installation 2 7 Cable Installation on Standard Units Table 2 2 Additional Details About Signals Exchanged via the Gun Control System I O Cable Digital Interlock Inputs Required G1J2 Wire Signal Name Pins Colors Function TANK INTERLOCK 13 O Prevents the gun from being switched on unless all vacuum system doors and covers are 14 BK closed and locked VACUUM GAUGE 15 W Ensures that product chamber ion gauge is on before gun is switched on INTERLOCK 16 R 18 AUXILIARY G Customer defined Generally used with multipocket sources to ensure that the beam is OFF INTERLOCK 19 R 1
95. lation condition Symptom FPS High Voltage LED does not Light FPS not powered up Refer to Table 28 1 1 2 High Voltage IS ON signal not 2 High voltage is not switched ON present 3 3 Confirm HV ON signal On FPSB check pins J3 8 and J3 9 for HV ON signal 4 High Voltage IS ON signal on FPSB 4 On FPSB check pins J5 1 for 24 V DC If signal is not present not present replace FPSB Table 15 RAIL UNDER VOLTAGE LED Lights Red Symptom Rail Voltage under 430 V DC Possible Cause Procedure System improperly grounded for HV Follow grounding instructions provided in e gun manual Incorrect line voltage Confirm line voltage as per manual Incorrect line phase Confirm line phase as per specifications s ops Re Tw pes ps Faulty or loose cable connections Make sure that all power module and FPS cable connections are correctly and securely made If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply Disconnect HV output cable from J104 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 Ifthe symptom is not in evidence during Step 3 troubleshoot the emitter assembly fo
96. llowing the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J104 switch the power supply back on and proceed with the troubleshooting steps described below Rail Voltage Below 430 V DC 5 Confirm rail voltage on HVRB TP22 If voltage is greater than 4 3 V DC proceed to next step else skip to step 7 6 Rail voltage set point tampered 6 Adjust R1 to the set point indicated on the test data sheet provided changed with this unit 7 Rail resistors damaged 7 On Inverter board confirm low rail voltage on TP38 Turn the power e off measure series resistors R159 through R165 for a total resistance of 1 743KOhm 8 Inverter capacitors faulty 8 Replace Inverter board 0101 8241 0 Rev F 5 13 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 16 HV OVERCURRENT LED Lights Red Symptom HV Output current is above 636 mA 1 Incorrect or fluctuating line Confirm input line voltage voltage 2 Faulty or loose cable Make sure that all power module and FPS cable connections are correctly connections and securely made 3 Emitter damaged Follow instructions in gun manual to troubleshoot emitter issues 4 No HV relay control voltage 4 On FPSB check pins J103 6 for 24 V DC If signal is present replace HV relay else replace FPSB 5 Defective HV relay in FPS 5 Check for presence of high voltage at output of FPS WA
97. lock switches must be connected to the Filament Supply PCB CV 6SLX Technical Manual 4 22 0101 8241 0 Rev F 5 1 5 2 Troubleshooting Section Overview This section covers the following topics 5 2 Troubleshooting Procedures 5 3 Filament Power Supply Fuse Replacement Procedure 5 4 Suggested Spare Parts DANGER HIGH VOLTAGE Removal of either the power module top cover or the FPS top cover can expose personnel to dangerous or lethal voltages Particular care should be taken regarding high voltage which can arc over a considerable distance It is not necessary to be in physical contact with a live terminal in order for an arc to send a lethal high voltage discharge through a person s body Troubleshooting Procedures This section consists of a series of tables that describe troubleshooting procedures for the CV 6SLX Each table is organized around an LED state or a operational symptom that should be easily identifiable to the operator For a detailed explanation of power module front panel LEDs see section 3 2 2 p 3 2 The titles of the troubleshooting tables are Table 1 No input power indicated Table 2 Fan not rotating Table 3 One or more power supply interlocks not made Table 4 Power supply fails to achieve HV Ready state Table 5 Power supply fails to achieve Gun Ready state Table 6 HV does not switch on Table 7 Gun does not switch on Table 8 No filament current after GUN ON state achieved Table
98. ls and workmanship The foregoing warranty is subject to the condition that the apparatus part or component be properly operated under conditions of normal use and that regular periodic maintenance and service be performed or replacements made in accordance with instructions provided by Seller The foregoing warranty shall not apply to any apparatus part or component that has been repaired other than by Seller or an authorized representative of Seller or in accordance with written instructions provided by Seller that has been altered by anyone other than Seller or that has been subject to improper installation or abuse misuse negligence accident or corrosion Purchaser s sole and exclusive remedy under the above warranty is limited to at Seller s option repair or replacement of defective parts or components or return to Purchaser of the price of the apparatus Any such obligation on Seller s part is subject to the following requirements x the defect must be promptly reported to Seller y if so advised by Seller Purchaser must return the part or component with a statement of the observed deficiency not later than seven 7 days after the expiration date of the warranty to the address designated by Seller during normal business hours transportation charges prepaid and z upon examination by Seller the part or component must be found not to comply with the above warranty Return trip transportation charges for
99. n assert the HV GO OFF signal supplied via Pins 17 18 of power module rear panel connector J 4 3 6 3 Switching the Filament Current On Off NOTE In order for the filament current to be switched on the FPS module s power cable must be properly connected to a source of 220 V ac power and the module s ON OFF switch must be in the ON position Switching On the Filament Current The gun i e filament current can be switched on only by an externally supplied GUN GO ON signal which must be applied via Pin 15 of FPS front panel connector 101 see Table 2 4 NOTE Once HV and gun are both switched on emission current will ramp up to requested level after a 10 15 second delay Switching Off the Filament Current The filament current can be switched off only by de asserting the GUN GO ON IN signal which Is supplied via Pin 15 of FPS front panel connector J 101 see Table 2 4 3 6 4 Adjusting the Filament Bias Current and the Emission Current Adjusting the Filament Bias Current On units without a remote gun controller the bias current can be adjusted only by varying the FILAMENT BIAS SET IN signal which is supplied Pin 12 on the FPS front panel connector J 101 see Table 2 4 NOTE When the FIL BIAS SET SELECT signal supplied via J 101 Pin 5 is low the Autobias circuit of the FPS controls the bias current When the FIL BIAS SET SELECT signal is high the operator can control the bias current from the control system s us
100. nding hook provided with the power supply in the vacuum cubicle attaching its pigtail to the vacuum cubicle s central grounding point and the grounding hook s storage bracket at a convenient location nearby 2 Cable Installation on Standard Units On standard CV 6SLX units i e units equipped with the remote gun control unit connect cables as shown in Figure 2 4 0101 8241 0 Rev F 2 7 CV 6SLX Technical Manual Installation Section 2 2 7 Cable Installation on Standard Units l cO gt Q Z Z 318vV1 ONY 1 Z Dlg 335 o N31SAS NOB4 O I 1OHLNOO Nn ETETETT O L Z 318vV1 ONY 81 2 Slid 335 c N31SAS WOHJ O I TOHLNOD AH L 0 46 0290 G O G Fari FER G b a e ULL II a I rL 2 Did 338 SNOILVNSIS3Q c HOL23NNOO 13NVvd Hv3H Q CN OH ING WE H31T10HLNOO NAD 3LON3H D LL 318929 TOHLNOO AND o 0EZ86 0c80 ONNOHS LNIOd 319NIS 318v2 TwIXvOO 39vI10OA HESIH L zLL8 Fz09 S Z NOILO3S NI 0381489830 SV AVHL 3OHfOS LY 1O3NNOO TaNWd LNOHJ Aldd H3MOd LN3MNYTI lin NO2 AH 0 r236 0z290 g g L235 NI 03882530 Sv VANYd HY3H Sad OL LOANNOD SHIM SAW 01 ONS SIESYHO OaNddNs HIEN dvHls H3ddO2 ONS 3H uun egy oj aBewep shoas ul yjn amp 84 jila Ea U n Saqr asoy JO uoln29UUO O 1289JJ02U UAQUuS E SE jogxa pajaeuuoa aq janw ajqga oua l m UNE aui pug a qg3 zgJ ajnpojy J8og PUL NOILLNYWS 3
101. nput line voltage voltage 2 Faulty or loose cable connections 2 Make sure that all power module and FPS cable connections are correctly and securely made 3 Emitter damaged Follow instructions in gun manual to troubleshoot emitter issues No HV relay control voltage 4 On FPSB check pins J103 6 for 24 V DC If signal is present replace HV relay else replace FPSB 5 Defective HV relay in FPS 5 Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present 6 System improperly grounded for 6 Follow grounding instructions provided in e gun manual HV 7 Chamber Pressure too high 7 Chamber pressure should be less than 1 x 10 mtorr 8 HV feedthrough shorted 8 Check copper bus bars and HV feedthroughs for shorts coatings cracks or arc marks If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from J104 3 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out
102. ns J5 1 and J5 3 Turn damaged the power off measure resistors R2 through R5 HV Output circuit faulty 10 Replace HV Output Board CV 6SLX Technical Manual 5 14 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 17 HV OVERVOLTAQE LED Lights Red Symptom HV Output voltage is above 105 of setpoint Possible Cause Procedure 1 Incorrect or fluctuating line Confirm input line voltage voltage 2 Faulty or loose cable Make sure that all power module and FPS cable connections are connections correctly and securely made 3 Emitter damaged Follow instructions in gun manual to troubleshoot emitter issues 4 No HV relay control voltage 4 On FPSB check pins J103 6 for 24 V DC If signal is present replace HV relay else replace FPSB Defective HV relay in FPS 5 Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present System improperly grounded 6 Follow grounding instructions provided in e gun manual for HV If preceding steps have failed to correct the fault perform the following procedure 1 10 Switch off the power supply Disconnect HV output cable from J104 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether t
103. nstallation e Gun Control system I O cable PN 0620 9730 1 e HV coaxial cable PN 6024 6112 1 e HV cable conduit assembly PN 0620 9654 0 e Bracket PN 0040 9982 0 for securing HV conduit to source tray e 16 grounding hook PN 9900 4864 0 e 20 coil of 3 wide copper strap PN 5621 0032 3 e One copy of CV 6SLX Technical manual 2 2 2 Units Without a Remote Controller The components and cables listed below are supplied with units without a remote controller These units will have the top level PN 0620 9600 0 for 208 volt units or PN 0620 9600 1 for 400 volt units e CV 6SLX power module PN 6024 7110 0 208 volt unit or 6024 7120 0 400 volt unit e Filament power supply PN 0620 6604 0 or 0620 6604 2 e FPS input power cable PN 6622 0100 20 e Power module system I O cable PN 6338 2886 0 e Two 20 DB15M DB15F cables PN 6338 2884 0 one to serve as the power module FPS cable the other to serve as the FSP system I O cable e HV coaxial cable PN 6024 6112 1 e HV cable conduit assembly PN 0620 9654 0 e Bracket PN 0040 9982 0 for securing HV conduit to source tray e 16 grounding hook PN 9900 4864 0 e 20 coil of 3 wide copper strap PN 5621 0032 3 e One copy of CV 6SLX Technical manual 2 3 Rack Mounting the Power Module 2 3 1 General Installation Guidelines The CV 6SLX power module can be rack mounted in a standard 19 rack cabinet It must be supported by two side shelf supports to hold the power suppl
104. nts for the voltages listed below e P11 for 24 V DC e P10 for 15 V DC e P9 for 15 V DC e P14 for 5 V DC If any of these voltages is not present at the test point indicated replace the FPS Figure 5 4 ON OFF Switch and Indicators on FPS Front Panel HIGH VOLTAGE ON LED POWER ON LED Temescal Power ON OFF Switch 0101 8241 0 Rev F 5 21 CV 6SLX Technical Manual 5 3 FPS Fuse Replacement Procedure Section 5 Troubleshooting Table 29 FPS front panel HIGH VOLTAGE ON LED does not light 1 FPS is not powered up Refer to Table 12 2 HIGH VOLTAGE IS ON signal 2 High voltage is not switched ON at power module not asserted 3 On FPSB HV ON signal not 3 On FPSB check pins J3 8 and J3 9 for HV ON signal present 4 On FPSB HIGH VOLTAGE IS 4 On FPSB check pins J5 1 for 24 V DC If signal is not present replace FPSB ON signal not present 5 3 FPS Fuse Replacement Procedure To check the fuses input power fuses and replace them as necessary follow the instructions provided below Step Action l Set the FPS ON OFF switch to the OFF position 2 Switch off the facility breaker providing AC power to the FPS 3 Unplug the input power cable from its receptacle on the FPS front panel 4 Using a flat bladed screwdriver pry open the fuse block s cover as shown in Figure 5 5 Figure 5 5 Prying Open the Fuse Block s Cover 5 Using the same screwdriver pry the fuse block out of it
105. oided Take steps to ascertain whether or not the material being deposited is a known toxic substance Refer to the Material Safety Data Sheet s covering the evaporant s in question Certain powders titanium for instance can cause flash fires when exposed to oxygen or other oxidizers Therefore when opening the chamber door after a deposition cycle exercise extreme caution and allow time for the coating surface to oxidize Breakage of some of the more reactive condensates may be hazardous even when the above precautions are observed In this situation fire protective clothing should be worn Certain powders platinum for instance are known to catalyze methyl alcohol vapors upon contact generating heat in the process and possibly causing a fire to erupt Therefore never use methyl alcohol to wipe down or clean any internal tank surfaces of a vacuum system Use isopropyl alcohol IPA instead Dispose of all IPA exposed lint free paper cloth into a fireproof container while ensuring all proper safety procedures and precautions are being followed CV 6SLX Technical Manual 0101 8241 0 Rev F 1 PRODUCT DESCRIPTION AND SPECIFICATIONS 1 1 Product Description The Temescal Model CV 6SLX is a 6 kW constant voltage high frequency switching electron beam power supply Designed to power and control a single electron beam source the CV 6SLX is compatible with sources featuring either permanent magnet or electromagnetic deflection
106. on chosen for these rods should be as close as possible to the vacuum cubicle The rods must be copper clad steel 8 feet in length and their top ends should extend approximately 6 inches above the surface of the floor 2 Measure the resistance between the rods If the resistance is greater than 3 ohms try lowering it by pouring salt water or copper sulfate down the sides of the rods If the resistance is still greater than 3 ohms consult Temescal 3 When you have verified that the resistance between the two grounding rods is 3 ohms or less silver solder the copper stap connected to the system central grounding point to each of the rods NOTE Do NOT rely on mechanical connections between the copper strap and the grounding rods Distance from system central grounding point to facility low Z grounding point 0 60 ft 0 18 3 m 2 60 ft To system central grounding point A 3 76 mm wide copper strap GROUNDING RODS Copper clad steel Diameter 3 4 20 mm Length 8 2 44 m Distance apart 6 1 85 m Required size of connecting copper strap 3 in 76 mm wide x 035 050 0 9 1 3 mm thick Consult Temescal ALTERNATIVE METHOD Bolt copper strap to clean bare metal To system central grounding point i GROUNDED STRUCTURAL SN STEEL OF BUILDING 3 76 mm wide copper strap CV 6SLX Technical Manual 2 4 0101 8241 0 Rev F Section 2 Installati
107. on 2 6 Grounding Requirements The installation of twin rods of copper clad steel is preferred However if the equipment is to be Installed on the upper floors of a building the system can be grounded by connecting the vacuum chamber to the steel structure of the building Where copper straps are attached to frame members the copper must be bolted to clean bare patches of metal The length of copper strap connected to the source tray must be securely bolted to a clean site on that part CAUTION Do not use braided wire for any ground connections CAUTION Do not rely on water pipes to establish the system ground connection Multiple plumbing joints each with tape and or sealing compounds make such a ground unreliable 2 6 2 System Low Impedance Grounding Within the vacuum system the low impedance ground is provided by 3 and 1 wide copper straps As Figure 2 3 shows these straps must connect e the grounding stud labeled RF GND on the power module s rear panel see Figure 2 4 to a grounding point on the frame of the operator station e the operator station s grounding point to the vacuum cubicle s central grounding point e the grounding stud labeled RF GND on the FPS front panel see Figure 2 5 to the vacuum cubicle s main grounding point e the source tray to the vacuum cubicle s main grounding point Figure 2 3 System Low Impedance Grounding Requirements VACUUM CUBICLE OPERATOR STATION High Volta
108. ot in evidence during Step 3 troubleshoot the HV path and emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J101 switch the power supply back on and proceed with the troubleshooting steps described below 8 Power module and or FPS defective le Return power module and FPS to Temescal Table 8 General Condition No filament current after GUN ON state achieved Symptom Gun Switches On But Has No Filament Current Possible Causes Procedure 1 Faulty or loose cable connections 1 Make sure that all power module and FPS cable connections are correctly and securely made 2 Emitter damaged 2 Follow instructions in gun manual to troubleshoot emitter issues 3 Incorrect filament bias current 3 Adjust filament bias current 4 Filament Power Supply Module fault 4 Refer to Tables 28 and 29 CV 6SLX Technical Manual 5 8 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 9 General Condition No beam emitted after filament current is switched on Symptom HV Gun and Filament Current Switch On But No Beam Is Emitted Procedure Possible Causes 1 Faulty or loose connections 1 Make sure that all HV and FPS connections are correctly and securely made 2 Confirm HV Ready signal 2 Refer to Table 4 3 Confirm Gun Ready signal 3 Refer to
109. pplied with the conduit secure the conduit to the bracket as shown in Figure 2 11 CV 6SLX Technical Manual 2 12 0101 8241 0 Rev F Section 2 Installation 2 7 Cable Installation on Standard Units Figure 2 11 HV Conduit Properly Secured to Bracket 4 Secure the lugs on the ends of the HV cables to the feedthroughs as shown in Figure 2 10 Either cable can be connected to either feedthrough as polarity is not an issue 2 7 3 Connecting the HV Coaxial Cable PN 6024 6112 1 The HV coaxial cable PN 6024 6112 1 conducts the high voltage output of the power module to the FPS Connect this cable to power module rear panel connector J1 and to the HIGH VOLTAGE IN connector on the FPS 2 7 4 Connecting the Remaining Cables to the Remote Controller and FPS Connect the remaining cables to the power module the FPS and remote controller following the instructions provided below Figure 2 12 shows the connectors on the remote controller s rear panel Figure 2 12 Remote Controller Rear Panel REV REV GUN INTERFACE ADAPTER 3 1886 412 m lt l WO 09 oO I n HV INTERFACE ADAPTER 19 J sss 112 31 TE SY USE SRE SP YL SK gt ror ii amp EY i ELLA E 0101 8241 0 Rev F 2 13 CV 6SLX Technical Manual 2 7 Cable Installation on Standard Units Section 2 Installation Step 1 Figure 2 13 Connect female end of FPS Power Module cable PN 6338 2884 0 to J102 Connect the male end of that
110. r H1 and H4 for 480 V AC and output at X1 and X4 for 240 V AG 5 24 V DC power supply faulty 5 Check 24 V DC power supply input at pins 1 and 3 for 240 V AC and output at pins 3 and 4 for 24 V DC Table 25 EXTERNAL CONTROL FAULT LED Lights Red Symptom External Control voltage is below minimum value lt 20 V DC 1 Control voltage not present 1 On HVRB check TP10 for 24 V DC 2 Check fuse F1 on HVRB 3 Control supply voltage not present 3 On HVRB check pins J8 26 for 24 V DC 4 5 2 Control voltage fuse blown 4 Fuses on Inverter board blown Check fuses F1 F2 and F3 5 AC Control transformer faulty Check input to control transformer H1 and H4 for 480 V AC and output at X1 and X4 for 240 V AC 6 24 V DC power supply faulty 6 Check 24 V DC power supply input at pins 1 and 3 for 240 V AC and output at pins 3 and 4 for 24 V DC Table 26 FILAMENT LOAD FAULT LED Lights Red Symptom Minimum filament load not present 1 Control voltage not present 1 On HVRB check TP10 for 24 V DG 2 Check fuse F1 on HVRB 3 Control supply voltage not present 3 On HVRB check pins J8 26 for 24 V DC 4 5 2 Control voltage fuse blown 4 Fuseson Inverter board blown Check fuses F1 F2 and F3 5 AC Control transformer faulty Check input to control transformer H1 and H4 for 480 V AC and output at X1 and X4 for 240 V AC 6 24 V DC power supply faulty 6 Check 24 V DC power supply input at pins 1 and
111. roughly 100us The 2 21ms long active high output Q pulse from U18 B ARC created by an HV arc is fed into the input of frequency to voltage converter U1 an LM2907 ARC also briefly flashes the ARC OUT OF REGULATION LED yellow on the front panel via OR gate U37 E and 13 U1 uses a charge pump to create a voltage output on pins 5 and 10 which is linearly related to the frequency of the square wave on its input The values of R2 C1 and C2 have been chosen to create a frequency to voltage equation of V 2 0 0199xf where V is in VDC and f is in Hz This signal is scaled and filtered by R19 R59 and C19 and then buffered by U14 D The buffered CV 6SLX Technical Manual 4 8 0101 8241 0 Rev F Section 4 Theory of Operation 4 2 Power Module Theory of Operations output can be selected by jumper J3 to be fed to the Diagnostics connector but this is not currently the default jumper setting Prior to the U14 D buffer the scaled 100 104 and filtered signal is compared by U8 D to 1 92VDC created by the divider formed from R40 and R49 which pulls its output low when the arcing frequency exceeds approximately 100Hz see frequency to voltage equation above This turns MOSFET Q16 off which allows C91 and C92 to start charging to 5VDC through R144 and R147 The charging voltage on these two capacitors is scaled and buffered by U14 E so that ARC_DUR is equal to 10VDC after 120s which assumes the arcing frequency has exceeded 100Hz durin
112. s holder as shown in Figure 5 6 Figure 5 7 shows the fuse block extracted from its holder CV 6SLX Technical Manual 5 22 0101 8241 0 Rev F Section 5 Troubleshooting 5 3 FPS Fuse Replacement Procedure Figure 5 6 Extracting the Fuse Block from the FPS 6 Check the fuses and replace them as necessary 7 Push the fuse block all the way into its holder and snap Its cover back into place 8 Reconnect the FPS input power cable 9 Switch on the facility breaker that supplies power to the FPS 10 Set the FPS ON OFF switch to the ON position 0101 8241 0 Rev F 5 23 CV 6SLX Technical Manual 5 4 Suggested Spare Parts Section 5 Troubleshooting 5 4 Suggested Spare Parts 5 4 1 Suggested Spare Parts for 208 Volt Units Component Assembly Part Number Fuse 6 3 A 250 V ac 6024 7324 0 Fuse 40 A 700 V dc Semi 6024 7354 0 Diode 1600 V 56 A 6024 7364 0 Power Entry Module 6024 7312 0 Power Supply 24 V dc 2 7 A 6024 7352 0 IGBT 6024 7330 0 Aux Transformer 480 VCT In 240 VCT Out 6024 7319 0 Choke 1 2 mH 4 8 mH 6024 7307 0 Circuit breaker 30 A 600 V ac 3 Pole 6024 7384 0 Fan 24 V dc 325 cfm 6024 7379 0 Line Filter 6024 7310 0 HV Transformer 6024 7355 0 Display and Controls PCB 6024 7345 0 Interface PCB 6024 7346 0 HV PCB 6024 7390 0 Regulator PCB 6024 7344 0 Inverter PCB 6024 7335 0 5 4 2 Suggested Spare Parts 400 Volt Units Component Assembly Part Number Fuse 6 3 A 250 V ac 6024 7324 0 Fuse 20 A 700 V
113. s inductor improves the power factor of the HVPS as seen by the AC power grid High speed IGBTs in the Inverter switch the rectified bus voltage through HV Transformer T1 at 25kHz thereby converting the intermediate DC power once again into AC power HV Rectifier board A2 then converts the high frequency high voltage output of the HV Transformer into DC high voltage power In addition the HV Rectifier scales the output voltage and current for feedback to the Regulator control circuits DC output voltage is delivered from this board to the external load through custom high voltage cablewell connector J1 The mating connector and cable for 1 is provided with each HVPS Virtually all logic control and analog processing functions are managed on Regulator board A3 To provide visual indications on the front panel Display and Control board A4 is connected and sandwiched between the front panel and the Regulator In addition the Display and Control board provides an HV OFF pushbutton output voltage adjustment potentiometer and voltage and current LCD displays for the user The Regulator links with the customer s remote interface through the three D subminiature connectors on Interface board A5 which is mounted to the upper left corner of the rear panel The most critical function of the Regulator is to compare the output feedback to the provided references and then feed the Inverter IGBT gate drives to properly actuate them Module Level Theory
114. s the input to the filament current summing junction The Auto Bias circuit is described in greater detail below 0101 8241 0 Rev F 4 19 CV 6SLX Technical Manual 4 3 FPS Theory of Operation Section 4 Theory of Operation Figure 4 7 Block Diagram of Filament Supply PCB Control and Power Circuits HV OFF Gun OFF A uto Bias Enable Filament Current Request Emission Current Request Emission Current Monitor Auto B ias Circuit Fil Curr Auto Bias Select Filament Current Loop Compensation Fil ament Current Switch Mode sensor To Filament aur Power Transformer se Circuit AME Emission Circuit Emission Sura ia Ramp Loop Compensation Emission Monitor Scale Select Emission Current Control Loop When emission current ECR is called for the emission current loop control comes into play and the filament current control loop is ignored ECR is first buffered by A105 and then fed to the 10 sec ramp circuit to gradually increase the emission current to the desired level The output of the ramp circuit U103 2 is fed to inverting buffer U205A to the summing junction of the emission current loop compensation circuit of U106A via R55 The emission current feedback signal Emission Monitor EM comes from the HV current transducer in the Filament Output Section of the FPS and is scaled by a rotary switch selection of gain values for buffer A101 The output of A101 is also fed to the summing junction of the
115. s these pins switches on the gun 8 BK FILAMENT CURRENT 24 Y A 0 to 7 5 volt signal proportional to 0 75 amperes is available for driving a remote meter MONITOR 25 BK The impedance should be 1 megohm or higher FILAMENT BIAS SET 26 BN This input controls the filament bias current Range 0 V dc to 10 V dc On all FPS units 27 BK 0 V dc 0 A On standard FPS units i e PN 0620 6604 0 10 V dc 50 A On units equipped with FPS PN 0620 6604 2 10 V dc 100 A Digital Outputs Wire Signal Name Colors GUN IS READY 1 R Indicates that all gun control interlocks are made and that the GUN GO OFF ENABLE loop is 2 BK closed so the gun can be switched on GUN IS ON 3 W Indicates that the gun is switched on 4 BK Analog Output G1J2 Wire Signal Name Pins Colors Function ACTUAL EMISSION 50 BR Linearly represents the actual emission current 0 V 0 A 10 V 600 mA CURRENT 51 R L RSS 0101 8241 0 Rev F 2 17 CV 6SLX Technical Manual 2 8 Cable Connections on Units Without a Remote Controller Section 2 Installation 2 8 Cable Connections on Units Without a Remote Controller On CV 6SLX units not equipped with the remote gun control unit connect the cables as shown in Figure 2 16 Figure 2 16 Cabling Diagram for CV 6SLX Units Without a Remote Controller 6024 6112 1 HIGH VOLTAGE COAXIAL CABLE 6622 0100 20 208 VOLT POWER CABLE PROCESS CHAMBER ELECTRON BEAM SOURCE s CONNECT T
116. shape to the actual output waveform shape Potentiometer R90 and R134 are used to compensate for the effect of the voltage drop across the arc limiting resistors on the HV Output board which add a load current dependent voltage offset The negative feedback signal is inverted by op amp U30 B before being fed to the voltage error amplifier as signal KV CAL This signal creates a current flow through R146 and R156 that is proportional to the HV output voltage Error amplifier U30 C varies the Inverter IGBT duty cycle so that its inverting terminal stays at zero volts which is the condition when the current flow through R146 and R156 is equal but opposite to the current flow through R194 207 and 211 This is how the Regulator maintains the HV output voltage at the requested setpoint Components R143 R154 R155 C90 C96 and C101 form a two pole and two zero frequency compensation network which ensures that the closed voltage control loop is quick to respond but is always stable as well mA Feedback and Control The current setpoint feedback and error amplifier work in similar ways to their voltage counterparts Current setpoint programming is only received internally created by 10VDC reference chip U22 in conjunction with filtering inverting and scaling buffer op amp U33 D The reference current fed away from the inverting terminal of current error amplifier U30 D through R79 81 and 204 is calibrated by potentiometer R81 to maintain a fixed
117. signal is rectified by DB 11 and scaled by A 102 The feedback signal scaling is 5 0 V 50 A Filament Current Control Circuits Filament Current Control Loop Figure 4 7 shows a block diagram of the control and power circuits As that diagram shows the filament current is regulated by filament current feedback or emission current feedback The analog OR circuit U 106B along with D 13A and D 13B selects emission current regulation or filament current regulation depending on which request signal is greatest Assume that Filament Current Request FCR is asserted and Emission Current Request ECR is zero and that Auto Bias Enable is not asserted The scaling for FCR is 0 to 5 0 volts 0 to 50 0 amperes FCR is buffered by A 103 and fed via analog switch A 104B and buffer inverter U 205B to the summing junction at the input to the filament current loop compensation amplifier U106A The output of U106A feeds the PWM U101 via buffer U106B to drive the switch mode power inverter The filament feedback signal from buffer A102 is fed to the summing junction at the input to the filament current loop compensation amplifier U106A Ideally the FCR level will be just below the point where emission current takes place therefore when zero emission current is called for FCR will dominate An alternative to FCR to drive the filament current loop is auto bias Analog switches A104A and U104B form an SPDT switch that selects either FCR or the Auto Bias signal a
118. stem I O cable PN 6338 2886 0 into connector J4 on the power module rear panel see Figure 2 4 5 Plug the male end of the power module FPS PN 6338 2884 0 into connector J5 on the power module rear panel see Figure 2 16 6 Plug the female end of the power module FPS cable into connector J102 on the FPS front panel see Figure 2 17 7 Plug the male end of the FPS system I O cable also PN 6338 2884 0 into connector J 101 on the FPS front panel see Figure 2 17 8 Make the I O connections to the control system as described in section 2 8 2 Figure 2 17 FPS Cabling Detail on Units Without Remote Gun Controller s Connect FPS Power Module cable gt j i 0 No Connect FPS system I O cable PN 6338 2884 0 to J102 Num a mu also PN 6338 2884 0 to J101 2 8 2 Making I O Connections to the Control System The installer must make connections 1 between the control system and the power module system I O cable PN 6388 2886 0 and 2 between the control system and the FPS system 0101 8241 0 Rev F 2 19 CV 6SLX Technical Manual 2 8 Cable Connections on Units Without a Remote Controller Section 2 Installation I O cable PN 6388 2884 0 If necessary remove the female D connectors from the ends of these two cables Control inputs and status outputs include both digital and analog signals Digital inputs require a simple contact closure and carry 24 V dc at approximately 20 mA All digital outputs are from
119. t to the Inverter 0101 8241 0 Rev F 4 1 CV 6SLX Technical Manual 4 2 Power Module Theory of Operations Section 4 Theory of Operation 4 2 2 Two AC line phases from the Inverter feed the primary of step down transformer T2 wired with jumpers for a 1 1 ratio in the 208VAC unit and 2 1 ratio in the 400VAC unit which in turn powers the AC input of 24VDC auxiliary power supply PS1 The 24VDC output of PS1 connects back to the Inverter and provides low voltage power to the other board assemblies in the HVPS Temperature inputs come from two separate devices connected to the Inverter thermostat S2 and IC sensor U1 S2 opens when the Inverter heat sink rises above a preset temperature while U1 generates an analog voltage scaled to the temperature of the heat sink near the Inverter IGBTs Both sensors feed the over temperature fault circuitry Cooling of internal components is provided by 24VDC fan B1 mounted on the rear panel which draws airflow in through the front panel grille and exhausts at the rear An integrated jammed rotor sensor in the fan senses when the blades have stopped spinning and will trip an over temperature fault After the circuit breaker the three AC line phases are fed to the Inverter for conversion from 50 60Hz AC power into high frequency power Part of the conversion process involves rectifying the AC input voltage through a three phase bridge rectifier and current smoothing with DC link choke L1 Thi
120. t to the User Interface Diagnostics and Filament connectors through J1 HV ON also turns the HV ON LED green on the front panel through J 13 Faults Numerous fault circuits are used to determine if there is a malfunction in the HVPS serious enough to shut down the HV output In several of these circuits a compensated shunt voltage regulator TL431 with a 2 5VDC reference is used as a 3 pin 2 5V comparator If the voltage applied to the reference pin exceeds 2 5VDC the cathode of the TL431 is pulled to ground where the anode is connected This creates a very simple over limit comparator All fault signals are diode OR ed onto the SUM FLT bus by CR43 44 and 46 48 which creates a single high signal indicating at least one HVPS fault is present and turns the front panel POWER SUPPLY FAULT LED red through J 13 The buffered kV feedback signal KV CAL is divided and filtered by R4 R6 R8 and C3 and fed into the input of TL431 comparator U3 R4 is calibrated so that U3 trips latch U11 C when the output voltage exceeds 10 5kVDC The latch s output turns the front panel HV OVERVOLTAGE LED red through J 13 and via Q7 and J 1 pulls the open collector over voltage status pin low on the Diagnostics connector Feedback signal KV CAL is also used to trip the reference over voltage fault Calibrated voltage reference signal KV REF CAL is compared to KV CAL divided by R7 and R14 by U7 C using R7 to calibrate the circuit to trip when the actual ou
121. tely via the front panel OUTPUT kV ADJ UST potentiometer or a pin on the rear panel J4 HVPS CONTROL I O connector referred to as the User Interface respectively These two signals are brought onto the Regulator through connectors J 13 and J1 as signals KV REF LCL and KV REF REM respectively These reference control signals scaled for 10VDC 10kVDC are calibrated with potentiometers R114 and R108 and fed to analog switches U35 B and U35 C respectively Only one signal is routed through the analog switches to the reference inverter amplifier as determined by the signal LOCAL where High 5VDC Local Mode which comes from the User Interface through an isolating optocoupler U17 A The now single calibrated voltage reference signal KV REF CAL is filtered scaled and inverted via op amp U33 E The voltage output of U33 E produces a fixed current flow through R194 207 and 211 which is fed away from the inverting terminal of voltage error amplifier U30 C discussed later Shunt jumper J 14 is used during the test process to check the over voltage fault circuit To control the output voltage in a closed loop the reference signal must be compared to the feedback signal The partially divided output voltage signal is brought in from the HV Output board through pin 4 of J 12 and further divided and filtered for noise with R118 R142 R149 C76 C83 C88 and C89 Potentiometer R118 is also used during test to match the feedback waveform
122. than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 If the symptom is not in evidence during Step 3 troubleshoot the HV path and emitter assembly following the instructions in the e gun manual If the symptom persists during Step 3 reconnect the HV output cable to J101 switch the power supply back on and proceed with the troubleshooting steps described below 6 FPS defective le Replace FPS 0101 8241 0 Rev F 5 11 CV 6SLX Technical Manual 5 2 Troubleshooting Procedures Section 5 Troubleshooting Table 12 General Condition Power Supply out of regulation Symptoms TCS PSU1_FAIL_ALM Power Supply Control Is On Failure Alarm Remote Control REG LED Lights Up Power Module OOR LED Lights Up Possible Cause Procedure 1 System improperly grounded for HV 1 Follow grounding instructions provided in e gun manual 2 Incorrect line voltage 2 Confirm line voltage as per manual 3 Incorrect line phase 3 Confirm line phase as per specifications If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from J104 3 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether
123. the HV Transformer The IGBTs are arranged in a full bridge configuration and are controlled in a phase shifted scheme whereby Q7 and Q11 are always in an opposite conducting state from each other i e one is on while the other is off as are Q6 and Q10 always in an opposite state By shifting the phase between these two pairs of IGBTs the effective current on time delivered to the HV Transformer can be varied precisely The IGBT switching sequence generated by the phase shift modulated PSM controller chip on the Regulator is connected through J11 which contains other control signals as well to the Inverter Driver chips U7 and U8 transmit those signals to the gates of the IGBTs through DC coupling capacitors C35 and C36 and gate drive transformers T1 and T2 which have a 1 1 1 transfer ratio Separate turn on and turn off gate resistor pairs are employed to limit EMI and turn off losses respectively as well as high frequency series ferrite beads to limit ringing on the gates Each IGBT possesses an RCD resistor capacitor and diode snubber circuit between its collector and emitter leads e g RA1 C43 and CR6 This snubber circuit limits the collector voltage overshoot during turn off and protects the IGBT from damage High frequency current from the rail capacitors passes through the input terminals of Hall effect current sensor U15 through the half bridge I GBTs through resonant capacitor C2 and out to 0101 8241 0 Rev F
124. the bottom of the FPS module over the drilled holes and secure the FPS in place with the hardware provided DANGER HIGH VOLTAGE Removal of any of the covers on the FPS module can expose personnel to dangerous or lethal voltages Particular care should be taken regarding high voltage which can arc over a considerable distance It is not necessary to be in physical contact with a live terminal in order for an arc to send a lethal high voltage discharge through a person s body Figure 2 1 Mounting Hole Pattern for FPS Module 5 35 e e 4 13 Hole Diameter 25 0101 8241 0 Rev F 2 3 CV 6SLX Technical Manual 2 6 Grounding Requirements Section 2 Installation 2 6 Grounding Requirements 2 6 1 Facility Low Impedance Grounding Requirements Safe dependable operation of the power supply cannot be ensured unless a good earth ground is provided for the system and the power supply This ground must provide a low impedance path for radio frequency RF as well as direct current dc electricity and it must not be connected to that of any other system or equipment Figure 2 2 shows two different methods of providing the required low impedance ground on the facility side of the installation Figure 2 2 Facility Low Impedance Grounding Requirements PREFERRED METHOD BUILDING FLOOR 1 As shown at right sink two grounding a through the floor of the building and into the earth approximately six feet apart The locati
125. the kV and mA monitor signals from the Regulator and filtered with C7 and C5 potentiometers R24 and R13 calibrate the voltage and current displays respectively Controls An access hole in the front panel allows a chassis mounted potentiometer connected through J2 to adjust the output voltage setpoint in local mode The potentiometer uses the 10VDC reference from the Regulator to produce a 0VDC to 10VDC reference voltage Finally as a safety feature momentary pushbutton switch S1 is used to initiate an HV Off command on the Regulator regardless of whether the unit is in local or remote mode Ab Interface Board Mounted to the rear panel so its three D subminiature connectors protrude enough to allow external attachment the Interface board provides interconnection between the user s control system and the Regulator J1 J5 on rear panel 15 pin D sub connects to the user s Filament module J2 J3 on rear panel 37 pin D sub provides diagnostic signals to the user and J3 J4 on rear panel 25 pin D sub serves as the active control interface with the user User Interface connector J4 simply routes all signals on the Interface board to the Regulator Since the location of the unit s top cover interlock switch which opens its contacts when the top cover has been removed is adjacent to the Interface board J5 provides the shortest path for the switch s contacts to the interlock circuitry on the Regulator The Interface board also cont
126. the part or component shall be paid by Purchaser In the event that Seller elects to refund the purchase price the apparatus shall be the property of Seller and shall be promptly shipped to Seller at Seller s expense This mechanical warranty shall be void and the apparatus shall be deemed to be purchased AS IS in the event that the entire purchase price has not been paid within thirty 30 days of original shipment of the apparatus THERE ARE NO EXPRESS OR IMPLIED WARRANTIES THAT EXTEND BEYOND THE WARRANTY HEREINABOVE SET FORTH THERE IS NO WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE WITH RESPECT TO THE APPARATUS OR ANY PART OR COM PONENT THEREOF AND NO WARRANTY SHALL BE IMPLIED BY LAW Items not of Seller s manufacture but resold by Seller are the products of other manufacturers and their warranty if any shall apply THERE ARE NO WARRANTIES OF ANY KIND ON PRODUCTS OF OTHER MANUFACTURERS RESOLD BY TEMESCAL EXCEPT THE WARRANTY OF TITLE AND NO WARRANTIES SHALL BE IMPLIED BY LAW THERE IS NO EXPRESS OR IMPLIED WARRANTY OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE WITH RESPECT TO PRODUCTS OF OTHER MANUFACTURERS PERFORMANCE WARRANTY Seller warrants that the apparatus will comply with the specifications set forth in the purchase order All specifications are subject to the corrections and tolerances allowed by the NEC If the purchase order expressly provides for factory testing to verify compli
127. ther details see Table 5 13 e Emission current selection switch A black plastic cap normally covers this switch which is factory set for the power supply with which it is supplied and should require no further attention Figure 3 2 shows the switch set to the 300 mA position For a standard CV 6SLX power supply i e with the remote control unit it should always be set to the 600 mA position For CV 6SLX without the remote control unit it should be set to 1000 mA 3 4 Control and Display Features on Remote Gun Controller Figure 3 3 shows the remote HV gun control unit Control display features on the HV Control panel are described in detail below the illustration 0101 8241 0 Rev F 3 3 CV 6SLX Technical Manual 3 4 Control and Display Features on Remote Gun Controller Section 3 Power Supply Operation Figure 3 3 Remote Control Unit H V CONTROL GUN CONTROL FIL i EMI POS REM EN TE LOC BIAS REG DOORS PWR REM FAULT TANK VAC REM alr LOCAL Q ri g POSITION H O POS AUX Temescal EMISSION CURRENT OFF ON ES BE m GRERSS ra d p UL kN a fenky aer i proa nt 2 te Eu Control Display Features on HV Control Panel Figure 3 4 shows the following control display features on the front panel of the HV Control portion of the single gun control unit s front panel The control display features on this panel are described below Figure 3 4 Control Display Features
128. tion 4 changes made to improve technical accuracy Temescal a part of Edwards Vacuum Inc Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trade marks of Edwards Limited Edwards Vacuum Is an Equal Opportunity Employer Table of Contents Page Section Number and Title Number 1 Specifications and Product Description Ll Product DESC DUO usus bosque Mee PM Parcas tq qasanan iter ted 1 1 2 Installation 2 Secom OVOl VIO Wiepdit teb tix tshirt qa One MOS c xe Cat b t au 2 1 2 2 List of Components and Cables Supplied with the Unit 2 1 2 3 Rack Mounting the Power Module Hn 2 2 2 4 Rack Mounting the Remote Control Unit r 2 3 2 5 Mounting the Filament Power Supply HH 2 3 2 6 Greunalna Redilrermiehls datos ado d rr rr rr 2 4 2 7 Cable Installation on Standard Units rr 2 7 2 8 Cable Installation on Units Without the Remote Gun Controller 2 18 2 9 Initial Power Up Maintenance Power Up Procedure 2 21 3 Power Supply Operation SL SEHON VE VIO WA stum UR IEEE RAS PN u uu CRM 3 1 3 2 Power Module Controls and IndicatorsS rr 3 1 3 3 Switches and Indicators on Filament Power Supply Front Panel 3 3 3 4 Control and Display Features on Remote Gun Controller
129. tput voltage exceeds the reference setpoint by 596 R9 13 and 214 are used to add an offset voltage to KV REF CAL so that U7 C is not forced to compare two 0VDC signals which would result in an undefined output When comparator U7 C trips latch U11 D sets its output high turns the front panel SETPOINT OVERVOLTAGE LED red through J 13 and via Q8 and J 1 also pulls the open collector over voltage status pin low on the Diagnostics connector Like the over voltage circuit the buffered mA feedback signal MA CAL is divided and filtered by R34 R37 R38 and C14 and fed into the input of comparator U9 R37 is calibrated so that U9 trips latch U11 E when the output current exceeds 636mADC The latch s output turns the front panel HV OVERCURRENT LED red through J 13 and via Q6 and J 1 pulls the open collector over current status pin low on the Diagnostics connector Two arc related faults can be tripped on the Regulator The output of frequency to voltage converter U1 which linearly converts the repetition frequency of the output arcing to a DC voltage according to the formula V 0 0199xf is divided and filtered by R3 R15 and C137 before feeding the input of comparator U4 R15 is calibrated so that U4 trips when the arcing rate exceeds 200Hz setting the output of latch U25 D high and flipping ARC FLT high through OR gate U5 B ARC FLT is also tripped high when ARC DUR reaches 10VDC indicating an output arcing event with a rate greater
130. tputs AUTO BIAS INDICATOR HI Curent AB IAS RESET IN Control Circuits AUTO BIAS INDICATOR LO GUN GOONIN EM MON HVISON IN FILIMON HVINTERLOCKN gt HVPS HV INTERLOCK OUT Status HV IN REGULATION IN FILPWR OK FIL OK OPEN Filament DC Voltage Supply for Switch Mode Converter A single phase bridge rectifier circuit provides the raw dc power for the high frequency switches The DC voltage is filtered and a positive rail voltage and a negative rail voltage is established The single phase 220 V power for the filament and positions circuits enters on J 104 Pin 1 and 4 The circuit is protected by fuses F 1 and F 2 The ac power is rectified by DB 10 and filtered by inductors L 10 and L 11 in combination with rail capacitors C 11 and C 12 Low Voltage DC Supplies Low DC voltages of 24 V 12 V 5 V and 12V are supplied by T 102 via bridge rectifiers DB 14 and DB 15 12 V and 5V are down regulated from 24 V by VR 101 and VR 103 12 V is down regulated from 24 V by VR 102 These supplies provide power for the logic and control circuits on the board CV 6SLX Technical Manual 4 18 0101 8241 0 Rev F Section 4 Theory of Operation 4 3 FPS Theory of Operation Filament Switch Mode Supply The filament supply uses IGBT switches and operates at a frequency of approximately 28 5 kHz The filament transformer steps down the voltage with a ratio of 10 1 to provide
131. tputs include both digital and analog signals Digital inputs require a simple contact closure and carry 24 V dc at approximately 20 mA All digital outputs are from contact closures rated at 2 A 9 220 V ac or at 2A 9 30 V dc CV 6SLX Technical Manual 2 14 0101 8241 0 Rev F Section 2 Installation 2 7 Cable Installation on Standard Units Making Connections to the HV Control System I O Cable PN 0620 9840 0 System O HV control connections are made via unterminated end of the HV control system l o cable For detailed information about these I Os see Figure 2 14 and Table 2 1 Figure 2 14 Signals Exchanged via the HV Control System I O Cable PN 0620 9840 0 Pin Wire Color R HV IS READY LO 9 HV IS ON 9 ACTUAL HIGH VOLTAGE 1 0 to 10 V dc REMOTE HIGH VOLTAGE REQUEST 0 to 10 V dc TOTAL POWER SUPPLY CURRENT 0 to 10 V dc Table 2 1 Additional Information About Signals Exchanged via the HV Control System I O Cable Digital Control Inputs HVJ 2 Wire Signal Name Pins Colors Function HV GO OFF 3 G A momentary open pulse switches off the high voltage If all HV control interlocks are made ENABLE 7 BK contact closure of this line enables the HV to be switched on NOTE If these pins are not connected to a remote contact closure they must be jumpered together or the HV cannot be switched on HV GO ON BL If all HV control interlocks are made and the HV GO OFF ENABLE loop is close
132. twork across the rail which feeds an analog isolation circuit This circuit powered by the 15V from U1 employs a filtered control amplifier U4 that drives a high linearity optocoupler U2 configured to compensate for temperature and age related optocoupler drift The isolated output of the optocoupler is amplified by U3 and scaled by potentiometer R2 for a final 100 1 ratio of rail voltage to signal output which is routed to the Regulator on J 11 Several of the signals on J 11 are not connected on these versions of the Inverter board and have no functionality despite their node names pins 11 12 13 14 16 18 and 22 CV 6SLX Technical Manual 4 4 0101 8241 0 Rev F Section 4 Theory of Operation 4 2 Power Module Theory of Operations A2 HV Output Secondary Tuning High frequency AC voltage driven on the primary of the HV Transformer by the Inverter is transformed by a fixed ratio 15 225 and connected to the input of the HV Output board P N 9170079 012 at J1 and J 2 Since the AC high voltage magnitude on J 1 will be at least two times as large as that on 2 with reference to ground and the finish winding lead of the HV Transformer has more spacing to ground than the start lead J1 must always be connected to the finish lead Between 1 and J 2 effectively across the HV Transformer secondary is the secondary tuning capacitance This capacitor bank formed by C31 35 and C41 45 creates a series parallel resonant c
133. ugh inverter gate U13 G and J 13 via Q2 and 1 pulls the open collector interlock status pin low on the Diagnostics connector and via Q20 and J 1 deactivates the interlock OK status pin on the User Interface connector The scaled and filtered rail voltage signal feeding buffer U16 D also feeds comparator U7 B R1 is calibrated so that when the Inverter rail voltage rises above 220VDC for 208VAC unit 427VDC for 400VAC unit the output of U7 B goes high This sets AC RLY ON high as well which is sent to the Inverter on J8 to activate the three phase AC relay and permit power operation in the Inverter If the rail voltage falls below 220VDC for 208VAC unit 427VDC for 400VAC unit the output of U7 B goes low setting the output of latch U11 B high and turning front panel RAIL UNDERVOLTAGE LED red through J13 Jumper J7 is used during test to defeat the rail under voltage fault during low voltage rail testing Finally the high output of the Inverter rail current fault latch connected through J 8 RAIL FAULT on the Inverter RAIL CURR FLT on the Regulator turns front panel INVERTER OVERLOAD LED red through J 13 CV 6SLX Technical Manual 4 12 0101 8241 0 Rev F Section 4 Theory of Operation 4 2 Power Module Theory of Operations Power Supplies References and Grounds 24VDC from auxiliary power supply PS1 is brought in through the Inverter on J8 referenced to the ground and then further filtered regulated and converte
134. ust kV below 10 5KV 2 Faulty reference voltage 2 n Local mode on HVRB measure TP36 or in remote mode measure TP30 by 1V21KV Correct appropriate reference inputs 3 Faulty HVRB 3 Replace HVRB Table 19 OUTPUT ARCING LED Lights Red Symptom One or more output acring faults are active Arc duration gt 120ms or Arc Rate gt 200Hz Possible Cause Procedure 1 Faulty or loose connections Make sure that all HV and FPS connections are correctly and securely made Emitter damaged Follow instructions in gun manual to troubleshoot emitter issues Defective HV relay in FPS 3 Check for presence of high voltage at output of FPS WARNING Perform this step only with suitable test equipment DMM with 10 Megohm input resistance and Fluke 80 K 40 test probes or the equivalent and a with safety assistant present 4 System improperly grounded 4 Follow grounding instructions provided in e gun manual for HV 5 Chamber Pressure too high 5 Chamber pressure should be less than 1 x 10 mtorr 6 HV feedthrough shorted 6 Check copper bus bars and HV feedthroughs for shorts coatings cracks or arc marks CV 6SLX Technical Manual 5 16 0101 8241 0 Rev F Section 5 Troubleshooting 5 2 Troubleshooting Procedures Table 20 HV OUT OF REGULATION LED Lights Yellow Symptom HV Output voltage is not regulating to setpoint Possible Cause Procedure 1 Incorrect or fluctuating line Confirm i
135. utput signals GATEA GATEB GATEC and GATED connect to the Inverter board on J8 through series protections resistors R128 130 Since the pulse currents on the gate drive outputs can sometimes be large the PSM chip employs separate power and ground connections to isolate the drive circuitry from the sensitive control pins Drive related pins VC and PGND are therefore also isolated on the board layout EUH R157 and R164 and a separate copper ground plane for PGND shown symbolically as D Analog Monitors Several analog monitors scale and buffer feedback from other boards and sensors in the unit delivering them to the interface connectors and front panel displays The already buffered HV output voltage feedback signal is calibrated by R61 buffered by U33 B current limited by resistor R182 fed to the interface connector through J1 and the front panel display through J13 The HV output current feedback is similarly processed by R72 U33 C and R183 and fed out through J1 and J13 The output of the analog Inverter temperature sensor mounted on the heat sink near the warmest IGBT is routed in through J8 and then filtered scaled and buffered by U14 B IGBT_TEMP is linearly scaled from 0 to 10VDC to represent 0 to 160 C 0101 8241 0 Rev F 4 7 CV 6SLX Technical Manual 4 2 Power Module Theory of Operations Section 4 Theory of Operation This signal is then connected out to the Diagnostics connector through J1 and also fed to
136. wer Supply Fault occurs The high voltage can be intentionally switched off in any of the following ways 1 The control system can assert the HV GO OFF signal which is supplied via at HVJ 2 Pins 3 and 7 on the remote gun controller s rear panel see Figure 2 15 2 he operator can press the HV OFF button on the power module front panel 3 The operator can press the OFF button on the HV control panel see Figure 3 4 4 The operator can turn the HV control panel s key switch to the OFF position CV 6SLX Technical Manual 3 8 0101 8241 0 Rev F Section 3 Power Supply Operation 3 5 Routine Power Supply Operation on Standard Units 3 5 3 Switching the Filament Current On Off NOTE In order for the filament current to be switched on the FPS module s power cable must be properly connected to a source of 220 V ac power and the module s ON OFF switch must be in the ON position Switching On the Filament Current The operator can switch on the filament current by pressing the ON button on the Gun Control panel see Figure 3 5 and holding it down for 2 seconds Alternatively the control system can switch on the filament current by asserting the REMOTE GUN GO ON signal for 2 seconds The REMOTE GUN GO ON signal is supplied via G1J2 Pins 7 and 8 on the remote gun controller s rear panel see Figure 2 16 NOTE Once the HV and the gun are both switched on the emission current will ramp up to requested level after a 10 15
137. y weight The rack vertical height required is 8 3 4 inches The chassis depth is 23 inches An additional 3 is required for clearance of terminals plugs and wiring The panel should be secured to the rack cabinet by the four mounting holes provided DANGER HIGH VOLTAGE Removal of the power module top cover can expose personnel to dangerous or lethal voltages Particular care should be taken regarding high voltage which can arc over a considerable distance It is not necessary to be in physical contact with a live terminal in order for an arc to send a lethal high voltage discharge through a person s bogy The power module is designed to be installed in an indoor laboratory or clean room in which the immediate environment is controlled to maintain an ambient temperature of 40 C or lower and a noncondensing humidity level of 10 90 The screen covering the front panel air vent and the screen sandwiched between the exhaust fan and the rear panel provide IP40 ingress protection These screens prevent solid foreign objects larger than 1 mm in diameter from penetrating the outside chassis but do not provide a barrier against liquids Both screens must CV 6SLX Technical Manual 2 2 0101 8241 0 Rev F Section 2 Installation 2 4 Rack Mounting the Remote Control Unit 2 3 2 be removed and cleaned whenever the fan airflow drops more than 15 from its original value or every two years whichever comes first The power module does not requ

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