User Manual MP148E - Physik Instrumente
Contents
1. gt Always keep this user manual available with the N 565 The latest versions of the user manuals are available for download p 3 on our website Add all information from the manufacturer to the user manual for example supplements or Technical Notes If you give the N 565 on to other users also include this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and damage to equipment Only install and operate the N 565 after you have read and understood this user manual Personnel qualification The N 565 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model Ove Vi Wii aan 7 Product View lea ana 8 Scope Of Delivery neigen 11 suitable Controller icon a aaa 11 Technical Feature miii ea aan 12 3 1 Model Overview The N 565 is available in the following versions A ASIA N 565 160 Precision Linear Stage 13 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 80 x 20 mm W x L x H Piezoelectric Stepping Drive NEXACTO N 565 260 Precision Linear Stage 26 mm Travel Range PlOne Linea2. 15 pin sensor E 861 1A1 single axis motion controller E 712 modular controller system for up to 6 axes NEXACT piezo stepping drive 10 to 50 10 to 50 Al black anodized 0 4 65 x 110 x 20 3 HD Sub D m 15 pin motor HD Sub D f 15 pin sensor E 861 E 861 1A1 single axis motion controller E 712 modular controller PI NEXACT piezo stepping drive 10 to 50 V 10 to 50 Al black anodized 0 6 65 x 160 x 20 kg 15 mm 3 m 10 mm HD Sub D m 15 pin motor HD Sub D f 15 pin sensor E 861 1A1 single axis motion controller E 712 modular controller system for up to system for up to 6 axes 6 axes The N 565 stage series replaces the LPS 65 series Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the N 565 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa Relative humidity Highest relative humidity 80 for temperatures to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 10 C to 50 C Storage temperature 20 C to 60 C Transport temperature 20 C to 60 C Overvoltage category in acc with EN 60664 1 2007 VDE 0110 1 Protection cl
3. 3 4 mm and counterbore for mounting from above with M3 screws Mounting from above with M3x12 screws This mounting option is used e g when setting up an XY system consisting of two N 565 stages p 22 Figure 7 N 565 top view holes with 3 4 mm and counterbore for mounting from above with M3 screws Mounting from below with M4 screws Figure 8 N 565 bottom view M4 holes for mounting from below with M4 screws N 565 NEXACT Stage MP148E Version 1 0 0 19 5 Installation pP I NOTICE Screws that are too long The N 565 can be damaged by screws that are screwed in too deeply gt Observe the depth of the mounting holes p 42 gt Only use screws of the correct length for the respective mounting holes Protruding screw heads Protruding screw heads can damage the N 565 NOTICE gt Ensure that the screw heads do not protrude from countersunk holes so that they do not interfere with the stage motion Prerequisites v You have read and understood the general notes on installation p 15 v You have provided a suitable surface For the required position of the holes see Dimensions p 42 For mounting from above with M3x12 screws Four M3 holes with a depth of at least 5 mm are provided For mounting from below with M4 screws Four through holes for M4 screws are provided The thickness of the surface and the depth of the counterbores at the through holes in the surface are
4. N 565 Maximum screw in depth 7 5 mm Maximum torque 0 5 Nm 4 Make sure that screw heads do not protrude from the countersunk holes 5 Check that the N 565 is affixed firmly to the surface N 565 NEXACT Stage MP148E Version 1 0 0 21 5 Installation Pp I 5 3 Setting Up an XY System Two N 565 stages can be combined to an XY system gt For further combination possibilities contact our customer service department p 37 NOTICE A i Impermissibly high load on the stages N e In an XY system the stage for the Y axis must be moved as well Impermissibly high loads interfere with the motion and can damage the stages gt Include the mass of the moved stage in the calculation of the load to be moved gt For all stages in a multi axis system Do not exceed the maximum permissible load gt Forall stages in a multi axis system make sure that forces that act upon the moving platform in the respective direction of motion do not exceed the active push pull force of the drive p 39 Designations in these instructions Lower stage Forms the basis of the multi axis system X axis is attached to a surface Upper stage Forms the Y axis of the multi axis system is attached to the lower stage rotated by 90 Prerequisites v You have read and understood the general notes on installation p 15 v You have accounted for the space required to route cables without bending and according to regulatio
5. driven by NEXACT piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can stay charged for several hours Touching or short circuiting the contacts in the drive connector of the N 565 can trigger unpleasant electric shocks If you want to avoid these unpleasant electric shocks gt Discharge the stage before you pull out the drive connector from the controller Discharging the piezo actuators of the drive If you want to pull out the connector of the drive from the controller 1 If you are working in closed loop operation Switch off the servo mode on the controller Set the piezo voltage on the controller to 0 V by sending an RNP command see user manual of the controller If possible Switch off the controller Wait at least 10 seconds before disconnecting the controller N 565 NEXACT Stage MP148E Version 1 0 0 31 PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance occccccccncnonocincnononononononnnnnononononnnnnnnn nn nn nn nana nan cn nn nn nan 33 Cleaning the NB civic eek 33 7 1 General Notes on Maintenance The N 565 is maintenance free 7 2 Cleaning the N 565 Prerequisites v You have discharged the piezo actuators of the N 565 v You have disconnected the N 565 from the controller Cleaning the N 565 gt Clean the surfa
6. for sensor mating side Supply voltage 5V Input GND GND Encoder signal 1 cosine Output Encoder signal 1 cosine inverted Output Output Output Q Z U The character indicates that the corresponding pin is not connected 44 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 3 Pin Assignment of the N664B0001 Adapter The pin assignments for the N664B0001 adapter that is included in the scope of delivery of the N 565 are as follows Sub D 15 m connector See Sensor Connection for N 565 HD Sub D 15 f connector See following table 5 1 a SS S33 e j AS 00000 Ag r vv vo 15 11 Figure 15 HD Sub D 15 f connector for sensor mating side Pin Ten O CAMINITO ONO CE cos Encoder signal 2 cosine inverted IR E TASA AA ECON OOOO DE SEE wopo CE CHE The sign indicates that the corresponding pin has not been assigned N 565 NEXACT Stage MP148E Version 1 0 0 45 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with EU law electrical and electronic equipment may not be disposed of in EU member states via the municipal residual waste Dispose of your old equipment according to international national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH amp
7. matched so that compliance with the maximum screw in depth of 7 5 mm in the N 565 is observed The evenness of the surface is lt 10 um For applications with large temperature changes The surface should have the same or similar thermal expansion properties as the N 565 v You have accounted for the space required to route cables without bending and according to regulations 20 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories Screws according to the selected mounting option see above Four M3x12 screws in the scope of delivery or 4 M4 screws of suitable length not in the scope of delivery Suitable screwdriver Mounting the N 565 on a Surface 1 Only for mounting from above When the required mounting holes in the base body of the N 565 are covered by the moving platform Start up the stage p 29 and command the moving platform to a suitable position see user manual of the controller and arrows in the illustration 2 Align the stage on the surface so that the corresponding mounting holes in the stage and the surface overlap 3 Screw the screws into the mounting holes according to the selected mounting option p 29 Mounting from above Insert the screws through the moving platform and the base body of the N 565 into the surface Mounting from below Insert the screws through the surface into the base body of the
8. u 2 22 022 ae as 5 General Safety Instructions simini niiina anaa aeaaaee aa aaia 5 Organizational MEOSSurOS cicle 6 2 1 Intended Use The N 565 is a laboratory device as defined by DIN EN 61010 1 It is intended for indoor use and in an environment which is free of dirt oil and lubricants In accordance with its design the N 565 is intended for single axis positioning adjusting and shifting of loads at different velocities The N 565 is a stage for nanopositioning technology The feed is produced by NEXACT piezo actuators coupled to a ceramic rail PiezoWalk principle The N 565 is equipped with a linear encoder for direct position measurement The intended use of the N 565 is only possible when installed and in connection with a suitable controller p 11 The controller is not included in the scope of delivery of the N 565 2 2 General Safety Instructions The N 565 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the N 565 gt Only use the N 565 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the N 565 N 565 NEXACT Stage MP148E Version 1 0 0 5 2 Safety PI 2 3 Organizational Measures User manual
9. using the Screws Maximum screw in depth in the moving platform of the N 565 M2 screws 3mm M2 5 screws 4 mm M3 screws 5 mm Maximum torque M2 screws 0 3 Nm M2 5 screws 0 7 Nm M3 screws 1 3 Nm 3 Check that the load is affixed firmly to the moving platform of the stage N 565 NEXACT Stage MP148E Version 1 0 0 25 5 Installation Pp I 5 5 Connecting the N 565 to the Controller 3m Figure 11 N 565 Connections 1 HD Sub D 15 m drive connector 2 Sub D 15 f sensor connector 3 Adapter Sub D 15 m to HD Sub D 15 f Prerequisites You have read and understood the general notes on installation p 15 lt You have installed a suitable controller p 11 v You have read and understood the user manual of the controller v The controller is switched off Tools and accessories N664B0001 adapter in the scope of delivery p 11 Screwdriver for slotted screws SL 26 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Connecting the N 565 to the E 861 1A1 controller 1 Connect the drive connector of the stage to the corresponding controller socket see user manual of the controller 2 Connect the sensor connector f of the stage to the controller a Connect the sensor connector f of the stage to the connector side of the adapter Sub D 15 m b Secure the connection with the integrated screws against a
10. ANO POSITIONING WWW PI WS 5 Installation NOTICE Damage from mechanical actions The ruler of the linear encoder is scratch sensitive and can be damaged by mechanical actions e g from pointed objects gt Treat the ruler with extreme care The ruler is not accessible in the reference position of the moving platform delivery state If necessary before installation and demounting gt Start up the stage p 29 and perform a reference move to the reference point switch see the user manual of the controller NOTICE Malfunction due to soiling Any type of soiling e g dust oil grease or condensation will render the N 565 inoperable gt Keep the N 565 free from dirt and condensation gt Avoid touching the ceramic rail of the NEXACT drive and the ruler of the linear encoder The ceramic rail and the ruler are not accessible in the reference position of the moving platform delivery state If necessary before installation and demounting gt Start up the stage p 29 and perform a reference move to the reference point switch see the user manual of the controller NOTICE Damage from incorrect mounting Incorrect mounting of the N 565 or incorrectly mounted parts can damage the N 565 gt Only mount the N 565 and the loads on the mounting fixtures holes intended for this purpose N 565 NEXACT Stage MP148E Version 1 0 0 17 5 Installation Pp I NOTICE Warping
11. Co KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge Any old PI equipment can be sent free of charge to the following address Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 D 76228 Karlsruhe Germany N 565 NEXACT Stage MP148E Version 1 0 0 47 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the N 565 an EC Declaration of Conformity has been issued in accordance with the following European directives 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below EMC EN 61326 1 2013 Safety EN 61010 1 2010 RoHS EN 50581 2012 If an electrical operating device is designed to be integrated into another electrical operating device The operator is responsible for standards compliant integration of the electrical device into the overall system et ng N 565 NEXACT Stage MP148E Version 1 0 0 49
12. FORMATION For products that are supplied with software CD in the scope of delivery access to the manuals is protected by a password Protected manuals are only displayed on the website after entering the password The password is included on the CD of the product N 565 NEXACT Stage MP148E Version 1 0 0 3 1 About this Document Pp I For products with CD Identify the password 1 2 3 Insert the product CD into the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Downloading Manuals 1 2 na gt Open the website http www pi ws Click Info If you have a user name and password a Click Login b Log in with the user name and password Click gt gt Product Downloads In the Product Files area click the corresponding product category On the right hand side of the page select the corresponding sub category Navigate to the product code on the page The following manuals are displayed Freely accessible manuals Manuals that are protected by a password Click the desired manual and save it to the hard disk of your PC or to a data storage medium 4 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter Intended Use
13. I 5 4 Affixing the Load to the N 565 NOTICE Screws that are too long The N 565 can be damaged by screws that are screwed in too deeply gt Observe the depth of the mounting holes p 42 gt Only use screws of the correct length for the respective mounting holes Prerequisites v You have read and understood the general notes on installation p 15 v You have properly p 18 mounted the stage v You have prepared the load so that it can be affixed to the mounting holes on the moving platform The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast two points are provided for affixing the load on the moving platform Tools and accessories Atleast two screws of suitable length Options M2 5 screws M3 screws Suitable tools for fastening the screws 24 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Affixing the load to the N 565 1 Figure 10 Mounting holes for affixing the load to the moving platform 18x M2 5 holes with 4 mm thread depth 2 18x M2 holes with 3 mm thread depth 3 4x M3 holes with 5 mm thread depth For the exact position see Dimensions p 42 1 Align the load so that the selected mounting holes in the moving platform can be used for affixing it 2 Affix the load to the selected mounting holes in the moving platform
14. PI MP148E N 565 NEXACT Stage User Manual Version 1 0 0 Date 27 08 2015 This document describes the following products N 565 160 Precision Linear Stage 13 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 80 x 20 mm W x L x H Piezoelectric Stepping Drive NEXACT N 565 260 Precision Linear Stage 26 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 110 x 20 mm W x L x H Piezoelectric Stepping Drive NEXACT N 565 360 Precision Linear Stage 52 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 160 x 20 mm W x L x H Piezoelectric Stepping Drive NEXACT Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PIMag PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation 2015 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights The use of any text images and drawings is permitted only in part and only when indicati
15. ass acc to EN 61140 VDE 0140 1 Degree of pollution acc to EN 60664 1 2007 VDE 0110 1 Degree of protection acc to IEC 60529 10 2 Maximum Ratings The stage is designed for the following operating data Maximum Operating Maximum Operating Maximum Power Frequency Consumption A A 1500 Hz 40 W N 565 NEXACT Stage MP148E Version 1 0 0 41 10 Technical Data Pp I 10 3 Dimensions Dimensions in mm Characters used to separate decimal places Depth and diameter of holes Period All other dimensions Comma 4x 2 5H7 V5 42 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment 10 4 1 Drive Connection The HD Sub D 15 connector transmits the signals to control the drive AMP Amplifier enable The character indicates that the corresponding pin is not connected This pin is connected to the GND in the connector shell In the E 861 1A1 controller this pin is used to activate the amplifiers N 565 NEXACT Stage MP148E Version 1 0 0 43 10 Technical Data Pp I 10 4 2 Sensor Connection Pin assignment of the Sub D f connector on the N 565 The Sub D 15 connection transmits the signals from and to the integrated incremental linear encoder sensor and the reference point switch 8 1 BOS Gaia te wwe we wu fe 15 9 Figure 14 Sub D 15 connector f
16. ccidental disconnection c Connect the female side of the adapter HD Sub D 15 f to the panel plug of the controller see user manual of the controller 3 Secure the connections on the controller with the integrated screws against accidental disconnection N 565 NEXACT Stage MP148E Version 1 0 0 27 PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation srsnusrssennnnnnnnnennnnnnnnnnnnnnnnnnnnnnen 29 Operating Parameters wes c cvsssatvevisssidesiasitacevestedeeassncevidacds cevuaaeddvatessedevaasncacudesnsceveagniuees 30 Operating the N 565 ia aan eu 31 Discharging the Piezo Actuators of the Drive nnuennnsnnnennnnnnnennnnnnennnnnnennnnnnenn 31 6 1 General Notes on Start Up and Operation NOTICE Damage from collisions Collisions can damage the stage the load to be moved and the environment gt Make sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage gt Do not place any objects in areas where they can be caught by moving parts gt Stop the motion immediately if a controller malfunction occurs gt If possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion NOTICE Damage from changes in position due to external forces Displacement of
17. ces of the N 565 with a cloth that is slightly dampened with a mild cleanser or disinfectant e g ethanol or isopropanol gt Do not do any ultrasonic cleaning N 565 NEXACT Stage MP148E Version 1 0 0 33 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting In this Chapter General Notes on Troubleshooting 4444srsnaunnnnonnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nen 35 Possible Causes and Correction cccccccecceceeeeeeeeeeeseeceeeeecaeeeeaaeseeeeeeeaeeesaeeneeeeeaes 36 8 1 General Notes on Troubleshooting CAUTION AN Risk of glare and irritation The linear encoder of the N 565 uses a class 2 laser according to DIN EN60825 1 2007 Technical data of the laser Lmax 1 mW 655 nm On delivery and if used according to the intended use of the N 565 the laser is fully shielded Laser radiation can exit from the laser only if N 565 is opened The laser beam can cause glare and irritation gt Do not open or disassemble the N 565 gt Contact our customer service department if there is any malfunction of the N 565 N 565 NEXACT Stage MP148E Version 1 0 0 35 8 Troubleshooting P J 8 2 Possible Causes and Correction Target position is approached too Servo control parameters 1 Switch off the servo control slowly or with overshoot are not optimally set system immediately Target position is not kept stable Large changes in the load 2 Check the settings of th
18. chnical Features He een 12 3 5 1 Linear Encoder Sensor mcocccincccnnncccconcnnnonnnnnnnnnoneccnnnnn nan nnnn cana ncnnns 12 3 5 2 GOCE 12 4 Unpacking 13 A AAA I 5 1 General Notes on Installation oooonnnccicnnnnninnnnnnnonnccnn canaria narrar nara 15 5 2 Mounting the N 565 on a Surface cccccccnncconocanoncccnonccnnnnnnn nn cnc cnn rn 18 5 3 Setting Upan XY System leer 22 5 4 Affixing the Load to the N 565 ononccccnnoccconononcconononccnnnnn cnn nan n cnn 24 5 5 Connecting the N 565 to the Controller ooooocnnccnnnccnnnnncnnoccnnnccccnrncnncrnnnnana rancio 26 10 11 12 Start Up and Operation 6 1 General Notes on Start Up and Operation 6 2 Operating Parameters 6 3 Operating the N 565 6 4 Discharging the Piezo Actuators of the Drive Maintenance 7 1 General Notes on Maintenance 7 2 Cleaning the N 565 Troubleshooting 8 1 General Notes on Troubleshooting 8 2 Possible Causes and Correction Customer Service Technical Data 10 1 Specifications 10 1 1 10 1 2 10 4 1 10 4 2 10 4 3 Old Equipment Disposal EC Declaration of Conformity Ambient Conditions and Classifications 10 2 Maximum Ratings 10 3 Dimensions 10 4 Pin Assignment Drive Connection Sensor Connection Pin Assignment of the N664B0001 Adapter PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Objective and Target Audience of this User Manual coonooccnnnoccccnonocnnccononnnonano
19. e servo control parameters 3 If necessary correct the settings of the servo control parameters Uncontrolled oscillation of the N 565 Reduced holding force and feed Ceramic rail of the gt Contact our customer service force NEXACTO drive is soiled department p 37 No or limited motion Excessive load gt Reduce the load see Data Table p 39 Scale of the encoder is gt Contact our customer service soiled e g from being department p 37 touched Encoder malfunction due gt Carry out a reference move to shock impact see user manual of the controller If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 37 36 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws gt Ifyou have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present gt If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manua
20. e point switch is always approached from the same side Recommended controllers from PI fulfill this requirement with their automatic direction detection for reference moves to the reference point switch 6 2 Operating Parameters If you use the software included in the scope of delivery of the E 861 1A1 controller the operating parameters can be loaded from the PIMicosStages2 dat stage database gt Download the PI Update Finder from the PI website http update pi portal ws and use it to update the P MicosStages2 dat stage database on your PC For further information on the stage databases refer to the user manual of the E 861 1A1 controller 30 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 3 Operating the N 565 Prerequisites Y S S SS You have read and understood the general notes on start up and operation p 29 You have read and understood the user manual of the controller You have read and understood the user manual of the PC software You have properly mounted the stage p 15 The controller and the required PC software have been installed All connections with the controller have been established see user manual of the controller Operating the N 565 gt Follow the instructions in the manual of the controller used for startup and operation of the N 565 6 4 Discharging the Piezo Actuators of the Drive INFORMATION The N 565 is
21. ls are available for download p 3 on our website N 565 NEXACT Stage MP148E Version 1 0 0 37 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter SPECIICAMONS ari ker 39 Maximumi Ratings u nee een 41 Dimensions eine 42 Pin Assignment a 2 a kin 43 10 1 Specifications 10 1 1 Data Table Preliminary data N 565 160 N 565 260 N 565 360 Unit Tolerance Active axes x x x Motion and Positioning Travel 13 26 52 mm Integrated sensor Optical linear Optical linear Optical linear encoder PIOne encoder PlOne encoder PlOne Sensor resolution 0 5 0 5 0 5 nm Minimum incremental 2 2 2 nm motion Velocity closed loop 10 10 10 mm s max Unidirectional repeatability 5 5 5 nm typ Pitch at full travel range 30 40 80 rad typ Yaw at full travel range 30 30 30 Straightness and flatness of 1 1 1 5 um typ motion at full travel range Mechanical Properties Load capacity 20 20 20 N max Feed force active 10 10 10 N max Holding force passive 10 10 10 N min N 565 NEXACT Stage MP148E Version 1 0 0 39 10 Technical Data Drive Properties Motor Type Operating voltage Miscellaneous Operating temperature range Material Mass Dimensions Cable length Connector Recommended controller driver 40 NEXACT piezo stepping drive 10 to 50 10 to 50 Al black anodized 0 3 65 x 80 x 20 3 HD Sub D m 15 pin motor HD Sub D f
22. n the Specifications section p 39 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 5 2 Reference Point Switch The stage is equipped with a direction sensing reference point switch that is located approximately in the middle of the travel range This sensor transmits a TTL signal that indicates whether the stage is on the positive or negative side of the reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals 12 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacki N 565 NEXACT Stage ng Unpack the N 565 with care Compare the contents with the items listed in the contract and the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact Pl immediately Keep all packaging materials in case the product needs to be returned MP148E Version 1 0 0 13 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ooonncninnninicinicninnnncnnnacannccnnnccn arrancan rana 15 Mounting the N 565 on a Surface 220 2200nnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn
23. ng the source Original instructions First printing 27 08 2015 Document number MP148E LMo Version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Objective and Target Audience of this User Manual u 1 1 2 Symbols and Typographic Conventions oooconcccnnccononccononananoconancn nan nsen nana 1 1 3 BENON siaren idanaerten caches iddtauancdcguunvedadaiuenneviveddetommeceaaeydeds 2 1 4 EU iii ad 3 1 5 Other Applicable DOCUMENTS ooooconcccnnccconocinonoccnoncconann conc nano cnn carr rra 3 1 6 Downloading Manuals occoconnccccnonoccccnnnocccononancccnnnonc ane 3 2 Safety 5 2 1 Intended USE sresti a a tarta 5 2 2 General Safety Instructions ooonnnnnnnccnnncconncnnnncccnn nc rra 5 2 3 Organizational Measur8S coomcinnncnnnnccnncccnnccnnncncnnc cnn nn 6 3 Product Description 7 3 1 Model Overview cs ixciiociomsiocrnada canaria dador nennen 7 3 2 PrOQUC VIG WE scada 8 3 2 1 Product Detalls ce oia tried 8 3 2 2 Product LabelingQ oococonoccccnoniccccnnnoccccnononnnnnanannnn cano aaa iaaa ernennen 9 3 3 Scope of Delivery nuunsnseennnannnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnen 11 3 4 Suitable Controllers 240u424044440onnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnnnnnen 11 3 5 Te
24. nnnnnnnnennnnnnnnnen 18 Setting Up an XY System ana 22 Affixing the Load to the N 565 uursnsuunssennnnnnnannnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnonnnnnnnnnannn 24 Connecting the N 565 to the Controller 0urs40usrn0annnnnennnnennnnnnnnnnnnnnnnnnnnnnnnnn 26 5 1 General Notes on Installation NOTICE Damage from changes in position due to external forces Displacement of the moving platform of the stage from externally acting forces can damage the drive Changes in position of the moving platform that are triggered by externally acting forces can also damage the load or the environment gt Especially when the stage is vertically mounted make sure that the forces that act on the moving platform in the direction of motion do not exceed the active push pull force of the drive p 39 gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually N 565 NEXACT Stage MP148E Version 1 0 0 15 5 Installation pP I Figure 4 Accessible when the moving platform is driven out Ruler of the linear encoder 1 Bottom of the moving platform of the N 565 2 Scale of the linear encoder do not touch 1 2 Figure 5 Accessible when the moving platform is driven out Ceramic rail of the NEXACT drive 1 Bottom of the moving platform of the N 565 2 Ceramic rail of the NEXACT drive do not touch 16 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO N
25. nononannnos 1 Symbols and Typographic Conventions ooooconcccncccconocananaccnoncnnnona nano nnnannc cnn naar rn 1 DO TIMITION cria AA EUA AREA acaecida 2 A LITE PEN E O T 3 Other Applicable DOCUMEMIS cccceceeeeeeeeceeeeeeaaeceeeeeeeaeeecaaeeseaaeseeneeseaeessaaeseeneeeaes 3 Downloading Manuals en EA KRAAN EAR A 3 1 1 Objective and Target Audience of this User Manual This manual contains information on the intended use of the N 565 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation N 565 NEXACT Stage MP148E Version 1 0 0 1 1 About this Document Pp I INFORMATION Information for easier handling tricks tips etc Symbol Meaning Label 1 Action consisting of several steps whose sequential order 2 must be observed gt Action consisting of one or several steps whose sequential order is irrele
26. ns v You have properly attached the lower stage to a surface p 18 Tools and accessories 4 M3 screws in the scope of delivery of the upper stage p 11 Suitable screwdriver 22 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Setting up an XY system OO e fe e Figure 9 Setting up an XY system consisting of two N 565 260 stages 1 Upper stage moving platform in reference position with a d mounting holes 3 4 mm with counterbore for M3 socket head cap screws 2 Lower stage with a d M3 mounting holes in the platform Holes that overlap during attachment are marked with the same letter 1 If necessary Make the required mounting holes in the base body of the upper stage accessible Start up the upper stage p 29 and perform a reference move to the reference point switch see the user manual of the controller 2 Position the upper stage rotated by 90 on the moving platform of the lower stage see above figure 3 Align the upper stage so that the required mounting holes in the upper and lower stage overlap holes a to d in the above figure 4 Completely screw in one M3 screw into each of the holes 5 Make sure that screw heads do not protrude from the countersunk holes 6 Check that the upper stage is affixed firmly N 565 NEXACT Stage MP148E Version 1 0 0 23 5 Installation Pp
27. of the N 565 due to mounting on uneven surfaces Mounting the N 565 on an uneven surface can warp the N 565 Warping reduces the accuracy gt Mount the N 565 on an even surface The recommended evenness of the surface is lt 10 um gt For applications with large temperature changes Only mount the N 565 on surfaces that have the same or similar thermal expansion properties as the N 565 NOTICE Damage from unsuitable cables Unsuitable cables can damage the stage and the electronics gt Only use cables provided by Pl for connecting the N 565 to the electronics INFORMATION For optimum repeatability all components must be firmly affixed to each other 5 2 Mounting the N 565 on a Surface Options for mounting the N 565 onto a surface INFORMATION The mounting holes in the base body of the stage are only accessible from above when the moving platform is in the reference position delivery state If necessary gt Start up the stage p 29 and perform a reference move to the reference point switch see the user manual of the controller The mounting holes of the N 565 are intended for the following mounting options 18 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Mounting option Mounting holes details see Dimensions p 42 Mounting from above with M3x12 screws Figure 6 N 565 top view M4 holes with core hole diameter
28. r Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 110 x 20 mm W x L x H Piezoelectric Stepping Drive NEXACTO N 565 360 Precision Linear Stage 52 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 160 x 20 mm W x L x H Piezoelectric Stepping Drive NEXACTO N 565 NEXACT Stage MP148E Version 1 0 0 7 3 Product Description E i 3 2 Product View 3 2 1 Product Details Figure 1 N 565 product view 1 Moving platform 2 Cables for connecting sensor and drive to the controller 3 Base body The arrow in the figure shows the positive direction of motion 8 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 2 2 Product Labeling 1 2 Figure 2 Position of the product labeling on the stage 3 Figure 3 Position of the product labeling on the motor and sensor connector N 565 NEXACT Stage MP148E Version 1 0 0 9 3 Product Description i 10 Position Labeling Description LE See E 565 N 565 x60 Product name AAA following the period identify the model exactly 414000946 Serial number example individual for each N 565 Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers A Warning sign Observe manual 8 comi of origin Germany Country of origin WWW PIMICOS COM Manufacturer s address websi
29. te Symbol for the protective earth conductor marks the position of the holes via which the N 565 is to be connected to the protective earth conductor Warning sign Observe manual here Top side of sensor connector Warning sign and values for the laser Pr p 33 here Bottom side of sensor connector 4 Notice of laser radiation p 33 here Top ee tse nyse side of sensor connector TEC 60825 1 Ed 2 0 Laserstrahlung nicht in den Stahl blicken Laser Klasse 2 EN 60825 1 2007 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 3 Scope of Delivery Stage according to order p 7 5870500002 Screw set for mounting of the N 565 4 M3x16 socket head cap screws ISO 4762 2 dowel pins 3 m6 x 8 ISO 2338 000036450 Accessories for connection to the grounding system 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers Adapter Sub D 15 m to HD Sub D 15 f for sensor connection MP137EK Short instructions for the NEXACT stage 3 4 Suitable Controllers E 861 1A1 Digital NEXACT Controller gt To order contact our customer service department p 37 N 565 NEXACT Stage MP148E Version 1 0 0 11 3 Product Description i 3 5 Technical Features 3 5 1 Linear Encoder Sensor The stage is equipped with an optical linear encoder For the encoder resolution refer to the table i
30. the moving platform of the stage from externally acting forces can damage the drive Changes in position of the moving platform that are triggered by externally acting forces can also damage the load or the environment gt Especially when the stage is vertically mounted make sure that the forces that act on the moving platform in the direction of motion do not exceed the active push pull force of the drive p 39 gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually N 565 NEXACT Stage MP148E Version 1 0 0 29 6 Start Up and Operation Pp I NOTICE oO Uncontrolled oscillation Your application and the N 565 can be damaged by uncontrolled oscillations Uncontrolled oscillations can be identified by the fact that the stage approaches the target position too slowly or too fast or does not keep it stable servo jitter If uncontrolled oscillations occur during the operation of the N 565 gt Immediately switch off the servo control system of the affected axis gt Check the settings of the servo control parameters INFORMATION Shock like impacts can cause encoder malfunction gt Protect the stage from shock like impacts gt Carry out a reference move see user manual of the controller INFORMATION The positive direction of motion is away from the cable exit side INFORMATION The repeatability of the positioning is only ensured when the referenc
31. vant List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontally The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 2 Version 1 0 0 MP148E N 565 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals E 861 NEXACT Servo Controller PZ205E User Manual PIMikroMove SM148E Software Manual 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading gt Contact our customer service department p 37 IN
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