RTM User Manual - Newport Corporation
Contents
1. Model shown RTM350PP Dimensions in millimeters L RTM 350PP 146 5 RTM 350PE 129 5 RTM 350CC 192 RTM350MS 143 4 SS SS es Nevvport 19 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 10 0 Maintenance 10 1 10 2 10 3 Maintenance RTM Series stages necessitate no particular maintenance Nevertheless this are precision mechanical device that must be maintained and manipu lated with precaution PRECAUTIONS RTM Series stages must operate or to be stocked in a clean environment without dusts humidity solvent or other substances Repairing CAUTION Never attempt to disassemble an element of the stage that has not been specified in this manual base and interface plates To disassemble a non specified element can provoke a bad functioning of the stage If you observe a bad functioning of your stage please contact immediately your sale representative that will know to indicate you manipulations to undertake or instructions to return us the equipment CAUTION All disassembling attempt or repair of stage without authorization will interrupt your warranty Control CAUTION It is recommended to return us your stage every year for a control of its specifications QD EDH0160En1011 07 97 20 Newport Servi ce For m Your Local Representative Tel Fax Name Return Authorization Pleas2. Maximum torque a rotary stage can supply This value is specific to the motor used So we specify it for each kind of motor When rotary stages are used in vertical the load moment is created by an off centered load Maximum inertia Maximum inertia that a stage can move around its rotation axis 3 5 Off center Load Characteristics RTM80 RTM120 RTM160 RTM240 RTM350 Cz N 600 1200 1800 2700 4200 a mm 30 40 50 70 100 ka urad N m 21 3 2 2 1 3 0 5 PE 1 8 10 20 24 27 Mz PP N m 1 8 8 14 17 18 CC 1 8 2 10 11 13 14 1 RTMB80CCHL only with Q Off center load Q lt Cz 1 D a Cz Normal center load capacity on bearings D Cantilever distance in millimeters a Construction parameter ka Transversal stiffness Mz Nominal torque 3 6 Motorized Stages Weight Weights indicated into the below table are average values for stages with the drive unit RTM80 kg 1 2 RTM120 kg 4 5 RTM160 kg 6 5 RTM240 kg 10 RTM 350 kg 16 The weight variation according to the drive unit is not very significant NS Nevvport 5 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 4 0 Drives 4 1 Stepper Motor Drive Stepper motor driven stages are offered in two variants e One mini step drive version RT MPP e One full step version RTMPE Full Step Drive Is used for stepper motors when 1 pulse emmited by electronic corres ponds to theoritical phys
3. N C 5 Phase 3 Motor Motor N C 6 Phase 3 Motor Motor N C 7 Phase 4 Motor Motor N C 8 Phase 4 Motor Motor N C 9 Common phase 3 4 N C N C N C 10 N C N C N C N C 11 Common phase 1 2 N C N C N C 12 N C N C N C N C 13 Mechanical Zero Mechanical Zero Mechanical Zero Mechanical Zero 14 Shield Ground Shield Ground Shield Ground Shield Ground 15 Encoder Index Pulse Encoder Index Pulse Encoder Index Pulse Encoder Index Pulse 16 0 V logic 0 V logic 0 V logic 0 V logic 17 End of Run End of Run End of Run End of Run 18 End of Run End of Run End of Run End of Run 19 Encoder Phase A Encoder Phase A Encoder Phase A Encoder Phase A 20 Encoder Phase B Encoder Phase B Encoder Phase B Encoder Phase B 21 Encoder Power V Encoder Power 5 V Encoder Power 5 V Encoder Power 5 V 22 0 V Encoder 0 V Encoder 0 V Encoder 0 V Encoder 23 Encoder Phase A Encoder Phase A Encoder Phase A Encoder Phase A 24 Encoder Phase B Encoder Phase B Encoder Phase B Encoder Phase B 25 Encoder Index Pulse Encoder Index Pulse Encoder Index Pulse Encoder Index Pulse l SS Nevvport 11 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 6 0 Connection to a Newport Electronics 6 1 Warnings on electronic units Electronic units are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the el
4. Thesecond one Is dued to conception of our positionning stages The first quantity varies on a linear way with travel It can be compensated by mean of controller The second term is intrinsic to our stages ans cannot be compensated We call it on axis accuracy NOTE In this manual we will use On axis accuracy repetability Hysteresis Those definitions are valid for linear stages as well as for rotary stages The controls of on axis accuracy repetability and reversal error are made sys tematically with our test equipement in an air conditioned room 20 C Linear stages are controlled with laser interferometry Hewlett Packard resolution 10 nm Rotary stages are controlled with precision optical encoder Heidenhain resolution 5 10000 For each stage a linear cycle with 21 measures on travel and 4 cycles in each direction gives a total of 164 points NS Nevvport 3 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 3 2 Mechanical Specifications Definitions Sensitivity unidirectional Minimum motion that a stage can make Our stages and our kinematic chain are conceived on such a way that sensitivity is better than resolution of encoders tipically 1 um 0 1 um or 1 1000 deg Resolution The smallest motion a metrology fixed to the stage can measure For manual stages resolution is given by graduation on micrometer For motorized stages resolution is given by reading of e
5. dependent 25 pin female connector amp STEPPER MOTOR OPTIONS 05 45 46 UE31PE U 30VDC 1 0 4A Encoder Supply 5VDC WARNING Do not mistake the 25 pin Remote Control Interface Connector with one of the Stage Connector Interface on MD1000 and MM2500 units Nevvport 13 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 6 3 Driver Module Options Driver modules for our MotionMaster MM Series controllers are available for each of the RTM Series stages They are referenced as 2 digit coded options to be used in the motion controller part number and are listed in the following table MM2000 MD1000 MM2500 MM3000 MM4005 Electronics io g i ne Elna Without With Without With 1 plea Manual Control Keyboard RTM80PP 12 51 12 51 12 12 RTM120PP 15 DD 15 55 14 15 RTM 160 350PP 1A 5A 1A 5A 08 1A RTM80PE 05 46 05 46 03 05 RTM 120 350PE 1H 5J 1H 5J 05 1H RTM80CCHL 72 92 72 7G RTM 120 350CC 79 96 76 7H RTM80CC 05 64 83 63 64 1 Front panel with keypad and display is ordered as a chassis option 6 4 Cables All our stages are delivered with a 3 meter cable with 25 pin Sub D connector So they can be directly connected to our controllers drivers of MM series Locking Knobs lt Disconnected 59 gt Statical 104 Dynamical 166 WARNING These cables are shielded correctly For a correc
6. spilling any liquid on the product may touch hazardous voltage points or short out parts SS EDH0160En1011 07 97 12 Nevvyport RTM Series High Performance Annular Rotation Stages SS 6 2 Connection On each stage is represented a label which indicates its name its serial number and the motor it is equipped ex UE31PP RTM80PE S N ENCODER 5V MOTOR UE31PP Stepper Motor U 30VDC l 1A WARNING Before to begin any connection make sure that the name of the motor indicated on the stage corresponds to the name of the motor indicated on the driver module WARNING Always turn power OFF electronics units to link up before to connect them stages Stages may be connected to the rear panel motor connectors labeled Motor any time prior to power up with the supplied cable assemblies WARNING Damage to stage may occur if the stage is not the same type as shown on driver label located near the stage interface connector see drawing below Check that the option number specified on this label correspond to the number indicated in the driver module options table for your stage see next page To protect the Stage and or FUSES N ED Driver Module gt TION Do not connect or during FO 5A 250V tes in a while Fault Condition France power is applied Remote Controle Interface 25 pin male connector REMOTE CONTROL Stage Interface stage
7. 0 001 deg angular resolution the modular design of RTM stages brings you the flexibility to choose the drive configuration that best matches your specific application requirements manual DC motor or step per motor driven versions with mini step or full step drive options higher torque 20 sec versions For optimum positioning performance and seamless compatibility we recommend our MotionMaster family of motion controllers for these devices The RTM Series stages are supplied with a 3 meter cable for connection to the MotionMaster controllers QD EDH0160En1011 07 97 2 Newport RTM Series High Performance Annular Rotation Stages 3 0 Characteristics 3 1 Position Precision Specifications of our products are established in reference to ISO 230 norm part II Determination of the position precision and repetability of the machine tools with CNC This norm gives definition of position uncertainty which depends of the 3 following quantitites Position Error Difference of postion between ideal position and real position Position Repetabilty Repetability Variation between ideal postion and real position approached n times Reversal Error Hysteresis Difference of position dued to direction of approach of ideal position Position uncertainty depends of 2 quantities e The first one is dued to service condition temperature position of article on the carriage and to uncertainty on screw pitch e
8. 60En1011 07 97 RTM Series High Performance Annular Rotation Stages 5 0 Motorization 5 1 Newport Stepper Motor Characteristics Motor Angle by Step Current Resistance Inductance Newport A Q mH Utilization UE31PP 3 6 0 56 7 6 8 4 Full Step UE41PP 1 8 1 2 3 4 3 Full Step or Mini Step UE62PP 1 8 1 8 2 6 4 9 Mini Step UE63PP 1 8 2 9 1 16 2 0 Mini Step 5 2 Command Signals for Newport Stepper Motors Command Signals Command Signals UE31PP UE41PP UE62PP UE63PP 1 2 3 4 1 2 3 4 Phase 1 Phase 1 Phase 2 Phase 2 Phase 3 Ti Lil Lf Phase 3 Direction e Displacement Direction Direction e Displacement Direction Direction Direction E O EDH0160En1011 07 97 8 Newport RTM Series High Performance Annular Rotation Stages 5 3 Newport DC Motor Characteristics Motor Mechanical Power Nominal Voltage Armature Resistance Tachometer W V Q V Krpm WESICC 2 53 24 57 UE404CC 40 75 18 6 3 10 UE511CC 110 75 5 1 7 10 5 4 Command Signals for Newport DC Motors Motor A Motor A Tacho Generator Tacho Generator Motor Motor Tacho Generator Tacho Generator Displacement Direction Direction lt Displacement Direction Direction In the above drawings Motor signal is referred to Motor signal Tacho Generator signal is referr
9. DEVE seara i E E 7 5 0 Motorization rriren 8 5 1 Newport Stepper Motor CharacteriStiCS sssssssssrrrsssrerrrrsssrrrrrrrssens 8 5 2 Command Signals for Newport Stepper MOtOrS sesssssssssssesrrrsssrrrrrresens 8 5 3 Newport DC Motor Character isStiCs oo cccccssssssssssssteeeeeeesssessssssseeeneess 9 5 4 Command Signals for Newport DC Motors cccccccccessssssreeeeessesseeeees 9 539 DeMSOCS POS MOU ai jevceaicipconinvine neni dasinandiereinircomadnaiendae a EN Eia 9 5 6 Feedback Signals POSIEON siisccpxvasmaunnnssnceniirxasanciasonrenindiniisysisiniatcesnasicenesats 10 5S PINOUT siprann EEEE E 11 6 0 Connection to a Newport Electronice 0 0 00 12 6 1 Warnings ON electronic UNIES cccccccccssssssseecceesssssseeeeeessssssteeeeeesesseaees 12 OZ CONME UO aa Ea A A A S A 13 6 3 Driver Module OptiOnS a iraiiiterunsiciaiincinssiitean te ga ssvaieuiinesesaivine daa sitarseecine tibiae 14 eA LOD n A melaniateamemammaciay actin 14 7 0 Connection to other electronics 15 A Nevvport iii EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 00 OU sropsenna aa 16 9 0 DIMENSIONS 0 cccccccccccccccccccccccccsccecscsscssscsscesserscsssrsesseen 16 E RIMO ee E E A E EE 16 o2 RTN Del 2 nner nee A E E 17 g3 RIMI oes ccs E Snes eae ee 17 QA RE M240 oiceccccccccccccccsccccucccccuccccuceccucecauccecauseeuaueeeeauseeeaueeseaueeeuaueeeuaueesaansss 18 J5 RIM DO acces acs e
10. RTM Series High Performance Annular Rotation Stages High Performance Annular Rotation Stages RTM Series 10 Introduction This manual provides operating instructions for the rotation stage that you have purchased in the RTM Series RTMPP RTMPE e RTMCCHL e RIMCC e RTMMS It indicates equally minimum maintenance operations useful to a good equipment functioning RECOMMANDATION We recommend you to read attentively the chapter Connection to elec tronics before RTM stage using NS Nevvport 1 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 20 Description RTM Series rotation stages offer high precision angular positioning accura cy with high load carrying capacity and a compact annular design Precise rotation is ensured by a precision ground hardened worm and gear drive worm gear ratio 1 180 which provides smooth motion A double row of pre loaded recirculating ball bearings supports the rotating platform adding the benefits of high load capacity and excellent rigidity All RTM stages are equipped with mechanical limit switches 165 for RTM80 and RTM 120 170 for other sizes and a home position allows the stage to be returned to a reference origin position Position measuring is performed with a 2000 pts rev encoder integral with the motor shaft All RTM Series stages are equipped with a knurled knob for a manual control While all featuring
11. e it is imperative to fix it e directly on a rectified working surface e onan other stage directly or with a mounting interface but in no case the stage has to remain without fastening It is equally necessary to fasten the device to move on the carriage CAUTION The working surface flatness directly influences on stages accuracy and performances 9 0 Dimensions 9 1 O Y p H max 13 5 O A i 4 holes M4 thd on 1 55 x 17 5 gt 114 95 eile L gt Both sides 4 holes M3 thd at 90 on 57 Depth 4 80 25 pin Sub D connector 62 5 pam Model shown RTM80OPP Dimensions in millimeters L H RTM 80PP 80 5 42 RTM80PE 129 32 RTM 80CCHL 141 48 5 RTM80CC 106 5 32 RTM80MS 90 5 32 SS EDH0160En1011 07 97 16 Nevvyport RTM Series High Performance Annular Rotation Stages 9 2 RTM120 z 5 60 i J Q max j X 4 holes M6 thd on 80 x 28 5 Depth 10 gt 21 144 2 lt L l 120 Both sides 4 holes M4 thd at 90 on 87 5 Depth 6 SERIAL NUMBER Model shown RTM120CC Dimensions in mi
12. e obtain prior to return of item Compagny Adress Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems SW Newport 21 EDH0160En1011 07 97 SS EDH0160En1011 07 97 22 Nevvyport Motorized Translation amp Rotation Stages EC Declaration of Conformity We declare that the accompanying product identified with the CE mark meets all relevant requirements of Directive 89 336 EEC for Electro Magnetic Compatibility Compliance was demonstrated to the following specifications EMISSION Radiated and Conducted Emission per EN 50081 1 Residential Commercial and Light Industry Standard IMMUNITY Radiated and Conducted Immunity per EN 50082 2 Industrial Standard po ain DANIELO VP European Operations Zone Industrielle 45340 Beaune la Rolande France seme High Performance Annular Rotation Stages i ij z l me g USER S MANUAL QAD Newport RTM Series High Performance Annular Rotation Stages Warranty Newport Corporation warrants this product to be free from defects In material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s option To exercise thi
13. ectronics manual carefully before operating the instrument and heed all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any Way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the case CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture gt 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to assure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or
14. ed to Tacho Generator signal 1 When the stage moves in Direction the Motor voltage is higher than Motor voltage and Tacho Generator voltage is higher than Tacho Generator voltage 2 When the stage moves in Direction the Motor voltage is lower than Motor voltage and Tacho Generator voltage is lower than Tacho Generator voltage 5 5 Sensors Position x HomePosition EOR Limit a a Mechanical 7 aa i i Zero n erruse LULE Index Pulse ar lt Stage Travel Range gt Displacement Direction End of Run and Mechanical Zero are Open Collector type output signals Their use needs a pull up resistance connected to the power supply gene rally the power supply of the board where signals are sent QAS Newport 9 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 5 6 Encoder PhaseA Encoder Phase A Encoder Phase B Encoder 1 Phase B Newport User Stage _ Output Signal User Power Supply ex 4 7 KQ Pin 22 OV Encoders and Sensors 45V Power Pin 21 Index Pulse and Index Pulse are differential pair type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 Feedback Signals Position Encoder Phase A Encoder P
15. hase A Encoder Phase B Encoder PhaseB Direction The incremental sensor operates following the photoelectric measurement principle with a disk including slides When the sensor shaft turns the sen sor generates square signals in quadrature sent to pins 19 20 23 and 24 of the 25 pin Sub D connector Newport User Stage Encoder Phase A Pin 19 Encoder Phase A Pin 23 Encoder Phase B Pin 20 Output Signals Encoder Phase B Pin 24 Pin 21 yV r O 5 Encoders and Sensors Pin 22 a gy Power Encoders are differential pair type output signals Using these signals per mits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 QD EDH0160En1011 07 97 10 Newport RTM Series High Performance Annular Rotation Stages 3 7 Pinouts O O 0O OO 0O OO O0OOQ0OOQO O O O O 0O O 0O 0O 0O 270 Ore The 25 pin Sub D connection for each RTM stage is given in the following table UE31PP amp UE41PP UE31CC UE404CC Manual RTMPE RTM80CC RTM80CCHL RTMMS UE41PP UE62PP UE63PP UE511CC RTMPP RTM120CC to RTM350CC 1 Phase 1 N C Tacho Generator N C 2 Phase 1 N C Tacho Generator N C 3 Phase 2 N C Tacho Generator N C 4 Phase 2 N C Tacho Generator
16. ical motion of 1 full step of the motor Our full step stages have one more specification minimum increment of kinematic chain equals encoder resolution Mini Step Drive Is used for stepper motors when 1 pulse emmited by electronic corres ponds to theoritical physical motion of a fraction of a full step of the motor For these stages a mini step equals 1 10 of a full step Stepper Motor Performance Specifications Resolution Speed Motor sec RTM80PP UE41PP RTM120PP UE62PP RTM160PP 0 001 20 RTM240PP UE63PP RTM 350PP a O EDH0160En1011 07 97 6 Nevvyport RTM Series High Performance Annular Rotation Stages Resolution Speed Motor sec RTM80PE UE31PP RTM120PE RTM160PE 0 001 2 UE41PP RTM240PE RTM350PE 4 2 DC Motor Drive Two DC motor driven configurations are available e One version equipped with a tachometer RTM80CCHL RTM 120CC RTM 160CC RTM240CC RTM 350CC e One low power version RT M80CC DC Motor Performance Specifications Resolution Speed Motor sec RTM80CCHL UE404CC RTM 120CC RTM160CC 0 001 20 UE511CC RTM 240CC RTM350CC RTM80CC 0 001 25 UE31CC 4 3 Manual Drive One manual drive version is available equipped with a rotary encoder RTMMS Our CV1000 Display Counter permits to read the position RTM80MS Manual Performance Specifications Resolution Nb rev RTMMS 0 001 2 A Nevvport f EDH01
17. llimeters L RTM120PP 121 RTM120PE 129 5 RTM120CC 192 RTM120MS 143 4 9 3 RTM160 a S max l 4 holes M6 thd on Depth 10 gt 21 158 2 160 Both sides 6 holes M5 thd at 60 on 120 depth 7 A 114 75 y dp SS Model shown RTM160PP Dimensions in millimeters L RTM 160PP 146 5 RTM 160PE 129 5 RTM 160CC 192 RTM160MS 143 4 Nevvport 17 EDH0160En1011 07 97 RTM Series EDH0160En1011 07 97 High Performance Annular Rotation Stages 9 4 RTM240 4 holes M6 thd on 140 x 28 5 Depth 10 206 2 Both sides 6 holes M5 thd at 60 on 187 5 Depth 7 gt l Model shown RTM240PP Dimensions in millimeters L RTM240PP 146 5 RTM240PE 129 5 RTM240CC 192 RTM240MS 143 4 QAS 18 Newport RTM Series High Performance Annular Rotation Stages 9 5 RTM350 RRR O O y ee on ee A 4 holes M6 thd on LZ 182 x 32 Depth 10 gt 21 lt 248 2 gt lt L gt 350 28047 Both sides g 6 holes M6 thd at 60 on 295 Depth 7
18. ncoder informa tion as well for translation stage as for rotation stages Concentricity Displacement of the geometric center of a rotation stage from the rotation axis in the plan defined by bearings Wobble Tilt of rotation axis during rotation of a stage 3 3 Mechanical Specifications Diameters mm 80 120 160 240 350 Drive Stepper PP PE DC CCHL CC Manual MS On Axis Accuracy Si eon 0 010 RTM120 to RTM350 Repeatability 0 002 Hysteresis 0 006 RTM80 0 004 RTM120 to RTM350 50 RTM80 Wobble urad 40 RTM120 RTM 160 60 RTM240 RTM 350 Concentricity um 5 3 4 Load Specifications Definitions Load Capacity Cz Maximum load a stage can move This value is given with speed and accelaration specified for each stage and with a load perpendicalar to bearings Off Centerd Load Q Maximum cantiliver load a stage can move Q lt Cz 1 D a D Cantilever distance a Construction parameter On Axis Load Capacity Cx Direct load capacity on axis with specified speed and acceleration AD EDH0160En1011 07 97 4 Newport RTM Series High Performance Annular Rotation Stages Angular stiffness ka This is dued to stage cosntruction We specify this stiffness around X axis kax and around Y axis kay for translation and perpendicular to rotatio axis for rotary stages It allows determination of stages deformations dued to off centered load Nominal Torque Mz
19. notice Any changes will be reflected in future printings P A de Saint Gu nault 3 bis rue J Mermoz BP 189 91006 Evry Cedex France Tel 33 0 1 60 91 68 68 Fax 33 0 1 60 91 68 69 CYS EDH0160En1011 07 97 i Nevvyport RTM Series High Performance Annular Rotation Stages Table of Contents WA ECAC ar E S aio tsuonacentaaianerein ii ES Contents arrais nannaa Eea RARER RESTE iii WANO aE E E suntuiuanesesa V COU OEE EE EE ANTEE E E vi 1 0 Introduction sesrrerrrrrrrrrrrsrrssrrrrrrrsrrerrsrrerrrerrerrern 1 2 0 Description 0 0 csc cesses cseesessseetesesssesteeeseseeeeen 2 3 0 Characteristics cc ceeesescsteessssstsenessseeseeeeen 3 Bee POSItUON PREIS ICOM aususevneunuetanetnest ulannieuasidevoumncvactnatcnestvanstuinnuesuedteatatuaceny 3 3 2 Mechanical Specifications DefiNItions ccccccssssssssreeeeeessssessseseeeeeeees 4 3 3 Mechanical SUPCCIICALONSyiicscccatsivinnianirssavusnnnienineyiaaaanmniaveissiessinaaieens n 4 3 4 Load Specifications Definitions sssssssrrrssseerrrrrsnnrrrrrrsnnrnrrrrsssrrrrrrsssns 4 3 5 Off center Load Characteristics ssesssssssseerrrrrseeerrrrrrsnnrnrrrnsssrrrrrrsssne 5 3 6 Motorized Stages Weight sssssssssrrrsssrnrrrsssnerrrrrssnnrrrrnnsnnnrrrnnnssnrnrrrrsens 5 A0 DIVES e A 6 AA Stepper Motor DEIVG ssisisntvscecansintatincnsxcsedrestostsinhstoliasnnkeastonniuenarstoawerthaananscedans 6 42 OC VOLO DTIVE sosanna Eaa aaia 7 43 Manual
20. r is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this is dangerous WARNING Do not use this stage if any water has entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury WARNING Take care that this stage is not exposed to moisture and that water does not get into the stage WARNING Do not insert or drop metallic or inflammable foreign objects into this stage this may cause an electric shock or lock the drive WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its pe
21. rformances A Nevvport V EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages Caution CAUTION Do not place this stage in a damp or dusty place This may cause an elec tric shock or alter mechanical parts CAUTION Do not place this equipment in a location affected by oil fumes or steam This may cause an electric shock CAUTION Do not leave this equipment in places subject to extremely high tempera tures This may cause an electric shock CAUTION Do not move this stage if its power motor is on Then ensure that the cable to electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request cleaning and specifica tion control every year SS EDH0160En1011 07 97 vi Nevvyport
22. s warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transpor tation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not aplly to dammages resulting from e abad utilization Load on the stage graeter than specified load Carriage speed higher than specified speed Non respected grounds continuity Connectors locking When the load on the stage represents an electrical risk inevi tably it must be connected to the ground Bad mounting stage or fixing load e Modification of the stage or any part This warranty is in lieu of all other warranties expressed or implied inclu ding any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or conse quential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for informations only and product specifi cations are subject to change without
23. se sa te es ces ts se hee case ee neces 19 10 0 Maintenance iriiri 20 10 1 ME IPM STAIN cactsrcacuneceecdsnattaatsnttxnsancisteiacanucd tuihes sentatarnshatneantesivdcun anerantoindeaite 20 1O TR CD AE FG oane E E E E A R 20 IEEE n ga E E EE E E E AE 20 Service FOr aovndaanteunuessaucanacisdanetstinereastas asec wiacisauctauntie anvasiavcnm TEAN EIEEE EEA Eain 21 ENS E K We declare that the accompanying product identified with the C mark meets ies ote Re f ne S all relevant requirements of Directive 89 336 EEC for Electro Magnetic ere ki 6S Compatibility io NG v Ei 1 P i T amp Generic Standard Emission EN50081 1 G KS ee amp Immunity EN50082 2 OG A e LA ll yh Ka Residential Commercial and Light Industry and per IEC 1000 4 5 Surge Se i aa KA Immunity Standard Q ONG DA es oe Ko Newport Corporation shall not be liable for damages when using the product 6 EnA SEN ne KA e Modification of the product NS E n E amp e Using modified connector or modified or not supplied cables C9 Ne i i pe a e Connecting this product to non CE equipments is NY SA eo oe NINISI NINININI NINININI SINI NINININI NINININI EDH0160En1011 07 97 iv Nevvyport RTM Series High Performance Annular Rotation Stages Warnings WARNING Do not use this stage when its motor is emitting srnoke is unusually hot to the touch is emitting any unusual odor or noise o
24. t operating make sure for connectors locking grounds continuity provided by cables For long distance applications higher lengths cables are available in stan dard Electronic cable from MM controllers drivers to stages with 25 pin Sub D connector are available in 5m or 10 m length i O EDH0160En1011 07 97 14 Nevvyport RTM Series High Performance Annular Rotation Stages WARNING Cables creep into a typical industrial environment separtes motor cables and power supply cables Motor cables must be a specific csbles creep Electronic components included in our stages need 5V regulated voltage If you use cables longer than 3 m you have to add a voltage regulator 25 Pin Sub D Male 25 Pin Sub D Female E1050A T COD 5V T This regulator with 25 pin Sub D connector has to be fixed on the stage Others lengths up tu 25 m are available on request Please contact your sales representative A Sub D 25M Sub D 25F cable is necessary to connect a stage from a MM 2000 board via a UIB box 70 Connection to other electronics AVERTISSEMENT The responsibility of Newport will not be able to be committed in case of bad functioning or damage of a stage used with an electronics non provi ded by Newport A Nevvport 15 EDH0160En1011 07 97 RTM Series High Performance Annular Rotation Stages 8 0 Mounting WARNING Before to use a RTM stag
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