ALPHA STEP 500 MANUAL - CMI
Contents
1. key 11 Press the START key to initiate the measure 12 Level adjustment of the profile plot e Press the LEVEL key e Using the 2 displayed red cursors indicate two points on the profile plot that should be at the same level Use the lt and keys to move the cursors and the space bar to switch from one to another e Press ENTER The profile plot level is adjusted Box Box Vertical Units Difference Profile Trace Between Trace if RECIPE Dara CORFTCCALTE bree 7B Tres lar Values at L TTT and R RACE 6749 9A al Cursors 4 2291uUm Cursor Positions Recipe Summary Function Key Horizontal Units Assignments 13 Measuring cursors e Use the two cursors to get the height between two points of the plot e Average the value targeted by each of the two cursors by splitting them using the T and 4 keys e Use the space bar to switch from one cursor to the other or to activate both 14 Profile zoom e Press ZOOM a zoom box appears e Use the lt and keys or the trackball to move that box to the area you want to zoom in CMi J Pernollet Page 2 3 Alpha Step 500 CMi User manual 1999 last update 11th October 2010 Press FJ to anchor the box and use the lt and keys or the trackball to adjust the zoom box size Press F2 or ZOOM for seeing Press F3 to get back to original plot Press F4 to suppress the zoom box 15 Data saving e Press F4 save e D2. ATA BASE SAVE IDs window opens e Enter symbol into the first six ID fields quick shortcut Press F1 Default e Inthe part ID field enter the name as follows nom e Inthe Save data field choose SUMM RAW e Press ENTER to confirm 16 Data ae ie on floppy disk Press F4 or ESC to return to main menu Choose DISK PATH in CONFIG menu and press ENTER to see DISK PATH window Select Export to Import from C and press F4 Select CATALOG in DATA menu and press ENTER In Type field enter Any Data and press F2 Select the file and press F3 export Press N ASCII format Type a file name and press ENTER 17 End of operation Go back to camera view by pressing the Z key and then press UNLOAD Release the vacuum clamping and unload your sample Go back to main menu by pressing F4 or ESC Switch off the screen do not switch off the computer only the screen CMi J Pernollet Page 3 3
3. Alpha Step 500 CMi User manual 1999 last update 11th October 2010 EPFL STI CMI ALPHA STEP 500 The Alpha Step 500 equipment is used to characterize a sample surface profile by scanning it with a diamond tip sensor The obtained plot is a representation of the scanned area cross view It can measure steps height down to 50A through a scanning length of maximum 10mm The holder of this particular equipment is suitable wafers up to 100mm Do NOT put the tip in a hole or at any position away from the wafer To measure steps higher than 500um always do it in descent from the top of the feature 1 Switch on the computer screen 2 Press the Z key and check that the holder is in low position 3 Put your sample on the holder 4 Activate the vacuum clamping vac position and press the LOAD key 5 Keep the key pressed until the tip contacts the sample NEVER MOVE THE HOLDER WHEN THE TIP IS IN CONTACT WITH THE SAMPLE 6 Press once the key to slightly lift the tip from the surface 7 Move to the place you want to measure using the trackball use FI key to change the moving speed 8 Press F4 or ESC keys to return to the main menu CMi J Pernollet Page 1 3 Alpha Step 500 CMi User manual 1999 last update 11th October 2010 9 Choose CATALOG in the RECIPE menu Either choose the general recipe or make your own 1 recipe per user See appendices for recipe writing 10 Return to camera view using the Z
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