"user manual"
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1. Sevenstar 9 APPENDIX 9 1 Mass Flow Conversion Factors Table 6 Conversion Factors GAS GAS CODE HEAT p Factors SEMIE52 0302 Cal g g l 0 C Air 008 0 2400 1 2930 1 006 Ar 004 0 1250 1 7837 1 415 AsH3 035 0 1168 3 4780 0 673 079 0 0647 11 1800 0 378 070 0 1217 5 2270 0 430 048 0 1779 3 0250 0 508 058 0 5020 1 2350 0 441 101 0 1297 6 8600 0 307 CF4 063 0 1659 3 9636 0 420 CH4 028 0 5318 0 7150 0 719 C2H2 042 0 4049 1 1620 0 581 C2H4 038 0 3658 1 2510 0 598 C2H6 054 0 4241 1 3420 0 481 C3H4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 398 C3Hs 089 0 3990 1 9670 0 348 C4H6 093 0 3515 2 4130 0 322 C4Hs 104 0 3723 2 5030 0 294 111 0 4130 2 5930 0 255 5 12 240 0 3916 3 2190 0 217 CH30H 176 0 3277 1 4300 0 584 136 0 3398 2 0550 0 392 112 0 1654 5 9500 0 278 009 0 2488 1 2500 1 000 025 0 2017 1 9640 0 737 CoN2 059 0 2608 2 3220 0 452 Cb 019 0 1145 3 1630 0 858 D2 014 1 7325 0 1798 0 998 F2 018 0 1970 1 6950 0 931 GeCl4 113 0 1072 9 5650 0 267 Page 31 of 33 Sevenstar Continue To Table 6 Conversion Factors GAS GAS CODE HEAT p Paetos 5 52 0302 Cal e GeH4 043 0 1405 3 4180 0 569 007 3 4224 0 0899 1 010 010 0 0861 3 61002. MASS FLOW CONTROLLER Sevenstar 007 9F 007 19F Mass Flow Controller DO7 9FM D07 19 Mass Flow Meter INSTRUCTION MANUAL Jb 5 BEIJING SEVENSTAR ELECTRONICS CO LTD Version June 2013 Sevenstar A NOTE TO OUR CUSTOMERS Dear customer Thank you for purchasing SEVENSTAR D07 series Mass Flow Controller and Mass Flow Meter product This user manual is important when installing and doing maintenance Please keep it carefully We strongly recommend that you read this manual thoroughly before you starting to use the product This user manual introduces the important issues including the proper and safe use of the products And please notice the words and section with the symbol N Not in accordance with the user manual for the use of property caused by loss or personal injury SEVENSTAR may not be responsible If you require any additional information or assistant of Sevenstar D07 series Mass Flow Controller and Mass Flow Meter please feel free to contact your local Sevenstar Sales Agent or Sevenstar Customer Service at 8610 6436 2925 Yours sincerely Sevenstar Sevenstar CONTENTS 1 APPLICATION amp FEATURES 1 5 2 2 Zero Test and Adjustment 20 2 SPECIFICATION ree eter Reha eig 3 5 2 3 Gas Supply ii aaa roues e edi e di tuas 20 3 STRUCTURE amp PRINCIPLE 5 5 2 4 Shut Off 20 eser 5 6 CA
3. 547 Tianmu West Road Zhabei District Shanghai 200070 China Tel 86 21 33030324 Fax 86 21 63533265 Shenzhen Office Room 712 Section B Qiche Tower No 45 Zhenhua Road Futian District Shenzhen China Zip code 5180831 Tel 86 755 88290258 86 755 88294770 _ Description be changed following improvements to product The information x contained in this document is subject to change without notice j If there is any mistake in this uses manual please feel free to contact us 2010 Beijing Sevenstar Electronics Co Ltd AI rights reserved
4. A D In Signal common q Signal common Signal common MFC or MFM ATTENTION No Valve OFF ON and Set in MFM x OFF Valve Off 24V PC or PLC common power common ed ae ee aces ete el Figure 16 PC Directly Connection Under the case of MFM MFC directly connects to PC without Flow Readout Box 24VDC power supply with good anti jamming should be provided by user itself connects SET with PC D A output connects Output I with PC A D input Signal common connects signal reference point low current common and heavy current power common down lead separately and connects together to the 24VDC power supply common port Page 16 of 33 Sevenstar 4 5 Zero Adjustment It could be zero adjusted in case of zero excursions while the first time operates or a long period operating Users could adjust Zero Potentiometer from side face or adjust it while removed its overall showing in Figure 17 and Figure 18 Please note it should be sure that gas flow tube could not be open while zero adjustment or shutoff the valves it should be warming up not less than 15 minutes adjustment performs after its zero moving to the stable stop Users should not adjust zero except zero potentiometer otherwise it will affect device accuracy Linearit Zero Span After P Open Zero After Open Figure 18 The Position of Potentiometer of D07 19F amp D07 19FM P
5. Number 19 19FM 9 9 9 Please consult SEMI52 0302 For Example 013 007 H2 000 Mixture gases please consult d for detail r r r r Flow Range Full Scale 005C 5SCCM 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 100SCCM 200C 200SCCM 300C 300SCCM 500C 500SCCM 001L 1SLM 0020 2SLM 003 3SLM 0050 5SLM 0100 10SLM 0200 20SLM 030 30SLM 000C Customer Special Request please consult d for detail Page 25 of 33 Sevenstar DO07 000 5 Id 6 1 Inlet and Outlet Fittings AA Compression Fitting 3mm GG Compression Fitting 6mm DD Compression Fitting 8mm JJ Compression Fitting 10mm BB Compression Fitting1 8 CC Compression Fitting 1 4 HH Compression Fitting3 8 MM VCR 1 4 TT 4 X Ihose RR 6 inner X Ihose XX Customer Special fittings please consult d for detail s Seal Materials V Viton T Teflon N Neoprene Mounting Position H Horizontal HESD Horizontal Edge Side Down 10 Vertical Inlet Up D Vertical Inlet Down d Description Default Value The letters on cover and tag in Chinese Differential Pressure 007 19 lt 10SLM 0 1 0 5 MPa 14 5 72 5 psid gt 10SLM 0 1 0 3 MPa 14 5 43 5 psid D07 19FM 0 02MPa 2 9psid Max
6. Operating Pressure 007 19 MPa 435 1 psig D07 19FM 10 MPa 1450 4 psig Calibration Temperature 22 2 Page 26 of 33 Sevenstar D07 19F Setpoint Signal Current 4 20mA S Customer Special Requirements For Example The letters on cover and tag in English Customer Special Full Scale 29SLM The proportion of Mixture gases should be indicated 60 2 40 Customer Differential Pressure 0 05 0 3 MPa Customer Calibration Temperature 40 C 007 19 Setpoint Signal Voltage 1 5VDC and other customer special requirements For Example D07 19F013500CGGVHS D07 19F 013 5000 GG V H S Type Number D07 19F MFC Gas Flow Range Full Scale 500SCCM Inlet and Outlet Fittings Compression Fitting 4 _ Seal Materials Viton Mounting Position Horizontal d Customer Special Requirements For Example The letters on cover and tag in English Differential Pressure 0 05 0 3 MPa Customer Special fittings According to drawing Customer Special Calibration Temperature 40 Page 27 of 33 Sevenstar 7 TROUBLESHOOTING Table 5 Failure Handling after turn on inputting 1 2 Valve control switch is shutoff Turn the switch to CONTROL 1 3 No setting signal Check potentiometer or In Out switch 2 case of turning on but without gas the flow rate testing is 3 In case of valve 3 1 Over load pressure of input Reduce the inlet operating pressure
7. around 50mm more after adding the electric connector Page 10 of 33 Sevenstar 4 2 Fittings Four models of external diameters connectors could be provided Table3 Connectors amp Dimensions of D07 9F 207 9 Compression Fitting 1 4 Model _ lt 60SLM 20051 7 19 912 lt 75 12 1 2 Mark means could be H DOr i Tee selected but each model ET could be selected one Do9FM o jojo o o connector type at a ime Table4 a amp Dimensions of 007 19 D07 CompressionFiting Fitting Roe Model 1 8 1 4 3 8 1 4 Gnner 007 198 means could be selected but each model D07 19FM 1 could be selected one connector type at a time Using standard Compression Fitting connectors general speaking stainless steel tube was used to connect MFC and Gas System matching to the different request other materials also could be used as nylon tube or hard flexible plastic hose Figure 9 is an example to showing the fitting structure please be careful the flow input amp output direction should not be inversed fitted Tube Nut Back Ferrule Front Ferrule Fittings Figure 9 Compression Fitting Connector Installation Page 11 of 33 4 3 11 T Figure 10 VCR Connector Installation AttentionA For install
8. of valve port valve sealing leakage rate will lower than 290 of full scale flow rate when use the special caustic gas all sealing materials should be changed relatively Page 20 of 33 6 3 6 4 6 5 6 6 6 7 Sevenstar For the cases that the MFC MFM used with toxic pyrophoric flammable or corrosive gas you should ensure that the fixing and fitting are airtight It becomes necessary to remove the controller from the system purge the controller thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to purge the controller could cause a fire or explosion resulting in death Valves Dynamic Sealing The Valve of MFC is an electric magnetic valve for adjustment which is not a solenoid plug valve so that could not perform that kind of function Users should better have that plug valve by themselves Especially when users operate with caustic gas general speaking it should separately add one cut off valve of MFC inlet and outlet to protect operating security After a long period operating if the leakage rate of MFC valve outlet is not beyond 296 FS it is the standard situation Otherwise it should be under maintaining Valves operating When valve is operating PURGE which should not be directly turned to AUTO operation should be turned the switch to OFF position and then turn it into AUTO to operating Installation Position Keeping installation surface hor
9. 1 000 HCl 011 0 1911 1 6270 1 000 012 0 3482 0 8930 1 000 017 0 0545 5 707 0 999 H2S 022 0 2278 1 5200 0 844 He 001 1 2418 0 1786 1 415 Kr 005 0 0593 3 7390 1 415 N2 013 0 2486 1 2500 1 000 Ne 002 0 2464 0 9000 1 415 NH3 029 0 5005 0 7600 0 719 NO 016 0 2378 1 3390 0 976 NO2 026 0 1923 2 0520 0 741 N20 027 0 2098 1 9640 0 709 015 0 2196 1 4270 0 992 193 0 1247 6 1270 0 358 031 0 2610 1 5170 0 691 PFs 143 0 1611 5 6200 0 302 102 0 1324 6 8450 0 302 SiCl4 108 0 1270 7 5847 0 284 SiF4 088 0 1692 4 6430 0 348 51 4 039 0 3189 1 4330 0 599 SiH2Cle 067 0 1472 4 5060 0 412 SIHCIs 147 0 1332 6 0430 0 340 SFo 110 0 1588 6 5160 0 264 SO 032 0 14890 2 8580 0 687 TiCls 114 0 1572 8 4650 0 206 121 0 0956 13 2900 0 215 006 0 0379 5 8580 1 415 Page 32 of 33 Sevenstar 9 Conversion Factors Instruction and are standard calibrated while it s out of factory Other gas calibrations can be approximated by converting of conversion factors of our instruction While using other gas operating One single gas The conversion factors could find out in the users specification instruction A mixture of two or more gases Assume there is sorts of gases could calculate the conversion factors C by the following formula Basic Formula 0 3106 N 2 Cp Density of the gas Cp Specific heat of the gas N Structure factors of gas molecule See Tabl
10. Shut Off Operation 20 9 APPENDIX S a 31 5 2 20 9 1 Mass Flow Conversion 31 5 21 Start UP ertet trees 20 9 2 Conversion factors Introduction 33 MASS COU COTROUWER amp MASS FOU MEvER Sevenstar Operating Instruction 1 APPLICATION amp FEATURES Mass Flow Meter accurately measures mass flow rates Mass Flow Controller accurately measures and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes They are widely applied in the fields as semiconductor and IC fabrication special materials science chemical industry petrolic industry pharmaceutical industry environmental protecting and vacuum system researching etc The typical applications include microelectronic process equipment such as diffusion oxidation epitaxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing amp matching gas system capillary flow control system gas chromatograph and other analytical instruments D07 series amp bring the high accuracy excellent repeatability quick response soft start better reliability wide variety ranges of operation pressure good operation in high pressure and vacuum situations simple convenient op
11. UTION 20 3 2 Operation Principle 6 6 1 Medium Forbidden 20 4 INSTALLATION amp CONNECTION 8 6 2 Corrosive 20 E T DO 8 6 3 Valves Dynamic Sealing 21 4 2 Fittings eene 11 6 4 Valves Operating 21 4 3 Electrical Interfacing 12 6 5 Installation Position 21 4 4 Connection 14 6 6 Operation Pressure 21 4 5 Zero Adjustment 17 6 7 Calibration and 21 5 OPERATION INSTRUCTIONS 18 6 8 07 9 9 Ordering Code 22 5 1 Operation eese 18 6 9 D07 19F 19FM Ordering Code 25 5 1 1 Start Up cisco ee de e do Ue ee Un 18 7 TROUBLESHOOTING 28 5 12 coco tette 19 8 WARRANTY amp SERVICE 30 5 1 3 Readout Box amp PC Connection 19 8 1 Product Warranty 30 5 1 4 PC ee enee 19 8 2 Specific warranty requirements 30 5 1 5 Valves Conttol eec 19 8 3 NOLVICE em 30 5 1 6
12. age 17 of 33 Sevenstar There is another external zero adjustment function while MFC connected with our new zero adjustment functional 208 Flow Readout it could be achieved by zero potentiometer of display panel The important is the ranges of external zero adjustment is narrow when there is big zero excursion happened it should be better adjust zero from zero potentiometer of MFC 5 OPERATING INSTRUCTIONS 51 Operation Together with Flow Readout Box 5 1 1 Start up Reference to Figure 19 The main operating should perform in the Flow Readout Box Valve Control Switches and flow setting potentiometer are in the front of display panel the flow setting internal or external signal control switches are on the back of panel of Readout Box When the switch is turned on the INT position the potentiometer will control flow rate when the switch is turned on EXT position the external signal will control flow rate Please check out the details in Flow Readout Box Instruction Flow Display D08 1K ZM av Set Conversion Swic Valve Drive Switch Set Figure 19 Flow Readout Box Operating Panel Page 18 of 33 Sevenstar a When the valve switch is on the position of AUTO gas supply should be open first and then turn on the power supply the flow rate will not be beyond 590 of presetting after flow soft start about 20 seconds General speaking it should be warming up around 15 minutes in case o
13. al converters and three phase switches Figure 5 is exactly showing the operating principle while MFC is connecting Page 6 of 33 Sevenstar with Flow Readout Box 5 FLOW READOUT BOX 100 0 Reacout Ez 4 20mA lt SET 4 20mA gt 1 lt Output 220V Power Signal L Common Power Common MASS FLOW CONTROLLER MASS FLOW METER Bypass Figure5 Principle of MFC The outputting flow testing signal from MFC is a direct ratio with the flow through the channels flow outputting signal is 4 20mA or 1 5VDO The Flow control ranges of is 2 100 F S flow resolving power is 0 1 F S Attention When Valve controller of MFC is posited on position of PURGE it can be functioned as a MFM In that case the maximum flow testing voltage could reach beyond 10V please be careful while flow is beyond F S 5V Full Scale the real flow will have no linearity corresponding with flow testing voltage While it s purging flow display will be inaccurate even showing reduce while the real flow is enhanced please be sure it ll be no damaged to device itself Page 7 of 33 4 1 Sevenstar Operation control could accomplish by Flow Readout Box When set point is turned on the INT flow rate will be under controlled by the presetting potentiometer when setpoint is turned on the EXT flow
14. e 6 Table 6 Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE Single atom numerator Ar He 1 01 Double atom numerator CO 1 00 Tree atom numerator CO NO2 0 94 Multi atom numerator NH3 C4Hs 0 88 For mixture gases N 02707 Nn Then 0 3106 N2 02 01 Nn owor C piCpi 1 T p2Cp2 e or 01 The flow of single gas OT The flow of mixture gas 1 The density of single gas 1 Specific heat of the single gas Structure factors of gas molecule See Table 6 AttentionA 1 Standard Temperature 273 15 0 Air Pressure 101325 Pa 760mm Hg 2 Please feel free to contact us if the request gas conversion factors could not be found in our appendix Page 33 of 33 Sevenstar Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co Ltd 007 Series Mass Flow Controller Beijing Sevenstar Electronics Co Ltd Mass Flow Meter Subsidiary Co Ltd Address No 1 Jiuxiangiao East Rd Chaoyang District Beijing China P O BOX 344741 Beijing China Post code 100015 Tel 86 10 64362939 86 10 64361831 8491 8315 86 10 64362923 64362939 http mfc sevenstar com cn E Mail mfcsales sevenstar com cn Shanghai Office Room 1916 Unicom International Tower NO
15. eration flexible installation possible connecting with PC to carry out automatic control to the users system D07 9F D07 9FM D07 19F and D07 9FM all use 24 VDC power supply and they are better connected together with 08 series Readout Box the cable connection is showing as following Figure 1 and Figure 2 Page 1 of 33 Figure 1 D07 9F MFC and Readout Figure 2 D07 19F MFC and Readout Box Page 2 of 33 2 SPECIFICATION Sevenstar Table 1 Specifications of D07 9F amp D07 19F MFC D07 9F D07 19F Flow Ranges 0 20 30 50 100 150 200 250 SLM 0 5 10 20 30 50 100 200 300 500SCCM 0 1 2 3 5 10 20 30 SLM Accuracy 2 F S 1 F S 20 3051 2 FS Linearity 1 ES 0 5 F S 20 30SLM 2 ES Repeatability 0 2 F S Response Time lt 4sec Differential Pressure 20 30 SLM 0 05 0 30 MPa 7 3 43 5 psid lt 10SLM 0 1 0 5 MPa 14 5 72 5 psid gt 10SLM 0 1 0 3 MPa 14 5 43 5 psid 50 150SLM 0 10 0 30 MPa 14 5 43 5 psid 200 250SLM 0 15 0 30 MPa 21 8 43 5 psid Max Pressure 3 MPa 435 1 psig Operation Tem 5 C 45 C Input Output Signal 4 20 mA 1 5VDC Valve N C Solenoid Power Supply 24 VDC 400 mA Dimension According to Figure 6 According to Figure 8 Weight 2 6 kg 1 2 kg NotesA is calibrated by as a standard gas Units SCCM Standard Cubic Centimeter Min Standard Sit
16. f valves shut off and without gas flow operates it after zero has stable movement If there is big zero excursion please see the reference 4 5 in the case of non gas flow it could be possible to adjust zero by zero potentiometer b If valve switch is on the position of OFF after power supplying gas supplying and warming up turns the switch to AUTO position the flow rate will reach the presetting 2 or lower after a few seconds which is the suggested operating method c Ifvalve switch is on the position of PURGE the flow rate will reach up to the maximum value after gas and power supplying which will have the function of air blasting to the gas circuit d If valve switch is on the position of AUTO and presetting is not zero open the gas after power supply the flow rate will have a big overshoot and then rapidly reach to the stable presetting value this kind of operation should better be avoided e The best operating sequence should be 1 the power supply 2 Turn the valve switch on the position of OFF 3 Open the gas supply 4 Warm up for minutes to have stable zero point movement 5 Turn the switch on AUTO position 6 Set flow rate under request This is the best way to operate without an overshooting 5 1 2 PURGE When need air blasting and cleaning bypass and tube users could turn the switch on PURGE position during the purging the flow rate value should reach up to times or even several decuple
17. ic warranty requirements are as follows Gas must be clean and particle free which means a filter 30p must be fitted in the gas line upstream of the a b Gas must comply with the pressure specifications and never exceed rated value C Process gas should be in line with the seal materials chosen in the order especially in case of corrosive gas We shall not be responsible for any damage caused by changing process gas or choosing the wrong seal materials in order d Electrical connection requirements are as follows The system must be wired carefully non observance of the pin out may irreversibly damage the electronic board inside the products If user self scheme power supply of stable and anti jamming power supply is required with ripple below 5mV e connections the fittings must be handled carefully We guarantee that all fittings have been individually inspected and are scratch free f The MFC MFM must not be dismounted the MFC MFM warranty will be invalidated if the seal between the MFC MPM block and cover is torn 8 3 Service Our product engineer will help you with issues related to operation calibration installation process specification gas convention etc And we also provide you with technology support amp maintenances and products operation training Please visit mfc sevenstar com cn for relevant information and the locations of our service centers Page 30 of 33
18. ing the fittings you should manually use spanner to wrench it tighten by 1 2 turn pulling up imported Compression Fitting should use spanner to be tighten in 1 25 turns to prove its not blow by after your installing the front ferrule back ferrule and nut Please note you should use two spanners to operating one spanner for locking the fitting stable and another one for revolving the nut Especially when you dismantle the tube you should operate by the two spanners otherwise fitting will become flexible which will affect its airproof function Electrical Interfacing MFC could begin operating after it was well connected with professional cable and corresponding Flow Readout Box The electrical interfacings of each and MFM are showing as following figures Figure 11 Figure 14 Signal Figure 11 Connection of D07 9F MFC Electrical Interfacing Page 12 of 33 24 Figure 12 Connection of D07 9FM MFM Electrical Interfacing D07 9F MFM electrical interfacings figurel2 is as same as connector of D07 9F MFC only compared with MFC accessories that lacks of Valve Control and Setpoint two wires Valve Voltage Signal Figure 13 Connection of D07 19F MFC Electrical Interfacing Page 13 of 33 24 Figure 14 Connection of D07 19FM MFM Electrical Interfacing D07 19F MFM electrical interfacings figurel4 is as same as connector of D07 19F MFC only compared with MFC accessories that lac
19. ing up their overall Electric Connector Locknut Solenoid _ control valve Outlet Figure 3 Structure of D07 9F MFC Other models structures are basically as same as showing in figure 3 D07 9FM MFM compared with D07 9F only is different of lacking solenoid control valve other parts are almost same For other more information please be advised by your salesmen Page 5 of 33 Sevenstar Electric Connector Solenoid control valve Figure 4 Structure of D07 19F MFC Other models structures are basically as same as showing in figure 4 D07 19FM MFM compared with D07 19F MFC only is different of lacking solenoid control valve other parts are almost same For other more information please be advised by your salesmen 3 2 Operation Principle According to the Capillary Heat Transfer Temperature Difference Calorimetry Theory the flow sensor measures the mass flow without pressure compensation The sensor heated the flow signal which was measured by electric bridge and amplified it through amplifier the amplified flow testing voltage is compared with presetting voltage the differential signal will control valve after amplified then the flow rate of closed loop control will be as same as presetting flow rate The bypass divider controls the flow rate The corresponding 208 series Flow Readout Boxes have stabilized power supply 3 and 1 2 digital voltage meter presetting potentiometer external amp intern
20. izontal while installation Please provide the installation position when ordering the MFC We will calibrate products according to the requirement of customers The MFC might show the zero drift if it is not installed as the same position of calibration Customer can adjust zero to fix it Operation Pressure Resistance Please be caution for the medium operating pressure of MFC it should not be beyond the rage of specification of inlet and outlet Especially while operating under the high pressure situation the big differential pressure will affect flow fail to shut off or lower adjustment In case of using heavy flow rate of MFC please be sure appropriately widen tube and reduce gas internal resistance if operating differential pressure is lower than the value of request it might could not be reach to the full scale flow rate value Calibration and Conversion 207 series is calibrated by nitrogen Other gas calibrations please inform in your order statements When the nitrogen calibration users use other gas operating it could convert and calculate used gas flow rate by conversion factors of appendix 8 1 Which means users could multiply the readout flow rate from MFC Readout Box with the used gas corresponding conversion factors the result will be the used gas corresponding mass flow rate of standard situation For example there is 100 SCCM N2 calibrated flow rate is displayed 86 SCCM while firedamp flowing the conversion fac
21. k gas dust outputting display Using special gas should be sure of good tube sealing and gas dryness 9 2 Circuit failure Repair circuit 10 Without gas flow Zero 10 1 Sensor failure Replace a new sensor is fluctuate Or excursion happened Attention Mark indicates that reparation and adjustment must be dealt under specialist advices Page 29 of 33 Sevenstar 8 WARRANTY amp SERVICE 8 1 Product Warranty a b Our products are guaranteed within 2 years warranty against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage contamination alteration or retrofit Buyers undertake to check and inspect the goods and to notify SevenStar of shipment incidents by fax phone or e mail as soon as possible after receipting the goods During the warranty period products must only be repaired by Sevenstar or authorized SevenStar service centers otherwise the SevenStar product warranty will be invalidated Repairs will be performed free of charge during the two year warranty period If MFCs MFMs are out of warranty SevenStar will notify the owner of replacement or repair costs before proceeding Factory service and repairs are guaranteed 90 days The warranty excludes consumable materials and wear parts in teflon viton etc No used with dangerous gas will be accepted for repair or warranty without a decontamination and purge certificate 8 2 Specif
22. ks of Valve Control and Setpoint two wires 4 4 PC Connection a Connection through Flow Readout Box with PC or other external signal Figure 15 Signal common Connection Cable D A Out Signal common di Valve Off COMPUTER Readout Box No Valve OFF ON Or PLC and Set in MFM D 1 1 ATTENTION 1 1 1 1 1 Figurel5 Connection with PC through Readout Box Page 14 of 33 Sevenstar When need test the output I signal 4 20mA users could connect to the Output and the Signal common of external control signal socket of Flow Readout Box also could directly connect with PC modulus A D converter If flow output signal is voltage signal 5V output voltage is corresponding as full scale rating flow rate of MFC 1V output voltage is corresponding as zero scale rating flow Please be sure the flow testing output electric current will be no more than 3mA When the flow is setting by external signals it should be turned the switch on EXT meanwhile it should be input 4 20mA external signal from external control socket to the Flow Readout Box It also could be directly connecting with modulus D A converter of PC to achieve auto control If PC or PLC need perform the OFF function of valve control it could be accomplished by use one RELAYS two sets transfer contacts showing in Figure 15 Page 15 of 33 b PC Directly Connection Figure 16 4 20mA Output
23. rate will be controlled by set signal which is supplied by users There are three valves control switches on the panel of 208 series Flow Readout Box CLOSE PURGE and AUTO In case of CLOSE Valves of MFC will shut off in case of PURGE Valve will open reach to the tip to purge the Gas systems or could be functioned as a MFM when set to AUTO Valve can control the flow rate automatically INSTALLATION amp CONNECTION Dimension Dimensions and installations are showing as following figure 6 to figure 8 Compression Fitting 1 2 VCR Fitting Compression Fitting 6 8 10 12 1 4 3 8 1 2 Fitting Figure 6 Dimension of D07 9F Page 8 of 33 Compression Fitting 8 10 12 1 4 3 8 1 2 Fitting Compression Fitting 1 2 VCR Fitting Figure 7 Dimension of D07 2FM AttentionA The height which is showing in figure 6 and figure 7 of 140mm are height without electric connectors of cable It should be added around 50mm more after adding the electric connector Page 9 of 33 3 6 2 69 2 Compression Fitting 6 8 1 8 1 4 L 113 1 4 VCR L 124 Compression Fitting b 10 3 8 L 118 4 X Ihose L 114 6 X Ihose L 121 Figure 8 Dimensions of D07 19F and 07 19 AttentionA The height which is showing in figure 8 of 125mm are height without electric connectors of cable It should be added
24. rtical Inlet Down d Description 4 Default Value The letters on cover and tag in Chinese Differential Pressure DO7 9F 20 30SLM 0 05 0 30 MPa 7 3 43 5 psid 50 150SLM 0 10 0 30 MPa 14 5 43 5 psid 200 250SLM 0 15 0 30 MPa 21 8 43 5 psid 007 9 20 100SLM lt 0 02MPa 2 9 psid gt 100SLM lt 0 05MPa 7 3 psid Max Operating Pressure 3 MPa Calibration Temperature 22 2 C 007 9 Setpoint Signal Current 4 20mA S Customer Special Requirements For Example The letters on cover and tag in English Customer Special Full Scale 29SLM The proportion of Mixture gases should be indicated 60 2 40 Customers Differential Pressure 0 08 0 13 MPa Customer Calibration Temperature 40 007 9 Setpoint Signal Voltage 1 5VDC and other customers special requirements For Example D07 9F013100LJJVHS Page 23 of 33 Sevenstar D07 9F 013 100L JJ V H 5 Type Number D07 9F MFC Gas Flow Range Full Scale 100SLM Inlet and Outlet Fittings Compression Fitting 10mm lt Seal Materials Viton Mounting Position Horizontal Customer Special Requirements For Example The letters on cover and Tag in English Differential Pressure 0 08 0 13 MPa Customer Special fittings According to drawing Customer Special Calibration Temperature 40 C Page 24 of 33 Sevenstar 6 9 D07 19F 19FM Ordering Code DO7 t 000 ff 5 m Id t Type
25. s of the full scale flow value If shutoff the gas supplying it could be vacuum pumping to get rid of MFC internal or upper reaches remained gas to match request And then shut off valves open gas supply again and turn it to OFF position 5 1 3 Readout Box amp PC Connection Please find the reference in Figure 5 and Figure 15 it should set the switch of Readout Box to the External and turn the switch to the position of CONTROL and then startup PC 5 1 4 PC Connection Please have the reference in Figure 5 and Figure 16 after MFC warming up it could have PC startup 5 1 5 Valves Control When the valve switch sets to CONTROL position users could perform valves control by CONTROL wire of external control signal socket please find the reference in Figure 5 and Figure 15 When valve control wire connects with 15 V valves will be shutoff when valve control wire connects with 15 V valves will be turned to the top of maximum to purge position when valve control wire hangs in the air it s in the auto control situation Page 19 of 33 Sevenstar 5 1 6 Shut off Operation After shutoff power supply flow will be cut off automatically It should be better shut off gas supply Turns valve switch to CLOSE position and closes the cut off valve of gas circuit before power supply 5 2 MFM Operation 5 2 1 Start Up Please warm up for 15 minutes by power supply before using 5 2 2 Zero Test and Adjustmen
26. t Please check up the zero point of MFM after its warming up especially for the first time operating it could have reference in 4 5 without gas supplying which could adjust zero by zero potentiometer 5 2 3 Gas Supply After zero movement reaches stable could have gas supply Please pay attention to the flow rate it should be better operate not beyond full scale range 5 2 4 Shut Off Turn off the power supply which means MFM operating will be terminated it could not affect the flow rate of bypass 6 CAUTION 6 1 Medium Forbidden The gas of using should be purified without dust liquid and oil stain When necessary it should be added filter to gas circuit to make sure gas purified If the outlet of MFC connects with liquid sources which should be added simple directional valve of MFC outlet to avoid the liquid is refluent to the tube to destroy MFC 6 2 Corrosive Gas The materials of bypass are anti caustic materials like 00Cr17Nil4Mo2 same as 316Lstainless steel Teflon and Viton When users operate in condition of without vapor low leakage regular cleaning and proper operating MFC could possible control the normal corrosive gas Using ammonia organic solvent gas such as acetone or other strong caustic gas like BC13 and BBr3 please informed in your order statements Valves Dynamic sealing materials usually are Viton for D07 9F MFC could also use Teflon While Teflon has been selected there maybe leakage happened
27. to shutting off there is outlet the differential pressure between decrease differential pressure still heavy flow rate inlet and outlet is beyond rating passing 4 The flow rate display could not reach to full scale flow rate value 4 3 Setting voltage is less than5 00V Check the setting Voltage 4 4 Others trouble Repair circuit etc Page 28 of 33 Sevenstar Continue To Table 5 Failure Handling NO FAILURE CAUSE TREATMENT Fluctuant flow rate 5 1 Inlet pressure is too low or Heighten inlet pressure instable 5 2 High internal gas resistance Lessen internal resistance The heavy gas flow should have big valve open widen tube to parallel connecting gas bottles to improve gas supply capacity 5 3 Circuit or valve failure Repair and adjust Disturbed by high 6 1 Earth wire and zero wire frequency power connecting of power supply is error be one port connection sourcing 6 2 Signal reference port connecting Check signal connecting wire problem 6 3 Inter space disturbing _ Flow display is 7 1 The range or unit of Display is not Re adjust Display accurate matching to controller flow rate excursion instable There is still flow 8 1 Valves leakage Repair solenoid control valve passing while zero 8 2 Zero point is moving less than 0 Adjust zero setting The heavy flow is 9 1 Block of sensor Repair and replace the new sensor passing but no Should add filter to bloc
28. tors of firedamp is 0 719 from reference of appendix 8 2 the real firedamp flowrate is 86 0 719261 8 SCCM If users use the mixture gas it could be calculated the conversion factors by the method which introducing in appendix 8 2 Page 21 of 33 6 8 107 9 9 Ordering Code DO7 t 0 9 9 ff t Type Number 4 9F 19 9 91 Please consult SEMI52 0302 For Example 013 007 H2 000 Mixture gases please consult d for detail r r r r Flow Range Full Scale 0200 20SLM 0300 30SLM 0500 50SLM 1001 100SLM 1500 150SLM 2001 200SLM 2501 250SLM 000C Customer Special Request please consult d for detail f f Inlet and Outlet Fittings 4 GG Compression Fitting 6mm F S lt 605 DD Compression Fitting 8mm F S lt 200SLM JJ Compression Fitting 10mm SS Compression Fitting 12mm CC Compression Fitting F S lt 60SLM HH Compression Fitting 3 8 PP Compression Fitting 1 2 EE VCR 1 2 XX Customer Special fittings please consult d for detail s Seal Materials lt V Viton N Neoprene Page 22 of 33 Sevenstar 074 9 9 9 ff s 19 m Mounting Position H Horizontal HESD Horizontal Edge Side Down U Vertical Inlet Up D Ve
29. uation FS SLM Standard Liter Min Tem 273 15 0 C Air Pressure 101325 Pa 760mm Full Scale Page 3 of 33 Sevenstar Table 2 Specifications of 007 9 amp 07 19 MFM D07 9FM D07 19FM Flow Ranges 0 5 10 20 30 50 100 200 300 500 SCCM 0 1 2 3 5 10 20 30 SLM 0 20 30 50 100 150 200 250 SLM Accuracy 2 F S 1 FS 20 30SLM 2 ES Linearity 1 FS 40 5 FS 20 30SLM 2 F S Repeatability 0 2 ES Response Time lt 4sec 20 100SLM lt 0 02 MPa 2 9 psid 2100SLM 0 05 MPa 7 3 psid 3 MPa 435 1 psig Operation Pressure 0 02 MPa 2 9 Max Pressure 10 MPa 1450 4 psig 5 C 45 C 4 20 mA or 1 SVDC 24 VDC 100 mA According to Figure 7 According to Figure 8 Weight 1 5 kg 1 0 kg Operation Tem Output Signal Power Supply Dimension The main specifications could be found in table 1 and table 2 D07 9FM and D07 19FM is respectively the measuring part of D07 9F and D07 19F the specifications of measuring parts are almost same Page 4 of 33 Sevenstar 3 STRUCTURE amp OPERATION PRINCIPLE 3 1 Structure The MFM consists of flow sensor flow splitter bypass and flow amplifying circuit If add Control valves and PID control circuit to MFM will compose a MFC The following figures Figure 3 and Figure 4 are exactly showing the structures of D07 9F MFC and D07 19F MFC after open
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