Thin films sputtering system Alliance-Concept DP650 - CMI
Contents
1. DP 650 CMi User manual created November g 2012 last update November 5 2012 EPFL CMi DP 650 WARNING Only the CMi Staff is qualified to do a service or to do maintenance If the target configuration doesn t fit with the one given on the user interface please contact the staff User manual 1 Login 1 1 Logon on the ACCESS CONTROL SYSTEM on the zone computer to unlock the touch screen of the DP 650 yes 1 2 Icon Users Logon on the DP 650 Click on Login and then enter your login and password The login is valid for 20 minutes but stays valid during a run 2 Loading n 2 1 Icon Production 2 2 lt Load lock vent gt 2 mn 2 3 Open the load lock Put your substrate on the substrate holder Close the load lock 2 4 lt Load lock pumping gt 3 Recipe Selection and Start Production He 3 1 Click on the button lt Reset gt 3 2 Click on the blue line iT Nom nied fe 3 3 Check Current subfolder you can change it lt Subfolder change gt 3 4 Select your recipe 3 5 Checking Click on lt Start gt 3 6 Enter the deposition time for each film 3 7 Wait the green message Valid then click on lt OK gt 3 8 lt Start Production gt 4 Unloading He 4 1 lt Load lock vent gt 2 mn 4 2 Open the load lock Get back your substrate on the substrate holder Close the load lock 4 3 lt Load lock pumping gt 5 Logout we 5 1 Logout from the DP 650 oy 5 2 Logou2. t from the ACCESS CONTROL SYSTEM FAQ lt Start Production gt button is hidden or lt gt button is dimmed peen gt You ve been automatically logged out after 20 min Log in again r p EPFL CMi PhL Page 1 sur 1
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