Trillium US Inc. Model 125 Cryogenic Helium Compressor User`s
Contents
1. 97 00020 000 15 User s Manual Rev A November 2015 M125 Helium Compressor e Ifa freezing temperature environment is anticipated whether during shipping or under storage make certain the coolant in the compressor circuit is properly drained Caution The compressor unit should never be tilted more than 45 degrees either during shipping or in storage 8 3 Scheduled Preventative Maintenance Activity The only scheduled maintenance required on the Model 125 compressor is the replacement of compressor adsorber after every 15 000 hours of operation as indicated on the compressor elapsed time meter or every three years whichever comes first When the compressor is used with 50 Hz power the actual elapsed time will be 1 2 times of that shown on the meter The adsorber is used to keep the oil vapor out of the helium gas in the flow circuit of compressor unit and its load After about 15 000 hours of operation or every three years whichever comes first the effectiveness of the adsorber will decrease It will then need to be replaced Otherwise the oil particles could accumulate on the cold surface of the compressor load reducing the cooling performance of the overall system In severe cases of such oil contamination the load cryopump coldhead etc could cease to function completely To remove and replace the compressor adsorber follow the steps described in Sections 8 3 1 and 8 3 2 Caution Use only Trillium US Inc supplied ad2. t iv 2 PCT AGC a c aae ee 1 2 1 About Trillium US Inc eesseesseeeeeseee eene nnne nennen reei ere eere en nn senten nentes inea e nenne nnne ns 1 2 2 Other Services from Trillium US Ihe orit no toti rene PE pn nno eR E aera a RR eo ab reos ki kon ba VAa s na sao A PER EESE 1 2 3 ADOUt a 0 TT eT 1 2 4 Compatibility sses teree aa a e a E EOE a A EE E EEE aE E a aE EAEE EaR 1 3 Safe Y WAN AA a O E eA EES aS EE EAA Eaa aa AEE 2 3 1 Standards for the Use of Warnings and Cautions sees eee eee eee eee eee 2 3 2 Warnings Applicable to All Aspects of M125 Operation eee eee eee 2 3 2 1 High Voltage and Electrical Shock Warnings see eee eee eee eee eee 2 3 2 2 High Pressure Related Warnings sees eee eee eee eee eee 2 3 2 3 Helium Gas Related Warnings sees eee ee eee eee 2 3 2 4 HeateRelated WISTNINES T 2 3 3 Operator Instr ctlOFis in RAEE PANE TV IEA Pre ode cies 3 4 A RR 3 4 1 General Information about the Model 125 Compressor sss sese ee eee ee eee 3 4 1 1 A A ON 3 4 1 2 Overview of Model 125 Compressor Design amp Operation sese eee eee eee eee 3 4 1 3 Description of Subsystems 2 nere ema aee proa chia eo Page eaa sand XR e a Fe E RA DR FERE eaae EXER ER sieaseeacuneasedeseanve 4 4 1 4 Operational Fl OW L 4 4 2 SPEcIICACIONS ROTE TOTO TU LER 7 4 3 Ordering A ren re RI ER nn Yea aaa PR Te RR ERR ORAN HER vaduesitaancaes ER eR ERR R K
3. 3 i 1571 Figure 3 Model 125 Dimensions 97 00020 000 8 A User s Manual Rev A November 2015 M125 Helium Compressor 4 3 Ordering Information Table 4 4 contains the ordering information for the Model 125 compressor unit Customers can also order the optional accessories and replacement parts listed in Table 4 5 Table 4 4 Model 125 Compressor Unit Ordering Information Compressor Unit Part Number M125 Water cooled Low Voltage Standard Drive Circuit 91 00003 0LW M125 Air cooled Low Voltage Standard Drive Circuit 91 00003 1LA Customers can also order the optional accessories and replacement parts listed in Table 3 5 Table 4 5 Optional Accessories and Replacement Parts Accessories Replacement Parts Part Number Adsorber Water cooled model 80034 Adsorber Air cooled model 80111 Helium Lines 10ft 10418 10 Helium Regulator HR 580 Maintenance Manifold for helium clean up process on compressors and 10134 cryopumps Cryopump Drive Cable 10ft sends power to the cryopump motor from the compressor OMAHI Custom length available 5 Installation 5 1 Safety Warnings Review the safety warnings in Section 3 before beginning any installation activities 5 2 Installation Steps 5 2 1 Unpacking and Inspection Once the equipment is received inspect the exterior of the shipping carton for any signs of damage Report an
4. i 1 x i i QNO 031002 3IV E En NI 34v EN NV 2H 2 2 1 CANO 037002 YMESL Na i L ome DICO A LLL sl S ve 3 8 CEI T WA 022 BEE 2 11 310835 n qv34 WI Model 125 Electrical Schematic Figure 4 E Au 97 00020 000 User s Manual Rev A November 2015 M125 Helium Compressor Figure 5 Model 125 Electrical Chassis Components Inside View Table 5 1 Figure 5 Legend Item Description Ref Desig P N 1 Capacitor Run C1 30016 2 Capacitor Start C2 30015 3 Capacitor 60Hz C3 30014 4 Fuse 1 AMP Not Shown F1 50081 5 Relay Start K1 50085 6 Meter Elapsed Time M1 50089 7 Connector 15 Pin Chassis P2 50087 8 Resistor 1500 100W R1 20053 9 Resistor 150 2W R2 20056 10 Resistor 680 1W R3 20057 11 Switch Compressor ON OFF SW1 50083 12 Switch Safety Interlock sw2 50155 13 Transformer T1 50082 14 Terminal Block TB1 50125 6 Operations 6 1 Before Switching ON the System After the compressor unit and its load cryopump coldhead etc are installed and connected check the helium gas pressure as indicated by the pressure gauge mounted on the rear panel of the compressor unit Refer to Table 4 3 for the proper static pressure readings for the compressor 97 00020 000 User s Manual Rev A November 2015 M125 Helium Compressor If the helium pressure needs to be adjusted refer to Sections 8 4 1 and 8 4 2 for procedures t
5. Trillium Trillium US Inc Model 125 Cryogenic Helium Compressor User s Manual Rev A November 2015 97 00020 000 User s Manual Rev A November 2015 M125 Helium Compressor For information about Trillium US Inc visit the Trillium US Inc Web site at http www trilliumus com How to Contact Trillium US Inc Support support trilliumus com For contact information and a complete listing of Direct Sales Distributor and Sales Representative contacts visit the Trillium US Inc Web site at http www trilliumus com Trillium US Inc has made its best effort to ensure that the information contained in this document is accurate and reliable However the information is subject to change without notice and is provided AS IS without warranty of any kind express or implied Before placing orders customers are advised to obtain the latest version of relevant information to verify that information being relied upon is current and complete All products are sold subject to the terms and conditions of sale supplied at the time of order acknowledgment including those pertaining to warranty patent infringement and limitation of liability No responsibility is assumed by Trillium US Inc for the use of this information including use of this information as the basis for manufacture or sale of any items nor for infringements of patents or other rights of third parties This document is the property of Trillium US Inc and by furnishing
6. cccccsssccccecsessaesececeseeusecececeesesesseseceeceseeseeaeseseeseseeaaeeeseesseseaaeseeees 15 8 2 Removing the Compressor from Service Removal Transport and Storage eee eee eee eee eee 15 8 3 Scheduled Preventative Maintenance Activity see ee eee eee 16 8 3 1 Remove the Compressor Adsorber ee eee 16 8 3 2 Install Replacement Adsorber sees eee 16 8 4 Unscheduled Ma ititernance oi e n nm E ee enne FR n XR UC REEF ERR NER MAR ERR VN EE OP FE ERTREER dada RRE e ines 18 8 4 1 Adding HeliWin CERE C IC EDIDI IDLITUITTTILITImM 18 8 4 2 Removing Heli m Gas 5 seen oue eiae pk ren Ra aae Ere nS ERR dando 0iecea execs RR ERE REN FRA Na E PEE ARR A teas Veagendsseaesene 18 8 5 Cleaning Equipment NA 19 8 6 Returning EQUIPIMENE iuuii econtra rene Rr Re Reden a avra rea eade aree vader Rara Ere rd Rie Vara Se Rav ka s Sagra negari eaned 19 List of Figures Figure 1 Flow Diagram for Water Cooled Model 125 compressor Figure 2 Flow Diagram for Air Cooled Model 125 COMPLeSSOL cccsessssecececsesseecececeecesaesececsceesesasseeecsceessaeseeeesseeseaaees Figuire 3 Model 125 DIMENSIONS eei uten O Figure 4 Model 125 ElectricalSchematlc oer onere a sadly exeo cn daa dedu du ed Sex uu rua en Figure 5 Model 125 Electrical Chassis Components Inside View eee eee e Figure 6 Location of Adsorber in Model 125 Air Cooled Compressor essen eene nennen nnne 17 Figure 7 L
7. this information Trillium US Inc grants no license expressed or implied under any patents copyrights trademarks trade secrets or other intellectual property rights of Trillium US Inc Trillium US Inc copyright owner of the information contained herein gives consent for copies to be made of the information only for use within the customer s organization as related to the use of Trillium US Inc products The same consent is given for similar information contained on any Trillium US Inc Web site or disk used to distribute information to a customer Trillium US Inc does give consent to the copying or reproduction by any means of the information contained herein for general distribution advertising or promotional purposes or for creating any work for resale The names of products of Trillium US Inc or other vendors and suppliers appearing in this document may be trademarks or service marks of their respective owners that may be registered in some jurisdictions A list of Trillium US Inc trademarks and service marks can be found at http www trilliumus com Trillium US Inc 1340 Airport Commerce Dr Bldg 1 Suite 175 Austin Texas 78741 USA TEL 1 512 441 6893 FAX 1 512 443 6665 Email cryo sales trilliumus com Copyright O 2015 by Trillium US Inc All rights reserved 97 00020 000 ii ya User s Manual Rev A November 2015 M125 Helium Compressor Table of Contents 1 Revision TG sc coo
8. 1 Maintenance Personnel Requirements Only trained and qualified personnel should perform the maintenance procedures described in this section All other maintenance work must be performed by Trillium US Inc personnel in the factory Please contact Trillium US Inc to make arrangement for such work See contact information in Section 2 8 2 Removing the Compressor from Service Removal Transport and Storage It is recommended that the Model 125 compressor be removed from service when carrying out the maintenance duties described in Section 8 3 0 Ur mou L a To remove the compressor unit from service do the following Turn off the compressor unit by pressing the OFF button Switch off the main power supply to the compressor Separate the compressor unit from the main power source Allow coolant to continue circulate for at least 10 more minutes for water cooled Model Allow the compressor load cryopump coldhead etc to warm up before detaching helium flex lines Caution Loosening or detaching helium flex lines with the compressor load at low temperature without proper warming up can result in loss of helium and or pressure rise in the cryopump unit beyond its designed maximum pressure level When transporting the compressor unit follow these guidelines e Make sure the appropriate protective caps are properly secured before shipping Always store the compressor unit in a dry place Refer to Table 4 3 for proper storage environment
9. am of the heat exchanger Safety Function Will turn OFF the compressor if the temperature get too high Thermal switch TS2 Purpose and Safety Function Equalizes pressure within Bypass valve the compressor upon power interruption Fuses e Fuse for coldhead drive circuit e Fuses for the main input power e Fuses for the fan motors Safety Function Over current protection Purpose Opens a shunt between the high and low pressure helium gas circuits Safety Function If the differential pressure exceeds a preset value this valve opens to allow safe operation Internal relief valve Purpose and Safety Function Opens the helium gas circuit External relief valve to atmosphere if the helium gas pressure exceeds 350 PSI 4 1 4 Operational Flow The work flow of helium gas within the compressor follows these steps 1 High pressure helium gas is delivered from the compressor to the coldhead through the Supply helium flex line at 250 260 PSI 2 The helium gas is then compressed during the compression stroke of the cryopump 3 Thecryopump then expands the helium gas to expand during its expansion stroke During this cycle of compression and expansion of the cryopump the helium gas is forced through regeneration materials to increase the thermodynamic efficiency of the cycle 4 With each successive cycle the regeneration material becomes colder and colder Eventually the cryopump temperatures come
10. ble in low voltage and in either air or water cooled model 4 1 1 Model 125 Features The Model 125 compressor is designed for tens of thousands of hours of continuous operation The main features of the Model 125 compressor are e Minimal maintenance requirements Removable top cover for easy maintenance No front or rear panels with which to struggle e Rack mounting available which is ideal for ion implanters cat scanners and sputtering system applications 4 1 2 Overview of Model 125 Compressor Design amp Operation Model 125 Helium Compressor is specifically designed to run a single CP 8 or CP 8LP low profile cryopump for 208 230 VAC and 60 50 Hz single phase operation The compressor itself consists of four main components Compressor capsule Heat exchanger Oil mist vapor separator Adsorber The compressor unit and the coldhead are connected by way of helium gas flex lines The compressor unit coldhead and helium lines are fitted with self sealing couplings and are charged with ultra high purity 99 999 helium gas The heat exchanger removes the heat generated from the process of compressing helium in the capsule The heat generated by the capsule must be removed from the oil and the helium gas To remove heat from the compressor capsule oil is used as lubrication and cooling medium The helium gas as well as oil is then pumped by way of differential pressure out of the capsule through the water cooled or a
11. continue to circulate for at least 10 more minutes before shutting off flow 7 Troubleshooting 7 1 Troubleshooting Activities Table 6 1 describes some problems that users might encounter while operating the Model 125 Cryopump Compressor and provides solutions to those problems If a compressor problem still persists after performing the corrective actions described in this section please contact Trillium US Inc Technical Support for further assistance Refer to Section 2 for contact information Table 7 1 Trouble Shooting Procedures Problem Possible Cause Corrective Action The compressors On Off switch SW1 remains in 1 No power is coming from the power 1 Check service fuses circuit breakers ha source and wiring associated with the power ee 2 Incorrect or disconnected wiring source Repair as needed On position when switched M 5 oe within the compressor 2 Check the compressor against the wiring er otk the pump clecs nek schematic See Figure 5 run 1 The safety interlock switch SW2 is 1 Securing the compressor cover may open This will happen if the top correct the problem If not check for The compressor On Off cover of the unit is removed proper operation of safety interlock switch 2 Thermal protection switch TS1 switch SW2 located in the top right SW1 will not remain in and or TS2 is open side of the electronic control chassis the ON position 3 High current has activated the trip See Figure 5
12. dimensions Table 4 2 Power Requirements for Model 125 Compressor P N Model Voltage AC Hz Phase Avg Recommended AMPs Circuit Breaker 91 00003 0LW Model 125 Water cooled 208 230 50 60 1 5 9 15 91 00003 1LA Model 125 Air cooled 208 230 50 60 1 6 10 15 Table 4 3 Model 125 Compressor Specifications Feature Component Specification Description Physical Dimensions Length 19 00 inches 183 mm Height 16 00 inches 406 mm Width 19 50 inches 495mm Weight 150 Ib 68 kg Helium Pressure Static 190 5 psig Operating 250 10 psig supply Interface Cold head power connector mates with ASC and CTI drive cables Compressor power cord is equipped with a Hubbell No 5G66C plug Helium connections 1 2 inch Male Aeroquip couplings Adsorber Replacement Schedule 15 000 Hours per elapsed time meter on the compressor or 3 years whichever comes first Cooling Water 0 4 GPM minimum flow rate 80 F maximum inlet water temperature 100 F maximum outlet temperature Recommended chiller capacity 1 ton per unit Water line connector 3 8 Swagelok Air Cooling Air cooled units must maintain a minimum clearance of at least 12 Inches at both the front and rear grills Maximum ambient temperature should not exceed 104 F 97 00020 000 User s Manual Rev A November 2015 M125 Helium Compressor o 139 250 357 524 545 887 11 42 15 42 E
13. ding one wrench tight on the coupling half attached to the rear side of the compressor Use the other wrench to tighten the coupling to the helium supply line 6 Make the final turns by hand and then use the wrenches until the fittings bottom out 7 Replace the cover and the flex lines Make sure that the cover is installed so that it depresses the safety interlock switch The compressor cannot be started until the switch is depressed 8 Make sure the supply pressure gauge reads 190 5 PSI If the pressure is either too high or too low follow the instructions in Section 8 4 1 to fill the helium gas to the proper pressure level 9 Add 15 000 to the reading of the elapsed time meter and write this number on the decal provided with the replacement adsorber This decal can be affixed to the foot of the compressor 10 Restart the compressor 97 00020 000 16 4 A lt User s Manual Rev A November 2015 M125 Helium Compressor Adsorber Adsorber Figure 7 Location of Adsorber in Model 125 Water Cooled Compressor 97 00020 000 17 User s Manual Rev A November 2015 M125 Helium Compressor C 2 b IL R Figure 8 Self Sealing Coupling in Closed Position 8 4 Unscheduled Maintenance The following corrective maintenance activities may be necessary should the helium gas circuit of Model 125 compressor becomes contaminated 8 4 1 Adding Helium Gas If a compressor unit needs to have helium gas added more than
14. down to cryogenic range 6 After expansion the helium gas returns to the compressor through the Return helium flex line at 50 100 PSI to begin the cycle again S The helium flow between the Model 125 compressor s components are illustrated in Figure 1 and Figure 2 for the water cooled and air cooled version of the Model 125 compressor respectively 97 00020 000 4 A User s Manual Rev A November 2015 M125 Helium Compressor lt He Charge Vent Valve Return 8 Female Aeroquip Ip A ByPass Solenoid sss he NV w Orifice ByPass Valve IN IN JA Pressure Gauge Ea agpo Aeroquip J9 4 llO Heat Exchanger Water Out Water In Safety Relief Valve 350 PSI Figure 1 Flow Diagram for Water Cooled Model 125 compressor 97 00020 000 5 A lt User s Manual lt 225 F Oil Pump TS2 lt 200 F Heat Exchanger PPPS co 23 ar AAA ANAIS Vv VIA WAAAAAAARY 8210 J8y 4 nO Rev A November 2015 M125 Helium Compressor oc He Charge Vent Valve Return 8 Female Aeroquip F Ak ByPass Solenoid w Orifice Internal va S Pressure ByPass Valve E 2 AAAS Gauge Q Figure 2 Flow Diagram for Air Cooled Model 125 compressor 97 00020 000 User s Manual 4 2 Specifications Rev A November 2015 M125 Helium Compressor The Model 125 Helium Compressor specifications are listed in Table 4 2 and Table 4 3 Figure 3 shows the Model 125 compressor
15. e Ea ARTE RENE a EXER GR 9 5 Installation CX H 9 5 1 rau Enn NN 9 5 2 laeaat S RI X 9 5 2 1 Unpacking ard lnspecLtiOFi eonun ranae rancio cdi EA uA ves ee Ix Eve UNE Ree onus 9 5 2 2 Mounting the Compressor ccccccccccecssssssececececsesesaeceeecesseeeeeeeeecesseseeeeseeeeesseesneeesesecsceesesaeseeesceeseeaeaeeeeeeeene 9 5 2 3 Preparing the Compressor for Operation sese eee eee eee eee 10 5 2 4 Ambient Conditions and Coolant Connection sss sees sees ee eee eee 10 5 2 5 Connecting the Helium Flex HT 10 5 2 6 Filling the Compressor with Helium Gas sees eee eee eee eee 11 5 2 7 Adjusting Helium Gas S a TT TT 11 5 2 8 Electrical a ERR 11 6 OPERATIONS RE A ARALAR ARA EA EAA ai 13 6 1 Before Switchirig ON the System dan erba x paa Fn E ERR VES FER ena La ERE FR cu ERE ERR a Ue RR NERA VR ATA eR Een b R4 cat 13 6 2 Normal Opera noria K N 14 97 00020 000 ii gt A A lt User s Manual Rev A November 2015 M125 Helium Compressor 7 TROUDIOSHOOTIMG eT E CA 14 7 1 Troubleshooting Activities cccccccccessssccccecsessssscesececeessaeseeececseesaesesececceseeseeaeseeececeeseasssesesesesesaeseeseseseeagaaaeses 14 8 MIEIGIEDICSER SEE 15 8 1 Maintenance Personnel Requirement
16. e coolant flow rate and temperature to ensure the proper operation of the compressor unit 5 2 5 Connecting the Helium Flex lines Caution Attach or detach the helium flex lines only when the power to the compressor unit is switched off Never twist the helium flex lines during the installation process Before connecting the helium flex lines follow these steps 1 Identify the helium Return low pressure and Supply high pressure ports on the compressor front panel 2 Clearly mark the helium flex line that will be used to connect to the corresponding Supply and Return port on the cryopump or coldhead Note The helium flex lines are equipped with self sealing couplings which can be attached and detached without helium escaping Follow these steps to connect the helium flex lines 1 Unscrew the protective caps from the couplings and keep the caps for future use 2 Checkthe connectors for cleanness When necessary use lint free clean cloth or soft brush to clean the connectors 97 00020 000 10 A e User s Manual Rev A November 2015 M125 Helium Compressor 3 Check the flat seals on the male couplings and make sure they are properly placed Replace any missing or defective seals 4 Use only the open wrenches supplied with the installation kit For a 4 coupling tighten with a 1 3 16 wrench and stabilize with a 1 wrench 5 Tighten down all couplings as far as possible and then back off by one quarter turn to r
17. ed Model 125 units connect the cooling water a Typical municipal drinking water is recommended b 0 4to 0 5 GPM is required to achieve a maximum discharge temperature of 100 F with 80 F considered ideal c Maximum inlet water pressure should not exceed 150 PSIG with less than 100 PSIG considered ideal 3 For air cooled Model 125 units make sure the front and rear grills have at least 12 inches of clearance from the nearest objects 4 Verify that helium pressure is between 190 5 psig If pressure is low refer to Section 8 4 1 for charging procedures 5 Start the compressor and run for about 15 minutes to stabilize the compressor oil inventory 6 The compressor is now ready to be connected to the cryopump 5 2 4 Ambient Conditions and Coolant Connection Ambient Conditions When the compressor is in operation the ambient temperature should be between 5 C to 40 C 40 F to 104 F The compressor unit should be set up in a non condensing environment Coolant Connection Caution For water cooled compressor models the water used in the unit operation must meet the specifications indicated in Section 4 2 Caution Failure to comply with the coolant specifications may result in serious damage to the compressor and may void the warranty on the unit Identify the inlet and outlet connection ports first before connecting the hoses The water supply line should be connected to the inlet port on the compressor Periodically check th
18. elieve strain If the flex lines need to be bent to a radii of less than 8 20 cm then a 90 degree helium elbow needs to be installed see Section 3 3 for the part number 5 2 6 Filling the Compressor with Helium Gas Caution All safety regulations related to handling pressurized gas cylinders must be observed Only use helium with 99 999 or better purity when performing refill operation Follow these steps 1 Connect a pressure reducer and a helium flex line to a helium supply gas cylinder 2 Connect the open end of the helium flex line to the helium gas charge vent valve on the rear panel of the unit do not tighten the 1 4 flare connector on the end of the flex line 3 Open the valve at the cylinder 4 Setthe pressure of the helium supply cylinder to the value specified in Table 4 3 Tighten the 1 4 flare connector on the end of the helium flex line to the gas charge vent valve of the compressor 5 Openthe pressure regulator valve slightly so that the helium flex lines are purged with helium gas for at least 15 seconds Open the helium gas charge vent valve and fill the compressor unit to the desired pressure value Detach the coupling of the helium flex line from the helium charge vent valve Close the helium gas regulator on the supply cylinder Seal the helium gas charge vent valve on the compressor unit by properly securing with a protective cap 5 00 4 5 2 7 Adjusting Helium Gas Pressure Refer to Table 4 3 for the re
19. ge changed Table 4 2 Document Part Number 97 00020 000 A 97 00020 000 v S User s Manual Rev A November 2015 M125 Helium Compressor 2 Preface 2 1 About Trillium US Inc Trillium US Inc a wholly owned subsidiary of Trillium US Inc specializes in the manufacture and repair of cryogenic vacuum pumps cryocoolers refrigerators and helium compressors for semiconductor optical coating linear accelerators medical equipment and R amp D applications You can find just what you need from our range of products and support services s New Equipment cryopumps compressors cryocoolers and cryopump controllers such as the Model 125 Helium Compressor described in this manual s Comprehensive range of accessories for the installation of whole systems and a complete range of spare parts to repair cryopumps and compressors 2 2 Other Services from Trillium US Inc Trillium US Inc offers comprehensive refurbishment services for its own equipment as well as for that of most of our competitors Our products and services are available through our global network of agents and dealers s Repair and refurbishment services We offer our own quality products as well as most other manufactures models often with off the shelf availability e Exchanges We offer our own quality products as well as most makes of cryopumps and helium compressors which are refurbished and fully warranted e Technical Support Our support e
20. ions Compressor Drive Circuit Configuration RC 350CS Coldheads CTI 350 CP Cryo Plex 8 S Cryo Plex 8LP CT 8 CT 8F 3 Safety Warnings 3 1 Standards for the Use of Warnings and Cautions Warnings are noted when there is a possibility of injury or death to persons operating the equipment or performing specific tasks or procedures noted in this manual Cautions are noted when there is a possibility of damage to equipment if the caution is ignored 3 2 Warnings Applicable to All Aspects of M125 Operation 3 2 1 High Voltage and Electrical Shock Warnings Warning Potentially fatal voltages are present in the compressor unit Before beginning any work on the compressor unit the compressor needs to be switched off then isolated from the power supply Warning Connect or disconnect the flex lines joining the compressor and its load cryopump coldhead etc only after the compressor is switched off and separated from the power source Otherwise an electrical shock hazard may exist causing the compressor unit and its load damage Warning Always provide proper grounding to the compressor unit All electrical connection and disconnection of the unit should be done by a qualified and licensed electrician Warning High voltage is present within the system and can cause severe injury from electrical shock Permit only qualified electrical technicians to open any electrical enclosure to perform electrical trouble
21. ir cooled heat exchanger The cooled oil returns to the capsule to lubricate and cool the capsule The helium gas purifying occurs after the heat removal and cooling process Helium gas purification must occur because the heat exchanger still has a small amount of oil vapor mixed with it If this helium gas gets to the cryopump with oil vapor in it the oil will freeze and foul the cryopump The function of the oil mist vapor separator is to rid the helium gas stream of this oil vapor The condensate from the oil is then returned to the capsule The helium gas still contains a small quantity of oil vapor at this point The adsorber then filters out the remaining oil vapor from the helium gas stream Overtime the adsorber may become saturated from the oil vapor Thus it is important the adsorber be replaced according to the recommended replacement interval 97 00020 000 3 A User s Manual Rev A November 2015 M125 Helium Compressor 4 1 3 Description of Subsystems Along with the four main components Table 3 1 describes the subsystems that serve to monitor the operating condition of the compressor unit and to ensure its safe operation Table 4 1 Model M125 Helium Compressor Subsystems Subsystem Name Function Purpose Monitors helium temperature upstream of the heat exchanger Safety Function Will turn OFF the compressor if the temperature get too high Thermal switch TS1 Purpose Monitors helium temperature downstre
22. mpressor is tightly closed Then shut off the helium pressure regulator on the helium bottle Remove the charging line from the male flare fitting and reinstall the flare cap 8 4 2 Removing Helium Gas Helium contamination is usually indicated by irregular noisy or intermittent operation ratcheting and sometimes seizure of the cryopump drive mechanism This is caused by accumulation of frozen contaminants within the compressor load and resulting in interference The source of the helium contamination is due to either e Inadvertent introduction of ambient air into the system e Use of helium with purity of less than 99 999 such as helium gas used for leak detection and welding Steps to decontaminate the helium circuit 97 00020 000 18 A lt User s Manual Rev A November 2015 M125 Helium Compressor e Minor contamination can usually be removed by running the cold cryopump for several hours to trap contaminants in the cryopump then shut down the compressor and immediately remove the helium lines at the compressor Allow the cryopump to warm thoroughly and then perform the cleanup procedure as outlined in the cryopump manual 8 5 Cleaning Equipment Stubborn contamination involving water vapor requires decontamination of the compressor One effective method involves supplying clean helium to the return side at appropriate pressure while venting a small amount of gas from the supply side while the compressor is running This is refe
23. ngineers will help determine if your cryopump system is operating correctly so that you can get your system back to optimum efficiency as soon as possible o To contact Trillium US Inc Technical Support o E mail supportEtrilliumus com o Telephone 1 512 441 9258 or Toll Free 1 800 404 1055 e Installation On site installation services are available to guarantee performance and save you time e Training We offer on site training to help you and your staff to know more about your cryopump and compressor systems Our training will give you confidence and the ability to maintain a highest possible uptime for your system 2 3 About this Manual The purpose of this manual is to provide our customers using the Model 125 Helium Compressor with the information needed to safely and efficiently operate the compressor when operating as part of a cryogenic refrigeration system Such a system is often comprised of the following equipment s Model 125 helium compressor unit s Coldhead s or cryopump s e Connecting helium lines This manual describes the design operation and maintenance of the Model 125 helium compressor unit 2 4 Compatibility The Model 125 Helium Compressor is compatible with the cryopumps and coldheads described in Table 1 1 Each Model 125 Helium Compressor can be used to run one such cryopump or coldhead 97 00020 000 1 A lt User s Manual Rev A November 2015 M125 Helium Compressor Table 2 1 Compatible Configurat
24. o release helium gas in order to reduce the pressure or to fill the compressor with more helium gas to increase the pressure Do not remove the top cover of the compressor unit Doing so will disable the unit due to the built in safety interlock mechanism 6 2 Normal Operation The load of the compressor can be powered through the power connectors located on the front panel of the compressor To start operation of the compressor and its load do the following 1 Open the coolant supply water cooled compressor model only 2 Switch on the main power source 3 Press the ON button to start the compressor Both the compressor and its load should start simultaneously During operation check the coolant flow rate water cooled compressor and the operating pressure frequently Refer to Table 4 3 for required coolant flow rate If it is too slow make sure any problems associated with water supply or water outlet are resolved Refer to Table 4 3 for proper helium pressure level for the compressor unit If the helium pressure is too low switch off the compressor unit It may be necessary to perform a helium topping up maintenance procedure as described in Section 8 4 1 If pressure drop off happens frequently there may be a substantial leak in the helium circuit of the compressor In this case contact Trillium US Inc customer service immediately To shut down the compressor unit press the OFF button on the front panel After that allow coolant to
25. ocation of Adsorber in Model 125 Water Cooled COMPpresSOF ccccconococoonnonconnnoononnnnncnnnnnonnnnnnncnnnnannnnnncnncnnnos 17 Figure 8 Self Sealing Coupling in Closed Position sse sese eee 18 List of Tables Table 2 1 Compatible Configurations eee eee eee eee ee Table 4 1 Model M125 Helium Compressor Subsystems Table 4 2 Power Requirements for Model 125 COMPpressor sse eee eee e eee eee eene nnne enne nnn nsns enne tareas setenta rasan nnn 7 Table 4 3 Model 125 Compressor Specifications eee eee ee eee eee 7 Table 4 4 Model 125 Compressor Unit Ordering Information sss esse eee ee eee eee eee eee 9 Table 4 5 Optional Accessories and Replacement Parts see eee eee eee eee ee 9 Table S21 Figure Legend rea E E exuti and sn ede dd a mena Feud eee da stedsax sudansancensdarenkdnteateseneanes 13 Table 7 1 Trouble Shooting Procedures eee eee ee 14 97 00020 000 ivl A A lt User s Manual Rev A November 2015 M125 Helium Compressor 1 Revision History Date Revision ECR Description of Change August 2006 1 0 1 Conversion to new format December 2007 1 0 2 Remove caution on 5 2 Review and revise document Conversion to new format Update figures Change adsorber September 2010 1 1 change interval umeai AS Correct minor typographical errors Add maximum inlet water pressure specification August 2012 1 3 Update format November 2015 A 2794 Rebranding ampera
26. once every several months check for leaks caused by improperly connected self sealing connections or incorrectly sealed charge valve If the compressor unit is connected to its load cryopump coldhead etc check for leaks in the load also Use only 99 999 pure helium gas To add helium gas 1 Remove the flare cap of the gas charge fitting on the rear of the compressor 2 Loosely attaching a charging line from the helium pressure regulator on the helium pressure bottle to the 1 4 inch male flare fitting installed on the helium charge valve A user supplied helium charging line terminating in a 1 4 inch female flare fitting and a pressure regulator rated at 400 psig delivery pressure is required 3 Setthe helium pressure regulator to 10 to 25 PSI Allow helium gas to flow through the charging flare fitting for 30 seconds to purge the charging line of air Then tighten the flare nut at the end of the charge line a Ifthe compressor is running under normal operating conditions set the helium pressure regulator to 325 PSI and slowly open the helium charge valve in the rear of the compressor When the helium supply pressure gauge rises to 250 to 260 PSI tightly close the charger valve b Ifthe compressor is not running set the helium pressure regulator to 250 psig and slowly open the helium charge valve When the helium supply pressure gauge rises to 190 5 PSI tightly close the charge valve 4 Insure that the helium charge valve on the co
27. quired pressure specification of the compressor unit If the pressure falls below that level the helium gas refill procedure described in Section 5 2 6 needs to be performed On the other hand if the pressure is too high then the helium gas needs to be released in order to maintain the proper level 5 2 8 Electrical Connection Caution Before connecting power to the compressor unit make sure the factory setting of the frequency switch on the front panel matches the frequency of the power supply where the unit is being installed Failure to do so will result in performance degradation of the system Electrical connections are to be made in accordance to the diagram in Figure 4 Figure 5 shows the Electrical Control Chassis and the components within 97 00020 000 11 A e Rev A November 2015 M125 Helium Compressor User s Manual a a ea TTT ET E RET LE ac 1 1 SS nanna ORE neoaeae 1 H 1 la 1 tt i D li 1 z 23 i 1 11 H L 1 li i Im N H 1 Li 1 ME H N 1 c 1 tt pl SSB ON JG 1 i Ei i 1 H 1 B 1 tt i 11 1 u ij H 1 H li oM 4 qM D lt ics 25 2y i 14 T 1 1 ta E 1 H i N 1 1 i la 1 pg H E 1 I EAS i 1 B 1 tt i gt 1 E la i tt H i 1 i d I ll TTT EFFEPFEEREEEIFEEEDL 4 ES Bree ee bere Tl 30 WAUIDID 1 1 1 i i 24 ei n h H Q G 1 i 1 1 3
28. rred to as a running purge Contact Trillium US Inc if such a procedure is needed Caution Do not use solvents to clean the connectors The fittings should never be greased or oiled Otherwise the helium circuit could become contaminated 8 6 Returning Equipment Before returning any equipment contact Trillium US Inc to receive special instructions and to obtain a return authorization RMA number See contact information in Section 2 97 00020 000 19 A A lt
29. shooting Warning Disconnect the compressor from its power source before carrying out any troubleshooting or maintenance activities 3 2 2 High Pressure Related Warnings Warning High gas pressure is present within the system and can cause severe injury from propelled particles or parts Warning Do not recharge the system without using a pressure regulator 3 2 3 Helium Gas Related Warnings Warning Helium gas can cause rapid asphyxiation and death if released in a confined and un ventilated area Warning Use a pressure reducing regulator when withdrawing helium gas from a high pressure cylinder 3 2 4 Heat Related Warnings Warning The compressor motor may become hot during operation Wait for the motor to cool down before working inside the compressor 97 00020 000 2 A User s Manual Rev A November 2015 M125 Helium Compressor 3 3 Operator Instructions Follow standard Model 125 operating procedures as described in this manual If after reading this manual and you still have questions regarding the safe operation of the Model 125 Helium Compressor please contact Trillium US Inc Technical Support using the contact information found in Section 2 4 Introduction 4 1 General Information about the Model 125 Compressor Trillium US Inc offers industry proven compressors such as the Model 125 Compressor described in this manual at highly competitive prices and with flexible configurations Model 125 compressors are availa
30. sorber for replacement Refer to Section 4 3 for part number 8 3 1 Remove the Compressor Adsorber To remove the compressor adsorber 1 Turn off the compressor 2 Usethe two wrenches supplied with the Installation Kit to avoid loosening the body of the coupling from its adapter Hold one wrench tight on the coupling half attached to the rear side of the compressor Use the other wrench to loosen the coupling to the helium supply line Unscrew the two self sealing coupling halves quickly to minimize minor gas leakage Figure 8 contains an illustration of the self sealing couplings Remove the top cover Remove the adsorber from the compressor as shown in Section 8 3 1 Save all nuts bolts and washers for installing the replacement adsorber 7 Theremoved adsorber can be returned to Trillium US Inc for credit Section 2 provides the contact information gv ur quw 8 3 2 Install Replacement Adsorber To install the replacement adsorber 1 Remove the dust caps from the self sealing coupling halves at each end of the replacement adsorber 2 Checkthe self sealing connector flat rubber gasket to make sure that it is clean and properly positioned 3 Place the adsorber back in the compressor using the nuts bolts and washers set aside during the removal process described in Section 8 3 1 4 Install the two self sealing coupling halves quickly to minimize minor gas leakage 5 Usethe two wrenches supplied with the Installation Kit hol
31. switch in the compressor s On Off 2 Confirm that switch TS1 and or TS2 is Switch closed 97 00020 000 14 A A lt User s Manual Rev A November 2015 M125 Helium Compressor Problem Possible Cause Corrective Action Contact the Trillium US Inc service department for assistance Compressor stops after several minutes of operation and remains off Compressor stops after several minutes of operation and remains OFF High temperature of the compressor caused by insufficient cooling water for water cooled model resulting in the opening of thermal protection switch TS1 and or TS2 For air cooled model the ambient temperature is too high When the compressor is not in operation cold cooling water was left running through the compressor Insufficient helium static pressure High temperature helium gas tripped the thermal protection switch TS1 Low power source voltage Mechanical seizure Confirm that sufficient cooling water for water cooled model is flowing to the compressor For air cooled model provide additional cooling to the surrounding environment Turn the compressor on and off for several times to allow the oil temperature to rise Add helium using the procedure described in Section 8 4 1 Check for proper cooling of the compressor unit Confirm that power source voltage is correct Contact the Trillium US Inc service department 8 Maintenance 8
32. y damage to the shipping company immediately Remove the straps and packaging materials on the compressor unit then lift or roll the unit out of the carton carefully Inspect the exterior of the unit If any damage is observed inform the shipping company Keep the original packaging materials in case the unit needs to be returned to the factory for service or other reasons Most shipping companies have a certain grace period for reporting damages due to shipping in order to process the insurance information in a timely manner Therefore it is highly recommended that shipping carton be opened and the unit inspected whether or not it will be put into operation right away Caution When transporting or storing the compressor unit make certain it is not tilted by more than 45 degrees to avoid the unit been tipped over 5 2 2 Mounting the Compressor It is highly recommended that the compressor unit be installed on a level and steady surface 97 00020 000 9 A lt User s Manual Rev A November 2015 M125 Helium Compressor If the unit must be installed in a tilted manner the maximum tilting angle is 10 degrees Tilting the unit more than this maximum allowable angle could result in damage and contamination in the system and may void the warranty on the unit 5 2 3 Preparing the Compressor for Operation 1 Connect the main power cable to a suitable connector or disconnect box making sure that the compressor switch is off 2 For water cool
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