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User Manual PZ245E

1. Maximum permissible operating temperature of the piezo actuator p 50 The greater the operating frequency the operating voltage peak to peak and the capacitance of the piezo actuator the greater the thermal power generated in the piezo actuator The operating frequency operating voltage and operating time must be selected so that the maximum permissible operating temperature of the piezo actuator is not exceeded For the maximum permissible operating frequency without cooling see column B of the table in Maximum Ratings p 49 When cooling measures p 28 are used the limit values for the operating frequency operating voltage and operating time increase The use of a temperature sensor p 15 can prevent the piezo actuator from overheating Peak and average output current of the used electronics p 14 The used electronics must be selected so that it can supply the required currents See Calculating the Power Requirement for Sinusoidal Operation p 37 6 2 2 Calculating the Effective Mass Meff T 3 Meff T 3 M Figure 10 Effective mass of an unloaded piezo actuator left and a piezo actuator loaded with an additional mass M right Each piezo actuator is permanently mounted at one end P 2x5 Piezo Actuator PZ245E Version 1 0 1 35 6 Start Up and Operation P J Find the mass m of your piezo actuator in the data table p 47 Determine the additional mass M Calculate the effective mass Me o
2. P 176 B25 Ball tip for P 225 and P 235 P 176 F25 Flat tip for P 225 P 176 F35 Flat tip for P 235 P 203 VA Vacuum feedthrough for high voltage piezo actuators up to 10 hPa 100 C consisting of Vacuum feedthrough LEMO SJG OB 701 CJA 1173 Air side cable with 2 LEMO connectors 2 m P 2x5 Piezo Actuator PZ245E Version 1 0 1 15 3 Product Description P J P 892 VA Vacuum feedthrough strain gauge sensor up to 10 hPa 100 C consisting of m Vacuum feedthrough LEMO SWH 0S 304 CLLSV maili Aijr side cable with 2 LEMO connectors 2 m P 899 VA Vacuum feedthrough temperature sensor up to 10 hPa 100 C consisting of m Vacuum feedthrough LEMO SWH 0S 303 CLLSV Aijr side cable with 2 LEMO connectors 2 m Connector m F G 0B 701 CJA 1173 connector f PHG OB 701 CJL 1173 Extension Cable for Strain Gauge Sensors LEMO Connector s 2 m Extension Cable for Strain Gauge Sensors LEMO Connector s 3 m P 892 05 Extension Cable for Strain Gauge Sensors LEMO Connector s 5 m P 892 10 Extension Cable for Strain Gauge Sensors LEMO Connector s 10 m P 892 15 Extension Cable for Strain Gauge Sensors LEMO Connector s 15 m Connector m FFA 0S 304 CLAC32 connector f PCA 0S 304 CLLC32 16 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description P 899 07 Extension cable for temperature sensor LEMO connectors 7 m P 899 10 Extension cable for temperature sens
3. Cleaning the P 2x5 gt Do not do any ultrasonic cleaning Only when the piezo actuator is not used in vacuum gt When necessary clean the surfaces of the P 2x5 with a cloth that is lightly dampened with a mild cleanser or disinfectant e g alcohol or isopropanol When the piezo actuator is used in a vacuum gt Only touch the piezo actuator with powder free gloves gt If necessary wipe the piezo actuator clean 42 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting No or limited The cable is not gt Check the cable connections motion connected correctly Excessive load The E 481 or E 482 electronics from PI has deactivated the voltage output due to overheating of the piezo actuator Zero shift of the position sensor for the following reasons Load in direction of motion Ambient operating temperature of the piezo actuator is far above or below the calibration temperature 21 C to 24 C Piezo actuator is depolarized due to overheating P 2x5 Piezo Actuator gt Do not exceed the permissible compressive tensile stress capacity according to the specifications p 47 If the piezo actuator is equipped with the option PT1000 temperature sensor and protective air connection for PICA high voltage piezo actuators p 15 the E 481 and E 482 electronics evaluate the signal of the temperature sensor Switch off the electro
4. Do not operate the P 2x5 during evacuation NOTICE aD Destruction of the piezo actuator by dynamic forces During dynamic operation dynamic forces can occur that cancel the preload of the piezo actuator Operation without a preload can destroy the actuator gt Do not exceed the maximum tensile compressive stress capacity according to the specifications p 47 gt Observe the notes in Determining the Operating Parameters p 34 NOTICE Destruction of the piezo actuator by operating frequencies that are too high An operating frequency that is too high can destroy the piezo actuator gt Select the operating frequency so that the following conditions are met The operating frequency is maximally one third of the resonant frequency resonant frequency of the unloaded piezo actuator see Data Table p 47 resonant frequency of the loaded piezo actuator see Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 36 The dynamic forces that occur during operation do not exceed the maximum tensile compressive stress capacity of the piezo actuator see Calculating Forces that Occur During Dynamic Operation p 37 32 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators
5. Connecting the P 2x5 to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the P 2x5 as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 5 3 Mounting the P 2x5 Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 2x5 see Unpacking p 19 or the P 2x5 is connected to the switched off electronics from PI Tools and accessories M8 screw of suitable length see Dimensions p 50 Suitable tools for fastening the screw Open end wrench AF 27 Mounting the P 2x5 1 Use an AF 27 open end wrench to hold the base of the P 2x5 by the wrench flats 2 Mount the P 2x5 on a suitable surface with an M8 screw For this purpose use the M8 mounting hole on the bottom side of the base see Dimensions p 50 3 Remove the open end wrench from the base 26 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 Optional Fastening a Tip INFORMATION The optionally available tips p 15 make it possible to realize d
6. P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 6 Vacuum Feedthroughs for Sensors The dimensions of the following vacuum feedthroughs are identical LEMO SWH 0S 304 CLLSV part of the P 892 VA option for SGS LEMO SWH 0S 303 CLLSV part of the P 899 VA option for temperature sensor fi amome BA pn S3 E max S1 Figure 16 LEMO SWH 0S 30x CLLSV AA e AA ee ee ee P 2x5 Piezo Actuator PZ245E Version 1 0 1 55 10 Technical Data PI 10 3 Pin Assignment 10 3 1 Voltage Connection LEMO FGG 0B 701 CJA 1173 Connector front view Z N Ow W Input Piezo voltage 1000 V female M GND Ground male The connector shell is connected with the cable shield 10 3 2 Connection of the Position Sensor LEMO FFA 0S 304 CLA ee a a won Meee 1 rpn Supp votage tor sain gauge sensor The connector shell is connected with the cable shield 10 3 3 Connection of the Temperature Sensor 56 LEMO FFA 0S 303 CLA Connector ne isl o po fem A e owe frems ooo The connector shell is connected with the cable shield Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equ
7. P 2x5 Piezo Actuator PZ245E Version 1 0 1 29 5 Installation P J Connecting the protective air 1 Make sure that the piezo actuator has cooled down to room temperature 2 Connect the protective air Attach the hose for feeding the protective air to the corresponding plug nipple on the P 2x5 see above figure Attach the hose for discharging the protective air to the corresponding plug nipple on the P 2x5 see above figure 30 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation cccccccsesecceeceesseceeeeeeeeeeeeeeaeeeseeeesaaees 31 Determining the Operating ParaMeters cccccccsseeeceeeeeeeseceeeeseeeeeeeeeeeeeeeeeeseaeeeeeeeeas 34 OSG Me AA AA EEE 38 Discharging ING 2X 0 scssi eeo r Eea e ES 38 6 1 General Notes on Start Up and Operation DANGER A Risk of electric shock if the protective earth conductor is not connected lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 2x5 in the case of malfunction or failure of the system If touch voltages exist touching the P 2x5 can result in serious injury or death from electric shock gt Connect the P 2x5 to a protective earth conductor p 25 before start up gt Do not remove the protective earth conductor during operation gt If t
8. a safety factor of 70 should be added to the small signal Capacitance 6 3 Operating the P 2x5 Prerequisite v You have read and understood the General Notes on Start Up and Operation p 31 You have determined the operating parameters for your application p 34 You have correctly installed the P 2x5 p 21 You have provided suitable electronics that can supply the required currents p 37 v You have read and understood the user manual of the used electronics Operating the P 2x5 gt Follow the instructions in the manual of the used electronics for connecting starting up and operating the P 2x5 p 14 6 4 Discharging the P 2x5 The P 2x5 must be discharged in the following cases When the P 2x5 is not used but the electronics remain switched on to ensure temperature stability Before demounting e g before cleaning and transporting the P 2x5 and for modifications Prerequisite v You have read and understood the General Notes on Installation p 21 38 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation Tools and accessories If the P 2x5 is not connected to the electronics Supplied shorting plug p 14 Alternative Electronics from PI Discharging a P 2x5 connected to the electronics In closed loop operation 1 Switch off the servo mode on the electronics 2 Set the piezo voltage to 0 V on the electronics In open loop operat
9. direction Shear load Torque on tip Drive properties Electrical capacitance Dynamic operating current coefficient Other Mass with cable Piezo ceramic PICA Power P 235 10 0 to 1000 15 0 3 0 15 0 2 860 14 30000 3500 707 2 550 65 580 Temperature range 40 to 80 C P 235 20 0 to 1000 30 0 6 0 3 0 2 600 10 30000 3500 420 2 1100 65 690 P 235 40 O to 1000 60 12 0 6 0 2 380 30000 3500 232 2 2400 65 940 P 235 80 O to 1000 120 2 4 1 2 0 2 210 30000 3500 147 2 5100 65 1400 The operating voltage should not exceed 750 V in continuous operation Requires integrated strain gauge sensor These versions are shipped with a performance report P 235 90 O to 1000 180 3 6 1 8 0 2 150 2 8 30000 3500 147 2 7800 65 1900 PI Unit um nm nm Yo N um kHz Nm nF UA Hz x um Measured interferometrically The position resolution of piezo actuators is not limited by stiction or friction Dynamic small signal stiffness is approx 50 higher 48 Version 1 0 1 PZ245E Tolerance typ typ typ 20 20 max max max 20 20 5 Yo P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Maximum Ratings P 2x5 piezo actuators are designed for the following operating data Maximum op
10. for the P 2x5 piezo actuators that have to be integrated during the manufacturing of the P 2x5 p 15 If a P 2x5 piezo actuator is ordered with these options it receives a customer specific product number beginning with P 2x5K This manual also applies to all piezo actuators that have a customer specific product number due to integrated options Piezo actuators without a sensor moa peen oo P 2x5 Piezo Actuator PZ245E Version 1 0 1 9 3 Product Description P J Piezo actuators without a sensor suitable for high temperature range and high vacuum Lan A AA Wa P 225 10V_ Preloaded High Load Piezo Actuator 15 um 1000 V 12500 N High Temperature Vacuum P 225 20V_ Preloaded High Load Piezo Actuator 30 um 1000 V 12500 N High Temperature Vacuum P 225 40V_ Preloaded High Load Piezo Actuator 60 um 1000 V 12500 N High Temperature Vacuum P 225 80V Preloaded High Load Piezo Actuator 120 um 1000 V 12500 N High Temperature Vacuum P 235 10V___ Preloaded High Load Piezo Actuator 15 um 1000 V 30000 N High Temperature Vacuum P 235 20V_ Preloaded High Load Piezo Actuator 30 um 1000 V 30000 N High Temperature Vacuum P 235 40V Preloaded High Load Piezo Actuator 60 um 1000 V 30000 N High Temperature Vacuum P 235 80V Preloaded High Load Piezo Actuator 120 um 1000 V 30000 N High Temperature Vacuum P 235 90V_ Preloaded High Load Piezo Actuator 180 um 1000 V 30000 N High Te
11. is responsible for the correct installation and operation of the P 2x5 Temperature changes and compressive stresses can induce charges in the P 2x5 piezo actuator After being disconnected from the electronics the piezo actuator can stay charged for several hours Touching the live parts of the P 2x5 can result in serious injury or death from electric shock gt Do not open the P 2x5 lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 2x5 in the case of malfunction or failure of the system If touch voltages exist touching the P 2x5 can result in serious injury or death from electric shock gt Connect the P 2x5 to a protective earth conductor p 25 before start up gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 2x5 to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the P 2x5 gt Avoid impacts that affect the P 2x5 gt Do not drop the P 2x5 gt Avoid torques bending forces and lateral forces on the moving pusher of the P 2x5 gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 47 6 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 3 Organizational Measures User manu
12. leads to a considerable reduction in the lifetime of the piezo ceramics of the actuator gt gt When the P 2x5 is not used but the electronics remain switched on to ensure temperature stability discharge the P 2x5 p 38 If possible Limit the maximum operating voltage to 750 V during continuous operation NOTICE Operating voltages that are too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 2x5 gt gt gt Only operate the P 2x5 with controllers drivers and original accessories from PI Do not exceed the operating voltage range p 49 for which the P 2x5 is specified Only operate the P 2x5 when the operating voltage is properly connected see Pin Assignment p 56 NOTICE Destruction of the piezo actuator by overheating fe Overheating can destroy the piezo actuator gt gt gt Cool the piezo actuator with e g protective air p 28 Monitor the temperature of the piezo actuator with a temperature sensor p 15 Adjust the operating voltage operating freguency and or operating time so that the maximum operating temperature of the piezo actuator is not exceeded see Ambient Conditions and Classifications p 50 Maximum Ratings p 49 and Determining the Operating Parameters p 34 P 2x5 Piezo Actuator PZ245E Version 1 0 1 33 6 Start Up and Operation P J NOTICE Uncontrolled oscillati
13. list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned 20 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ccccccssssecceeceeeeeceeeeeeeseceeeeeeeeceeeseeaeeeeseesaeeeeseesaenes 21 Connecting the P 2x5 to the Protective Earth Conductor ww wmmwmenamamimznmawa 25 Mounino the 2 Xo Ia 26 Optional FANANI 27 AINGI NE Load aa 27 Optional Connecting the Protective Air ccccccccccccccsseeceececeeeceeeeeeeseeeeeseaeeeeeeeesaeees 28 5 1 General Notes on Installation NOTICE aD Destruction of the piezo actuator by discharging too quickly If the P 2x5 is not connected to the electronics the lines on the voltage connection must be short circuited with a discharge resistor of 10 kQ in order to prevent the piezo actuator from charging when temperature changes and compressive stresses occur Unsuitable short circuiting leads to an abrupt contraction of the piezo actuator due to excessively fast discharging Abrupt contraction can destroy the piezo actuator gt Only remove the supplied shorting plug from the voltage connection of the piezo actuator when this is necessary for installation or operation gt Keep the shorting plug near
14. N The outwards motion of the pusher corresponds to the positive direction of motion and is proportional to the applied operating voltage 24 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 2 Connecting the P 2x5 to the Protective Earth Conductor INFORMATION gt Observe the applicable standards for mounting the protective earth conductor The P 2x5 has an M4 threaded hole for connecting the protective earth conductor This hole is located on the base of the piezo actuator and is marked in the dimensional drawing with the symbol for the protective earth conductor see Dimensions p 50 Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 2x5 see Unpacking p 19 v The P 2x5 is not connected to the electronics Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm and protective earth conductor resistance lt 0 1 Q at 25 A Supplied M4 protective earth screw set p 14 for connecting the protective earth conductor Suitable screwdriver Figure 8 Mounting of the protective earth conductor profile view Base of the P 2x5 Flat washer Safety washer Screw Cable lug O Oa KR WD DHS m Protective earth conductor P 2x5 Piezo Actuator PZ245E Version 1 0 1 25 5 Installation P J
15. PI PZ245E P 2x5 Piezo Actuator User Manual Version 1 0 1 Date 02 03 2015 This document describes the following products P 225 Tu Preloaded high load piezo actuator P 225 10 20 40 80 without sensor P 225 10V 20V 40V 80V without sensor high temperature range and high vacuum P 225 1S 2S 4S 8S with sensor j P 225 1SV 2SV 4SV 8SV with sensor high temperature range and high vacuum p P 235 r Preloaded high load piezo actuator P 235 10 20 40 80 90 without sensor P 235 10V 20V 40V 80V 90V without sensor high temperature range and high vacuum P 235 1S 2S 4S 8S 9S with sensor P 235 1SV 2SV 4SV 8SV 9SV with sensor high temperature range and high vacuum Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2015 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citat
16. al gt Always keep this user manual available by the P 2x5 The latest versions of the user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the P 2x5 on to other users also turn over this user manual as well as all other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing important information serious or fatal injury as well as property damage can result Only install and operate the P 2x5 after having read and understood this user manual Personnel qualification Only authorized and qualified personnel must install operate maintain and clean the P 2x5 P 2x5 Piezo Actuator PZ245E Version 1 0 1 7 PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model Overvie W cccecceccececcecceceececeeceeaecuecueaecuecueseeaecuecueaecaeceseeaeseesueseeaeeueaeeaesaeeeeaess 9 PI VRC aaa 12 COME AA 14 Suitable Electronics w wawawawawawawawawawawewewiwzwiwzununuzunukanawakawawawa wawekewa 14 PC COS SOS WW 15 Technical Features w w wawamanwnwawawamanwnwawawawanunwawawanuzunuzwa wanunua wakanena 17 3 1 Model Overview INFORMATION Optional accessories are available
17. apacitance Dynamic operating current coefficient Miscellaneous Mass with cable Piezo ceramic PICA Power Temperature range 40 to 80 C KKK P 225 10 0 to 1000 15 0 3 0 15 0 2 480 14 12500 2000 255 Ss 320 33 410 P 225 20 0 to 1000 30 0 6 0 3 0 2 330 10 12500 2000 152 1 5 630 33 470 P 225 40 0 to 1000 60 1 2 0 6 0 2 200 7 12500 2000 84 1 5 1300 33 610 The operating voltage should not exceed 750 V in continuous operation Requires integrated strain gauge sensor These versions are shipped with a performance report P 225 80 O to 1000 120 2 4 1 2 0 2 110 4 12500 2000 73 eS 2600 33 900 10 Technical Data Unit um nm nm Yo N um kHz Nm nF UA Hz x um Measured interferometrically The position resolution of piezo actuators is not limited by stiction or friction Dynamic small signal stiffness is approx 50 higher P 2x5 Piezo Actuator PZ245E Version 1 0 1 Tolerance typ typ typ 20 20 max max max 20 20 5 Yo 47 10 Technical Data Operating voltage Motion and positioning Closed loop travel Closed loop resolution Open loop resolution Linearity error Mechanical properties Static large signal stiffness in the direction of motion Unloaded resonant frequency Push pull force capacity in motion
18. correct Angle error on the pusher B Correct Axial loading of the actuator C Incorrect Both ends of the actuator screwed in tight 22 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Flexure Figure 6 Ball tips or flexure joints for decoupling lateral forces and bending forces u 7 Aa g bi M YA a LA Lar E g po g E Eo Eo E g Y i Figure 7 No lateral forces or torques A Incorrect Shearing force from lateral force B Correct Axial loading of the actuator C Incorrect Torsion from torque P 2x5 Piezo Actuator PZ245E Version 1 0 1 23 5 Installation P I NOTICE Damage from unsuitable cables Unsuitable cables can damage the piezo actuator and the electronics gt Only use cables provided by PI for connecting the P 2x5 to the electronics NOTICE Heating up of the P 2x5 during operation gH The heat produced during operation of the P 2x5 can affect your application gt Install the P 2x5 so that your application is not affected by the dissipating heat INFORMATION Extended cables can affect the performance of the P 2x5 gt Only use extension cables from PI p 15 INFORMATION When handling the vacuum version of the piezo actuator appropriate cleanliness must be ensured gt Only touch the piezo actuator with powder free gloves gt f necessary wipe the piezo actuator clean INFORMATIO
19. elected depending on the type of application The table below lists the suitable products HVPZT Piezo Amplifier Controller amp Interface Display Upgrade possible 550 W 1100 V Bench Top 19 14 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description E 500 Modular piezo controller configuration example High voltage piezo amplifier for PICA HVPZT 3 channels with PC interface and display consisting of 1 x E 500 00 19 Chassis for Modular Piezo Controller System 1 to 3 Channels 3 x E 508 00 HVPZT Piezo Amplifier Module 3 to 1100 V 1 Channel 1 x E 517 13 Interface Display Module 24 Bit D A TCP IP USB RS 232 IEEE488 3 Channels Optionally as high voltage amplifier servo controller additionally with 1 x E 509 S3 sensor Piezo Servo Control Module SGS Sensors 3 Channels gt To order contact our customer service department p 45 gt Before selecting electronics calculate the power requirements of the application p 37 3 5 Accessories Options with a gray background have to be ordered together with the P 2x5 piezo actuator for manufacturing reasons Piezo actuators that are equipped with these options have a customer specific product number beginning with P 2x5kK P 177 50 PT1000 temperature sensor and protective air connection for PICA high voltage piezo actuators with E 481 and E 482 controllers P 706 00 Water resistant case for P 225 P 235
20. erating frequency without Maximum power load consumption A considering thermal Maximum operating without considering considering SA aspects voltage range thermal aspects thermal aspects Piezo Actuator One third of the resonant frequency of the unloaded piezo actuator For further restrictions see Overview of Limiting Factors p 34 In order to prevent the maximum permissible operating temperature from being exceeded the unloaded uncooled piezo actuator may only be operated maximally with this operating frequency at an operating voltage of 1000 V peak to peak In the case of smaller amplitudes of the operating voltage and or the use of cooling measures higher operating frequencies are possible For further restrictions see Overview of Limiting Factors p 34 Power consumption of the unloaded uncooled piezo actuator that is operated at an operating voltage of 1000 V peak to peak with the operating frequency from column B of this table P 2x5 Piezo Actuator PZ245E Version 1 0 1 49 10 Technical Data PI 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P 2x5 Area of application Maximum altitude Air pressure Relative humidity Operating temperature Storage temperature Transport temperature Maximum bake out temperature for vacuum compatible products Overvoltage category Protection class Degree of p
21. f the unloaded piezo actuator and Mex of the loaded piezo actuator with the formulas in the above figure 6 2 3 Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator INFORMATION In the following calculation the maximum permissible operating temperature of the piezo actuator is not taken into account During operation without cooling the maximum operating temperature may already be exceeded when the operating frequency is still below the limit value calculated in the following gt For the maximum permissible operating frequency without cooling see column B of the table in Maximum Ratings p 49 1 Calculate the resonant freguency of the loaded piezo actuator with the following formula Mott To lo m eff fo Resonant frequency of the loaded piezo actuator Hz fo Resonant frequency of the unloaded piezo actuator Hz see Data Table p 47 Met Effective mass approx 1 3 of the mass of the piezo actuator kg Met Effective mass Mer additional mass M kg See also Calculating the Effective Mass p 35 Calculate the maximum operating frequency of the loaded piezo actuator with the following formula fmax fo 3 fmax Maximum operating frequency of the loaded piezo actuator Hz fo Resonant frequency of the loaded piezo actuator HZ 36 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 2 4 Calcula
22. g of 1a Base with wrench flat 1b Case tube Not shown here Optional inlets and outlets for protective air optional water protection Moving pusher with wrench flat and M8 internal thread 3 Cable exit for piezo voltage Not shown here Cable exits for sensors 4 Protective earth connection 12 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 2 2 Product Labeling 1 2 3 4 Swanton CE 7 8 9 Figure 2 P 2x5 Type plate example view Data matrix code contains the serial number Product name Serial number Manufacturer s logo Warning sign Observe manual Disposal of used devices Manufacturer s address website Country of origin O MN DAA OD MH CE conformity mark Figure 3 P 2x5 Warning sign DANGER on voltage connection with attached shorting plug Warning sign DANGER Notice of risk of electric shock p 6 P 2x5 Piezo Actuator PZ245E Version 1 0 1 13 3 Product Description P J 3 3 Scope of Delivery Piezo actuator according to order p 9 000036450 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers P 202 01 Shorting plug for high voltage piezo actuators with internal discharge resistor of 10 KQ PZ246EK Short instructions for high voltage piezo actuators 3 4 Suitable Electronics To operate a P 2x5 you need electronics The device is s
23. he corresponding category e g P Piezo Actuators Nanopositioning amp Scanning Systems Click the corresponding product code e g P 225 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals he 2 3 4 Carry out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter Mendod USG AI aa 5 General Safety Instructions cccccccececeeccceeeeeseeeeeeeeeeeeseeeeseceeeeeeseseaeeeeeeeeeesssaaaeeeeeeess 6 Organizational MEASUIES ccccccceeeeeccceeeeeeeeeseeeceeeseceueesseeeeeeeseseeseeeceeeeessseeeeeeeeeeeeseaas 7 2 1 Intended Use The P 2x5 is a laboratory device as defined by DIN EN 61010 1 It is inte
24. he protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 2x5 to the protective earth conductor before Starting it up again A Burning from hot surface The surface of the P 2x5 can become hot during operation Touching the P 2x5 can cause slight injuries from burning gt Cool the P 2x5 e g with protective air p 28 so that the temperature of its surface does not exceed 65 C gt If sufficient cooling is not possible Make sure that the hot P 2x5 cannot be touched gt When sufficient cooling and protection against contact are not possible Mark the danger zone according to the legal regulations P 2x5 Piezo Actuator PZ245E Version 1 0 1 31 6 Start Up and Operation P J NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 2x5 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 2x5 in environments that can increase the electric conductivity gt Only operate the P 2x5 within the permissible ambient conditions and classifications p 50 gt For operation in vacuum below 0 1 hPa
25. his Chapter Goal and Target Audience of this User Manual cccecceeeeeeeeeeeeeseeeeeeeeeeeaaeneeeeeeees 1 Symbols and Typographic COnVventions ccccccccccccececsseeseecceeeeeeeaeeeeeeeeeeeesssaageeeeeees 1 Other Applicable DOCUMENTS ccccccccceceeeeeseeeeeeeeeeaeeeeseeeeeeeeeaaeaeseeeeeeessaeaeeeeeeeeessaas 3 D wnioading Manuals KWa 3 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 2x5 x stands for the different models p 9 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual DANGER A Imminently hazardous situation If not avoided the hazardous situation will result in death or serious injury gt Actions to take to avoid the situation AN Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation P 2x5 Piezo Actuator PZ245E Version 1 0 1 1 About this Document PI NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the eguipment gt Actions to take to avoid the situation INFORMATION Information f
26. iezo actuator see Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 36 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 45 44 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website P 2x5 Piezo Actuator PZ245E Version 1 0 1 45 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Specifications Dimensions Pin Assignment In this Chapter 10 1 Specifications 10 1 1 Data Table Operating voltage Motion and positioning Closed loop travel Closed loop resolution Open loop resolution Linearity error Mechanical properties Static large signal stiffness in the direction of motion Unloaded resonant frequency Push pull force capacity in motion direction Shear load Torque on tip Drive properties Electrical c
27. ifferent mechanical connections to a load Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 2x5 see Unpacking p 19 or the P 2x5 is connected to the switched off electronics from PI Tools and accessories Optionally available tip p 15 Open end wrench for holding the pusher P 225 AF 13 P 235 AF 17 Fastening a tip 1 Use a suitable open end wrench to hold the wrench flats of the pusher 2 Manually screw the tip into the mounting hole in the pusher of the P 2x5 3 Remove the open end wrench from the pusher 5 5 Affixing the Load Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 2x5 see Unpacking p 19 or the P 2x5 is connected to the switched off electronics from PI Tools and accessories M8 screw of suitable length see Dimensions p 50 Suitable screwdriver P 2x5 Piezo Actuator PZ245E Version 1 0 1 27 5 Installation P J Open end wrench for holding the pusher P 225 AF 13 P 235 AF 17 Affixing the load 1 Use a suitable open end wrench to hold the wrench flats of the pusher 2 Fasten the load to the mounting hole in the pusher with an M8 screw see Dimensions p 50 3 Remove the open end wrench from the pusher 5 6 Optional C
28. ion gt Set the piezo voltage to 0 V on the electronics Discharging a P 2x5 that is not connected to the electronics gt Connect the voltage connection of the piezo actuator with the shorting plug see Unpacking p 19 gt Alternative Connect the voltage connection of the piezo actuator to the switched off electronics from PI P 2x5 Piezo Actuator PZ245E Version 1 0 1 39 PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance cccccccccceccececcececcccecuccececcecuccececaeceeauceeaceecaeaeceuaecass 41 deanna AKA 41 7 1 General Notes on Maintenance The P 2x5 is maintenance free 7 2 Cleaning the P 2x5 NOTICE Destruction of the piezo actuator by electric flashovers ah The intrusion of fluids into the case of the piezo actuator can lead to the destruction of the piezo actuator by electric flashovers Before cleaning the P 2x5 gt Discharge the P 2x5 p 38 gt Disconnect the voltage connection of the P 2x5 from the electronics gt Connect the voltage connection of the P 2x5 with the supplied shorting plug p 19 Prerequisites v You have discharged the piezo actuators of the P 2x5 p 38 v You have disconnected the P 2x5 from the electronics v The supplied shorting plug is attached to the voltage connection of the P 2x5 see Unpacking p 19 P 2x5 Piezo Actuator PZ245E Version 1 0 1 41 7 Maintenance P I
29. ion of the source Original instructions First printing 02 03 2015 Document number PZ245E CBo version 1 0 1 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual cccccssseceeeceesseeeeeeaeeeeeees 1 1 2 Symbols and Typographic ConventionS cccccseseccceceeeeseeeeeeaeeeeeeeesaeeeeeeeesaeeeees 1 1 3 Other Applicable DOCUMENTS cccccccececsseeseeeeeeeeeeeaeeseeeeeeeesseeeeeeeeeeeessaaaeeess 3 1 4 Downloading Manuals ccccceeccccceeeeeecaeeeeeeneeseeeceaeeeesseueeeseaaeeeesseeeessaneessaaeees 3 2 Safety 5 2 1 UNE UGO III 5 2 2 General Safety Instructions ccccccceccsssscceecceeeceeeeceeseceeseeeeeeceeeseeeeceeesaeaeeees 6 2 3 Organizational MeasureS w wwwmanmwwnaanunanawwnnanunanawwnaakunanu kununua na naume nuna 7 3 Product Description 9 3 1 POG OV OIC II II 9 3 2 OCC VIEW AA AAA SEA WA a wa mawa Mapana io wasee MARU aetenneaeseeadenocieseceae 12 3 2 1 cece net eccentrics mawaa aaah akawaua eaaa 12 3 2 2 aana Ua EDE UAE AAA AE 13 3 3 SCOPE of Delivery 000 cee ceccccccseeseeeeceeeeeeeeccaeeeseeeeseeasseeeessaaaeeeeesseaseeeesssaaneeesessaaess 14 3 4 SUILADIS ElSCIFONICS EA 14 3 5 PSC SS ONS AI 15 3 6 Ta Features Ia 17 3 6 1 PICA Piezo Actua
30. ipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 D 76228 Karlsruhe Germany yy P 2x5 Piezo Actuator PZ245E Version 1 0 1 57 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the P 2x5 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 Safety Low Voltage Directive EN 61010 1 2010 lt laa P 2x5 Piezo Actuator PZ245E Version 1 0 1 59
31. mperature Vacuum Piezo actuators with a position sensor moe peen ooo 10 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description Piezo actuators with a sensor suitable for high temperature range and high vacuum Le Wa P 225 1SV_ Preloaded High Load Piezo Actuator 15 um 1000 V 12500 N SGS High Temperature Vacuum P 225 2SV Preloaded High Load Piezo Actuator 30 um 1000 V 12500 N SGS High Temperature Vacuum P 225 4SV_ Preloaded High Load Piezo Actuator 60 um 1000 V 12500 N SGS High Temperature Vacuum P 225 8SV_ Preloaded High Load Piezo Actuator 120 um 1000 V 12500 N SGS High Temperature Vacuum P 235 1SV Preloaded High Load Piezo Actuator 15 um 1000 V 30000 N SGS High Temperature Vacuum P 235 2SV Preloaded High Load Piezo Actuator 30 um 1000 V 30000 N SGS High Temperature Vacuum P 235 4SV_ Preloaded High Load Piezo Actuator 60 um 1000 V 30000 N SGS High Temperature Vacuum P 235 8SV_ Preloaded High Load Piezo Actuator 120 um 1000 V 30000 N SGS High Temperature Vacuum P 235 9SV_ Preloaded High Load Piezo Actuator 180 um 1000 V 30000 N SGS High Temperature Vacuum P 2x5 Piezo Actuator PZ245E Version 1 0 1 11 3 Product Description 3 2 Product View 3 2 1 Overview The figure serves as an example and can differ from your model Figure 1 Example of product view 1 Case consistin
32. nanuninznnaninuninauniawaninunanu zinazaa nanaa 6 4 Discharging the P 2X5 ais sircicntescdeicntnitenicsmenhsdennnsasicasautandienten sicinunlatenmuaeateneusacdenntanesiin Maintenance 7 1 General Notes on Maintenance ccccccccssscceceeeeceeceeeceeceeeeeseeeceesaaeeeessaaeees 7 2 Cle ane iia PAA E E EI E E A E Troubleshooting Customer Service Technical Data 10 1 SpPECNCANONS cessos res deaiyaes giniveseiantasduth praca uamiata ciadeacnotinoun 10 1 1 A NOC AA eave aiacesieusmete 10 1 2 Maximum IA eA NACH II 10 1 3 Ambient Conditions and Classifications w wwmwmwa NO SONATA SI OS III 10 2 1 PRE PICZO ACU ALON peacannan E EEEE EENE i 10 2 2 P 2x5 with the P 706 00 Option Water Resistant Case 10 2 3 Bal LOPATO B2 WAWA E 10 2 4 Flat Tips F 176 F29 and PA ai 10 2 5 Vacuum Feedthrough for High Voltage Piezo Actuators 10 2 6 Vacuum Feedthroughs for SCnSOrs ceccceeeeeeeeeeeeseeeeeeeeeeeaeeeees IOS PIAS SONNEN oaa E E E ET 10 3 1 Voltage COnne ction cccccccccesseseeceeeeecceeeeeeeeeeeeeseeeeaseeeeeeesseaaeaases 10 3 2 Connection of the Position Sensor cccccceececceeeeeeeeeeseeeeeeeeeeeeees 10 3 3 Connection of the Temperature Sensor cccceecceseeeeeeeeeeeeeeeeeees Old Equipment Disposal EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In t
33. nded to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design the P 2x5 is intended for the following applications Positioning of high loads see Specifications p 47 Dynamic positioning Vibration damping Force generation The motion takes place in one axis The specifications of the P 2x5 apply to mounting with a vertically oriented motion axis Mounting with a horizontally oriented motion axis is not recommended The intended use of the P 2x5 is only possible in a completely mounted and connected state and only in combination with suitable drive or control electronics p 14 available from PI The electronics is not included in the scope of delivery of the P 2x5 The electronics must provide the required operating voltages To ensure proper performance of the position control the electronics must also be able to read out and process the signals from the position sensors P 2x5 Piezo Actuator PZ245E Version 1 0 1 5 2 Safety P J 2 2 General Safety Instructions The P 2x5 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 2x5 gt Only use the P 2x5 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator
34. nics Wait a few minutes until the piezo actuator has sufficiently cooled down Switch the electronics on again Preventive measures Reduce the operating voltage operating frequency and or operating time Cool the piezo actuator Perform a zero point adjustment of the sensor see manual of the electronics used gt Contact our customer service department p 45 PZ245E Version 1 0 1 43 8 Troubleshooting pP J Reduced P 2x5 or controller has gt Perform a recalibration of the axis displacement see accuracy been replaced controller manual or contact our customer service department p 45 Axes were mixed up With calibrated systems during connection gt Observe the assignment of the axes when connecting several piezo actuators to a multi channel controller This assignment is indicated by labels on the devices The piezo Servo control parameters 1 Immediately switch off the servo mode of the actuator starts incorrectly set because corresponding axes oscillating or e g the load was Check the settings of the servo control parameters positions changed on the controller inaccurately Adjust the servo control parameters on the controller according to the load change Operation with frequency gt Operate the piezo actuator with maximally one third that is too high of the resonant frequency resonant frequency of the unloaded piezo actuator see Data Table p 47 resonant frequency of the loaded p
35. ollution Degree of protection according to IEC 60529 10 2 Dimensions 50 For indoor use only 2000 m 1100 hPato 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C 20 C to 80 C With models for high temperature range and high vacuum P 2x5 xxV xSV 40 C to 150 C 20 C to 80 C 20 C to 80 C Piezo actuators for high temperature range and high vacuum P 2x5 xxV xSV 150 C LEMO vacuum feedthroughs see Optional Accessories p 15 100 C Dimensions in mm Note that the decimal places are separated by a comma in the drawings Standard tolerance according to DIN ISO 2768 f H Roughness Ra 1 6 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 1 P 2x5 Piezo Actuator Figure 11 P 2x5 1 Sensor only with models with position sensor and or with P 177 50 option 2 Piezo L mm A mm B mm AF P 225 1x 55 39 8 16 13 P 225 2x 68 39 8 16 13 P 225 4x 94 39 8 16 13 P 225 8x 147 39 8 16 13 P 235 1x 59 49 8 20 17 P 235 2x 68 49 8 20 17 P 235 4x 94 49 8 20 17 P 235 8x 147 49 8 20 17 P 235 9x 199 49 8 20 17 P 2x5 Piezo Actuator PZ245E Version 1 0 1 51 10 Technical Data P I Not shown When the P 2x5 has been ordered with the option PT1000 temperature sensor and protective air c
36. on Oscillations can cause irreparable damage to the piezo actuator Oscillations are indicated by a humming and can result from the following causes Achange in the load and or dynamics requires the servo control parameters to be adjusted The piezo actuator is operated near its resonant frequency If you notice oscillations gt In closed loop operation immediately switch off the servo mode gt In open loop operation immediately stop the piezo actuator INFORMATION The outwards motion of the pusher corresponds to the positive direction of motion and is proportional to the applied operating voltage 6 2 Determining the Operating Parameters 6 2 1 Overview of Limiting Factors Limiting factors for the operation of the piezo actuator Resonant frequency The resonant frequency must not exceed one third of the resonant frequency of the loaded piezo actuator See Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 36 Maximum tensile compressive stress capacity p 47 The mass of the load to be moved and the operating frequency of the piezo actuator must be selected so that the dynamic forces that occur during operation do not exceed the maximum tensile compressive stress capacity of the piezo actuator See Calculating the Forces that Occur During Dynamic Operation p 37 34 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation
37. onnecting the Protective Air NOTICE Destruction of the piezo actuator by cooling too quickly If the cooling is too fast the resulting thermomechanical load can destroy the piezo actuator gt Only connect the protective air to the piezo actuator when the piezo actuator has cooled down to room temperature INFORMATION The piezo actuator can be cooled with protective air when the P 2x5 has been ordered with the option PT1000 temperature sensor and protective air connection for PICA high voltage piezo actuators P 177 50 p 15 28 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 9 P 2x5 Protective air connection with P 177 50 option 1 Inlet for protective air M3 PK 2 plug nipple 2 Outlet for protective air M3 PK 2 plug nipple Prerequisite v You have read and understood the General Notes on Installation p 21 v The supplied shorting plug is attached to the voltage connection of the P 2x5 see Unpacking p 19 or the P 2x5 is connected to the switched off electronics from PI Tools and accessories Hoses for feeding and discharging the protective air suitable for M3 PK 2 plug nipple Suitable protective air Compressed air according to ISO 8573 1 quality class 4 that is passed through a dryer and a microfilter with 99 9999 efficiency The maximum air pressure in the piezo actuator must not be more than 0 5 bar 7 3 psi
38. onnection for PICA HVPZT P 177 50 p 15 M3 PK 2 plug nipples are present for the protective air connection Position of the protective air inlet In the base of the piezo actuator across from the cable exit 20 mm above the lower edge of the base Position of the protective air outlet In the case tube of the piezo actuator above the cable exit precise position upon request gt Contact our customer service department p 45 for details on the position of the plug nipples 10 2 2 P 2x5 with the P 706 00 Option Water Resistant Case The dimensions of the P 2x5 with water resistant case are supplied upon request gt Contact our customer service department p 45 10 2 3 Ball Tip P 176 B25 Figure 12 P 176 B25 52 Version 1 0 1 PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 4 Flat Tips P 176 F25 and P 176 F35 Figure 13 P 176 F25 1 Plane hardened and polished 20 6 10 Figure 14 P 176 F35 1 Plane hardened and polished P 2x5 Piezo Actuator PZ245E Version 1 0 1 53 10 Technical Data P I 10 2 5 Vacuum Feedthrough for High Voltage Piezo Actuators LEMO SJG 0B 701 CJA 1173 part of the P 203 VA option for high voltage piezo actuators 1 PZTw __SW10 5 N GND w GND m Outer body O ring 12x1 5 LEMO device socket J coded EGJ 0B 701 CJA flange side atmosphere 54 Version 1 0 1 PZ245E
39. or LEMO connectors 10 m P 899 15 Extension cable for temperature sensor LEMO connectors 15 m Connector m FFA 0S 303 CLAC32 connector f PCA 0S 303 CLLC32 gt To order contact our customer service department p 45 3 6 Technical Features 3 6 1 PICA Piezo Actuators P 2x5 are preloaded high load piezo actuators for static and dynamic applications They provide a sub millisecond response and sub nanometer resolution The piezo actuators have a friction free preloaded PICA Power piezo ceramic that is integrated in a stainless steel case The high load capacity and internal preload makes them ideal for applications such as precision manufacturing and active vibration damping 3 6 2 Strain Gauge Sensors SGS Strain gauge sensors derive the position information from their expansion A strain gauge sensor consists of an electrically conductive film the resistance of which changes with the strain Strain gauge sensors are attached to the actuator and measure its displacement The sensors are equipped with a full bridge circuit that is insensitive to thermal drift and assure optimum position stability in the nanometer range P 2x5 Piezo Actuator PZ245E Version 1 0 1 17 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking NOTICE Destruction of the piezo actuator by discharging too quickly If the P 2x5 is not connected to the electronics the lines on the voltage connection must be short circuited wi
40. or easier handling tricks tips etc Symbol Label 1 Zi gt p 5 RS 232 2 Version 1 0 1 Meaning Action consisting of several steps whose seguential order must be observed Action consisting of one or several steps whose seguential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual PZ245E P 2x5 Piezo Actuator PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website Prom 2 Wi 10 to 1000 V OEM Version 1 4 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 45 The current versions of the manuals are found on our website For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD P 2x5 Piezo Actuator PZ245E Version 1 0 1 1 About this Document P I Download freely accessible manuals 1 a 3 Open the website http www pi portal ws Click Downloads Click t
41. th a discharge resistor of 10 kQ in order to prevent the piezo actuator from charging when temperature changes and compressive stresses occur Unsuitable short circuiting leads to an abrupt contraction of the piezo actuator due to excessively fast discharging Abrupt contraction can destroy the piezo actuator gt Only remove the supplied shorting plug from the voltage connection of the piezo actuator when this is necessary for installation or operation gt Keep the shorting plug near the piezo actuator after removing it gt Only use the supplied shorting plug to short circuit the lines at the voltage connection of the piezo actuator Figure 4 Voltage connection of the P 2x5 with attached shorting plug 1 Voltage connection of the P 2x5 2 P 202 01 shorting plug in the scope of delivery P 2x5 Piezo Actuator PZ245E Version 1 0 1 19 4 Unpacking P I INFORMATION When handling the vacuum version of the piezo actuator appropriate cleanliness must be ensured At PI all parts are cleaned before assembly During assembly and calibration powder free gloves are worn Afterwards the piezo actuator is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the piezo actuator with powder free gloves gt f necessary wipe the piezo actuator clean after unpacking 1 Unpack the P 2x5 with care 2 Compare the contents against the items covered by the contract and against the packing
42. the piezo actuator after removing it gt Only use the supplied shorting plug to short circuit the lines at the voltage connection of the piezo actuator NOTICE Destruction of the piezo actuator by loads that are too high Loads that are too high can destroy the P 2x5 gt Do not exceed the maximum tensile compressive stress capacity according to the specifications p 47 P 2x5 Piezo Actuator PZ245E Version 1 0 1 21 5 Installation P I NOTICE Destruction of the piezo actuator by mechanical overload Torques bending forces shearing forces and lateral forces can destroy the piezo actuator gt Avoid bending forces and lateral forces on the pusher of the P 2x5 gt Do not exceed the maximum torque and the maximum shearing load on the pusher according to the specifications p 47 gt Avoid torques on the base when the pusher is tightly clamped gt Make sure that the center of load of the moving system is on the motion axis of the piezo actuator gt Avoid an uneven load distribution by using suitable structures or guide elements e g ball tips or flexure guides gt Observe the information on parallelism in the Dimensions section p 47 gt Do not screw the piezo actuator tight on both ends Piezo actuators may only be loaded axially The following figures are to help you avoid mounting errors B C Figure 5 Not tightly screwed at both ends and no angles y N A In
43. ting the Forces that Occur During Dynamic Operation gt Calculate the dynamic forces that act on the piezo actuator during sinusoidal operation with the frequency f with the following formula AL tAn Moy f Fayn Dynamic force N F dyn Met Effective mass Mer approx 1 3 of the mass of the piezo actuator additional mass M kg see also Calculating the Effective Mass p 35 AL Displacement in the application peak to peak m f Frequency Hz Example The dynamic forces at 1000 Hz 2 um displacement peak to peak and 1 kg effective mass are approximately 40 N 6 2 5 Calculating the Power Requirement for Sinusoidal Operation gt Calculate the average current requirement for sinusoidal operation with the following formula la f C Upp gt Calculate the peak current requirement for sinusoidal operation with the following formula Imax f m C Up Cales AA Required average current of the It is essential for the power amplifier source sink A supply to supply enough current hii peak current of the amplifier source sink A Operating frequency Hz Details on the operating frequency see Overview of Limiting Factors p 34 P 2x5 Piezo Actuator PZ245E Version 1 0 1 37 6 Start Up and Operation P L EE pS A Capacitance of the piezo actuator F See Data Table p 47 for the As V small signal capacitance of the piezo actuator For large signal conditions
44. tors cccccccceecccceeceeeeeeeceeeeecaueeesesessaeeessaeeeseeeeees 17 3 6 2 Strain Gauge Sensors SGS ccceeccccccceceeeeeseeeeeeeeeeeeeeeseeeeeeeeeseaas 17 4 Unpacking 19 5 Installation 21 5 1 General Notes on Installation ccccccccccccseecceceeseceeceeeceeseeeeeesseeeeeesaeeeessaeees 21 5 2 Connecting the P 2x5 to the Protective Earth Conductor ww wwwmemmmesa 25 5 3 MONU IO MX AA ai 26 5 4 Optional Fastening a Tip 4x ciccicceisctesectcnaaciesnedssttensdencietiaecd aaneheaee besser eeatonceenees 27 5 5 AMING Ne Load ENR ee enn ene a ee ne eee eee 27 5 6 Optional Connecting the Protective Air cccccecccssseseeeeeeeeeeeeeeeeeeeeeeessaaeeeees 28 6 Start Up and Operation 31 6 1 General Notes on Start Up and Operation ccccccssseeeeeeeeeeeeeeeeeseeeeeeeeeaaeees 31 6 2 Determining the Operating Parameters cccccccsseeeceeesaeeeeeeeeeseeeeeeeeseeeeeeeeeeas 34 6 2 1 Overview Of Limiting Factors ccccceeseecceeeeeeeeeeeeeesaeeeesaaeeeeenaaeees 34 10 11 12 6 2 2 Calculating the Effective MASS ccccccssessseseeeeeeeeeeeseeseeeeeeeeeseaas 6 2 3 Calculating the Maximum Operating Frequency of the Loaded PICZO PACUUAUON ai aaa aa 6 2 4 Calculating the Forces that Occur During Dynamic Operation 6 2 5 Calculating the Power Reguirement for Sinusoidal Operation 6 3 Operating the P 2X5 wwwwmmsmamwmanaaniwu

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