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User Manual MP42E - Physik Instrumente

1. C 863 Mercury Parameter Settings Stage Type Parameter M 126 CG1 M 126 DG1 M 126 PDx 150 to 350 150to350 50to 300 1 0 to 60 0 to 60 0 to 70 2 0 to 1 200 0 to 1 200 0 to 1 200 i Limit SPA DL ACG 2 500 to 2 500 to 2 500 to 3 000 000 3 000 000 1 250 000 Velocity VEL SV 120000 120000 50000 1 to 200 000 1 to 200 000 1 to 70 000 GCS and MCC native commands respectively for setting corresponding parameters PI GCS software usually loads paramaters automatically The values given can be used directly with native commands For GCS some values need to be converted from encoder counts to mm See GCS and Native Commands manuals for further details www pi ws M 126 Series MP 42E Release 2 7 0 Page 29 Piezo Nano Positioning PI Appendix Current Controllers 6 2 2 Parameter Settings for Other DC Motor Controllers The C 843 is an add on card to be installed in a PCI slot of a PC Two and 4 axis versions are available and more than one card can be installed in the same PC PWM and analog stages can be run off the same card without using a converter box See the C 843 user and software manuals for detailed information on this controller and its software interfaces The currently available C 848 and C 880 controllers use C 842 x3 cards with the same processor as is on the C 843 so the same settings apply for them For models manufactured before 2007 see Sectio
2. 3 000 000 3 000 000 1 250 000 1 to 200 000 1 to 200 000 1 to 70 000 www pi ws M 126 Series MP 42E Release 2 7 0 Page 35
3. PWM mode is enabled by the OUTP SIGN PWM command while analog mode is enabled by the OUTP SIGN DAC command All axes connected to a given C 844 must be in the same mode Mixing PWM and non PWM stages on the same controller is possible using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode C 844 Parameter Settings Stage Type M 126 CG1 M 126 DG1 M 126 PDx Parameter p i d terms PID 220 12 600 PID 250 12 600 PID 180 40 300 p 150t0 300 p 150to300 p 50 to 300 i O to 60 i O to 60 i 0 to 70 d 0t01 200 d 0t01 200 d 0to 1 200 0 to 2 000 0 to 2 000 0 to 500 ACC 1200000 ACC 1200000 ACC 750000 2 500 to 2 500 to 2 500 to 3 000 000 3 000 000 1 250 000 MVEL 120000 MVEL 120000 1 to 200 000 1to 200 000 1 to 70 000 WWW pl ws M 126 Series MP 42E Release 2 7 0 Page 34 Piezo Nano Positioning PI Appendix Il Older Controllers 7 2 4 Parameter Settings for C 862 Mercury C 862s are daisy chain networkable with each other with the new C 863 DC motor controller and the C 663 stepper motor controller meaning a multi axis system can be controlled from a single PC RS 232 interface C 862 Mercury Parameter Settings Stage Type M 126 CG1 M 126 DG1 M 126 PDx Parameter Goto 150 to 350 150 to 350 50 to 300 Oto 0 to 60 0 to 60 0 to 70 0 to 1 200 0 to 1 200 0 to 1 200 DL2000 Acceleration ACC 1200000 ACC 1200000 ACC 750000 ell est PA
4. given input which is sometimes referred to as practical or operational resolution Design resolution and practical resolution have to be distinguished Design resolutions of 1 nm or better can be achieved with many motor gearbox and leadscrew combinations In practical applications however stiction friction windup and elastic deformation limit resolution to fractions of a micron Repeatable nanometer or sub nanometer resolution can be provided by solid state actuators PZTs and PZT flexure stages see the PZT Flexure NanoPositioners and PZT Actuators sections of the PI Catalog for details Bl Max Normal Load Capacity Centered vertical load horizontal installation B2 Max Push Pull Force Active and passive force limit in operating direction at center of stage Some stages may be able to generate higher forces at the cost of reduced lifetime www pi wSs M 126 Series MP 42E Release 2 7 0 Page 16 PI M 126 Technical Data Piezo Nano Positioning 4 1 Dimensions Dimensions in mm decimal places separated by commas in drawings 4 1 1 M 126 MO 1 Ww M16 7x0 5 3 Fig 9 M 126 M01 www pi ws M 126 Series MP 42E Release 2 7 0 Page 17 PI M 126 Technical Data Piezo Nano Positioning 4 1 2 M 126 0CG 1 2x M4V 11 4x M475 Fig 10 M 126 CG1 NOTE Motor may be rotated about its axis as desired changing cable connector orientation Fig 6 Drawing and current production may d
5. gt 9 MOT linput motorconnection gt 8 mc notcomected gt lnotconnected ___ ______ sand Limit signal for positive side active high TTL Limit signal for negative side active high TTL ground logic 333 A output _ encoder signal A dash TTL Polarity determines direction of motion if MOT gt MOT motion is in the positive direction www pi ws M 126 Series MP 42E Release 2 7 0 Page 24 Piezo Nano Positioning PI Connector Pin Assignments 5 2 M 126 PD1 M 126 PD2 PWM DC Motor 5 2 1 Controller Connector Connector type sub D15 m see Fig 16 h Brake ON 0 to 5 12 V and motor disable signal active low input 9 10 PGND power ground MAGN signal magnitude speed input 11 SIGN signal sign direction TTL input 5 V input for encoder and logic 12 NLIMIT Limit signal for negative side active high TTL output PLIMIT Limit signal for positive side active high TTL output 13 REFS reference signal TTL output GND Logic 14 A encoder TTL output A encoder TTL output 15 B encoder TTL output B encoder TTL output 5 2 2 PWM Amplifier Supply Power Type 3 pin round socket Switchcraft Tini Q G note that pins are numbered counter clockwise starting from latch 1 GND power Fig 17 Power connector viewed 2 Voltage input 24 VS V I from front with latch 3 n C at right The newer 20683 power supply comes wi
6. software the software must take care of setting the parameters The controller CD includes DLLs and LabVIEW drivers to facilitate this task See the corresponding software manuals for details 6 1 Stepper Motor Controller The stepper motor version can be controlled with the C 663 stepper motor controller Fig 18 Single axis C 663 Mercury M Step stepper motor controllers are networkable with each other and with C 862 and C 863 DC motor controllers PI stepper motors do not have position sensors and operate in open loop mode The limit or reference switches on the stage can be used to determine absolute position This is usually done at startup or if confidence in the count is lost C 663 Mercury Step Parameter Settings M 126 2S1 Max Velocity 6 mm s 4800 full steps sec 76800 micro steps with C 663 16 x interpolation Phase drive current 300 mA recommended absolute limit 800 mA www pi ws M 126 Series MP 42E Release 2 7 0 Page 27 Piezo Nano Positioning PI Appendix Current Controllers 6 2 DC Motor Controllers The following sections give ranges of numeric parameter settings appropriate for using DC motor versions of M 126 stages with different PI controllers The values are in encoder counts and should be considered approximate It may be necessary to fine tune the system for optimum operation DIGMAL CONTROLLER nt tt tt misil y Tel e Fig 19 Currently available D
7. 3 1 PWM Amplifiers amp Brake Signal ccccconccccoccnncconnnccnacononos 12 32 EIT SWIC NOS Leed 12 33 Reference Switch ccccccccececcccccccecececececucacavavacauaesesecscsees 13 34 Incremental Position SENSOL ccccceceececececcecececeececececaeneces 13 5 OPEN 13 M 126 Technical Data 15 4At DIMENSION Susini eee 17 211 MEZO MOL ean 17 ANZ M126 GB a A N 18 213 VIE PO Ve 19 414 M 126 PD1 and M 126 PD2 000000 20 215 ME SV 21 42 Accessory Z Axis Mounting Bracket ccccccccesssseeseeeeseeeens 22 43 DISPOS ld 23 Connector Pin Assignments 24 51 M 126 CG1 M 126 DG1 DC Motor rrnnrnnrnvrnvnnennrnennennenennenne 24 www pi ws M 126 Series MP 42E Release 2 7 0 Page 1 Contents 52 M 126 PD1 M 126 PD2 PWM DC Motor rararnerenarennnrrnnnenne 25 521 Controller Connedior sosa dl 25 522 PWM Amplifier Supply POWer oooooncccnnccccccccooncconnccnnccnonononoos 25 53 M 126 251 Stepper Motor rrrnnrannnnrnrnnnnennnnnnnrnnnnnnrrnnnnnnnnen 26 6 Appendix I Current Controllers 21 6 1 Stepper Motor Controller oooccccccoccnncococcnncocononnconononnnos 27 62 DE MolorConrolersuuvv season 28 621 Parameter Settings for C 863 Mercury DC Motor Controllers29 622 Parameter Settings for Other DC Motor Controllers 30 7 Appendix Il Older Controllers 31 7 1 Discontinued Stepper Motor Controllers oo o 31 72 Discontinued DC Motor
8. C motor controllers from PI C 848 C 880 benchtop rackmount from top C 843 PCI card left and the C 863 Mercury right M 126 DC motor versions can be used with C 843 C 848 C 880 and C 863 Mercury M controllers Drive type DC Motor Controller C 880 C 848 C 843 C 863 Mercury Axes per up to 19 2or4 2or4 1 controller Host PC RS 232 RS 232 Internal USB interface RS 422 or RS 422 or PCI bus RS 232 bus or IEEE GPIB IEEE GPIB daisy chain Multiple yes on yes on yes in yes all on same controllers on separate separate separate port same host PC ports ports slots Custom configurations possible with networked controllers controlling hundreds of axes www pi ws M 126 Series MP 42E Release 2 7 0 Page 28 Appendix l Current Controllers Piezo Nano Positioning PI 6 2 1 Parameter Settings for C 863 Mercury DC Miotor Controllers The C 863 Mercury controller is a compact palm size single axis controller The C 863 and other Mercury Class controllers like its software and hardware compatible predecessor the C 862 and the C 663 Stepper Motor Controller are daisy chain networkable meaning that a multi axis system can be controlled from a single PC RS 232 or USB interface Both Windows user interface programs that come with the Mercury controller allow choice of M 126 stages as a start option for operation Mercury Ms always have PWM mode enabled without requiring any extra command
9. Controllers o oooccnccconnnncononnnnnss 32 721 Parameter Settings for C 842 PC ISA Bus Card 00 33 722 Parameter Settings for Older C 848s C 8805 rrrrrrrnnnnrrrrr 33 723 Parameter Settings for C 844 rrrrrrnnnnnnnnrrnnrrrnnnnnnnrrrnnnrrnnnnnnee 34 724 Parameter Settings for C 862 Mercury cccccccceeessseeeeeeees 35 www pi ws M 126 Series MP 42E Release 2 7 0 Page 2 Piezo Nano Positioning PI Introduction 1 Introduction M 126 xxx are leadscrew driven translation stages with travel ranges of 20 mm and 25 mm Precision crossed roller bearings guarantee straightness of travel of better than 2 um 1 1 Safety Precautions Read this before operating the linear stages WARNING Crush Hazard Never put your finger where the moving platform the motor or any connected object could possibly trap it The moving platform and motor can accelerate rapidly and generate high forces which can cause damage or injury WARNING Avoid Damage lnjury When mounting the stage keep in mind that the motor will move with the platform and possibly might trap your finger or any equipment Make sure that there is sufficient clearance for the motor when it and the platform move V CAUTION Avoid Damage Be aware that the stage could start an unexpected move when first connected to the motor controller Be aware that failure of the motor controller may crash the stage against a har
10. Motor resolution Max load 200 Max push pull force 50 50 WWwWw pl ws M 126 CG1 X 25 Rotary encoder 2048 0 0035 0 1 0 2 2 2 5 50 0 7 Leadscrew 0 5 69 12 1 200 40 40 M 126 DG1 X 25 Rotary encoder 2000 0 0085 0 1 0 1 1 2 5 50 Leadscrew 0 5 28 12 01 29 6 1 200 50 50 M 126 PD1 X 25 Rotary encoder 4000 0 125 0 25 0 1 1 2 5 50 113 Leadscrew 0 5 200 50 50 M 126 Series MP 42E Release 2 7 0 Piezo Nano Positioning M 126 PD2 M 126 2S1 X X 20 25 Rotary encoder 4000 0 25 0 08 0 25 0 1 0 25 0 1 1 1 2 5 25 50 50 2 2 50 6 Recirculating ballscrew 1 200 50 50 Leadscrew 0 5 6400 200 50 50 PI Units Notes mm Cts rev um A3 um A4 um um um urad um mm s um mm steps rev N B1 N B2 Page 15 M 126 Technical Data Models Max lateral force Drive properties Motor type Operating voltage Electrical power Limit and reference switches Miscellaneous Operating temperature range Material Mass Recommended controller Max recommended velocity M 126 M01 100 20 to 65 Aluminum steel 0 6 M 126 CG1 100 DC Motor gearhead 0 to 12 2 Hall effect 20 to 65 Aluminum steel 0 8 C 863 one axis C 843 PCI board for up to 4 axes M 126 DG1 100 DC Motor gearhead 0 to 12 3 H
11. Piezo Nano Positioning PI MP 42E User Manual M 126 Series Linear Positioning Stages Release 2 7 0 Date 2008 04 24 This document describes the following products E M 126 M01 Linear Positioning Stage manual operation E M 126 CG1 Linear Positioning Stages DC Motor gearhead compact design E M 126 DG1 Linear Positioning Stages DC Motor gearhead E M 126 PD1 M 126 PD2 Linear Positioning Stages DC Motor direct drive E M 126 2S1 Linear Positioning Stages stepper motor drive Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der R merstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Linear Positioning Stages Model Numbers M 126 xxx Product Options all complies with the following European directives 2006 95 EG Low voltage directive 2004 108 EC EMC Directive 98 37 EC Machinery Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 April 14 2008 Karlsruhe German
12. all effect 20 to 65 Aluminum steel 0 9 C 863 one axis C 843 PCI board for up to 4 axes M 126 PD1 100 ActiveDrive DC Motor 24 PWM 30 Hall effect 20 to 65 Aluminum steel 0 9 C 863 one axis C 843 PCI board for up to 4 axes PI Piezo Nano Positioning M 126 PD2 M 126 251 Units Notes 100 100 N ActiveDrive DC Motor 2 phase stepper motor 24 PWM 24 V 30 W Hall effect Hall effect 20 to 65 20 to 65 le Aluminum steel Aluminum steel 0 9 1 kg C 863 one axis C 663 single C 843 PCI board for up axis to 4 axes 2 phase stepper motor 24 V chopper voltage max 0 8 A phase 400 full steps rev motor resolution given for C 663 stepper motor controller with 16 x interpolation see Section 7 1 for older controllers Specifications assured for 20 C 3 C NOTES A3 Design Resolution The theoretical minimum movement that can be made based on the selection of the mechanical drive components drive screw pitch gear ratio angular motor resolution etc Design resolution is usually higher than the practical position resolution minimum incremental motion The resolution of Piezo actuators and PZT flexure is not limited by stiction and friction it depends on amplifier sensor and servo noise The practical resolution of most PI PZT NanoPositioning systems is in the sub nanometer range A4 Minimum Incremental Motion The minimum motion that can be repeatedly executed for a
13. below and described in detail in the sections that follow M 126 M01 M 126 CG1 M 126 DG1 M 126 PD1 M 126 2S1 M 126 PD2 Drive type Manual DC compact DC 30 W stepper micrometer 2W PWM drive motor 2 phase e Position No Yes Yes sensor No Direction Yes but not Yes but not Yes but not Yes but not sensing in older in older in older in older reference M 126 CG M 126 DG M 126 PD M 126 2S switch 1 4 1 M 126 MO 1 Manual drive stage equipped with a high precision leadscrew for thumbscrew operation features excellent resolution and repeatability Fig 1 M 126 M01 www pi ws M 126 Series MP 42E Release 2 7 0 Page 5 Piezo Nano Positioning PI Introduction 1 4 2 M 126 CG 1 Utilizes a compact closed loop DC motor with shaft mounted high resolution position encoder and a precision gearhead providing 0 1 um incremental motion Fig 2 M 126 CG1 1 4 3 M 126 DG 1 Equipped with a larger motor than M 126 CG1 and provides higher velocity at the same incremental motion of 0 1 um Fig 3 M 126 DG1 1 4 4 M 126 PD1 The M 126 PD1 and M 126 PD2 versions have integrated PWM amplifiers and require connection of a separate power supply an E 500 PS or 20683 The newer more compact 20683 power supply comes with the K050B0002 adapter required to plug it into the stage xs K050B0002 adapter shown between 20683 PS barrel connector and DC IN socket on M 126 PDx stage WWW pl
14. d operation of the stages The verification of the technical specifications by the manufacturer does not imply the validation of complete applications In fact the operator is responsible for the process validation and the appropriate releases The M 126 Series Linear Positioning Stages meet the specifications as defined by DIN EN 61010 for safe operation under normal ambient conditions See the specifications table for details 1 3 Features Models are available with the following features m 20or25 mm Travel Ranges m Crossed Roller Bearings m DC Servo or Stepper Motor Drive lt 0 1 um Resolution m ActiveDrive m Manual Knob for Ease of Operation all models m Choice of Motor Controllers www pi ws M 126 Series MP 42E Release 2 7 0 Page 4 Piezo Nano Positioning PI Introduction m XY and XYZ Combinations m Non contacting Hall effect limit and reference switches m Reference switch with direction sensing 1 4 Model Survey The platform portion of all models is the same with travel range of 25 mm except for M 126 PD2 with 20 mm Non contacting Hall effect limit switches are integrated in motorized versions to help prevent overtravel All current models also have a direction sensing reference switch All stages can be cross stacked and or combined with the M 125 90 Z axis mounting bracket to provide multi axis motion The differences between the various models lie in the drive section They are shown in the table
15. d stop High speed crashes can cause irreparable damage Do not disable limit switches in software Test limit switch operation at low speeds Be aware that overlength mounting screws will interfere with motion and may cause permanent damage Never connect a stepper motor to a DC motor controller or a DC motor to a stepper motor controller Irreparable damage could result WWW pl ws M 126 Series MP 42E Release 2 7 0 Page 3 Piezo Nano Positioning PI Introduction 1 2 Prescribed Use Correct operation of the M 126 Series Linear Positioning Stages is only possible in combination with a suitable controller driver ordered separately and software The controlling device must be able to read out and process the signals from reference and limit switches and the incremental position encoder to ensure proper performance of the servo control system Based on their design and realization these stages are intended for single axis positioning adjusting and shifting of loads at various velocities M 126 Series Linear Positioning Stages can be mounted horizontically or vertically To achieve the specified guiding accuracy the positioners have to be mounted on a flat surface to avoid torsion of the basic profile The positioners may only be used for applications suitably in accordance with the device specifications Respect the safety instructions given in this User Manual The operator is responsible for the correct installation an
16. e your software turns the brake OFF before operation even though standard M 126 stages are not equipped with brakes If the signal on the brake line from the motor controller pin 1 is in the Brake ON state 0 V the PWM amplifier output to the motor is disabled and no motion is possible 3 2 Limit Switches All M 126 motorized stages are equipped with non contacting Hall effect limit switches with TTL drivers On stepper motor versions limit switch outputs are active low on other versions active high Each limit switch controls an overtravel signal on its own dedicated line to the controller It is the controller that is then responsible for stopping motion If it does not do so in time the stage will run into the hard stop Should this happen it may be necessary to push the stage manually out of the end zone WWW pl ws M 126 Series MP 42E Release 2 7 0 Page 12 Piezo Nano Positioning PI Operational Considerations CAUTION High speed crashes can cause irreparable damage Do not disable limit switches in software Test limit switch operation at low speeds 3 3 Reference Switch Current motorized versions with model numbers ending in 1 or 2 are equipped with direction sensing Hall effect reference switches These switches provide a TTL signal indicating whether the stage is to the positive or negative side of a fixed point The rising or falling edge of this signal can be used as to indicate a known re
17. ference position always approach the reference point from the same side to achieve repeatability See the controller User Manual and or associated software manuals for the commands which make use of the reference signal 3 4 Incremental Position Sensor M 126 stages are equipped with incremental position sensors called encoders These sensors provide highly accurate signals whenever the position changes by a known small amount By counting the encoder signals called counts the controller can keep track of the relative motion of the stage To discover the absolute position it is necessary to drive the stage to a limit or reference switch Most controllers have commands to automate this procedure which is sometimes called referencing NOTE Motion direction If the stage is commanded in the positive direction the platform and motor move away from the motor end of the unit see Fig 8 p 10 All M 126 stages have leadscrews with left handed threads 3 5 Operation WARNING CRUSH HAZARD Never put your finger where the moving platform the motor or any connected object could possibly trap it The moving platform can accelerate rapidly and generate high forces which can cause damage or injury To operate a motorized stage proceed as follows www pi ws M 126 Series MP 42E Release 2 7 0 Page 13 Operational Considerations www pi ws Piezo Nano Positioning PI Install connect the controller following the inst
18. he contract and against the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage such as loose contacts or hairline cracks please contact Pl immediately Save all packing materials in case the product need be shipped again www pi ws M 126 Series MP 42E Release 2 7 0 Page 8 Installation Piezo Nano Positioning PI 2 Installation 2 1 Mechanical Mounting WARNING CRUSH HAZARD When mounting the stage keep in mind that the motor will move with the platform and possibly might trap your finger or any equipment Make sure that there is sufficient clearance for the motor when it and the platform move 2 1 1 Cable Connector Position Before mounting one of the motorized versions decide whether or not the cable connector is in a suitable position Because the platform and motor normally move together proper clearance and cable slack will be required To change connector orientation loosen the 2 set screws which clamp the motor housing with an Allen wrench shown and rotate the housing and connector to the desired position arrows Then retighten the set screws NOTE Motor may be rotated about its axis as desired to change cable connector orientation Fig 6 Fig 6 Changing connector orientation 2 1 2 Sled Attachment The stage is usually mounted with the sled bottom side of the stage see Fig 8 firmly bolted to a base plate or another stage Note tha
19. iffer www pi ws M 126 Series MP 42E Release 2 7 0 Page 18 Piezo Nano Positioning PI M 126 Technical Data 4 1 3 M 126 D G 1 20 0 A a a A i 3 I un I Eg J EE mm 08 24 10 2 AT al A Es 945 Fig 11 M 126 DG1 NOTE Motor may be rotated about its axis as desired changing cable connector orientation Fig 6 Drawing and current production may differ www pi ws M 126 Series MP 42E Release 2 7 0 Page 19 PI M 126 Technical Data Piezo Nano Positioning 4 1 4 M 126 PD1 and M 126 PD2 Fig 12 M 126 PDx NOTE Motor may be rotated about its axis as desired changing cable connector orientation Fig 6 Drawing and current production may differ www pi ws M 126 Series MP 42E Release 2 7 0 Page 20 PI M 126 Technical Data Piezo Nano Positioning 4 1 5 M 126 2571 AT Fig 13 M 126 2S1 NOTE Motor may be rotated about its axis as desired changing cable connector orientation Fig 6 Drawing and current production may differ www pi ws M 126 Series MP 42E Release 2 7 0 Page 21 PI M 126 Technical Data Piezo Nano Positioning 4 2 Adaptor Plate Z Axis Mounting Bracket The M 126 80 adapter plate is available for mounting M 126 stages on standard honeycomb tables Fig 14 M 126 80 base plate to honeycomb adapter www pi ws M 126 Series MP 42E Release 2 7 0 Page 22 PI M 126 Technica
20. l Data Piezo Nano Positioning The M 125 90 Z axis Is for mounting bracket for vertical mount of two M 126 stages Material aluminum mass 0 680 kg Fig 15 M 125 90 angle bracket 4 3 Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente PI GmbH Co KG Auf der Romerstr 1 76228 Karlsruhe Germany www pi ws M 126 Series MP 42E Release 2 7 0 Page 23 Connector Pin Assignments Piezo Nano Positioning E I 5 Connector Pin Assignments All models are equipped with one sub D15 male connector for connection to the motor controller The stepper motor and DC motor pinouts are however not compatible CAUTION Never connect a stepper motor to a DC motor controller or a DC motor to a stepper motor controller Irreparable damage could result Fig 16 Sub D 15 pin male connector 5 1 M 126 CG1 M 126 DG1 DC Motor Connector type sub D15 m see Fig 16 4 nc lnotconnected
21. les Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The motion controller and the software tools which might be delivered with M 126 Series Linear Positioning Stages are described in their own manuals All documents are available as PDF files For updated releases visit download section of the PI Website www pi ws contact your Physik Instrumente Sales Engineer or write info pi ws Contents Introduction 3 Tal oale Precnbnskass eeedeKe ter 3 12 Prescribed US ococococococococococccconononononnnnnononononnnnnnnnnnnnnnnnnnnnannss 4 12 A 4 14 Mode SUS Vascos SSG 5 MAA A E E N A 5 142 Fe BP ok Glide tc iaa 6 145 MI PE 6 24 A A a aR 6 VPN 7 TAO MN a N 8 ko UNPa kN A o EEES E E 8 Installation 9 2 1 Mechanical MOUNT ae 9 2 1 1 Cable Connector POSItiION ccccccccececcececcececcecececcecccececeeceees 9 212 Sled Ataca 9 22 Interconnecting the SySteM occccconncnnccccnccncccnccnncononennconononnnos 11 2 POP ase ce tes eer RN 11 Operational Considerations 12
22. n 7 C 843 C 848 amp C 880 Parameter Settings Stage Type Parameter M 126 CG1 M 126 DG1 M 126 PDx p term 5 0 i term 4 29 d term 80 i Limit 000 vff term O Acceleration 2831 16 23 1 36 8000 max Velocity max 254803 97 177852 120000 www pi ws M 126 Series MP 42E Release 2 7 0 Page 30 Piezo Nano Positioning PI Appendix Il Older Controllers 7 Appendix li Older Controllers This section covers controllers which are no longer available but which may still be in use in the field 7 1 Discontinued Stepper Motor Controllers a gt s Sa Se EEE a T SPIES pms __ a Fig 20 Discontinued stepper motor controllers 3 axis Apollo foreground and 4 axis C 600 background both networkable but not with newer controllers When controlled with the C 600 or C 630 controllers the microstepping behavior is different from that of the current C 663 leading to the following divergent specifications Models M 126 251 Units Notes p 16 Design resolution 0 05 um A3 Min incremental motion 0 1 um A4 Unidirectional repeatability 0 1 um Bidirectional repeatability 1 um Max velocity 6 mm sec Motor resolution 20000 steps rev Linear transmission ratio 40 steps um When controlled with C 600 or C 630 www pi wSs M 126 Series MP 42E Release 2 7 0 Page 31 Piezo Nano Positioning PI Appendix Il Older Controllers PI stepper moto
23. o use custom software If the controller is a PC ISA or PCI card there will also be hardware drivers to install See the controller User and Software manuals for installation details CAUTION Avoid Damage Check Limit Switch Operation The limit switches do not stop the motor directly Instead each limit switch controls an overtravel signal on its own dedicated line to the controller The controller is then responsible for stopping motion If it does not do so in time the stage will run into the hard stop At high speeds this can permanently damage the stage www pi ws M 126 Series MP 42E Release 2 7 0 Page 11 Operational Considerations Piezo Nano Positioning E I 3 Operational Considerations 3 1 PWM Amplifiers Brake Signal The M 126 PD1 and M 126 PD2 stages with the ActiveDrive direct DC motor drive have the platform connected directly to the 30 watt DC motor by a flexible coupling For maximum dynamic performance the DC servo motors are driven by high efficiency PWM power amplifiers integrated into the stages An external plug in power supply order number M 500 PS is provided to supply the built in amplifiers directly This architecture allows high torque and high velocities while loading the motor controller with control signals only The actual power is provided by the external supply All current PI controllers can drive either analog or PWM stages by operating in the corresponding mode NOTE Be sur
24. platform use the threaded mounting holes and M4 screws www pi ws M 126 Series MP 42E Release 2 7 0 Page 10 Installation Piezo Nano Positioning PI Interconnecting the System Motorized versions of the M 126 series can be internetworked with other PI micropositioning stages in many different combinations including m Mercury Class devices can be daisy chained off a single RS 232 or USB port meaning that even stepper and DC motors PWM and analog can be networked together with C 663 and C 863 controllers m PWM and DC motor devices can be mixed on the current models of the multi axis controllers with C 843 C 848 C 880 With the PWM stages be sure to connect the separate power supply to the stage using the KO50B0002 barrel to Switchcraft adapter if necessary 2 3 Host PC Most Pl controllers are in turn controlled by a host PC provided by the user The only exceptions are programmable controllers with stand alone mode C 862 Mercury controllers with a joystick port or manual control pad The controller is either installed directly in the PC e g C 843 or connected to it over a communications interface See the controller User Manual for details PI generally provides software and or drivers that run on the host PC to control the system Typically there will be a control program with a graphic user interface for testing and simple operation and in addition DLL COM and or LabView drivers for users who wish t
25. rs do not have position sensors and operate in open loop mode The limit switches can be used to determine absolute position at startup or if confidence in the count is lost 7 2 Discontinued DC Motor Controllers TELLES LL TT TT ALLA pr DETTE i oe Fig 21 Discontinued DC motor controllers C 844 C 842 ISA bus card and C 862 black Mercury Covered in this section are the C 844 C 842 C 862 and pre 2007 models of the C 848 and C 880 Proper operation of the DC motor controllers requires appropriate setting of the servo control parameters The following sections describe the parameter settings appropriate for using DC motor versions of M 126 stages with different older PI controllers Values for current PI controllers are given in Section 6 www pi wSs M 126 Series MP 42E Release 2 7 0 Page 32 Piezo Nano Positioning PI Appendix Il Older Controllers 7 2 1 Parameter Settings for C 842 PC ISA Bus Card The amplifier mode can also be set by command PWM mode is enabled by the SOP command while analog mode is enabled by the SOH command Use PWM mode with the ActiveDrive stages PD models All axes connected to a given card must be in the same mode Mixing PWM and non PWM stages on the same card is possible using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode Parameter Settings for C 842 and older C 880 C 848 Stage Type CG DG PD Parameter versions versions
26. ructions in the controller manual If you are going to be using a host computer install the host software in the host computer This procedure is described in the controller User Manual and or associated software manuals Connect the stage to the controller using the connecting cable part number C 815 38 which comes with the stage With multi axis controllers be sure to note the axis designation of the connection selected If using any PWM stages e g M 126 PD1 read Section 3 1 carefully M 126 PDx ActiveDrive PWM versions only Connect the stage to the power supply M 500 PS which comes with the stage Command a few test moves to make sure everything is working properly If your controller comes with a graphic user interface software use it for such testing If the motion characteristics need fine tuning see Section 6 Appendix l Current Controllers for information on servo control parameters for the various controllers M 126 Series MP 42E Release 2 7 0 Page 14 M 126 Technical Data 4 M 126 Technical Data Models M 126 M01 Active Axes X Motion and positioning Travel range 25 Integrated sensor Sensor resolution Design resolution Min incremental motion 1 Unidirectional repeatability Bidirectional repeatability Accuracy Pitch Yaw 50 Straightness Flatness 2 Max velocity Origin repeatability Mechanical properties Drive Screw Leadscrew Thread pitch 0 5 Gear ratio
27. t this means that not only the spindle driven platform moves but also the motor and cable CAUTION Be aware that overlength mounting screws will interfere with motion and may cause permanent damage www pi ws M 126 Series MP 42E Release 2 7 0 Page 9 Installation Piezo Nano Positioning PI Use the two clearance holes on the top of the platform see Fig 7 to access mounting holes in the sled see Fig 8 Please note that you have to drive the unmounted stage to the proper position so that the holes line up exactly When this is done insert the mounting screws screw set 4 000011348 6 x hex head cap screw M4x18 comes with the stage from the top side in the holes until the screw heads are tight and do not interfere with stage motion Clearance holes in the platform for mounting hole access Fig 7 M 126 stage seen from the top side motor moves with platform NOTE The platform and motor move as a unit as the stage is mounted by the sled The positive direction of motion is away from the end where the motor is mounted see Fig 8 Mounting holes in the stationary sled tt arrow shows positive motion of platform and motor Fig 8 M 126 stage bottom view Adapter plates and mounting brackets are available for stacking M 126 series stages to form XY or XYZ systems See p 22 and the Pl catalog at www pi ws for more information or contact your PI Sales Engineer To mount an object on the
28. th the KO50B0002 barrel to Switchcraft adapter required to plug it into the stage see figure p 6 The barrel connector on the PS has the positive pole in the center www pi ws M 126 Series MP 42E Release 2 7 0 Page 25 Piezo Nano Positioning PI Connector Pin Assignments 53 M 126 2S1 Stepper Motor Connector type sub D15 m see Fig 16 Pin Function 1 phase la 9 phase 1b 2 WWW pl ws M 126 Series MP 42E Release 2 7 0 Page 26 Piezo Nano Positioning PI Appendix Current Controllers G Appendix I Current Controllers Each motorized stage in the motion system must be connected as an axis to a motion controller The controller is either networked with or installed in a PC NOTE This section covers the controllers currently available from PI If you are using an older controller see Section 7 Controller setup and in most cases operation is effectuated with software after being properly set up with a PC a certain level of stand alone operation is possible with the controller and stage alone With PI user interface software controller parameter settings specific to the stage are made automatically when the operator indicates which stage type is connected to the controller See the controller User Manual and the software manual for the software you are using for details they should be on the product CD that came with the controller but can also be downloaded from www pi ws If using non PI
29. versions 50 to 250 50 to 300 50 to 250 0 to 50 0 to 50 0 to 50 d term SPA DD ca 00 DL2000 100 1 to 400 Limit SPA DD Acceleration SPA 99 1 to 600 1 to 600 Velocity VEL SV 210000 120000 70000 1 to 280 000 1 to 190 000 1 to 120 000 2 0 to 1000 0 to 1200 0 to 1000 2 7 2 2 Parameter Settings for Older C 848s C 880s C 848 and C 880 controllers manufactured in 2007 and later have C 842 x3 motor controller cards with the same motion processer as the C 843 and are covered in Section 6 2 2 For models older than 2007 use the settings for the C 842 ISA bus card given above Use PWM mode with the ActiveDrive stages PD models All axes connected to older C 848s or to the same card on an older C 880 must be in the same mode Mixing PWM and non PWM stages on the same card is possible only by using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode www pi ws M 126 Series MP 42E Release 2 7 0 Page 33 Piezo Nano Positioning PI Appendix Il Older Controllers 7 2 3 Parameter Settings for C 844 The C 844 is a 19 inch rackmountable or desktop controller capable of controlling up to 4 axes DCMove is the standard C 844 operating program This program uses a configuration file to define the motion control parameters First use the parameter menu to set these values Use PWM mode with the M 126 PD models
30. ws M 126 Series MP 42E Release 2 7 0 Page 6 Piezo Nano Positioning PI Introduction Equipped with a 30 W ActiveDrive DC motor providing 0 25 um minimum incremental motion and velocity up to 15 mm sec The novel ActiveDrive concept features an integrated high efficiency power amplifier and reduces overall system cost The stage can be driven directly from a PC motor controller e g C 842 Mercury M 126 PDx stages come with a power supply which supplies the built in amplifiers directly Fig 4 M 126 PD1 and M 126 PD2 shown have the same dimensions 1 45 M 126 PD2 The M 126 PD1 and M 126 PD2 versions are the same size but differ in their travel ranges of 25 and 20 mm respectively Furthermore the M 126 PD2 is equipped with a ballscrew with 1 mm pitch while the M 126 PD1 has a precision drive screw pitch 0 5 mm The M 126 PD1 and M 126 PD2 versions have integrated PWM amplifiers and require connection of a separate power supply an E 500 PS or 20683 www pi ws M 126 Series MP 42E Release 2 7 0 Page 7 Piezo Nano Positioning PI Introduction 1 4 6 M 126 2S Equipped with a 2 phase micro stepping stepper motor offering a design resolution of 80 nm in conjunction with the C 663 Mercury Step stepper motor controller resolution differs with older controllers see Section 7 1 Fig 5 M 126 281 1 5 Unpacking Unpack the M 126 stage with care Compare the contents against the items covered by t
31. y fyrer I Dr Karl Spanner President The following designations are protected company names or registered trademarks of third parties Windows LabView Physik Instrumente PI GmbH Co KG is the owner of the following company names and trademarks ActiveDrive TV Copyright 1999 2008 by Physik Instrumente PI GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Document Number MP 42E Release 2 7 0 M 126UserMP42E270 doc This manual has been provided for information only and product specifications are subject to change without notice About This Document Users of This Manual This manual is designed to help the reader to install and operate the M 126 Series Linear Positioning Stages It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 126 Series Linear Positioning Stages as well as the procedures which are required to put the associated motion system into operation This document is available as PDF file Updated releases are available for download from www pi ws or by email contact your Physik Instrumente Sa

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