User Manual PZ253 - Physik Instrumente
Contents
1. 2 1 Intended Use The P 611 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the P 611 is intended for fine positioning as well as the fast and precise motion of small objects The specifications of the P 611 apply to horizontal mounting The motion is performed as follows depending on the model 1S 10 in one axis horizontally 29 20 in two axes horizontally XXZS XZ0 in one axis horizontally and in one axis vertically 389 3SF 30 30F in two axes horizontally and in one axis vertically Vertical mounting is only possible under certain conditions The intended use of the P 611 is only possible in combination with suitable electronics p 14 that is available from PI The electronics is not included in the scope of delivery of the P 611 The electronics must provide the required operating voltages To ensure proper performance of the servo conitrol system the electronics must also be able to read out and process the signals from the position sensors P 611 Positioning Systems PZ253E Version 1 0 0 5 2 Safety F I 2 2 General Safety Instructions The P 611 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 611 gt Only use the P 611 for its intended purpose and only use it i2. 4 Unpacking gt Ji 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If there is any sign of damage or missing parts contact PI immediately 4 Keep all packaging materials in case the product needs to be returned 18 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation cccccseccceceescceeeeeeeeceeseeeceesececeegeeseeegseeeeesesersegeeeeas 19 Connecting the P 611 to the Protective Earth Conductor ccc ceeeececeeeeeeeeeeeeae ees 21 Mounino the POTI erein SEE 23 ADONE EO IA 25 5 1 General Notes on installation Dangerous voltage and residual charge on piezo actuators A The P 611 is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 611 can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 611 gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor gt Do not pull out the
3. If touch voltages exist touching the P 611 can result in minor injuries from electric shock gt Connect the P 611 to a protective earth conductor p 21 before start up gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 611 to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the P 611 gt Avoid impacts that affect the P 611 gt Do not drop the P 611 gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 39 gt Only hold the P 611 by the holding surfaces of the base body p 17 The P 611 is maintenance free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy gt Only loosen screws according to the instructions in this manual gt Do not open the P 611 P 611 Positioning Systems PZ253E Version 1 0 0 7 2 Safety PI 2 3 Organizational Measures User manual gt Always keep this user manual available by the P 611 The latest versions of the user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the P 611 on to other
4. temperature range Material Dimensions Mass Cable length Sensor connection Voltage connection P 611 2S X Y SGS 120 100 0 2 2 0 1 lt 10 5 20 10 0 2 X 345 Y 270 X 270 Y 225 X 180 Y 165 15 10 15 PICMA P 885 LS 1 9 20 to 80 Aluminum steel 44mm x 44 mm x 25 mm 0 235 1 5 LEMO LEMO P 611 20 X Y 120 0 2 5 20 10 0 2 X 345 Y 270 X 270 Y 225 X 180 Y 165 15 10 15 PICMA P 885 ES 1 9 20 to 80 Aluminum steel 44mm x 44mm x 25mm 0 235 1 5 LEMO P 611 XZS X Z SGS 120 100 0 2 2 0 1 lt 10 5 10 20 10 0 2 Z 035 X 365 Z 340 X 280 Z 295 X 185 Z 230 15 10 15 PICMA P 885 iS 1 9 20 to 80 Aluminum steel 44mm x 44 mm x 34 mm 0 27 1 5 LEMO LEMO P 611 XZ0 X Z 120 0 2 5 10 20 10 0 2 Z 0 35 X 365 Z 340 X 280 Z 295 X 185 Z 230 15 10 15 PICMA P 885 iS 1 9 20 to 80 Aluminum steel 44mm x 44 mm x 34 mm 0 27 1 5 LEMO PI Unit Tolerance um min 20 0 um nm typ nm typ typ nm typ urad typ urad typ urad typ urad typ urad typ N um 20 Hz 20 Hz 20 Hz 20 N max N max uF 20 uA Hz 20 x um C kg 5 m 10 mm The resolution of PI piezo nanopositioning systems is not limited by friction or stiction Value given is noise equi
5. users also turn over this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the P 611 after having read and understood this user manual Personnel qualification The P 611 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model Overvie W ccccecccceececceececceceeceeceenecueceeaecueceaecaecuecueaesaeceeseeaeseesueseeaecueaeeaeeaeeeeaess 9 PrOOUCU VICW sicavanaesteianaiatensanceueuaanek besuanneretanaiatadsanceeauaaaeh R tetanaaeruan 10 POU TTA SING sete sin Sees sseerextctes Secectnee aesazeqh E 12 RC ODS Ol OEN GY eere icessaeeeea sae ol va enoece scat besecsoeuenacteseaeeboacceenceeeeeseoore etic 14 Suitable Electronics seg ccicesciecettd ccc decics ves cecbanedadcasaevscudcandecent dotanddanndadeanuerasearendedeseeheausasiees 14 Technical Features aids einscexiceencstdeeusinnsasiitvamassinsiamcesainmacitaenuiiaasahdihawasdinsdamenaandeteaneniinaslldthanisitinsane 15 3 1 Model Overview The following standard versions of the P 611 are available P 611 1 Linear Piezo Positioning System Mo
6. 0 11 3 Product Description i l 3 3 Product Labeling Figure 2 P 611 Position of the product labeling example of a view from above reser Triangular arrow Positive direction of motion of the with the letter X xB eaw p Triangular arrow Positive direction of motion of the ameme Ya Triangular arrow Positive direction of motion of the with the letter Z XZx DO A j 3X 3xF A NanoGube erandrame oae ooo Manufacturer s logo Omermedes o WWW PI WS Manufacturer s address website all Orern o places after the point refer to the Other models model P 611 XZS Product name example the 12 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 3 Product Description Labeling Description Model Dependent Position sco 114031266 Serial number example individual for each P 611 Other models Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Country of origin Country of origin Massa man CO o C a Warning sign Observe manual Old equipment disposal p 55 CE conformity mark Other models Symbol for the protective earth conductor marks the protective earth connection of the P 611 Other models Figure 3 P 611 Residual voltage warning sign on connector Warning sign Residual voltage Notice of risk of electric shock p 6 P 611 Positioning Systems PZ253E V
7. 1 3OF and P 611 3SF pA B jc D_JE F _ JG Ks Ke P 611 30 44 38 2 37 8 43 2 3 5 44 35 fio P 611 3S 44 38 2 37 8 43 2 3 5 44 3 5 fio P 611 30F P 611 3SF P 611 Positioning Systems PZ253E Version 1 0 0 49 10 Technical Data 50 Figure 16 P 611 ZS Version 1 0 0 PZ253E PI P 611 Positioning Systems 10 Technical Data PIEZO NANO POSITIONING WWW PI WS Figure 17 P 611 Z0 P 611 Positioning Systems PZ253E Version 1 0 0 51 10 Technical Data i gt I 10 3 Torque for Stainless Steel Screws A2 70 Screw Sze Minimum Torque enmu Torge 10 4 Pin Assignment Sub D 25 connector Only for P 611 3S 3SF 30 30F 1 13 E E E E E E EE EEEE E E 14 29 Figure 18 Sub D 25 connector Front side with connections Pin assignment of the Sub D 25 connector of the P 611 3S 3SF SGS 3 reference voltage SGS 2 B1 sensor signal SGS 2 reference voltage SGS 3 B1 sensor signal 52 Version 1 0 0 PZ253E P 611 Positioning Systems 10 Technical Data PIEZO NANO POSITIONING WWW PI WS pn fso roon e mu 80S trteencovotase Tow pe Foo ewe pe Foo Pin assignment of the Sub D 25 connector of the P 611 30 30F Pin Signal Function oe free awe ee P 611 Positioning Systems PZ253E Version 1 0 0 53 10 Technical Data Pp I 54 LEMO connectors Only for P 611 1S 10 2S 20 XZS XZ0 ZS Z0 Figure 19 LEMO connector side v
8. 135 200 15 10 15 PICMA P 885 IES 1 9 20 to 80 Aluminum steel 44 mm x 44 mm x 43 2 mm OF version 44 mm x 50 mm x 44 2 mm 0 32 1 5 Sub D connector 10 Technical Data Unit um um nm nm nm urad urad urad urad urad N um Hz Hz Hz uF UA Hz x um C kg Tolerance min 20 0 max 20 20 19 J6 10 mm The resolution of PI piezo nanopositioning systems is not limited by friction or stiction Value given is noise equivalent motion with E 503 amplifier Dynamic operating current coefficient in pA per Hz and um Example Sine operation with 50 um at 10 Hz requires approximately 0 9 mA of current Adapter cable with LEMO connectors for sensor and operating voltage available P 611 Positioning Systems PZ253E Version 1 0 0 41 10 Technical Data 42 Active axes Motion and positioning Integrated sensor Open loop travel 20 to 120 V Closed loop travel Open loop resolution Closed loop resolution Linearity error Repeatability Runout 987 Z motion Runout Ox Z motion Runout Oy Z motion Mechanical properties Stiffness Unloaded resonant frequency Resonant frequency 30 g Resonant frequency 100 g Push pull force capacity Drive properties Ceramic type Electrical capacitance Dynamic operating current coefficient Miscellaneous Operating temperature range Material Dimensions Mass Cable length Sensor connection Volt
9. 3 6 Tecnnical FediU rES sarayinin as e inaina aa aai 15 3 6 1 PICMA Piezo Actuators iccscccaccenasansndyatdmsiendansereibbsitucmearaesndvesgacceinenn 15 3 6 2 Flexure GUIDES seisoin E E E 15 3 6 3 Strain Gauge Sensors SGS ccceeeeccescsssseeeeeceeeseeeeeeeeeseeeeeseaseeeess 16 4 Unpacking 17 5 Installation 19 5 1 General Notes on Installation cccccccsssecceeecesseceeeeeeeeeceeeseeeeeceessseeeeeeeeseeees 19 5 2 Connecting the P 611 to the Protective Earth Conductor ccccceeeeeeeeeeeees 21 5 3 Mounting the P30 11 saiccdenisnsnansenannidsetncecssinwesstunexasmdsSneiemiaseniaidninsesnisanstaanstonsaasaaaeasas 23 5 4 Atixing the Load rsistcratwishansilininrtssrotawssiautnln nnns nenni Ens E REENA ERANA EE ESA AAA AESi Iaia 25 6 Start Up and Operation 29 6 1 General Notes on Start Up and Operation cccccccssseeeceeeeeeeeeeeeeeeaeeeeeneeeees 29 6 2 Operating the P 611 sccccesasdccns epercicetdcdeeseueteceastucenncdvendenqusdoesacesdesecesaseouctwenenecosedd 31 6 3 Discharging the P 611 ccccsssccccesseeecseseeeceeeseeecsaeeeceeuseeceeaseeessaseeessenseesseass 31 Maintenance 33 7 1 General Notes on Maintenance cccccccceccccecccecccecccecuccececeececaucecucesacsesaees 33 7 2 Cleaning the P 611 ccccccccsseeeecseeeeeeeeeeeeeeeeeeeeeeeeseeeseeueeeseegeeseseaeeeessaeeessnaeeees 33 Troubleshooting 35 Customer Service 37 Technical Data 39 101 SSC ICAO NS eos vane tae iccie
10. PZ253E PI P 611 Positioning Systems User Manual Version 1 0 0 Date 24 07 2014 PIEZO NANO POSITIONING WWW PI WS This document describes the following products P 611 1 Linear Piezo Positioning System P 611 1S 10 P 611 XZ P 611 2 XZ and XY Nanopositioner P 611 2S 20 XZS XZO P 611 3 NanoCube XYZ Piezo Stage P 611 3S 3SF 30 30F P 611 Z Piezo Z Stage P 611 ZS Z0 1S 10 2S 20 XZS XZ0 ZS Z0 with LEMO connector s 3S 3SF 30 30F with Sub D connector Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano The products described in this document are in part protected by the following patents German patent no 10021919C2 German patent no 10234787C1 German patent no 10348836B3 German patent no 102005015405B3 German patent no 102007011652B4 US patent no 7 449 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2014 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all t
11. age connection P 611 ZS Z SGS 120 100 0 2 2 0 1 lt 10 5 20 5 0 45 460 375 265 15 10 PICMA P 885 1 5 es 20 to 80 Aluminum steel 44 mm x 44mm x 2 mm 176 125 LEMO LEMO P 611 Z0 Z 120 0 2 5 20 5 0 45 460 375 265 15 10 PICMA P 885 1 5 19 20 to 80 Aluminum steel 44 mm x 44mm x 27 7 mm 176 15 LEMO LEMO PI Unit um um nm nm nm urad urad urad N um Hz Hz uF uA Hz x um C Tolerance min 20 0 typ typ typ typ typ typ typ 20 20 20 20 max 20 20 5 10 mm The resolution of PI piezo nanopositioning systems is not limited by friction or stiction Value given is noise equivalent motion with E 503 amplifier System properties System configuration P 611 ZS and E 665 SR controller with 30 g load Small signal bandwidth 40 Hz Settling time 10 step width 25 ms Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Maximum Ratings P 611 stages are designed for the following operating data Maximum Maximum Operating Maximum Power Operating Voltage N Unloaded No P 611 1S 20 to 120 V 133 Hz 3 9 W aere r P 611 25 20to 120 V 115 Hz in X 3 4 W i n in P 611 XZS 20 to 120 V 122 Hz in 3 6 W in P 611 XZ0 113 Hz in 3 3 W in 20 to 120 V 117 Hz in X 3 4 W in X 73 Hz in Y i
12. atyccnen cue N EER E EEEE 39 10 1 1 Data T ADC ccc toccievthsvnncnccetsaedshsesnaevdeseceddtebaanucess vacdddesseudecssaneveeeenenseases 39 10 1 2 Maximum Ratings retrearceties canis eccsiaatoee dna ecainedd cine nciaitneeaatteiranenteanssptemeauaens 43 10 1 3 Ambient Conditions and Classifications c ccccceccececeeceeeeceeeeees 44 10 2 BES 9 fs eee ae ere ro EE AA 45 10 3 Torque for Stainless Steel Screws A2 70 cccccceccseeeeeeeeeeeeeeeeeeeeeeeeeeesaaaeeees 52 10 4 Pin PRS SICIMMVCT a santas econetceeatcdsientetianennaneadanmmensinecuhi atin tex accisunbadnumucusnesusacduetuacsaus 52 Old Equipment Disposal 55 EC Declaration of Conformity 57 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual cccceccecceeeeeeeeeeseeeeeeeeeeeaaeeeeeeeees 1 Symbols and Typographic COnventions cccecccccccccceessesseeceeeeeeeeseeeeeeeeeeeessuaageeseeees 1 FOUORA 2 Other Applicable DOCUMENHS ccccccccceseeseeeceeeeeesaeeeseceeeeeeeuaessseceeeeessaaeaeeeeeeeeeesaas 3 Downloading Manuals seiareniantncadadensviszanddewsiebinhentactasaciadensavieatdancletasnannectasaiadansiienenidamelcari 3 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 611 x stands for the different models see p 9 Basic knowledge of control technology driv
13. connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller P 611 Positioning Systems PZ253E Version 1 0 0 19 5 Installation gt Ji NOTICE 4 Mechanical overload from incorrect handling Impermissible mechanical loading of the moving platform as well as certain surfaces of the P 611 can lead to damage to the piezo actuators sensors and flexure joints of the P 611 as well as to loss of accuracy In addition the P 611 can be damaged from tensile forces on the cable exit and bending of the connection cable gt Only hold the P 611 by the holding surfaces of the base body p 17 gt Avoid tensile forces on the cable exit and do not bend the cable NOTICE re Damage from unsuitable cables Unsuitable cables can damage the stage and the electronics gt Only use cables provided by PI for connecting the P 611 to the electronics NOTICE Fh Damage from incorrect mounting e Incorrect mounting of the P 611 or incorrectly mounted parts can damage the P 611 gt Only mount the P 611 and the loads on the mounting fixtures holes intended for this purpose NOTICE f gt Damage due to incorrectly tightened screws Incorre
14. ctly tightened screws can cause damage gt Observe the torque range p 52 given for the screws used during installation INFORMATION Extended cables can reduce the positioning accuracy of the P 611 or affect the sensor processing by the electronics gt Do not use cable extensions If you need longer cables contact our customer service department p 37 20 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 2 Connecting the P 611 to the Protective Earth Conductor INFORMATION In the case of P 611 stages with Sub D connectors ground loops can occur when the stage is grounded via its protective earth connector as well as by the shield of the connection cable for the electronics gt Ifa ground loop occurs contact our customer service department p 37 INFORMATION gt Observe the applicable standards for mounting the protective earth conductor The P 611 has an M4 hole for mounting the protective earth conductor This hole is marked with the symbol for the protective earth conductor For the precise position of the hole see Dimensions p 45 Prerequisite v You have read and understood the general notes on installation p 19 v The stage is not connected to the electronics Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Supplied M4 protective earth screw set p 14 for connecting the prot
15. del MI P 611 1S Linear nanopositioning system 100 um strain gauge sensor P 611 10 Linear nanopositioning system 120 um open loop P 611 XZ P 611 2 XZ and XY Nanopositioner Model Descrpon o P 611 3 NanoCube XYZ Piezo Stage Ls sc P 611 3S NanoCube XYZ nanopositioning system 100 um x 100 um x 100 um strain gauge sensors P 611 Positioning Systems PZ253E Version 1 0 0 9 3 Product Description i eS SS ae P 611 30 NanoCube XYZ nanopositioning system 100 um x 100 um x 100 um open loop P 611 30F NanoCube XYZ nanopositioning system 100 um x 100 um x 100 um open loop integrated fiber holder P 611 Z Piezo Z Stage koni eee O OOOO P 611 ZS Vertical nanopositioning stage 100 um strain gauge sensor P 611 3SF NanoCube XYZ nanopositioning system 100 um x 100 um x 100 um strain gauge sensors integrated fiber holder P 611 Z0 _ Vertical nanopositioning stage 110 um open loop 3 2 Product View The figures serve as examples and can differ from your stage model 1 2 3 Figure 1 Example of product view 1 2 3 4 10 Version 1 0 0 PZ253E P 611 Positioning Systems Moving platform Base body Protective earth connection Cable exit 3 Product Description PIEZO NANO POSITIONING WWW PI WS Directions of motion of the P 611 The arrows each represent the positive direction of motion P 611 3x P 611 3xF P 611 Positioning Systems PZ253E Version 1 0
16. ductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 611 in environments that can increase the electric conductivity gt Only operate the P 611 within the permissible ambient conditions and classifications p 44 P 611 Positioning Systems PZ253E Version 1 0 0 29 6 Start Up and Operation I NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramics of the actuator gt When the P 611 is not used but the controller remains switched on to ensure temperature stability discharge the P 611 p 31 NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 611 gt Only operate the P 611 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 43 for which the P 611 is specified gt Only operate the P 611 when the operating voltage is properly connected see Pin Assignment p 52 NOTICE Uncontrolled oscillation Oscillations can cause irreparable damage to the stage Oscillations are indicated by a humming and can result from the following causes Achang
17. e Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 Safety Low Voltage Directive EN 61010 1 2010 lt laa P 611 Positioning Systems PZ253E Version 1 0 0 57
18. e in the load and or dynamics requires the servo control parameters to be adjusted The stage is operated near its resonant frequency If you notice oscillations gt In closed loop operation immediately switch off the servo mode gt In open loop operation immediately stop the stage INFORMATION The positive direction of motion of the axes is given in the product view p 10 INFORMATION Sound and vibration e g footfall impacts can be transmitted to the stage and can affect its performance with regard to position stability gt Avoid transmitting sound and vibration while the stage is being operated 30 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 2 Operating the P 611 gt Follow the instructions in the manual of the controller used for start up and operation of the P 611 6 3 Discharging the P 611 The P 611 must be discharged in the following cases Before installation I f the P 611 is not used but the controller remains switched on to ensure temperature stability Before demounting e g before cleaning and transporting the P 611 and for modifications The P 611 is discharged through the internal discharge resistor of the controller from PI Discharging a P 611 that is connected to the controller In closed loop operation 1 Switch off the servo mode on the controller 2 Set the piezo voltage to 0 V on the controller In o
19. e technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation ol P 611 Positioning Systems PZ253E Version 1 0 0 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label 1 2 gt p 5 RS 232 AA 1 3 Figures Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 2 Version 1 0 0 PZ253E P 611 Positi
20. ective earth conductor Suitable screwdriver P 611 Positioning Systems PZ253E Version 1 0 0 21 5 Installation I Figure 5 Mounting of the protective earth conductor profile view 1 Base body of the P 611 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 611 to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the P 611 as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 22 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Mounting the P 611 NOTICE Warping of the P 611 due to mounting on uneven surfaces Mounting the P 611 on an uneven surface can warp the P 611 Warping reduces the accuracy gt Mount the P 611 on an even surface The recommended evenness of the surface is 20 um gt For applications with great temperature changes Only mount the P 611 on surfaces that have the same or similar thermal expansion properties as the P 611 NOTICE Tensile stress on piezo actuator with vertical mounting When the stage is mounted ve
21. ersion 1 0 0 13 3 Product Description i 3 4 Scope of Delivery P 611 Stage according to order p 9 000036450 M4 screw set for protective earth consisting of M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers PZ240EK Short instructions for piezo positioning systems 3 5 Suitable Electronics To operate a P 611 you need suitable electronics Devices are selected depending on the type of application The following table lists suitable devices x suitable a ag E 610 piezo amplifier servo controller OEM module E 625 piezo servo controller bench top E 665 servo controller bench top E 621 servo controller module E 660 piezo amplifier bench top E 501 modular piezo controller consisting of E 503 piezo amplifier module m Only models with sensor E 509 S3N sensor servo controller module Optional E 517 interface and display module or E 515 display module 14 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 3 Product Description zE E 564 3 channel piezo controller 3 X X X X with digital interface E 664 NanoCube piezo 3 X controller Eseverri _ 1 _ One device per axis 3 6 Technical Features 3 6 1 PICMA Piezo Actuators P 611 stages are driven by PICMA piezo actuators PICMA actuators have all ceramic insulation and are therefore far Superior to conventional actuato
22. f it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the P 611 The P 611 is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 611 can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 611 gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller 6 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 2 Safety lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 611 in the case of malfunction or failure of the system
23. he rights Use of said text photographs and drawings is permitted only in part and only upon citation of the Source Original instructions First printing 24 07 2014 Document number PZ253E CBo Version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual cccccessseceeeeeesseeeeeeeeeseeees 1 1 2 Symbols and Typographic CONVENTIONS cccccseeeccceeeeeeeceeeeeaeeeeeeeeeeeeeeeeeeaaaeeeees 1 1 3 FOUG aea E E E E 2 1 4 Other Applicable DOCUMENTS ccccccecccseeseeeeeeeeeeeeaeeseeeeeeeeessaeaeeeceeeeessaaaeeess 3 1 5 Downloading Manuals ccccseeeececeeeeeeceeeeeeeseeeeeeceaeeecseeeeeeeeseeessueeessaneesenaeees 3 2 Safety 5 2 1 mended Une araea E qecisooce aeunavec qresesaeansitenedodeae 5 2 2 General Safety Instructions ccccccccccessseceecceeeceeeceeeeeceeeeeeseeceeeseeeeeceeesaeaeeeess 6 2 3 Organizational MEASULES cccccceccccceseceeceeseeeceeeececseeeeeeceueeeeseueeeessaeeeesseeeessaees 8 3 Product Description 9 3 1 DOCS Oy CI ete Ena i EA EERE E E 9 3 2 P OGUCE VAC W cirer Ea E TE E E E A EAT 10 3 3 Product LADS csiisiriiaronneia riaa a Eaa i ark 12 3 4 CODE Ol I CNV CMY serieren insni ae iieii arae iis 14 3 5 SUIADIS ElSCIVONICS serisine inea aa e TS 14
24. iew LEMO connectors according to model one connector per axis P 611 Connector Connector Model View Shell Inner Piezo voltage Ground conductor 20 to 120 V AS 28 Input Supply voltage for Cable XZS ZS strain gauge sensor shield ae Sensor Sensor signal2 2 a of the supply voltage Version 1 0 0 PZ253E P 611 Positioning Systems 11 Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der Romerstr 1 D 76228 Karlsruhe Germany P 611 Positioning Systems PZ253E Version 1 0 0 55 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the P 611 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltag
25. irection Load capacity 15 15 N max Drive properties Ceramic type PICMA P 885 PICMA P 885 Electrical capacitance 1 5 15 uF 20 Dynamic operating current 1 9 1 9 UA Hz x um 20 coefficient Miscellaneous Operating temperature range 20 to 80 20 to 80 C Material Aluminum steel Aluminum steel Dimensions 44mmx44mmx 44mmx 44mm x 17mm 17mm Mass 0 135 0 135 kg 5 Cable length 1 5 1 5 m 10 mm Voltage connection LEMO LEMO Sensor connection LEMO The resolution of PI piezo nanopositioning systems is not limited by friction or stiction Value given is noise equivalent motion with E 503 amplifier Dynamic operating current coefficient in pA per Hz and um Example Sine operation with 50 um at 10 Hz requires approximately 0 9 mA of current P 611 Positioning Systems PZ253E Version 1 0 0 39 10 Technical Data Active axes Motion and positioning Integrated sensor Open loop travel 20 to 120 V Closed loop travel Open loop resolution Closed loop resolution Linearity error Repeatability Pitch in X Y Runout 8x motion in Z Yaw in X Yaw in Y Runout Oy motion in Z Mechanical properties Stiffness Resonant frequency no load Resonant frequency under load at 30 g Resonant frequency under load at 100 g Push pull force capacity in motion direction Load capacity Drive properties Ceramic type Electrical capacitance Dynamic operating current coefficient Miscellaneous Operating
26. ite http www pi portal ws Click Downloads Click the corresponding product category Go to the corresponding product code The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer Log in with the user name and the password from the Release News In the directory of the corresponding product go to the Manuals sub directory Copy the desired manual to the hard disk of your PC or to a data storage medium Version 1 0 0 PZ253E P 611 Positioning Systems 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter Mendod USG presia sinct escent ect gasiaebes ects lt 8 aeenocseasectiece oetitsocwenteaead uenneaccuenasieck sep ieaewneeee 5 General Safety Instructions ccccccececeeccceeeeeseeeseeeeeeeeeesseeeeeceeeeeesssaaeeeeeeeeeesssaaeeeeeeees 6 Organizational MEASUIES ccccccseeeeeccceeeeeeeeeseeceeeeeeceseeeseeeeeeeesseeseeeeeeeeessaaeaeeeeeeeeeeeaas 8
27. ix the load so that it is centered and that the center of load is on the moving platform P 611 Positioning Systems PZ253E Version 1 0 0 27 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ccccccccssssecceeceesseceeeeeeeeeeeeeeaeeeseeeeseenes 29 Operating the O areen ia ANEETA 31 Discharging Ne P G 1 essee Eea in 31 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 611 in the case of malfunction or failure of the system If touch voltages exist touching the P 611 can result in minor injuries from electric shock gt Connect the P 611 to a protective earth conductor p 21 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 611 to the protective earth conductor before Starting it up again NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 611 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and con
28. latform e g high set ups and long levers the P 611 can be damaged from high strain on the flexure guides high torques and oscillations gt Ifthe center of the load to be affixed is far above or to the side of the moving platform adjust the controller settings before start up or contact our customer service department p 37 NOTICE Screws that are too long EHE The P 611 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 45 gt Only use screws of the correct length for the respective mounting holes INFORMATION The positive direction of motion of the axes is given in the product view p 10 Center of load at the optimum position Figure 8 Example of an optimally affixed load 26 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation Center of load at an unsuitable position Figure 9 High set up and center of load far above the moving platform Figure 10 Long lever and center of load on the side of the moving platform Prerequisite v You have read and understood the general notes on installation p 19 Tools and accessories Screws of appropriate size and length p 45 Suitable tools Affixing the load gt Only affix loads to the threaded holes p 45 intended for this purpose and with suitable screws Observe the specified torque range p 52 while doing SO gt Aff
29. mounting a P 611 XZx 3x 3xF or Zx Introduce the screws into the recesses in the base body of the P 611 from the side 3 Tighten the screws Observe the specified torque range p 52 while doing so 5 4 Affixing the Load NOTICE Mechanical overload due to high torques and high loads When affixing the load high torques and high loads can overload the moving platform of the P 611 Mechanical overload can cause damage to the piezo actuators sensors and flexure joints of the P 611 and lead to losses in accuracy gt Observe the torque range p 52 given for the screws used during installation gt Avoid torques gt 50Ncm on the moving platform gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 39 NOTICE ah Warping of the P 611 due to affixing of loads with uneven contact surface Affixing loads with an uneven contact surface can warp the P 611 Warping reduces the accuracy gt Only affix loads on the P 611 whose contact surface with the moving platform of the stage has an evenness of at least 20 um gt For applications with great temperature changes Only affix loads on the P 611 that have the same or similar thermal expansion properties as the P 611 P 611 Positioning Systems PZ253E Version 1 0 0 25 5 Installation gt Ji NOTICE Center of load at unsuitable position If the center of load is located far outside of the moving p
30. n Y 83 Hz in Z 2 4 W in Z P 611 ZS 20 to 120 V 153 Hz 45 W P 611 Z0 P 611 Positioning Systems PZ253E Version 1 0 0 43 10 Technical Data 10 1 3 Ambient Conditions and Classifications 44 The following ambient conditions and classifications must be observed for the P 611 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Ovenctapecatogoy NT Protciondess Degree of protection IP20 according to IEC 60529 Version 1 0 0 PZ253E P 611 Positioning Systems PI PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 11 P 611 1S P 611 Positioning Systems PZ253E Version 1 0 0 45 10 Technical Data 46 Figure 12 P 611 10 Version 1 0 0 PZ253E PI P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Figure 13 P 611 2S and P 611 20 P 611 Positioning Systems PZ253E Version 1 0 0 47 10 Technical Data 48 Figure 14 P 611 XZS and P 611 XZ0 Version 1 0 0 PZ253E PI P 611 Positioning Systems 10 Technical Data PIEZO NANO POSITIONING WWW PI WS Figure 15 P 611 30 P 611 3S P 61
31. ollowing information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website P 611 Positioning Systems PZ253E Version 1 0 0 37 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter OS CLG ONS A E E ET I AA T AT A IE T 39 DIMENSION eee seecestonmee taceenaeuadeenestor dence nk EEA a rE EE E EEEE E E EE a 45 Torque for Stainless Steel Screws A2 70 ssssssnssssssnnnsensrnrrsesrrrrrenrrrtrrennnnrreerrnnnee 52 PIVASSONME eisrean 52 10 1 Specifications 10 1 1 Data Table P 611 1S P 611 10 Unit Tolerance Active axes X X Motion and positioning Integrated sensor SGS Open loop travel 20 to 120 V 120 120 um min 20 0 Closed loop travel 100 um Open loop resolution 0 2 0 2 nm typ Closed loop resolution 2 nm typ Linearity error closed loop 0 1 typ Repeatability lt 10 nm typ Pitch 5 5 urad typ Yaw 20 20 urad typ Flatness 10 10 nm typ Mechanical properties Stiffness in motion direction 0 2 0 2 N um 20 Unloaded resonant frequency 400 400 Hz 20 Resonant frequency 30 g 300 300 Hz 20 Resonant frequency 100 g 195 195 Hz 20 Push pull force capacity in 15 10 15 10 N max motion d
32. oning Systems 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 4 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website E 501 modular piezo controller E 503 piezo amplifier module E 509 sensor servo controller module E 515 display module E 517 interface and display module E 564 piezo controller E 610 piezo amplifier servo controller E 621 servo controller module E 625 piezo servo controller E 660 piezo amplifier E 663 piezo amplifier E 664 NanoCube piezo controller E 665 servo controller PIMikroMove P 5xx P 6xx P 7xx piezo positioning PZ240EK Short Instructions systems 1 5 Downloading Manuals INFORMATION lf a manual is missing or problems occur with downloading gt Contact our customer service department p 37 P 611 Positioning Systems PZ253E Version 1 0 0 3 1 About this Document gt Ji INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals PI website gt Follow the corresponding instructions for downloading Download freely accessible manuals he 2 3 4 Open the webs
33. pen loop operation gt Set the piezo voltage to 0 V on the controller Discharging a P 611 that is not connected to the controller gt Connect the stage to the switched off controller from PI P 611 Positioning Systems PZ253E Version 1 0 0 31 7 Maintenance PIEZO NANO POSITIONING WWW PI WS 7 Maintenance In this Chapter General Notes on Maintenance ccccceccececcececcececcccecucceccccecucceceeaecueaucecaceecaeaecauaecass 33 NS UMN WAS Fd cee seetececcaccatyessicdhenposeds qesesinParpeoceusaeasedhsgetsess konshet use ssececaase eeseaseas aan 33 7 1 General Notes on Maintenance NOTICE Misalignment from loosening screws The P 611 is maintenance free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy gt Only loosen screws according to the instructions in this manual gt Do not open the P 611 7 2 Cleaning the P 611 Prerequisites v You have discharged the piezo actuators of the P 611 p 31 v You have disconnected the P 611 from the controller Cleaning the P 611 gt Clean the surfaces of the P 611 with a cloth that is slightly dampened with a mild cleanser or disinfectant e g ethanol or isopropanol gt Do not do any ultrasonic cleaning P 611 Positioning Systems PZ253E Version 1 0 0 33 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Tro
34. rs in respect to performance and lifetime The monolithic piezoceramic block is protected against humidity and failure due to increased leakage current by a ceramic insulation layer In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating parts or friction The piezo actuators are therefore backlash maintenance and wear free 3 6 2 Flexure Guides P 611 stages have flexure guides flexures for frictionless motion and high guiding accuracies A flexure guide is an element which is free from static and sliding friction It is based on the elastic deformation bending of a solid e g steel and does not have any rolling or sliding parts Flexure elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any lubricants P 611 Positioning Systems PZ253E Version 1 0 0 15 3 Product Description i 3 6 3 Strain Gauge Sensors SGS Strain gauge sensors derive the position information from their expansion They are attached at a suitable position in the drivetrain where they measure the displacement of the moving stage part against the base body This type of position measurement is done with contact and indirectly since the position of the moving platform is derived from a measurement on the lever guide or piezo stack The
35. rtically tensile stress can result in particular alignments that reduces the preload of the piezo actuator and thus destroys it gt Ifyou want to mount the P 611 vertically contact our customer service department p 37 NOTICE Protruding screw heads Protruding screw heads can damage the P 611 gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion The following figures serve as examples and can differ from your stage model P 611 Positioning Systems PZ253E Version 1 0 0 23 5 Installation I Figure 6 P 611 1x and 2x Holes for mounting the stage on a surface Number of mounting holes P 611 1x 4 P 611 2x 3 Figure 7 P 611 XZx 3x 3xF and Zx One of four recesses in the base body Prerequisite v You have read and understood the general notes on installation p 19 Tools and accessories When mounting a P 611 2x 3 screws of suitable size and length p 45 When mounting other models of the P 61 1 4screws of suitable size and length p 45 Suitable screwdriver 24 Version 1 0 0 PZ253E P 611 Positioning Systems 5 Installation PIEZO NANO POSITIONING WWW PI WS Mounting the stage on a surface 1 Position the stage on an even surface 2 Introduce the screws When mounting a P 611 1x or 2x Introduce the screws into the counter sunk holes in the base body of the P 611 from above When
36. sensors are equipped with a full bridge circuit that is insensitive to thermal drift and assure optimum position stability in the nanometer range 16 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking NOTICE Mechanical overload from incorrect handling Impermissible mechanical loading of the moving platform as well as certain surfaces of the P 611 can lead to damage to the piezo actuators sensors and flexure joints of the P 611 as well as to loss of accuracy In addition the P 611 can be damaged from tensile forces on the cable exit and bending of the connection cable gt Only hold the P 611 by the holding surfaces of the base body p 17 gt Avoid tensile forces on the cable exit and do not bend the cable The figure serves as an example and can differ from your stage model Z if gs Figure 4 P 611 Holding surfaces to be used on the base body see arrows W La Areas to be protected against the application of forces Moving platform framed with a dashed line Non anodized surfaces hatched 1 Unpack the P 611 carefully a Spread the foam packaging apart with one hand b Grasp the stage by the holding surfaces c Grasp all connection cables of the stage with your other hand d Carefully remove the stage and the connection cables from the foam packaging at the same time P 611 Positioning Systems PZ253E Version 1 0 0 17
37. ubleshooting No or limited The cable is not gt Check the cable connections motion connected correctly Excessive load gt Do not exceed the maximum permissible stress and load Capacities according to the specifications p 39 Zero shift of the sensor Perform a zero point adjustment of for the following the sensor see controller manual reasons Load applied in direction of motion Ambient operating temperature of the stage far above or below calibration temperature 21 C to 24 C Reduced Warping of the base Only mount the P 611 on surfaces accuracy body or the moving with the following characteristics platform Evenness of at least 20 um The thermal expansion properties are similar to those of the P 611 e g surfaces made of aluminum Only affix loads with the following characteristics on the P 611 The contact surface of the load has an evenness of at least 20 um The thermal expansion properties are similar to those of the P 611 e g loads made of aluminum P 611 Positioning Systems PZ253E Version 1 0 0 35 8 Troubleshooting 36 PI The stage starts oscillating or positions inaccurately If the problem that occurred with your system is not listed in the table above or cannot P 611 or controller has been replaced Axes were mixed up during connection only with LEMO connectors The stage is not connected to the corresponding controller only with several s
38. valent motion with E 503 amplifier Dynamic operating current coefficient in pA per Hz and um Example Sine operation with 50 um at 10 Hz requires approximately 0 9 mA of current Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW Active axes Motion and positioning Integrated sensor Open loop travel 20 to 120 V Closed loop travel Open loop resolution Closed loop resolution Linearity error Repeatability Pitch in X Y Runout 8x motion in Z Yaw in X Yaw in Y Runout Oy motion in Z Mechanical properties Stiffness Unloaded resonant frequency X Y Z Resonant frequency at 30 g in X Y Z Resonant frequency at 100 g inx Y Z Push pull force capacity in motion direction Load capacity Drive properties Ceramic type Electrical capacitance Dynamic operating current coefficient Miscellaneous Operating temperature range Material Dimensions Mass Cable length Sensor connection Voltage connection P 611 3S P 611 3SF X Y Z SGS 120 axis 100 axis 0 2 0 1 lt 10 5 10 20 10 10 0 3 350 220 250 270 185 230 180 135 200 15 10 15 PICMA P 885 1 5 1 9 20 to 80 Aluminum steel 48 mm x 44 mm x 43 2 mm SF version 44 mm x 50 mm x 44 2 mm 0 32 1 5 Sub D connector Sub D connector P 611 30 P 611 30F X Y Z 120 axis 0 2 5 10 20 10 10 0 3 350 220 250 270 185 230 180
39. ystems Servo conirol parameters incorrectly set because e g the load was changed Open loop operation near the resonant frequency After the P 611 or controller has been replaced it is necessary to recalibrate the axis displacement gt Perform a recalibration of the axis displacement see controller manual or contact our customer service department p 37 Observe the assignment of the axes when connecting the stage to the controller This assignment is indicated by labels on the devices Observe the assignment of the devices when several systems are connected The assignment is indicated on the calibration label of the controller see rear panel or bottom side which contains the serial number of the stage to be connected Immediately switch off the servo mode of the corresponding stage axes Check the settings of the servo control parameters on the controller Adjust the servo control parameters on the controller according to the load change In open loop operation only operate the stage with a frequency that is below the resonant frequency be solved as described contact our customer service department p 37 Version 1 0 0 PZ253E P 611 Positioning Systems PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the f
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