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6517B-900-01 (A - Jun 2008)(User`s).book

1. 2 1 ipie rer PE 2 2 Front and rear panel familiarization cesses 2 2 Front panel 2 2 Rear panel rtt ett e Fk de epe he ee poen 2 4 mri DM m 2 6 Line power Connection eerie ritenere nde bear 2 6 mung rcp 2 6 pot p c 2 6 aigu M p mE 2 6 Secondary display tci eter teste 2 7 gi pc M 2 7 Restoring bench defaulls eei rere 2 7 Function default settings cesse cecinere 2 7 3 Basic Measurements 3 1 y E 3 2 Changing rej E 3 2 Voltage MM 3 2 MEE 3 3 2 2220 2 3 4 Resistance measurements 2 3 5 le A 3 6 3 6 Resistivity 3 7 e idee iter tette ecce tuerit 3 9 Po bbb ETE 3 10 Temperature and humidity measurements 3 10 ONS m 3 10 2 3 11 Temperature dtp M H 3 11 Displa
2. 2 6 Line power 2 6 Power p 2 2 6 Bl E 2 6 Primary desplay Wie rrt bere rh 2 6 Secondary display 2 7 Bench CHORUS 2 7 Restoring bench defaults rnnt 2 7 Function default settings 2 2 7 Section 2 Getting Started Model 6517B Electrometer User s Manual Introduction This section contains identification and descriptions of controls and components of the Keithley Instruments Model 6517B Electrometer and detailed information for powering up the Model 6517B Front and rear panel familiarization Front panel summary The front panel of the Model 6517B is shown in Figure 2 1 The descriptions of the front panel controls follow Figure 2 1 Figure 2 1 Model 6517B front panel Secondary display line 1 9 Primary display line VOLTAGE SOURCE RO OPERATE OP ION VOLTAGE SOURCE DISPLAY Q x 7 REL FILTER MATH TRIG SEQ CHED OWER o INFO LOCAD SroREjRECAU CONFIG EXIT ENTER P 1 ANNUNCIATORS EDIT Editing voltage source values ERR Questionable reading REM In remote TALK Addressed to talk LSTN Addressed to listen SRQ Service Request REL Relative reading displayed FILT Digital filter enabled MATH Math calculation enabled AUTO Autoranging enabled ARM
3. 5 6 SCPI signal oriented commands esee 5 8 SCPI subsystem 5 8 Program examples 5 13 Changing function and 5 13 Lucus aie ener cenae eie enar cde eerie nene 5 14 Continuous triggering 5 15 Continuous triggering 2 5 15 Generating SRQ on buffer full esses 5 16 Storing readings in the 5 17 Taking readings with the scanner 5 18 Test sequence Staircase 8 5 19 Section 5 Remote Operation Model 6517B Electrometer User s Manual Overview For remote operation the Keithley Instruments Model 6517B can use the IEEE 488 interface or the RS 232 interface Common commands and Standard Commands for Programmable Instrumentation SCPI can be used with either interface For IEEE 488 operation you can select the device dependent command DDC language mode In this mode you use DDCs instead of common commands SCPI commands This mode allows you to use the Model 6517B as an easy replacement for the Model 617 Electrometer The 6517B can use existing programs written for the Model 617 without any code modifications Appendix of the Reference Manual lists the DDC
4. Continuous triggering 2 Control sources Current measurements 6517B 900 01 Rev A Jun 2008 Index Data store Buffer 5 10 Default nodes ss BIER Function settings Restoring iones ea Devic Display Secondary Display reading options External scanning eee 4 22 Features ades Ri eae ilg Configuring Median itta eu pan Fresh readings Front panel summary Tm Function configuration Generating SRQ on buffer full 5 16 G ardi g 33 Handle Handling precautions Humidity measurements Idle gt inm x ead 4 11 IEEE 488 Bus Address selection 5 3 IEEE 488 bus CONNECTIONS upside tr 5 2 Language selection 5 3 Standards sepes p E EPIS 5 2 IEEE 488 bus standards 5 2 Inspection E Instruction manual 4189 Internal scanning 4 21 Keys Index Display H 2 3 FUNCTIO
5. 4 10 Bench default setup 4 12 Control 0 4 12 Serie nu Ds Device action Idle Output trigger Unpacking 1 5 Voltage measurements 3 2 Voltage source eene Basic operation Configuring Connections MSSOUIGO AERE Zero Check esasen dekoten 4 10 4 10 6517B 900 01 Rev Jun 2008 KEITHLEY Service Form Model No Serial No Date Name and Telephone No Company List all control settings describe problem and check boxes that apply to problem Intermittent O Analog output follows display O Particular range or function bad specify O IEEE failure Obvious problem on power up Batteries and fuses OK O Front panel operational Allranges functions are bad Checked all cables Display or output check one Drifts O Unable to zero O Unstable O Will not read applied input Overload O Calibration only O Certificate of calibration required O Datarequired attach any additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether power is turned on or not Also describe signal source Where is the measurement being performed factory controlled l
6. 4 21 Configure internal 4 21 the Stal rne eee 4 21 Close open Channels 4 22 FS TE E E E 4 22 Trigger GOBISCHOIS 4 23 Configure external Channels 4 23 Penonn the Dc 4 23 5 Remote 2 2 222 5 1 go I M 5 2 Ere rt 5 2 gt eR 5 2 Remote REM 5 2 EEE ASE DUS ME 5 2 Ma 5 3 5 m 5 5 zu Ee ogaline 016 12 MR 5 5 Ca COMM Syl ia cade Regu 5 6 SCPI signal oriented commands 5 8 subsystem COMINGS ccce titre tenerte 5 8 dee DR aee io NOE REIR 5 13 Ghanging function and range ceste entrent 5 13 One shol eue Cm 5 14 Continuous triggering 1 5 15 Continuous triggering 2 eccezione nece 5 15 ii 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section Topic Page Generating on buffer full 2 5 16 Storing readings in the 5 17 Taking readings with the scanner 5 18 Test sequence Staircase
7. 5 19 MI P 1 1 6517 900 01 Rev A Jun 2008 Table of Contents Table of Contents Model 6517B Electrometer User s Manual This page left blank intentionally iv 6517B 900 01 Rev A Jun 2008 List of Figures Section Figure Title Page 2 Figure 2 1 Model 65175 front tente 2 2 2 Figure Z2 Model 65178 rear panel nece tei 2 4 3 Figure 3 1 Voltage measurements esses 3 3 3 Figure 3 2 Quent ImasSDEFGITIBEIIS ioci cose tiet eni eiae 3 4 3 Figure 3 3 Resistance measurements eese itin 3 6 3 Figure 3 4 Resistivity 3 9 3 Figure 3 5 Charge 3 10 3 Figure 3 6 External temperature and humidity measurements 3 11 4 Figure 4 1 Main menu 4 5 4 Figure 4 2 Independent V Source 4 8 4 Figure 4 3 FVNMICODDBOIOUS iuit creer leeren bene taken 4 8 4 Figure 4 4 Basic trigger model 4 11 4 Figure 4 5 Advanced trigger model simplified 4 11 4 Figure 4 6 Filter response noise window 4 14 4 Figure 4 7 Combining math calculat
8. Red E j gt zz 1 Black NUT 2 SES Measured if umm 3 oP CHE 1 Green LINE RATING FUSE LINE V SOURCE e 9 4o VAwAX 30 220 315 DIGITAL I O IEEE 488 OPTION SLOT UD RS TRIGGER LINK RS 232 CAUTION CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING Guard Safety Safety Ground 6517B 900 Guarding Guarding should be used for high impedance gt 1080 voltage measurements and for voltage measurements when using long input cables In a high impedance circuit guarding greatly reduces leakage currents When using long input cables guarding cancels the effects of cable capacitance that can significantly slow down the measurement response time When GUARD is enabled the INPUT triax connector is reconfigured to apply the guard potential to the inner shell of the INPUT triax connector With this configuration the COMMON banana jack is used for input low Figure 3 1 shows both the guarded and unguarded configurations for the INPUT connector Perform the following steps to enable or disable guard 1 Press CONFIG and then V to display the volts configuration menu 2 Use the 4 and gt keys to place the cursor blinking menu item on GUARD and press ENTER 3 Place the cursor on the desire
9. Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 4 Measurement Options Running a test After a test is selected configured and connected perform the following steps to run the test 1 2 Press the SEQ key The display message will indicate the selected test Press ENTER to arm the test The blinking SEQ message will be displayed The test will start when the selected control source event occurs Note that if the Immediate control source is selected the test will start as soon as it is armed After the test is armed the TRIG key can be used to start the test regardless of which control source is selected When the test is finished the SEQ display message is removed and the V Source goes into standby Use the RECALL key to read the data from the buffer Use the RANGE keys A and 7 to scroll through the data points Internal scanning The Model 6517B can be used with a scanner card such as the Keithley Instruments Model 6521 or Model 6522 installed in the option slot of the instrument This section provides basic information for scanning internal channels If the scanner card is not already installed refer to the scanner card instruction manual For complete information on scanning internal and external refer to the scanner card instruction manuals The scanner card must be installed in the option slot in order to access the menus to configure and run an in
10. iacentes cette eiui 1 5 Repacking for SHIPMENT 1 6 1 Introduction Section 1 Introduction Overview Model 6517B Electrometer User s Manual This section contains general information about the Keithley Instruments Model 6517B Electrometer If you have any questions after reviewing this information please contact your local Keithley Instruments representative or call one of our applications engineers at 1 888 KEITHLEY 1 888 534 8453 within the U S and Canada You can also contact us through our website at www keithley com Capabilities and features overview The Model 6517B is 612 digit electrometer high resistance test and measurement system with the following measurement capabilities DC voltage measurements from 1uV to 210V DC current measurements from 10aA to 21mA Charge measurements from 10fC to 2 1 Resistance measurements from 100 to 210PQ Surface resistivity measurements Volume resistivity measurements External temperature measurements from 25 to 150 C using the supplied Model 6517 TP thermocouple Relative humidity measurements 0 to 100 using the optional Model 6517 probe additional capabilities of the Model 6517B include Built in V Source The 100V range provides up to 100 at 10mA while the 1000V range provides up to 1000 at 1mA Data storage 50 000 points Single button zeroing REL Built in math function
11. A 13 PRINT r 14 Return to Section Topics 6517B 900 01 Rev A Jun 2008 ACCESSONIGS Addenda manual Additional math operations SO eC URN DAN Annunciators Auto discharge Auto VeSOUICE iced gos Basic 1 Buffer Data Store Cables and adapters Capabilities Changing function and range P Changing functions Charge measurements Close Open channels Common commands Configure external channels Configure internal scanner Configure resolution Configuring filters Configuring rel Configuring speed Configuring V Source Connections Connectors 2V Analog Chassis Ground COMMON n i Digital Guard Humidity IEEE 488 aeu m Preamp OU RS 232 Temp atassiepti usine steaks EIC oec stood iet t pois V Source Hl and LO Continuous triggering 1
12. There are some queries that have no corresponding command For example SENSe1 DATA causes the instrument to return the latest reading Of course there is no corresponding command to send a reading value to the instrument Default nodes SCPI uses the concept of default nodes Consider the example command tree shown previously in Figure 5 2 What is within square brackets is not necessary to send to the instrument but the instrument will accept it if you send it Consider the command which sets the measurement range set the Model 6517B to measure 15VDC any of the following commands works SENSe1 VOLTage DC RANGe UPPer 15 SENSe VOLTage DC RANGe UPPer 15 SENSe1 VOLTage DC RANGe 15 VOLTage RANGe UPPer 15 VOLTage DC RANGe 15 These are shown in long form but short forms could also be used Command syntax Notice in the preceding examples that there is no colon character at the beginning of the commands A leading colon instructs the Model 6517B to interpret the command starting at the root highest level of the command tree Since the Model 6517B also starts at the root each time you send it a new command the leading colon is not needed although the instrument will accept it if you send it You can send multiple commands in a single message Separate the commands with a semicolon character When the Model 6517B encounters a command following a semicolon it attempts to interpret the co
13. EEEE EEEa 4 15 MH 4 15 Section 4 Measurement Options Model 6517B Electrometer User s Manual Topic Page e T 4 16 Selecting and configuring mall efte 4 17 ri V 4 18 Additional math operations iscri 4 18 E60 1s E 4 19 Configuring test sequences 4 19 jog E X 4 20 4 21 menal SCAM MED nn G 4 21 Configure internal SCSPi er iiio assu iced idee rto tet eee riti 4 21 ur dui lc M 4 21 Olose openm ehannele enean sedeo een cee 4 22 mue go MH T 4 22 Trigger connections 4 23 Configure external ehannels nee neither 4 23 MERE 4 23 4 2 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 4 Measurement Options Introduction This section describes the details of taking measurements Configuration options triggers reading storage and scanning are just a few of the topics discussed You will find this information useful whether operating the Model 6517B from the front panel or IEEE 488 bus Multiple displays Each measurement function and some operations provide multiple displays by using the bottom line of the front panel These multiple displays provide multiple type measurements show a reading in a different form or give additional i
14. and gt to place the cursor blinking menu item on MEAS TYPE and press ENTER 6517B 900 01 Rev A Jun 2008 Return to Section Topics 3 7 Section 3 Basic Measurements Model 6517B Electrometer User s Manual c Place the cursor on RESISTIVITY and press ENTER d Cursor position SURFACE or VOLUME menu item blinking indicates the selected measurement type The Model 6517B senses the switch position surface or volume on the Model 8009 through the interlock cable and automatically configures the instrument for that measurement type SURFACE If Surface is the selected measurement type you do not have to proceed any further into the menu structure Use the EXIT key to exit from the menu VOLUME If Volume is the selected measurement type proceed as follows to specify the thickness of the sample With the cursor on VOLUME press ENTER to display the parameters menu for volume Place the cursor on THICKNESS and press ENTER The present thickness parameter for the sample will be displayed 3 Use the cursor keys 4 gt and the RANGE keys A and v7 to specify the thickness in millimeters of the sample and then press ENTER 4 Use the EXIT key to back out of the menu structure 6 Disable zero check by pressing Z CHK 7 Press OPER to source voltage to the DUT and after an appropriate electrification time take a reading from the display Typically an electrification time of 60 seconds is used 8 Place the V Source
15. PD Gn x 100 Where Xisthe normal display reading Y is the user entered reference value PD is the displayed result percent deviation Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 4 Measurement Options Deviation Deviation lt uM Where Xisthe normal display reading Y is the user entered reference value Deviation is the displayed result Ratio Ratio x Y Where is the normal display reading Y is the user entered reference value Ratio is the displayed result Log10 logarithmic logo X Y Where X is the input reading Y is the logarithmic result Selecting and configuring math The procedure to select and configure a math calculation is summarized as follows 1 Press CONFIG and then MATH to display the following math filter menu options NONE Selects no calculation when the MATH key is pressed POLYNOMIAL Selects the polynomial calculation and enters the constants a2 a1 Selects the percent calculation and enters the target value reference 96 DEV Selects the percent deviation calculation DEVIATION Selects the deviation calculation RATIO Selects the ratio calculation LOG10 Selects the logarithmic calculation 2 Use the menu items to select and configure math A menu item is selected by placing the cursor on it and pressing ENTER Parameter values are changed using the cursor keys 4 and th
16. To prevent electrical shock that could cause injury or death NEVER make or break connections to the Model 6517B while the output is on Power off the equipment from the front panel or disconnect the main power cord from the rear of the Model 6517B before handling cables connected to the outputs Putting the equipment in standby mode does not guarantee that the outputs are not powered if a hardware or software fault occurs Test sequences use the force voltage measure current FVMI technique as shown in Figure 4 8 This connection scheme assumes that V Source LO is internally connected to ammeter LO This connection is controlled from the METER CONNECT option of the CONFIGURE V SOURCE menu see V Source Note that Figure 4 8 does not meet the exact connection requirements for all the tests It is only intended to show the general concept More specific connection diagrams are provided in the Reference Manual Figure 4 8 Typical FVMI connections 7078 TRX Cable WARNING NO INTERNAL OPERATOR SERVICAE PREAMP 250000 MAX COMMC 2 Ee 1 VSOURCE XXXXXXK OPTION SLOT 1 DUT t CAUTION For CONTINUED PROTECTION Bre Note Ammeter LO internally connected to V source LO see V Source Shield E H 2 6517B cm 6517B V Source Ammeter LO LO 4 20
17. Usethe EXIT key to back out of the menu structure On the Model 6517B press ENTER to display the next message CONFIG EXT SCANNER set CHAN COUNT to infinite On the Switch System set the channel count to infinite as follows a Press SCAN b Select SELECT CONTROL gt NUMBER OF CHANS gt CHAN COUNT gt INFINITE Note Do not exit from the menu structure after selecting an infinite channel count On the Model 6517B press ENTER to display the next message SELECT TRIG SOURCE and select the appropriate trigger source If using the Trigger Link select TRIGLINK If you are instead using conventional external triggering select EXTERNAL The CONFIG EXT SCANNER message to set channel spacing for the Switch System will then be displayed On the Switch System set channel spacing as follows Note that the message on the Model 6517B tells you which channel spacing option to select a Select CHANNEL SPACING b Select TRIGLINK or EXTERNAL Use the EXIT key to back out of the menu structure On the Model 6517B press ENTER The display will prompt you to define the scan list for the Switch System Use the Switch System to define the scan list On the Model 6517B press ENTER to display CONFIG EXT SCANNER STEP scanner to first channel On the Switch System press STEP to close the first channel in the scan On the Model 6517B press ENTER to display the currently programmed scan count The scan count specifies th
18. 2008 Return to Section Topics 4 3 4 4 Section 4 Measurement Options KEITHLEY PASS IHLIM1 6517B ELECTROMETER HIGH RESISTANCE METER 0 65170 innunin KES 075 332 50x1 me E 507 65178 ELECTROMETER HIGH RESISTANCE METER 075 507 075 525 075 480 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY 000 030 ACTUAL 075 540 without REL 6517B ELECTROMETER HIGH RESISTANCE METER KEITHLEY 10 0000 0 POLY Readings 5 0000 6517B ELECTROMETER HIGH RESISTANCE METER KEITHLEY 0 65170 U RH 50 External Temp 23 0 C 6517B ELECTROMETER HIGH RESISTANCE METER KEITHLEY 0 65170 Change From Cal Temp 03 6 C 6517B ELECTROMETER HIGH RESISTANCE METER Return to Section Topics Model 6517B Electrometer User s Manual Limits This display provides the result of the limit test The graphical representation of the reading is shown on a zero centered bar graph If the reading is between the specified high and low limits the PASS message is displayed If the reading is outside of the limits the FAIL message is displayed Limits are set and enabled from the LIMITS option of the Main Menu Zero centered bar graph The zero centered bar graph is a graphical representation of the reading using plus minus limits with zero in the center Each full segment represents 10 of the limit Maximum and minimum Thi
19. ARM ABORt TYPE name TSOurce lt name gt TLINe lt gt DLEakage STARt lt gt STOP lt gt STEP lt gt MDELay lt NRf gt CLEakage SVOLtage NRf STIMe NRf DTIMe lt gt CIResistance SVOLtage NRf STIMe NRf RVCoefficient SVOLtage 1 lt NRf gt MDELay 1 lt NRf gt SVOLtage2 NRf MDELay2 lt NRf gt SRESistivity 6517B 900 01 Rev A Jun 2008 ABORt and the trigger measure layer commands Take the instrument out of idle ARM indicator on Enable or disable continuous initiation Reset trigger system instrument stays in idle if continuous initiation is disabled off Path to configure the advanced trigger layer Select control source IMMediate TIMer MANual BUS TLINk EXTernal Or HOLD Set timer interval sec 0 001 to 9999999 999 Set delay between measurements sec 0 to 999999 999 Path to configure basic triggering Select basic triggering Specify trigger mode CONTinuous or ONEShot Specify source IMMediate MANual BUS EXTernal Or TIMer Specify timer interval 0 001 to 99999 999 sec TSEQuence subsystem Arms selected test sequence Stops a test sequence in process Specify test DLEakage CLEakage CIResistance RVCoefficient SRESistivity VRESistivity SIResistivity SQSWeep STSWeep Specify trigger source MANual IMMediate BUS TLINk EXTernal LCLosure Specify TLINK line 1 to 6 Diode leakage test path S
20. ELECTROMETER HIGH RESISTANCE METER Print buffer data Menus Maximum reading shown at left Minimum reading Average reading shown at left Standard deviation Measure source This display is used to display the measured current and the V Source level for ohms measurements Buffer When in RECALL there are seven displays for buffer There are two basic menu structures used by the Model 6517B The main menu and the CONFIG menus The main menu accesses items for which there are no dedicated keys The CONFIG menus are used to configure measurement functions and other instrument operations Table 4 2 summarizes main menu selections Table 4 3 and Table 4 4 show configuration settings for the measurement Figure 4 Main me MA functions and instrument operations 4 nu display MENU SAVESETUP COMMUNICATION CAL gt TEST LIMITS STATUS MSG GENERAL Table 4 2 Main menu summary Option Description SAVESETUP COMMUNICATION CAL TEST LIMITS STATUS MSG GENERAL 6517B 900 01 Rev A Jun 2008 Save and restore setups stored in memory set power on defaults and return unit to default conditions Select and configure interface GPIB or RS 232 Calibrate the Model 6517B perform offset adjustments and check calibration date Perform self tests see Reference Manual Configure unit to perform limit tests Enable disable status message mode Control output lines of digital outp
21. If a failure occurs the instrument momentarily displays an error message and turns on the ERR annunciator If the instrument passes the self tests the firmware revision level and bus interface information are displayed For complete information on the power up sequence see Section 2 in the Model 6517B Reference Manual Display As shown in the Model 6517B front panel illustration see Figure 2 1 the front panel has three lines of display information the primary display line the secondary display line and annunciators Primary display line The top line displays readings along with units It can also display measurement type hold math operating type channel number menu headings and messages Status and error messages are listed in Section 2 of the Reference Manual 2 6 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 2 Getting Started Secondary display line The bottom line displays the range V Source value menu items messages and multiple displays see Section 4 Longer text strings are indicated by arrows on either end of the display line Use the cursor keys 4 to display the additional information Bench defaults The Model 6517B can save ten user setups in non volatile memory You can select one of the user setups as the power on default or have the instrument power up to either of the two factory defaults optimized for BENCH or GPIB operation Fo
22. RSWitch USER RSELect lt name gt KSURface NRf KVOLume NRf CHARge ADIScharge LEVel lt gt STATe lt b gt V Source SOURCe VOLTage n RANGe n LIMit AMPLitude STATe lt b gt MCONnect lt b gt CURRent RLIMit STATe LIMit STATe b Data store Buffer TRACe ELEMents name POINtS FEED CONTrol lt name gt DATA lt n gt Model 6517B Electrometer User s Manual Path to configure resistivity Volume Specify sample thickness 0 0001 to 99 9999 mm Select test fixture M8009 or USER Path to query Model 8009 test fixture Query switch setting SURFace or VOLume Path to configure user test fixture Select test type SURFace or VOLume Surface Specify Ks 0 001 to 999 999 Volume Specify Kv 0 001 to 999 999 Path to configure Coulombs Volts commands The same commands as Volts except GUAR apply Path to control auto discharge Set level 2 2e6 to 2 2 6 Enable or disable auto discharge SOURce subsystem Specify V Source level 0 to 1000V Select range lt 100 100V range gt 100 1000V range Path for voltage limit Specify voltage limit 0 to 1000 V Enable or disable limit Enable or disable V Source LO to ammeter LO connection Path for current limit Path to control resistive current limit Enable or disable resistive I limit Path to check current compliance Query
23. be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis 9 a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning servicing Table of Contents Section Topic Page 1 sf ee 1 1 1 2 Capabilities and features 1 2 Options and ecco m 1 3 scies MEM 1 5 Unpacking and rii 1 5 Inspection Tor 1 5 ProcautionS d 1 5 Shipment EI 1 5 DOCUMENTATION 1 5 Repacking Tor saine rene bias 1 6 2 Getting Started
24. by side in a standard 19 inch rack Model 4288 4 Side by side Rack Mount Kit Mounts a Model 6517B and a 5 25 inch instrument side by side in a standard 19 inch rack Probes Model 6517 RH Humidity Probe with Cable This sensor allows the Model 6517B to make relative humidity measurements 0 to 100 Also included is an extension cable part number CA 129 1 Model 6517 TP Thermocouple with Leads This type K thermocouple sensor allows the Model 6517B to make external temperature measurements from 190 to 1350 Scanner cards Model 6521 Low Current Scanner Card This 10 channel low current scanner card is terminated with BNC connectors and plugs into the option slot of the Model 6517B Model 6522 Low Current Low Voltage Scanner Card This 10 channel low current low voltage scanner card is terminated with triax connectors and plugs into the option slot of the Model 6517B Test fixture Model 8009 Resistivity Test Fixture This is a guarded test fixture for measuring volume and surface resistivities can accommodate sheet samples 64 to 102mm 2 1 2 to 4 in in diameter and up to 3 175mm 1 8 in thick Software Model 6524 Hi R Software Package Designed to aid in making more repeatable high resistance resistivity measurements Four windows driven programs increase measurement precision ease download and analysis of Hi R data and allow cross correlation of environmental factors Return to Section Topics 6517B 900
25. cursor keys 4 to place the cursor blinking menu item on AUTO DISCHARGE and press ENTER 3 Perform step a to enable Auto Discharge or perform step b to disable it a Enable Auto Discharge Place the cursor on ON and press ENTER to display the present discharge level Use the cursor keys 4 and the RANGE keys A and to set a different discharge level and press ENTER b Disable Auto Discharge Place the cursor on OFF and press ENTER 4 Use the EXIT key to exit from the menu Figure 3 5 Charge measurements Trax m Red HI Cable S 1250 Measured 1 Q OF Charge Us ot Black LO OPTION SLOT TRIGGE E CAUTION For CONTINUED PROTECTION AGAINST F Input low connected to shield Temperature and humidity measurements The Model 6517B can make external temperature measurements from 25 C to 150 C using the Keithley Instruments Model 6517 TP type K thermocouple which is a supplied accessory Shield Optional The Model 6517B can make relative humidity measurements 0 to 10096 using the Keithley Instruments Model 6517 RH humidity probe which is available as an option Connections The Model 6517 TP thermocouple and Model 6517 RH humidity probe connect to the rear panel connectors labeled TEMP TYPE and HUMIDITY as shown in Figure 3 6 NOTE Keithley Instruments recommends that the thermocou
26. cursor keys 4 and and the RANGE keys A and to change the number 1 to 400 Press ENTER to continue 4 Press EXIT to return to the normal measurement display Procedure B Option slot of Model 6517B empty 1 Press CONFIG and then CARD to display the scanner configuration menu 2 You will then be prompted to enter the number of external inputs channels for the scan Use cursor keys 4 and and the RANGE keys A and J to change the number 1 to 400 3 Press ENTER to return to the normal measurement display Perform the scan Perform the following steps to scan external channels Note that menu items are selected by placing the cursor on it and pressing ENTER A parameter value is changed by using the RANGE keys A and and pressing ENTER 1 Onthe Model 6517B press the CARD key If a scanner card is installed in the option slot of the Model 6517B perform steps a and b If the option slot is empty proceed to step 2 a Place the cursor on PERFORM SCAN and press ENTER to display the scan types internal or external b Place the cursor on EXTERNAL and press ENTER 2 Onthe Switch System if not already done reset the Model 7001 2 as follows a Press MENU 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 23 Section 4 Measurement Options Model 6517B Electrometer User s Manual 10 11 12 13 14 15 4 24 Select SAVESETUP Select RESET Select ENTER Select ENTER f
27. equipment in standby mode does not guarantee that the outputs are not powered if a hardware or software fault occurs Figure 3 3 Resistance measurements Test fixture WARNING NO INTERNAL OPERATOR SERVICAE p PREAMP ME HI Measured ean eme Resistance E LO connected wG to shield 7 OPTION SLOT Shield CAUTION FOR CONTINUED PROTECTION AGAINST F Note V Source low internally connected to electrometer low Auto V Source With Auto V Source selected the V Source is automatically set for either 40V or 400V For the 2MQ through 20090 ranges the V Source is set to 40V For the 2TO through 200TQ ranges 400V test voltage is used With Manual V Source selected you can manually set the voltage level of the V Source Perform the following steps to select the V Source mode for the ohms function 1 Press CONFIG and then R to display the ohms configuration menu 2 Use the 4 and gt keys to place the cursor blinking menu item VSOURCE and press ENTER 3 Place the cursor on AUTO Auto V Source ohms or on MANUAL Manual V Source ohms and press ENTER 4 Usethe EXIT key to back out of the menu Amps Rel Amps Rel is used to cancel leakage current in a test fixture for ohms measurements This procedure assumes that steps 1 through 4 of the Resistance Measurements procedure have been performed Perform the following steps 1 W
28. in standby when finished by again pressing OPER 2 WARNING Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death NEVER make or break connections to the Model 6517B while the output is on Power off the equipment from the front panel or disconnect the main power cord from the rear of the Model 6517B before handling cables connected to the outputs Putting the equipment in standby mode does not guarantee that the outputs are not powered if a hardware or software fault occurs 3 8 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 3 Basic Measurements Figure 3 4 Resistivity measurements Model 8009 A OOO e Warning Connect of fixture to safety earth ground using safety ground wire Interlock Cable Banana Plug Cables LINE RATING FUSE LINE 50 60 100 100 630 120V 315mAT V SOURCE CC e Qu e DIGITAL I O IEEE 488 TRIGGER LINK RS 232 CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING Model 6517B Charge measurements Assuming reset conditions the basic procedure is as follows an OPTION SLOT WZ 1 With zero check enabled ZeroCheck displayed select the co
29. line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category and Measurement Category Il as described in the International Electrotechnical Commission IEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category and must not be directly connected to mains voltage or to voltage sources with high transient over voltages Measurement Category II connections require protection for high transient over voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that
30. not affected by RST CALL SEND 27 stat pres cls status CALL SEND 27 stat meas enab 512 status enable BFL CALL SEND 27 1 status enable MSB RST sets TRIG SOUR to IMM CALL SEND 27 trig coun 3 status CALL SEND 27 arm lay2 sour tim tim 15 status CALL SEND 27 arm lay2 coun 10 status TRACe subsystem is not affected by RST CALL SEND 27 trac poin 30 elem none status CALL SEND 27 trac feed sens1 feed coun next status now the buffer is armed CALL SEND 27 rout scan 1 3 status CALL SEND 27 rout lsel init status Start everything CALL SEND 27 init status Initialize reading while the 6517B is busy taking readings reading SPACES 2500 WaitSRQ IF NOT srq THEN GOTO WaitSRQ CALL SPOLL 27 poll status IF poll AND 64 0 THEN GOTO WaitSRQ CALL SEND 27 form elem read time chan status CALL SEND 27 trac data status CALL ENTER reading length 27 status PRINT readings Test sequence Staircase sweep The following program performs a staircase sweep Using the source voltage measure current FVMI method this test will measure the current through a DUT at eleven voltage steps OV through 10V see Figure 4 3 The eleven readings are stored in the buffer and displayed on the computer CRT at the conclusion of the test Quick Basic 4 5 KPC 488 2 CEC card 6517B 9
31. s Manual Section 4 Measurement Options Test sequences The following information summarizes the built in test sequences of the Model 6517B Detailed information on test sequences can be found in the Reference Manual Configuring test sequences A test sequence is selected and configured from the CONFIGURE SEQUENCE menu as follows 1 2 Press CONFIG and then SEQ to display the sequence configuration menu Place the cursor on APPLICATIONS and press ENTER Select and configure a test from the test sequence menu structure To select a menu item place the cursor on it and press ENTER To change a parameter value use the cursor and RANGE keys A and 7 and press ENTER DEV CHAR Use to select a device characterization test DIODE Diode leakage current test Specify start voltage stop voltage step voltage and delay CAPACITOR leakage current test Specify bias voltage bias time and discharge time CABLE Cable insulation resistance test Specify bias voltage and bias time RESISTOR Resistor voltage coefficient test Specify source 1 voltage delay 1 source 2 voltage and delay 2 RESISTIVITY Use to select a resistivity test SURFACE Surface resistivity test Specify pre discharge time bias voltage bias time measure voltage measure time and discharge time VOLUME Volume resistivity time Specify pre discharge time bias voltage bias time measure voltage measure time and discharge time S
32. the following resolution options 3 5 to 6 54 Select one of these options to set the display resolution b AUTO This option automatically optimizes the resolution for the present integration time speed setting see Section 5 of the Reference Manual 3 Setresolution by placing the cursor on the menu option and pressing ENTER Filter Filtering stabilizes noisy measurements The Model 6517B uses a digital filter and a median filter When a filter is enabled by pressing FILTER FILT annunciator turns on the selected filter for that measurement function is in effect Pressing FILTER a second time disables the filter 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 13 Section 4 Measurement Options Model 6517B Electrometer User s Manual 4 14 Filter types The Model 6517B has two types of digital filters averaging and advanced Both types are a simple average of 1 to 100 reading conversions The difference is a user programmed noise window for the advanced filter The noise window expressed as a percentage of range allows a faster response time to large signal step changes see Figure 4 6 See Section 9 of the Reference Manual for complete information on filter types Figure 4 6 Filter response noise window Input signal Response with the noise window turned shifts when the input signal moves beyond the specified range gt Response with no noise window Limits of the Value displaye
33. voltage level is applied to the output terminals when the instrument is placed in operate by pressing the OPER key In operate the VOLTAGE SOURCE OPERATE indicator is on Pressing OPER a second time places the V Source in standby Configuring V Source Relative Perform the following steps to configure the V Source 1 Press the CONFIG key and one of the VOLTAGE SOURCE keys to display the following configuration menu RANGE Select the 100V range or 1000V range V LIMIT Control on off and set a voltage limit absolute value RESISTIVE LIMIT Control on off the resistive 1 current limit METER CONNECT Control on off the internal connection between V Source LO and ammeter LO 2 Use the menu items to configure the V Source A menu item is selected by placing the cursor on it and pressing ENTER Options for a menu item are selected in the same way Parameter values are changed using the cursor keys 4 gt and the RANGE keys A and and then pressing ENTER 3 Use the EXIT key to back out of the menu structure Rel subtracts a reference value from actual readings When rel is enabled the instrument uses the present reading as a relative value Subsequent readings will be the difference between the actual input value and the rel value Actual Input Reference Displayed Reading The rel relative operation is enabled by pressing the REL key REL annunciator turns on Pressing REL a second time disables
34. 00 01 Rev A Jun 2008 Return to Section Topics 5 19 Section 5 Remote Operation 5 20 SINCLUDE ieeeqgb bi CALL initialize 21 0 CLS CALL send 27 rst status CALL send 27 CLS status CALL spoll 27 KIspoll statu Configure status model to SRQ CALL send 27 stat meas enab CALL SEND 27 sre 1 status Select autoranging amps CALL send 27 SENS FUNC CUR CALL send 27 SENS CURR RANG Configure Staircase Sweep from 0V to 10V in 1 steps Model 6517B Electrometer User s Manual 8 on Buffer Full 512 status R status AUTO ON status CALL send 27 TSEQ TYPE STSW status CALL send 27 TSEQ STSW STAR 0 status CALL send 27 TSEQ STSW STOP 10 status CALL send 27 TSEQ STSW STEP 1 status CALL send 27 TSEQ STSW STIM 0 3 status CALL send 27 TSEQ TSO imm status Wait for commands to complete processing DATA1 SPACES 600 CALL send 27 OPC status CALL enter DATA1 length 27 status Start Test Sequence CALL send 27 TSEQ ARM status Wait for SRQ buffer full WaitSRQ IF NOT srq THEN GOTO WaitSRQ CALL 11 27 poll status If poll AND 64 0 THEN GOTO WaitSRQ Dump buffer readings to computer CALL send 27 TRACE DATA status CALL enter DATA1 length 27 status A 1 FOR I 1 TO 11 r MIDS DATA
35. 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 1 Introduction Specifications Full Model 6517B specifications are included in the Model 6517B Reference Manual Appendix A Check the Keithley Instruments website at www keithley com for the latest updates to the specifications Unpacking and inspection Inspection for damage The Model 6517B was carefully inspected electrically and mechanically before shipment After unpacking all items from the shipping carton check for any obvious signs of physical damage that may have occurred during transit there may be a protective film over the display lens which can be removed Report any damage to the shipping agent immediately Save the original packing carton for possible future shipment Before removing the Model 6517B from the anti static bag observe the following handling precautions Handling precautions Always grasp the Model 6517B by the covers After removing the Model 6517B from its anti static bag inspect it for any obvious signs of physical damage report any such damage to the shipping agent immediately When the Model 6517B is not installed and connected keep the unit in its anti static bag and store it in the original packing carton Shipment contents The following items are included with every Model 6517B order Model 6517B Electrometer with line cord Protective Triax Shield Cap CAP 28 1 e 237 ALG 2 Triax Cable terminated with alligat
36. 2 take current reading CALL SEND 27 func curr dc status CALL SEND 27 rout clos 02 status reading SPACES 80 CALL ENTER reading length 27 status PRINT reading Close channel 3 take ohms reading CALL SEND 27 func res status CALL SEND 27 rout clos 03 status reading SPACES 80 CALL ENTER reading length 27 status PRINT reading The following example program sets up the Model 6517B using a scan list to measure DC voltage on channels 1 2 and 3 The meter takes ten sets of readings with each set spaced 15 seconds apart and each of the three readings in each group taken as fast as possible The Model 6517B Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 5 Remote Operation stores the readings in the buffer and asserts SRQ when the buffer is full The program waits for the SRQ then reads the readings from the buffer Example program to demonstrate using the scan list For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeegb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state set function to DCV CALL SEND 27 rst status Reset STATus subsystem
37. 6517B Electrometer User s Manual PRINT reading Switch to current and take reading CALL SEND 27 func curr dc read statuss reading SPACES 80 CALL ENTER reading length 27 status PRINT reading Switch to 2 wire ohms and take reading CALL SEND 27 func res read status reading SPACES 80 CALL ENTER reading length 27 status PRINT reading One shot triggering Older instruments generally have two types of triggering one shot and continuous In one shot each activation of the selected trigger source causes one reading In continuous the instrument is idle until the trigger source is activated at which time it begins taking readings at a specified rate Typical trigger sources for non SCPI instruments are IEEE 488 talk IEEE 488 Group Execute Trigger GET X command External trigger rear panel BNC Arming the instrument to respond to triggers is implicit in the non SCPI instruments Simply sending a command to a 5 instrument to change any of the trigger controls causes the instrument to arm itself for triggers The SCPI trigger model implemented in the Model 6517B gives you Explicit control over the trigger source the TRIGger subsystem Atwo level control for arming the instrument for triggers Away to completely disable triggers Changing any of the settings in the TRIGger subsystem does not automatically arm the Model 6517B for triggers The followin
38. D integration time autorange on off and so on Example program to demonstrate continuous triggering For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeegb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status RST sets TRIG SOUR to IMM CALL SEND 27 arm lay2 sour ext status CALL SEND 27 trig coun inf status start everything CALL SEND 27 init status After the Model 6517B receives the INITiate command it stops in ARM LAYer2 ofthe trigger model waiting for a pulse on the external trigger jack After the external trigger signal occurs the Model 6517B moves to the TRIGger layer Since TRIGger SOURce is set to IMMediate a reading is triggered immediately with a subsequent reading triggered as soon as the previous one is finished Continuous triggering 2 The following example program sets up the Model 6517B to take readings continuously after an external trigger is received The trigger rate is set to one reading every 50ms Example program to demonstrate continuous triggering at a specified rate For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c N
39. Displays context sensitive information about the present menu level toggles information message on off Voltage source The built in bipolar 1W voltage source can output up to 1000 With the instrument in the normal measurement mode the programmed V Source level is shown on the bottom line of the display Connections WARNING Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death NEVER make or break connections to the Model 6517B while the output is on Power off the equipment from the front panel or disconnect the main power cord from the rear of the Model 6517B before handling cables connected to the outputs Putting the equipment in standby mode does not guarantee that the outputs are not powered if a hardware or software fault occurs If used as an independent source voltage is available at the V SOURCE HI and LO terminals on the rear panel see Figure 4 2 If used as an FVMI force voltage measure current source V Source LO can be internally connected to ammeter LO from the METER CONNECT option of the CONFIGURE V SOURCE menu see Configuring V Source for more information Figure 4 3 shows the connections for this configuration 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 7 Section 4 Measurement Options Figure 4 2 Independent V Source connections LO HI V Source Out RL A Basic Connectio
40. EN GOTO WaitSRQ CALL SEND 27 trac data status CALL ENTER reading length 27 status PRINT reading Taking readings with the scanner card The Model 6521 and Model 6522 are optional 10 channel scanner cards for the Model 6517B Only one channel can be closed at a time If you close a channel while another is already closed the first one opens with break before make operation You can use the scanner card two ways One is to issue a command to close a particular channel before sending other commands to take readings The other way is to program the scan list and let the meter take care of closing a channel before taking a reading The following example program measures voltage on channel 1 amps on channel 2 and resistance on channel 3 using the ROUTe CLOSe command Example program to demonstrate taking readings on different scanner channels For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c qb45 ieeegb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state set function to volts CALL SEND 27 rst status Close channel 1 take voltage reading CALL SEND 27 rout clos 291 status reading SPACES 80 CALL ENTER reading length 27 status PRINT reading Close channel
41. IR Surface insulation resistance test Use to select the SIR test Specify bias voltage bias time measure voltage and measure time SWEEP Use to select a sweep test SQUARE WAVE Square wave sweep test Specify high level voltage time at high level low level voltage time at low level and cycle count STAIRCASE Staircase sweep test Specify start voltage stop voltage step voltage and step time Press EXIT to display the following menu CONFIGURE SEQUENCE Applications Control Place the cursor on CONTROL and press ENTER to display the control sources that can be used to start the test Place the cursor on the desired control source and press ENTER MANUAL Pressing the TRIG key will start the test IMMEDIATE Test will start immediately after it is armed LID CLOSURE Test will start when the lid of the Model 8009 test fixture is closed GPIB Test will start when a bus trigger TRG or GET is received by the Model 6517B 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 19 Section 4 Measurement Options Model 6517B Electrometer User s Manual EXTERNAL Test will start when a trigger pulse via EXT TRIG IN connector is received by the Model 6517B TRIGLINK Test will start when a trigger pulse via TRIG LINK connector is received by the Model 6517B You will also be prompted to select the input line for the trigger Connections WARNING Hazardous voltages may be present on the output and guard terminals
42. IS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE THE REMEDIES PROVIDED HEREIN ARE BUYER S SOLE AND EXCLUSIVE REMEDIES NEITHER KEITHLEY INSTRUMENTS INC NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS INC HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES SUCH EXCLUDED DAMAGES SHALL INCLUDE BUT ARE NOT LIMITED TO COST OF REMOVAL AND INSTALLATION LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON OR DAMAGE TO PROPERTY KEITHLEY A GREATER MEASURE OF CONFIDENCE Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY 1 888 534 8453 www keithley com 3 07 Model 6517B Electrometer User s Manual 2008 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A Document Number 6517B 900 01 Rev Jun 2008 Any unauthorized reproduction photocopy or use the information herein in whole or in part without the prior written approval of Keithley Instruments Inc is strictly prohibited TSP TSP Link and TSP Net are trademarks of Keithley Instruments Inc All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments
43. Inc Other brand names are trademarks or registered trademarks of their respective holders KEITHLEY Safety Precautions The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with non hazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner not specified the protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the
44. LL AND STOP Select ELEMENTS enable disable Select COUNT Select ENTER COUNT enter buffer size If you enabled the TIMESTAMP data element continue on to configure the timestamp Otherwise press EXIT to back out of the menu structure Select TIMESTAMP Select TYPE Select REAL TIME Select FORMAT Select ABSOLUTE n Use the EXIT key to back out of the menu structure 3 Press STORE The presently programmed buffer size number of readings to store is displayed If desired use the cursor keys 4 gt and the RANGE keys A and 7 to change the buffer size incrementing the most significant digit sets the buffer size to maximum 4 Press ENTER to start storing readings The asterisk annunciator turns on to indicate a data storage operation 5 recall stored readings press RECALL Use the RANGE keys A and 57 to scroll through the buffer 3 Z OBAT The MATH key lets you perform math operations on single readings and display the result The six math calculations that are configured from the CONFIGURE MATH menu structure are Polynomial a2 X a1 X a0 Where is normal display reading a2 a1 and a0 are user entered constants Y is the displayed result Percent Input Reading 100 Target Value Percent Where Input Reading is the normal display reading Target Value is a user entered constant Percent is the displayed result Percent Deviation
45. Link connectors for example Model 7001 Switch System The Model 8501 1 is one meter long the Model 8501 2 is two meters long Model 8502 Trigger Link Adapter Allows you to connect the Trigger Link of the Model 6517B to instruments that use the standard BNC In Out external triggering technique Model 8606 High Performance Probe Tip Kit Consists of two spade lugs two alligator clips and two spring hook test probes the spade lugs and alligator clips are rated at 30V RMS 42 4V peak the test probes are rated at 1000V These components are designed to be used with high performance test leads terminated with banana plugs such as the Model 8607 High Performance Banana Cables 6517B 900 01 Rev A Jun 2008 Return to Section Topics 1 3 Section 1 Introduction Model 6517B Electrometer User s Manual Model 8607 High Performance Banana Cables Consists of two high voltage 1000V banana cables The cables are terminated with banana plugs that have retractable sheaths CS 751 Barrel Adapter This is a barrel adapter that allows you to connect two triax cables together Both ends of the adapter are terminated with 3 lug female triax connectors Case and rack mount kits Model 1050 Padded Carrying Case A carrying case for a Model 6517B Includes handles and shoulder strap Model 4299 1 Single Fixed Rack Mount Kit Mounts a single Model 6517B in a standard 19 inch rack Model 4299 2 Side by side Rack Mount Kit Mounts two instruments side
46. N 2 3 Operation sed Range ed Voltage source 2 3 LabView driver eene 5 2 Line power connection 2 6 Line voltage Input module 2 5 Manual addenda 1 3 MEET 4 16 Enabling esso pha TED ERREUR apis 4 18 Selecting and configuring 4 17 Measurement control 442511 Median filter 24 14 4 5 Navigating 4 6 Multiple displays 4 8 4 24 Navigating MENUS 4 6 One shot triggering 5 14 Open close channels and scan 5 10 Option Slot see 2 5 Options Outpt triggel 4 epe punte 4 12 Overview 5 2 Perform the scan 4 21 4 23 Phone number Power switch Power up 5 ep Program examples 5 13 Query commands 5 7 Rack Mount Kits 1 4 Rear panel summary 2 4 Relative 4 9 Remote interfaces see Repacking for shipment Resistance measurements 3 4 Resistivity measur
47. ONFIG Z CHK Set whether readings are shown in Zero Check mode To access the V Source menu press CONFIG and then any one of the VOLTAGE SOURCE keys Navigating menus Use the following rules to navigate through the menu structures Table 4 5 summarizes the front panel keys used for navigation 1 From the instrument s normal state of displaying readings you can View a configuration menu by pressing CONFIG and then the desired function or operation key View the top level of the main menu by pressing the MENU key 2 The unit is returned to the normal reading display by Pressing EXIT or MENU from the top level of the main menu Pressing EXIT from the top level of a configuration menu Pressing a measurement function key from within a menu 3 Pressing the ENTER key selects an item and if further definition is needed moves down within the menu structure Pressing the EXIT key backs up within a menu structure 4 cursor position is denoted by a blinking menu item or parameter The cursor is moved from one item to the next using the cursor keys 4 To select an item highlight it with the cursor then press ENTER 5 displayed arrow 4 or gt on the bottom line indicates there is more information or additional menu items to select from When 4 is displayed use the cursor key The cursor keys have an auto repeat feature 4 6 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B E
48. Trigger armed not in idle asterisk Reading being stored 2 2 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 2 Getting Started 2 FUNCTION KEYS Select measurement function volts V amps 1 resistivity or coulombs Q 3 RANGE KEYS Moves to higher range increments digit Moves to lower range decrements digit AUTO Enables disables autorange 4 HANDLE Pull out and rotate to desired position 5 DISPLAY KEYS PREV NEXT Scroll through multiple displays of a function 6 OPERATION KEYS Z CHK Enables disables zero check enable zero check before changing functions REL Enables disables relative reading FILTER Displays digital filter status for present function and toggles filter on off MATH Displays math calculation and toggles math on off if configured TRIG Triggers unit SEQ Performs selected test sequence and Moves cursor among data entry digits menu selections and information displays INFO Shows context sensitive information about the present display LOCAL Cancels remote operation STORE Enables data storage RECALL Displays reading data reading number time Use PREV NEXT DISPLAY for maximum minimum average standard deviation CONFIG Configures functions and operations MENU Saves restores instrument conditions sets up communications performs calibration and self tests defines limits digital output and other miscellaneous ope
49. User s Manual 6517B 900 01 Rev A June 2008 Equipment An Interworld Highway LLC Company A GREATER MEASURE CONFIDENCE WARRANTY Keithley Instruments Inc warrants this product to be free from defects in material and workmanship for a period of one 1 year from date of shipment Keithley Instruments Inc warrants the following items for 90 days from the date of shipment probes cables software rechargeable batteries diskettes and documentation During the warranty period Keithley Instruments will at its option either repair or replace any product that proves to be defective To exercise this warranty write or call your local Keithley Instruments representative or contact Keithley Instruments headquarters in Cleveland Ohio You will be given prompt assistance and return instructions Send the product transportation prepaid to the indicated service facility Repairs will be made and the product returned transportation prepaid Repaired or replaced products are warranted for the balance of the original warranty period or at least 90 days LIMITATION OF WARRANTY This warranty does not apply to defects resulting from product modification without Keithley Instruments express written consent or misuse of any product or part This warranty also does not apply to fuses software non rechargeable batteries damage from battery leakage or problems arising from normal wear or failure to follow instructions TH
50. a bus trigger GET or TRG is received TrigLink Event detection is satisfied when an input trigger via the trigger link connector is received Not available for basic triggering TIMER Event detection is immediately satisfied on the initial pass through the layer Each subsequent detection is satisfied when the programmed timer interval elapses Not available in the Arm Layer of the advanced trigger model Hold With this selection event detection is not satisfied by any of the above control source events and operation is paused Not available for basic triggering If continuous basic triggering is being used then operation bypasses the control source as shown in Figure 4 4 and performs a device action Device action The primary device action is a measurement However the device action could include a function change and a channel scan if scanner is enabled A channel is scanned closed before a measurement is made When scanning internal channels the previous channel opens and the next channel closes break before make Also included in the device action is the internal settling time delay for the relay Output trigger After each measurement device action an output trigger pulse occurs and is available at the rear panel of the Model 6517B When used with an external scanner each output trigger is used to select the next channel in a scan see External scanning for more information Counters All three layers of
51. aboratory out of doors etc What power line voltage is used Ambient temperature F Relative humidity Other Any additional information If special modifications have been made by the user please describe Be sure to include your name and phone number on this service form Sue USA TEquipment Interworld Highway LLC Company Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITHLEY GIR EAT MEASURE Q CO E Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY www keithley com 12 06
52. al number of readings that can be stored in the buffer depends on how many optional data elements are included for each reading see Section 8 of the Reference Manual The basic data elements include the reading units reading number and status overflow or underflow In addition to these items recalled data also includes statistical information such as minimum maximum average and standard deviation which are part of the NEXT displays see Multiple displays for more information Optional data elements include timestamp humidity external temperature channel number for scanning and the V Source level Storing readings The following procedure to store readings uses a typical data store configuration a user defined number of readings will be stored in the buffer fill and stop All aspects of data store configuration and operation are detailed in Section 8 of the Reference Manual 1 Setup the instrument for the desired measurements function or range 2 Configure the data store as follows A menu item is selected by placing the cursor on it and pressing ENTER Parameters are changed using the RANGE A and 57 pressing ENTER see Menus for more information on navigating through the menu structure a Press CONFIG b Press STORE Select CONTROL 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 15 Section 4 Measurement Options Model 6517B Electrometer User s Manual Math 4 16 Select FI
53. asurements Assuming reset conditions the basic procedure is as follows 1 With zero check enabled ZeroCheck displayed select the volts function by pressing V The Z CHK key is used to enable and disable zero check 2 Enable or disable guard as needed see Guarding for more information Note that with guard enabled ON the message is displayed However if zero correct is already enabled ZCor displayed then Grd will not be displayed 3 To achieve optimum accuracy for low voltage measurements zero correct the Model 6517B To do this use the RANGE 7 key to select the lowest measurement range 2V and press REL With zero correct enabled the REL indicator is on Note that with zero correct enabled the ZCor message is displayed However if guard is already enabled Grd displayed then ZCor will not be displayed 4 Select a measurement range or use autoranging a To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on b For manual ranging use the RANGE A keys to select a measurement range consistent with the expected voltage 5 Connect the test cable s to the voltage to be measured Figure 3 1A shows connections for unguarded measurements and Figure 3 1B shows connections for guarded measurements WARNING Hazardous voltage may be present on the inner shield of
54. aved at memory location 0 send RCL 0 RST reset Returns the instrument to the RST defaults and places the instrument in the idle state ARM indicator off SAV lt gt save Saves the instrument setup to the specified memory location 0 to 9 Example To save the setup to memory location 0 send SAV 0 TRG trigger When a trigger model control source is set for BUS event detection is satisfied by sending this bus trigger For example if instrument operation is waiting at the measure trigger layer control source and it is programmed for BUS events TRG will provide the required event resulting in a device action measurement WAI wait to continue This delay is used to allow the TRG or an initiate command INIT or INIT CONT to finish before processing any further commands An INITiate command is not considered finished until instrument operation returns to the idle state SCPI commands In the Model 6517B you are given access to control settings that are hidden on other instruments Because the instrument has more control points available it requires more commands than its counterparts to perform comparable tasks To accommodate this the instrument incorporates the SCPI command set This introduction to the SCPI command set has three goals Describe the syntax of SCPI commands Included are descriptions of short forms and default nodes which help reduce the amount of data sent to the instrume
55. d user specified with filtering noise window Filter modes There are two filter modes moving or repeating The moving filter uses a first in first out stack When the stack becomes full the measurement conversions are averaged yielding a reading For each subsequent conversion the new conversion is placed into the stack the oldest conversion is discarded and a new reading is averaged For the repeating filter the stack is filled and the conversions are averaged to yield a reading The stack is then cleared and the process starts over See Section 9 of the Reference Manual for complete information on filter modes Median filter Median filtering uses the middlemost reading from a group of sample readings arranged in ascending order For example assume the following readings 20V 1V 3V They are then arranged in ascending order as follows 1V 3V 20V The median middlemost reading from the above sample group is 3V The number of sample readings is determined by the specified rank as follows Sample readings 2 x R 1 Where R is the selected rank 1 to 5 For example a rank of 4 will use the last nine readings to determine the median 2 4 1 9 Each new reading replaces the oldest reading and the median is then determined from updated sample group of readings Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 4 Measurement Options Configuring fi
56. d change the RS 232 interface settings for the Model 6517B The RS 232 settings baud rate data bits parity and stop bits of the Model 6517B must match the RS 232 settings of the communications package for your computer 1 Press MENU to display the MAIN MENU 2 Place the cursor on COMMUNICATION and press ENTER The interface options GPIB and RS 232 will then be displayed 3 Place the cursor on RS 232 and press ENTER to select the RS 232 interface If the GPIB interface was previously selected the unit will exit from the MAIN MENU when you select RS 232 In that event repeat steps 1 2 and 3 to continue in the menu structure 4 Perform the following steps if you wish to check and change the baud rate a Place the cursor on BAUD and press ENTER to display the available baud rates Cursor position indicates the present baud rate setting To retain the present baud rate setting press ENTER or EXIT b To change the baud rate place the cursor on the desired setting and press ENTER 5 Perform the following steps if you wish to check and change the number of data bits a Place the cursor on BITS and press ENTER to display the available number of data bits 7 or 8 Cursor position indicates the present setting To retain the present setting press ENTER or EXIT b the number of data bits place the cursor on the alternate selection and press ENTER 6 Perform the following steps if you wish to check and chang
57. d selection OFF to disable or ON to enable and press ENTER 4 Use the EXIT key to back out of the menu 01 Rev A Jun 2008 Return to Section Topics 3 3 Section 3 Basic Measurements Model 6517B Electrometer User s Manual Current measurements Assuming reset conditions the basic procedure is as follows 1 With zero check enabled ZeroCheck displayed select the amps function by pressing I The Z CHK key is used to enable or disable zero check 2 To achieve optimum accuracy for low current measurements zero correct the Model 6517B To do this use the RANGE key to select the lowest measurement range 20pA and press REL With zero correct enabled the REL indicator is on and the message 2 is displayed 3 Select a measurement range or use autoranging a To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on b For manual ranging use the RANGE A and keys to select a measurement range consistent with the expected current 4 Connect the instrument to the current to be measured as shown in Figure 3 2 CAUTION Do not apply more than 250V peak DC to 60Hz 10 seconds per minute maximum on mA ranges or instrument damage may occur 5 Press Z CHK to disable zero check and take a reading from the display To disable zero correct enable zero check and then press REL Figure 3 2 Cu
58. e RANGE keys A and and then pressing ENTER 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 17 Section 4 Measurement Options Model 6517B Electrometer User s Manual Enabling math The selected math calculation is enabled by simply pressing the MATH key When enabled the MATH annunciator turns on and the calculation type NONE POLY 96 or is displayed Also one of the following messages is briefly displayed Math Enabled Display NONE reading Math Enabled Display POLY reading Math Enabled Display 96 reading Math Enabled Display DEV reading Math Enabled Display DEV reading Math Enabled Display RATIO reading Math Enabled Display LOG10 reading Math is disabled by pressing MATH a second time Additional math operations In addition to the math performed on single readings described above the Model 6517B has these math operations Math performed on buffered readings maximum and minimum values average and standard deviation Math performed on single readings as part of a pass fail limits test Complete information on MATH is provided in Section 9 of the Reference Manual Figure 4 7 Combining math calculations Math Raw Polynomial Percent Value Displayed Percent Deviation Ratio Logarithmic MAX MIN Multiple Displays 4 18 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User
59. e number of scans to be performed To change the scan count use the cursor keys 4 and and the RANGE keys A and Press ENTER to continue On the Model 6517B you will be asked if you wish to use the scan timer The timer is used to provide a time interval between each scan If you select YES enter the interval in seconds You will then be asked if you wish to store the readings in the buffer If you select YES a message indicating the total number of readings to be stored in the buffer will be displayed Press ENTER to continue With the message Press ENTER to begin displayed press ENTER to start the scan process After the scan is completed options to recall readings or repeat the scan will be displayed a RECALL DATA Select this option to recall readings Use the cursor keys and the range keys to scroll through the buffer When finished press EXIT to return to the post scan options SCAN AGAIN Use this option to repeat the scan EXIT Use this option to disable the scan Return to Section Topics 6517B 900 01 Rev A Jun 2008 Section 5 Remote Operation In this section Topic Page gl PO 5 2 SONNIE SUPPO MMC EE 5 2 PEN WE ONET qM 5 2 Remote LSTA P 5 2 EE 5 2 FR gcc 5 3 Common commis etre rhet 5 5 ree Deo te E 5 5 SCPI command
60. e parity a Place the cursor on PARITY and press ENTER to display the parity options NONE ODD or EVEN Cursor position indicates the present setting To retain the present setting press ENTER or EXIT b To change parity place the cursor on the desired selection and press ENTER 7 Perform the following steps if you wish to check and change the number of stop bits a Place the cursor on STOP and press ENTER to display the available number of stop bits 1 or 2 Cursor position indicates the present setting To retain the present setting press ENTER or EXIT b the number of stop bits place the cursor on the alternate selection and press ENTER 8 Use the EXIT key to back out of the menu structure 5 4 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 5 Remote Operation Common commands Common commands are common to all IEEE 488 devices on the bus The following information summarizes the common commands that are used most often For complete details refer to Section 11 of the Reference Manual CLS clear status Clears all event registers and Error Queue After clearing an event register you can monitor the register for a bit to set indicating that an event such as the buffer becoming full has occurred RCL lt gt recall Returns the instrument to the instrument setup saved at the specified memory location Example To recall the setup s
61. e program sets up the Model 6517B to take 20 readings as fast as it can into the buffer then reads the data back after the buffer has filled The readings will be stored with the timestamp and other information but the program reads back only the reading values and timestamp Example program to demonstrate the reading buffer For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c Nqb45Nieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status Reset STATus subsystem not affected by RST CALL SEND 27 stat pres cls status CALL SEND 27 stat meas enab 512 status enable BFL CALL SEND 27 sre 1 status enable MSB CALL SEND 27 trig coun 20 status TRACe subsystem is not affected by RST CALL SEND 27 trac poin 20 elem none status CALL SEND 27 trac feed cont next status Start everything CALL SEND 27 init status Initialize reading while the 6517B is busy taking readings reading SPACES 4000 WaitSRQ 6517B 900 01 Rev A Jun 2008 Return to Section Topics 5 17 Section 5 Remote Operation Model 6517B Electrometer User s Manual IF NOT srq THEN GOTO WaitSRQ CALL SPOLL 27 poll status IF poll AND 64 0 TH
62. efore use the function call The Model 6517B provides a status bit for nearly every operation it performs It can be programmed to assert the IEEE 488 SRQ line whenever a status bit becomes true or false The IEEE 488 controller your computer can examine the state of the SRQ line without performing a serial poll thereby detecting when the 6517B has completed its task without interrupting it in the process The following example program segment sets up the Model 6517B to assert SRQ when the reading buffer has completely filled then arms the reading buffer initiates readings and waits for the Model 6517B to indicate that the buffer is full This is not a complete program Not shown are the commands to configure the trigger model and the reading buffer see the next example The example shown here can be modified for any event in the Model 6517B status reporting system Reset STATus subsystem not affected by RST CALL SEND 27 stat pres cls status CALL SEND 27 stat meas enab 512 status Enable BFL CALL SEND 27 sre 1 status enable MSB CALL SEND 27 trac feed cont next status Start everything CALL SEND 27 init status WaitSRQ IF NOT srq THEN GOTO WaitSRQ CALL SPOLL 27 poll status IF poll AND 64 0 THEN GOTO WaitSRQ Notice that after the program has detected an asserted SRQ line it serial polls the Model 6517B to determine if it is the device reque
63. ements 3 7 Resolution RS 232 interface Configuration Connections SelectiODi igni TS Standard Running a toSt 5 asso a ia iren Model 6517B Electrometer User s Manual Safety symbols and terms 1 5 Scanner cards 1 4 SGPlI comimanidS 5 5 Default nodes 5 7 Long and short form 5 6 QUGIIGS ei dud eub deque 5 7 Syntax 5 6 5 7 Tree structure i i 5 6 SCPI signal oriented commands 5 8 SCPI subsystem commands 5 8 Selecting and configuring a test sequence 4 19 Service form 1 6 Software 1 4 Software 5 2 e 4 13 Status register 5 12 Storing readings 4 15 Storing readings in buffer 5 17 Taking readings with the scanner 5 18 Temperature measurements 3 10 Temperature units fIX ULO ia edes dias Test Sequence staircase sweep 5 19 Test sequences 4 19 5 11 Trigger connections 4 23 Trigger model rit nr 5 11 Triggerinig
64. emperature measurements 8 POWER LINE INPUT MODULE Provides connections for power line input and contains the line fuse If the fuse needs to be replaced refer to the procedure in Section 2 of the Model 6517B Reference Manual 9 IEEE 488 CONNECTOR Connects the Model 6517B to the IEEE 488 GPIB bus Use shielded IEEE 488 cables 10 INTERLOCK Connects the safety interlock to a test fixture using an appropriate cable Interlock is automatically enabled when the appropriate interlock cable is connected to the 6517B Rated at 50 60 Hz 140 VA max The interlock s CS 1305 connector includes four pins left to right as viewed from rear of the 6517B Pin 1 Interlock safe e Pin 2 Ground Pin 3 5 VDC output Pin 4 Surface volume select low volume high surface 11 RS 232 DB 9 connector for the RS 232 interface Use a standard RS 232 cable 12 DIGITAL I O A male DB 9 connector for the four TTL compatible digital output lines 13 TRIGGER LINK An 8 pin micro DIN connector for sending and receiving trigger pulses to and from other instruments 14 V SOURCE HI and LO Safety banana jacks for the voltage source 15 OPTION SLOT An option card such as the Keithley Instruments Model 6521 or Model 6522 scanner card can be installed in this slot 6517B 900 01 Rev A Jun 2008 Return to Section Topics 2 5 Section 2 Getting Started Model 6517B Electrometer User s Manual Power up Line power connection Follow t
65. equests a new calculated reading When CALC1 is enabled SENS DATA FRES is the reading before calculation and CALC DATA FRES is the reading after calculation When CALCI is disabled the readings are the same 5 8 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Function configuration SENSe 1 FUNCtion lt name gt VOLTage DC NPLC lt gt AUTO RANGe UPPer AUTO lt n gt REFerence lt n gt STATe lt b gt ACQuire DIGits lt n gt AUTO lt b gt AVERage TYPE lt name gt TCONtrol lt name gt COUNt lt n gt NTOLerance n STATe lt b gt MEDian RANK lt n STATe GUARd lt b gt n b CURRent DC DAMPing lt b gt RESistance AUTO RANGe UPPer n AUTO lt b gt MANual CRANge UPPer n AUTO lt b gt VSOurce AMPLitude n RANGe OPERate b IREFerence lt b gt DAMPing lt b gt VSControl name MSELect name 6517B 900 01 Rev A Jun 2008 Section 5 Remote Operation SENSe subsystem Select measurement function lt gt VOLTage DC CURRent DC RESistance CHARge Volts function Amps function Ohms function Coulombs function Path to configure volts Set speed 0 01 to 10 PLC Enable or disable auto NPLC Path to configure measurement range Specify expected reading to select ran
66. er the scan is finished the following options are available a Recall data If readings were stored in the buffer select RECALL DATA to display the stored readings Use the RANGE keys A and V to scroll through the data points b Scan again If you wish to repeat the scan s select SCAN AGAIN Press ENTER to start the scan c Exit To return to the normal measurement mode select EXIT Note that stored readings can still be displayed by pressing the RECALL key Close open channels Perform the following steps to open or close a channel on an internal scanner card 1 Press the CARD key to display the internal scanner options close channel or perform scan 2 Place cursor on CHANNEL CLOSURES and press ENTER 3 The following channel closure options are available a Toclose a channel place the cursor on CLOSE CHANNEL and press ENTER Use the RANGE keys A and V display the channel that you wish to close and press ENTER The number of the closed channel will be displayed along with the reading b Toopen all channels on the scanner card place the cursor on OPEN ALL CHANNELS and press ENTER External scanning The Model 6517B can be used with a scanner card installed in an external scanning mainframe for example the Keithley Instruments Model 7001 or 7002 Switch System With the use of external triggering the Model 6517B can measure and store each scanned channel For complete information on scanning internal and
67. external refer to Section 10 of the Reference Manual and the switch system and scanner card instruction manual The following steps assume that the Model 6517B is set to the BENCH reset default conditions and the Model 7001 7002 is set to the RESET default conditions see Restoring bench defaults for more information 4 22 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 4 Measurement Options Trigger connections Connect the Model 6517B to the switch system as shown in Figure 4 9 Detailed information on triggers is provided in Section 7 of the Reference Manual Figure 4 9 Trigger connections using trigger link Model 7001 or 7002 Switch System 6517B Electrometer CAUTION ros commun FUSE WITH SAME TYPE AND RATING Trigger Trigger Link Trigger Link Cable 8501 Link Configure external channels The scanner configuration menu is used to specify the number of channels external inputs for the scan a scanner card is installed in the option slot of the Model 6517B use procedure If the option slot is empty use procedure B Procedure A Scanner installed in option slot of Model 651 7B 1 Press CONFIG and then CARD to display the scanner configuration menu 2 Place the cursor on EXTERNAL and press ENTER 3 You will then be prompted to enter the number of external inputs channels for the scan Use
68. f Input high Chassis ground Guarded guard off 1 INPUT CONNECTOR Unguarded Configuration Disable GUARD for amps ohms coulombs and unguarded voltage measurements Guarded Configuration Enable GUARD for guarded voltage measurements 2 PREAMP OUT Follows the signal amplitude applied to the INPUT terminal With GUARD on PREAMP OUT is connected to the inner shell of the INPUT triax connector to configure the input for guarded voltage measurements Referenced to COMMON See the Model 6517B Reference Manual for more information Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 2 Getting Started 3 COMMON Connector that is internally connected to INPUT low 4 CHASSIS GROUND Attached cable that connects the chassis to ground through the power line cord COMMON can be connected to chassis ground by plugging the cable into COMMON For floating measurements make sure the ground cable connection between COMMON and Chassis Ground is open 5 2V ANALOG OUTPUT Connector provides a scaled 0 to 2V output that is referenced to COMMON It is typically connected to a measuring device such as a chart recorder See the Model 6517B Reference Manual for more information 6 HUMIDITY Connect the optional Keithley Instruments Model 6517 RH probe for relative humidity measurements 7 TEMP TYPEK Connect the Keithley Instruments Model 6517 TP type K thermocouple for t
69. file named INDEX TXT for example in each directory of your computer s hard disk Although the files have the same name they are unique because they are each in a different directory Long and short form commands Every SCPI command has a short form and most also have a long form The notation used in documentation shows the short form in upper case with the remainder of the name which creates the long form shown in lower case There are no intermediate forms of the command name You must send the exact short or long form However you do not have to use the mixed capitalization The Model 6517B accepts commands in any combination of upper and lower case For example all of the following are valid forms of the SENSe1 VOLTage DC REFerence command sensel voltage dc reference state sensl1 volt dc ref stat SENS1 volt DC rEFErENCe STat Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 5 Remote Operation Query commands With few exceptions every SCPI command has a corresponding query A command sets a control point in the instrument a query determines the present setting of the control point The query is simply the command name with a question mark attached Some commands are actions rather than control point settings These commands have no query form For example SENSe1 VOLTage DC REFerence ACQuire is an action command not a setting and so has no query form
70. from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock Ifa 5 screw is present connect it to safety earth ground using the wire recommended in user documentation The symbol on an instrument indicates that the user should refer to the operating instructions located in
71. g program sets up the Model 6517B to take one reading each time it receives an external trigger pulse Example program that demonstrates one shot external triggering For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c Nqb45Nieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status CALL SEND 27 trig sour ext coun inf status start everything CALL SEND 27 init status Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 5 Remote Operation After the Model 6517B receives the INITiate command it stops in the TRIGger layer of the trigger model waiting for a pulse on the external trigger jack Each time a pulse arrives on the external trigger jack the Model 6517B takes one reading Because TRIGger COUNt has been set to INFinity the trigger model never exits from the TRIGger layer You can send the ABORt command to put the trigger model in the idle state disabling triggers until another INITiate command is sent Continuous triggering 1 The following example program sets up the Model 6517B to take readings as fast as it can once it receives an external trigger The actual reading rate will depend upon other factors such as A
72. g the test fixture The following procedure requires reset conditions see Restoring bench defaults for more information 1 With zero check enabled ZeroCheck displayed select the ohms function by pressing R 2 Select Auto V Source ohms In this mode the V Source is automatically set to a voltage nominally 40V or 400V that optimizes measurement accuracy see Auto V Source for more information Note that BENCH reset conditions selects Manual V Source ohms In this mode you must manually set the V Source level for the measurement see Voltage source for more information WARNING Selecting Auto V Source ohms may set the V Source to 400V Hazardous voltages may be present on the output and guard terminals that could cause personal injury or death 3 Select a measurement range or use autoranging a To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on b Formanual ranging use the RANGE keys A and to select a measurement range consistent with the expected resistance 4 Connect the Model 6517B to the Model 8009 test fixture as shown in Figure 3 4 and set the switch on the test fixture to the desired measurement type Surface or Volume 5 Select the resistivity measurement mode as follows a Press the CONFIG and then R to display the ohms configuration menu b Use the cursor keys
73. ge Enable or disable auto range Specify reference rel 210 to 210 Enable or disable reference rel Use input signal as reference rel Specify measurement resolution Enable or disable auto resolution Path to control digital filter Select filter NONE SCALar or ADVanced Select averaging method REPeat or 1 Specify filter count 1 to 100 Path to configure advanced filter Specify noise tolerance 0 to 100 Enable or disable digital filter Path to control median filter Specify rank for filter 1 to 5 Enable or disable median filter Enable or disable guard Path to configure Amps Volts commands The same commands as Volts except GUAR apply Enable or disable damping Path to configure Ohms Volts commands The same commands as Volts except GUAR apply Path to configure Auto V Source Ohms Path to set measurement range Select range 0 to 100e18 Enable or disable auto range Path to configure Manual V Source Ohms Path to set measurement range Select range 0 to 100e18 Enable or disable auto range Path to control the V Source Specify V Source level 0 to 1000 Set range lt 100 100V range gt 100 1000V range Enable or disable V Source output Enable or disable amps reference Enable or disable damping Select ohms V Source mode MANua1l or AUTO Select ohms type NORMa1 or RESistivity Return to Section Topics Section 5 Remote Operation RESistivity STHickness FSELect M8009
74. hat the measurement is enabled 5 change the control state for temperature and humidity place the cursor on the appropriate menu item and use the the RANGE keys A and to toggle the control state With the desired states for temperature and humidity displayed ON or OFF press ENTER 6 Use the EXIT key to back out of the menu Temperature units All temperature readings by the Model 6517B can be displayed in Celsius C Fahrenheit F or Kelvin BENCH reset selects Celsius measurement units Perform the following steps to change units 1 Press MENU to display the main menu 2 Use the cursor keys 4 and to place the cursor blinking menu item on GENERAL and press ENTER to display the menu items of the general menu 3 Place the cursor on DISPLAY and press ENTER to display the SET READING DISPLAY menu 4 Placethe cursor on TEMP UNITS and press ENTER The blinking cursor indicates the present temperature units selection 5 To change temperature units place the cursor on the desired selection or F and press ENTER 6 Use the EXIT key to back out of the menu 6517B 900 01 Rev A Jun 2008 Return to Section Topics 3 11 Section 3 Basic Measurements Model 6517B Electrometer User s Manual Display reading options Temperature and humidity readings are available as multiple NEXT displays Using multiple displays temperature and humidity readings can accompany each normal A D meas
75. hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000V no conductive part of the circuit may be exposed Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use 11 07 When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power
76. he procedure below to connect the Model 6517B to line power and turn on the instrument CAUTION Operating the instrument on an incorrect line voltage may cause damage to the instrument possibly voiding the warranty 1 Before plugging in the power cord make sure that the front panel power switch is in the off O position Be sure that line input voltage is set to the correct range for the power supply being used to power the Model 6517B NOTE Line voltage is pre set at the factory but may be reset in the field by adjusting the voltage selector behind the left ear To access the voltage selector first remove the handle then remove the left mounting ear The current voltage setting is the marking closest to the small circle 2 Connect the female end of the supplied power cord to the AC receptacle on the rear panel Connect the other end of the power cord to a grounded AC outlet WARNING The power cord supplied with the Model 6517B contains a separate ground wire for use with grounded outlets When proper connections are made instrument chassis is connected to power line ground through the ground wire in the power cord Failure to use a grounded outlet may result in personal injury or death due to electric shock Power up procedure 1 Turn on the instrument by pressing the front panel power switch to the on position 2 During power up the Model 6517B performs self tests on its memory elements
77. iguring speed Each measurement function can have a unique integration time Speed is set from the configure function menu structures The procedure is summarized as follows 1 Press the CONFIG key and then the desired function key 2 Use the cursor keys to select SPEED and press ENTER to display the following speed options NORMAL Sets the integration time to 1 PLC FAST Sets the integration time to 0 01 PLC MEDIUM Sets the integration time to 0 1 PLC HIACCURACY Sets the integration time to 10 PLC SET SPEED EXACTLY This options prompts you to enter a PLC value 0 01 to 10 SET BY RESOLUTION Automatically optimizes the integration time for the present resolution setting see Section 4 of the Reference Manual 3 Use the menu items to configure speed A menu item is selected by placing the cursor blinking menu item on it and pressing ENTER Parameter values are changed using the cursor keys and the RANGE keys and then pressing ENTER see Menus for more information on navigating through the menu structure For more information see Section 4 of the Reference Manual Resolution All functions can operate from to 6 2 digits of resolution Each function can have a unique resolution setting Configuring resolution Perform the following steps to set resolution for a measurement function 1 Press the CONFIG key and then the desired function key 2 Using the cursor keys select RESOLUTION and press ENTER to display
78. ing MEASure function In general this command places the instrument in the one shot measurement mode ARM indicator off triggers a single measurement and then performs a FETCh command If you include the measurement function with this command the instrument will first go to the specified function and then perform the one shot measurement and query as follows MEASure Currently selected function MEASure VOLTage DC Volts function MEASure CURRent DC Amps function MEASure RESistance Ohms function MEASure CHARge Coulombs function SCPI subsystem commands Detailed information on all SCPI commands is covered in Section 14 of the Reference manual In this section only the commands used for basic operation are summarized Defaults SYSTem SYSTem subsystem PREset Set the 6517B to the system preset defaults Some of the selected defaults include volts continuous triggers normal speed 1 0 PLC and auto range POSetup lt name gt Select power setups RST PRESet or SAVO through SAV9 Instrument will power up to the RST or system present defaults or one of the SAVO SAV9 setups Fresh readings SENSe 11 SENSe subsystem DATA FRESh Requests a new reading This command will not request the same reading twice If a new reading has already been triggered this command will wait until the new reading is available CALCulate 1 CALCulate subsystem DATA FRESH R
79. ions eene 4 18 4 Figure 4 8 Typical FVMI 4 20 4 Figure 4 9 Trigger connections using trigger 4 23 5 Figure 5 1 IEEE 49B 5 creek nan ea 5 3 5 Figure 5 2 Hierarchy of the example SENSe1 commands 5 6 List of Figures vi This page left blank intentionally Model 6517B Electrometer User s Manual 6517B 900 01 Rev A Jun 2008 List of Tables Section Table Title Page 4 Table 4 1 Multiple displays by 4 3 4 Table 4 2 Main menu summary eee iin 4 5 4 Table 4 3 Configuration settings for each measurement function 4 6 4 Table 4 4 Configuration settings for instrument operations 4 6 4 4 5 Menu SUITE iier deterrere ex tere Decree 4 7 List of Tables Model 6517B Electrometer User s Manual This page left blank intentionally viii 6517B 900 01 Rev A Jun 2008 In this section Topic Page 8 c lp Mo 1 2 Capabilities and features overview 1 2 Options and 1 3 aciei ello MM 1 5 Uripsicking n tern Rae 1 5 Inspection for damage creer 1 5 KHanding Precautions sm 1 5 Shipment
80. ith the V Source in standby remove the DUT from the test fixture 2 Select the Amps function and disable zero check Make sure REL is disabled 3 6 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 3 Basic Measurements 3 Place the V Source in operate by pressing OPER The VOLTAGE SOURCE OPERATE indicator is on when in operate 4 Select the lowest possible measurement range to display the leakage current in the test fixture 5 Enable relative REL annunciator on by pressing REL This zeroes the display canceling the leakage current reading 6 Press OPER to place the V Source in standby and enable zero check 7 Perform the following steps to establish the amps Rel value for the ohms function a Press CONFIG and then R to display the ohms configuration menu b Use the 4 and gt keys place the cursor blinking menu item on AMPSREL and press ENTER c Place the cursor on YES and press ENTER to use the amps Rel value for the ohms measurement d Use the EXIT key to back out of the menu 8 Re install the DUT in the test fixture 9 Select the ohms R function and proceed to step 5 of the Resistance Measurement procedure Resistivity measurements NOTE following procedure to measure resistivity surface or volume requires the use of the Keithley Instruments Model 8009 Resistivity Test Fixture Refer to the Model 8009 Instruction Manual for details on usin
81. lace the cursor on LANGUAGE and press ENTER to display the language options SCPI or Cursor position indicates the present language mode b Place the cursor on the desired language and press ENTER Changing the language mode causes the unit to exit from the MAIN MENU If you did not change the language then use the EXIT key to back out of the menu structure RS 232 interface RS 232 standard For remote operation the Model 6517B can use the RS 232 serial port for communication between instrumentation and the controller computer All commands except DDCs can be used over this serial port The serial port is based on the electrical and mechanical characteristics of the RS 232 C standard 6517B 900 01 Rev A Jun 2008 Return to Section Topics 5 3 Section 5 Remote Operation Model 6517B Electrometer User s Manual RS 232 connections The RS 232 serial port of the Model 6517B can be connected to the serial port of a computer using a standard straight through not null modem RS 232 cable terminated with DB 9 connectors The serial port is located on the rear panel of the Model 6517B and is labeled RS232 If your computer uses a DB 25 connector for the RS 232 interface you will need a cable or an adapter with a DB 25 connector on one end and a DB 9 connector on the other end Again make sure you use a straight through not null modem cable Interface selection and configuration Perform steps below to select check an
82. lectrometer User s Manual 6 Anumeric parameter is keyed in by placing the cursor on the digit to be changed and pressing the RANGE keys A and to increment or decrement the digit Section 4 Measurement Options 7 Achange is only executed when the ENTER key is pressed Entering an invalid parameter generates an error and the entry is ignored Changes are also ignored if an EXIT is performed 8 The INFO key can be used anywhere in a menu to display helpful information messages concerning operation To cancel an information message and remain in the menu press INFO a second time EXIT or ENTER Pressing a function key cancels INFO and the menu and returns the instrument to a reading display Table 4 5 Menu summary Action CONFIG function MENU RANGE A RANGE ENTER EXIT INFO Description Press the CONFIG key then a function key for example V to view the top level of a function configuration menu Press the MENU key to view the top level of the main menu the operations that have no corresponding key are included in the main menu Use the cursor keys to move the highlighted cursor among menu selections or the digits of a parameter value or change channels on the scanner Use the RANGE keys to increment and decrement digits of a parameter value Accepts menu selection or data entry Cancels menu selection changes and returns to the display of the previous menu level
83. lters Each measurement function has its own filter configuration Perform the following steps to configure filter 1 Select the measurement function 2 Press CONFIG and then FILTER to display the following menu items AVERAGING This item is used to control and configure the digital filter MEDIAN This item is used to control and configure the median filter 3 The menu structure for the two filters averaging and median is shown as follows a AVERAGING digital filter options TYPE is used to select the digital filter type NONE Disables the digital filter AVERAGING Selects the averaging filter and prompts you to enter the number of readings to average stack size ADVANCED Selects the advanced filter and prompts you to enter the number of readings to average stack size after entering the stack size you are then prompted to enter the noise tolerance level 0 to 100 AVERAGING MODE is used to select the filter mode either MOVING or REPEAT b MEDIAN filter options DISABLE Disables the median filter ENABLE Enables the median filter and prompts you to enter the range 1 to 5 4 Usethe menu items to configure a filter A menu item is selected by placing the cursor on it and pressing ENTER Parameter values are changed using the cursor keys 4 and gt and the RANGE A and keys and then pressing ENTER Buffer data store The Model 6517B has a buffer that can store from one to 15 706 readings The actu
84. maximum value to measure The instrument interprets this parameter and goes to the appropriate range When you query the range with RANGe the instrument sends back the full scale value of its present range The following example program illustrates changing function and range It sets the range for several functions then takes readings on each of those functions Note that the Model 6517B rounds the range parameter to an integer before choosing the appropriate range Sending VOLTage DC RANGe 20 45 will set the Model 6517B to the 20V range Example program that demonstrates changing function and range taking readings on various functions For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer SINCLUDE c Nqb45Nieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 the SENSel subsystem settings along with the trigger model each READ will cause one trigger CALL SEND 27 rst status Set range for each function to measure CALL SEND 27 volt dc rang 10 status CALL SEND 27 curr dc rang 0 003 status CALL SEND 27 res rang 10e6 status Switch to volts and take reading CALL SEND 27 func volt dc read status reading SPACES 80 CALL ENTER reading length 27 status 6517B 900 01 Rev A Jun 2008 Return to Section Topics 5 13 Section 5 Remote Operation Model
85. mmand starting at the level of the previous command unless you precede the second command with a colon For example either of the following command strings programs the Model 6517B to the 20V range and uses 5 as a relative value with the REFerence commands volt dc rang 20 ref 5 ref stat on volt dc rang 20 volt dc ref 5 volt dc ref stat on The two command strings are treated identically by the Model 6517B In the first string when the instrument encounters ref 5 it notices the following Itis the first command in the string There is no leading colon on the command The previous command was at the VOLTage DC level Therefore it interprets the command as if it were at the VOL Tage DC level 6517B 900 01 Rev A Jun 2008 Return to Section Topics 5 7 Section 5 Remote Operation Model 6517B Electrometer User s Manual SCPI signal oriented commands Signal oriented commands are used to acquire readings using a set of high level instructions to control the measurement process The two most commonly used commands are FETCh and MEASure Details on all signal oriented commands are covered in Section 14 of the Reference Manual FETCh This query command is used to request the latest post processed reading After sending this command and addressing the Model 6517B to talk the reading will be sent to the computer This command does not trigger a measurement it simply requests the last available read
86. nformation about the reading Multiple displays are summarized in this section All the multiple displays are shown in Table 4 1 The NEXT and PREV previous DISPLAY keys scroll through the multiple displays for the selected function or operation The multiple display mode can be cancelled by pressing and holding in either key Table 4 1 Multiple displays by function Function Next display All Time day and date Bar graph Zero centered bar graph Maximum and minimum values Relative and actual values Calculated and actual values Limits bar graph Relative humidity and external temperature Change from calibration temperature Ohms R Source V and measure values Buffer Relative humidity and external temperature V Source value maximum reading minimum reading average reading standard deviation and print buffer data KEITHLEY Time day and date This display provides the time day of 075 258 WV week and the date The time date and format 12 hour 24 hour are set from the CLOCK option of the GENERAL MENU 08 93 69 Non 12007 see Menus for more information 6517B ELECTROMETER HIGH RESISTANCE METER Bar graph The bar graph is a graphical representation of the 075 258 reading with zero the left end Each full segment of the bar Mr 1200 represents approximately 4 of the range limit 6517B ELECTROMETER HIGH RESISTANCE METER 6517B 900 01 Rev A Jun
87. ns V Source HI RL B Equivalent Circuit Figure 4 3 FVMI connections HI V SOURCE 250V OUT Note V SOURCE LO connected to ammeter input LO via METER CONNECT option of CONFIGURE V SOURCE Menu Ammeter V Source LO 4 8 Return to Section Topics Model 6517B Electrometer User s Manual 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 4 Measurement Options Basic operation Basic operation simply consists of setting the V Source level and placing the V Source in OPERATE to output the voltage Other V Source operations are performed from the CONFIGURE V SOURCE menu see Configuring V Source for more information to select range 100V or 1000V set voltage limit select resistance current limit and control the LO to LO connection between the V Source and the ammeter Setting V Source level The V Source level is set with the instrument in the normal measurement mode The VOLTAGE SOURCE A keys and the cursor keys 4 and gt are used to adjust the voltage level Pressing any one of these four keys will enable the V Source edit mode The flashing digit on the V Source display indicates the cursor position Use the cursor keys to place the cursor on the desired digit and use the VOLTAGE SOURCE A keys to adjust the level Polarity can be changed by placing the cursor on the polarity sign and pressing VOLTAGE SOURCE A and y Sourcing voltage The displayed
88. nt Provide some simple programs to perform commonly used tasks Describe the SCPI commands used in the example programs so you can modify the programs to suit your needs 6517B 900 01 Rev A Jun 2008 Return to Section Topics 5 5 Section 5 Remote Operation Model 6517B Electrometer User s Manual 5 6 SCPI command syntax Tree structure SCPI commands are organized in a tree structure similar to disk directories in computer operating Systems Each subdirectory is called a subsystem For example part of the SENSe1 subsystem is listed below and shown in Figure 5 2 SENSe 1 DATA FUNCtion lt name gt VOLTage DC RANGE UPPer lt gt AUTO lt Boolean gt ONCE REFerence n STATe Boolean ACQuire Figure 5 2 Hierarchy of the example SENSe1 commands SENSe1 FUNCtion VOLTage command summary table is way documenting SCPI commands but it does show complete command names A complete command is formed by joining the components For example the complete STATe command in the example is SENSe1 VOLTage DC REFerence STATe Note that square brackets are not part of the command they indicate optional parts of the command This hierarchical approach permits the same command to be used many times For example many subsystems contain a STATe command but each one is unique because the complete command is unique This is analogous to having a
89. or This is a 3 lug female triax bulkhead connector with cap for assembly of custom panels and interface connections Suitable for use with the Model 6517B V Source in high voltage applications Model 6517B ILC 3 Interlock Cable This is a 3 meter 6 6 ft cable terminated with a 4 pin Phoenix connector on one end and a 4 pin Switchcraft connector on the other end Model 7078 TRX BNC Adapter This is a 3 slot male triax to female BNC adapter This adapter lets you connect a BNC cable to the triax input of the Model 6517B Suitable for use with the Model 6517B in high voltage applications Models 7078 TRX 3 7078 TRX 10 and 7078 TRX 20 Triax Cables These are low noise triax cables terminated at both ends with 3 slot male triax connectors The Model 7078 TRX 3 is 3ftft 0 9m in length the Model 7078 TRX 10 is 10ft 3m in length and the Model 7078 TRX 20 is 20ft 6m in length Model 7078 TRX TBC Connector This is a 3 lug female triax bulkhead connector with cap for assembly of custom panels and interface connections Suitable for use with the Model 6517B V Source in high voltage applications Models 7007 1 and 7007 2 Shielded IEEE 488 Cables Connect the Model 6517B to the IEEE 488 bus using shielded cables and connectors to reduce electromagnetic interference EMI The Model 7007 1 is one meter long the Model 7007 2 is two meters long Models 8501 1 and 8501 2 Trigger Link Cables Connect the Model 6517B to other instruments with Trigger
90. or clips on one end Accessories as ordered Certificate of calibration e CD containing complete documentation and required software Documentation A CD ROM containing this User s Manual a Reference Manual and required software is included with each Model 6517B Check the Keithley Instruments website at www keithley com for the latest versions of the manuals The latest manuals can be downloaded in PDF format from the website 6517B 900 01 Rev A Jun 2008 Return to Section Topics 1 5 Section 1 Introduction Model 6517B Electrometer User s Manual Repacking for shipment Should it become necessary to return the Model 6517B for repair carefully pack the unit in its original packing carton or the equivalent and follow these instructions e Call the repair department toll free 1 888 KEITHLEY 1 888 534 8453 within the U S and Canada to obtain a Return Material Authorization RMA number as to the warranty status of the Model 6517B Write ATTENTION REPAIR DEPARTMENT and the RMA number on the shipping label Complete and include the Service Form located at the back of this manual 1 6 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Section 2 Getting Started In this section Topic Page C 2 2 Front and rear panel 2 2 Front panel enr t rre erbe re tri ERES 2 2 Rear panel P 2 4 ue P
91. pecify start voltage 1000 to 1000 Specify stop voltage 1000 to 1000 Specify step voltage 1000 to 1000 Specify measure delay 0 to 99999 9s Capacitor leakage test path Specify bias voltage 1000 to 1000 Specify bias time 0 to 99999 9s Specify discharge time 0 to 9999 9s Cable insulation resistance test path Specify bias voltage 1000 to 1000 Specify bias time 0 to 99999 95 Resistor voltage coefficient test path Specify source voltage 1 1000 to 1000 Specify measure delay 1 0 to 99999 0s Specify source voltage 2 1000 to 1000 Specify measure delay 2 0 to 99999 9s Surface resistivity test path Return to Section Topics 5 11 Section 5 Remote Operation PDTime lt NRf gt SVOLtage NRf STIMe lt gt MVOLtage NRf MTIMe lt gt DTIMe lt gt VRESistivity PDTime lt NRf gt SVOLtage NRf STIMe lt gt MVOLtage NRf MTIMe lt gt DTIMe lt gt SIResistance SVOLtage NRf STIMe lt gt MVOLtage lt NRf gt lt gt SQSWeep EVel NRf TIMe lt NRf gt EVel NRf lt NRf gt OUNt NRf STSWeep lt NRf gt TOP lt NRf gt lt NRf gt TIMe lt NRf gt E 5 S S S Status register Model 6517B Electrometer User s Manual Specify pre discharge time 0 to 99999 9s Specify bias voltage 1000 to 1000 Specify bias time 0 to 99999 9 Specify measu
92. ple junction of the Model 6517 TP be electrically insulated from ground and voltage potentials Erroneous readings will result if the thermocouple comes in contact with ground or a voltage potential 3 10 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 3 Basic Measurements Figure 3 6 External temperature and humidity measurements Model 6517 RH Humidity Probe COMMON 2VOUT NO T IVDC MAX HUMIDITY RVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY MI INTERLOCK sy 9 9 _ LINE RATING FUSE e CE eMe 221 lr 100 VA MAX 315mAT DIGITAL IEEE 488 20 RIGGER LINK RS 232 Model 6517 TP Thermocouple AINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING 6517B Measurement control BENCH reset disables temperature and humidity measurements These measurements can be enabled from the front panel as follows 1 Press MENU to display the main menu 2 Use the cursor keys 4 and gt to place the cursor blinking menu item on GENERAL and press ENTER to display the menu items of the general menu 3 Place the cursor on A D CONTROLS and press ENTER to display the A D controls menu 4 Placethe cursor on DATA STAMP and press ENTER The present control state for temperature and humidity will be displayed OFF indicates that the measurement is disabled while ON indicates t
93. qb45Nieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status 6517B 900 01 Rev A Jun 2008 Return to Section Topics 5 15 Section 5 Remote Operation Model 6517B Electrometer User s Manual RST sets TRIG SOUR to IMM CALL SEND 27 arm lay2 sour ext status CALL SEND 27 trig coun inf sour tim tim 05 status start everything CALL SEND 27 init status After the Model 6517B receives the INITiate command it stops in ARM LAYer2 of the trigger model waiting for a pulse on the external trigger jack After the external trigger signal occurs the Model 6517B moves to the TRIGger layer Since TRIGger SOURce is set to TIMer a reading is triggered immediately with a subsequent reading every 50ms Because TRIGger COUNt has been set to infinity the trigger model never exits from the TRIGger layer Generating SRQ on buffer full When your program must wait until the Model 6517B has completed an operation it is more efficient to program the Model 6517B to assert the IEEE 488 SRQ line when it is finished rather than repeatedly serial polling the instrument An IEEE 488 controller will typically address then unaddress the instrument to talk each time it performs a serial poll Repeated polling of the Model 6517B will generally reduce its overall reading throughput Ther
94. r When an event register is read a decimal value is sent to the computer The binary equivalent determines which bits in the register are set For example a decimal value of 33 indicates that bits BO and B5 are set An event register is cleared when it is read Sending CLS clears all event registers Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 5 Remote Operation Some of the more useful bits of these event registers are summarized as follows Measurement event register Operation event register Bit set reading overflow Bit B9 set calculating Bit B5 set reading available Bit B10 set idle Bit B7 set buffer available Bit B11 set sequence test running Bit B8 set buffer half full Bit B9 set buffer full Bit B14 set V source compliance Program examples All examples presume QuickBASIC version 4 5 or higher and a Keithley Instruments KPC 488 2 CEC IEEE 488 interface card with CEC driver version 2 11 or higher with the Model 6517B at address 27 on the IEEE 488 bus Changing function and range The Model 6517B has independent controls for each of its measurement functions This means for example that autorange can be turned on for volts while leaving it off for amps Another difference is in the range command parameter In older instruments a single number was used to denote each range The parameter of the SCPI RANGe command is given as the
95. r more information on saving and restoring user setups see Section 2 in the Model 6517B Reference Manual Restoring bench defaults Since the basic measurement procedures in this manual assume the BENCH defaults reset the instrument from the SAVESETUP item of the MAIN MENU by performing the following steps 1 Press the MENU key to display the main menu MAIN MENU SAVESETUP COMMUNICATION CAL TEST LIMITS STATUS MSG GENERAL 2 If the SAVESETUP option is not blinking press the 4 key until it is blinking and then press ENTER to view the setup menu SETUP MENU SAVE RESTORE POWERON RESET 3 Select the RESET option using the cursor keys 4 and press ENTER to view the reset menu RESET ORIGINAL DFLTS BENCH GPIB 4 Select the BENCH option using the cursor keys 4 and press ENTER The following message is displayed RESETTING INSTRUMENT Press ENTER to confirm EXIT to abort 5 Press ENTER to confirm The display will go to the volts function with zero check enabled and auto range disabled Function default settings Other BENCH default settings for each function include Triggers Continuous measurements Measurement speed integration time Normal 1 power line cycle Digital filter Enabled averaging 10 readings Median filter Enabled rank 1 Display resolution 5 digits See Menus for more information 6517B 900 01 Rev A Jun 2008 Return to Section Topics 2 7 Section 2 Getting Sta
96. rations EXIT Cancels selection moves back within menu structure ENTER Holds reading enters selection moves down within menu structure 7 VOLTAGE SOURCE KEYS OPER Toggles V source between operate and standby A and V Adjusts V source value 8 VOLTAGE SOURCE OPERATE Indicator light is on when in operation off in standby 9 OPTION CARD KEY Use to program and operate an optional feature Also use to view external scanner channels 6517B 900 01 Rev A Jun 2008 Return to Section Topics 2 3 Section 2 Getting Started Model 6517B Electrometer User s Manual 2 4 Rear panel summary The rear panel of the Model 6517B is shown in Figure 2 2 The descriptions of the rear panel components follow Figure 2 2 Figure 2 2 Model 6517B rear panel 1 2 34 5 6 7 WARNING INTERNAL QPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY PREAMP Pc 2vour pur INTERLOCK L HI KEITHLEY MADE IN e e 777 U S A 1 gus LINE RATING FUSE V SOURCE 58 50 60 1007 CC e 100 VAMAx 630 320v 315mAT DIGITAL I O IEEE 488 25 d LP TRIGGER LINK RS 432 BAR CODE KX KX KKK OPTION SLOT e CAUTION HOR CONTINUED PROTECTION AGAINST FIRE HAZARD FUSE WITH SAME TYPE AND RATING 13 12 11 10 9 Input high Input low Chassis ground Unguarded guard of
97. re voltage 1000 to 1000 Specify measure time 0 to 99999 9s Specify discharge time 0 to 99999 9s Volume resistivity test path Specify pre discharge time 0 to 99999 9s Specify bias voltage 1000 to 1000 Specify bias time 0 to 99999 9s Specify measure voltage 1000 to 1000 Specify measure time 0 to 99999 9s Specify discharge time 0 to 99999 9s Surface insulation resistance test path Specify bias voltage 1000 to 1000 Specify bias time 0 to 99999 9s Specify measure voltage 1000 to 1000 Specify measure time 0 to 99999 9s Square wave sweep test path Specify high level voltage 1000 to 1000 Specify high level time 0 to 99999 9s Specify low level voltage 1000 to 1000 Specify low level time 0 to 99999 9s Specify number cycles Staircase sweep test path Specify start voltage 1000 to 1000 Specify stop voltage 1000 to 1000 Specify step voltage 1000 to 1000 Specify step time 0 to 99999 9s The status register structure of the Model 6517B lets you monitor and act upon numerous events that occur Many programming decisions can be made by monitoring the measurement event register and the operation event register See Section 14 of the User s Manual for details of the status registers STATUS MEASurement EVENCt OPERation EVENt STATus subsystem Path for measurement status registers Use to read the measurement event register Path for operation status registers Use to read the operation event registe
98. rel You can also enter and enable a rel value from the CONFIG REL display A rel value can be established for each measurement function The state and value of rel for each measurement function are saved when changing functions Once a rel value is established for a measurement function the value is the same for all ranges 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 9 Section 4 Measurement Options Configuring rel To check or change a rel value for a measurement function perform the following steps 1 Select the desired measurement function 2 Press the CONFIG key and then the REL key to display the present rel value 3 Use the cursor keys 4 and the RANGE keys A and 57 to change the value and press ENTER The instrument will return to the normal display state with rel enabled Zero check With zero check enabled ZeroCheck displayed the input signal is routed to low through a high impedance shunt For volts amps and ohms measurements zero check should be enabled when connecting or disconnecting input signals For charge measurements zero check should be disabled If left enabled the charge will dissipate through the 10MQ shunt The Z CHK key is used to enable and disable zero check To ensure proper operation always enable zero check before changing functions V or Q Zero correct Triggering 4 10 The Z CHK and REL keys work together to cancel zero correct any inte
99. rement range or use autoranging a To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on b For manual ranging use the RANGE A and keys to select a measurement range consistent with the expected resistance Connect the Model 6517B to the test fixture Generic connections are shown in Figure 3 3 Note that this connection scheme requires that ammeter LO be internally connected to V Source LO see Configuring V Source for more information For optimum accuracy leakage currents in the test fixture can be cancelled by performing REL on the current component of the measurement see Amps Hel for more information Disable zero check by pressing OPER then press Z CHK to source voltage to the test fixture device under test DUT Take a reading from the display Place the V Source in standby when finished by again pressing OPER 6517B 900 01 Rev A Jun 2008 Return to Section Topics 3 5 Section 3 Basic Measurements Model 6517B Electrometer User s Manual WARNING Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death NEVER make or break connections to the Model 6517B while the output is on Power off the equipment from the front panel or disconnect the main power cord from the rear of the Model 6517B before handling cables connected to the outputs Putting the
100. rnal offsets that might upset accuracy for voltage and current measurements Perform the following steps to zero correct the volts or amps function Select the V or I function Enable Zero Check Select the range that will be used for the measurement or select the lowest range Press REL to zero correct the instrument The REL indicator turns on and the ZCor message is displayed For the volts function the 2 message will not be displayed if guard was already enabled displayed Press Z CHK to disable zero check 6 Readings can now be taken in the normal manner The instrument will remain zeroed even if the instrument is upranged If downranged re zero the instrument 7 To disable zero correct first enable zero check and then press REL e The following overview is intended to acquaint you with triggering For a complete explanation see the Model 6517B Reference Manual Triggering is configured from the Trigger Configuration menu which is accessed by pressing CONFIG and then TRIG There are two trigger modes for the Model 6517B basic and advanced These two trigger modes are summarized by the simplified trigger models shown in Figure 4 4 and Figure 4 5 As shown in the drawings the basic trigger model uses one layer of operation while the advanced trigger model uses three layers to provide more trigger options Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer U
101. rrent measurements Triax Red HI Cable UD ZA 74 CAT I Measured Current 5 m V SOURCE 10 OPTION SLOT 4 Shield Recommended E CAUTION FOR CONTINUED PROTECTION AGAINS below 1uA Input low connected to shield CAUTION Maximum Input 250V peak DC to 60Hz 10s per minute maximum mA ranges TRIGC 3 4 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 3 Basic Measurements Resistance measurements NOTE Accurate high resistance measurements require the use of a low leakage test fixture The following procedure requires BENCH default settings see Restoring bench defaults for more information 1 2 With zero check enabled ZeroCheck displayed select the ohms function by pressing Select Auto V Source ohms In this mode the V Source is automatically set to a voltage nominally 40V or 400V that optimizes measurement accuracy see Auto V Source for more information Note that default BENCH settings selects Manual V Source ohms In this mode you must manually set the V Source level for the measurement See Section 4 for details on using the V Source WARNING Selecting Auto V Source ohms may set the V Source to 400V Hazardous voltages may be present on the output and guard terminals that could cause personal injury or death Select a measu
102. rted Model 6517B Electrometer User s Manual This page left blank intentionally 2 8 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Section 3 Basic Measurements In this section Topic Page linge eo MT 3 2 Changing S 3 2 Voltage 5 3 2 CLIE 12 3 3 Current 3 4 Resistance 0 1 4 3 6 DOE cip LEE 3 6 Cro M RH 3 6 Resistivity measurements 3 7 Charge 3 9 CISCMANGS TS 3 10 Temperature and humidity 3 10 drca cric PER 3 10 Measurement control sciis 3 11 Temperature 3 11 Display reading optiors 1 eee enters 3 12 Section 3 Basic Measurements Model 6517B Electrometer User s Manual Introduction This section provides information on taking basic measurements For more detailed information see Section 4 and the Keithley Instruments Model 6517B Reference Manual Changing functions To avoid erratic operation always enable zero check ZeroCheck displayed before selecting one of the other measurement functions V Q The Z CHK key controls zero check see Zero check for more information Voltage me
103. s Filtering averaging and median Built in test sequences Remote operation using the IEEE 488 GPIB bus or the RS 232 interface Scan measure channels of an external scanner Scan measure channels of an internal scanner card for example Keithley Instruments Model 6521 or Model 6522 installed in the option slot Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 1 Introduction Options and accessories The following options and accessories are available from Keithley Instruments for use with the Model 6517B Electrometer NOTE Check the Keithley Instruments website www keithley com for additional options and accessories that may have been added to the Keithley Instruments product line for use with the Model 6517B Electrometer Cables and adapters Model 237 ALG 2 Triax Cable This is a 2 meter 6 6ft low noise triax cable terminated with a 3 slot male triax connector on one end and 3 alligator clips on the other Model 237 BNC TRX Adapter This is a male BNC to 3 lug female triax adapter guard disconnected It is used to terminate a triax cable with a BNC plug Suitable for use with the Model 6517B V Source in high voltage applications Model 237 TRX T Adapter This is a 3 slot male to dual 3 lug female triax tee adapter for use with 7078 TRX triax cables Suitable for use with the Model 6517B V Source in high voltage applications Model 237 TRX TBC Connect
104. s Instrument Instrument 6517B Address and language selection The Model 6517B is shipped from the factory with the IEEE 488 bus selected the primary address set to 27 and the SCPI language mode selected The primary address is displayed on power up if the IEEE 488 bus is the selected interface Perform the following steps to select the IEEE 488 bus interface check and change the primary address and check and change the language mode 1 Press MENU to display the MAIN MENU 2 Place the cursor on COMMUNICATION and press ENTER The interface options GPIB and RS 232 are displayed 3 Place the cursor on GPIB and press ENTER to select the IEEE 488 bus interface If the RS 232 interface was previously selected the unit will exit from the MAIN MENU when you select GPIB In that event repeat steps 1 2 and 3 to continue in the menu structure 4 Perform the following steps if you wish to check and change the primary address a Place the cursor on ADDRESSABLE and press ENTER to display the addressable menu items ADDRESS and LANGUAGE Place the cursor on ADDRESS and press ENTER to display the primary address change the address use the cursor keys 4 and and the RANGE keys and to display the desired address then press ENTER Each device on the bus must have a unique address Typically the computer uses address 0 or 21 5 Perform the following steps if you wish to check and change the language mode a P
105. s display shows the maximum and minimum readings that have occurred since the display was entered Maximum and minimum values are reset by pressing the present function key or by leaving the display Relative and actual This display is used with the REL relative feature While the top line shows the result of the rel operation the bottom line shows the actual raw reading Calculated and actual This display is used with a math calculation While the top line provides the result of the math calculation the bottom line provides the raw reading Relative humidity and external temperature This display is used to display the relative humidity and external temperature readings Note that the appropriate option see Section 1 of the Reference Manual must be connected and enabled Change from cal temp With temperature readings enabled this display indicates the difference between the present internal temperature and the internal temperature when the instrument was last calibrated 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual KEITHLEY 1 00000 MEAS 4 000 05A SRC 040 0 Section 4 Measurement Options 001 6517 ELECTROMETER HIGH RESISTANCE METER KEITHLEY readings 1 00000 4 1 00236 00 at RDG 00038 Relative humidity RH and temperature ET 6517B ELECTROMETER HIGH RESISTANCE METER V Source value KEITHLEY 1 00000 Average 1 0083726 00 6517B
106. s for the Model 6517B Software support LabView driver This driver allows you to use the Model 6517B with the National Instruments LabView package and is free upon request Contact the Keithley Instruments applications group for details at 1 888 KEITHLEY 1 888 534 8453 within the U S and Canada Remote interfaces IEEE 488 bus Standards For remote operation the Model 6517B can use the IEEE 488 bus for communication between instrumentation and the controller computer The IEEE 488 bus is also known as the General Purpose Interface Bus GPIB In addition to conforming to the IEEE 488 1978 and IEEE 488 1 1987 standards the Model 6517B also conforms to the IEEE 488 2 1987 standard and the SCPI 1994 standard These two standards allow most instrument operations to be performed with the use of common commands and SCPI commands IEEE 488 bus connections The Model 6517B is connected to the IEEE 488 bus using a cable terminated with standard IEEE 488 connectors Figure 5 1 shows a typical connection scheme for a multi unit test system Note that connectors can be stacked to accommodate the parallel connection scheme To minimize interference caused by electromagnetic radiation only use shielded IEEE 488 cables such as the Keithley Instruments Model 7007 1 and Model 7007 2 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 5 Remote Operation Figure 5 1 IEEE 488 connection
107. ser s Manual Model 6517B Electrometer User s Manual Section 4 Measurement Options Figure 4 4 Basic trigger model simplified Output Trigger Event Detection Device Action Figure 4 5 Advanced trigger model simplified Another Arm Arm Arm Layer Count Scan Scan Layer Count Measure Layer meni Count Measure Event Output Trigger Device Action Idle The instrument is in idle whenever it is not within one of the layers of the trigger model When the Model 6517B is taken out of idle by pressing TRIG or sending INIT or INIT CONT ON over the bus the ARM indicator turns on and operation proceeds in the trigger model 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 11 Section 4 Measurement Options Model 6517B Electrometer User s Manual Control sources With advanced triggering and basic one shot triggering operation is controlled by control sources which hold up operation until the programmed event occurs Basic one shot triggering uses one control source while advanced triggering uses three control sources The control sources are described below Immediate Event detection is immediately satisfied allowing operation to continue External Event detection is satisfied when an input trigger via the EXT TRIG IN connector is received Manual Event detection is satisfied by pressing the TRIG key Event detection is satisfied when
108. state of current compliance TRACe subsystem Select reading elements TSTamp HUMidity CHANnel ETEMperature VSOurce NONE Specify buffer size Path to control buffer Select control mode and enable buffer NEVer NEXT ALWays PRETrigger Read all readings in buffer Open close channels and scan ROUTe CLOSe lt list gt STATe OPEN lt list gt OPEN ALL SCAN INTernal EXTernal lt list gt SMEThod lt name gt LSELect lt name gt lt list gt Return to Section Topics ROUTe subsystem Close specified channel Query the closed channel Open specified channel Open all channels Path to control scanning Specify internal scan list 2 to 10 channels Specify external scan list 1 to 400 channels Specify settling time for internal card 0 to 99999 9999 sec Enable the specified scan INTernal EXTernal or NONE 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Trigger model Section 5 Remote Operation Performing a system preset SYSTem PRESet configures the advanced trigger model for typical instrument operation After a system preset many advanced operations can be accomplished using the initiate commands INITiate IMMediate CONTinuous b TRIGger SOURCe lt name gt TIMer lt n gt DELay n SYSTem MACRO TRIGger EXECute MODE lt name gt SOURCe lt name gt TIMer Test sequences TSEQuence
109. sting service This is necessary for two reasons Serial polling the Model 6517B causes it to quit asserting the SRQ line ntest systems that have more than one IEEE 488 instrument programmed to assert SRQ your program must determine which instrument is actually requesting service Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 5 Remote Operation Once an event register has caused a service request it cannot cause another service request until you clear it by reading it in this case using STATus MEASurement EVENt or by sending the CLS command Storing readings in the buffer The reading buffer in the Model 6517B is flexible and capable It has three controls which are found in the TRACe subsystem There are commands to control The size of the buffer in readings TRACe POINts lt NRf gt Whether or not extra data is stored with each reading for example channel number time stamp storing extra data reduces the maximum size of the buffer TRACe ELEMents lt name gt Specify additional reading elements TSTamp HUMidity CHANnel ETEMperature VSOurce Or NONE e Select buffer control mode TRACe FEED CONTrol NEVer Immediately stop storing readings TRACe FEED CONTrol NEXT Start now stop when buffer is full TRACe FEED CONTrol ALWays Start now never stop TRACe FEED CONTrol PRETrigger Start now stop when pretrigger is satisfied The following exampl
110. ternal scan Configure internal scanner Perform the following steps to configure an internal scan 1 2 Press CONFIG and then CARD to display the scanning options internal or external Place the cursor on INTERNAL and press ENTER to display the menu items for the internal scanner Use the following menu structure to configure the internal scanner To select a menu item place the cursor on it and press ENTER Parameter values are changed using the cursor keys 4 and gt and the RANGE keys A CHANNELS Selecting this menu item displays the status on or off for each channel ON indicates that the channel will be included in the scan while OFF indicates that the channel will not be included in the scan To change the status of a channel s place the cursor on that channel and press a RANGE key A When finished press ENTER SCAN MODE Use this menu item to set the scan mode The VOLTAGE scan mode is faster and can be used when break before make switching is not required VSRC LIMIT Use this menu item to enable YES or disable NO the 200V V Source limit The 200 limit is used to protect the scanner card Note that a V Source limit 0 to 1000 may also be set from the Configure V Source menu see V SOURCE SETTLING TIME Use this menu item to set a settling time 0 to 999 999 seconds for each channel Be sure to press ENTER after changing the time period Use the EXIT key to back out of the menu s
111. the cable when GUARD is A safety shield connected to safety earth ground as shown Figure 3 1B should be used for voltage measurements at or above 30V CAUTION Do not apply more than 250V peak DC to 60Hz to the input or instrument damage may occur 6 Press Z CHK to disable zero check and take a reading from the display 3 2 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 3 Basic Measurements Figure 3 1 Voltage measurements A Unguarded GUARD off WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY PREAMP 729 COMMON _ 2V OUT p HUMIDITY LINE RATING FUSE LINE V SOURCE UNS 50 60 quum 160580 6 0 10 315mAT 240V DIGITAL IEEE 488 N O INTERLOCK lage Voltage 7 OPTION SLOT Q e TRIGGER LINK RS 232 Black LO Shield Optional 1 CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING B Guarded GUARD on WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY B 250VDC N COMMON 2V OUT TEMP TYPEK
112. the advanced trigger model use programmable counters that allow operation to return to or stay in the respective layer For example programming the measure layer counter to infinite keeps operation in the measure layer After each device action operation loops back to the trigger layer control source A counter resets when operation loops back to a higher layer or idle Bench default setup The bench default setup selects advanced triggering and takes the Model 6517B out of idle sets the control sources of all layers to Immediate and sets the measure layer counter to infinite With this trigger model setup operation simply falls into the measure layer and stays there to make continuous measurements 4 12 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Model 6517B Electrometer User s Manual Section 4 Measurement Options Speed SPEED sets the integration time of the A D converter the period of time the input signal is measured The SPEED can be set for each measurement function The integration time is specified in parameters based on a number of power line cycles NPLC where one PLC for 60Hz is 16 67msec and one PLC for 50Hz and 400Hz is 20msec In general the fastest integration time 0 01 PLC results in increased reading noise and less usable resolution while the slowest integration time 10 PLC provides the best common mode and normal mode rejection In between settings are a compromise between speed and noise Conf
113. the user documentation The symbol on an instrument shows that it can source measure 1000V more including the combined effect of normal and common mode voltages Use standard safety precautions to avoid personal contact with these voltages The symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The n symbol indicates a connection terminal to the equipment frame If this symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly disposed of according to federal state and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may
114. tructure Perform the scan Perform the following steps to scan internal channels Note that menu items are selected by placing the cursor on it and pressing ENTER Parameter values are changed using the cursor and RANGE keys and pressing ENTER 6517B 900 01 Rev A Jun 2008 Return to Section Topics 4 21 Section 4 Measurement Options Model 6517B Electrometer User s Manual peg mo e Set up the Model 6517B for the desired measurement for example function range filter Press CARD to display the internal scanner options close channel or perform scan Select PERFORM SCAN to display the scan types internal or external Select INTERNAL to display the scan count the scan count indicates the number of times the scan will be repeated If desired change the scan count and press ENTER You will then be asked if you wish to use the timer to provide a time interval between scans a To use the timer select YES The present interval in seconds will be displayed If desired change the interval Press ENTER to continue b If you do not wish to use the timer select NO You will then be asked if you wish to store the readings in the buffer a Touse the buffer select YES A message indicating the number of readings that will be stored in the buffer will be displayed Press ENTER to continue b If you do not wish to use the buffer select NO With the message Press ENTER to begin displayed press ENTER to start the scan Aft
115. ulombs function by pressing Q 2 Select a measurement range or use autoranging a To automatically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on b For manual ranging use the RANGE keys A and to select a measurement range consistent with the expected charge reading 3 Connect the test cable see Figure 3 5 to the input of the Model 6517B With the input open disable zero check If needed press REL to zero the display 4 Connect the instrument to the charge to be measured as shown in Figure 3 5 CAUTION Do not apply more than 250V peak DC to 60Hz or instrument damage may occur 5 Take a reading from the display The reading can be reset to zero by enabling zero check If you wish to have the reading reset to zero when a specified charge level is reached enable Auto Discharge as explained in the following paragraph 6517B 900 01 Rev A Jun 2008 Return to Section Topics 3 9 Section 3 Basic Measurements Model 6517B Electrometer User s Manual Auto discharge When enabled Auto Discharge is used to automatically reset the charge reading to zero when the specified charge level is reached After the integrator resets the charge measurement process simply restarts at zero Perform the following steps to enable or disable Auto Discharge 1 Press the CONFIG key and then Q to display the coulombs configuration menu 2 Use the
116. urement and they can be included as data storage elements for each reading stored in the buffer see Multiple displays for more information External temperature and humidity are selected as data store elements from the data store configuration menu see Buffer data store for more information 3 12 Return to Section Topics 6517B 900 01 Rev A Jun 2008 Section 4 Measurement Options In this section Topic Page T 4 3 M liple c 4 3 Cllr 4 5 Nevigaling Menus sissit seistes rent 4 6 oaeee 4 7 Comece euie 4 7 21 4 9 2 4 9 4 9 HEN 4 10 PRO IGG c 4 10 oa 4 10 1 4 10 o C ec Es eck bese ecco Adda 4 11 eni E c MER 4 12 Device AGNON Rr 4 12 mir qM cm 4 12 4 12 default SGU tet tenere 4 12 ENSE decas IM 4 13 4 13 icr E 4 13 Gonfigaring 4 13 4 13 Fiter YPES MET 4 14 x db E E 4 14 Median HEF MEME 4 14 MOTTA MING eT 4 15 Buker dala 5 29
117. ut port check serial number of unit and firmware revision levels control line sync limit control and data stamp configure timestamp set reading display and set real time clock Return to Section Topics 4 5 Section 4 Measurement Options Table 4 3 Configuration settings for each measurement function Model 6517B Electrometer User s Manual Function Speed Filter Resolution Autorange limits Damping Guard External feedback Amps rel Meas type V Source Auto discharge Volts Amps Ohms Coulombs Resistance or resistivity Auto or manual Table 4 4 Configuration settings for instrument operations Option Description CONFIG REL Set rel relative value and enable CONFIG FILTER Select and configure averaging and median filters CONFIG MATH Select and configure math calculation polynomial percent percent deviation ratio or log10 CONFIG TRIG Select and configure basic or advanced trigger model CONFIG SEQ Select and configure test sequence CONFIG STORE Configure data store set count control timestamp elements and display and clear buffer CONFIG VOLTAGE SOURCE Configure V Source range V limit resistive I limit and meter connect CONFIG CARD Select and configure internal or external scanning CONFIG NEXT Change the scale for the zero center bar graph C
118. y reading ODDO seis 3 12 4 Measurement Options 2 4 1 iige Rc 4 3 Multiple displays m 4 3 4 5 4 6 Table of Contents Model 6517B Electrometer User s Manual Section Topic Page VONGE SOUTO MM m 4 7 gd En 4 7 Ba ie Opa ND ee ELS 4 9 netiis Em 4 9 iln mc D 4 9 drip eM 4 10 PR dM 4 10 e 4 10 piss 1i EE 4 10 15 1 HAI 4 11 Control BONS MEME 4 12 Device AGON MEE 4 12 dra Ele RETO IL I 4 12 GOUDES 4 12 Bench default SOUP 4 12 xi e PH P 4 13 c PE EET 4 13 cnn DEPT 4 13 4 13 d BMW 4 13 mimo MEME Em 4 14 ais c 4 14 SIE UNE NER 4 14 ED RM 4 15 BSP data IONS E 4 15 EE EET 4 15 lu MNT 4 16 Selecting and configuring math 4 17 mE 4 18 Additional math operations ne etta ee 4 18 ME 4 19 Goniiguring test 8 8 rettet trece nee 4 19 More M 4 20 M 4 21 intemal

6517B-900-01 (A - Jun 2008)(User`s).book

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