Semiconductor Characterization System
Contents
1. DC Force DC Sense DC Force Figure 2 Interconnect for pulse l V high x charge trapping Figure 3 Interconnect for single pulse charge trapping and isothermal testing Pulse voltage on gate with DC bias on drain 1 888 KEITHLEY wis ony KEITHLEY www keithley com A GREATER MEASURE O F CONFIDENCE 1 C Ke Ss Ge OU o O Y O o N a K O SEMICONDUCTOR TEST2. 40 C x3 x5 REMOTE SENSE lt 10Q in series with FORCE terminal not to exceed a 5V differ ence between FORCE and SENSE terminals 30V maximum between COMMON and SENSE LO Additional Specifications MAX OUTPUT POWER 22 watts for 4210 SMU and 2 2 watts for 4200 SMU both are four quadrant source sink operation DC FLOATING VOLTAGE COMMON can be floated 32 volts from chassis ground VOLTAGE MONITOR SMU in VMU mode Measure Voltage Measure Accuracy Range Resolution rdg volts 200 V 200 uV 0 015 3 mV 20 V 20 uV 0 01 1 mV 2 V 2 uV 0 012 110 uV 200 mV 1 pV 0 012 80 uV INPUT IMPEDANCE gt 1080 INPUT LEAKAGE CURRENT lt 30pA MEASUREMENT NOISE 0 02 of measurement range rms DIFFERENTIAL VOLTAGE MONITOR Differential Voltage Monitor is available by measuring with two SMUs in VMU mode or by using the low sense terminal provided with each SMU GROUND UNIT Voltage error when using the ground unit is included in the 4200 SMU 4210 SMU and 4200 PA specifications No additional errors are introduced when using the ground unit OUTPUT TERMINAL CONNECTION Dual triaxial 5 way binding post MAXIMUM CURRENT 2 6A using dual triaxial connection 4 4A using 5 way binding posts LOAD CAPACITANCE No limit CABLE RESISTANCE FORCE lt 1 SENSE lt 10Q 1 888 KEITHLEY wus oniy www keithley com MAXIMUM LOAD CAPACITANCE 10nF MAXIMUM GUARD OFFSET VOLTAGE 3mV from FORCE GUARD OUTPU
3. v W cc e k U a Z e 2 wW v 4200 SCS i La im Intuitive point and click Windows based environment Unique Remote PreAmps extend the resolution of SMUs to 0 1fA New pulse and pulse I V capabilities for advanced semiconductor testing New scope card provides integrated scope and pulse measure functionality Self contained PC provides fast test setup powerful data analysis graphing and printing and on board mass storage of test results Unique browser style Project Navigator organizes tests by device type allows access to multiple tests and provides test sequencing and looping control Built in stress measure looping and data analysis for point and click reliability testing including five JEDEC compliant sample tests Integrated support for a variety of LCR meters Keithley switch matrix configurations and both Keithley Series 3400 and Agilent 81110 pulse generators Includes software drivers for Cascade Microtech Summit 12K Series Karl Suss Model PA 200 and Model PA 300 Micromanipulator Model 8860 Signatone CM 500 Prober and manual probers Advanced semiconductor modeling support including Keithley supplied IC CAP device modeling package driver and support for Cadence BSIMProPlus Virtuoso and Silvaco UTMOST device modeling tools 1 888 KEITH LEY ws ony Semiconductor Characterization System The easy to use Model 4200 SCS Semiconductor Characterization System pe
4. 000 40 fA VOLTAGE COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected voltage range VOLTAGE SPECIFICATIONS VOLTAGE MAX CURRENT MEASURE SOURCE Accuracy Accuracy 4200 SMU 4210 SMU Resolution rdg volts Resolution rdg volts 5 mV 500 uV 0 02 15 mv 0 02 1 5 mV 0 02 300 uV 0 02 150 uV 0 015 3 mV 0 01 1mV 0 012 150 uV 0 012 100 uV CURRENT COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected current range 1 888 KEITHLEY ws ony www keithley com KEITHLEY CONFIDENCE A GREATER MEASURE OF 4200 SCS Supplemental Information Semiconductor Characterization System Supplemental information is not warranted but provides useful information about the Models 4200 SMU 4210 SMU and 4200 PA COMPLIANCE ACCURACY Voltage compliance equals the voltage source specifications Current compliance equals the current source specifications OVERSHOOT lt 0 1 typical Voltage Full scale step resistive load and 10mA range Current 1mA step R 10kQ 20V range RANGE CHANGE TRANSIENT Voltage Ranging lt 200mV Current Ranging lt 200mV ACCURACY SPECIFICATIONS Accuracy specifications are multiplied by one of the following factors depending upon the ambient temperature and humidity Relative Humidity Temperature 5 60 60 80 10 18 C x3 x3 18 28 C xl x3 28
5. for mounting PULSE GENERATOR OSCILLOSCOPE AND two included with each 4200 PA 4200 PA on a triaxial mounting panel ACCESSORIES 4200 TRX 3 Ultra Low Noise PreAmp Triax Cable 3m OTHER ACCESSORIES 4200 PG2 Dual Channel Pulse Generator N Ttak fla CONES en a teat rE 4000 CASE Wheeled Canina c 4200 SCP2 Dual Ch Digital Oscill 4200 MTRX 1 Ultra Low Noise SMU Triax Cable 1m Mini i l sce SAN Nee i Beh MANNE ENG al S IRSE Triax Triax connects 4200 SMUs to a test 4200 MAN Printed Manual Set 4200 PlV Complete Pulse I V Package fixture 4200 CART Roll Around Cart 4200 SCP2 ACC Dual Channel Digital Oscilloscope Accessory 4200 MTRX 2 Ultra Low Noise SMU Triax Cable 2m Mini Kit 70MHz probe TriaxTriax connects 4200 SMUs to a test fix eee eon 8101 4TRX 4 Pin Transistor Fixture ture two included with each 4200 SMU that is Ultra Low Current 100fA offset 30uV offset remote or local sense 9101 PIV a ee not configured with a Remote PreAmp Low Current 1pA offset 40uV offset 12 360 pins local 4200 MTRX 3 Ultra Low Noise SMU Triax Cable 3m Mini sense only ADDITIONAL CABLES AND CONNECTORS TriaxTriax connects 4200 SMUs to a test General Purpose 100pA offset 5uV offset 12 360 pins remote 4200 RPC 0 3 Remote PreAmp Cable 0 3m for use inside fixture sense prober shield 236 ILC 3 Interlock Cable 3m one included with each DRIVER OPTIONS 4200 RPC 2 Remote PreAmp Cable 2m for remote location 4200 SCS 4200 ICCAP 6 0 IC CAP Driver and Source Code for 4200 SC
6. keithley com KEITHLEY MEASURE OF A GREATER CONFIDENCE Cc Oo i N D 49 i U ap O gt oD ge O O oD ge 2 A SEMICONDUCTOR TEST Cc Oo i qe IN D 49 ie U ap O gt oD O O O oD ge 2 q SEMICONDUCTOR TEST 4200 SCS Semiconductor Characterization System ACCESSORIES AVAILABLE COMPUTER OPTIONS CABINETS AND MOUNTING ACCESSORIES 4200 RPC 6 Remote PreAmp Cable 6m for remote location 4200 FPD RM 1V 17 TFT Display with keyboard and 4200 CAB 20UX 20U Cabinet 35 of 4200 PA pointing device 4200 CAB 25UX 25U Cabinet 44 4200 TRX 0 3 Ultra Low Noise PreAmp Triax Cable 0 3m i i j Triax Triax connects 4200 PA to a test fixture E sullen eet suie bra A200 CAB 34UX 34U Cabinet 60 recommended for remote location of the REMOTE PREAMP MOUNTING OPTIONS 4200 RM Slide Rack Mounting Kit for 4200 SCS F and 4200 PA 4200 MAG BASE Magnetic Base for mounting 4200 PA on a 4200 5050 O 42007RX 1 Ultra Low Noise PreAmp Triax Cable 1m prober platen 4200 CRT RM Fixed Rack Mounting Kit for external CRT Triax Triax connects 4200 PA to a test fixture 4200 VAC BASE Vacuum Base for mounting 4200 PA on a 4200 KEY RM Slide Rack Mounting Kit for standard keyboard 4200 TRX 2 Ultra Low Noise PreAmp Triax Cable 2m prober platen and pointing device Triax Triax connects 4200 PA to a test fixture 4200 TMB Triaxial mounting bracket
7. noise limits Measured resolution is 6 digits on each range Source resolution is 4 digits on each range 4 Interlock must be engaged to use the 200V range KEITHLEY CONFIDENCE A GREATER MEASURE OF VY Cc Ss RS gt U oD ok WY C3 U gt N a Ko O SEMICONDUCTOR TEST 09 Ke i s u UO oD O Y O A oO N a K O SEMICONDUCTOR TEST 4200 SCS 4200 PG2 Specifications Semiconductor Characterization System 4200 SCP2 Specifications PULSE LEVEL ANALOG INPUT HIGH SPEED HIGH VOLTAGE NO OF CHANNELS 2 50 Q into 50 Q 5Vto 5V 20 V to 20 V BANDWIDTH 502 DC to 750MHz Vout 50 Q into 1 MQ 10 Vto 10 V 40 Vto 40 V BANDWIDTH 1MQ DC to 500MHz Accuracy 3 50 mV 3 100 mV FULL SCALE INPUT RANGE 502 0 05 0 1 0 25 0 5 1 2 5 AMPLITUDE LEVEL 50 Q into 50 Q 1mvV 5 mV 10 Vp p RESOLUTION 50 Q into 1MQ 2 mV 10 mV FULL SCALE INPUT RANGE 1MQ 0 1 0 2 0 5 1 2 5 5 10 OUTPUT CONNECTORS SMA SMA 20 50 100 Vp p SOURCE IMPEDANCE 50 Q torna 50 Q naana DC GAIN ACCURACY lt 1 of full scale Accuracy 0 5 0 5 IMPEDANCE 1MQ 12pF or 50Q SHORT CIRCUIT CURRENT 200 mA 800 mA peak IMPEDANCE ACCURACY 1 CURRENT INTO 509 LOAD AT FULL SCALE 100 mA typical 400 mA typical COUPLING DC or AC BASELINE NOISE 0 1 5 mV RMS typical 0 1 5 mV RMS typical OFFSET ADJUST full scale range
8. 2 OVERSHOOT PRE SHOOT RINGING 5 of amplitude 20 mV 5 of amplitude 80 mV OFFSET ACCURACY 1 offset 1 full scale OUTPUT LIMIT Programmable limit to protect the DUT INPUT CONNECTOR BNC ABSOLUTE MAXIMUM INPUT 502 5VDC ABSOLUTE MAXIMUM INPUT 1MQ 150 DC derated TIMING 20dB decade above 1MHz HIGH SPEED HIGH VOLTAGE ANALOG TO DIGITAL CONVERTER FREQUENCY RANGE 1 Hz to 50 MHz 1 Hz to 2 MHz RESOLUTION 8 bit TIMING RESOLUTION 10 ns 10 ns SAMPLE RATE 2 5kS s to 1 25GSJs in 1 2 5 5 steps 2 5GS s 1 RMS JITTER period width 0 01 200 ps typical channel interleaved PERIOD RANGE 20 ns to 1s See Figure 1 500 ns to 1s MEMORY DEPTH 1M samples channel 2M using 1 channel Accuracy 1 1 interleaved PULSE WIDTH RANGE dal ee ee e ACQUISITION TIME RANGE 50ns to 419 seconds a Accuracy 3 200 ps 3 5 ns ACQUISITION MODES Normal Average Envelope and 2 z Equivalent Time TRANSITION TIME 0 100 10ns 1s 100ns 1s q Accuracy 1 for transition time 100 ns 1 for transition time 1 us 3 COENA Linearity 3 for transition time 100 ns 3 for transition time 500 ns TRIGGER TYPICAL MIN TRANSITION lt 15ns TIME 10 90 pe 70ns High Speed Range Pulse Period Operating Region ti amp 20ns 70ns 1s Period Figure 1 Permitted area of operation NOTES 1 Unless stated otherwise all specifications assume a 50Q termination 2 Level specs are valid after 50ns typical settling
9. CE 4200 SCS Ordering Information 4200 SCS F Flat Panel Display 4200 SCS C Composite Front Bezel requires an external SVGA display Accessories Supplied Reference and User Manual on CD ROM 236 ILC 3 Interlock Cable 3m Note All 4200 SCS systems and instrument options are supplied with required cables of 2m length Additional Instrumentation 4200 PG2 Dual Channel Pulse Generator 4200 SCP2 Dual Channel Digital Oscilloscope 4200 PIV Complete Pulse l V Package Related Products 707A Semiconductor Switching Matrix Mainframe 708A Single Slot Switching Matrix Mainframe 4200 SCP2 ACC 70M Hz Scope Probe 7071 8x12 General Purpose Matrix Card 7072 8x12 Semiconductor Matrix Card 7072 HV 8x12 High Voltage Semiconductor Matrix Card 7174A 8x12 High Speed Low Current Matrix 1 888 KEITHLEY ws ony Semiconductor Characterization System The Keithley Interactive Test Environment KITE is designed to let users understand device behavior quickly When running a test sequence users can view results and plots for completed tests while the sequence is still running As shown here multiple plots can be viewed at the same time to get a complete picture of device per formance 7 deel Geer tetra ter Crt ret eer Keithley Configuration Utility KCON Allows test engineers to define the configuration of GPIB instruments switch matrices and analytical probers connec
10. S ee tee ae 7007 1 Shielded IEEE 488 Cable 1m UNIX Windows 4200 RPC 3 Remote PreAmp Cable 3m for remote location 7007 2 Shielded IEEE 488 Cable 2m DEEN 7078 TRX BNC Coaxial connector for connecting coax instru ments to a triax matrix CURRENT SPECIFICATIONS SPECIFICATION CONDITIONS CURRENT MAX Specifications are the performance standards against RANGE VOLTAGE MEASURE SOURCE which the Models 4200 SMU 4210 SMU and 4200 PA ACCURACY ACCURACY are tested The measurement and source accuracy are a RESOLUTION rdg amps RESOLUTION rdg amps specified at the termination of the supplied cables 4210 SMU l A 21V I pA 0 100 2004A 50 WA CAESA ee eo wn L year OF calbralon RucbelWeen High 100 mA 210 V 100 nA 0 045 3uA 5 pA 0 050 15 uA 5 and 60 after 30 minutes of warm up Power 4200 SMU2 100 mA 21V 0 045 3u 5 uA 0 050 15 uA Speed set to NORMAL SMU Medium 10 mA 0 037 300 nA 500 nA 0 042 15 uA Guarded Kelvin connection Power 1 mA 0 035 30 nA 50 nA 0 040 150 nA 1 C and 24 hours from ACAL SMU 100 uA 0 033 3nA 5 nA 0 038 15 nA 10 uA 0 050 600 pA 500 pA 0 060 1 5 nA 1 uA 0 050 100 pA 50 pA 0 060 200 pA 100 nA 0 050 30 pA 5 pA 0 060 30 pA 4200 SMU and 10 nA 0 050 1pA 500 fA 0 060 3 pA 4210 SMU with 1 nA 0 050 100 fA 50 fA 0 060 300 fA optional 100 pA 0 100 30 fA 15 fA 0 100 80 fA 4200 PA PreAmp 10 pA 0 500 15 fA 5 fA 0 500 50 fA 1 pA 1 000 10 fA 1 5 fA 1
11. T IMPEDANCE 100k MAXIMUM GUARD CAPACITANCE 1500pF MAXIMUM SHIELD CAPACITANCE 3300pF 4200 SMU and 4210 SMU SHUNT RESISTANCE FORCE to COMMON gt 10 02 100nA 14A ranges 4200 PA SHUNT RESISTANCE FORCE to COMMON gt 10 2 1pA and 10pA ranges gt 108Q 100pA 100nA ranges OUTPUT TERMINAL CONNECTION Dual triaxial connectors for 4200 PA dual mini triaxial connectors for 4200 SMU and 4210 SMU NOISE CHARACTERISTICS typical Voltage Source rms 0 01 of output range Current Source rms 0 1 of output range Voltage Measure p p 0 02 of measurement range Current Measure p p 0 2 of measurement range MAXIMUM SLEW RATE 0 2V us GENERAL TEMPERATURE RANGE Operating 10 to 40 C Storage 15 to 60 C HUMIDITY RANGE Operating 5 to 80 RH non condensing Storage 5 to 90 RH non condensing ALTITUDE Operating 0 to 2000m Storage 0 to 4600m POWER REQUIREMENTS 100V to 240V 50 to 60Hz MAXIMUM VA 500VA REGULATORY COMPLIANCE Safety Low Voltage Directive 73 23 EEC EMC Directive 89 336 EEC DIMENSIONS 43 6cm wide x 22 3cm high x 56 5cm deep 1732 in x 8 in x 22 in WEIGHT approx 29 7kg 65 5 Ibs for typical configuration of four SMUs 1 0 PORTS SVGA Printer RS 232 GPIB Ethernet Mouse Keyboard NOTES 1 All ranges extend to 105 of full scale 2 Specifications apply on these ranges with or without a 4200 PA 3 Specified resolution is limited by fundamental
12. e Test Environment KITE to provide a powerful single box solution KITE allows users to gain familiarity quickly with tasks such as managing tests and results and generating reports Sophisticated and simple test sequencing and external instrument drivers simplify performing automated device and wafer testing with combined I V and C V measurements The exceptional low cur rent performance of the Model 4200 SCS makes it the perfect solution for research studies of single electron transistors SETs molecular electronic devices and other nanoelectronic devices that require l V characterization The Model 4200 SCS can be used to make four probe van der Pauw resistivity and Hall voltage measurements eliminating the need for a switch matrix and user written code With remote preamps added resistances well above 101202 can be measured The Model 4200 SCS is modular and configurable The system supports up to eight Source Measure Units including up to four high power SMUs with 1A 20W capability Also available are new pulse and scope pulse measure modules Pulse I V Package The optional Pulse I V package provides dual channel pulse generation and measurement Pulsed I V testing offers a new approach to characterization testing Its high speed pulses allow you to charac terize materials and devices in applications like charge trapping for high gates and devices that have self heating effects Extended Measurement Resolution An optional Remote P
13. encing on a device a group of devices subsite module or test element group or a user programmable number of probe sites on a wafer Keithley User Library Tool KULT The Keithley User Library Tool is an open environment that provides you with the flexibility to create your own custom routines as well as use existing Keithley and third party C language subroutine libraries User library modules are accessed in KITE through User Test Modules Factory supplied libraries provide up and running capability for supported instruments Users can edit and compile subroutines then integrate libraries of subroutines with KITE allowing the Model 4200 SCS to con trol an entire test rack from a single user interface KULT is derived from the Keithley S600 and Series S400 Parametric Test Systems This simplifies migration of test libraries between the Model 4200 SCS and Keithley parametric test systems v LLI cc e k U a lt e 2 wW v A GREATER MEASURE OF CONFIDENCE Cc Oo i qe IN D O 49 ie U w O gt w O O O oD ge 2 q 4200 SCS Dual Channel Pulse Generator The optional integrated dual channel pulse generator adds pulsing to the Model 4200 SCS s DC source and measure capabilities It supports voltage pulses as short as 10ns in high speed mode or up to 20V into 5092 in high voltage mode Two pulse generators on one card provides you with the flexibility to apply pulses
14. es and materials sub ject to self heating effects charge pumping AC stress testing clock generation and mixed signal device testing The specialized interconnect solves most of the problems encountered in high speed pulse testing such as DC Source e Combining pulse and DC sources to asingle DUT pin to permit both DC and pulse characterization with out recabling or switching Impedance matching for pulse integrity to minimize reflection Straightforward cabling and connection to the DUT for easy setup Dual Channel Digital Oscilloscope for Measurement Trigger Taai Dual Channel Pulse Generator AC DC Out The Pulse l V package includes everything needed to implement a turnkey system for pulsed l V testing of leading edge devices and materials Pieces included in the package are e Integrated dual channel pulse generator Dual channel digital oscilloscope Pulse l V control software patent pending e Interconnect designed to minimize the signal reflections com mon to pulse I V testing patent pending All required connectors and cables Sample projects for Pulse l V isothermal testing of FinFETs SOI devices and other devices with self heating problems paseeeagp eee eeeees Charge trap testing for high gate stack characterization Pulse testing can characterize a device with little to no isothermal degradation 1 888 KEITHLEY ws ony www
15. hout 4200 Remote Bias Tee Figure 3 Measurement Accuracy lt 4 of signal 1mV N A Max Current Measure 100 mA 400 mA Maximum 54A 250uV Maximum 54A 250uV ResounoN 8 bit A D one 8 bit A D p Sample Rate 1 25 Gsample s 1 25 Gsample s Duty Cycle lt 0 1 See PG2 specs DC Offset 200 V N A Min Transition Time 10 ns See PG2 specs eee 0 to 5V into gate 0 to 5V into gate 40V into drain Pulse Width 40 ns to 150 ns See PG2 specs SMU TYPICAL DC PERFORMANCE with 4200 Remote Bias Tee Leakage 1 10nA V2 NOTES Noise 1 10nA RMS 1 Unless stated otherwise all specifications assume a 50Q termination Max Voltage 200V gt 40V requires Safety interlock and related 2 4200 Remote Bias Tee supports the 4200 PG2 high speed range only precautions 3 Leakage measured after a five second settling time Max Current 0 5A 4 All typical specs apply to the AC DC output connector of the 4200 4200 REMOTE BIAS TEE TYPICAL PERFORMANCE Remote Bias Tee interconnect box and after system compensation Band Pass 10kHz 300MHz 3B All specifications apply at 23 5 C within 1 year of calibration RH between a 5 and 60 after 30 minutes of warmup Power Divider Max Power Input 0 125W DC AR P AC Input Splitter Tee oc re ee ch PG2 Tiigin ae PG2 Trig In O L DC Force Ch 2 0O R i a ch 1 ch 1 O SCP2 Trig Out Ho SCP2 Trig Out H Ch 2 O Ch 2 O MU2 DC Sense DC Sense DC Force DC Force S DC Sense
16. isothermal testing of new devices a ut To minimize the signal reflections due to poor impedance matching that often plague do it yourself pulse testing systems Keithley s Pulse I V package includes a system intercon nect setup that provides AC DC coupling to connect the pulse generator and the DC instru mentation PE Ba Semiconductor Characterization System Pulse l V Solution Package The Pulse I V package provides a turnkey pulse I V solution It is a comprehensive package of hard ware and software designed to integrate seamlessly with the Model 4200 SCS workstation It com bines the dual channel pulse generator dual channel digital oscilloscope specialized interconnect and patented Pulse 1 software The Pulse l V software controls sourcing from the pulse generator and data acquisition from the oscilloscope to automate a variety of Pulse l V tests Running in the Model 4200 SCS s proven inter face the Pulse l V software provides instrument setup and control data storage and presentation The innovative software includes both cable compensation and a solution to the load line effect pro ducing pulsed based I V transistor curves such as the Vps lp family of curves and V I for voltage threshold extraction The Pulse l V bundle allows the Model 4200 SCS to support a wide range of applications such as charge trapping for high dielectric characterization isothermal testing of devic
17. n of acquisition modes triggers measurements calculations and up to four reference waveforms The dual channel oscilloscope integrates directly into the Model 4200 SCS chassis It can be purchased as an upgrade to existing systems KTEI ver sion 6 0 or above required or as an option for new systems OSCILLOSCOPE SPECIFICATIONS Bandwidth DC to 750MHz Channels 2 Maximum Sample Rate 1 25 giga samples per second per channel 1 888 KEITHLEY ws ony www keithley com n PULSE GENERATOR SPECIFICATIONS Programmable from 10ns to near DC Dual independent channels 100mV 20V into 509 100mV 40V into IMQ Pulse width duty cycle rise time fall time amplitude offset GREATER Semiconductor Characterization System ib Kpiithies Internal Pula bndertiace a ni cite Alen m B4 mi tate Erre n ities age te reed Hia Phe Piia ie har Howie Trae Peer Char iga Soe Lore G Dimen p i Erap un i p reil Piet Le fE Fun rag fi By em a wT Pal er j Bis mh el l Pairi Deir Ai i Sad Stake KEITHLEY KEITHLE Y i e a a tl Ct bk Wl EA Sd Ae a BS E oS MEA T i 5 i i i i vou ed J bhgib itchi O Eda i dane KEITHLEY MEASURE OF CONFIDENCE 4200 SCS High x Gate Stack Upper Interfacial Region Lower Interfacial Region Pulse I V measurement capabilities are in creasingly critical for high gate stack charac terization and
18. reAmp the Model 4200 PA extends the system s measurement resolution from 100fA to 0 1fA by effectively adding five current ranges to either SMU model The PreAmp module is fully integrated with the system to the user the SMU simply appears to have additional measurement resolution available The Remote PreAmp is shipped installed on the back panel of the Model 4200 SCS for local operation This installation allows for standard cabling to a prober test fixture or switch matrix Users can remove the PreAmp from the back panel and place it in a remote location such as in a light tight enclosure or on the prober platen to eliminate measurement problems due to long cables Platen mounts and triax panel mount accessories are available KTE Interactive Software Tools KTE Interactive includes four software tools for operating and maintaining the Model 4200 SCS in addition to the Windows operating system The Keithley Interactive Test Environment KITE is the Model 4200 SCS Windows device charac terization application It provides advanced test definition parameter analysis and graphing and automation capabilities required for modern semiconductor characterization Built in looping stress measure capabilities and data management enable many types of reliability testing Keithley User Library Tool KULT Allows test engineers to integrate custom algorithms into KITE using Model 4200 SCS or external instruments A GREATER MEASURE OF CONFIDEN
19. rforms lab grade DC and pulse device characterization real time plotting and analysis with high precision and sub femtoamp resolution The 4200 SCS offers the most advanced capabilities available in a fully integrated characteri zation system including a complete embedded PC with Windows operating system and mass storage Its self documenting point and click interface speeds and simplifies the process of taking data so users can begin analyzing their results sooner Additional features enable stress measure capabilities suitable for a variety of reliability tests The powerful test library management tools included allow standardizing test methods and extrac tions to ensure consistent test results The Model 4200 SCS offers tremendous flexibility with hard ware options that include four different switch matrix configurations and a variety of LCR meters and pulse generators A variety of customer support packages are also available including applications support calibration repair and training A Total System Solution The Model 4200 SCS provides a total system solution for DC and pulse characterization and reliability testing of semiconductor devices test structures and materials This advanced parameter analyzer pro vides intuitive and sophisticated capabilities for a wide variety of semiconductor tests The Model 4200 SCS combines unprecedented measurement speed and accuracy with an embedded Windows based PC and the Keithley Interactiv
20. ted to the Model 4200 SCS It also provides system diagnostics functions e Keithley External Control Interface KXCI The Model 4200 SCS application for controlling the Model 4200 SCS from an external computer via the GPIB bus KITE Projects A project is a collection of related tests organized in a hierarchy that parallels the physical layout of the devices on a wafer KITE operates on projects using an interface called the project navigator The project navigator simplifies organizing test files test execution and test sequencing The project navi gator organizes tests into a logical hierarchy presented in a browser style format This structure allows users to define projects around wafer testing e The project level organizes subsites and controls wafer looping execution e The subsite level organizes devices and controls subsite test sequencing e The device level organizes test modules manages test module libraries and controls device test sequencing e The test module level performs tests analyzes data and plots results Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user programmable number of probe sites on a wafer Contact the factory for a list of supported analytical probers A manual prober mode prompts the operator to perform prober opera tions during the test sequence Test Sequencing KITE provides point and click test sequ
21. time after slewing for the high speed mode and after 500ns typical settling time after slewing for the high voltage mode into a 5022 load 3 Specifications apply to a 10 90 transition typical All specifications apply at 23 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes of warmup 1 888 KEITHLEY ws ony www keithley com n lt 150 ns Pulse period and width are variable in 10ns steps without any output glitches or dropouts GREATER TRIGGER SOURCE Channels 1 to 2 External Pattern Software POST TRIGGER DELAY 0 to 655 seconds PRE TRIGGER DELAY 0 to waveform time TRIGGER HOLD OFF RANGE 0 to 655 seconds TRIGGER MODES Edge or Pulse Width EDGE TRIGGER MODE Rising or Falling Edge PULSE WIDTH RANGE 20ns to 655 seconds 10ns resolution EXTERNAL TRIGGER INPUT TTL compatible 10k 2 input impedance CONNECTOR SMB OPTIONAL SCOPE PROBE 4200 SCP2 ACC BANDWIDTH 70MHz ATTENUATION 1x MAX DC 300V DC rated LOADING 100pF and 1MQ LENGTH 1 meter CONNECTOR BNC NOTES 1 Inputs are referenced to 4200 chassis ground All specifications apply at 23 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes of warmup KEITHLEY CONFIDENCE MEASURE OF 4200 SCS Semiconductor Characterization System 4200 PIV Typical Specifications CHANNELS Two TYPICAL PULSE PERFORMANCE With 4200 Remote Bias Tee Figure 2 Wit
22. to two points on a DUT such as the gate and the drain simultaneously Using a supplied User Test Module it is simple to incorporate pulse gener ation into KITE test sequences The pulse generator can also be used as a stand alone pulse generator using the pulse generator s Window s GUI This GUI can control a wide range of variables including pulse frequency duty cycle rise fall time amplitude offset and the ability to trigger single pulses and or pulse chains The dual channel pulse generator has a wide range of uses Typical applications include e Charge pumping to characterize interface state densities in MOSFET devices Using AC stress pulses of varying fre quencies to simulate real world AC signals applied to clocked devices Frequency Range 1Hz 50MHz Pulse Width Channels Basic clock generation for test vectoring and failure analysis Digital triggering Pulse Amplitude The pulse generator can be purchased as iaka an upgrade to existing systems KTEI version 6 0 or above required or as an option for new systems Programmable Parameters Dual Channel Digital Oscilloscope The optional dual channel digital oscilloscope places more than the per formance of a bench top oscilloscope into your 4200 SCS It also supports time domain measurements of pulse waveforms and monitors the reac tions of devices under test to those pulses Some of the features of this oscilloscope include a broad selectio
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