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X-TMF-5964-5850EM-MFC-eng Cover.pmd

1. 2 8 2 5 Maximum Allowable Loop Resistance Current I O version sss 2 8 2 6 Electrical Hookups Current I O version 2 9 3 1 Model 5964 5850EM Components arrnnnnnnvvnnnnnvnonvnvrrnnnnnrennannnvnnnnnrnnnnnnnrnnannnnnnnnnrnnesennrnesennnene 3 2 3 2 Externaslly Accessible Adjustments U U U nenn 3 3 3 3 Flow Sensor Operational Diagram VCR End Connections Shown 3 4 3 4 Flow Controller System Block Diagram a 3 4 3 5 Enhanced Response 20 Pin Card Edge PC Board Jumper location and Function 3 6 3 6 Standard Response 20 Pin D Connector PC Board Jumper location and Function 3 7 3 7 Enhanced Response 15 Pin D Connector PC Board Jumper location and Function 3 8 3 8 Standard Response 15 Pin D Connector PC Board Jumper location and Function 3 9 3 9 Current I O Version PC Board Jumper Location and Function 3 10 3 10 Command Steps Soft Start Disabled a 3 11 3 11 100 Command Steps Soft Start Enabled 3 11 3 12 Adjustment Potentiometer Location nanne een ennnennen een ennnennerenvenenennen ee vennnnnnen 3 14 3 13 Bench Troubleshooting Circuit nennen ee nnne nennen 3 16 3214 Resp
2. edi DEEP 3 45 2 PLACES 3 0 8 32 UNC 2B X 1 4 DP MOUNTING HOLE M4 X 7 12 3 0 DEEP 1 LEGACY MOUNTING HOLE E 2 MOUNTING HOLES SEMI STANDARD MOUNTING Figure 1 3 MFC MFM Dimensional Drawing for Model 5964 5850EM Downported with D Connector Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 INCH DIMENSIONS IMM 1 NOTE SHOWN WITH NORMALLY OPEN VALVE CONFIGURATION 433 01 110 00 0 28 445 03 113 00 076 22 DIA 735 20 5 6 18 7 4 PLCS 16 17 1 18 N 40 43 DIA Boo ag F DIA C BORE 9 0 18 9 024 I 61 DEEP 8 32 UNC 2B X 1 4 DP i 2 PLACES MOUNTING HOLE M4 X 7 HAR OLDEEP 2 MOUNTING HOLES Figure 1 4 MFC MFM Dimensional Drawing for Model 5964 5850EM Downported with Card Edge Installation and Operation Manual Section 2 Installation X TMF 5964 5850EM MFC eng Part Number 541B121AH
3. QTA Viton SUA Buna Kalrez 3 4 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 3 3 Theory of Operation The thermal mass flow sensing technique used in the Model 5964 5850EM works as follows A precision power supply provides a constant power heat input P at the heater which is located at the midpoint of the sensor tube Refer to Figure 3 3 At zero or no flow conditions the heat reaching each temperature sensor is equal The temperatures T1 and T2 therefore are equal When gas flows through the sensor tube the upstream sensor is cooled and the downstream sensor is heated which produces a temperature difference The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is AT A P Cp m Where AT Temperature difference T2 T1 K Cp Specific heat of the gas at constant pressure kJ kg K P Heater power kJ s m Mass flow kg s A Constant of proportionality s2 K2 kJ2 A bridge circuit interprets the temperature difference and a differential amplifier generates a linear 0 5 Vdc signal directly proportional to the gas mass flow rate Side View 7 Figure 3 2 Externally Accessible Adjustments Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM
4. Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden taytyy olla 100 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liitt minen katso liiteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls f r CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 D eller runda typer av anslutningskontakter ska vara sk rmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en
5. 2 500 V and measure the flow rate Calculate the error as a percentage of full scale Measured Desired Flow Flow Rate Rate Full Scale Error 100 x Full Scale Flow Rate Example What is the percent of full scale error when full scale is equal to 100 sccm Measured flow rate 48 5 sccm Desired flow rate 50 0 sccm 48 5 50 100 Full Scale Error 100 x 1 5 i Calculate the TP2 correction voltage error calculated in Step h x 0 450 Volts Example Error 1 5 TP2 correction voltage 1 5 x 0 450 0 675 Volts New TP2 voltage zero volts 0 675 0675 Volts j Set the command potentiometer for 100 flow 5 000 V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common k Adjust the linearity potentiometer for an output equal to the new calcu lated TP2 voltage I Repeat Steps f g and h 11 If the error calculated in Step h is less than 0 5 then the calibration procedure is complete l2 If the error is greater than 0 5 set the command potentiometer for 10096 5 000 V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Calculate a new TP2 voltage as follows employing the measured TP2 voltage error measured New TP2 voltage calculatedin x 0450V 2 Step h voltage Example Controller error 0 7 Measured TP2 voltage 0 567 Volts TP2 correction 0 7 x 0 450 0 315 Volts New TP2
6. 5964 5850EM mass flow controller to optimum step response performance This method is the preferred way to adjust the step response Adjustment of the response circuit will not affect the accuracy of the flow controller as adjusted in Section 3 7 Note The output voltage shown in Figure 3 14 is based on a controller equipped with an elastomeric seat For a metal valve seat a positive offset up to 400 mV can be expected for a zero command Enhanced Response PC Board Adjustment 1 specification not guaranteed Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed of three samples or greater per second to monitor the rate of change of the output signal a Set the command potentiometer for 100 of flow 5 000 V and wait about 30 seconds for the flow output signal to stabilize b Step the command signal to zero percent or activate valve override closed to stop the flow Observe the flow signal output as it decays c The behavior of the flow signal during this transition between 10096 and zero percent flow indicates the adjustment required of the anticipate potentiometer Refer to Figure 3 14 Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 DJUST CLOCKHISE w F Oo a o gt Lu ac c 1 o gt 2 n 2 o me Be mn Figure 3 14 Response Adjustment OUTPUT VOLTAGE VOLTS Br
7. D 992 amp C 061 AND HIGHER COMPONENT SIDE SHOWN J1 CONFIGURATIONS BLACK CD D CD veo ae BLACK 1 YELLOW BAD DLE External Valve Return 5V Ref is enabled Pin 10 is connected Pin 10 is grounded on Pin 10 to Circuit Common at the Power Supply 5V Ref disabled end of the cable Standard 5V Ref disabled NOTE For S097X061AAA PC Boards all J1 Pins should be open Figure 3 5 Enhanced Response 20 Pin Card Edge PC Board Jumper Location and Function 3 7 3 8 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 J7 GREEN J4 amp J1 BLUE REMOTE TRANSDUCER INPUT VALVE FUNCTION CE EE m Disabled Enabled Normally Normally Standard Closed Open NOTE Normally open valves are identified by a label on the solenoid cover TEST POINTS CIRCUIT COMMON TP4 VALVE TEST TP3 LINEARITY VOLTAGE TP2 VALVE SENSOR VOLTAGE TP1 CONNECTOR Multiplied by 100 ADJUSTMENT POTENTIOMETERS SPAN J2 RED SOFT START LINEARITY ANTICIPATE J2 ZERO um Died Isable 2 Standard CAUTION CONNECTOR EB J8 Enabled LEE J3 Do not place a jumper between J8 and J3 as shown above S097Ye24AAA Permanent damage to the board will result O CS REV J COMPONENT shout J8 YELLOW J3 BLACK 5 VOLT REFERENCE amp PIN 10 FUNCTION VALVE DRIVE J8 J8 J8 mmo Emm BUG Ema mim 12 J3 J3 J
8. ELECTRICAL CHARACTERISTICS continued 5 Volt Reference Output 5 Volts 0 01 Vdc into 2 000 ohms minimum Power Requirements Voltage Option N C Valve or N O Valve with flow less than 2 5 slpm 3 25 watts max 15 Vdc 35 mA 15 Vdc 180 mA N O Valve with flow rate greater than 2 5 slpm 10 5 watts max 15 Vdc 350 mA 15 Vdc 350 mA Current Option 15 Vdc to 28 Vdc 3 68 Watts min 15 Vdc 245 mA 10 36 Watts max 28 Vdc 370 mA Power Supply Sensitivity None within 5 of specified voltage See Power Requirements Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 50 12 7 WRENCH FLAT TYP 1 4 MVCR INLET 68 CONNECTION Section 1 Introduction Brooks Models 5964 5850EM f INCH DIMENSIONS MM 15 POSITION MALE D CONNECTOR 1 4 MVCR CONNECTION OUTLET 1 48 37 7 17 3 I L 16 41 1 I 38 2 6 amp 35 9 0 8 32 UNC 2B X 1 4 DP MOUNTING HOLE 1 LEGACY MOUNTING HOLE M4 X 7 12 3 0 DEEP 2 MOUNTING HOLES SEMI STANDARD MOUNTING Figure 1 1 MFC MFM Dimensional Drawing for Model 5964 5850EM with D Connector and VCR Fittings
9. To Power Supply 2 Bypass Sensor Tube prox 10 sccm Max Full Scale Less 10 sccm RESTRICTOR FLOW B Figure 3 3 Flow Sensor Operational Diagram VCR End Connections Shown 1 READOUT PRECISION 5 VOLT p DEVICE SOURCE 5 VOLT FLOW SIGNAL REFERENCE SENSOR ADJUST OUTPUT FLOW COMMAND ERROR CONTROL INPUT AMPLIFIER VALVE VALVE VALVE TEST VALVE OVERRIDE OVERRIDE POINT PURGE RETURN SUPPLY Figure 3 4 Flow Control System Block Diagram 3 6 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 3 4 Features The flow restrictor shown in Figure 3 3 performs a ranging function similar to a shunt resistor in an electrical ammeter The restrictor provides a pressure drop that is linear with flow rate The sensor tube has the same linear pressure drop flow relationship The ratio of the restrictor flow to the sensor tube flow remains constant over the range of the meter Different restrictors have different pressure drops and produce meters with different full scale flow rates The span adjustment in the electronics affects the fine adjustment of the meter s full scale flow In addition to the mass flow sensor the Model 5964 5850EM Ma
10. ee dun 3 22 Section 4 Maintenance 4 1 QUI s a este nc ane ae safes hisap aaa Pu wass E 4 1 4 2 Troubleshooting 4 3 Gas Conversion Factors 4 4 Omee DING 4 10 45 en IEEE 4 15 Section CE Certificate CE Certificate of Mass Flow Equipment nnns snnt nnns nnne qasqa A 1 Warranty Local Sales Service Contact Information nonnen neee n eer rn rann n sr rna nana Back Cover Content s Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Figures Figure Page Number Number 1 1 MFC MFM Dimensional Drawing for Model 5964 5850EM with D Connector VCR Fittings sess enne 1 5 1 2 MFC MFM Dimensional Drawing for Model 5964 5850EM with Card Edge and VCR Fittings eene 1 6 1 3 MFC MFM Dimensional Drawing for Model 5964 5850EM Downported with D Connector 1 7 1 4 MFC MFM Dimensional Drawing for Model 5964 5850EM Downported with Card Edge 1 8 2 1 Gard Edge Connector D E end 2 6 2 2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram 2 7 2 3 D Connector Shielded Cable Hookup Diagram Voltage I O Version 2 6 2 4 D Connector Shielded Cable Hookup Diagram Current I O Version
11. flow controller and the shut off valve which will result in a surge upon actuation of the shut off valve This surge can be reduced in magnitude by locating close together the controller and the shut off valve or by moving the shut off valve upstream of the controller 2 9 Electrical Interface NOTICE The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention is required when selecting the signal cable to be used with CE marked equipment Brooks supplies high quality cables which meet the specifications for CE certification If you provide your own signal cable you should use a cable which is completely screened with a 100 shield D Connectors should also be shielded using a metal shield If applicable metal cable glands must be used to provide cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 degrees The shield should be terminated to an earth ground See Appendix A for CE Certification of Mass Flow Equipment Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Section 2 Installation November 2008 Brooks Models 5964 5850EM To insure proper operation the Model 5964 5850EM must be connected per Figures 2 1 through 2 6 depending upon the type of printed circuit board and co
12. within 2 mV of the voltage set in Step c above If the zero does not repeat check for leakage Note Controllers with all metal or Teflon valve seats do not provide tight shut off A 0 896 leak through is typical For metal and Teflon seat controllers close a downstream shut off valve and observe the flow signal Set the command potentiometer for 100 flow 5 000 V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Adjust the linearity potentiometer for an output of 0 0 V zero Volts As an alternative you can turn the linearity potenti ometer 25 turns counterclockwise Read the full scale sensor voltage and flowrate Prior to taking the measurement allow a minimum of two minutes for the flow to stabilize Connect the DVM positive lead to TP1 and the negative lead to TPO Measure and record the voltage If the flowrate is within specification skip to Step h Obtain the correct flowrate at 10096 command by adjusting the span potentiometer and calculate the new sensor voltage using the following equation measured Sensor TP1 voltage measured flow rate X desired flow rate Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Adjust the span potentiometer until the TP1 to TP0 sensor voltage is equal to the value calculated above Recheck the flow rate after the flo
13. Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden Die Belegung der Anschlu pins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen A 1 A 2 Section CE Certification Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 English Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 10096 shiel
14. Green Not Used Blue Valve Override Violet Not Used Gray 5 V Reference Output or Valve Return White Valve Off Black This Pin is used for Valve Common on Unit replacement PC board Jumper Selectable Remote Transducer input on standard response PC board only Refer to Figure 3 6 Jumper Selectable Refer to Figure 3 5 or 3 6 wk o r Figure 2 2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram Section 2 Installation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 looooooo os 9 15 Function Color Code Command Return Black 0 5 Volt Signal Output White Not Used Red Current Signal Output Green 15 to 28 Vdc Supply Orange Not Used Blue Current Command Input Wht Blk Voltage Command Input Supply Grn Bik Signal Output Return Org BIk 5 Volt Reference Output Blu Blk Valve Override Blk Wht Not Used Red Wht Chassis Ground Grn Wht Not Used Blu Wht OND WW NN Figure 2 4 D Connector Shielded Cable Hookup Diagram Current Version TITT Reme p TOTAL LOOP RESISTANCE OHMS 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 POWER SUPPLY VOLTAGE VOLTS Figure 2 5 Maximum Allowable Loop Resistance Current I O Version In
15. In Line Filter 2 8 Installation It is recommended that an in line filter be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Table 2 1 Recommended Filter Size Maximum Flow Rate Recommended Filter 100 sccm 1 micron 500 sccm 2 micron 1 to 5 slpm 7 micron 10 to 30 slom 15 micron Prior to installation make certain all piping is clean and free of obstructions for tubing installations Install the piping in such a manner that permits easy access to the instrument if it needs to be removed for cleaning or test bench troubleshooting For surface mount downported devices verify that the seal cavities are clean and free of lateral scratches ACAUTION When installing the controller care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until time of installation Recommended installation procedures a The Model 5964 5850EM should be located in a clean dry atmo sphere relatively free from shock and vibration b Leave sufficient room for access to the electrical components span and zero potentiometers c Install in such a manner that permits easy removal if the instrument requires servicing ACAUTION When used with a reactive sometimes toxic gas contamination o
16. Instrument must have been purged in accordance with the following AWARNING Before returning the device purge thoroughly with a dry inert gas such as Nitrogen before disconnecting gas connections Failure to correctly purge the instrument could result in fire explosion or death Corrosion or contamination may occur upon exposure to air All flow instruments returned to Brooks requires completion of Form RPROO3 1 Brooks Instrument Decontamination Statement along with a Material Safety Data Sheet MSDS for the fluid s used in the instrument Failure to provide this information will delay processing by Brooks personnel Copies of these forms can be downloaded from the Brooks website www BrooksInstrument com or are available from any Brooks Instrument location listed above 2 6 Removal from Storage To safeguard the instrument against transportation damage it is recommended to keep the instrument in its factory container until ready for installation Upon removal of the instrument from storage a visual inspection should be conducted to verify its as received condition If the instrument has been subject to storage conditions in excess of those recommended See Section 2 3 it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes Installation and Operation Manual Section 2 Installation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM 2 7
17. November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Contents X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Paragraph Page Number Number Section 1 Introduction 1 1 How to Use This Maat s t 1 1 122 DESCHPION er getan 1 1 to Seleucus 1 2 Section 2 Installation 2 1 A her 2 1 2 2 Receipt of Equipment at n nna eden rn a ad a 2 1 2 3 Recommended Storage Practice n 2 1 2 4 Return STU PING TIN au TI m 2 2 2 5 Transit PRECAUTION au u 2 2 2 6 Removal from Storage 2 2 2 7 OmU Tm 2 3 2 8 Installation na 2 3 2 9 El amp etrie l interfate ita 2 4 2 10 Operation Procedure ia 2 5 Section 3 Operation 3 1 SE EEE EE NE ARENA 3 1 3 2 Connections and Controls dd 3 1 33 Theory of Operation ayu aw didnt 3 4 3 4 FeatufeSu u ai 3 6 3 5 Adjustment Potentiometers iii i Lo P aL aandere 3 15 36 Zero Adjustment unike einen 3 16 37 Calibration Procedure etia ann tias 3 17 3 8 RESPONSE Adjustment
18. Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 INCH DIMENSIONS MM NOTE SHOWN WITH NORMALLY OPEN VALVE CONFIGURATION 50 12 7 WRENCH FLATS TYP 1 4 MVCR CONNECTION CONNECTION INLET OUTLET is i n 37 7 1 4 MVCR 35 9 0 8 32 2 1 4 MOUNTING HOLE X 7 bes OUNTING HOLES Figure 1 2 MFC MFM Dimensional Drawing for Model 5964 5850EM with Card Edge and VCR Fittings Installation and Operation Manual Section 1 Introduction X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM INCH DIMENSIONS MM 15 POSITION MALE D CONNECTOR i 17 3 433 01 16 110 00 0 28 41 445 03 113 00 076 22 DIA 38 35 T 3 62 5 6 9 6 894 18 7 829 4 PLCS 46 47 1 DIA 1 18 i N o 4 0 4 3 30 0 er 30 DIAC BORE 354 18 E 7 6
19. board will result SHUT OFF VALVE GAS There are three fundamentally different printed circuit boards used on the Model 5964 5850EM depending on line pressure and full scale flow rate The enhanced response PC Board is the primary board and is used for all Nitrogen equivalent full scale flow rates above 50 sccm with line pressures less than 150 psig The settling time specification for the enhanced response PC Board is one second The second type of PC Board is the standard response PC Board with a settling time of three seconds The enhanced response PC Board can be identified by five adjustment potentiometers versus four potentiometers on the standard response PC board The third type of PC Board is the Current I O version which also has a settling time of three seconds PRESSURE GAUGE V PRESSURE GAUGE CN ER Y FLOW 7 N LA L J SUPPLY PRESSURE REGULATOR Figure 3 13 Bench Troubleshooting Circuit WIE let S SS Ui HDD MASS FLOW CONTROLLER MEASURING DEVICE SHUT OFF VALVE 3 17 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 When calibrating the Current I O Version it is easiest to calibrate using 0 5 Vdc command and flow signals and follow the standard response procedure Refer to Section 3 4 Features Current I O Version for proper
20. correction 0 315 0 567 0 252 Volts Adjust the linearity potentiometer for an output equal to the new TP2 correction voltage and then repeat Steps f g and h 3 21 3 22 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 3 8 Response Adjustment Note The voltage at TP2 can range from 10 to 3 Volts It is recommended however that this voltage stay between 2 5 and 2 5 Volts for proper operation If the recommended voltage range is exceeded the desired accuracy and or signal stability may not be achieved If one of the limits is reached check the restrictor sizing in Section 4 7 This section describes the procedure for step response adjustment For enhanced response PC Boards 5 potentiometers follow either one of the enhanced response procedures For standard response PC Boards 4 potentiometers follow either one of the standard response procedures Two methods of adjusting the step response on the enhanced or standard response PC boards of the Model 5964 5850EM mass flow controller can be used Adjustment 1 describes a method that will get the step response close to optimum quickly and without any flow measuring equipment This method should be used when the response time of the flow controller is not critical to overall system performance Adjustment 42 describes a method that will allow adjustment of your Model
21. jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 100 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse F r elektrisk anslutning till kontaktstiften h nvisas till medf ljande instruktionsmanual Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installat
22. must be adjusted clockwise and Steps a and b repeated c3 If the flow signal decays slowly and does not go below 0 5 Volt the anticipate potentiometer must be adjusted counterclockwise and Steps a and b repeated Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Standard Response and Current I O PC Board Adjustment 2 specification guaranteed Note Adjustment of the anticipate potentiometer to obtain a flow rate performance to be within 2 of flow rate commanded in less than three seconds six seconds for Current I O Version after command change requires the use of a fast response flowmeter 500 millisecond response to be within 0 2 of final value or better in series with the Model 5850EM and a storage oscilloscope or recorder a Make a step change in command to the controller from zero to 100 of full scale flow and record the output signal of the fast response flowme ter b If this signal shows more than 4 overshoot adjust the anticipate potentiometer one half to one turn counterclockwise If the signal does not show overshoot but is not within 2 full scale of final value after three seconds adjust the anticipate potentiometer one half to one turn clockwise Set the command potentiometer for zero percent of flow c Repeat Steps a and b until the fast response flowmeter output signal meets the specified response requirement
23. nyi v A 3 A 4 Section CE Certification Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1996 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilita Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualita che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 100 I connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemit Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici Il cavo impiegato dev
24. service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas B 1 888 554 FLOW Europe T 31 318 549 290 Within Netherlands Z 0318 549 290 Asia B 011 81 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS Brooks su an aaa uya Brooks Instrument LLC FreoN 125 ertet ei PE Eas E l DuPont de Nemours amp Co farei oio DuPont Dow Elastomers Teflon gt tenen E I DuPont de Nemours amp Co nternet ede Cajon Co VOR arti bene Cajon Co A aussi DuPont Performance Elastomers VoLEU Mbelter 5 reae tern a ua soan ss Brooks Instrument LLC Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 318 549 300 T 011 81 3 5633 7100 T 215 362 3700 F 31 318 549 309 F 011 81 3 5633 7101 F 215 362 3745 E Mail BrooksEu BrooksInstrume
25. the output signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two gases or by sensor conversion factor list of sensor conversion factors is given in Table 4 5 To change to a new gas multiply the output reading by the ratio of the gas factor for the desired gas by the gas factor for the calibration gas used Factor of the New Gas A Flow Rate Readi Gas Flow Rate Output Heading x Factor of the Calibration Gas Example The controller is calibrated for Nitrogen The desired gas is Carbon Dioxide The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 773 57 98 sccm In order to calculate the conversion factor for a gas mixture the following formula should be used 100 100 100 P P P Sensor Sensor Sensor Conversion Conversion Conversion Factor Factor Factor Sensor Conversion Factor Where P percentage of gas 1 by volume P percentage of gas 2 by volume P percentage of gas n by volume Installation and Operation Manual Section 4 Maintenance X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Table 4 3 Conversion Factors Nitrogen Base FORMULA SENSOR DENSITY FACTOR FACTOR kg m Acetylene 0 615 0 970 1 173 Air eae 0 998 1 018 1 293 Allene C H 0 478 1 1
26. this potentiometer will alter the response of the mass flow controller and is therefore not recommended unless adjusting the response of the device Note Only enhanced response printed circuit boards are equipped with a response potentiometer Each Model 5964 5850EM is factory adjusted to provide a zero 10 mVdc at zero flow The adjustment is made in our calibration laboratory which is temperature controlled to 20 C 68 F 3 F After initial installation and warm up in the gas system the zero flow indication may be other than the factory setting This is primarily caused by changes in temperature between our calibration laboratory and the final installation The zero flow reading can also be affected to a small degree by changes in line pressure and mounting attitude To check zero always mount the controller in its final configuration and allow a minimum of twenty minutes for the temperature of the controller and its environment to stabilize If an upstream shut off valve is installed it should be closed Verify that the gas system is not pressurized Using a suitable voltmeter check the controller output signal If it differs from the factory setting adjust it by removing the lower pot hole plug refer to Figure 3 2 which is located closest to the controller body Adjust the zero potentiometer until the desired output signal is obtained Installation and Operation Man X TMF 5964 5850EM MFC eng Part Number 541B121AHG November
27. through the controller Replace printed circuit board Refer to Section 4 3 Connect command signal Refer to Section 2 6 for terminal assignments Remove Pin D from common Output signal follows set point at higher commands but will not go to zero Leaky control valve Excessive resistance in valve voltage return line Disassemble and repair valve Refer to Section 4 3 Reduce wiring resistance or reconfigure controller for External Valve Return Refer to Section 3 4 Output signal follows set point at lower commands but does not reach full scale Insufficient inlet pressure or pressure drop Partially clogged sensor Partially clogged valve Valve out of adjustment Valve guide spring failure Adjust pressures inspect in line filters and clear replace as necessary Check calibration Refer to Section 3 7 Disassemble and repair control valve Refer to Section 4 3 Adjust valve Refer to Section 4 4 Check valve spring Controller grossly out of calibration Flow is higher than desired Partially clogged sensor Clean sensor Refer to the cleaning procedure Section 4 2D Controller grossly out of calibration Flow is lower than desired Partially clogged restrictor Replace restrictor Refer to Section 4 3 Controller oscillates Pressure drop or inlet pressure excessive Oversized orifice Valve out of adjustment Anticipate potentiometer out of adjustment Faulty pressure
28. 0 390 2 099 5 492 Dichlorofluoromethane f 21 0 456 1 985 4 912 Dichlorosilane 0 442 1 897 4 506 1 2 Dichloroethane HCl 0 382 1 879 4 419 1 2 Dichlorotetrafluoroethane f 114 0 231 2 449 7 479 2 2 Dichloro 0 259 2 336 6 829 1 1 Difluoro 1 Chloroethane 0 341 1 957 4 776 1 1 Difluoroethane af 0 415 1 536 2 940 1 1 Difluoroethylene 0 458 1 512 2 860 Diethylsilane 0 183 1 775 3 940 Difluoromethane f 32 oH 0 627 1 360 2 411 Dimethylamine 9 NH 0 370 1 269 2 013 Dimethylether 0 392 1 281 2 055 2 2 Dimethylpropane 0 247 1 613 3 244 Disilane LH 0 332 1 493 2 779 Ethane 0 490 1 038 1 357 Ethanol 0 394 1 282 2 057 Ethylacetylene CH 0 365 1 384 2 388 Ethyl Chloride H 0 408 1 516 2 879 Ref No J 836D508 Gasdata doc Vsn 8 6 4 8 Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Table 4 3 Conversion Factors Nitrogen Base Continued FORMULA SENSOR ORIFICE Ethylene Ethylene Oxide c O Fluorine 3 Fluoroform f 23 CHF Germane Germanium Tetrachloride GeCl Halothane R 123B1 C HBrCIF Helium Hexafluoroacetone Hexaflorobenzine Hexafluoroethane f 116 Hexafuoropropylene HFP Hexamethyldisilane HMDS Hexane Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen lodide Hydrogen Selenide Hydrogen Sulfide lodine Pentafluoride Isobutane Isobutene Isopent
29. 0EM All Model 5964 5850EM instruments are factory calibrated for optimum performance The only potentiometer recommended for field adjustment is the Zero As shown in Figure 3 2 access to the Zero Potentiometer is provided by removing the plug labeled Z The Span Adjustment is also accessible by removing the S plug however its adjustment is not recommended as described below Adjustment of the remaining potentiometers necessitates removal of the electronics cover ACAUTION Adjusting potentiometers can seriously affect the performance of the mass flow controller and should only be performed by properly trained and qualified personnel Span The span potentiometer is used to adjust the full scale setting of the mass flow controller An adjustment in the clockwise direction will give less flow while turning counterclockwise will give more flow Adjusting this potentiometer will alter the calibration and is therefore not recommended unless calibrating the device Side View Span Linearity Anticipate Zero Response Note 1 Linearity Anticipate and Response Potentiometers necessitate removal of the electronics cover 2 Not all Printed Circuit Boards contain a Response Potentiometer Figure 3 12 Adjustment Potentiometer Location Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 3 6 Zero Adjustment Li
30. 2008 3 7 Calibration Procedure ual Section 3 Operation Brooks Models 5964 5850EM Ifthe valve has been disassembled and any of the following parts have been replaced the control valve adjusting procedure in Section 4 4 must be performed before the Model 5964 5850EM is calibrated orifice valve stem plunger assembly lower guide spring valve seat Calibration of the Model 5964 5850EM mass flow controller requires the use of a digital voltmeter DVM and a precision flow standard calibrator such as the Brooks Instrument s Vol U Meter It is recommended that the calibration be performed only by trained and qualified service personnel The recommended flow circuit for performing zero adjustments calibration and troubleshooting is shown in Figure 3 13 If the mass flow controller is to be used on a gas other than the calibration gas apply the appropriate gas conversion factor Refer to Section 4 5 Size the orifice for actual operating conditions Refer to Section 4 6 If older Brooks secondary electronics Models 5878 5876 and 5896 are being used as a power supply during the calibration the 5 Volt reference must be enabled on the card edge version for proper operation Remember to deactivate the 5 Volt reference before installing the calibrated mass flow controller in the system where Terminal 10 is grounded ACAUTION Do not ground 5 Volt reference output when it is enabled Improper operation of the printed circuit
31. 224BMG Rlo m m lt Ix S lt c H n 0 uz a r e r p mnim u Materials BMG 316 Stainless Steel Electropolished CVA Hastelloy C ACLFE only DCA Monel R ACLFE only NOTES For flow rates less than 8 sccm use the low flow plug P N 618 K 019 BMG in place of a restrictor assembly If two sizes are allowed because of overlap select the larger size Restrictor size not required to enter order Installation and Operation Manual Section A CE Certification of X TMF 5964 5850EM MFC eng Mass Flow Equipment Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Dansk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Emne Till g til instruktions manual Reference CE m rkning af Masse Flow udstyr Dato Januar 1996 Brooks Instrument har gennemf rt CE m rkning af elektronisk udstyr med succes i henhold til regulativet om elektrisk st j EMC direktivet 89 336 EEC Der skal dog g res opmeerksom p benyttelsen af signalkabler i forbindelse med CE m rkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med hel sk rm med 100 daekning Forbindelses stikket type D eller cirkul re skal v re sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal sk rmet
32. 3 5V Ref enabled Pin 10 is Connected External Valve Return Use Valve Drive Valve Drive on Pin 10 to Circuit Common where Pin 10 is connected 15 Volts 30 Volts 5V Ref Disabled to Power Supply Common at Standard the Power Supply for 15 Volt Valve Drive or where Pin 10 is connected to 15 Volts at the Power Supply for 30 Volt Valve Drive 5V Ref Disabled Figure 3 6 Standard Response 20 Pin Card Edge PC Board Jumper Location and Function Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 J1 GREEN LINEARITY JUMPER B B Error Error A A TEST POINTS CIRCUIT COMMON TP4 SENSOR VOLTAGE TP1 SENSOR VOLTAGE TPO ADJUSTMENT POTENTIOMETERS SPAN LINEARITY ANTICIPATE ZERO RESPONSE SENSOR CONNECTOR CTA SO97Y984AAA CS REV H 5097XTI9AAA C9 REV B Section 3 Operation Brooks Models 5964 5850EM J3 BLACK VALVE DRIVE JUMPER Be el Valve Drive External 15 Volts Valve Return NOTE The 5V Reference is always enabled and is available on Pin 11 2 RED SOFT START Disabled Standard acq Enabled CS REV H 984 amp B 119 COMPONENT SIDE SHOWN Figure 3 7 Enhanced Response 15 Pin D Connector PC Board Jumper Location and Function 3 9 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 J7 G
33. 99 1 787 Ammonia NH 0 786 0 781 0 771 Argon Ar 1 395 1 195 1 784 Arsine 0 754 1 661 3 478 Trichloride BCL 0 443 2 044 5 227 Boron Trifluoride 0 579 1 569 3 025 Bromine Pentafluoride 5 0 287 2 502 7 806 Bromine Trifluoride 0 439 2 214 6 108 Bromotrifluoroethylene BIF 0 326 2 397 7 165 Bromotrifluoromethane f 13B1 0 412 2 303 6 615 1 3 Butadiene 0 354 1 413 2 491 Butane 0 257 1 467 2 593 1 Butene C H 0 294 1 435 2 503 CIS 2 Butene C H 0 320 1 435 2 503 Trans 2 Butene 0 291 1 435 2 503 Carbon Dioxide 0 773 1 255 1 977 Carbon Disulfide 0 638 1 650 3 393 Carbon Monoxide 0 995 1 000 1 250 Carbon Tetrachloride 0 344 2 345 6 860 Carbon Tetrafluoride f 14 0 440 1 770 3 926 Carbonyl Fluoride 0 567 1 555 2 045 Carbonyl Sulfide 0 680 1 463 2 180 Chlorine 0 876 1 598 3 214 Chlorine Dioxide 0 693 1 554 3 011 Chlorine Trifluoride 0 433 1 812 4 125 2 Chlorobutane 0 234 1 818 4 134 Chlorodifluoromethane f 22 0 505 1 770 3 906 Chloroform Trichloromethane 0 442 2 066 5 840 Chloropentafluoroethane f 115 2 5 0 243 2 397 7 165 Chlorotrifluoroethylene 3 0 337 2 044 5 208 Chlorotrifluoromethane f 13 a 0 430 1 985 4 912 Cyanogen 0 498 1 366 2 322 Cyanogen Chloride 0 618 1 480 2 730 Cyclobutane 0 387 1 413 2 491 Cyclopropane H 0 505 1 224 1 877 Deuterium 0 995 0 379 0 177 Diborane 0 448 1 000 1 235 Diboromodifluoromethane f 12B2 0 363 2 652 8 768 1 2 Dibromotetrafluoroethane f 114B2 0 215 2 905 10 53 Dichlorodifluoromethane f 12
34. ED directive Meters described in this manual are in compliance with EN directive 97 23 EC module H Conformity Assessment All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with category I II Ill of PED Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP ESD Electrostatic Discharge ACAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components
35. FC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Differential Pressure Valve orifice sized for any pressure drop between 5 to 50 psi Minimum pressure drop depends on gas and range Ambient Temperature Limits Operating 40 F to 150 F 5 C to 65 C Non Operating 13 F to 212 F 25 to 100 C Leak Integrity Inboard to outboard 1 x 109 atm cc sec Helium max PHYSICAL CHARACTERISTICS Materials of Construction 316L VAR Vacuum Arc Remelt 316L and high alloy ferritic stainless steel External seals Nickel Internal seals Nickel Valve Seat 316L Viton fluoroelastomers Buna N Kalrez or Teflon Dimensions Refer to Figures 1 1 thru 1 4 Process Connections 1 4 Tube VCR Downport C Seal Downport W Seal Surface Finish 5850EM 32Ra Passivated 5964 7Ra Electropolished ELECTRICAL CHARACTERISTICS Electrical Connections Card Edge 30 microinch gold over low stress nickel plated copper D Connector 15 Pin DA 15P Command Input Voltage Option 0 5 Vdc Input resistance 40 k ohm min Current Option 4 20 mAdc Input resistance 75 ohm Output Signal Voltage Option 0 to 5 Vdc into 2 000 ohms minimum Current Option Jumper selectable 4 20 mAdc or 0 20 mAdc refer to Figure 2 6 for maximum total loop resistance Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008
36. G November 2008 Brooks Models 5964 5850EM 2 1 General i x This section contains the procedures for the receipt and installation of the instrument See Section 1 for dimensional and connection requirements Do not attempt to start the system until the instrument has been permanently installed It is important that the start up procedures be followed in the exact sequence presented 2 2 Receipt of Equipment a r ss When the instrument is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability Areport should be submitted to your nearest Product Service Department Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEuEBrooksInstrument com Remove the envelope containing the packing list Carefully remove the instrument from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damage
37. Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Mass Flow Controllers BROOKS Model 5964 Mass Flow Controller with D Connector Model 5850EM Mass Flow Controller with D Connector www BrooksInstrument com Model 5850EM Downported Mass Flow Controller with Card Edge BROOKS INSTRUMENT Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Essential Instructions Read this page before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the
38. LTAGE TP3 LINEARITY VOLTAGE TP2 SENSOR VOLTAGE TP1 Multiplied by 100 ADJUSTMENT POTENTIOMETERS SPAN LINEARITY CONNECTOR ANTICIPATE ZERO SENSOR CONNECTOR FLOW amp 2 RED SOFT START EIC O 5097Y901AAA oO N SS CS KEV H Enabled J3 amp J4 BLUE N SS DES ES REG AND HIGHER CURRENT OUTPUT RANGE Standard COMPONENT SIDE SHOWN J4 B J4 i A I A f J3 J3 Note Does not affect voltage output Figure 3 9 Current I O Version PC Board Jumper Location and Function 3 12 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 COMMAND STEP CHANGES SOFT START DISABLED 1 SLPM NITROGEN INLET PRESSURE 25 PSIG ENHANCED RESPONSE PCB COMMAND ACTUAL FLOW MFC OUTPUT PERCENT OF FULL SCALE ss 10 12 14 16 18 20 22 24 26 30 6 8 TIME SECONDS SOFT START ENABLED 1 SLPM NITROGEN INLET PRESSURE 25PSIG COMMAND ACTUAL FLOW MFC OUTPUT PERCENT OF FULL SCALE Figure 3 11 100 Command Step Soft Start Enabled Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Five Volt Reference Output Valve Drive Configuration The 5 Volt reference output is required if a potentiometer is to be used to generate the Command Signal On Card Edge PC Boards Pin 10 c
39. Model 5964 5850EM the 5 Volt reference must be enabled Brooks secondary electronics that require the 5 Volt reference consist of 587x and 589x series a Mount the controller in its final orientation b Apply power to the controller and allow approximately 45 minutes for the instrument to warm up and stabilize its temperature c Turn on the gas supply d Command zero percent 0 flow and observe the controller s output signal If the output is not zero mVdc 10 mVde check for leaks and if none are found refer to the re zeroing procedure in Section 3 6 e Set the command for the desired flow rate to assume normal operation Note If a separate positive shut off valve is not installed a flow signal may result from leak through Leak through is more significant with stainless steel and Teflon valve seats 2 6 Section 2 Installation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Component Side Non Component Side of PC Board of PC Board FLOW amp P FLOW Chassis Ground Command Input Command Common Supply Common Valve Test Point Not Used 15Vdc Supply Slot Flow Signal Common Flow Signal Output 15 Vdc Supply Not Used Not Used Slot Not Used Not Used Valve Override Not Used 5V Ref or Valve Return or Not Used 10 L Valve Off O O Q gt G N A Inmoou gt This pin is used for Valve Common on Unit replacement
40. PC Board Remote Transducer In on 3 second response PCB only Refer to Figure 3 6 Jumper selectable Refer to Figure 3 5 or 3 6 Figure 2 1 Card Edge Connector 1 0000000 9 15 Function Color Code Command Common Black 0 5 Volt Signal Output White Not Used External Valve Return Red Valve Off Green 15 Vdc Supply Orange 15 Vdc Supply Blue Valve Test Point Purge Wht Blk Command Input Red BIk Supply Common Grn BIk 0 5 Volt Signal Common Org BIk 5 Volt Reference Output Blu BIk Valve Override Blk Wht Not Used Red Wht Chassis Ground Grn Wht Not Used Blu Wht Jumper Selectable Refer to Figure 3 7 or 3 8 Jumper Selectable Remote Transducer input on standard response PC board only Refer to Figure 3 8 CO SIO JO T Go N Figure 2 3 D Connector Shielded Cable Hookup Diagram Voltage O Versions Installation and Operation Manual Section 2 Installation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Brown En Connector Key Supplied Black Ref Connector Pin No Function Color Code Chassis Ground Brown Command Input Red 0 5 V Signal Common Orange Command Common Yellow 0 5 V Signal Output Green Supply Common Blue 15 Vdc Supply Violet Valve test Point Gray Not Used White Not Used Black Not Used Brown 15 Vdc Input Red Slot Orange Slot Yellow Not Used
41. REEN REMOTE TRANSDUCER INPUT Eme memo Disabled Enabled Standard TEST POINTS CIRCUIT COMMON TP4 VALVE VOLTAGE TP3 LINEARITY VOLTAGE TP2 SENSOR VOLTAGE TP1 Multiplied by 100 ADJUSTMENT POTENTIOMETERS SPAN CONNECTOR LINEARITY ANTICIPATE J4 amp J1 BLUE J3 cu mim VALVE FUNCTION ZERO 51 50 EE ES RE nt SENSOR Normally Normally CONNECTOR Closed Open mim u NOTE Normally open valves are Disabled identified by a label on the Standard solenoid cover BER FLOW amp Enabled CS REV H AND HIGHER so zrea7AAA COMPONENT SIDE SHOWN CS KEV H J3 BLACK VALVE DRIVE JUMPER a el n olm CE BUG Valve Drive Valve Drive External Valve Return 15 Volts 30 Volts Use where Pin 3 is connected to Power Supply Common at the Power Supply for 15 Volt Valve Drive or where Pin 3 is connected to 15 Volts at the Power Supply for 30 Volt Valve Drive NOTE The 5V reference is always enabled and is available on Pin 11 Figure 3 8 Standard Response 15 Pin D Connector PC Board Jumper Location and Function Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM J7 GREEN SETPOINT INPUT SIGNAL TYPE Mass Flow Controller only A A EC 4 20 mA 0 5 VOLTS NOTE The 5V Reference is always enabled and is available on Pin 11 TEST POINTS CIRCUIT COMMON TP4 VALVE VO
42. Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen b r v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 100 deekning Sk rmen b r v re forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum i Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel AnschluBstecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten da eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kabeldurchf hrungen mit AnschluBm glichkeiten f r die Kabelabschrimung verwendet werden Die
43. an be jumper selected as any of three mutually exclusive functions 5 Volt reference output external valve return or not used In the not used state Pin 10 is connected to Circuit Common ACAUTION Do not ground the 5 Volt reference output when it is enabled Improper operation of the printed circuit board will result The external valve return is used to minimize the effect of resistance in the connection wiring If the external valve return feature is not enabled the valve voltage is returned internally on the printed circuit board and the connection wiring resistance must be less than 0 2 ohms a Card Edge Connector Version On the enhanced response PC Board Pin 10 is configured using the J1 black and yellow jumpers On the standard response PC Boards Pin 10 is configured using the J3 black and J8 yellow jumpers Refer to Figure 3 5 or 3 6 as applicable for jumper configurations b D Connector Voltage I O Version Only The valve drive is configured using the J3 black jumper The 5 Volt reference is always available on Pin 11 Refer to Figures 3 7 and 3 8 as applicable for jumper configurations c D Connector Current I O Version The current I O PC Board provides a 5 Volt reference on Pin 11 at all times The external valve return is not available with this version Valve voltage is always returned internally on the printed circuit board Refer to Figures 2 4 and 3 9 Valve Override Allows full opening and cl
44. ando utilice conectores del tipo D Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 100 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto Installation and Operation Manual Section A CE Certification of X TMF 5964 5850EM MFC eng Mass Flow Equipment Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Fran ais Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Sujet Annexe au Manuel d Instructions R f rence Certification CE des D bitm tres Massiques a Effet Thermique Date Janvier 1996 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hi
45. ane Krypton Methane Methylacetylene Methyl Bromide 3 Methyl 1 butene Methyl Chloride Methyl Fluoride Methyl Mercaptan Methyl Silane Methyl Trichlorosilane MTS Methyl Vinyl Ether Monoethanolamine Monoethylamine Monomethylamine Neon Nickel Carbonyl Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrogen Trioxide Nitrosyl Chloride Nitrous Oxide Octofluorocyclobutane Oxygen Oxygen Difluoride Ozone Pentafluorethane f 125 Pentane n Pentane Perchloryl Fluoride Perfluorobutane Perfluoro 2 Butene Perfluoromethyl vinylether Perfluoropropane Ref No J 836D508 Gasdata doc Vsn 8 6 Installation and Operation Manual Section 4 Maintenance X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Table 4 3 Conversion Factors Nitrogen Base Continued GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR kg m Pentane n Pentane 0 212 1 605 3 222 Phosgene 0 504 1 881 4 418 Phosphine 0 783 1 100 1 517 Phosphorous Pentafluoride 0 346 2 109 5 620 Phosphorous Trifluoride 0 495 1 770 3 906 Propane same as CH CH CH 0 343 1 274 2 008 Propylene Propene 0 401 1 234 1 875 Rhenium Hexafluoride 0 230 3 279 13 41 Silane i 0 625 1 070 1 440 Silicon Tetrachloride i 0 310 2 465 7 579 Silicon Tetrafluoride i 0 395 1 931 4 648 Sulfur Dioxide 0 728 1 529 2 858 Sulfur Hexafluoride 0 270 2 348 6 516 Sulfur Tetrafluoride 0 353 1 957 4 776 Sulfu
46. anual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 BASE LINE Do lin 120 033 078 062 Section 4 Maintenance Brooks Models 5964 5850EM Pin psia 1500 1200 1000 Q Nitrogen sccm 30000 20000 10000 5000 3000 2000 1000 Figure 4 1 Model 5850EM Orifice Sizing Nomograph CAUTION REPRODUCTION OF THIS CHART MAY SERIOUSLY AFFECT TS ACCURACY NOTE NITROGEN EQUIVALENT FLOW RATE IS BASED ON OMC STANDARD TEMPERATURE JF REQUIRED ORIFICE SIZE FALLS BELOW THIS POINT VALVE STABILITY CANNOT BE INSURED 4 11 Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Example Qu 2 000 sccm Paas 269 PNITROGEN Q NITROGEN Quas X Poss PNITROGEN 2 000 x 269 538 sccm Nitrogen In order to calculate the orifice conversion factor when using a gas mixture the following formula must be used eo Bp 7 Orfice N P Orfice b i Orfice N NNN Mixture 100 Where P percentage by volume of gas 1 percentage by volume of gas 2 P percentage by volume of gas Example Find the Nitrogen equivalent for 20 slpm of a 20 Helium and 80 Chlorine gas mixture Orifice Conversion 20 378 80 1 598 Factor 100 Mixture nn Oa orifice conversion factor 20 x 1 439 28 78 slpm Nitrogen 2 Ifinlet and outlet pressures ar
47. belnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord e _ Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 100 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instruc es Refer ncia Certificac o CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atenc o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certificac o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas me
48. culer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 100 95 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type lt card edge gt sont non m talliques Les cables utilis s doivent tre blind s 100 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruction pour le raccordement des contacts Greek Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A O pa Eryeip w O ny v Lyetika Hiwronotqon CE Opr vov M rpuonc Matas Huzpounvia lavov pros 1996 Kuptec kar Ta pyava n ektpikd n ertpovikd Brooks ta g pouv ro ana CE amp xouv EmttUy G eheyydet pe Kavoviouo g HAeKtpo MayvytiKys Zuu ar rntag EMC vripextifa 89 336 EEC O
49. d D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 1996 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de se al cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 100 Cu
50. d or missing parts 2 3 Recommended Storage Practice s FV A If intermediate or long term storage of equipment is required it is recommended that the equipment be stored in accordance with the following conditions a Within the original shipping container b Stored in a sheltered area preferably a warm dry heated warehouse c Ambient temperature 21 C 70 F nominal 32 C 90 F maximum 45 F 7 C minimum d Relative humidity 45 nominal 60 maximum 25 minimum 2 1 2 2 Section 2 Installation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 2 4 Return Shipment 2 5 Transit Precautions Prior to returning any instrument to the factory contact your nearest Brooks location for a Return Materials Authorization Number RMA This can be obtained from one of the following locations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail Brooks Am BrooksiInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksiInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com
51. e comunque avere una schermatura del 100 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 1996 Dames en heren Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen e Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 e D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden word
52. e given in gauge pressure psig add 14 7 to convert to absolute pressure psia Outlet Pressure 30 psig 14 7 44 7 psia Inlet Pressure 50 psig 14 7 64 7 psia 4 12 Installation and Operation Manual Section 4 Maintenance X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM 3 Determine Critical Pressure Drop Critical pressure drop occurs when the outlet pressure psia is less than half the inlet pressure psia or P inlet P outlet lt 2 If these conditions exist the pressure drop Dp should be calculated as follows Pr Dp P Dp Pressure drop psi P Inlet pressure psia in If these conditions do not exist pressure drop equals the inlet pressure minus the outlet pressure 64 7 psia Is 44 7 psia p 2 Then Dp 64 7 44 7 20psi 4 Using the nomograph locate the pressure drop psi on the vertical line marked Dp Point A 5 Locate the Nitrogen equivalent flow rate sccm Nitrogen on the vertical line marked Point B 6 Draw a line connecting Dp and OR and extend it to the baseline Mark this point Point C 7 Locate inlet pressure psia on the vertical line marked Point D 8 Draw a line connecting P Point D and baseline Point C and then extend this line to the vertical line marked D orifice diameter inches Point E 9 This point on the line is the minimum orifice size for the given co
53. en Het scherm moet worden verbonden met aarde e Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Installation and Operation Manual Section A CE Certification of X TMF 5964 5850EM MFC eng Mass Flow Equipment Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Norsk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Vedr rende Vedlegg til h ndbok Referanse CE sertifisering av utstyr for massestr msm ling og regulering Dato Januar 1996 Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger e _ Brooks Instrument tilbyr levert med utstyret egnet kabel som m ter de krav som stilles til CE sertifisering e Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og ka
54. even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Dear Customer We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www Brooksinstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM
55. gas such as Nitrogen before disconnecting the gas connections Failure to correctly purge the flowmeter could result in fire explosion or death Corrosion or contamination of the flowmeter upon exposure to air may also occur CAUTION It is important that this MFC MFM only be serviced by properly trained and qualified personnel 4 1 Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 No routine maintenance is required on the Model 5964 5850EM If an in line filter is used the filtering element should periodically be replaced This section provides the following information Troubleshooting Cleaning Control Valve Adjustment Gas Conversion Factors Orifice Sizing Restrictor Sizing 4 2 Troubleshooting jiwasa w ACAUTION It is important that this controller only be serviced by properly trained and qualified personnel A System Checks The Model 5964 5850EM is generally used as a component in gas handling systems which can be quite complex This can make the task of isolating a malfunction in the system a difficult one An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime If possible make the following system checks before removing a suspected defective mass flow controller for bench troubleshooting or return especially if the system is new 1 Verify a
56. h the controller Clogged Sensor tube and restrictor and or a clogged orifice Closed or clogged flow path up or downstream or the controller Clogged Control Valve Internal reference being used as the command source and the yellow jumper is in the wrong position 15 volts applied to the valve override input Defective printed circuit board Valve voltage not returned Pin L at common Valve off pin grounded Clean sensor Refer to cleaning procedure Section 4 2D Open valve s Clean filter s Remove any foreign material from gas delivery system Check TP3 with the command at 100 If the voltage is more negative than 11V disassemble and repair the control valve Refer to Sections 4 3 and 4 4 Refer to Section 3 4 Check valve override input Refer to Section 2 6 for terminal assignments Replace printed circuit board Refer to Section 4 3 Check jumper for external valve return Refer to Section 3 4 Check Valve Off input Refer to Section 2 6 for terminal assignments Output signal stays at 6 8 Volts 26 mA for Current I O Vers regard less of command and there is flow Valve stuck open or leaky 15 Volts applied to the valve override input Defective printed circuit board Command input floating Pin D connected to common Clean and or adjust control valve Refer to cleaning procedure and or Section 4 2D Check the valve override terminal Refer to Section 2 6 for terminal assignments
57. handling systems where very low leakage and high performance are required The Models 5964 and 5850EM incorporates metal seals or welded joints insuring leak integrity for high purity and high vacuum applications Reducing the amount of internal threads makes the design less prone to system contamination The control electronics and flow sensor designs utilized in the Models 5964 and 5850EM have been well proven in precision gas delivery systems Standard features include e High leak integrity less than 109 atm cc sec He Enhanced process 7 Ra internal surface finish Optional 5850EM Electropolished wetted surfaces Optional 5850EM High purity VAR 316L Stainless Steel All metal seals Particulate free Wide flow range 0 06 sccm through 30 000 sccm Insensitive to mounting attitude Negligible flow overshoot undershoot Fast response control permits rapid gas settling times with minimal over undershoot Refer to Figure 1 1 Helium leak check ports Class 100 Clean Room assembly and calibration Optional 5850EM Available with all popular process connections Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 1 3 Specifications IEEE s AWARNING Do not operate this instrument in excess of the specifications listed in this manual Failure to heed this warning can result in serious personal inj
58. he signal does not reach and stay within 2 of final value within 1 second adjust the anticipate potentiometer one half to one turn clockwise If this signal does overshoot above the final value then overshoots below the final value by more than 2 the anticipate potentiometer must be adjusted one half to one turn clockwise b2 If the signal from the fast response flowmeter overshoots above the final value by more than 2 and does not overshoot below the final value then the anticipate potentiometer must be adjusted one half to one turn counterclockwise 3 24 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 C d Repeat Steps a and b above until no further anticipate potentiometer adjustment is necessary If the response time and overshoot are not within the required limits the response potentiometer must be adjusted to control the amount of overshoot Set the command to 0 flow rate 0 000 V and allow the flow signal output to stabilize 30 seconds minimum Step change the command to 100 5 000 V and record the output signal from the fast response flowmeter d1 If this signal shows excessive overshoot above the final value adjust the response potentiometer 2 to 3 turns counterclockwise d2 If this signal shows that the overshoot above the final value is not excessive adjusting the response potentiometer one half to one t
59. hookups After calibration the Model 5964 5850EM may be reconfigured for Current I O operation with negligible change in calibration Calibration Procedure for the Enhanced Response PC Board 5 adjustment potentiometers a New Sensor TP1 voltage With the controller installed in an unpressurized gas line apply power and allow approximately 45 minutes for warm up During the warm up adjustment and calibration check procedures do not allow the control valve to drift when gas flow is not present This situation is not a normal operating mode and will cause abnormal heat up of the control valve With this abnormally warm valve the meter will be difficult to calibrate This situation can be prevented by switching a normally closed valve to valve override closed or a normally open valve to valve override open when there is no gas flow Rough adjust the anticipate and response potentiometers fully clock wise 20 turns Then adjust the anticipate and response potentiometers 10 turns counterclockwise This provides a rough adjustment of this circuit and makes the flow more stable for calibration Adjust zero by connecting the DVM digital voltmeter positive lead to the 0 5 Volt output Pin 3 Card Edge Pin 2 D Connector and the negative lead to TP4 circuit common Adjust the zero potentiometer second pot from the bottom for an output of zero mV 2 mV Apply pressure to the system and insure that the zero signal repeats
60. ibration equipment To adjust the controller to the proper full scale flow calculate a new TP1 voltage using the following equation New TP1 measured TP1 voltage desired flow rate Voltage measured flow rate Adjust the span potentiometer until the voltage at TP1 is equal to the value calculated above Recheck the flow rate after the flow is stable at least two minutes Repeat this check and adjustment procedure until the measured flow rate is within 196 of the desired flow rate Note The voltage at TP1 is 100 times the output voltage 100 times for Current I O Version of the sensor This voltage can range from 1 2 to 12 Volts however it is recommended that this voltage stay between 2 0 and 9 0 Volts for proper operation If the recommended voltage range exceeds the desired range accuracy and or signal stability may not be achieved If one of the limits is reached check the orifice and restrictor sizing procedures given in Sections 4 6 and 4 7 respectively Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM g Set the command potentiometer for zero percent of flow Connect the DVM positive lead to flow signal output Pin 3 Card Edge Pin 2 D Connector and the negative lead to TP4 circuit common Readjust the zero potentiometer for an output of zero MV 2 mV as necessary h Set the command potentiometer for 50 of flow
61. ion modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www Brookslnstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this
62. ion of the interaction of the various parts of the controller you are urged to review Section 3 3 Theory of Operation Ifthe restrictor assembly has been contaminated with foreign matter the pressure drop versus flow characteristics will be altered and it must be cleaned or replaced lt may also be necessary to replace the restrictor assembly when the mass flow controller is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel See Section 4 3 Disassembly and Assembly for restrictor removal and installation Restrictors The Model 5964 5850EM mass flow controller device uses two types of restrictor assemblies depending on full scale flowrate and expected service conditions 1 Wire mesh for Nitrogen equivalent flow rates above 3 4 slpm These restrictor assemblies are made from a cylinder of wire mesh and are easily cleaned if they become contaminated in service 2 Anti Clog Laminar Flow Element A C L F E This type of restrictor assembly is used for Nitrogen equivalent flow rates less than 3 4 slpm Sizing All Model 5964 5850EM Series Restrictor Assemblies are factory adjusted to provide a specific pressure drop for each flow rate This corresponds to the desired full scale flow rate A list of restrictor assemblies used in the Model 5850EM mass flow controller device is shown in Table 4 4 Example The desired gas is Silane SiH4 The desired full scale flow rate
63. is 200 sccm Sensor conversion factor is 0 625 from Table 4 3 Nitrogen equivalent flow 200 0 625 320 sccm Nitrogen 4 15 4 16 Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 In the example above a Size P restrictor would be selected Note If the calculated flow rate is such that two different size restrictors could be used always select the larger size If a mixture of two or more gases is being used the restrictor selection must be based on a Nitrogen equivalent flow rate of the mixture Example The desired gas is 20 Helium He and 80 Chlorine CI by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is Mixture 100 Factor 20 80 945 1 386 876 Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen In this example a Size 4 Wire Mesh Assembly would be selected Table 4 4 Model 5850EM Standard Restrictors ENE SCCM Nitrogen Equivalent Flow Part Number WireMesh ACLFE S110Z275BMG S110Z276BMG S110Z277BMG S110Z278BMG S110Z279BMG S110Z280BMG S110Z281BMG S110Z282BMG S110Z283BMG S110Z284BMG S110Z285BMG S110Z286BMG S110Z287BMG S110Z288BMG S110Z289BMG S110Z290BMG S110Z291BMG S110Z292BMG S110Z319BMG S110Z321BMG S110Z317BMG S110Z228BMG S110Z226BMG S110Z
64. l valve seat If the controller is connected in series with a suitable flow standard observe the actual flow behavior and verify the accuracy of the mass flow controller If the mass flow control ler functions as described above it is functioning properly and the problem is most likely elsewhere Table 4 1 lists possible malfunctions which may be encountered during bench troubleshooting C Sensor Troubleshooting If it is believed the sensor coils are either open or shorted troubleshoot using Table 4 2 If any of the steps do not produce expected results the sensor assembly is defective Return to Brooks Instrument for sensor replacement Note Do not attempt to disassemble the sensor D Cleaning Procedures No routine external cleaning is required for Brooks thermal mass flow controller Should the Models 5964 or 5850EM Mass Flow Controller require cleaning due to deposition return the device to Brooks Instrument for servicing by trained technicians 4 3 Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Table 4 1 Bench Troubleshooting Possible Cause Check Corrective Action Actual flow overshoots setpoint by more than 5 full scale Anticipate potentiometer out of adjustment Adjust anticipate potentiometer Refer to Sections 3 5 amp 3 8 Output stays at zero level regardless of command and there is no flow throug
65. led in the process it is ready for operation When initiating flow slowly open the valve to avoid a flow surge Bypass is a help in bringing the flow on smoothly Avoid starting a pump to supply the flowmeter without the use of a valve upstream of the flowmeter AWARNING Before operating the flowmeter ensure all fluid connections have been properly tightened and where applicable all electrical connections have been properly terminated This section contains the following information Features and Jumper Configurations Theory of Operation Adjustment Potentiometers Calibration and Response Adjustments 3 2 Connections and Controls v a D V9 F Figure 3 1 shows the locations of the Model 5964 5850EM controls and connections Figure 3 2 identifies the externally accessible adjustment potentiometers located on the inlet side of the instrument 3 1 3 2 Section 3 Operation Brooks Models 5964 5850EM Electronics Cover Adjustment Potentiometers Inlet Connector Electrical Interface Adjustment Potentiometers Mounting Fastener Bore Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Electrical Interface Valve Connector Valve Coil Assembly Outlet Connector Valve Connector Valve Coil Assembly Figure 3 1 Model 5964 5850EM Components Installation and Operation Manual X TMF 5964 5850EM MFC eng Part N
66. low resistance common connection correct power supply voltage and that signals are reaching and leaving the controller The breakout board P N S273Z649AAA Card Edge version or P N S273Z668AAA D Connector version listed in Section 5 will make this job much easier 2 Verify that the process gas connections have been correctly terminated and leak checked 3 If the mass flow controller appears to be functioning but cannot achieve set point verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow 4 Verify that all user selectable jumpers are in their desired positions Refer to Figures 3 5 through 3 9 AWARNING If it becomes necessary to remove the controller from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the controller thoroughly with a dry inert gas such as Nitrogen before disconnecting the gas connections Failure to correctly purge the controller could result in fire explosion or death Corrosion or contamination of the mass flow controller upon exposure to air may also occur Installation and Operation Manual Section 4 Maintenance X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM B Bench Troubleshooting In order to assist in troubleshooting it is highly recommended that the controller be installed in a flow circuit as shown in Figure 3 13 1 Properly connect the mass flow co
67. n or Pin 15 D Connector The input signal is selected by the J7 green jumper Refer to Figure 3 6 or 3 8 as applicable for jumper configurations Low Command Flow Cutoff Auto Shut Off Prevents the valve from opening whenever the command input is less than 2 of full scale This function is always active and is present on all versions Output Limiting Prevents possible damage to delicate data acquisition devices by limiting the output to 6 8 Vdc and 7 Vdc 0 to 26 mA with the Current I O Option Current I O Version Refer to Figures 2 4 2 5 2 6 and 3 9 a Input Signal Selection To use the current command connect the command signal to Pin 7 of the D Connector and the command return to Pin 1 of the D Connector Configure the J7 green jumper in the left position To use the voltage command connect the command signal to Pin 8 and the command return to Pin 1 of the D Connector Configure the J7 green jumper in the right position b Output Signal Selection To use the current output connect the output signal to Pin 4 of the D Connector and the output return to Pin 10 The current output range is jumper selectable from 4 20 mA or 0 20 mA using the J3 and blue jumpers The 0 5 Vdc output signal is always enabled on Pin 2 Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 3 5 Adjustment Potentiometers Brooks Models 5964 585
68. n specific heat caused by pressure and or temperature 4 9 4 10 Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 4 4 Orifice Sizing The Orifice Sizing Nomograph Figure 4 1 is used to calculate the control valve s orifice size when changing any or all of the following factors from the original factory calibration gas operating pressure inlet and outlet flow range The flow controller s orifice is factory sized to a preselected gas operating pressure and flow range Note that the orifice is marked with its size in thousandths of an inch When changing the aforementioned factors calculate the new orifice size by following the procedure and example outlined in the following paragraphs Example Determine the orifice size for the following conditions Gas Hydrogen Flow Rate 2 000 sccm Outlet Pressure 30 psig Inlet Pressure 50 psig 1 Determine Nitrogen equivalent flow rate refer to Table 4 3 Q NITROGEN Qus X Poss y PNITROGEN OR Q NITROGEN Quas x SG as SGyirrocen Where Qyitrocen Nitrogen equivalent flow rate sccm Desired flow rate of the gas sccm Pyitrocen Density of Nitrogen at 70 F Pass Density of the gas taken at customer temperature SUL is Specific gravity of the gas taken at customer temperature Refer to Table 4 5 for densities Installation and Operation M
69. nditions If this point is between two orifice sizes select the next largest size orifice to ensure adequate flow If the orifice selected falls below 0013 choose 0013 size orifice For the example in Figure 4 3 the 007 size orifice would be selected 4 13 4 14 Section 4 Maintenance Brooks Models 5964 5850EM Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Pin psia 1500 1200 1000 Q Nitrogen sccm Figure 4 2 Example Nomograph 30000 20000 10000 5000 3000 CAUTION REPRODUCTION OF THIS CHART MAY SERIOUSLY AFFECT 175 ACCURACY NOTE NITROGEN EQUIVALENT FLOW RATE IS BASED ON OT STANDARD TEMPERATURE IF REQUIRED ORIFICE SIZE FALLS BELOW THIS POINT VALVE STABILITY CANNOT BE INSURED Installation and Operation Manual Section 4 Maintenance X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM 4 5 Restrictor Sizing The restrictor assembly is a ranging device for the sensor portion of the controller It creates a pressure drop which is linear with flow rate This diverts a sample quantity of the process gas flow through the sensor Each restrictor maintains the ratio of sensor flow to restrictor flow however the total flow through each restrictor is different Different restrictors active area have different pressure drops and produce controllers with different full scale flow rates For a discuss
70. nearity 0 0115186 x error 0 2128734 x error 0 0036597 full scale flow rate Note Error The error calculated in Step h Adjust the linearity potentiometer until the voltage at TP2 equals the value calculated above k Readjust the span by allowing the flowrate to stabilize at 100 for at least 30 seconds Connect the DVM positive lead to TP1 and thenegative lead to TPO Adjust the span potentiometer until the sensor voltage TP1 to TPO equals the sensor voltage measured in Step g I Check the calibration by rechecking zero and adjusting if necessary Check the flow rate accuracy at 25 50 75 and 100 command values m Adjust the response characteristics Refer to Section 3 8 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Calibration Procedure for the Standard Response and Current I O PC Board 4 Adjustment Potentiometers a With the controller installed in an unpressurized gas line apply power and allow approximately 45 minutes for warm up During the warm up adjustment and calibration check procedures do not allow the control valve to drift when gas flow is not present This situation is not a normal operating mode and will cause abnormal heat up of the control valve With this abnormally warm valve the meter will be difficult to calibrate This situation can be prevented by switching a normally clo
71. nearity The linearity potentiometer is used to linearize the flow calibration due to subtle non linearities in various bypass elements The linearity signal can be viewed between TP2 and TP4 circuit common The value of the signal is flow rate and gas dependent On enhanced response PC boards adjusting the potentiometer clockwise will increase the absolute value of this number On standard response and Current I O PC boards adjusting the potentiometer clockwise will increase this number Adjusting this potentiometer will alter the calibration and is therefore not recommended unless calibrating the device Anticipate The anticipate potentiometer is used to adjust the response of the sensor for steps in flow Adjusting this potentiometer in the clockwise direction will slow the response of flow signal and cause a controller to overshoot more Adjusting this potentiometer will alter the response of the mass flow controller and is therefore not recommended unless adjusting the response of the device Zero The zero potentiometer is used to balance the thermal sensor at a no flow condition This potentiometer is adjusted at the time of calibration and minor adjustments may be done in the field See the Zero Adjustment section below for details Response The response potentiometer is used to adjust the response of the sensor for steps in flow Adjusting this potentiometer in the clockwise direction will increase actual flow overshoot Adjusting
72. nnector As a minimum the following connections must be made Voltage I O Version Chassis Ground Signal Common Signal Output 415 Vdc Supply 15 Supply Command Input Command Common Supply Common Valve Return Specific to applications see below Current I O Version Chassis Ground Signal Output Return Voltage or Current Signal Output 15 28 Vdc Supply Supply Common Voltage or Current Voltage or Current Command Input Command Return 2 10 Operation Procedure NOTICE The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention is required when selecting the signal cable to be used with CE marked equipment Brooks supplies high quality cables which meet the specifications for CE certification If you provide your own signal cable you should use a cable which is completely screened with a 100 shield D Connectors should also be shielded using a metal shield If applicable metal cable glands must be used to provide cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 degrees The shield should be terminated to an earth ground See Appendix A for CE Certification of Mass Flow Equipment Note If older Brooks secondary electronics are used to power and control the
73. nt com E Mail BrooksAs BrooksInstrument com E Mail BrooksAm BrooksInstrument com www Brooksinstrument com BROOKS Copyright 2008 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
74. ntroller to a 15 Vdc power supply or a 15 to 28 Vdc in the case of a current I O board Connect a com mand voltage source and an output signal readout device 4 1 2 digit voltmeter recommended to Pins 2 and 3 on the Card Edge version or Pins 2 and 10 for the D Connector version Refer to Figure 2 2 2 3 2 4 or 2 6 Apply power set the command voltage to zero and allow the controller to warm up for 45 minutes Do not connect to a gas source at this time Observe the output signal and if necessary perform the zero adjust ment procedure Section 3 6 If the output signal will not zero properly refer to the sensor troubleshooting section and check the sensor If the sensor is electrically functional the printed circuit board is defective and will require replacement 2 Connect the controller to a source of the gas on which it was originally calibrated Command 100 flow and adjust the inlet and outlet pres sures to the calibration conditions Verify that the output signal reaches and stabilizes at 5 000 Volts Vary the command voltage over the control range and verify that the output signal follows the command input Apply 15 Volts to the valve override input Pin 9 for the Card Edge version Pin 12 for D Connector version and verify that the output exceeds 5 000 Volts Apply 15 Volts to the valve override terminal and verify that the output signal falls below 0 100 Volts for an elastomeric valve seat and below 400 Volts for a meta
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76. onse Adjustment servies seerd luu ie 3 22 4 1 Model 5964 5850EM Orifice Sizing Nomograph 4 11 42 Example Nomograpn uu uu nee 4 14 Tables Table Page Number Number 2 1 Recommended Filter SIZe 2 2 I Ire guest ERE 2 3 3 1 Cables calibration Covers and PC Boards for Model 5964 5850 3 3 4 1 Bench Troubleshooting uuu u ee eene eee la leia ee ee here 4 4 4 2 Sensor Troubleshooting nnee eee nennen 4 5 4 3 Conversion Factors Nitrogen Base a 4 7 4 4 Model 5964 5850EM Standard Restrictors a 4 16 Installation and Operation Manual Section 1 Introduction X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 1 1 How to Use This Manual 1 2 Description Brooks Models 5964 5850EM This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks Models 5964 and 5850EM This manual is organized into the following sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section A CE Certifications Back Cover Warranty Local Sales Service Contact Information The Brooks Models 5964 and 5850EM Mass Flow Controllers is used in gas flow
77. ooks Models 5964 5850EM ADJUSTMENT CORRECT ADJUST COUNTER CLOCKWISE wea OUTPUT VOLTAGE VOLTS p oco ne Der MM nm c1 If the flow signal decays to 0 05 to 0 5 Volt then rises to zero Volts the anticipate potentiometer properly adjusted c2 If the flow signal decays rapidly and goes below 0 5 Volt before rising to zero Volt the anticipate potentiometer must be adjusted clockwise and Steps a and b repeated c3 If the flow signal decays slowly and does not go below 0 5 Volt the anticipate potentiometer must be adjusted counterclockwise and Steps a and b repeated Enhanced Response PC Board Adjustment 2 specification guaranteed Note Adjustment of the response circuitry to obtain a flow performance to be within 2 of final value in less than one second after command change of 0 100 requires the use of a fast response flowmeter less than 100 millisecond response to within 0 2 of final value in series with the Model 5964 5850EM and a storage oscilloscope or recorder a Set the command to zero percent flow rate 0 000 V and allow the flow signal output to stabilize 30 seconds minimum Step change the command to 100 of flow 5 000 V and record the output signal from the fast response flowmeter This flow signal should overshoot above the final value then overshoot below the final value b1 lf the signal from the fast response flowmeter does not overshoot the final value and or t
78. osing of the control valve independent of the command input The valve override for normally closed and normally open mass flow controllers is as follows a To open the valve apply 15 Vdc supply voltage to the valve override pin b To close the valve apply 15 Vdc supply voltage to the valve override pin c Isolating the valve override pin returns the controller to normal opera tion The valve override function is activated by applying the appropri ate voltage to Pin 9 for Card Edge versions or Pin 12 for D Connector versions 3 14 Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Valve Off This feature allows the user to close the control valve by supplying a T TL level low signal lt 0 4 Vdc to the proper terminal independently of the command input A TTL level high or floating at this pin has no effect Valve off is accessed via Pin L on the Card Edge or Pin 4 on the D Connector version Note Valve off is not available on Current I O versions Remote Transducer Input This feature allows the use of the integral control electronics and valve to regulate flow in response to signal from an external 0 5 Vdc signal The flow signal from the Model 5964 5850EM is still available for process monitoring This feature is only available on standard response versions The external signal is applied to Pin 5 on the Card Edge versio
79. product Inform and educate your personnel in the proper installation operation and maintenance of the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnel to install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury Pressure Equipment Directive PED All pressure equipment with an internal pressure greater than 0 5 bar 9 and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Directive is applicable within the European Economic Area EU plus Norway Iceland and Liechtenstein Pressure equipment can be traded freely within this area once the PED has been complied with Section 1 of this manual contains important safety and operating instructions related to the P
80. r Trioxide 0 535 1 691 3 575 Sulfuryl Fluoride 0 423 1 931 4 648 Tetrachloromethane 0 344 2 345 6 858 Tetrafluoroethylene TFE 0 361 1 905 4 526 Tetrafluorohydrazine NF 0 367 1 926 4 624 Trichlorofluoromethane f 11 0 374 2 244 6 281 Trichlorosilane 0 329 2 201 6 038 Trimethyloxyborane TMB 0 300 1 929 4 638 1 1 2 Trichloro 1 1 2 Triflouroet f 113 0 231 2 520 7 920 Trimethylamine 0 316 1 467 2 639 Tungsten Hexafluoride WF 0 227 3 264 13 28 Uranimum Hexafluoride 0 220 3 548 15 70 Vinyl Bromide 0 524 1 985 4 772 Vinyl Chloride 0 542 1 492 2 788 Vinyl Fluoride 0 576 1 281 2 046 Water Vapor 0 861 0 802 0 804 Xenon 1 383 2 180 5 851 Ref No J 836D508 Gasdata doc Vsn 8 6 Example The desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is Mixture 100 Factor 20 80 945 1 386 876 Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen It is generally accepted that the mass flow rate derived from this equation is only accurate to 5 The sensor conversion factors given in Table 4 3 are calculated based on a gas temperature of 21 C and a pressure of one atmosphere The specific heat of most gases is not strongly pressure and or temperature dependent However gas conditions that vary widely from these reference conditions may cause an additional error due to the change i
81. r corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the instrument purged with clean dry N before use d The Model 5964 5850EM Mass Flow Controller can be installed in any position However mounting in orientations other than the original factory calibration see calibration data sheet can result ina 0 5 maximum full scale shift after re zeroing 2 3 Section 2 Installation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 ACAUTION Use caution when installing surface mount downported controllers Most metal seals can not be reused after compression Follow the seal manufacturers recommendations for installation Tighten the mounting screws in 10 in lb increments such that the seal undergoes uniform compression Final torque values depend on the screw and hardware material and lubrication e The control valve in the Model 5964 5850EM provides precision control and is not designed for positive shut off If positive shut off is required it is recommended that a separate shut off valve be installed in line CAUTION Since the Model 5964 5850EM Control Valve may not provide positive shut off a separate shut off valve may be installed downstream for that purpose It should be noted that a small amount of gas may be trapped between the downstream side of the mass
82. regulator Defective printed circuit board Adjust pressures Check orifice size Refer to Section 4 6 Adjust valve Refer to Section 4 4 Adjust anticipate potentiometer Refer to Section 3 8 Check regulator output Replace printed circuit board Refer to Section 4 3 Installation and Operation Manual Section 4 Maintenance X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM Table 4 2 Sensor Troubleshooting SENSOR SCHEMATIC 00000 Sensor En FUNCTION Connector Heater Upstream FLOW Temperature Sensor Su Downstream Temperature Sensor Sd 4 Sensor Common Heater Common Flex Circuit Wire Numbers Remove the sensor connector from the PC Board for this procedure OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on ohmmeter If either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an ohmmeter reading will be obtained Pin 4 to Pin 2 Nominal 1100 ohms reading depending on temperature and ohmmeter current Pin 4 to Pin 3 Pin 5 to Pin 1 Nominal 1200 ohm reading 4 5 4 6 Section 4 Maintenance Brooks Models 5964 5850EM 4 3 Gas Conversion Factors Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 If a mass flow controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the relation between
83. s 3 26 Section 3 Operation Brooks Models 5964 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Installation and Operation Manual Section 4 Maintenance X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM 4 1 Overview A WARNING METER CONTROLLER SEAL COMPATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O rings or valve seats It is the user s responsibility to select materials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller ona regular schedule to ensure that it is leak free as both metal and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure A WARNING If it becomes necessary to remove the instrument from the system power to the device is disconnected at the power supply WARNING If it becomes necessary to remove the flowmeter from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the flowmeter thoroughly with a dry inert
84. s flow is achieved in approximately 15 seconds This is enabled by moving the J2 Red Jumper on the printed circuit board Refer to Figures 3 5 through 3 9 as applicable for jumper configurations Valve Test Point Purge This feature allows the user to monitor a relative control valve voltage during operation One terminal of the valve coil is connected to the 15 Vdc supply the other terminal is modulated by the electronics The relative valve voltage can be measured between circuit common and Pin D of the card edge version or Pin 7 of the D Connector version Installation a nd Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 54 November 2008 1B121AHG Brooks Models 5964 5850EM Grounding the valve test point pin will cause the valve to open fully on normally closed devices and close fully on normally open devices regardless of command input voltage Note The Current I O Version does not offer purge functions or a relative control valve voltage monitor J5 GREEN LINEARITY JUMPER Error Error mo le A B A B TEST POINTS CIRCUIT COMMON TP4 VALVE VOLTAGE TP3 LINEARITY VOLTAGE TP2 VALVE SENSOR VOLTAGE TP1 CONNECTOR SENSOR VOLTAGE TPO ADJUSTMENT POTENTIOMETERS SPAN J2 RED SOFT START LINEARITY ANTICIPATE n Disabled sable RESPONSE Standard SENSOR CONNECTOR FLOW NN 5097Y944AAA CS REV G SO97Y992AAA CS REV D SO97XOGIAAA CS REV C CS REV G 944
85. sed valve to valve override closed or a normally open valve to valve override open when there is no gas flow Rough adjust the anticipate potentiometer with 20 clockwise full turns Then adjust the anticipate potentiometer with 10 counterclockwise turns to center the potentiometer This will provide a rough adjustment of this circuit and make the flow more stable for calibration Connect the DVM positive lead to the 0 5 Volt signal output Pin 3 Card Edge Pin 2 D Connector and the negative lead to TP4 circuit com mon Adjust the zero potentiometer for an output of zero mV 2 mV Apply pressure to the system and insure that the zero signal repeats within 2 mV of the voltage set in Step c above If the zero does not repeat check for leakage Note Controllers supplied with all metal or Teflon valve seats do not provide tight shut off A 0 896 leak through is typical For metal or Teflon seat controllers close a downstream shut off valve and observe the flow signal Set the command potentiometer for 100 of flow 5 000 V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Adjust the linearity potentiometer for an output of 0 0 V zero volts Connect the DVM positive lead to TP1 100x sensor voltage and the negative lead to TP4 circuit common The command potentiometer should still be set at 10096 flow 5 000 V Measure the flow rate using suitable volumetric cal
86. ss Flow Controller has an integral control valve and control circuit as shown in Figure 3 4 The control circuit senses any difference between the flow sensor signal and the command input adjusting the current in the modulating solenoid valve to increase or decrease the flow Note All Model 5964 5850EM mass flow controllers meters are configured at the factory as ordered and do not require adjustment The following section is for reference should installation conditions change Not all features are available on all devices Refer to Figures 3 5 through 3 9 depending upon the type of printed circuit board and connector for jumper locations functions and adjustment potentiometers Note To obtain access to the jumpers and test points referenced in this section the Electronics Cover must be removed Extract the cover by removing the three screws and the valve connector The cover must be replaced before returning the device to service Fast Response Adjusted by the anticipate potentiometer and where applicable the response potentiometer this circuit when properly adjusted allows the high frequency information contained in the sensor signal to be amplified This provides a faster responding flow signal for remote indication and use by the control valve Soft Start Refer to Figures 3 10 and 3 11 This circuit provides a slow injection of the gas as a protection to the process particularly those using a volatile or reactive gas Full ga
87. stallation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Section 2 Installation Brooks Models 5964 5850EM l ooqoooboeo 0000000 15 Power Supply 15 28 Vdc Com Signal Output Return Current Setpoint Note 2 Input Current Output Indicator or Receiver Current Signal Setpoint and Output 1 cu 0 o 4 9 15 Power Supply 15 28 Vdc Com Input Voltage Setpoint v Mole R et Voltage Output Signal Output Return Indicator or JO Ret Voltage Signal Setpoint and Output Notes Receiver 1 The returns for the command input and current output are not isolated from power supply common 2 Tie cable shields to ground at one end only 3 Current and voltage outputs may be used simultaneously Figure 2 6 Common Electrical Hookups Current I O Version 2 9 2 10 Section 2 Installation Brooks Models 5964 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Installation and Operation Manual Section 3 Operation X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM 3 1 Overview F p After the flowmeter has been properly instal
88. t licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado blindagem ou bucha met lica em ambas as extremidades em 360 A blindagem deve terminar com a liga o massa Os conectores Card Edge n o s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 10096 nos termos da Certificac o CE A blindagem deve terminar com liga o massa Relativamente configurac o da cavilha queiram consultar o Manual de Instruc es A 5 A 6 Section CE Certification Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG Brooks Models 5964 5850EM November 2008 Suomi Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asia Lis ys K ytt ohjeisiin Viite Massam r mittareiden CE sertifiointi P iv m r Tammikuu 1996 Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEG Erityist huomiota on kuitenkin kiinnitett v signaalikaapelin valintaan Signaalikaapelin kaapelin l piviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka t ytt v t CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitett ess suojaa
89. umber 541B121AHG November 2008 Section 3 Operation Brooks Models 5964 5850EM Table 3 1 Cables Calibration Covers and PC Boards for Model 5964 5850EM Break Out Board Assembly Card Edge P N S273Z649AAA D Connector P N S273Z668AAA Calibration Cover Card Edge P N 909Z011EAD D Connector P N 909Z017EAD Installs directly between mass flow controller and interconnecting cable Allows convenient access to all signals for easy troubleshooting of the system Calibration covers reduce the chance of accidental cantact with the circuit board but allow access for all adjustment potentiometers and test points needed for calibration Contains 1 Break Out PC Board 1 5 foot Extension Cable 1 Terminal PC Board 5964 5850EM To Model Cable Type Cable Part Number 5 feet 10 feet 25 feet 50 feet 0151E Panel Ribbon S124Z469AAA S124Z470AAA S124Z471AAA S124Z472AAA Open Frame 0151E Table Top 0152E 0154E 0151E Panel Open Frame 0151E Table Top 0152E 0154E 0151 Panel D Connector 01517 Table Top Current 1 0 0152 01541 Shielded S124Z669AAA S124Z539AAA S124Z562AAA S124Z670AAA Shielded S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA D Connector Voltage 1 0 Shielded S124Z576AAA S124Z577AAA 51242578 51242579 Shielded S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA Shielded S124Z576AAA S124Z577AAA S124Z578AAA S124Z579AAA
90. urn clockwise will speed up the response with correspondingly more overshoot and may also significantly reduce the dead time between application of a change in command and the first noticeable change in flowrate Repeat Step d above until no further adjustment of the response potentiometer is necessary If the desired response characteristics are still not achieved some additional improvement can be realized by making adjustments to the flow control valve Refer to Section 4 4 Standard Response and Current I O PC Board Adjustment 1 specification not guaranteed Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed of three samples or greater per second to monitor the rate of change of the output signal a b Set the command potentiometer for 100 of flow 5 000 V and wait about 30 seconds for the flow output signal to stabilize Step the command signal to zero percent or activate valve override closed to stop the flow Observe the flow signal output as it decays The behavior of the flow signal during this transition between 100 and zero percent flow indicates the adjustment required of the anticipate potentiometer Refer to Figure 3 14 c1 If the flow signal decays to 0 05 to 0 5 Volt then rises to zero Volt the anticipate potentiometer is properly adjusted c2 If the flow signal decays rapidly and goes below 0 5 Volt before rising to zero Volt the anticipate potentiometer
91. ury and or damage to the equipment PERFORMANCE CHARACTERISTICS Flow Ranges Any range from 0 3 sccm to 0 30 000 sccm Nitrogen equivalent Lower flows available consult factory Standard 0 C and 101 kPa 760 Torr Per SEMI Guideline E12 96 Control Range 2 100 with elastomeric valve seat 3 100 with metal or Teflon valve seat Accuracy 196 Full Scale including linearity at calibration conditions 1 596 Full Scale including linearity for flow ranges greater than 20 slpm Repeatability 0 2596 of rate Settling Time Model 5964 Enhanced response PCB s less than 1 sec to within 296 of Full Scale of final value for a 0 100 command step with Normally Closed Valve Optional on 5850EM Model 5850EM Less than 3 seconds to within 296 of Full Scale of final value for a 0 10096 command step with Normally Closed Valve Per SEMI Guideline E17 91 Mounting Attitude Sensitivity Available in any position 0 5 maximum full scale deviation after rezeroing Temperature Sensitivity Zero Less than 0 075 full scale per G Span Less than 1 0 full scale shift over 10 50 C range Pressure Equipment Directive PED 97 23 EC Sound Engineering Practice Pressure Sensitivity 0 00896 per psi Nitrogen RATINGS Operating Pressure 1 500 psi 10 342 MPa max Note 150 psi for enhanced response 500 psi for stainless steel fasteners option Installation and Operation Manual Section 1 Introduction X TMF 5964 5850EM M
92. w is stable at least two minutes Repeat this step until the measured flow rate is within specification When the flow rate is within specifica tion record the sensor voltage and proceed to Step h Note The TP1 to TP0 sensor voltage can range from about 12 mV to about 120 mV However it is recommended that this voltage stay between 20 mV and 90 mV for proper operation If the recommended voltage range is exceeded the desired accuracy and or signal stability may not be achieved If one of the limits is reached check the orifice and restrictor sizing using the procedures given in Sections 4 6 and 4 7 respectively h Set the linearity jumper by adjusting the command potentiometer for 50 flow 2 500 V Allow at least two minutes for the flow to fully stabilize Read the flow rate Calculate the error using the following equation Measured Desired Flow Error 100 X Flow Rate Rate Full Scale Flow Rate Record the error If the error is positive too much flow the linearity jumper must be in the a position negative TP2 voltage If the error is negative too little flow the linearity jumper must be in the b position positive TP2 voltage i Measure the linearity voltage by setting the command potentiometer to 100 flow 5 000 V with the DVM positive lead connected to TP2 and the negative lead connected to TP4 The proper full scale linearity voltage can be calculated using the following equation Full Scale Li

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