Safety Manual - Norfolk State University
Contents
1. NORFOLK STATE UNIVERSITY NSU Micro amp Nano technology Center MiNaC Cleanroom User Cleanroom User s Manual Alice Musapatike Lab Manager Safety TABLE OF CONTENTS Policies and Procedures Introduction Enforcement Equipment Schedule Rules Access to the Cleanroom Buddy System Visitors Safety Procedures Wafer Handling Tools and Repairs Caution and Good Judgment Habits General Precautions Personal Hygiene Spill Response Procedures Introduction Spill Response Cart Items Spill of a known Substance Cleanup of an Unknown Substance First Aid Cleanroom Gowning Procedure Introduction Gowning Sequence Notes Cleanroom Etiquette Non Functional Equipment Broken Glassware Laundry Chemical Warning labeling Disposal of Solvent soaked materials Equipment Malfunction Cleaning up procedures Item Storage CO CO ON NN A A H 10 12 13 14 15 19 19 19 19 19 20 20 20 20 TABLE OF CONTENTS Cleanroom Rules Unauthorized Use of Equipment Granting access to an unauthorized user Use of another person s ID Allowing a user to log in under a different persons ID Using Equipment reserved for another user Using Equipment undergoing maintenance Observing time limits Failure to log in the Log Book Failure to log out when finished Failure to use Chemical Safety Warning Form Failure to Use proper Personal Protection Equipment Not showing up for2. used for accounting purposes Prior to being granted access to the Cleanroom applicants must attend an orientation session on Cleanroom safety and procedures Handouts will be provided at this session including the Norfolk State University General Laboratory Safety Manual and various policy and procedure handouts Applicants must sign a form acknowledging they have read and understood the contents of the handouts Applicants may also be required to take an exam on the contents of the handouts The Cleanroom is open 7am to 7 pm Monday through Friday Weekend access and Holiday access is to be provided by the Principle Investigator Authorized users are able to come in at any time the Cleanroom is open However always use and follow the Buddy System V Buddy System The buddy system must always be used in the Cleanroom As implemented here the buddy system requires a minimum of two people inside the Cleanroom at all times and they should both be authorized users This is to ensure the safety of all users A list of emergency phone numbers is located in the hallway of the Cleanroom and in the corridor outside the Cleanroom VI Visitors Whenever possible visitors should remain outside the Cleanroom the entire facility may be viewed through the windows and through the chase If a visitor must enter the Cleanroom he she must wear proper Cleanroom garments and sign in and out in the visitor s log A qualified Cleanroom faculty staff member
3. Exit the gowning room towards the Cleanroom e While you are in the Cleanroom keep your hands away from your exposed body parts The oils on your skin can be transferred to the gloves and subsequently to the Cleanroom equipment or your sample Il Notes 17 v Cleanroom garments shall be worn only within the Cleanroom complex except under emergency conditions Do not wear soiled dirty or lint producing street clothes under Cleanroom garments Do not hang street clothes or lab coats in the gowning area Facemasks are to be worn over the top of the nose VV V V Safety glasses goggles can ONLY be removed when using a Microscope and MUST be put back on after use v Never open your gown in the Cleanroom CLEANROOM ETIQUETTE 101 I Disposal of Damaged or Non Functional Equipment On occasion lab equipment stops working or is damaged during normal use In the case of countdown timers make sure the batteries are working properly Sometimes they just need new batteries Whenever something stops working please give it to a member of the Cleanroom Staff who will then either repair it or dispose of it Lab equipment is inherently expensive and eventually much of the cost is passed on to the users therefore it is mutually beneficial to maintain the equipment Il Broken and Stained Glassware Wafers Other Sharp Objects With all the glassware used in the Cleanroom breakage or permanent contamination will occasionally occur or
4. cleanup Unauthorized entry into the Cleanroom Damage to Equipment Allowing Cleanroom entry without swiping card Improper gowning and de gowning procedures Removing supplies and Equipment from the Cleanroom Changing Equipment settings Failure to leave the Cleanroom in an Emergency 21 21 21 22 22 22 23 23 23 24 24 24 24 25 25 24 24 25 26 POLICIES AND PROCEDURES Introduction A Class 100 Cleanroom is defined as having less than 100 particles of more than 5 microns in size within a cubic foot of air Similarly a Class 1 000 Cleanroom has less than 1 000 particles of more than 0 5 microns in size within a cubic foot of air This level of cleanliness is necessary to maintain the reproducibility of newly developed state of the art electronic device processes To reach and maintain this level of cleanliness the transfer of particles and chemical contaminations must be eliminated wherever they are found Attitude towards cleanliness will ultimately determine the success or failure of any Cleanroom policy All the elaborate equipment installed to provide a microscopically clean controlled environment would be to no avail if users do not believe in and help enforce the policies It is also recognized technology is continually changing and Cleanroom users are a tremendous resource of new ideas With this in mind it is strongly encouraged to recommend changes that may make the facility safer cleaner easier to use or less exp
5. things will get contaminated beyond the point of being cleanable If glassware meeting these criteria is observed dispose of it into the container marked Sharp Objects Only This includes the following wafers razor blades needles microscope slides and cover slips and anything else questionable Exercise care when disposing of any glass injuries can occur when sharp objects are discarded improperly Ill Laundry When finished with a gown zip it up and make sure it isn t inside out Unfasten the booties from the gown and each other and put them into the soiled hamper IV Chemical Warning Labels Frequently Cleanroom users will leave items under fume hoods overnight or for part of the day unattended The policy is simple ANYTHING left unattended MUST be labeled with your NAME PHONE NUMBER WHERE YOU REALLY CAN BE REACHED WHAT IT IS THAT IS SITTING THERE DATE AND TIME of when you left it DATE AND TIME of when you will return for it The staff will THROW OUT anything not appropriately labeled no questions asked For the protection of all complete Chemical Safety Warning form available in the Cleanroom Hallway 18 Any container not appropriately labeled will be disposed of V Disposal of Solvent and Photoresist Soaked Materials All materials used in the Cleanroom must be assumed as hazardous There are several containers in the Cleanroom specifically for the disposal of solvent soaked materials and require they be use
6. aged to make suggestions on how we can more effectively meet our goals
7. ake a mess clean it up Return everything to its original condition or better This includes your entire set up of experiments or projects Only Cleanroom paper or plastic laminated paper will be allowed in the Cleanroom Cleanroom paper taken out of the cleanroom may be brought back into the Cleanroom At no time will paper in any form be torn or mutilated within the Cleanroom Corrugated cardboard Styrofoam or foam rubber of any type will not be allowed in the Cleanroom without plastic containment and prior approval Remove cartons and packaging material before taking materials into the Cleanroom area Pencils erasers and retractable pens shall not be used within the Controlled Environment Non retractable ballpoint pens are approved for writing purposes Users will make proper entry into the logbook each time a piece of equipment that has a logbook is used Be aware of supplies If quantities of stock appear to be low report it to the Cleanroom Staff Do not remove dedicated items from the Cleanroom without the Cleanroom Staff s permission If you require a special equipment set up consult the Cleanroom Staff or your If an incident may have adversely affected someone s work or equipment find the owner and agree on a proper remedy for the accidental interference Do not contaminate the Nitrogen blow guns When spinning photoresist do not allow it to bypass the wafer chuck The photoresist will clog the vacuum port in the spin
8. an area e Do not wear jewelry except plain wedding bands watches and pierced ear studs e Report adverse changes in environmental conditions particle generation or accumulation marked changes in humidity or temperature and or personal changes in physical condition profuse sweating a nasal discharge adverse skin conditions etc to the Cleanroom Staff XIII Personal Hygiene Personnel with colds temporary sneezing and coughing and severe sunburns should not enter the Cleanroom until they have recovered The high degree of cleanliness required necessitates the development of the following habits e Bathe frequently e Shampoo hair regularly and take action to control dandruff e Wear clean under and outer garments e Do not wear open toed shoes sandals or torn clothes and shoes SPILL RESPONSE PROCEDURES Introduction The Cleanroom uses many hazardous chemicals and the possibility of a major spill always exists Therefore it is necessary to know how to react quickly and properly to any chemical spill to avoid injury death or major equipment damage A large acid spill HF for instance might cause serious injury or even death if handled improperly These procedures are intended only to provide guidelines Common sense should always be used when dealing with any chemical spill Safe practices should be foremost in mind whenever in the cleanroom You should never work alone in the Cleanroom BUDDY POLICY NSU Cleanroom policy di
9. be removed from the Cleanroom for use by other laboratory or department The lack of supplies and equipment hinders other users from making progress in their research 24 Penalty Suspension from the Cleanroom for three weeks 18 Changing the equipment settings The computers attached to any equipment are exclusively for equipment use only They 25 are to be used for applications only No additional software should be installed in any equipment as this violates equipment warranty No one should modify any software setting in any system as this often leads to equipment malfunction Penalty Suspension from the Cleanroom for three weeks 19 Not leaving the Cleanroom during an emergency During an emergency the emergency lights and horns will be activated e In such cases every user must immediately leave the Cleanroom e Users should not take time to de gown Just leave the Cleanroom with garments on e Users must exit the building through the nearest exit in an orderly manner All exits are clearly marked Penalty Suspension from the Cleanroom for three weeks Finale The intent of these policies and procedures is to ensure an environment where researchers can work together safely and productively while maintaining the integrity of the Cleanroom environment and equipment These policies and procedures will certainly change with time as the personality of our Cleanroom becomes more clearly understood Users are strongly encour
10. by the absorbent pillows Please be aware that the Cleanroom Floor is a raised perforated tile floor therefore the same treatment must be applied to the sub floor The tools to remove the tiles are available in the Spill Kit 6 Clean up V First Aid Do not remove personal protective equipment until cleanup is finished There may still be some active chemical on the floor When the liquid has been completely absorbed place the absorbent dam and pillows in a double trash bag If any glass is involved place the glass in a separate Haz Mat bucket and label it as SHARPS along with the chemical the glass contained Wipe down the spill area with the mop and DI water When finished place the mop head in a fume hood sink and rinse it thoroughly with DI water The wet dry vac can be used to vacuum small spills Place the bag in a Haz Mat bucket and apply an NFR diamond label writing the name of the chemical on the label Put the lid on the bucket and place the bucket in the Cleanroom Storeroom Notify MiNaC staff to its presence First aid is an important element of Cleanroom usage The NSU Cleanroom environment contains many potential hazards especially the chemicals used This section presents only a simplified first aid procedure for a hazardous chemical spill For more specific information consult the MSDS 1 Did the chemical spill on you If the chemical is a strong acid or base run the affected area under water for 10
11. cium Gluconate gel to the area following the directions on the package Seek medical attention as soon as possible 2 Is the chemical hazardous If the chemical is hazardous and you feel you cannot handle it alert others to its presence and evacuate the cleanroom During the workday notify the Cleanroom staff If after hours call the NSU Police 823 9000 first and then notify the Cleanroom staff at 823 0001 o If the chemical is a solvent or possesses a strong odor evacuate the bay and put on respirator and goggles before returning to clean up the spill 3 Retrieve the spill response cart o If the chemical is acidic or basic put on acid gloves respirator and goggles before attempting to clean up the spill Isolate the area around the spill Select the proper equipment for the spill For large spills those from a half gallon bottle or larger an absorbent dam will be necessary to prevent spreading For small spills only absorbent pillows are necessary Select the proper neutralizer for the chemical note 9 solvents do not require a neutralizer 4 Attack the spill o If using an absorbent dam place the dam around the spill approximately 4 inches from the liquid o Place the neutralizer bottle on the floor Release the clamp and spray neutralizer pushing the chemical into the spill dam Be sure to cover the entire spill o For strong acids HF and Sulfuric use approximately an 8 1 ratio of neutralizer to chemical to compl
12. ctates there must have at least one other person in the Cleanroom at all times BUDDY SYSTEM Il Spill Response Cart Items The cleanroom spill response cart is located in the Storage Testing Inspection Bay It is clearly marked as a spill response cart and contains the items you will need to combat a minor major spill All spills must be reported to the Principle Investigator and documented on the Incident Report Form The items included in the Cleanroom Spill Response Kit are absorbent spill dam absorbent pillows o acid neutralizer o caustic neutralizer o HF ointment calcium gluconate 2 5 pH paper o two pairs of acid gloves o two respirators with acid gas cartridges o two pairs of vapor resistant goggles o trash bags o 5gal Haz Mat bucket w NFPA labels o Tile Removers SPECIFIC HAZARD 0 Acid ACID Corrosive COR Use NO WATER NFPA Label Ill ve spilled a Bottle of If you the person responsible for the spilled chemical clean up should be straightforward 1 Did the chemical spill on you o If the chemical is a strong acid or base remove contaminated clothing and run the affected area under water for 15 to 20 minutes This should relieve some of the pain and reduce the danger of severe burns o If the chemical is HF remove contaminated clothing and run the affected area under water for 15 to 20 minutes Apply a liberal amount of Cal
13. d for the disposal of only such materials While it may seem like a couple of TexWipes with photoresist on them isn t bad remember the air in the Cleanroom is constantly recirculated so all those vapors will find their way back in eventually for everyone to breathe The following materials should be put in the solvent cans gt alcohols ethanol methanol isopropanol etc gt Acetone gt TCE Trichloroethylene gt Chlorobenzene this is particularly dangerous gt Photoresist and related products What If Don t Know How to Use Something if it malfunctions While I m Using It If you need to use a particular piece of equipment and you are not absolutely sure on how to use it DON T TRY TO LEARN BY DOING IT The staff is here to help you and they can point you to the right person who can show you how to use it If something malfunctions during a process advise staff accordingly DO NOT attempt to fix something without experience or prior approval There is a reason the technical manuals are kept outside the Cleanroom VII What Are The Procedures For Cleaning Up All cleanroom users are responsible for cleaning up their work site Store all tools dispose of all wipers and thoroughly clean all glassware and leave to dry Vill How Do I Store Things There will be tote boxes dry boxes available in the Storage Testing Inspection Bay for users to keep their belongings Just be sure they are properly labe
14. dle potentially causing a sample to fly off of the chuck VIII Wafer Handling NEVER sneeze cough or spit towards a wafer even with a mask on The resulting spots are non removable If you do have to sneeze turn head away from the wafer preferably towards the middle of the bay face the floor and sneeze towards the direction of the floor Or sneeze in your hood Never speak towards the wafer Avoid passing anything over the wafer which may release particles i e don t look down on the wafer don t cover the wafer with a hand Whenever possible store wafers in covered containers IX Tools and Repairs Vacuum or blow clean all equipment followed by an Isopropyl alcohol wipes before taking it into the Cleanroom see Detailed Cleaning Procedures No equipment will be modified without prior approval of the Cleanroom Staff No new equipment will be moved into the Cleanroom without prior approval of the Cleanroom Manager and Safety Officer Keep parts and tools in toolboxes at the workstation as clean and orderly as possible Any work or tools dropped on the floor shall be considered contaminated and must be cleaned Never leave exposed critical parts on the workbench Work on a clean surface When using Microscopes always wipe lenses before and after use Operations such as lapping filing deburring and heavy soldering are prohibited in the Cleanroom except where contamination is isolated and exhausted from the clean ar
15. e used or Out of Service Under no circumstances is a user allowed to perform any maintenance on any equipment Any abnormalities while using the equipment must be reported promptly When a machine is undergoing maintenance repairs users must be cooperative and patient No user is allowed to use equipment that is in a non working condition or when it is going routine maintenance Penalty Suspension from the cleanroom for three weeks 7 Being logged in the equipment for longer than the equipment time limit All the equipment in the cleanroom have a time limit which is the maximum number of hours the equipment can be used in one session No user should be logged in any equipment exceeding this time limit This is to ensure others have the opportunity to use the equipment If the equipment is not reserved by another user it can be continued to be used If the equipment time limit for usage is exceeded skip the log out and log back in This resets the timer for equipment log in Penalty First Offense Written warning Second Offense One week suspension from the cleanroom Third and Subsequent Offenses One week suspension from the cleanroom each time 8 Failure to log in at the computer or Log Book All users must log in at the computer If for any reason the computer is not working you have to report in the Log Book next to the computer From the moment you enter the Cleanroom until you are no longer using any equipment you mu
16. eas X Exercise Caution and good judgment Obey signs on equipment or in specific areas Refill empty squirt bottles Let empty solvent jugs evaporate to dry Rinse acid and base jugs three times with tap water before placing in appropriate cart When working with acids bases or solvents wear chemical resistant nitrile neoprene gloves and apron available at each wet hood Before using the gloves be sure they are in good condition Replace them if they are torn Do not dump solvents down the drains Use the solvent waste jugs located at the Fume Hoods When disposing of acid mixtures dilute with lots of tap water Label all unattended mixtures with Chemical Safety Warning Sheets available in the Cleanroom Hallway if being left XI Habits If a glove touches bare skin e g a forehead replace the gloves immediately Avoid scratching or rubbing exposed skin areas Never comb or brush hair within the Cleanroom or gowning area 6 e Limit the use of cosmetics colognes and perfumes in the Cleanroom and gowning areas as much as possible e No eating chewing or smoking shall be allowed any environmentally controlled area XII General Precautions e Personal items such as combs cigarettes matches tissues and similar particle shedding products shall not be carried into the Cleanroom Such items may be carried into controlled areas in street clothes pockets provided they are not removed from the pockets within the cle
17. ensive to maintain When in the Cleanroom be aware of your knowledge limitations It is extremely important to seek help if are unsure about the operation of this facility Il Enforcement The policies and procedures described here are intended to ensure the safety of all users protect the very complex and expensive equipment in the Cleanroom and to create an environment in which many different research groups can co exist It is expected that Cleanroom users will police themselves by encouraging and assisting one another in adhering to these policies Safe work offenders will be penalized typically through suspension or expulsion from the cleanroom The penalties are clearly defined in this manual Equipment Schedule Rules Schedule runs in advance whenever possible do not monopolize equipment Comply with your schedule 15 min maximum hold of equipment before position is queue is lost Remove tooling boats etc from systems and clean up particles from process chamber after each use Note and report any anomalies to the next user and staff IV Access to the Cleanroom The Cleanroom is equipped with a Card Access System which limits access to authorized users only Users must have their ID card in order to enter the Cleanroom Except in the case of emergency evacuations users will be required to exit the Cleanroom in the same way they entered The card system will record the times of entry and exit for each user This data will be 3
18. er whose card is being borrowed is responsible for any damage to the equipment caused by the other user as it will be regarded as an act of negligence of the cardholder Penalty Suspension from the cleanroom 5 Using Equipment reserved for another user A user is not allowed to sign in on equipment reserved by another user for the first 15 minutes of the first hour the equipment is reserved If the person who reserved it does not show up in 15 minutes any authorized user can use the machine after that time If a user s run exceeds his her scheduled time the next user who has reserved the equipment should reach a compromise with the previous user The equipment belongs to the user who reserved it and it is entirely his her decision to allow or disallow the previous user to continue using the equipment from using it The user should be careful in allowing the previous user to continue using the 21 equipment as he she faces the risk of violating a cleanroom policy see Violation 7 Also after 15 minutes is up if another user finds the equipment not in use and begins using it the machine belongs to this user Therefore if a user allows the previous user to continue he she must sign into the equipment after logging out the other user The user should then be around the equipment to prevent Violation 4 Penalty Suspension from the cleanroom for three weeks 6 Using equipment when it is undergoing maintenance and is marked not to b
19. etely neutralize the spill The acid neutralizer will turn from purple to yellow to red when finished Check pH it should be around 7 If still acidic continue adding neutralizer until pH 7 o For strong bases metal and ammonium hydroxides you will need approximately a 6 1 ratio of neutralizer to chemical The base neutralizer will turn from red to blue to yellow when finished Check pH it should be around 7 If still basic continue adding neutralizer until pH 7 Once the reaction has ceased allow liquid to cool Check pH it should be around 7 When cool vacuum with the wet dry vacuum cleaner o If dealing with a solvent spill do not attempt to neutralize it Soak up the chemical as soon as possible to avoid damage to the floor Do not use water on the spill until after the entire chemical has been absorbed Please be aware that the Cleanroom Floor is a raised perforated tile floor therefore the same treatment must be applied to the sub floor The tools to remove the tiles are available in the Spill Kit 5 Clean up o Do not remove personal safety equipment until you have finished cleaning up There may still be some active chemical on the floor o When the liquid has been completely absorbed place the absorbent dam and pillows in a double trash bag If any glass is involved place the glass in a separate Haz Mat bucket and label it as O SHARPS along with the chemical the glass contained o Wipe down the spill area w
20. fety equipment at the hood Personal Protective Equipment must always be used when handling chemicals at the Fume Hood and other situations where there is risk of injury or health effects Required Basic Cleanroom garment consists of a coverall hood shoe covers booties mask gloves safety glasses and a bouffant cap In addition when dealing with chemicals a face shield and an acid apron must be worn at the fume hood When handling acids acid Gloves should also be worn Penalty First Offense Reminder to put on proper safety equipment Second offense Written warning Third Offense One week suspension from the Cleanroom Fourth Offense One month suspension from the Cleanroom Subsequent Offenses One semester suspension from the Cleanroom 12 Not participating in clean up Cleanup will be held every Friday and the scheduled time is 20m However a user can perform their duties any time before Friday when scheduled for cleanup It is preferable to reschedule before the next specified time Only in emergency situations will a cleanup be rescheduled 23 Penalty Their account privileges will be suspended 13 Unauthorized entry into the Cleanroom by following another user Each user should use their ID Card to enter into the Cleanroom and get into the gowning area Penalty Suspension from the Cleanroom for three weeks 14 Allowing a user to enter the Cleanroom behind you when they did not swipe their card Be careful tha
21. ith the mop and DI water When finished place the mop head in a fume hood sink and rinse it thoroughly with DI water o Place the bag in a Haz Mat bucket and apply an NFR diamond label writing the chemical on the label o Put the lid on the bucket and place the bucket in the Cleanroom storeroom Notify Cleanroom Staff to its presence 10 IV Cleanup of an Unknown spill Finding a chemical spill can be more dangerous than spilling the chemical yourself if the proper precautions are not taken In most cases the spill will be of a small amount of unknown chemical 1 Assess any immediate hazards e 5 there a strong odor If so evacuate the bay and put on a respirator before continuing e ls aviolent reaction taking place If so it may be wise to wait until the reaction has finished 2 Attempt to identify the chemical e Look for clues to the chemical s identity labels tipped containers etc e Wearing an acid glove use the pH paper to identify whether the chemical is an acid base or solvent and its strength e If the chemical can be classified as an acid or base with the pH paper but not identified assume it is a very strong acid HF or a very strong base Sodium Hydroxide 3 Is the chemical hazardous e If the chemical is suspected of being hazardous and you feel you cannot handle it alert others to its presence and evacuate the Cleanroom During the workday notify MiNaC staff After hours call 823 9000 first and then
22. led 19 CLEANROOM RULES The following describes proper cleanroom policies users must follow at all times Failure to do so is a violation and the penalties for the violations are listed below 1 Unlawful use of any Cleanroom equipment without authorization Every user operating any equipment must be authorized to use that equipment In order to obtain authorization a user is required to go through the Cleanroom orientation training and testing on the equipment and subsequent check off Training sessions are held per need basis More information is available from the Cleanroom Manager or the Tool Owner Once trained by an experienced user of the equipment one should then schedule time with a trainer to obtain a check off after a minimum of one week from the training Doing so gives one time to get ready for check off Also if there are other users who are currently authorized to use that particular equipment you can operate the machine under the constant supervision of the users When you are ready for a check off the trainer and trainee must meet for a check off session The trainee must demonstrate his her ability to use the equipment without any assistance If the trainer deems the user capable of using the equipment without causing any damage he she will grant access to the user thereby making him her an authorized user of the equipment From this point on the user can use the equipment without supervision In cases where the trai
23. must escort and remain with the visitors at all times The escort will be responsible for ensuring visitors follow the facility policies and procedures VII Safety Procedures e Use special care to keep fume hoods in ultra clean conditions e Emergency exit doors are ONLY for EMERGENCIES such as fire or explosion in the lab or movement of very large pieces of equipment in and out of the cleanroom In case of an alarm exit immediately DO NOT take time to remove your gown until you are clear of the building IMPORTANT Hot plates one of the main causes of cleanroom fires o Never leave them on when unattended o Make SURE that the temperature is 20 C BELOW flash point of contents and 20 C BELOW melting point of beaker materials o Ask for help if you are unsure of any part of the process e Do not walk around unnecessarily be cautious when approaching another user s work space e Personnel movement is to be restricted to minimize the stirring up of settled particulate matter Storage of excess stuff in the Cleanroom is not permitted If you turn it ON remember to turn it OFF Examples o Vacuum Chuck Because others may be on the system Deionize Water Because DI system will become empty o Nitrogen Gas Because the Nitrogen Dewar will quickly deplete o Hot Plate Because the lab and personnel might burn Exceptions Those pieces of equipment that must be left on all day for practical purposes If you m
24. ner decides against granting access to the user the trainer and trainee need to 20 schedule another check off session Penalty Suspension from the cleanroom 2 Granting access to an unauthorized user to use Equipment No user can grant access to an unauthorized user to use any equipment without the user s constant supervision Authorized users are allowed to train other users on the equipment They are responsible for any damage to the equipment caused by the trainee as it will be regarded as an act of negligence of the authorized user Penalty Suspension from the Cleanroom 3 Using equipment with someone else s ID Card without being an authorized user and or not under supervision A user is not allowed to use equipment without being an authorized user for the equipment see Violation 1 He she can only use the equipment under the full supervision of an authorized user or Tool Owner Principal Investigator see Violation 2 Penalty Suspension from the Cleanroom 4 Allowing an authorized unauthorized user to use equipment under your name i e using your ID card without supervision No user can grant access to another user authorized or unauthorized to use equipment without constant supervision The authorized user who has ID card access to the equipment must be present at the equipment the entire time the other user is using the equipment The authorized user is allowed to train the other user on the equipment The us
25. ng area Take time to make sure that the garment stays completely off the floor at all times Inspect the garment each time it is worn for tears or soiling Put on coverall gown jumpsuit Gather coverall at waist level Step into the jumpsuit legs making sure that the garment does not touch the floor at any time Put arms through the sleeves and shrug on the coverall Straighten the coverall and zip it all the way up and snap around neck While wearing a hood make sure that the skirt of the hood is completely inside the collar of the jumpsuit A mirror is provided 15 e Put booties To put on cleanroom booties sit on the gowning bench Be sure the top of the boot is over the bottom of the jumpsuit leg so that any particles falling down the jumpsuit leg will be trapped in the bootie e Put on Cleanroom Gloves Carefully put on the first glove touching the outside of this glove as little as possible Put on the second glove using the previously gloved hand taking care not to touch skin with the gloved hand Pull the cuff of the gloves over the sleeve of the jumpsuit so that any particles falling from sleeves are trapped in the glove Gloves should be worn at all times no bare hands or fingers e Putonaclean pair of safety glasses goggles Isopropyl Alcohol is provided for cleaning safety glasses goggles e After having fully gowned check in the mirror to ensure that everything fits properly 16 with no gaps e
26. notify MiNaC staff 4 Retrieve the spill response cart e Put on acid gloves and goggles before attempting to clean up the spill e Select the proper equipment for the spill For large spills those from a half gallon bottle or larger an absorbent dam will be necessary to prevent spreading For small spills only absorbent pillows are necessary Select the proper neutralizer for the chemical note solvents do not require a neutralizer 5 Attack the spill e If using an absorbent dam place the dam around the spill approximately 4 inches from the liquid e Place the neutralizer bottle on the ground Release the clamp and spray neutralizer pushing the chemical into the spill dam Be sure to cover the entire spill e For the strong acids HF and Sulfuric use approximately an 8 1 ratio of neutralizer to chemical to completely neutralize the spill The acid neutralizer will turn from purple to yellow to red when finished e For the strong bases metal and ammonium hydroxides use approximately 6 1 11 ratio of neutralizer to chemical The base neutralizer will turn from red to blue to yellow Once the reaction has ceased allow liquid to cool When cool place absorbent pillows over the spill and allow them to soak up the liquid If dealing with a solvent spill do not attempt to neutralize it Soak up the chemical as soon as possible to avoid damage to the floor Do not use water on the spill until after the chemical is absorbed
27. r Cleanroom garments which trap and hold the particles emitted by their bodies and clothing The Micro and Nano technology Center has adopted the following gowning procedure for use in the Cleanroom It is important that each person who enters the Cleanroom carefully follows this procedure Frequent Cleanroom users will be assigned a garment hanger The coverall hood and booties must be laundered approximately after one week of continual use Infrequent users and visitors will not be assigned any hangers They will use Tyvek Disposable Coverall which will be discarded after use Gowning Sequence e Clean shoes with shoe scrubber The shoe scrubber is located outside the gowning room entrance on the left Turn the shoe scrubber on by pushing on the handle Slide each foot between the rotating brushes for several seconds The scrubber will turn off when you release the handle e Put shoe covers located inside at the entrance of the gowning room Only flat or very low heeled shoes may be worn No sandals or open toed shoes may be won e Putona bouffant cap and make sure all the hair is contained in the cap Put a pair of gloves and cross over the bench e Carefully put on a face mask and a hood The hood must completely cover your hair and mask Adjust hood by using snaps on the back 14 Hood and Face Mask Remove your cleanroom garment from the hanger and inspect it The permanent gowns are stored on assigned hangers in the gowni
28. st remain logged in If you are leaving the Cleanroom but are still using the equipment you should not log out Penalty First Offense Written warning Second Offense One week suspension from the cleanroom Third and subsequent Offenses One week suspension from the cleanroom each time 22 9 Failure to log out from the computer or the log book All users must log out at the computer when leaving the Cleanroom provided they are not still using equipment Use the Log Book if the computer is not working From entering the Cleanroom until exiting users must remain logged in the computer If leaving the cleanroom but are still using equipment inside the cleanroom do not log out Only after using the equipment should a user log out Penalty First Offense Written Warning Second offense One week suspension from the cleanroom Third and subsequent Offenses One week suspension from the cleanroom each time 10 Leaving chemicals without proper documentation on Chemical Safety Warning Sheets Chemical Safety Warning Sheets are available in the Cleanroom Hallway and must be completed by providing all the information required on the form All chemicals left unattended must be properly documented by the use of the Chemical Safety Warning forms Penalty a The mislabeled chemical will be disposed of b The student will be issued with a written warning c Repeat Offenders One week suspension from the cleanroom 11 Not wearing proper sa
29. t no one follows you into the Cleanroom without swiping his her card Each user must swipe their card to enter the cleanroom No one should follow another user into the Cleanroom This is to prevent unauthorized users into the Cleanroom Penalty Suspension from the Cleanroom for three weeks 15 Damage to the equipment Damages resulting from user s negligence are the user s responsibility and cost of repair replace The charges that the individual can pay as a result of their negligence will vary by case Penalty Users are responsible for damages to machines that are a result of negligence 16 Not following proper gowning and de gowning procedures Normal Cleanroom garment consists of a gown hood shoe covers booties gloves safety glasses mask and bouffant cap They must be methodically attired as shown in the pictures Do not put feet with without shoe covers booties on the bench in the gowning room at any time NOTE Safety glasses goggles are mandatory Penalty First Offense Demonstration of proper gowning and de gowning procedures Second Offense Written warning Subsequent Offenses One week suspension from the Cleanroom for each offense thereafter 17 Removing supplies and or equipment from the Cleanroom All supplies in the Cleanroom such as the solvent squirt bottles tote boxes and hot plates are for Cleanroom use ONLY These supplies and equipment are for Cleanroom related research only Nothing should
30. to 20 minutes This should relieve some pain and reduce the danger of severe burns If the chemical is HF run the affected area under water for 15 to 20 minutes and then apply a liberal amount of calcium gluconate gel following the directions on the package Seek medical attention as soon as possible If the chemical is a solvent rinse the affected area for 10 15 minutes to reduce any irritation 12 2 The chemical spilled on someone else If the person is coherent find out what chemical they were using If the person is unable to communicate have someone place them under a safety shower and remove visibly contaminated clothing while attempting to identify the chemical o Look for clues to identify the chemical labels tipped containers etc o Wearing acid gloves use a litmus paper to identify whether the chemical as acid base or solvent and its strength If the chemical can be classified as an acid or base with the pH paper but not identified assume it is HF or Sodium Hydroxide o Take necessary first aid action including the use of HF ointment o Notify Norfolk State University Police at 823 9000 as soon as possible and then notify Cleanroom staff 13 CLEANROOM GOWNING PROCEDURE I Introduction By far the dirtiest thing in the Cleanroom will be the people who use it Even the most carefully manicured person generates a shroud of particles from their skin hair clothing and breath Consequently all Cleanroom users must wea
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