User Manual MP61E - Physik Instrumente
Contents
1. 3 2 Limit Switches All M 122 positioners are equipped with non contact Hall effect limit switches with TTL drivers Each limit switch sends an overtravel signal on its own dedicated line to the controller It is the controller that is then responsible for stopping the motion If it does not do so in time the positioner will run into the hard stop Limit switch outputs are active high CAUTION Crashes can cause irreparable damage Do not disable limit switches in software Test limit switch operation at low speeds Stop system if necessary Do not let it run against a hard stop Limit Switch Specifications Type Magnetic Hall effect sensors Supply voltage 5 V GND supplied by the motor controller through the motor connector Signal output TTL level Sink source capab 20 mA at 18 C Signal logic Active high normal motor operation low limit sensor reached high wWww pi ws M 122 MP61E Release 1 0 0 Page 12 Operational Considerations Piezo Nano Positioning PI 3 3 Reference Switch All stage versions are equipped with a direction sensing Hall effect reference switch which is located at about the midpoint of the travel range This sensor provides a TTL signal indicating whether the positioner is to the positive or negative side of a fixed point The rising or falling edge of this signal can be used to indicate a known reference position within 0 5 um accuracy depending on the controller The d2. Wrong axis commanded m Check if commanded axis is that of the desired positioner Incorrect configuration m Check for anomalous parameter settings on the controller Positioner does not reach position with expected accuracy Motion parameters are not optimized M 122 MP61E Release 1 0 0 Page 15 Troubleshooting Piezo Nano Positioning PI W Adjust the motion parameters according to the values given in this document Positioner runs jerkily and not smooth enough Motion parameters are not optimized m Adjust the motion parameters according to the values listed in this document Positioner did not stop in time and ran into a hard stop The controller has not stopped the positioner in time W Too high velocity See chapter Limit Switches p 12 W Turn off the motor If possible you may push the positioner out of the end zone manually m The end of the leadscrew has an Allan wrench socket so it can be cranked manually 5 2 Customer Service Still having problems Call your Pl representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system W Current firmware version of the controller if present m Version of drivers and or host software if present W Operating system on host PC if present WWwW pi ws M 122 MP61E Release 1 0 0 Page 16 Old Equipment Disposal Piezo Nano Positioning PI GS Old
3. 2 If Y axis motion desired mount the Y axis positioner using two of the threaded mounting holes in the sled of the X axis positioner 3 If Z axis motion desired mount the Z axis mounting bracket using two of the threaded mounting holes in the sled of the X or the Y axis positioner 4 When the bracket is affixed attach the Z axis stage to it in the right orientation see fig below The moveable bearing has to be upturned www pi ws M 122 MP61E Release 1 0 0 Page 8 Start Up Piezo Nano Positioning P I Figure 4 Assembling M 122 stages to form an XYZ system maximum screw length is given in mm www pi ws M 122 MP61E Release 1 0 0 Page 9 Start Up Piezo Nano Positioning P I e 3 Interconnecting the System WARNING CRUSH HAZARD Never put anything where the moving platform or any connected object could possibly trap it The moving platform can accelerate rapidly and generate high forces which can cause damage or injury Figure 5 M 122 2DD positive direction of motion Prior to operation you should read the documentation for your motor controller To operate a stage proceed as follows 1 Install connect the controller following the instructions in the controller manual If you are going to use a host computer install the host software in the host computer This procedure is described in the controller User Manual and or associated software manuals 2 Connect the positioner to the controller using th
4. 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Translation Stage Model Numbers M 122 Product Options all complies with the following European directives 73 23 EWG Niederspannungsrichtlinie 73 23 EEC Low voltage directive 89 336 EWG EMV Richtlinie 89 336 EEC EMC Directive 98 37 EG Maschinenrichtlinie 98 37 EC Machinery Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 July 31 2007 Karlsruhe Germany POS Dr Karl Spanner President About this Document Users of this Manual This manual is designed to help the reader to install and operate the M 122 Micro Translation Stage It assumes that the reader has a fundamental understanding of motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 122 Micro Translation Stage as well as the procedures which are required to put the associated motion system into operation Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls
5. 150 urad 150 prad 20 mm s 1 um Recirculating ballscrew 0 5 mm 0 25 N um 50N 20N 25N DC motor 0 to 12 V differential 2 25W Hall effect 20 to 65 Aluminum steel 86 x 60 x 20 5 mm 0 22 kg C 862 single axis C 843 PCI board up to 4 axes M 122 MP61E Release 1 0 0 Page 18 Piezo Nano Positioning PI Technical Data 7 2 Dimensions All dimensions in mm decimal places separated by commas in drawings 7 2 1 Dimensions 86 31 75 12 5 L y Figure 6 M 122 2DD dimensions in mm www pi ws M 122 MP61E Release 1 0 0 Page 19 Piezo Nano Positioning PI Technical Data 7 2 2 Angle Bracket and Adapter Plate Mi Figure 8 M 110 01 Adapter plate for mounting on Honeycomb stages www pi ws M 122 MP61E Release 1 0 0 Page 20 Technical Data Piezo Nano Positioning PI 7 3 Pin Assignments 7 3 1 Analog DC Motor Versions Connector type on motor Sub D 15m T T T Bo ne mteomeed OO 9 MOT impu motrconecion C Sine necnneced O n c not connected 12 NCI output negative imit signal actve nigh TTE GND around fiogie output i 12 CON ouput 7o 15 encoder signal A dash TTL po 15 B w output encoder signal B TTL 8 BY output jencodersignal B dash TTL Polarity determines direction of motio
6. the Z axis M 122 MP61E Release 1 0 0 Page 3 Piezo Nano Positioning PI Introduction 7 2 Prescribed Use Correct operation of the M 122 positioners is only possible in combination with a suitable controller driver ordered separately and software The controlling device must be able to read out and process the signals from reference and limit switches and the incremental position encoder to ensure proper performance of the servo control system Based on their design and realization the M 122 stages are intended for single axis positioning adjusting and shifting of loads at various velocities M 122 positioners can be mounted horizontically or vertically To achieve the specified guiding accuracy the positioners have to be mounted on a flat surface to avoid torsion of the basic profile The positioners may only be used for applications suitably in accordance with the device specifications Respect the safety instructions given in this User Manual The operator is responsible for the correct installation and operation of the M 122 The verification of the technical specifications by the manufacturer does not imply the validation of complete applications In fact the operator is responsible for the process validation and the appropriate releases The M 122 meets the specifications as defined by DIN EN 61010 for safe operation under normal ambient conditions See the specifications table for details see Specifications p 1
7. 8 1 3 Safety Instructions Read carefully the User Manuals of all other components involved such as controllers or software Read the following before operating the equipment covered in this manual CAUTION Read this before operating the equipment covered in this manual Always keep the User Manual safe and close to the described device In case of loss or damage to the instructions please order a new copy from your PI distributor or download one from www pi ws http www pi ws Also keep and add all further information e g extended instructions or Technical Notes to the User Manual WWwW pi ws M 122 MP61E Release 1 0 0 Page 4 Introduction Piezo Nano Positioning PI T E WARNING CRUSH HAZARD Never put anything where the moving platform or any connected object could possibly trap it The moving platform can accelerate rapidly and generate high forces which can cause damage or injury A E WARNING M 122 stages are powered by powerful electric motors and can accelerate to high speeds Be aware that automatic limit switch halt may not be supported by or activated at the motor control electronics Be aware that failure of the motor controller may drive the mechanics into a hard stop at high speeds When the mechanics is first connected to the motor controller be aware that it could start an undesired move CAUTION Crashes can cause irreparable damage Do not disable limit switches in software Test limit swit
8. Equipment Disposal www pi ws In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH 8 Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from Pl you can send it to the following address postage free Physik Instrumente PI GmbH 8 Co KG Auf der R merstr 1 76228 Karlsruhe Germany M 122 MP61E Release 1 0 0 Page 17 Technical Data 7 Technical Data Piezo Nano Positioning PI 7 1 Specifications Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Design resolution Min incremental motion Backlash Unidirectional repeatability Pitch Yaw Max velocity Origin repeatability Mechanical properties Drive screw Thread pitch Stiffness in motion direction Max load Max push pull force Max lateral force Drive properties Motor type Operating voltage Electrical power Limit and reference switches Miscellaneous Operating temperature range Material Dimensions Mass Recommended controller driver wWww pi ws M 122 2DD X 25 mm Linear encoder 0 1 um 0 1 um 0 2 um 0 2 um 0 15 um
9. Piezo Nano Positioning PI MP61E User Manual M 122 Micro Translation Stage Release 1 0 0 Datum 01 08 2007 This document describes the following product m M 122 2DD High Precision Micro Translation Stage with linear encoder Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 I info pi ws www pi ws Moving the NanoWorld www pi ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI The following designations are protected company names or registered trademarks of third parties LabVIEW Copyright 1999 2007 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Erstdruck 01 08 2007 Document Number MP61E BSc Release 1 0 0 M122 User MP61E doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws zum Herunterladen verf gbar Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der R merstrasse
10. alog or PWM automatically enabled with no extra command required M 122 MP61E Release 1 0 0 Page 22 DC Motor Controllers Piezo Nano Positioning PI www pi ws Appropriate Parameters for M 122 2DD Parameter Recommended Value 40 AAA A 200 000 20 0 400 000 40 0 M 122 MP61E Release 1 0 0 Page 23 9 Glossary of Terms Backlash Position error that appears upon reversing direction Backlash is caused by play in the drive train components coming after the encoder such as gearheads or bearings and by friction in the guiding system Unlike hysteresis it can lead to instability in closed loop setups because it causes a deadband in the servo loop Some manufacturers promote controllers with automatic backlash compensation that add the estimated amount of lost motion upon each reversal This solution is very limited in practice as backlash is not constant but varies with temperature deceleration acceleration load leadscrew position direction wear etc Bidirectional Repeatability The accuracy of returning to a position from any position regardless of direction Effects such as hysteresis and backlash affect bidirectional repeatability See also Unidirectional Repeatability DC Servo Motor A direct current motor that is operated in a closed loop system servo loop Characteristics of DC servo motors are lack of vibration smooth running wide speed range and very good low speed torque For optimum perfor
11. attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints The motion controller and the software tools which might be mentioned in this documentation are described in their own manuals Current releases can be downloaded from the PI Website as PDF files www pi ws http www pi ws For updated releases contact your Physik Instrumente sales engineer or write an email toinfo pi ws mailto info pi ws Contents Introduction 3 WV Product Description ride 3 12 Prescribed Use eene cidad 4 13 Safety MMS EMICUONS Ts 4 14 MIN PACKING Sista En 5 15 ACCOSSOMIES i tre ita 6 Start Up 7 21 Mechanical Mounting cccccccccnccnnccnnncnnncnnnnnnnennnnnnnnnnnnnnnnnnnnnnnoninininoss 7 22 Stacking M 122 SIages x setatis rtr PM Ge ox OU rp M eles 8 23 Interconnecting the SysteM oooocooccnoninnnnicnancnonecenennnnnnnnnrrnenrn nen 10 Operational Considerations 12 31 Linear EA Od ET e a a r a E een 12 32 LIMIR SWIICNCS mrs e p e ee EO e 12 33 Reference Switch nr ttt eret Ai 13 34 Motor Controllers ssssssssssss Hee 13 35 JOSE PC uo isebtecQics nda 13 Maintenance 14 Troubleshooting 15 51 s oco cok chant endless eens eesti 15 52 Customer Service ceccccccccccceccceeceeeeeeeeeeeeeeeeeeeeeeseeeeeeeeeeeeeeeeseeeseeess 16 Old Equipment Disposal 17 Technical Data 18 71 Speci
12. ch operation at low speeds Stop system if necessary Do not let it run against a hard stop 1 4 Unpacking Unpack the M 122 Micro Translation Stage with care Compare the contents against the items covered by the contract and against the packing list The following components are included B M 122 Micro Translation Stage m C 815 38 motor cable for connecting to motor controller m 000018146 screw set m MP61E User Manual for M 122 in printed form this document Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact Pl immediately WWw pi ws M 122 MP61E Release 1 0 0 Page 5 Introduction Piezo Nano Positioning PI Save all packing materials in case the product need be shipped again 1 5 Accessories The following accessories see Angle Bracket and Adapter Plate p 20 can be ordered for use with the M 122 Micro Translation Stage m M 110 01 Adapter plate for mount of M 122 stages on honeycomb tables metric and inch M 400 and M 500 translation stages and rotation stages m M 122 AP1 Angle bracket for vertical mounting of M 122 stages Contact your PI represenstative or write info pi ws if you need additional components www pi ws M 122 MP61E Release 1 0 0 Page 6 Start Up Piezo Nano Positioning P I 2 Start Up 2 1 Mechanical Mounting The M 122 positioner is usually mounted with its base firmly bolted to a baseplate or another stage so that the spindle drive
13. e connecting cable part number C 815 38 With multi axis controllers be sure to note the axis designation of the connection selected 3 Use the software to adopt the controller to the stage 4 Command a few test moves to make sure everything is working properly WWW pi ws M 122 MP61E Release 1 0 0 Page 10 Start Up Piezo Nano Positioning PI For best performance and system compatibility we recommend using Pl controllers This User Manual includes a list of suitable controllers see DC Motor Controllers p 22 Most PI controllers come with a graphic user interface software which is easy to setup and allows quick installation and testing NOTE Most standard motor controllers and or software from Pl use a database which contains information on all standard micropositioners and installs automatically with the host software This database a file called pistages dat also includes an initial set of PID servo control parameters for each stage type If your system does not use pistages dat possible PID parameters are included in this manual WWwW pi ws M 122 MP61E Release 1 0 0 Page 11 Operational Considerations Piezo Nano Positioning PI 3 Operational Considerations 3 1 Linear Encoder An optical linear encoder is mounted in the M 122 featuring 0 1 um resolution Linear optical encoders measure the actual position directly thus eliminating drivetrain errors such as non linearity backlash or elastic deformations
14. fications sssssssssssssse mem 18 12 Dimensions ncn nce ie 19 12 14 DIMENSIONS 3 iet echte ioa nte init ib tede 19 722 Angle Bracket and Adapter Plate sssseeeeee 20 L3 Pin ASS Me dU e ete pU o ede 21 731 Analog DC Motor Versions esee 21 8 9 10 DC Motor Controllers Glossary of Terms Index 22 25 27 Introduction 1 Piezo Nano Positioning PI Introduction 1 1 Www pi ws Product Description Figure 1 M 122 2DD micro translation stage golf ball for size comparison The M 122 palm top sized translation stage combines small dimensions high speeds and very high accuracy at a competitive price It features a space saving folded drive train with the servo motor and drive screw side by side Equipped with a non contacting optical linear encoder and a preloaded precision ground ball screw these stages can provide much higher accuracy and better repeatability than conventional stepper motor stages or rotary encoder equipped servo motor stages Low Friction High Speed Maintenance Free Due to its low friction the backlash free ball screw yields significantly higher mechanical efficiency than leadscrews and allows maintenance free high duty cycle operation at high velocities up to 20 mm sec XY and XYZ Combinations M 122 stages can be combined to very compact XY and XYZ systems The M 122 AP1 mounting bracket is available to mount
15. ifference in the reference point when approached from the positive or the negative side is about 0 2 mm to 0 4 mm See the controller User Manual and or associated software manuals for the commands which make use of the reference signal NOTE To obtain best position repeatability it is recommended always to approach the reference point from the same direction 3 4 Motor Controllers M 122 series micropositioners can be connected to the same motor controllers as other micropositioners from PI DC motor controllers from Pl can control both analog and ActiveDrive PWM motor versions The required operating mode is set automatically depending on the controller model either directly when the controller is powered up or when the user chooses the connected positioner type in the control software If networking several positioners you have to keep in mind that stepper motor devices can only be networked with other stepper motor devices This manual includes a list of suitable controllers 3 5 Host PC wWww pi ws Most controllers from Pl are in turn controlled by a host PC provided by the user The controller is either installed directly in the PC e g C 843 PCI board or connected to it over a communications interface See the controller User Manual for details PI provides software and or drivers that run on the host PC to control the system Typically there will be a control program with a graphic user interface for test
16. ing and simple operation and in addition DLL COM and or LabView drivers for users who wish to use custom software If the controller is aPC ISA or PCI card there will also be hardware drivers to install See the controller user and software manuals for installation details M 122 MP61E Release 1 0 0 Page 13 Maintenance Piezo Nano Positioning PI e Maintenance When operated in a clean environment no maintenance is required WWwW pi ws M 122 MP61E Release 1 0 0 Page 14 Troubleshooting Piezo Nano Positioning PI 5 Troubleshooting 5 1 www pi ws Troubleshooting Positioner does not move Cables not connected properly m Check the connecting cables Positioner or positioner cable is defective m Replace positioner with a working positioner of the same type to test a new combination of controller and positioner positioners of a different type may malfunction due to unsuitable parameter settings on the controller Test cable and or replace with a working cable of the syme type Wrong command or wrong syntax m Check the error code with PI GCS command set use ERR see controller and software manuals for the error code explanations Positioner is not referenced m Inthe GCS command set some closed loop motion commands are not executed if the mechanics has not been referenced ERR replies 5 see controller and software manuals Reference the axis as described in the controller and user manuals
17. ion can be provided by solid state actuators PZTs and PZT flexure stages see the PZT Flexure NanoPositioners and PZT Actuators sections of the PI Catalog for details such as those integrated in PI s M 511 HD and M 714 Hybrid Drive stages Unidirectional Repeatability The accuracy of returning to a given position from the same direction Because unidirectional repeatability is almost unaffected by backlash and hysteresis it is often considerably better than bidirectional repeatability 10 Index A Accessories 6 Analog DC Motor Versions 21 Angle Bracket and Adapter Plate 6 20 B Backlash 25 Bidirectional Repeatability 25 C Customer Service 16 D DC Motor Controllers 7 11 22 DC Servo Motor 25 Design Resolution 25 Dimensions 19 H Host PC 13 Interconnecting the System 7 10 Introduction 3 L Limit Switches 12 16 Linear Encoder 12 M Maintenance 14 Maximum Push Pull Force 25 Mechanical Mounting 7 8 Minimum Incremental Motion 26 Motor Controllers 13 O Old Equipment Disposal 17 Operational Considerations 12 P Pin Assignments 21 Prescribed Use 4 Product Description 3 R Reference Switch 13 S Safety Instructions 4 Specifications 4 18 Stacking M 122 stages 8 Start Up 7 y Technical Data 18 Troubleshooting 15 U Unidirectional Repeatability 26 Unpacking 5
18. mance a good motor controller with PID proportional integral derivative algorithm and filter settings is mandatory Design Resolution The theoretical minimum movement that can be made This is a calculated value based on the drive components drive screw pitch gear ratio motor angular resolution etc and does not account for nonlinearities like friction backlash etc Design resolution must not be confused with minimum incremental motion In systems with high gear ratios or microstepping motors the design resolution can be in the subnanometer range In practice incremental motion of less than 0 1 um is prevented by guiding system friction except with air bearings and flexures Maximum Push Pull Force Active and passive force limit in operating direction at center of stage Some stages may be able to generate higher forces at the cost of reduced lifetime Minimum Incremental Motion The minimum motion that can be repeatedly executed for a given input which is sometimes referred to as practical or operational resolution Design resolution and practical resolution must be distinguished Design resolutions of 1 nm or better can be achieved with many motor gearbox and leadscrew combinations In practical applications however stiction friction windup and elastic deformation limit resolution to fractions of a micron Minimum incremental motion must be determined by actual measurements Repeatable nanometer or sub nanometer resolut
19. n if MOT gt MOT motion is in the positive direction i e away from the end where the motor is mounted WwWW pi ws M 122 MP61E Release 1 0 0 Page 21 DC Motor Controllers Piezo Nano Positioning PI 8 DC Motor Controllers WWwW pi ws M 122 positioners can be used with the C 843 motor controller card or C 862 Mercury controllers Drive type DC Motor Controller C 862 Mercury C 843 motor controller card Axes per controller A REN Host PC interface RS 232 bus or E chain Internal LN bus Multiple controllers on yes same or separate ports yes separate slots same host PC NOTE Most standard motor controllers and or software from Pl use a database which contains information on all standard micropositioners and installs automatically with the host software This database a file called pistages dat also includes an initial set of PID servo control parameters for each stage type If your system does not use pistages dat possible PID parameters are included in this manual Parameter settings for C 862 Mercury DC Motor Controller The C 862 Mercury Controller is a compact palm size single axis controller C 862s are daisy chain networkable and a multi axis system can be controlled from a single PC RS 232 interface The Windows operating program for the C 862 Mercury controller allows choice of micropositioners as a start up option for operation The C 862 Mercury has the correct operating mode an
20. n sled is visible Proceed as follows 1 Move the sled blue part of the stage back and forth to access the mounting holes in the base You can do this in either of two ways W Connect the positioner to a suitable motor controller see DC Motor Controllers p 22 and command the necessary motion see Interconnecting the System p 9 See the User Manual of the controller and any associated software manuals for a detailed description W Move the platform by manually turning the spindle To do this use a 1 5 mm Allen wrench included Figure 2 Mounting hole in the M 122 Figure 3 M 122 with Allen wrench base left hole partially obscured by the sled Note Turn the leadscrew ball screw manually only for mounting or for moving the sled off of a limit switch 2 Insertthe two mounting screws form the top tighten and make sure the screw heads do not interfere with the stage motion www pi ws M 122 MP61E Release 1 0 0 Page 7 Start Up Piezo Nano Positioning PI 3 To mount an object on the sled of the stage use M3 screws in the six threaded holes CAUTION Overlength screws will interfere with motion of the stage and could cause permanent damage 2 2 Stacking M 122 stages You can assemble stacked XY or XYZ systems with M 122 positioners Be sure to read the chapter Mechanical Mounting p 7 For assembling use the included screws Proceed as follows 1 Attach the X axis positioner to its mounting
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