4 Installation Procedure - Ideal Vacuum Products, LLC
Contents
1. 1078 107 PRESSURE mbar Figure 5 Pumping speed vs pressure for Argon Vaclon Plus 20 pumps User Manual 87 900 106 01 E 55 90 5 Technical Information A z LL 14 14 2 oO 1078 1077 1076 PRESSURE mbar Figure 6 Pressure vs current diagram 56 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Vaclon Plus 20 Noble Diode e C e N e oO Q TT LL 0 0 O z A 5 n e 0 10 10 10 10 10 10 PRESSURE mbar Figure 7 Pumping speed vs pressure for Nitrogen e C e N e PUMPING SPEED l s gt e 0 10 10 10 10 10 10 10 PRESSURE mbar Figure 8 Pumping speed vs pressure for Argon Vaclon Plus 20 pumps User Manual 87 900 106 01 E 57 90 5 Technical Information2. lt LLI x x gt O 10 10 PRESSURE mbar Figure 9 Pressure vs current diagram 58 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Vaclon Plus 20 Diode a a LU m A 0 o e 2 a 10 10 107 PRESSURE MBAR Figure 10 Pumping speed vs pressure for Nitrogen CURRENT A 10 10 10 10 10 10 10 10 PRESSURE mbar Figure 11 Pressure vs current diagram Vaclon Plus 20 pumps User Manual 87 900 106 01 E 59 90 5 Technical Information Outline Drawing The following figure shows the outline drawing for the Vaclon Plus pump WITH FERRITE MAGNETS WITH Sm Co MAGNETS Figure 12 Vaclon Plus pump outline drawing 60 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Stray Magnetic Field Curves of stray magnetic field strength along the centre line of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs 14 1
3. Reactive L Flammable Explosive LI Biological L Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and model l understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Pg 2 3 AE Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down T
4. and then reassembly the new heater following the instructions of the above mentioned paragraph Bakeout Operation When a Vaclon pump does not reach the desired base pressure and there are no leaks it is necessary to bake the system This is done by heating the pump and all the components in the system and is generally required to achieve base pressure less than 10 mbar 1 Heat the pump body and the system with a bakeout oven unit or heating strips to temperatures between 150 C and 220 C 220 C is the maximum allowable for most bakeable high voltage cables This temperature is high enough to degas the pump surfaces of water vapor without damaging the magnet and high voltage connector Note that the system components must be compatible with the bakeout temperature The heating must be approximately even on all surfaces or evaporated water will condence on the colder surfaces resulting in an incomplete bake and preventing achievement of UHV vacuum pressure Leave the pump control unit on and monitor the pressure Agilent recommends that current during bake not exceed 50 mA if this value is exceeded turn the bakeout off and then on again when low pressure is restored To control the heaters and to monitor the high pressure limit during bakeout an automatically controlled relay may be used Bake the Vaclon Plus pump for at least 24 hours Longer bakeout periods are recommended when the pump has been used with heavy gas load
5. USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 E Agilent Technologies Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 04
6. Samarium Cobalt magnets Heaters 120V 220V Part Number Starcell with Sm Co magnets ou al Cables and accessories Diode Noble Diode Starcell p a a HV radiation 929 0705 interlock pasmi EE 919 1114 919 1124 919 1144 919 0036 919 0044 919 0043 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Copper gasket for 2 3 4 inlet flange 10 pack individually sealed Nut and bolt set for 2 3 4 inlet flange 1 4 28x1 25 pack Copper gasket for 1 1 3 CF feedthrough flange 10 pack individually sealed Nut and bolt set for 11 3 GF feedthrough flange 8 32x3 4 25 pack FG 0275 Cl FB 0275 C12 FG 0133 Cl FB 0133 C For a complete overview of Agilent s extensive vacuum product line please refer to the Agilent Vacuum Catalogue Vaclon Plus Pump Controllers The following controller series are available to supply the Vaclon Plus pumps MiniVac Dual AUHV Please refer to the Agilent Vacuum Catalogue to choose the correct controller for each pump Vaclon Plus 20 pumps User Manual 87 900 106 01 E 83 90 5 Technical Information Vaclon Plus Pump Controllers 84 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E XE Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be sa
7. and they are very difficult to remove even by baking High voltage feedthrough is leaking lon pump leakage current causing higher pressure reading Vaclon Plus 20 pumps User Manual 87 900 106 01 E Correction procedure Reduce pressure to 105 mbar recommended 104 mbar minimum Leak check the vacuum system with a helium leak detector With the system under vacuum pump for several days or heat to 100 150 C for up to 15 hours Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see section BAKEOUT OPERATION Replace the feedthrough 81 90 5 Technical Information Symptom 1 System fails to achieve desired UHV vacuum pressure Possible cause System not fully baked Water vapor limits base pressure Correction procedure Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see section BAKEOUT OPERATION 8 System fails to achieve desired UHV vacuum pressure System not appropriately cleaned Clean all components for for UHV Excessive outgassing from UHV and bake the system walls limits base pressure again Vaclon Plus Pump Replacement Parts and Accessories 82 90 Tab 3 Basic pump resistant cable with HV Feedthrough Pump without magnets Ferrite magnets
8. 5x10 Torr mbar a controller voltage of approximately 300 to 400 volts is typical A current value near the short circuit current of the control unit could indicate that an unconfined flow discharge exists in the pump and system temporary rise in roughing pressure will usually be noticed during any starting procedure Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pressure decreases the voltage again will rise and the roughing valve may be closed When the voltage has increased to 2 3 kV place the control unit in the PROTECT condition The system is now automatically protected against pressure increases to 10 Torr mbar when the pump is left unattended If such an increase should occur the control unit will be turned off automatically The pressure in the pump can also be determined by reading the current and converting this reading to pressure with the appropriate pressure versus current graph shown in the appendix Technical Information of this manual Vaclon Plus 20 pumps User Manual 87 900 106 01 E 45 90 4 Installation procedure The steps on the pressure current charts are a characteristic of the Dual step voltage operation When the current drawn by the Vaclon pump reaches the specified values the controller will change the
9. CAUTION The high voltage feedthrough contains a ceramic insulator that can be damaged If excessive force is applied in torque in bending or in tension When installing or removing the feedthrough the applied torque should not exceed 2 Nm Rotate the feedthrough gently when making the threaded connection to avoid excessive force 1 Remove the 6 bolts of the Mini ConFlat flange connection see Fig 20 Remove the cable connection disc Gently relieve the feedthrough from the metal gasket connection and turn the feedthrough counterclockwise until it is completely detached from the internal high voltage threaded connection 4 Replace the feedthrough and the copper gasket making sure that the feedthrough is connected to the pumps internal connector Check that the feedthrough is not shorted 5 Bake out the pump while it is operating and leave it to cool down then verify that the base pressure is below 10 mbar Figure 20 High voltage feedthrough connection 78 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Leakage Current Check If the pump current reading is to be used as pressure measurement check the pump leakage currents as follows 1 Turn off the pump control unit 2 Remove the pump magnet 3 Turn on the pump
10. Cable Safety Interlock feature When the high voltage cable connector is disconnected from the Vaclon Plus pump feedthrough the high voltage is automatically switched off by the control unit Heater Installation The heating element is a coaxial resistance heater shaped to fit the bottom of the pump body To install the element proceed as follows Fig 19 1 Disassemble half of the cover by loosening the two screws 2 Remove the pump from the magnet If some shock occur to the magnet assembly when the pump is removed the magnets can attract each other with the possibility of trapping fingers shattering the magnets or damaging the equipment In order to avoid this insert a piece of wood or plastic in place of the pump body to keep the magnets separated J Install the heater around the pump body 4 Reinstall the pump body and the cover 12 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information MAGNE _ PUMP BODY Figure 19 Heater element mounting cover removed Vaclon Plus 20 pumps User Manual 87 900 106 01 E 5 73 90 5 Technical Information Heater Replacement 74 90 To replace the pump heaters first remove the faulty heater following in the reverse order the instructions of the paragraph HEATER INSTALLATION
11. an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical pump Be careful to minimize the time that this pump is open to the system and ion pump since mechanical pump vapors will start diffusing into the system at pressures below 1x10 Torr mbar and cause contamination In systems where oils must be completely eliminated turbopump roughing pumps should be used Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During exposure to air the deposits of titanium compound absorb water vapor In subsequent start ups pump heating causes release of the water vapor and some previously pumped hydrogen thus the starting time may be lengthened Vaclon Plus 20 pumps User Manual 87 900 106 01 E Installation procedure 4 Operating Procedure Check that the controller HV polarity is correct for the pump positive polarity for Diode pumps and negative for StarCell or Triode pumps Refer to the relevant pump control unit instruction manual and follow the procedure below when operating the pump 1 With a clean roughing pump establish a minimum starting pressure in the vacuum system per the table on page 9 for the type of ion pump Plug the control unit into a suitable power source and switch the power ON Observe the voltage current and roughing pressure If started at
12. be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Vaclon Plus 20 pumps User Manual 87 900 106 01 E 47 90 4 Installation procedure Disposal 48 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Vaclon Plus 20 pumps User Manual ee 5 Technical Information Description of the Vaclon Pump 51 Technical Specification 53 Vaclon Plus 20 Starcell 55 Vaclon Plus 20 Noble Diode 57 Vaclon Plus 20 Diode 59 Outline Drawing 60 Stray Magnetic Field 61 Vaclon Plus Pump Installation 63 Inspection Procedure 63 RES Agilent Technologies Visual Inspection 63 Vacuum Evaluation 64 Short Circuits 65 Typical Installation 66 Inlet Flange Connection 68 Control Unit Connection 71 Safety Interlock 72 Heater Installation 72 Heater Replacement 74 Original Instructions 5 Technical Information 50 90 Bakeout Operation 74 Bakeout of Vaclon Pump with the Integral Heaters 75 Operating Procedure 76 Maintenance 77 Exchange of the High Voltage Feedthrough 78 Leakage Current Check 79 High potting 80 Pump Troubleshooting 81 Vaclon Plus Pump Replacement Parts and Accessories 82 Vaclon Plus Pump Controllers 83 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Informati
13. customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 FI Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxahle 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A Non Billable _ Billable mmm New PO hard copy must be submitted with this form 3B L Exchange Repair lupgrade Consignment Demo Calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the fallowing information must also be filled out Check boxes for all materials to which product s pumped or was exposed L Toxic Gorrosive
14. high voltage output to a lower applied voltage T When venting the pump use dry nitrogen This will avoid water 46 90 vapor absorption on the pump walls WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases WARNING When the heating element is installed do not touch the pump during the heating and cooling phases The high temperature may cause a serious damage Do not put any electronic device near the pump otherwise the magnetic field around it may cause a device malfunctioning Vaclon Plus 20 pumps User Manual 87 900 106 01 E Installation procedure 4 Maintenance Disposal The Vaclon Plus series pump does not require any maintenance Any work performed on the pump must be carried out by authorized personnel Before carrying out any work on the pump disconnect it from the High Voltage supply If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must
15. minimum starting pressure as stated by the technical specification 10 mbar or less is recommended To reach this pressure the use of an oil free turbo molecular roughing pump is recommended When starting an ion pump a slight increase in vacuum pressure is normal as the internal components are heated and outgassed If possible leave the roughing pump connected to the system while starting the ion pump This will make the startup faster and easier Connect the control unit to a suitable power source and switch the power on Switch on high voltage to the pump and observe the current and voltage Fastest starting is obtained using a high applied voltage 7 kilovolts for example The applied voltage may be reduced later to optimize pumping and achieve the lowest vacuum pressure If started at 10 mbar the voltage will start at approximately 800 volts and increase to full voltage as the pump starts operating The current will start at several milliamps and slowly decrease to microamps or nanoamps as low vacuum pressure is achieved When first starting the pump if the voltage de creases instead of increasing reduce the vacuum pressure then start the ion pump again When the pump reaches its full operating volt age you may close the roughing valve If the pump does not start after 30 minutes of pumping see the section PUMP TROUBLE SHOOTING Once the pump reaches its base pressure with stable voltage and current the ion pump m
16. 0 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 O Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 106 01 E Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino I
17. 5 and 16 Figure 13 Vaclon Plus pump axis identification B Gauss 20 0 20 Distance mm Figure 14 Stray magnetic field along X axis Vaclon Plus 20 pumps User Manual 87 900 106 01 E 61 90 5 Technical Information Er a 20 0 20 O o gt O m Distance mm Figure 15 Stray magnetic field along Y axis X COMP B Gauss CO 0 20 40 60 80 100 120 140 160 Distance mm Figure 16 Stray magnetic field along Z axis 62 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Vaclon Plus Pump Installation Inspection Procedure Vaclon Plus pumps are evacuated baked out sealed and leak checked at below 1x10 mbar prior shipping The following information and procedures can be used to optimize the vacuum integrity of a VacIon Plus pump before installation Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment Inspect the pinch off seal If it is open the pump is at atmospheric pressure WARNING The pinch off seal is extremely sharp Be careful A Vaclon Plus pump that has been exposed to atmosphere during shipment or while in storage will operate properly if it has not been damaged The pump is not harmed by such exposure alth
18. Vaclon Plus 20 pumps User Manual e e e o e ee e 00 4 09 Installation Procedure e e e I General Information 40 a Preparation for Installation 41 Installation 43 Use 44 Operating Procedure 45 Maintenance 47 Disposal 47 Original Instructions for more into CLICK HERE deal lt vacuum products www idealvac com UA Agilent Technologies 39 90 4 Installation procedure General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Vaclon Plus series pumps are ion pumps commonly used to create ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or
19. ay be baked at high temperature if required per the section titled BAKEOUT OPERATION To stop the ion pump simply switch off the high voltage The pump surfaces will continue to pump for a few minutes depending on the system pressure Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 11 When venting the pump use clean dry nitrogen This will avoid water absorption on the pump surfaces and make subsequent pump downs easier Maintenance WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely VacIon Plus pumps are maintenance free In case of life time expiry or premature failure of the pump please contact your nearest Agilent sales service office for repair The Vaclon Plus 20 pumps are designed with exchangeable high voltage feedthrough and pump elements Vaclon Plus 20 pumps User Manual 87 900 106 01 E 11 90 5 Technical Information Exchange of the High Voltage Feedthrough
20. control unit and wait for cur rent stabilization The current reading should not be higher than 50 nA Make sure that the control unit and the high voltage cable leakage current is negligible 4 If leakage current comes from the pump per form high potting per the following procedure then recheck the pump and install the magnet 5 If itis not possible to high pot the pump the pressure reading is biased by the leakage current value Vaclon Plus 20 pumps User Manual 87 900 106 01 E 79 90 5 Technical Information High potting A constant pump current when no vacuum leak exists is often caused by field emission currents which prevent the use of the pump current as a UHV pressure indicator To reduce this field emission current high potting should be performed High potting is the term used to describe the application of higher than normal operating voltage 8 kV AC max 50 mA for the purpose of burning off whiskers sharp edges on the pump cathode High potting should be done under vacuum and preferably without pump magnets installed to reduce the drawn current High potting must be done carefully and in voltage steps since uncontrolled arcing inside the pump can cause permanent damage Therefore slowly increase the applied voltage and watch the current meter for indication of arcing inside the pump as whiskers are burned away If arcing occurs wait at this voltage until the current is stable again Then slowly increa
21. d to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation to obtain the specified operation the ambient temperature must be between 0 C and 85 C The pump should be kept sealed with its pinch off tubulation until it is ready for attachment to the vacuum system To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off The pump operation is optimized using one of the special Agilent controllers Dual MidiVac or MiniVac only Vaclon Plus 20 pumps User Manual 87 900 106 01 E 43 90 4 Installation procedure CAUTION The safety specifications agreement using the pump is guaranteed using the Use 44 90 Agilent controller only The Vaclon Plus pump can be installed in any position For convenience a pump is usually mounted vertically with the inlet up Pumps can be supported by the mounting flange in any position For detailed information about the pump installation see the appendix Technical Information All the instructions for the correct use of the VacIon Plus pumps are contained in the control unit manual Read the manual carefully before using the pump Rough pumping down to 1x10 Torr mbar is recommended for the most rapid starting Roughing with
22. e cathode is held at negative potential The inlet ConFlat flange is a 8 NW 150 Vaclon Plus 20 pumps User Manual 87 900 106 01 E 51 90 5 Technical Information Fig 2 shows the Vaclon Plus 20 pump Fig 3 shows the main assemblies of the pump Figure 2 Vaclon Plus 20 pump MAGNET UMP BODY Figure 3 Pump main assemblies 52 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E HIGH VO WU FEEDTHROUGH TAGE A Technical Information 5 Technical Specification The following table details the main technical specifications of the Vaclon Plus 20 pumps Tab 1 Model Specification StarCell Noble Diode Diode Nominal pumping speed for Nitrogen 20 22 2 CM Operating life at 1x10 6 mbar hours 80 000 50 000 50 000 Operating voltage max 000 Vdc 7000 Vdc 10 10 96 Max starting current Om 80 Max baking current 10 mA Protect current 20 mA Maximum starting pressure mbar lt 5x10 2 lt 1x10 3 Ultimate pressure Below 10 11 mbar ma a 0000000000000 2 3 4 CFF NW 35 AISI 304 ESR ST Internal volume litres 0 9 Maximum baking temperature C 350 Temperature limits C Pump 400 Magnet ferrite 350 Flange 500 Mat
23. emp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clagging ee OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High valtage prablem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum ver temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 b
24. eria Body O 1 n 1 AISI 304 SST BS Cathode Titanium Titanium Titanium Tantalum WAE 21555 NNNM Magnet Ferrite or Sm Co Weight lbs kg with ferrite magnet 1 11 with Sm Co magnet 5 8 Tested according to ISO DIS 3556 1 1992 Vaclon Plus 20 pumps User Manual 87 900 106 01 E 53 90 5 Technical Information 54 90 Figures 4 to 11 show the pumping speed vs pressure diagrams for saturated and unsaturated pumps and the pressure vs current diagrams for the same pump The diagrams are for pumps con trolled by means of a Dual controller The pumping speed of a newly regenerated 1 e baked sputter ion pump decreases during operation until it reaches a stabilized level known as saturation nominal pumping speed To saturate the Vaclon Plus 20 pumps it normally requires an amount of gas equal to 0 6 mbar liters Consequently pumps can operate for extended periods of time at low pressures in the non saturated state if they are properly conditioned Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Vaclon Plus 20 Starcell LI o a m m A 0 O z Fa n N z 107 1077 PRESSURE mbar Figure 4 Pumping speed vs pressure for Nitrogen Ar PUMPING SPEED L SEC
25. f this occurs turn the power OFF immediately 5 Ifthe vacuum integrity has been lost the pump should be leak checked with a mass spectrometer leak detector before installation on the system Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Short Circuits If there is a short circuit between the anode and cathodes in the pump or cathode to pump body the short circuit current of the control unit will be drawn and low voltage will be indicated If a short circuit exists in the control unit or high voltage cable and connector low voltage will also be observed when the high voltage connector is disconnected from the pump refer to the control unit manuals An ohm meter reading on the pump feedthrough may not be effective in finding a short Short circuits may be caused by mechanical shock to the pump If the pump is shorted contact Agilent Vaclon Plus 20 pumps User Manual 87 900 106 01 E 65 90 5 Technical Information Typical Installation A typical installation is shown in figure 17 and consists of 1 Vaclon Plus pump 2 A Valve to seal off the pump from the rest of the system if required 3 The control unit 4 A clean roughing pump i e turbo or sorption 5 Athermocouple gauge capable of indicating pressure from atmosphere to 10 mbar range 6 A valve to seal off the roughing pump from the vacuum chamber Roughing lines are usually made of stainless steel or copper tubing
26. ical Information 5 Control Unit Connection WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off Make sure that the pump is well connected to the grounded vacuum system Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve travel is required from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit Vaclon Plus 20 pumps User Manual 87 900 106 01 E 11 90 5 Technical Information Safety Interlock The Vaclon Plus pump feedthrough in conjunction with the cable P N 929 0705 0707 0708 and 0709 when used with the Agilent MidiVac DUAL and 4UHV control units allows the operation of the High Voltage
27. lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc GE Agilent Technologies m e 06 de cet E e e e Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization R number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other li
28. on 5 Description of the Vaclon Pump The Agilent Vaclon Plus 20 pumps are ion pumps and are available in three types StarCell Noble Diode Diode They operate in the pressure range from 10 to below 10 mbar Virtually all gases and vapors can be pumped successfully with the ion pump The pumping speed will vary depending on the system pressure the gas type and the applied operating voltage The latter can be optimized using Agilent controllers to achieve the lowest possible operating pressure The Vaclon Plus StarCell pump allows starting from as high as 5x10 mbar because ions are prevented from bombarding the system and pump walls at starting pressures and have high speed for inert gases The Vaclon Plus Diode and Noble Diode pumps require a lower starting pressure i e 10 mbar The tantalum in the Noble Diode pump enhances the noble gas pumping capacity although it somewhat reduces the high getterable gas pumping speed that the standard diode pump provides The Vaclon Plus StarCell is the latest variation of the Triode configuration Its patented design makes this ion pump the only one that can handle a high amount of Noble Gases better than Noble Diode and Triode and Hydrogen comparable to the Diode A positive polarity high voltage supply is required to operate Diode and Noble Diode pumps negative polarity high voltage supply is required to operate StarCell pumps since the anode is grounded and th
29. or other low vapor pressure material 7 High voltage cable 8 Backing pump diaphragm or scroll 66 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 lA ar vv a Y 3 CNN hermocouple VC V Q Valve 2 Gauge vive Q SM MD si J opti optional Sin 2 va NZ Turbo v N Roughing Pump Diaphragm Vacuum Pump Chamber aw sm n va w Vacuum p ump Dm O2UM O E Bes don I Controller igh Vacuum E NA Gauge Figure 17 Typical installation Vaclon Plus 20 pumps User Manual 87 900 106 01 E 67 90 5 Technical Information Inlet Flange Connection 68 90 The pump should be mounted allowing a sufficient clearance for installation and removal of the high voltage connector The pump should be kept sealed with its pinch off tubulation until it is ready for attachment to the vacuum system This avoids accumulation of dust and other undesirable materials Before breaking the pinch off seal consult the inspection procedure see preceding paragraph Vent the ion pump by opening the pinch off tubulation in a clean area free from smog dust pollen etc Venting with dry nitrogen ga
30. ough it is good practice to keep it under vacuum when not in use to exclude dust and the accumulation of water vapor from the environment Vaclon Plus 20 pumps User Manual 87 900 106 01 E 63 90 5 Technical Information Vacuum Evaluation The ion pump is shipped in an evacuated condition Before removing the shipping flange for installation on a vacuum system it is recommended that the pump be started briefly to verify vacuum integrity and proper operation To verify the vacuum integrity of the new pump before venting 1 Connect the pump to the control unit as directed in the instruction manual of the control unit WARNING The high voltage which is present in the ion pump from the control unit can 64 90 cause severe injury or death Be sure that the high voltage cable is proper connected to the ion pump and its power unit Make sure that the pump is well grounded 2 With the main power switch in the OFF position plug the control unit into a suitable power source Turn the power to ON Observe the reading for an indication of one of the following conditions a Ifthe pump is free of leaks and is at a low pressure the pressure indication shall within 10 minutes fall to or below the 10 mbar range as the volume of gas is pumped b Ifthe pressure inside the pump is at or near atmospheric level an arc may strike inside the high voltage feedthrough giving a popping sound and the pump current will fluctuate I
31. practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 40 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Installation procedure 4 Preparation for Installation The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 6 recyclable and complies with EEC Directive 85 399 CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust Vaclon Plus 20 pumps User Manual 87 900 106 01 E 41 90 4 Installation procedure Preparation for Installation Figure 1 42 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Installation procedure 4 Installation Do not install or use the pump in an environment expose
32. quids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or cantainers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the R was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt
33. s is further recommended This can be done by placing a clean polyethylene bag over the ion pump flange Small pumps can be placed inside of the bag Purge the bag with clean dry nitrogen for several minutes then reach into the bag and release the internal vacuum using pliers to open the copper tube pinch off Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushing air as the pump is opened The pinch off seal is extremely sharp Be careful when opening Watch your fingers Use appropriate procedures to maintain the clean condition of the pump and vacuum system Unscrew the main flange bolts and lift the blank flange with the help of a bolt screwed into the available threaded hole Remove the ConFlat flange and the copper gasket plate Some particles of copper oxide may adhere to the outer edge of the flange gasket Be careful not to allow them or any other foreign materials to fall into the pump Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Connect the ion pump to the vacuum chamber with a short length and large diameter tubulation in or der to retain as much pumping speed as possible Proceed as follows 1 Inspect the mating flanges for cleanliness and absence of scratches on the knife edge 2 Place a new copper gasket between pump flange and vacuum chamber flange 3 Bolt mating flanges of the pump to the chamber
34. s or when UHV pressure 10 mbar or less is desired As the pump and system cool down to room temperature a drop in pressure should be observed Note that the ion pump can be also baked when switched off into an external turbo pump through a bakeable isolation valve Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Bakeout of Vaclon Pump with the Integral Heaters 1 The integral heaters are to be powered with the appropriate voltage Please refer to the inscription on the heaters to apply correct voltage 2 The integral heaters are designed to provide a temperature of 250 C to 300 C when the pump is wrapped in a 3 fold aluminium foil A three layer foil wrapping is advisable and sufficient to achieve full bakeout regeneration if the standard European heaters 230 Vac are operated at 240 Vac thus preventing overheating 3 Bakeout the VacIon pump for 24 hours If the pump is used in heavy gas load applications it is recommended to bakeout the pump for a longer period 4 Waituntil the pump cools down to room temperature and recovers its base pressure before using it in the application WARNING Do not touch the pump during the heating and cooling phases The high temperature may cause serious damage Vaclon Plus 20 pumps User Manual 87 900 106 01 E 15 90 5 Technical Information Operating Procedure 76 90 1 10 Using a clean roughing pump evacuate the system to a
35. se voltage again in steps up to a maximum voltage The maximum voltage may be applied to the pump for a period of about 15 seconds This should effectively remove any whiskers or sharp edges on the pump cathode WARNING Voltages developed in the High Potter power supply are potentially lethal Use caution during operation and ensure correct grounding connection 80 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Technical Information 5 Pump Iroubleshooting Tab 2 Symptom 1 Slow starting 2 Slow starting more than 30 minutes 3 Slow pump down due to long exposure of viton parts to air 4 Slow pump down due to absorption of vapours on pump and system walls 5 Slow starting or slow pump 6 Current higher than expected at any given pressure Possible cause Starting vacuum pressure too high Air leaks which limit pressure to above 10 6 mbar and cause longer starting time Viton releases considerable gas after long exposure to air A bell jar system which reached 2 x 108 mbar in 24 hours after 30 minutes air exposure will only reach 1 x 107 mbar in 24 hours after 20 hours air exposure Vapours and gases admitted to a system are absorbed on the walls of the system and pump Subsequent reduction in pressure depends on the rate of depletion of this vapour Heavy hydrocarbons are most troublesome because of their relative low vapour pressure
36. taly Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
37. tisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely J Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F
38. usiness days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421
39. with the screws provided with the ion pump For flanges over NW 35 2 75 o d also mount washers below the nuts and screw heads 4 Use silver plated screws or apply high temperature lubricant to the screw threads Lubrication simplifies sealing and disassembly recommended lubricant is Fel Pro C 100 Lubrication is essential to prevent galling of the nut and screw after bakeout 5 Attach the nuts and tighten each one to 6 11 Nm 4 5 8 ft Ibs of torque After tightening a nut always tighten the opposite nut with respect to the center of the flange This will partially close the gap between the flange faces 6 Repeat the sequential tightening for two more cycles 1 Continue tightening the bolts until the flange faces meet and a pronounced increase in torque is felt Note that it s not possible to install the screws from the lower side but only from the upper side of the flange To allow complete flexibility in the installation a stud mounting kit is available see Fig 18 For ordering information refer to the VacIon Plus Pump Replacement Parts and Accessories paragraph Vaclon Plus 20 pumps User Manual 87 900 106 01 E 69 90 5 Technical Information WASHER NUT VACION Figure 18 Stud mounting kit 10 90 Vaclon Plus 20 pumps User Manual 87 900 106 01 E Techn
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