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Current Version - Extorr Residual Gas Analyzers

1. 4 Degas Current 0 mA I should be about 2 4 mA TATE me Groundvet 02 0017314 vots p Oto 200 4 165151 vots Focust FB Focust Piani Com 1 to 1 0 ie Pirani Press 3 to 25 FB 2 25to25 FB 2251025 Le 2 Repeller 119V amp should be about 68V Ready iv acuum Plus 1010 Eile Edt view Help 0 D H eea out MEn Total Pressure 4 994x10 torr Pirani Pressure 1 00 10 torr l Partial Pressure Sensitivity k 1 is somewhat lower than in Normal Operation Ready Nm 4 Figure 81 Outputs Tab and Mass Scan Graph Filaments Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 26 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 2 8 Filaments Shorted to Source 1 o loj x 18 x vacuum Plus 1010 WR Eile Edit view Window Control Help ORO Zs E S 1 Total Pressure is Negative because Filament is OFF Log ces Degas Current 17 mA Operating parameters k2 4 Sears should be about 2 4 mA _ ene es Pees Filament Voltage 2V 20 Degas current oe Te Fierent okani on vots e 3 3 should be about 1 6V Electronics Temperature 324 C Filament Resistance 7 02 Ohm ie A ee mn A ia genera ilament Resistance 7 Power supply 24 11 vots Sensor Temperature 36 9 C 4 should be about 0 50 5 Source 1 Current gt 6 mA 5 eee EAO ma
2. Category General Number Currency Accounting Date Time Percentage Fraction Scientific Text Special Custom Sample General format cells have no specific number format Figure 169 Record Data for Trend Mode in Excel Format Cells Window Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 155 Extorr Inc www extorr com Click on Custom in the Category list Many custom formatting options are displayed and the General option is highlighted in the list and shown in the Type Box Figure 170 Record Data for Trend Mode in Excel Format Cells Custom Category Selected Click in the Type box and delete General and then enter yyyy mm dd hh mm ss 000 into the box Figure 171 Record Data for Trend Mode in Excel Format Cells Custom Type Entered Format Cells Number Alignment Category General Number Currency Accounting Date Time Percentage Fraction Scientific Text ana Tr Font Border i Protection Sample rcNormalPosition bottom 715 Type General 0 0 00 20 0 00 20_ 0 0_ Red 0 20 00_ 0 00 0 00_ Red 0 00 0_ S 0 0_ Red 0 General Type the number format code using one of the existing codes as a starting point Format Cells Category Number Alignment General Number
3. Probe lonizer Partially Inside Vacuum Chamber Avoid Mounting Probe with spacer Rings in Connection Between Flanges Figure 90 Probe Mounted with Spacer Rings inside Connection between Flanges Extorr Inc 307 Columbia Road New Kensington PA 15068 100 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 5 Finding Electrical Short Circuits Caused by Damage to the Probe Short circuits may occur if the probe is damaged during installation The ionizer elements or the connecting wires may bend if they touch the sides of the chamber the opposite wall of the chamber or another obstruction inside the vacuum system If you think you may have damaged the probe first check for short circuits as described in Section 4 3 of the User s Manual If a short is found remove the probe from your chamber and inspect the Ionizer and the connecting wires See the drawings that follow lonizer Outside Edge Parallel to Quadrupole gt 4 Frame Outside Edge p Repeller Source 2 Assy small Gap between Repeller amp Source 1 Gap Between Ny Source 1 amp Focus 1 gt lt Source 1 N lonizer Spacer Rings Focus 1 Connecting Wires Parallel to Frame VA and Not Shorting to Frame or to Each Other Quadrupole Frame gt 4 Probe lonizer without Damage or Short Circuits Figure 91 Ionizer without Damage Use an Ohm
4. 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 28 791 2015 09 11 09 17 28 999 2015 09 11 09 17 29 208 2015 09 11 09 17 29 416 2015 09 11 09 17 29 624 2015 09 11 09 17 29 833 Chart Title 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 1 51E 08 1 50E 08 1 50E 08 1 50E 08 1 50E 08 1 50E 08 RgaTrendDatal AVERAGE 7 000000007 COUNT 200 SUM 1400 000001 Figure 188 Record Data in Excel with Time Intensity Chart www extorr com Drag the chart to the right and resize it if necessary so that the values in column C are visible RgaTrendDatal xlsx Excel CHARTTOOLS 7 fA A x HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack A B fx E 2015 09 11 09 17 24 075 2015 09 11 09 17 24 283 2015 09 11 09 17 24 492 2015 09 11 09 17 24 700 2015 09 11 09 17 24 908 2015 09 11 09 17 25 117 2015 09 11 09 17 25 325 2015 09 11 09 17 25 533 2015 09 11 09 17 25 742 2015 09 11 09 17 25 950 2015 09 11 09 17 26 158 2015 09 11 09 17 26 367 2015 09 11 09 17 26 575 2015 09 11 09 17 26 783 2015 09 11 09 17 27 124 2015 09 11 09 17 27 333 2015 09 11 09 17 27 541 2015 09 11 09 17 27 749 2015 09 11 09 17 27 958 2015 09 11 09 17 28 166 2015 09 11 09 17 28 374 2015 09 11 09 17 28 583 2015 09 11 09 17 28 791 2015 09 11 09 17 28 999 2015 09 11 09 17 29 208 2015 09 11 09 17 29 416 201
5. Figure 51 Graph Zoomed to Small or Blank Area The Graph may be returned to the normal display by right clicking in the graph area and selecting Undo Zoom from the Customization Menu Vacuum Plus 404 BF File Edit View Wii Controh Help 1 Ce 28 4 cB R BF el Li total pressure 2 94910 8 torr Pirani Pressure 1 00x10 torr ge Start Degas Start Recording Customization Dialog Export Dialog Help Figure 52 Right Click in Graph Area for Customization Menu Extorr Inc 307 Columbia Road New Kensington PA 15068 50 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The Graph Window returns to the normal display x Vacuum Plus 404 www extorr com BF File Edit View Window Control Help org D k EE a Total Pressure 3 176x10 torr Pirani Pressure 1 00x104 torr 4 Start Degas Start Recording n n S Mass Sweep 2 50e 8 Figure 53 Graph after Undo Zoom The Customization Menu also allows the user to modify the properties of the Graph Window such as the grid lines the graph fonts and the graph colors Some of these properties may also be changed on the Plot tab see section 6 11 above 6 19 4 Mass Sweep or Mass Table Customization Menu Left double clicking in the graph area displays the Mass Sweep of Mass Table Customization Menu Mass Sweep Customization General Piot Subsets Points Axis Font Color
6. cccssssssssscsssssssssssssssssssssssssssssssssssesoeees OO Appendix E Troubleshooting and Service cccccccccccsssssssssssssssssssssssssssssssssssceeee Hols PP OUDICSMOOUME aens e E A 70 Ball Switch toa Known Good Coniiouratiom Pile ssesicno re neue a O E malddaaess 70 Bl Conneure VacuumFl s Tor Troubleshoot rsisi ones O cla eaciohey atl edamats 70 Bel Set Parameters To Troubles hootin csi a a a E O maleate sade dohn ag ledanats 74 E LA Examine Output Tab Parameter Valles ereere e tei A a dee ce ee 76 Bul Creatine Screen Captures ene e E e 78 E21 Normal Operations e e ea a a E A E aA 80 E22 Filaments Open Bume d Out recse ee a a E A Ee a 81 E 2 3 Source 1 Shorted to Vacuum Chamber Ground tanenin a a E A E 82 E 24 Source 2 Shorted to Vacuum Chamber Ground aceiren inian a i e Wea a a a 83 E25 Focus 1 Shorted to Vacuum Chamber Ground oneee ienie ina a a a a n N 84 E 2 6 Repeller Shorted to Vacuum Chamber Ground seisi araa a a a E 85 E 2 7 Filaments Shorted to Vacuum Chamber Ground 0 cc cece ccceccceecccsccceeccececccenscceesseecsseecssesessesessueseeeuss 86 EZS Filaments Shoned to Soure hooraa a EEE E EAT N TAA ANS 87 Bed Repeller SHORE Source lniane E E A E E tld eineneabees 88 E210 Repeller Source 14nd Focus L Shorted Togothel esrin eruo aren ranea AAE E O aN DEAE 89 BZ lc OCUS US NOMmed to SOULCEL jecii nsssvebnoaduatswasaperbsacesaasachoues aA eas EO REE OEE 90 E 3 Outputs Tab Parameter Def
7. RgaTrendDatal xlsx Excel 7 BH O x HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack v D i 7 a n a D a l yoan ia BI E aeae Tables Illustrations Apps Recommended E p PivotChart Map Sparklines Filters Links Text Symbols X 7 Charts D l gt g z i 7 z X Charts Tf Tours 2015 09 11 09 17 24 283 1 49E 08 See All Charts 2015 09 11 09 17 24 492 1 50E 08 2015 09 11 09 17 24 700 1 50E 08 2015 09 11 09 17 24 908 1 49E 08 2015 09 11 09 17 25 117 1 49E 08 2015 09 11 09 17 25 325 1 49E 08 2015 09 11 09 17 25 533 g 1 48E 08 2015 09 11 09 17 25 742 1 49E 08 2015 09 11 09 17 25 950 1 48E 08 2015 09 11 09 17 26 158 1 49E 08 2015 09 11 09 17 26 367 1 49E 08 2015 09 11 09 17 26 575 1 49E 08 2015 09 11 09 17 26 783 1 49E 08 2015 09 11 09 17 27 124 1 47E 08 2015 09 11 09 17 27 333 1 49E 08 2015 09 11 09 17 27 541 1 48E 08 2015 09 11 09 17 27 749 1 49E 08 2015 09 11 09 17 27 958 1 51E 08 2015 09 11 09 17 28 166 1 50E 08 2015 09 11 09 17 28 374 1 50E 08 2015 09 11 09 17 28 583 1 52E 08 2015 09 11 09 17 28 791 1 51E 08 2015 09 11 09 17 28 999 1 50E 08 2015 09 11 09 17 29 208 1 50E 08 2015 09 11 09 17 29 416 1 50E 08 2015 09 11 09 17 29 624 1 50E 08 2015 09 11 09 17 29 833 1 50E 08 RgaTrendDatal AVERAGE 7 000000007 COUNT 200 SUM 1400 000001 Figure 186 Record Data in Excel showing Insert Ribbon Click on the All Charts tab and select the Line
8. Vacuum Plus 404 File Edit View Window Control Help vG Ose 282 46 CF BT ACHE ro E Total Pressure 4 384x10 8 torr a Graph Zero Slider Moved Toward Bottom of Window Figure 34 Mass Sweep Graph Zero Slider The Graph Width Slider controls the portion of a complete sweep that is displayed in the graph window Moving the slider all the way to the left side of the window will display the entire mass sweep This is the default position of the Width Slider Vacuum Plus 404 IF File Edit View Window Control Help Graph Width Slider At Left Side of Window Figure 35 Mass Sweep Graph Width Slider at Left Side Extorr Inc 307 Columbia Road New Kensington PA 15068 41 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Moving the Width Slider toward the right side of the window produces a display that shows only a part of the mass sweep and the Graph Position Scroll Bar appears above the Width Slider IF File Edit View Window Control Hel v 0e i 82 46 cF BT RCH we I toseesse aimeo Pron presare rooms Qf soo Sarena Graph Graph Position Width Slider Scroll Bar Moved Toward Right Side of Window Figure 36 Mass Sweep Graph Width Slider and Position Scroll Bar These two controls allow the user to display a narrow mass range in the graph window at any point along the entire mass sweep Graph Position Scroll Bar Moved T
9. button selects the continuous Mass Sweep mode The sweep starts at about half an amu below the Low Mass setting and stops about half an amu above the High Mass setting and will repeat continuously The 1 Scan button selects the Single Mass Sweep mode A single sweep starts about half an amu below the Low Mass setting and continues to about half an amu above the High Mass setting The RGA then enters the Stop mode The RGA will remain in the Stop mode until another single sweep is started by clicking the 1 Scan button again or the continuous sweep mode is selected by clicking on the GO button Clicking on the STOP button aborts the current scan The RGA will remain in the Stop mode until another single sweep is started by clicking the 1 Scan button or the continuous sweep mode is selected by clicking on the GO button in the main VacuumPlus window control Sweep The factory setting has the system scanning rapidly from mass one to the maximum mass for the unit 100 200 or 300 amu If the user is looking at the residual gases during pump down he may wish to concentrate on only the first 50 amu Do this by setting the low mass to and the high mass to 50 Since there is always a speed and signal to noise tradeoff the user may wish to reduce the noise by decreasing the Scan speed value Extorr Inc 307 Columbia Road New Kensington PA 15068 20 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support
10. k Sens j kr Relative mbar f Sensitivity Figure 60 Ion Gauge Relative Sensitivities Here we divide the nitrogen reading by the relative sensitivities above to get the pressure of that pure gas A gas mixture will give some intermediate result B 3 Determination of Partial Pressures Of all the vacuum measurements the partial pressure measurements are the most difficult because they depend on so many different things As in the ion gauge the residual gas molecules are electron impact ionized Unlike the ion gauge which just measures total ion current the quadrupole separates all the ions produced into their mass to charge ratios and measures the current from each of the ions produced These ions may be molecular fragments or from a mixture of molecules So not only is the ionization cross section important so is the cracking pattern of each molecule We can then add to this the mass to charge discrimination inherent to any mass spectrometer system When used the response of an electron multiplier to differing ions must also be taken into account Extorr Inc 307 Columbia Road New Kensington PA 15068 61 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The system may be calibrated to take most of these factors into account For most purposes an extremely accurate partial pressure measurement is not required If we know the cracking pattern of the molecule at a give
11. should be about 20V Pirani Cor 1 to 1 0 x8 sa ent Powe Pirani Press 3 to 25 0 volts Filament DAC Coarse 2 FB 2 25 to 25 E 398065 volts Filament DAC Fine B 2251025 2396855 vots C 1010 S WB Fie Edit View Window Control Help fe Q a s SOE SLE rE Total Pressure 1 435x10 8 torr Pirani Pressure 1 00x10 4 torr No Mass Spectrum k1 shown on Mass Sweep Graph t 4 lt ij z Ready CO y Figure 85 Outputs Tab and Mass Scan Graph Focus 1 Shorted to Source 1 Extorr Inc 307 Columbia Road New Kensington PA 15068 90 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 3 Outputs Tab Parameter Definitions The Outputs tab displays 21 different parameters from various sections of the CCU box These readings are provided to aid in the troubleshooting of your RGA system Section E 2 contains actual Screen Captures of the Outputs Tab readings and Mass Sweep Graph Captures during normal operation and with common problems are included NOTE The Reference and Ground Ref parameters must be checked before any of the other readings are considered These two parameters test the accuracy of the system Analog to Digital converter and must be correct or ALL the other readings on the Outputs tab will be wrong E 3 1 Reference The Reference reading shows the result of the CCU s internal Analog to Digital Converte
12. 0 002129 v should be about 0 59 reve 0207 11 851137 volts Facust FB Focus 13 61 k5 Source 1 Current 0 mA Pirani Temp 1ta 1 0 0 139454 volts Repeller 2 0 Elec_En 1 voks should be about 1 0 mA Pirani Corr 1 to 1 0 volts Filament Power fe j k6 Source 2 Current 0 mA Piani Press 3to 25 0319917 vots Filament DAC Coarse 3005 should be about 1 0 mA FB 225t025 2 410443 volts Filament DAC Fine 2047 k7 Filament Power 5 because Filament is OPEN Filament Switch Turns OFF Automatically after k several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum shown on Mass Sweep Graph 81 Extorr Inc www extorr com E 2 3 Source 1 Shorted to Vacuum Chamber Ground EE Plus 1010 iolx Eile ee View Window Help ie 18 x Filament Switch Turns i OFF Automatically after ood eee k 4 several Mass Sweeps Light Bulb Icon shows Mass Table Plot Printing bog a Filament Problem Snead en a Degas Current 0 mA ameter Calibration parameter Diagnostics Qutputs i Sera karan i 2 should be about 2 4 mA k2 Degas current D ma Filament Voltage ees l 3 Filament Voltage 0 10V Electronics Temperature 27 5 C Filament Resistance 3 Ohm Ie 4 9 should be about 1 6V Power supply 7 volts Sensor Temperature 32 2 k Filament Resistance 0 33 Q because Filament is OFF k5 Sourcel curent 0 000022 m Referenc
13. Electron Energy between 3 to 6 volts usually gives the best sensitivity without peak shape distortion Also note that higher masses have less speed than do lower masses at the same energy The focus voltage which may be controlled under the Operating Parameters tab controls how the ions are extracted from the ionization region Any particular tune setting may be optimized by a change in this voltage As 1onizers age by contamination sensitivity may be increased by an increase in magnitude of this negative voltage Mass calibration is controlled under the Calibration Parameters tab It is controlled by extrapolation and interpolation from the High Cal Mass and Low Cal Mass set points These are the parameters which control the exact position of the mass peak on the mass scale As resolution is increased peak width decreased the mass peak will change width more on the low mass side than the high mass side The peak maximum will therefore have been shifted The High Cal Mass and Low Cal Mass set points may be adjusted to place the peak top back at the proper mass position Mass peak resolution is also controlled under the Calibration Parameters tab It is controlled by extrapolation and interpolation from the High Cal Resolution and Low Cal Resolution set points These are the parameters which control the width of the mass peak As resolution is increased the peak widths are decreased Decreasing the resolution allows more ions through the quad
14. HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack a f B E 2015 09 16 12 08 06 202 2015 09 16 12 08 06 323 2015 09 16 12 08 06 445 2015 09 16 12 08 06 566 2015 09 16 12 08 06 688 2015 09 16 12 08 06 809 2015 09 16 12 08 06 931 2015 09 16 12 08 07 052 2015 09 16 12 08 07 174 2015 09 16 12 08 07 295 2015 09 16 12 08 07 417 2015 09 16 12 08 07 538 2015 09 16 12 08 07 660 2015 09 16 12 08 07 781 2015 09 16 12 08 07 9031 2015 09 16 12 06 55 125 2015 09 16 12 06 55 247 2015 09 16 12 06 55 368 2015 09 16 12 06 55 490 2015 09 16 12 06 55 611 2015 09 16 12 06 55 733 2015 09 16 12 06 55 854 2015 09 16 12 06 55 976 2015 09 16 12 06 56 097 2015 09 16 12 06 56 219 2015 09 16 12 06 56 341 2015 09 16 12 06 56 462 2015 09 16 12 06 56 584 gt alalelalalalaslalalalalalelalala BREREREREREERERS 14 1 53E 09 1 48E 09 1 52E 09 1 60E 09 1 52E 09 1 56E 09 1 68E 09 1 59E 09 1 55E 09 1 51E 09 1 55E 09 1 58E 09 1 51E 09 1 54E 09 1 51E 09 8 2 20E 08 2 24E 08 2 24E 08 2 22E 08 2 22E 08 2 21E 08 2 22E 08 2 22E 08 2 22E 08 2 22E 08 2 21E 08 2 20E 08 2 21E 08 1 60E 07 1 40E 07 1 20E 07 1 00E 07 8 00E 08 6 00E 08 4 00E 08 2 00E 08 0 00E 00 Chart Title 4g dseddddseddddssdgdgsscagdgssdgdgasadggasagggas MassSpecData 00404 20150916 120 ES O H c Figure 222 Record Data in Excel with Chart
15. lt ConfigurationData gt 2015 09 11 09 17 06 158 2015 09 11 09 17 06 193 2015 09 11 09 17 06 228 2015 09 11 09 17 06 262 2015 09 11 09 17 06 297 2015 09 11 09 17 06 332 2015 09 11 09 17 06 367 14 2015 09 11 09 17 06 401 18 2015 09 11 09 17 06 436 28 2 72E 07 2015 09 11 09 17 06 471 32 5 77E 08 2015 09 11 09 17 06 505 44 4 96E 10 2015 09 11 09 17 06 540 5 49E 07 2015 09 11 09 17 06 575 14 1 51E 08 2015 09 11 09 17 06 610 18 6 62E 09 2015 09 11 09 17 06 644 28 2 72E 07 2015 09 11 09 17 06 679 32 5 77E 08 2015 09 11 09 17 06 714 44 5 41E 10 2015 09 11 09 17 06 748 5 48E 07 2015 09 11 09 17 06 783 14 1 50E 08 2015 09 11 09 17 06 818 18 6 64E 09 2015 09 11 09 17 06 853 28 2 72E 07 2015 09 11 09 17 06 887 32 5 78E 08 2015 09 11 09 17 06 922 44 5 59E 10 2015 09 11 09 17 06 957 999 5 47E 07 2015 09 11 09 17 06 992 14 1 51E 08 3 2015 09 11 09 17 07 026 18 6 69E 09 RgaTrendDatal AVERAGE 339580 25 42 COUNT 18 SUM 6112447 42 38 H m 100 Figure 173 Record Data for Trend Mode in Excel One Trend Data Sample Point Group The number of Trend Data Sample groups in a complete Trend Scan is set by the value in the Samples box on the Mass Table tab In this example the Samples box is set to 100 so one complete Trend Scan will contain 100 groups of the six enabled masses in the Mass Table 600 Trend Data Sample Points The first Trend Scan begins at row 138 in this example and would end at row 737 if a complete Trend Scan w
16. lt Sample Value 6 02352e 009 gt lt Sample Value 4 11353e 010 gt lt Sample Value 8 15777e 013 gt lt Sample Value 2 86842e 012 gt lt Sample Value 1 2607e 013 gt lt Sample Value 5 3608e 011 gt lt Sample Value 2 04398e 010 gt lt Sample Value 2 53127e 010 gt lt Sample Value 1 79202e 010 gt lt Sample Value 2 55128e 011 gt lt Sample Value 5 37074e 012 gt lt Data gt The Icon ay flowing from the program this icon changes to a dynamic icon an indicates that a data pipe for streaming XML is not open When the pipe is open and data is Extorr Inc 307 Columbia Road New Kensington PA 15068 3g TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 17 Use with Multiple XT Systems The VacuumPlus software allows for the multiplexing of all XT systems run by the host computer Each unit must be run from an independent com port but as many units as com ports available may be run by a single host computer All that is required is to open a second third etc file using the File drop down menu For each case designate the port and cfg file for the unit on that port The VacuumPlus window can then display embedded windows for each system being run The various display modes may be selected from those found in Window on the menu bar El vacuum Plus sn144 g le x Fie Edt View Window Help GOs cS 6 cE BeAr
17. 2015 09 08 10 22 15 482 2015 09 08 10 22 15 489 2015 09 08 10 22 15 496 2015 09 08 10 22 15 503 2015 09 08 10 22 15 650 2015 09 08 10 22 15 656 2015 09 08 10 22 15 663 2015 09 08 10 22 15 670 2015 09 08 10 22 15 677 2015 09 08 10 22 15 684 2015 09 08 10 22 15 691 2015 09 08 10 22 15 698 2015 09 08 10 22 15 705 2015 09 08 10 22 15 712 2015 09 08 10 22 15 719 2015 09 08 10 22 15 726 2015 09 08 10 22 15 733 2015 09 08 10 22 15 740 PAGE LAYOUT fe o6 B C RgaSweepData2TimeAndDateFormatCorrected csv Excel FORMULAS 50 2 7 17E 11 50 3 2 28E 11 50 4 1 66E 11 50 5 3 78E 13 50 6 2 94E 12 50 7 1 20E 11 50 8 3 58E 11 50 9 8 77E 11 51 2 67E 12 51 1 6 37E 11 51 2 6 25E 12 51 3 4 63E 11 51 4 4 12E 11 31 5 1 71E 11 0 61 3 61E 10 0 7 1 52E 09 0 8 1 69E 09 0 9 1 88E 09 1 2 19E 09 1 1 2 24E 09 1 2 2 04E 09 1 3 1 31E 09 14 5 12E 10 15 2 97E 10 1 6 6 22E 10 1 7 1 01E 09 18 1 34E 09 1 9 1 52E 09 RgaSweepData2TimeAndDateFormatC DATA REVIEW HE H o VIEW D A xX john hackwelder 100 Figure 144 Record Data in Excel Data at the Start of Third Sweep The third sweep ends at row 1667and the start of a fourth sweep is shown in row 1668 HOME INSERT 2015 09 08 10 22 19 094 2015 09 08 10 22 19 101 2015 09 08 10 22 19 108 2015 09 08 10 22 19 115 2015 09 08 10 22 19 122 2015 09 08 10 22 19 129 2015 09 08 10 22 19 136 2015 09 08 10 22 19 143 2015 09 08 10 22 19 150 20
18. 2015 09 16 12 06 55 386 18 1 04E 07 a 00404 20150916 120 SC 601 5 2 20E 08 2 24 1204 2015 09 16 12 06 55 507 18 1 04E 07 1205 2015 09 16 12 06 55 629 18 1 03E 07 1206 2015 09 16 12 06 55 750 18 1 03E 07 1207 2015 09 16 12 06 55 872 18 1 03E 07 1208 2015 09 16 12 06 55 993 18 1 04E 07 1209 2015 09 16 12 06 56 115 18 1 03E 07 1210 2015 09 16 12 06 56 236 18 1 03E 07 1211 2015 09 16 12 06 56 358 18 1 03E 07 1212 2015 09 16 12 06 56 479 18 1 03E 07 1213 2015 09 16 12 06 56 601 18 1 03E 07 1214 2015 09 16 12 06 56 722 18 1 03E 07 MassSpecData 00404 20150916 120 7 i Figure 230 Record Data in Excel Mass 14 Data for the Complete Trend Scan Accepted Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 188 Extorr Inc www extorr com Click the OK button in the Edit Series window to return to the Select Data Source window Mass 14 is now listed in the Legend Entries Series box Select Data Source Chart data range The data range is too complex to be displayed If a new range is selected it will replace all of the series in the Series panel Legend Entries Series Horizontal Category Axis Labels Sass J _Taet_ Xamoe Series1 Mass 14 a a NNE Hidden and Empty Cells Figure 231 Record Data in Excel Chart Filters Select Data Source Window with Mass 14 Added Click on the OK button to add the
19. 307 Columbia Road New Kensington PA 15068 48 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com To return to the normal Graph Window right click in the graph area to display the Customization Menu and select Undo Zoom amp Vacuum Plus 404 BF File Edit View Window Control Help Li So Total Pressure 3 559 10 8 torr Pirani Pressure 1 00x104 torr Q 4 Start Degas Start Recording a Scale i Mass Sweep Viewing Style Border Style Font Size Show Legend Numeric Precision Plotting Method Data Shadows Grid Options Graph and or Table Point Label Orientation Mark Data Points Undo SEN Maximize Customization Dialog Export Dialog Help Figure 49 Right Click in Graph Area for Customization Menu The Graph returns to the original display x Vacuum Plus 404 File Edit View Window Control Help rg Cs mE S Total Pressure 3 176x10 8 torr Pirani Pressure 1 00x104 torr Q j Start Degas Start Recording a Mass Sweep Figure 50 Graph Display After Undo Zoom Extorr Inc 307 Columbia Road New Kensington PA 15068 49 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com It is possible to accidently Zoom in on a small area or blank portion of the graph such as below Vacuum Plus 404 File Edit View Window Control Help 1G 058 18 6 F RB REE
20. 7 52E 09 6 49E 07 1 51E 09 2 19E 08 1 01E 07 4 03E 07 8 88E 08 7 43E 09 D MassSpecData 00404 20150916 120 AVERAGE 346100 02 43 COUNT 3 SUM 1038300 08 08 H m 100 Figure 211 Record Data in Excel Last Trend Data Sample Point for a Complete Trend Scan Other files may have been recorded that contain the data from additional Trend Scans A graph may be generated in Excel to analyze the data One way to generate a useful graph is to first sort the data by the Mass value in column B This groups all the measurements for each mass together and makes it easier to select the data and add it to the graph Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 180 Extorr Inc www extorr com Select all the data in the file by clicking on the column label at the top of column A and then while holding down the shift key click on the Column B label and the column C label H 9 7 ers FILE HOME INSERT MassSpecData 00404 20150916 120655 xlsx Excel PAGE LAYOUT FORMULAS DATA REVIEW VIEW w OR DEVELOPER john hack pq XY f lt xml version 1 0 encoding us ascii gt B c D E F G lt xml version 1 0 enca 1 2 3 4 5 6 7 8 9 10 u 12 EE 14 m v af in Progress TestConfigs 404 152006 cfg 603c1 RBNRRRRRRNRBERESE MassSpecData 00404 20150916 120 AVERAGE 339405 11
21. Figure 125 USB to RS232 Converter Port Properties Window Click on the Port Settings Tab and then click on the Advanced button Figure 126 USB to RS232 Port Properties Port Settings Tab Extorr Inc 307 Columbia Road New Kensington PA 15068 125 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Advanced Settings window will open COM Port Number USB Transfer Sizes Select lower settings to correct performance problems at low baud rates Select higher settings for faster performance Receive Bytes Transmit Bytes Select lower settings to correct response problems Serial Enumerator Serial Printer Latency Timer msec Cancel If Power Off Event On Surprise Removal Timeouts Set RTS On Close Disable Modem Ctrl At Startup Enable Selective Suspend 0 0000 gO g Minimum Read Timeout msec Minimum Write Timeout msec l i i Figure 127 USB to RS232 Port Properties Advanced Settings Window The current settings are displayed Click on the COM Port Number box to show the drop down list of available COM numbers COM Port Number USB Transfer Sizes A COM12 Select lower settings to corre COM13 COM14 Select higher settings for fas COM15 COM16 Receive Bytes COM17 COM18 Transmit COM19 Bytes jae COM21 COM22 BM Options COM23 Miscellaneous Options Select lower settings to corre por Serial Enumerator COM26 Serial Printer L
22. Finally break off the top of the filament assembly and discard More detailed Photographs are available on the Extorr web site at www extorr com Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 55 Extorr Inc www extorr com 8 Return Procedure If for any reason you need to return your XT system to Extorr Inc for service first call 1 724 337 3000 to obtain a Returned Material Authorization RMA number Then pack the instrument securely using the original packaging if it is available Be sure that the RMA number is clearly marked on the outside of the shipping box Many Probes returned to Extorr for repair are damaged in shipping because of poor packaging by the customer If the Vacuum Feed Thru Pins are broken in shipping the feed thru must be replaced at a cost of 600 To avoid damage use the original Probe Shipping Box or clear plastic shipping tube if possible The factory shipping box or clear plastic shipping tube supports and protects the probe to help prevent damage Please contact the factory for instructions on properly packaging your probe Extorr Inc 307 Columbia Road New Kensington PA 15068 56 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix A First Mass Spectrum As the vacuum system is first pumped down the Pirani gauge output will decrease hopefully r
23. If power was just applied to the CCU the Outputs tab parameter data will be blank until the configuration file is downloaded and the first Mass Sweep is completed If your unit has been running in the Mass Sweep Mode for some time data will be displayed for each parameter on the Outputs tab Extorr Inc 307 Columbia Road New Kensington PA 15068 71 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com If the parameter values on the right side of the Outputs tab are hidden as shown below the Operational Folders section of the VacuumPlus window will have to be resized This is done by slowly moving the mouse cursor over the Left Edge of the Operational Folder Tabs until it changes shape from the normal Arrow into the double ended Resize cursor When the Resize cursor is shown left click and drag the left edge of the Folder Tabs until both columns of the parameter data are visible in the Outputs tab The FirstTimeRgaStartUp avi video in the Instruction Videos Folder on the Extorr CD shows how to resize the Operational Tabs This information is in the Operating Your Extorr RGA for the First Time section which is the last of the four parts in this video This section starts about 10 minutes into the 15 minute video EA vacuum Plus 1010 10 gt file Edt view window Help l xl Total Pressure Pirani Pressure Q j Start Degas a Webs pe
24. LowCalPosition 0 21 LowCallonEnergy 4 2 HighCalMass 300 HighCalResolution 1895 HighCalPosition 0 50 HighCallonEnergy 5 3 TotalAmpOffset 0 PartialAmpOffset 0 TotallntegratingCap 9 97 PartiallntegratingCap 3 05 RFSettleTime 50 SWSettleTime 10 Pirani1 ATM 2 25670 PiraniZero 0 31365 PiraniAutoRecalibrate 0 PartialSensitivity 8 00e 004 TotalSensitivity 1 00e 000 debug 0 gt lt MassTableParameters Samples 100 gt lt Mass1 Enabled 1 Mass 2 Description Color Black Dwell 3 5 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass2 Enabled 1 Mass 18 Description Color Navy Dwell 50 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass3 Enabled 1 Mass 28 Description Color Dk Gray Dwell 50 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass4 Enabled 1 Mass 32 Description Color Red Dwell 100 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass5 Enabled 1 Mass 149 Description Color Fuschia Dwell 200 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass6 Enabled 1 Mass 69 Description Color Green Dwell 100 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass7 Enabled 1 Mass 38 Description Color Silver Dwell 3 5 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass8 Enabled 1 Mass 40 Descriptio
25. PA 15068 9 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 3 5 Power Supply The Power Supply parameter displays the input voltage to the CCU box from the AC to DC Power Supply This reading should be about 24 VDC E 3 6 Filament Voltage The Filament Voltage reading measures the potential applied across the Ionizer Filaments The CCU electronics vary this voltage to produce the desired emission current When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading should be about 1 5 V to 2 V for the standard Extorr thoria coated dual filament operating at a Filament Emission current of 2 0 mA The Filament Voltage will read about 0 5 V when the Filament Activation Switch is set to OFF If the Filaments have burned out and the Filament Activation Switch is set to ON the Filament Voltage reading will be greater than 5 V and the Filament Light Bulb Icon will show a Red Dot with an X across it E 3 7 Filament Resistance The Filament Resistance display is the calculated resistance of the Ionizer Filaments measured in Ohms The standard Extorr thoria coated dual filament in normal operation will give a Filament Resistance reading of about 0 5 Ohms If one of the filaments burns out this reading will increase to about 1 Ohm A reading of 3 Ohms or more indicates that both filaments have burned out and will ne
26. Sort By Column B Selected Make sure that the Sort on box contains Values and the Order box contains Smallest to Largest Next click on the OK button to accept the settings and close the Sort window Alada tevet 2 lt petete tevet Ba copytevet iootions E1 my data nas peagers Sort On Order Sor by GGG Values Figure 216 Record Data in Excel Sort By Column B Sort On Values and Order Smallest to Largest Extorr Inc 307 Columbia Road New Kensington PA 15068 182 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The data is now sorted by increasing Mass value MassSpecData 00404 20150916 120655 xIsx Excel 7 amp OH xX HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack i fx 9 16 2015 12 06 55 PM B c D E 2015 09 16 12 06 55 108 2015 09 16 12 06 55 229 4 90E 10 2015 09 16 12 06 55 251 4 27E 10 2015 09 16 12 06 55 472 3 70E 10 2015 09 16 12 06 55 594 2 25E 10 2015 09 16 12 06 55 716 2 73E 10 2015 09 16 12 06 55 837 3 31E 10 2015 09 16 12 06 55 959 3 10E 10 2015 09 16 12 06 56 080 2015 09 16 12 06 56 202 2015 09 16 12 06 56 323 2015 09 16 12 06 56 445 2015 09 16 12 06 56 566 2015 09 16 12 06 56 688 2015 09 16 12 06 56 809 2015 09 16 12 06 56 931 2015 09 16 12 06 57 052 18 2015 09 16 12 06 57 174 2015 09 16 12 06 57 295 20 2015 09 16 12 06 57 417 2015 09 16 12 06 57 538 3 79E 10 2015 09 16 12 06 57 66
27. USB Serial Port COM11 in this example will disappear from the list while all the other ports remain USB Serial Port COM11 is the USB to RS232 Converter on this computer The USB to RS232 Converter may have a different COM number on your computer A Device Manager File Action View Help ml 5 ih Jack PC il Computer gt Sy Disk drives gt ly Display adapters p Ei DVD CD ROM drives gt eS Human Interface Devices A jg IDE ATA ATAPI controllers N Keyboards n A Mice and other pointing devices A Monitors p E Network adapters 4 Ports COM amp LPT a Processors n amp Sound video and game controllers 5 JE System devices gt F Universal Serial Bus controllers gt USB Virtualization Figure 110 The Device Manager After the USB to RS232 Converter is Unplugged Extorr Inc 307 Columbia Road New Kensington PA 15068 1 15 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Plug the USB to RS232 Converter back into the same USB port as before and the device will reappear in the list itis USB Serial Port COM11 in this example Device Manager File Action View Help e H f amp a ey Jack PC gt JE Computer gt coq Disk drives i Display adapters me i DVD CD ROM drives oe Human Interface Devices gt Sg IDE ATA ATAPI controllers gt 2 Keyboards P Mice and other pointing devices s i Monitors p a Ne
28. and Focus 1 Shorted Together O x 18 x ti vacuum Plus 101 0 IR Bile Edit wew window Control Help j 1 Gj Oe 41 82 AE RGAE Total Pressure 6 541x10 11 torr Pirani Pressure 1 00x10 4tor Oy Start Degas ka k1 Total Pressure is Negative SEAR because Filament is OFF Configuration Communications Sweep parameters Operating parameters k Degas Current 0 mA Calibration param T Outputs massTabe should be about 2 4 mA 2 Degas current 04 ma Filament Voltage 0 53 vats 3 k3 Filament Voltage 0 5V Electronics Temperature 32 4 C Filament Resistance 178 ohm ie 4 should be about 1 6V Power supply 24 10 volts Sensor Temperature k Filament Resistance 1 72 should be about 0 52 F Source c nei mma Reference 2 45 to 2 55 2499675 volts 9 Current Source 1 should be A TOA E ne S o KG Sowce2 curent 1355557 me Groundref 34 02 0002185 vots ee cnet RF Amp 0 to 20 0 Set oe Focus FB Focus 0 10 voke j Current Source 2 should be Pirani Temp 1 to 1 0 0 141265 volts Repeller 2 0 Elec_En 0 17 volts Je B about 10 lt Source 1 Pirani Corr 1 to 1 0 0 141873 volts Filament Power 52 2KO 7 Focus 1 FB 0Y Pirani Press 3 to 2 5 E E F E a e ETA 0 should be about 20V FB 2 25 to 25 2 399940 volts Filament DAC Fine w k g Repeller OV FB 225t025 2 398905 volts should be about 68V 9 Filament Power 5 because Filament i
29. drop down list in the Communications Setup group should be set to Local COM Port for most installations The Restart Retry communications channel button at the top of the Communications tab is used to reestablish communications between the Extorr RGA CCU and user s computer The user may also enter a data port name in the Service Port text box when taking streaming XML data to an application Click the Apply button and the changes made will take effect Remember to save your Configuration File with the new settings by clicking on the Configuration Tab and then on the Save button or use the Save As button to give it a different file name VacuumPlus will load the newly saved Configuration File whenever the software is restarted A serial server and the appropriate software will allow the system to operate on a Local Area Network LAN or a Wide Area Network WAN Extorr Inc 307 Columbia Road New Kensington PA 15068 18 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 5 Configuration Tab lt The Configuration tab allows the user to reestablish Configuration the factory settings or to store his own operational settings The contents of all the operational folder tabs are stored in an XML file format Save As will call up a dialog box which will allow the user to name this Model 300 syn 404 configuration file as desired
30. your ionizer may be contaminated A contaminated ionizer may cause a difference of an order of magnitude or more between the total pressure and the sum of the partial pressures If the contamination is not severe the sensitivity may be restored by degassing the ionizer To start degas click on the Start Degas button that is located to the right of the filament switch at the top center of the graphics interface See section 6 17 of the User s Manual Let the unit complete the full ten minute automatic Degas cycle If the partial pressure sensitivity remains low after Degassing the Ionizer will probably need to be replaced Follow the instructions in section E 1 5 and create Screen Captures of the Mass Scan Graph and the Outputs Tab and then contact the factory for additional help Extorr Inc 307 Columbia Road New Kensington PA 15068 76 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com If the Outputs Tab parameter values from your system indicate that a short circuit is present use an Ohm meter to check the probe Un plug the DC Power supply carefully remove the CCU Box and measure the resistance of each flange pin to ground the Vacuum Chamber All pins should have very high resistance to ground gt 20MQ with CCU disconnected except for the RTD pin7 which should be on the order of 1000 ohms to ground and the daisy chained Pirani Pins 13 amp 14 which should be on the order
31. 006455 volts RF Amp 0 to 20 0 4 296429 volts Focus FB Focus1 15 14 volts Pirani Temp 1 to 1 0 0 127937 volts Repeller 2 0 Elec_En 68 17 volts Pirani Corr 1 to 1 0 0 128505 volts Filament Power 6 amp 2 Pirani Press 3 to 2 5 0 283876 volts Filament DAC Coarse 3087 FB 225t025 2404021 volts Filament DAC Fine 1970 FB 2 25 to 2 5 2 401232 volts Figure 20 The Outputs Tab The outputs tab gives information on system operation The values are updated at the end of every scan The user will find this information very useful especially if trouble shooting is required The factory support personnel will ask for the values on this page when trouble shooting The top parameters reported here are Degas current Electronics Temperature within the electronics box CCU the voltage placed on the electronics by the power supply the voltage placed across the filaments the resistance of the filaments and the temperature at the base of the probe The degas current is also the total emission current from the filaments when the system is not in the degas mode The total current through the filaments is given by the voltage across the filaments divided by the resistance Below these readings are further operational readings labeled with the acceptable ranges for these readings Source current is electron current to the source grid Source 2 current is electron current to the B A section of the i
32. 05 56 RgaTrendDatal xlsx Excel FORMULAS DATA 9 11 2015 9 17 48 AM c 5 74E 08 5 58E 10 5 47E 07 1 49E 08 7 70E 09 2 70E 07 5 75E 08 5 41E 10 5 47E 07 1 51E 08 18 7 77E 09 28 2 70E 07 32 5 74E 08 44 5 83E 10 999 5 47E 07 14 1 49E 08 18 7 75E 09 28 2 70E 07 32 5 70E 08 999 4 94E 10 5 53E 07 14 1 51E 08 18 7 76E 09 28 2 71E 07 32 5 74E 08 44 5 27E 10 999 5 50E 07 14 1 49E 08 AN COUNT 3 D SUM 1038177 17 48 REVIEW VIEW DEVELOPER a john hack Y 100 Figure 175 Record Data in Excel Last Trend Data Sample Point at End of Second Trend Scan Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 159 Extorr Inc A third complete Trend Scan should end at row 1937 RgaTrendDatal xlsx Excel 1945 1947 1949 1950 1951 Y HOME INSERT 2015 09 11 09 18 08 438 2015 09 11 09 18 08 473 2015 09 11 09 18 08 508 2015 09 11 09 18 08 543 2015 09 11 09 18 08 577 2015 09 11 09 18 08 612 2015 09 11 09 18 08 647 2015 09 11 09 18 08 681 2015 09 11 09 18 08 716 2015 09 11 09 18 08 751 2015 09 11 09 18 08 786 2015 09 11 09 18 08 820 2015 09 11 09 18 08 855 2015 09 11 09 18 08 890 2015 09 11 09 18 09 057 2015 09 11 09 18 09 092 2015 09 11 09 18 09 127 2015 09 11 09 18 09 161 2015 09 11 09 18 09 196 2015 09 11 09 18 09 231 20
33. 08 10 22 11 975 2015 09 08 10 22 11 982 2015 09 08 10 22 11 989 2015 09 08 10 22 11 996 2015 09 08 10 22 12 003 2015 09 08 10 22 12 010 2015 09 08 10 22 12 017 2015 09 08 10 22 12 024 2015 09 08 10 22 12 031 2015 09 08 10 22 12 038 2015 09 08 10 22 12 045 2015 09 08 10 22 12 052 RgaSweepData2TimeAndDateFormatCorrected csv Excel 7 SB O xX PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder 1 Charts Mi Sok h WK day flee Charts 5 50 2 9 29E 12 3 2 76E 11 4 6 79E 11 51 2 3 80E 11 513 3 53E 11 51 4 5 15E 12 BLS 3 84E 111 0 6 3 54E 10 0 7 1 44E 09 0 8 1 70E 09 0 9 1 82E 09 1 2 13E 09 1 1 2 20E 09 1 2 1 98E 09 1 3 1 39E 09 1 4 4 12E 10 1 5 3 82E 10 1 6 6 14E 10 1 7 9 58E 10 1 8 1 35E 09 RgaSweepData2TimeAndDateFormatC AVERAGE 13 025 COUNT 1020 SUM 13285 5 wm Be 4 2 Map Sparklines Filters Links Text Symbols X Tours See All Charts H m 100 Figure 149 Record Data in Excel showing Insert Ribbon Click on the All Charts tab and select the X Y Scatter option on the left side of the tab and the Scatter with Straight Lines type at the top of the tab Insert Chart Recommended Charts All Charts Recent Templates Column Line Surface 7 Radar Combo M Scatter with Straight Lines Figure 150 Record Data in Excel Insert Chart Window Click on the OK button to cr
34. 09 2015 09 16 12 08 07 903 1 51E 09 2015 09 16 12 06 55 125 14 2 20E 08 2015 09 16 12 06 55 247 14 2 24E 08 2015 09 16 12 06 55 368 14 2 24E 08 2015 09 16 12 06 55 490 14 2 22E 08 2015 09 16 12 06 55 611 14 2 22E 08 2015 09 16 12 06 55 733 14 2 21E 08 2015 09 16 12 06 55 854 14 2 22E 08 2015 09 16 12 06 55 976 14 2 22E 08 2015 09 16 12 06 56 097 14 2 22E 08 2015 09 16 12 06 56 219 14 2 22E 08 2015 09 16 12 06 56 341 14 2 21E 08 2015 09 16 12 06 56 462 14 2 20E 08 2015 09 16 12 06 56 584 14 2 21E 08 MassSpecData 00404 20150916 120 AVERAGE 2 000000009 COUNT 1200 SUM 2400 000011 dad a 4 4 4 4 4 aj aj 4 al 4 PI 4 4 Figure 219 Record Data in Excel showing Insert Ribbon Click on the All Charts tab and select the Line option on the left side of the tab and the Lines type at the top of the tab Recommended Charts All Charts Recent X f i B Templates a SNI la Column Line i X Y Scatter Stock WRESSSSSSSERGARRESRESESCSER SEE asw sre Surface Radar gt XEEN Combo Figure 220 Record Data in Excel Insert Chart Window Click on the OK button to create the chart Extorr Inc 307 Columbia Road New Kensington PA 15068 184 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The Chart is generated and shown at the center of the Excel window Drag the chart to
35. 1 Multty 7 12 BA Out Figure 4 Flange Pin Out Use an Ohm meter to check the probe for shorts by measuring the resistance to ground of all pins They should all have very high resistance Mega ohms to ground except for the RTD pin7 which should be on the order of 1000 ohms to ground and the daisy chained Pirani Pins 13 amp 14 which should be on the order of 5 ohms to ground The resistance between filament leads should be low perhaps half an ohm If this checks out your probe installation is most likely OK If not recheck the port inside diameter and port flange trueness to 90 degrees The probe requires a port and or nipple with an inside diameter of at least 1 375 inches If the filaments are open this will require a new filament assembly Extorr Inc 307 Columbia Road New Kensington PA 15068 1 1 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 4 4 Connect the Command and Control Unit CCU Now attach the CCU to the back of the probe being careful to match up the flange pins to the socket on the CCU The CCU should slip fairly easily onto the flange unless flange pins have been bent Improper alignment may cause pins to bend further so do not use excessive force Insert the CCU mounting bolts through the holes in the CCU Carefully start the threads of the mounting bolts in the mounting ears of the probe You may need to stop the threaded inserts in the mounting ears from spinnin
36. 11 50 5 2 35E 11 50 6 7 46E 11 50 7 4 87E 11 10 1 3 1 39E 09 14 4 12E 10 15 3 82E 10 1 6 6 14E 10 1 7 9 58E 10 1 8 1 35E 09 FORMULAS DATA REVIEW VIEW Chart Title RgaSweepData2TimeAndDateFormatC AVERAGE 13 025 COUNT 1020 SUM 13285 5 CHART TOOLS DESIGN FORMAT www extorr com w o john hack Figure 151 Record Data in Excel With Mass Intensity Chart x data for an individual sweep may be found in these files by identifying the beginning and end of each sweep as shown above Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 141 Extorr Inc www extorr com H 2 Data Saved to Multiple Files Once Per Scan in the Mass Sweep Mode The data logging file named MassSpecData 00404 20150909 112443 csv in this example was created using the To Multiple Files mode with the Once Per Scan creation option on the Record Data tab With this recording mode a new data logging file is created and saved for each Mass Sweep The Data file name contains the Serial Number of the CCU along with the Date and the Time that it was created In this example 00404 is the CCU Serial Number 2015 09 09 is the Date YYYY MM DD and 11 24 43 is the time HH MM SS The RGA was in the Mass Sweep mode and the controls on the Sweep Parameters tab were set for a Scan speed of 72 Sec a Low mass of 11 a High mass of 21 and a S
37. 1s clicked in the main VacuumPlus window A Mass Sweep will start over at the Low Mass setting or the Trend mode will reset to the first entry in the Mass Table The specified file is created in the selected folder and the data is appended to the file until the Start Stop Recording button is clicked again or the disk becomes full The last record appended to the data file when the Stop Recording button is clicked may contain a partial sweep or data for only some of the enabled entries in the mass table Data Recording may also be controlled with the Data File Recording On check box and Uncheck button on the Record Data Tab Remember to click the Apply button when using these controls Extorr Inc 307 Columbia Road New Kensington PA 15068 39 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 14 3 Recording Data to Multiple Files The Multiple data file mode is selected by clicking on the To multiple files radio button on the Record Data Tab Click on the More Options button LA next to the File Name box to display the Browse for Folder window Navigate to an existing folder or create a new one using the Make New Folder button Browse For Folder d PerfLogs d Program Files di Program Files x86 d ProgramData d Recovery sh RgaDataFiles RgaSweepData d RgaTrendData d Riot Games Figure 28 Browse for Folder Window Cl
38. 23 6 C Filament Resistance 0 76 Ohm 10x3 Power supply 23 84 volts Sensor Temperature 26 9 C Sie Sourcel current 1 148442 ma Reference 2 45 to 2 55 2 459222 E i i Source curent 0 853039 ma Ground ref 02 0 001848 RF Amp 0 to 20 0 8 900695 volts Focus FB Focust 19 52 O Pirani Temp 1 to 1 0 0 138916 volts Repeller 2 0 Elec_En 67 52 30 7 Pirani Corr 1 to 1 0 0 140357 volts Filament Power 68 2 Pirani Press 3to 2 5 0 318079 volts Filament DAC Coarse 2991 vet FB 2 25to2 5 2 404495 volts Filament DAC Fine 3224 FB 2 25 to 2 5 2 404073 volts 10 7 UAA 1 11 21 1 i 5 5 15 2 xs 6 Ready NUM A i H I E p Data is Updated after every Scan Entire Outputs Tab Visible Figure 67 Entire Outputs Tab Visible The Mass Sweep Graph may be too small to observe the mass spectrum when the entire Outputs Tab is visible as in Figure 67 To hide the Operational Folder Tabs and make the Mass Sweep Graph fill the entire VacuumPlus window click on the Graphics Split Mode button Switch back to the Split Screen mode to view the Outputs Tab by clicking on the Graphics Split Mode button again Ei vacuum Plus 10 M File Edit View Goel Total Split Mode Button Figure 68 Split Mode Graphics Button Extorr Inc 307 Columbia Road New Kensington PA 15068 73 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr
39. 66E 11 12 625 5 53E 11 12 75 1 09E 10 12 875 5 59E 13 13 1 00E 10 13 125 6 00E 11 13 25 2 99E 11 13 375 7 96E 11 13 5 9 63E 11 13 625 3 30E 11 13 75 1 39E 10 MassSpecData 00404 20150909 112 FORMULAS DATA REVIEW VIEW john hackwelder AVERAGE 8 03125 COUNT 176 SUM 1413 5 Figure 161 Record Data in Excel Mass Intensity Data Selected Click on Insert to display the ribbon and then click on the Expand arrow in the Chart section to open the Insert Chart window z MassSpecData 00404 20150909 112443TimeAndDateFormated csv Excel Pace O X INSERT PAGE LAYOUT FORMULAS john hackwelder HOME Ea eT the amp te ell al Q E8 s 1 a A 8 Tables Illustrations Apps Recommended PivotChart Map Sparklines Filters Links Text Symbols Charts D li i s z bi Charts G DATA REVIEW VIEW X v Tours 137 lt ConfigurationData gt 2015 09 09 11 24 43 420 10 625 2015 09 09 11 24 43 433 10 75 2015 09 09 11 24 43 447 10 875 2015 09 09 11 24 43 461 il 2015 09 09 11 24 43 475 11 125 2015 09 09 11 24 43 489 11 25 2015 09 09 11 24 43 503 11 375 2015 09 09 11 24 43 517 11 5 2015 09 09 11 24 43 531 11 625 2015 09 09 11 24 43 545 11 75 11 875 2015 09 09 11 24 43 572 Eal 2015 09 09 11 24 43 586 12 12 2015 09 09 11 24 43 600 2015 09 09 11 24 43 614 2015 09 09 11 24 43 628 2015 09 09 11 24 43 642 2015 09 09 11 24 43 656 1 09E 1 2015 09 09 11 24 43 670 12 875 5 59E 13 2015 09 09 11 2
40. 8322 EMAIL support extorr com Extorr Inc www extorr com If the nipple is 7 inches about 178 mm or more in length the Ionizer Spacer Rings will be completely inside the nipple If the end flanges are not accurately aligned to the tube or if the copper gasket is not evenly compressed the spacer rings will touch the nipple wall and keep the other parts of the probe from shorting Vacuum Nipple Length 7 inches or greater Vacuum Chamber lonizer Spacer Rings Inside Vacuum Nipple Probe lonizer Completely Inside Vacuum Nipple Probe Mounted in Long Vacuum Nipple Figure 89 Probe Mounted with a Long Vacuum Nipple Extorr Inc 307 Columbia Road New Kensington PA 15068 99 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Avoid using a nipple that is between 5 inches about 127 mm and 7 inches about 178 mm in length A nipple of this length will put the Ionizer Spacer Rings in the connection between the nipple and the chamber in the area of the copper gasket Because the inside diameter of the copper gasket is usually larger than the I D of the nipple the spacer rings may not touch before the connecting wires or the ionizer and a short circuit may occur Vacuum Nipple Length between 5 inches and 7 inches z i xs Probe ENRON EEL l Vacuum Chamber lonizer Spacer Rings in connection between Nipple and Chamber
41. 95 volt Piani Cor 1 to 1 0 0738695 vots Filament Power 2 Pirani Press 3to 25 0 313927 vots Filament DAC Coarse 2995 FB 225t025 2401924 vots Filament DAC Fine 2840 7B 22515 29 2 ony i vacuum Plus 1010 teres 18 x Figure 75 Outputs Tab and Mass Scan Graph Normal Operation Extorr Inc 307 Columbia Road New Kensington PA 15068 g0 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc E 2 2 Filaments Open Burned Out FB 2 25 to 2 5 J volts BiYacuum Plus 1010 Home Figure 76 Outputs Tab and Mass Scan Graph Filaments Open Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 2 www extorr com ETT Plus 1010 10 xj TB Eile Edt Yiew Window Control Help a B x joe T is ae i Filament Switch Turns l Printing ile Log OFF Automatically after Configuration _ Sweep parameters Operating parameters ye f Several Mass Sweeps Calibration parameters Diagnostics Outputs Mass Table Light Bulb Icon shows 2 Degas current ae Te Filament Voltage 15877 vots Ie 3 a Filament Problem Electronics Tempasiro 27 8 C AAEREN 5256 Ohm fe 4 2 me perke m eA ilament Voltage gt 5V 3 should be about 1 6V 4 ma Aleference 245 to 2 55 2 458292 volt y 4 Filament Resistance gt 32 6s Source current 58 ma Groundref 02
42. COM1 thru COM9 are shown to be currently in use but no known device is connected to COM9 Click on COM9 in the list and then on the OK button A warning is displayed Communications Port Properties port or modem Using duplicate names can lead to inaccessible devices and changed settings Do you want to continue Figure 130 Communication Port Properties Warning Message Click on Yes to accept the change and close the warning and the Advanced Settings window Extorr Inc 307 Columbia Road New Kensington PA 15068 127 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com In the COM Port Properties window click on the General Tab USB Serial Port COMS Properties P USB Seral Port COMS Device type Ports COM amp LPT Manufacturer FTDI Location on USB Seral Converter Device status This device is working propery Figure 131 USB to RS232 Port Properties General Tab Updated The COM number has been updated to COM9 Click on the OK button to close the properties window In the Device Manager window the COM number of the USB to RS232 Converter has also been updated it is USB Serial Port COM9 in this example Device Manager Sa File Action View Help e mH H mw e eRe 4h Jack PC b gill Computer gt eq Disk drives gt Display adapters t e DVD CD ROM drives gt Ta Human Interface Devices p 4g IDE ATA ATAPI controllers gt lt a Keybo
43. Cap IEE pi may be helpful An example of this may be ony ET Pastial nbegrating Cop EI P when a very weak signal requires less than unit Total Sensitivity 1 e1 A A ton resolution or a fractional mass must be resolved Pirani Calibration Partial Sensitivity e4 Aton from a peak next to it The calibration parameters allow for the Dall te Bets tole Diagnostics changing of system resolution and sensitivity Zero mE This is also the place where the Pirani gauge may be calibrated 6 8 1 Low Cal and High Cal Figure 16 The Calibration Tab Because of the linearity and stability of the Extorr system the resolution and sensitivity requires calibration at only two points within the mass range These are the Low Cal and High Cal points along the mass axis We designate their location by placing values in the Low Cal Mass and the High Cal Mass All mass positions are linearly placed between these two points or extrapolated beyond these points The Low Cal Position allows for an offset so that a known low mass peak may be placed in the correct mass scale position Similarly the High Cal Position can be used to place a known mass peak at its correct position The mass scale will then be calibrated Again to actually make the changes the Apply button must be clicked Residual gas analyzers are usually run with unit resolution This means that throughout the system s mass range the peaks are set so that the valley between two equal
44. De i Paste Special Insert Delete Clear Contents Format Cells Column Width Hide Unhide au ewe U7 1 9 1 49E 09 2 1 68E 09 2 1 1 30E 09 FORMULAS RgaSweepData2 csv Excel DATA REVIEW RgaSweepData2 AVERAGE 42255 43211 COUNT 1740 SUM 68200267 42 VIEW 7 B O xX john hackwelder cy H E _ Ss 100 Figure 137 Record Data in Excel Format Cells Drop Down Menu The Format Cells window will open Format Cells Alignment Category General Number Currency Accounting Date Time Percentage Fraction Scientific Text Special Custom Sample General format cells have no specific number format Figure 138 Record Data in Excel Format Cells Window Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 132 Extorr Inc www extorr com Click on Custom in the Category list Many custom formatting options are displayed and the General option is highlighted in the list and shown in the Type Box Format Cells Number Alignment Font Border Fill Protection Category Sample gt Accounting Type Date Time General Percentage Fraction 0 Scientific 0 00 Text 220 Special 70 00 custom ee 0_ Red 0 0 00_ 0 00 0 00_ Red 0 00 0_ S 0 0_ Red 0 Type the numb
45. FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com ESTen POWE acacia he oi E e E a E ae a Mids faa aa aee a nt EES 95 E gt 0 Tilament DAC COA Se morenen iee a e Eaa E aE 95 Bid ZAP iar i DACEN se e e a e eas 95 E 4 Vacuum Probe Mounting Considerations to Avoid Electrical Short Circuits 96 E 4 1 Preferred Probe Mounting Arrangement cccccccccccssssssseseseeeececeeeceeeeeeaaassseeeeseeeeeeeeeeseesaeauasaaasseeseseeeees 97 E 4 2 Mounting the Probe Using a Vacuum Nipple ccccsssssssseseeeeeceeeeeeeeeeaaasseeseeeeeeeeeeeeeeeeesaessaasasssesseeeeeess 98 E 5 Finding Electrical Short Circuits Caused by Damage to the Probe csccssseeees 101 Appendix F Electron Multiplier Installation ccccsssssscccscssssssssccccccsssccees 106 F1 Unpack th SMUPMIEIC assises erini E E EER 106 F2 Prepara O oi T seesnuseceuis voueaudsseeiecusetoeesaees 106 F 3 Install Electron Multiplier sssseecececccsssccceeccccssssccecoccossssscecocossssssceecososssssceececssssssseceesssss 107 F 4 Install High Voltage Power Supply Module eecccssssseececcccssssscceoccsssssceceococsssseceeeossssos 109 Appendix G COM Port Troubleshooting sssssseceecccccssssscccececcossssscceeeocossssssseeee 111 G 1 Connecting the USB to RS232 Converter ccsssssssssscsscccccccccccccccccsssssssssscssscscees 111 G 2 Installing the USB to RS232 Converter Driver Software s
46. Man Tee ES Sub Tile 7 Border Style No Border Shadow C Line C 3D Inset ra Oo oe C2 fe 3 Grid Lines Both CY CX C None Gridin front of data Display Graph C Table C Both Figure 54 Mass Sweep or Mass Table Customization Menu This Menu contains many of the same controls as in the other Customization menu displayed by right clicking in the graph area The properties of grid lines the graph fonts and the graph colors may be changed here Some of these properties may also be changed on the Plot tab see section 6 11 above Many of the graphics changes revert to default settings when the moving from one mode to another but it is still well worth exploring the options found in the customization menus Extorr Inc 307 Columbia Road New Kensington PA 15068 51 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 7 Maintenance 7 1 Servicing the RGA probe 7 1 1 Ionizer Dual Filament Replacement A filament will eventually fail after years of operation even in a clean UHV system due to the thoria coating on it eventually decomposing and evaporating The Extorr RGA uses two thoria coated iridium filaments that operate in parallel When one of them burns out the other will continue to operate the instrument normally giving a warning so that the user will be able to replace the filament assembly when it is convenient Unlike what may occur
47. Mass 14 data to the chart MassSpecData 00404 20150916 120655 xlsx Excel CHARTTOOIS fH O X HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack fx B c 1 48E 09 1 52E 09 1 60E 09 1 52E 09 1 56E 09 1 68E 09 1 59E 09 1 55E 09 CSRS Chart Title 1 55E 09 1 58E 09 1L51E 09 3 206 07 1 54E 09 1 o0E 07 1 51E 09 800E 08 2015 09 16 12 08 06 323 2015 09 16 12 08 06 445 2015 09 16 12 08 06 566 2015 09 16 12 08 06 688 2015 09 16 12 08 06 809 2015 09 16 12 08 06 931 2015 09 16 12 08 07 052 2015 09 16 12 08 07 174 2015 09 16 12 08 07 295 2015 09 16 12 08 07 417 2015 09 16 12 08 07 538 2015 09 16 12 08 07 660 2015 09 16 12 08 07 781 2015 09 16 12 08 07 903 2015 09 16 12 06 55 125 2 20E 08 6 00 08 2015 09 16 12 06 55 247 2 24E 08 4 00E 08 2015 09 16 12 06 55 368 2 24E 08 2 00E 08 2015 09 16 12 06 55 490 14 2 22E 08 0 00 00 2015 09 16 12 06 55 611 14 2 22E 08 4444444444444444444444444444 444444 4444444444444 2015 09 16 12 06 55 733 14 2 21E 08 2015 09 16 12 06 55 854 14 2 22E 08 2015 09 16 12 06 55 976 14 2 22E 08 2015 09 16 12 06 56 097 14 2 22E 08 2015 09 16 12 06 56 219 14 2 22E 08 2015 09 16 12 06 56 341 14 2 21E 08 2015 09 16 12 06 56 462 14 2 20E 08 2015 09 16 12 06 56 584 14 2 21E 08 2015 09 16 12 06 56 705 14 2 20E 08 MassSpecData 00404 20150916 120 1 60E 07 1 40E 07 A oo oo i od amp 5 H m 10
48. Pfernce 245 4510255 2499369 volts should be about 1 0 mA ee eer ee 6210251 Source 2 Current gt 6 mA K G sce i 9 should be about 1 0 mA RF Amp 0 to 20 0 4167980 volts Focus FB Focus 2 Piani Temp 1t0 1 0 0141894 vots Repeler 20 Elec_En 6557 e O E F Ry should E E T _ be about 2 40V Pirani Cor 1to 1 0 0 142545 volts Filament Power Pirani Press 3to 2 5 0 317946 volts Filament DAC Coarse 301 8 Focus 1 FB 62V ae should be about 20V FB 2 25 t0 25 374501 volts Filament DAC Fine Teese TE o 9 adba Sey Filament Power 5 1 0 because Filament is OFF Apply num 2 E24 vacuum Plus 1010 loxi IE Eie gdt View Window Control Hep E J 181 x f 1 Oe a1 Scam wene ee k 4 Total Pressure is Negative because Filament is OFF No Mass Spectrum 2 shown on Mass Sweep Graph Ready wml 4 Figure 82 Outputs Tab and Mass Scan Graph Filaments Shorted to Source 1 Extorr Inc 307 Columbia Road New Kensington PA 15068 Q7 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc l iv acuum Plus 1010 O Fie Edt View Window Control Help Total Pressure 7 271x10 3torr Pirani Pressure 1 00x10 4 torr k 3 Soucs2 curent 0 948269 ma RF Amp 0 to 20 0 4 136950 volts FB 225t025 2401304 vot I E acuum Plus 1010 10 TB file Edit view Window Control Help je AAEL ELEELINI
49. Resized Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 185 Extorr Inc www extorr com Click on the Chart Filters button next to the chart and then click on Select Data at the bottom of the Menu to open the Select Data Source window MassSpecData 00404 20150916 120655 xIsx Excel cHARTTOOLS fH O0 RX HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack Chart 1 s f A B c 2015 09 16 12 08 06 202 1 53E 09 2015 09 16 12 08 06 323 1 48E 09 2015 09 16 12 08 06 445 1 52E 09 2015 09 16 12 08 06 566 1 60E 09 2015 09 16 12 08 06 688 1 52E 09 2015 09 16 12 08 06 809 1 56E 09 2015 09 16 12 08 06 931 1 68E 09 2015 09 16 12 08 07 052 1 59E 09 2015 09 16 12 08 07 174 1 55E 09 2015 09 16 12 08 07 295 1 51E 09 2015 09 16 12 08 07 417 1 55E 09 2015 09 16 12 08 07 538 1 58E 09 1 60E 07 2015 09 16 12 08 07 660 1 51E 09 1 40E 07 2015 09 16 12 08 07 781 1 54E 09 120E 07 VALUES NAMES 2015 09 16 12 08 07 903 1 516 09 1006 07 4 SERIES 2015 09 16 12 06 55 125 2 206 08 fo J darai 2015 09 16 12 06 55 247 2 24E 08 oor og 2015 09 16 12 06 55 368 2 24E 08 2015 09 16 12 06 55 490 2015 09 16 12 06 55 611 2015 09 16 12 06 55 733 2015 09 16 12 06 55 854 2 00E 08 2 22E 08 0 00 00 4 CATEGORIES 2015 09 16 12 06 55 976 2015 09 16 12 06 56 097 2 22E 08 44444444444444444444444444444444444444444444
50. Scan This value must be an integer between 100 and 5000 but the product of the value in the Samples box and the number of entries in the Mass Table must be less than or equal to 45000 So if the number of Samples is set to 5000 the maximum number of entries in the Mass Table is 9 If there are 16 entries in the Mass Table the maximum number allowed the Samples value will have to be reduced to about 2800 The Samples box setting along with the actual Dwell Times determine the time required to complete a Trend Scan For example the Mass Table in Figure 17 above has the Samples box value set to 300 So one Trend Scan would consist of 300 Samples and each Trend Data Sample takes 4 5 seconds as calculated above so the total time for one scan is 4 5 seconds 300 Samples which equals 1350 seconds or 22 5 minutes The Trend Scan Time is displayed on the horizontal axis of the Mass Table graph in the main VacuumPlus window and the maximum value is determined by the Dwell Time and Sample settings as described above Use a greater number of Samples and longer Dwell Times for slowly changing process or to monitor pressure changes over long periods of time Again the Apply button must be clicked before these settings will take effect The table may be edited and saved in a configuration file at any time as described in section 6 5 1 The GO 1 Scan and STOP buttons Trend Scan The GO or Start Scan button selects
51. Select all the data in the file by clicking on the column label at the top of column A and then while holding down the shift key click on the Column B label and the column C label H S5 ers RgaTrendData1 xlsx Excel 7 E O xX FILE HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack ra Al X va fe lt xml version 1 0 encoding us ascii gt A B D E F G lt xml version 1 0 enca In Progress TestConfigs 404 cfg RNRRRBRRRERSRBRERKRE Be oewanewne x Ja RgaTrendDatal A A O READY 3 AVERAGE 339580 25 57 COUNT 7830 EA _ 100 Figure 179 Record Data in Excel All Data Selected for Sort Next click on Data to display the ribbon and then select Sort H S5 ers RgaTrendData1 xlsx Excel 7 amp 7 X FILE HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack 7 A 2 Connections AJ Y Y Clear e E Flash Fill feo z Properties Reappl B f Remove Duplicates gt an Get External Refresh Ei Prop Z Sort Filter PEN wg 4 Data All R Edit Links A Y Advanced Columns o Data Validation ne Connections Sort amp Filter Data Tools In Progress TestConfigs 404 cfg 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 gt RgaTrendDatal SEC A O READY 3 AVERAGE 339580 25 57 COUNT 7830 H e _ 100 Figure 180 Record Data in Excel showing Data Ribbo
52. Torr At pressures between 1x10 Torr and 1x10 Torr the ionizer surfaces will oxidize after many months of operation and at pressures below 1x10 Torr the ionizer should operate for many years It is not a good idea to leave the filament on at pressures above 1x10 Torr for any longer than necessary The total pressure will usually read correctly even if the partial pressure sensitivity is low The B A type gauge measuring the total pressure uses higher voltages and works with more energetic ions that are less susceptible to stray fields The life of the filament may also be shortened if operated at high pressures because it must run hotter to maintain the electron emission current speeding up the decomposition of the thoria coating Cleaning the ionizer is difficult if not impossible in most cases so replacement is the remedy if the stainless steel surfaces have been oxidized Operating the RGA at a high pressure in an inert atmosphere such as Helium or Argon will not cause the ionizer surfaces to oxidize but the mass spectra will be distorted due to 1on molecule collisions The mass graph baseline will also rise because of metastable ions reaching the detector The total pressure will also not read correctly because the gauge is calibrated for nitrogen If the RGA is operated in mostly Argon the total pressure will read about 10 higher than the actual pressure In Helium the actual pressure will be about a factor of 10 greater than the
53. You may now start your pump down procedure If VacuumPlus is running the output screen shows the Pirani reading near the top of the window just right of the ion gauge output The Pirani reading is not displayed until the unit has finished one complete sweep When the pressure falls below 3x10 torr the ion gauge will start to operate and finally when the pressure falls below 3x10 torr the quadrupole will begin to operate The factory default VacuumPlus output screen is a mass sweep between masses and maximum amu Although pressure readings are made by the system for instrument control pressure outputs on the screen will not be displayed until the end of the first sweep and then will update after every following sweep Extorr Inc 307 Columbia Road New Kensington PA 15068 13 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 5 Operation 5 1 General theory of Operation Vacuum measurement requires that some device be it mechanical thermal or electrical interact with the gases of the vacuum system to produce a voltage or a current which may be related to pressure For the Extorr XT systems the highest pressure measuring device is the Pirani gauge A thin platinum wire with a precisely regulated current passing through it is located on the flange end of the probe A precise measurement of the wire s temperature yields a reproducible function of gas pressure This gauge is calibr
54. a of 18 The next most abundant ion is the fragment OT taarresave araoe Pronipresswre rssseeia0s O f OH at mass 17 The next most abundant fragment is Mass Sweep m y copanan cati O at mass 16 Note that the fragments are formed by the removal of an atom or group of atoms from catratnsaentes comms the molecular ion The molecular weight of the molecular ion and the particular fragment of the meng molecule both are used in the identification of the Hohas 0 H anu molecule z Samples amu 10 A closer examination of a pure water spectrum would also show peaks at mass 1 mass 19 and mass 20 but these peaks are on the order of 1000 times less than the peak at mass 18 The peaks at masses 19 and 20 arise because some of the H2O molecules contain 0 17 and 0 18 Figure 56 Water Vapor in Mass Spectrum isotopes Ordinary oxygen contains 99 756 of the mass 16 isotope 0 039 of the mass 17 isotope and 0 205 of the mass 18 isotope The peak at mass 18 is called the molecular or M peak of water vapor while those at peaks 19 and 20 are called the M 1 and M 2 peak respectively The other two peaks which are expected to be in these first mass spectra are the peaks due to the other main constituents of air nitrogen oxygen and argon The molecular peaks of these gases are at 28 32 and 40 The ratios of these peaks are 4 to 1 to 1 20 If these same ratios persist for a length of time you most likely have an air leak As the pumping
55. a Scan speed of 144 Sec a Low mass of 1 a High mass of 51 and a Samples amu of 10 The Date Time values are in column A the Mass values are in column B in units of amu and the Intensity values are in column C in units of torr RgaSweepData2TimeAndDateFormatCorrected csv Excel 7 amp QO Xx HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder A 136 137 lt ConfigurationData gt 2015 09 08 10 22 08 287 0 6 4 06E 10 2015 09 08 10 22 08 293 0 7 1 59E 09 2015 09 08 10 22 08 300 0 8 1 59E 09 2015 09 08 10 22 08 307 0 9 1 90E 09 2015 09 08 10 22 08 314 1 2 17E 09 2015 09 08 10 22 08 321 1 1 2 21E 09 2015 09 08 10 22 08 328 1 2 1 97E 09 2015 09 08 10 22 08 335 1 3 1 39E 09 2015 09 08 10 22 08 342 14 4 92E 10 2015 09 08 10 22 08 349 15 3 83E 10 2015 09 08 10 22 08 356 1 6 6 12E 10 2015 09 08 10 22 08 363 1 7 1 02E 09 2015 09 08 10 22 08 370 1 8 1 35E 09 2015 09 08 10 22 08 377 1 9 1 49E 09 2015 09 08 10 22 08 384 2 1 68E 09 2015 09 08 10 22 08 391 2 1 1 30E 09 2015 09 08 10 22 08 398 2 2 1 21E 09 2015 09 08 10 22 08 405 2 3 7 25E 10 2015 09 08 10 22 08 412 2 4 1 84E 10 2015 09 08 10 22 08 418 2 5 1 91E 11 2015 09 08 10 22 08 425 2 6 1 79E 11 2015 09 08 10 22 08 432 2 7 2 37E 11 2015 09 08 10 22 08 439 2 8 8 24E 11 2015 09 08 10 22 08 446 2 9 2 17E 11 2015 09 08 10 22 08 453 3 5 29E 11 2015 09 08 10 22 08 460 3 1 1 11E 11 RgaSweepData2TimeAndDateFormatC l _ 100 Figure 142 Record D
56. about 68V Filament Power 5 because Filament is OFF Filament Switch Turns OFF Automatically after k 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum k 2 shown on Mass Sweep Graph 83 Extorr Inc www extorr com 2 2 5 Focus 1 Shorted to Vacuum Chamber Ground o x 2181 x k1 Focus 1 FB 156V a Pees ee should be about 20V BSST ma Groundief 94 02 DONG vot Pr 5 lt volts Focust FB Foc Piani Press 3t0 25 El vacuum Plus 1010 BP Ble Edit View Window Help OD ws Ge oem aseet Pirani Pressure 1 00x10 4 torr Partial Pressure Sensitivity is Very Low Observed lon K 4 Intensities are only about 10 of the Total Pressure Reading Figure 79 Outputs Tab and Mass Scan Graph Focus 1 Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 2A TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc E 2 6 Repeller Shorted to Vacuum Chamber Ground lolx lal x Eivacuum Plus 1010 Bitten inon te Th www extorr com Filament Switch Turns OFF Automatically after Mass Table Plt Printing 4 1 several Mass Sweeps Configuration Communications PERAE Light Bulb Icon shows Operating parameters Calibration parameters Diagnostics Outputs a Filament Problem 2 Degas curent 0 4 ma Filament Voltage 0 10 volts 3 k Degas Current 0 4 mA Electro
57. al Notepad aa Windows Virtual PC Games Computer wee Adobe Reader Command Prompt a Fa oy Paint Control Panel Devices and Printers Default Programs A WordPad Help and Support All Programs Figure 105 Control Panel Button on Windows Start Menu Extorr Inc 307 Columbia Road New Kensington PA 15068 1 12 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The Control Panel window will open COO x EF Control Panel File Edit View Tools Help Adjust your computer s settings System and Security Review your computer s status Back up your computer Find and fix problems Network and Internet View network status and tasks Choose homegroup and sharing options Hardware and Sound View devices and printers Add a device Programs Uninstall a program www extorr com c I E J Search Control Panel View by Category User Accounts and Family Safety ey Add or remove user accounts Set up parental controls for any user Appearance and Personalization Change the theme Change desktop background Adjust screen resolution Clock Language and Region Change keyboards or other input methods Change display language Ease of Access Let Windows suggest settings Optimize visual display Figure 106 The Control Panel Window Click on Hardware and Sound to show this group of settings Now click on Device Manager under Devices and Pr
58. applied to the quadrupole mass analyzer at the proper ion gauge pressure The factory default partial pressure operation is a Mass Sweep from mass to the unit s highest mass After the filaments are turned on the partial pressure readouts are available on the Mass Sweep graph in the main VacuumPlus window Extorr Inc 307 Columbia Road New Kensington PA 15068 15 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 VacuumPlus Software The basic VacuumPlus window consists of pressure readouts a graph and a group of operational folder tabs which allow the user to setup the Extorr RGA make measurements and to customize both look and operation of the system 6 1 Starting up By default the software comes up displaying the Pirani and ion gauge measurements the filament status and a graph of either an analog mass spectrum or a trend line of single ion measurements A push of the graphics button wu on the upper left of the screen will split the screen so that the graph as well as the oo Pia PEEN im Perc na om a E u je parE Fi bi ye ie zs Fin EE ILEI 0E Benet 2 0 o c OE Bepeet L rai rras i oe a aM Frei err Eke Pert Pom Ge mh on Mass Sweep Maua Sweep r r pot Peet are Mati Se ed Pr per E e e a Tik Siac aai DEH wa Lss apa IaH kim i PT La oe amen T Tet Eien Toh ee Li DEH Figure 5 Toggle the Graph Icon near th
59. be generated in Excel to analyze the data This file contains the data from only one sweep so to produce a Mass Intensity graph select all the data in columns B and C To select all the data first click on the label on the top of column B and then while holding down the Shift key click on the label at the top of column C Both columns of data will be highlighted z MassSpecData 00404 20150909 112443TimeAndDateFormated csv Excel 7 amp O x HOME INSERT v A lt ConfigurationData gt 2015 09 09 11 24 43 420 2015 09 09 11 24 43 433 2015 09 09 11 24 43 447 2015 09 09 11 24 43 461 2015 09 09 11 24 43 475 2015 09 09 11 24 43 489 2015 09 09 11 24 43 503 2015 09 09 11 24 43 517 2015 09 09 11 24 43 531 2015 09 09 11 24 43 545 2015 09 09 11 24 43 558 2015 09 09 11 24 43 572 2015 09 09 11 24 43 586 2015 09 09 11 24 43 600 2015 09 09 11 24 43 614 2015 09 09 11 24 43 628 2015 09 09 11 24 43 642 2015 09 09 11 24 43 656 2015 09 09 11 24 43 670 2015 09 09 11 24 43 683 2015 09 09 11 24 43 697 2015 09 09 11 24 43 711 2015 09 09 11 24 43 725 2015 09 09 11 24 43 739 l 2015 09 09 11 24 43 753 2015 09 09 11 24 43 767 PAGE LAYOUT fe B c 10 625 9 16E 11 10 75 8 39E 11 10 875 3 71E 11 11 4 95E 11 11 125 2 74E 12 11 25 4 56E 11 11 375 7 60E 11 __11 5 5 22E 11 11 625 6 25E 11 11 75 6 18E 12 11 875 7 74E 11 i 12 7 80E 11 12 125 5 34E 11 12 25 7 28E 11 12 375 6 30E 11 __125 _7
60. complete sweeps and a partial sweep The Stop Recording button was clicked before the end of the fourth sweep and the last data point appended to the logging file is shown at row 1751 This unfinished sweep stopped at 8 9 amu RgaSweepData2TimeAndDateFormatCorrected csv Excel 7 O X HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder fe 83 B c 2015 09 08 10 22 19 795 7 5 4 06E 11 2015 09 08 10 22 19 802 7 6 5 52E 11 2015 09 08 10 22 19 809 7 7 2 76E 11 2015 09 08 10 22 19 816 7 8 3 18E 11 2015 09 08 10 22 19 822 7 9 3 25E 11 2015 09 08 10 22 19 829 8 2 92E 11 2015 09 08 10 22 19 836 8 1 3 69E 11 2015 09 08 10 22 19 843 8 2 6 79E 11 2015 09 08 10 22 19 850 8 3 3 06E 12 2015 09 08 10 22 19 857 8 4 4 26E 11 2015 09 08 10 22 19 864 8 5 1 57E 11 2015 09 08 10 22 19 871 8 6 1 82E 12 2015 09 08 10 22 19 878 8 7 4 95E 12 2015 09 08 10 22 19 885 8 8 8 19E 11 1751 2015 09 08 10 22 19 892 8 9 5 33E 12 100 Figure 146 Record Data in Excel Data at the End of Fourth Sweep Extorr Inc 307 Columbia Road New Kensington PA 15068 138 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com A graph may be generated in Excel to analyze the data To produce a Mass Intensity graph for the first sweep select the data in columns B and C from row 138 to row 647 the beginning and end of the first sweep as found above RgaSweepData2TimeAndDateF
61. continues these peaks will become smaller until there is virtually no mass 32 peak The nature of the pumps used and the material of vacuum system construction will determine the mass spectrum at the lowest pressures There are many sources of mass spectra in libraries on the World Wide Web NIST maintains a database on the web Some common residual gases first encountered on pump down are given below The numbers are rough percentage intensities with respect to the largest peak for each source Extorr Inc 307 Columbia Road New Kensington PA 15068 57 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Source Mass Figure 57 Table of Common Mass Peaks Note that hydrocarbons tend to produce peaks virtually everywhere but they tend to group in bunches which are separated by the CH2 fragment a mass of 14 If you look deep enough into every unbaked system you will most likely find hydrocarbon peaks An example of a hydrocarbon group is shown in Figure 58 Extorr Inc 307 Columbia Road New Kensington PA 15068 58 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com a Beyond these first pump down peaks the residual gases which are most likely to be found are those probably best known to the user of the vacuum system The user knows the processes carried out in his chamber and the chemical species involved There are other tricks to
62. desired H S gt MassSpecData 00404 20150909 112443TimeAndDateFor CHART TOOLS man G HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW v A 136 137 lt ConfigurationData gt l 2015 09 09 11 24 43 420 2015 09 09 11 24 43 433 2015 09 09 11 24 43 447 2015 09 09 11 24 43 461 2015 09 09 11 24 43 475 2015 09 09 11 24 4 2015 09 09 11 24 4 f B 2 8 10 625 9 16E 11 10 75 8 39E 11 10 875 3 71E 11 11 4 95E 11 11 125 2 74E 12 2015 09 09 11 24 4 9 00 09 2015 09 09 11 24 4 8 00E 09 2015 09 09 11 24 4 2015 09 09 11 24 4 7 00E 09 6 00E 09 2015 09 09 11 24 4 2015 09 09 11 24 4 5 00E 09 2015 09 09 11 24 4 4 00E 09 2015 09 09 11 24 4 3 00E 09 2015 09 09 11 24 4 2 00E 09 2015 09 09 11 24 4 1 00 09 2015 09 09 11 24 4 0 00 00 2015 09 09 11 24 4 2015 09 09 11 24 4 2015 09 09 11 24 43 697 2015 09 09 11 24 43 711 2015 09 09 11 24 43 725 2015 09 09 11 24 43 739 2015 09 09 11 24 43 753 2015 09 09 11 24 43 767 MassSpecData 00404 20150909 112 AVERAGE 8 03125 COUNT 176 SUM 1413 5 1 00E 09 5 13 125 6 00E 11 13 25 2 99E 11 13 375 7 96E 11 13 5 9 63E 11 13 625 3 30E 11 13 75 1 39E 10 VIEW DESIGN FORMAT john hack v AH E m Figure 164 Record Data in Excel With Mass Intensity Chart In the To Multiple Files mode with the Once Per Scan option selected a new data logging file is generated for each sweep The last file saved when the Stop Recording b
63. disk becomes full Data Recording may also be controlled with the Data File Recording On check box and Uncheck button on the Record Data Tab Remember to click the Apply button when using these controls VERY LARGE data logging files are generated using this recording option Recording a Mass Sweep from 1 amu to 100 amu with 10 Samples amu and a Scan speed of 144 second produces a Data logging file of about 560 MB per day Extorr Inc 307 Columbia Road New Kensington PA 15068 35 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 14 3 4 Recording Data to Multiple Files After N Sweeps Option When the After N sweeps option is selected a new data logging file is created and saved that contains the data for the number of scans specified by the value in the N box This value must be an integer between 1 and 1023 Numbers may be typed into the box or the up down arrows may be used to change the value Data Logging will begin when the Start Stop Recording button is clicked in the main VacuumPlus window A Mass Sweep will start over at the Low Mass setting or the Trend mode will reset to the first enabled entry in the Mass Table A data logging file named MassSpecData XXXXX Y Y Y Y MM DD HHMMSS csv is created in the selected folder at the beginning of the first scan The XX XXX in the file name is the Serial Number of the CCU followed by the Y YYY year
64. extorr com Extorr Inc www extorr com 6 7 Operating Parameters Tab en Operating parameters Under this tab the mode of operation may be changed as well as the Focus Voltage Electron Energy the Filament Mode Mass sweep Emission and the units in which the Total Pressure and 15 Partial Pressures are expressed O re The optional electron multiplier is also controlled under this Electron Energy 70 EV tab Filament Emission 2 0 ma Electron Multiplier Enable M __Disable_ ithe a J Currently the VacuumPlus Software supports three modes AutoZero Off M i Pressure units Torr v These are Mass Sweep Trend and Calibration All may be Filament selected from the drop down menu in the Mode box as on on shown below Filament Force OFF on Startup Uncheck Mass Sweep calls the analog scan as was discussed in section 6 6 above Trend is the Figure 11 The Operating Parameters Tab Mode Mass sweep graphical output of those mass intensities partial pressures placed into and activated in the mass table When Mass Table or Trend is selected a graph is generated which shows the peak heights due to the ions selected in the table as a function of time Each trace uses the color selected in the Mass Table The scale and zero functions Figure 12 Mode Drop are the same as for the analog graph This mode is further described in section Down Menu 6 9 the Mass Table The Calibrati
65. formatting of the Date Time values in column A RgaSweepData2 csv Excel a O0 X HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder i fx gt i B C gt 1 lt WindowParameters gt lt PlotParameters BkColor Pale green LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 gt 2015 09 08 10 22 08 287 0 6 4 06E 10 2015 09 08 10 22 08 293 0 7 1 59E 09 2015 09 08 10 22 08 300 0 8 1 59E 09 2015 09 08 10 22 08 307 0 9 1 90E 09 2015 09 08 10 22 08 314 1 2 17E 09 2015 09 08 10 22 08 321 1 1 2 21E 09 2015 09 08 10 22 08 328 1 2 1 97E 09 2015 09 08 10 22 08 335 1 3 1 39E 09 2015 09 08 10 22 08 342 1 4 4 92E 10 2015 09 08 10 22 08 349 1 5 3 83E 10 2015 09 08 10 22 08 356 1 6 6 12E 10 2015 09 08 10 22 08 363 1 7 1 02E 09 2015 09 08 10 22 08 370 1 8 1 35E 09 2015 09 08 10 22 08 377 1 9 1 49E 09 2015 09 08 10 22 08 384 2 1 68E 09 2015 09 08 10 22 08 391 2 1 1 30E 09 RgaSweepData2 AVERAGE 1014130 22 14 COUNT 1740 H l t 100 Figure 141 Record Data in Excel Column A Date Time Format Corrected Extorr Inc 307 Columbia Road New Kensington PA 15068 134 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com This data file was created using the To One File option on the Record Data Tab with the RGA in the Mass Sweep mode The data file produced may contain more than one Mass Sweep The controls on the Sweep parameters tab were set for
66. full peak width 10 height 70 eV electron energy 6 eV ion energy and 2 mA electron emission current Minimum detectable partial 10 torr Measured with N2 28 amu with 1 amu full pressure peak width 10 height 70 eV electron energy 6 eV ion energy and 1 mA electron emission current Below 10 14 torr possible with electron multiplier option Operating pressure Atmosphere to UHV Recommendations for ion gauge is below 107 for the RGA below 10 torr for the multiplier below 10 torr Max operating temp Bakeout temperature 300 C Probe Only CCU Removed Total pressure meas Available in Pirani BA and RGA modes lonizer Design Ss Open ion source electron impact ionization Dual Filament Thoria coated Iridium with firmware protection Built in 1 to 30 W degas ramp up Field replaceable Nickel construction 3 3 x 4 8 x 7 5 Easily separated from the probe for bake out Software Windows XP 7 8 or 10 _ _ S Power requirement 24 VDC 2 5 Amps Standard 120 240 VAC adapter supplied See Appendix D for options and spare parts Latest prices and spare parts are on the Extorr web site at www extorr com Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com O Extorr Inc www extorr com 4 Installation 4 1 Unpack the XT Shipment Carefully unpack your XT Unit The shipment includes these components quadrupole probe and co
67. g Tart Degas a Mass Sweep a 1 ille 9 00e Ea vacuum Plus 10 00c 7 4 File Edit VIEW 7 00e 7 oOem 4 2 00e 7 ee Total 3 000 7 2 O0e N 100e 7 Click Graphics OE eo ae ee Button to show a Operational Tabs Figure 64 Mass Scan Only Graphics Display Extorr Inc 307 Columbia Road New Kensington PA 15068 70 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com After clicking on the Graphics button the Operational Folder Tabs are displayed Operational Folder Tabs are displayed Ej yvacuurn Plus 11 10 F ie dl Yes pidu Heb Sosa foe saelat wE N iii iii i we Mass Siwar Fs Onevating vares Taiga an parameters Raznzstks Qutputs Macs ibe zizt Penin oq Lorfeursticn Zu a iieclicits Sihesp paia lers EX DENSI Plus 10 File Edit View GOs W Total ms M ai ah Fie Yenre iiy toe eects and Selhmgast oe lime i Leseoplicn gt m xt pF at 1 j ek PTA Kf x Saplizn jun Graphics Button changes to Split Mode Button Figure 65 Split Mode Graphics Display If necessary switch to the Mass Sweep Mode To change modes first select the Operating Parameters tab and then choose Mass Sweep from the Mode drop down menu then click on the Apply button Click on the Outputs tab to bring it to the front of the folders
68. help in identification of residual gas peaks For instance the intensities of the various isotopic peaks can be used to help identify molecules For instance a molecule containing a single Cl atom is going to have a molecular peak due to Cl and an M 2 peak due to Cl The intensity of the M 2 peak is about 33 of that of the M peak A molecule containing a single Br atom will have M and M 2 peaks of about equal intensity Emez 70e Armed with a few cracking patterns of common residual gasses a periodic table and a knowledge of how your chamber is used the user should have little trouble identifying a the gases in his system If he is stumped it is amazing what a simple search such as a T E what is mass spectral peak xxx or peak at m z XXX on the internet will yield Figure 58 Low Level Hydrocarbons Extorr Inc 307 Columbia Road New Kensington PA 15068 59 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix B Gauge Sensitivity to Differing Gases B 1 Pirani Gauge Thermal conductivity of a gas is directly related Extorr XTx00 1 ma emission to both the mass of the gas molecules and the pressure The Pirani readout is calibrated for air Pressures in other gases may vary considerably from the results due to air The characteristic voltage vs pressure response curve for the Pirani is shown to the right The voltage read at atmo
69. ion current may be converted to an amplified electron current The amplified current will allow mass spectra to be generated at a far greater speed The multiplier may also increase the ultimate detection sensitivity by a factor of over 1000 All molecules have their own unique mass spectrum Those familiar with residual gas analyzers will immediately recognize the mass spectral signatures of those gases frequently encountered These people will immediately tell you that the cascading intensity of peaks from 18 to 17 to 16 is due to the presence of water A four to one ratio of peak heights at 28 and 32 indicates that you have an air leak or the residual air has not yet been pumped down They would expect peak 44 in even a well sealed stainless chamber A surprise peak or set of peaks may take longer to identify but commonly available data bases and the information available on the Internet make the solutions to many of these puzzles available to non specialists Often all that is required is to type mass XXX peak into an internet search engine Of course in residual gas analysis you must expect that a number of different gases will produce peaks at the same time The residual gas spectra will be a combination of pure spectra In fact the user may see the mass spectrum of a pure compound only when he backfills the chamber with that gas 5 2 Pirani Readout Pilani Pressure 3 27110 torr After installation the VacuumPlus Software is st
70. of 5 ohms to ground The resistance between filament leads should be low perhaps half an ohm See the Flange Pin Out Drawing below Also check for shorts between the flange pins If the Ohm meter shows a short circuit the probe will have to be removed from the vacuum chamber See sections E 4 and E 5 for help finding the short circuit 6 Rods 7 RTD 5 Filament y 8 Rods 15 Faraday MultipliegOut N y 9 Filament 4 Repeller 3 Sourcel ell d 4 T gt 7 10 Source2 2 Mult HV A A j b X J F Z 13 14 Pirani k g N a 11 Focus 1 Mult LV 12 BA Out Figure 72 Flange Pin Out Extorr Inc 307 Columbia Road New Kensington PA 15068 77 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 1 5 Creating Screen Captures Screen Captures of the VacuumPlus window may be made using only the Print Screen key on your keyboard and the Paint program that is included with the Windows operating system These pictures may be saved as files and then e mailed to the Tech Support Group at Extorr support extorr com should you need help troubleshooting your RGA system A Screen Capture of the Outputs tab and another of the Mass Sweep graph should be created first by following the steps below Additional captures will be requested if needed Follow steps E 1 2 and E 1 3 above to set up your system Maximize the VacuumPlus window so that it fills the en
71. or continuous Trend Scan mode using the GO button Data Logging will begin when the Start Stop Recording button is clicked in the main VacuumPlus window A Mass Sweep will start over at the Low Mass setting or the Trend mode will reset to the first enabled entry in the Mass Table A data logging file named MassSpecData XXXXX Y Y Y Y MM DD HHAMMSS csv is created in the selected folder at the beginning of the scan The XXXXX in the file name is the Serial Number of the CCU followed by the YYYY year the MM month the DD day and the HHMMSS time Data is appended to the file until the end of the scan in the Mass Sweep mode In the Trend Mode data is appended to the file until all enabled entries in the Mass Table have been measured for the number of times specified in the Mass Table Samples box a complete Trend Mode Scan The file is then closed and a new data logging file is created at the beginning of the next scan Data files continue to be created for each scan until the Start Stop Recording button is clicked again or the disk becomes full The last record appended to the data file when the Stop Recording button is clicked may contain a partial sweep or data for only some of the enabled entries in the mass table Data Recording may also be controlled with the Data File Recording On check box and Uncheck button on the Record Data Tab Remember to click the Apply button when usi
72. rarral Serial BR Li _coanteellore Figure 121 The Device Manager Ports List Refer to Section 6 of this manual for additional information on using the VacuumPlus software Extorr Inc 307 Columbia Road New Kensington PA 15068 122 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com G 4 1 Device Manager Shows All Ports In Use In some cases when Windows assigns a COM number to the USB to RS232 Converter greater than COM the Device Manager Port Properties Advanced Settings window will show that COM 1 through COM9 are all in use Advanced Settings for COM10 COM Port Number com v COM 1 in use USB Transfer Sizes COM2 in use 2 COM3 Select loner stings care opi re COM in use Receive Bytes COMS in use COMMS i E Transmit Bytes COM11 COM12 COM13 BM Options COM14 Miscellaneous Options Select lower settings to corre CONN ro COM17 Serial Printer Latency Timer msec COMIS Cancel If Power Off COM20 Event On Surprise Removal Timeouts Set RTS On Close COM22 COM23 Disable Modem Ctrl At Startup Minimum Read Timeout mse cOM24 COM25 Minimum Write Timeout mse COM26 Selective Suspend Idle Timeout secs S COM27 COM28 COM29 COM30 v O eee Lx Defaults m d rates 0 00 000g Figure 122 Device Manager Advanced Setting Window Shows COM1 thru COM9 In Use However the Device Manager window shows only a few of
73. screen capture of the VacuumPlus window will be pasted into the Paint program From the File menu select the Save As command Type Sweep1 into the File Name box and select JPEG File Interchange Format jpg Jpeg from the Save As Type drop down list By default Paint will save the file in the My Pictures Folder To save the file in a different location select a folder from the drop down list under the Save In box Click the Save button to save the screen capture Extorr Inc 307 Columbia Road New Kensington PA 15068 79 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 2 Screen Captures showing Common Problems This section contains Screen Captures of the Outputs Tab and Mass Sweep Graph during normal operation and with common problems present E 2 1 Normal Operation Et vacuum Plus 1010 CE eT Oc8 2S 6 com asnar Total Pressure 4 879 x10 8 torr Pirani Pressure 1 00x10 4 torr Mass Tabe Plot Configuration Communications Operating parameters Calibration parameters l Diagnostic Outputs Electronics Temperature 28 4 C sem 0 53 Ohm Soucel curent 1 112967 ma Reference 2 45 to 255 Source curent 0 887691 ma Ground ref 02 RF Amp 0t0 20 0 4111254 vots Focust FB Focust 19 97 Pirani Temp 1 to 1 0 0 137965 volts Repeller 2 0 Elec_En 7
74. section 7 Maintenance for detailed instructions on replacing the filament The filament may also trip if a non conductive coating is on the source grid The coating may not allow the full 2 mA of emission to be produced and the filament will trip after only a few seconds of operation Try reducing the Filament Emission to 0 1 mA on the Operating Parameters tab to see if the filament will turn on Even a very dirty source grid will usually be able to support 0 1 mA of emission If the filament turns on at the reduced emission the mass peaks will be much smaller but the contamination may burn off as the ionizer heats up Leave the filaments on for a minute or so and then try to degas for about 1 minute After degassing set the Filament Emission on the Operating Parameters back up to 2 mA If the filament still does not turn on the ionizer may need to be replaced See section 7 Maintenance for detailed instructions on replacing the ionizer and filament The ionizer may become contaminated over time causing the filaments to trip Operating the ionizer in an oxidizing environment for long periods of time will form an insulating coating on the surfaces and the sensitivity will decrease The RGA will operate at 10 Torr and give meaningful results but if the major components are water or oxygen the stainless steel parts will Extorr Inc 307 Columbia Road New Kensington PA 15068 193 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr
75. support extorr com 147 Extorr Inc www extorr com The last data point recorded in the sweep occurs about half an amu above the High mass setting This happens at 21 5 amu in this example and is shown in row 225 This is the end of the single sweep recorded in this file Other files may have been recorded that contain the data from additional sweeps 223 224 Y HOME INSERT 2015 09 09 11 24 44 433 2015 09 09 11 24 44 447 2015 09 09 11 24 44 461 2015 09 09 11 24 44 475 2015 09 09 11 24 44 489 2015 09 09 11 24 44 503 2015 09 09 11 24 44 517 2015 09 09 11 24 44 531 2015 09 09 11 24 44 545 2015 09 09 11 24 44 558 2015 09 09 11 24 44 572 2015 09 09 11 24 44 586 2015 09 09 11 24 44 600 2015 09 09 11 24 44 614 225 2015 09 09 11 24 44 628 MassSpecData 00404 20150909 112 PAGE LAYOUT Se 19 75 19 875 20 20 125 20 25 20 375 20 5 20 625 20 75 20 875 21 21 125 21 25 21 375 21 5 a 21 3 C 5 65E 11 8 65E 11 1 04E 10 5 71E 11 9 47E 11 6 10E 11 2 12E 11 7 62E 11 8 42E 11 2 32E 11 9 09E 11 7 25E 11 5 93E 11 7 34E 11 2 26E 11 VIEW MassSpecData 00404 20150909 112443TimeAndDateFormated csv Excel 7 D a Figure 160 Record Data in Excel Data at the End of the Sweep Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Ci os john hackwelder 100 148 Extorr Inc www extorr com A graph may
76. the graph window controls the position of the zero line of the Y axis on the graph Move the slider toward the top of the window to shift the zero line down to the bottom of the graph or move the slider toward the bottom of the window to shift the zero line up to the top of the graph x Vacuum Plus 404 BF File Edit View Window Control Help rg 0 l a Total Pressure 5 048x10 7 torr Pirani Pressure 1 00x104 torr Q 4 Start Recording s s Mass Table _ _ Mass 28 Total Pressure Graph Zero Slider Moved Toward Top of Window Seconds Figure 40 Trend Scan Graph Zero Slider The Graph Width Slider controls the portion of a complete a Trend Scan that is displayed in the graph window Moving the slider all the way to the left side of the window will display the entire Trend Scan This is the default position of the Width Slider amp Vacuum Plus 404 BF File Edit View Window Control Help rg Do Total Pressure 5 048x10 7 torr Pirani Pressure 1 00x104 torr Q J Start Recording a a Mass Table a L Helium Mass 28 m _ Mass 32 Total Pressure Seconds Graph Width Slider At Left Side of Window Figure 41 Trend Scan Graph Width Slider at Left Side Extorr Inc 307 Columbia Road New Kensington PA 15068 AA TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Moving the Width Slider toward the right side
77. the ions will make it through the rods In the D region both ions make it through the rods In the B region only the high mass ion makes it through the rods and in C only the low mass ion makes it through the rods Extorr Inc 307 Columbia Road New Kensington PA 15068 63 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com A second example of this concept is of the stability diagrams of the first 5 masses Note the 5 similar stability diagrams for the first 5 ion masses If we sweep the RF and DC voltages along line A we get the mass spectrum shown as a Note that the peaks are flat topped and thin I have chosen an ion abundance at each mass such that mass is larger mass 2 3 and 5 are about half this size and mass 4 is the largest peak When we sweep along B we get the spectrum shown as b The peaks are now uniformly wider So we can control the peak widths with our sweep line If we want to change peak widths we could sweep as in C and get the mass spectrum c Note that the mass 1 peak is no longer as tall as mass 2 This is the situation when a peak is said to be over resolved You may note that theses peaks do not look like real world peaks They are indeed idealized In the real world the corners are smoothed Armed with these ideas Figure 63 Stability Diagrams and Mass Spectra of how mass sweeps work we can look at how the parameter settings can change individual pe
78. the right and resize it if necessary so that the values in column C are visible 2015 09 16 12 08 06 202 2015 09 16 12 08 06 323 2015 09 16 12 08 06 445 2015 09 16 12 08 06 566 2015 09 16 12 08 06 688 2015 09 16 12 08 06 809 2015 09 16 12 08 06 931 2015 09 16 12 08 0 2015 09 16 12 08 0 2015 09 16 12 08 0 2015 09 16 12 08 0 2015 09 16 12 08 07 2015 09 16 12 08 0 2015 09 16 12 08 07 2015 09 16 12 08 0 2015 09 16 12 06 5 2015 09 16 12 06 5 2015 09 16 12 06 5 2015 09 16 12 06 5 2015 09 16 12 06 5 1 60E 07 1 40E 07 1 20E 07 1 00E 07 8 00E 08 6 00E 08 4 00E 08 2 00E 08 0 00E 00 2015 09 16 12 06 5 2015 09 16 12 06 5 2015 09 16 12 06 55 976 2015 09 16 12 06 56 097 2015 09 16 12 06 56 219 2015 09 16 12 06 56 341 2015 09 16 12 06 56 462 2015 09 16 12 06 56 584 MassSpecData 00404 20150916 120655 xlsx Excel f B Chart Title CHART TOOLS fH 444444444444444444444444444444444444444444444444444444444444 14 14 14 14 14 14 AVERAGE 2 000000009 Y MassSpecData 00404 20150916 120655 xlsx Excel 2 22E 08 2 22E 08 2 22E 08 2 21E 08 2 20E 08 2 21E COUNT 1200 08 MassSpecData 00404 20150916 120 SUM 2400 000011 www extorr com Ciis HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack 2 E E M t CHARTTOOLS fH 100 Figure 221 Record Data in Excel with Time Intensity Chart m x
79. the wires along their entire length and if necessary carefully bend the wires away from the Quadrupole Frame to remove the short circuit Do not bend the wires too far or they might short to the vacuum chamber wall Also check for adjacent wires shorted to each other If necessary bend the wires away from each other to remove the short circuit Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between Quadrupole Frame and all six wires Also check for shorts between adjacent wires See Section 4 3 Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 105 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix F Electron Multiplier Installation The Extorr Multiplier Upgrade Kit consists of an Electron Multiplier and a High Voltage Power Supply module The Electron Multiplier mounts on the high vacuum side of Quadrupole Probe Flange and the High Voltage Power Supply is installed inside the Command and Control Unit F 1 Unpack the Shipment Carefully unpack your Multiplier Upgrade Kit The shipment includes these components 1 Electron Multiplier in Sealed Plastic Bag 2 High Voltage Power Supply Module 3 4 40 Nut for Power Supply Module 4 Glove 5 Copper Gasket If your shipment does not have all of these items call Extorr Inc at 724 337 3000 If anything appears to have been damaged in shipment contact the shipp
80. total pressure reading See Appendix B Gauge Sensitivity to Differing Gasses for more information The life of the filament is also shortened if operated at high pressures because it must run hotter to maintain the electron emission current speeding up the decomposition of the thoria coating In many cases a pressure reduction system made up of a vacuum pump a manifold and a glass capillary or small orifice may be the only practical way to analyze gasses at high pressures Extorr Inc 307 Columbia Road New Kensington PA 15068 195 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com www extorr com Extorr Inc Appendix K Integrating Capacitor Causing Very Noisy Baseline For RGAs made prior to April 2013 a very noisy baseline may be caused by conductive material becoming lodged in the air gap of the current integrating capacitor on the Electrometer PCB To access the board remove the black box cover by unscrewing the six Phillips head screws around the perimeter and then remove the two thumb screws N br i i T y an a p kd A p L m amp A aa gt gt hid a A T r ar r 7 Pi MMT rie i e Electrometer i PCB Figure 236 CCU Exploded View The center board in the stack 1s the Electrometer PCB The air dielectric capacitor on this PCB 1s formed by 2 concentric tubes soldered to the board The larger outer tube is approx 5 mm in diameter and 1 cm long
81. use of Compression Mounts WARNING Do not use a compression mount quick connect for attaching the Analyzer probe to the vacuum system in applications that may develop positive pressures Positive pressures may cause the probe to be blown out of a compression fitting and damage equipment and injure personnel Extorr Inc 307 Columbia Road New Kensington PA 15068 6 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 2 Overview 2 1 General Description The Extorr XT Series instruments are quadrupole residual gas analyzers which also include an enhanced Pirani gauge as well as a hot cathode ion gauge The Pirani gauge makes vacuum measurements based on thermal conductivity of the gas environment The ion gauge uses electron impact ionization of residual gases to measure ion currents related to pressure The quadrupole gas analyzer uses precision mechanics and electronics to measure ion currents due to the partial pressures of the residual gases in the vacuum chamber The Pirani starts operation at atmospheric pressure the ion gauge at a nominal 10 torr and the quadrupole starts at a nominal 10 torr pressure The ion gauge will measure total pressures to its x ray limit of 2x10 torr and the quadrupole can measure partial pressures well below 10 torr There are three XT models The XT100 operates from 1 to 100 amu The XT200 operates from 1 to 200 amu The XT300 operates from to 300 a
82. will contain 600 groups of the seven enabled masses in the Mass Table 4200 Trend Data Sample Points The Trend Scan begins at row 138 in this example and would end at row 4337 if a complete Trend Scan was recorded in the data logging file If the data logging file ends before row 4337 the Stop Recording button was clicked before a complete Trend Scan was completed Extorr Inc 307 Columbia Road New Kensington PA 15068 179 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Scrolling through the data logging file in this example we find that the data continues all the way to row 4337 which indicates that at the complete Trend Scan has been recorded 4323 4324 4325 4326 4327 4328 4329 4330 4331 4332 4333 4334 4335 4336 4337 Y HOME INSERT A 2015 09 16 12 08 07 764 2015 09 16 12 08 07 781 2015 09 16 12 08 07 799 2015 09 16 12 08 07 816 2015 09 16 12 08 07 834 2015 09 16 12 08 07 851 2015 09 16 12 08 07 868 2015 09 16 12 08 07 886 2015 09 16 12 08 07 903 2015 09 16 12 08 07 920 2015 09 16 12 08 07 938 2015 09 16 12 08 07 955 2015 09 16 12 08 07 972 2015 09 16 12 08 07 990 2015 09 16 12 08 08 007 PAGE LAYOUT MassSpecData 00404 20150916 120655 xlsx Excel fe 14 18 28 32 40 999 6 49E 07 FORMULAS w O x DATA REVIEW VIEW DEVELOPER john hack 7 9 16 2015 12 08 08 PM C 6 49E 07 1 54E 09 2 21E 08 1 01E 07 4 03E 07 8 85E 08
83. with Chart Filters Select Data Source Window The Edit Series window opens Series name Select Range Series values 1 Figure 192 Record Data in Excel with Chart Filters Edit Series Window Extorr Inc 307 Columbia Road New Kensington PA 15068 167 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Type Mass 18 in the Series name box and then click on the Select Values button in the Series values box Edit Series Series name Mass 13 Series values l Figure 193 Record Data in Excel Edit Series with Series Name Entered The Edit Series Values box is displayed Edit Series Figure 194 Record Data in Excel Edit Series Values Box Scroll through the data until the first Mass 18 value is found and then click in the cell in column C to select it S CHART TOOLS HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack C429 v fx A B c D E F G H 1 Be 415 2015 09 11 09 18 32 941 14 6 15E 10 416 2015 09 11 09 18 33 149 14 6 23E 10 417 2015 09 11 09 18 33 358 14 6 50E 10 418 2015 09 11 09 18 33 566 14 6 60E 10 419 2015 09 11 09 18 33 774 14 6 32E 10 420 2015 09 11 09 18 33 983 14 6 20E 10 421 2015 09 11 09 18 34 191 14 5 17E 10 422 2015 09 11 09 18 34 399 14 5 57E 10 423 2015 09 11 09 18 34 608 14 6 28E 10 424 2015 09 11 09 18 34 816 14 5 70E 10 Edit Series 425 2
84. 0 Figure 232 Record Data in Excel with Chart Updated Repeat the steps above for all 600 values of the remaining Masses to add their data to the existing chart Extorr Inc 307 Columbia Road New Kensington PA 15068 189 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc A Chart with all the data added is shown below fe B E 2015 09 16 12 08 06 202 2015 09 16 12 08 06 323 2015 09 16 12 08 06 445 2015 09 16 12 08 06 566 2015 09 16 12 08 06 688 2015 09 16 12 08 06 809 2015 09 16 12 08 06 931 2015 09 16 12 08 07 052 2015 09 16 12 08 07 174 2015 09 16 12 08 07 295 2015 09 16 12 08 07 417 2015 09 16 12 08 07 538 2015 09 16 12 08 07 660 2015 09 16 12 08 07 781 2015 09 16 12 08 07 903 2015 09 16 12 06 55 125 2015 09 16 12 06 55 247 2015 09 16 12 06 55 368 2015 09 16 12 06 55 490 2015 09 16 12 06 55 611 2015 09 16 12 06 55 733 2015 09 16 12 06 55 854 2015 09 16 12 06 55 976 2015 09 16 12 06 56 097 2015 09 16 12 06 56 219 2015 09 16 12 06 56 341 2015 09 16 12 06 56 462 2015 09 16 12 06 56 584 See ee ee DD BREEREREEREREERES 14 1 53E 09 1 48E 09 1 52E 09 1 60E 09 1 52E 09 1 56E 09 1 68E 09 1 59E 09 1 55E 09 1 51E 09 1 55E 09 1 58E 09 1 51E 09 1 54E 09 1 51E 09 2 20E 08 2 24E 08 2 24E 08 2 22E 08 2 22E 08 2 21E 08 2 22E 08 2 22E 08 2 22E 08 2 22E 08 2 21E 08 2 20E 08 2 21E 08 7 00E 07 6 00E 07 5 00E 07 4 00E 07 3 00E 07 2 00E 07 1 00E 07 0
85. 0 3 74E 10 2015 09 16 12 06 57 781 3 08E 10 2015 09 16 12 06 57 903 3 51E 10 2015 09 16 12 06 58 025 3 49E 10 2015 09 16 12 06 58 146 3 75E 10 2015 09 16 12 06 58 268 3 44E 10 2015 09 16 12 06 58 389 MassSpecData 00404 20150916 120 AVERAGE 339405 11 05 COUNT 12726 Figure 217 Record Data in Excel Data Sorted by Mass Value in Column B In this example the complete Trend Scan contains 600 Trend Data Samples so to graph it select the Mass values in column B and the Intensity values in column C for rows 1 to 600 MassSpecData 00404 20150916 120655 xIsx Excel 7 amp O xX HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack P i 2015 09 16 12 08 06 202 2015 09 16 12 08 06 323 2015 09 16 12 08 06 445 2015 09 16 12 08 06 566 2015 09 16 12 08 06 688 2015 09 16 12 08 06 809 2015 09 16 12 08 06 931 2015 09 16 12 08 07 052 2015 09 16 12 08 07 174 2015 09 16 12 08 07 295 2015 09 16 12 08 07 417 2015 09 16 12 08 07 538 2015 09 16 12 08 07 660 2015 09 16 12 08 07 781 2015 09 16 12 08 07 903 2015 09 16 12 06 55 125 14 2 20E 08 2015 09 16 12 06 55 247 14 2 24E 08 2015 09 16 12 06 55 368 14 2 24E 08 2015 09 16 12 06 55 490 14 2 22E 08 2015 09 16 12 06 55 611 14 2 22E 08 2015 09 16 12 06 55 733 14 2 21E 08 2015 09 16 12 06 55 854 14 2 22E 08 2015 09 16 12 06 55 976 14 2 22E 08 2015 09 16 12 06 56 097 14 2 22E 08 2015 09 16 12 06 56 219 14 2
86. 00E 00 Chart Title 4444444444444444444444444444444444444444444444A MassSpecData 00404 20150916 120 100 www extorr com Figure 233 Record Data in Excel Chart with All Data from the Complete Trend Scan After resizing and formatting the chart the Trend Scan data is displayed HOME INSERT 2015 09 16 12 08 06 202 21 a 2 7 00E 07 E a a 6 00E 07 2 21 E 5 00E 07 2 2 z 4 00E 07 2 21 E 3 00E 07 2X 21 21 2 00E 07 2 21 21 1 00E 07 a E E E 2015 09 16 12 06 56 462 2015 09 16 12 06 56 584 PAGE LAYOUT f B 4 14 14 MassSpecData 00404 20150916 120655 xlsx Excel E 1 53E 09 FORMULAS DATA REVIEW VIEW DEVELOPER Helium Leak Checking 2 20E 08 2 21E 08 MassSpecData 00404 20150916 120 ee Vass 4 Mass 14 ome Mass 18 Mass 28 Vass 32 Mass 40 em Ota Pressure Figure 234 Record Data in Excel Chart with All Data from the Complete Trend Scan Formatted Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 190 Extorr Inc www extorr com The plot of Mass 4 Helium is difficult to see because several of the other masses are about the same intensity Changing the plot color of Mass 32 to purple while removing the plots for Mass 14 Mass 18 and Mass 40 makes the Mass 4 data much easier to see MassS
87. 015 09 11 09 18 35 024 14 6 11E 10 426 2015 09 11 09 18 35 233 14 5 89E 10 427 2015 09 11 09 18 35 441 14 5 46E 10 428 2015 09 11 09 18 35 649 14 _5 81E 10 429 2015 09 11 09 17 06 193 181_6 61E 091 430 2015 09 11 09 17 06 401 18 6 67E 09 431 2015 09 11 09 17 06 610 18 6 62E 09 432 2015 09 11 09 17 06 818 18 6 64E 09 433 2015 09 11 09 17 07 026 18 6 69E 09 434 2015 09 11 09 17 07 235 18 6 69E 09 435 2015 09 11 09 17 07 443 18 6 69E 09 436 2015 09 11 09 17 07 651 18 6 68E 09 437 2015 09 11 09 17 07 860 18 6 76E 09 438 2015 09 11 09 17 08 068 18 6 63E 09 439 2015 09 11 09 17 08 276 18 6 71E 09 440 2015 09 11 09 17 08 485 18 6 68E 09 441 2015 09 11 09 17 08 693 18 6 64E 09 442 2015 09 11 09 17 08 901 18 6 65E 09 RgaTrendDatal 4 gt POINT 3 Figure 195 Record Data in Excel Start of Mass 18 Data for First Trend Scan Extorr Inc 307 Columbia Road New Kensington PA 15068 168 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Hold down the Shift key and select the first 100 values from the Mass 18 data in column C H S s 7 CHART TOOLS HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT C429 X A 509 2015 09 11 09 17 22 860 510 2015 09 11 09 17 23 068 511 2015 09 11 09 17 23 276 512 2015 09 11 09 17 23 485 513 2015 09 11 09 17 23 693 514 2015 09 11 09 17 23 901 515 2015 09 11 09 17 24 110 516 2015 09 11 09 17 2
88. 015 09 16 12 06 55 993 18 1 04E 07 1209 2015 09 16 12 06 56 115 18 1 03E 07 1210 2015 09 16 12 06 56 236 18 1 03E 07 1211 2015 09 16 12 06 56 358 18 1 03E 07 1212 2015 09 16 12 06 56 479 18 1 03E 07 1213 2015 09 16 12 06 56 601 18 1 03E 07 1214 2015 09 16 12 06 56 722 18 1 03E 07 MassSpecData 00404 20150916 120 lt POINT 23 Figure 229 Record Data in Excel End of Mass 14 Data for the Complete Trend Scan Selected Click on the Select Data button on the right side to accept the selected cells POINT 3 gt H S9 ers CHART TOOLS HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack C601 v fe A B C D 2 G H I 1187 2015 09 16 12 08 06 341 14 2 20E 08 1188 2015 09 16 12 08 06 462 141 2 20E 08 1189 2015 09 16 12 08 06 584 14 2 19E 08 1190 2015 09 16 12 08 06 705 14 2 22E 08i 1191 2015 09 16 12 08 06 827 14i 2 21E 08 1192 2015 09 16 12 08 06 948 141 2 20E 08 1193 2015 09 16 12 08 07 070 14 2 20E 08 1194 2015 09 16 12 08 07 191 14 2 19E 08 1195 2015 09 16 12 08 07 313 14 2 20E 081 1196 2015 09 16 12 08 07 434 14i 2 20E 08 1197 2015 09 16 12 08 07 556 14i 2 22E 08 1198 2015 09 16 12 08 07 677 14 2 22E 08 1199 2015 09 16 12 08 07 799 14 2 21E 081 Edit Series 1200 2015 09 16 12 08 07 920 14 _2 19E 08 Seales maar 1201 2015 09 16 12 06 55 143 18 1 03E 07 jisi ENAR 1202 2015 09 16 12 06 55 264 18 1 05E 07 Series values 1203
89. 05 COUNT 12726 x i C E O H a 100 Figure 212 Record Data in Excel All Data Selected for Sort Next click on Data to display the ribbon and then select Sort Ho ers FILE HOME INSERT Bl 2 2 Connections P rti Get External Refresh roperties Data All X Edit Links Connections MassSpecData 00404 20150916 120655 xIsx Excel FORMULAS AJ Y Y Clear g gt Z Sort Filt 2 Reapply ilter o AL Ye Advanced Columns 4 Data Validation nd Sort amp Filter PAGE LAYOUT DATA f Flash Fill o Data Tools RBEBwCernaunewn In Progress TestConfigs 404 152006 cfg 603c1 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 MassSpecData 00404 20150916 120 COUNT 12726 EA AVERAGE 339405 11 05 B Remove Duplicates E A O x REVIEW VIEW DEVELOPER john hack AO aS Outline kg C O m 100 Figure 213 Record Data in Excel showing Data Ribbon Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 181 Extorr Inc www extorr com The Sort window is displayed moea Sort On jee e TamfAtoz ad Figure 214 Record Data in Excel Data Sort Window Click on the arrow next to the Sort by box under column and select Column B from the list Sort On x Values e AtoZ mea Figure 215 Record Data in Excel Data Sort Window
90. 0523 COUNT 4326 SUM 177506722 The Format Cells window will open Format Cells Figure 206 Record Data for Trend Mode in Excel Format Cells Window TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Sample General format cells have no specific number format Percentage Fraction Scientific Extorr Inc 307 Columbia Road New Kensington PA 15068 www extorr com 176 Extorr Inc www extorr com Click on Custom in the Category list Many custom formatting options are displayed and the General option is highlighted in the list and shown in the Type Box Format Cells Number Alignment Font Border Fin Protection Category General Number Currency Accounting Date Time Percentage Fraction Scientific Text ie Tr Type the number format code using one of the existing codes as a starting point Sample rcNormalPosition bottom 934 Type General 0 0 00 0 0 00 0_ 0 0_ Red 0 0 00_ 0 00 0 00_ Red 0 00 S 0_ S 0 0_ Red S 0 Lox J _cancet_ Figure 207 Record Data for Trend Mode in Excel Format Cells Custom Category Selected Click in the Type box and delete General and then enter yyyy mm dd hh mm ss 000 into the box Format Cells Number Alignment Category General Number Currency Accounting Date Time Per
91. 06 2 18 6 61E 09 17 06 2 28 2 71E 07 17 06 3 32 5 74E 08 17 06 3 44 5 65E 10 17 06 3 999 5 53E 07 17 06 4 14 1 52E 08 17 06 4 18 6 67E 09 17 06 4 28 2 72E 07 17 06 5 32 5 77E 08 17 06 5 44 4 96E 10 17 06 5 5 49E 07 17 06 6 14 1 51E 08 17 06 6 18 6 62E 09 17 06 6 28 2 72E 07 RgaTrendDatal F m 100 Figure 167 Record Data for Trend Mode in Excel at the Start of the Date Mass Intensity Data Extorr Inc 307 Columbia Road New Kensington PA 15068 154 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The entire column is highlighted Right click on any cell in column A and then select Format Cells from the drop down menu RgaTrendDatal csv Excel wW HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW fx rcNormalPosition bottom 715 C D E F G q rcNrmalPosition bottom 715 gt lt Windc wParameters gt lt PlotParhmeters EE Calibri ju aF pr 0 00 a ri v fo 3 0 Cut Copy Paste Options pe pih a E Paste Special Insert Delete Clear Contents Format Cells Column Width Hide Unhide 999 5 49E 07 14 1 51E 08 18 6 62E 09 28 2 72E 07 RgaTrendDatal AVERAGE 42258 3874 COUNT 2694 SUM 108519538 8 O x DEVELOPER john hack PA Figure 168 Record Data for Trend Mode in Excel Format Cells Drop Down Menu The Format Cells window will open Format Cells
92. 09 2015 09 11 09 17 27 749 1 49E 08 2 00E 09 2015 09 11 09 17 27 958 1 51E 08 0 00E 00 d 2015 09 11 09 17 28 166 1 50E 08 1414141414141414141414141414141414141414 2015 09 11 09 17 28 374 1 50E 08 2015 09 11 09 17 28 583 1 52E 08 2015 09 11 09 17 28 791 1 51E 08 2015 09 11 09 17 28 999 1 50E 08 2015 09 11 09 17 29 208 1 50E 08 2015 09 11 09 17 29 416 1 50E 08 113 2015 09 11 09 17 29 624 1 50E 08 114 2015 09 11 09 17 29 833 1 50E 08 115 2015 09 11 09 17 30 041 1 51E 08 RgaTrendDatal 100 Figure 199 Record Data in Excel with Chart Updated Repeat the steps above for the first 100 values of all the remaining Masses to add their data to the existing chart Extorr Inc 307 Columbia Road New Kensington PA 15068 170 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com A Chart with all the data added is shown below RgaTrendDatal xlsx Excel CHARTTOOIS 7 fH OF XxX HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack 2 f B C 2015 09 11 09 17 24 908 14 1 49E 08 2015 09 11 09 17 25 117 14 1 49E 08 2015 09 11 09 17 25 325 14 1 49E 08 2015 09 11 09 17 25 533 14 1 48E 08 2015 09 11 09 17 25 742 14 1 49E 08 2015 09 11 09 17 25 950 14 1 48E 08 2015 09 11 09 17 26 158 14 1 49E 08 2015 09 11 09 17 26 367 14 1 49E 08 2015 09 11 09 17 26 575 14 1 49E 08 Chart Title 2015 09 11 09 1
93. 09 11 09 17 25 117 2015 09 11 09 17 25 325 2015 09 11 09 17 25 533 2015 09 11 09 17 25 742 2015 09 11 09 17 25 950 2015 09 11 09 17 26 158 2015 09 11 09 17 26 367 2015 09 11 09 17 26 575 2015 09 11 09 17 26 783 2015 09 11 09 17 27 124 2015 09 11 09 17 27 333 2015 09 11 09 17 27 541 2015 09 11 09 17 27 749 2015 09 11 09 17 27 958 2015 09 11 09 17 28 166 2015 09 11 09 17 28 374 2015 09 11 09 17 28 583 2015 09 11 09 17 28 791 2015 09 11 09 17 28 999 2015 09 11 09 17 29 208 2015 09 11 09 17 29 416 2015 09 11 09 17 29 624 2015 09 11 09 17 29 833 14 14 c FORMULAS DATA REVIEW VIEW DEVELOPER john hack 1 50E 08 14 1 49E 08 14 1 50E 08 1 14 1 50E 08 14 1 49E 08 14 1 49E 08 1 49E 08 1 48E 08 1 49E 08 1 48E 08 1 49E 08 1 49E 08 1 49E 08 RgaTrendDatal AVERAGE 7 000000007 1 49E 081 1 47E 08 1 49E 08 1 48E 08 1 49E 08 1 51E 08 1 50E 08 1 50E 08 1 52E 08 1 51E 08 1 50E 08 1 50E 08 1 50E 08 1 50E 08 1 50E 08 COUNT 200 SUM 1400 000001 H m Figure 185 Record Data in Excel Mass 14 Data for First Trend Scan Selected Extorr Inc 307 Columbia Road New Kensington PA 15068 164 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Click on Insert to display the ribbon and then click on the Expand arrow in the Chart section to open the Insert Chart window
94. 0916 120 100 Figure 203 Record Data in Trend Mode CSV File Opened in Excel Extorr Inc 307 Columbia Road New Kensington PA 15068 174 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Configuration parameters end with the lt ConfigurationData gt label at cell A137 in this example The data below the configuration parameters starting in row 138 in this example are the Date Time Mass and Intensity values from the recorded scan The Date Time values are in column A the Mass values in amu are found in column B and the Intensity values in torr are in column C The default cell formatting in Excel does not display the Date Time values correctly This is a problem with the way that Excel interprets the information even though the ASCII data in the CSV file clearly shows the Year Month Day and Time To change the formatting for column A first select all values in the column by clicking on the label at the top of the column MassSpecData 00404 20150916 120655 csv Excel eos O X HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack fx A B C D 125 rcNormalPosition bottom 934 126 gt 127 lt WindowParameters gt 128 129 lt PlotParameters 130 BkColor Pale green 131 LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 135 gt 136 137 lt ConfigurationData gt 06 55 1 4 2 91E 10 06 55 1 1
95. 0E 07 Total Pressure 2015 09 2015 09 2015 09 1 00E 07 2015 09 2015 09 ee a 2015 09 0006 00 EA NE 2015 09 Time 2015 09 2015 09 11 09 17 30 458 14 1 51E 08 2015 09 11 09 17 30 666 14 1 49E 08 RgaTrendDatal 5 00E 07 4 00E 07 ams MViass 14 a Mass 18 m 100 Figure 201 Record Data in Excel Chart with All Data from First Trend Scan Formatted Extorr Inc 307 Columbia Road New Kensington PA 15068 171 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com A data logging file created in the Trend mode may contain several Trend Scans but it is actually a continuous series of measurements made over the time it was recorded The difference between the last data point in one scan and the first data point of the following scan is just that they are separated in time The exact beginning and end points of the individual scans in the Trend mode are of little importance unless data must be captured for a specific amount of time Data logging files containing numerous Trend Scans as in the example above are also created in the To Multiple Files mode using the On The Hour At Midnight or After N Sweeps options Extorr Inc 307 Columbia Road New Kensington PA 15068 172 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com H 4 Data Saved to Multiple Files Once Per Scan in the Trend Mode The MassSpecDat
96. 1 24 43 656 2015 09 09 11 24 43 670 2015 09 09 11 24 43 683 2015 09 09 11 24 43 697 2015 09 09 11 24 43 711 2015 09 09 11 24 43 725 2015 09 09 11 24 43 739 2015 09 09 11 24 43 753 3 2015 09 09 11 24 43 767 MassSpecData 00404 20150909 112 MassSpecData 00404 20150909 112443TimeAndDateFormated csv Excel fi Caos PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder fx LogYAxis 0 C D 10 625 9 16E 11 10 75 8 39E 11 10 875 3 71E 11 11 4 95E 11 11 125 2 74E 12 11 25 4 56E 11 11 375 7 60E 11 11 5 5 22E 11 11 625 6 25E 11 11 75 6 18E 12 11 875 7 74E 11 12 7 80E 11 12 125 5 34E 11 12 25 7 28E 11 12 375 6 30E 11 12 5 7 66E 11 12 625 5 53E 11 12 75 1 09E 10 12 875 5 59E 13 13 1 00E 10 13 125 6 00E 11 13 25 2 99E 11 13 375 7 96E 11 13 5 9 63E 11 13 625 3 30E 11 13 75 1 39E 10 m _ 100 Figure 159 Record Data in Excel Data at the Start of the Sweep With the RGA in the Mass Sweep mode a sweep begins about half an amu below the Low mass setting In this example the Low mass was set to 11 so the first data point recorded is at 10 625 amu in row 138 above The intensity value recorded at 10 625 amu is 9 16E 11 torr in this example With a Samples amu setting of 8 on the Sweep parameters tab as in this example an intensity measurement occurs every 0 125 amu Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL
97. 15 09 08 10 22 19 156 2015 09 08 10 22 19 163 2015 09 08 10 22 19 170 2015 09 08 10 22 19 177 2015 09 08 10 22 19 184 2015 09 08 10 22 19 316 2015 09 08 10 22 19 322 2015 09 08 10 22 19 329 2015 09 08 10 22 19 336 2015 09 08 10 22 19 343 2015 09 08 10 22 19 350 2015 09 08 10 22 19 357 2015 09 08 10 22 19 364 2015 09 08 10 22 19 371 2015 09 08 10 22 19 378 2015 09 08 10 22 19 385 2015 09 08 10 22 19 392 2015 09 08 10 22 19 399 2015 09 08 10 22 19 406 PAGE LAYOUT RgaSweepData2TimeAndDateFormatCorrected csv Excel FORMULAS 50 2 1 17E 11 50 3 3 47E 11 50 4 4 42E 11 50 5 4 42E 11 50 6 9 76E 12 50 7 1 54E 11 50 8 4 69E 11 50 9 5 88E 11 51 4 73E 11 51 1 7 04E 11 1 2 2 12E 11 51 3 1 40E 11 51 4 1 11E 11 51 5 5 88E 11 0 61 3 98E 10 0 7 1 52E 09 0 8 1 61E 09 0 9 1 95E 09 1 2 23E 09 1 1 2 28E 09 1 2 2 00E 09 1 3 1 36E 09 14 4 37E 10 1 5 2 63E 10 1 6 6 29E 10 1 7 1 11E 09 1 8 1 44E 09 1 9 1 45E 09 RgaSweepData2TimeAndDateFormatC DATA REVIEW VIEW 7 amp T Extorr Inc 307 Columbia Road New Kensington PA 15068 Ci john hackwelder 100 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Figure 145 Record Data in Excel Data at the Start of Fourth Sweep 137 Extorr Inc www extorr com In the Record Data To One File mode data is appended to the file until the Stop Recording button is clicked So the data logging file may contain
98. 15 09 11 09 18 09 266 2015 09 11 09 18 09 300 2015 09 11 09 18 09 335 2015 09 11 09 18 09 370 2015 09 11 09 18 09 404 2015 09 11 09 18 09 439 2015 09 11 09 18 09 474 2015 09 11 09 18 09 509 RgaTrendDatal PAGE LAYOUT fe 44 999 14 18 28 32 999 14 18 28 32 a4 999 4 09E 07 14 18 28 32 44 999 14 18 28 32 44 999 14 18 FORMULAS DATA 9 11 2015 9 18 09 AM C 5 45E 10 4 93E 07 1 37E 08 8 14E 09 2 42E 07 5 13E 08 5 96E 10 4 51E 07 1 28E 08 8 30E 09 2 27E 07 4 79E 08 5 36E 10 1 13E 08 8 68E 09 2 00E 07 4 21E 08 5 04E 10 3 52E 07 1 08E 08 8 94E 09 1 87E 07 3 96E 08 4 45E 10 3 19E 07 1 00E 08 9 17E 09 D REVIEW VIEW DEVELOPER john hack X AVERAGE 346059 06 03 COUNT 3 SUM 1038177 18 09 E H _ 100 www extorr com Figure 176 Record Data in Excel Last Trend Data Sample Point at End of Third Trend Scan A fourth complete Trend Scan should end at row 2537 RgaTrendDatal xlsx Excel 2524 2525 2526 2527 2528 2529 2530 2531 2532 2533 2534 2535 2536 2537 2538 2539 2540 2541 2542 2543 2544 2545 2546 2547 2548 2549 2550 2551 v HOME INSERT A 2015 09 11 09 18 29 404 2015 09 11 09 18 29 439 2015 09 11 09 18 29 474 2015 09 11 09 18 29 509 2015 09 11 09 18 29 543 2015 09 11 09 18 29 578 2015 09 11 09 18 29 613 2015 09 11 09 18 29 647 2015 09 11 09 18 29 682 2015 0
99. 15 9 17 27 AM c 5 73E 08 6 19E 10 5 40E 07 1 49E 08 7 56E 09 2 69E 07 5 72E 08 6 66E 10 5 39E 07 1 49E 08 7 57E 09 2 69E 07 5 71E 08 5 47E 10 5 33E 10 5 45E 07 1 49E 08 7 65E 09 2 68E 07 5 70E 08 5 75E 10 5 41E 07 1 48E 08 COUNT 3 D SUM 1038177 17 27 REVIEW VIEW 7 M DEVELOPER e t _ john hack m AM4 d 100 Figure 174 Record Data in Excel Last Trend Data Sample Point at End of First Trend Scan A second complete Trend Scan should end at row 1337 kd HOME INSERT A 1323 2015 09 11 09 17 47 437 1324 2015 09 11 09 17 47 471 1325 2015 09 11 09 17 47 506 1326 2015 09 11 09 17 47 541 1327 2015 09 11 09 17 47 576 1328 2015 09 11 09 17 47 610 1329 2015 09 11 09 17 47 645 1330 2015 09 11 09 17 47 680 1331 2015 09 11 09 17 47 714 1332 2015 09 11 09 17 47 749 1333 2015 09 11 09 17 47 784 1334 2015 09 11 09 17 47 819 1335 2015 09 11 09 17 47 853 1336 2015 09 11 09 17 47 888 1337 2015 09 11 09 17 47 923 1338 2015 09 11 09 17 48 091 1339 2015 09 11 09 17 48 126 1340 2015 09 11 09 17 48 161 1341 2015 09 11 09 17 48 195 1342 2015 09 11 09 17 48 230 1343 2015 09 11 09 17 48 265 1344 2015 09 11 09 17 48 300 1345 2015 09 11 09 17 48 334 1346 2015 09 11 09 17 48 369 1347 2015 09 11 09 17 48 404 1348 2015 09 11 09 17 48 438 1349 2015 09 11 09 17 48 473 1350 2015 09 11 09 17 48 508 PAGE LAYOUT fe RgaTrendDatal AVERAGE 346059
100. 2 12 7 80E 11 2015 09 09 11 24 43 586 12 125 5 34E 11 2015 09 09 11 24 43 600 12 25 7 28E 11 2015 09 09 11 24 43 614 12 375 6 30E 11 MassSpecData 00404 20150909 112 AVERAGE 1014155 24 44 COUNT 214 H s 100 Figure 158 Record Data in Excel Column A Date Time Format Corrected Extorr Inc 307 Columbia Road New Kensington PA 15068 146 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com This data file was created in the To Multiple File mode with the Once Per Scan option selected The RGA was in the Mass Sweep mode The logging file generated contains the data for one sweep The controls on the Sweep parameters tab were set for a Scan speed of 72 Sec a Low mass of 11 a High mass of 21 and a Samples amu of 8 The Date Time values are in column A the Mass values are in column B in units of amu and the Intensity values are in column C in units of torr 136 v HOME INSERT v A 137 lt ConfigurationData gt 138 139 140 2015 09 09 11 24 43 420 2015 09 09 11 24 43 433 2015 09 09 11 24 43 447 2015 09 09 11 24 43 461 2015 09 09 11 24 43 475 3 2015 09 09 11 24 43 489 2015 09 09 11 24 43 503 2015 09 09 11 24 43 517 2015 09 09 11 24 43 531 2015 09 09 11 24 43 545 2015 09 09 11 24 43 558 2015 09 09 11 24 43 572 2015 09 09 11 24 43 586 2015 09 09 11 24 43 600 2015 09 09 11 24 43 614 2015 09 09 11 24 43 628 2015 09 09 11 24 43 642 2015 09 09 1
101. 2015 09 11 09 17 24 110 516 2015 09 11 09 17 24 318 517 2015 09 11 09 17 24 526 518 2015 09 11 09 17 24 735 519 2015 09 11 09 17 24 943 520 2015 09 11 09 17 25 151 521 2015 09 11 09 17 25 360 522 2015 09 11 09 17 25 568 523 2015 09 11 09 17 25 776 524 2015 09 11 09 17 25 985 525 2015 09 11 09 17 26 193 526 2015 09 11 09 17 26 401 527 2015 09 11 09 17 26 610 528 2015 09 11 09 17 26 818 529 2015 09 11 09 17 27 159 530 2015 09 11 09 17 27 367 531 2015 09 11 09 17 27 576 532 2015 09 11 09 17 27 784 533 2015 09 11 09 17 27 992 534 2015 09 11 09 17 28 201 535 2015 09 11 09 17 28 409 536 2015 09 11 09 17 28 617 B fx c 18 7 00E 09 181 7 09E 09 18 7 06E 091 18 6 98E 09 18 7 07E 09 181 7 18E 09 181 7 16E 091 18 7 19E 091 18 7 19E 09 18 7 25E 09 181 7 29E 09 18 7 33E 091 18 7 34 09 18 7 35E 09 181 7 40E 09 181 7 43E 091 18 7 49E 051 18 7 46E 09 18 7 56E 09 181 7 57E 09 18 7 65E 09 18 7 70E 09 18 7 69E 09 18 7 62E 09 18 7 68E 09 18 7 59E 09 18 7 65E 09 RgaTrendDatal POINT 3 Series name Mass 18 Mass 18 Series values RgaTrendDatal C 429 C 529 6 61E 09 6 67 john hack 7 Figure 197 Record Data in Excel Mass 18 Data for First Trend Scan Accepted Click the OK button in the Edit Series window to return to the Select Data Source window Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1
102. 22E 08 2015 09 16 12 06 56 341 14 2 21E 08 2015 09 16 12 06 56 462 14 2 20E 08 2015 09 16 12 06 56 584 14 2 21E 08 MassSpecData 00404 20150916 120 AVERAGE 2 000000009 COUNT 1200 SUM 2400 000011 rrr HHH HHH RPK HH HH Figure 218 Record Data in Excel Mass 4 Data for the Complete Trend Scan Selected Extorr Inc 307 Columbia Road New Kensington PA 15068 183 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Click on Insert to display the ribbon and then click on the Expand arrow in the Chart section to open the Insert Chart window gt MassSpecData 00404 20150916 120655 xlsx Excel 7 B O xX HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack v D R i a E 9 3 1 nied le ey E E8 4 2 Tables Illustrations Apps Recommended 7 ia PivotChart Map Sparklines Filters Links Text Symbols z X Charts D l X z X r Charts f Tours 1 48E 09 See All Charts 1 52E 09 1 60E 09 1 52E 09 1 56E 09 1 68E 09 1 59E 09 1 55E 09 1 51E 09 1 55E 09 1 58E 09 1 51E 09 2015 09 16 12 08 06 323 2015 09 16 12 08 06 445 2015 09 16 12 08 06 566 2015 09 16 12 08 06 688 2015 09 16 12 08 06 809 2015 09 16 12 08 06 931 2015 09 16 12 08 07 052 2015 09 16 12 08 07 174 2015 09 16 12 08 07 295 2015 09 16 12 08 07 417 2015 09 16 12 08 07 538 2015 09 16 12 08 07 660 2015 09 16 12 08 07 781 1 54E
103. 3 1 06E 10 2015 09 08 10 22 11 800 3 80E 11 2015 09 08 10 22 11 807 3 53E 11 2015 09 08 10 22 11 814 5 15E 12 2015 09 08 10 22 11 821 3 84E 11 2015 09 08 10 22 11 969 0 6 3 54E 10 2015 09 08 10 22 11 975 0 7 1 44E 09 2015 09 08 10 22 11 982 0 8 1 70E 09 2015 09 08 10 22 11 989 0 9 1 82E 09 2015 09 08 10 22 11 996 1 2 13E 09 2015 09 08 10 22 12 003 1 1 2 20E 09 2015 09 08 10 22 12 010 1 2 1 98E 09 2015 09 08 10 22 12 017 1 3 1 39E 09 2015 09 08 10 22 12 024 1 4 4 12E 10 2015 09 08 10 22 12 031 1 5 3 82E 10 2015 09 08 10 22 12 038 1 6 6 14E 10 2015 09 08 10 22 12 045 1 7 9 58E 10 2015 09 08 10 22 12 052 1 8 1 35E 09 RgaSweepData2TimeAndDateFormatC AVERAGE 13 025 COUNT 1020 SUM 13285 5 Figure 148 Record Data in Excel Mass Intensity Data for End of First Scan Selected Extorr Inc 307 Columbia Road New Kensington PA 15068 139 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Click on Insert to display the ribbon and then click on the Expand arrow in the Chart section to open the Insert Chart window HOME INSERT E ce a Tables Illustrations Apps Recommended PivotChart 649 650 651 X 2015 09 08 10 22 11 731 2015 09 08 10 22 11 738 2015 09 08 10 22 11 745 2015 09 08 10 22 11 787 2015 09 08 10 22 11 793 2015 09 08 10 22 11 800 2015 09 08 10 22 11 807 2015 09 08 10 22 11 969 2015 09
104. 32 Converter Drop Down Menu Left click on Properties in the drop down menu to open the port properties window F USB Serial Port COM11 Properties me Genera USB Serial Port COM11 Device type Ports COM amp LPT Manufacturer FTE Location on USB Seral Converter Device status This device is working properly Figure 113 USB to RS232 Converter Port Properties Window Extorr Inc 307 Columbia Road New Kensington PA 15068 1 17 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Click on the Port Settings Tab and then click on the Advanced button USB Serial Port COM11 Properties Pot Settings Bits per second 5600 Data bits 8 Parity Stop bits 1 How control None ete Dea Figure 114 USB to RS232 Port Properties Port Settings Tab Extorr Inc 307 Columbia Road New Kensington PA 15068 1 18 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Advanced Settings window will open Advanced Settings for COM11 COM Bor ibe USB Transfer Sizes Select lower settings to correct performance problems at low baud rates Select higher settings for faster performance Receive te Transmit Bytes BM Options Miscellaneous Options Select lower settings to correct response problems Serial Enumerator Serial Printer Latency Timer msec Cancel If Power Off Event On Surprise Rem
105. 322 EMAIL support extorr com Extorr Inc www extorr com Command and Control Unit for XTCCU100 XT100 2000 00 cece TOSI an cee OREO an consent TOSI an cea OOF an cena OSU an vom aaa Power Supply Board for all XT XTPSB000 madee 600 00 XTPSBOODEX Power Supply Board for all XT 300 00 models Exchange Price RF Board for XT 100 XTRFB100 600 00 RF Board for XT100 Exchange XTRFB100EX PHS 300 00 RF Board for XT200 XTRFB200 850 00 RF Board for XT200 Exchange XTRFB200EX gE 300 00 RF Board for XT300 Extorr Inc 307 Columbia Road New Kensington PA 15068 67 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com www extorr com RF Board for XT200 Exchange Price XTRFBSOOEX 300 00 Electrometer Board for XT 100 600 00 Electrometer Board for XT 100 Exchange Price Electrometer Board for XT200 Electrometer Board for XT200 Exchange Price Electrometer Board for XT300 Electrometer Board for XT200 Exchange Price 300 00 XTELB100EX 850 00 XTELB200EX 300 00 1100 00 XTELB300EX 300 00 IOUN ele EE Power Supply shield board RF Shield Board 25 00 x lt x lt x lt x lt x lt 7 e lt Sj J q al WY YW m m m e I I as W gJ UJ z z D D a S z S 5 j Extorr Inc 307 Columbia Road New Kensington PA 15068 6 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com OO Extorr Inc www exto
106. 4 2 20E 08 06 55 1 18 1 03E 07 06 55 2 28 4 06E 07 06 55 2 32 8 81E 08 06 55 2 40 7 40E 09 06 55 2 6 60E 07 06 55 2 4 90E 10 06 55 2 2 24E 08 06 55 3 1 05E 07 06 55 3 4 08E 07 06 55 3 8 83E 08 06 55 3 7 50E 09 06 55 3 6 66E 07 06 55 4 4 27E 10 MassSpecData 00404 20150916 120 H 4 100 Figure 204 Record Data for Trend Mode in Excel at the Start of the Date Mass Intensity Data Extorr Inc 307 Columbia Road New Kensington PA 15068 175 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The entire column is highlighted Right click on any cell in column A and then select Format Cells from the drop down menu co HOME A B z MassSpecData 00404 20150916 120655 csv Excel INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack p fe rcNormalPosition bottom 934 C D E F G rcNgrmalPosition bottom 934 gt 127 lt Windc wParameters gt 129 lt P Calibri ju A A E KON HAERE 00 B I Q2 ii o 30 F n vree ki LEB Copy f Paste Special Insert Delete Clear Contents Format Cells Column Width Hide Unhide 00 32 53 06 55 3 06 55 3 06 55 3 06 55 3 06 55 4 I5 1 V3E 07 28 4 08E 07 32 8 83E 08 40 7 50E 09 999 6 66E 07 4 4 27E 10 MassSpecData 00404 20150916 120 Figure 205 Record Data for Trend Mode in Excel Format Cells Drop Down Menu AVERAGE 42263 5
107. 4 318 517 2015 09 11 09 17 24 526 518 2015 09 11 09 17 24 735 519 2015 09 11 09 17 24 943 520 2015 09 11 09 17 25 151 2015 09 11 09 17 25 360 522 2015 09 11 09 17 25 568 523 2015 09 11 09 17 25 776 524 2015 09 11 09 17 25 985 525 2015 09 11 09 17 26 193 526 2015 09 11 09 17 26 401 527 2015 09 11 09 17 26 610 528 2015 09 11 09 17 26 818 529 2015 09 11 09 17 27 159 530 2015 09 11 09 17 27 367 531 2015 09 11 09 17 27 576 532 2015 09 11 09 17 27 784 533 2015 09 11 09 17 27 992 534 2015 09 11 09 17 28 201 535 2015 09 11 09 17 28 409 536 2015 09 11 09 17 28 617 uw N amli RgaTrendDatal POINT 3 c 18 7 00E 091 18 7 09E 09 18 7 06 09 181 6 98E 09 18 7 07E 051 18 7 18E 091 18 7 16E 09 181 7 19E 09 18 7 19E 09 18 _7 25E 091 18 7 29E 09 18 7 33E 09 181 7 34E 094 18 7 35E 091 18 7 40E 09 18 7 43E 09 181 7 49E 09 18 7 46E 091 18 7 56E 091 I 18i 7 57E 09 Edit Series john hack Figure 196 Record Data in Excel End of Mass 18 Data for First Trend Scan Selected Click on the Select Data button on the right side to accept the selected cells H 7 CHART TOOLS HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT C429 A 509 2015 09 11 09 17 22 860 510 2015 09 11 09 17 23 068 511 2015 09 11 09 17 23 276 512 2015 09 11 09 17 23 485 513 2015 09 11 09 17 23 693 514 2015 09 11 09 17 23 901 515
108. 4 40 17 Device reports itis waiting for high vacuum OO0004e0O 14 40 24 Device reports filament it on rT Figure 23 The Log Tab The user may also use a number of features which are displayed when the Options button is pressed The options pop up box allows for a forced scan restart forced loading of the operating parameters as well as setting a number of trace options Debug Options Log limit x 1000 0 means no limit Trace Read of configuration file Trace Data packets Trace Raw Packets Trace DataPoints rc Trace XML Force Operations Start Scan Load Operating Parameters Figure 24 Log Debug Options Extorr Inc 307 Columbia Road New Kensington PA 15068 30 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 14 Record Data Tab 5 The Record Data tab contains the controls for File Data Logging Data from the Mass Sweep or Trend mode may be saved in a one file in multiple files or data logging may be turned Off on the Record Data tab The multiple file mode also has several options to determine when each individual file is created and saved The data is saved in a CSV file format Data Logging begins when the Start Recording button Start Recording is clicked in the main VacuumPlus window The button appears pushed in and changes to Stop Recording the Stop Recording button Clicking the button again
109. 4 43 683 13 1 00E 10 2015 09 09 11 24 43 697 13 125 6 00E 11 2015 09 09 11 24 43 711 13 25 2 99E 11 2015 09 09 11 24 43 725 13 375 7 96E 11 2015 09 09 11 24 43 739 13 5 9 63E 11 2015 09 09 11 24 43 753 3 30E 11 2015 09 09 11 24 43 767 eea See All Charts 9 16E 11 8 39E 11 3 71E 11 4 95E 11 2 74E 12 4 56E 11 7 60E 11 5 22E 11 6 25E 11 6 18E 12 7 74E 11 7 80E 11 5 34E 11 7 28E 11 6 30E 11 12 5 7 66E 11 12 625 5 53E 11 12 75 1 09E 10 2015 09 09 11 24 43 558 13 75 1 39E 10 MassSpecData 00404 20150909 112 AVERAGE 8 03125 COUNT 176 SUM 1413 5 Figure 162 Record Data in Excel showing Insert Ribbon Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 149 Extorr Inc www extorr com Click on the All Charts tab and select the X Y Scatter option on the left side of the tab and the Scatter with Straight Lines type at the top of the tab Insert Chart Recommended Charts All Charts Recent Templates Column Line i E loll RA A amp ith Combo ava Scatter with Straight Lines Figure 163 Record Data in Excel Insert Chart Window Click on the OK button to create the chart The Mass Intensity Chart is generated and shown at the center of the Excel window The chart may be dragged to a blank area of the work sheet and resized and formatted as
110. 444 Select All 2015 09 16 12 06 56 219 2 21E 08 2 22E 08 2 22E 08 2 22E 08 2015 09 16 12 06 56 341 2 21E 08 2015 09 16 12 06 56 462 2 20E 08 3 2015 09 16 12 06 56 584 14 2 21E 08 MassSpecData 00404 20150916 120 Chart Title PPP RRP HH HHH HHH HL 5S v E Seriesi SBREEESR ES 2 22E 08 is ry gt aA aA A A A A A A v Select Data Figure 223 Record Data in Excel showing Chart Filters Menu Click on the Add button in the Legend Entries Series box Select Data Source Chart data range MassSpecData 00404 20150916 120 SBS1 SCS600 a Legend Entries Series Horizontal Category Axis Labels a Series1 Hidden and Empty Cells Figure 224 Record Data in Excel with Chart Filters Select Data Source Window The Edit Series window opens E Series name Series values a Figure 225 Record Data in Excel with Chart Filters Edit Series Window Extorr Inc 307 Columbia Road New Kensington PA 15068 186 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Type Mass 14 in the Series name box and then click on the Select Values button in the Series values box Edit Series Series name Mass 1 4 Series values f Figure 226 Record Data in Excel Edit Series with Series Name Entered The Edit Series Values box is displayed Figure 227 Record Data in Ex
111. 48 6 19 4 Mass Sweep or Mass Table Customization Menu ccccccccssssesseseeeeeeeeeeeeeeeeeeaaaseeeeseeeeeeceeeeeeeeeaeaaaaeeesees 51 Ts NEAT ANICE 4 cass iceecsssaesiwockeuneaawinceeeashcedeeaeewecbacenean cbescetewiancedesteineohacavees nese eee Oe TA Servicing the RGA ProDe sits svecseteesessicssvewsedeceesetis seen Seseavereiessosscebsccerecsessesteccasereisuseseeesaseneeeers 52 TeL omer Dual Flament Replace Me ME aenga oria iea E E E SOLENON 32 Extorr Inc 307 Columbia Road New Kensington PA 15068 3 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Se Re EF OCCULIN Coroa seasansecsasacdenver saauesucessaaassavecesereatenseass OO Appendix A First Mass Spectrum ccccccssssssssssssssssssssssssssssssssssssssssssssssssssssee Appendix B Gauge Sensitivity to Differing Gases ccccccccccsssssssssssscscccccssseesss OU Doel PUP ANG DUOC eecczescescctccaesetensscucelccdvavezesdesuetccaeevecccsdecerccasaveseeseswacacdusscstesduceuscavaveateseececacuevcetens 60 B2 Ton Gauee COFPECUIONS sccscisceccvccactetesevacsceacnzacsevassectuccnssevesesaeeUeaconscsevassesteecouseoesasacasweconaesecess 60 B 3 Determination of Partial Pressures ccccccccccscssccccscccccccccccccccccccccccccccccccccccccccccccccccces 61 Appendix C Manual Tuning of an RGA sssssssssssssccecececcccososososssssssssssecececeeesessss OO Appendix D Options and Spare Parts
112. 5 09 11 09 17 29 624 2015 09 11 09 17 29 833 1 50E 08 1 49E 08 1 50E 08 1 50E 08 1 49E 08 1 49E 08 1 49E 08 1 48E 08 1 49E 08 1 48E 08 1 49E 08 1 49E 08 1 49E 08 1 49E 08 Ea u RgaTrendDatal 1 47E 08 1 49E 08 1 48E 08 1 49E 08 1 51E 08 1 50E 08 1 50E 08 1 52E 08 1 51E 08 1 50E 08 1 50E 08 1 50E 08 1 50E 08 1 50E 08 1 53E 08 1 52E 08 1 51E 08 1 50E 08 1 49E 08 1 48E 08 1 47E 08 1 46E 08 Chart Title 1414141414141414141414141414141414141414 H T H Figure 189 Record Data in Excel with Chart Resized Extorr Inc 307 Columbia Road New Kensington PA 15068 100 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 166 Extorr Inc www extorr com Click on the Chart Filters button next to the chart and then click on Select Data at the bottom of the Menu to open the Select Data Source window RgaTrendDatal xlsx Excel cHARTTOOLS fH O X HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack Chat2 fx v A B 87 2015 09 11 09 17 24 075 14 1 50E 08 88 2015 09 11 09 17 24 283 14 1 49E 08 89 2015 09 11 09 17 24 492 14 1 50E 08 90 2015 09 11 09 17 24 700 14 1 50E 08 91 2015 09 11 09 17 24 908 14 1 49E 08 92 2015 09 11 09 17 25 117 14 1 49E 08 93 2015 09 11 09 17 25 325 14 1 49E 08 94 2015 09 11 09 17 25 533 14 1 4
113. 5ms mass entry 3 5ms 5 measurements and with 7 entries enabled the total time required for one Trend Data Sample point is 122 5 ms 17 5ms 7 entries The Sample value is set to 600 producing a complete Trend Scan about every 73 5 seconds 122 5ms Sample 600 Samples Extorr Inc 307 Columbia Road New Kensington PA 15068 173 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com When opened in Microsoft Excel the contents of the data logging file are displayed as shown below At the beginning of the file starting at cell Al are the Configuration parameters 7 MassSpecData 00404 20150916 120655 csw Excel HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack Al fx lt xml version 1 0 encoding us ascii gt A B C D E F G H 1 lt xml verbion 1 0 encoding us ascii gt 2 lt ConfigurationData gt lt CommunicationParameters Port COM6 Baud 115200 PacketFrequency 5 0 PacketTimeout 1 0 CommunicationsType 1 UserFrequency 5 0 UserTimeout 1 0 NamedPort Test1 gt lt ConfigurationParameters Filename C Users Jack Desktop Shipped In Progress TestConfigs 404 152006 cfg Description Air Leak PTA TimeStamp 07df000900030010000c0006003603c1 DateTime 9 16 2015 12 06 54 PM Caption 404 Serial 404 Model 300 gt lt ScanParameters ScanSpeed 144 LowMass 1 HighMass 51 SamplesPerAMU 10 MassSpecData 00404 2015
114. 7 26 783 14 1 49E 08 6 00E 07 2015 09 11 09 17 27 124 14 1 47E 08 2015 09 11 09 17 27 333 14 1 49E 08 2015 09 11 09 17 27 541 14 1 48E 08 4 00E 07 2015 09 11 09 17 27 749 14 1 49E 08 3 00E 07 2015 09 11 09 17 27 958 14 1 51E 08 2015 09 11 09 17 28 166 14 1 50E 08 2015 09 11 09 17 28 374 14 1 50E 08 1 00E 07 2015 09 11 09 17 28 583 14 1 52E 08 0 00E 00 2015 09 11 09 17 28 791 14 1 51E 08 1414141414141414141414141414141414141414 2015 09 11 09 17 28 999 14 1 50E 08 2015 09 11 09 17 29 208 14 1 50E 08 2015 09 11 09 17 29 416 14 1 50E 08 2015 09 11 09 17 29 624 14 1 50E 08 2015 09 11 09 17 29 833 14 1 50E 08 2015 09 11 09 17 30 041 14 1 51E 08 2015 09 11 09 17 30 249 14 1 51E 08 2015 09 11 09 17 30 458 14 1 51E 08 2015 09 11 09 17 30 666 14 1 49E 08 RgaTrendDatal 5 00E 07 2 00E 07 m t 100 Figure 200 Record Data in Excel Chart with All Data from First Trend Scan After resizing and formatting the chart one complete Trend Scan is displayed RgaTrendDatal xlsx Excel HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack a f B c D 2015 09 11 09 17 24 908 14 1 49E 08 2015 09 11 09 17 25 117 14 1 49E 08 2015 09 7 77 cr eer Se 2015 09 Trend Scan 2015 09 6 00E 07 2015 09 2015 09 ee ie a ee 2015 09 2015 09 2015 09 2015 09 2015 09 2015 09 2015 09 2015 09 3 00E 07 ame Mass 28 2015 09 Mass 32 2015 09 ee Viass 44 2015 09 2 0
115. 724 337 8322 EMAIL support extorr com 169 Extorr Inc www extorr com Mass 18 is now listed in the Legend Entries Series box Select Data Source Chart data range The data range is too complex to be displayed If a new range is selected it will replace all of the series in the Series panel _ S E iE L Legend Entries Series Horizontal Category Axis Labels tase J Epiat _ emove a Series1 Mass 18 Sssisi Hidden and Empty Cells Figure 198 Record Data in Excel with Chart Filters Select Data Source Window with Mass 18 Added Click on the OK button to add the Mass 18 data to the chart RgaTrendDatal xlsx Excel CHARTTOOIS fH OF X HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack fx B Cc 2015 09 11 09 17 24 283 1 49E 08 2015 09 11 09 17 24 492 1 50E 08 2015 09 11 09 17 24 700 1 50E 08 2015 09 11 09 17 24 908 1 49E 08 2015 09 11 09 17 25 117 1 49E 08 2015 09 11 09 17 25 325 1 49E 08 2015 09 11 09 17 25 533 1 48E 08 2015 09 11 09 17 25 742 1 49E 08 2015 09 11 09 17 25 950 1 48E 08 Chart Title 2015 09 11 09 17 26 158 1 49E 08 L60E 08 2015 09 11 09 17 26 367 1 49E 08 anne O 2015 09 11 09 17 26 575 1 49E 08 1206 08 2015 09 11 09 17 26 783 1 49E 08 LODE 08 2015 09 11 09 17 27 124 1 47E 08 8006 09 d 2015 09 11 09 17 27 333 1 49E 08 6006 09 2015 09 11 09 17 27 541 1 48E 08 4 00E
116. 8E 08 95 2015 09 11 09 17 25 742 14 1 49E 08 96 2015 09 11 09 17 25 950 14 1 48E 08 Chart Title 97 2015 09 11 09 17 26 158 14 1 49E 08 98 2015 09 11 09 17 26 367 14 1 49E 08 1 53E 08 a 99 2015 09 11 09 17 26 575 14 1 49E 08 S we saben 100 2015 09 11 09 17 26 783 14 _1 49E 08 1516 08 101 2015 09 11 09 17 27 124 14 1 47E 08 1 50E 08 4 SERIES 102 2015 09 11 09 17 27 333 14 1 49E 08 1 49E 08 J Select All 103 2015 09 11 09 17 27 541 14 1 48E 08 1 48E 08 ZW Seriesi 104 2015 09 11 09 17 27 749 14 1 49E 08 igei 105 2015 09 11 09 17 27 958 14 1 51E 08 Jaos 4 CATEGORIES 106 2015 09 11 09 17 28 166 14 1 50E 08 1414141414141414141414141414141414141414 Select All 107 2015 09 11 09 17 28 374 14 1 50E 08 108 2015 09 11 09 17 28 583 14 1 52E 08 109 2015 09 11 09 17 28 791 14 1 51E 08 110 2015 09 11 09 17 28 999 14 1 50E 08 111 2015 09 11 09 17 29 208 14 1 50E 08 112 2015 09 11 09 17 29 416 14 1 50E 08 113 2015 09 11 09 17 29 624 14 1 50E 08 114 2015 09 11 09 17 29 833 14 1 50E 08 RgaTrendDatal v Select Data Figure 190 Record Data in Excel showing Chart Filters Menu Click on the Add button in the Legend Entries Series box Select Data Source Chart data range RgaTrendDatal SBS1 CS100 Switch Row Column Legend Entries Series Horizontal Category Axis Labels Fest Series1 Hidden and Empty Cells Figure 191 Record Data in Excel
117. 9 08 10 22 12 038 2015 09 08 10 22 12 045 2015 09 08 10 22 12 052 2015 09 08 10 22 12 059 Figure 143 Record Data in Excel Data at the End of First Sweep RgaSweepData2TimeAndDateFormatCorrected csv Excel PAGE LAYOUT Se B 50 2 50 3 50 4 50 5 50 6 50 7 50 8 50 9 51 DLL 51 2 51 3 51 4 51 5 La 0 6 0 7 0 8 0 9 1 1 1 1 2 1 3 1 4 1 5 1 6 1 7 1 8 1 9 51 5 C 9 29E 12 2 76E 11 6 79E 11 2 35E 11 7 46E 11 4 87E 11 2 17E 11 7 25E 11 1 46E 12 1 06E 10 3 80E 11 3 53E 11 5 15E 12 3 84E 11 3 54E 10 1 44E 09 1 70E 09 1 82E 09 2 13E 09 2 20E 09 1 98E 09 1 39E 09 4 12E 10 3 82E 10 6 14E 10 9 58E 10 1 35E 09 1 45E 09 RgaSweepData2TimeAndDateFormatC VIEW 7 A m H Oo x john hackwelder 100 The first data point in the second sweep at 0 6 amu is recorded in the following row row 648 in this example Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 136 Extorr Inc www extorr com Continuing to scroll through the file the end of the second sweep at 51 5 amu is shown in row 1157 A third sweep begins in row 1158 HOME INSERT A 2015 09 08 10 22 15 413 2015 09 08 10 22 15 420 2015 09 08 10 22 15 427 2015 09 08 10 22 15 434 2015 09 08 10 22 15 441 2015 09 08 10 22 15 448 2015 09 08 10 22 15 455 2015 09 08 10 22 15 462 2015 09 08 10 22 15 469 2015 09 08 10 22 15 475
118. 9 11 09 18 29 717 2015 09 11 09 18 29 752 2015 09 11 09 18 29 786 2015 09 11 09 18 29 821 2015 09 11 09 18 29 856 2015 09 11 09 18 30 024 2015 09 11 09 18 30 059 2015 09 11 09 18 30 094 2015 09 11 09 18 30 128 2015 09 11 09 18 30 163 2015 09 11 09 18 30 198 2015 09 11 09 18 30 233 2015 09 11 09 18 30 267 2015 09 11 09 18 30 302 2015 09 11 09 18 30 337 2015 09 11 09 18 30 371 2015 09 11 09 18 30 406 2015 09 11 09 18 30 441 2015 09 11 09 18 30 476 PAGE LAYOUT fe RgaTrendDatal AVERAGE 346059 06 10 a4 14 18 28 32 999 14 18 28 32 a4 999 2 05E 08 14 18 28 32 14 18 28 32 44 999 14 18 FORMULAS DATA 9 11 2015 9 18 30 AM Cc 1 32E 10 2 09E 08 7 25E 10 9 94E 09 8 93E 09 2 09E 09 2 06E 10 2 06E 08 7 54E 10 9 86E 09 8 77E 09 2 11E 09 1 93E 10 7 88E 10 1 00E 08 8 43E 09 2 06E 09 1 24E 10 2 04E 08 7 81E 10 9 72E 09 8 25E 09 1 96E 09 1 94E 10 2 01E 08 7 15E 10 9 88E 09 COUNT 3 D SUM 1038177 18 30 REVIEW VIEW DEVELOPER T H john hack 100 Figure 177 Record Data in Excel Last Trend Data Sample Point at End of Fourth Trend Scan Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 160 Extorr Inc A fifth complete Trend Scan would end at row 3137 but the data stops at row 2705 The Stop www extorr com Recording button was clicked b
119. A 15068 145 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Date Time values in column A are now shown with the correct formatting The Date is displayed as YY YY MM DD and the Time is shown as HH MM SS 000 With this formatting the Time is displayed down to the millisecond If you plan to open this file in the future using Microsoft Excel save the modified file as a Microsoft Excel Workbook instead of a CSV type file The Microsoft Excel Workbook file type will preserve the changes made to the formatting of the Date Time values in column A MassSpecData 00404 20150909 112443 csy Excel 7 amp O x HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder fx rcNormalPosition bottom 719 A B Cc D E F rcNormalPosition t ottom 719 f gt lt WindowParameters gt lt PlotParameters BkColor Pale green LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 gt 137 lt ConfigurationData gt 2015 09 09 11 24 43 420 10 625 9 16E 11 2015 09 09 11 24 43 433 10 75 8 39E 11 2015 09 09 11 24 43 447 10 875 3 71E 11 2015 09 09 11 24 43 461 11 4 95E 11 2015 09 09 11 24 43 475 11 125 2 74E 12 2015 09 09 11 24 43 489 11 25 4 56E 11 2015 09 09 11 24 43 503 11 375 7 60E 11 2015 09 09 11 24 43 517 11 5 5 22E 11 2015 09 09 11 24 43 531 11 625 6 25E 11 2015 09 09 11 24 43 545 11 75 6 18E 12 2015 09 09 11 24 43 558 11 875 7 74E 11 2015 09 09 11 24 43 57
120. Acgocea Waree ntl iies 33 6 14 3 1 Recording Data to Multiple Files Once Per Scan Option cccccccceccceeeeeceeeeeeseeeseeeeeeeeeeeeeeeeeeeaaas 34 6 14 3 2 Recording Data to Multiple Files On The Hour Option ccccceccsseeecceeeeeeeeeeeaeeeeeesseeeeeeeeeeeeeeaaaaas 35 6 14 3 3 Recording Data to Multiple Files At Midnight Option ccccsccssssseeeecececeeeeeeeeeeeeeeeeeeeeeeeeeeeeeaaaaas 35 6 14 3 4 Recording Data to Multiple Files After N Sweeps Option cccccssseeeceeceeeeceeeeaeaeeeeseeeeeeeeeeeeeeeeas 36 0 15 Diagnostics TAM csi cvecicasssvacssicescunssdanisesscvecieasscteyesscvicus sedan lcoisevecessseateystssvsaunseceuliedsetwereasectayeds 36 CLO AMEC U S oii caccassscsacsescrtactatdeelelersascidudssaetessatectatdcnlslave Castes suuuceussadectetdeuiabevevaustadudeubetestoaseisiiass 37 6 17 Use with Multiple XT SySte is cisisssscccesscscasscessessvawnvenessantocsvesedeosssessessvacenenausansceaweseteosssanvees 39 OAS Tbe Desis WO Gis oesc ieee sivesccsaetesacs avis ins be cocaea seeccaaaeivcaceiwescaueneoeceus oe caecceasevccaecessaceeeseocereesesee 39 6 19 Graph VV ING OW errasse eae EEE EERE E Eaa EEEa EEA aata 40 t91 Graphi Window Slider CONGO ls easa a N E A E a eoeneuas tee eantcaes 40 6 19 2 Changing the Relative Size of the Graph Window and Folder Tabs ccc ccsssseessseeeeeeeeeeeeeeeeeeaeeeeeeeees 46 tS Graph Window Zoom and Undo ZOOM sxc ieee oases einen pace A E dance
121. Add Clear Audio Output Selected Channel i Disable Enabled Description Owan free ty tie nee wos 100 mes 100 rs 100 ms 100 mes 100 ms 100 ms 100 ms 0 od 00 5 Pirani 100 m D O Ol OOl O O O O D O Ol OOl O O O amp D O O O DOD O OO O D O O O D O Ol O 1 2 3 4 a ri a 4 Figure 17 The Mass Table Enter the mass to charge ratio of the ion to be monitored in the Mass column A description may be entered such as Hydrogen for mass 2 by double clicking in the Description cell to select it and then entering the desired text A graph color for each mass may be selected from a drop down menu invoked by double clicking on the graph color cell Each mass table entry may be enabled or disabled by clicking on the Enabled cell and either checking or clearing the check box for that entry Entries that are disabled are not measured during a Trend scan Extorr Inc 307 Columbia Road New Kensington PA 15068 24 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Pirani Pressure and Total Pressure readings may also be monitored in the Trend mode Use the special Mass column value of 0 Zero for the Total Pressure and 5 for the Pirani Pressure Dwell times may be set with the drop down menu from each cell in the dwell column The actual time taken for a measurement at one mass 1s five times this dwell time Five measurements are taken across the peak and th
122. Currency Accounting Date Time Percentage Fraction Scientific Text ere Font Border Fill Protection Sample rcNormalPosition bottom 715 Type yyyy mm dd hh mm ss 000 General 0 0 00 20 0 00 0_ 0 0_ Red 0 0 00_ 0 00 0 00_ Red 0 00 0_ S 0 S 0_ Red S 0 Type the number format code using one of the existing codes as a starting point Click on the OK button to close the Format Cells window Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 156 Extorr Inc www extorr com The Date Time values in column A are now shown with the correct formatting The Date is displayed as YY YY MM DD and the Time is shown as HH MM SS 000 With this formatting the Time is displayed down to the millisecond If you plan to open this file in the future using Microsoft Excel save the modified file as a Microsoft Excel Workbook a XLSX type file instead of a CSV type file The Microsoft Excel Workbook file type will preserve the changes made to the formatting of the Date Time values in column A RgaTrendDatal csv Excel HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack fx rcNormalPosition bottom 715 B C D E F rcNormalPosition tlottom 715 gt lt WindowParameters gt lt PlotParameters BkColor Pale green L
123. Filament Activation Switch in the main VacuumPlus window The Filament Force OFF on Startup control overrides the VacuumPlus automatic filament turn on sequence The automatic sequence is enabled if the configuration file is saved with the filament on When the Filament Force OFF on Startup box is checked the filaments will remain off until turned on manually using the Filament control here on the Operating Parameters tab or the Filament Activation Switch in the main VacuumPlus window Click the Uncheck button to remove the check mark Click Apply and the changes made will take effect The red check at the top of the tab will disappear Figure 15 Filament Control Extorr Inc 307 Columbia Road New Kensington PA 15068 22 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 8 Calibration Parameters Tab The Extorr system comes with a factory tuning SLES which can always be reestablished by loading the factory configuration file None of the sas NAN Mass 1 amu Mass 300 7 amu tuning parameters should be changed greatly from the factory settings The system worked Resolution 637 2 Resolution 1400 best with the factory set parameters but these lon Energy 0 lon Energy 3 0 r may require slight changes over time Position 0 24 Position 015 There are however times when a special tune na fa00 Total Integrating
124. G 2 Installing the USB to RS232 Converter Driver Software When the USB to RS232 Converter is first connected to your computer Windows will detect the new hardware and search for a device driver on the internet The Installing device driver software message is shown on the tool bar Installing device driver software gt Click here for status Figure 101 Installing Device Driver Software Message If you click on the message the Driver Software Installation window is displayed i Driver Software Installation Installing device driver software USE HS SERIAL CONVERTER Searching Windows Update Obtaining device driver software from Windows Update might take a while Skip obtaining driver software from Windows Update Figure 102 Driver Software Installation Window It may take several minutes for the correct driver to be found and downloaded Once windows completes installing the device driver for the USB to RS232 Converter the Driver Software Installation window will show that the USB Serial Port has been installed and is ready to use A Driver Software Installation USB Serial Port COM11 installed USB Serial Port COM11 wf Ready to use Figure 103 Driver Software Installation Finished Extorr Inc 307 Columbia Road New Kensington PA 15068 1 1 1 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com On the toolbar the Device driver software installed success
125. IL support extorr com Extorr Inc www extorr com 6 13 Log Tab bs A log of CCU to computer communications is shown in this tab Here you can follow the communications between the VacuumPlus software and the Microprocessors in the CCU This information may come in handy for trouble shooting It will clearly tell you when there is no communication in the case of an incorrect port setting power failure or cable being unplugged gon sme Cie gt O00004e0 08 45 24 Communications thread terminated successfully OO00 Zac 08 45 24 XML stream being shut down 0000 Zac 08 45 24 XML communication killed OOOODEEO 08 45 24 Create XML pipe i pipe Test1 O00004e0 05 45 24 Communications thread terminated successfully O00004e0 05 45 24 Communication thread is restarting OODD0BEO 03 45 24 XML output stream Testi successfully created 000004e0 08 45 24 Opening COM port O00004e0 08 45 24 Sucesstully opened connection COMB OO0004eD 08 45 24 Requesting download 00001350 08 45 24 gpbox_stripped elt file format elfS2 little 00001350 05 45 24 Setting transmission baud rate to 115200 00001350 03 45 24 Memory checksum on 18392 bytes 02001 db665 00001350 08 45 24 No download required code is consistent O00004e0 14 40 04 Saved configuration V C Users WJack Desktop AGA CONFIG FILES sn404_factorn_cal cig O00004e0 14 40 14 Scan restarted 1 O00004e0 14 40 15 Device reports filament is off OO0004e0 14 40 16 Sean restarted 1 0000040 1
126. Instruction Manual Extorr XT Series RGA Models XT100 M XT200 M XT300 M using VacuumPlus Software Version 1 0 40 and above Rev 150928 by Extorr Inc 2015 Extorr Inc www extorr com Table of Contents k Satet UMTO LUAU Oessaare esa EEEE EER Ea Ea 6 Di CVV EL VIC W scostras causes eerineses 7 21 General Descrip Oasa cebacaues ds EN EEE sedacaunueseccvesctacancussectessesacasenestceess 7 3 Dimensions and Specifications sssecccccsssccceccsssccccccccsssecceccsssecccccocssecccecosssecccecsssseee 8 DLs Dimensio Sein R EEE eee ame aa ae 8 D2 DPECINICALIONS sicsiecvccccsebestesiatecuseasbacenicas aces AEE E E TESE EES EN 9 de stalla OM cocseexsnusivys veeesouceceety E T E ETEA 10 41s Unpack Me XT SHIPMe Mh sessies kense a E EEAS 10 4 2 Factors to Consider before Mounting the Probe sssssccceccccssssscccooccssssscceeooossssseeceoessssos 10 A De Mount LEW LODE coania A A E A E 11 4 4 Connect the Command and Control Unit CCU ssesssossessesssossesseossossessesssossessesssossosoe 12 4 5 Attach the RS232 Cable and Power the Unit cccsssccccccccccssssssssssssssssssssssssccccessees 12 4 6 Install the VYa ac umPlus Software sicicieciicsessesderdnsduacsasuecdeacseadicnsssesdulsnsiwacsasvecdeacseialessesecdsvents 12 A 7 RESONALING RE COMM cssicsstcensanedennsevettenssccendedsosdacneanedeansuveddagsccendodsssdewneasedeaniuveddaphecieadsccostsanence 12 4 9 Sarl PUMP DO Wilts ie Aan aa a 13 Ie CIDE AUT
127. LUSIVE AND NO OTHER WARRANTY WHETHER WRITTEN OR ORAL IS EXPRESSED OR IMPLIED Extorr DISCLAIMS ANY IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE EXCLUSIVE REMEDIES The remedies provided herein are Buyer s sole and exclusive remedies In no event will Extorr be liable for direct indirect special incidental or consequential damages including loss of profits whether based on contract tort or any other legal theory Extorr Inc 307 Columbia Road New Kensington PA 15068 202 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com
128. MAIL support extorr com Extorr Inc www extorr com filament emission is decreased by a factor of 10 Note that partial pressure readings will read low unless the Partial Sensitivity factor is changed under the Calibration parameters tab The mass scale set points are under the Calibration Parameters tab These set points are usually set to mass and the highest nominal mass for the XT unit That is for an XT100 the set points are and 100 for an XT200 the points are 1 and 200 and so on They may however be set anywhere in the mass range of the RGA These set points control by extrapolation and interpolation the values of Ion Energy Mass Position and Resolution at each individual point along the mass axis Ion energy is controlled under the Calibration Parameters tab It is controlled by extrapolation and interpolation from the High Cal Ion Energy and Low Cal Ion Energy set points It is the parameter which controls the speed of the ion through the quadrupole As the speed is increased so is the probability of the ion making it from the ionization volume to the ion detector Ion energy 1s therefore a way of controlling peak height The lower the ion energy the lower are the number of ions detected The higher the energy the greater are the number of ions detected Unfortunately as the ions increase their speed they are less likely to be properly selected by the RF field of the quadrupole and peak splitting occurs In the Extorr RGA an
129. Mass Table as Mass 0 MassSpecData 00404 20150916 120655 xIsx Excel 7 amp B O XxX HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack fx 9 16 2015 12 06 55 PM B D E 136 137 lt ConfigurationData gt 2015 09 16 12 06 55 108 2 91E 10 2015 09 16 12 06 55 125 2015 09 16 12 06 55 143 2015 09 16 12 06 55 160 2015 09 16 12 06 55 177 2015 09 16 12 06 55 195 2015 09 16 12 06 55 212 2015 09 16 12 06 55 229 2015 09 16 12 06 55 247 2015 09 16 12 06 55 264 1 05E 07 2015 09 16 12 06 55 281 4 08E 07 2015 09 16 12 06 55 299 8 83E 08 2015 09 16 12 06 55 316 7 50E 09 2015 09 16 12 06 55 334 6 66E 07 2015 09 16 12 06 55 351 4 4 27E 10 3 2015 09 16 12 06 55 368 14 2 24E 08 2015 09 16 12 06 55 386 18 1 04E 07 2015 09 16 12 06 55 403 28 4 07E 07 2015 09 16 12 06 55 420 32 8 81E 08 2015 09 16 12 06 55 438 40 7 32E 09 2015 09 16 12 06 55 455 6 63E 07 2015 09 16 12 06 55 472 4 3 70E 10 2015 09 16 12 06 55 490 14 2 22E 08 2015 09 16 12 06 55 507 18 1 04E 07 2015 09 16 12 06 55 525 28 4 04E 07 3 2015 09 16 12 06 55 542 32 8 75E 08 MassSpecData 00404 20150916 120 AVERAGE 339405 10 53 COUNT 21 SUM 7127508 48 26 HE m _ 100 Figure 210 Record Data for Trend Mode in Excel One Trend Data Sample Point Group The number of Trend Data Sample groups in a complete Trend Scan is set by the value in the Samples box on the Mass Table tab In this example the Samples box is set to 600 so one complete Trend Scan
130. NSweeps 1 _ FileRecordingon 0 gt lt MassTableParameters Samp 1les 600 Audi ooutput 0 lt Massi Enabled 1 Sound 1 Mass 4 Description Helium color Red Dwel1 3 5 ms Highwarning 0 Figure 240 PiraniZero Value Edited in Configuration File Save the edited Configuration file using the same file name and then exit Notepad Start VacuumPlus The Configuration file that was in use when VacuumPlus was shut down is automatically opened This is the file that was just edited in Notepad I Calibration parameters Low Cal High Cal Mass 1 amu Mass 200 amu Resolution 640 Resolution 1260 at lon Energy 5 0 a lon Energy 5 0 a tion pa H tion be Position C Position Le Unit ES Total Integrating Cap 10 00 pt Model 300 Partial Integrating Cap 3 00 pf S N 404 Total Sensitivity Vel AAAS bor Pirant Calibration Partial Sensitivity Bed Ato ATM 1 985 Recalibrat 7 H an me Diagnostics Zero Recalibrate Figure 241 VacuumPlus Calibration Tab with Pirani Zero Error Message An Error Message is displayed on the Calibration Parameters tab indicating that the PiraniZero value is invalid but the program will use this value and continue The Pirani Pressure display in the main VacuumPlus window should now read about 1x10 Torr allowing the filaments to turn on Extorr Inc 307 Columbia Road New Kensington PA 15068 200 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL suppo
131. O err a ss cuusevecesdee ueessncseveseuvsseseceuseceastvaucestecees 14 Si General theory of Operation ssiecstccesstiviesicssseasecdedesvacevseagesdeuiestesssousecdudestaeuvscasseeeveesvessuousente 14 S2 Firan REAG OU lonnns aaa atone ntae teenies tisdale nea EAEE 14 5 5 NOM Gaute RCACOUE rissie inaa ea E EEE Ea A OaE aaeoa iia 15 54 Flament A Civ ation SWU ehersisio eaaa aa aa aaa a aaa aaa asaan 15 5 5 Reading Mass Peak Heights veccacsicessceccceseeasasessscieceeteusesseacecsveteuesdeesaeeSeesecaueedeesceseccoaseaceosaneens 15 OV ACHUIMPIUS SOTW ALC ge esees Gers decscssnsvensessbssavestvesCecuvaespssasesscesuadeseestaussecevecseuseivexeds 16 MSC OM Disa EE a aa 16 AE Gd O E E E E L E T E EE S O NETE T A L EE TE S 17 6 5 Operational SeMS ossosa aaa ai aero vasa EEO e a ieee 17 04 COMMINICATIONS TaD esinenud enre aN aa aa e aaa a aasa 18 G55 CONMGUT AMOI TA Disisi dense a a AEE aaae 19 GO S WEED Parameters TaADisisissrsnssee EE eE EEA E EAE NAi 19 Extorr Inc 307 Columbia Road New Kensington PA 15068 2 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 65 Peratine Parameters DAD wsiscessccssscivecescbebtcdescesevascapeesssdsesecussbensolanseguveseucnesesessavesescoesiuuasess 21 SATA Reali Xs cere teen a en Mist na senner mn ere ary ene MA erennt a renee de E rE 21 a TOC US a E N T E rns cea aut aw eaneh Acute a Batman tiadee 21 6 7 3 Hlectron Enero yand EMISSION CUCO nsi caiieeretoenaxna
132. RS232 Converter may be set to COM9 To change the COM number navigate to the Device Manager window and expand the Ports list as described above Right click on USB Serial Port Serial Port COM10 in this example to display a drop down menu a Device Manager Sn File Action View Help E ACEI CS a i Jack PC a gt JE Computer gt Sy Disk drives p MY Display adapters gt i DVD CD ROM drives gt ee Human Interface Devices gt og IDE ATA ATAPI controllers gt Keyboards Mice and other pointing devices Be Monitors Network adapters Ports COM amp LPT ETT Fi USB Serial Port COMLO Update Driver Software p Ba Processors gt Sound video and game co Disable gt i System devices Uninstall gt o F Universal Serial Bus control es USE Virtualization Scan for hardware changes Opens propert Properties Figure 124 The Device Manager with USB to RS232 Converter Drop Down Menu Extorr Inc 307 Columbia Road New Kensington PA 15068 124 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Left click on Properties in the drop down menu to open the port properties window USB Serial Port COM10 Properties USB Seral Port COM10 Device type Ports COM amp LPT Manufacturer FTOI Location on USB Serial Converter Device status This device is working property
133. SpecData 00404 20150916 120 4 gt POINT 23 Figure 228 Record Data in Excel Start of Mass 14 Data for the Trend Scan Extorr Inc 307 Columbia Road New Kensington PA 15068 187 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Hold down the Shift key and select all 600 values of the Mass 14 data in column C H S9 e s CHART TOOLS HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack C601 X fx A B C D z g G H I 1187 2015 09 16 12 08 06 341 14 2 20E 08 1188 2015 09 16 12 08 06 462 14 2 20E 03 1189 2015 09 16 12 08 06 584 141 2 19E 081 1190 2015 09 16 12 08 06 705 14 2 22E 08 1191 2015 09 16 12 08 06 827 14 2 21E 08 1192 2015 09 16 12 08 06 948 14 2 20E 03 1193 2015 09 16 12 08 07 070 14 2 20E 081 1194 2015 09 16 12 08 07 191 141 2 19E 08 1195 2015 09 16 12 08 07 313 14 2 20E 08 1196 2015 09 16 12 08 07 434 14 2 20E 08 1197 2015 09 16 12 08 07 556 14 2 22E 08 1198 2015 09 16 12 08 07 677 141 2 22E 081 1199 2015 09 16 12 08 07 799 14 2 21E 08 Edit Series 1200 2015 09 16 12 08 07 920 14 2 19E 08 1201 2015 09 16 12 06 55 143 18 1 03E 07 1202 2015 09 16 12 06 55 264 18 1 05E 07 1203 2015 09 16 12 06 55 386 18 1 04E 07 1204 2015 09 16 12 06 55 507 18 1 04E 07 1205 2015 09 16 12 06 55 629 18 1 03E 07 1206 2015 09 16 12 06 55 750 18 1 03E 07 1207 2015 09 16 12 06 55 872 18 1 03E 07 1208 2
134. The last saved settings mpi C Usersack Desktop AGA CONFIG FILI will remain in effect by becoming the default settings for the next startup If at some later date the settings are changed again this previous setting may be called up using the configuration file name under which it lt was saved Caption 404 Note that this tab also gives the option of adding a Internal date 8 12 2015 10 31 18 AM description and a caption to this configuration This description and caption may then become a label for On Save _Seveds printouts and data files Also note that a Model Number Serial Number and date of creation also follows this file Description Air Leak PTA Figure 9 The Configuration Tab The CFG file may be read using any text editor or an internet browser Changes in the configuration file could be made directly into the text file but the user must do this with caution 6 6 Sweep Parameters Tab fas The most fundamental quadrupole RGA output is the analog mass sweep The graph generated is directly Sweep parameters proportional to the ion current measured at each mass to charge ratio This graph will have mass on the horizontal axis and pressure or ion current on the Scan speed 48 vi sec vertical axis On the Sweep Parameters tab the High Low mass 1 H amu Mass Low Mass Samples per amu and Scan Speed EI may be set Numbers may be typed into the High mass 51 a any appropriate boxes or the up
135. There is less than 0 5 mm spacing between the tubes and sometimes dust particles can cause a leakage path across this small space Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 196 Extorr Inc www extorr com The tubes are visible at the end of the Electrometer PCB near the copper box You do not have to separate the PCB stack to make the repair i TTT tit 3 sa Pa Mi ae TT EE BEE z zoe 2 PA ma ic c e ngan baap z zgj Y s EJ r a EH gt Si A Integrating Capacitor Figure 237 Location of Integrating Capacitor on Electrometer PCB The particles may be dislodged by blowing dry clean air through the space between the concentric tubes In one case a small insect had gotten inside the tubes and created a leakage path Replace the black box cover when finished Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 197 Extorr Inc www extorr com Appendix L Pirani Gauge Will Not Allow Filament to Turn On The Extorr RGA is protected from turning on unless the pressure is low enough for the filament to operate without damage The Pirani gauge reads from atmosphere down to about 1x10 torr It is constructed from a fine platinum wire in the base of the probe that is heated to about 150 C and the heat loss to the surrou
136. Total Pressure 9 157 10 3 torr Pirani Pressure 1 317704x103 Q J Total Pressure 6 497x108 torr Pirani Pressure 1 000000x104 Q 7 Mass Sweep Mass Table Mass 28 Mass 18 1 Dw 3 SB FW BG 15 134 153 172 19 20 223 249 267 286 MASS Total Pressure 5 964 108 torr Pirani Pressure 1 000000x10 4 Q pl L Mass Sweep zo Sweep para 2 3 6S F 15 134 153 172 191 216 229 268 267 286 MASS Figure 31 Multiple Units Operated from a Single Computer 6 18 The Degas Mode Start Degas Degas increases the electron energy to nearly 400 volts the electron emission to nearly 50 ma and the ion energy to 200 volts The purpose of degas is to clean the unit If the unit loses sensitivity due to contamination a degas of a few minutes duration often will restore the sensitivity To start degas click on the Start Degas button shown above and located to the right of the filament switch at the top center of the graphics interface After a descriptive message is displayed and agreed to a Time out j Stop Deg f bar AEE will be displayed The user may choose to stop the degas process at any time by clicking on the button again If not clicked the bar will continue across the button until it is automatically turned off after ten minutes Extorr Inc 307 Columbia Road New Kensington PA 15068 30 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 19 Gra
137. Total Pressure 7427x109 torr Pirani Pressure 1 00x10 4torr 1 TECA E R SIE Piani Temp 1 t0 1 0 0141863 volts Repeler 20 Eeen 016 vots 4 Pirani Corr 1 to 1 0 0 142492 volts _ Pirani Press 3 to 2 5 0 317839 volts FB 225t025 2 402483 vols www extorr com E 2 9 Repeller Shorted to Source 1 o xi 218 x fh Sanog T eR i ae ee parameters Calbration parameters Diagnostics Outputs Mass Table Electronics een IE Filament Resistance 0 62 Ohm Poser sgh ae ATA k1 Degas Current 0 9 mA should be about 2 4 mA Source 1 Current Source 2 x 2 Current Source 1 should be ie WZ eset current 0 948269 ma Reference 2 45to 2 55 2 499379 _ volts about 10 gt Source 2 Ground ref 02 0 002359 vots Source 2 Current Source 1 Focus FB Focust 1969 volts 3 Current Source 2 should be about 10 lt Source 1 J a a Repeller 0 1V a ne Pee Should be about 68V Filament DAC Coarse re Filament DAC Fine 3582 loxi la x Partial Pressure Sensitivity is Very Low Observed lon k 1 Intensities are only about 10 of Total Pressure Reading Figure 83 Outputs Tab and Mass Scan Graph Repeller Shorted to Source 1 Extorr Inc 307 Columbia Road New Kensington PA 15068 gg TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 2 10 Repeller Source 1
138. a 00404 20150916 120655 csv file in this example was created using the To Multiple Files mode with the Once Per Scan creation option on the Record Data tab The RGA was in the Trend mode With this recording mode a new data logging file is created and saved for each Trend Scan The Data file name contains the Serial Number of the CCU along with the Date and the Time that it was created In this example 00404 is the CCU Serial Number 2015 09 16 is the Date YYYY MM DD and 12 06 55 is the time HH MM SS The Mass Table used in this example is displayed below It contains 8 entries for Mass 4 Mass 14 Mass 18 Mass 28 Mass 32 Mass 40 Mass 0 the special code for Total Pressure and Mass 5 the special code for Pirani Pressure The entry for Mass5 Pirani Pressure 1s disabled leaving 7 entries to be measured during a Trend Scan Mass Table entries 1 through 7 Mass Table Samples 600 Add Remove Clear Audio Output Selected Channel i Disable Graph Dwell High High Low Low Color Alarm Warming Alarm Warming Yes 4 Helium 3 5 ms No 14 3 5 ms Ho 18 3 5 ms el No 28 Ee E Status Enabled Audio Mags Description Mo a2 3 5 ms Ho 40 3 5 ms g Total 3 5 me 5 Pirani 3 5 me rye 1 2 3 4 5 B Fi a Figure 202 Record Data in Excel Mass Table used for Trend Mode Data The Dwell Time is set to 3 5ms for all of the entries Because 5 measurements are taken at each mass the actual dwell time is 17
139. ak heights shapes and widths Always remember you can go back to the factory settings by reloading the factory configuration file which came with your RGA Electron energy which may be controlled under the Operating Parameters tab is the energy in electron volts that the electrons have as they move through the ionization volume The probability that the electron produces an ion from a molecule moving within this volume depends on the electron s energy and the nature of the molecule Ionization depends on the electron energy ionization threshold below which no ionization is produced After this threshold ionization probabilities increase to a maximum and then decrease as electron energies are advanced beyond this maximum This electron impact ionization cross section curve is unique to each molecule but for production of singly charged ions the maximum is near 70 eV This is the normal setting for RGA electron energy If for some reason it is desirable to reduce the intensity of doubly charged ions a reduction of electron energy will usually help Filament emission which may be controlled under the Operating Parameters tab controls the amount of electrons available for ionization Peak height can be adjusted using this parameter When operating at pressures above 10 torr filament and ionizer lifetime will be increased if the Extorr Inc 307 Columbia Road New Kensington PA 15068 64 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 E
140. ament DAC Coarse 3044 FB 2 25 t0 2 5 2 403980 volts Filament DAC Fine 3796 FB 2 25 to 2 5 2 405849 volts Apply Drag Left Edge Until Entire Tab is Visible Figure 46 Drag Resize Cursor to Expand Folder Tabs Extorr Inc 307 Columbia Road New Kensington PA 15068 AT TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Remember to save your Configuration File by clicking on the Configuration Tab and then on the Save button or use the Save As button to give it a different file name The resized Graph and Operational Folder tabs will be saved and reloaded whenever VacuumPIlus is restarted 6 19 3 Graph Window Zoom and Undo Zoom Part of the Graph may be enlarged by left clicking and dragging a section box around the area of interest amp Vacuum Plus 404 BH File Edit View Window Control Help i1 0 ie B Total Pressure 4 446x10 8 torr Pirani Pressure 1 00x104 torr Q 4 art De Start Recording a a Scale Mass Sweep Figure 47 Selecting a Part of the Graph to Zoom In When the Left Mouse button is released the Graph Window zooms in to the selected area xX Vacuum Plus 404 IF File Edit View Window Control Help rg Do i EE Total Pressure 3 973x10 torr Pirani Pressure 1 00x104 torr Q 4 tart Dega Start Recording L Scale Mass Sweep Figure 48 Graph Zoomed In to Selected Area Extorr Inc
141. ample The data below the configuration parameters starting in row 138 in this example are the Date Time Mass and Intensity values from the recorded sweep The Date Time values are in column A the Mass values in column B and the Intensity values in column C The default cell formatting in Excel does not display the Date Time values correctly This is a problem with the way that Excel interprets the information even though the ASCII data in the CSV file clearly shows the Year Month Day and Time To change the formatting for column A first select all values in the column by clicking on the label at the top of the column MassSpecData 00404 20150909 112443 csw Excel eS O x HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW john hackwelder fx E D rcNormalPosition bottom 719 gt lt WindowParameters gt lt PlotParameters BkColor Pale green LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 gt 37 lt ConfigurationData gt 24 43 4 10 625 9 16E 11 24 43 4 10 75 8 39E 11 24 43 4 10 875 3 71E 11 24 43 5 11 4 95E 11 24 43 5 11 125 2 74E 12 24 43 5 11 25 4 56E 11 24 43 5 11 375 7 60E 11 24 43 5 11 5 5 22E 11 24 43 5 11 625 6 25E 11 24 43 5 11 75 6 18E 12 24 43 6 11 875 7 74E 11 24 43 6 12 7 80E 11 24 43 6 12 125 5 34E 11 24 43 6 12 25 7 28E 11 24 43 6 12 375 6 30E 11 MassSpecData 00404 20150909 112 Ll se ee OO Figure 153 Record Data in Excel at the Start of the Date Mass Inte
142. amples amu of 8 Data was recorded for about 30 seconds and produced 24 data logging files When opened in Microsoft Excel the contents of the data logging file is shown below At the beginning of the file starting at cell Al are the Configuration parameters MassSpecData 00404 20150909 112443 csv Excel 7 O X HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder Al fr lt xml version 1 0 encoding us ascii gt A B C D E F G H 1 lt xml verbion 1 0 encoding us ascii gt 2 lt ConfigurationData gt lt CommunicationParameters Port COM6 Baud 115200 PacketFrequency 5 0 PacketTimeout 1 0 CommunicationsType 1 UserFrequency 5 0 UserTimeout 1 0 NamedPort Test1 gt lt ConfigurationParameters Filename C Users Jack Desktop Shipped In Progress TestConfigs 404 152006 cfg Description Air Leak PTA TimeStamp 07df000900030009000b001800180165 DateTime 9 9 2015 11 24 24 AM Caption 404 Serial 404 Model 300 gt lt ScanParameters ScanSpeed 72 LowMass 11 HighMass 21 SamplesPerAMU 8 MassSpecData 00404 20150909 112 H 100 Figure 152 Record Data CSV File Opened in Excel Extorr Inc 307 Columbia Road New Kensington PA 15068 142 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Configuration parameters end with the lt ConfigurationData gt label at cell A137 in this ex
143. and the permitted range is about 0 3 to about 0 35 The Pirani Calibration Zero value will have to be changed by editing the configuration file in a text editor such as Notepad First use the Save As button on the Configuration tab in VacuumPlus to save the configuration file with a unique name Save the file in a folder that will be easy to locate later Next close VacuumPlus Extorr Inc 307 Columbia Road New Kensington PA 15068 198 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Locate the Configuration file and open it using a text editor such as Notepad The configuration file data is shown below File Edit Format View Help k xml version 1 0 encoding us ascii gt lt ConfigurationData gt lt Communi cationParameters Port COM6 Baud 115200 PacketFrequency 5 0 PacketTimeout 1 0 Communi cationsType 1 UserFrequency 5 0 UserTimeout 1 0 NamedPort Test1 gt lt ConfigurationParameters Fi lename C Users Jack Desktop shipped In Progress Testconfigs 404 A cfg Description Air Leak PTA TimeStamp 07df000900040018000a001b0026006b DateTime 9 24 2015 10 27 38 AM Caption 404 Serial 404 Model 300 gt lt ScanPar ameters ScanSpeed 144 LowMass 1 HighMass 51 SamplesPerAMU 10 gt lt OperatingParameters Mode Mass sweep Focusi 20 Focus2 68 ElectronEnergy 70 Fi lamentEmission 2 0 AutoZero 0ff S
144. apidly to pressures in the 10 torr range In the factory configuration file the filaments are in the activated position and the light bulb icon will glow red when only the Pirani is activated As the pressure drops below 3 x 10 torr the ion gauge starts to operate with a reduced electron emission In this situation the bulb icon shines orange In this pressure region the ion gauge yields the more accurate pressure measurement As the pressure falls below 3x10 torr the electron emission for the ion gauge and the quadrupole analyzer ion source are increased to the value set in the configuration file see the filament emission box under the operating parameters tab At this point the bulb icon becomes yellow and the quadrupole starts operation The factory setting for the quadrupole is a sweep from mass to the highest rated mass of the system This usually makes for a rather cramped spectrum making the assignment of peaks to masses difficult The spectrum may be stretched out either by changing the mass range or by using the width slider at the bottom of the graph If you are pumping down from atmosphere the dominant peaks will be the water peaks at masses 18 17 and 16 The mass spectrum usually consists of a molecular ion parent peak or M peak Then there will also be one or more fragments of the molecule A mass spectrum which includes H20 is shown in Figure 56 The largest peak is the molecular ion H2O with a mass eS EEO EEE
145. ards FL Mice and other pointing devices b T Monitors b E Network adapters a Y Ports COM amp LPT Communications Port COM1 gt p Processors b Sound video and game controllers lil System devices gt Universal Serial Bus controllers USB Virtualization Figure 132 USB to RS232 Device Manager Window Updated Extorr Inc 307 Columbia Road New Kensington PA 15068 128 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Note the COM number of the USB to RS232 Converter in the Device Manager this COM number will need to be selected from the Port drop down menu of the Serial Port group on the Communications tab in the VacuumPlus software Click on the Close button in the Device Manager and also in the Control Panel to close each window As mentioned above the COM number of the USB to RS232 Converter must also be set in VacuumPlus to establish communications between your computer and the RGA CCU If VacuumPlus is currently running close and then restart it to refresh the list of available COM Ports on your computer Once VacuumPlus is restarted click on the Graphics button wu in the main VacuumPlus window to display the operational file folder tabs Next click on the Communications tab and select the COM number of the USB to RS232 Converter that was shown in the Device Manager Port list Click on the Apply button on the Comm
146. arted by double clicking on the Extorr VacuumPlus icon on the user s Windows desktop The Pirani gauge is factory calibrated In the future when the probe is up to atmosphere an atmospheric calibration point may be reestablished by clicking the Pirani 1 Atm Recalibrate button found under the Calibration Parameter tab and then clicking the Apply button The Zero Recalibrate button may be clicked when the system is below 10 4 torr to reestablish the low Extorr Inc 307 Columbia Road New Kensington PA 15068 14 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com calibration point Again remember to click the Apply button The Pirani readouts are the first measurements made immediately upon starting to pump down but this value is displayed only after the first sweep Your factory configuration file includes the factory Pirani calibration parameters 5 3 lon Gauge Readout Total Pressure 6 744 lt 10 9 torr The ion gauge readouts start when the pressure is below the Pirani measurement limits about 107 torr Once on the ion gauge reads continually protecting the system from over pressure The ion gauge pressure 1s reported to the host computer for the total pressure display that is updated at the end of each mass scan 5 4 Filament Activation Switch 9 f The filaments which produce electrons for both the ion gauge and the quadrupole analyzer ion source are turn
147. as its goal to enable generic SGML to be served received and processed on the Web in the way that is now possible with HTML XML has been designed for ease of implementation and for interoperability with both SGML and HTML XML is a trademark of the World Wide Web Consortium VacuumPlus produces XML files on command as well as supporting streaming XML data to an XML port of the user s choosing XML data files may be saved from the Save XML and Save XML As selections from the File drop down menu Configurations may be saved edited in a text file XML format renamed and opened at a later time A representative XML file as read in a browser is given below lt xml version 1 0 encoding us ascii gt lt ConfigurationData gt lt CommunicationParameters Port COM2 Baud 115200 PacketFrequency 5 0 PacketTimeout 1 0 CommunicationsType 1 UserFrequency 5 0 UserTimeout 1 0 NamedPort VacuumPlus gt lt ConfigurationParameters Filename C Documents and Settings Jack Desktop sn132_factory_cal cfg TimeStamp 07d3000b000300130011002100260203 Date Time 11 19 2003 5 33 38 PM Caption Serial 0 Model 0 gt lt ScanParameters ScanSpeed 20 LowMass 14 HighMass 19 SamplesPerAMU 8 gt lt OperatingParameters Mode Mass sweep Focus1 35 Focus2 20 ElectronEnergy 68 FilamentEmission 3 0 AutoZero Off ScanMode Sweep Filament 1 PressureUnits Torr gt lt CalibrationParameters LowCalMass 1 LowCalResolution 672
148. as recorded in the data logging file If the data logging file ends before row 737 the Stop Recording button was clicked before a complete Trend Scan was completed Extorr Inc 307 Columbia Road New Kensington PA 15068 158 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Scrolling through the data logging file in this example we find that the data continues beyond row 737 which indicates that at least one complete Trend Scan has been recorded HOME INSERT v A 2015 09 11 09 17 26 471 2015 09 11 09 17 26 505 2015 09 11 09 17 26 540 2015 09 11 09 17 26 575 2015 09 11 09 17 26 610 2015 09 11 09 17 26 644 2015 09 11 09 17 26 679 2015 09 11 09 17 26 714 2015 09 11 09 17 26 748 2015 09 11 09 17 26 783 2015 09 11 09 17 26 818 2015 09 11 09 17 26 853 2015 09 11 09 17 26 887 2015 09 11 09 17 26 922 2015 09 11 09 17 26 957 2015 09 11 09 17 27 124 2015 09 11 09 17 27 159 2015 09 11 09 17 27 194 2015 09 11 09 17 27 228 2015 09 11 09 17 27 263 2015 09 11 09 17 27 298 2015 09 11 09 17 27 333 2015 09 11 09 17 27 367 2015 09 11 09 17 27 402 2015 09 11 09 17 27 437 2015 09 11 09 17 27 471 2015 09 11 09 17 27 506 2015 09 11 09 17 27 541 PAGE LAYOUT Se 32 999 14 18 28 32 999 RgaTrendDatal AVERAGE 346059 05 49 14 18 28 32 ao 14 18 28 32 a4 14 18 28 32 44 14 RgaTrendDatal xlsx Excel FORMULAS DATA 9 11 20
149. ata in Excel Data at the Start of First Sweep With the RGA in the Mass Sweep mode a sweep begins about half an amu below the Low mass setting In this example the Low mass was set to 1 so the first data point recorded is at 0 6 amu in row 138 above The intensity value recorded at 0 6 amu is 4 06E 10 torr in this example With a Samples amu setting of 10 on the Sweep parameters tab as in this example an intensity measurement occurs every 0 1 amu Extorr Inc 307 Columbia Road New Kensington PA 15068 135 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The last data point recorded in a sweep occurs about half an amu above the High mass setting on the Sweep parameters tab This occurs at 51 5 amu in this example and is shown in row 647 This is the end of the first sweep HOME INSERT 2015 09 08 10 22 11 731 2015 09 08 10 22 11 738 2015 09 08 10 22 11 745 2015 09 08 10 22 11 752 2015 09 08 10 22 11 759 2015 09 08 10 22 11 766 2015 09 08 10 22 11 773 2015 09 08 10 22 11 780 2015 09 08 10 22 11 787 2015 09 08 10 22 11 793 2015 09 08 10 22 11 800 2015 09 08 10 22 11 807 2015 09 08 10 22 11 814 2015 09 08 10 22 11 821 2015 09 08 10 22 11 969 2015 09 08 10 22 11 975 2015 09 08 10 22 11 982 2015 09 08 10 22 11 989 2015 09 08 10 22 11 996 2015 09 08 10 22 12 003 2015 09 08 10 22 12 010 2015 09 08 10 22 12 017 2015 09 08 10 22 12 024 2015 09 08 10 22 12 031 2015 0
150. ated for nitrogen but is roughly the same for air Other gases such as pure argon may cause misleading readouts These may be corrected using a Pirani conversion chart At about 10 torr the hot cathode ion gauge starts into operation at a reduced emission level Dual thoria coated iridium filaments produce electrons which are directed into a well defined volume Within this volume ions are produced and collected by a small diameter wire The magnitude of this current is directly proportional to the pressure of the gas in the volume Again this device is factory calibrated for nitrogen but the user may change the sensitivity factor for other vacuum gases as is given in Appendix B Finally after the ion gauge measures a pressure below 10 torr the quadrupole analyzer may be turned on Now ions are extracted from a second volume These ions are directed along the axis of a set of four parallel rods precisely separated and aligned to produce a nearly perfect hyperbolic field With just the right combination of radio frequency RF potential and direct current DC potential an ion with just the right mass to charge ratio will be directed through the rods to a Faraday cup ion collector All other mass to charge ratios will be rejected long before the ion is collected By carefully scanning the RF and DC potentials a mass spectrum consisting of a number of ion current peaks may be generated If the electron multiplier option was chosen then the
151. atency Timer msec pai Cancel If Power Off COM29 Event On Surprise Removal Timeouts COM30 Set RTS On Close COM31 COM32 Disable Modem Ctrl At Startup Minimum Read Timeout mse cOM33 elle Sae Sa COM34 Minimum Write Timeout mse COM35 COM36 O0 00 oono gnog l i COM37 COM38 COM39 Figure 128 Port Properties Advanced Settings Drop Down COM Port Number List Extorr Inc 307 Columbia Road New Kensington PA 15068 126 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Scroll up in the list of COM numbers to show COM thru COM9 Advanced Settings for COM10 COM Port Number COM 1 in use a USB Transfer Sizes COM2 in use COM3 i Select lower settings to corre Gig in use COMS in use COM7 in use Receive Bytes COMB in use COMS is oe Transmit Bytes COM11 COM12 COM13 i BM Options COM14 Miscellaneous Options Select lower settings to corre ee Serial Enumerator COM17 Serial Printer Latency Timer msec i Cancel If Power Off COM20 Event On Surprise Removal Timeouts COM21 Set RTS On Close COM22 COM23 Disable Modem Ctrl At Startup Minimum Read Timeout mse cOM24 Enable Selective S j COM25 Minimum Write Timeout mse COM26 COM27 COM28 COM29 COM30 m x Lox Defaults m d rates O0 0 0 0 0O 0O K i Figure 129 Device Manager Advanced Setting Window Shows COM1 thru COM9 In Use On this computer
152. below where glow discharge is possible such as 10 torr or below Use the plastic screwdriver supplied for tuning Remove the two plastic plugs from the sides of the CCU Start the software and go to the Operating Parameters tab and select Calibrate from the drop down Mode menu You will Extorr Inc 307 Columbia Road New Kensington PA 15068 12 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com then be presented by a horizontal line on the graph Using the plastic screw driver slightly turn the tuning slug in one direction and note if the graph goes up or down If it goes up turn in the other direction to make the line go down After the line has gone down do the same thing with the tuning slug on the other side of the CCU Go back and forth between slugs until the line is at its lowest position and all other turning just makes the line go up The system is now RF tuned Replace the plugs in the box Always resonate the RF coil when placing a CCU on a new probe Even if CCU and probe remain as a set you may wish to repeat this anytime the probe is moved or if the unit is not getting up to the full mass range 4 8 Start Pump Down After software installation you may start the VacuumPlus exe program and load the configuration file as described above The unit immediately starts making Pirani gauge measurements and knows not to supply power to elements which may be harmed by power application
153. canmMode Sweep Filament 1 Pressureunits Torr EnableelectronMultiplier 0 Multipliervoltage 1070 7 Fi lamentForceoffstartup 0 gt lt CalibrationParameters LowcalMass 1 LowCalResolution 640 LowCcalPosition 0 24 LowcalIonEnergy 5 0 HighCalMass 300 Figure 238 Configuration File Opened in a Text Editor Scroll through the file and find the lt CalibrationParameters group and locate the PiraniZero value 404 A cfg Notepad File Edit Format View Help Filament 1 Pressureunits Torr Enable lectronmultiplier 0 viral a ier voltage 1070 FilamentForceoffstartup 0 gt lt CalibrationParameters LowcalMass 1 LowcalResolution 640 LowcalPosition 0 24 LowCalIonEnergy 5 0 HighcalMass 300 HighcalResolution 1260 HighcalPosition 0 75 HighCalIonenergy 5 0 TotalAmpoffset 2000 PartialAmpoffset 2550 TotaliIntegratingcap 10 00 PartialIntegratingcap 3 00 RFSett leTime 50 swsett leTime 10 PiranilATM 1 98500 PiranizZero 0 29200 PiraniAutoRecalibrate 0 PartialSensitivity 6 00e 004 TotalSensitivity 1 00e 001 debug 0 gt lt LogFileParameters Rode 2 See i lEs Negat endnata egat endjatas csv DirectoryName C RgaDataFi Creationoption 0 NSweeps 1 f Fi leRecordingon 0 gt lt MassTableParameters Samples 600 Audi ooutput 0 es RgaTrendData gt lt Mass1 Enabled 1 Sound 1 Mass 4 Description Heliu
154. ce checking the Logarithmic Y axis j i box Click on the Disable button to Scan Eostin Eoo O it z clear the check box and return to a linear intensity graph The color of the graph window may also be changed here Drop down menus give a choice of background color plot line color and the scan position line color Click Apply and the changes made will take Figure 21 The Plot Tab effect The Printing tab allows for the selection E oer i Inverted colors of what will be printed when Print is y errereen T W Configuration File Name selected from the File menu or the Print Ww Description a J button is clicked in the main M Total Pressure VacuumPlus window The mass graph iv Pirani Pressure colors may be inverted to produce a dark 8 12 2015 1 26 53 PM on light print out instead of light on dark Date format system default The configuration file name the contents Time format system default of the Description box on the Configuration tab along with the Total Help Date formats Pressure and Pirani Pressure readings may also be included on the print out by checking the corresponding box The format of the Date and Time on the Figure 22 The Printing Tab print out may also be changed here using the drop down lists Click Apply and the changes made will take effect Extorr Inc 307 Columbia Road New Kensington PA 15068 29 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMA
155. cel Edit Series Values Box Scroll through the data until the first Mass 14 value is found and then click in the cell in column C to select it H CHART TOOLS HOME INSERT PAGELAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack C601 v fx A B C D E F G H I J a 588 2015 09 16 12 08 06 445 4 1 52E 09 589 2015 09 16 12 08 06 566 4 1 60E 09 590 2015 09 16 12 08 06 688 4 1 52E 09 591 2015 09 16 12 08 06 809 4 1 56E 09 592 2015 09 16 12 08 06 931 4 1 68E 09 593 2015 09 16 12 08 07 052 4 1 59E 09 594 2015 09 16 12 08 07 174 4 1 55E 09 595 2015 09 16 12 08 07 295 4 1 51E 09 596 2015 09 16 12 08 07 417 4 1 55E 09 597 2015 09 16 12 08 07 538 4 1 58E 09 598 2015 09 16 12 08 07 660 4 1 51E 09 599 2015 09 16 12 08 07 781 4 1 54E 09 600 2015 09 16 12 08 07 903 4_1 51E 09 Edit Series 601 2015 09 16 12 06 55 125 14 2 20E 08 602 2015 09 16 12 06 55 247 14 2 24E 08 603 2015 09 16 12 06 55 368 14 2 24E 08 604 2015 09 16 12 06 55 490 14 2 22E 08 605 2015 09 16 12 06 55 611 14 2 22E 08 606 2015 09 16 12 06 55 733 14 2 21E 08 607 2015 09 16 12 06 55 854 14 2 22E 08 608 2015 09 16 12 06 55 976 14 2 22E 08 609 2015 09 16 12 06 56 097 14 2 22E 08 610 2015 09 16 12 06 56 219 14 2 22E 08 611 2015 09 16 12 06 56 341 14 2 21E 08 612 2015 09 16 12 06 56 462 14 2 20E 08 613 2015 09 16 12 06 56 584 14 2 21E 08 614 2015 09 16 12 06 56 705 14 2 20E 08 615 2015 09 16 12 06 56 827 14 2 22E 08 lt Mass
156. centage Fraction Scientific Text vr Type the number format code using one of the existing codes as a starting point Type Font Border Fill Protection Sample rcNormalPosition bottom 934 yyyy mm dd hh mm ss 000 General 0 00 20 0 00 0_ 0 0_ Red 0 0 00_ 0 00 0 00_ Red 0 00 0_ S 0 0_ Red 0 Figure 208 Record Data for Trend Mode in Excel Format Cells Custom Type Entered Click on the OK button to close the Format Cells window Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 177 Extorr Inc The Date Time values in column A are now shown with the correct formatting The Date is displayed as YY YY MM DD and the Time is shown as HH MM SS 000 With this formatting the Time is displayed down to the millisecond If you plan to open this file in the future using Microsoft Excel save the modified file as a Microsoft Excel Workbook a XLSX type file instead of a CSV type file The Microsoft Excel www extorr com Workbook file type will preserve the changes made to the formatting of the Date Time values in column A gt MassSpecData 00404 20150916 120655 csv Excel HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW i fx rcNormalPosition bottom 934 A B C D rcNormalPosition tjottom 934 f gt lt Wind
157. center line An error of only a degree or so will cause the Ionizer end of the Probe to be as much as 1 8 inch about 3 mm off of the center line and may cause a short circuit An unevenly compressed copper gasket could also cause improper alignment within a close fitting tube For these reasons always use the largest inside diameter tube possible To help prevent short circuits the Extorr Quadrupole Probe has two built in spacer rings near the Ionizer The Ionizer Spacer Rings are larger in diameter than the rest of the Probe Assembly and are electrically connected to ground These rings will usually come in contact with the vacuum chamber walls before the other parts of the ionizer or the connecting wires to the electrical feed through pins See the figure below The Spacer Rings will a touch the Chamber tS Before the lonizer or Connecting Wires Source 2 lonizer Repeller Assembly Source 1 2 eae ae BB os Focus 1 ees ee gt lonizer Spacer Rings Quadrupole Frame Connecting Wires to Vacuum Feed Through Figure 86 Ionizer Spacer Ring Location Extorr Inc 307 Columbia Road New Kensington PA 15068 06 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 4 1 Preferred Probe Mounting Arrangement The preferred Probe mounting arrangement is a 2 3 4 inch CF DN 40 CF Flange on a Port that is up to 2 1 2 inches about 64 mm long and opens into a larger cha
158. cing a complete Trend Scan every 21 seconds 210ms Sample 100 Samples Mass Table Samples 100 Add Remove Clear Audio Output Selected Channel V Disable e Graph High High Low Low No No 0 0 0 0 4 Helium 7 ms p Total 1 2 3 4 J 6 8 5 Pirani Figure 165 Record Data in Excel Mass Table used for Trend Mode Data Extorr Inc 307 Columbia Road New Kensington PA 15068 152 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com When opened in Microsoft Excel the contents of the data logging file are displayed At the beginning of the file starting at cell Al are the Configuration parameters RgaTrendDatal csv Excel msie GE X HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack Al fx lt xml version 1 0 encoding us ascii gt A B G D E F G H lt xml verbion 1 0 encoding us ascii gt 2 lt ConfigurationData gt lt CommunicationParameters Port COM6 Baud 115200 PacketFrequency 5 0 PacketTimeout 1 0 CommunicationsType 1 UserFrequency 5 0 UserTimeout 1 0 NamedPort Test1 gt lt ConfigurationParameters Filename C Users ack Desktop Shipped In Progress TestConfigs 404 cfg Description Air Leak PTA TimeStamp 07df00090005000b000900110006000f DateTime 9 11 2015 9 17 06 AM Caption 404 Serial 404 Model 300 gt lt ScanParameters ScanSpeed 144 LowMass 1 HighMas
159. com E 1 3 Set Parameters for Troubleshooting Select the Operating Parameters tab If necessary change to the Mass Sweep mode by choosing Mass Sweep from the Mode drop down menu and then clicking the Apply button Make sure that Auto Zero is set to Off and Pressure Units are set to Torr on the Operating Parameters tab Change these settings if necessary and then click the Apply button EA vacuum Plus 1010 n R by NUM WA Operating Parameters Tab Settings Figure 69 Operating Parameters Tab Settings for Troubleshooting Extorr Inc 307 Columbia Road New Kensington PA 15068 74 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Select the Sweep Parameters Tab and set Scan Speed to 288 sec Low Mass to 1 High Mass to 50 and Samples amu to 10 With these settings a complete Mass Sweep will take about 2 seconds ij S SEE Ei vacuum Plus 1010 a y Fi BU SE S sweep Parameter Tab Settings Figure 70 Sweep Parameters Tab Settings for Troubleshooting Extorr Inc 307 Columbia Road New Kensington PA 15068 75 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 1 4 Examine Output Tab Parameter Values Click on the Outputs tab to bring it to the front of
160. com Extorr Inc www extorr com form chromium oxide an insulator on their surfaces because the ionizer temperature gets to about 200 C in normal operation An insulating substance could also be deposited on the ionizer in the vacuum system Oil back streaming is common when using a rotary vane pump without proper precautions such as a molecular sieve oil trap The oil may produce either insulating compounds or secondary electron emitting surfaces in the ionizer This can cause a charge from electrons to build up and disturb the electric fields in the ionizer or the mass filter leading to low sensitivity Deposition systems can also deposit insulating materials on the vacuum probe surfaces In the case of oxidation replacing the filament and ionizer will usually restore proper operation because the quadrupole mass filter does not get hot enough to oxidize In the case of contamination from outside sources the quadrupole will probably need to be cleaned in addition to the replacement of the filament and ionizer See section 7 Maintenance for detailed instructions for cleaning the quadrupole and replacing the ionizer and filament Another reason for the filament tripping could be that the RGA vacuum feed thru pins have become oxidized from a high temperature bake out The pins are made of nickel alloy and form nickel oxide at high temperatures increasing the contact resistance In normal operation the resistance of filaments is only about 0 5 Ohms
161. d in Section 4 7 Resonating the RF Coil of the Extorr RGA User Manual An XT300 or XT300M system in the Mass Sweep Mode with Low Mass set to 1 and High Mass set to 300 produces a RF Amp reading of about 20V The reading is updated at the end of every scan If the RF Amp reading is greater than about 22 5V try tuning the CCU as described in Section 4 7 Resonating the RF Coil of the Extorr RGA User Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 93 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 3 12 Pirani Temp The Pirani Temp is proportional to the Sensor temperature near the Pirani wire During normal operation the Pirani Temp reading will be in the range of 0 1 V to 1 0 V E 3 13 Pirani Corr The Pirani Corr is proportional to the Pirani wire temperature During normal operation the Pirani Corr reading will be in the range of 0 1 V to 1 0 V E 3 14 Pirani Press The Pirani Press is proportional to Pressure During normal operation the Pirani Press reading will be in the range of 0 3 V to 2 5 V E 3 15 FB During normal operation the FB reading will be in the range of 2 25 V to 2 5 V when the Quadrupole DC Power Supply is operating correctly E 3 16 FB During normal operation the FB reading will be in the range of 2 25 V to 2 5 V when the Quadrupole DC Power Supply is operating correctly E 3 17 Focus 1 FB The Focus 1 FB reading
162. d may be ignored but they may give a clue if the software does not run on your computer Find the factory configuration file on the CD and copy it to your computer The file is named snXXXX factory _cal cfg where XX XX is the serial number of the CCU This factory configuration is unique to the unit with which it was shipped and it should only be used with that unit It is a good idea to make a copy of this file with a different name and save it on the computer hard drive After the file is renamed right click on the file name and select Properties from the menu Uncheck the Read only box in the Attributes section of the Properties window and then click on the OK button Use the Open button on the Configuration tab to load the factory settings in renamed file into VacuumPlus 4 7 Resonating RF Coil Each Extorr probe and each Extorr electronics unit CCU is unique When a CCU is moved from one probe to another the CCU RF coil may be tuned for that particular probe When an Extorr system is delivered it is tuned for maximum performance in the factory test chambers as a matched set When placed in a new vacuum system environment the RF coil may be slightly off resonance This is usually not a problem especially for the 100 amu models but to return to maximum performance the coil may be tuned for the new environment This may be done when the system is at atmosphere the filament must be turned off manually or at a pressure far
163. d on the CD is designated as snXXXX_ factory cal cfg The XXXX is the four or three digit serial number of the CCU This is a factory configuration which is unique to the unit with which it was shipped and it should only be used with that unit It is a good idea to give this file another name with the same cfg extension and save it on the computer hard drive Even if the factory file is corrupted it may be recopied to your system from the VacuumPIlus installation disk Load the factory configuration file into VacuumPlus by clicking on the Open button on the Configuration tab and navigating to the folder that it was copied to As seen above the GUI uses a file tab organization to allow the user to create edit and store configurations The configuration files have an extension CFG and are in the XML file format These may then be called up as desired Extorr Inc 307 Columbia Road New Kensington PA 15068 17 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The operational folders tabs give the user control of his system settings These tabs are shown below Calibration parameters Diagnostics Outputs Mass Table Plot Printing Log Configuration Communications Record Data Sweep parameters Operating parameters Figure 7 Folder Tabs for Operation As the user changes his system settings a red check mark appears on the folder tab These changes only tak
164. dDatal xlsx Excel foci Ele FORMULAS DATA REVIEW VIEW DEVELOPER john hack v 9 11 2015 9 17 06 AM 2015 09 11 09 17 06 367 2015 09 11 09 17 06 575 2015 09 11 09 17 06 783 2015 09 11 09 17 06 992 2015 09 11 09 17 07 200 2015 09 11 09 17 07 408 2015 09 11 09 17 07 617 2015 09 11 09 17 07 825 2015 09 11 09 17 08 033 2015 09 11 09 17 08 242 2015 09 11 09 17 08 450 2015 09 11 09 17 08 658 14 2015 09 11 09 17 08 867 2015 09 11 09 17 09 075 2015 09 11 09 17 09 283 2015 09 11 09 17 09 492 18 2015 09 11 09 17 09 700 i 2015 09 11 09 17 09 908 20 2015 09 11 09 17 10 117 2015 09 11 09 17 10 325 2015 09 11 09 17 10 533 2015 09 11 09 17 10 742 2015 09 11 09 17 10 950 2015 09 11 09 17 11 158 2015 09 11 09 17 11 367 2015 09 11 09 17 11 575 2015 09 11 09 17 11 783 RgaTrendDatal AVERAGE 339580 25 57 COUNT 7830 Figure 184 Record Data in Excel Data Sorted by Mass Value in Column B In this example a complete Trend Scan contains 100 Trend Data Samples so to graph the first scan select the Mass values in column B and the Intensity values in column C for rows 1 to 100 RgaTrendDatal xlsx Excel 7 amp OH X HOME INSERT PAGE LAYOUT Se 2015 09 11 09 17 24 075 2015 09 11 09 17 24 283 2015 09 11 09 17 24 492 2015 09 11 09 17 24 700 2015 09 11 09 17 24 908 2015
165. down arrows may be used z al to change the values The low mass must be less than Sempres amu J the high mass and the low mass may not be set below 1 The high mass may not be set above the mass range of the system being used An allowed value will display a green background A value which is not allowed results in a red background and a frowning face with an error message at the top of the Tab The sweep will start at about half an amu below the Low Mass and stop at roughly half an amu above the High Mass Figure 10 The Sweep Parameters Tab The Samples amu setting is the number of evenly spaced samples taken within a one amu mass range This value must be an integer between 6 and 20 Extorr Inc 307 Columbia Road New Kensington PA 15068 19 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Scan Speed is the number of samples measured per second The user must choose from the values in the drop down menu The Samples amu and Scan Speed settings together determine the time required for a scan For example a scan speed of 2 sec and a samples amu setting of 10 would produce a scan rate of 1 amu in 5 seconds or 0 2 amu second Click Apply and the changes made will take effect The red check will disappear The user may wish to save these settings in a new configuration file 1 The GO 1 Scan and STOP buttons operation The GO or Start Scan
166. ds cass a Auaeoea eaten taee 21 6274 Ee Cirom WIIG Esana e O r r i casanendearelenendeadaeas 22 Ga Ds AOL CIO ar E S EE aesuenttes 22 GeO Press Uiier CIS arora a E EE 22 Gi Jit Paice MU C OMUOM E teach A E EE AE A E E EE T 22 6 5 Calibration Parameters TabDuissersissisiisirncsossrcnereenoresce ensaioa ae aesa ea aeieea a as 23 OS E LOW C aland IC AN eanan E E E S 23 0S2 UMNO NO a E E A E A 23 COP EE Ora Oe ar E E Tame er neT Ter nraent mre tnt eee ete re Uere rere 24 626 4 Loralvand Partial Inte satin Caps iors cases awcsanncticsaeicuaruasnniahoe verieansab sl uj caso ueameas A A EE E A E RARE 24 6 26 54 Loland Paral Sens VIIy oiea E a sh uj ceuoueameas ye caeat E AE acanunanioass 24 OS Or DONOSE S erara tenteny ee tanegsit nace E neces nen aon st GaceLnoamnin acest hiauau nau ss acumen nancen seca t tunes 24 69 Mass Table T ani cxcesissisceccessscucsvnsuassedususustuaaieuscededevsswuswaudadusuauatvadeessduccsauasavaneusaduasaustuaceessevesenss 24 ST Miss Table Setup tor Leak Detectia nren a E Ween ae 26 6 10 Outputs Taboras aisea EEEE AA 28 l POC Tabiin E A E 29 GAZ Ernt Ta Desna N a A 29 GESTS Tabee E RR 30 614 Record Data TaD esiisosiiriisesnneti sionen Ea a aaRS aaa 31 Onl Le Record na Data OR yeaa a a nad ueean duu sanaaAdigeeda maueeeenes 31 O42 Recording DATOS Fie e aw ence Acne Maree ntlaaes 32 6 14 53 Recording Data fo Mili ple Piles a ciysias San ceit esc ceed Gareteoni tne tdnadeau ba bnciel datene stunned ada au Raw eaneh
167. e Save As command Type Outputs1 into the File Name box and select JPEG File Interchange Format jpg Jpeg from the Save As Type drop down list By default Paint will save the file in the My Pictures Folder To save the file in a different location select a folder from the drop down list under the Save In box Click the Save button to save the screen capture Extorr Inc 307 Columbia Road New Kensington PA 15068 78 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com In the Paint program select New from the File menu Minimize the Paint program window and return to the VacuumPlus window If necessary maximize the VacuumPlus window so that it fills the entire screen Click on the Split Mode button in VacuumPlus to switch to the Mass Sweep Graph mode In the Graph mode the Mass Sweep will fill the entire VacuumPlus window A acuum Plus 1010 ol x TRE ew Widow He Zleix PEND r uw A Operational Folders Hidden Figure 74 Mass Scan Only Display for Screen Capture Adjust the Scale and Zero sliders in the VacuumPlus Mass Sweep window so that any Ion Peaks that are present are clearly visible Press the Print Screen key on your keyboard to save the VacuumPlus window to the Clipboard Back in the Paint program window select Paste from the Edit menu The
168. e 2 45 to 2 55 2 489232 volts k5 Source 1 Current 0 mA SN should be about 1 0 mA k G seucer curent 0 000031 ma Ground ref 4 02 0 011288 vot RF Amp Oto 20 0 4 198112 Focust FB Focust 18273 vots 8 KEG Sanit E Pirani Temp 1 to 1 0 0 139896 volts Repeler 2 0 Elec_En 15272 vots paoi Piani Cor 1t0 1 0 0 140280 vott Filament Power E x zk 0 kT a Mi should be Piani Press 3to 25 0 316207 vots Filament DAC Coarse Wa NE reese Focus 1 FB 152V _FB 225t025 24076e0 Flament DAC Fine 8 should be about 20V k J e 2251025 0498140 vo kT RR A k9 Repeller 152V should be about 68V Filament Power 5 1 0 because Filament is OFF vacuum Plus 1010 Ee er anin iee ee Filament Switch Turns OFF Automatically after k 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum k 2 shown on Mass Sweep Graph Figure 77 Outputs Tab and Mass Scan Graph Source 1 Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 g2 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc E 2 4 Source 2 Shorted to Vacuum Chamber Ground EE Plus 1010 lolx BP Eile m a Window Help P la x E a Pirani Pressure 1 00x10 4 torr amp F Start Degas lK4 a Mass Table Plot Printing Log Configuration Communications Sweep parameters Operating parameters Calibration parameters Diagnos
169. e place after the Apply button at the bottom of the folders is clicked When clicked the new settings are applied and the red check is cleared We will now discuss the contents of each folder tab Communications 6 4 Communications Tab The Communications tab contains the controls for the i T i A Restart Retry communications channel serial communication link between the user s computer and the Extorr RGA Command and Control Unit CCU BLE Ie The Port drop down list displays all com ports that are Pot COME x present on the user s computer Select the Port that is Speed 115200 connected to the Extorr RGA CCU by the RS232 cable and the USB to RS232 Converter if present Communications Setup The factory configuration file on the Extorr CD has the Communications Local COM pot Port set to COM and will have to be changed to the z correct port number for the user s computer 1 0 z mH See Appendix G COM Port Troubleshooting for help finding the COM Port number that is connected to the CCU XML Setup Service Port Test The baud rate is set by selecting one of the values in the Speed drop down list Choose the highest setting that provides error free communications Most systems will work at 115200 Baud with the supplied RS232 Cable and USB to RS232 Converter if present Reduce the Speed Figure 8 The Communications Tab setting if communication errors occur The Communications
170. e Degas mode and with the Filament Activation Switch set to ON this reading should be about 50 of the Filament Emission setting The sum of this current and the Source 1 Current should be roughly equal to the Filament Emission control setting on the Operating Parameters tab The factory default setting for the Filament Emission control is 2 0 mA If Source 2 is shorted to the Vacuum Chamber Ground and the Filament Activation Switch is set to ON the Source 2 Current will be 0 mA and the Filament Light Bulb Icon will show a Red Dot with an X across it after several complete Mass Sweeps E 3 11 RF Amp The RF Amp displays a voltage reading in the Quadrupole RF section of the electronics that is roughly proportional to the High Mass control setting on the Sweep Parameters tab An XT100 or XT100M system in the Mass Sweep Mode with Low Mass set to 1 and High Mass set to 100 produces a RF Amp reading of about 7 5V The reading is updated at the end of every scan If the RF Amp reading is greater than about 9V try tuning the CCU as described in Section 4 7 Resonating the RF Coil of the Extorr RGA User Manual An XT200 or XT200M system in the Mass Sweep Mode with Low Mass set to 1 and High Mass set to 200 produces a RF Amp reading of about 13 5V The reading is updated at the end of every scan If the RF Amp reading is greater than about 13V try tuning the CCU as describe
171. e Stop Icon to go from Graph only to Tabs plus Graph operational file folder tabs become visible When in the split mode the graphic button becomes The VacuumPlus window and these two sub windows may be resized to the user s preferences using the usual pull the mouse on the edge technique See section 6 19 Graph Window for additional information Extorr Inc 307 Columbia Road New Kensington PA 15068 16 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 2 GUI The Graphical User Interface GUI is shown below Note the Tool Bars the pressure readouts the graphics mode switch the graph scale slider and zero slider and the operational folder tabs The user should take some time moving the mouse from icon to icon to activate pop up labels of their functions amp Vacuum Plus 404 F File Edit View Window Control Help ro Oe 6 BEB Relea W B Total Pressure 3 894x103 torr Pirani Pressure 1 00 104 torr Q 4 Start Degas Start Recording E E Mass Sweep Calibraton parameters Diagnostics Mass Table Plot Printing v Configuration Communications Scan speed 48 x jpet Low mass f amu High mass g amu Samples amu 10 Figure 6 The Graphical User Interface GUI 6 3 Operational Settings Although the system comes up in a default mode the user has complete control over the configuration of his system The factory default configuration file foun
172. e largest measurement is the one reported The Mass Table may contain a maximum of 16 entries but the total size of the table is limited by the number of entries and the value entered into the Samples box The product of these two values must be less than or equal to 45000 One Data Sample point in the Trend mode consists of a complete set of measurements of all enabled entries in the Mass Table The Data Sample points are displayed as pressure or ion current on the vertical axis of the Mass Table graph in the main VacuumPlus window and may be saved and exported using the controls on the Record Data tab The time required to make one Trend Data Sample measurement may be calculated by adding together the actual Dwell Times Dwell column setting 5 measurements for all Mass Table entries that are enabled For example the Mass Table in Figure 17 above has the Dwell Time set to 100ms for each entry and all are enabled The actual Dwell Time for each entry is 100ms 5 measurements which equals 500ms per entry There are 9 enabled entries in the table so the total time is 9 entries 500ms actual dwell time per entry which equals 4 5 seconds for each Trend mode Data Sample Use shorter Dwell Times and fewer Mass Table entries for fast changing processes or for leak checking One Trend Mode Scan is made up of a number of Trend Data Samples The value entered in the Samples box on the Mass Table tab determines the number of data samples in a complete Trend
173. eate the chart Extorr Inc 307 Columbia Road New Kensington PA 15068 140 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The Mass Intensity Chart is generated and shown at the center of the Excel window The chart may be dragged to a blank area of the work sheet and resized and formatted as desired Data logging files containing numerous sweeps as in the example above are also created in the To Multiple Files mode using the On The Hour At Midnight or After N Sweeps options The MH S HOME INSERT RgaSweepData2TimeAndDateFormatCorrected csv Excel 3 2015 09 08 10 22 11 724 2015 09 08 10 22 11 731 2015 09 08 10 22 11 738 2015 09 08 10 22 11 745 2015 09 08 10 22 11 752 2015 09 08 10 22 11 759 2015 09 08 10 22 11 766 2015 09 08 10 22 1 2015 09 08 10 22 11 2015 09 08 10 22 1 3 2015 09 08 10 22 1 2015 09 08 10 22 1 1 80E 08 1 60E 08 1 40E 08 2015 09 08 10 22 1 2015 09 08 10 22 1 2015 09 08 10 22 11 2015 09 08 10 22 1 2015 09 08 10 22 1 2015 09 08 10 22 1 2015 09 08 10 22 1 2015 09 08 10 22 1 2015 09 08 10 22 1 1 20E 08 1 00E 08 8 00E 09 6 00E 09 4 00E 09 2 00E 09 0 00E 00 2 00E 09 2015 09 08 10 22 1 2015 09 08 10 22 12 017 2015 09 08 10 22 12 024 2015 09 08 10 22 12 031 2015 09 08 10 22 12 038 2015 09 08 10 22 12 045 2015 09 08 10 22 12 052 PAGE LAYOUT Se B G 50 1 1 96E 11 50 2 9 29E 12 50 3 2 76E 11 50 4 6 79E
174. ectron energy which controls sensitivity Filament emission controls the amount of electrons available for ionization Ion energy which controls sensitivity and peak shape Focus which can affect sensitivity and peak shape High Cal Mass and Low Cal Mass which control the set points on the mass scale from which extrapolation and interpolation for Ion Energy Mass Position and Resolution values are taken 6 High Cal Position and Low Cal Position which control where peaks are placed on the mass scale and where the High Resolution and Low Resolution settings are applied 7 High Resolution and Low Resolutions which control spectrum wide resolution peak shape and sensitivity Sia ae Quadrupole rods act as a mass filter For a given mass to charge ratio a large number of combinations of RF and DC voltage will allow that ion through the length of the rods In fact all combinations of RF and DC below a unique nearly triangular graph will allow that ion through This is called the quadrupole stability diagram Note that this graph is reflected in the V oc Extorr logo A second ion say with half the mass to charge ratio as the first will have a completely similar stability diagram as shown in lt lt Figure 62 We can now see how this arrangement can be V used to produce a mass RF spectrometer Clearly if we have combinations of RF and Figure 62 Stability Diagrams DC voltages in the region A neither of
175. ed The COM number has been updated to COM4 Click on the OK button to close the properties window Extorr Inc 307 Columbia Road New Kensington PA 15068 120 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com In the Device Manager window the COM number of the USB to RS232 Converter has also been updated it is USB Serial Port COM4 in this example aa Device Manager File Action View Help C AEN e a e PRs g Jack PC JE Computer gt a Disk drives MG Display adapters gt 43 DVD CD ROM drives gt 3 Human Interface Devices Ca IDE ATA ATAPI controllers lt gt Keyboards gt A Mice and other pointing devices ik Monitors MY Network adapters a Y Ports COM amp LPT o o Communications Port COM a Processors ily Sound video and game controllers n JE System devices gt Uniwersal Serial Bus controllers gt USB Virtualization Figure 119 USB to RS232 Device Manager Window Updated Note the COM number of the USB to RS232 Converter this COM number will need to be selected from the Port drop down menu of the Serial Port group on the Communications tab in the VacuumPlus software Click on the Close button in the Device Manager and also in the Control Panel to close each window As mentioned above the COM number of the USB to RS232 Converter must also be set in VacuumPlus to establish communications between your comput
176. ed ao be D E PFN NAAS E Configuration Communications Sweep parameters Operating parameters Mass Table plot printing tog Calibration parameters Diagnostics Outputs Degas curent ma Filame Electronics Temperature a C Filament Power sef volts Sensor T Rig ht Side of Outputs tab Sanele Ae is not visible Source current ma Ground r RF Amp 0to200 volts Focust F PiraniTemp 1to 1 0 volts Repeller 2 0 PirsniCon 1 to 1 0 volts Filan Pirani Press 3to 25 volts Filament D FB 225t025 vots Filamen FB 225t025 vots gt um Z Outputs data is blank until the first Mass Sweep is completed Figure 66 Right Side of Outputs Tab Not Visible Extorr Inc 307 Columbia Road New Kensington PA 15068 72 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com With the entire Outputs tab visible note that some parameter values change slightly at the end of every scan when the display is updated with the latest data re File Edit view Window Help 18 x Total Pressure 1 908 x10 7 torr Pirani Pressure 1 00 x10 4 torr Q j Start Degas a Mass Svreep Zea Aae Configuration Communications Sweep parameters Mass Table Plot Printing Log sm 7 Operating parameters Calibration parameters Diagnostics Outputs Degas current 23 ma Filament Yoltage 2 09 volts Site Electronics Temperature
177. ed off and on manually or automatically under computer control The filaments are controlled manually using the Filament Activation Switch in the main VacuumPlus window or with the Filament controls on the Operating Parameters tab If the filaments are turned on by either control and the pressure is too high for ion gauge operation the light bulb icon next to the Filament Activation Switch is displayed as red If the ion gauge may be used but not the quadrupole the light bulb icon will be orange Finally the bulb will become yellow when the quadrupole is operational When the filaments are turned off the light bulb icon will appear gray If the configuration file is saved with the filament on the automatic filament turn on sequence is activated the next time VacuumPlus is started If the Pirani gauge reading is less than about 10 torr the filaments turn on at a reduced emission level to enable ion gauge operation When the ion gauge measures a pressure below about 10 torr the quadrupole analyzer begins operation The ion gauge continually monitors the vacuum and protects the RGA system from over pressure To override the automatic turn on sequence check the box for Filament Force OFF on Startup on the Operating Parameters tab This will disable the automatic turn on sequence when VacuumPIlus is first started and the filaments will remain off until turned on manually 5 5 Reading Mass Peak Heights Operating voltages are
178. ed to be replaced EK 3 8 Sensor Temperature The Sensor Temperature displays the temperature at the electrical feed through pins of the Quadrupole Probe When power is first applied the Sensor Temperature will be about equal to the ambient room temperature and will increase to about 40 C after operating for about an hour Extorr Inc 307 Columbia Road New Kensington PA 15068 92 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 3 9 Source 1 Current The Source 1 Current is a measurement of the electron current in milliamps that arrives at the Ion Source Grid When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading should be about 50 of the Filament Emission setting The sum of this current and the Source 2 Current should be roughly equal to the Filament Emission control setting on the Operating Parameters tab The factory default setting for the Filament Emission control is 2 0 mA If Source 1 is shorted to the Vacuum Chamber Ground and the Filament Activation Switch is set to ON the Source 1 Current will be 0 mA and the Filament Light Bulb Icon will show a Red Dot with an X across it after several complete Mass Sweeps E 3 10 Source 2 Current The Source 2 Current displays the electron current in milliamps that arrives at the B A Gauge section of the Ionizer When NOT in th
179. efore the fifth Trend Scan completed 2692 2693 2694 2695 2696 2697 2698 2699 2700 2701 2702 2703 2704 2705 Figure 178 Record Data in Excel Last Trend Data Sample Point Appended to File Y HOME INSERT 2015 09 11 09 18 35 371 2015 09 11 09 18 35 406 2015 09 11 09 18 35 441 2015 09 11 09 18 35 476 2015 09 11 09 18 35 510 2015 09 11 09 18 35 545 2015 09 11 09 18 35 580 2015 09 11 09 18 35 615 2015 09 11 09 18 35 649 2015 09 11 09 18 35 684 2015 09 11 09 18 35 719 2015 09 11 09 18 35 753 2015 09 11 09 18 35 788 2015 09 11 09 18 35 823 PAGE LAYOUT fx RgaTrendDatal 44 14 18 32 44 999 14 18 28 32 pa 999 1 69E 08 2a AVERAGE 346059 06 12 RgaTrendDatal xlsx Excel FORMULAS DATA 9 11 2015 9 18 36 AM C 1 85E 10 1 70E 08 5 46E 10 9 74E 09 6 02E 09 1 48E 09 1 89E 10 1 69E 08 5 81E 10 9 66E 09 5 93E 09 1 47E 09 1 54E 10 COUNT 3 D SUM 1038177 18 36 REVIEW EH VIEW DEVELOPER _1 _ john hack Y 100 A graph may be generated in Excel to analyze the data One way to generate a useful graph is to first sort the data by the Mass value in column B This groups all the measurements for each mass together and makes it easier to select the data and add it to the graph Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 161 Extorr Inc www extorr com
180. epeller Source 1 and Focus 1 Figure 93 Short Circuit between Repeller Source 1 and Focus 1 To repair the short first gently bend the Repeller Source2 Assembly away from the Source 1 plate If possible bend the Repeller Source 2 Assembly back so that its outside edge is parallel to the Quadrupole Frame Next carefully bend the Source 1 plate to remove the short circuit between Source 1 and Focus 1 Bend the Repeller Source2 Assembly and the Source 1 plates until there are gaps between them as shown in the un damaged probe drawing above Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between the Repeller Source2 Assembly and Source 1 plate then check for an open circuit between Source 1 and Focus 1 Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 103 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com If the Source 1 plate is bent there may be a short circuit between the Source plate and Focus 1 See the drawing below Gap between e Repeller Source 2 Assy Repeller amp Source 1 Source 1 Bent and KU Touching Focus 1 Focus 1 short Circuit between Source 1 amp Focus 1 Connecting Wires Parallel to Frame VA and Not Shorting Quadru
181. er Sizes COM2 in use Select lower settings to corre COM3 d rates COM4 TS fas CO in use x Defaults Select higher settings COM6 in use COM in use Receive Bytes COM in use COMS in use Transmit Bytes COM10 DES COM12 COM13 BM Options COM14 Miscellaneous Options Select lower settings to corre br z Serial Enumerator 7 COM17 Serial Printer Latency Timer msec ee Cancel If Power Off E COM20 Event On Surprise Removal E Timeouts COM21 Set RTS On Close al COM22 i COM23 Disable Modem Ctrl At Startup fal Minimum Read Timeout mse COM24 Bei sie ee FI COM25 i Minimum Write Timeout mse COM26 Selective Suspend Idle Timeout secs ss COM27 COM28 COM29 COM30 e Figure 117 USB to RS232 Advanced Settings COM Port Number List Showing COM1 thru COM9 On this computer COM1 COM2 and COMS5 thru COM9 are currently in use but COM3 and COM4 are available Choose one of the unused COM numbers between COM1 and COM9 for the USB to RS232 Converter in this example COM4 is selected Click on COM4 in the list and then on the OK button to accept the change and close the Advanced Settings window In the COM Port Properties window click on the General Tab USB Serial Port COMA Properties USB Serial Port COM4 Device type Ports COM amp LPT Manufacturer FTOI Location on USB Serial Converter Device status This device is working property Figure 118 USB to RS232 Port Properties General Tab Updat
182. er and the RGA CCU If VacuumPlus is currently running close and then restart it to refresh the list of available COM Ports on your computer Once VacuumPlus is restarted click on the Graphics button wm in the main VacuumPlus window to display the operational file folder tabs Extorr Inc 307 Columbia Road New Kensington PA 15068 121 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Next click on the Communications tab and select the COM number of the USB to RS232 Converter that was shown in the Device Manager Port list Click on the Apply button on the Communications tab for the changes made to take effect Serial Fort Figure 120 VacuumPlus Communications Tab Port List The Port list on the Communication tab of VacuumPlus contains only the COM ports installed on your computer This list will contain the same COM port numbers as shown in the Ports list of the Device Manager Remember to save your Configuration File with the new COM Port setting by clicking on the Configuration Tab and then on the Save button or use the Save As button to give it a different file name VacuumPlus will load the newly saved Configuration File whenever the software is restarted a Device Manager File Action View Help m e a Ports COM amp LPT i T PCI Serial Port COMS gt T Processors gt Sound video and game controllers gt li System devices g m l lrn
183. er as well The Electron Multiplier is sealed in a plastic bag containing dry nitrogen Leave the multiplier in its shipping bag until you are ready to install it F 2 Preparation Prepare to remove the Quadrupole Probe from your vacuum system by turning OFF the Ionizer Filaments Allow the ionizer to cool for at least 30 minutes before venting your vacuum system Unplug the DC Power Supply Connector and then the RS 232 Cable from the CCU Box Loosen the CCU mounting bolts and then remove the CCU from the Vacuum Flange being careful not to bend the flange pins After the Ionizer has cooled vent your vacuum system and remove the quadrupole probe from the vacuum chamber ATTENTION Always handle the vacuum side of the probe and the electron multiplier with clean gloves or you will see the results of your contamination on the next scan A fingerprint will outgas and cause peaks at virtually every amu until it is evaporated or turned into low vapor pressure compounds in your vacuum system Of course other sources of contamination such as diffusion or mechanical pump oil could cause similar problems Even after the volatiles are gone the residue may cause the probe to operate improperly by leaving behind either insulating compounds or secondary electron emitting surfaces This can cause charge from electrons to build up and disturb the electric fields in the ionizer or the mass filter leading to low sensitivity Extorr Inc 307 Columbia Road N
184. er format code using one of the existing codes as a starting point Lox _cancet_ Figure 139 Record Data in Excel Format Cells Custom Category Selected Click in the Type box and delete General and then enter yyyy mm dd hh mm ss 000 into the box Format Cells Number Alignment Border i Protection Category General Sample gt Type yyyy mm dd hh mm ss 000 Percentage General Fraction Scientific 0 00 Text 420 Special 70 00 ee 0_ 440 0_ Red 0 0 00_ 0 00 0 00_ Red 0 00 0_ S 0 0_ Red 0 Type the number format code using one of the existing codes as a starting point ox cane Figure 140 Record Data in Excel Format Cells Custom Type Entered Click on the OK button to close the Format Cells window Extorr Inc 307 Columbia Road New Kensington PA 15068 133 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Date Time values in column A are now shown with the correct formatting The Date is displayed as YY YY MM DD and the Time is shown as HH MM SS 000 With this formatting the Time is displayed down to the millisecond If you plan to open this file in the future using Microsoft Excel save the modified file as a Microsoft Excel Workbook instead of a CSV type file The Microsoft Excel Workbook file type will preserve the changes made to the
185. eters 4 Port COM6 5 Baud 115200 6 PacketFrequency 5 0 7 PacketTimeout 1 0 8 CommunicationsType 1 9 UserFrequency 5 0 UserTimeout 1 0 NamedPort Test1 gt lt ConfigurationParameters Filename C Users Jack Desktop Shipped In Progress TestConfigs 404 152006 cfg Description Air Leak PTA TimeStamp 07df000900020008000a0016000800c2 DateTime 9 8 2015 10 22 08 AM Caption 404 Serial 404 Model 300 gt lt ScanParameters ScanSpeed 144 LowMass 1 HighMass 51 SamplesPerAMU 10 RgaSweepData2 Figure 135 Record Data CSV File Opened in Excel Extorr Inc 307 Columbia Road New Kensington PA 15068 130 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Configuration parameters end with the lt ConfigurationData gt label at cell A137 in this example The data below the configuration parameters starting in row 138 in this example are the Date Time Mass and Intensity values from the recorded sweeps The Date Time values are in column A the Mass values in column B and the Intensity values in column C The default cell formatting in Excel does not display the Date Time values correctly This is a problem with the way that Excel interprets the information even though the ASCII data in the CSV file clearly shows the Year Month Day and Time To change the formatting for column A first select all values in the column by clicking on t
186. ew Kensington PA 15068 106 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com F 3 Install Electron Multiplier The Electron Multiplier will be installed on the high vacuum side of the Quadrupole Probe assembly It fits in the open space at the base of the quadrupole near the Faraday Detector See the figure below Electron Multiplier NJ Drasevbr are ee ge T athe A z 4 pen TRA PER oS re ES Se AE PELs ESSE SERS WEES SASS Se ee Eo ASE SS IES A TEE IER EL EN EA OEST NEI AOA D ua DA S S A T Rg r a e G S ee JUIN EHN AN 1 Ji Figure 96 Electron Multiplier Location Wearing a clean glove remove the Electron Multiplier from the sealed plastic bag and identify the Top and Bottom Mounting Tabs and the Contact Spring Sockets See the figure below Top Mounting Tab oS Contact Boron Mountin Spring ar Tab Y Sockets Figure 97 Electron Multiplier Mounting Tabs Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 107 Extorr Inc www extorr com Hold the multiplier at an angle with the Bottom Mounting Tab facing in toward the Faraday Cup as shown in Figure 98 Align the two Spring Contacts on the flange with the Sockets on the multiplier and carefully insert the Bottom Mounting Tab into the lower slot on the flange See Figure 98 Compress the Contact Springs but make sure
187. figuration File Load your last known good Configuration file or the Original Factory Configuration File that came on the Extorr CD with your RGA System The Configuration File is stored in volatile memory in the CCU and must be downloaded every time that power to the CCU is first applied See the FirstTimeR gaStartUp avi Instruction Video also on the Extorr CD for information on copying the Original Factory Configuration File from the CD to your computer NOTE If you load the Original Factory Configuration File you may have to change the Serial Port setting on the Communications Tab Wait for the Configuration File Download to finish and the RGA to start scanning If necessary switch to the Mass Sweep Mode To change modes first select the Operating Parameters tab and then choose Mass Sweep from the Mode drop down menu then click on the Apply button E 1 2 Configure VacuumPlus for Troubleshooting Prepare for troubleshooting by setting the Extorr VacuumPlus Software to display the Mass Sweep Graph and the Outputs Tab When the VacuumPlus Software is started only the Mass Scan or Mass Table Graphs are displayed the Operational Folder Tabs are hidden Click the Graphics button to switch to the split screen display that shows both the Mass Graph and the Operational Folder Tabs lzi xi BPE PA vacuum l has 110 F Flo Edt Ae vndow Fep oR Sa R REJSE wuld PR ssrt Pirani 53e
188. fully message is shown USB Serial Port COM11 Device driver software installed successfully n fm Ul ae ia 10 05 AM Lal Figure 104 Device Driver Software Installed Successfully Message Windows automatically assigned COM11 to the USB to RS232 converter installed in this example A different COM number may be assigned to the converter on your computer The COM number must be between COM1 and COM9 to work with the VacuumPlus Software so the COM number will have to be changed using the Windows Device Manager Always use the latest USB to RS232 adapter driver For the FTDI adapters which Extorr currently uses the driver is version 2 8 24 0 and the driver date should be no older than 04 10 2012 Some older USB adapters made by Prolific have various problems with changing baud rates and do not work properly without the newest drivers and some do not work at all on Windows 7 and above G 3 Identifying the COM Number of the USB to RS232 Converter Windows automatically assigns the COM number to the USB to RS232 Converter when the driver software is installed Often there are several COM Ports installed in the computer and identifying which COM Port is the USB to RS232 Converter may be difficult The Device Manager may be used for this purpose Click the Windows Start button to display the menu and then click on the Control Panel button i r a Xilinx iMPACT 11 ocumen Pictures Excel 2013 Music
189. g by placing a finger on the back of them while starting the CCU mounting bolts Hand tighten the CCU mounting bolts and the CCU will be firmly attached to the probe These mounting bolts give electrical mechanical and thermal stability to the unit and must be installed and tightened 4 5 Attach the RS232 Cable and Power the Unit Attach the RS232 cable to the CCU and to any unused COM port of your windows operated computer A single computer can run multiple CCUs We require the operating system to be Windows XP 7 8 or 10 Some computers no longer support the nine pin COM port standard In these cases a USB port may be used in conjunction with the supplied USB to RS232 Converter The DC power supply may now be attached to the CCU and plugged into a wall socket 4 6 Install the VacuumPlus Software Take the VacuumPlus software CD from its case and place it into the computer s CD drive If multiple systems are being used it is important to match individual units with CD ROMs The CCU serial number is written on the CD label Each electronics unit has its own factory configuration file on its own CD Read the readme txt file on the software disk for latest instructions concerning installation Follow these readme instructions carefully Run the VacuumPlusInstall exe to install VacuumPlus Follow any further instructions given by the installation program Make note of any messages from the installation program Most of these messages are benign an
190. generated using this recording option Recording Data for a Mass Sweep from 1 amu to 100 amu with 10 Samples amu and a Scan speed of 144 second for hour produces a Data logging file of about 23 MB 6 14 3 3 Recording Data to Multiple Files At Midnight Option When the At midnight option is selected a new data logging file is created and saved for every day that the RGA is scanning in the continuous Mass Sweep or continuous Trend Scan modes using the GO button Data Logging will begin when the Start Stop Recording button is clicked in the main VacuumPlus window A Mass Sweep will start over at the Low Mass setting or the Trend mode will reset to the first enabled entry in the Mass Table A data logging file named MassSpecData XXXXX Y Y Y Y MM DD HHMMSS csv is created in the selected folder at the beginning of the scan The XX XXX in the file name is the Serial Number of the CCU followed by the YY YY year the MM month the DD day and the HHMMSS time Data is appended to the file until the midnight hour on the current day is reached The existing file is then closed and a new data logging file is created to store the data for the next day The last record appended to the data file may contain a partial sweep or data for only some of the enabled entries in the mass table Data files continue to be created for each day of scanning until the Start Stop Recording button is clicked again or the
191. hMass 19 SamplesPerAMU 8 Units Torr Sample 0 gt lt Sample Value 4 80521e 012 gt lt Sample Value 4 90272e 012 gt lt Sample Value 3 49013e 011 gt lt Sample Value 2 13785e 010 gt lt Sample Value 2 38185e 010 gt lt Sample Value 1 70573e 010 gt lt Sample Value 1 16129e 011 gt lt Sample Value 1 44788e 012 gt lt Sample Value 1 04575e 012 gt lt Sample Value 3 8262e 013 gt lt Sample Value 1 86295e 011 gt lt Sample Value 2 13322e 010 gt lt Sample Value 2 52524e 010 gt lt Sample Value 1 75088e 010 gt lt Sample Value 2 61942e 011 gt lt Sample Value 1 25229e 012 gt lt Sample Value 2 86834e 012 gt lt Sample Value 2 62114e 012 gt lt Sample Value 1 64358e 010 gt lt Sample Value 1 00085e 009 gt lt Sample Value 1 17773e 009 gt lt Sample Value 8 14476e 010 gt lt Sample Value 1 09915e 010 gt lt Sample Value 7 56115e 012 gt lt Sample Value 1 92803e 012 gt lt Sample Value 3 37541e 012 gt lt Sample Value 5 62092e 010 gt lt Sample Value 2 50811e 009 gt lt Sample Value 2 8665e 009 gt lt Sample Value 1 99793e 009 gt lt Sample Value 1 79753e 010 gt lt Sample Value 1 34216e 012 gt lt Sample Value 1 11096e 011 gt lt Sample Value 2 38959e 011 gt lt Sample Value 1 86811e 009 gt lt Sample Value 7 15505e 009 gt lt Sample Value 8 63439e 009 gt
192. he label at the top of the column RgaSweepData2 csv Excel 7 amp F O Xx HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder fr lt xml version 1 0 encoding us ascii gt A E F G H gt lt WindowParameters gt lt PlotParameters BkColor Pale green LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 gt 37 lt ConfigurationData gt 22 08 3 0 6 4 06E 10 22 08 3 0 7 1 59E 09 22 08 3 0 8 1 59E 09 22 08 3 0 9 1 90E 09 22 08 3 1 2 17E 09 22 08 3 1 1 2 21E 09 22 08 3 1 2 1 97E 09 22 08 3 1 3 1 39E 09 22 08 3 1 4 4 92E 10 22 08 3 1 5 3 83E 10 22 08 4 1 6 6 12E 10 22 08 4 1 7 1 02E 09 22 08 4 1 8 1 35E 09 22 08 4 1 9 1 49E 09 22 08 4 2 1 68E 09 22 08 4 2 1 1 30E 09 RgaSweepData2 H _ 100 Figure 136 Record Data in Excel at the Start of the Date Mass Intensity Data Extorr Inc 307 Columbia Road New Kensington PA 15068 131 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The entire column is highlighted Right click on any cell in column A and then select Format Cells from the drop down menu HH HOME A e lt Windc CG gt INSERT PAGE LAYOUT fe gt Parameters gt lt PlotParhmeters BkColof Pale green LineCojor Green Scan calibri ju In aw 9 amp i PAET N NNN H amp 0 00 4 oo 3 0 F Copy Paste Options
193. height adjacent peaks is about 10 of the peak heights Setting a low cal resolution at the low mass position and a high cal resolution at the high mass position allows the user to adjust for this unit resolution The user may explore the resolution function by changing the values and observing the width and sensitivity of the resulting peaks Remember to Apply changes The user may choose to save the resulting configuration or not but he can always return to any other saved configuration by reopening it The intensity of the peaks may be changed by changing the ion energy Greater sensitivity may be gained by increasing the ion energy Unfortunately the quality of the peak shapes tend to suffer when the ion energy becomes too high Again the ion energy is interpolated between and extrapolated beyond the two mass cal points A description of this tuning procedure is given in Appendix C of this manual 6 8 2 Unit Information The information under Unit is the model and serial number of the user s CCU These are useful when using multiple CCUs or when model or serial number specific information is requested Extorr Inc 307 Columbia Road New Kensington PA 15068 23 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 8 3 Pirani Calibration The Pirani gauge located in the base of the Extorr probe is factory calibrated After a period of use the user may perform a two point ca
194. ick on the OK button when finished The path to the selected folder is shown in the Directory Name box on the Record Data tab To multiple files Enter the directory name C RgaDataFiles RgaSweepD ata Figure 29 Record Data Directory Name Box Extorr Inc 307 Columbia Road New Kensington PA 15068 33 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The radio buttons in the Creation Options box on the Record Data tab determine when each individual file is created and saved Creation options Once per scan On the hour At midnight PALA o Teed ww Figure 30 Record Data Creation Options Group 6 14 3 1 Recording Data to Multiple Files Once Per Scan Option The Once per scan option is the default setting When the Once per scan option is selected a new data file is created and saved for each complete scan in the Mass sweep mode In the Trend mode a new file is created and the data is saved after all enabled entries in the Mass Table have been measured for the number of times specified in the Mass Table Samples box a complete Trend Mode Scan see section 6 9 The Once per scan recording option may be used in the continuous Mass Sweep or continuous Trend Scan modes using the GO button Go in the main VacuumPlus window or also in the single Mass Sweep or single Trend Scan modes using the 1 Scan button v In the continuous Mass Sweep
195. ineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 fF 2015 09 11 09 17 06 158 1 50E 08 2015 09 11 09 17 06 193 6 61E 09 2015 09 11 09 17 06 228 2 71E 07 2015 09 11 09 17 06 262 5 74E 08 2015 09 11 09 17 06 297 5 65E 10 2015 09 11 09 17 06 332 5 53E 07 2015 09 11 09 17 06 367 1 52E 08 2015 09 11 09 17 06 401 6 67E 09 2015 09 11 09 17 06 436 2 72E 07 2015 09 11 09 17 06 471 5 77E 08 2015 09 11 09 17 06 505 4 96E 10 2015 09 11 09 17 06 540 5 49E 07 2015 09 11 09 17 06 575 1 51E 08 2015 09 11 09 17 06 610 6 62E 09 2015 09 11 09 17 06 644 2 72E 07 RgaTrendDatal Ct AVERAGE 1014201 17 51 COUNT 2694 100 Figure 172 Record Data for Trend Mode in Excel Column A Date Time Format Corrected Extorr Inc 307 Columbia Road New Kensington PA 15068 157 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Examining the Date Time Mass and Intensity data you notice that there are repeating groups of six masses These are the six enabled masses in the Mass Table and they form one Data Sample point in the Trend Mode Scan Note that the Total Pressure which is the last of the six masses in each group has a Mass value of 999 in the data logging file even though it is entered into the Mass Table as Mass 0 RgaTrendDatal csv Excel HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack fx 9 11 2015 9 17 06 AM A B 136 137
196. initions ccccccccssssssssscccccssssssssssccccccccssssssssccccsssssssssceees 91 Ele RC Ree atichaietin cind tna A ina camesiiausetexs cue eiate den es E O 91 Eo ZA TOER ea A E E a E T O 91 E35 DE CaS OCU A aan a a a a a ai 91 EDA BIC OTOn Cs Temper U eon a o a a OE Sater biaaacd 91 OSs OC SUDD Nre E A E EA timnbad alee bat auauanedeateenons aunts 92 Oe O ei latne Mu ON ASC estas ors ashes tawauidet eae lessee r tastes ee auaeed nieien bat abana eduatee sons neat 92 ES L Pilaiment Resistance eair T E AAi 92 Fo Oc SENSO Tenpera annir EA A E T daneaontradwenondcaante 92 ESS OUNCE l CPE e a A I T A AAN 93 ESITO Some 2 C Orre uaa a e E E T TE E 93 ESLIRE Ame ne Per Uc ree De OE SP Pee TOO ee te Ce eee 93 Fe Sak Pane POTN Saansgtecnncctsohoks hanes das nt Seana las aden les O dsencetlvlclasnna lohenect eden 94 ESLP ONE sarge crise asda aden eta as adalah aaaads E a smnmatiaduerawladanantadonanealanenate 94 Sols Pina PTC SS aa T ay ad aaetdanaaaa E 94 FD A B eae daa detcins E onan das aunt teaersae damned cums tate eee dohaneasseansctn 94 Ke Fa teed lo geet rte ers Pett eu AE OU EER HERERO Gl ROR TPE EN T eR PEATE SRE OPES ETE TE OREN TEN ROH EE AERIS DU ES E 94 Bgl 7e FOCUS I ED a aaa econ ana aosunte szauan a ols asasdeosuade densest asenonloo oa an erosontoonesaeenorn 94 BiB 1S REPE corria aecdscorosoguade Mea a duuteseaonte os adaaenedesaade AENA 94 Extorr Inc 307 Columbia Road New Kensington PA 15068 A TELEPHONE 1 724 337 3000
197. inters in the Hardware and Sound window File Edit View Tools Help Control Panel Home System and Security Add a device Network and Internet AutoPlay Hardware and Sound Devices and Printers Search Control Panel Addaprinter Mouse Device Manager Change default settings for media or devices Play CDs or other media automatically Programs User Accounts and Family Sound Safety lt Adjust system volume Appearance and Personalization Power Options Change system sounds Manage audio devices Change power saving settings Change what the power buttons do Clock Language and Region Ease of Access Display Make text and other items larger or smaller Adjust screen resolution Connect to an external display How to correct monitor flicker refresh rate Require a password when the computer wakes Change when the computer sleeps Choose a power plan Figure 107 The Control Panel Hardware and Sound Window Extorr Inc 307 Columbia Road New Kensington PA 15068 1 13 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The Device Manager window is displayed aay Device Manager File Action View Help m H amp 4 ih Jack PC gt 9 Computer gt q Disk drives gt MY Display adapters p 43 DVD CD ROM drives gt aie Human Interface Devices gt 4g IDE ATA ATAPI controllers gt ED Keyboards p A Mice and other pointing devices A Monitors EF Ne
198. lament DAC Coarse value gives information about the regulation of the filament It will stay constant from sweep to sweep after the filament has warmed up E 3 21 Filament DAC Fine The Filament DAC Fine value gives information about the regulation of the filament It should vary no more than 5 Counts after the filament has warmed up Extorr Inc 307 Columbia Road New Kensington PA 15068 95 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 4 Vacuum Probe Mounting Considerations to Avoid Electrical Short Circuits For the RGA to work properly the exposed electrical connections on the vacuum side of the Quadrupole Probe Assembly must not come in contact with the Vacuum Chamber walls If any of the wires touch the chamber at any point along their length a short circuit will be created A short circuit will also occur if the metal plates of the Ionizer come in contact with the chamber A vacuum port with a minimum inside diameter of 1 375 inches about 35 mm and clearance inside the chamber to a depth of at least 7 inches about 178 mm is required for the Extorr Quadrupole Probe Most short circuits occur when the Probe is mounted in a long close fitting vacuum nipple or tube Although the Probe will fit through an opening with an inside diameter of just 1 375 inches about 35 mm a long vacuum nipple or port of this size must be made with the end flanges precisely perpendicular to the tube
199. late to remove the short circuit If possible bend the Repeller Source 2 Assembly back so that its outside edge is parallel to the Quadrupole Frame See the drawing for the un damaged probe above Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between the Repeller Source2 Assembly and Source 1 plate Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 102 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com If the Repeller Source 2 Assembly is bent far enough it may bend the Source 1 plate until it touches Focus 1 This creates a short circuit between the Repeller Source 2 Assembly the Source 1 plate and the Focus 1 plate A bent Repeller Source 2 Assembly may also short to the chamber wall in a close fitting tube See the drawing below Repeller Source 2 Assy l Bent and ae Touching Source 1 short Circuit between Repeller amp Source 1 i 2 lt Source 1 Bent and ff gt Touching Focus 1 short Circuit between ee ey source 1 amp Focus 1 a i i Focus 1 Connecting Wires Parallel to Frame and Not Shorting Quadrupole Frame gt 4 Probe lonizer with Damage to Repeller and short Circuits between R
200. libration The first is done by clicking the 1ATM Recalibrate when the unit is at atmospheric pressure The other is done by clicking the Zero Recalibrate when the probe is at a pressure below 10 torr Remember to click the Apply button after each of these recalibrations 6 8 4 Total and Partial Integrating Caps The total and partial integrating capacitor values for the ultra sensitive electrometer are set at the factory for optimum performance and should not be changed without consulting with the factory 6 8 5 Total and Partial Sensitivity The total and partial pressure sensitivities are factory set and should only be reset if trusted secondary pressure standards are presented to the probe In general the sum of the partial pressure peaks should roughly equal the total pressure When adjusting these calibration numbers remember that total pressure is only displayed at the end of a scan It is therefore important to setup for a scan which completes about once per second 6 8 6 Diagnostics The Diagnostics box allows the user to place a password to unlock the information contained in the Diagnostics Tab See 6 14 6 9 Mass Table Tab FF The system may also be setup in a single or multiple ion monitoring mode for use in leak detection or process monitoring This is done by placing ion information into the Mass Table and selecting Trend from the Mode drop down menu on the Operating parameters tab Mass Table Samples 300
201. ly Push the two Phillips head 6 32 X 2 inch long screws through the holes in the back plate and the PCBs and tighten Again it may be necessary to slightly move the individual PCBs to get the screws completely through the spacers on all boards of the electronics assembly Remove the CCU to Vacuum Flange mounting bolts from the electronics and back plate assembly Recheck the alignment of the PCB connector pins before installing the CCU Box cover Attach the CCU Box cover to the back plate with the six black Phillips head screws Insert the CCU to Vacuum Flange mounting bolts into the holes in the CCU box Refer to sections 4 4 through 4 8 of the Extorr RGA Users Manual to re install the CCU box on the Quadrupole Probe and pump down your vacuum system Section 6 7 4 of the user manual describes the operation of the multiplier controls on the Operating Parameters Tab of the VacuumPlus Software Extorr Inc 307 Columbia Road New Kensington PA 15068 1 10 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix G COM Port Troubleshooting G 1 Connecting the USB to RS232 Converter Connect the USB to RS232 Converter to an unused USB port on your computer Note which connector is used so that the converter may be plugged back into the same connector if it is removed Windows may change the COM Port number for the converter if it is removed and then connected to a different physical USB port
202. m Color Red Dwell 3 5 ms Highwarning 0 Figure 239 PiraniZero Value in Configuration File Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 199 Extorr Inc www extorr com Edit the PiraniZero value between the quotation marks to make it slightly greater than the actual Pirani Press reading on the Outputs tab that was recorded above Increasing the Outputs tab value by about 0 05 should be enough For example if the Outputs tab Pirani Press value was 0 500V enter 0 550 no minus sign between the quotation marks for the PiraniZero value in the Configuration file 404 A cfg Notepad File Edit Format View Help Filament 1 Pressureunits Torr EnableElectronmultiplier 0 Multipliervoltage 1070 P FilamentForceoffstartup 0 gt lt CalibrationParameters LowCalMass 1 LowCalResolution 640 LowCalPosition 0 24 LowCalIonEnergy 5 0 HighcalMass 300 HighcalResolution 1260 HighcalPosition 0 75 HighCalIonener gy 5 0 TotalAmpoffset 2000 PartialAmpoffset 2550 TotaliIntegratingcap 10 00 PartialiIntegratingcap 3 00 RFSett leTime 50 swsett leTime 10 PiranilATM 1 98500 PiraniAutoRecalibrate 0 PartialSensitivity 6 00e 004 TotalSensitivity 1 00e 001 _ debug 0 gt lt LOgFileParameters Mode 2 Se ee eee DirectoryName C RgaDataFiles RgaTrendData Creationoption 0
203. mber When mounted in this way the Probe Ionizer and the electrical connections are far enough away from the Vacuum Chamber that short circuits are very unlikely See the figure below Tube l D 1 375 Min Vacuum Chamber 0 to 2 1 2 lt Clearance of at least 6 875 Preferred Probe Mounting Figure 87 Preferred Probe Mounting Arrangement Extorr Inc 307 Columbia Road New Kensington PA 15068 97 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 4 2 Mounting the Probe Using a Vacuum Nipple If the Probe must be mounted in a long close fitting vacuum nipple choose the length so that the Ionizer Spacer Rings are not in the connection between the nipple and the vacuum chamber A nipple that is 5 inches about 127 mm or less in length will put the Ionizer Spacer Rings inside the Vacuum Chamber If there is a slight misalignment the spacer rings will touch the vacuum chamber wall and keep the connecting wires and the Ionizer far enough away to prevent a short circuit Vacuum Nipple Length 5 inches orless j Probe JHII ara Vacuum Chamber lonizer Spacer Rings Inside Vacuum Chamber Port Probe lonizer Completely Inside Vacuum Chamber Probe Mounted in Short Vacuum Nipple Figure 88 Probe Mounted with a Short Vacuum Nipple Extorr Inc 307 Columbia Road New Kensington PA 15068 98 TELEPHONE 1 724 337 3000 FAX 1 724 337
204. meter to check for an open circuit gt 20MQ with CCU disconnected between the Repeller Source2 Assembly and Source 1 plate and between Source 1 and Focus 1 Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual If a short circuit was measured with the probe installed in the vacuum chamber but it is not found after it is removed the probe is probably touching the inside of the chamber See Section E4 above Extorr Inc 307 Columbia Road New Kensington PA 15068 101 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com If the probe has damage to the Repeller Source 2 Assembly there may be a short circuit between this assembly and the Source 1 plate A bent Repeller Source 2 Assembly may also short to the chamber wall in a close fitting tube See the drawing below Repeller Source 2 Assy k Bent and Touching Source 1 Short Circuit between Repeller amp Source 1 NY Gap Between Source 1 amp Focus 1 lt Source 1 mh Connecting Wires Parallel to Frame VA and Not Shorting Focus 1 Quadrupole Frame MES Probe lonizer with Damage to Repeller and short Circuit between Repeller and Source 1 Figure 92 Short Circuit between Repeller and Source 1 Gently bend the Repeller Source2 Assembly away from the Source 1 p
205. mu With the inclusion of an electron multiplier detection option an M is attached to each of these model numbers 1 e XTIOOM XT200M and XT300M All of the pressure gauging is done by the command and control unit CCU which is powered by the included 24 volt 2 5 amp supply The CCU 1s the interface between what is happening in the vacuum probe and the VacuumPlus Software which runs on your Windows computer Extorr Inc 307 Columbia Road New Kensington PA 15068 7 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 3 Dimensions and Specifications 3 1 Dimensions The dimensions of the probe and the CCU box are given below in both metric and American Standard units The mounting flange is a metal sealed DN 40 CF 2 Inch CF 0 60 15 24 mm i nam 6 79 172 52 mm E 7 40 188 01 mm T i 4 1 25 31 75 mm i 3 23 81 99 mm 5 50 139 65 mm 12 27 311 66 mm 2 75 69 85 mm Figure 1 XT Dimensions Extorr Inc 307 Columbia Road New Kensington PA 15068 gQ TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 3 2 Specifications Mass range Faraday cup FC Electron Multiplier EM Optional Resolution Greater than 0 5 amu 10 peak height per AVS std 2 3 Adjustable to constant peak width throughout the mass range Sensitivity A Torr 5x10 into Faraday cup Measured with N2 28 amu with 1 amu
206. n Color Pink Dwell 42 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass9 Enabled 1 Mass 44 Description Color White Dwell 21 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt MassTableParameters gt lt PrintingParameters InvertColors 0 ShowConfigurationFile 1 ShowDescription 1 ShowTotalPressure 1 ShowPiraniPressure 1 gt lt GraphParameters gt lt Y Axis FullScale 9 81748e 008 Span 1 05925 gt lt GraphParameters gt lt WindowParameters gt lt Frame flags 2 showCmd 3 ptMinPosition x 0 ptMinPosition y 726 ptMaxPosition x 4 ptMaxPosition y 23 rcNormalPosition left 0 rceNormalPosition top 0 rcNormalPosition right 667 rcNormalPosition bottom 438 gt lt Setup flags 0 showCmd 1 ptMinPosition x 1 ptMinPosition y 1 ptMaxPosition x 1 ptMaxPosition y 1 rcNormalPosition left 958 rcNormalPosition top 50 rcNormalPosition right 1349 rcNormalPosition bottom 723 gt lt WindowParameters gt lt PlotParameters BkColor Lt Green LineColor Red ScanColor Md Blue MouseWheel 0 gt lt ConfigurationData gt Extorr Inc 307 Columbia Road New Kensington PA 15068 37 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com A representative data file for a sweep from 13 5 amu to 19 5 amu is given below lt xml version 1 0 encoding us ascii gt lt Data LowMass 14 Hig
207. n Extorr Inc 307 Columbia Road New Kensington PA 15068 162 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Sort window is displayed Sort a add Level JX Delete Level EE Copy Level E My data has headers Figure 181 Record Data in Excel Data Sort Window Click on the arrow next to the Sort by box under column and select Column B from the list ta Add Level DX Delete Level EB Copy Level Options Column Sort On Sort by Order Values AtoZ My data has headers Figure 182 Record Data in Excel Data Sort Window Sort By Column B Selected Make sure that the Sort on box contains Values and the Order box contains Smallest to Largest Next click on the OK button to accept the settings and close the Sort window taj Add Level Delete Level El Copy Level Options E My data has headers ra Column Sort On Order Sortby siima values Smallest to Largest Figure 183 Record Data in Excel Sort By Column B Sort On Values and Order Smallest to Largest Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 163 Extorr Inc www extorr com The data is now sorted by increasing Mass value 1 2 3 4 5 6 7 8 9 10 il 12 13 gt Y HOME INSERT _2015 09 11 09 17 06 158 PAGE LAYOUT f RgaTren
208. n ion energy and we have a single peak which is free of interferences then a measure of the partial pressure of the molecule may be derived by comparing its peak height divided by the fraction of the total current produced by the molecule The ion gauge sensitivity factor although measured at a different electron energy may be used to get a rough idea of the partial pressure As an example let s say that we have a peak at mass 20 due to Ar We look at the cracking pattern of Argon and find that 17 of ionized argon becomes Ar So we measure the current i Ar divide by 0 17 The partial pressure is then given by 1 Ar ie k Ar where 1 1is the electron current to the ionizer Putting numbers into this example suppose the 20 amu signal was 10 amps the ionizer electron current was 10 amps so P Ar 10 amps 10 amps 0 17 27 9 torr 2 1 x 10 torr Again it should be emphasized that we have made a number of gross assumptions here which add to the uncertainty in this value Another factor is the relative quadrupole transmission for differing masses If the simplest tuning provisions are made a quadrupole has a transmission which falls off in direct proportion to the inverse of the mass In an RGA such transmission factors are usually normalized to the transmission at mass 28 Mass 20 would therefore have a current 28 20 times more than mass 28 if the same number of ions is produced per unit time in the ionizer So the 2 1X10 tor
209. nding gas molecules is measured In rare cases where it fails the RGA will not allow the filament to turn on because the Pirani gauge will read a high pressure probably atmosphere In one case exposing the heated wire to certain CVD gasses resulted in deposits forming on the wire producing incorrect readings If you suspect that the Pirani is reading incorrectly you can temporarily override it to confirm that it will need repaired The output voltage of the Pirani gauge is measured and displayed in the Pirani Press box on the Outputs tab This value is in the range of 0 3V to 2 5V for 1x10 Torr to 760 Torr Record the value in the Pirani Press box of your RGA this value will be needed later to edit the configuration file The absolute value of the voltage corresponding to a low pressure below 1x10 Torr is shown in the Pirani Calibration Zero box on the Calibration tab This value is usually about 0 3 volts Setting the Pirani Calibration Zero value slightly greater than the actual Pirani Press reading on the outputs tab will make the Pirani Pressure display in the main VacuumPlus window read about 1x10 Torr allowing the filaments to turn on CAUTION This could burn out the filament if the pressure is too high so do this only if you know the vacuum is below 1x104 Torr This cannot be done by directly entering the value into the Pirani Calibration Zero box on the Calibration tab Any value entered into the box is limit checked
210. ng these controls To record data in the single Mass Sweep or single Trend Scan modes using the 1 Scan button first click on the STOP button ai in the main VacuumPlus window to halt the scan Next click on the Start Stop Recording button to enable data logging Click the 1 Scan button 1 and data logging will begin A data logging file named MassSpecData XXXXX Y Y Y Y MM DD HHMMSS csv is created in the selected folder at the beginning of the scan The XXXXX in the file name is the Serial Number of the CCU followed by the YY YY year the MM month the DD day and the HHMMSS time Extorr Inc 307 Columbia Road New Kensington PA 15068 34 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Data is appended to the file until the end of the scan in the Mass Sweep mode In the Trend Mode data is appended to the file until all enabled entries in the Mass Table have been measured for the number of times specified in the Mass Table Samples box a complete Trend Mode Scan The file is then closed and the RGA will remain in the Stop mode Additional single scans may be started and their corresponding data logging files created by clicking on the 1 Scan button Data logging may be ended by clicking on the Stop Recording button or the continuous Sweep mode may be selected by clicking on the GO button 6 14 3 2 Recording Data
211. nics Temperature 281 C Filament Resistance 033 Ohm e 4 should be about 2 4 mA Power supply 90 volts SensorTe 33 9 E Fil t Voltage 0 10V a is ee a K3 Should be about 1 6V l Filament Resistance 0 33 2 k 5 soucer current 0 000058 Reference 2 45t0 2 55 2 48 kts 4 because Filament is OFF G soucez cae ana ee K5 Source 1 Current 0 mA yee 4 154830 Focus FB Focus 13 99 volts should be about 1 0 mA eee e e var eerie eee amp Source 2 Current 0 mA Pirani Corr 1 to 1 0 0 141489 Filament Power 2 2 should be about 1 0 mA ul Pirani Press 3 to 2 5 0 317713 volt Filament DAC Coarse 2995 k7 Repeller 152V FB 2 25t025 2407514 Filament DAC Fine should be about 68V FB 2 25 to 2 5 2 406835 volt 8 Filament Power 5 TUR T AEA lt ES Rimmel 3 gt aa Tne Tm Mi spy Ready uum og EE Plus 1010 E io xi B pe Edk men Won Hee 18x Figure 80 Outputs Tab and Mass Scan Graph Repeller Shorted to Ground Ready Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 2 because Filament is OFF Filament Switch Turns OFF Automatically after k 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum shown on Mass Sweep Graph 85 Extorr Inc www extorr com _ E 2 7 Filaments Shorted to Vacuum Chamber Ground Bivacuum Plus 1010 EE slax
212. nsitivity to Differing Gasses When the helium spray is moved away from the leak air slowly replaces it and the partial pressure of helium decreases as the partial pressures of nitrogen and oxygen increase as shown in the chart The helium spray was then moved back over the leak a second time to pin point the exact location For more information see section 6 9 1 Mass Table set up for Leak Detection Extorr Inc 307 Columbia Road New Kensington PA 15068 191 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com In the To Multiple Files mode with the Once Per Scan option selected a new data logging file is generated for each Trend Scan If the Stop Recording button 1s clicked before the end of a scan the data logging file will be closed and will contain data for only a partial scan To determine if the data logging file contains a complete scan the number of data points may be calculated from the entries on the Mass table tab In this example there are 7 enabled masses in the table and the Samples box value is 600 so a complete Trend Scan should contain 4200 Trend Data Sample points 7 enabled masses 600 samples In the MassSpecData 00404 20150916 120655 csv file the Trend Scan data begins at row 138 after the Calibration Parameters and the data ends at row 4337 So a complete Trend Scan of 4200 data points was recorded If the data logging file had ended before row 4337 we wo
213. nsity Data Extorr Inc 307 Columbia Road New Kensington PA 15068 143 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The entire column is highlighted Right click on any cell in column A and then select Format Cells from the drop down menu MassSpecData 00404 20150909 112443 csv Excel HOME INSERT PAGE LAYOUT fx rcNormalPosition bottom 719 A B C D rcNgrmalPosition bottom 719 m 0 00 a rei v Go 0 O Copy Paste Options da ein ad Paste Special Insert Delete Clear Contents Format Cells Column Width Hide Unhide LITI OIOI 11 875 7 74E 11 12 7 80E 11 12 125 5 34E 11 12 25 7 28E 11 12 375 6 30E 11 Cel ell oll ool E el ool ell od MassSpecData 00404 20150909 112 AVERAGE 42256 47551 COUNT 214 Figure 154 Record Data in Excel Format Cells Drop Down Menu The Format Cells window will open Format Cells Category Sample Number Currency Date Time Percentage Fraction Scientific FORMULAS E _ SUM 3718569 845 DATA Accounting General format cells have no specific number format Figure 155 Record Data in Excel Format Cells Window Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Oo x john hackwelder Fq v www extorr com 144 Extorr Inc www extorr com Click
214. of the window produces a display that shows only a part of the Scan and the Graph Positio ed v Ose Be 6 cB REHE we p Total Pressure 5 048x10 7 torr Pirani Pressure 1 00 10 torr gi Start Degas Start Recording Graph Graph Position Width Slider Scroll Bar Moved Toward Right Side of Window Figure 42 Trend Scan Graph Width Slider and Position Scroll Bar These two controls allow the user to display a narrow time range in the graph window at any point along the entire Trend Scan E i ro Dhi oI ek PO E otal Pressure 5 048 107 torr Pirani Pressure 1 00x104torr qf mme Start Recordi Graph Position Scroll Bar Moved Toward Right Side of Window Figure 43 Trend Scan Graph with Position Scroll Bar Moved Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 45 Extorr Inc www extorr com The range of the Width Slider extends from displaying the entire Trend Scan when the control is all the way at the left to a window that is about 2 of the entire scan with the slider all the way to the right side of the graph 6 19 2 Changing the Relative Size of the Graph Window and Folder Tabs When VacuumPlus is first started the main window displays the Mass Sweep or Mass Table Graph Clicking on the graphics button wu 1n the upper left of the window will split the screen so that the graph and the Operational Folde
215. ole does not allow ions to pass through its _ length This measurement is then subtracted from true ion measurements thereby eliminating baseline offsets Since extremely low current measurements can suffer from baseline drift due to thermal or other environmental factors this function is used Figure 13 AutoZero Drop Down Menu to reduce the effect as much as possible The drop down menu for AutoZero is shown in Figure 13 The user may choose to turn AutoZero off or enable it before each sample measurement AutoZero is important only when attempting to measure very small peaks The price paid is a doubling of acquisition time Pressure units 6 7 6 Pressure Units The system may display total pressures and partial Pressure units Tor 4 pressures using a number of different units The fon et 1 66 units chosen may be selected from the Pressure On ata Filament Force OFF on Startup Uncheck Units drop down list The Pirani Pressure does not change with this setting and is always displayed in Torr 6 7 7 Filament Control Figure 14 Pressure Units Drop Down Menu The Filament On check box and Off button Filament manually control the filaments To turn the On Off filaments on check the On box and click the Apply button Click on the Uncheck button Filament Force OFF on Startup Uncheck and then Apply to turn the filaments Off The filaments may also be controlled using the
216. on Custom in the Category list Many custom formatting options are displayed and the General option is highlighted in the list and shown in the Type Box Format Cells Number Alignment Font Border Fin Protection Category General a Sample Number J gt Currency Accounting Type Date Time General Percentage 0 Fraction Scientific 0 00 Text 0 Special 0 00 Custom Eo ero 0_ Red 0 0 00_ 0 00 0 00_ Red 0 00 0_ S 0 0_ Red 0 vr Type the number format code using one of the existing codes as a starting point ox cane Figure 156 Record Data in Excel Format Cells Custom Category Selected Click in the Type box and delete General and then enter yyyy mm dd hh mm ss 000 into the box Format Cells Number Alignment Category General Sample Number f gt Currency Accounting Type Date Time yyyy mm dd hh mm 5s5 000 Percentage Fraction Scientific Text Special y Custom ro io 0_ Red 0 0 00_ 0 00 0 00_ Red 0 00 0_ S 0 0_ Red S 0 Type the number format code using one of the existing codes as a starting point Figure 157 Record Data in Excel Format Cells Custom Type Entered Click on the OK button to close the Format Cells window Extorr Inc 307 Columbia Road New Kensington P
217. on mode is used to resonate the CCU RF coil as described in the Resonating RF Coil section 4 7 above 6 7 2 Focus Focus controls the potential which draws the ions out of the ion source grid It is factory set to give a standard response to a calibration compound at the factory This may be set to suit the user s tastes especially as the probe ages but is recommended not to deviate too far from the factory setting 6 7 3 Electron Energy and Emission current The electron energy is the potential placed between the filament and the ion source grid It is factory set to 70 eV which is the industry standard for residual gas library spectra Emission current is the electron current leaving the filament and directed through the source grid It is set at the factory for high sensitivity when operating with a 70 eV electron energy The emission current may be set between 0 1 ma and 4 ma The electron energy may be user set between 11 and 150 volts However not all combinations of emission current and electron energy may be set at once At lower voltages higher emission currents are not available and the software prompts the user when such a combination will not work It should be noted that the Electron Energy is just the potential difference placed between filament and source grid The true electron kinetic energy must be corrected for the contact potential difference between the thoria coated filament and the platinum coated source grid This c
218. onizer RF Amp is from the RF section of the electronics and is roughly proportional to the high mass value in sweep The Pirani Corr and Pirani Temp are proportional to the Pirani wire temperature and when added should be roughly equal to Pirani Press FB and FB are proportional to the DC voltages on the rods Reference and Ground ref are voltage references which test the operation of the analog to digital converter and should be within the ranges given The Focus 1 reading should be about equal to the value entered into the focus box under the Operating parameters tab The Repeller reading should be about equal to the value entered into the Electron Energy box under the Operating parameters tab less 2 volts If these readings are not as described a short circuit may be present in the probe Filament Power indicates how much of the available filament power is currently used Filament DAC Coarse and Fine give information about the regulation of the filament Extorr Inc 307 Columbia Road New Kensington PA 15068 28 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 11 Plot Tab a The Plot tab allows the user to change the graph display A linear intensity pressure or ion current Enable Logarithmic Y axis Disable display is the default graph but a Plot Background Color O Paegeen logarithmic plot is available by Plot Line Color M
219. onnector to the probe Remove the box cover to expose the electronics printed circuit board assembly The Power Supply PCB is the top board in the electronics assembly farthest from the back plate See Figure 100 for electronic assembly part locations High Voltage Power Supply High Voltage Module Output Wire aii f Pawei Supply pn Board m miT Lil ii ap l M aml 3 tnt Eo RF Board id i 5 a z rytrg tes eye z Terminal CCU Box EI Back Plate Figure 100 High Voltage Power Supply Location Remove the two silver Phillips head screws holding the electronics assembly to the back plate and set the back plate aside Carefully unplug the Power Supply Board from the assembly by lifting the edge of the board near the DC Power Connector the edge opposite the copper box until all the pins from the board below are out of the connector sockets on the Power Supply Board Next slide the Power Supply Board out from under the edge of the copper box The High Voltage Power Supply Module mounts in the area between the two 1 2 inch diameter silver spacers on the Power Supply Board Insert the 4 40 Stud on the High Voltage Module through the hole in the Power Supply Board and line up the 4 Male Pins on the Module with the Female Sockets on the Board Press the High Voltage Module onto the Power Supply Board Install and tighten the 4 40 Nut to secure the Module to the PCB Check the 4 40 nut again to insure it is securely tigh
220. ontact potential difference may place the electron kinetic energy as low as 3 7 eV below the Electron Energy There must also be a correction for the voltage drop across the filament Extorr Inc 307 Columbia Road New Kensington PA 15068 21 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 7 4 Electron Multiplier If the XT model number ends in an M the unit was shipped with the electron multiplier option The Multiplier is turned on by checking the multiplier Enable box on the Operating parameters tab The high voltage is only supplied to the multiplier if the pressure is sufficiently low The multiplier voltage may also be set here The gain of the multiplier depends on the voltage placed on the multiplier The gain is determined by measuring the height of a relatively small peak first when the multiplier is turned off and then when the multiplier is turned on The gain is given by dividing the peak height measured using the multiplier by the peak height as measured using the Faraday cup The Multiplier Voltage is set at the factory for a gain of 1000 at m z 18 and this is usually all the gain that is required for most RGA applications As a general rule to increase the lifetime of the multiplier use the lowest multiplier voltage which gives the gain desired 6 7 5 AutoZero When selected AutoZero makes a baseline measurement during a AutoZero lor time when the quadrup
221. option on the left side of the tab and the Lines type at the top of the tab Insert Chart Recommended Charts All Charts i Recent AN B Templates A 7 Ind Column i 2 r Area 10 j Iny it wee n X Y Scatter a u T m V A f T y Stock Surface Radar FRETS M Combo ouel owes _ Sel Sele 5 a7 ks a etl etal i ae ld See Se Sete De Setai Seats SeectS Seeci0 Figure 187 Record Data in Excel Insert Chart Window Click on the OK button to create the chart Extorr Inc 307 Columbia Road New Kensington PA 15068 165 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The Chart is generated and shown at the center of the Excel window RgaTrendDatal xlsx Excel CHART TOOLS 7 D CRA HOME INSERT PAGELAYOU FORMULAS DATA REVIEW VIEW DEVELOPER DESIGN FORMAT john hack v Fy 2015 09 11 09 17 24 075 2015 09 11 09 17 24 283 2015 09 11 09 17 24 492 2015 09 11 09 17 24 700 2015 09 11 09 17 24 908 2015 09 11 09 17 25 117 2015 09 11 09 17 25 325 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 2015 09 11 09 17 2 1 53E 08 1 52E 08 1 51E 08 1 50E 08 1 49E 08 1 48E 08 1 47E 08 1 46E 08
222. ording method used and the Operational settings of the RGA The file may contain single or multiple scans from either the Mass Sweep or Trend modes The Configuration file parameters are included at the beginning of every data logging file These parameters are the settings of all of the Operational Folder tabs and this is the same information contained in the RGA Configuration file Like a configuration file the data logging CSV file may be opened on the Configuration tab using the Open button and the Operational Folder tabs settings used to create the data logging file may be reloaded into VacuumPlus H 1 Data Saved to a Single File in the Mass Sweep Mode The RgaSweepData2 csv file was created using the To One File option on the Record Data tab with the RGA in the Mass Sweep mode The controls on the Sweep parameters tab were set for a Scan speed of 144 Sec a Low mass of 1 a High mass of 51 and a Samples amu of 10 About 3 sweeps were recorded When opened in Microsoft Excel the contents of the data logging file are displayed as shown below At the beginning of the file starting at cell Al are the Configuration parameters RgaSweepData2 csv Excel 7 amp OO xX HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder Al v fr lt xml version 1 0 encoding us ascii gt B amp D E F G H lt xml verbion 1 0 encoding us ascii gt 1 2 lt ConfigurationData gt 3 lt CommunicationParam
223. ormatCorrected csv Excel 7 amp O x HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder BkColor Pale green LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 gt lt ConfigurationData gt 2015 09 08 10 22 08 287 2015 09 08 10 22 08 293 2015 09 08 10 22 08 300 2015 09 08 10 22 08 307 2015 09 08 10 22 08 314 2015 09 08 10 22 08 321 2015 09 08 10 22 08 328 2015 09 08 10 22 08 335 2015 09 08 10 22 08 342 1 4 4 92E 10 2015 09 08 10 22 08 349 1 5 3 83E 10 2015 09 08 10 22 08 356 1 6 6 12E 10 2015 09 08 10 22 08 363 L7 2015 09 08 10 22 08 370 13 2015 09 08 10 22 08 377 1 9 2015 09 08 10 22 08 384 2 2015 09 08 10 22 08 391 2 1 2015 09 08 10 22 08 398 2015 09 08 10 22 08 405 2 3 7 2015 09 08 10 22 08 412 2 4 2015 09 08 10 22 08 418 gt AVERAGE 0 775000001 COUNT 40 SUM 31 00000002 RgaSweepData2TimeAndDateFormatCorrected csv Excel 7 amp Hx HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW john hackwelder v fe o6 A B c 2015 09 08 10 22 11 724 50 1 1 96E 11 2015 09 08 10 22 11 731 50 2 9 29E 12 2015 09 08 10 22 11 738 50 3 _2 76E 11 2015 09 08 10 22 11 745 50 4 6 79E 11 2015 09 08 10 22 11 752 50 5 2 35E 11 2015 09 08 10 22 11 759 50 6 7 46E 11 2015 09 08 10 22 11 766 50 7 4 87E 11 2015 09 08 10 22 11 773 50 8 2 17E 11 2015 09 08 10 22 11 780 7 25E 11 2015 09 08 10 22 11 787 1 46E 12 2015 09 08 10 22 11 79
224. oval Timeouts Set RTS On Close Disable Modem Ctrl At Startup Minimum Read Timeout msec Minimum Write Timeout msec O 0000 gog Figure 115 USB to RS232 Port Properties Advanced Settings Window The current settings are displayed Click on the COM Port Number box to show the drop down list of available COM numbers pE pea y Eo s COM Port Number COM11 A eax Wane Sues Ce COM13 E Select lower settings to corre 54454 d rates COM15 Defaul Select higher settings for fas comi COM17 Receive Bytes COM18 COM19 Transmit COM COM21 COM22 COM23 BM Options COM24 Miscellaneous Options Select lower settings to corre ON Serial Enumerator COM27 Serial Printer Latency Timer msec a Cancel If Power Off COM30 Event On Surprise Removal Timeouts COM31 Set RTS On Close COM32 i COM33 Disable Modem Ctrl At Startup Minimum Read Timeout mse COM34 Enable Selective S j COM35 Minimum Write Timeout mse COM36 COM37 COM38 COM39 COM40 a O0 00000 K i i Figure 116 USB to RS232 Port Properties Advanced Settings Drop Down COM Port Number List Extorr Inc 307 Columbia Road New Kensington PA 15068 1 19 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Scroll up in the list of COM numbers to show COM 1 thru COM9 Advanced Settings for COM11 a comer tte Ca COM 1 in use a USB Transf
225. owParameters gt lt PlotParameters BkColor Pale green LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 gt 2015 09 16 12 06 55 108 2 91E 10 2015 09 16 12 06 55 125 2 20E 08 2015 09 16 12 06 55 143 1 03E 07 2015 09 16 12 06 55 160 4 06E 07 2015 09 16 12 06 55 177 8 81E 08 2015 09 16 12 06 55 195 7 40E 09 2015 09 16 12 06 55 212 6 60E 07 2015 09 16 12 06 55 229 4 90E 10 2015 09 16 12 06 55 247 2 24E 08 2015 09 16 12 06 55 264 1 05E 07 2015 09 16 12 06 55 281 4 08E 07 2015 09 16 12 06 55 299 8 83E 08 2015 09 16 12 06 55 316 7 50E 09 2015 09 16 12 06 55 334 6 66E 07 2015 09 16 12 06 55 351 4 27E 10 MassSpecData 00404 20150916 120 AVERAGE 1014324 07 32 Figure 209 Record Data for Trend Mode in Excel Column A Date Time Format Corrected E COUNT 4326 H VIEW 7 amp DEVELOPER john hack m _1 Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com m Y 100 x 178 Extorr Inc www extorr com Examining the Date Time Mass and Intensity data you notice that there are repeating groups of seven masses These are the seven enabled masses in the Mass Table and they form one Data Sample point in the Trend Mode Scan Note that the Total Pressure which is the last of the seven masses in each group has a Mass value of 999 in the data logging file even though it is entered into the
226. oward Right Side of Window Figure 37 Mass Sweep Graph with Position Scroll Bar Moved Extorr Inc 307 Columbia Road New Kensington PA 15068 42 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The range of the Graph Width Slider extends from displaying the entire Mass Sweep when the control is all the way at the left to a 1 amu wide sweep with the slider all the way to the right side of the graph In the Trend mode the Scale Slider the Zero Slider and the Graph Width Slider also set the size and position of the data shown on the graph as in the Mass Sweep mode Vacuum Plus 404 Graph Zero Slider Graph Width Slider Figure 38 Trend Scan Graph Slider Controls The Scale Slider on the left side of the graph window controls the maximum value of the Y axis shown on the graph Move the slider toward the top of the window to display smaller signals or toward the bottom of the window to show larger signals Vacuum Plus 404 File Edit View Window Control Help v Os 282 46 CEB Anem Toa rresare 5001070 PranPresnce oosotter G ff soon stated Graph Scale Slider Moved Toward Top of Window Figure 39 Trend Scan Graph Scale Slider Extorr Inc 307 Columbia Road New Kensington PA 15068 43 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Zero Slider on the right side of
227. p Recording button r again to clear the error message S kie Data File Recording ON Uncheck Figure 25 The Record Data Tab Extorr Inc 307 Columbia Road New Kensington PA 15068 3 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 14 2 Recording Data to One File The Single data file mode is selected by clicking on the To one file radio button on the Record Data tab Click on the More Options button A next to the File Name box to display the Save As window Navigate to an existing folder or create a new one using the Save in drop down menu at the top of the window Enter the desired name in the File name box at the bottom of the window and select Comma separated values file csv in the Save as type box Click on the Save button to close the Save As window amp Save As Save in d RoaSweepData ex EB Name Date modified Type SweepDatal csv 8 24 2015 2 23PM Microso 4 m p Save as type Comma separated value files csv Cancel Figure 26 Record Data Save As Window The path to the selected folder and the file name are shown in the File Name box on the Record Data tab Toone file Enter file name C RgaDataFiles RaaSweepData SweepData2 csv f Figure 27 Record Data File Name Box Next click on the Apply button on the Record Data tab Data Logging will begin when the Start Stop Recording button
228. pecData 00404 20150916 120655 xlsx Excel HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack fx B C 2015 09 16 12 08 06 202 4 1 53E 09 21 21 89 21 21 Helium Leak Checking 612 2015 09 16 12 06 56 462 14 2 20E 08 613 2015 09 16 12 06 56 584 14 2 21E 08 MassSpecData 00404 20150916 120 Figure 235 Record Data in Excel Chart with Mass 4 Mass 28 Mass 32 and Total Pressure This data logging file was recorded while looking for the source of an air leak on a vacuum chamber On the Chart above starting at the left side the dark blue plot line near the top shows a Total Pressure of about 6 5 x 10 torr with partial pressures of Mass 28 No of about 4 x 10 torr and Mass 32 O2 of about 1 x 10 torr The ratio of Mass 28 to Mass 32 is about 4 1 indicating that an air leak is present in air N2 to O2 is about 80 20 The partial pressure of Mass 4 Helium starts out at zero on the chart because its concentration in air is only about S5ppm The partial pressure of helium is monitored as it is sprayed on different parts of the vacuum chamber When the helium is sprayed near the leak its partial pressure will increase As the helium flows into the leak it excludes the air and so the partial pressures of both Mass 28 and Mass 32 decrease The Total Pressure also decreases when the helium enters the leak because the ion gauge has a lower sensitivity to helium than it does to nitrogen see Appendix B Gauge Se
229. ph Window 6 19 1 Graph Window Slider Controls The Graph Window in VacuumPlus shows the Mass Sweep Mass Table or RF Calibration graph In the Mass Sweep mode there are three slider controls that set the size and position of the data shown on the graph They are the Scale Slider The Zero Slider and the Graph Width Slider Vacuum Plus 404 Graph Scale Slider Graph Zero Slider Slider Figure 32 Mass Sweep Graph Slider Controls The Scale Slider on the left side of the graph window controls the maximum value of the Y axis shown on the graph Move the slider toward the top of the window to display smaller signals or toward the bottom of the window to show larger signals Vacuum Plus 404 File Edit View Window Control Help ro Dnle cE AG HE we Bm Tota Pressure 478110810 Pirani Pressure 1 00 104torr ge StartDegas aa Scale Graph Scale Slider Moved Toward Top of Window Figure 33 Mass Sweep Graph Scale Slider Extorr Inc 307 Columbia Road New Kensington PA 15068 AO TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Zero Slider on the right side of the graph window controls the position of the zero line of the Y axis on the graph Move the slider toward the top of the window to shift the zero line down to the bottom of the graph or move the slider toward the bottom of the window to shift the zero line up to the top of the graph
230. pole Frame gt 4 Probe lonizer with Short Circuit between Source 1 and Focus 1 Figure 94 Short Circuit between Source 1 and Focus 1 If a short is found gently bend the Source 1 plate away from the Focus plate Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between Source 1 and Focus 1 Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 104 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com If any of the Connecting Wires between the Ionizer and Vacuum Feed Through are bent they may touch the Quadrupole Frame or the Vacuum Chamber wall and create a short circuit Sometimes a bent wire will cause the Barrel Connectors on the Filament Wires or the Tubular Spring Connectors on the other wires to touch the Frame or the Chamber and create a short circuit See the drawing below small Gap between Repeller amp Source 1 NS e lt lt Source 1 Gap Between IDN Source 1 amp Focus 1 Focus 1 Quadrupole Frame gt 4 short Circuit caused by Connecting Wire touching Quadrupole Frame Probe lonizer with short Circuit between Connecting Wires and Quadrupole Frame Figure 95 Probe Connecting Wire Short Circuits Examine
231. pper gasket command and control unit CCU flange mounting bolts CCU mounting bolts RS232 cable USB to RS232 Converter power supply and power cord VacuumPlus Software on CD plastic screw driver and Allen wrench any spare parts or accessories included with this order 2 te ee If your unit does not have all of these items call Extorr Inc at 724 337 3000 If anything appears to have been damaged in shipment contact the shipper as well Figure 2 Items Included in XT Package The probe is sent in a custom shipping box with shock absorbing vacuum formed plastic trays To remove carefully cut the tape sealing the box Then carefully lift off and set aside the upper plastic tray Next touching only the non vacuum side of the flange carefully remove the probe from the lower plastic tray Save this box in case the probe needs to be returned to the factory for repair 4 2 Factors to Consider before Mounting the Probe Find a DN 40 CF 2 34 inch flange on your vacuum system Carefully measure for the 7 inch 178 mm clearance required for probe insertion The port inside dimensions must be greater than 1 375 inches The port flange must also be a true 90 degrees from the center line of the port tubing If you require a smaller insertion length or need to convert to a different type of vacuum flange place the appropriate extension conversion nipple on the probe at this time Typically the CCU hangs in a vertical position
232. quency As the signal intensity increases the sound frequency increases A leak will be indicated by a rapid increase in frequency as the leak detect gas 1s applied to the location of the leak Since the sound is tied to the intensity level on the screen select the linear plot mode on the Plot tab by clearing the Enable Logarithmic Y Axis check box if necessary Extorr Inc 307 Columbia Road New Kensington PA 15068 26 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com If a multiplier unit is being used and the pressure is below 10 torr a leak is best detected with the multiplier option turned on at a gain of about 10 The Mass Table graph below shows Helium Air and Total Pressure plots during leak checking amp Vacuum Plus 404 HB File Edit View Window Control Help rg D kh Start Degas Start Recording a j Mass Table __ E Helium Mass 28 Total Pressure ess s EEE Seconds Figure 19 Mass Table Graph During Leak Checking The dark blue plot line near the top shows a Total Pressure of about 5 5 x 10 torr with partial pressures of Mass 28 N2 of about 4 x 10 torr and Mass 32 O2 of about 1 x 10 torr The ratio of Mass 28 to Mass 32 is about 4 1 indicating that an air leak is present in air N2 to O is about 80 20 The partial pressure of Mass 4 Helium starts out at zero on the graph and the audio output has a low frequency becau
233. r measuring a precision reference voltage If this reading and the Ground Ref reading are correct the A to D Converter is working properly The Reference value must be in the range of 2 45 V to 2 55 V E 3 2 Ground Ref The Ground Ref reading displays the result of the CCU s internal Analog to Digital Converter measuring the system Ground If this reading and the Reference reading are correct the A to D Converter is working properly The Ground Ref value must be in the range of 0 02 V to 0 02 V If the Reference and Ground Ref values are correct the other parameters should be as described below E 3 3 Degas Current The Degas Current displays the total electron current emitted from the filament measured in milliamps When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading will be about 0 5 mA greater than the Filament Emission control setting on the Operating Parameters tab The Degas Current will read about 0 mA when the Filament Activation Switch is set to OFF E 3 4 Electronics Temperature The Electronics Temperature displays the temperature inside the Extorr CCU electronics box in Degrees Celsius When power is first applied to the CCU the Electronics Temperature will be about equal to the ambient room temperature and will increase to about 40 C after operating for about an hour Extorr Inc 307 Columbia Road New Kensington
234. r should be multiplied by 20 28 to get 1 5x10 torr If exact partial pressures are required it is still best to calibrate by applying pure gases to your vacuum system A few cracking patterns for some common molecules are given in the Figure below Ar CO B Kr N _ H w for fas fof te ons ae oo fi oos 17 ois EJ s jos e jo foo f fi oos le jo ls ju is o Figure 61 Cracking Patterns for Some Common Molecules Extorr Inc 307 Columbia Road New Kensington PA 15068 62 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix C Manual Tuning of an RGA The Extorr XT Residual Gas Analyzer RGA comes with its default tune This was set at the factory for a nominal unit mass resolution at the proper mass positions throughout the mass range This default tune may always be assumed to be either fairly exact or a good starting point for a user calibration The user can over ride this tune by changing the default tuning parameters He may wish to do this to give special measurement capabilities to certain spectral regions He may for instance want to look at a particular weak spectral region with enhanced sensitivity or look at a portion of the spectrum with higher resolution to look at half mass peaks or peaks which suffer mass defects The tuning parameters which may be controlled and their functions are El
235. r tabs are visible When in the split mode the graphic button becomes The relative size of the Graph window and Operational Folder tabs may be changed by dragging the left edge of the tabs Slowly move the mouse cursor over the left edge of the Folder tabs amp Vacuum Plus 404 BF File Edit View Window Control Help 1 0 fl W E Total Pressure 2 873x108 torr Pirani Pressure Q 4 Start Degas Start Recording ese Zec Mass Sweep Sweep parameters Operating parameters 2 00e 8 Mass Table Plot Printing Log Configuration Communications Record Data 1 80e 8 Calibration parameters Diagnostics Qutputs Degas current 24 ma Filament Vi 1 60e 8 Electronics Temperature 44 3 C Filament Resis Power supply 24 35 volts Sensor Tempe 1 40e 8 1 20e 8 Sourcel current 1 021785 ma Reference 2 45 to Source2 current 0 983653 ma Ground ref 1 00e 8 RF Amp Oto 20 0 4 289125 volts Focus FB Fc Pirani Temp 1 to 1 0 0 128256 volts Repeller 2 0 Ele 8 00e 9 Pirani Corr 1 to 1 0 0 128752 volts Filament F Pirani Press 3 to 2 5 0 284096 volts Filament DAC C 6 00e 9 FB 2 25 to 2 5 2 404173 volts Filament DAC FB 2 25 to 2 5 2 405593 volts 4 00e 9 2 00e 9 Arrow Cursor Figure 44 Mouse Cursor at Folder Tab Left Edge Extorr Inc 307 Columbia Road New Kensington PA 15068 A6 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www e
236. rr com 24 Volt 50 Watt power supply SLSR Input 100 240 VAC 50 60 Hz 100 00 Power Cord for PS24VDC North America User must Install plug 5 00 end for other Countries Thumb Screws to hold CCU to XTTS000 Analyzer Probe 10 00 gt 600 00 XTFTO00 Vacuum Feedthrough with Pirani Gauge 500 00 XTMF100 Mass Filter for XT 100 1000 00 XTMF200 Mass Filter for XT200 1500 00 XTMF300 Mass Filter for XT300 300 00 XTMF300EX Mass Filter for XTx00 Exchange 200 00 XTFRAME Frame for XTx00 Analyzers XTFAR _ aaa ine Faraday Detector Assembly 200 00 prices effective as of 08 01 2015 International prices are 10 higher with a 50 minimum increase per invoice Extorr Inc 307 Columbia Road New Kensington PA 15068 69 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix E Troubleshooting and Service E 1 Troubleshooting Before continuing with this section please review the Extorr RGA Quick Start Guide and the FirstTimeR gaStartUp avi video on the Extorr CD that came with your RGA system Both contain step by step instructions for installing and operating your RGA system for the first time The video also demonstrates many key concepts including how to display and resize the VacuumPlus Operational Folder Tabs and how to copy the Factory Configuration File from the CD to your computer E 1 1 Switch to a Known Good Con
237. rt extorr com Extorr Inc www extorr com If the RGA filament does turn on then the Pirani gauge needs to be repaired as soon as possible The steps taken above are for troubleshooting only and defeat the RGA s built in filament protection system Have your Pirani Gauge repaired as soon as possible to prevent the filament from turning on at high pressure and burning out Extorr Inc 307 Columbia Road New Kensington PA 15068 201 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Warranty XT products of Extorr Inc are warranted to be free of defects in material and workmanship for a period of one year from the date of shipment At our option we will repair or replace products which prove to be defective during the warranty period Liability under this warranty is limited to repair or replacement of the defective items Shipping damage is excluded from the scope of this warranty If this product is returned to Extorr for warranty service Buyer will prepay shipping charges and will pay all duties and taxes for products returned to Extorr Extorr will pay for return of products to Buyer except for products returned to a Buyer from a country other than the United States LIMITATION OF WARRANTY The foregoing warranty does not apply to the defects resulting from unauthorized modification or misuse or operation outside the specifications of the product THE WARRANTY SET FORTH ABOVE IS EXC
238. rupole and increasing the resolution allows less Therefore peak heights may also be controlled by the resolution settings Quadrupole tuning is somewhat an acquired art The more the user plays with different tunes the more adept he will become at achieving customized purposes We again emphasize that for 99 of RGA operations the factory tune is more than adequate Remember you can go back to this tune by reopening the factory configuration file under the Configuration tab Extorr Inc 307 Columbia Road New Kensington PA 15068 65 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix D Options and Spare Parts Filament lon Gauge and lonizer Assembly 200 00 OBSOLETE use XTIONIZER XTDUALFIL lonizer assembly for use with dual filaments XTDUALFIL XTFIGI 1 XTIONIZER 200 00 Dual thoria coated iridium XTDUALFIL 90 00 2 3 4 Inch CF Nipple 5 0 Inches between Flange Faces Used to install analyzer ina 100 00 vacuum system where there is insufficient internal clearance XTPR100 XT100 Probe Probe 1600 00 aa tae XTPRGO0 KTa00 Probe 2600 00 XTPR300M KT300M Probe 3400 00 XTPRIOORF XT100 M Probe Refurbish 500 00 XTPRZ0ORF XT200 M Probe Refurbish 550 00 XTPRGOORF KT300 M Probe Refurbish 600 00 Z O1 Extorr Inc 307 Columbia Road New Kensington PA 15068 66 TELEPHONE 1 724 337 3000 FAX 1 724 337 8
239. s 51 SamplesPerAMU 10 RgaTrendDatal H l _ 100 Figure 166 Record Data in Trend Mode CSV File Opened in Excel Extorr Inc 307 Columbia Road New Kensington PA 15068 153 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The Configuration parameters end with the lt ConfigurationData gt label at cell A137 in this example The data below the configuration parameters starting in row 138 in this example are the Date Time Mass and Intensity values from the recorded scans The Date Time values are in column A the Mass values in amu are found in column B and the Intensity values in torr are in column C The default cell formatting in Excel does not display the Date Time values correctly This is a problem with the way that Excel interprets the information even though the ASCII data in the CSV file clearly shows the Year Month Day and Time To change the formatting for column A first select all values in the column by clicking on the label at the top of the column RgaTrendDatal csv Excel 7 O xX HOME INSERT PAGE LAYOUT FORMULAS DATA REVIEW VIEW DEVELOPER john hack v fx C D rcNormalPosition bottom 715 gt 127 lt WindowParameters gt 128 129 lt PlotParameters BkColor Pale green LineColor Green ScanColor Blue MouseWheel 0 LogYAxis 0 135 gt 136 137 lt ConfigurationData gt 17 06 2 14 1 50E 08 17
240. s Helium at Mass 4 is entered into the Mass Table Helium is usually the gas chosen but any other leak detection gases may be used The Mass Table below has the Helium and Air masses enabled for leak checking Mass Table Samples 600 Add Remove Clear Audio Output Selected Channel i Disable Graph High High Low Low Enabled Audio izeien Color Alarm Warning Alarm Warning es 4 Helium No 18 Ho 28 E s ce Ho 5 Pirari Figure 18 Mass Table for Leak Detection To enable the audio output first check the Audio Output Selected Channel check box on the Mass Table tab Next double click on the Audio cell for the leak detect gas and check the box there Click on another cell to update the table and then click on the Apply button for the changes made to take effect The Audio cell for the leak detect gas will change to Yes An audio output will be heard as soon as the Trend mode is entered If no audio is heard first check to see that the system is in the Trend mode the Audio Output Selected Channel box is checked on the Mass Table tab and that Yes is shown in Audio cell for the leak detect gas the check box in the Audio cell is checked Use the Scale and Zero sliders located to the sides of the graph along with the dwell time setting to get a smooth baseline tone but use a short dwell time for fast response When the plot of the leak detect gas is near the bottom of the trend graph the sound has a low fre
241. s OFF lolx k 4 Total Pressure is Negative because Filament is OFF No Mass Spectrum amp 2 shown on Mass Sweep Graph 4 i C Figure 84 Outputs Tab and Mass Scan Graph Repeller Source 1 and Focus 1 Shorted Extorr Inc 307 Columbia Road New Kensington PA 15068 29 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Source 1 Current Source 2 Source 2 Current Source 1 Extorr Inc www extorr com E 2 11 Focus 1 Shorted to Source 1 Eivacuum Plus 1010 TE Eie Edt View Window Control Hep l lal x 1 0 D0 n eela onti RE T Total Pressure 1 569x10 torr Pirani Pressure 1 00 x10 4 torr gr Start Degas Plot Printing Log Configuration Communications Sweep parameters Operating parameters Calibration parameters Diagnostics Outputs Mass Table 1 Degas current TO ne Filament Voltage 1 45 volts Electronics Temperature 325 C Filament Resistance O51 Ohm a 4 Degas Current 1 mA I Power supply 24 13 vots Sensor Temperature Tc should be about 2 4 mA Source 1 Current 1 7 mA amp should be about 1 0 mA f 2 Soucet curent 1 7822 6 ma Reference 2 45 to 2 55 2499754 4 volts k3 Source 2 Current 0 2 mA is 3 Source curent 0 222247 ma Ground ref oe T vite Y should be about 1 0 mA RF Amp 0 to 20 0 4172144 vots ont vets e 4 4 y 4 Focus 1 FB OV Piani Temp 1 to 1 0 _ 68 02 volt
242. s with distilled water The Extorr probe was designed to allow easy cleaning and ionizer filament replacement The only tool required is an Allen wrench to loosen the set screws that hold the ionizer to the probe This tool is supplied with all new ionizers The following steps will usually restore the XT system to proper operation Extorr Inc 307 Columbia Road New Kensington PA 15068 52 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Placing the analyzer onto the CCU without the thumbscrews makes a good stand for the repair Loosen the top set screws on the 2 barrel connectors that connect the filament wires Remove and discard the old filament assembly If you are only replacing the filament skip to step 7 Loosen the bottom set screws on each barrel connector and slide them down the wires towards the feedthrough Remove the ionizer by pulling upward a gentle twisting action may be necessary Using a hook made from some 062 diameter wire pull the mass filter Extorr Inc 307 Columbia Road New Kensington PA 15068 53 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc lt x 1gp Slide the 4 tubular spring Step 7 HEEN connectors completely up onto the ionizer wires Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com www extorr com Pull
243. se its concentration in air is only about Sppm When the helium is sprayed near the leak its partial pressure and the sound frequency will increase As the helium flows into the leak it excludes the air and so the partial pressures of both Mass 28 and Mass 32 decrease The Total Pressure also decreases when the helium enters the leak because the ion gauge has a lower sensitivity to helium than it does to nitrogen see Appendix B Gauge Sensitivity to Differing Gasses When the helium spray is moved away from the leak air slowly replaces it and the partial pressure of helium and the sound frequency decreases as the partial pressures of nitrogen and oxygen increase as shown in the graph The helium spray was then moved back over the leak a second time to pin point the location To turn off the audio output click on the Disable button next to the Audio Output Selected Channel check box on the Mass Table tab and then click on the Apply button Extorr Inc 307 Columbia Road New Kensington PA 15068 27 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 10 Outputs Tab Outputs Degas current 2 4 ma Filament Voltage 2 05 volts Electronics Temperature 43 7 C Filament Resistance 0 54 Ohm Power supply 24 71 volts Sensor Temperature 41 6 C Sourcel current 1 034503 ma Reference 2 45 to 2 55 2 494633 volts Source2 current 0 965255 ma Ground ref 02 0
244. shows the feedback voltage of the Focus 1 circuit This reading should be roughly equal to the value of the Focus 1 control on the Operating Parameters tab The factory setting for the Focus 1 control is typically 20 V If Focus 1 is touching the vacuum chamber shorted to Ground this reading will be about 150 V See section 4 3 of the Extorr RGA User s Manual for the Probe Pin Out and instructions for testing for shorts E 3 18 Repeller The Repeller value is the feedback voltage of the Repeller circuit This reading is typically about 68 V which is roughly 2 volts less than the value of the Electron Energy control on the Operating Parameters tab If the Repeller is touching the vacuum chamber shorted to Ground this reading will be about 150 V See section 4 3 of the Extorr RGA User s Manual for the Probe Pin Out and instructions for testing for shorts Extorr Inc 307 Columbia Road New Kensington PA 15068 94 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com E 3 19 Filament Power The Filament Power display indicates how much of the available power is currently being used by the filament When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading should be about 60 The Filament Power will read about 5 when the Filament Activation Switch is set to OFF E 3 20 Filament DAC Coarse The Fi
245. so even a small increase in the contact resistance of the pins is important It takes about 2V at 4A to generate 2mA of electron emission in normal operation The probe pins may be carefully cleaned with a fine 400 600 grit sandpaper to remove the oxide A finger nail emery board may also be used The oxide coating is a dull greenish grey so sand the pins until they are bright it usually takes just a few minutes Pay most attention to the filament pins pins 5 and 9 on the feed thru See Figure 4 Flange Pin Out on page 11 The Filament Voltage on the Outputs tab should read about 2 volts after cleaning Extorr Inc 307 Columbia Road New Kensington PA 15068 194 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix J High Pressure Operation The RGA will operate at 104 Torr and give meaningful results but if the major components are water or oxygen the stainless steel parts in the ionizer will oxidize Chromium oxide an insulator will form on the ionizer surfaces because the temperature gets to about 200 C in normal operation This will lead to low partial pressure sensitivity in as little as a few hours and may require replacement of the filament and ionizer to restore the sensitivity Lowering the operating pressure will slow down the oxidization of the ionizer surfaces For example it may take many weeks for the surfaces to oxidize at pressures between 1x10 Torr and 1x10
246. spheric pressure and that read when pressures are below 10 torr will establish the a voltage pressure 1 00E08 1 00E 08 100E 04 1 00E 03 100E 02 1 00E 01 1 00E 00 100E 01 T00E 02 1 00E 03 relationship between these two points 3 00E 02 2 80E 06 D m T a 5 2 B J a f E BA output current pressure Figure 59 Pirani amp Ion Gauge Operation B 2 Ion Gauge Corrections The ion gauge is also calibrated for nitrogen In the ion gauge pressure realm the ion current depends on the probability that an electron ionizes a molecule to make an ion This probability actually a cross section for ionization is strongly dependent on the molecular structure The pressure is defined by the ratio of ion current 1 to electron current e times a sensitivity number k That is P 1 k e k must have units of inverse pressure This k can vary widely depending on the molecular make up of the gas The table below gives this k value for most common vacuum gases The table gives this result in inverse torr inverse mbar and inverse pascals A relative sensitivity is also given with respect to nitrogen This is the number used to convert a nitrogen gauge reading to a reading for the gas in question This is done by dividing by the relative sensitivity number kz Extorr Inc 307 Columbia Road New Kensington PA 15068 60 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com
247. ssssseecccccssssscececocossssccceoooo 111 G 3 Identifying the COM Number of the USB to RS232 Converter sssssssssscseesees 112 G 4 Changing the COM Number of the USB to RS232 Converter sssssssssssssseseees 116 G4 1 Device Manager Shows All Ports In USE nniininronisoi alata anes a vie a Madaeta ied 123 Appendix H Analyzing Recorded Data In Microsoft Excel csscccssssees 130 H 1 Data Saved to a Single File in the Mass Sweep Mode ccccccccsssssssssssssssscssssssssssscees 130 H 2 Data Saved to Multiple Files Once Per Scan in the Mass Sweep Mode ccsseeees 142 H 3 Data Saved to a Single File in the Trend Mod cccccccsssssssssscccccccssssssssssccccssseseees 152 H 4 Data Saved to Multiple Files Once Per Scan in the Trend Mode cccsssssssssees 173 Appendix I Filament Trip Diagmosls cccccssssccscccsssssssssssssssssssssssssssssssssceees 193 Appendix J High Pressure Operation ccccccccssssssssssssssscccccccsssssssssssscccssssseeess 195 Appendix K Integrating Capacitor Causing Very Noisy Baseline 00 196 Appendix L Pirani Gauge Will Not Allow Filament to Turn On 00000 198 OV AU TAMA a E E E E 202 Extorr Inc 307 Columbia Road New Kensington PA 15068 5 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 1 Safety Information Limitation on
248. tened Reconnect the Power Supply PCB to the Electronics assembly Angle the board and slide the 1 2 inch diameter spacers under the edge of the copper box while carefully aligning the connector pins from the board below with the sockets on the Power Supply PCB Once the connector pins have been aligned press the Power Supply PCB onto the electronics assembly Check that all the pins on both of the connectors are mated correctly Extorr Inc 307 Columbia Road New Kensington PA 15068 109 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Connect the female socket on the High Voltage Output Wire from the Module to the male terminal pin at TE1 on the bottom PCB in the electronics assembly the RF Board The male pin at TE is a bent wire soldered to the bottom PCB and is located near one of the 1 2 inch diameter spacers It is about 3 4 inch in toward the center from the edge of the bottom PCB Gently push the High Voltage Wire socket onto the pin until it stops Use the CCU to Vacuum Flange mounting bolts to align the PCBs in the electronics assembly Insert the two bolts from the Power Supply Board side of the assembly into the holes in the edge of the copper box above the Power Supply Board It may be necessary to slightly move the individual PCBs to get the bolts completely through the spacers on all boards of the electronics assembly Attach the CCU Box back plate to the electronics assemb
249. the MM month the DD day and the HHMMSS time Data is appended to the file until the number of scans specified by the value in the N box are completed The existing file is then closed and a new data logging file is created to store the data for the next group of N scans Data files continue to be created for each group of N scans until the Stop Recording button is clicked or the disk becomes full The last record appended to the data file may contain a partial sweep or data for only some of the enabled entries in the mass table Data Recording may also be controlled with the Data File Recording On check box and Uncheck button on the Record Data Tab Remember to click the Apply button when using these controls Large data logging files may be generated by this recording option 6 15 Diagnostics Tab Diagnostics is a locked function which may be used by the factory for trouble shooting as required For the curious this may be unlocked by placing extorr into the password in the Calibration Parameters Diagnostics field Extorr Inc 307 Columbia Road New Kensington PA 15068 36 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 6 16 XML Use G XML stands for eXtensible Markup Language Like the famous HTML of internet fame XML is a subset of SGML In particular XML is the text markup language for interchange of structured data XML has
250. the continuous Trend Scan mode When one Trend Mode Scan is complete another starts and this repeats until the STOP button 1s pressed The 1 Scan button selects the Single Trend Scan mode One complete Trend Scan will occur and then the RGA will enter the Stop mode The RGA will remain in the Stop mode until another Single Trend Scan is in the main VacuumPlus window start and stop a Extorr Inc 307 Columbia Road New Kensington PA 15068 25 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com started by clicking the 1 Scan button again or the continuous Trend Scan mode is selected by clicking on the GO button Clicking on the STOP button aborts the current Trend Mode Scan The RGA will remain in the Stop mode until another Single Trend Scan is started by clicking the 1 Scan button or the continuous Trend Scan mode is selected by clicking on the GO button Actual operation requires selecting Trend from the Mode drop down menu on the Operating parameters tab This mode selection is explained in section 6 7 1 Audio Output Selected Channel i Disabl 6 9 1 Mass Table Setup for Leak Detection Deer gree _ Disable The Trend mode may be setup for vacuum leak checking with an audio output for the intensity of the leak detect gas A leak may be found by listening to the audio tone instead of watching a mass peak on the screen A leak detect gas such a
251. the folders The parameter values are refreshed at the end of every mass scan which takes about 2 seconds I ioli BH File Edit view Window Help x Total Pressure 1 560 x10 7 torr Pirani Pressure 1 00 x10 4 torr Start Degas m Mass Svreep Zen Mass Table Plot Printing Log Configuration Communications Sweep parameters Operating parameters Calibration parameters Diagnostics Outputs Degas curent 23 ma Filament Voltage 1 84 volts Electronics Temperature 24 3 C Filament Resistance 0 67 Power supply 23 84 volts Sensor Temperature 26 0 Sourcel current 1 126054 ma Reference 2 45 to 2 55 2 459044 Source2 current 0 881173 ma Ground ref 02 0 001630 RF Amp 0 to 20 0 8 749315 volts Focus FB Focus1 19 58 Pirani Temp 1 to 1 0 0 138739 volts Repeller 2 0 Elec_En 67 58 Pirani Corr 1 to 1 0 0 140201 volts Filament Power B46 Pirani Press 3to 25 0 318261 volts Filament DAC Coarse 2991 FB 225t025 2404382 vots Filament DAC Fine 2406 FB 225t025 2403971 volts Outputs Tab Visible Figure 71 Outputs Tab Parameter Values Compare the Outputs tab parameter values and the Mass Sweep Graph from your system to the Screen Captures shown in section E 2 If the Outputs Tab parameter values from your system agree with the Normal Operation Screen Captures but the sum of the partial pressures is low compared to the total pressure
252. the mass filter out of the frame Clean the surfaces of the rods with 1200 grit alumina abrasive paper until they are bright Using a waterproof paper with water works well Be careful not to bend the electrical contacts Then clean in Alconox detergent using an ultrasonic cleaner at 40 kHz Rinse well with distilled water in the ultrasonic bath several times then dry at 75 degrees C Next insert the mass filter into the probe being careful to line up the 2 wires with the two holes in the end of the mass filter that make the electrical contact Using a small pair of needle nose pliers or a strong pair of tweezers remove the 4 tubular spring connectors from the old ionizer and push them onto the respective pins on the new ionizer Push the new ionizer down onto the probe carefully engaging the center pin and BA shield spring until the focus plate is flush with the top of the quadrupole 54 Extorr Inc Figure 55 Servicing the Probe www extorr com Slide the four 4 tubular spring connectors down to engage the respective feedthrough wires Insert the new filament assembly and while holding down on the filament slide the barrel connectors into place and tighten both set screws on each barrel connector Be careful that the wires do not short to each other or the frame You can bend the wires from the feedthrough easily if necessary but do not bend the wires from the ionizer or you may crack the ceramics
253. the ports are actually installed Device Manager File Action View Help e Re 4 ey Jack PC p JE Tinis b cq Disk drives p BS Display adapters gt ei DVD CD ROM drives b Ta Human Interface Dewices t 4g IDE ATA ATAPI controllers gt Keyboards D gt A Mice and other pointing devices AS Monitors ee EP Network adapters ee Ports come LPT i an USB Serial Port gt Bp Processors p Sound video and game controllers gt I System devices e F Universal Serial Bus controllers b ig USB Virtualization Figure 123 The Device Manager Ports List Extorr Inc 307 Columbia Road New Kensington PA 15068 123 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com The COM ports that are shown in the Advanced Settings window but not in the Device Manager window may be for devices previously installed in your computer and then later removed or for devices that are only connected from time to time The user should identify the function of each of the ports before making any changes Replacing one of the in use ports with the USB to RS232 Converter may cause another device connected to your computer to stop working Proceed with caution For example in the figures above COM9 is shown to be in use in the Advanced Settings window but it is not in Port list in the Device Manger If no known device uses COM9 on this computer the COM number of the USB to
254. the total pressure and the sum of partial pressures Cleaning the ionizer is difficult if not impossible in most cases so replacement is the remedy It is also likely that some contamination will make it to the rods of the quadrupole So when replacing the ionizer due to low sensitivity it is a good idea to clean the quadrupole rods as well Always handle the probe with clean gloves or you will see the results of your contamination on the next scan A fingerprint will outgas and cause peaks at virtually every amu until it is evaporated or turned into low vapor pressure compounds in your vacuum system Of course other sources of contamination such as diffusion or mechanical pump oil could cause similar problems Even after the volatiles are gone the residue may cause the probe to operate improperly by leaving behind either insulating compounds or secondary electron emitting surfaces This can cause a charge from electrons to build up and disturb the electric fields in the ionizer or the mass filter leading to low sensitivity At the factory all parts are mechanically cleaned then vacuum baked and then plasma cleaned If you are doing UHV work and demand the best cleanliness you can send the analyzer to the factory for refurbishment but many customers have had good success with cleaning in the field The rods are best cleaned with an abrasive method such as 1200 grit abrasive paper polishing followed by an Alconox ultrasonic bath and several rinse
255. they stay in the sockets on the multiplier VA Slot Faraday Cup p Bottom Mounting a Lower Slot Contact Springs In Flange Figure 98 Insert Multiplier Bottom Tab Push the top of the multiplier in toward the Faraday Cup and insert the Top Mounting Tab into the upper slot in the Faraday Cup Assembly The Top Mounting Tab should snap into the upper slot Check the position of the Top Tab to make sure it is inside the upper slot See Figure 99 Check that the two Contact Springs are still in the sockets on the Multiplier Top Mounting Tab In Upper Slot Faraday Cup a es a4 ei TRE a ia a Contact Springs men Figure 99 Insert Multiplier Top Tab Bottom Mounting Tab In Lower Slot Refer to sections 4 2 and 4 3 of the Extorr RGA Users Manual to re install the Quadrupole Probe into your vacuum system Extorr Inc 307 Columbia Road New Kensington PA 15068 108 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com F 4 Install High Voltage Power Supply Module The High Voltage Power Supply Module mounts on the Power Supply PCB Printed Circuit Board inside the CCU Box To install the module first remove the two mounting bolts that attach the CCU to the Vacuum Flange Next remove the six black Phillips head screws that hold the CCU Box cover to the back plate These screws are located around the edge of the back plate on the side with the c
256. tics Outputs ge 2 a o m vots EB Filament Resistance 033 omk A k3 a 3 T k 5 6 kT 8 2 Degas current 0 ma Electronics Temperature 27 5 C Power supply 23 87 volts 5 Source current 0 000022 a 6 Source2 current o00003i RF Amp Oto 20 0 4 198112 Pirani Temp 1 to 1 0 0 139696 Pirani Com 1 to 1 0 0 140280 Pirani Press 3to 2 5 0 316207 FB 2 25t025 2407660 k Trese ona ma Reference 2 45 to 2 55 2 489232 volt ma Ground ref 2 02 0 011288 volts Focus FB Focus1 15273 volts Repeller 2 0 Elec_En 152 72 volts volts volts aa bea 7 x41 Filament DAC Coarse 2991 Filament DAC Fine 9 10 Er Plus 1010 ioxi oe E ania Nm 4 gaze Figure 78 Outputs Tab and Mass Scan Graph Source 2 Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com www extorr com Filament Switch Turns OFF Automatically after several Mass Sweeps Light Bulb Icon shows a Filament Problem Degas Current 0 mA should be about 2 4 mA Filament Voltage 0 10V should be about 1 6V Filament Resistance 0 33 Q because Filament is OFF Source 1 Current 0 mA should be about 1 0 mA Source 2 Current 0 mA should be about 1 0 mA FB 0 49 V should be about 2 40V Focus 1 FB 152V should be about 20V Repeller 152V should be
257. tire screen ioj x HB File Edit view Window Help x Total Pressure 1 560 x10 7 torr Pirani Pressure 1 00 x10 4 torr Q Start Degas a zea Mass Table plot Printing Log Configuration Communications Sweep parameters Operating parameters Calibration parameters Diagnostics Outputs Degas curent 23 m Filament Voltage 1 84 volts Electronics Temperature 244 Filament Resistance 0 67 Ohm Power supply 23 84 Sensor Temperature 26 0 C Source curent 1 126054 ma Reference 2 45 to 2 55 2 459044 Source current 0 881173 ma Ground ref 02 0 001630 RF Amp 0 to 20 0 8 749315 volts Focus1 FB Focus1 19 58 Pirani Temp 1 to 1 0 0 138739 volts Repeller 2 0 Elec_En 67 58 Pirani Con 1 t0 1 0 0 140201 vots Filament Power 64 6 Pirani Press 3to 25 0 318261 vots Filament DAC Coarse 2991 FB 225t025 2 404382 vots Filament DAC Fine 2406 FB 2 25 to 2 5 2 403971 volts Outputs Tab Visible Figure 73 Outputs Tab Visible for Screen Capture In the Split Screen mode with all the Outputs tab parameters visible press the Print Screen key on your keyboard The VacuumPlus window will be saved to the Clipboard Start the Paint program In the Paint program window select Paste from the Edit menu The screen capture of the VacuumPlus window will be pasted into the Paint program From the File menu select th
258. to Multiple Files On The Hour Option When the On the hour option is selected a new data logging file is created and saved for every hour that the RGA is scanning in the continuous Mass Sweep or continuous Trend Scan modes using the GO button Data Logging will begin when the Start Stop Recording button is clicked in the main VacuumPlus window A Mass Sweep will start over at the Low Mass setting or the Trend mode will reset to the first enabled entry in the Mass Table A data logging file named MassSpecData XXXXX Y Y Y Y MM DD HHMMSS csv is created in the selected folder at the beginning of the scan The XX XXX in the file name is the Serial Number of the CCU followed by the YY YY year the MM month the DD day and the HHMMSS time Data is appended to the file until the end of the current hour is reached The existing file is then closed and a new data logging file is created to store the data for the next hour The last record appended to the data file may contain a partial sweep or data for only some of the enabled entries in the mass table Data files continue to be created for each hour of scanning until the Stop Recording button is clicked or the disk becomes full Data Recording may also be controlled with the Data File Recording On check box and Uncheck button on the Record Data Tab Remember to click the Apply button when using these controls Large data logging files are
259. twork adapters gt SF Ports COM amp LPT gt Ba Processors gt Sound video and game controllers gt gill System devices gt F Uniwersal Serial Bus controllers gt USB Virtualization Figure 108 The Device Manager Window Click on the arrow next to Ports COM amp LPT to expand the Ports list A Device Manager E na File Action View Help H amp 4 iy Jack PC gt i Computer gt Sy Disk drives s iS Display adapters gt ff DVD CD ROM drives gt qi Human Interface Devices n 4g IDE ATA ATAPI controllers gt ED Keyboards gt A Mice and other pointing devices i Monitors gt EY Network adapters a T Ports COM amp LPT 1 Printer Port LPT1 gt USB Serial Port COM11 B Processors gt i Sound video and game controllers gt lil System devices p Uniwersal Serial Bus controllers gt USB Virtualization HEEE Figure 109 The Device Manager Ports List Expanded All of the COM ports installed in your computer are shown in the list Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com www extorr com 114 Extorr Inc www extorr com To determine which COM port is the USB to RS232 Converter unplug the converter from the USB port while watching the Ports list in the Device Manager window The Device Manager window will refresh when the converter is unplugged The device removed
260. twork adapters a F Ports COM amp LPT Dp Processors i Sound video and game controllers gt Mil System devices f Universal Serial Bus controllers gt USB Virtualization Figure 111 The Device Manager After the USB to RS232 Converter is Plugged In Again The port will appear and disappear from the Ports list in the Device Manager window as the actual converter is plugged in and then removed from the USB connector Plug the USB to RS232 Converter back into the same USB port as before and note the COM number The COM number found above will have to be selected from the drop down Ports list on the Communications tab in VacuumPlus to establish communications between your computer and the RGA CCU If the COM number is COM10 or above it will have to be changed to work with VacuumPlus Follow the instructions below to change the COM number G 4 Changing the COM Number of the USB to RS232 Converter The COM number of the USB to RS232 Converter must be between COM1 and COM9 to work with the VacuumPlus Software If the converter is COM10 or higher on your computer and one of the lower numbered ports is available the properties of the USB to RS232 Converter can be changed in Device Manager to give it a lower COM number If all of the ports between COM1 and COM9 on your computer are used by other devices check to see if the settings of any of the other devices may be changed to work with a COM number higher than COM9 If so set that de
261. uld know that a partial scan was recorded In the Trend mode a data logging file is a continuous series of measurements made over the time it was recorded The exact end point of an individual scan in the Trend mode is of little importance unless data must be captured for a specific amount of time Extorr Inc 307 Columbia Road New Kensington PA 15068 192 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix I Filament Trip Diagnosis The ionizer has two filaments that operate in parallel The filaments are made from Iridium metal and are positioned about 2 mm from the platinum source grid in the ionizer Iridium does not emit electrons at a low enough temperature to be useful so it is coated with thoria a powdery white substance The CCU electronics apply a voltage across the filaments to heat them until electrons are boiled off of the thoria coating This electron emission current flows from the filaments to the platinum source grid Source 1 and a portion of the current makes it to the other side of the ionizer to the Source 2 plate Both the Source 1 and Source 2 currents are measured by the electronics and are displayed on the Outputs tab The electronics will increase the filament voltage until the sum of the Source and Source 2 currents is equal to the Filament Emission setting on the Operational Parameters tab this is usually set to 2 mA The voltage is increased over the co
262. unications tab for the changes made to take effect Remember to save your Configuration File with the new COM Port setting by clicking on the Configuration Tab and then on the Save button or use the Save As button to give it a different file name VacuumPlus will load the newly saved Configuration File whenever the software is restarted Serial Port Port Speed Figure 133 VacuumPlus Communications Tab Port List The Port list on the Communication tab of VacuumPlus contains only the COM ports installed on your computer This list will contain the same COM port numbers as shown in the Ports list of the Device Manager et Device Manager File Action View Help 9 ml S 8 PR a Ports COM amp LPT iT Communications Port COML1 gt E Processors gt Sound video and game controllers gt JE System devices s Universal Serial Rus controllers Figure 134 The Device Manager Ports List Refer to Section 6 of this manual for additional information on using the VacuumPlus software Extorr Inc 307 Columbia Road New Kensington PA 15068 129 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Appendix H Analyzing Recorded Data In Microsoft Excel The Data Logging files generated in the Record Data mode are saved in a CSV format and may be opened in a spread sheet program such as Microsoft Excel The Data contained in the file depends on the rec
263. urse of about 5 seconds when the filament is first switched on You can monitor the filament voltage by choosing a fast scan speed or a small mass range so that the Outputs tab values update every second or so If the Filament Emission setting is not reached with the maximum filament voltage the software will report that the filament tripped and will reduce the filament voltage back down to about 0 1 volts The most common cause for a filament trip is an electrical short circuit from one of the probe elements to the vacuum chamber wall electrical ground A short circuit usually occurs when the exposed electrical connections on the vacuum side of the probe come in contact with the chamber or there is damage to the ionizer assembly It is also possible that both of the filaments have burned out See Appendix E Troubleshooting for details on how to diagnose these problems Another cause for the filament trip could be a filament that has lost the emissive thoria coating The thoria coating will decompose over time and the electronics will adjust the filament voltage to compensate At some point the electronics will no longer be able to obtain the desired emission current and the filament will trip Rinsing the probe in a solvent to remove oil contamination may wash the thoria coating off of the filament The thoria powder may also come off due to continuous large amplitude mechanical vibrations The filament will have to be replaced in these cases See
264. utton is clicked may Extorr Inc 307 Columbia Road New Kensington PA 15068 150 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com contain the data for only a partial sweep If the last data point appended to the file is any value less than about half an amu above the High mass setting on the Sweep parameters tab a partial sweep was recorded in the last file saved Extorr Inc 307 Columbia Road New Kensington PA 15068 151 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com H 3 Data Saved to a Single File in the Trend Mode The RgaTrendDatal csv file was created using the To One File option on the Record Data tab with the RGA in the Trend mode The Mass Table used in this example is displayed below It contains 8 entries for Mass 4 Mass 14 Mass 18 Mass 28 Mass 32 Mass 44 Mass 0 the special code for Total Pressure and Mass 5 the special code for Pirani Pressure The entries for Mass 4 and Mass5 Pirani Pressure are disabled leaving just 6 entries to be measured during a Trend Scan Mass Table entries 2 through 7 The Dwell Time is set to 7ms for all of the entries Because 5 measurements are taken at each mass the actual dwell time is 35ms mass entry 7ms 5 measurements and with 6 entries enabled the total time required for one Trend Data Sample point is 210 ms 35ms 6 entries The Sample value is set to 100 produ
265. vice to COM10 or higher and then use the previous COM number for the USB to RS232 Converter If none can be changed then a device will have to be removed from the computer or another computer with an unused port between COM1 and COM9 will have to be used for the RGA To change the COM number navigate to the Device Manager window and expand the Ports list as described above Extorr Inc 307 Columbia Road New Kensington PA 15068 1 16 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Select the COM Port that is the USB to RS232 Converter on your computer USB Serial Port COM11 in this example and then right click on it to display a drop down menu To identify the COM number of the USB to RS232 Converter on your computer see section G3 above a Device Manager p nea File Action View Help 9 HIG Bm t ENE a Jack PC JE Computer gt a Disk drives b MS Display adapters gt DVD CD ROM drives b i Human Interface Devices b 4g IDE ATA ATAPI controllers gt lt a Keyboards b Mice and other pointing devices 5 T Monitors EF Network adapters a Y Ports COM amp LPT d EJ Communications Port COML b Sound video and game co Disable li System devices Uninstall Universal Serial Bus controll y USB Virtualization Scan for hardware changes Properties Figure 112 The Device Manager with USB to RS2
266. will end Data Logging The button appears released and changes back to the Start Recording button File Data logging may also be controlled using the Data File Recording On check box and Uncheck button on the Record Data tab To start recording check the On box and click the Apply button Click on the Uncheck button and then Apply to stop recording The Configuration file parameters are saved at the beginning of every data logging file These parameters are the settings from all of the Operational Folder tabs and this is the same information contained in the RGA Configuration file Like a configuration file the data logging CSV file may be opened on the Configuration tab using the Open button and the Operational Folder tabs settings used to create the data logging file may be reloaded into VacuumPlus See Appendix H Analyzing Recorded Data in Record Data Microsoft Excel for additional information 6 14 1 Recording Data Off No file File Data Logging is turned OFF when the No file C Toonefile Enter file name radio button is selected Click on the Apply button for this change to take effect If the Start Stop Recording button is clicked in the main VacuumPlus 9 omasi reot cen window when the No file option is selected a A frowning face and the No file name or directory a Cee error message is displayed at the top of the Record z Data tab Click the Start Sto
267. with other residual gas analyzers the Extorr s filaments will not fail due to exposure to high pressures because they are protected by both ion and Pirani gauge outputs A complete filament failure can be verified by looking at the readings on the OUTPUTS tab If there is an open filament the filament voltage will read gt 5 volts and the filament resistance will be gt 3 Ohms The filament light bulb icon will not stay yellow in the main VacuumPlus window If only one of the filaments is burned out the instrument will operate normally but the filament resistance will read about 1 Ohm The ionizer normally will last for years without attention in a UHV environment There is nothing to wear out but the metal surfaces can become contaminated The results of contamination could cause low sensitivity for partial pressure readings It generally takes a very severe contamination to cause the total pressure readings to be low because the B A type gauge uses higher voltages and works with more energetic ions that are less susceptible to stray fields If you have a total pressure reading of 10 torr for example the sum of your partial pressure readings should be roughly the same A number of factors such as the relative sensitivities of different compounds and the cracking of molecules into ion fragments makes it unlikely that they will add up exactly but as the ionizer contamination increases you may see a an order of magnitude or more difference between
268. with the communications and power connections below the flange position the orientation as seen in figure 2 Although orientation of the CCU is not a strict requirement for the quadrupole and ion gauge the Pirani gauge works best in this orientation You may wish to apply this hanging orientation by rotating the flange so that the shielded pin which is closest to the outside edge of the flange is at the bottom This is shown in figure 3 Figure 3 Outside View of Flange Extorr Inc 307 Columbia Road New Kensington PA 15068 10 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com 4 3 Mount the Probe Now carefully attach the probe to your system making sure you do not bend or twist the probe as it is inserted into the port Use the new copper gasket shipped with the unit Take care in tightening the flange so that the gasket is evenly compressed The probe is perpendicularly mounted on its flange with great precision but an unevenly compressed gasket could cause improper alignment within a long inlet tube As a check on probe integrity after being mounted use an Ohm meter to check for shorts and filament breakage Figure 4 shows the feed through connections on the Extorr flange 6 Rods 7 RTD 5 Filament E 8 Rods 15 Faraday Multiplie Out a 9 Filament 4 Repeller 3 Sourcel E io Je f gt y L M AA A 10 Source2 2 Mult HV X 13 14 Pirani 11 Focus
269. xtorr com The mouse cursor will change from an arrow to the resize cursor eo Sweep parameters Mass Table Plot i Degas current 24 ma Electronics Temperature 44 3 C Filament Resis Power supply 24 35 volts Sensor Tempe Sourcel current 1 021785 ma Reference 2 45 to Source2 current 0 983653 ma Ground ref RF Amp 0 to 20 0 4 289125 volts Focus FB Fc Pirani Temp 1 to 1 0 0 128256 volts Repeller 2 0 Ele Pirani Corr 1 to 1 0 0 128752 volts Pirani Press 3 to 2 5 0 284096 volts FB 2 25to25 2404173 volts FB 2 25t0 2 5 2405593 volts Resize Cursor Figure 45 Mouse Cursor Changes to Resize Cursor Left click and drag the edge of the Operational Folder tabs to the left until the entire tab is visible in the window Scale Y Configuration Communications Diagnostics Outputs MassTable pot Printing Log Degas current 2 4 ma Filament Voltage 2 12 volts Electronics Temperature 44 2 C Filament Resistance 0 54 Ohm Power supply 24 36 volts Sensor Temperature 42 0 C Source current 1 023019 ma Reference 2 45 to 2 55 2 494444 volts Source curent 0 984468 ma Ground ref 02 0 006383 volts RF Amp 0 to 20 0 4 289911 volts Focus FB Focus1 20 14 volts Pirani Temp 1 to 1 0 0 128169 volts Repeller 2 0 Elec_En 68 14 volts Pirani Com 1 to 1 0 0 128717 volts Filament Power 719 Pirani Press 3to 25 0 284114 vots Fil

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