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Model EQ-1500 LDLS™ Laser-Driven Light Source Operation Manual
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1. The power input connection to the EQ 1500 is made via a standard IEC 3 pin power entry module A power cable is included with the system but any standard cable can be used Cooling Fan Exhaust The internal laser power supply is air cooled To avoid overheating do not obstruct this fan exhaust 5 Lamp House Connector Provides power and control signals to the Lamp House No connector or cable may be used with the EQ 1500 other than the one supplied J6 Remote Control Connector Provides access to control and status signals when operating the EQ 1500 in remote control mode Cooling water connections Standard Swagelok connectors for cooling water supply and return providing cooling for the internal diode laser 12 Lamp House Unit Exit Aperture Mounting Holes Mounting Holes on underside Figure 5 Lamp house unit front panel Exit Aperture The exit aperture is a standard 1 inch threaded lens holder The exit aperture also includes a high UV transmission quartz window Do not attempt to remove or otherwise disturb this window Doing so voids your warranty and may result in unsafe operating conditions Mounting Holes The Lamp House may be free standing or mounted rigidly via threaded holes situated on the front and bottom of the unit The 4 20 threaded mounting holes are spaced on a 1 inch grid pattern EQ 1500 Operation Manual Rev 4 13 Laser On Indicator Nitrogen Purge Inlet J1 Cont
2. in an appropriate beam pipe tube or enclosed space We suggest purging any beam transport space with dry Nitrogen gas as this is also required for safe operation of the EQ 1500 The source must be purged with dry nitrogen gas via the nitrogen input connector on the lamp head The unit must be purged for a minimum of 10 minutes prior to operation in order to ensure that no ozone is created by residual oxygen inside the unit It is recommended that any beam transport be purged for a similar amount of time The EQ 1500 controller must be connected to an appropriate closed loop water chiller system The water system must be capable of maintaining 0 5gpm at 18 C with a minimum of 200W cooling capacity The EQ 1500 source must also be cabled correctly and connected to a socket with a protective earth ground prior to operation Failure to do so may result in an electrical shock hazard Refer to the Installation section of this manual Chapter 3 for details of the facilities connections There are no user serviceable parts inside the EQ 1500 For any problems encountered during operation please refer to the Troubleshooting section of this user manual If there is a component failure do not attempt to open the chassis of the EQ 1500 The EQ 1500 utilizes a quartz lamp containing a high pressure gas fill Explosion of the lamp and possible injury from flying fragments can occur if the lamp is mishandled Never attempt to remove or
3. return pin e On state current 3 8 mA e Isolation 5000 VRMS Digital outputs e Type open collector to digital ground e Logic active low output pin is at lt 0 8V when output is on e Maximum voltage 15 VDC internal surge protector clamps at 15V e Maximum load current 30mA at 5VDC 12mA at 12VDC 9 Pullup resistor none 28 e Surge and ESD protected to 15kV Control Connector J6 DB25 male on Lamp Controller Status Signals from Lamp Description Pin For Pee Lamp Controller Thermal 25 Mk Lamp House Cover 3 kk Lamp House Thermal 24 kk D External Interlock OK 4 Lamp Enable Active 13 BaserOn O E Lamp On Stats CC 2 Laser Ovetemp 6 Laser Fault si See page 10 for detailed description 200 Digital Signal Groond gt Km E Command Signals from ME orco i Remote Control Enable 16 Return Lamp Enable B amp Fnable Retam l HampOn o Lamp On Retur 8 O 9 10 17 18 19 2021 EN EQ 1500 Operation Manual Rev 4 29 Chapter 5 TROUBLESHOOTING See below if any problems are encountered in operating the EQ 1500 Also see page 10 for detailed description of LED signals d POWER OK indicator not lit Check line cord and fuse Check that the main power switch on the rear panel is in the ON position EXTERNAL INTLK OK indicator not lit Check external interlock circuit or jumper plug CO
4. 8A Fast e Cooling Water 0 03 0 07 MPa 5 10 psi differential 1 9 3 8 lpm 0 5 1 gpm 18 C inlet temperature controlled within 1 0 C e Purge Gas Dry nitrogen grade 6 preferred 0 14 MPa 20 psig 1 lpm Environmental Requirements Operating e Temperature 540 C e Relative Humidity non condensing 80 max for temperatures up to 31 C decreasing linearly to 50 max at 40 C e Altitude 2000 m 6562 ft max e Pollution Degree 2 normally only non conductive pollution occasional temporary condensation possible e Installation Category II e Indoor use only Transport e Temperature 5 95 C e Relative Humidity non condensing 95 max Identification of Controls The following sections show the location of controls and other features and give an overview of their functions Refer to the Installation section of this manual Chapter 3 for more detailed information Controller Unit Status Indicator LEDs power ap sep EnABLE Mc ess LASER CURRENT CONTROLLER em x oF asen oy d ECESE LASER POWER Laur HOUSE wn ok upon Operation o EXTERNAL INTLA CI LAMP KOGUSE CERTE RI OFF RESET Selector Switch TOO asin ovenrewe 2ovenosam ee a CONTROLLER OVERTEMP sees oeeo o o o eo ENERGETIQ 6460600000000 TM 490995902929 EEEE E LA DARA LOHNT SOURCE Figure 3 Controller front panel EQ 1500 Operation Manual Rev 4 9 Operation Selector Switch Momentary switch used to start or sto
5. A connected whenever possible Minimize the number of fiber connections If the SMA fiber must be disconnected always use a cap on both ends Store caps open side down when possible Blow out caps with CDA Clean Dry Air prior to use Never leave the fiber disconnected without a cap Follow the fiber inspection and cleaning process before making an laser fiber SMA connection Operating the LDLS with a contaminated fiber introduces the risk of decreased performance or damage to the unit Always remove AC power from the EQ 1500 before performing a fiber inspection or cleaning Fiber Inspection and Cleaning Process Note Fiber Inspection should only be performed with power removed from the EQ 1500 Power Supply Controller Unit Figure 6 Fiber Cleaning Process Flowchart 24 Faber Inspection Tools Figure 7 Thorlabs CL 200 Handheld Fiber Inspection Scope Figure 8 Westover FVD 2400 Benchtop USB PC Operated fiber viewer Examples of Fiber Images EQ 1500 Operation Manual Rev 4 25 Figure 9 Contaminated Fiber end Figure 10 Clean Fiber End Faber Cleaning Tools 1 Clean Dry Air 2 Dust Off or similar clean compressed air 3 Cletop www cletop com Cletop Type A SMA cleaner with Blue tape 14100500 Box of 6 Replacement Blue Tape Reels 14100700 4 Lint Free Wipe with Isopropyl Alcohol 5 A modified adapter for the fiber inspection scopes is available through Energetiq 26 Chapter 4 OPERATION O
6. J a ie bii amara ie D Sin EQ 1500 Operation Manual Rev 4 UV Warning Manufacturer s ID Label Label Interlocked Functional Housing Label Earth Symbol Label Interlocked Explanatory Certification Housing Label Label Figure 1 Safety label locations Cover Interlocks The EQ 1500 is equipped with cover interlock switches to prevent operation of the source without the lamp unit and controller covers in place Since no user service is permitted these switches are intended for the protection of factory service personnel External Interlock An external interlock connector is provided for the customer s use Any suitable normally open contact can operate the interlock circuit The unit is shipped with a shorted connector which may be used to connect to the user s interlock circuitry The interlock circuit must not be grounded The interlock circuit must be connected to enable the operation of the unit Should the interlock connection open during operation or standby the source is immediately disabled and all light output from the aperture ceases The source is then latched off and will not restart until the interlock is restored and the lamp manually restarted Chapter 2 DESCRIPTION General The EQ 1500 is a DUV lamp system for a wide variety of applicat
7. Model EQ 1500 LDLS M Laser Driven Light Source Wess Operation Manual Revision 4 May 2011 Part Number DOC 4958 ENERGETIQ Copyright 2010 Energetiq Technology Inc All rights reserved Energetiq products are covered by US and foreign patents All technical information including drawings schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without notice Energetiq Technology Inc 7 Constitution Way Woburn MA 01801 USA Tel 1 781 939 0763 Fax 1 781 939 0769 E mail support energetiq com http www eneteetiq com Table of Contents A AAA IS PONIA 1 Genera TMN OM azer BCE 1 AED e 1 Darie ji idolo e ein EE EE A E AAE EAE 7 reale CREER il OBEGNCZNO P 7 Identification of Controls nr sia 9 So o II 9 Laor EOS NS ie o II E E A EAR 13 A asd ad OR ORA CAO AA 16 A Ma 16 END EEE tner aaa 16 als oa In Ooo ada 16 Tastallaon POE Lula unas rere EA EAE A E 20 Mier IS Variat roces E E OOOO AES ATA errr Tecra 24 TB a O OR PO a Wiese m COOP M 27 ROO SI OS NER 28 Gir 30 gis cols
8. NTROLLER INTLK OK indicator not lit Internal cover switch in the Lamp Controller is open Install Cover LAMP HOUSE INTLK OK indicator not lit N2 purge pressure 15 psi Cover switch is open on Lamp house Laser Fiber SMA connector is not properly installed at lamp house Control cable between Controller and Lamp house is not installed LAMP HOUSE OVERTEMP indicator lit Check for sufficient Lamp House cooling water flow and temperature Allow system to cool and try operating again If condition persists contact Energetiq LASER OVERTEMP or CONTROLLER OVERTEMP Check for sufficient Controller cooling water indicator is lit flow and temperature Ensure that Controller air vents are not obstructed Allow system to cool and try operating again If condition persists contact Energetiq Lamp fails to ignite Ensure that cable from Controller to Lamp House is securely attached Ensure that Controller cooling water flow and temperature are within spec 30 ee Laser Fault Prior to Ignition amp No Other Faults e Clear Fault Operation Selector Switch to Reset and attempt again If Laser Fault appears immediately there is likely a problem with the laser delivery optics contact Energetiq Prior to Ignition amp Other Faults Occur e Correct the other indicated fault condition clear the fault Operation Selector Switch to Reset and attempt again After Ignition Plasma On e Attempt again If a Laser Fault appe
9. ars immediately there is a likely a problem with the Laser delivery optics contact Energetiq EQ 1500 Operation Manual Rev 4 31 Copyright 2010 Energetiq Technology Inc All rights reserved Energetiq products are covered by US and foreign patents All technical information including drawings schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without notice Energetiq Technology Inc 7 Constitution Way Woburn MA 01801 USA Tel 1 781 939 0763 Fax 1 781 939 0769 E mail support a energetiq com http www eneteetiq com 32
10. ature must be held at 18 1 degrees C The pressure drop at 3 8 lpm 1 gpm through the cold plate is less than 0 07 MPa 10 psi There are several thermoelectric and direct water to water chillers that can satisfy these requirements Tight temperature regulation is required for tight regulation of the lamp s output If there are any questions or concerns please contact the manufacturer for recommendations or guidance The Lamp House water connection fittings are push to connect fittings sized for 3 8 O D tubing The Controller water connection fittings are 3 8 Swagelok tube fittings The Lamp House and Controller should be connected in series with the Controller upstream See Error Reference source not found below Water Supply Water Return Figure 7 Cooling water circuit layout Purge Gas The EQ 1500 requires grade 6 or better nitrogen purge gas The requirement for purge gas is a result of the EQ 1500 lamp s unique performance and operating principles The EQ 1500 EQ 1500 Operation Manual Rev 4 17 produces UV radiation capable of generating ozone gas when exposed to atmospheric oxygen So first and foremost the nitrogen purge gas is intended to displace any oxygen in the system s optical chamber The optics assembly is in direct contact with this purge gas UV optics are quite prone to UV photo contamination Clean and pure nitrogen from either a dewar or research grade N bottle is recommended Do not use any
11. ct switch such as a snap switch for a beam line cover or other door switch The contact should be rated for a minimum of 15mA at 15VDC In order for the EQ 1500 to operate this circuit must be closed The system is shipped with a jumpered connector installed Installation procedure 20 1 Mount the Lamp House rigidly to either an optical breadboard plate or another suitable mounting structure using the threaded holes on the bottom or front of the unit The holes are sized to accept standard 4 20 optical bench hardware and spaced to be compatible with a standard 1 grid mounting hole pattern Connect the Lamp House output aperture to the user equipment The light output is coupled via a standard optical 1 threaded barrel The beam should always be either directly coupled to a fiber optic cable or enclosed in an appropriate beam pipe tube or enclosed space and purged with nitrogen Operating the source without any output target or beam transport is not recommended and may lead to unsafe operating conditions Consult Energetiq for applications information and suggested configurations Set up the Lamp House with appropriate ultraviolet safety measures and laser light safety measures in place It is recommended that any enclosure or aperture blocking hardware utilize cover switches wired to the EQ 1500 external interlock circuit Place the Controller unit no farther than 6 feet from the lamp unit as the supplied cable is onl
12. e Interlock Connector r e A Fuse Drawer Power On Off Switch Cooling Water Connections Power Entry Connector Cooling Fan Exhaust J5 Lamp House Connector J6 Remote Control Connector Functional Earth Terminal Figure 4 Controller rear panel Interlock Connector Connection point for a user supplied external interlock contact Contact must be closed or connector jumpered to enable operation We recommend that any door or enclosure switches in the user s system be wired in series with this interlock connection Laser Connection to Lamp House Connects to the Lamp House to supply laser energy to the lamp via the fiber cable J4 Remote Sensor Connector Connection point for a user supplied photosensor when using remote control remote sensing mode EQ 1500 Operation Manual Rev 4 11 Armored Laser Fiber Transmits laser energy from the Controller to the Lamp House Handle the fiber gently and avoid creating sharp bends or kinks in the cable Minimum bend radius for the cable is 30 mm 1 2 in See instructions in Chapter 3 under Installation Procedure for details on inspecting cleaning and installing the fiber Fuse Drawer Two AC line fuses are installed in this fuse holder The fuse type is 250V 8A Fast 5 x 20mm Power On Off Switch This switch is used as a main AC power switch It can also be used as an emergency off switch Power Entry Connector
13. g box should contain 1 EQ 1500 Controller unit 1 EQ 1500 Lamp House 1 Lamp House Signal Power Cable and 1 2m IEC power cord If any part is missing or appears damaged contact the manufacturer Do not attempt to substitute any parts There are no user serviceable parts inside the EQ 1500 Lamp House or Controller unit The EQ 1500 system is shipped with the laser fiber optic cable already connected between the Controller and Lamp House Use care during installation and operation to avoid creating sharp bends or kinks in the cable Minimum bend radius for the cable is 60 mm 2 4 1n Facilities Connections Electrical Service The EQ 1500 can be operated from 100 120 200 240V AC single phase 50 60Hz Power consumption is approximately 200VA during normal operation 300VA during lamp starting The EQ 1500 uses a detachable three wire standard IEC 60320 C13 cord for connection to the power source The cord also provides the connection to the protective earth circuit Exposed metal parts of the EQ 1500 are connected to the protective earth ground via the cord and the outlet ground providing protection against electrical shock Never operate the EQ 1500 from an outlet without a properly connected protective earth ground There is no selection switch for line voltage it is automatically adjusted internally 16 Cooling Water The EQ 1500 requires 1 9 3 8 lpm 0 5 1 gpm water at a minimum of 0 14 MPa 20 psi The temper
14. he left You should not be able to pull the strain relief straight out Carefully remove the cap from the end of the fiber Use cate not to touch the end of the fiber THE FIBER END MUST BE KEPT VERY CLEAN VERY IMPORTANT See section on Fiber Cleaning at the end of this section e Again use extreme care not to touch the end of the fiber Carefully slide the fiber into the SMA connector and tighten finger tight Using care not to pinch any wites slide the lamp house covet back into place and install the cover screws The fiber installation is now complete 9 Connect the supplied IEC cord from the Controller to the power source 10 Purge the EQ 1500 unit for at least 10 minutes prior to operation Failure to purge the system properly may damage the optics and may produce ozone gas 11 Verify that cooling water is flowing and the temperature is at maximum 18 degrees C Operation of the EQ 1500 lamp at a higher temperature will result in reduced performance and possibly shorter lamp life Note cooling water should be turned off when the lamp is not operating to avoid condensation on internal and external cooling lines The system is now ready to operate EQ 1500 Operation Manual Rev 4 23 Fiber Cleaning Process Fiber Cleaning Basics The LDLS laser fibers contain very high power densities and are susceptible to damage if the LDLS is operated when the fiber connector is not clean Leave Laser Fiber SM
15. ions The lamp features high brightness broad band light from DUV wavelengths through visible and beyond The output is very stable and has a long lifetime before any service is required The interface is quite simple but robust enough for any lab or industrial environment The EQ 1500 system consists of a Controller unit Lamp House unit interconnecting signal power cable and interconnecting laser fiber optic cable Connections to AC power cooling water and purge gas are required for operation The Controller unit contains the IR laser laser power supply laser cooling a permanently attached laser fiber optic cable and control electronics The Lamp House unit contains the lamp igniter laser focusing optics and interlocks Specifications DUV Performance e Typical output spectrum see Figure 2 o Upper Blue line typical EQ 1500 output o Lower Red line typical D2 lamp output EQ 1500 Operation Manual Rev 4 7 mm i o E c CN E E E o c amp ko a tc nz o Q o 480 Wavelength nm Figure 2 Typical output spectrum Physical Specifications System Dimensions H x W x D Weight e lamp House 175 x 142 x 218 mm 6 9 x 5 6 x 8 6 in e Controller 142 x 254 x 419 mm 5 6 x 10 0 x 16 5 in Weight e Lamp House 5 kg 11 lbs e Controller 6 5 ke 14 3 lbs Utility Requirements e Electrical 100 120 200 240 VAC 10 50 60Hz 300V A max e Fuse 250VAC
16. l results best stability the EQ 1500 should be allowed to complete a warmup period of 5 minutes Stopping To shut off the lamp push the Operation Selector Switch down momentarily to the OFF RESET position The lamp can also be shut off by shutting off the main power switch on the rear panel EQ 1500 Operation Manual Rev 4 27 Opening the interlock chain will also stop the lamp and the EXTERNAL INTLK OK indicator will go out Closing the interlock will not restart the lamp the fault must be cleared by pushing the Operation Selector Switch to the OFF RESET position and then the EQ 1500 can be started again by pushing the Operation Selector Switch to LAMP ON again Cooling water should be shut off when the lamp is not operating to avoid condensation on internal and external cooling lines When shutting down for long periods the main power switch may be shut off Remote Mode The EQ 1500 is controlled remotely using the 25 pin connector on the rear of the controller unit Electrical specifications are given below Pin connections and descriptions of signals are given in Table 1 Specifications Connector e J6 25 pin male d sub e Mating connector standard 25 pin female d sub AMP part number 5 747913 2 or equivalent Digital inputs e Type optocoupler LED input anode internally connected to 5VDC through a 1K resistor cathode connected to input pin e Logic active low input is on when input pin is pulled to ground
17. lo letslale e abal sperm mre vere tren reer 30 iv Chapter 1 GENERAL INFORMATION Safety WARNING This unit emits ultraviolet UV radiation that is harmful to humans Avoid exposute to the direct or reflected output beam Make certain that the appropriate output beam shields and optics are in place prior to energizing the unit All interlocks must be satisfied prior to operation failure to do so may lead to hazardous conditions CAUTION The EQ 1500 emits dangerous levels of UV radiation Even short exposures to skin or eyes may cause burns Ensure that only authorized personnel are in the vicinity of source during operation Personnel in vicinity of operating source should wear protective eyeweat clothing and gloves Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental exposure EQ 1500 Operation Manual Rev 4 WARNING The EQ 1500 utilizes an internal Class 4 IR laser capable of causing severe injury to eyes or skin Do not open or attempt to service this unit Contact Energetiq regarding any problems with the unit General Precautions The output beam from the EQ 1500 should be blocked when not in use with an electronic shutter or other appropriate beam blocking device Due to the absorption of the short wavelength light and the possibility of ozone production the beam should always be either directly coupled to a fiber optic cable or enclosed
18. nce the lamp is set up properly verify that all personnel that will be in contact with the lamp system are aware of the potential hazards involved with its operation It is the responsibility of the user to verify that the lamp is being used safely To start the lamp 1 Verify that all safety measures are in place and that cooling water and purge gas are flowing 2 Turn on the main power switch on the back of the unit 3 The lights on the front panel of the Controller will indicate power and interlock status Verify that the following indicators are lit POWER OK CONTROLLER INTLK OK LAMP HOUSE INTLK OK EXTERNAL INTLK OK 4 Push the Operation Selector Switch momentarily up to the LAMP ON position The EC 1500 enters the start mode While in the start mode the LASER ON indicators will light both on the Controller and the Lamp House After 60 seconds the lamp will ignite and the LIGHT ON indicator will light 5 If the lamp does not start within approximately 60 seconds start mode will terminate 1 e the lamp stops trying to ignite and the Laser Fault LED will illuminate If this happens push the Operation Selector Switch to OFF RESET to clear the fault then to LAMP ON to try again If the lamp still does not ignite after 1 or 2 more attempts raise the cooling water temperature to 25 C and try again Once the lamp ignites lower the temperature setpoint back to 18 C for normal operation 6 For optima
19. other purge gas Usage of clean dry air CDA may cause damage to internal optical components and is likely to produce ozone gas which is a potential inhalation hazard The fitting is a push to connect fitting sized for 1 4 O D tubing The suggested hose to mate to this fitting 1s either Nylon Shore D 50 70 Polyethylene Shore D 50 196 or Teflon 1 4 O D tubing There is no return fitting for the purge nitrogen The purge flow normally escapes within the lamp unit enclosure and then to atmosphere Optical Interface The exit aperture consists of a Newport LH 1 5 1 5 lens mount This incorporates a 1 563 20 thread Optionally to utilize the full 0 5 NA output of the EQ 1500 this lens mount can be removed With the lens mount removed the machined mounting holes on the front panel can be used to interface to the EQ 1500 to external optics Figure 7 shows the details of the optical interface See Figure 8 below Any beam transport space should be purged with dry nitrogen to prevent the formation of ozone from atmospheric oxygen 18 IAS r 200 I A E m ELI xz 3 n M e j ELF o TT STOI md a enn x Pi UE ez L _ S UOIJe907 eulseld DJEJIOJUI EDNdO 7 IMIA 19 EQ 1500 Operation Manual Rev 4 External Interlock The connector is a 2 pin circular connector Hirose part no RMI2BPE 2PH It can be connected to any suitable dry conta
20. p UV light output or to clear a Fault condition Status Indicator LEDs Lamp controller Status Functional Description LEDs zen Powet AC power is applied and power switch is on satisfied satisfied External Interlock OK External interlock is satisfied Remote Control Remote Control has been activated via connector J6 Local Control via the front panel Operation Selector Switch 1s disabled Laser On Green Laser current is on Lamp on command has been asserted Plasma has ignited and is operating cooling failure a W MM Safety intetlock fot cold plate temperature has exceeded 70C cooling failure Laser Overtemp Unit has shut off due because laser temperature has exceeded 40 degC Cooling water flow or temperature for Lamp Controller is insufficient Excess Laser pozew ia current has exceeded 9A does not i operation Laser a Indicates that the laser has been disabled due to a fault The Controller has requested laser power but an IR sensor in Lamp House did not detect laser power Prior to Ignition 1 The unit has shut down due to a separate interlock fault 2 The plasma has failed to ignite 3 A failure has occurred in the laser fiber After Ignition 1 A failure has occurred in the laser fiber or laser delivery optics Table 2 Front Panel LED functions 10 Armored Laser Fiber coiled for storage J4 Remote Sensor Connector Laser Connection to Lamp Hous
21. replace the lamp If there is a failure of the lamp the unit must be shipped back to the factory for refurbishment Do not open the chassis of either the lamp unit or the power supply unit Dangerous invisible infrared laser beams and hazardous voltages exist inside the units Opening the chassis both voids the warranty and exposes the user to dangerous radiation and hazardous voltages CAUTION The EQ 1500 must be operated for its intended use and as described in this operating manual Operation in an un intended manner may result in dangerous conditions CAUTION Use of controls or adjustments or executing procedures other than those specified herein may result in hazardous radiation exposure EQ 1500 Operation Manual Rev 4 3 Laser Information The EQ 1500 uses a patented U S Patent 7 435 982 others pending laser drive system to excite a plasma that radiates in the UV as well as the visible bands Since the lamp unit contains an embedded laser the EQ 1500 is defined as a Laser Product However the drive laser does not exit the system The parameters of the non accessible internal laser are given below in Table 1 Laser Power for classification lt 40 mW via 7mm measurement aperture Transverse Beam Mode Highly irregular diffuse Table 1 Embedded Laser Parameters No regular service or maintenance is required Any service to the system must be performed only by factory authorized and trained technician
22. roller 9 LO Connector G00 a Cooling Water Cooling Water a ra Inlet Y Y Laser Fiber Entry Figure 6 Lamp house unit rear panel Laser On Indicator Indicates that the drive laser is on and laser power is being transmitted to the Lamp House J1 Controller Connector Interface for power and control signals from the Controller Nitrogen Purge Inlet Inlet fitting for nitrogen purge gas which is required to keep the optics clean and to purge oxygen from the Lamp House to prevent the formation of ozone by UV radiation There is no return fitting for the purge nitrogen The purge flow normally escapes within the Lamp House enclosure and then to atmosphere The fitting is for 74 OD tubing and is a push lock style connection 14 Cooling Water Inlet Outlet Push lock tube fittings for the Lamp House cooling water Laser Fiber Entry Entry point and strain relief for the laser fiber optic cable The cable is connected inside the Lamp House enclosure using a proprietary SMA type connector The EQ 1500 system is shipped with this connection already made EQ 1500 Operation Manual Rev 4 15 Chapter 3 INSTALLATION Installation of the EQ 1500 consists of connecting electrical water and gas supplies and connecting the lamp output to the user s equipment Unpacking Upon arrival start by inspecting all parts of the system for completeness and any damage incurred in shipping The EQ 1500 shippin
23. s To avoid eye injury under no circumstances should the user open or modify the lamp unit The unit must not be operated if the covers are removed or it is defective in any way Contact Energetiq if any problems with the equipment are suspected Labels and Safety Notification The following safety labels appear on the product Figure 1 shows the location of each label on the EQ 1500 lamp unit emir AAA UV Hazard warning label indicates hazardous levels of UV Exposure can cause Borer oye or skin damage Beam must be enclosed before ereengizing light are present eneRGETIG LDLS ENERGETIO TECHNOLOGY INC A R 7 CONSTITUTION WAY Manufacturer s identification label gives the manufacturer s WOBURN MA 01801 USA EQ 1500 ASD 4449 LAMP BOX name and address and the model serial number and date of S N 05 REV 1 MANUFACTURED APRIL 2010 manufacture of the equipment Explanatory label states the classification of the laser product Class 1 is the lowest hazard level classification Complies with FDA performance standards for i a aoi ee ee Certification label states that the equipment has been tested to Laser Notice No 50 dated June 24 2007 and verified to meet the standards indicated Interlocked housing label notifies of a potential hazard when covers ate removed and interlocks failed or defeated Protective Ground Functional Earth symbol SO L
24. y 2 meters long Do not block the air vents at the front or rear of the Controller Connect the supplied Signal Power Cable to the Lamp House and the Controller The connectors are polarized to prevent errors in setup Be sure to screw the attached flathead connector mounting screws fully with 12 in lbs torque Connect cooling water and nitrogen purge gas to the Lamp House Refer to Facilities Requirements above Connect cooling water to the Controller unit Verify that the main power switch on the back of the Controller is in the OFF position Fiber installation procedure EQ 1500 Operation Manual Rev 4 Using the supplied 1 16 hex driver remove the screws securing the lamp house cover Carefully lift the cover straight up CAUTION The shielded fiber located on the back of the controller has a minimum bend radius of 30mm Use care not to bend the fiber too tightly Cut the zip tie securing the fiber to the back of the controller and then unwrap the fiber Remove the SMA cap located inside the lamp house 21 8 4b 22 While supporting the end of the fiber place the strain relief against the side of the lamp house You will see two fingers that lock the strain relief in place from the back side These will need to slide over the inside surface of the panel Rotate the strain relief around the corner while keeping the locking fingers on the inside Move the strain relief all the way to t
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