Miniature and 2 l/s VacIon Pumps
Contents
1. Miniature and 2 1 s Vaclon Pumps Miniature Models 913 0037 913 0038 913 0040 913 0041 913 0049 913 0050 Magnet 913 0042 2 s Models 913 0032 913 0034 913 0035 913 0045 913 0046 913 0047 913 0052 913 5000 Magnet 913 0011 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 400 044 01 E 05 2011 RES Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 400 044 01 E Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages2. Agilent mitgelieferten Zusatzinformationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Benutzung unter Missachtung der einschl gigen nationalen Bestimmungen bernimmt Firma Agilent keinerlei Haftung In diesem Handbuch werden bestimmte Textstellen wie folgt hervorgehoben Die Vorsichtshinweise vor bestimmten Prozeduren machen darauf aufmerksam dass bei Nichteinhaltung Sch den am Ger t entstehen k nnen Die Warnhinweise richten die Aufmerksamkeit auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Personensch den zur Folge haben k nnte Die HINWEISE enthalten wichtige Informationen die aus dem Text hervorgehoben werden Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Gebrauchsanleitung 2 Allgemeine Hinweise Diese Anweisungen enthalten Grundinformationen zur Installation und zum Gebrauch von Vaclon Pumpen Mod Miniature und 2 l s In der Tabelle werden die erh ltlichen Modelle aufgef hrt Tab 1 MODELL P N Miniatur Mit Rohr in Kupfer 180 918 0087 Mit Rohr in Kupfer 909 1 1 913 0040 Mit Rohr in Edelstahl 3 8 OD 180 913 0038 Mit Rohr in Edelstahl 3 8 0D90 9190081 _ Mit Rohr in Kupfer 3 8 OD 180 mit Vorvakuum 913 0049 Mit Rohr in Kupfer 3 8 OD 90 mit Vorvakuum 0 913 0050 M
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4. Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum ver temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit towa
5. in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered
6. limited number of high temperature bakeout cycles to 400 C Hence Agilent recommends only a few high temperature bakeouts to 400 C Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Instructions for Use 4 Unusual Operating Conditions Low Current If the pump current reads lower than normal for the pressure see the preceding figure the discharge may have been extinguished To check for the pump being out of strike discharge extinguished remove the magnet and observe the residual current If the current is the same with and without the magnet in place no discharge exists in the pump a To restart the discharge tap the pump body with a soft plastic tool or heat the pump body locally with a small soldering iron This should liberate surface gas within the pump and restart the discharge NEVER strike the pump with metal hand tools b Ifthe magnet strength is below its rated level the pump discharge and speed will be reduced and the discharge may extinguish at a pressure below 1x10 Torr High Current If the pump current reads higher than normal for the pressure see the preceding figure look for a Breakdown of the connecting high voltage cable Repair or replace b Ohmic breakdown in the control unit Repair according to the control unit instruction manual c Shorting of anode support insulators caused by a flake of titanium compound Tapping the pump as described in step a of the pre
7. to the system with a tube that has the shortest length and the largest diameter possible For ultrahigh vacuum work joints should be tungsten inert gas welded hydrogen brazed or vacuum brazed Do not use flux in making joints for ultrahigh vacuum Gaskets in the system should be of soft metal such as annealed copper aluminium or gold After the pump is sealed in place leakcheck the entire system Assemble the magnet to the pump magnet bracket with the mounting screws that are provided Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 41 52 4 Instructions for Use Control Unit Connection WARNING Voltage delivered by control units used with the Vaclon pumps are potentially lethal To operate the pump safely ensure that grounding connection is correctly made Connect the control unit to the pump as follows 1 Ground the pump to the power supply by placing the ground spring over the pump insulator before attaching the high voltage lead On cables with ground leads attach the ground lead to a ground lug on the system 2 The power supply in turn is grounded through its power lead Therefore to ensure a completely grounded circuit the threeprong plug on the power supply cord must be inserted ina socket that has a ground connection Do not use socket convertors that prevent the completion of this ground circuit 42 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Instruction
8. trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond aWARNING notice until the indicated conditions are fully understood and met Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E Miniature pumps Miniature pumps Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 3 52 2 s Vaclon pumps 2 s Vaclon pumps 4 52 Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E Contents Contents 1 Istruzioni per l uso 7 Informazioni di Sicurezza 8 Informazioni Generali 9 Installazione 11 Note di Funzionamento 13 Condizioni di Funzionamento Anomale 15 Smaltimento 16 2 Gebrauchsanleitung 17 Sicherheitshinweise 18 Allgemeine Hinweise 19 Installation 21 Funktionsweise 23 Betriebsst rungen 25 Entsorgung 26 3 Mode d emploi 2 Informations sur la S curit 28 Indications G n rales 29 Installation 31 Notes de Fonctionnement 33 Miniature and 2 1 s V
9. un bakeout du syst me afin d liminer la vapeur d eau Cette op ration est effectu e en chauffant la pompe et tous les l ments du syst me 1 R chauffer le corps de la pompe et le syst me l aide d un four ou l ments chauffants une temp rature comprise entre 150 et 250 C 250 C est la temp rature maximum support e par de nombreux c bles de haute tension Cette temp rature est suffisamment lev e pour d gazer les surfaces de la pompe de la vapeur d eau sans endommager l aimant et le connecteur de haute tension Faire attention que les autres composants du syst me supportent la temp rature de chauffage Le chauffage doit tre le plus uniforme possible sur toutes les superficies pour viter que la vapeur ne se recondense sur les parties plus froides emp chant d atteindre les valeurs de vide lev es Laisser l unit de contr le allum e et contr ler que la pression ne d passe pas la valeur de 5x10 Torr mbar En cas de d passement de ladite valeur teindre l appareil de chauffage et le rallumer lorsque la basse pression est r tablie Pour contr ler les appareils de chauffage et les valeurs de pression en mode automatique pendant le chauffage utiliser un relais sensible la pression Chauffer la pompe Vaclon pendant 8 heures minimum Une p riode de chauffage plus longue est n cessaire lorsque la pompe doit tre utilis e avec de fortes charges de gaz ou lorsque l on d sire des valeurs de
10. 0 aT 913 0046 Con tubo in rame OFHC da 3 4 QD 913 0052 M m i i u a n Lu oe ar m Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 9 52 1 Istruzioni per l uso Il sistema di pompaggio completo comprende La pompa Vaclon il suo magnete ed un alimentatore Queste pompe Vaclon funzionano sul principio getter nel campo da 10 Torr a meno di 10 Torr Per portare il sistema dalla pressione a meno di 10 Torr amp necessaria una pompa di prevuoto La pompa deve essere alimentata tramite una tensione positiva di 3000 3500 Volt a circuito aperto La corrente di alimentazione e quella di corto circuito fornita dall alimentatore devono corrispondere alla corrente assorbita dalla pompa alla sua massima pressione di esercizio 10 52 Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E Istruzioni per l uso 1 Installazione Durante l installazione mantenere la pompa ed il sistema puliti Evitare di toccare le superfici che saranno sotto vuoto Quando la pompa aperta all aria far attenzione a non introdurre particelle estranee olio fondente per saldatura o qualsiasi sostanza volatile Pulire accuratamente il sistema prima del collegamento della pompa Una pulizia del sistema del vuoto con prodotti chimici sarebbe il metodo pi completo tuttavia non utilizzarlo quando sono presenti cavit e fessure che impediscano il risciacquo Normalmente sufficiente uno sgrassaggio con acetone o metanol
11. 00 Volts circuit ouvert Le courant d alimentation et le courant de court circuit fournis par l alimentateur doivent correspondre au courant absorb par la pompe sa pression d exercice maximum 30 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Mode d emploi 3 Installation Pendant l installation maintenir la pompe et le syst me propres viter de toucher les parties qui seront sousvide Lorsque la pompe est ouverte l air libre faire attention de ne pas y introduire de particules trang res huile fondant de soudage ou toute autre substance volatile Nettoyer soigneusement le syst me avant le montage de la pompe Un nettoyage du syst me du vide l aide de produits chimiques serait la m thode la plus complete Il est cependant conseill de ne pas l utiliser en pr sence de cavit s ou de fissures emp chant le rincage Normalement un d graissage l ac tone ou au m thanol suivis d un rincage l eau sont suffisants Pour atteindre la vitesse maximale de pompage relier la pompe au syst me l aide du tuyau le plus court et le plus large possible Pour les op rations sous vide ultra pouss les joints doivent tre soud s au gaz inerte TIG et soumis un brasage l hydrog ne ou sousvide Les joints du syst me doivent tre en m tal souple de type cuivre recuit aluminium ou or Apres le scellage de la pompe dans le syst me recontr ler que l ensemble ne pr sente aucune fui
12. a questa condizione causa di una limitazione del tempo di vita della pompa Evitare di usare la pompa ad alte pressioni per lunghi periodi Smaltimento 16 52 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Miniature and 2 1 s Vaclon Pumps User Manual 0 8 ee 2 Gebrauchsanleitung Sicherheitshinweise 18 Allgemeine Hinweise 19 Installation 21 Anschluss des Controllers 22 Funktionsweise 23 Bakeout 24 Betriebsst rungen 25 Stromst rke zu niedrig 25 Stromst rke zu hoch 25 Entsorgung 26 bersetzung der Originalanleitungen e Agilent Technologies 17 52 2 Gebrauchsanleitung Sicherheitshinweise VORSICHT 18 52 Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von
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14. aclon Pumps User Manual 87 400 044 01 E 5 52 Contents Conditions de Fonctionnement Anormales 35 Mise au Rebut 36 4 Instructions for Use 37 Safety Information 38 General Information 39 Installation 41 Operating Notes 43 Unusual Operating Conditions 45 Disposal 46 6 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E ee 1 Istruzioni per l uso Miniature and 2 1 s Vaclon Pumps User Manual Informazioni di Sicurezza 8 Informazioni Generali 9 Installazione 11 Collegamento dell unit di controllo 12 Note di Funzionamento 13 Operazione di bakeout 14 Condizioni di Funzionamento Anomale 15 Bassa corrente 15 Alta corrente 15 Smaltimento 16 Traduzione delle istruzioni originali Agilent Technologies 1 52 1 Istruzioni per l uso Informazioni di Sicurezza ATTENZIONE AVVERTENZA 8 52 Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Questo manuale utilizza le seguenti convenzioni messaggi di attenzione sono visualizzati prima di procedure che
15. agnet in Alnico mw VS Mit Rohr in Edelstahl 3 4 OD 180 913 0032 Mit Rohr in Kover gless 37400 gs _Mit Rohr in Kupfer 3 4 OD 180 mit Vorvakuum 9130035 Mit Rohr in Edelstahl 3 4 OD 180 mit Vorvakuum 913 0045 Mit Rohr in Edelstahl 3 4 DD 80 T Anschluss 9130046 _Mit Kurzer Rohr in Edelstahl 3 4 D 918000 Mit Rohr in OFHC Kupfer 3 4 OD 913 0052 Eee e a ep oz Peer ee UNS an Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 19 52 2 Gebrauchsanleitung Das komplette Pumpsystem umfasst die Vaclon Pumpe deren Magneten und ein Netzgerat Diese Vaclon Pumpen arbeiten nach dem Getterprinzip im Bereich von 10 Torr bis unter 10 Torr Um das System auf unter 10 Torr zu bringen ist eine Vorvakuumpumpe erforderlich Die Pumpe ist mit einer Plusspannung von 3 000 3 500 Volt im offenen Schaltkreis zu versorgen Die Versorgungsspannung und die vom Netzgerat gelieferte Kurzschlussspannung sollen der Stromaufnahme der Pumpe bei ihrem maximalen Arbeitsdruck entsprechen 20 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Gebrauchsanleitung 2 Installation Bei der Installation sind die Pumpe und das System sauber zu halten Die Berthrung von Oberflachen die unter Vakuum sein werden ist zu vermeiden Bei ge ffnetem Zustand der Pumpe ist darauf zu achten dass keine Schmutzpartikel l L tflussmittel oder fl chtige Substanzen eindringen Vor Anschluss der Pu
16. ceding paragraph may correct this condition d Field emission current from fine whiskers formed on the pump cathodes Hi pot the pump by applying 10 to 14 kVac at 20 to 30 mA for 5 to 20 seconds Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 45 52 4 Instructions for Use e Coatings on the insulators caused by operating above 10 Torr for extended periods Since disassembly of the pump is not practicable this condition must be regarded as a life limiting factor Avoid operating the pump at high pressures for long periods Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 46 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E d Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to en
17. de la valeur indiqu e sur la plaquette la d charge de la pompe et la vitesse se r duiront et la d charge pourrait s teindre une pression inf rieure 1x10 Torr Courant lev Si la valeur de courant lue est sup rieure la valeur normale pour la valeur de pression correspondante voir diagramme pr c dent contr ler que a Le c ble de haute tension ne soit pas en court circuit Reparer ou remplacer b Il n y ait aucune dispersion l int rieur de l unit de contr le R parer selon les indications de la notice correspondante Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 35 52 3 Mode d emploi c l n y ait pas de court circuit sur les isolateurs de support de l anode caus par des fragments de film de titane Frapper la pompe comme d crit au point a du paragraphe pr c dent Le probl amp me pourrait se r soudre ainsi d Il n y ait pas d mission de courant sur les pointes form es sur les cathodes Appliquer la pompe une tension entre 10 et 14 kVca avec un courant entre 20 et 30 mA pendant 5 secondes pour br ler les pointes e Ilnyait pas de rev tements de films m talliques conducteurs sur les isolateurs suite un fonctionnement sup rieur 10 Torr pendant des p riodes prolong es La pompe ne pouvant tre d mont e cette condition entrainerait une diminution de la dur e de vie de la pompe viter d utiliser la pompe hautes pressions pendant des p riodes p
18. durante il riscaldamento occorre utilizzare un rel sensibile alla pressione Riscaldare la pompa Vaclon per almeno 8 ore Periodi pi lunghi di riscaldamento sono necessari quando la pompa deve essere usata con carichi di gas pesanti o quando si desiderano valori di vuoto ultra alti 10 Torr mbar o inferiori A mano a mano che la pompa ed il sistema ritornano alla temperatura ambiente si deve osservare un abbassamento della pressione Tra le varie applicazioni delle pompe ioniche c anche la possibilit del loro impiego per processare sotto vuoto altri componenti Poich il passante di alta tensione puo sopportare un numero limitato di cicli di riscaldamento fino a 400 C si raccomanda di limitare tali cicli al minimo possibile per aumentare la durata di vita della pompa stessa Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Istruzioni per l uso 1 Condizioni di Funzionamento Anomale Bassa corrente Se il valore di corrente letto inferiore a quello normale per quel dato valore di pressione vedere il diagramma precedente la scarica si potrebbe essere fermata Per verificare se la scarica si fermata rimuovere il magnete ed osservare la corrente residua Se la corrente non cambia con e senza il magnete non in corso alcuna scarica nella pompa Per riavviare la scarica colpire il corpo pompa con un attrezzo di plastica morbida o riscaldarlo localmente con un piccolo saldatore In questo
19. e 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 400 044 01 E P Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl r
20. en hoher Vakuumwerte verhindert Den Controller eingeschaltet lassen und kontrollieren dass der Druck nicht 5x10 Torr mbar bersteigt Falls dieser Wert berschritten wird ist das Heizger t auszuschalten und erneut einzuschalten wenn der Unterdruckbereich wieder hergestellt ist Zur automatischen Kontrolle der Heizger te und Druckwerte w hrend der Erw rmung ist ein druckempfindliches Relais zu benutzen Die Vaclon Pumpe ber einen Zeitraum von mindestens 8 Stunden erw rmen L ngere Erw rmzeiten sind erforderlich wenn die Pumpe mit hohen Gaslasten benutzt werden soll oder H chstvakuumwerte 10 Torr mbar oder niedriger erreicht werden sollen Im Zuge der Abk hlung der Pumpe und des Systems auf die Umgebungstemperatur muss auch ein Druckabfall entstehen Zu den verschiedenen Einsatzm glichkeiten der Ionenpumpen z hlt auch die Vakuumerzeugung in anderen Komponenten Da Hochspannungsverbinder nur einer begrenzten Anzahl von Erw rmungszyklen bis zu 400 C standhalten sollten diese Zyklen auf ein Mindestma beschr nkt werden um die Standzeit der Pumpe zu verl ngern Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Gebrauchsanleitung 2 Betriebsstorungen Stromstarke zu niedrig Wenn die angezeigte Stromstarke unter dem Normwert fur den betreffenden Druck liegt siehe vorhergehendes Diagramm k nnte die Entladung gestoppt sein Um zu berpr fen ob die Entladung gestoppt ist ist der Mag
21. es miniature et 2 1 s Vaclon Le tableau ci dessous num re les mod les disponibles Tab 1 MODELE P N Miniature Avec tuyau en cuivre 180 918 0087 E Avec tuyau en cuve OT amm 313 0040 Avec tuyau en acier inoxydable de 3 8 DE 180 tS 913 0038 TN Avec tuyau en acier inoxydable de 3 8 E90 9130041 E Avec tuyau en cuivre de 3 8 E 180 pr par e sous vide 913 0049 Avec tuyau en cuivre de 3 8 DE 90 pr par e sous vide 913 0050 ee AS E Avec tuyau en acier inoxydable de 3 4 OE 180 913 0032 Avec tuyau en Kover lass 3 4 GE GEM oL M O ea TM EN Avec tuyau en cuivre de 3 4 DE 180 pr par e sous vide 913 008 Avec tuyau en acier inoxydable de 3 4 E 180 pr par e sous vide TN 913 0045 P Avec tuyau en acier inoxydable de 3 4 BE 80 en T _ uv 3 n f Avec tuyau courte en acier inoxydable de 3 4 DE N3007 Avec tuyau en cuivre OFHC de 3 4 DE 913 0052 er yoy a 7 Toa ID DR a Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 29 52 3 Mode d emploi Le syst me de pompage complet comprend la pompe Vaclon son aimant et un alimentateur Cette pompe Vaclon fonctionne sur le principe getter dans une plage de 10 Torr moins de 10 Torr Pour porter le syst me de la pression moins de 10 Torr il est n cessaire de disposer d une pompe de pr vide La pompe doit tre aliment e avec une tension positive de 3000 35
22. ese o ooo E With 3 4 OD OFHC Copper Tube 913 0052 u CI rum E c e Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 39 52 4 Instructions for Use The complete pumping system consists of the VacIon pump its magnet and a power supply These VacIon pump is a pump which operates on the principle of ion gettering in the pressure range from 10 Torr to less than 10 Torr A roughing pump is needed to lower the system pressure from atmosphere to below 10 Torr The pump should be powered by a positive voltage of 3000 3500 Volt open circuit direct current supply and the short circuit current of the control unit should match the current drawn by the pump at its maximum operating pressure 40 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Instructions for Use 4 Installation During installation keep the pump and system clean Avoid touching surfaces which will ultimately be under vacuum When the Vaclon pump is open to the atmosphere take care to avoid introducing foreign particles oil solder flux or any volatile substances Before attaching the pump clean the system thoroughly Chemical cleaning is the most complete cleaning method for the vacuum system however do not attempt it when pockets and crevices exist that will prevent thorough rinsing Degreasing with an acetone or methanol followed by water rinsing is usually sufficient To achieve maximum pumping speed connect the pump
23. ie en wobei die Masseanschlussfeder am Hochspannungsverbinder der Pumpe anzubringen ist bevor das Hochspannungskabel angeschlossen wird Bei den Kabeln die mit einem Masseleiter versehen sind ist der Masseleiter an einen Masseanschlusspunkt des Systems anzuschlie en Das Netzger t wird ber sein Versorgungskabel an die Masse angeschlossen Damit der Stromkreis vollst ndig an die Masse angeschlossen ist muss der dreipolige Stecker des Versorgungskabels an eine geerdete Steckdose angeschlossen sein Es d rfen keine Adaptersteckdosen verwendet werden die keine Schlie ung des Erdungskreises zulassen Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Gebrauchsanleitung 2 Funktionsweise Vaclon Pumpen arbeiten durch Gasionisierung infolge einer magnetisch abgegrenzten Entladung Penning Zelle An die Anode wird eine Spannung von ungefahr 3 kV angelegt wahrend die Katoden an die Masse angeschlossen sind Ein axiales Magnetfeld von ungefahr 1 200 Gauss verhindert dass die Elektronen direkt zur Anode gelangen Ein abgeschirmter Isolator isoliert die Anode vom Erdungspotenzial Bei ordnungsgemafsem Betrieb der Vaclon Pumpe mit dem installierten Magnet ist die Stromaufnahme proportional zum Druck siehe nachstehende Abbildung HB V ii 2 ul D lt E E o gt DL o A mam AIT ASD I HH TOE na Bal omnes m ES BEER im san ee TW EIC HERE HE 1UA IHA 10 uA 100 u A l mA e gt 01 u Stro
24. il condensatore dell alimentatore si scarichi adeguatamente Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 13 52 1 Istruzioni per l uso 14 52 Operazione di bakeout Quando una pompa Vaclon non raggiunge la pressione base desiderata e non ci sono perdite necessario eseguire un bakeout del sistema per eliminare il vapore acqueo Questa operazione viene eseguita riscaldando la pompa e tutti gli elementi del sistema 1 Riscaldare il corpo pompa ed il sistema per mezzo di un forno o elementi riscaldanti ad una temperatura tra 150 e 250 C 250 C la massima temperatura sopportata da molti cavi di alta tensione Questa temperatura abbastanza elevata in modo da degassare le superfici della pompa dal vapore acqueo senza danneggiare il magnete ed il connettore dell alta tensione Occorre fare attenzione che gli altri componenti del sistema sopportino la temperatura di riscaldamento Il riscaldamento deve essere il piu possibile uniforme su tutte le superfici per evitare che il vapore si ricondensi sulle parti pi fredde impedendo cosi il raggiungimento di valori elevati di vuoto Lasciare accesa l unit di controllo e controllare che la pressione non superi il valore di 5x10 Torr mbar Nel caso in cui si superi il suddetto valore occorre spegnere il riscaldatore e riaccenderlo quando si ripristinata la bassa pressione Per controllare i riscaldatori ed 1 valori di pressione in modo automatico
25. ita in una presa con collegamento di terra Non utilizzare prese di adattamento che non permettano la chiusura del circuito di terra 12 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Istruzioni per l uso 1 Note di Funzionamento Le pompe Vaclon funzionano ionizzando il gas mediante una scarica confinata magneticamente cella Penning Una tensione di circa 3 kV viene applicata all anodo mentre i catodi sono mantenuti a massa Un campo magnetico assiale di circa 1200 gauss impedisce che gli elettroni giungano direttamente all anodo Un isolante schermato isola l anodo dal potenziale di terra Nel funzionamento corretto della pompa Vaclon con il magnete installato la corrente assorbita proporzionale alla pressione vedere la figura seguente EU coor HI PE ON IZ uu HS QUE AA EHE ERR H K rompe RIS CO 12 AU HH EEE At EA T 108 HH 0 01uA O 1uA luA 10 uA 100 u A 1 mA Corrente D ala E E il o gt 1 Q c n n wo Il am Figura 1 Curva pressione corrente Dopo che il sistema ha raggiunto una pressione inferiore ai 10 Torr si pu avviare la pompa semplicemente accendendo l unit di controllo L avvio della pompa viene indicato dalla presenza di un assorbimento di corrente da parte dell unit di controllo Prima di scollegare il cavo dell alimentatore attendere sempre almeno 30 secondi dallo spegnimento dell alta tensione in modo da permettere che
26. logical Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liahle for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model RES Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does not start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Cantact Overtemperature PARAMETERS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMIPS CONTROLLERS Poor vacuum High voltage prablem Bad feedthrough
27. m http www agilent com Pg 1 3 FIR Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFIGATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable C1 Billable mmm New PO hard copy must be submitted with this form 3B _ Exchange Repair lupgrade Consignment Demo _ calibration _ Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIGACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable Explosive C Bio
28. modo si libera del gas dalla superficie all interno della pompa e la scarica dovrebbe riprendere NON COLPIRE MAI la pompa con un attrezzo metallico Se il campo magnetico scende sotto il suo valore di targa la scarica della pompa e la velocit si ridurranno e la scarica potrebbe spegnersi ad una pressione inferiore a 1x10 Torr Alta corrente Se il valore di corrente letto superiore a quello normale per quel dato valore di pressione vedere il diagramma precedente controllare quanto segue Che il cavo dell alta tensione non sia in corto circuito Riparare o sostituire Che non ci sia una dispersione all interno dell unit di controllo Riparare secondo quanto indicato sul relativo manuale Che non ci sia un corto circuito sugli isolatori di supporto dell anodo causato da frammenti di film di Titanio Colpire la pompa come descritto al passo a del paragrafo precedente potrebbe porre rimedio a questa situazione Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 15 52 1 Istruzioni per l uso d Che non ci sia una emissione di corrente da punte che si siano formate sui catodi Applicare alla pompa una tensione tra 10 e 14 kVac con una corrente tra 20 e 30 mA per 5 20 secondi per bruciare le punte e Che non ci siano rivestimenti di film metallici conduttori sugli isolatori a causa di un funzionamento sopra i 10 Torr per elevati periodi di tempo Poich non possibile smontare la pomp
29. mpe ist das System sr ndlich zu reinigen Eine Reinigung des Vakuumsystems mit chemischen Produkten w re hierbei die beste Methode sie sollte allerdings nicht bei Vorhandensein von Hohlr umen und Spalten angewendet werden die das Aussp len verhindern In der Regel ist das Entfetten mit Aceton oder Methanol und das anschlie ende Sp len mit Wasser ausreichend Um eine maximale Pumpgeschwindigkeit zu erzielen ist die Pumpe ber eine m glichst kurze und breite Leitung an das System anzuschlie en F r den H chstvakuumbetrieb sollen die Verbindungen mit Inertgas geschweifst WIG und wasserstoff oder vakuumgel tet sein Die Dichtungen im System sollen aus Weichmetall wie gegl htes Kupfer Aluminium oder Gold sein Nachdem die Pumpe im System versiegelt wurde ist das gesamte System auf Leckstellen zu berpr fen Den Magneten an den hierf r vorgesehenen B gel der Pumpe mit den mitgelieferten Schrauben befestigen Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 21 52 2 Gebrauchsanleitung Anschluss des Controllers WARNUNG Die Spannungen die vom Controller erzeugt und von Vaclon Pumpen genutzt werden sind potenziell t dlich Um die Sicherheitsbedingungen beim Arbeiten zu gew hrleisten ist sicherzustellen dass der Masseanschluss vorschriftsgem ausgef hrt ist Den Controller wie folgt an die Pumpe anschlie en 1 22 52 Die Pumpe an den Masseanschluss des Netzger tes anschl
30. mst rke Abbildung 1 Druck Stromst rke Diagramm Nachdem das System einen Druck unter 10 Torr erreicht hat ist es m glich die Pumpe lediglich durch Einschalten des Controllers zu starten Der Pumpenstart ist anhand der Stromaufnahme durch den Controller erkenntlich Bevor das Kabel des Netzger tes abgetrennt wird sind stets mindestens 30 s nach Abschaltung der Hochspannung abzuwarten damit sich der Kondensator des Netzger tes entsprechend entladen kann Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 23 52 2 Gebrauchsanleitung 24 52 Bakeout Wenn eine Vaclon Pumpe den gew nschten Basisdruck nicht erreicht und keine Druckverluste vorhanden sind ist ein Bakeout des Systems aus zuf hren um den Wasserdampf zu beseitigen Dieser Vorgang erfolgt unter Erw rmung der Pumpe und aller Systemelemente 1 Den Pumpenkorpus und das System mit ei nem Ofen oder Heizelementen auf eine Temperatur zwischen 150 und 250 C erhitzen 250 C ist die maximal zul ssige Temperatur vieler Hochspannungskabel Diese Temperatur ist ausreichend um die Oberfl chen der Pumpe von Wasserdampf zu entgasen ohne den Magneten oder den Hochspannungsverbinder zu besch digen Es ist darauf zu achten dass die anderen Systemkomponenten der Erw rmungstemperatur standhalten Die Erw rmung soll m glichst gleichm ig auf allen Oberfl chen erfolgen damit der Dampf nicht an den k lteren Teilen kondensiert und das Erreich
31. net zu entfernen und die Reststromst rke zu beobachten Wenn die Stromst rke sich weder mit noch ohne Magneten ver ndert findet keine Pumpenentladung statt a Zur erneuten Entladungsaktivierung ist mit einem weichen Kunststoffwerkzeug gegen den Pumpenkorpus zu schlagen oder der Pumpenkorpus lokal mit einem kleinen Schwei ger t zu erhitzen Auf diese Weise l st sich Gas von den Innenfl chen der Pumpe und m sste die Entladung wieder aufgenommen werden Gegen die Pumpe darf NIEMALS mit einem metallenen Werkzeug GESCHLAGEN werden b Wenn das Magnetfeld unter den Kennschildwert sinkt verringern sich die Pumpenentladung und geschwindigkeit hierbei k nnte die Entladung bei einem Druck unter 1x10 Torr aussetzen Stromst rke zu hoch Wenn die angezeigte Stromst rke ber dem Normwert f r den betreffenden Druck liegt siehe vorhergehendes Diagramm sind folgende Kontrollen auszuf hren a Das Hochspannungskabel darf nicht kurzgeschlossen sein Reparieren oder auswechseln b Im Controller darf kein Leckstrom vorhanden sein Gem der Angaben aus dem diesbez glichen Handbuch reparieren Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 25 52 2 Gebrauchsanleitung c Anden Hilfsisolatoren der Anode darf kein Kurzschluss durch Titanfolienteile anliegen Wie unter Schritt a des vorhergehenden Abschnitts gegen die Pumpe schlagen was die ses Problem beheben k nnte d Es darf keine Stromabgabe durch Spit
32. o ed un successivo risciacquo con acqua Per ottenere la massima velocit di pompaggio collegare la pompa al sistema con un tubo il pi corto ed il pi largo possibile Per lavorazioni in ultra vuoto le giunzioni devono essere saldate con gas inerte TIG brasate con idrogeno o sotto vuoto Le guarnizioni nel sistema devono essere di metallo morbido tipo rame ricotto alluminio o oro Dopo che la pompa stata sigillata nel sistema ricontrollare che l intero sistema non presenti perdite Fissare il magnete alla relativa staffa della pompa tramite le viti in dotazione Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 11 52 1 Istruzioni per l uso Collegamento dell unit di controllo WARNING Le tensioni generate dall unit di controllo ed utilizzate dalle pompe Vaclon sono potenzialmente letali Per operare in sicurezza assicurarsi che il collegamento di massa sia realizzato correttamente Collegare l unit di controllo alla pompa come segue 1 Collegare la pompa alla massa dell alimentatore sistemando la molletta di massa sul passante della pompa prima di collegare il cavo di alta tensione Con i cavi provvisti di filo di massa collegare il filo di massa ad una massa del sistema 2 L alimentatore si collega a massa attraverso il suo cavo di alimentazione Perci per assicurare un circuito completamente collegato a massa la spina a tre poli del cavo di alimentazione deve essere inser
33. off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the R was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent co
34. on Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Be Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe
35. que axial d environ 1200 gauss emp che que les lectrons arrivent directement l anode Un isolant blind isole l anode du potentiel de terre Dans le fonctionnement correct de la pompe Vaclon avec aimant install le courant absorb est proportionnel la pression voir figure suivante PSE INE TEE Hin Pompes Miniature HE See LITT LIII L I y CAT RE RER EEE EEE x CEE N EE EHI SD LU mm Im Bu LLLI HT marss ea A HEHE EH Visa o t DO CL E LL DI rT E E o gt c 2 uo o o dh c CON 214 22 eno et a RE cu LET LH e x N LN ai Lf T sr sni VA 8 EAE EHR 0 01uA O 1HA 1HA 10uA 100 HA 1 mA Courant Figure 1 Courbe pression courant Apr s que le syst me a atteint une pression inf rieure 10 Torr il est possible de d marrer la pompe en allumant simplement l unit de contr le La mise en marche de la pompe est signal e par la pr sence d une absorption de courant par l unit de controle Avant de d brancher le c ble de l alimentateur toujours attendre au moins 30 secondes apr s la coupure de la haute tension de facon permettre au condensateur de l alimentateur de se d charger correctement Miniature and 2 l s Vaclon Pumps User Manual 87 400 044 01 E 33 52 3 Mode d emploi 34 52 Operation de bakeout Lorsqu une pompe Vaclon n atteint pas la pression de base d sir e et qu il n y a aucune fuite il est n cessaire de proc der
36. rd the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e ASpecial Cleaning fee will apply to all exposed products per Section 4 of this document e l frequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei
37. rolong es Mise au Rebut 36 52 Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E x Agilent Technologies Miniature and 2 l s Vaclon Pumps User Manual Instructions for Use Safety Information 38 General Information 39 Installation 41 Control Unit Connection 42 Operating Notes 41 Bakeout Operation 44 Unusual Operating Conditions 45 Low Current 45 High Current 46 Disposal 46 Original Instructions 37 52 4 Instructions for Use Safety Information 38 52 This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial
38. s for Use 4 Operating Notes Vaclon pumps operate as a multiple cell Penning discharge A potential of about 3 kV is applied to the anode cell the cathodes are at ground potential Electrons are constrained from going directly to the anode by the presence of an axial magnetic field of about 1200 gauss A self shielding insulator isolates the anode from ground potential When the Vaclon pump is operating properly with magnet installed the current drawn is proportional to pressure see the following figure e L0 5 EE TTT CT mn m Hr TDI HH HR APERTI tico LIH E MM SON im apr dH ps CETTE T ELTE x E ao 2 i 2 i 2 a vu a a a E 2 Qa HT 08 H 0 000A O 1HA 1HA 10uA 100 1A 1 mA Pump Current Figure 1 Pressure versus current curve After the system is rough pumped to below 10 Torr the pump can be started by simply switching on the VacIon pump control unit A current draw on the control unit will indicate that the pump dis charge has started Always wait at least 30 seconds after turning off the high voltage switch before disconnecting the power supply leads This should allow the power supply output capacitor to discharge adequately Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 43 52 4 Instructions for Use 44 52 Bakeout Operation When a Vaclon pump does not reach the desired base pressure and there are no leaks it is necessary to bake the system to remove wa
39. se non osservate potrebbero causare danni all apparecchiatura messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Le note contengono informazioni importanti estrapolate dal testo Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Istruzioni per l uso 1 Informazioni Generali Queste istruzioni contengono informazioni di base per l installazione e l uso delle Pompe Miniature e 2 1 s VacIon La seguente tabella elenca i modelli disponibili Tab 1 MODELLO P N Miniature Con tubo in rame 180 9190087 _bontuoomiame a Lu 313 0040 Con tubo in acciaio inossidabile da 3 8 OD 180 913 0038 mM Con tubo in acciaio inossidabile da 3 8 OD 90 uM E 913 0041 _ Con tubo in rame da 3 8 OD 180 preparata sotto vuoto _ 913 0049 MEM Con tubo in rame da 3 8 OD 90 preparata sotto vuoto 9130050 a WW WV_u uu p uwnmw m ewwv up b amp amp amp pi amp amp VW ve MM AMS Con tubo in acciaio inossidabile da3 4 0D180 913 0032 Gon tubo in Kover glass de 3 4 OD _ uni Tuy Lo ui ivi i T CES Con tubo in acciaio inossidabile corto da 3 4 OD 913 0047 Con tubo in acciaio inossidabile da 3 4 OD 180 preparata sotto vuoto 913 0045 Con tubo in acciaio inossidabile da 3 4 OD9
40. sure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Divisi
41. t 34 Conditions de Fonctionnement Anormales 35 Courant faible 35 Courant lev 35 Mise au Rebut 36 Traduction de la mode d emploi originale Agilent Technologies 2152 3 Mode d emploi Informations sur la Securit ATTENTION AVERTISSEMENT 28 52 Cet appareillage a t concu en vue d une utilisation professionnelle Il est conseill a l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication fournie par Agilent avant d utiliser l appareil Agilent d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions fournies d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Cette notice utilise les signes conventionnels suivants Les messages d attention apparaissent avant certaines proc dures dont le non respect peut endommager s rieusement l appareillage Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manceuvre sp ciale dont la mauvaise ex cution risque de provoquer de graves l sions au personnel Les notes contiennent des renseignements importants extrapol s du texte Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Mode d emploi 3 Indications G n rales Ces instructions contiennent des informations de base pour l installation et l utilisation des pomp
42. te Fixer l aimant la bride de la pompe a l aide des vis fournies Miniature and 2 I s Vaclon Pumps User Manual 87 400 044 01 E 31 52 3 Mode d emploi Branchement de l unit de controle NWS VERS Sati Les tensions g n r es par l unit de contr le et utilis es par les pompes Vaclon sont potentiellement mortelles Pour op rer en toute s curit v rifier que le branchement la masse soit correctement r alis Relier l unit de contr le la pompe en op rant de la fa on suivante 1 Relier la pompe la masse de l alimentateur en pla ant la molette de masse sur le passant de la pompe avant de brancher le cable de haute tension En pr sence de c bles pourvus d un fil de masse celui ci doit tre reli une masse du syst me 2 L alimentateur se relie la masse par son c ble d alimentation Pour garantir un circuit enti rement reli la masse la fiche trois p les du cable d alimentation doit tre introduire dans une prise avec liaison la terre Ne pas utiliser de prise d adaptation qui ne permettent pas la fermeture du circuit de terre 32 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Mode d emploi 3 Notes de Fonctionnement Les pompes Vaclon fonctionnent en ionisant le gaz travers une d charge confin e magn tiquement cellule Penning Une tension d environ 3 KV est appliqu e l anode alors que les cathodes sont maintenues la masse Un champ magn ti
43. ter vapour This is done by heating the pump and all the components in the system 1 Heat the pump body and the system with a bakeout oven unit or heating strips to temperatures between 150 C and 250 C 250 C is the maximum allowable for most bakeable high voltage cables This temperature is high enough to degas the pump surfaces of water vapour without damaging the magnet and high voltage connector Note that the system components must be compatible with the bakeout temperature The heating must be approximately even on all vacuum surfaces or water vapour can recondence on the cooler surfaces preventing achievement of UHV vacuum pressures Leave the pump control unit on and monitor the pressure It must never increase above 5x10 Torr mbar if this value is exceeded turn the bakeout off and then on again when low pressure is restored To control the heaters and to monitor to high pressure limit during bakeaout in automatic mode a pressure sensitive relay may be used Bake the Vaclon pump for at least eight hours Longer bakeout periods are recommended when the pump has been used with heavy gas load or when UHV pressure 10 Torr mbar or less is desired As the pump and system cool down to room temperature a drop in pressure should be observed Since Vaclon pumps can be used in many different applications some are being used successfully in vacuum processing The high voltage feedthrough on the VacIon pump can stand a
44. vide pouss tr s lev es 10 Torr mbar ou inf rieures Au fur et mesure que la pompe et le syst me retournent la temp rature ambiante on doit noter un abaissement de la pression Les pompes ioniques offrent de nombreuses applications Elles permettent m me la pr paration sousvide d autres composants Le passant de haute tension pouvant supporter un nombre limit de cycles de chauffage jusqu 400 C il est conseill de limiter ces cycles le plus possible pour augmenter la dur e de vie de la pompe Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Mode d emploi 3 Conditions de Fonctionnement Anormales Courant faible Si la valeur de courant lue est inf rieure la valeur normale pour la valeur de pression correspondante voir diagramme pr c dent cela peut tre d une interruption de la d charge Pour v rifier s il y a eu une interruption de la d charge retirer l aimant et observer le courant r siduel Si le courant n est pas modifi par le retrait de l aimant aucune d charge n est en cours dans la pompe a Pour r amorcer la d charge frapper le corps de la pompe l aide d un outil en plastique souple ou le r chauffer localement l aide d un fer souder On lib re ainsi du gaz de la superficie l int rieur de la pompe et la d charge devrait alors reprendre NE JAMAIS frapper la pompe l aide d un outil m tallique b Sile champ magn tique descend en dessous
45. with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards This manual uses the following standard protocol The caution messages are displayed before procedures which if not followed could cause damage to the equipment WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Instructions for Use 4 General Information These instructions contain basic information for installing and operating miniature and 2 l s Vaclon Pumps The available models are detailed in the following table Tab 1 MODEL P N Miniature With 180 Copper Tube 0 9828 With 90 Copper Tube 913 0040 i With 3 8 OD 180 Stainless Steel Tbe 913 0038 _ With 3 8 OD 90 Stainless Steel Tube 91S ONT E With 3 8 OD 180 Copper Tube vacuum proc 913 0049 E With 3 8 OD 90 Copper Tube vacuum proc 913 0050 i MAL LISS B DS E With 3 4 OD 180 Stainless Steel Tube 1 913000 E De Ta P E With 3 4 OD 180 Copper Tube vacuum proc 9130035 E With 3 4 OD 180 Stainless Steel Tube vacuum processed 913 0045 E TE PME ER ns ERE roro See te T
46. zen erfolgen die sich an den Katoden gebildet haben An die Pumpe eine Spannung zwischen 10 und 14 kVAC mit einer Stromst rke zwischen 20 und 30 mA ber einen Zeitraum von 5 s anlegen um die Spitzen abzubrennen e Anden Isolatoren d rfen keine Metallfilmbel ge vorhanden sein die infolge eines l ngeren Betriebs bei einem Druck ber 10 Torr entstehen Da die Pumpe nicht demontiert werden kann bewirkt dies eine k rzere Standzeit des Ger tes Die l ngerfristige Benutzung der Pumpen bei hohen Dr cken ist zu vermeiden Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EURichtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat 26 52 Miniature and 2 1 s Vaclon Pumps User Manual 87 400 044 01 E Miniature and 2 1 s Vaclon Pumps User Manual Mode d emploi Informations sur la S curit 28 Indications G n rales 29 Installation 31 Branchement de l unit de contr le 32 Notes de Fonctionnement 33 Op ration de bakeou
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