Turbo-V Vent Device Outline
Contents
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3. Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and model E Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Fareline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Salenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display prohlem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error cade on display Dther SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t star
4. Turbo V Vent Device are shown in the following figure Figure 3 Turbo V Vent Device Outline Turbo V Vent Device 87 900 806 01 1 User Manual 17 34 2 Technical Information Control Unit Installation Control Unit Installation Place the control unit free standing on a stable surface or fasten it by means of the four suitable taped holes Plug the power cable into a suitable power source When first installed or after 6 months of non use leave the control unit under voltage for at least 3 hours in order to fully recharge the battery before use x3MA depth 5mm Figure 4 Fastening holes bottom view 18 34 Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 Vent Valve Installation Connect the NW 10 KF port to the chamber or pump vent port This port is compatible with an NW 16 KF flange having an adaptive centering ring Use the provided filter to prevent the ingress of dust dirt or contaminants when the pump Is vented to atmosphere When a dry gas bottle line is used never exceed 1 bar 15 psig to the riffled nozzle connection otherwise a leak in the Turbo V pump may occur When a dry gas bottle line is used check the correct venting time to prevent overpressuring the Turbo V pump The Turbo V vent device has been designed to vent the Turbo V pump only To vent the chamber it is advisable to install a suitable vent valve Turbo V Vent Device 87 900 806 01 1 User Manua
5. Turbo V Vent Device Model 969 9831 969 9731 User Manual 87 900 806 01 1 05 2012 E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 806 01 I Edition Edition 05 2012 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these ter
6. age Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 FIR Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only Taxable Non taxable 2 PRODUCT IDENTIFIGATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and
7. cifications Control Unit Table 1 Input voltage frequency power fuses Output voltage power max Delay time Venting time Operating temperature Storage temperature Power cable Valve cable Pollution degree Max altitude Compliance according to Weight Turbo V Vent Device 87 900 806 01 I User Manual 110 120 Vac 10 969 9831 model 220 240 Vac 10 969 9731 model 50 to 60 Hz 15 VA 2x T 315 mA 250V 24 Vdc able to drive a Turbo Pump Vent Valve 2 5 W Factory set to 16 seconds adjustable up to 36 minutes Factory set to 3 minutes adjustable up to 36 minutes 0 to 40 C 32 F to 104 F 20 C to 50 C 4 F to 122 F With European or NEMA plug 3 meters long optional 5 meters long 2 2000 m a s l 61010 1 61326 1 industrial level 2 5 kg 5 5 Ibs 15 34 2 Technical Information Vent Device Specifications 16 34 Vent Valve Table 2 High vacuum flange Gas entrance Orifice size Pressure range Leak rate Life cycle Input voltage power Bakeout temperature Mounting position Weight NW 10 KF Riffled nozzle 4 8 mm 0 19 0 D Tube 1 4 1 2 mm 0 05 106 mbar to 1bar 1077 Torr to atm 1x10 mbar l s One million cycles 24 Vdc 10 2 2W 60 C 140 F Any 120 g 0 27 Ibs Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 Turbo V Vent Device Outline The outline dimensions for the
8. ent device is powered by the Turbo V controller and a battery back up capability is built in The vent control unit is provided with a delay time to avoid undesired venting during a temporary power failure and to allow closure of the system valves before venting A second setting is also provided to control the venting time to atmosphere The Turbo V pump must be vented when it is shut down to prevent the forepump oil from contaminating the Turbo V and the connected chamber Figure Vent Valve and Control Unit The 969 9831 969 9731 Turbo V vent device consist of a Vent Control Unit a Vent Valve Turbo V Vent Device 87 900 806 01 I User Manual 9 34 1 Instructions for Use Disposal Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 10 34 Turbo V Vent Device User Manual 87 900 806 01 1 00 e 2 Technical Information General 12 Ve
9. ilent battery 6 Reconnect the electrical connections according to the polarity red wire black wire 3 1 Replace the cover by tightening all the screws 8 Reconnect the power cord to the unit Turbo V Vent Device 87 900 806 01 1 User Manual 27 34 2 Technical Information Turbo V Vent Device Orderable Parts Turbo V Vent Device Orderable Parts Table 3 Orderable Parts DESCRIPTION PART NUMBER Gas filter 28 900008 01 Battery 6 V 1Ah 74 103100 01 Mains cable NEMA plug 969 9958 3m long Mains cable European plug 969 9957 3m long For a complete overview of Agilent s extensive vacuum product line please refer to the Vacuum Catalogue 28 34 Turbo V Vent Device User Manual 87 900 806 01 1 e Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your C
10. ion fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 0 10 64397888 Fax 86 0 10 64391318 Toll free 800 820 3278 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Sales amp Services GmbH amp Co KG Vacuum Products Division Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230
11. l 19 34 2 Technical Information Operation Operation 20 34 When the Turbo V pump starts the blue LED lights indicating that the battery is being charged and the set timers are reset If the pump is switched off or a power failure occurs the LED goes off and the delay time starts At the end of delay the valve blue LED lights and the valve opens for the set time At the end of the venting time the valve closes the valve LED goes off and the battery is switched off If during the delay or venting time the Turbo V pump is switched on even if only for a few seconds both delay and venting time are reset A charged battery is able to supply a minimum of 4 complete venting cycles with the maximum delay and venting time The life of the battery is affected by ambient temperature Never exceed the specified operating temperature and replace the battery every 30 months Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 Time Setting WARNING High voltage present in the control unit can cause severe injury or death Service must be carried out only by qualified and authorized personnel WARNING The whole procedure described in this chapter must be carried out with the power cord detached from the unit Turbo V Vent Device 87 900 806 01 1 User Manual 21 34 2 Technical Information Time Setting 1 Disconnect the power cord from the unit 2 Remove the top cover of the Vent control uni
12. l pump oil backstreaming and contamination of the Turbo V pump MULTIPLIED BY MULTIPLIED BY 64 8 1 64 8 1 SECONDS SECONDS l l l E H H E H m aros apr e i 8 L Vent Time Delay Time a Figure 6 Timers setup selectors 24 34 Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 Battery Replacement WARNING High voltage present in the control unit can cause severe injury or death Service must be carried out only by qualified and authorized personnel WARNING The whole procedure described in this chapter must be carried out with the power cord detached from the unit 1 Disconnect the power cord from the unit Remove the top cover of the Vent control unit by unscrewing the screws Figure 7 Unit interior Turbo V Vent Device 87 900 806 01 1 User Manual 25 34 2 Technical Information Battery Replacement 2 Identify the battery positioned in the rear of the unit 3 Disconnect both electrical connections Figure 8 Internal Battery 26 34 Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 4 Slide the battery out sideways Figure 9 Battery removal 5 Insert a new battery maintaining the electrical terminals towards the front of the unit WARNING The new battery must be an Agilent Replacement Battery see Orderable Parts Table In order to be compliant with warranty rules it is mandatory using Ag
13. ms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of impor
14. nnel must be aware of all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious This product must only be operated and maintained by trained personnel Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Agilent All warnings and cautions should be read carefully and strictly observed Address any safety operation and or maintenance questions to your nearest Agilent office The following format is used in this manual to call attention to hazards WARNING Warning are used when failure to observe instructions or precautions could 8 34 result in injury or death Warning Cautions are used when failure to observe instructions could result in damage to equipment whether Agilent supplied or other associated equipment Information to aid the operator in obtaining the best performance from the equipment Turbo V Vent Device User Manual 87 900 806 01 1 Instructions for Use Turbo V Vent Device Description The Turbo V vent device consisting of a vent control unit and a vent valve is a complete unit suitable for automatic venting of the Turbo V pump when it is switched off or during a power failure switch refer to the following figure The V
15. nt Control Unit 13 Vent Valve 14 Vent Device Specifications 15 Control Unit 15 Vent Valve 16 Turbo V Vent Device Outline 17 Control Unit Installation 18 Vent Valve Installation 19 Operation 20 Time Setting 21 Battery Replacement 25 Turbo V Vent Device Replacement Parts 28 Agilent Technologies 11 34 2 Technical Information General General The 969 9831 969 9731 Turbo V vent device consisting of a vent control unit and a vent valve are a complete unit suitable for automatic venting of the Turbo V pump when it is switched off or during a power failure switch refer to the following figure Figure 2 Vent Valve and Control Unit The 969 9831 969 9731 Turbo V vent device consist of a Vent Control Unit aVent Valve 12 34 Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 Vent Control Unit The vent control unit is mains powered via the IEC 60320 C14 plug placed on its front panel and a battery back up capability is built in The vent control unit is not suitable for rack mounting Four taped holes in the bottom surface are available for fastening see Figure 4 for details When the supply voltage is present the internal battery is automatically recharged then the timer circuits are inhibited and reset When the supply voltage is shut off the valve still remains not energized and the delay timer counter starts After the pre set delay time the valve opens and the venting
16. orrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ge Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning product
17. s Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the pack
18. supply Purchase Order if requesting a billable service 3A LI Non Billable C1 Billable mmm New PO hard copy must be submitted with this form 3B Exchange Repair lupgrade Consignment Demo _ Calibration _ Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or heen exposed to the follawing toxic or hazardous materials If this bax is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic Corrosive Reactive L Flammable Explosive C Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product
19. t Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluat
20. t by unscrewing the screws Timers selectors Figure 5 Unit interior 3 Choose the appropriate times make the appropriate jumper settings and rotary switch position refer to the following figure place only one jumper for each timer to select the time unit between 1s 8s and 64s turn the rotary switch multiplier for the desired value between 0 to 9 22 34 Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 If the rotary switch is set to O the delay becomes zero no delay regardless of the Jumper position Exemple to set a delay time of 40 seconds and a venting time of 4 minutes proceed as follows Adjust the delay time rotary switch to 5 and place the jumper across 8s Adjust the venting time rotary switch to 4 and place the jumper across 64s CAUTION Use the appropriate tool to adjust the time settings to avoid damages to the rotary switches Replace the cover by tightening all the screws Reconnect the power cord to the unit Turbo V Vent Device 87 900 806 01 1 User Manual 23 34 2 Technical Information Time Setting The minimum venting times for each Turbo V pump series with the high vacuum flange blanked off and leak tight are listed below Turbo V 80 2 16 minute Turbo V 300 4 16 minute Turbo V 1000 0 5 minute The minimum venting time is the time needed to reach a pressure of about 500 mbar 375 Torr inside the pump in order to avoid mechanica
21. tant data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Turbo V Vent Device User Manual 87 900 806 01 1 Turbo V Vent Device Turbo V Vent Device Turbo V Vent Device 87 900 806 01 I User Manual 3 34 Turbo V Vent Device 4 34 Turbo V Vent Device User Manual 87 900 806 01 1 Contents Contents 1 Instructions for Use 7 General Information 8 Turbo V Vent Device Description 9 Disposal 10 2 Technical Information 11 General 12 Vent Control Unit 13 Vent Valve 14 Vent Device Specifications 15 Turbo V Vent Device Outline 17 Control Unit Installation 18 Vent Valve Installation 19 Operation 20 Time Setting 21 Battery Replacement 25 Turbo V Vent Device Replacement Parts 28 Turbo V Vent Device 87 900 806 01 I User Manual 5 34 Contents 6 34 Turbo V Vent Device User Manual 87 900 806 01 1 Turbo V Vent Device User Manual 1 Instructions for Use General Information 8 Turbo V Vent Device Description 9 Disposal 10 xii Agilent Technologies 1 34 1 Instructions for Use General Information General Information Operators and service perso
22. time count starts At the end of the venting time the valve is de energized and the battery is disconnected The battery is protected against short circuits on the valve Two blue LEDs indicate when the mains is supplied and when the valve is driven Valve closed Other three LEDs indicates the backup battery status The red LED indicates that the battery actual charge level does not allow the actuation of the valve It need to be charged before to be able to operate In this condition in case of power shutdown the Vent Valve opens immediately The green LED indicates that battery actual charge level is ok the yellow one indicates a charge level intermediate If even after a prolonged period of charging the green LED does not light replace the internal battery Turbo V Vent Device 87 900 806 01 1 User Manual 13 34 2 Technical Information General Vent Valve The vent valve consists of a small normally closed straight through electromagnetically actuated and viton sealed valve with an NW 10 KF flange on the high vacuum port and a filter or adapter tube 1 4 on the air entrance port The valve opens under control of a metallic spring and closes when power is supplied to the valve electromagnet A riffled nozzle is provided for use in lieu of the sintered filter when the Turbo V pump is vented by the dry gas bottle line 14 34 Turbo V Vent Device User Manual 87 900 806 01 1 Technical Information 2 Vent Device Spe
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