342 & 343 Benchtop Mini-Ion® Gauge Controllers Manual (342026)
Contents
1. Table 1 1 Specifications of the lon Gauge Controllers and Vacuum Gauges Parameter Specification Controller Pressure Range for N or Air With Series 342 Triode style IG With Series 343 Bayard Alpert style IG Less than 1 x 10 Torr to 5 x 102 Torr using 1 0 mAdc emission current Less than 5 x 10 Torr to 5 x 103 Torr using 2 0 mAdc emission current Accuracy 5 of reading at ambient temperature of 25 C 77 F Display Units Torr Display Resolution Scientific notation 2 significant digits Display Update Time 0 5 sec Overpressure Protection The ion gauge is turned OFF if the pressure rises above the upper pressure limit 50 mTorr 5x102 for the 342 Triode ion gauge 5 mTorr 5x103 Torr for the 343 BA ion gauge Electrical Voltage 100 240 VAC 10 50 60 Hz Power 25 W Max Fuse Rating 50 Amp Buss MDA 1 2 or Littlefuse 326 500 Enviromental Conditions Indoor Use Only Temperature Range 0 C to 40 C 32 OF 104 OF Altitude Up to 2000 meters Maximum Relative Humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C lon Gauge Series 342 Triode style IG Series 343 Bayard Albert style IG Sensitivity 6 2 Torr nominal 5 2 Torr nominal Emission Current 1 0 mAdc 2 0 mAdc Collector Potential 0 Vdc 0 Vdc Grid Potential 180 Vdc 180 Vdc Filament Potential2. Note The NW16KF flange requires O rings and centering rings between the mating flanges a Tighten the clamp to compress the mating flanges together b Seal the O ring c Connect a ground wire from the lon Gauge to the vacuum chamber Step 3 Connect the Gauge and Power Cables Controller Gauge Connection Connect the provided interconnect cable to the Controller and Gauge Power Cord Connection The Controller will operate over a line voltage range of 100 Vac to 240 Vac Series 342 343 Instruction Manual 342026 Rev C 17 Chapter 2 410 50 60 Hz All that is required is that a line cord be selected to match your available power receptacle to the power input connector located on the rear of the Controller a Connect a ground wire from the ground connection on the rear of the Controller to a known system ground See System Grounding Step 4 b Connect the power cable but do NOT apply power at this time Figure 2 1 Micro lon Gauge Controller Connections Power ON Gauge Cable Power ON OFF Power Cord LED Connector Rocker Switch Connector Series 342 INPUT POWER lonization Gauge Controller PORABA 25 WATTS Gauge ON OFF Replaceable Fuse 8 32 Thread Pushbutton Switch Ground Connection Step 4 System Grounding Procedure V WARNING Improper grounding could cause severe product failure or personal injury from electrical shock Follow ground network requirements for the facility e Maintain al
3. o 5 Each caution statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice AXA WARNING Warning statements alert you to hazards or unsafe practices that could result in severe property damage or personal injury due to electrical shock fire or explosion Each warning statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice Each caution or warning statement explains a The specific hazard that you must prevent or unsafe practice that you must avoid b The potential result of your failure to prevent the specified hazard or avoid the unsafe practice and c What you must do to prevent the specified hazardous result Series 342 343 Instruction Manual 342026 Rev C 7 Chapter 1 A CAUTION These safety alert symbols in this manual or on the Product rear panel mean caution personal safety property damage or danger from electric shock Read these instructions carefully In these instructions the word product refers to the Series 342 or 343 lon Gauge Controller and all of its approved parts and accessories NOTE These instructions do not and cannot provide for every contingency that may arise in connection with the installation operation or maintenance of this product If you reguire further assistance contact Brooks Automation Inc at the addres
4. The service and repair information in this manual is for the use of Oualified Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you are gualified to do so CAUTION Do not substitute parts or modify the product Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by Brooks Automation Granville Phillips for service and repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications 26 Series 342 343 Instruction Manual 342026 Rev C Service 8 Maintenance 4A WARNING High voltages are present within the power supply of the Controller capable of causing electrical shock injury or death Use extreme caution while troubleshooting when power is applied to the Controller The Controller contains static sensitive electronic parts thus the following precautions must be followed when troubleshooting Use a grounded conductive work surface Wear a high impedance ground strap for personal protection Use conductive or static dissipative envelopes to store or ship static sensitive devices or printed circuit boards Do not operate the product with static sensitive devices or other components removed from the product Do not handle static
5. parts of the vacuum chamber and the Controller chassis 3 If no voltages exist measure the resistance The resistance should not exceed 2 Ohms A resistance of 2 Ohms or less implies commonality of these grounds that should prevent a plasma from creating a dangerous voltage between them This test does not prove that either connection is at Earth ground only that they are the same If more than 2 Ohms is indicated check with a licensed electrician 4 If AC or DC voltages exist and are less than 10 volts shunt the meter with a 10 Ohm 10 Watt resistor Repeat the voltage measurement With the shunt in place across the meter if the voltage remains at 83 or more of the un shunted value commonality of the grounds is implied Repeat the measurements several times to be sure that the voltage ratio is not changing with time This should prevent a plasma from creating a dangerous voltage between these grounds Make sure that no more than 10 volts exists between grounds If the voltage change in step 4 is greater than 17 due to the placement of the shunt it complicates the measurement The commonality of the grounds Series 342 343 Instruction Manual 342026 Rev C 19 Chapter 2 may be satisfactory and the coupling poor or the commonality could be poor Be sure to check the electrical continuity between these two ground systems 20 Series 342 343 Instruction Manual 342026 Rev C 3 1 Theory of Operation WARN
6. 30 Vde 30 Vdc Degas None None Series 342 343 Instruction Manual 342026 Rev C 15 mM 2 D z ge z e 2 o 5 Chapter 1 Notes 16 Series 342 343 Instruction Manual 342026 Rev C 2 1 Installation Procedure The installation procedure includes the following steps 1 Location of the benchtop mounted Series 342 or 343 lon Gauge Controller 2 Attach the lon Gauge to the vacuum chamber 3 Connect the power cable and the Controller Gauge interconnect cable 4 Connect ground wires between the lon Gauge and the vacuum chamber and any other ground connections to assure the system is safe and protects personnel from electrical shock Step 1 Location of the Benchtop Mounted Controller e Locate the Controller where it can be easily accessed For greatest accuracy and repeatability locate the Controller in a stable room temperature environment Ambient temperature should never exceed 40 C 104 F operating non condensing or 85 C 185 F non operating gt a 2 5 a o 5 Locate the Controller away from internal and external heat sources and in an area where ambient temperature remains reasonably constant Step 2 Install the lon Gauge on the Vacuum Chamber Do not locate the lon Gauge near the pump where gauge pressure might be lower than normal vacuum pressure Do not locate the lon Gauge near a gas inlet or other source of contamination
7. 43 lon Gauge Controller Power ON Gauge Cable Power ON OFF Power Cord LED Connector Rocker Switch Connector Series 342 INPUT POWER lonization Gauge Controller Gauge ON OFF Replaceable Fuse 8 32 Thread Pushbutton Switch Ground Connection Gas Sensitivity Correction The Series 342 343 lon Gauge Controller is calibrated to read pressure for nitrogen or air If used with other gases the pressure reading must be corrected for the gas in use Table 3 1 gives some typical sensitivity ratios To correct the pressure curve reading divide the indicated pressure reading by the relative sensitivity ratio Gauge Reading True Pressure Relative Sensitivity Rx o 1 pet 5 lon gauge sensitivity ratios Rx shown in Table 3 1 are from NASA Technical Note TND5285 lonization Gauge Sensitivities as Reported in the Literature by Robert L Summers Lewis Research Center National Aeronautics and Space Administration Table 3 1 Relative Gas Sensitivities Gas Ry Gas Ry He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 N 1 00 Kr 1 94 Air 1 00 SF 2 5 O 1 01 Xe 2 87 Series 342 343 Instruction Manual 342026 Rev C 23 Chapter 3 Notes 24 Series 342 343 Instruction Manual 342026 Rev C 4 1 4 2 Service Guidelines Damage Reguiring Service If a gualified service person makes repairs at t
8. 7 4887 24 hours per day 7 days per week within the USA e Email co csr brooks com For Global Customer Support go to www brooks com click on Service and Support then click on Global Service and Repair Centers to locate the Brooks Automation office nearest you Disconnect this product from the power source and refer servicing to Oualified Service Personnel if any the following conditions exist The gauge cable power supply cord or plug is damaged Liguid has been spilled onto or objects have fallen into the product The product does not operate normally even if you have followed the Operation Instructions Adjust only those controls that are covered in this instruction manual The product has been dropped or the enclosure has been damaged Series 342 343 Instruction Manual 342026 Rev C 25 m D z ix o go 2 Fl D 5 o Ss ix o Chapter 4 A CAUTION Replacement Parts When replacement parts are reguired be certain to use the replacement parts that are specified by Brooks Automation Granville Phillips or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards CAUTION Safety Check Upon completion of any service or repairs to this product ask the Oualified Service Person to perform safety checks to assure that the product is in safe operating order 4 3 Troubleshooting 4A CAUTION
9. 70 lon Gauge Controller with digital display 342017 lon Gauge Controller with digital display 342022 lon Gauge Controller with digital display 343011 Catalog numbers for Series 342 Triode lon Gauges lon Gauge with 0 75 inch Kovar 342003 lon Gauge with NW16KF Stainless Steel flange 342004 lon Gauge with NW16KF Stainless Steel flange 342015 mounted on a 90 elbow Catalog numbers for Series 343 Bayard Alpert lon Gauges lon Gauge with 0 75 inch Kovar 343001 lon Gauge with NW16KF Stainless Steel flange 343002 lon Gauge with 1 5 16 inch non rotatable ConFlat type flange 342003 for readings below 1 x 107 Torr lon Gauge pumped down and sealed for testing 343013 lon Gauge Cables for Series 342 amp 343 Controllers Cable 1 meter long 3 2 feet 342023 Cable 2 meters long 6 5 feet 342024 Cable 3 meters long 9 8 feet 342025 Chapter 1 Chapter 2 Chapter 3 Chapter 4 Safety amp Introduction LL AE 7 11 Caution and Warning Statements 7 1 2 Damage Requiring Service 9 1 3 Implosion Explosion Conditions 11 1 4 Proper Grounding 13 1 5 Warranty Information 13 1 6 Service Guidelines 13 17 Specifications nA ee ne Pi EA ded aeons 14 Installation a aa rn z a ee ja 17 2 1 Installation Procedure 17 Step 1 Location of t
10. Granville Phillips Series 342 amp 343 lon Gauge Controllers GRANVILLE PHILLIPS Instruction Manual Instruction manual part number 342026 Revision C January 2013 Brooks Instruction manual part number 342026 Granville Phillipse Series 342 8 343 lon Gauge Controllers This Instruction Manual is for use with the following Granville Phillips Series 342 Controllers 20342070 342017 342022 343011 GRANVILLE PHILLIPS Customer Service Support For customer service within USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Granville Phillips 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 800 776 6543 Phone 1 303 652 4400 FAX 1 303 652 2844 Email co csr brooks com Brooks Automation Inc 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 For customer service 24 hours per day 7 days per week every day of the year including holidays within the USA Phone 1 800 367 4887 www brooks com Instruction Manual 1994 2013 Brooks Automation Inc All rights reserved Granville Phillips and Mini lon are registered trademarks of Brooks Automation Inc All other trademarks and registered trademarks are the properties of their respective owners Brooks Granville Phillips Series 342 amp 343 lon Gauge Controllers with Digital Display Catalog numbers for Series 342 amp 343 lon Gauge Controllers lon Gauge Controller with digital display 203420
11. ING Using the Series 342 343 Controller and Ion Gauge to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage personal injury or death Do not measure the pressure of flammable or explosive gases A WARNING Exposing the Series 342 343 Controller to moisture can cause fire or electrical shock resulting in severe property damage or personal injury Install the Controller ONLY in an indoor environment The functional parts of a typical ionization gauge are the filament cathode grid anode and ion collector which are shown schematically in Figure 3 1 These electrodes are maintained by the gauge controller at 30 180 and 0 volts relative to ground respectively The filament is heated to such a temperature that electrons are emitted and accelerated toward the grid by the potential difference between the grid and filament All of the electrons eventually collide with the grid but many first traverse the region inside the grid many times When an energetic electron collides with a gas molecule an electron may be dislodged from the molecule leaving it with a positive charge Most ions are then accelerated to the collectors The rate at which electron collisions with molecules occur is proportional to the density of gas molecules and hence the ion current is proportional to the gas density or pressure at constant temperature The amount of ion current f
12. afe operation of a vacuum system with this or any similar high voltage producing product Verify that the vacuum port to which the Ion Gauge is mounted is electrically grounded It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground 1 5 Warranty Information Brooks Automation Inc provides an eighteen 18 month warranty from the date of shipment for new Granville Phillips Controllers The Brooks Automation Inc General Terms and Conditions of Sale provides the complete and exclusive warranty for Brooks Automation products This document may be located on our web site at www brooks com or may be obtained by contacting a Brooks Automation Customer Service Representative 1 6 Service Guidelines Some minor problems are readily corrected on site If the product reguires service please contact our Customer Service Department at 303 652 4400 for troubleshooting help over the phone If the module must be returned to the factory for service reguest a Return Authorization RA from Brooks Automation Granville Phillips Do not return products without first obtaining an RA In some cases a hazardous materials document may be reguired The Brooks Automation Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning equipment to Brooks Automation Granville Phillips be sure to package the
13. ct on manual systems and c The automation is correct on automated gas delivery system Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized AA WARNING Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system It is the installer s responsibility to ensure that the automatic signals provided by the product are always used in a safe manner Where an eguipment malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device 12 Series 342 343 Instruction Manual 342026 Rev C Safety 8 Introduction 1 4 Proper Grounding A WARNING All components of a vacuum system used with this or any similar high voltage product must be maintained at Earth ground for safe operation The power cord of this product must be connected only to a properly grounded outlet Be aware however that grounding this product does not guarantee that other components of the vacuum system are maintained at Earth ground mM 2 o z ge FI 2 o 5 Complying with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for s
14. edures in this manual or perform any servicing on this product unless you are gualified to do so A CAUTION Replacement Parts When replacement parts are reguired be certain to use the replacement parts that are specified by Brooks Automation Inc or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards Return the product to a service facility designated by Brooks Automation Inc for service and repair to ensure that safety features are maintained Do not use this product ifit has unauthorized modifications A CAUTION Safety Check Upon completion of any service or repairs to this product ask the Oualified Service Person to perform safety checks to determine that the product is in safe operating order 10 Series 342 343 Instruction Manual 342026 Rev C Safety 8 Introduction 1 3 Implosion Explosion Conditions A WARNING Do not operate in an explosive atmosphere Do not operate the product in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures Danger of explosion or inadvertent venting to atmosphere exists on all vacuum systems which incorporate gas sources or involve processes capable of pressurizing the system above safe l
15. he Benchtop Mounted Controller 17 Step 2 Install the lon Gauge on the Vacuum Chamber 17 Step 3 Connect the Gauge and Power Cables 17 Step 4 System Grounding Procedure 18 Operatioti ss aast aastatuhat 21 3 1 Theory of Operation 21 3 2 Operation 1 05 Ai gto aema s sail 22 Gas Sensitivity Correction 23 Service amp Maintenance 25 4 1 Service Guidelines 25 4 2 Damage Requiring Service 25 4 3 Troubleshooting 26 4 4 lon Gauge Continuity Test 28 DED asta klar A ASE OE sla aha et suse D N N 31 Series 342 343 Instruction Manual 342026 Rev C 5 Table of Contents 6 Series 342 343 Instruction Manual 342026 Rev C The instructions given in this user manual explain how to install operate and maintain the Granville Phillips Series 342 amp 343 lon Gauge Controllers and lon Gauges 1 1 Caution and Warning This manual contains Caution and Warning statements with which you Statements MUST comply to prevent inaccurate measurement property damage or personal injury A CAUTION Caution statements alert you to hazards or unsafe practices that could result in inaccurate measurement minor personal injury or property damage mM D 4 o ES z go FI 2
16. he component level repairs properly made with eguivalent electronic parts and rosin core solder do not void the warranty If the product reguires service contact Brooks Automation Granville Phillips Customer Service Department at 1 800 776 6543 for troubleshooting help over the phone Other phone numbers are published on the front and back covers and below If the product must be returned for service reguest a Return Authorization RA from Brooks Automation Granville Phillips Do not return products without first obtaining an RMA In some cases a hazardous materials document may be required The Brooks Automation Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning equipment to Brooks Automation Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules must be handled using proper anti static protection methods and must be packaged in anti static packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility Before you return a product for repair obtain an RMA number by contacting Granville Phillips customer service Phone 1 303 652 4400 or 1 800 776 6543 within the USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Phone 1 800 36
17. imits mM 2 o z ge z 2 o o WARNING The fumes from solvents such as trichloroethylene perchloroethylene toluene and acetone can be dangerous to health ifinhaled Use only in well ventilated areas exhausted to the outdoors Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical eguipment A CAUTION Install suitable devices that will limit the pressure to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below the pressure that the system can safely withstand A CAUTION If accurate conversion data is not used or is improperly used a potential overpressure explosion hazard can be created under certain conditions A pressure relief valve should be installed in the system if the possibility of exceeding 1000 Torr 1333 mbar exists Suppliers of pressure relief valves and pressure relief disks can be located via an internet search and are listed in the Thomas Register under Valves Relief and Discs Rupture Series 342 343 Instruction Manual 342026 Rev C 11 Chapter 1 Confirm that these safety devices are properly installed before installing the product In addition check that a The proper gas cylinders are installed b Gas cylinder valve positions are corre
18. l exposed conductors at Earth ground e Ground the Ion Gauge to the vacuum chamber as illustrated in Figure 2 2 e Connect the system ground wires as illustrated in Figure 2 2 18 Series 342 343 Instruction Manual 342026 Rev C Installation Figure 2 2 System Grounding Diagram DO NOT MAKEA DIRECT CHASSIS TO VACUUM SYSTEM CONNECTION 342 lon Gauge Controller m sm mnn mee nane tle ni m kan cwan m an mxn se wen ewn xane sen ene wxe sen ewane Vacuum System Power Distribution Breaker Box Facility Grounding Ground Wire Electrode System NOTE Other Power Leads are not shown Power Common or Safety Install a High Current Capacity Ground Wire Ground Wire 12 AWG Safety Ground Wire from the to a Known 2 05 mm Minimum Size Controller Chassis to the Earth Ground Facility Ground Electrode System 12 AWG 2 05 mm 12 AWG 2 05 mm Minimum Size Minimum Size gt a 2 9 gt 2 2 5 Use the following procedure to test the vacuum system This procedure uses a digital multimeter DMM and a 10 Ohm 10 Watt resistor 1 Examine the grounding of the Series 342 or 343 Controller the ion gauge and the vacuum chamber Make sure there is a heavy duty ground connection to all exposed conductors on the chamber 2 With the Controller turned OFF test for both DC and AC voltages between the metal
19. n Manual 342026 Rev C 29 Chapter 4 Notes 30 Series 342 343 Instruction Manual 342026 Rev C C Caution and Warning Statements 7 Chapters Before You Begin 7 Installation 17 Maintenance 25 D Damage Requiring Service 9 25 Dimensions 14 E Electrical Shock 21 27 Explosion Implosion Conditions 11 F Figures Dimensions 14 Flammable or Explosive Gases 21 G Gas Sensitivity Correction 23 Global Customer Support 14 25 Grounding 13 l Implosion Explosion Conditions 11 Installation Procedure 17 Interconnect Cable 29 lon Gauge Continuity Test 28 lon Gauge Illustrations 22 0 Operation 22 P Pressure Relief Valves 11 R Relative Gas Sensitivities 23 S Safety Damage Reguiring Service 9 Service Guidelines 13 25 Specifications 14 Controller 15 Gauge 15 T Theory of Operation 21 Troubleshooting 26 W Warranty Information 13 Series 342 343 Instruction Manual 342026 Rev C 31 Index 32 Series 342 343 Instruction Manual 342026 Rev C Instruction manual part number 342026 Rev C Granville Phillips Series 342 amp 343 lon Gauge Controllers GRANVILLE PHILLIPS Customer Service Support For customer service within USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Granville Phillips 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 800 776 6543 Phone 1 303 652 4400 FAX 1 303 652 2844 Email co csr brooks com B
20. or a given emission current and pressure depends on the ion gauge design This gives rise to the definition of ion gauge sensitivity frequently denoted by K ion current K emission current x pressure Series 342 343 Instruction Manual 342026 Rev C 21 uonesadg Chapter 3 The lon Gauge has a sensitivity of 6 2 Torr for the Series 342 Triode ion gauge and 5 2 Torr for the Series 343 B A ion gauge when used with nitrogen or air The 342 343 Controller varies the heating current to the filament to maintain a constant electron emission and measures the ion current to the collector The pressure is then calculated from these data Figure 3 1 lon Gauge Illustration G P Series 342 Triode Gauge G P Series 343 BA Gauge Filament 30 V Grid 180 V lon Collector 0 V ME Collector 180 V 0 V i 3 2 Operation Power ON OFF Depress the top half of the rocker power switch located on the rear panel to turn ON power to the Controller The green LED on the front panel will illuminate Depress the lower half of the power switch to turn OFF the Controller lon Gauge ON OFF Use the pushbutton on the front panel to turn the lon Gauge ON or OFF The digital display will turn ON immediately and display 9 99 After an approximate 6 second delay the actual pressure will be displayed 22 Series 342 343 Instruction Manual 342026 Rev C Operation Figure 3 2 Series 342 3
21. otential n D gt E 2 lt ge z Z Ss 2 ix z 2 5 This hazard is not unique to this product A CAUTION Objects and Liquid Entry Never push objects of any kind into this product through openings as they may touch dangerous voltage points or short out parts that could result in a fire or electric shock Be careful not to spill liguid of any kind onto the products 1 2 Damage Reguiring Disconnect the product from all power sources and refer servicing to Service Oualified Service Personnel under the following conditions a When any cable or plug is damaged b If any liquid has been spilled onto or objects have fallen into the product If the product has been exposed to rain or water d If the product does not operate normally even if you follow the operating instructions Adjust only those controls that are covered by the operation instructions Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the product to its normal operation e If the product has been dropped or the enclosure has been damaged f When the product exhibits a distinct change in performance This indicates a need for service Series 342 343 Instruction Manual 342026 Rev C 9 The service and repair information in this manual is for the use of Oualified Service Personnel To avoid electrical shock do not perform any proc
22. products to prevent shipping damage Circuit boards and modules separated from the controller chassis must be handled using proper anti static protection methods and must be packaged in anti static Series 342 343 Instruction Manual 342026 Rev C 13 Chapter 1 1 7 Specifications packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon reguest Shipping damage on returned products as a result of inadeguate packaging is the Buyer s responsibility Before you return the module obtain an RA number by contacting Granville Phillips customer service Phone 1 303 652 4400 or 1 800 776 6543 within the USA Phone 1 800 367 4887 24 hours per day seven days per week within the USA Email co csr brooks com For Global Customer Support go to www brooks com click on Service and Support then click on Global Service and Repair Centers to locate the Brooks Automation office nearest you Figure 1 1 Dimensions of the Series 342 amp 343 lon Gauge Controllers r 6 75 in 855 in 171 45 mm j 1 50 in 2 55 in O Power Series 342 lonization Gauge Controller LE 750 in INPUT POWER 100 240 VAC 25 WATTS 50 60 HZ Gauge li gt m ak AO FRONT VIEW REAR VIEW 14 Series 342 343 Instruction Manual 342026 Rev C Safety 8 Introduction
23. rooks Automation Inc 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 For customer service 24 hours per day 7 days per week every day of the year including holidays within the USA Phone 1 800 367 4887 www brooks com Instruction Manual Instruction manual part number 342026 Revision C January 2013 Brooks
24. s on the title page of this manual This product offers safe service provided it is installed operated and serviced in strict accordance with these safety instructions A WARNING Failure to comply with these instructions may result in serious personal injury including death or property damage NOTE These safety precautions must be observed during all phases of operation installation and service of this product Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the instrument Brooks Automation Inc disclaims all liability for the customer s failure to comply with these reguirements WARNING To reduce the risk of fire or electric shock do not expose this product to rain or moisture Series 342 343 Instruction Manual 342026 Rev C Safety 8 Introduction AA WARNING Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors are maintained at earth ground This hazard is not peculiar to this product AA WARNING Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high p
25. se an electrical discharge through a gas or plasma resulting in serious property damage or personal injury due to electrical shock or fire Vent the vacuum chamber to atmospheric pressure and turn OFF power to the Controller before you test remove or replace the Ion Gauge Turn OFF power to the lon Gauge Controller 1 Use a digital multimeter to measure the resistance between the filament pins see Figure 4 1 The reading should be approximately 0 2 Q 2 Measure the resistance of the filament pins to the gauge case The reading should be infinity 3 Measure the resistance of the grid pin to the gauge case The reading should be infinity 4 Measure the resistance of the collector pin to the gauge case The reading should be infinity If the resistance values are not the specified values the lon Gauge is defective Contact Brooks Automation customer service to order a replacement gauge See Section 4 1 Figure 4 1 Interconnect Cable and lon Gauge Pinout Controller Gauge Interconnect Cable Controller Gauge Connector Connector Shield _ a Z KE PA l l Pin 1 Red Grid Z 2 TE TE 9 e I I Filament e I l sp Black 2 Filament go j Grid I I L Brown l Filament z j Dea Filament 2 i D 5 I o l 1 I gt i 6 Full Length Pin EF F 9 Collector g vdi ly Oz Pin is Cut Off Series 342 343 Instructio
26. sensitive devices more than absolutely necessary and only when wearing a ground strap Do not use an ohmmeter for troubleshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron N D z ix o go a wo 5 o Fl ix o Series 342 343 Instruction Manual 342026 Rev C 27 Chapter 4 Table 4 1 Failure Symptoms Causes and Solutions Symptom Possible Causes Corrective Action The Power LED does not 1 No power to the Controller 1 Check to be sure proper power is illuminate 2 The Controller input power fuse connected to the Controller is blown 2 Replace the fuse with the correct type and value as listed on the rear panel of the Controller The Controller fuse blows when 1 Incorrect power source 1 Check to be sure proper power is the Power is turned ON 2 Incorrect fuse rating connected to the Controller See 3 Defective Controller Table 1 1 2 Replace the fuse with the correct type and value as listed on the rear panel of the Controller 3 Contact Customer Service See Section 4 1 and Section 4 2 The lon Gauge filament does not 1 The lon Gauge cable is not 1 Check to be sure the gauge cable is turn ON when the Gauge connected properly connected to the ion gauge and pushbutton switch is pressed The 2 Open filament in the lon Gauge the Controller display on the Controller reads 3 Defective Controller 2 Test the con
27. tinuity of the lon Gauge see 9 9 9 for approximately 30 Section 4 4 and replace the gauge if seconds and then turns OFF necessary 3 Contact Customer Service See Section 4 1 and Section 4 2 The lon Gauge filament turns ON 1 Chamber pressure is too high to 1 Decrease the pressure in the vacuum when the Gauge pushbutton permit emission The pressure in chamber switch is pressed the display on the gauge is higher than the 2 Test the continuity of the lon Gauge see the Controller reads 9 9 9 for overpressure shutdown level Section 4 4 and replace the gauge if approximately 30 seconds and from the electrometer circuit necessary then turns OFF 2 Defective filament in the ion 3 Contact Customer Service See Section gauge 4 1 and Section 4 2 3 Defective Controller 4 4 lon Gauge Continuity Test If a problem with pressure measurement is traced to the lon Gauge the gauge can be tested with an ohmmeter This test should be performed ONLY while the lon Gauge is exposed to atmospheric pressure and power to the Controller is OFF The continuity test can detect an open filament or shorts between gauge elements but may not detect inaccurate pressure measurement associated with vacuum leaks or adsorbed gases or other materials within the gauge 28 Series 342 343 Instruction Manual 342026 Rev C Service 8 Maintenance A WARNING Removing or replacing the Ion Gauge in a high voltage environment can cau
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