Emulsion Plate Creation Using the Mann 3000
Contents
1. The Mann 3000 will begin printing the emulsion plate When the exposure process is complete the stage will move to the load position and the computer will display a message indicating completion of the exposure 16 Remove the plate holder by loosing the retaining screws and sliding it out in a similar fashion as it was inserted Be certain to lift the fasteners up slightly so to prevent them from catching on the stage a Keith S Darr Rev 2 1 11 3 2008 Be careful to not hit the emulsion plate on the column extending down or you may cause a scratch on the objectives 11 17 Bring the plate holder over to the table and turn it over so that the emulsion plate is facing down Rotate the lock on the back of the plate holder to unlock the plate holder back Carefully remove the emulsion plate from the plate holder a The side facing up does not have any emulsion on it and will not scratch if touched slightly However try to only touch the outer edge of the emulsion plate to minimize the number of particles generated on the plate b Replace the back of the plate holder and lock it in place 18 Bring your plate to the front room to be developed Developing Note NOY oe UD Slightly agitate the bath solutions during the developing process to ensure a constant concentration of the solution Use Teflon tweezers to remove the plate from the developer solution Use PD 86 developer to develop the emulsion plate for 5 min2. 3 Ifthe emulsion plate is to be used to create a Stepper Mask GCA 6300 a Measure the plate dimensions and calculate the error as the difference between the measured dimensions and an ideal plate which would be 127mm b Take 2 5mm error 2 offset c Manually adjust the y coordinate of the stage to offset before powering on the stage drivers 4 Ifthe emulsion plate is to be used to create a Contact Printer Mask Karl Suss a Ensure that the y coordinate of the stage is at 0 0 mm before powering on the stage drivers 4 The Mann 3000 software will prompt the operator with the steps of operation a The first prompt is Enable main power and XYWHA chassis power ONLY Manually move X Y staging to the ORIGIN position Press any key when done 1 il ii iv Keith S Darr Rev 2 1 11 3 2008 The main power is the switch hidden directly below the shelf that the computer monitor and the keyboard sits This switch should be on already if it isn t turn it on Figure 2 The stage should be at 0 0 or 0 2 5 depending on your process however you should verify its position If it is not then manually position the stage by rotating the stage position dials Figure 1 1 The stage position is read on the linear gauges mounted on the right hand side of the stage 2 Fine positioning increments are read on the micrometer dials The XYWHA chassis power is the right most switch on the XYWHA chassis Turn t
3. Rinse the plate in DI water for 1 min Put the plate in fixer PF 95 for 3 min Rinse the plate in DI water for 1 min Rinse the plate with Methanol Place the plate in the slotted Teflon plate holder and let air dry a Alternatively you may blow dry the plate with Nitrogen Completing Operations 1 The lights may be changed back to the yellow lights at this point 2 On the computer Type O to cause the Mann 3000 to move to the origin position This will position the stage for the next user 3 Turn off the flash lamp power supply 4 Disable the X Y H W and A motors and turn off the chassis power for this unit 5 Exit the Pgen3001 software by pressing X 6 Return the emulsion plate box to the yellow cabinet by the front room door 7 Clean up the work space 8 Indicate the number of emulsion plates that were used chemicals changed or any other important information in the logbook and log out 9 If you are finished with the reticle room turn off the outside red light Keith S Darr 12 Rev 2 1 11 3 2008 Appendix Stage power is the switch on the right Figure 2 System power and Stage control Figure 3 Flash Lamp Power Supply Power switch is right most Figure 1 Manually setting stage position Keith S Darr Rev 2 1 11 3 2008 13 Figure 5 Alignment points for the Figure 6 Aligning the plate emulsion plate holder 4 Figure 7 Aligning the plate Figure 8 Tightening the plate holder holder
4. to the stage 1 Keith S Darr Rev 2 1 11 3 2008 4
5. Emulsion Plate Creation Using the Mann 3000 For the Micro Electronics Laboratory At University of Notre Dame Department of Electrical Engineering This user manual is not be removed from the Mask Making Room This includes making copies A downloaded copy can be obtained from the web at the following link http www nd edu ee ndnf or contact Keith Darr for a copy of this manual Purpose The Mann 3000 isa computer controlled lithographic pattern generator used to generate master emulsion plates These patterned emulsion plates are used to create photomasks for use in the photolithography for integrated circuits Reference Documents Procedural documents written by Tatyana Orlova Additional Equipment Required None Materials Required Emulsion coated plate 5 X 5 127 X 127 mm PD 86 Photomask Negative Developer PF 95 Photomask Fixer 3 5 Floppy disk 100 Mega byte Zip disk Protective Equipment Required Safety glasses Latex Gloves Engineering and or Administrative Controls Only authorized users may operate this piece of equipment Training To obtain training on this machine please contact Keith Darr office 221 Cushing phone 1 5497 email kdarr nd edu Problems For problems clarification of procedures or general information pertaining to this machine please contact one of the following personnel Keith Darr 631 5497 kdarr nd edu Mike Thomas 631 7493 Thomas 20 nd edu Mark Richmond 631 6478 Richm
6. Jena 4 14 08 Ireneusz Janik ijanik nd edu Tan 04 30 08 Marya Lieberman mlieberm nd edu Lieberman 05 14 08 Amol Singh Asingh1 nd edu Jena 05 21 08 Lisa Cole Icole5 mail rochester edu Roeder 06 18 08 Xiu Xing xxing nd edu Fay 06 18 08 Joe Bonath jbonath nd edu Bernstien 06 23 08 Kristen Anderson kranders mit edu Bernstien 06 23 08 Andy Carter acarter3 nd edu Bernstein 06 31 08 Connor Griffith grifcj gmail com Porod 07 01 08 Hubert George hgeorge nd edu Snider 07 16 08 Yu chen Chang ychang nd edu Chang 07 25 08 Prasad Sarangapasei psaraoga nd edu Zhu 08 21 08 Yunshan Wang esannywang gmail com Chang 07 25 08 Dan Ho dho nd edu Xhu 09 12 08 Qingling Hang qhang nd edu Jena 10 07 08 Qin Zhang qzhang1 nd edu Seabaugh 10 29 08 Keith S Darr Rev 2 1 11 3 2008 Setup Note Prior to mask creation a plastic mask case for storing the reticle may be obtained from the lab staff 1 Turn on the red light outside of the reticle room to indicate that the room is in use 2 Set up the mask developing chemicals a The baths which are located on the wet bench are used to immerse the mask during the developing process The solution contents are clearly labeled on each container lid Be certain to not interchange the lids Doing so will cause cross contamination of the solutions b Each developing bath should have a solution level of approximately 1 2 1 25 cm c Ifthe solutions in
7. e will be illuminated Contact lab staff Note Do not attempt to move the stages manually by turning the stage micrometers from this point on Doing so may cause damage to the equipment 3 The help menu will appear on the screen a The help menu contains a list of the commands available for use in the Mann3000 program It is able to be redisplayed by pressing H Keith S Darr 8 Rev 2 1 11 3 2008 5 Press the letter O to move the stage from the load position to the origin Once this movement has completed press L to return the stage to the load position Perform this cycle 3 to 5 times a This will cause the lubricant on the Mann 3000 to spread evenly 1 Verify that the stage is moving to the correct position 1 On the right hand side of the computer screen is a readout of the destination xdes or ydes and current xcur or ycur position 2 If there is an error where the stage does not move to the correct location for example the reading on the computer indicates the stage is at 0 0 and the stage is actually at 50 0 or if a limit light is turned on contact lab staff The fuse is likely bad Power down the system change the fuse and restart the procedure if trained b Finish the cycle with the stage in the load position 6 Insert your 3 5 disk into the floppy drive a If you are uncertain of your file name i Type S to cause the program to shell to DOS 1 Press Y to conti
8. his switch on only Note Do not turn on the X Y W H and A switches at this time Figure 2 Once these steps are complete press any key 1 Do Not use the Arrow Keys this will cause an error b On the right side of the software screen ensure that all current positions destinations and velocities read 0 If there is any number other than 0 in this step then the fuse is bad i Turn off the chassis power and replace the fuse Reboot the computer using Cntl Alt Del Restart the procedures c The second prompt instructs the operator to Enable each X Y W H and A motor Enable the flash unit Press any key when done i Switch the X Y H W and A switches to the up position ii The power switch for the flash unit is the right most switch This is a two position switch Make sure to position it completely up The light will turn on Note Verify that the switch on the left hand side AUTO MANUAL is in the auto position iii Once these steps are complete press any key 1 Do not use the Arrow Keys This will cause an error 2 The machine will automatically move the stage to the load position a If you set the origin to be 0 2 5 the stage will move to 100 102 5 b There will be a small error at the load position this is normal The machine will work correctly and will create an accurate emulsion plate Note If the stage reaches a limit condition one of two red lights on the left side the stag
9. n nd edu Chang 08 12 05 Chuanxin Lian clian nd edu Xing 9 16 05 Vlad Protasenleo vprotase nd edu Ken Kuno 9 9 05 David Deen ddeen nd edu Xing 10 18 05 Wentao Luo wluo nd edu Chang 10 24 05 Adams Tong atong nd edu Snider 10 24 05 Siddharth Maheshwari smaheshw nd edu Chang 10 25 05 Qinxin Zhang qzhang nd edu McGiun 10 25 05 Juan Jiang jjiang nd edu A E Miller 10 25 05 Aaron Prager aprager nd edu Snider 10 25 05 Heng Yang hyang nd edu Bernstein 4 18 06 Loukas Tsagalas Itsagala nd edu D A Hill 06 08 06 Chris Seibert cseibert nd edu Hall 8 14 06 Tom Zimmerman Tzimmer2 nd edu Xing 12 11 06 Jia Guo jguo nd edu Liu 12 21 06 Keith S Darr Rev 2 1 11 3 2008 Authorized Users List Name Email Advisor Date Peter Hoffman phoffma2 nd edu Zhu 3 22 07 Zhen Wang Zwang3 nd edu Bohn 4 11 07 Paul Robbins probbins nd edu Berstein 6 25 07 Preshant Deshlahra pdeshlah nd edu Bernstein 6 25 07 Kejia Wang kwang nd edu Jena 07 17 07 Jason Kulick jkulick nd edu Bernstein 08 17 07 Yu Cao ycaol nd edu Jena 09 05 07 Gilad Yossifon yossifon 1 nd edu_ Chang 10 08 07 Xinguong Cheng xcheng nd edu Chang 10 08 07 Sagnik Basuray sbasuray nd edu Chang 10 08 07 Nishant Chetwani cchetwan nd edu Chang 10 08 07 Dane Wheeler dwheeler nd edu Seibaugh 10 23 07 Nan Sun nsun nd edu Ruggiero 12 19 07 Chao Sun csunl nd edu
10. nue li Type a and press Enter iii Type dir and press Enter to display a directory of the A drive iv Record the name of the file that you desire to use v Type exit and press Enter to return to the Mann 3000 program b If you know the name of your file i Type F ii When Filename appears type the path and the name of your file with the dwm extension 1 Make sure you specify a 2 For example Filename a test dwm iii Press Enter 1 At the bottom of the PC screen the Mann 3000 program will return Data file your file name to indicate that the file has been loaded 7 Press E a This will verify the file syntax report potential errors and indicate the number of exposure counts i If there is a number of syntax errors the disc may be bad or you may need to redo the file conversion process Keith S Darr 9 Rev 2 1 11 3 2008 8 If you are making an emulsion plate for use on the GCA 3696 contact mask stepper masks do not require this step a Type lt CTRL gt F i Hold the control button and type F b At the prompt Fiducial Type A B C Type A i This will cause the Mann 3000 to print the necessary alignment marks on the emulsion plate for alignment on the GCA 3696 9 Ifa title is desired a Press T i Select Left ii Choose 2 02 mm high iii Include Imm offset 10 Turn off all lights in the mask making rooms except for
11. ond 7 nd edu In Case of Emergency Please Contact Notre Dame Security at 911 MSDS s can be located in the EE Department office or in Room 244 near the door Keith S Darr 2 Rev 2 1 11 3 2008 Table of Contents Page Contents 4 5 Authorized Users 6 Setup 7 12 Operation 12 Developing 12 Completing Operations 13 15 Appendix Keith S Darr Rev 2 1 11 3 2008 Authorized Users List Name Email Advisor Date Jie Wu jww nd edu Chang 04 29 04 Zach Gagnon zgagnon nd edu Chang 05 27 04 Diana Hou dhou nd edu Chang 05 27 04 Jeffery Bean jbean nd edu Porod 06 3 04 Kai Sun ksun nd edu Merz 07 26 04 Di Liang dliang nd edu Hall 07 26 04 Wei He whe nd edu Lieberman 10 05 04 Lili Ji lji nd edu Porod 10 08 04 Yong Tang ytang nd edu Fay 10 08 04 Niti Goel ngoel nd edu Jena 10 22 04 Ying Cao ycao nd edu Hall 12 14 04 Ning Su nsu nd edu Fay 12 20 04 Jon Valenzuela jvalenz l nd edu Xing 02 23 05 Qing Liu qliu nd edu Bernstein 03 16 05 Ni Man mni nd edu Fay 02 28 05 Zhuowen Sun zsun nd edu Fay 04 11 05 Jie Su jsu nd edu Bernstein 04 14 05 Zengiao Jin zjin nd edu Snider 04 18 05 Sangeetha Swaminathan sangi utk edu Wu 06 15 05 Jon Baeten baetonj ms edu Wu 06 15 05 Bo Gao bgao nd edu Lieberman 06 17 05 Jing Zhou jzhou nd edu Xing 07 19 05 Mike Coogan mcooga
12. refully slide the plate holder into position on the stage under the optical column i Do not let the fasteners drop while positioning the plate holder Doing so may cause damage to the level stage surface Align the plate holder to the stage alignment pins as per the following steps Note There are two pins mounted on the rear of the stage Figure 4 On the edge of the plate holder there are two alignment plates One of the alignment plates is flat and the other has an L shape if viewed from the top of the plate holder down Figure 5 Slide the plate holder in place so that the L plate is against its associated stage pin It should be touching the pin both on its flat side and on its extended side Figure 6 Using the L side s stage pin as a pivot point slightly rotate the plate holder until the flat alignment plate is against the its associated stage pin Figure 7 The stage pins will be touching the plate holder alignment plates at 3 points if the plate holder is correctly aligned 2 points on the L plate and 1 on the flat plate 14 While holding pressure on the plate holder and maintaining the correct alignment position tighten down the fasteners finger tight to attach the plate holder correctly to the Mann 3000 stage Figure 8 15 The plate it ready for printing Type P a If you choose you may type I instead of P to produce a mirror image pattern Doing so will rotate the image about the y axis 180 degrees
13. the baths are older than 3 days they should be discarded and replaced with clean fresh chemicals i Empty developing baths in the wet bench sink 1 Clean fresh chemicals are in the lower right hand side of the reticle room wet bench a If this supply is empty a new bottle may be obtained from the yellow chemical cabinet near the reticle room door b The bottles are dated Use oldest dated bottle Empty bottles or bottles dated greater than one year are to be discarded as per the laboratory safety manual Note The janitor will not empty the trash container located inside of the reticle room If the trash is full it is the responsibility of the lab user to exchange the container with the container located outside of the reticle room ii Replenish each bath at level of approximately 1 2 1 25 cm iii In the logbook record the exchange of solution 3 Retrieve a box of emulsion plates from the yellow cabinet and place it on the table located in the printing room a The supply of emulsion plates is located on the left hand side of the cabinet These containers are dated use the oldest dated container This one will likely have the tape removed from around the lid Keith S Darr 6 Rev 2 1 11 3 2008 Operation 1 If the Mann 3000 PC is off turn on the power to the PC a The system will automatically boot into the pattern generator software 2 If the Mann 3000 PC is ON and at the DOS prompt a Type PGEN and press Enter
14. the red lights 11 Retrieve the plate holder from the cabinet that is to the left of the door 12 Rotate the lock on the back of the plate holder counterclockwise to allow removal of the back of the plate holder a Load the emulsion plate into the plate holder with the emulsion side face down The emulsion will be facing up when mounted when the plate holder is mounted on the Mann3000 s stage Note The emulsion plate s box has a sticker on the front lower part to indicate the side of the plates that have the emulsion chemical Handle the emulsion plate by the edges Make sure not to touch the emulsion plate face as this will cause defects on the emulsion plate i There are three small dots on the inside of the plate holder two on one side and one on another Figure 5 Pick the plate holder up and slightly tilt it so that the emulsion plate is aligned against the two dotted sides of the plate holder Keith S Darr 10 Rev 2 1 11 3 2008 13 Reinstall the back of the plate holder Make sure the plate stays aligned a Apply a slight amount of pressure downward and lock the back of the plate holder in place The plate holder back has spring loaded pins that will apply pressure to the plate when installed The lock should be perpendicular to the frame if properly locked Turn the plate holder over so the emulsion plate is face up and bring it over to the Mann 3000 While the holding the fasteners lifted up slightly ca
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