Veeco Nanoman Atomic Force Microscope
Contents
1. Amplitude 509 my Signal Sum 5 46 W N NANO RESEARCH FACILITY WshingnUniversityinseloui Cantilever Tune TappingMode select Cantilever Tune from the RealTime gt Cantilever Tune pop down menu or click the Cantilever Tune icon i Set the AUTO TUNE parameters H Auto Tune Start frequency 100 000 kHz End frequency 500 000 KHZ 3 2 Target amplitude BOO ri rene _ Peak offset 5 0 Tip FESP OTESPA End Frequency 100 kHz 500 kHz Click on Auto Tune Click on Zero Phase Click on Exit when done A NANO RESEARCH FACILITY Engage Tip TappingMode e First in the Scan Controls panel set the following Initial Scan Size is set to 1m or a small scan size initially X and Y Offsets are set to 0 Scan Angle is set to 0 e Under Feedback Controls panel set the following Set point is set to OV Integral Gain is set to 2 0 Proportional Gain is set to 3 0 Scan Rate is set to 1Hz select RealTime gt Engage or select the Engage icon Real Time Scan Parameter List H Feedback Integral Gain Proportional Gain Amplitude Setpoint Drive Frequency L Drive Amplitude scan Scan Size Aspect Ratio x Offset Y Offset Scan Angle scan Rate Tip Velocity Samples Line Lines Slow Scan Axis L Y Closed Loop Limits L z Limit a Range Other Microscope Mode Tip Bias Control Sample Bias Control Units L Tip Serial Number t Washington University in St Louis SCHOOL OF ENGINEERING2. CN NANO RESEARCH FACILIT Atomic Force Microscope Veeco Nanoman User Manual Basic Operation 4th Edition Aug 2012 NR ANANO RESEARCH FACILITY yaningonUnkesiyinsuiaus SCHOOL OF ENGINEERING amp APPLIED SCIENCE System Startup e If the system is currently ON e To start the NanoScope software double click the NanoScope startup icon on the desktop 6 e From the Menu Bar select File gt Open Workspace e You now can choose the operating mode Choose TappingMode by selecting e Tapping in Air NRF wks e Click on Scan Dual IF THE SYSTEM IS OFF CALL 5 7640 veiw NANO RESEARCH FACILITY 3 Washington University in St Louis SCHOOL OF ENGINEERING amp APPLIED SCIENCE Mounting the Probe e Select the appropriate probe e TappingMode Si crystal probe OTESPA P or FESP e Mount the probe in the correct holder e Select an In air probe holder e Place the holder in a docking station Docking Station of the cantilever installation fixture and secure the probe in the groove with the spring clip NANO RESEARCH FACILITY yanneoathbes mss Loading Probe to AFM Head Fully tighten the dovetail knob rotate clockwise Lift the AFM head out of the dovetail groove Place the tip holder completely onto the four pins on the base Replace the AFM head into the dovetail grove Lock the AFM head by releasing the dovetail knob rotate counter clockwise _ NANO RESEARCH FACILITY
3. Locate Tip d CAUTION If Locate Tip is not accomplished before Focus Surface there is a A danger of crashing the tip during Engage e Verify that a tip is installed in the probe tip holder then select Tools gt Stage gt Locate Tip or use the icon e he screen will display a caution indicating that the microscope objective is in motion SCHOOL OF ENGINEERING amp APPLIED SCIENCE NNANO RESEARCH FACILITY yanneonUatesiyinstiaus Locate Tip Continued Adjust illumination to 100 Zoom Out with the arrow Move the tip until it comes focus using the Optics arrows You can change the focus speed tne Optics Sa Humination ocus the tip using the trackball or tratag Zoomin f NUL WA mpty Ctrl W it is necessary recenter the tip after Zoom Out D P K to finish locate tip Move the tip to the center of the crosshairs with the X Y knobs to the left of the optics Press OK NANO RESEARCH FACILITY Aligning the Laser to the Cantilever e Set illumination to 0 Place a piece of white paper below the AFM head on the chuck e Use the X Y laser control knobs located on top of the AFM head to move the laser Spor inside the illumination spot Turn the right rear laser control knob until gea the spot begins to disappear 1 9 gt Turn the front left laser control Knob until the beam crosses the cantilever and a shadow appears in over the laser spot below 2 Turn the rear
4. amp APPLIED SCIENCE FEX 2 OO 3 000 2 mw 302 032 KHz 141 9 mi 1 00 pm 1 00 2 000 nm 0 000 nm O00 9 0 996 Hz 1 99 umis Al2 Al Enabled Ott 8 079 um 11 0 urn Tapping Ground Ground Metric NN NANO RESEARCH FACILITY uupemnahesiyinstiaus Scanning e To ensure we have true engagement Increase the tip surface interaction by decreasing the value of Amplitude Setpoint Make sure that the_ race and Retrace lines overlap each other y Data type Height Channel E Image capture times depend primarily on the number of data points captured and on scan speed N NANO RESEARCH FACILITY WshingonUniversiyinstouk SCHOOL OF ENGINEERING amp APPLIED SCIENCE Optimizing Scanning e To ensure we have the best image we need to optimize settings such that trace and retrace overlap as shown Optimal Scan Signal 2 Range 30 00 ne diu 24 99 msrdiv e First Step Increase the tip surface interaction by decreasing the value of Amplitude Setpoint N NANO RESEARCH FACILITY WstingonUniverstyinstlous SCHOOL OF ENGINEERING amp APPLIED SCIENCE Optimizing Scanning e Additional adjustments may be made e Second Step Scan Rate may be too high For publications use slower scan rates e Third Step Adjust Integral and Proportional Gain If Integral gain is too low or too high you will have the following signatures in the signal Integral
5. highest point by clicking the Withdraw icon several times e Very carefully turn the chuck to move the sample under the AFM head NANO RESEARCH FACILITY Focus Surface CAUTION Since the command Focus Surface moves the scanner vertically be careful when making this adjustment to ensure that the tip does not hit the sample surface e Select Tools gt Stage gt Focus Surface or click the Focus Surface icon e Before continuing check the clearance between the base of the AFM head and the sample e To focus on the surface move the AFM head down 2mm above the sample by using the Z Motor arrows e IMPORTANT Use speed set to S _ NANO RESEARCH FACILITY waist Focus Surface Continued e Inthe Focus On box choose either Surface or Tip Reflection e Ifthe sample is very flat or reflective choose Tip Reflection e Note You may need to adjust illumination and zoom to clearly see the probe NANO RESEARCH FACILITY WesietonUniversity inStLouts SCHOOL OF ENGINEERING amp APPLIED SCIENCE ene Visible Laser Alignment w CCD Adjust illumination to lt 25 e Laser should now be visible in video screen works best with reflective samples e Adjust laser alignment knobs moving laser directly over tip i e Pay attention to both location of laser ea 5 signal Sum value e Adjust Vertical Deflections back OV e Increase illumination to 100 Video ertical Deflection 0 03
6. the dovetail groove e Remove the tip holder pulling it straight off the AFM head NANO RESEARCH FACILITY Shutting Down Continued e Replace the AFM head in the dovetail groove e Tighten the AFM head with the dovetail Knob e Quit the software without saving changes to the workspace file
7. Gain Too High Integral Gain Too Low oe SCH _ NANO RESEARCH FACILITY Capture Images e Create a file name under RealTime gt Capture Filename e Click on the Capture icon e Check the capture status in the bar at the lower right corner of the screen e Capture Options e To capture the image in the middle of a scan RealTime gt Capture Now or fe e Capture the previously scanned image RealTime gt Capture Before or Ctrl B e Cancel Capture x ey Drift OP Analyze Images GH meee rir yey Tk Wie p IVE D TV itl CLD ani l N OF ENGINEERING amp ae NANO RESEARCH FACILITY Once an image is captured double click on it in the browser Click the height image Channel 1 to select it Remove all tilt and scan line errata from the image by selecting Analyze gt Flatten e Set the Flatten Order parameter in the input box to 1 e GO to the display w window and draw a stop band box over Execute e Repeat for Ch 2 NNANO RESEARCH FACILITY yaningonUntesiy nouns SCHOOL OF ENGINEERING amp APPLIED SCIENCE Shutting Down Click on the Withdraw icon Do this several more times or use the UP arrow to make sure there is enough clearance between the bottom of the head and the sample Remove the sample from the chuck Remove the tip holder from the head e Loosen the AFM head with the dovetail knob Lift the AFM head out of
8. right laser control Knob until the laser crosses the tid end and appears on the surface below back it up until the laser spot just disappears from the surface below 3 o e Verify Signal Sum is 4 V 6 V NSF 43 Washington University in St Louis SCHOOL OF ENGINEERING amp APPLIED SCIENCE WN NANO RESEARCH FACILITY yeaamgonthheriyinstious Adjust the Photodetector e Use the two photodetector adjustment knobs on the left side of the AFM head to adjust the laser spot to the center of the photodetector e Center reflected laser light in the viewing window on the AFM head e Adjust the Vertical Deflection to 0 V SCHOOL OF _ NANO RESEARCH FACILITY waunsen Mounting the Sample e There are two ways to mount a sample by e vacuum e magnetic stage e Mounting on the chuck by vacuum e Take out screws e Place sample over holes e Turn vacuum ON g e Mounting on a magnetic stage e Place the magnetic stage on the chuck e Mount the sample on the puck e Set the puck on top of the magnetic stage NNIN Nanoscale Science Engineering amp Technolog NANO RESEARCH FACILITY yanneonthnbesomsious Loading the Sample Under AFM Head sample stage and the liquid cell tip holder CAUTION A larger amount of clearance is required for both the magnetic e Ensure that the clearance between the bottom of the AFM head and sample is large e Move the Z position of the AFM head to its
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