MFA User Manual - Newport Corporation
Contents
1. CAUTION End of Run are active signals and should not be connected to any other source 5 6 Feedback Signal Position 1 2 3 4 Encoder Phase A 0 Encoder PhaseA sere Encoder Direction 4 doana PhaseB _ QO 00 PS Encoder Phase B Direction lt Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport User Stage Encoder Phase A Pin 19 I T eS Encoder Phase A j Pin 23 i gt gt Encoder Phase B_ 4 Pin 20 7 gt M T LE Encoder Phase B Pin 24 i gt Output Signals T f p 5 V 5 Encoders Wie i 150 mA max amp Sensors i ov Power Supply Encoder are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 D Newport Experience Solutions EDH0199En2031 09 15 8 MFA Series Miniature Linear Stages 5 7 Pinouts The SUB D25 connections for MFA PPD and MFA CC stages are given in the following table MFA PPD MFA CC UE16PP UE18CC R2 1 Phase 1 1 N2. D Newport Eaperience Solitons vii EDH0199En2031 09 15 MFA Series Miniature Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment Only the MFA CCV6 stage is compatible and can be used in a vacuum environment up to 10 hPa CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year gt Newport EDH0199En2031 09 15 viii Experience Solutio
3. Miniature Linear Stages BB FT ANS Compliant A USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed MFA Series Miniature Linear Stages Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0199En2031 09 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified load Carriage spee
4. Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
5. finitions saisies issuneinderissnnitieisin Gedo OE EE EE ET 3 3 2 Mechanical Specifications ss 4 3 3 Load Specification Definitions s 5 sssssissssssstesneenensisneenriv niss 4 3 4 Load Characteristics and Stiffness 0 0 ecccseescecneceseceseeeneeeneeeneeenes 5 DD LAGE WEISS 26550552202 tri i ENEN EN 5 40 DV eme cd non 6 4 1 DC Motor Drive Version ssssisssssesnnesnemenenenernemeneitenenereenes 6 42 Stepper Drive Version ressentent 6 D MOTO 250 do 7 5 1 UE16PP Motor Characteristics ccccccecssessesssescessecsceeeeeseeseeesseseeeeeees 7 5 2 Command Signals for the Stepper Motor 7 5 3 UE18CC R2 Motor Characteristics cccccceccsescessesceeceesseseeeseeseeeeeees T 5 4 Command Signals for the DC Motor cceccsseesesssesceeeeesecseeeseeeeeeeenes 7 5 5 Sensor Posion E anise EEEN 8 5 6 Feedback Signal POSITION serenererereneenenna nenn nn dccseevessenes 8 5 7 PINOUTS 4 en AR minerai 9 6 0 Connection to Newport Controllers 10 6 1 Warnings on Controllers sr 10 6 2 Connections dicen aiaiediananiiinniania ainsi 11 E e o R E A concent EAE E A A EE 11 D Newport Experience Solutions iii EDH0199En2031 09 15 MFA Series Miniature Linear Stages EDH0199En2031 09 15 7 0 Connection to Non Newport Electronics 12 Tl COMMGCE ONS see aE NE EAE E NEETER 12 7 2 MFA PPD and MFA CC Stages cccccscessssssesesscsssseseescseesescsscsesses
6. y eee Eee oe 142 79 se 1 77 36 20 APE X a Sa A 2 HOLES C BORED 1 21 1 19 FOR 4 40 M3 SCREW 30 65 20 TE GHOLES 924 6 lt 217 55 gt 9 2 M MFA TP Top Plates 4 HOLES C BORED lt 6 HOLES 8 32 M4 THD ON 1 42x 79 36 x 20 FOR 4 40 M3 SCREW i gt a7 p 05 p 12862 Y_ Ce 9 DE ie lt ey lt 248 63 gt 9 3 MFA BP Base Plate 4 HOLES C BORED 4 HOLES 9 26 7 5 24 FOR 4 40 M3 SCREW 1 ON SOR 79 20 i 6 ii 2 98 x 1 0 75 8 x 25 4 io il Sl 1 42 79 9 19 1 97 36 20 20 50 o y on 07 O P i 1 42 8 HOLES M3 THD lt 36 lt 3 50 89 gt GO Newport 15 EDH0199En2031 09 15 Experience Solutions MFA Series Miniature Linear Stages 10 0 Maintenance 10 1 10 2 10 3 EDH0199En2031 09 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The MFA stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The MFA stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your MFA stage to Newport s
7. After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your MFA stage to Newport once a year for recalibration to its original specifications D Newport 1 6 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 1 T EDH0199En2031 09 15 Newport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave
8. Ground 16 r Green Ground 13 Ly Blue Reserved 1 19 n Purple r X Encoder Phase A 23 i i Purple l 1 Encoder Phase A 20 7 Black Encoder Phase B A4 Black Encoder Phase B 15 _ N C 25 N C 17 1 Pink i End of Run 2 18 Lo Grey End of Run 2 21 Brown m X 5 V Encoder 22 a Green Ground Connector Connector Cp Cap 1 Pin 13 of Newport Sub D25M is reserved for internal logic for Newport controller 2 Open collector type with a 5 6 V protective Zener diode For connection to non Newport electronics pin 17 and 18 End of Runs must be connected to 5 V with a pull up resistor For some non Newport controllers the 5 V output signal may be pulled up internally Newport Stage Feedback Signal End of Run ln max 16 mA Vmax 56V ER Pin 17 Pin 18 R Pull Up Resistor 5V Position When a MFA stage is used with non Newport controllers using the SUD D25M connector provided pin 13 must be connected to 5 V with a pull up resistor Newport Stage SUB D25M Connector Reserved EEPROM Enable y lin Max 10 MA V max 30 V Pin 13 R Pull Up Resistor 5V Encoder are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to
9. Stages 6 2 Connection On each stage is represented a label which indicates its name andits serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables MFA PP MFA PPD and MFA CC are delivered equipped with a 3 meter cable the MFA CCV6 stage is delivered with a 1 5 meter cable These cables are equipped with a SUB D25M connector so they can be directly connected to our controllers drivers lt oisconnecreo gt LOCKING gt KNOBS EE 9 24 STAGE CABLE CONNECTOR SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING m STATIC CABLE z 94 24 CABLE IN MOTION 22 76 70 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk D Newport Experience Solutions 1 1 EDH0
10. information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user gt Newport EDH0199En2031 09 15 vi Experience Solutions MFA Series Miniature Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconn
11. use are 26LS32 or MC3486 13 EDH0199En2031 09 15 MFA Series Miniature Linear Stages 7 5 MFA PP Stage WARNING The MFA PP stage is equipped with a mini DIN9 non standard connector and must only be used with our Newport NSC200 controller driver NSC200 Single Axis Low Power Motion Controller Driver e e Dimensions MODEL SHOWN MFA PP DIMENSIONS IN INCHES AND MILLIMETERS MINI DIN9 CONNECTOR 4 HOLES C BORED 79 4 HOLES M2 THD T FOR 4 40 M3 SCREW Fe DEPTH 12 3 MFA PPD amp MFA CC 4 y SUB D25M CONNECTOR 142 79 i fb 36 20 YA 1 42 6 HOLES M3 THD I 36 I DEPTH 20 5 87 4 C2 B lt 98 gt gt 22 Le 1 89 48 gt 25 y CABLE LENGTH 9 8 FT 3 M 19 Y po w ot N 39 10 A A Ng 142 lt lt i Ba 5 26 133 5 177 2 HOLES M3 THD RE 45 DEPTH 20 5 D Newport Experience Solutions EDH0199En2031 09 15 14 Miniature Linear Stages MFA Series 9 0 Accessories NOTE These plates are not included with MFA stages and must be ordered separately 9 1 MFA BK Plate The MFA BK top plate is used for XZ and XYZ assemblies with MFA stages 38 31 4 HOLES C BORED 9 65 gt lt gt 8 7 FOR M2 SCREW EE 24 6
12. 199En2031 09 15 MFA Series Miniature Linear Stages 7 0 Connection to Non Newport Electronics 7 1 7 2 EDH0199En2031 09 15 Connections WARNING Newport is not responsible for malfunction or damage to a MFA stage when it is used with non Newport controllers WARNING Newport guarantees CK compliance of the MFA stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a MFA stage is used with non Newport controllers MFA PPD and MFA CC Stages SUB D25M Connection Connection Connector UE16PP UE18CC R2 9 oan 1 N C N C 10 i 7 N C N C 11 N C N C 12 a oe 2 N C N C 1 Orange 1 Phase 1 N C 2 1 1 N C N C 3 i Green t 1 Phase 1 N C 4 ar T N C N C Be Black 1 Phase 2 Motor 6 Black 1 N C Motor 7 ae Purple Le 1 Phase 2 Motor 8 Purple 1 N C Motor 14 TS Ground Ground 16 White Ground Ground 13 1 Blue Reserved Reserved 19 Yellow 1 N C Encoder Phase A 23 l Yellow 1 N C Encoder Phase A 20 i Pink N C Encoder Phase B 24 _ Pink N C Encoder Phase B 15 ii Li 1 N C N C 25 1 N C N C 175 Red i End of Run End of Run 2 18 Lo Grey End of Run End of Run 2 21 Brown 1 5V 5 V Encod
13. 5 or 0 75 On Axis Accuracy um 6 or 3 aximum Speed mm s 0 3 MFA PP 2 5 1 0 MFA PPD Pitch rad 200 or 100 Yaw urad 100 or 50 TBF 10 000 h at a 1 kg load with a 20 duty cycle 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 2 After backlash compensation 3 To obtain arcsec units divide urad value by 4 8 NOTE For the MFA CCV6 vacuum compatible stage to 10 hPa the max speed and load capacity have to be divided by two CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D a D Cantilever distance a Construction parameter D Newport 4 Experience Solutions MFA Series Miniature Linear Stages 3 4 Load Characteristics and Stiffness Cz Normal centered load capacity N 50 Cx Cx Axial load capacity N 10 Kax Complia
14. C 2 N C 2 N C 3 Phase 1 3 N C 4 N C 4 N C 5 Phase 2 5 Motor 6 N C 6 Motor 7 Phase 2 7 Motor 8 N C 8 Motor 9 N C 9 N C ulo 1 10 N C 10 N C 0 11 N C 11 N C co 12 N C 12 N C 13 Reserved 13 Reserved O 14 Ground 14 Ground C 15 N C 15 N C 25 a i 16 Ground 16 Ground 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 N C 19 Encoder Phase A 20 N C 20 Encoder Phase B 21 5V 21 Encoder Power 5 V 22 Ground 22 Ground 23 N C 23 Encoder Phase A 24 N C 24 Encoder Phase B 25 N C 25 N C D Pin 13 of SUB D25M is reserved for internal logic for Newport controller The mini DIN9 connections for MFA PP stages are given in the following table MFA PP UE16PP End of Run Phase la 5V Phase 2b N C Phase 2a Phase 1b Ground End of Run COIN HU A D D mm D Newport Experience Solutions 9 EDH0199En2031 09 15 MFA Series Miniature Linear Stages 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord o
15. FA PP 1 43 Feedback MFA CC Motor mounted rotary encoder 2 048 cts rev MFA PP None Limit Switches Optical switches Origin Uses motor side limit for homing typically lt 5 mm repeatability Cable Length MFA PP MFA PPD amp MFA CC 3 m MFA CCV6 1 5 m NOTE RoHS This product complies with the RoHS directive Restriction of Hazardous Substances Compliant gt Newport EDH0199En2031 09 1 5 2 Experience Solutions MFA Series Miniature Linear Stages EW Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Rever
16. FA PPD 0 00757 i UE16 D Micro step driving QD Newport EDH0199En2031 09 15 6 Experience Solutions MFA Series Miniature Linear Stages EW Motor 5 1 UE16PP Motor Characteristics Motor Angle by Step RMS Current per Resistance Inductance Newport C Phase A Q mH Utilization UE16PP 15 0 25 12 5 5 5 Mini step 5 2 Command Signals for the Stepper Motor Phase 1 eis 3 Direction Phase 2 QO 00 PX Direction lt Motion gt Direction 5 3 UE18CC R2 Motor Characteristics Moto Nominal Max RMS Max Peak Resistance Inductance r Voltage V Current A Current A Q mH UE18CC R2 24 0 15 0 21 54 6 1 19 5 4 Command Signals for the DC Motor Motor v en Motor v Motor v pO Displacement Direction Direction Displacement Motor v 90 Oo CE oo o Direction o oo oeo oO OC In the above drawings When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage D Newport Experience Solutions 7 EDH0199En2031 09 15 MFA Series Miniature Linear Stages 5 5 Sensor Position m Home Position i EE Actuator Travel Range Displacement gt Direction End of Run are 5 V open collector type
17. d higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions MFA Series Miniature Linear Stages Table of Contents Warranty line a nee as nasa a E E etant ah tants stades ii EC Declaration Of CONOMIE En ANR eee v D finitions and Symbols i sicssceiiesies montienitistirmernstissnernrneleisteententiiennnee vi WAPI GS sise ctecssuecs sa covestetscaeugashdcensdesb evede 4 duecuatectilentead eee ere ea tee S vii CAUTIONS session vi catseuv set sduver oastevveaevecveaaeiveey vente nlsdenidenens viii 1 0 Introduction 1 2 0 Description ee eee ne enn nT ene ec RENT eter 2 2 1 Design Details n aE inane 2 3 0 Characterislics suimmirens 3 Sil D
18. ect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit
19. er 22 Ti White S Ground Ground Connector i Connector Connector Cap Cap Cap 1 Pin 13 of Newport Sub D25M is reserved for internal logic for Newport controller 2 Open collector type with a 5 6 V protective Zener diode For connection to non Newport electronics To enable End of Run when a MFA stage is pin 17 and 18 End of Runs must be used with non Newport controllers using the connected to 5 V with a pull up resistor For Sub D25M connector provided pin 13 must some non Newport controllers the 5 V be connected to 5 V with a pull up resistor output signal may be pulled up internally ex 4 99 kQ Reserved _ End of Run EEPROM Enable Newport Stage ln max 16 mA Newport Stage ln max 10 mA l V max 5 6 V SUB D25M Connector V max 30 V Pin 17 Pin 18 Pin 13 R Pull Up Resistor Pull Up Resistor 5V 5V D Newport 1 2 Experience Solutions MFA Series Miniature Linear Stages gt Newport Experience Solutions 7 3 7 4 MFA CCV6 Stage SUB D25M Connection Connector UE18CC R2 gs an a 2 N C 10 m N C 11 i 1 N C D i gt NC 1 14 a gt N C 2 1 N C 3 1 N C 4 N C Be White Motor 6 o White 1 Motor 7 1 Orange L Motor 8 t Orange 1 Motor 14
20. eseeseees 12 Ted MFACCVO SUAS Enearena eeur aa ean enea e eae AE AAEE E AENEASE IERE 13 A Feedback Signal POSITION 5 4 iiaii aie 13 hed MEA PP StaG verse secsecisiestaciessiccaees tee N dec eane teen ORGNR 14 8 0 Dimensions 14 9 0 ACCeSSOrIieS 15 9 1 MFABK Plat AE E ere date OEA 15 9 2 M MFA TP Top PRES na au 15 9 3 MFA BP Base Plate iisssiccsaesisseccssatvasvacsediecdavssvdssnesesaasesvasiasvartedsviessaeigeacates 15 10 0 Maintenance oo cccccsccssscscssscscssscsessscssssseseeses 16 10I Maintenance din intel tienne te niet ne mentees 16 10 2 REP air stimule disent sin 16 LOSS Cali ATIOM M ntm ns enmeseihe sde Sounded midi decedent 16 DOLVICE POM RE TR TR 17 D Newport iv Experience Solutions MFA Series Miniature Linear Stages EC Declaration of Conformity S VADA DADA PSO Go ONG fe Ie 4 NS S N S Se amp as K DAS ie OND a DAS Se OAS Ie ONG x Nie XXe ENS gt Newport Experience Solutions ASSO PSOPSOPSO ST MEA Series rm EC Declaration of Conformity following Annex IT 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE Hereby declares that the machinery e Description MFA e Function Miniature Linear Stages Models MFA CC CCV6 PP PPD the technical file of which
21. nce in roll urad Nm 60 Kay Compliance in pitch urad Nm 10 Q Off center load N Q lt Cz 1 D 20 Where D Cantilever distance mm NOTE For the MFA CCV6 vacuum compatible stage to 10 hPa the max speed and load capacity have to be divided by two 3 5 Stage Weights The weight indicated is the average value for stages with their cable installed Weight Ib kg MFA 1 3 0 6 The weight variation between drive units is not very significant MFA CCV6 stage D Newport Experience Solutions 5 EDH0199En2031 09 15 MFA Series Miniature Linear Stages 4 0 Drive 4 1 DC Motor Drive Version One DC motor driven configuration is available MFA CC DC Motor Performance Specifications Resolution Speed Moto r um mm s MFA CC 0 0174 2 5 UE18CC R2 NOTE For the MFA CCV6 vacuum compatible stage to 10 hPa the max speed and load capacity have to be divided by two 4 2 Stepper Drive Version Stepper motor driven stages are offered in one half step drive version MFA PP amp MFA PPD Micro Step Drive This is the drive for stepper or pulse driven motors transmitted by the electronic unit which entails a theoretical movement of the motor by one fraction of a full step For these translation stages the micro step is equivalent to 1 64 of the full step Stepper Motor Performance Specifications Resolution Speed Mot otor um mm s MFA PP 0 3 a E16PP M
22. ns MFA Series Miniature Linear Stages Miniature Linear Stages MFA Series 1 0 Introduction This manual provides operating instructions for the stage that you have purchased in the MFA Series e MFA CC e MFA PP e MFA CCV6 e MFA PPD D REMARK Vacuum compatible stage to 10 hPa In this case the max speed and load capacity have to be divided by two MFA CC miniature linear stage RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the MFA stage MFA stages in an XYZ configuration gt Newport Experience Solutions 1 EDH0199En2031 09 15 MFA Series Miniature Linear Stages 20 Description Designed for space limited applications and compact multi axis assemblies MFA Series linear stages supply very high resolution single axis translation in a low cost motorized package Typical applications for this stage are fiber optic alignment laser diode research bio medical applications and inspection systems MFA linear stages are available in two versions The MFA CC with a DC motor features an integrated gear box and a motor mounted high resolution 2 048 cts rev rotary encoder The high resolution position feedback and low friction mechanical design ensures ultra smooth motion with 100 nm sensitivity The DC motor supplies an optimized output torque that permits the use of a lower ratio step down gear allowing for faster motion with higher
23. r any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0199En2031 09 15 10 Experience Solutions MFA Series Miniature Linear
24. reliability and lower backlash Hence the MFA CC is the recommended choice for applications that require small incremental motion with high dynamic speed range and good repeatability The MFA PP and MFA PPD stepper motor versions are more economical solutions for less demanding applications Travel limit switches prevent bearing damage from accidental over travel MFA stages feature an all steel construction that provides a higher stiffness to weight ratio and lower thermal expansion compared to aluminum designs The result is superior performance in a smaller footprint The smooth motion of the MFA linear stages is further accentuated by Newport s proprietary double row linear ball bearing design with bearing ways that are directly machined into the structural frame of the stage Compared to other solutions that use commercial bearings MFA linear stages have a higher load capacity and stiffness with low pitch and yaw errors Another benefit of Newport s integrated bearing ways is the availability of 4 widely spaced mounting holes for base mounting and XY assemblies This provides better stress distribution and allows for more rigid multi axis combinations than other designs that provide only line contact with 2 mounting holes 2 1 Design Details Base Material Stainless Steel Bearings Double row linear ball bearings Drive Mechanism Backlash compensated leadscrew Drive Screw Pitch 0 5 mm Reduction Gear MFA CC 1 14 M
25. sal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com D Newport Experience Solutions 3 EDH0199En2031 09 15 MFA Series Miniature Linear Stages EDH0199En2031 09 15 3 2 3 3 Mechanical Specifications MFA PP and MFA PPD MFA CC Travel Range lin mm 1 25 inimum Incremental Motion um 0 1 0 1 Uni directional Repeatability um 0 5 0 3 Bi directional Repeatability um 1 5 or 0 75 1
26. was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director v EDH0199En2031 09 15 MFA Series Miniature Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important
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