User Manual PZ248E - Physik Instrumente
Contents
1. 1 0 0 11 3 Product Description P J 3 4 Scope of Delivery Order Number items Stage according to order p 9 Transport lock consisting of Support frame o 4 plastic screws 000036450 M4 screw set for protective earth consisting of 1 M4xg8 flat head screw with cross recess ISO 7045 2 safety washers 2flat washers P500T0002 Technical Note with instructions on unpacking and packing P 5xx stages PZ240EK Short instructions for piezo positioning systems Only for P 56x 3CL models E71000211 Adapter cable Sub D Mix 25W3 to LEMO 1 m for connection to E 500 systems 12 Version 1 0 0 PZ248E P 56x Nanopositioners 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 5 Recommended Piezo Controllers To operate a P 56x you need a piezo controller The device is selected depending on the type of application The table below lists suitable controllers X suitable Controller E 500 modular piezo controller with E 509 C3A control module for Capacitive sensors and E 503 3 channel amplifier Optional E 517 interface and display module P 56x 3CD P 56x 3DD E 500 modular piezo controller with E 509 C3A control module for Capacitive sensors and 3x E 505 1 channel high performance amplifier Optional E 517 interface and display module E 712 digital piezo controller modular system for up to 6 axes E 725 digital piezo controller for up to 3 axes 3 E 761 digital piezo controller for up to 3 axes PCI2. 2 Maximum Ratings P 56x stages are designed for the following operating parameters Maximum Operating Maximum Power Operating Voltage Frequency Unloaded Consumption P 561 3CD 20 to 120 V 63 Hz in X and Y 15W in X and Y P 561 3CL 126 Hz in Z 30 W in Z P 561 3DD 20 to 120 V 306 Hz inXandY 34W in X and Y P 562 3CD 20 to 120 V 53 Hz in X and Y 21 W inX and Y P 563 3CD 20 to 120 V 46 Hz in X and Y 21 W in X and Y P 563 3CL 83 Hz in Z 43 W in Z 40 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P 56x Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 20 C to 80 C Storage temperature 20 C to 80 C Transport temperature 25 C to 85 C Overvoltage category Protection class Degree of pollution Degree of protection according to IEC 60529 P 56x Nanopositioners PZ248E Version 1 0 0 41 10 Technical Data pP I 10 3 Dimensions 42 Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 10 P
3. card 3 O O m x a 3 6 Technical Features 3 6 1 PICMA Piezo Actuators P 56x stages are driven by PICMA piezo actuators PICMA actuators have all ceramic insulation and are therefore far Superior to conventional actuators in respect to performance and lifetime The monolithic piezoceramic block is protected against humidity and failure due to increased leakage current by a ceramic insulation layer In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating parts or friction The piezo actuators are therefore backlash maintenance and wear free P 56x Nanopositioners PZ248E Version 1 0 0 13 3 Product Description P J 3 6 2 Flexure Guides P 56x stages have flexure guides flexures for frictionless motion and high guiding accuracies A flexure guide is an element which is free from static and sliding friction It is based on the elastic deformation bending of a solid e g steel and does not have any rolling or sliding parts Flexure elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any lubricants 3 6 3 Capacitive Sensors Capacitive sensors measure the position directly on the moving platform direct metrology and work without contact Neither friction nor hysteresis interfere
4. controller manual or contact our customer service department p 37 Observe the assignment of the axes when connecting the stage to the controller This assignment is indicated by labels on the devices Immediately switch off the servo mode of the corresponding stage axes Check the settings of the servo control parameters on the controller Adjust the servo control parameters on the controller according to the load change In open loop operation only operate the stage with a frequency that is below the resonant frequency If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 37 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website P 56x Nanopositioners PZ248E Version 1 0 0 37 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In th
5. manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the P 56x after having read and understood this user manual Personnel qualification The P 56x may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel P 56x Nanopositioners PZ248E Version 1 0 0 7 PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model OV EI VIEW insista ini radar 9 PLOQUEL VICW nens nee endeten iaa E 10 Prode LAD SMG asteriscos tao E 11 So DEINER PAPAS nn e 12 Recommended Piezo Controllers ccccecceccecceeceeceececeeeneeceeneeceeneeeeeceeeeeeeeeneseeeneeaeeaes 13 Technical F SAU SS iniciado 13 3 1 Model Overview The following standard versions of the P 56x are available GB VE P 561 3CD PlMars XYZ nanopositioning system with large travel range 100 um x 100 um x 100 um capacitive sensors parallel metrology Sub D connector s P 561 3CL PlMars XYZ nanopositioning system with large travel range 100 um x 100 um x 100 um capacitive sensors parallel metrology LEMO connector s P 561 3DD PlMars high dynamics XYZ nanopositioning system 45 um x 45 um x 15 um capacitive sensors parallel metrology Sub D connector s direct drive P 562 3CD PlMars XYZ nanopositioning system with large travel range 200 um x 200 umx 200 um capacitive sens
6. the protective earth conducior This hole is located next to the cable exit and is marked with the protective earth conductor symbol see Dimensions p 42 Prerequisite v You have read and understood the General Notes on Installation p 17 v The stage is not connected to the electronics Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Supplied M4 protective earth screw set p 12 for connecting the protective earth conductor Suitable screwdriver P 56x Nanopositioners PZ248E Version 1 0 0 19 5 Installation pP I Figure 5 Mounting of the protective earth conductor profile view 1 Base body of the P 56x 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 56x to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the P 56x as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 20 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Mounting the P 56x NOTICE Warping of the P 56x due to mou
7. 10 25 50 140 140 250 120 120 215 110 110 170 100 100 50 30 30 30 50 Version 1 0 0 P 561 3DD 45 x 45 x 15 direct drive Capacitive 58 x 58 x 18 0 1 0 2 0 01 2 2 2 3 3 3 10 20 920 920 1050 860 860 950 500 500 470 200 200 50 30 30 30 50 Unit um um Hz Hz Tolerance 20 20 20 max max max 39 10 Technical Data P I P 561 3CD P 562 3CD P 563 3CD P 561 3DD Unit Tolerance P 561 3CL P 562 3CL P 563 3CL Drive properties Piezo ceramic PICMA PICMA PICMA PICMA P 885 P 885 P 885 P 885 in Z P 888 in XY Electrical capacitance in 92 52 7 41 7 4 7 41 7 4 38 38 6 UF 20 EN Get 10 4 14 8 14 8 Dynamic operating current 6 5 6 5 13 4 6 4 6 Sek Os 106 106 yuA 20 coefficient DOCC in 9 25 6 1 50 Hz x X Y Z um Miscellaneous Operating temperature 20 to 80 20 to 80 20 to 80 20 to 80 C range Material Aluminum Aluminum Aluminum Aluminum Mass 1 45 1 45 1 45 1 55 kg 5 Sensor voltage CD version Sub D Special 1 5 m cable connection CL version LEMO The resolution of Pl piezo nanopositioning systems is not limited by friction or stiction Value given is noise equivalent motion with E 725 E 712 controller With digital controller Non linearity of direct drive stages measured with analog controllers is up to 0 1 typ Super invar and titanium versions available Ask about custom designs 10 1
8. 56x 3CD and P 56x 3CL Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS Figure 11 P 561 3DD 10 Technical Data 10 4 Torque for Stainless Steel Screws A2 70 4 Nm 2 5 Nm 1 5 Nm 0 3 Nm 0 15 Nm 0 06 Nm P 56x Nanopositioners PZ248E Version 1 0 0 43 10 Technical Data P I 10 5 Pin Assignment 44 Sub D Mix connector 25W3 Only for P 56x 3CD 3DD 11 06000000000 12 22 A1 inner conductor Output Probe sensor signal channel 2 nonmoving part of the capacitive sensor A1 outer conductor GND Shield of Probe sensor signal channel 2 A2 inner conductor Output Probe sensor signal channel 3 nonmoving part of the capacitive sensor A2 outer conductor GND Shield of Probe sensor signal channel 3 A3 inner conductor Output Probe sensor signal channel 1 nonmoving part of the capacitive sensor A3 outer conductor GND Shield of Probe sensor signal channel 1 Input Target sensor signal channel 2 movable part of the capacitive sensor Input Target sensor signal channel 3 movable part of the capacitive sensor GND Ground of ID chip Bidirectional Data line for ID chip Fe FO Fe FO Fe Piezo voltage channel 3 Piezo voltage channel 2 Piezo voltage channel 1 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Target sensor signal channel 1 movable part of the capacitive sensor Shield of Targ
9. CMA Piezo Actuators ooccccccccccncoconcnnoconcnnnonononnononcnnononnnnnonaneness 13 3 6 2 Elx QUIES een ee 14 3 6 3 Capacitive SENSOSMS ccccccceeececcsccseeceescceseeeeesscaseeeeesccuseeeeessceeeeees 14 3 6 4 ID Chip Only Models With Sub D Connector 14 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation cccccoconncnnnccconncnnnccononcnnnnononnnnnnnononnnnnnnnnnns 17 5 2 Connecting the P 56x to the Protective Earth Conductor cccooccnccccccnnccconcnnononos 19 5 3 Mounting the P 560X APP RPOO0 U0 0 0 DPU E oPPn ee 21 5 4 Atixing the SAA 23 5 5 Connecting the Adapter Cable to the P 56x Only P 56x 3CL Models 25 6 Start Up and Operation 27 6 1 General Notes on Start Up and Operation ooocccccccooonncnncccnnnncnncccnnnncnnononanncnnenonnns 27 6 2 Operating the P 56X nennen 29 6 3 Discharging the P 56X oocccccococcoccccoconccoononcononcnnnnnnnonnnnnnncnnnnnnnononnnnnnnannnnonannnninnns 30 10 11 12 Maintenance 7 1 General Notes on Maintenance c cccceceeeeeeeeceeeees 7 2 Packing the P 56x for TransSpoltd oooccccccnnoncconccononcconcnnnnss 7 3 Cleaning the P 56x coocoooccccccnoccnconoccncononcnnononnnnonnanonconanenoos Troubleshooting Customer Service Technical Data 10 1 SPecilica oia 10 1 1 Data Tabla en 10 1 2 Maximum Ratings ccccssscceessseeeeseeeeeesaees 10 2 Ambient Conditions and Cl
10. Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 56x to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the P 56x gt Avoid impacts that affect the P 56x gt Do not drop the P 56x gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 39 gt Only hold the P 56x externally by the base body 6 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 2 Safety The P 56x is maintenance free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy gt Only loosen screws according to the instructions in this manual gt Do not open the P 56x 2 3 Organizational Measures User manual gt Always keep this user manual available by the P 56x The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the P 56x on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user
11. PZ248E P 56x Nanopositioners User Manual Version 1 0 0 Date 22 11 2013 PI This document describes the following products P 561 PiMars XYZ Nanopositioning System P 561 3CD 3CL 100 um x 100 um x 100 um P 561 3DD 45 um x 45 um x 15 um Direct Drive P 562 PiMars XYZ Nanopositioning System P 562 3CD 3CL 200 um x 200 um x 200 um P 563 PiMars XYZ Nanopositioning System P 563 3CD 3CL 300 um x 300 um x 300 um 3CD 3DD with Sub D connector 3CL with LEMO connectors Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING WWW PI WS _ Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano The products described in this document are in part protected by the following patents German patent no 10021919C2 German patent no 10234787C1 German patent no 10348836B3 German patent no 102005015405B3 German patent no 102007011652B4 US patent no 7 449 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2013 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains a
12. age from unsuitable cables gt Only use cables provided by Pl for connecting the P 56x to the electronics Unsuitable cables can damage the stage and the electronics NOTICE Fa Damage from incorrect mounting Incorrect mounting of the P 56x or incorrectly mounted parts can damage the P 56x gt Only mount the P 56x and the loads on the mounting fixtures holes intended for this purpose NOTICE Damage due to incorrectly tightened screws Incorrectly tightened screws can cause damage gt Observe the torque range p 43 given for the screws used during installation INFORMATION Extended cables can reduce the positioning accuracy of the P 56x or affect the sensor processing by the electronics gt Do not use cable extensions If you need longer cables contact our customer service department p 37 18 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 2 Connecting the P 56x to the Protective Earth Conductor INFORMATION In the case of P 56x stages with Sub D connectors ground loops can occur when the stage is grounded via its protective earth connector as well as by the shield of the connection cable for the electronics gt Ifa ground loop occurs contact our customer service department p 37 INFORMATION gt Observe the applicable standards for mounting the protective earth conductor The P 56x is equipped with an M4 hole for fastening
13. assifications 10 3 DME HONS ze A 10 4 Torque for Stainless Steel Screws A2 70 195 PIMASSION Misco dico aca Old Equipment Disposal EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual oooocccnnccccccononnccnnnccnnnnnonnncnnnnnnnononannnnnns 1 Symbols and Typographic COnVventions ccccccccccccconnccnnnccnnonononccnnnnnonononannnnnnononononanenonns 1 Other Applicable DOCUMENTS ccccccccccconnccnnnnccccononnccnnnnnonononanonnnnnonononannnnnnnnnononananennnnnnnss 3 LOW MIC AGING Maas rennen ne earth een 3 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 56x x stands for the different models p 9 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual IN Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the s
14. e operator is responsible for the correct installation and operation of the P 56x P 56x Nanopositioners PZ248E Version 1 0 0 5 2 Safety P J The P 56x is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 56x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 56x gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 56x in the case of malfunction or failure of the system If touch voltages exist touching the P 56x can result in minor injuries from electric shock gt Connect the P 56x to a protective earth conductor p 19 before start up gt
15. e or to the side of the moving platform adjust the controller settings before start up or contact our customer service department p 37 P 56x Nanopositioners PZ248E Version 1 0 0 23 5 Installation P J NOTICE Screws that are too long The P 56x can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 42 gt Only use screws of the correct length for the respective mounting holes INFORMATION The arrows in the figures see Dimensions p 42 show the positive direction of motion Center of load at the optimum position Figure 7 Example of an optimally affixed load Center of load at an unsuitable position Figure 8 High set up and center of load far above the moving platform 24 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 9 Long lever and center of load on the side of the moving platform Prerequisite v You have read and understood the General Notes on Installation p 17 Tools and accessories Screws of appropriate size and length p 42 Suitable tools Affixing the Load gt Only affix loads to the threaded holes p 42 intended for this purpose and with suitable screws Observe the specified torque range p 43 while doing SO gt Affix the load so that it is centered and that the center of load is on the moving platform 5 5 Connecting the Adapter Cable to t
16. er from PI 30 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance cccccccccceccececcececcececccceccccecccuecucaecuuauceeaceucaeueceuaecass 31 Packing the P 56x for TranSpotrt ccccssccccssseeeceesseeceeeseeecsaseeecseuseeeeeseeessaseesenaaeees 31 e A 33 7 1 General Notes on Maintenance NOTICE Misalignment from loosening screws The P 56x is maintenance free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy gt Only loosen screws according to the instructions in this manual gt Do not open the P 56x 7 2 Packing the P 56x for Transport NOTICE Mechanical overload from incorrect handling An impermissible mechanical overload of the moving platform of the P 56x can cause damage to the piezo actuators sensors and flexure joints of the P 56x as well as losses of accuracy gt Only ship the P 56x in the original packaging gt Only hold the P 56x externally by the base body P 56x Nanopositioners PZ248E Version 1 0 0 31 7 Maintenance pP I The following figures serve as examples and can differ from your stage model Tools and accessories Original packaging Transport lock included in delivery consisting of Support frame 4 pla
17. et sensor signal channel 2 Shield of Target sensor signal channel 3 ire RT ee IN 7 ee TR eooo pe RT LEMO coaxial connector Only for P 56x 3CL one PZT P and T connector each per axis PZT P T TE Figure 13 LEMO connectors PZT P and T Connector Shell Output Probe sensor signal nonmoving part Cable shield of the capacitive sensor T Input Target sensor signal movable part of Cable shield the capacitive sensor P 56x Nanopositioners PZ248E Version 1 0 0 45 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente PI GmbH Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany A P 56x Nanopositioners PZ248E Version 1 0 0 47 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conform
18. he P 56x Only P 56x 3CL Models Prerequisites v The adapter cable is not connected to the electronics Tools and accessories Supplied E71000211 adapter cable p 12 Connecting the adapter cable to the P 56x gt Connect the Sub D Mix connector m of the P 56x to the Sub D Mix connector f of the adapter cable P 56x Nanopositioners PZ248E Version 1 0 0 25 PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation cccccccoccccccccconncnnnoconnnnnnnononnnnnnnononncnnnnnnnos 27 Operating the A een e REC A 29 Discharging Ne D o CAME nn en ine einen 30 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 56x in the case of malfunction or failure of the system If touch voltages exist touching the P 56x can result in minor injuries from electric shock gt Connect the P 56x to a protective earth conductor p 19 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 56x to the protective earth conductor before Starting it up again NOTICE Destruction of the piezo actuator by electric flashove
19. is Chapter BO CHING LO INS cante nee 39 Ambient Conditions and Classifications oocccccnccccononnncconnnonononanncnnnnncnnnnnnnnenannnnnos 41 DIMENSION Sarita ico atadas 42 Torque for Stainless Steel Screws A2 70 oooooocccccncccccoconoccconnnonononanccnnnnonononannncnnnnnnnos 43 MAS SIO MO tri idas 44 10 1 Specifications 10 1 1 Data Table PlMars XYZ piezo nanopositioning system closed loop travel Motion and positioning Integrated sensor Open loop travel 20 to 120 V Open loop resolution Closed loop resolution Linearity error Repeatability in X Y Z Pitch in X Y Crosstalk 8x y motion in Z Yaw in X Y Flatness in X Y Crosstalk in X Y motion in Z Mechanical properties Unloaded resonant frequency in X Y Z Resonant frequency at 100 ginX Y Z Resonant frequency at 330 ginX Y Z Push force capacity in motion direction in X Y Z Pull force capacity in motion direction in X Y Z Load capacity P 56x Nanopositioners P 561 3CD P 562 3CD P 561 3CL P 562 3CL 100 x 100x 200 x 200 x 100 200 Capacitive Capacitive 150 x 150 x 300 x 300 x 150 300 0 2 0 4 0 8 1 0 03 0 03 2 2 2 2 2 4 1 2 15 20 6 10 15 20 30 50 190 190 160 160 380 315 145 145 275 140 140 130 130 300 195 200 200 120 120 50 50 30 30 30 30 30 30 50 50 PZ248E P 563 3CD P 563 3CL 300 x 300 x 300 Capacitive 340 x 340 x 340 0 5 2 0 03 2 2 4 2 25
20. ituation mb P 56x Nanopositioners PZ248E Version 1 0 0 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label 1 2 gt p 5 RS 232 AA 2 Version 1 0 0 Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website Prom Rumen o E 712 digital piezo controller E 725 digital piezo controller E 761 digital piezo controller P 5xx P 6xx P 7xx piezo positioning systems 1 4 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 37 The current versions of the manuals are found on our website For some products e g Hexapod systems and electronics that are delivered with a CD access to the ma
21. ity For the P 56x an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 Safety Low Voltage Directive EN 61010 1 2010 laa P 56x Nanopositioners PZ248E Version 1 0 0 49
22. ll the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 22 11 2013 Document number PZ248E CBo Version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS q Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual ccccccconccncccccoonncnnnccconnnnncnnnannnos 1 1 2 Symbols and Typographic ConventionS ccooocccncccncncconccnnnnncnncnononnnonononannnnnononanenns 1 1 3 Other Applicable DOCUMENTS ccccccccccocnncconncccocononnccnnnnnonononancnnnnnnnonnnnnnnnnnnnnnnnnonans 3 1 4 Downloading Manuals cccccooncnccconcnncccnnnncononcnnonnnnonconanoncnnnncnnononrnnnonnnnnnnancnnnnanens 3 2 Safety 5 2 1 las IS AMA nn qeunaecqretvsqe an ieene codes 5 2 2 General Safety Instructions cccccccconccnnccconncnnnnononnnnnnnononnnnnnononnnnnnnonnnnnnnnnnnannnns 5 2 3 Organizational Measures cccoonncnccconcnncconnnncononcnnononcnnononnnnnnnnnnnnonannnnononnnnonennnnnnnos 7 3 Product Description 9 3 1 Model OVERVIEW ee ee acento etapa 9 3 2 OCG A e o PA 10 3 3 a o XA 11 3 4 Scope of Delivery visionaria a 12 3 5 Recommended Piezo Controllers cococccccoconcnncconnnnccconnncnnoncnnonononnononcnnnnnos 13 3 6 Technical Feres ee e na i ee 13 3 6 1 PI
23. ller manual or contact our customer service department p 37 INFORMATION Sound and vibration e g footfall impacts can be transmitted to the stage and can affect its performance with regard to position stability gt Avoid transmitting sound and vibration while the stage is being operated 6 2 Operating the P 56x Prerequisite v Ifa P 56x 3CL stage is to be operated with a controller with LEMO sockets The E71000211 adapter cable is connected to the stage p 25 Operating the P 56x gt Follow the instructions in the manual of the used controller for start up and operation of the P 56x P 56x Nanopositioners PZ248E Version 1 0 0 29 6 Start Up and Operation pP I 6 3 Discharging the P 56x The P 56x must be discharged in the following cases Before installation fthe P 56x is not used but the controller remains switched on to ensure temperature stability Before demounting e g before cleaning and transporting the P 56x and for modifications The P 56x is discharged through the internal discharge resistor of the controller from PI Discharging a P 56x that is connected to the controller In closed loop operation 1 Switch off the servo mode on the controller 2 Set the piezo voltage to 0 V on the controller In open loop operation gt Set the piezo voltage to 0 V on the controller Discharging a P 56x that is not connected to the controller gt Connect the stage to the switched off controll
24. n 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 Affixing the Load NOTICE Mechanical overload due to high torques and high loads When affixing the load high torques and high loads can overload the moving platform of the P 56x Mechanical overload can cause damage to the piezo actuators sensors and flexure joints of the P 56x and lead to losses in accuracy gt Observe the torque range p 43 given for the screws used during installation gt Avoid torques gt 1 5 Nm on the moving platform gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 39 NOTICE Warping of the P 56x due to affixing of loads with uneven contact surface Affixing loads with an uneven contact surface can warp the P 56x Warping reduces the accuracy gt Only affix loads on the P 56x whose contact surface with the moving platform of the stage has an evenness of at least 20 um gt For applications with great temperature changes Only affix loads on the P 56x that have the same or similar thermal expansion properties as the P 56x NOTICE Center of load at unsuitable position If the center of load is located far outside of the moving platform e g high set ups and long levers the P 56x can be damaged from high strain on the flexure guides high torques and oscillations gt Ifthe center of the load to be affixed is far abov
25. nnenonononononannnnnnnnnonnnannncnnnnnononenanennnns 5 Organizational MeasuresS ooooccccnnncccocononccnnnnononononnncnnnnnonononanenonnnnnnnnnnnnnnnnnnnnnnnananennnnnnnss 7 2 1 Intended Use The P 56x is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the P 56x is intended for fine positioning as well as the fast and precise motion of small objects The specifications of the P 56x apply to horizontal mounting The motion takes place in three axes horizontally and vertically The intended use of the P 56x is only possible in combination with suitable drive and control electronics p 13 available from Pl The electronics is not included in the scope of delivery of the P 56x The electronics must provide the required operating voltages To ensure proper performance of the servo control system the electronics must be able to read out and process the signals from the capacitive sensors 2 2 General Safety Instructions The P 56x is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 56x gt Only use the P 56x for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect Safety Th
26. nting on uneven surfaces Mounting the P 56x on an uneven surface can warp the P 56x Warping reduces the accuracy gt Mount the P 56x on an even surface The recommended evenness of the surface is 20 um gt For applications with great temperature changes Only mount the P 56x on surfaces that have the same or similar thermal expansion properties as the P 56x NOTICE Y Tensile stress on piezo actuator with vertical mounting When the stage is mounted vertically tensile stress can result in particular alignments that reduces the preload of the piezo actuator and thus destroys it gt If you want to mount the P 56x vertically contact our customer service department p 37 NOTICE Protruding screw heads Protruding screw heads can damage the P 56x gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion P 56x Nanopositioners PZ248E Version 1 0 0 21 5 Installation P J Figure 6 Mounting holes in the base body Prerequisite v You have read and understood the General Notes on Installation p 17 Tools and accessories Screws of appropriate size and length see Dimensions p 42 Suitable tools Mounting the stage on a surface 1 Position the stage on an even surface 2 Fasten the stage to the mounting holes see figure with suitable screws Observe the specified torque range p 43 while doing so 22 Versio
27. nuals is password protected The password is stored on the CD P 56x Nanopositioners PZ248E Version 1 0 0 1 About this Document P I Download freely accessible manuals 1 2 3 Open the website http www pi portal ws Click Downloads Click the corresponding category e g P Piezo Actuators Nanopositioning amp Scanning Systems Click the corresponding product code e g P 567 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals he 2 3 4 Carry out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter Mendod USG erstes ce ee nee 5 General Safety Instructions ccccccccccoconnnccnnnncnononon
28. ors parallel metrology Sub D connector s P 562 3CL PlMars XYZ nanopositioning system with large travel range 200 um x 200 um x 200 um capacitive sensors parallel metrology LEMO connector s P 56x Nanopositioners PZ248E Version 1 0 0 9 3 Product Description P J PTE TE EA P 563 3CD PlMars XYZ nanopositioning system with large travel range 300 um x 300 um x 300 um capacitive sensors parallel metrology Sub D connector s P 563 3CL PlMars XYZ nanopositioning system with large travel range 300 um x 300 um x 300 um capacitive sensors parallel metrology LEMO connector s 3 2 Product View The figure serves as an example and can differ from your stage model Figure 1 Example of product view 1 Moving platform 2 Cable exit 3 Protective earth connection 4 Base body X Y Z Positive directions of motion of the stage 10 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 3 Product Labeling 1 23 4 9 9 8 7 6 Figure 2 P 56x Type plate example view Product name Serial number Brand name Country of origin Manufacturer s logo CE conformity mark Manufacturer s address website Disposal of used devices O MAN DAA ONS Warning sign Observe manual Figure 3 P 56x Residual voltage warning sign on connector Warning sign Residual voltage Notice of risk of electric shock p 5 P 56x Nanopositioners PZ248E Version
29. ort lock support frame marked with arrow for protecting the moving platform Tools and accessories Suitable screwdriver Unpacking the P 56x 1 Unpack the P 56x with care 2 Compare the contents against the items covered by the contract and against the packing list If parts are incorrectly supplied or missing contact Pl immediately P 56x Nanopositioners PZ248E Version 1 0 0 15 4 Unpacking P I 3 Inspect the contents for signs of damage If you notice signs of damage contact Pl immediately 4 Remove the transport lock a Place the P 56x on a surface with the support frame facing downwards b Release the four plastic screws with a screwdriver In the following figure one of the screws is marked with an arrow c Remove the plastic screws and the support frame 5 Keep all packaging materials and the transport lock in case the product needs to be transported again later 16 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation u 22220002224000RRnnnne nennen nennen ennnnnne nennen nennen nennen 17 Connecting the P 56x to the Protective Earth Conductor cccoocccccccncccccncconcncconcnononos 19 NOUNLNO the P55 OO surta atienda eier lee 21 ANDINAS 120 AC escarnio 23 Connecting the Adapter Cable to the P 56x Only P 56x 3CL Models 25 5 1 General No
30. ping of the base positioning body or the moving accuracy platform P 56x Nanopositioners PZ248E gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 39 Perform a zero point adjustment of the sensor see controller manual Only mount the P 56x on surfaces with the following characteristics Evenness of at least 20 um The thermal expansion properties are similar to those of the P 56x e g surfaces made of aluminum Only affix loads with the following characteristics on the P 56x The contact surface of the load has an evenness of at least 20 um The thermal expansion properties are similar to those of the P 56x e g loads made of aluminum Version 1 0 0 35 8 Troubleshooting 36 PI When stages whose ID chip p 14 does not contain any calibration data or LEMO connectors no ID chip lines present are used the axis displacement has to be recalibrated after the P 56x the controller an extension cable or an adapter cable has been replaced P 56x controller extension cable or adapter cable has been replaced Axes were mixed up during connection only with LEMO conneciors The stage Servo control starts parameters incorrectly oscillating or set because e g the positions load was changed inaccurately Open loop operation near the resonant frequency gt Perform a recalibration of the axis displacement see
31. rly connected see Pin Assignment p 44 NOTICE Uncontrolled oscillation Oscillations can cause irreparable damage to the stage Oscillations are indicated by a humming and can result from the following causes A change in the load and or dynamics requires the servo control parameters to be adjusted The stage is operated near its resonant frequency If you notice oscillations gt In closed loop operation immediately switch off the servo mode gt In open loop operation immediately stop the stage INFORMATION The arrows in the figures see Dimensions p 42 show the positive direction of motion 28 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation INFORMATION systems are calibrated at the factory to achieve optimum positioning accuracy Replacing the system components will cause a loss in positioning accuracy in the following cases ID chip p 14 of the stage does not contain any calibration data Stage is connected via LEMO connectors to the controller no ID chip lines present gt When connecting the stage observe the assignment of the stage axes to the controller channels which is given by the calibration label of the controller If the positioning accuracy is reduced after the P 56x the controller an extension cable or an adapter cable has been replaced gt Perform a recalibration of the axis displacement see contro
32. rs The use of the P 56x in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 56x in environments that can increase the electric conductivity gt Only operate the P 56x within the permissible ambient conditions and classifications p 41 P 56x Nanopositioners PZ248E Version 1 0 0 27 6 Start Up and Operation P J NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramics of the actuator gt When the P 56x is not used but the controller remains switched on to ensure temperature stability discharge the P 56x p 30 NOTICE Operating voltages that are too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 56x gt Only operate the P 56x with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 40 for which the P 56x is specified gt Only operate the P 56x when the operating voltage is prope
33. s with the motion which allows excellent linearity values to be achieved in combination with the high position resolution In connection with suitable electronics capacitive sensors achieve the best resolution stability and bandwidth 3 6 4 ID Chip Only Models With Sub D Connector An ID chip is located in the Sub D connector of the stage When the stage Is calibrated at the factory with digital electronics the calibration data is saved together with specific product information on the ID chip When switched on digital electronics read the data from the ID chip of the connected stage Stages whose ID chip contains the calibration data can therefore be connected to any suitable digital electronics without a new calibration For more information on the ID chip see the manual of the controller used 14 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking NOTICE Mechanical overload from incorrect handling An impermissible mechanical overload of the moving platform of the P 56x can cause damage to the piezo actuators sensors and flexure joints of the P 56x as well as losses of accuracy gt Only ship the P 56x in the original packaging gt Only hold the P 56x externally by the base body The P 56x is delivered with installed transport lock The following figures serve as examples and can differ from your stage model Figure 4 Exemplary view Stage with transp
34. stic screws Suitable screwdriver Packing the P 56x 1 Attach the transport lock a Place the support frame on a surface b Place the stage with its top side facing downwards on the support frame c Align the stage so that the mounting holes in the stage are above the mounting holes in the support frame 32 Version 1 0 0 PZ248E P 56x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 7 Maintenance d Fasten the support frame to the mounting holes of the stage with the four plastic screws In the following figure one of the screws is marked with an arrow 2 Pack the stage in the original packaging 7 3 Cleaning the P 56x Prerequisites v You have discharged the piezo actuators of the P 56x p 30 v You have disconnected the P 56x from the controller Cleaning the P 56x gt Clean the surfaces of the P 56x with a cloth that is slightly dampened with a mild cleanser or disinfectant e g ethanol or isopropanol gt Donotdo any ultrasonic cleaning P 56x Nanopositioners PZ248E Version 1 0 0 33 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting No or limited The cable is not gt Check the cable connections motion connected correctly Excessive load Zero shift of the sensor for the following reasons Load applied in direction of motion Ambient operating temperature of the stage far above or below calibration temperature 21 C to 24 C Reduced War
35. tes on Installation Dangerous voltage and residual charge on piezo actuators A The P 56x is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 56x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 56x gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector al Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller P 56x Nanopositioners PZ248E Version 1 0 0 17 5 Installation P J NOTICE Ir f Mechanical overload from incorrect handling An impermissible mechanical overload of the moving platform of the P 56x can cause damage to the piezo actuators sensors and flexure joints of the P 56x as well as losses of accuracy gt Only hold the P 56x externally by the base body NOTICE ah Dam
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