M-663 Linear Positioning Stage
Contents
1. WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 25 6 Start Up Piezo Nano Positioning PI Collision of the moving platform with the hard stop The motion of the moving platform is aborted by the hard stop To prevent damage to or considerable wear on the M 663 you must avoid high acceleration as well as the collision of the moving platform with the hard stop gt Only command target positions that are located within the travel range gt Ensure that the platform approaches the end of the travel range at low velocity gt Ensure that the moving platform does neither abruptly stop at the end of the travel range nor attempt to continue moving gt Determine the maximum velocity for your application Figure 10 Motion directions of the M 663 465 left and M 663 Y65 right INFORMATION To obtain best position repeatability we recommend that you always approach the reference switch from the same side The start up procedure for the M 663 depends on the hardware you are using see p 47 In this user manual the following two alternatives are described page 26 M 663 Linear Positioning Stage Version 1 6 0 WWW pi ws PI Piezo Nano Positioning 6 Start Up C 86 piezomotor controller driver from PI see p 27 C 185 analog drive electronics from PI with a suitable controller see p 28 6 2 Start Up the M 663 with the C 867 Controller INFORMATION Irrespective of the number of axes to be2. Drive Performance 11 2 1 Velocity and Dynamic Force To estimate the M 663 performance at different levels of the control signal refer to the following graph E E E gt 200 o 2 v gt 1 Force in N Figure 11 Velocity of the M 663 vs dynamic force push pull force at various levels of the control signal WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 41 11 Technical Data Piezo Nano Positioning PI 11 2 2 Impact of Ambient Temperature and Downtime To protect your equipment against damage refer to the following graphs A e E un e o 3 Kei x co 95 UN AU C 10 C 20 C ou AUT Temperature in C Figure 12 Maximum duty cycle vs ambient temperature at maximum level of the control signal INFORMATION In closed loop operation the control signal level depends on the given velocity gt To avoid overheating fine tune the duty cycle ambient temperature and velocity to each other page 42 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 11 Technical Data E E v o lam e C E S o ag o B e E d OI Downtime inh Figure 13 Static holding force depending on the downtime of the motor WWW pi WS M 663 Linear Positioning Stage Version 1 6 0 page 43 PI 11 Technical Data Piezo Nano Positioning 11 3 Dimensions Dimensions in mm Note that the decimal places are separated by commas in the drawings Standard to
3. Low Voltage Directive EN 61010 1 Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 The person authorized to compile the technical file is Bernd Philips August 5 2010 Karlsruhe Germany H pese n nr Dr Karl Spanner President Physik Instrumente FI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany WWW piws Phone 49 721 48 46 0 Fax 449 721 48 46 299 E mail infogopiws ago WWW pi WS M 663 Linear Positioning Stage Version 1 6 0 page 51
4. Technical Note M663T0015 for adapter box Extension cable for use with adapter box M 663 AB Extension Cable for PlLine amp MDR to 15 pin Sub D 1 m Extension Cable for PlLine MDR to 15 pin Sub D 3 m Extension Cable for PlLine amp MDR to 15 pin Sub D 5 m Extension Cable for PlLine amp MDR to 15 pin Sub D 10 m To order contact our customer service department see p 37 3 6 Technical Features 3 6 1 Linear Encoder The M 663 is equipped with an optical linear encoder featuring 0 1 um resolution Linear optical encoders measure the actual position directly direct metrology Therefore errors occurring in the drive such as non linearity backlash or elastic deformations cannot influence the measurement of the position page 10 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 3 Product Description 3 6 2 Reference Switch The M 663 is equipped with a direction sensing reference switch which is located at about the midpoint of the travel range This sensor provides a TTL signal indicating whether the stage is to the positive or negative side of the reference switch The rising or falling edge of this signal can be used to indicate a known reference position The difference in the reference points when approached from the positive or the negative side is about 0 2 mm to 0 4 mm See the controller user manual and or associated software manuals for the commands which make us
5. connected the software needs to be installed only once on the PC which is to be used for commanding the mechanics see C 867 User Manual Prerequisites v You have read and understood the General Notes on Start Up see p 25 v The M 663 has been correctly installed see p 15 v The C 867 piezomotor controller driver and the required software have been installed All connections with the C 867 have been established see C 867 User Manual Starting Up the M 663 with the C 867 Controller 1 Start up the stage axis see C 867 User Manual The start up procedure involves the following steps Selecting the stage type Referencing the axis Commanding motion in closed loop operation The description in the C 867 User Manual assumes that you perform these steps using PIMikroMove 2 Optionally For optimum performance of the stage axis it may be necessary to adjust the servo control parameters of C 867 e g P term l term D term Save the new parameter values for future use 3 Command a few motion cycles for testing and run in of the mechanical system 50 96 duty cycle After run in the M 663 will generate its maximum dynamic force WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 27 6 Start Up Piezo Nano Positioning PI 6 3 Start Up the M 663 with the C 185 Drive Electronics Replacement of fine tuned system components The C 185 drive electronics is fine tuned to the M 663 before de
6. fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures For updated releases of this user manual or if you have any questions contact our customer service department see p 37 1 2 Symbols and Typographic Conventions The symbols and typographic conventions used in this manual have the following meanings DANGER A imminently hazardous situation If not avoided the hazardous situation will result in death or serious injury Action to be taken to avoid the hazard BE e a Hazardous situation If not avoided the hazardous situation will result in damage to the equipment Action to be taken to avoid the hazard WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 1 Positioning P I 1 About this Document Piezo Nano INFORMATION Information to facilitate operation and handling tips and tricks and so on 1 Action consisting of several steps whose sequential order 2 must be observed Action consisting of one or several steps whose sequential order is irrelevant ee Ooo Cross reference to page 5 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals For the latest versions of the user manuals contact our customer service department see p 37 Device Document C 185 drive electronics MS137E User Manual C 185 Analog Drive
7. improper maintenance Improper maintenance can result in misalignment and malfunction of the M 663 gt Do not loosen any sealed screws gt Ensure that the piezomotor of the stage does not come into contact with lubricants Depending on the operational conditions and the period of use of the M 663 the following maintenance measures are required Maintenance Run The maintenance run is performed to redistribute the existing lubricant on the guidings of the stage gt To evenly distribute the existing lubricant on the stage guidings perform a maintenance run across the entire travel range after 500 hours of operation or after 1 year at the latest gt If you operate your stage continuously on a small travel range 20 of the entire travel range perform a maintenance run every 5000 motion cycles across the entire travel range Lubrication Under laboratory conditions the guidings of the stage need to be lubricated in exceptional cases only For continuous industrial use the lubrication intervals must be defined individually gt Do not lubricate the guidings of the M 663 until after consultation with our customer service department see p 37 gt To lubricate the guidings follow the instructions given in the maintenance manual which you can obtain from our customer service department WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 33 8 Maintenance Piezo Nano Positioning PI gt Ensu
8. max Push pull force 2 N max Holding force 2 N max Drive properties Motor type P 661 PlLine ultrasonic piezomotor Operating voltage 120 peak peak V 42 RMS Electrical power D W nominal Current 400 mA Reference switch Optical Miscellaneous Operating temperature range 20 to 50 C Material Al anodized Dimensions 35 x 35 x 15 mm Mass 40 g 5 WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 39 11 Technical Data page 40 Cable length Connector Piezo Nano Positioning PI M 663 465 M 663 Y65 Units Tolerance 1 5 m 10 mm MDR 14 pin Recommended controller driver C 867 controller driver C 185 161 drive electronics Power for the motor is supplied by the drive electronics which runs on 12 V DC or by the controller 24 V For drive electronics Reference Switch Specifications Type Supply voltage Signal output Signal logic M 663 Linear Positioning Stage Version 1 6 0 Optical sensor 5 V GND supplied via the motor connector TTL level Direction sensing by means of different signal levels on the left and right side of the reference switch The signal level changes from O to 5 V when the reference switch is passed Direction recognition by means of different signal levels on the left and right side of the reference switch The signal level changes from 0 to 5V when the reference switch is passed WWW pi ws PI Piezo Nano Positioning 11 Technical Data 11 2
9. 5 for the Y axis In this case the cable exits of both stages are on the same side page 20 M 663 Linear Positioning Stage Version 1 6 0 WWW pi ws p I Piezo Nano Positioning 5 Installation Screws that are too long The M 663 can be damaged by screws that are too long Note the depth of the mounting holes in the moving platform see p 44 gt Only use screws of the correct length for the respective mounting holes Prerequisites v You have read and understood the General Notes on Installation see p 15 Tools and Accessories for stacking two M 663 stages 2 included M1 6x5 screws and Allen wrench see p 9 Stacking an M 663 on an M 663 Figure 8 Mounting holes in the moving platform and the base body of the M 663 see arrows 1 Rotate the upper M 663 by 90 and position it on the lower M 663 It is possible to rotate the upper stage again by 180 for a different orientation of its cable exit 2 Displace the moving platform of the M 663 manually to make two of the three counter sunk holes in the base body accessible see figure WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 21 5 Installation Piezo Nano Positioning PI 3 Mount the upper M 663 with one of the included screws on the lower M 663 To do this use the deeper hole in the base body of the upper M 663 see the black arrow in the figure and one of the threaded holes in the platform of the lower M 663 see the white a
10. Description Piezo Nano Positioning PI 3 2 Model Overview Two standard versions of the M 663 are available They differ in the cable exit Figure 1 M 663 model overview M 663 465 front and M 663 Y65 back M 663 465 M 663 Y65 PlLine Translation Stage 19 mm PlLine Translation Stage 19 mm Linear Encoder 0 1 um Resolution Linear Encoder 0 1 uim Resolution turned cable outlet XY Mountable page 8 M 663 Linear Positioning Stage Version 1 6 0 WWW pi ws PI Piezo Nano Positioning 3 Product Description 3 3 Product View Figure 2 M 663 product view 1 Moving platform 2 Connection cable to the electronics 3 Base body 3 4 Scope of Delivery Order Item s Number PlLine Translation Stage 19 mm Linear Encoder 0 1 um Resolution PlLine Translation Stage 19 mm Linear Encoder 0 1 um Resolution turned cable outlet XY Mountable 000011207 Screw set 4hex head cap screws M1 6x5 ISO 4762 1 Allen wrench MP64E User manual this document in printed form WWW pi WS M 663 Linear Positioning Stage Version 1 6 0 page 9 3 Product Description 3 5 Accessories Piezo Nano Positioning PI Order Description Number M 663 AV1 Mounting bracket for vertical mounting including screw set no 000031517 6 hex head cap screws M1 6x4 8 hex head cap screws M1 6x6 8 hex head cap screws M2x6 Adapter Box MDR to 15 pin Sub D for PILine Stages with Long Cables
11. Electronics C 867 controller MS185E User Manual C 867 160 PlLine Controller MS189E User Manual C 867 260 PlLine Controller page 2 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 2 Safety 2 Safety In this Chapter Prescribed USE eesierrsiiin atesin adai 3 General Safety Instructions 3 2 1 Prescribed Use The M 663 is a laboratory device as defined by DIN EN 61010 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the M 663 is intended for single axis positioning adjusting and shifting of loads at various velocities The prescribed use of the M 663 is only possible in combination with suitable electronics The following options exist Drive electronics and controller with suitable software Combination device with suitable software The electronics is not included in the scope of delivery of the M 663 The electronics must provide the operating voltage required by the piezomotor s To ensure proper performance of the servo control system the electronics must be able to read out and further process the signals from the reference switch as well as the ones from the incremental position encoder 2 2 General Safety Instructions www pi ws The M 663 is built according to state of the art technology and recognized safety standards Improper use can re
12. P I Piezo Nano Positioning 5 Installation 5 3 Affixing the Load Screws that are too long The M 663 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform see p 44 gt Only use screws of the correct length for the respective mounting holes INFORMATION If the M 663 is mounted vertically the maximum load is 50 g For loads higher than 50 g you will need a mechanism for counterbalancing gravity In this case contact our customer service department see p 37 Figure 6 M 663 threaded holes for affixing a load see arrows Prerequisites v You have read and understood the General Notes on Installation see p 15 Tools and Accessories M1 6 screws of a suitable length see p 44 Suitable wrench WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 19 Positioning P I 5 Installation Piezo Nano Affixing the Load 1 Choose the mounting position so that the seven M1 6 threaded holes in the moving platform see arrows in the figure can be used for affixing the load 2 Affix the load to the moving platform using the screws 5 4 Mounting Stacked Systems 5 4 1 Stacking an XY System You can stack two linear positioning stages to form an XY systems as shown below Figure 7 M 663 Y65 top and M 663 465 bottom as stacked XY system For stacked XY systems we recommed that you use an M 663 465 for the X axis and an M 663 Y6
13. Piezo Nano Positioning PI MP64E M 663 Linear Positioning Stage User Manual Version 1 6 0 Date 15 12 2010 This document describes the following product s M 663 465 PlLine Translation Stage 19 mm Linear Encoder 0 1 um Resolution M 663 Y65 PlLine Translation Stage 19 mm Linear Encoder 0 1 um Resolution turned cable outlet XY Mountable Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Wir ffnen Nanowelten www pi ws Phone 49 721 4846 0 Fax 49 721 4846 100 E mail info pi ws l PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following company names and trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk amp NEXACT NEXLINE NanoCube NanoAutomation The products described in this document are in part protected by the following patents US Pat No 6 765 335 German Patent No 10154526 2010 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are proteced by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 15 12 2010 Document number MP64E CBo Release 1 6 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download
14. ch can cause injury or property damage When connecting the stage to the controller for the first time the stage can perform an unintentional motion Defective software or wrong operation of the software can also result in unintentional motions gt Do not place any objects in areas where they can get caught by moving parts The motion of the moving platform is aborted by the hard stop To prevent damage to or considerable wear on the M 663 you must avoid high acceleration as well as the collision of the moving platform with the hard stop gt Only command target positions that are located within the travel range Ensure that the platform approaches the end of the travel range at low velocity WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 5 2 Safety Piezo Nano Positioning PI gt Ensure that the moving platform does neither abruptly stop at the end of the travel range nor attempt to continue moving gt Determine the maximum velocity for your application 2 2 3 Safety Measures During Operation gt If noise is generated during operation of the M 663 check the settings of the servo control parameters of your controller Highest dynamic force and holding force are achieved at maximum level 100 96 of the control signal However during continuous operation the motor drive can overheat at this input level gt During continuous operation at room temperature do not exceed 90 of the control signal le
15. e of the reference signal For further details refer to the Specifications section see p 39 WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 11 PI Piezo Nano Positioning 4 Unpacking 4 Unpacking 1 Unpack the M 663 with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials You can use it to re package the M 663 in the event the product needs to be returned WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 13 P I Piezo fano Positioning 5 Installation 5 Installation In this Chapter General Notes on Installation 15 Mounting the Stage on a Surface 16 Affixing the HOGG nie 19 Mounting Stacked Systems 20 5 1 General Notes on Installation Lubricants dirt condensation Dirt oil lubricants and condensation will render the motor drive inoperable gt Ensure that the piezomotor of the M 663 does not come into contact with lubricants gt Keep the M 663 free from dirt and condensation a l Unsuitable or extended cables Unsuitable or extended cables can damage the electronics and can affect the performance of the M 663 gt Only use cables provided by PI for connecting the M 663 to the e
16. ers are included in the software that comes with the device If it should be necessary to set specific parameters for another controller you can use the following values WWW pi WS M 663 Linear Positioning Stage Version 1 6 0 page 31 7 Operation Piezo Nano Positioning PI Encoder resolution 10 counts um _ l term _ O E EIA COS CAS CIN Acceleration Recommended initial value The optimum value depends on the technical requirements e g load of your application Depending on the controller and or control algorithm you use these values have to be converted n Overheating during continuous operation Highest dynamic force and holding force are achieved at maximum level 100 of the control signal However during continuous operation the M 663 can overheat at this input level gt During continuous operation at room temperature do not exceed 90 of the control signal level gt For continuous operation at other temperatures refer to the maximum allowable duty cycle see p 42 7 3 Short Operating Time The M 663 will not immediately achieve its maximum dynamic and holding force when operated after a rest period or with low duty cycle This behavior results from the contamination of the M 663 components which occurs even during a short downtime page 32 M 663 Linear Positioning Stage Version 1 6 0 www pi ws PI Piezo Nano Positioning 8 Maintenance 8 Maintenance Damage due to
17. g PI C 867 Piezomotor controller with drive electronics for PILine systems combination device The C 867 piezomotor controllers drive electronics perform the position servo control and provide the operating voltage for the stage Separate drive electronics is not necessary The user adjusts the operating voltage for the stage by changing parameters in the software Analog drive electronics bench top with power supply C 185 drive electronics converts an analog control signal differential 10 V into the voltage which is required by the piezomotor drives In addition to the drive electronics a controller suitable for piezomotor drives is needed available from a third party supplier This controller performs position control and provides the appropriate control signal for the drive electronics Furthermore the controller must be able to process the reference signals of the stage The following combination is possible M 668 stage with C 185 161 drive electronics INFORMATION The C 185 drive electronics must be fine tuned with the mechanics Always order mechanics and drive electronics together gt To order contact our customer service department see p 37 page 48 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 12 Old Equipment Disposal 12 Old Equipment Disposal Since 13 August 2005 in accordance with the EU directive 2002 96 EC WEEE electrical and electro
18. he General Notes on Installation see p 15 Tools and Accessories M 663 AV1 mounting bracket and included screws see p 10 Stacking a Z System 1 Mount the M 663 AV1 mounting bracket on the lower M 663 Use at least four M1 6x4 screws for this purpose 2 Mount the upper M 663 to the mounting bracket Use two M1 6x6 and two M2x6 screws for this purpose Proceed as when mounting the M 663 to a surface see p 16 WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 23 PI Piezo Nano Positioning 6 Start Up 6 Start Up In this Chapter General Notes on Grat Up 25 Start Up the M 663 with the C 867 Controller 27 Start Up the M 663 with the C 185 Drive Electronics 28 6 1 General Notes on Start Up DANGER A High voltage and residual charge on piezo actuators PlLine Motors are driven by piezo actuators After disconnecting the electronics the piezo actuator can stay charged for several hours Temperature changes can also induce charges in the piezo actuators Touching the piezo actuators can result in serious injury or death gt Do not disassemble the M 663 E ES E Uncontrolled vibration Your system can be damaged by uncontrolled vibration of the M 663 If noise is generated during operation of the M 663 do the following gt Immediately switch off the servo control system of the affected stage axes gt Check the settings of the servo control parameters
19. he deeper hole must be used for mounting the stage from the top side see arrow WWW pi WS M 663 Linear Positioning Stage Version 1 6 0 page 17 5 Installation Piezo Nano Positioning PI Figure 5 M 663 bottom view threaded holes for mounting the stage from the bottom side see arrows Prerequisites v You have read and understood the General Notes on Installation see p 15 Tools and Accessories 2 included M1 6x5 screws and Allen wrench see p 9 If you also want to mount the stage at the bottom side 1 or 2 M2 screws of a suitable length and a suitable wrench not included Mounting the M 663 on a Surface 1 Displace the moving platform of the M 663 manually to make two of the three counter sunk holes in the base body accessible see top view 2 Mount the stage with one of the included screws in the deeper hole see arrow in the top view 3 Ensure that the screw head does not protrude from the counter sunk hole 4 Move the platform manually to the other side so that only one counter sunk hole in the base body is accessible 5 Mount the stage with one of the included screws 6 Ensure that the screw head does not protrude from the counter sunk hole 7 For secure attachment Mount the stage at the bottom side using at least one of the threaded holes in the base body see arrows in the bottom view and an M2 screw of a suitable length page 18 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws
20. ion 1 6 0 www pi ws PI Piezo Nano Positioning 6 Start Up 3 Configure and move the axis according to the description in the user manual of the controller and or the manual of any software which came with the controller If it should be necessary to set stage dependent parameters you can use the values from the table in the Operating Parameters section see p 31 4 Command a few motion cycles for testing and run in of the mechanical system lt 50 duty cycle After run in the M 663 will generate its maximum dynamic force WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 29 PI Piezo Nano Positioning 7 Operation 7 Operation In this Chapter General Notes on Operation 31 Operating Parameters noannnnnnaannnnneanenneanni 31 Short Operating Time nnnnnno00aanannnnonnaaannnnnne 32 7 1 General Notes on Operation m F E E a Heating up of the M 663 during operation The heat produced during operation might affect your application Install the M 663 so that your application is not affected by the dissipating heat INFORMATION If unusual noise is generated during the operation of the M 663 check the settings of the servo control parameters of your controller For more information about operational conditions refer to the Drive Performance section see p 41 7 2 Operating Parameters For the C 867 controller from Pl the operating paramet
21. lectronics gt Do not use cable extensions If you need longer cables use the M 663 AB adapter box and an extension cable from PI see p 10 For more information about operational conditions refer to the Drive Performance section see p 41 www pi ws M 663 Linear Positioning Stage Version 1 6 0 page 15 5 Installation Piezo Nano Positioning PI 5 2 Mounting the Stage on a Surface Protruding screw heads Protruding screw heads can damage the M 663 gt Ensure that the screws are completely fastened and that the screw heads do not protrude from the counter sunk holes so that they do not interfere with the stage motion Warping of the base body Incorrect mounting can warp the base body Warping of the base body will increase wear and reduce accuracy gt Mount the M 663 on a flat surface The recommended evenness for the surface is 10 um DN d Use at least three screws to mount your stage To ensure that the M 663 is securely mounted we recommend that you use at least three screws Use two screws to mount the M 663 at the top side and at least one screw to mount it at the bottom side page 16 M 663 Linear Positioning Stage Version 1 6 0 WWW pi ws PI Piezo Nano Positioning 5 Installation Figure 3 Motion directions of the M 663 465 left and M 663 Y65 right Figure 4 M 663 top view Two of the three counter sunk holes in the base body are visible T
22. lerance according to DIN ISO 2768 f H Roughness Ra 1 6 2x M1 67 3 5x M1 6Y 1 5 Figure 14 M 663 465 page 44 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 11 Technical Data 7x M1 6Y 1 5 12 5 035 Figure 15 M 663 Y65 WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 45 11 Technical Data Piezo Nano Positioning PI Figure 16 M 663 AV1 mounting bracket for stacking a Z system page 46 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 11 Technical Data 11 4 Pin Assignments Connector MDR14 N10214 52B2VC 3M Pn ooa Fee oo Encoder channel A RS 422 Encoder channel A inverted RS 422 B6 ENCB Encoder channel B inverted RS 422 11 5 Suitable Drive Electronics and Controllers For closed loop operation of stages with PILine piezomotor drives you need either one piezomotor controller which is a combination device or drive electronics with a separate controller and suitable software The selection of these devices depends on the type of application they are used for We recommend that you use the combination device because you will not need a separate controller and the software will be included with the device The table below describes the suitable drive electronics and controllers WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 47 11 Technical Data Piezo Nano Positionin
23. livery for optimum system performance Replacing the drive electronics or the M 663 can impair the operation of the M 663 gt Do not exchange the drive electronics or the M 663 of a fine tuned system gt If you must replace parts of your system the fine tuning procedure must be repeated see the frequency tuning description in the user manual of the drive electronics gt With multi axis systems respect also the assignment of the axes to the drive electronics This assignment is indicated by labels on the devices Prerequisites v You have read and understood the General Notes on Start Up see p 25 v The M 663 has been correctly installed see p 15 v You have a suitable controller with the following features The controller provides the control signal for the C 185 drive electronics The controller can read out and process the signals from the reference switch and the incremental position encoder You have read and understood the user manual of the controller You have prepared the controller for operation Starting Up the M 663 with the C 185 Drive Electronics and a Suitable Controller 1 Connect the stage axis to the Closed loop piezomotor socket of the C 185 drive electronics which was tuned with this axis see labels on the electronics and the connectors 2 Connect the drive electronics to the controller and to the power supply see C 185 User Manual page 28 M 663 Linear Positioning Stage Vers
24. nic equipment can no longer be disposed of in the member states of the EU with other wastes When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany r3 WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 49 PI Piezo Nano Positioning 13 Declaration of Conformity 13 Declaration of Conformity Declaration of Conformity according to DIN EN ISO IEC 17050 2005 01 Manufacturer Physik Instrumente Fl GmbH amp Co KG Manufacturer s Auf der R merstra e 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Di me Linear Motor Stage Model Numbers M 663 Product Options all complies with all relevant provisions of the Machinery Directive 2006 42 EC Furthermore it complies with all provisions of the Low Voltage Directive 2006 95 EC and the EMC Directive 2004 108 EC The applied standards certifying the conformity are listed below Safety of Machinery EN 12100 Safety
25. nss 16 5 3 AmKNg the HOA tee sense ee are 19 DA Mounting Stacked Guvsiems 20 5 4 1 Stacking an XY EC 20 SSA AA 22 M 663 Linear Positioning Stage Version 1 6 0 page page Il 10 11 12 13 Piezo Nano Positioning Start Up 25 6 1 General Notes on Giart Un 25 6 2 Start Up the M 663 with the C 867 CGontroller 27 6 3 Start Up the M 663 with the C 185 Drive Electronics sssss 28 Operation 31 FA General Notes eu ee A nennen il 31 72 3ODerautitg Pa Ee 31 1 39 Ohorn Operating Times 32 Maintenance 33 Troubleshooting 35 Customer Service 37 Technical Data 39 OS CHICANOS nennen er een rennen 39 Drive Performance nenne nnnne nenne nnnnnenn 41 11 2 1 Velocity and Dynamic Force 41 11 2 21mpact of Ambient Temperature and Downtme 42 BUR c 44 PIN ASSIONMIENIS 47 Suitable Drive Electronics and CGontrollers 47 Old Equipment Disposal 49 Declaration of Conformity 51 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws P I Piezo Nano Positioning 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this Manual 1 Symbols and Typographic Conventions 1 Other Applicable Documents 2 1 1 Goal and Target Audience of this Manual This manual contains information on the prescribed use of the M 663 It assumes that the reader has a
26. on our website http www pi ws p I Piezo Nano Positioning www pi ws Contents 1 About this Document 1 1 1 Goal and Target Audience of this Manual 1 1 2 Symbols and Typographic Conventions ccccccccssseeceeeeeeeeeeeeeeeeeeeeeseeeeeeeeesaaees 1 1 3 Other Applicable Documents oooocccnnncccccoonccnnnnccnnnnonnncnnnnnonononannnnnnnnnnnnannnnnnnnnnnnnnans 2 2 Safety 3 21 Prescribed D 3 2 2 General Safety InStructiONS viciosos iia 3 2 2 1 Safety Measures During Installation 00annnnnennneennnnnneneennnenenesrrnrnrnrrennne nne 4 2 2 2 Safety Measures During Start Up cccccccccoccccnncccccccnonnccnnnncnononanncnonononononannnns 5 2 2 3 Safety Measures During Operation cccccccccoconnconnccccncnonnccnnnncnnononcnnnnnonnnnnnnos 6 2 2 4 Safety Measures During Mammtenance 6 3 Product Description 7 3 1 Features and Applications cccccccccssssccccseseecsesececceuseeessaseeecseuseecseuseesseseeessaeees 7 3 2 Model Overview ccccccccccsesececceseceeceeeececeeceeseeaecesceaceeseueeessaaeeesseseeeeseaeeeesseeeeeas 8 33 PS A o 9 3 4 Scope of Delen 9 S MEM o o o 10 3 6 Technical Featill CS rennen en 10 3 0 1 Linear ENG OGM PM 10 3 6 2 Reference Gwtch eissuuuireriuninennsriinnuiui inanan aia iaia 11 4 Unpacking 13 5 Installation 15 5 1 General Notes on Insiallaton 15 5 2 Mounting the Stage on a Surface oocccccccccccocnncconnnoconononnncnnnnnonnnnnnnnnnnnnononnnnnnnnanon
27. re that the piezomotor of the stage does not come into contact with lubricants page 34 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Mano Positioning 9 Troubleshooting Problem Noise during operation Increased wear Reduced accuracy Functional impairment after system modification No or limited vertical motion Possible Causes Uncontrolled vibration of the M 663 Warped base body C 185 drive electronics has been replaced M 663 has been replaced Load too high 9 Troubleshooting Solution Immediately switch off the servo control system of the affected stage axes Check the settings of the servo control parameters Mount the M 663 on a flat surface The recommended evenness for the surface is 10 um Repeat the fine tuning procedure for the C 185 drive electronics and the M 663 see the frequency tuning description in the user manual of the drive electronics With multi axis systems respect the assignment of axes to the drive electronics This assignment is indicated by labels on the devices Reduce the load to a maximum of 50 g For loads higher than 50 g you will need a mechanism for counterbalancing gravity In this case contact our customer service department see p 37 If the problem that occurred with your system is not listed in the table above or it cannot be solved as described contact our customer service department See p 37 www pi w
28. rrows in the figure 4 Ensure that the screw head does not protrude from the counter sunk hole 5 Move the platform of the upper M 663 manually so that only one counter sunk hole in the base body is accessible 6 Mount the upper M 663 with one of the included screws on the moving platform of the lower M 663 7 Ensure that the screw head does not protrude from the counter sunk hole 5 4 2 Stacking a Z System You can form a Z system XZ or XYZ combination by mounting one M 663 on another M 663 using a mounting bracket You can use both the M 663 465 and the M 663 Y65 to form a Z system Screws that are too long The M 663 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform see p 44 gt Only use screws of the correct length for the respective mounting holes INFORMATION The mounting bracket can also be mounted on the M 663 in a 180 rotated position gt Mount the load centrically INFORMATION If the M 663 is mounted vertically the maximum load is 50 g For loads higher than 50 g you will need a mechanism for counterbalancing gravity In this case contact our customer service department see p 37 page 22 M 663 Linear Positioning Stage Version 1 6 0 www pi ws PI Piezo Nano Positioning 5 Installation Figure 9 Z system consisting of two M 663 465 stages and an M 663 AV1 mounting bracket Prerequisites v You have read and understood t
29. s M 663 Linear Positioning Stage Version 1 6 0 page 35 PI Piezo Nano Positioning 10 Customer Service 10 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Current firmware version of the controller if present Software version of driver or host software if present Operating system on host PC if present The latest versions of the relevant user manuals for your system are available for download on our website http www pi ws WWW pi ws M 663 Linear Positioning Stage Version 1 6 0 page 37 PI Piezo Nano Positioning 11 Technical Data 11 Technical Data In this Chapter ee e e Ta EE 39 Drive Performance a anannnnnnnnnnennnnnnnnnnnnnnnnnne 41 DTIC TISION NS E 44 Pin Assignments sees 47 Suitable Drive Electronics and Controllers 47 11 1 Specifications M 663 465 M 663 Y65 Units Tolerance Active axes X Motion and positioning Travel range 19 mm Integrated sensor Linear encoder Sensor resolution 0 1 um Min incremental motion 0 3 um typ Bidirectional repeatability 0 3 um typ Unidirectional repeatability 0 2 um typ Pitch 300 urad typ Yaw 300 urad typ Velocity 400 mm s max Reference switch repeatability 1 um typ Mechanical properties Load 5 N
30. s must not protrude from the counter sunk holes Note the depth of the mounting holes in the moving platform Only use screws of the correct length for the respective mounting holes Only mount the M 663 and the loads on the M 663 using the mounting fixtures holes intended for this purpose The M 663 heats up during operation High temperatures can influence your application page 4 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 2 Safety gt Install the M 663 so that your application is not affected by the dissipating heat Cable extensions can affect the performance of the M 663 and damage the electronics gt Only use genuine PI parts to connect the M 663 to the electronics gt Do not use cable extensions If you need longer cables use the M 663 AB adapter box and an extension cable from PI see p 10 Avoid shorting the piezo voltage lines since this can damage the electronics 2 2 2 Safety Measures During Start Up gt Do not start up the M 663 until it is fully mounted and connected Your application can be damaged by uncontrolled vibration of the M 663 A typical sign of vibration is noise during the operation of the M 663 gt Immediately switch off the servo control system of the affected stage axes gt Check the settings of the servo control parameters Moving parts attached to devices with motorized stages can accelerate rapidly and generate high forces whi
31. sult in personal injury and or damage to the M 663 gt Only use the M 663 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety M 663 Linear Positioning Stage Version 1 6 0 page 3 2 Safety Piezo Nano Positioning PI The operator is responsible for the correct installation and operation of the M 663 Organizational Measures User Manual gt Always keep this user manual next to the M 663 when using the M 663 If the user manual is lost or damaged contact our customer service department see p 37 Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing important information serious or fatal injury as well as property damage can result gt Only install and operate the M 663 after having read and understood this user manual Personnel Qualification Only authorized and qualified personnel must install operate maintain and clean the M 663 2 2 1 Safety Measures During Installation The M 663 can be damaged by screws that are too long and parts that are wrongly mounted When mounting the M 663 on a surface make sure that the mounting screws do not interfere with the motion of the stage The screw head
32. vel gt For continuous operation at other temperatures refer to the maximum allowable duty cycle vs ambient temperature see p 42 2 2 4 Safety Measures During Maintenance The M 663 is precisely aligned gt Do not loosen any sealed screws Dirt oil lubricants and condensation will render the motor drive inoperable gt Ensure that the piezomotor of the M 663 does not come into contact with lubricants gt Keep the M 663 free from dirt and condensation page 6 M 663 Linear Positioning Stage Version 1 6 0 WWVW pi ws PI Piezo Nano Positioning 3 Product Description 3 Product Description In this Chapter Features and Applications 7 Model Cvenview 8 Product View 9 Scope of Delen 9 Accessories Lie rores riders aut e xpi a vaa ae rare scri 10 Technical Features eese 10 3 1 Features and Applications www pi ws M 663 linear positioning stages make use of PlLine ultrasonic piezo linear motors enabling a compact design and low profile An integrated linear encoder offers precision position control with 0 1 um resolution The PILine linear motor provides push forces to 2 N and a maximum velocity of up to 400 mm s over a 19 mm travel range The stages can be combined to XY systems for applications requiring a multi axis alignment see p 20 Vacuum compatible versions of the M 663 are available on request M 663 Linear Positioning Stage Version 1 6 0 page 7 3 Product
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