HR Motors - Nanomotion
Contents
1. 41 3 FOR HIGH VACUUM MOTOR t PRELOAD 53 2 RELEASE VENUS TYPx2 FINGER ECCENTRICS Oy oflayout drowngs MSPS 4430 120 20 ang 5P2V M IPS 23 05 49 Dimensions for HR8 Standard and High Vacuum Motors Document No HR00458000 00 Rev C DIRECTION OF MOTIOIN 21 02 _ x 995 z 2 THREADS ele FOR GROUND S S 4 Si 5 5 o N H 143302 CIPIT 40 5 14 3 IYPx4 nz 5 FRONT COVER FRONT COVER N 454 L BACKWARD BACKWARD s 41 3 0 6 0 2 FRONT COVER FRONT COVER 40 6 FORWARD FORWARD TYPx2 41 9 REF y o a Ap mao 4 THREADS NOTES 25 8 IYPx2 2 18 8 0 2 58 TYPx 02 10 7 FINGER TYPx2 TIPS 3 05 FOR MOUNTING PRELOAD RELEASE ECCENTRICS hw N PRELOAD RELEASE ECCENTRICS SHOULD REMAIN ACCESIBLE AFTER MOUNTING ALL DIMENSIONS REFER TO A MOTOR CORRECILY MOUNTED AGAINST ALUMINA STRIP ALL DIMENSIONS ARE IN MM GENERAL TOLERANCE 10 1 copy of layout drawing 98 U MIO LOO 39 Dimensions for HR8 Ultra High Vacuum Motor 50 Document No HR00458000 00 Rev C2. A B HR1 2 mm 6 mm HR2 2 mm 11 mm HR4 3 5 mm 12 mm HR8 3 5 mm 21 mm Stage Carriage Design Guidelines The Carriage is the customer designed portion of the Stage that is moved by the HR motor The interface between the Stage and the motor is the Ceramic Strip The designer must limit the Stage motion to prevent a loss of contact between the motor tip s and the Ceramic Strip on the Carriage The provided ceramic driving plate should not exceed the stage It must be supported by a solid even backing along all its entire length to avoid breaking when motor is pressed against it No holes or grooves are allowed on the ceramic mounting surface or at a proximity to the surface to allow smooth operation of the motor the carriage motion should be limited to assure that motor tips do not lose contact with the ceramic at any point Hard limits are recommended on top of any soft or electrical limits see Figure 5 at the ends of the carriage movement 5mm Motor tip to edge of Ceramic i Stage Carriage HR X Motor Ceramic Drive Strip Figure 5 Distance between motor tip and edge of Ceramic Drive Strip For example design mechanical limiters so that the Driving Strip extends at least 5 mm beyond the carriage s maximum positive or negative travel The actual distance is dependent on the application and usage of the motor Document No HR00458000 00 Rev C 16 Preparing the Stage Base Bonding the Driving Element to the
3. MSP1J02001 11 in half between the two arms b Slide each half of the spacer from the opposite sides of the motor until they touch the motor tip Alignment ridge Figure 11 Flat Spacers Positioned Next to Motor Tip encoder not shown c Push the motor against the spacers and tighten the screws d Remove the spacers and perform motor conditioning according to Motor Conditioning on page 27 Document No HR00458000 00 Rev C 22 Motor Installation Linear and Rotary Stages For rotary element with a diameter of 60 80mm a From the bottom of the stage set the spacer PN FBR0600001 00 in the two holes It may be necessary to move the motor slightly BKM If there is no room to set the block spacer from the bottom of the stage cut the 1 8mm spacer in half between the arms Slide each half of the spacer from the side of the motor until they touch the motor tip b Push the motor against the pins and tighten the mounting screws Figure 12 Relation of HR Motor Spacer Pins and Ceramic Ring encoder not shown c Remove the spacers and perform motor conditioning according to Motor Conditioning on page 27 Mounting HR4 and HR8 motors on Linear Stage Nanomotion HR4 and HR8 motors have preload screws The motors are supplied with the preload screws in the locked position and ready for mounting on the stage 1 Ensure that the two preload screws are turned fully CCW Document No HR00458000 00 Rev C
4. x 40 5 la aig 2 FRONT COVER FRONT COVER 258 04 HIS i BACKWARD _ BACKWARD 41 3 0 6 0 2 FRONT COVER FRONT COVER FORWARD FORWARD L 41 9 REF d NOTES 7 1 PRELOAD RELEASE ECCENTRICS SHOULD 4 THREADS REMAIN ACCESIBLE AFTER MOUNTING FOR MOUNTING 2 3 4 PRELOAD RELEASE ECCENTRICS ALL DIMENSIONS REFER TO A MOTOR CORRECTLY MOUNTED AGAINST ALUMINA STRIP ALL DIMENSIONS ARE IN MM GENERAL TOLERANCE 0 copy of layout drawing SP4U M10 L00 20 Dimensions for HR4 Ultra High Vacuum Motors 48 Document No HR00458000 00 Rev C HR8 MECHANICAL DRAWI NGS DIRECTION OF MOTION GND PAN SCREW 41 7 REF M3x0 5 9 20 2 x2 16 4 30 2 TYPx2 25 8 10 7 0 2 4 X c i Hi i 5 t ce A f 1 J ml al 14 3 50 2 SY Sg 40 3 14 gt ES FRONT COVER FRONT COVER TOS POE MILII 46 6 BACKWARD BACKWARD s z F 41 1 0 6 0 2 FRONT COVER FRONT COVER 40 6 40 1 FORWARD FORWARD TYPx2 _ 5NOM NON MIS NOTES ajz M4x0 7 HE Lol 7 PRELOAD RELEASE ECCENTRICS SHOULD iif La 4 THREADS REMAIN ACCESABLE AFTER MOUNTING FOR MOUNTING 2 ALLDIMENSIONS REFER TO A MOTOR CORRECTLY Sla Il MOUNTED AGAINST ALUMINA STRIP e ra S X 8 ALL DIMENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 aj gt ei 41 9 FOR HIGH VACUUM MOTOR 4 e 40 5 FOR HIGH VACUUM MOTOR a D 2
5. A vacuum application requires 1 25N at a velocity of 100mm sec The graph shows that this point of operation corresponds to the curve d The table shows that curve d and a vacuum environment require that a duty cycle of 1796 will not be exceeded and the maximum continuous operation time is limited to 72 seconds Document No HR00458000 00 Rev C 36 EOP for HR Motors Driven by AB5 Drivers EOP FoR HR Morons DRIVEN BY AB5 DRIVERS The AB5 drivers are preferable for a perfect servo tracking and or very low ripple constant velocity Refer to the AB5 Drivers User Manual AB05458200 The AB5 unique features result in the motor consuming more power and in a lower EOP compared to the EOP for a motor operating with the AB1A Driver Figure 9 illustrates motor velocity as a function of the applied AB5 Driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance 300 250 200 150 Velocity mm sec 100 50 Command V Figure 3 Velocity vs Command Using the AB5 Driver This graph and the following table are designed to help the user determine the correct envelope of performance and avoid overheating and damaging the motor HR1 HR2 HR4 4 8 16 32 6 12 24 Force N 0 50 100 150 200 250 300 Velocity mm sec Figure 4 Force vs Velocity Using the AB5 Driver at the Various Work Regimes Document No HR00458000 00 Rev C 37 Exampl
6. Table 1 Performance Specifications Specification HR1 HR2 HR4 HR8 Maximum Allowable 250 mm sec 250 mm sec 250 mm sec 250 mm sec Velocity Dynamic Stall Force 3 5 to 4 5 N 7to9N 15 18 N 30 36 N Static Holding Force 35N 7N 14 N 28 N Reference value 0 8 1 1 4 1 8 2 3 2 8 3 3 3 8 Non E i tiff on Energized Stiffness N um N um N um N um Nominal Preload on 18N 36 N 72N 144 N Stage 1 2 4 i dn N volt ay N Volt Driver and command N Volt N Volt dependent Kf 12 to18 24 36 60 72 120 144 N sec m N sec m N sec m N sec m Offset 1 2 V Driver dependent Nominal Lifetime 20 000 hours under nominal operating conditions Document No HR00458000 00 Rev C 31 HR Motor Specifications Table 2 Electrical Specifications Specification HR1 HR2 HR4 HR8 Maximal Volt M idi 280 Vrms 280 Vrms 270 Vrms 270 Vrms 39 6 KHz sine wave Typical motor current at 120 250 320 600 max voltage Cable length dependent mA rms mA rms mA rms mA rms Maximum Power Con 5W 10 W 20 W 40 W sumption Table 3 Environmental Specifications Specification HR1 HR2 HR4 HR8 Ambient Temperature 0 509 C Storage 40 to 702 C Humidity 0 80 non condensing Vacuum level for high vacuum motors le 7 torr guaranteed only after baking Vacuum level for ultra high vacuum motors 16 10 torr guaranteed only after baking Maximum Baking Tem perature f
7. 23 Motor Installation Linear and Rotary Stages Motor Tips Drive Strip ol gt i o CO Figure 13 Preload Screw Turned CCW 3 270 V RMS 600 mA RMS OMOTION itented KHz 2 Set the motor in place and finger tighten the four mounting screws M4 and washers Apply a small amount of blue Loctite to the screws before mounting The motor should be secure but able to move 3 Press the motor so that the motor tips are against the Drive Strip 4 Using a diagonal sequence tighten the four mounting screws M3 Ensure that the motor does not move during this process Q1 30 Q4 20 5 Apply a torque of 0 5 to 0 7 Nm to each screw 6 Turn the Preload screws CW to load the motor tips Document No HR00458000 00 Rev C 24 Electrical Connections Motor Tips Drive Strip e an M za gt lt SE 8 2 M8 55 Figure 14 Preload Screws turned CW to Load the Motor Tips 7 Perform motor conditioning according to Motor Conditioning on page 27 ELECTRI CAL CONNECTI ONS The motor requires two electrical connections e System ground Power and control cable Grounding the Motor Nanomotion motors must be grounded to maintain electrical continuity with the Driver and ensure electrical safety for the system and users Failure to connect the motor to the system ground is a hazard to personnel safety and equipme
8. Do not immerse the motor in any solvent or cleaning agent e Use only a clean cloth to wipe the motor e Be sure that the motor and especially the motor s tips are not sub jected to mechanical shocks e not operate Nanomotion vacuum and high vacuum motors in air pressure between 0 1 torr and 200 torr Document No HR00458000 00 Rev C 11 MOUNTI NG AND CONNECTI NG HR MOTORS For optimal motor performance it is recommended to use only the Ceramic Drive Strips provided by Nanomotion These Ceramics have been specifically designed to work with Nanomotion motors Substituting this strip with any other material might reduce motor performance or damage the motor Use of Ceramic Drive Strips from suppliers other than Nanomotion voids the motor warranty Stage Carriage Encoder eim Mounting Base Ceramic Drive Stage Base Strip Figure 1 Example Mounting Base image is for reference only Document No HR00458000 00 Rev C 12 Preparing the Stage Base PREPARI NG THE STAGE BASE The application s HR motor and Carriage are mounted on the Stage base The form of the Base and the Carriage are application dependent However some basic rules are applicable to all designs to ensure optimal performance It is critical that the stiffness of the stage perpendicular to the direction of carriage travel is gt 50N um Motor Mounting Holes The HR1 and HR2 motors require a mounting base Figure 2 with slots f
9. M3x0 5 t eo Q T 5 NOM s _ 155905 255 02 NOTES 1 ALL DIMENSIONS MM 2 GENERAL TOLERANCE 0 1 copy of layout crowing SPI U M 0 L00 Dimensions for HR1 Ultra High Vacuum Motor 44 Document No HR00458000 00 Rev C HR2 MECHANI CAL DRAWI NGS FINGER TIPS 23 05 1 T d i it YTN i i rico I L 7 A IL a d m u 4 Cx 15 6 0 2 _ 8 N ALT REF FREE 40 5 REF PRELOADED 38 7 0 2 1 8 0 05 LL PRELOADED M3x0 5 3 FREE 4 THREADS ii FOR MOUNTING r1 feet m n 7 gt v LES amp e Fw EM TI le ais e A YEG a TYPx2 9 5 REF PRELOADED 10 7 REF FREE DIRECTION EE Ce E ii POWER CABLE 43 22 FOR HR2 1 V F 15 5 40 5 e GND PAN SCRE 257 04 M3x0 5 NOTES 1 ALL DIMENSIONS ARE IN MM 2 GENERALTOLERANCE 20 1 Dimensions for HR2 Standard and High Vacuum Motors 45 Document No HR00458000 00 Rev C 2 TYPx2 11 2 30 2 FINGER TIPS 23 05 41 7 REF FREE 40 5 REF PRELOADED 38 7 0 2 3 FREE 1 8 20 05 PRELOADED 25 TYPx2 10 7 REF FREE 9 5 REF PRELOADED DIRECTION c GND PAN SCREW i P Y r Fg M3x0 5 Drs so A ba t t t nee H 4 3 j i Mj 255 02
10. complete the interconnections of the motor Driver and servo controller Conditioning of the motor is important to stabilize the motor s dynamic performance and balance the motor heat dissipation However conditioning should be performed any time a motor has been assembled on the stage or its pre load released Nanomotion supplies clean V and UHV motors yet the bake out is required in order to remove residual contaminants and absorbed humidity from the motors and other system components Refer to the Nanomotion Vacuum and Ultra High Vacuum Motors Bake out Procedure Document number HR00458001 Perform conditioning as follows when using Nanomotion ABO5 Driver Setthe conditioning procedure to cover the whole expected operated travel of the ceramic drive strip e Run the stage repetitively from end to end in closed loop at e velocity of 100 mm sec Document No HR00458000 00 Rev C 27 Motor Conditioning e Acceleration 1 5 m sec e Duty cycle and duration Driver Duty cycle Duration AB1 AB2 ABA 5096 4 hrs AB5 2596 8 hrs Before operating the motor verify the following Make sure the Driver is set to operate with the motor All motors are properly mounted and pre loaded e Mechanical screws lock all connectors The external power supply is capable of supplying the required power consumption of the Driver There is no command from the Controller to the motor when turning the power
11. on For AB5 or XCD in high resolution mode run the motor for 8 hours at 25 DC at the same conditions when using XCD controller driver it is recommended to condition the motor in standard mode even if the application uses high resolution mode Never operate the motor during vacuum pumping or at pressure of 0 1 to 200 torr Corona region to avoid electric brake through air When conditioning is completed carefully clean the Ceramic with a lint free cloth and isopropyl Alcohol IPA Do not remove the motor from the base during cleaning General remarks Conditioning should be repeated if the motor is removed from the stage and then reinstalled or if the preload is released Do not condition the motor in a vacuum environment Maintenance The HR motors have no user repairable or replaceable parts However the user might need to clean the motor tips and ceramic drive plane from time to time The frequency of cleaning depends on the operating environment and type of operating conditions Do not remove the cover of the HR motor The motor has high voltage inside when power is applied Document No HR00458000 00 Rev C 28 Motor Conditioning To clean the motor tips and ceramic plane 1 Remove power from the motor 2 Loosen the motor mounting screws A For HR4 and HR8 motors turn the pre load screw fully CCW 3 Wipe the Drive Strip and motor tips using a piece of lint free cloth and isopropy
12. operate the motor for an extended period of time at a specific duty cycle or alternatively can operate the motor for a continuous time period specified under Maximal Continuous Operation Time After the continuous operation is completed the Driver must be disabled to cool down the motor for 400 sec in air and for 700 sec in vacuum environment The duty cycle is the ratio of the operation time and the total work cycle operation time idle time When operating the motor with the AB5 Driver continuously in Brake Off Mode the motor consumes power at all times even when the control command voltage is 0 zero thus the time at 0 command is accounted in the heating process and reduces the thermal EOP Upon operating a motion system in vacuum it is expected that the Coefficient of Friction of the bearing structure will increase This may require changing the system operation point on the thermal EOP curves STAGE HEAT DISSIPATION CONSI DERATI ON The motor heat dissipation mechanism is by convection and radiation to the motor case and by conduction through motor s tips Hence the motor and the Ceramic bases must both be thermally designed to dissipate 2W each per motor s finger tip with maximum temperature rise of 15 C Thermal EOP for HR1 Motor Driven by AB1A AB2 ABA Drivers Document No HR00458000 00 Rev C 34 Stage Heat Dissipation Consideration Figure 7 illustrates motor velocity as a function of the applied Driver comman
13. over a minimum of 5mm Figure 6 Figure 7 Use one of the following or a compatible adhesive Emerson amp Cuming Ecobond 24 for vacuum applications e 3M 2216 epoxy or Arldite Radite for non vacuum applications Document No HR00458000 00 Rev C 17 Preparing the Stage Base Suggested gluing points Figure 6 Securing the Ceramic to the Stage When attaching ceramic strips with a width dimension A of 6mm or less HR1 EDGE and EDGE 4X motors apply epoxy on both the upper and lower surfaces Epoxy coverage Epoxy coverage Figure 7 Epoxy Coverage on Flat and 90 Degree Joints Ensure that the epoxy contacts the ceramic plate and the stage carriage Ensure that it does not flow onto the Ceramic Strip s front surface 5 Allow the required time period for curing according to the Epoxy manufacturer specifications 6 Mount the Carriage on the Stage Document No HR00458000 00 Rev C 18 Motor Installation Linear and Rotary Stages Mounting Ceramic Ring on Radial Stage 1 Verify that all parts are clean Spread an even layer of epoxy on the inner rim of the ceramic ring Slide the ceramic ring onto the flange and turn it CW and CCW to spread the epoxy evenly Ceramic ring Radial flange Apply expoxy to inner surface Figure 8 Mounting Ceramic Ring on Radial Flange 4 Use a dial indicator with a resolution of 2 micron or less to center the ring to 10micron runout 5 Allow the r
14. 1 Bake out Conditions Minimal Temperature Temperature Motor Recommended C C Duration Type Vacuum Level without Motor with NM Motor hours Torr Connector Connector V VN 104 110 100 24 UHV 104 140 N A 24 Bake out at 100 C may not be sufficient to achieve full motor baking 6 Gradually raise the temperature at a maximum rate of 4 C min to the temperature specified in Table 1 7 Maintain the motor for 24 hours in the oven under the specified vacuum conditions 8 Gradually cool down the vacuum oven at a typical rate of no more then 4 C min 9 After the vacuum oven has reached room temperature leave the motor for relaxation time at an ambient temperature for 48 hours before testing or mounting the motor 10 After 48 hours retract motor preload screws The motor is ready for testing or mounting Full Systems with Motors Mounted For baking out a full system with motors mounted perform the following steps 1 Disconnect the motor connector from the driver or the LC box 2 Itis assumed that the motor connector is not the NM original connector but rather a custom connector chosen by the stage designer Verify the pinout of the actual connector used in the system and identify the pins associated with the three wire leads of the motor cable white black and red 3 Short circuit connector s motor pins Short circuit the pins associated with three wire lea
15. 356 1800356 2007 533057 pending 2011 093431 pending 7 876 509 10 2007 7009928 pending 200780019448 6 7713361 9 pending 12 294 926 pending GB2008000004178 pending GB2009000003796 pending 12 398 216 pending GB2446428 12 517 261 pending 08702695 1 pending 10 2009 7017629 pending 12 524 164 pending 12 581 194 pending J J Website www nanomotion com Customer Service Contact your local distributor or email Nanomotion Ltd Technical Support Department at nano nanomotion com with detailed problem description additions corrections or suggestions Headquarters Israel USA Mordot HaCarmel Industrial Park HaYetsira Street PO Box 623 Yokneam 20692 Tel 972 73 249 8000 Fax 972 73 249 8099 Email nano nanomotion com 1 Comac Loop Suite 14B2 Ronkonkoma NY 11779 Tel 1 800 821 6266 Fax 1 631 585 1947 Email nanoUS nanomotion com Revision History The following table shows the last three revisions to this document ECO Doc Date Description Rev 752 A 9 2015 Initial release of combined HR motor user manual B 01 2015 Corrected typographic errors C 09 2015 Corrected HR2 motor stiffness value to read 1 4 1 8 N um Table of Contents Introduction iva ire h S DR CUI d Re 7 GE Compliance cni tios et e nE ERI IE Neue tate eee Ra a ER Wet 7 Conventions used in this manual eese e Renew ue e E P ERE EE Ed 7 Related Products c
16. 5 ei 5NOM M2x0 4 VIEW A 2 THREADS FOR TERMINAL i P BLOCK MOUNTING tig T i M3x0 5 E 4 THREADS x FOR MOUNTING 2 NS NOTES 1 ALL DIMENSIONS ARE IN 2 GENERAL TOLERANCE 20 1 Copy of layout crawing SP2U M10 L00 20 Dimensions for HR2 Ultra High Vacuum Motors 46 Document No HR00458000 00 Rev C HR4 MECHANICAL DRAWI NGS DIRECTION OF MOTION 25 8 0 1 TYPx2 10 7 0 2 23 2 TYP x2 14 3 40 2 TYPx2 46 6 40 6 TYPx2 IYPx2 18 8 0 2 de FINGER TIPS 23 05 PRELOAD RELEASE ECCENTRICS 75 0 2 TYPx2 3 9 0 2 TYPx2 1 4 0 1 GND PAN SCREW M3x0 5 7 2 FRONT COVER BACKWARD 0 60 2 FRONT COVER FORWARD NOTES m 9 NOM i x s ui f 40 5 FRONT COVER BACKWARD 41 3 FRONT COVER FORWARD 4 9 REF 7 4 THREADS l FOR MOUNTING PRELOAD RELEASE ECCENTRICS SHOULD REMAIN ACCESSIBLE AFTER MOUNTING ALL DIMENSIONS REFER TO A CORRECTLY MOUNTED AGAINST ALUMINA STRIP ALL DIMENSIONS A GENERAL TOLERANCE 0 1 POWER CABLE 2 FOR HR4 1 V REIN MM MOTOR 53 Dimensions for HR4 Standard and High Vacuum Motors 47 Document No HR00458000 00 Rev C DIRECTION OF MOTIOIN 14 3 0 2 TYPx2 46 6 25 8 TYPx2 10 7 0 2 2 40 6 nPS 23 05 M3x0 5 2 THREADS FOR GROUND ERE
17. Carriage The Driving Strip provides the interface between the motor s tips and the Carriage It must present a solid surface to ensure accuracy of movement as well as long operating life Mounting Ceramic Element on Linear Stage The Driving Strip is supplied with double sided tape along one surface for mounting to the carriage The Drive Strip must be fully supported by the carriage along its full length and width The Drive Strip must be secured to the Carriage at its center with epoxy to ensure rigidity along its length The instructions given in this section refer to the standard Ceramics provided by Nanomotion Nanomotion does not guarantee performance attained by strips pur chased from other sources 1 Clean the surface of the carriage where the Driving Strip will be bonded Use a suitable agent such as Isopropyl Alcohol Ethanol Acetone or Methanol 2 Peel off the self adhesive backing paper on the Ceramic The self adhesive tape is compatible with high vacuum applications Ensure there are no folds or large bubbles in the adhesive layer before mounting the ceramic to the stage 3 Position the Driving Strip on the drive surface of the carriage and press along its length Ensure that bubbles or wrinkles do not form between the drive strip and mounting surface 4 Apply epoxy adhesive at the center of the Ceramic The epoxy should be applied along the joint of the ceramic strip and the carriage
18. ave an interconnect cable with a 9 pin D type female connector The following image and table provide pinout information Figure 15 Motor Connector Pin Function Description 1 GND System ground 2 N C with AB1A Driver Phase 3 Motor Up White wire High voltage input 4 Motor Common Black wire High Voltage input for AB1A GND for AB5 AB2 and ABA drivers as well as XCD Control ler Drivers 5 Motor Down Red wire High voltage input Document No HR00458000 00 Rev C 26 Motor Conditioning Pin Function Description 6 Motor Connected short pin 6 to pin 1 enables Driver Safety input Open on pin 6 disables the Driver 7 GND System ground Connected to connector hood 8 N C Not connected 9 N C Not connected Ultra High Vacuum Motor Connection The HR motors designed for ultra high vacuum operation do not have an outlet cable or a connector Instead there are 3 TFE jacketed wires extending outside the motor allowing the user to connect the motor to application specific hardware The pinout for the three wires is the same as for standard motors black wire common white wire up red wire down Note that the safety interlock on pin 6 is not available with this three wire connection and should be added by the customer MOTOR CONDI TI ONI NG Before conditioning the motor refer to the user manual for the Driver used in the application for the instructions on how to
19. d voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance 2 250 200 150 100 Velocity mm sec 50 0 1 2 3 4 5 6 7 8 9 10 Figure 1 Figure 7 Motor Velocity vs Command The motor operates horizontally at room temperature and low duty cycle 1096 It interfaces with the Ceramic according to Nanomotion Specifications and a cross roller high quality slide Figure 8 are designed to help the user determining the correct envelope of performance and avoid overheating and damaging the motor HR1 HR2 HR4 HR8 4 8 16 32 Force N N A 0 50 100 150 200 250 300 Velocity mm sec Figure 2 Figure 8 Motor Force vs Velocity at the Various Work Regimes a g Document No HR00458000 00 Rev C 35 Stage Heat Dissipation Consideration Table 1 EOP Table for HR Motors Driven by AB1A AB2 AB4 Air 25 C Air 50 C Vacuum Maximal Maximal Maximal Curve Duty Continuous DUty Continuous Puty Continuous Cycle Operation Cycle Operation Cycle Operation 1 76 time sec 76 time sec 26 time sec a 100 00 100 00 100 00 b 100 0 100 00 44 184 C 100 oo 92 137 26 107 d 100 oo 62 93 17 72 e 78 87 47 70 13 55 f 56 62 33 50 9 39 g 50 56 30 45 8 35 An Example for Defining the EOP for AB1A Driver in Vacuum Environment An example for using the graph and table for the AB1A Driver
20. ds of the motor cable white black and red e Ifthe NM original connector is maintained short circuit according to Table 2 Table 2 Motor 9 Pin D Type Connector Description Wire Pin White 3 Black 4 RedorOrange 5 4 Place the system in a vacuum oven 5 Perform bake out according to step 5 on page 41 through step 9 on page 41 Multiple Motors per Axis Systems For baking out a system with motors mounted and connected by means of branch cables perform the following steps 1 Disconnect the motors from the branch cable Place the system in a vacuum oven Perform bake out according to step 2 on page 41 through step 5 on page 42 Document No HR00458000 00 Rev C 42 HR1 MECHANICAL DRAWINGS NOM ha o he 17 E Lad i tm D E i i E X A e I Rf I 4 PREL Lr AT 3 FREE RELOADED 4 hes i i d n i y 2 20 gt i Ste fe 1 Px np j rxz REF FK 2 SRE PRELOADED Dimensions for HR1 Standard and High Vacuum Motor Document No HR00458000 00 Rev C 43 FINGER TIP 3 05 j _41 7 REF FREE 40 5 REF PRELOADED j__38 7 0 2 3 FREE _ 1 8 0 05 PRELOADED N g N TYPx2 LL 10 7 REF FREE 9 5 REF PRELOADED 7 7 02 TYPx2 21 5 40 1 M3x0 5 4 THREADS FOR MOUNTING i TYPx2 DIRECTION OF MOTION GND PAN SCREW
21. e maximum continuous operation time is limited to 90 seconds Alternatively AB5 can be used giving duty cycle and continuous operation of 2396 and 100 sec respectively The same conditions under Air at 25 C will result in 10096 Duty Cycle and unlimited continuous operation Document No HR00458000 00 Rev C 38 Example EOP Definitions Example Define EOP for AB5 Driver in Vacuum Environment Brake Off Mode When Brake Off Mode is used under vacuum conditions the motor will overheat at any duty cycle if operated for a prolong time To calculate the max operation time use curve O a for time at 0 command and the operation curve for the operating time according to the following formula Tmax max continues operation at the operation regime DC max continuous operation under regime a 1 DC If operating under curve c using AB5 in a duty cycle of 1096 the total operation time is Tmax 150 0 1 230 1 0 9 222 sec Once Tmax is reached the Driver should be disabled for a period of 700 sec Document No HR00458000 00 Rev C 39 This appendix provides the following information e Vacuum motor baking instructions e Mechanical Drawings e HRI Mechanical Drawings on page 43 HR2 Mechanical Drawings on page 45 e HRA Mechanical Drawings on page 47 e HR8 Mechanical Drawings on page 49 VACUUM MOTOR BAKING I NSTRUCTI ONS This manual is intended to guide the user in performing the bake out procedure on Nanomot
22. e EOP Definitions Table 2 EOP Table for HR Motors Driven by the AB5 Driver Air 25 C Vacuum Curve Duty Cycle Duty Cycle Continuous Duty Cycle Continuous Brake Off Brake On Operation Brake On Operation 96 sec sec 0 8 100 100 oo 56 500 b 100 100 00 54 450 100 100 oo 45 280 d 100 100 oo 33 170 e 100 100 00 23 100 f 53 58 170 12 66 g 33 48 77 10 44 h 17 28 32 6 5 25 In the Brake Off Mode the full advantage of the AB5 Driver is enabled giving a linear response best tracking and low velocity performance Using this mode the motor operates continuously even at 0 command and special attention must be given to maintain the work regime within the permitted Duty Cycle and Maximal Continuous Operation Time Once the operation time has reached the Maximal Continuous Operation Time even at Brake Off Mode without motion the Driver must be disabled to allow the motor to cool down for at least 400 seconds in air and 700 sec in vacuum environment EXAMPLE EOP DEFINITIONS Define EOP for AB5 Driver in Vacuum Environment Brake On Mode A vacuum application requires 1N at a velocity of 80mm sec and the motor is disabled when stand still Brake On Mode The graph shows that this point of operation corresponds to the curve e In Figure 4 AB5 in Brake On Mode shows that curve e and a vacuum environment require that a duty cycle of 1396 will not be exceeded and th
23. equired time period for curing according to the Epoxy manufacturer specifications MOTOR I NSTALLATI ON LINEAR AND ROTARY STAGES After the Carriage is mounted on the Base the motor can be mounted HR motors can be mounted on either of the motor s two flat surfaces The primary consideration for HR1 and HR2 motors is the cable routing To install HR motors use the following items e Spacer It is necessary to use a spacer to mount HR1 and HR2 motors on both linear Figure 9 and rotary stages The spacer provides the motor s pre load Document No HR00458000 00 Rev C 19 Motor Installation Linear and Rotary Stages Figure 9 Spacer 1 8mm thickness PN MSP1J02001 11 Allen wrench M3 for HR1 and HR2 motors and M4 for HR4 and HR8 motors Screw and washer M3 for HR1 and HR2 motors and MA for 4 and HR8 motors Screw length should be sufficient to pass the base and contact least 1 2 the depth of the motor body If the screw protrudes from the motor care should be taken that it does not interfere with the movement of other stage parts such as the stroke of the upper axis Mounting HR1 and HR2 Motors on Linear Stage Nanomotion HR1 and HR2 motors do not have pre load screws The pre load is set by using a 1 8mm thick spacer P N MSP1J 02001 11 1 Set the motor in place and finger tighten the four mounting screws M3 and washers Apply a small amount of blue Loctite to the screws before mounting The motor
24. ese DR Sm dne valine d EE desee e E atat 8 Related Docurnerntetonr eem e E Aye Seva Pe Ree eda EE 8 Overview of the HR Motors 10 EIESIMOIOE SYSTEM tei o pO e Ee e ED or eni RN EP ein 10 General Precautions o qoe Rien doti po eects NR End nt vea ent due pud BS S deca at 11 Mounting and Connecting HR 5 12 Preparing the Stage Bases vb eS e be 13 Motor Mounting Holes sae Areas oa CR pnr os eR e ehe the BAY Oe ar dS ea 13 Relation of Motor Mounting Base to Ceramic 15 Stage Carriage Design Guidelines llli 16 Bonding the Driving Element to the 17 Motor Installation Linear and Rotary 8 65 19 Mounting HR1 and HR2 Motors on Linear 8 6 20 Mounting HR1 and HR2 Motors on Rotary 5 806 21 Mounting HR4 and HR8 motors on Linear 8 6 23 Electrical Connections cs cue E me rERVET ra beg Phor RU e PETERE RP E 25 Grounding the MOIOF euge era ERE ERA Eee eR ae Sale 25 Connecting a Standard Motor Cable 000 ene 26 Ultra High Vacuum Motor Connection llli 27 Motor Conditioning c e Trao fes baie DES la Po pet 27 Mainte
25. ion NM vacuum V vacuum non magnetic VN and ultra high vacuum UHV motors prior to their operation The bake out procedure should be performed in a vacuum oven either on motors alone or on complete systems with motors mounted under approval of the stage manufacturer Nanomotion supplies clean V VN and UHV motors yet a bake out procedure is required in order to remove residual contaminants and adsorbed humidity from the motors and other system components Nanomotion also supplies ready for use baked motors upon customer s request Motors Only Procedure Nanomotion supplies both V and VN motors with a motor connector for initial operation for instance a burn in procedure These connectors are non vacuum compatible Therefore in order to assure optimal motors bake out it is recommended to cut off the connectors before bake out The UHV motors are supplied with 3 flying wire leads and no connector Nanomotion suggests performing the following steps for V VN and UHV motors 1 Nanomotion supplies V VN and UHV versions of HR4 and HR8 motors with preload screws retracted Prior to bake out release the motor preload screws half turn clockwise 2 Cut the motor connector off for V and VN motors Short circuit the three wire leads of the motor cable white black and red 4 Place the motor in a vacuum oven Document No HR00458000 00 Rev C 40 5 Attain vacuum level specified in the following table Table
26. l alcohol or ethanol 4 Reset the motor according to the procedures in Motor Installation Linear and Rotary Stages on page 19 5 Perform Motor Conditioning on page 27 Document No HR00458000 00 Rev C 29 HR MOTOR SPECIFICATIONS AND Di MENSI ONS This chapter provides mechanical and electrical specifications for HR motors and mechanical drawings to provide motor dimensions GENERAL I NFORMATI ON These specifications apply to the standard motor driven by the AB1A Driver Box The motor features a linear voltage response The motor and driver can be modeled as a DC motor with friction driven by a voltage amplifier as illustrated in the following diagram Offset Figure 1 Block Diagram of the Motor and Driver Vin Command to the driver 10 to 10 V e Kf Force constant N V e Offset Starting voltage V e Kfv Velocity damping factor similar to back EMF N x sec m e Vel Motor velocity m Sec e M Moving mass kg S Laplace variable 1 sec Document No HR00458000 00 Rev C 30 HR Motor Specifications V Command V Motor Velocity Force HR4 Motor Figure 2 Typical Motor Sub system The figure above shows a typical HR Driver Motor Sub system A command voltage of x 10V is applied to the driver The driver then generates a 39 6Khz sine wave V motor whose amplitude is a function of the command voltage The sine wave drives the HR4 motor HR MOTOR SPECIFI CATI ONS
27. n NANOMOTION A Johnson Electric Company User Manual HR Motors Document No HR00458000 00 Rev C 9 2015 Nanomotion Ltd POB 623 Yokneam 20692 Israel Tel 972 73 2498000 Fax 972 73 2498099 Web Site www nanomotion com E mail nano nanomotion com Copyright Notice Copyright O 2012 2015 by Nanomotion Ltd All rights reserved worldwide No part of this publication may be reproduced modified transmitted transcribed stored in retrieval system or translated into any human or computer language in any form or by any means electronic mechanical magnetic chemical manual or otherwise without the express written permission of Nanomotion Ltd Mordot HaCarmel Industrial Park Yokneam 20692 Israel This document contains proprietary information and shall be respected as a proprietary document with permission for review and usage given only to the rightful owner of the equipment to which this document is associated Limited Warranty Nanomotion Ltd provides a limited warranty on all its products For warranty details contact your Nanomotion sales representative Patents Nanomotion products are covered under one or more of the following registered or applied for patents 5 453 653 5 616 980 5 714 833 111597 5 640 063 6 247 338 6 244 076 6 747 391 6 661 153 69838991 3 6 384 515 7 119 477 7 075 211 69932359 5 1186063 7 211 929 69941195 5 1577961 4813708 6 879 085 6 979 936 7 439 652 7061158 1800356 1800
28. nances aree SEU E ROSTRUM RN TR acd 28 HR Motor Specifications and 30 General Information 2 602 cedet ME Lost ua md Ete EA 30 HR Motor SpecifICatlOns Mie bere eae E 31 Thermal Envelope of Performance sess 34 Stage Heat Dissipation Consideration llli eee 34 EOP for HR Motors Driven by AB5 37 Example EOP Defniloris 22 28 acd te shares dU mida I d rec 38 Define EOP for AB5 Driver in Vacuum Environment Brake On Mode 38 Example Define EOP for AB5 Driver in Vacuum Environment Brake Off Mode 39 hesterna ny ESTA va DESCR ES 40 Vacuum Motor Baking Instructions 3 122 RE pror REEL 40 HRI Mechanical Drawings ui oy e HR DOO ace ax EHE gc 43 HR2 Mechanical Drawings 4 6 euer our aate t acu 2 Batt 45 HR4 Mechanical Drawings HR8 Mechanical Drawings vi NTRODUCTI ON This user manual provides general instructions for Nanomotion HR motors These motors can be controlled and drive by different Nanomotion Drivers as well as by user developed hardware During planning and design of the motion system refer to both this manual and the user manual for the Nanomotion Driver being used CE COMPLI ANCE Nanomotion HR motors comply with the following directives e Safet
29. nt operation 1 Prepare a grounding wire Terminal connector minimum 18 AWG wire maximum length of 2 meter 2 Attach the ground wire s terminal connector between the two star washers and tighten 3 Connect the other end of the ground cable to the system ground Document No HR00458000 00 Rev C 25 Electrical Connections Connecting a Standard Motor Cable Nanomotion guarantees proper Driver and motor performance only when a Nanomotion standard cable is used Consult Nanomotion before making any changes to cable lengths The Motor Connected interlock is available on Nanomotion standard motor connector It disables high voltage on the bare Driver connector when the motor is disconnected from the Driver e Nanomotion s motors run at a resonant frequency and are sensitive to the capacitance of the electrical circuit Changing cable length affects the total capacitance and will affect motor performance Refer to user manual for the installed Driver for maximum allowed cable length cation Failure to tune the Driver to the motor may cause damage to Driver Changing the length of the motor cable will change the cable s impedance requiring retuning of the Driver The Driver selected for the application must be tuned to the motor used on the appli e Nanomotion supplies motors with specific low capacitance cables Standard motors 210pF meter e Vacuum motors 43pF meter Standard and vacuum motors h
30. or the motor mounting screws The slots provide the ability to apply preloading when mounting the motor The motor tension against the ceramic strip is set using a spacer during the mounting process All dimensions in this document are in millimeters unless otherwise specified Isometric drawings use European standard display Document No HR00458000 00 Rev C Preparing the Stage Base TYPx2 MOTOR MOUNTING SURFACE SHOULD BE FIXED TO STAGE BASED 95102 ast TYPx2 TyPx2 Figure 2 Mounting Base Dimensions for HR1 and HR2 Motors The mounting base for the motors must be an integral part of the stage E baseplate The HR4 and HR8 motors have a built in preload setting Therefore the motors are mounted in a fixed position Figure 3 Document No HR00458000 00 Rev C Preparing the Stage Base MOTOR MOUNTING SURF ACE SHOULD BE FIXED TO STAGE BASE TYPx2 255504 Figure 3 Mounting Base Dimensions for HR4 and HR8 Motors Relation of Motor Mounting Base to Ceramic Strip The ceramic strip must be mounted perpendicular to the mounting base as specified in Figures 2 and 3 The size and position of the ceramic strip should follow the dimension specified in Figure 4 and Table 3 1 Ceramic strip Motor mounting base Figure 4 Ceramic Position Document No HR00458000 00 Rev C 15 Preparing the Stage Base Table 3 1 Dimensions from Motor Mounting Base to Ceramic
31. or vacuum motors 1202 C for standard motors 1405 C for ultrahigh vacuum motor Do not operate Nanomotion vacuum and high vacuum motors in air pressure between 0 1 torr and 200 torr Table 4 Physical Dimensions Specification HR1 HR2 HR4 HR8 Length 40 5 mm 40 5 mm 42 mm 41 9 mm Width 25 7 mm 25 7 mm 46 6 mm 46 6 mm Document No HR00458000 00 Rev C 32 HR Motor Specifications Table 4 Physical Dimensions Specification HR1 HR2 HR4 HR8 Height 8 mm 12 7 mm 15 mm 23 8 mm Weight standard motor 20 gr 40 gr 73 gr 120 gr Weight high amp ultra high vacuum motors 30 gr 30 gr 60 gr 170 gr Document No HR00458000 00 Rev C 33 THERMAL ENVELOPE PERFORMANCE Motor operating temperature is a result of the balance between heat generation and heat dissipation The heat generation depends on motor s work regime Driver com mand level The heat is dissipated through the following heat transfer mecha nisms conduction radiation convection negligible in a vacuum environment The heat dissipation mechanisms should be able to dissipate the heat generated in order to avoid overheating The EOP gives the user the tools to assess the permitted operating conditions for set ambient temperature and command deriving the duty cycle and maximal continuous operation that assures safe operation The user can either
32. r Driver HRI AB1A AB1A 3U ABO2 AB4 AB5 51 XCD HR1 HR2 AB1A AB1A 3U AB02 AB4 AB5 51 XCD HR2 HR4 AB1A AB1A 3U AB02 AB4 AB5 51 XCD HR4 HR8 AB1A AB1A 3U AB02 AB4 AB5 51 XCD HR8 XCD HR16 HR MOTOR SYSTEM An HR motor is part of a motion system Figure 1 consisting of the following parts HR Motor e Standard motors provided with a 3m shielded and jacketed cable e Vacuum motors provided with a 3m shielded cable UHV motors provided with 0 5m flying leads 3 wires Ceramic Driving Strip for linear applications e Driving Ring Disk for rotary applications Driver e ABO2 ABO4 Driver with a Controller with a servo rate 28KHz Document No HR00458000 00 Rev C 10 General Precautions ABO5 Driver with standard Controller with servo rate gt 4KHz 20KHz recommended Some standard off the shelf controllers have been checked to provide high performance with Nanomotion motors Consult Nanomotion for specific manufacturers and controllers e XCD Controller Driver or compatible third party driver Optional encoder to provide position feedback HR Motor Encoder Linear or Rotary Carriage Feedback Figure 1 Closed Loop HR Motor Drive System Block Diagram GENERAL PRECAUTI ONS When handling HR motors observe the following precautions The motor has high voltage inside Do not open Do not apply electric power unless the motor is mounted and pre loaded
33. river XCD HR4 BD XX XCD HR8 Controller Drive XCD HR8 BD XX XCD HR16 Controller Driver XCD HR16 BD XX RELATED DOCUMENTATION The following table lists related Nanomotion guides and manuals Document Document number AB1A Driver User Manual AB1A458000 AB1A 3U Driver User Manual AB3U458000 AB1B Driver User Manual AB1B458000 Document No HR00458000 00 Rev C Related Documentation Document Document number AB2 Driver User Manual AB02458000 AB4 Driver User Manual AB04458000 AB5 Driver User Manual AB05458200 XCD HR1 HR2 HR4 Controller Driver User Manual XCDH458000 XCD HR8 HR16 Controller Driver User Manual XCDH458002 Document No HR00458000 00 Rev C OVERVIEW THE HR MOTORS The HR series of motors are high precision ceramic motors The HR motors combine unlimited stroke with high position resolution in compact dimensions The motors are used in applications such as microscopy precision motion robotics etc The HR motors are available in versions that are compatible with vacuum and ultra high vacuum operating environments These applications include wafer inspection and metrology scanning stages and lithography When working with a Nanomotion ABO5 Driver the motors provide a linear response to the input voltage The operation of the motor and Driver resembles that of a DC motor driven by a voltage amplifier Motor Controlle
34. should be secure but able to move 2 Position the spacer supplied with the motor between the motor and the Drive Strip on the carriage Document No HR00458000 00 Rev C 20 Motor Installation Linear and Rotary Stages Figure 10 Spacer Set Between Motor and Ceramic Strip 3 Hold the motor against the spacer applying even pressure on both sides of the motor 4 Using a diagonal sequence tighten the four mounting screws M3 Ensure that the motor does not move during this process Q1 30 Q4 20 Apply a torque of 0 5 to 0 7 Nm to each screw and remove the spacer Perform motor conditioning according to Motor Conditioning on page 27 Mounting HR1 and HR2 Motors on Rotary Stage Because a rotary stage presents an arc to the motor mounting and pre loading the motor requires additional steps Nanomotion stages are manufactured with an alignment ridge to keep the motor perpendicular to the Document No HR00458000 00 Rev C 21 Motor Installation Linear and Rotary Stages rotary element For rotary stages with a diameter of 60 80mm two holes are added to the base For unique rotary applications or assistance contact your Nanomotion engineering sales representative 1 Setthe motor in place and finger tighten the four mounting screws The motor should be secure but able to move 2 Ensure that the motor is set against the alignment ridge of the base For rotary elements a Cut the flat spacer
35. y IEC 61010 1 1990 e EMC 89 336 EEC as amended by 92 31 EEC and 93 68 EEC e Harmonized Standards to which conformity is declared e 50081 2 1993 EN 55011 1991 Generic Emission Standards Class A for radiated emission and Class B for conducted emission e 50082 2 1995 Generic Immunity Standard CONVENTI ONS USED IN THI S MANUAL Throughout this manual commands are shown in BOLD and parameter values are shown in italics The following indicate information that is relevant to use and operation of the equipment NOTE Notes provide additional information that is not included in the normal text flow CAUTI ON A Caution provides information about actions that will adversely affect system performance Document No HR00458000 00 Rev C 7 Related Products BKM Best Known Methods BKMs provide recommended actions or procedures Danger Indicates actions that will cause damage to equipment or are a danger to personnel RELATED PRODUCTS The following table lists Nanomotion products covered by these instructions Product Part Number AB1A Driver AB1A458000 XX AB1A 3U AB3U458000 XX AB1B Driver AB1B458000 XX AB2 Driver AB02458000 XX AB4 Driver AB04458000 XX AB5 Driver AB05458000 XX XCD Motherboard XCDH150100 XX XCD HR1 Controller Driver XCD HR1 BD XX XCD HR2 Controller Driver XCD HR2 BD XX XCD HR4 Controller D
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