GateKeeper Inert Gas Purifiers
Contents
1. Low pressure drop across purifiers CE certified to the Pressure Equipment Directive PED and manufactured in an ISO 9001 2000 facility Backed by global service and support staff Safe and Simple to Use Easy to install Uses ambient temperature purification technology no power or heat required No moving parts General Specifications Materials of construction 316L stainless steel electropolished 10 Ra except for the 45M model Cr Mo steel SA 372 Grade F Class 70 Gases purified Na He Ne Kr Ar halocarbons light hydrocarbons Outlet purity lt 1 ppb H5 CO and CO 100 ppt H20 05 the 45M model is 100 ppb for all contaminants Outlet particle filtration 30KF to 75KF 300KF to 10MH 0 003 um 316L stainless steel 100KF 0 003 um nickel 45M 200M 20 um 316L stainless steel Media Nickel metallic metal oxide Maximum differential pressure 1379 kPa 200 PSID Minimum operating pressure 101 kPa 14 7 PSIA Leak rating 30KF to 10MH 1 x10 atm cc sec 45M 110 3 atm cc sec 200M 4 x 10 9 atm cc sec Maximum inlet challenge of contaminant to maintain product efficiency 10 ppm part per million Lifetime One year at nominal flow rate with 1 ppm inlet challenge of moisture Maximum operating temperature 65 C 149 F Operating Specifications Maxim2. 20 9 l0 43 9 cm 17 3 10 2 cm 4 Centered h face seal male male 9 5 kg 20 9 lb 44 7 cm 17 6 10 2 cm 4 Centered 5000K h face seal female male 15 5 kg 34 2 lb 115 8 cm 45 6 10 2 cm 4 Centered 10MH I face seal female male 27 kg 59 5 lb 97 4 cm 38 36 15 2 cm 6 Centered 3 4 face seal female female 41 kg 90 3 Ib 143 3 cm 56 4 15 2 cm 6 Centered 45M 2 NPT female female 360 kg 794 1b 147 3 cm 58 244 cm 9 6 Centered 200M 2 tube stub 454 kg 1000 lb 165 9 cm 63 3 7 9 111 8 cm 44 81 8 cm 32 2 8 Drop in Replacements for Waferpure Purifiers 30KF Micro 1 4 face seal male male 0 3 kg 0 6610 8 4 cm 3 317 3 8 cm 1 5 0 97 cm 0 38 75KF Mini XL 1 4 face seal male male 0 4 kg 0 8810 12 7 cm 5 3 8 cm 1 5 0 97 cm 0 38 300KF Megaline 1 4 face seal male male 1 8 kg 4 Ib 20 8 cm 8 2 5 1 cm 2 Centered 6 Height 7 Depth 8 Width Options 3 Valve 5 Valve 4 Valve 8 Valve Moisture Isolation GC 300 Bypass Bypass Changeover Changeover Breakthrough Model Valves Manifold Manifold Manifold Manifold Manifold Indicator 35KF Yes Yes Yes Yes 70KF Yes Yes Yes Yes 100KF Yes 300KF Yes Yes Yes 500KF Yes Yes Yes Yes 500KFHP Yes 700KF Yes Yes 2500KH Yes Yes Yes Yes Yes Yes 5000K included Yes 10MH included Yes Yes Yes 45M 200M included Drop in Replacements for Waferpure Purifiers 30KF Micro Yes Ye
3. O Entegris GATEKEEPER INERT GAS PURIFIERS Cost effective environmentally friendly gas purification 412 targa 42 Mpa 709 pi 13 8 bar 1 28 Mpa 200 790 com n h JR SE WITH N2 Me Ne Ya Re A ADCANMONS LIGHT WYDROCANEONS 0 SOT USt Vut 02 COA AIRA MPD SP at sa estes rive Son Diega CA 92121 pedet 0 00 0 PP IN H EET Se anten e Sq ig CN e cowl pur unas cust m FOR USE WITH na Ne Ne 9o wor use wink oz OAD Mein UA Fader vive Sn Dee Ae GATEKEEPER INERT GAS PURIFIERS Overview Available for point of use area and bulk applica tions GateKeeper inert gas purifiers are designed for use with N5 He Ne Kr Xe Ar halocarbons and light hydrocarbons The purifiers remove Oy Hg CO CO and H50 to sub ppb part per billion levels SO to sub ppt part per trillion levels Features and Benefits Cost effective Regenerable for low cost of ownership Gas purification improves process consistency increases product yields and lengthens tool life e Transforms low purity gas into UHP grade reducing process costs Environmentally Friendly Regenerable eliminates disposal issues Process Protection Consistently delivers ultrapure gas Guards against bulk gas purifier break through impurity spikes from liquid storage tanks cylinder changeouts and unexpected contaminants in the process Does not release hydrocarbons that may contaminate the process
4. higher pressures available please consult your local sales representative 3 Pressure drop at maximum flow rate and 90 PSIG 620 kPa inlet pressure For a detailed pressure drop curve and other pressures or flows please consult your local sales representative or visit www entegris com Model only available for countries that recognize ASTM US standards and certifications not CE certified not a UHP product 5 Model only available for countries that recognize ASTM US standards not currently CE certified contact Entegris if needed for EU application All product information is subject to change without notice Facility Specifications Configuration Approximate Model Fitting Sizes inlet outlet Weight Length Diameter Fitting Offset 35KF J4 face seal male male 0 3 kg 0 66 lb 8 4 cm 3 31 3 8cm 1 5 Centered 70KF J4 face seal male male 0 4 kg 0 88 lb 11 4 cm 4 5 3 8cm 1 5 Centered 100KF J4 face seal male male 0 5 kg 1 1 lb 8 4 cm 3 31 15 2 cm 6 1 12 cm 0 44 300KF J4 face seal male male 1 8 kg 4 lb 20 8 cm 8 2 5 1 cm 2 Centered 500KF J4 face seal male male 1 6 kg 3 5 Ib 20 2 cm 7 94 7 6cm 3 Centered 500KFHP I4 face seal male male 2 5 kg 5 5 lb 25 4 cm 10 7 6 cm 3 Centered 700KF J4 face seal male male 1 6 kg 3 5 lb 25 4 cm 10 7 6 cm 3 Centered 2500KH i face seal male male 9 5 kg
5. ion or you can contact our Gas Purification Specialists directly at 1 858 452 0124 or 1 800 511 9761 toll free in the U S All products with the exception of the 45M SS5000K and 200M models meet CE Directive 97 23 EC requirements CE es Contact Customer Service to learn about our regeneration service For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit www entegris com and select Regional Customer Service Centers for the center nearest you Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale To view and print this information visit Entegris website at www entegris com and select the Legal Notices link from the footer found on the home page Entegris Mykrolis Waferpure and GateKeeper are registered trademarks of Entegris Inc ENTEGRIS INC Corporate Headquarters 3500 Lyman Boulevard Chaska Minnesota 55318 USA Customer Service Tel 952 556 4181 Customer Service Fax 952 556 8022 www entegris com The materials integrity management company 2007 Entegris Inc All rights reserved Printed in USA 4506 5120ENT 0807
6. s Yes Yes 75KF Mini XL Yes Yes Yes Yes 300KF Megaline Yes Yes Yes 9 External to purifier for models 30KF 700KF Ordering Information GateKeeper Gas Purifiers Part Number CE XXXXX X XX XXX R Additional Processing R Regeneration Fitting 4R 1 4 face seal male to male 8R 1 2 face seal male to male 8Y 1 2 face seal female to male Gas Series 12W 3 4 face seal female to female C Corrosive H Hydrogen Inert Filter N Nonreactive Example CE2500KHI8RR F 0 003 um O Optics Model 2500K H 0 003 um SK Hydride Model 2 low pressure 1K Carbon monoxide Filter 0 003 um low pressure drop drop Gas series Inert 70K Ss m 100K Fitting V2 face seal male to male 300K Additional processing Regeneration 500K 700K 2500K SS5000K 10M For all models except 45M and 200M To order 45M and 200M 45MI SS200MI Note Not all models are available with all gas series or fittings contact your salesperson for more information Note For Mykrolis replacement specify 30K 75K or 300K for model Note This product is considered a dangerous good for shipping purposes under IATA ICAO regulations For dimensional drawings pressure drop curves and more refer to the user manual or go to www entegris com click on Products and Services and click on the link to Gas Microcontamination An online Product Wizard is available to help you specify the ideal purifier for your applicat
7. um Nominal Maximum Maximum Flow Rate Flow Rate Operating Pressure Operating Pressure Model SLPM SLPM Purifier Only Purifier with Options Pressure Drop 35KF 1 0 5 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 3 4 kPa 0 5 PSID 70KF 3 1 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 4 8 kPa 0 7 PSID 100KF 20 2 6895 kPa 1000 PSIG 1724 kPa 250 PSIG 27 6 kPa 4 PSID 300KF 50 7 4826 kPa 700 PSIG 1724 kPa 250 PSIG 34 5 kPa 5 PSID 500KF 60 12 4826 kPa 700 PSIG 1724 kPa 250 PSIG 48 3 kPa 7 PSID 500KFHP 60 2 19995 kPa 2900 PSIG 19995 kPa 2900 PSIG 48 3 kPa 7 PSID 700KF 120 8 4826 kPa 700 PSIG 1724 kPa 250 PSIG 48 3 kPa 7 PSID 2500KH 300 60 1724 kPa 250 PSIG 1724 kPa 250 PSIG 17 2 kPa 2 5 PSID 5000K 500 130 1724 kPa 250 PSIG 1724 kPa 250 PSIG 62 1 kPa 9 PSID 10MH 1000 220 1724 kPa 250 PSIG 1724 kPa 250 PSIG 1 2 62 kPa 9 PSID 3 4 36 5 kPa 5 3 PSID 45M 5000 100 20684 kPa 3000 PSIG 20684 kPa 3000 PSIG 758 kPa 110 PSID 200M5 20000 3500 1379 kPa 200 PSIG 1379 kPa 200 PSIG 27 6 kPa 4 PSID Drop in Replacements for Waferpure Purifiers 30KF Micro 1 0 5 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 3 4 kPa 0 5 PSIG 75KF Mini XL 5 1 19995 kPa 2900 PSIG 1724 kPa 250 PSIG 10 3 kPa 1 5 PSIG 300KF Megaline 50 7 4826 kPa 700 PSIG 1724 kPa 250 PSIG 34 5 kPa 5 PSIG Do not use under vacuum Minimum pressure should be 1 atm 14 7 PSIA 2 Pressure limited by standard valves
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