8510 Low Voltage Compressor
Contents
1. Brooks 8510 Low Voltage Compressor For Use with On Board High Vacuum Pumps Installation Operation and Service Instructions 8040232 Revision AA 8510 Low Voltage Compressor Installation Operation and Service Manual Information provided within this document is subject to change without notice and although believed to be accurate Brooks Automation assumes no responsibility for any errors omissions or inaccuracies AcuLigner Align AquaTran AutoTeach ATR AXM Basic Blue BiSymmetrik CenterSmart Cool Solutions Crate to Operate e RMA e Spares e Volution FastRegen FIXLOAD FrogLeg InLigner InCooler Interface Jet Engine LowProfile M2 Nano Mini lon PASIV PowerPak PerformanceBlue PowerPak PowerTools QuadraFly Radius Radient Radient Express Reliance Reliance ATR RetroEase SCARA SmartPM SPOTLevel Synetics The New Pathway to Productivity Time Optimized Trajectory Time Optimal Trajectory Time Optimized Path TopCooler TopLigner Ultimate Blue VAC 407 VacuTran Vacuum Quality Monitor VQM Vacuum Quality Index VQI and the Brooks logo are trademarks of Brooks Automation Inc AcuTran AquaTrap Conductron Convectron the Cool Solutions logo Cryodyne Cryotiger Cryo Torr Fusion GOLDLink Granville Phillips Guardi2. d Replace the compressor front panel Hex Head Nut Red Flat Washer Hex Head Nut lt p Red Flat Washer Compressor Base Rubber Grommets Figure 3 2 Removing Compressor Pump Shipping Supports 3 2 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Assembling the Compressor Input Power Cable CAUTION Use round cable diameter 0 595 to 1 50 with the BROOKS CRYOGENICS supplied compressor receptacle plug Do not tin the conductor leads Assemble the compressor input power cable using the BROOKS CRYOGENICS supplied compressor receptacle plug and a 600 volt power cable that has a SO 4 conductor 600 volt rating neoprene jacket and 10 gauge wire as follows 1 Prepare the input power cable by stripping wires and jacket of the cables as shown in Figure 3 2 n INSULATING t 1 2 ae ae nag CONDUCTOR LEADS Figure 3 3 Stripping Compressor Input Power Cable Insulation 2 Disassemble the receptacle plug See Figure 3 4 a Loosen the two assembly screws 1 securing the receptacle plug face 2 to the cover 3 until plug face can be removed from cover b Open cord clamp 5 by loosening the two clamp screws 4 securing the clamp to the cover NOTE If you are using cable with a diameter greater than 0 895 inch remove the auxiliary insert 6 from the cover c Insert the stripped end of the power cable into the cover
3. COMPRESSOR PUMP a te ee eye EEE el P P GAS AND OIL FLOW p GAS FLOW ONLY OIL FLOW ONLY 3 SELF SEALING COUPLING Figure E 1 Flow Diagram of 8510 Low Voltage Compressor E OO P N 8040232 E 1 Introduction gt Bro oks This Page Intentionally Left Blank _ SS SSeS E 2 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Appendix F Multiple Cryopump Installation with Single 8510 Low Voltage Compressor Your 8510 Compressor may be used to drive a number of multiple On Board cryopump combinations Figure F 1 depicts a typical multi cryopump installation with an 8510 Low Voltage Compressor As shown in this figure a power cable is connected from the compressor to each cold head also the components are helium connected in parallel all supply fittings piped together 8510 Compressor On Board Cryopump On Board Cryopump On Board Cryopump Helium Return Line dh Helium Supply Line Input Power Figure F 1 Typical Multiple Cryopump Installation with Single 8510 Low Voltage Compressor Shown in Figure F 1 is a typical multiple cryopump installation If you are considering a mult
4. For Use With On Board High Vacuum Pumps gt Bro oks Table C 2 Legend for Figure C 1 Component Description CBI Circuit Breaker 25 Amps Main Power CB2 amp CB3 Circuit Breakers 3 Amps Cryopump Power CB4 amp CB5 Circuit Breakers 5 Amps Heater Power CB6 amp CB7 Circuit Breakers 5 Amps On Board Power ETM Elapsed Time Meter Jl Input Power Connector J4 Remote ON OFF Connector J10 Thru J12 On Board Power Output Connectors K2 On Board Power Cryopump Heater Relay K3 Voltage Select Relay K4 Remote ON OFF Relay K5 Compressor Start Relay K6 Cryopump Phase Monitor Relay Mil Motor Starter Motor Overload Protector PM Phase Monitor Compressor Pump RI Resistor 150 Ohms 5 Watts S1 Compressor Power Switch With Lamp LT1 S2 On Board Power Switch With Lamp LT3 S3 Voltage Select Switch Solenoid Valve Oil Flow Solenoid Valve Gas Flow Cold Head Drive Transformer Control Transformer 24 VAC Time Delay Relay Thermal Protective Switch Oil Flow Gas Discharge Temperature Thermal Protective Switch Oil Flow Motor Temperature P N 8040232 Thermal Protective Switch Oil Water Temperature Introduction gt Bro oks This Page Intentionally Left Blank SS C 4 P N 8040232 8510 Low Voltage Compressor For Use With On Boar
5. opening by starting from clamp end 6 until the stripped conductor ends are exposed d Loosen and back off all terminal screws on receptacle plug face 2 P N 8040232 3 3 Introduction gt Bro oks KEYWAY GROUND TERMINAL GREEN SCREW 7 TERMINAL X TERMINAL Y TERMINAL Figure 3 4 Input Power Cable Receptacle Plug e Insert all conductors into their proper wire entrance holes on receptacle plug face See Figure 3 5 Check that there are no bare conductors exposed Tighten terminal screws to 9 12 in lbs torque Users with 3 phase power where one phase is at or near ground potential must connect to the compressor as shown in Figure 3 5 WARNING For installation where one of the 3 phase legs is at or near ground potential connect that leg to terminal X on the compressor as shown in Figure 3 5 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps gt Bro oks PHASE A PHASE B PHASE C Q IN lt X GROUND COMPRESSOR RECEPTACLE PLUG SUPPLIED BY BROOKS CRYOGENICS STANDARD CONFIGURATION Figure 3 5 Wiring Diagram For Standard And Grounded Delta Configurations 3 Assemble the receptacle plug by sliding the cover over the wire assembly noting key 7 Align the key on the cover to the keyway on the plug face and tighten the two assembly screws 1 to secure the cover and plug face Alternately tighten the cl
6. prohibited Printed in the U S A Brooks Automation 8040232 Revision AA 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Table of Contents Section 1 Introduction General ea enade ee E EE apg ac EA EE E ead E E E E EEEE 1 1 Installation Operation and Service Instructions 0 00005 1 1 Section 2 Inspection Packaging Of the System ii cca gcda 4 edad Stow eV ERS RRR EKER Oe SRE DOK 2 1 The Compressor ase ves oobi den bot etoades pae aee a E a a a E 2 1 Section 3 Installation Compressor Installation anann eae betes ed EY Ea 4 eee Sw 3 2 Preparing the Compressor geendaee ee 6k vende twee bad eae eee He 3 2 Assembling the Compressor Input Power Cable 2 0 5 3 3 Electrical Preparation Of Compressor Control Module 3 5 Cooling Water Preparation 0 0 cee eens 3 5 Cooling Water General Considerations 000 cece eee eee 3 6 Cooling Water Flow and Pressure Requirements 005 3 7 Cooling Water Temperature Rise 6 lt saceadedgadei ve kaehaaavedeed 3 10 Oil Circuit Stabilization sects aca des he eda td SOR eR a eee ee aes 3 11 Connecting the Compressor to the Cryopump 0 00 cece eee ee 3 11 Electrical Connection of Compressor 640 006 ccc e esse ed cease cae eseeaas 3 12 8510 Low Voltage Compressor Electrical Phase Check and Automatic ON OFF Control 24 4034 0 2448 4saeo 8 4440 s hae
7. straight line to the left to obtain the increase in output water temperature The example shows a temperature increase of 14 F Oil Circuit Stabilization 1 Check to insure that the cover and all panels are properly installed on the compressor 2 With the system power ON OFF switch in the OFF position con nect the input power cable to the power source If necessary refer to Table 1 1 for electrical requirements 3 Place the system power switch to the ON position and allow the compressor to run 15 minutes to stabilize the oil circuit If the com pressor shuts down oil system priming may be necessary Refer to Section 4 Maintenance Procedures for compressor oil priming procedures Connecting the Compressor to the Cryopump NOTE If your application requires the use of multiple compressors on a single gas manifold you must install an external check valve on each compressor Order BROOKS CRYOGENICS Kit No 8080275K004 and contact the Product Service Department for installation guidance on manifolding compressors Make the connections between the cryopump and compressor See Figure 3 9 1 Remove all dust plugs and caps from the supply fittings and return lines compressor and cryopump cold head Check all fittings 2 Connect the helitum gas return line from the gas return connector on the rear of the compressor to the gas return connector on the cryopump cold head 3 Connect the helium gas supply line from the ga
8. 3 2 5 Check voltage setting of switch S3 see Figure 3 6 6 a Reset the overload relay in the motor contactor Refer to Fig ure C 1 for its location b Contact the Product Ser vice Department 2 System power ON OFF switch CB1 will not remain in the ON position when switched on The switch circuit breaker trips when excessive current is being drawn by the cold head or 24 volt compres sor control circuits 1 Damaged On Board power cable connectors or drive motor 2 Damaged component in the compressor power or control circuit 1 Check for compressor opera tion with each cold head connec tion P2 P3 or P4 disconnected from compressor Contact the Product Service Department if the compressor operates improperly 2 Contact the Product Service Department P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps gt Bro oks Table B 1 Compressor Troubleshooting Procedures Problem 3 System power ON OFF switch CB1 remains in the ON posi tion and the compressor stops after several min utes of operation and remains off P N 8040232 Possible Cause 1 Loss or degradation of power coming from power source 2 Thermal protective switches are open 3 Very cold cooling water has caused a restriction of oil flow through the oil injection orifice during startup Corrective Action 1 Ensure a constant supply of power per Tab
9. 30 230 250 Factory setting P N 8040232 WATER PRESSURE DROP PSID WATER SUPPLY TEMPERATURE F NOTE Without consideration of back pressure 1 8 2 0 2 5 3 0 WATER FLOW RATE GPM Figure 3 7 8510 Compressor Cooling Water Flow And Pressure Requirements 1 Determine the temperature of the cooling water Allow a 10 F to the present water temperature if a variation cannot be ascertained Plot the high and low temperatures on the vertical axis of the lower graph The example describes cooling water that varies between 45 F and 67 F 2 Determine the optimum water flow rate by drawing a horizontal line from the upper temperature variation figure on the lower graph to the upper curve of the allowable operating range indicated by cross hatching Draw a line from this intersecting point straight down to the horizontal axis to find the optimal flow rate The example shows a solid arrow extending from 67 F and intersecting the allowable operating range Dashed arrows pointing downward indicate a water flow rate of 2 5 gallons per minute 3 Determine the cooling water supply pressure drop by drawing a straight line up from the flow rate in the lower graph to the upper graph At the point at which this line intersects the upper graph draw a line leftward to the vertical axis and find the water supply pressure drop P N 8040232 3 9 Introduction gt Bro oks The example shows dashed ar
10. Introduction gt Bro oks This Page Intentionally Left Blank Ss 4 10 P N 8040232 Brooks Appendix A Customer Support Information Customer Support Center Locations To locate a Customer Support Center near you please visit our website www brooks com on the world wide web and select CONTACT on the home page Guaranteed Up Time Support GUTS For 24 hour 7 day per week Guaranteed Up Time Support GUTS dial 1 800 367 4887 Inside the United States of America 1 508 337 5599 Outside the United States of America Product Information Please have the following information available when calling so that we may assist you e Product Part Number e Product Serial Number e Product Application e Specific Problem Area e Hours of Operation e Equipment Type e Vacuum System Brand Model Date of Manufacture E mail For your convenience you may also e mail us at techsupport brooks com 2013 Brooks Automation Inc A 1 This Page Intentionally Left Blank 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Appendix B Troubleshooting Procedures Troubleshooting the Compressor The compressor troubleshooting procedures are summarized in Table B 1 Technical Inquiries Please refer to Appendix A of this manual for a complete list of the BROOKS CRYOGENICS world wide customer support centers WARNING Disconnect the compressor before performing any troubleshootin
11. NER EPEN N EREE D 3 Figure E 1 Flow Diagram of 8510 Low Voltage Compressor E 1 Figure F 1 Typical Multiple Cryopump Installation with Single 8510 Low Voltage Compressor 000 ce cece ee eee ene F 1 Tables Table 1 1 Compressor Dimensions P N 8031315 00 2000 00 08 1 2 Table 1 2 Power Requirements Steady State Conditions 1 2 Table 1 3 General Specification 65 244s iads e00ee does ddiwesieeseaions 1 3 Table 2 1 8510 Shipping Carton Contents 00 00 c eee eee 2 1 Table 3 1 Compressor Control Module Specifications 3 8 Table 3 2 Electrical Leads ose osndeg iadoh oxy eo dese Sead ena a a 3 14 Table B 1 Compressor Troubleshooting Procedures 04 B 2 Table C1 8510 FUSES aks 6064 aaehe kate nada ean eE ea hans Keenan C 1 Table C 2 Legend for Figure C 1 2 acdaccccawstea teense eaveineneads C 3 Table D 1 Legend for Figure D 1 4 6 i2s e400 caterers dese twa Bi eased D 2 P N 8040232 iii gt 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks This Page Intentionally Left Blank SSS ers iv P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps gt Bro oks Section 1 Introduction General The manual provides instructions for installing operating and servicing the 8510 Low Voltage Compressor P N 8031315 If you are installing or operating an On Board High Vacuum System you s
12. THE BOTTLE VALVE AT THIS TIME Purge the regulator and charging line as instructed in steps a through e in Adding Helium Gas Do not use helium gas that is less than 99 999 pure 9 Perform in sequence a Backfill the cold head and helium gas return and supply lines with helium to a static charge pressure of 195 205 psig 1345 1415 kPa by adjusting the regulator to the required pressure and opening the valve on the manifold Close the valve when the pressure is correct b Depressurize the cold head by slowly opening the ball valve gt EEE ee P N 8040232 4 7 Introduction gt Bro oks and allowing the helium to bleed out slowly Do not reduce the pressure to less than 30 psig or the cold head may be further contaminated c Perform flushing steps a and b three more times d Pressurize the cold head to the static charge pressure of 195 205 psig 1345 1415 kPa and run the cold head drive motor for 10 to 30 seconds by actuating the controller ON OFF switch to on e Perform steps b through d three more times for a total of 16 flushes and a total of 4 drive motor runs 10 Verify that the cold head is pressurized to the static charge pressure of 195 205 psig 1345 1415 kPa 11 Disconnect the maintenance manifold from the helium gas return and helium gas supply lines 12 Reconnect the helium gas return and helium gas supply lines to the return and supply connector
13. amp screws 4 to 8 10 in lbs torque WARNING Insure that the ground wire is returned to the equipment grounding con ductor of the circuit supplying the receptacle 4 Refer to 8510 Low Voltage Compressor Electrical Phase Check and Automatic ON OFF Control for correct phasing checkout procedure Do not connect the compressor to the power source at this time All of the preparation must be completed and all the panels reinstalled before electrically connecting the compressor Electrical Preparation Of Compressor Control Module 1 Refer to Table 1 2 for electrical power requirements Then using a voltmeter measure the phase to phase voltage from the power source 2 Prepare the compressor voltage selector switch S3 as required in accordance with Figure 3 6 Cooling Water Preparation If flexible water hose connections are used install the barbed fittings supplied with the compressor on the input and output connections 1 Apply a light coating of standard plumbing thread sealant on the barbed fitting threads EE E ae P N 8040232 3 5 Introduction gt Bro oks 2 Tighten fittings on 1 2 inch FPT input and output connections DO NOT OVERTIGHTEN 3 Connect flexible hoses to the fittings and secure with hose clamps If hard piping is desired install the water lines directly onto the compr
14. an GUTS Helix Jet Leapfrog MagnaTran MapTrak Marathon Marathon 22 Marathon Express Micro lon MiniConvectron On Board Polycold Razor Simplicity Solutions the Simplicity Solutions logo Stabil lon TrueBlue TurboPlus Vision Zaris and the Brooks Automation logo are registered U S trademarks of Brooks Automation Inc All other trademarks are properties of their respective owners 2013 Brooks Automation Inc All Rights Reserved The information included in this manual is Proprietary Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot be used for distribution reproduction or sale without the express written permission of Brooks Automation This information may be incorporated into the user s documentation however any changes made by the user to this information is the responsibility of the user Brooks For Technical Support Location GUTS Contact Number North America oa 1 800 367 4887 Europe 49 1804 CALL GUTS 49 1804 2255 4887 Japan 81 45 477 5980 China 86 21 5131 7066 Taiwan 886 3 5525225 Korea 82 31 288 2500 Singapore 65 6464 1481 Visit us online www brooks com January 11 2013 Part Number 8040232 Revision AA This technology is subject to United States export Administration Regulations and authorized to the destination only diversion contrary to U S law is
15. d High Vacuum Pumps 2 Bro oks Appendix D Electrical Control Module Components of the 8510 Low Voltage Compressor SSS SSS a P N 8040232 D 1 Introduction D 2 Item Number Table D 1 Legend for Figure D 1 Description Cryopump Phase Monitor Relay Brooks Symbol Designation Compressor Start Relay Remote ON OFF Relay Voltage Select Relay On Board Power Cryopump Heater Relay Time Delay Relay Control Transformer 24 VAC Cold Head Drive Transformer O OAIAI ND MJ AJIN On Board Power Switch with Lamp LT3 Compressor Power Switch with Lamp LT1 Cold Head Drive Transformer Fuse 0 125A Slow Blow Bussman MDL 1 8 Fuse 0 5A Slow Blow Bussman MDL 1 2 Fuse 0 5A Slow Blow Bussman MDL 1 2 Fuse 3 2A Slow Blow Bussman MDL 3 2 10 Fuse 3 2A Slow Blow Bussman MDL 3 2 10 Fuse 3 2A Slow Blow Bussman MDL 3 2 10 Fuse 2 0A Slow Blow Bussman MDX 2 Fuse 1 0A Slow Blow Bussman MDX 1 Fuse 1 0A Slow Blow Bussman MDX 1 Fuse 1 0A Slow Blow Bussman MDX 1 Resistor 150 Ohms 5 Watts RI Motor Starter Ml Phase Monitor PM Motor Overload Protector OLI Voltage Select Switch S3 Motor Starter Reset M1 Reset Remote ON OFF Connector J4 Input Power Connector Jl On Board Power Output Connector On Board Power Output Co
16. d High Vacuum Pumps gt Bro oks a Close the Hi Vac valve in your vacuum system b Turn off the system power ON OFF switch CAUTION Exposing the cryopump to atmosphere during warm up will cause excessive water vapor adsorption by the charcoal of the 15K array 3 Immediately disconnect the helium gas supply and helium gas return lines from the gas supply and gas return connectors at the rear of the compressor Leave them attached to the cold head 4 Attach the maintenance manifold P N 8080250K003 to the dis connected ends of the helium gas return and helium gas supply lines 5 Reduce the pressure in the cold head to a level of 45 psig by using the maintenance manifold 6 Ifyou have the automatic REGEN ON BOARD option start a regeneration and then discontinue it when the cryopump reaches 300K If you only have the manual regeneration option turn the cryopump off and open the purge valve until the second stage reaches room temperature 7 Allow the second stage of the cold head to warm up to room tem perature Warm up time can be reduced by purging the cryopump with warm dry argon or nitrogen gas Using the gas heater BROOKS P N 8080250K020 will reduce warm up time about 50 percent and will maintain the gas temperature below the 150 F 66 C limit 8 Once the cryopump has reached room temperature attach a two stage regulator 0 3000 0 400 psig and charging line to a helium bottle 99 999 pure DO NOT OPEN
17. eadr se tatowas es 3 13 System Phase Input Checkout Procedure 0 0000 e cece eee 3 13 Automatic ON OFF Control of the 8510 Low Voltage Compressor Using the On Board Setpoint Relays nnana c cece eee ee 3 14 Multipump Installation dacs a caw hme ea slea Rane ba aeG as oR aR SRE RS 3 14 Section 4 Maintenance Procedures Scheduled Maintenance 6440 4 cecec eva edebeee he dG he de a eheeeeeeedinens 4 Removing the Compressor Adsorber 2 0 0 0 aana ence eee ee 4 2 Unscheduled Maintenance 5 24 ccs dens deeds O54 4 OR AGES ead eR eR CAGES 4 4 Suggested Unscheduled Maintenance Equipment 005 4 4 Adding Henn Ode 260 50d bod boaetonar dae ta oe anaes hanai 4 4 Helium Circuit Decontamination 0 0 0 0 cece eee eee 4 6 Cryopump Decontamination Procedures 00 0 c eee eee ee 4 6 Compressor Decontamination Procedures 0000 cece eee 4 8 Priming the Compressor Oil System 0 2 0 0 00 eee eee eee 4 9 P N 8040232 i 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Table of Contents continued Appendix A Customer Support Information Appendix B Troubleshooting Procedures Appendix C Electrical Schematic for 8510 Low Voltage Compressor Appendix D Electrical Control Module Components of the 8510 Low Voltage Compressor Appendix E 8510 Low Voltage Compressor Flow Diagram Appendix F Multiple Cryopump Installa
18. efer to Page 3 5 7 Helium Gas Return and Supply Connections Verifying Helium Static Pressure Refer to Page 3 11 Y Making Electrical Connections Refer to Page 3 12 Cooling Water Connections to Compressor Cooling Water PH Factors and Conservation Cooling Water Flow and Pressure Requirements Cooling Water Temperature Rise Refer to Page 3 5 Connecting Relay Connector Pins Programming Relay 1 to the Cryopump Function Refer to Page 3 14 Oil Circuit Stabilization Refer to Page 3 11 Figure 3 1 Block Diagram for 8510 Low Voltage Compressor Installation P N 8040232 3 1 Introduction gt Bro oks Compressor Installation Installation of your compressor requires no special tools other than those supplied in the Installation and Scheduled Maintenance Tool Kit Preparing the Compressor 1 After removing the compressor front panel refer to Figure 3 1 and remove the front two compressor pump shipping supports a Remove the front two nuts and red flat washers that secure the compressor pump tightly in position NOTE Retain the two red flat washers for use during shipment b Remove the two rubber grommets that are in the package attached to the compressor install them flat side up onto the front two mounting posts c Reinstall the two nuts and screw them down flush with the tops of the mounting posts
19. ero psig a broken flex line for example then the cryopump and compressor would have to be decontaminated according to the cryopump decontamination Refer to Helium Circuit Decontamination within this section Priming the Compressor Oil System The oil prime manifold P N 8018129 supplied with the 8510 Low Voltage Compressor is used to prime the compressor oil system when any of the following conditions exist 1 The compressor has been inoperative for a period of three months or longer 2 The compressor is not operating and the supply pressure gauge reads 0 psig If this condition exists contact the Product Service Department for corrective action before priming the compressor 3 The compressor has automatically shut off because of a loss of helium supply pressure Priming procedures are 1 Disconnect the helium return and supply lines from the rear of the compressor 2 Install the oil prime manifold on the compressor supply and return connectors 3 Ensure that the pressure gauge reads 195 205 psig 1345 1415 kPa If additional gas pressure is required follow the instructions under Adding Helium Gas 4 Turn the compressor switch to the ON position and allow the com pressor to run between 15 and 30 minutes 5 After completing the oil system priming turn off the compressor and remove the oil prime manifold 6 Reconnect the helium return and supply lines on the rear of the compressor P N 8040232 4 9
20. ery slowly Allow helium gas to escape until pressure gauge reads 50 100 psig 345 690 kPa c Close the gas charge valve and reinstall the charging line to the gas charge fitting refer to step 4 for procedure 4 Ifthe pressure is low attach a helium bottle regulator and charging line to the compressor and perform the following a Remove the flare cap of the gas charge fitting on the rear of the compressor b Loosely attach a charging line from the helium pressure reg ulator on the helium bottle to the 1 4 inch male flare fitting installed on the helium charge fitting of the compressor NOTE Use only 99 999 pure helium c Set the helium pressure regulator to 10 to 25 psig 70 125 kPa Allow helium gas to flow through the charging line F 2 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks and around the loosened flare fitting for 30 seconds to purge the charging line of air Then tighten the flare nut at the end of the charge line d Slowly add helium gas until compressor pressure gauge reads 195 205 psig 1345 1415 kPa 5 Turn on the system power ON OFF switch 6 Note helium pressure gauge reading immediately after startup It should read 50 100 psig 345 690 kPa If necessary add additional helium gas by slowly opening the helium charge valve on the rear of the compressor until the helium pressure gauge rises to 50 100 psig 345 690 kPa 7 Allow the cr
21. essor 1 2 inch FPT input and output connections DO NOT OVERTIGHTEN CAUTION Check water connections for leaks Cooling Water General Considerations NOTE Adjust your water flow to maintain an optimum discharge water temperature of 80 F with a minimum input pressure of 7 psi For detailed water requirements see below 1 Cooling water must meet flow and pressure requirements as indicated in the following subsections 2 Cooling water should have a pH value of 6 0 to 8 0 and a calcium carbonate concentration of less than 77ppm The quality of typical municipal drinking water is generally acceptable If the cooling water has a pH value lower than 6 0 or a calcitum carbonate concen tration higher than 77 ppm water conditioning may be required 3 To conserve water the cooling water should be shut off when the compressor is not running CAUTION If cooling water below 45 F 7 C is allowed to run through the compressor while the compressor is not operating the compressor oil will change viscosity and thicken causing the compressor to overheat and shut off at startup In this event repeatedly restart the compressor and allow it to run until it has shut off several times The oil temperature will rise and thereby allow continuous compressor operation 4 Drain and purge water from the compressor before shipping it back to the factory or subjecting it to freezing conditions Purge water from the compressor by blowi
22. g procedures The compressor pump is hot after operating Wait for the pump to cool down before working on the inside of the compressor Do not change or modify any compressor internal wiring circuits this may cause failure of the compressor and cold head due to improper phasing T P N 8040232 B 1 Introduction Brooks Table B 1 Compressor Troubleshooting Procedures Problem 1 System power ON OFF switch CB1 and compressor switch S1 remains in the ON posi tion when switched on but the compressor will not run Refer to Figure C 1 for identification of all electrical compo nents Possible Cause 1 No power coming from the source 2 Insufficient voltage at power source 3 Control circuit fuses missing or blown 4 Improperly wired external remote control circuit This will apply only if the remote control feature is being utilized 5 Incorrect control circuit volt age 6 Excessive current drawn by the compressor pump has caused the overload relay in the motor contactor MI to open Corrective Action 1 Check source fuses circuit breakers and wiring associated with the power source and repair as needed 2 Verify adequate phase to phase input voltage Refer to Table 1 2 3 Check control fuses 1FU 2FU and 3FU If any of these fuses are blown contact the Product Ser vice Department 4 Verify correct installation of remote control feature by refer ring to Table
23. hould also have available the On Board High Vacuum Pump Manual that applies to your particular system e 8040215 On Board 8 and 8F High Vacuum Pumps e 8040233 On Board 10 and 400 High Vacuum Pumps The manuals for a system cover two basic components the high vacuum pump and the compressor Each manual outlines the details necessary for installation operation and service of that component A manual is shipped with each system component high vacuum pump and compressor When you purchase a system you will receive the two manuals necessary for system installation plus a loose leaf binder with index tab separators allowing you to compile a complete indexed system notebook Installation Operation and Service Instructions Installation Operation and Service Instructions for your 8510 Low Voltage Compressor provide easily accessible information All personnel with installation operation and service responsibilities should become familiar with the contents of these instructions to ensure high quality safe reliable performance Unit must be wired by an authorized electrician in accordance with the national electric code ANSI NFPA 70 1987 as well as the local codes SSS eT P N 8040232 1 1 Introduction t tT FRONT VIEW Bo Ppa ee Brooks Figure 1 1 8510 Low V
24. iple cryopump installation please contact the BROOKS CRYOGENICS U S A Application Engineering Department 1 800 447 5007 for technical assistance in the selection and sizing of the manifolds and interconnecting lines for your particular installation Ee P N 8040232 F 1 Introduction gt Bro oks Preliminary System Requirements Installation of the 8510 Low Voltage Compressor for use with a single cryopump is covered in Section 3 Installation Installation for multiple cryopump usage is similar but requires that system charge pressure be established for a given high vacuum pump system Additionally the following parameters must be considered before the system can be assembled e All system components must be assembled and be operational for system static charge pressure determination e All system components must have static charge pressures of 195 205 psig at 70 F to 80 F 21 C to 27 C Determining System Charge Pressure To establish the helium gas charge pressure of a multiple cryopump installation proceed as follows 1 Assemble your multiple cryopump system components 2 Check the compressor pressure gauge to insure static pressure is in the 195 205 psig 1345 1415 kPa range 3 Ifit is necessary to reduce helium gas pressure then perform the following a Disconnect the charging line from gas charge fitting on rear of compressor b Open the gas charge valve v
25. le 1 2 2 Check for inadequate water cooling see Table 1 3 3 Recheck for proper cooling water temperature per Table 1 1 Restart the compressor repeat edly until continuous operation is achieved Introduction gt Bro oks This Page Intentionally Left Blank nn nn acQoQ QhaeDw aseiiirxv 0008K8837WMWAVBPIB vvvrvr lRiR __ B 4 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Appendix C Electrical Schematic for 8510 Low Voltage Compressor Fuse Designation 1FU Table C 1 8510 Fuses Amp Rating Bussman P N MDX1 2FU MDX1 3FU MDX2 4FU 3 2 MDL 3 2 10 SFU 3 2 MDL 3 2 10 6FU 3 2 MDL 3 2 10 7FU 0 5 MDL 1 2 8FU 0 5 MDL 1 2 9FU 0 125 MDL 1 8 Replacement parts must be Bussman type only P N 8040232 C 1 Introduction 2 Bro oks erm ryt 1A RED 13 a ke Ld o 5 m Ed ce 4 5A 5 e 54 ce 6 Sa ca Sa wrt sone a BAN a viO oe GRAY lt lt CRN YEL WHT ORN KECER recce ech gt amp cE ina od E E amp GE amp e gt cE 2a cE E E EE Tefc ofelefel ayo e bbe ON BOARD Ow BOARD on Aoano USERS REMOTE SWITCHING CIRCUIT OPTIONAL Figure C 1 Electrical Schematic for 8510 Low Voltage Compressor Drawing No 8031350 Rev F C 2 P N 8040232 8510 Low Voltage Compressor
26. lines to the compressor fittings and secure with hose clamps If hard piping is used apply a light coating of plumb ing thread sealant on threads and install water lines onto the com pressor DO NOT OVERTIGHTEN CAUTION Check water connections for leaks 7 Connect the cold head power cables to the compressor connectors 8 Plug the compressor input power cable into the power source Unscheduled Maintenance Suggested Unscheduled Maintenance Equipment It is advisable to keep on hand the unscheduled maintenance equipment and disposable supplies listed below 1 Helium 99 999 pure 2 Pressure regulator 0 3000 0 400 psig 3 Maintenance manifold P N 8080250K003 4 Helium charging line terminating in a 1 4 inch female flare fitting P N 7021002P001 5 Installation and Scheduled Maintenance Tool Kit P N 8032040G014 Available from stock consult the factory or your sales representative Adding Helium Gas Use only 99 999 pure helium gas CAUTION If the compressor helium pressure gauge reads 0 decontamination is required Refer to Helium Circuit Decontamination within this section or contact the Product Service Department 1 A user supplied helium charging line terminating in a 1 4 inch female flare fitting and a two stage pressure regulator rated at 0 3000 0 400 psig is required for this operation EEE 4 4 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pu
27. mps 2 Bro oks 2 Ifyou need to add helium more than once every several months check for leaks caused by improperly connected self sealing con nections or any mechanical joint within the compressor There are two conditions that require the addition of helium gas 1 Compressor not operating helium pressure gauge reads 195 psig 1345 kPa or below 2 Compressor operating helium pressure reads 75 psig 517 kPa or below To add helium gas 1 Attach a two stage regulator 0 3000 0 400 psig and charging line to a helium gas 99 999 pure DO NOT OPEN THE BOTTLE AT THIS TIME Purge the regulator and charging lines as instructed in steps a through e below Do not use helium gas that is less than 99 999 pure a Open the regulator a small amount by turning the adjusting knob clockwise until it contacts the diaphragm then turn approximately 1 8 to 1 4 turn more so that the regulator is barely open b Slowly open the bottle valve and purge the regulator for 10 to 15 seconds Turn the regulator knob counterclockwise until the helium stops flowing c Connect the charge line to the helium pressure regulator d Remove the flare cap of the gas charge fitting on the rear of the compressor Loosely connect the charge line to the charge fitting e Set the helium pressure regulator to 10 to 25 psig 70 125 kPa Allow helium gas to flow through the charging line and around the loosened flare fitting for 30 seconds to pu
28. necting the Adsorber Self Sealing Couplings Removing the Compressor Adsorber To remove the compressor adsorber see Figure 4 1 and proceed as follows 1 Shut down the compressor 2 Disconnect the compressor input power cable from its electrical power source and disconnect the water lines 3 Disconnect the flex lines from the gas return and gas supply con nectors at the rear of the compressor NOTE Use the two wrenches supplied in the Installation and Scheduled Maintenance Tool Kit to avoid loosening the body of the coupling from its adapter Hold one wrench fast on the coupling half attached to the rear side of the compressor Use the other wrench to loosen the coupling on the helium supply or return line 4 Loosen the four screws that hold the compressor rear panel and remove the panel Disconnect the adsorber inlet self sealing coupling See Figure 4 1 Remove the bolts nuts and washers that secure the adsorber to the base of the compressor Save all hardware D r E 4 2 P N 8040232 A 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks 7 Carefully slide the adsorber outward until it clear the compressor and remove the adsorber WARNING Depressurize the adsorber before disposing of it Attach the depressur ization fitting included in the Installation and Scheduled Maintenance Tool Kit to the coupling half at either end of the adsorber and tighten it slowly Installing the C
29. ng compressed air regulated to 30 to 40 psig 200 to 275 kPa into the compressor output connection and allowing water to exit from the water input connection eHO U ae 3 6 P N 8040232 g 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps Brooks Cooling Water Flow and Pressure Requirements CAUTION If your water supply pressure falls below 7psig due to back pressure the compressor will overheat and shut down Use the two graphs in Figure 3 7 to determine the minimum acceptable cooling water supply pressure at different flow rates and temperatures Find the minimum pressure P N 8040232 3 7 Introduction gt Bro oks Heater Power On Board Power Cold Head Power Circuit Breakers Circuit Breakers Circuit Breakers CB4 CB5 CB6 CB7 CB2 CB3 Or f at System Power N OFF Switch Circuit Breaker CB1 Voltage Selector Switch S3 O yaa Cold Head Power Cable Receptacles J10 J11 J12 System Remote Control Receptacle J4 Input Power Cable Receptacle J1 Figure 3 6 Preparing the 8510 Low Voltage Compressor Control Module Table 3 1 Compressor Control Module Specifications Voltage Selector Frequency Hz Voltage Switch S3 Setting Compressor Configuration P N 8031315 220 190 210 230 VAC 50 60 Hz 210 230 198 2
30. nnector Jil On Board Power Output Connector Circuit Breaker 3A Cryopump Power Circuit Breaker 3A Cryopump Power Circuit Breaker 5A On Board Power Circuit Breaker 5A On Board Power Circuit Breaker 5A Heater Power Circuit Breaker 5A Heater Power Circuit Breaker 25A Main Power P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps gt Bro oks Figure D 1 Electrical Control Module Components of 8510 Low Voltage P N 8040232 Introduction gt Bro oks This Page Intentionally Left Blank SSS D 4 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Appendix E 8510 Low Voltage Compressor Flow Diagram RELIEF VALVE SOLENOID CONTROLLED VALVE 250 PSIG NORMALLY OPEN 3 _ HELIUM RETURN LINE FROM THE COLD HEAD RETURN PRESSURE DIFFERENTIAL GAUGE PRESSURE RELIEF VALVE 235 PS RELIEF VALVE 375 PSIG HELIUM SUPPLY ADSORBER LINE TO THE COLD HEAD GAS CHARGE VALVE FITTING BULK OIL SEPARATOR OIL INJECTION INJECTION ORIFICE i FILTER re a e 4 Pi OIL MIST 4 SEPARATOR I RETURN l FILTER OEO CONTROLER VALVE l NORMALLY CLOSED as T OIL RETURN ORIFICE CYLINDER HEAD l OIL SIGHT GLASS 4 r Joi FILL oi OVERFLOW 4 LINE i
31. oltage Compressor Front and Side Views Table 1 1 Compressor Dimensions P N 8031315 Location Compressor Dimension Inches mm 19 40 max 493 mm 21 25 max 540 mm 24 12 max 613 mm 2 30 58 mm Table 1 2 Power Requirements Steady State Conditions Compressor 8510 Part No 208 230 8031315 200 Full Load Current Amps Operating Voltage Range Volts 198 250 190 230 Maximum Phase Run Current Amps P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps Brooks Table 1 3 General Specification Specification Description Weight 340 Ibs 154 kg approximate Weight shipping 445 lbs 202 kg approximate Power consumption 5 kw nominal operating power 6 75 kw maximum Compressor input power cable customer supplied Recommended type SO 4 conductor 600V neoprene jacket and 10 gauge wire Install per Figure B 1 electrical schematic diagram ensuring compliance with all national state and local standards Helium pressure Static 195 205 psig 1345 1415 kPa at 70 to 80 F 21 to 27 C Return Normal operation 75 85 psig 517 590 kPa at operating temperature Ambient operating temperature range 50 to 100 F 10 to 38 C Interface Cold head power receptacles 3 Mates with plugs on cold head power cables Compressor input power receptacle Mates with Hubbel twis
32. ompressor Adsorber 1 Install the replacement adsorber as follows a Remove the dust caps from the self sealing coupling halves at each end of the replacement adsorber b Install the replacement adsorber following the steps for compressor adsorber removal in reverse order Use the hard ware saved from adsorber removal 2 Connect the adsorber to the compressor internal piping as follows a Check the self sealing connector flat rubber gasket to make sure that it is clean and properly positioned b Make the first turns by hand and then firmly seal the con nection using the two wrenches until the fittings bottom CAUTION Make sure to hold fast on the left coupling nut while tightening the right coupling nut as shown in Figure 4 1 c Using the two wrenches supplied in the Installation and Scheduled Maintenance Tool Kit make the connection quickly to minimize minor gas leakage See Figure 4 1 3 Replace the panel and secure it by tightening the four screws 4 Ensure that the pressure gauge reads 195 205 psig 1345 1415 kPa If additional gas pressure is required follow the instructions under Adding Helium Gas Record the date that the adsorber was replaced and also make a note that the next adsorber replacement is in three years 5 Connect the flex lines to the gas return and gas supply connectors at the rear of the compressor P N 8040232 4 3 Introduction gt Bro oks 6 Connect the water
33. rces of electrical power before performing any maintenance procedures Unit must be wired by an authorized electrician in accordance with the national Electrical Code ANSI NFPA 70 1987 as well as the local codes This shall include installation of a readily accessible disconnect device into the fixed wiring supplying power An insulated safety grounding conductor that is identical in size insula tion material and thickness to the circuit supply conductors except that it is green with or without one or more yellow stripes is to be installed as part of the branch circuit which supplies the unit or system The ground ing conductor described is to be connected to equipment grounding con ductor of the supply circuit Scheduled Maintenance The only scheduled maintenance required on the 8510 Low Voltage Compressor is replacement of the compressor adsorber P N 8080275K001 every three years P N 8040232 4 1 Introduction gt Bro oks Compressor Rear gt Panel L ie Y K A lZ SS This 1 1 8 in wrench This 1 3 16 in wrench is used This 1 1 8 in wrench This 1 3 16 in wrench is used holds the couplingin to loosen the self sealing holds the coupling in to tighten the self sealing a stationary position coupling connector Note the a stationary position coupling connector Note the direction of the large arrow direction of the large arrow To Disconnect The Coupling To Connect The Coupling Figure 4 1 Disconnecting Con
34. reakers CB6 and CB7 lamp 12 Cold head power circuit breakers CB2 and CB3 3 Oil sight glass 13 Cold head power cable receptacles J10 J11 and J12 4 Cooling water output 14 Input power cable receptacle J1 5 Cooling water input 15 Helium gas charge fitting and valve 6 Helium gas return connector self sealing coupling 16 Helium return pressure gauge 7 Helium gas supply connector self sealing coupling 17 System power ON OFF switch circuit breaker CB1 8 Compressor motor starter reset 18 System remote control receptacle J4 9 Voltage selector switch S3 Figure 1 2 8510 Low Voltage Compressor 4 4 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Section 2 Inspection Packaging of the System The On Board High Vacuum Pump System is packaged in three separate cartons Listed below are the contents of each carton as they relate to these two system applications Note that an Installation Operation and Servicing Manual is included in cartons for the high vacuum pump and compressor Each manual covers the component packaged in that carton When installing an On Board High Vacuum Pump System BROOKS CRYOGENICS recommends that as you unpack a component you perform an inspection and the necessary tasks for system installation for the component according to the manual included with the component Final system installation and operation will be perfo
35. rge the charging line of air Then tighten the flare nut at the end of the charge line This procedure is required to ensure that both the regulator and the charging line will be purged of air and that the air trapped in the regulator will not diffuse back into the helium bottle For best results BROOKS suggests a dedicated helium bottle regulator and line which are never separated for adding helium 2 Set the helium pressure regulator to 300 psig 2070 kPa Depend ing on the compressor operating state add helium gas a Ifthe compressor is running approximately 2 hours operat E P N 8040232 4 5 Introduction gt Bro oks ing time under normal operating conditions slowly open the helium charge valve on the rear of the compressor When the helium pressure gauge rises to 75 85 psig 517 590 kPa tightly close the charge valve b Ifthe compressor is not running slowly open the helium charge valve When the helium pressure gauge rises to 195 205 psig 1345 1415 kPa tightly close the charge valve CAUTION Add helium gas slowly to prevent relief valve blow off 3 Ensure that the helium charge valve on the compressor is tightly closed Shut off the helium pressure regulator on the helium bottle and remove the charging line from the male flare fitting Shut off the helium gas bottle valve Reinstall the flare cap Helium Circuit Decontamination Contamination of the helium gas circuit is indicated by sluggi
36. rmed following procedures in the On Board 8 8F or 10 and 400 Cryopump Manual No 8040215 or 8040233 respectively Table 2 1 8510 Shipping Carton Contents On Board 8 8F 10 And 400 High Vacuum Manual Canon Label Pump System Carton Contents Included On Board On Board 8 8F Cryopumps 8040215 On Board On Board 10 and 400 Cryopumps 8040233 Compressor 8510 Low Voltage Compressor 8040232 Accessories Installation and Scheduled Maintenance Tool Kit and Accessories P N 8032040G014 The Compressor On receipt remove the 8510 Low Voltage Compressor from its shipping carton and inspect the compressor for evidence of damage as described in this Section 1 Unpackage and remove the compressor from its shipping carton EEeE E ay P N 8040232 2 1 Introduction gt Bro oks 2 Check the carton contents It should contain a 8510 Low Voltage Compressor b Two barbed fittings for compressor cooling water connec tions c Compressor remote start connector d Input power connector e Oil prime manifold P N 8018129 f 8510 Low Voltage Compressor Manual P N 8040232 g Spare fuses 2 2 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps gt Bro oks Section 3 Installation Removing Compressor Pump Shipping Supports Refer to Page 3 2 7 Assemble Compressor Input Power Cable Refer to Page 3 3 r Setting Voltage Tap Switches R
37. rows extending from the lower to the upper graph On the upper graph the dashed arrows intersect the graph curve at approximately 15 psig 4 Determine the total cooling water supply pressure drop by adding the pressure drop determined from the graph to the water back pres sure at the installation site Cooling Water Temperature Rise CAUTION The temperature of the cooling water as it leaves the compressor should not exceed 100 F Use the graph in Figure 3 8 to determine the rise in cooling water temperature as it passes through the compressor The recommended discharge temperature for the compressor is 80 F This information is used by plant engineering personnel to determine cooling water requirements 20 E Ww oo lt iu x a Ge wm z a 15 iJ aa a tw a uu 10 NOTE Used for 1 8 2 0 2 5 3 0 clarification of example WATER FLOW RATE GPM presented in text Figure 3 8 8510 Compressor Water Discharge Temperature Increase F Find the temperature rise 1 Draw a vertical line upward from the horizontal axis of the graph at the water flow rate determined from the previous section until it hits the graph curve 3 10 P N 8040232 A 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks The example shows dashed arrows pointing upward to the graph curve from 2 5 gpm on the water flow rate axis 2 At the point which the dashed arrows intersect the graph curve draw a
38. s at the rear of the compressor The cryopump is now ready for operation Compressor Decontamination Procedures The procedure to decontaminate a compressor is similar to the above procedure with certain exceptions e There is no need to operate the cryopump before decontaminating the compressor e The maintenance manifold and helium gas supply and helium gas return lines will be connected to the supply and return fittings on the compressor 1 Open the ball valve slightly on the maintenance manifold and allow the helium to bleed out and depressurize the compressor if pressurized to 30 psig 2 Charge the compressor slowly to approximately 200 psig 1380 kPa by opening the 1 8 inch valve on the maintenance manifold 3 Run the compressor for about 30 seconds 4 Repeat steps 1 and 2 one time 5 Disconnect the maintenance manifold from the helium gas return and helium gas supply lines 6 Reconnect the helium gas return and helium gas supply lines to the return and supply connectors on the cold head The compressor is now ready for operation a eT 4 8 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks NOTE After connecting the compressor to the cryopump and operating the system for a period of time it may be necessary to decontaminate the cryopump as some residual contamination from the compressor may become trapped in the cold head If the entire system was reduced to z
39. s supply connector on the rear of the compressor to the gas supply connector on the cryopump cold head 4 Attach the supply and return line identification decals BROOKS CRYOGENICS supplied to their respective connecting piping ends P N 8040232 3 11 Introduction gt Bro oks Verify proper helium supply static pressure by confirming that the helium pressure gauge reads 195 205 psig 1345 1415 kPa in an ambient temperature range of 50 to 100 F 10 to 38 C If the indicated pressure is higher than 205 psig 1415 kPa reduce the pressure as follows 1 Remove the flare cap from the gas charge fitting located on the rear of the compressor 2 Open the gas charge valve very slowly Allow a slight amount of helium gas to escape until the helium pressure gauge reads 200 psig 1380 kPa 3 Close the gas charge valve and reinstall the flare cap If the indicated pressure is lower than 195 psig 1345 kPa add helium gas as described in Section 4 Maintenance Procedures Electrical Connection of Compressor WARNING The system power switch on the rear of the compressor must be in the OFF position before making any and all electrical connections 1 Connect the power cable to the rear panel of the compressor and the other end to the electrical power connector on the cryopump 2 Plug the compressor input power cable into the power source 3 Turn the system power switch on the rear of the compressor to the ON posi
40. sh or intermittent operation ratchetting of the cold head drive mechanism With severe contamination the cold head drive may seize and fail to operate One of the major sources of contamination is using helium gas of less than the required purity When performing the decontamination process use only 99 999 pure helium gas and the regulator and charging line must be properly connected and purged This contamination procedure will remove contaminants from the cold head and or compressor thereby restoring system performance The cold trapping of contaminants inside the cold head during this procedure will also decontaminate the compressor if the contamination of the system is not severe Separate decontamination of the compressor is required whenever the compressor has been opened to atmosphere or the pressure dropped to zero Cryopump Decontamination Procedures 1 Cool down the cryopump and operate it for one to three hours If the system will not cool down proceed to step 2 Operating the cryopump will isolate the contaminants by freezing them in the cold head The contaminants in the helium gas circuit of the cryopump tend to become frozen inside the cold head The longer the cryopump is operated beyond the one hour period the greater is the amount of contamination that becomes isolated inside the cold head 2 Shut down the compressor as follows ESO llU T T ey 4 6 P N 8040232 8510 Low Voltage Compressor For Use With On Boar
41. t lock plug No 27723 Gas supply connector 1 2 inch self sealing coupling Gas return connector 1 2 inch self sealing coupling Remote control receptacle 24 VAC 150ma Mates with P4 connector P N MS3106A 2 supplied by BROOKS CRYOGENICS Adsorber service schedule Replace every three years Cooling water require ments 70 F water supply 2 5 gpm 14 psid pressure drop water inlet to water outlet The pressure value does not consider discharge back pressure con ditions Maximum minimum water requirements Maximum outlet temperature 100 F 38 C Minimum inlet temperature 40 F 4 C Maximum inlet pressure 100 psig This compressor has been designed to operate with water having a pH value of 6 0 to 8 0 and a calcium carbonate concentration of less than 75 parts per million typical municipal drinking water quality For applications of lower pH or greater hardness water conditioning may be necessary SSS eT P N 8040232 1 3 Introduction gt Brooks 1 2 CTI CRYOGENICS Al Ea 7 a 00a aa 8510 GUMPRESSOR O fl E 5 yO fel 4 5 Q I FRONT VIEW lg REAR VIEW 1 Compressor power ON OFF switch with ON lamp 10 Heater power circuit breakers CB4 and CBS 2 On Board System power ON OFF switch with ON 11 On Board power circuit b
42. tion SSS as 3 12 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps gt Bro oks User s Vacuum Chamber On Board Cryopump Helium Supply Line Helium Return Line On Board Power Cable Roughing Pump Air Pressure 60 80 psi Nitrogen 40 80 psi Figure 3 9 8510 Low Voltage Compressor Installation 8510 Low Voltage Compressor Electrical Phase Check and Automatic ON OFF Control System Phase Input Checkout Procedure To check that the correct phasing is being supplied to the On Board cryopump proceed as follows 1 Press CONTROL key on the On Board keypad 2 Press 1 to turn the cryopump on 3 Ifthe cryopump turns on keypad displays CRYO ON the system phasing is correct 4 Press 0 to turn cryopump off 5 Ifthe cryopump does not turn on when 1 is pressed keypad display reads NO CRYO POWER 2 This means that incorrect phasing is being supplied to the 8510 Compressor from its power source 6 To correct the phasing interchange any two of the three phase wires at the compressor receptacle plug See Figure 3 5 EEEeEeE EEE See P N 8040232 3 13 Introduction gt Bro oks Automatic ON OFF Control of the 8510 Low Voltage Compressor Using the On Board Setpoint Relays The 8510 Low Voltage Compressor remote start feature can be used with one of the On Board setpoint rela
43. tion with Single 8510 Low Voltage Compressor Figures Figure 1 1 8510 Low Voltage Compressor Front and Side Views 1 2 Figure 1 2 8510 Low Voltage Compressor 00 00 e eee eee 1 4 Figure 3 1 Block Diagram for 8510 Low Voltage Compressor Installation 3 1 Figure 3 2 Removing Compressor Pump Shipping Supports 3 2 Figure 3 3 Stripping Compressor Input Power Cable Insulation 3 3 Figure 3 4 Input Power Cable Receptacle Plug 0 000 3 4 Figure 3 5 Wiring Diagram For Standard And Grounded Delta Configurations 4 2c2064 hewdsa ee devo eedanasota lie nde od 3 5 Figure 3 6 Preparing the 8510 Low Voltage Compressor Control Module 3 8 Figure 3 7 8510 Compressor Cooling Water Flow And Pressure Requirements 2 a piced spray edna aaa od Men a earn ae WEL was 3 9 Figure 3 8 8510 Compressor Water Discharge Temperature Increase F 3 10 Figure 3 9 8510 Low Voltage Compressor Installation 3 13 Figure 4 1 Disconnecting Connecting the Adsorber Self Sealing Couplings 4 2 Figure C 1 Electrical Schematic for 8510 Low Voltage Compressor Drawing No 8031350 Rev F seee eretan hb anes Bie toe ees a ea oe C 2 eS ii P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Table of Contents continued Figure D 1 Electrical Control Module Components of 8510 Low Voltage COMIPIESSOR 4 0 cena heuatwe se hee Arar E
44. yopump to operate until a cooldown temperature of 20K or less is reached Adjust the helium pressure if necessary as described in step 6 until the helium pressure gauge reads 80 100 psig 550 690 kPa while the system is operating 8 Allow the system to reach steady state Recheck the helium pres sure 9 When steady state is achieved shut the system off and allow the system time to reach steady state conditions at room temperature 10 When the system reaches room temperature the pressure reading on the compressor gauge is the system charge pressure NOTE Record the compressor static pressure in your operating log This is the static pressure for your particular installation and should be used for checking compressor performance or when troubleshooting the installation 11 Ensure that the helium charge valve on the compressor is tightly closed Then shut off the helium pressure regulator or the helium bottle Remove the charging line from the male flare fitting and reinstall the flare cap P N 8040232 F 3 Introduction gt Bro oks This Page Intentionally Left Blank i SS F 4 P N 8040232
45. ys to automatically turn the compressor on when the cryopump is turned on and turn it off when the cryopump is turned off Disconnect the jumper on the jumper connector supplied and installed on the compressor REMOTE connector J4 Connect the electrical leads from the On Board relay using 18 awg or larger wire 2 7A inductive load to the remote connector as follows Table 3 2 Electrical Leads On Board Relay 8510 Remote Connector Connector J5 Pin 8 A Pin 6 B Now program Relay 1 to the cryopump function as described below 1 Press the RELAY function key 2 Select Relay 1 by pressing 1 3 Press the Next key until the display reads CRYOPUMP 4 Press Enter and the display should read FNC CRYOPUMP function is cryopump operation 5 Press the CONTROL function key Programming is complete NOTE Be sure that the compressor switch is off before connecting or disconnecting the remote connector Multipump Installation Your 8510 Low Voltage Compressor can be connected to more than one high vacuum pump at a time For example three On Board 8 vacuum pumps can be connected to a single 8510 Low Voltage Compressor CAUTION For detailed instructions on multiple Cryopump installation refer to Appendix F 3 14 P N 8040232 8510 Low Voltage Compressor For Use With On Board High Vacuum Pumps 2 Bro oks Section 4 Maintenance Procedures WARNING Always disconnect the compressor from all sou
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