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Leybold UL-500 Manual - Pascal Technologies, Inc

1. 00 17 MEASURE Mode 00 17 START RESET MAX Key 17 START RESET MAX Key in STANDBY 00008 17 START RESET MAX Key in DETECT Mode 17 o TOP VENT Key 2255 17 STOP Function 0008 17 VENT Function 00 18 ZERO Keys cide ter oe eee ee 18 SCALE KOY srk ei iea etn Ni Ueto Ad Bote US 18 RATE CONC Key 18 SPREC KY gatdsue dak eto wane wien 19 MAX ACT Key 2 2222000055 19 MAXIMUM Function 19 ACTUAL Function 0 19 FAST SLOW Key 2 19 Numeric Keypad 000 19 Decimal Point Key 19 EXPS KOV an ea cee ee 6 a aete 19 PLUS MINUS Key 4 005 20 Arrow LEFT RIGHT Keys 20 CLR Key 0000 2c eee eee eee 20 LIMIT LOW LIMIT HIGH Key 20 Operation with only LIMIT LOW Activated 3 52040 Seen ee Sel ek 20 Operation with LIMIT LOW and LIMIT HIGH Activated 20 Manual Ranging in Connection with set Upper and Lower Limit 21 OPTE Key 0 aa eee eee 21 sHELP KEY 4 2564 aes Ob eee dhe 24 jEXEGCSKEY ho ved do a a dengan dwba 24 GA 10 204 3 02 08 96 2 2 22 Volume Control 2 2 23 Recorder Output and Remo
2. GA 10 204 3 02 08 96 27 Page 2 7 1 1 Calibration with Internal Calibrated Leak 000 35 2 7 1 2 Calibration with External Calibrated Leak 000 35 2 7 2 Calibration in SNIFF mode 36 2 7 2 1 Calibration with a Known Helium Concentration 36 2 7 2 2 Calibration of Helium Leak Rate 36 2 8 Automatic Functions 37 2 8 1 AUTOTUNE 0 000005 37 2 8 2 AUTOZERO 0 000000 eae 37 2 8 3 AUTORANGE 0 00005 37 3 Maintenance 39 3 1 Checking the Oil Level and Gas Ballast Switch of the Auxiliary Pump or Forepump 39 3 2 Exchanging the Fluorescent Tube behind the Display 39 3 3 Changing the Fuses on the Power Distribution LV Front Panel 39 3 4 Exchanging the Filter Mat 40 3 5 Draining Condensate from the Compressor Buffer Vessel 41 ANNEX seteicig uh eaea N a a 42 Parameter entry mode PARA MODE 42 ANNEX Z co carta ssu et Ea eae EERU ETa e Ea 43 Operation of the UL 500 on mass 2 and 3 ydrogen oeie recae tati i e A 43 ANNEX I se dhs Wee ed ee pe tg 44 Equipment messages Messages for the operator on the text display 44 ANNEX 4 4 wee ei eta ee een ee ee a 46 Error messages 0 eee eee eee 46 3 1 Description 1 1 General These Operating Instructions contain impor tant information
3. 2 2 13 Decimal Point Key The decimal point key 7 19 is used in com bination with the numeric keypad 7 20 to enter digits 2 2 14 EXP Key The EXP key 7 5 is used when entering numbers The possible input point cursor immediately jumps to the first digit of the exponent when the key is pressed EXP 19 2 2 15 PLUS MINUS Key The PLUS MINUS key 7 6 is used to change the sign when entering numbers 2 2 16 Arrows LEFT RIGHT Key The keys Arrow pointing RIGHT 7 7 and Arrow pointing LEFT 7 8 have several functions When entering numbers for the functions LIMIT LOW 7 22 and 8 16 and LIMIT HIGH 7 21 and 8 14 the input position cursor is moved to the right or left by pressing the key 7 7 or 7 8 respectively The positi on just selected flashes The same function is employ ed in conjunction with inputs made via the alphanume ric display line 8 17 With LIMIT LOW and LIMIT HIGH measurement range interval active the display range can be shifted up or down by one decade Thus it is possible to manually set the measurement range manual ranging Selection of an option see Section 2 2 19 lt gt 2 2 17 CLR Key CLR The CLR key 7 4 is used to cancel the last function entered The following functions are possible Clear the command
4. After pressing the OPT key the desired function can be selected with the support of a menu which indicates the designation of the option and the option number in the alphanumeric display line 8 17 On activating the OPT key the last option selected is always displayed again or after switching the unit on option number 01 appears The low order position of the option number flashes and can be changed An option can be selected by means of the two arrow keys The arrow to the right increases the option number and the arrow to the left decreases it Like this the operator can easily obtain overview of all option functions the numeric keys A digit is directly entered at the flas hing low order position if a second digit is entered the first is shifted to the high order position In this way a specific option function can be directly selected Execution of a desired option function is initiated by pres sing the EXEC key 7 8 If the function produces a dis play in the alphanumeric display line the display remains there until a key is actuated The following applies Pressing the OPT key 7 2 causes the option menu to reappear Pressing any other key produces a normal operational GA 10 204 3 02 08 96 display of the UL 500 To cancel a request for an option press the CLR key 7 4 If an option number has not been assigned a func tion the following display appears OPT UNAVA
5. Vacuum Pumps Instrumentation Fittings and Valves GA 10 204 3 02 r LEYBOLD x LEYBOLD VACUUM SET cu Best solution your ULTRATEST UL 500 Helium Leak Detector Cat No 155 85 Operating Instructions LEYBOLD Service If an appliance is returned to LEYBOLD VACUUM GmbH indicate whether the appliance is free of sub stances damaging to health or whether it is contamina ted If it is contaminated also indicate the nature of the hazard LEYBOLD must return any appliance without a declaration of contamination to the sender s address General Note The right of alterations in the design and the technical data is reserved The illustrations are not binding Contents Page 1 Description 0 4 1 1 General 20202020200000 eee eee 4 1 1 1 Unpacking 0002s e ee eee 4 1 1 2 Transport at the Customer s Site 4 1A PUIPOSO 28 adaee ede nie es eG hag ae wd 4 1 1 4 Modules 2220 4 1 2 Technical Data 24 5 1 2 1 Physical Datasses 0 iate hae ies fue babes 5 1 2 2 Electrical Data 6 1 3 Technical Description 6 1 3 1 Principle of Leak Detection 6 1 3 2 Double Entry Turbomolecular Pump 6 1 3 3 FOrepuMp cen ses Skee eee eee ae 6 1 3 4 Auxiliary Pump 00 7 1 3 5 Mass Spectrometer
6. ANNEX 1 Parameter entry mode PARA MODE For proper operation the UL 500 requires some parame ters which are partly specific to the unit and some which can be changed by switching to other operating modes The parameters are stored in a battery backed up memory and are not lost when switching off the mains Should none the less the data be lost the entry of the parameters is automatically requested after switching on the mains Stored are the following Nominal speed of the turbo pump Leak rate of the internal calibrated leak Set mass Type of the built in auxiliary pump Set leak rate unit and in case of a built in clock Date Time In order to display these data and to change them the UL 500 has to be set up in the parameter entry mode The UL 500 is switched off or must be switched off from normal operation leave switched off for several seconds Operate the mains switch and at the same time press the OPT pushbutton and keep it pressed down fur ther The alphanumerical display will indicate one after the other LEYBOLD VACUUM Remains for 1 s PARA INPUT EXEC CLR Now the OPT pushbut ton may be released For switching on the PARA mode this question has to be acknowledged by the EXEC pushbutton Opera ting CLR will lead to normal operation After EXEC the following is displayed PREPARING PARA INPUT Remains for 1s UL 500 VERS 1 7 Remains for 1 s Now at first
7. In rooms with helium concentrations significantly above 5 ppm the use of air supply lines is recommended In such cases helium free air should be fed via a line to the venting valve VF 1 2 15 Special accessories are avai lable for this purpose upon request Note Prior to initial startup check the oil level of the auxiliary pump and forepump see Section 3 1 Before connecting the UL 500 to the mains check whether the mains voltage matches the voltage requi red see Section 2 1 2 1 2 1 2 1 Electrical Connections Note In general the currently valid VDE 0100 regulations must be observed The transformer integrated in the UL 500 permits an uni versal adaptation to mains voltages used throughout the world see Section 1 2 2 This is achieved by inserting several plug in jumpers 9 3 into a terminal strip 9 2 The required position depending on the local mains vol tage is given in Fig 10 A connection diagram for the different mains voltages according to Fig 10 is also given inside the UL 500 on its rear panel 100 V 50 Hz 220 V 50 Hz 110 V 60 Hz USA Venezuela 1 2 1 1 9 10 yom o ij ii I hi U f y I K I i i i i I it I a I M ii it i ii I i I i in y in 1 ia F T T ii i ieee ee 1 od EEREN EE 110V 50 Hz iii iiti Iiii i ih 127 V 50 Hz ia it i acs lee nt 200 V 50 Hz 123 45 6 7 T l I Wl h h ou TEISTE 240 V 50 Hz 5 6 7 8 9 1011 I i FA m
8. DETECTING Press CAL key Press EXEC key The running process may be terminated by pressing the CLR key After starting messages appear on the alphanumeric display line 8 17 informing the operator of the sequen ce and requesting him to perform further operations CAL EXT EXEC CLR Press EXEC 7 3 key CONC PPM x xE xx Enter the test concentration e g 5 ppm 5 0E 00 Press EXEC 7 3 key SNIFF CONC EXEC Hold the sniffer tip into the gas with the known helium concentration e g air then press EXEC 7 3 key SIGNAL STABLE EXEC 36 Wait until the signal is stable then press EXEC key 7 3 The UL 500 automatically determines the calibration fac tor for the concentration measurements based on the determined concentration and the last available value of the internal Zero This is followed by the message CALIBRATION FINISHED The instrument is now ready for further measurements The CLR key can be used to erase this message Note In order to determine the calibration factor a minimum difference between signal and Zero is required If this dif ference is too small the following error message occurs ER CAL DIFFERENCE lt lt In such a case select PREC and repeat the calibration 2 7 2 2 Calibration of Helium Leak Rate Range 1 10 to 9 9 104 mbar I s The calibration of the helium leak rate requires a sniffer calibrated
9. 1EH 1FH 20H 21H 22H 23H 24H 25H 28H 2CH 2DH 2EH 2FH 47 ER BACKING P I gt gt Current of backing pump motor too high ER BACKING P l lt lt Current of backing pump motor too low ER TMP U LINK gt gt Error message of the TPV if the intermediate circuit dc is too high ER TMP U LINK lt lt Error message from the TPV if the intermediate circuit dc is too low ER TMP I LINK gt gt Error message from the TPV if the intermediate circuit dc is too high ER TMP I LINK lt lt Error message from the TPV if the intermediate circuit dc is too low ER TMP FREQ gt gt Error message from the TPV if the nominal speed of the rotor of the turbomolecular pump is too high ER TMP FREQ lt lt Error message from the TPV if the nominal speed of the rotor of the turbomolecular pump is too low ER TMP OVERLOAD T Error message from TPV in case of over temperature of the motor T gt 65 C ER TMP OVERLOAD I Error message from TPV in case of over current of the TMP motor I gt 12 A ER TMP OVERLOAD U Error message from TPV in case of overvoltage of the TMP motor U gt 80 V ER TMP OVERLOAD FREQ Error message of TPV if the actual speed of the turoopump exceeds the set value ER TMP CONT NO COMMU Connection between TPV assy and STE assy is not working properly ER PHASE MISSING In case of 3 phase mains supply one phase is missing ER PHASE SEQ
10. Key EXEC The EXEC key 7 3 is used to start or ack nowledge functions which have been initiat ed via other keys Acknowledgements of messages of the UL 500 can be input via the EXEC key 7 3 2 2 22 Volume Control The volume of the acoustic signal can be adjusted with the volume control 6 1 Turning the volume control up increases the volume tur ning it down decreases it GA 10 204 3 02 08 96 Key to Fig 11 in Function 2 O 4 1 Channel 2 exponent trigger voltage Ce 2 15 V supply voltage for remote control O 3 Analogue ground for channel 1 and 2 6 4 Connection remote control START STOP O O 5 Channel 1 measurement value lin log 1 5 6 Ground screen Fig 11 Recorder output and remote control connection 2 2 23 Recorder Output and Remote Con Note trol Connection Socket The pin out of the recorder output and remote control connection socket is given in Fig 11 The measurement data are output in analogue form depending on the operating mode selected via OPT 11 to OPT 14 The following voltages are output recorder with an input resistance exceeding 2 5 kQ 1 0 9 9 V per decade channel 1 Pin 5 0 5 V per decade starting at 1 V at 1010 mbar l s 1 Channel 2 Pin 1 0 5 V per decade starting at 1 V at 1010 mbar I s Channel 1 Pin 5 1 Leak rate linear Leak rate exponent 2 Leak rate logarithmic 3 Inlet and forevacuu
11. function see Section 2 2 18 1 Entering LIMIT HIGH changes the representation on the analog circular display 8 1 Two arrow symbols are dis played to indicate the possible representation range The entire measuring range between the limits is now shown on this limited circular display GA 10 204 3 02 08 96 The same also applies for the frequency range of the acoustic signal Note The interval must always be equal to or exceed one decade If the upper limit is not entered a corresponding error message will be displayed Through LIMIT LOW the operation of the AUTORAN GING is limited in the direction of higher sensitivities However LIMIT LOW has no effect on the switching in the direction of lower sensitivities at higher leak rates If a measured value exceeds a set upper limit a segment above the limit value starts to flash and a warning signal can be heared 2 2 18 3 Manual ranging in connection with set upper and lower limit The keys gt can be used to shift the measurement range interval as set through LIMIT HIGH and LIMIT LOW by one decade up or down each time the arrow key is pressed Thus it is possible to select the measurement range manually at a freely selectable resolution mini mum one decade 2 2 19 OPT Key With the aid of the OPT key 7 2 it is possible to select or control optional functions of the UL 500 to OPT which no key has been specifically assig ned
12. 1 Power Switch The entire leak detector is switched on by actuating the power switch The UL 500 first conducts a selftest of individual modu les If concluded with no faults the pumps are switched on After the turbomolecular pump has been run up approx 4 min the UL 500 is ready to operate The UL 500 employs the alphanumeric display 8 17 to inform the operator of all automatically executed actions see Section 2 4 Note During the selftest the turoopump valve VF2 is briefly actuated for testing purposes After completion of run up the UL 500 is set automati cally to the operating condition at the time it was swit ched off All required parameters for this are stored in a battery backed up memory The life of the battery is 6 years approx The following parameters are stored when switching off LIMIT LOW value LIMIT HIGH value LIMIT LOW ON OFF LIMIT HIGH ON OFF INSP or MEAS 16 SNIFF or VAC RATE or CONC PREC on or off Status of the alphanumerical display display P 1 P 2 Status of the recorder output Output of P 1 P 2 leak rate linear or logarithmic Status of the V 24 RS 232 C option Status of the trigger option Equipment specific parameters programmed in the PARA MODE see Annex 1 Factors from OPT CALEMV Anode voltage value determined through AUTOTUNE 2 2 2 SNIFF VAC Key Note Tea The SNIFF VAC key 7 18 may only be actua
13. 7 11 activated the RESET MAX function is executed every time the key is pressed From the point of actuation onward all current leak rate values are displayed which are higher than a preceeding one The next max value is sought and stored in the dis play Note If the ACT display type display the currently measured value is activated pressing the RESET MAX key is ineffectual 2 2 5 STOP VENT Key The STOP VENT key 7 14 has either of two functions depending on how long it is pressed STOP VENT 2 2 5 1 STOP Function Starting from the DETECT mode of the UL 500 evacua tion of the test object is interrupted by pressing the STOP key 7 14 To do so the key must be pressed for less than 1 1 s The unit switches to the STANDBY mode i e all valves are closed Next a correction of the internal Zero level is carried out for the ranges FINE 3 and PREC For this the coupling valve VK is opened briefly and then shut At the same time the last internal leak rate signal is displayed which was determined as the offset after the last Zero determi nation in the two measurement ranges This takes approximately 10 s After Zero correction the detection limit is displayed The operator is informed of the status by the STOP dis play 8 9 lighting up In addition the message STANDBY FOR MEASURE or 17 STANDBY FOR INSPECT appears in the alphanume ric display line 8
14. Numeric keypad Digits 0 9 LIMIT HIGH Input of the upper limit of the measuring range to be displayed LIMIT LOW Input of the lower limit of the measuring range to be displayed GA 10 204 3 02 08 96 Fig 7 Operating unit OPT 10 11 12 13 14 GA 10 204 3 02 08 96 13 to Fig 8 Circular quasi analog display of the leak rate in the Inspect and Measure modes One revolution corresponds to one decade of the measuring range Quasi analog display of a measurement interval defined with the LIMIT values Key 1 2 Exponent scale For quasi analog display of leak rate 3 Digital display of the measured value as leak rate or con centration in the MEASURE mode with mantissa and expo nent 4 Unit ppm for Concentration mode 5 Units for Rate mode 6 MAX ACT Indicates the current operating status of the digital display 7 FAST SLOW Indicates the current speed of overall display reaction 8 CAT2 Informs the operator that the second cathode of the ion source has been put into service 9 STOP VENT Indicates the current operating status of the leak detector Fig 8 Display unit HEE GEHEUE 13 10 11 12 13 14 15 16 17 12 11 SNIFF VAC Indicates the current operating mode of the leak detector PREC Indicates that the PRECISION measuring range for AUTOR ANGING has been released BACKGRND Indicates that zero has b
15. TL 8 Calibrated leak TL 6 Calibrated TL 4 Calibrated TL 4 6 Reducer DN 40 16 Helium spray gun with 5 m hose Standard sniffer Helium sniffer Quicktest Headset Interface V 24 RS 232 C Trigger outputs Set of crane eyes Solenoid gas ballast valves with air inlet Antistatic work plate Exhaust filter Air filtering mat for the rear Remote control Air inlet for venting valve 155 81 165 57 155 66 155 65 155 80 183 89 165 55 155 90 155 78 165 07 156 05 156 06 200 59 475 200 59 643 200 59 665 200 59 658 200 59 736 upon request upon request GA 10 204 3 02 08 96 2 Operation 2 1 Installation of UL 500 When moving the UL 500 pull or push it only at its hou sing and not at the display When lifting the UL 500 with a crane special preparati ons are required See Section 1 1 2 Moreover it is recommended to use a transport frame so that the lifting forces are applied perpendiculary to the work panel of the UL 500 and the profiles of the UL 500 are subjected only to pulling forces Caution AN The exclusive use of standard crane eyes will result in damage to the display unit The additional strengthening mea sures using the clamping pieces and screws must be introduced to prevent damage to the instrument 2 1 1 Layout of Controls and Displays Note Fig 7 shows a list of the operating elements on the ope rating unit Fig 8 shows a list of the display elements on the
16. a PVC bag filled with a known helium concentration 16 4 If possible the connecting flange 16 6 should not be surrounded by the hood since helium might diffuse through the connec ting gasket and cause a background The test time should be kept as short as possible for inte gral leak detection If it is too long the test object may become contaminated see Fig 16 Note In the case of very large leaks for example by sudden damage to the test sample there is a risc of helium con tamination of the foreline pumps leading to an erratic background signal thus preventing sensitive measure ments In such a case the following error message is dis played BACKGROUND TOO HIGH OPEN GASBALLAST Measures Set LIMIT LOW to a higher value so that the backgro und is no longer displayed provided only large leaks are of interest Open the gas ballast on both pumps so that helium free air may enter Electromagnetically actuated gas ballast valves are availble as accessories for this They can be actuated through OPT 05 If option 05 has not been implemented it is possible to manually open the gas ballast on the pump 18 5 and HELIUM LEAK DETECTOR Fig 16 Integral leak detection Key to Fig 16 1 UL 500 4 2 Test object 3 Hood 4 Helium 5 Leak of test object 6 Connecting flange 32 GA 10 204 3 02 08 96 18 6 Take care that the ambient air is not contamina ted with helium 2 5 2 SNIF
17. also CAL key in Section 2 2 7 The external calibration process is prepared by connec tion of an external calibrated leak to the system or the test samples Starting the process Press START and after pumpdown wait for the DETECTING message Press CAL key 7 16 Press EXEC key 7 3 The running process may be terminated by pressing the CLR key 7 4 After starting messages appear on the alphanumeric display line 8 17 informing the operator of the sequen ce and requesting him to perform further operations CAL EXT EXEC CLR Press EXEC key 7 3 EXT TLK x xE xx Enter leak rate of the calibrated leak Press EXEC key 7 3 OPEN TESTLEAK EXEC Open calibrated leak acknowledge by pressing EXEC SIGNAL STABLE EXEC Wait until the signal is stable then press EXEC key 7 3 CLOSE TESTLEAK EXEC Close calibrated leak then press EXEC key SIGNAL STABLE EXEC Wait until the signal is stable then press EXEC key 7 3 The UL 500 automatically determines the calibration fac tor for the leak rate measurement followed by the mes sage CALIBRATION FINISHED The instrument is now ready for further measurements The CLR key can be used to erase this message Note In order to determine the calibration factor a minimum difference in the leak rate signal is required between opened and closed calibrated leak If this diff
18. dis play unit An overview of the controls on the top and front of the UL 500 is given in Fig 5 The mains socket 5 6 for the QUICK TEST always carries 220V a c Caution A In addition to the above controls see Fig 5 at the top and front of the UL 500 the headset connection 6 2 the loudspeaker 6 3 the loudspeaker volume control 6 1 the recorder connection socket 6 5 and the V 24 RS 232 C interface connection socket 6 6 Key to Fig 5 1 ON OFF power switch 2 START STOP key 3 Operating unit 4 Display unit 5 Connection flange for test objects 6 Mains socket for QUICKTEST Caution The mains socket for the QUICK TEST always carries 220V a c Fig 5 Controls of UL 500 GA 10 204 3 02 08 96 11 Fig 6 Back of display unit Key to Fig 6 1 Volume control 2 Headset connection 3 Loudspeaker 4 Display unit 5 Connection socket for a recorder 6 Connection socket for V 24 RS 232 C interface and trigger relay options Key to Fig 7 1 HELP Not used during normal operation 2 OPT Start of an optional input start or optional operating mode Input of optional parameters 3 EXEC Termination of an input and execution of the relevant command Acknowledgement of a message by the operator 4 CLR Cancellation of the last function entered 5 EXP Setting the cursor to enter numbers in the exponent panels 6 Changing the sign
19. ii T t T i T h h h h ah a 380 V 50 Hz 12345 6 78 91061 I T T T T T T h M h h at a 100 V 60 Hz Japan it Pee igs i it PA Sne i j 200 V 60 Hz Japan ye ea ae eee A i i ik ir I l i i l Al 208 V 60 Hz USA 9 10 11 i l ii al th jh it tah I Ley 220 V 60 Hz Pert en E k H ai Taiwaniapan Fig 10 Jumpers on the terminal strip for adaptation to different mains voltages GA 10 204 3 02 08 96 15 The mains voltage is adapted on terminal strip 9 2 at the rear of the UL 500 above the inlet for the power sup ply cord 9 5 and behind a transparent plastic plate 9 4 The factory set mains voltage is shown on the infor mation label 9 9 mounted there Caution A 2 2 Description of Controls Note Fig 7 shows a list of the operating elements on the ope rating unit Fig 8 shows a list of the display elements on the dis play unit The equipment voltage printed on the information label must correspond to the available mains voltage The UL 500 is designed for maximum simplicity and cla rity of operation Hence most of the control operations that can be executed via the keys are supported by dis plays Apart from the information in the following des criptions of the individual key functions the meanings of the displays are explained in Section 2 3 Also refer to the list of operating elements see Fig 7 the list of display elements see Fig 8 2 2
20. mass spectrometer Key to Fig 3 Cathode 1 Anode Cathode 2 Amplifier lon collector Shield for ion collector Suppressor Magnetic field Intermediate screen 10 Extractor screen 11 Shield ring OANOOARWND GA 10 204 3 02 08 96 Anode voltage Suppressor voltage Malfunctions in the mass spectrometer are detected and communicated to the control unit The latter monitors the mass spectrometer supply unit 1 3 6 3 Turbomolecular Pump Supply Unit This unit controls and monitors the turbomolecular pump It is in turn monitored by the control unit which thus controls the pump 1 3 6 4 Power Distribution Unit All circuits needed for operating and monitoring the rotary vane pumps and valves are contained in the power distribution unit This unit is in turn controlled by the control unit 1 3 6 5 Power Conversion Unit This unit generates from the AC supplied via the mains transformer all the DC supply voltages needed for ope rating the electronics units 1 3 6 6 Control Unit The control unit is the central component of the leak detector s electronics system It controls and monitors all other modules Its microprocessor is thus constantly informed of the status of the entire leak detector and can act accordingly The control unit is linked to the operation and display unit so as to receive operator commands and to output measured values and messages 1 3 6 7 Keypad and Display Unit This unit serve
21. mbar s Atm cc sec US unit Pa m s 1 Note The measurement units displayed can only be changed in a special operating mode of the instrument PARA MODE Refer to Annex 1 Two limit displays to indicate the low and high range limits Display capabilities for status 2 10 19 mbar l s 1 0 1 mbar l s 1 Light spots for display status 1 102 mbar l s 1 0 5 mbar I s71 MAX ACT storage of max value 5 10 mbar l s 400 mbar l s 1 FAST SLOW smoothing of measured value BACKGRND suppression of zero lt l Time CTL Toad Ae display SN Light spots for leak detection status Detectable masses 2 3 4 amu PREC sensitivity Pumpdown times until ready for leak detection See ae Paste ae without additional volume 6s ce with test object volume 1 6s oe caine with test object volume 50 150 s Key to Fig 1 1 Keypad 2 2 Display unit 3 Work panel 4 Valve block 5 Compressed air supply 1 3 6 Forepump 7 Auxiliary pump Bie 8 Mains transformer 9 High vacuum plug in a 4 10 Electronics plug in ia 10 Al z 9 AH pa KI 7 7 Fig 1 Modules GA 10 204 3 02 08 96 5 max 58 dBA 110 5 x 62 7 x 77 5 cm Noise when running Dimensions H x W x D Weight with auxiliary pump TRIVAC D 25 B 205 kg Cat No 155 85 1 2 2 Electrical Data Mains voltage convertible 100 V 110 V 127V 5 200 V 208 V 220 V 240 V 380 V 5 Mains frequency 50 60 Hz Nominal power Py 2 2 kW Max turn
22. passes through the leak in the case of 100 helium in front of the leak and a pressure differential of 1 bar vs 0 bar If the test sample is not filled with 100 helium but with X helium the following correction has to be made Qoorr Qmeas x 100 With Q it is then possible to carry out the following correction for higher pressures in the test sample In the following Qcorr is abbreviated by Q the standard leak rate to be determined 100 He 1 bar gt 0 bar is ter med Q The calculation given below permits conversion of the measured leak rate at the true pressure differential into the leak rate at 1 bar helium pressure in front of the leak and 0 bar pressure behind it This leak rate is termed Q In the laminar flow region the leak rate is a square function of the pressure differential Q P gt P3 Qg P42 P32 1 Q measured leak rate P absolute pressure in test object P atmospheric pressure 1 bar Q leak rate at 1 bar helium vs 0 bar Rearranging Eq 1 results in Qkorr Q __ _ 2 0 P2 P32 and with p 1 bar Qkorr Q 3 0 p2 1 P in bar 2 5 3 INSPECT Mode The INSPECT mode can be selected in both the VAC and SNIFF modes In the INSPECT mode the operator of the UL 500 is able to locate leaks as soon as the STANDBY message appears In this mode the analog display permits precise loca lization of the leak the digital leak rate display
23. related drifting 5 C after prolonged peri ods of operation CAT 2 The ion source of the UL 500 is equipped with two catho des As soon as the cathode 1 normally used malfunc tions automatic switchover to cathode 2 occurs The red CAT 2 warning display 8 8 informs the opera tor that switchover has taken place because failure of cathode 2 would then result in the failure of the entire unit GA 10 204 3 02 08 96 2 3 5 Alphanumeric Display Any desired text can be shown in the alphanumeric dis play line 8 17 to support the operator in using the UL 500 The following can be displayed Specific measured values e g inlet or foreline pressu re Notes in the event of operator errors or illegal entries The notes appear on the alphanumeric display for approx 2 s thereafter the normal display returns Requests for certain activities to be executed Error messages in the event of malfunctions see Sec tion 2 9 The error messages remain in the display until they are cleared by pressing the EXEC key 7 3 2 3 6 Acoustic Signal The acoustic signal is used to indicate the leak rate Its frequency is a measure of the leak rate value The entire measuring range shown on the analog display is repre sented by a frequency range of approximately 60 Hz to 4 kHz The volume can be varied via a volume control 6 1 GA 10 204 3 02 08 96 29 2 4 Startup First Pumpdown Cycle Step Activity Resp
24. the same selftest of the processors is per formed as for normal operation PERFORMING SELFTEST If this test is performed without errors the UL 500 is set to the PARA mode All programmed parameters can be displayed and changed for entering any changes num bers can be entered at the flashing positions or the parameter selections selected by the pushbuttons ARROW RIGHT and ARROW LEFT Every selec tion has to be acknowledged by EXEC Any already programmed parameters can be called up again by CLR 42 TMP 600 RPS The programmed nominal speed of the turbomolecular pump is indicated A value between 600 and 720 If the value is to be changed after exchanging the TMP the number given on the name plate of the pump has to be entered This name plate is accessible behind the right hand front panel Complete the entry with EXEC The following is dis played TESTLK 5 0E 07 ML S Enter the correct value of the calibrated leak e g 6 5E 07 ML S This value can be read off the cali brated leak after removing the rear cover of the work panel Two leak rates are given on the calibrated leak these being the calibrated leak rate and the effective corrected leak rate due to the mounting situation The corrected value has to be entered Permitted range 1 107 to 9 9 10 7 Complete the entry with EXEC The following is dis played MASS 4u Enter the correct mass number 2 3 or
25. will occur NO TUNE IN DETECT Note The fine aligment for maximum is performed tuning each calibration process with the exception of the first CAL after switching on see also AUTOTUNE in Section 2 8 1 ZERO EXEC CLR This function performs the determination of the in ternal helium background in all measurement ran ges Thus ZERO expands the background resp Zero determination in the FINE and PREC ran ges each time the STOP cycle is run through The thus expanded values are taken into account during all further measurements for checking the leak rate This can only be done starting from the STANDBY mode Otherwise the following error message will be displayed NO ZERO IN DETECT Note The background is determined each time the cali bration process is run CAL EMV EXEC CLR Determines the ratio between the output voltages of the high impedance amplifier for the 5 GQ and 50 GQ range as well as between the 50 GQ and the 500 GQ range By calculation of these factors it is possible to com pensate resistance and thus gain errors between the measurement ranges during all further leak rate measurements The once determined values remain stored even in the case mains failure To perform the alignment a variable calibrated leak range 1 105 mbar l s must be connected to the inlet for example TL 4 6 Cat No 155 80 The UL 500 must be set to operate in the DETECT mode by pressing START Otherwise the following e
26. without any appreciable reduction of sensitivity 1 3 2 Double Entry Turbomolecular Pump The double entry turbomolecular pump of the UL 500 combines in a single housing two turbomolecular pumps driven by a common motor The two turbomolecular pumps pump in opposite direc tions into a common forepressure connection One side of the turbomolecular pump compression side produces from the helium pressure in the foreline the helium pressure that is detected in the mass spec trometer The pump s stable compression capacity for helium is exploited for this purpose This capacity together with the pumping capacity of the forepump determines the sensitivity of the system The other side of the turbo pump pump side serves as a high vacuum pump to evacuate the inlet resp the test object The double entry turbomolecular pump is a special pump for the UL 500 its designation is TURBOVAC 150 1 3 3 Forepump The forepump produces a proportional helium pressure from the helium flow entering the UL 500 The stable heli um pumping capacity of the pump is exploited for this purpose This capacity together with the compression of one stage of the turbomolecular pump determines the sensitivity of the system A TRIVAC D 4 B rotary vane vacuum pump is integrated in the UL 500 as forepump All data of the forepump are contained in the Operating Instructions GA 01 201 GA 10 204 3 02 08 96 1 3 4 Auxiliary Pump The integrated aux
27. 17 if no special function of the display has been selected by pressing the OPT key 7 2 Note If the UL 500 is already in the STANDBY mode pressing the STOP key again will let the UL 500 determine the background 2 2 5 2 VENT Function The VENT function is achieved only if the STOP VENT key 7 14 is held down for more than 1 1 s After this period the inlet vent valve VF1 2 15 is opened The VENT indicator 8 9 lights up to report this operating mode The valve VF1 can be closed again by Briefly pressing the STOP VENT key again The UL 500 then enters the STANDBY mode Pressing the START RESET MAX key The UL 500 then enters the DETECT mode 2 2 6 ZERO Key ZERO A constant leak rate display can be suppres sed by means of the ZERO function such as for example a constant helium background of a test sam ple The Zero function is only active in the DETECT mode i e itis not possible to suppress internal backgrounds of the UL 500 itself This is done by pressing the STOP key See Section 2 2 5 1 Pressing the ZERO key 7 13 initiates storage of the current leak rate as Zero without changing the internal Zero Only values above this Zero are displayed resulting in enhanced resolution of the displayed measurement sig nal If measured values occur that are below the stored zero point an automatically floating zero adaptation initiates storage of t
28. 4 u Complete the entry with EXEC The following is dis played PH D25B Select the type of built in auxiliary pump with ARROW RIGHT or ARROW LEFT D16B D25B D40B D65B Complete the entry with EXEC The following is dis played LEAKRATE UNIT MLS Select the desired leak rate unit with ARROW RIGHT or ARROW LEFT MLS mbar I s ACS Atm cc s PMS Pa m s Complete the entry with EXEC The following is dis played DATE dd mm yy Enter the current date Day Month Year This is only requested provided the clock module has been built in Complete the entry with EXEC The following is dis played TIME hh mm ss Enter the current time Hour Minute Second This is only requested provided the clock module has been built in Complete the entry with EXEC This completes the entry process and the instrument will automatically start running up the pumps thereby retur ning to normal operation GA 10 204 3 02 08 96 ANNEX 2 Operation of the UL 500 on mass 2 and 3 Hydrogen For special applications the UL 500 may be switched from operation on mass 4 helium to operation on mass 2 or mass 3 see Annex 1 PARA MODE Mass 2 represents the molecular hydrogen ion H and mass 3 the H ion which is produced by addition of the molecular H ion from H O Depending on the number of operating hours of the unit a r
29. 7 1 3 5 1 lon Source a ais n in a a a E 8 1 3 5 2 Separation System 0 8 1 3 5 3 lon Collector 000 8 1 3 6 Electronics Modules 8 1 3 6 1 Electrometer Amplifier 8 1 3 6 2 Mass Spectrometer Supply Unit 8 1 3 6 3 Turbomolecular Pump Supply Unit 9 1 3 6 4 Power Distribution Unit 9 1 3 6 5 Power Conversion Unit 9 1 3 6 6 Control Unit vis orarin aE eee 9 1 3 6 7 Keypad and Display Unit 9 1 4 Equipment 0 00006 10 1 4 1 Standard Specification 10 1 4 2 Accessories 000 10 2 Operation 05 11 2 1 Installation of UL 500 11 2 1 1 Layout of Controls and Displays 11 2 1 2 Preparations for Initial Startup 15 2 1 2 1 Electrical Connections 15 2 2 Description of Controls 16 2 2 1 Power Switch 220 16 2 2 2 SNIFF VAC Key 0 16 2 2 2 2 1 2 2 2 2 2 2 3 2 2 3 1 2 2 3 2 2 2 4 2 2 4 1 2 2 4 2 2 2 5 2 2 5 1 2 2 5 2 2 2 6 2 2 7 2 2 8 2 2 9 2 2 10 2 2 10 1 2 2 10 2 2 2 11 2 2 12 2 2 13 2 2 14 2 2 15 2 2 16 2 2 17 2 2 18 2 2 18 1 2 2 18 2 2 2 18 3 2 2 19 2 2 20 2 2 21 Page Vacuum Mode 00000 eee 16 SNIFF Mode 2 00 00000 16 INSP MEAS Key 17 INSPECT Mode
30. F MEAS RATE MAX and FAST The calibration factor is calculated on the UL 500 by the calibration function in the SNIFF mode MEAS Determination of the actual leak of a test object The test object must be scanned with the same sniffing speed and the same sniffing distance as was used for the calibration procedure With calibration completed the actual leak rate is then displayed on the UL 500 Note If the test object is not filled with 100 helium the actual leak rate obtained on the test object Q gak must be cor GA 10 204 3 02 08 96 rected using a helium concentration factor in order to obtain the true leak rate 2 5 2 2 Integral Leak Detection in the SNIFF Mode For integral leak detection in the SNIFF mode the heli um filled test object is placed in a sealed hood If there are one or more leaks helium gradually flows into the hood where it enriches slowly To measure the rise in the helium concentration in the hood the sniffer tip is intro duced into the hood at the end of the waiting period After appropriate concentration calibration see Section 2 7 for example with air helium the UL 500 directly dis plays the helium concentration Preparations for determining the actual leak rate Press the following keys on the UL 500 SNIFF MEAS CONC ACT and SLOW To determine the actual leak rate Q gax the air helium concentration Q is first
31. F Mode In this basic operating mode leak detection on a test object filled with helium at overpressure is possible For this purpose a standard or QUICKTEST sniffer is connected to the inlet of the UL 500 If there is a leak in the helium filled test object helium is forced out by the overpressure and can be sucked in by the UL 500 via the sniffer Helium thus reaches the mass spectrometer where the gas molecules are ionized and detected In the SNIFF mode quantitative determination of the leak rate is also possible The main difference between the SNIFF and VAC modes are the calibration possibilities of the former 2 5 2 1 Local Leak Detection in the SNIFF Mode For local leak detection in the SNIFF mode a test object filled with helium is scanned locally with the sniffer probe to find any leaks The actual leak rate of the test object can only be dis played after calibration under defined sniffing conditions The calibration factor for the UL 500 can be determined through the CAL function in the SNIFF MEAS mode To do this press the following keys SNIFF MEAS RATE FAST See Section 2 7 for details on this calibration The calibration only applies for the position of the sniffer tip used for the calibration Correction of leak rate to standard leak rates 100 He 1 bar to 0 bar see Sec tion 2 5 2 3 Preparations for determining the acatual leak rate Press the following keys SNIF
32. ILABLE The following optional functions are available in software version 1 7 01 Display P1 ON OFF Switches on the continuous display of pressure P1 inlet pressure in the alphanumeric display line This display is switched off by reselecting OPT 01 DISPLAY P1 OFF Display of P1 causes display of P2 to be switched off 02 Display P2 ON OFF Switches on the continuous display of pressure P2 foreline pressure in the alphanumeric display line This display is switched off by reselecting OPT 02 Display of P2 causes display of P1 to be switched off 03 DISPLAY DATE Switches the alphanumeric display briefly approx 1s to display the current date The display indicates DATE dd mm yy d day m month y year Note This is only displayed provided the clock module has been built into the control pcb Otherwise the follo wing message is displayed NOT AVAILABLE 04 DISPLAY TIME Switches the alphanumeric display briefly 1s to display the current time The display indicates TIME hh mm ss h hour m minute s second Note This is only displayed provided the clock module has been built into the control pcb Otherwise the follo wing message is displayed NOT AVAILABLE 05 GASBALLAST OP CLO Opens and closes the optional electromagnetically actuated gas ballast valves of the pumps PH and PV When the valves are open this is continuously indi cated on the alphanumeric display GASBALLAST
33. INSPECT MEASURE Clear the command SNIFF VACUUM Clear the command PRECISION Clear the command CALIBRATE Clear the command LIMIT LOW Clear the command LIMIT HIGH Clear the command OPTION Clearing the display in case of a momentary error Clearing the entry of the last entered programmed parameter Termination of CAL Termination of OPT AUTOTUNE Termination of OPT ZERO Termination of OPT CALEMV 2 2 18 LIMIT LOW LIMIT HIGH Keys With the aid of the LIMIT LOW On m 7 22 and LIMIT HIGH 7 21 keys it is possible to enter a lower or higher limit for the measuring range LIMIT LOW affects only the possible measuring range of the UL 500 while LIMIT HIGH also changes the repre sentation on the analog circular display The LIMIT HIGH function depends on LIMIT LOW LIMIT HIGH can only be operated if LIMIT LOW has already 20 been activated Pressing one of the keys causes the corresponding digi tal display 8 14 or 8 16 to light up The last limit value entered in the UL 500 appears with its first digit flashing The following keys can be employed to change the numeric value Numeric keypad Changing the flashing digit by writing over it Point Shifting the flashing input position to the decimal point Exponent Shifting the flashing input position to the tens position of the exponent This position can only be occupied with 0 or 1 An
34. IT Error within the internal V 24 connection ER1 DSR INACTIV Error within the internal V 24 connection 49H 50H 51H 52H 53H 54H 55H 56H 57H 5AH 60H 61H 62H 91H 92H 93H 95H 96H 97H 98H GA 10 204 3 02 08 96 ER1 TIME OUT ECHO O Error within the internal V 24 connection ER1 ACIA OVERRUN Error within the internal V 24 connection ER1 DSR AKTIV Error within the internal V 24 connection ER1 PARITY ERROR Error within the internal V 24 connection ER1 DATA LOST Error within the internal V 24 connection GA 10 204 3 02 08 96 9AH 9BH 9CH 9EH 9FH 49 lN A1 TA LEYBOLD Declaration of Contamination of Vacuum Equipment and Components The repair and or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to accept any equipment without a declara tion This declaration can only be completed and signed by authorized and qualified staff 1 Description of Vacuum Equipment and Com ponents Equipment type model Code No Serial No Invoice No Delivery date 2 Reason for Return 3 Condition of the Vacuum Equipment and Com ponents Has the equipment been used yes O no O What type of pump oi
35. O selectable not selectable nor selectable selectable CAL VAC SNIFF CAL SNIFF INSP MEAS INSP RATE CONC RATE CONC 25 PREC MAX ACT ACT PREC MAX RESET MAX RESET MAX CLR OPT LIMIT LOW HELP LIMIT HIGH EXEC GA 10 204 3 02 08 96 31 HELIUM LEAK DETECTOR Fig 15 Local leak detection Key to Fig 15 1 UL 500 2 Test object 3 Shield 4 Spray gun 5 Helium 6 Leak 7 Helium reservoir 8 Connecting flange A calibration may be performed with an external calibra ted leak by pressing the CAL key even in the case of high partial flow ratios Section 2 7 1 2 The response time is also determined with a calibrated leak To do this a calibrated leak is connected to the test object at the point furthest away from the test connec tion The leak rate indicated by the UL 500 is the leak rate of the calibrated leak The calibrated leak is closed and simultaneously the time is measured until the leak rate indicated by the UL 500 has dropped to about 37 of the original value The time thus recorded is the res ponse time During quantitative local leak detection helium has to be sprayed onto the leak at least as long as the response time Otherwise the displayed value may lie considerab ly below the actual leak rate 2 5 1 2 Integral Leak Detection in the Vacuum Mode For integral leak detection the test object 16 2 is enc losed in a hood 16 3 e g
36. OPEN The display will become erratic while the pumps give off helium thus preventing sensitive measurements Note This function can only be selected provided the opti 21 on is built in The presence of this option is automa tically sensed upon switching on of the UL 500 If the option is not built in this condition is sensed and when selecting OPT 05 the display indicates NOT AVAILABLE 06 09 OPT UNAVAILABLE 10 11 12 22 No functions assigned yet TRIGGER ON OFF Switches the functions of the optional trigger relay pcb on and off The leak rate values at which the relays are actuated are entered through the function LIMIT LOW and LIMIT HIGH Moreover the limits have to be set to active so that the relays can switch according the set thresholds Note This function can only be switched on provided the trigger relay pcb has been built in The presence of this option is sensed automatically when switching the UL 500 on If the trigger relay option is not sensed and when selecting OPT 10 the display indicates 10 NO TRIGGER LK REC LOG ON OFF Switches on the output of the leak rate at the recor der output in logarithmic form When reselecting OPT 11 the output switches off The recorder output is assigned as follows Channel 1 pin 5 of recorder socket Output of leak rate with 1 0 V to 10 V 0 5 V per decade 1 0 V corresponds to a leak rate of 1 0 10 19 mbar l s and 1 5 V corr
37. P2 10 Coupling valve VK 11 Throttle for massive leak mode 12 Auxiliary pump TRIVAC D 25 B 13 Test leak with test leak valve VT 14 Auxiliary pump valve VH 15 Venting valve for test object VF1 GA 10 204 3 02 08 96 1 3 5 1 lon Source Electrons with 80 eV energy are used in the ion source The electrons emerging from the hot cathode 3 1 are attracted by the positive anode 3 2 However they do not immediately reach the anode 3 2 but oscillate to and fro for several times until finally reaching the wire spiral of the anode 3 2 In this way the electrons ionize gas atoms through impact These ions are extracted from the ion source by an extractor screen 3 10 connected to ground and enter the magnetic separation system The anode is heated during run up to prevent polymeri zed hydrocarbon deposits insulating layers that may impair the sensitivity After run up the anode is no longer heated as the oper ating temperature of the ion source cathode heating is sufficient The cathodes 3 1 and 3 3 consist of iridium tape coa ted with thorium oxide Owing to this thorium coating the iridium filaments operate at a much lower temperature than tungsten ones and possess excellent resistance burnout resistance to embrittlement oxygen water vapour and hydrocarbons Caution Halogens or halogen containing sub stances may adversely affect the service life of the cathodes 1 3 5 2 Separation Syste
38. R2R nc contact trigger rel 1 center cont trigger rel 1 no contact trigger rel 1 no contact trigger rel 2 center cont trigger rel 2 ne contact trigger rel 2 Supply voltage for fibre optics modules Handshake output Supply voltage for fibre optics modules 2 2 24 Pin out of the Multifunction Socket The multifunction socket is only operative with built in V 24 RS 232 C option and or trigger option Details are given in the corresponding operating instructions for these options V 24 RS 232 C interface GA 10 292 Trigger relay pcb GA 10 291 The pin out of the multifunction socket is given in Fig 13 2 2 25 Headset Output See Fig 6 for the connection of a headset The louds peaker is switched off when connecting a headset The volume of the headset signal is adjusted via the volume control see Section 2 2 22 26 GA 10 204 3 02 08 96 2 3 Description of Displays Note For the following explanantions see also fig 8 The displays of the UL 500 serve on the one hand to indicate the measured values generated by the unit and on the other to provide information on the operating modes that have been set and to inform the operator as to the measurement sequence and requirements The displays are divided into three main groups Measured value displays as analog and digital dis plays Status displays General purpose alphanumeric display In addition there is available a
39. SEE OP MANUAL Refer to Operating Instructions STANDBY FOR lt INSP gt STANDBY condition in the INSPECT mode STANDBY FOR lt MEAS gt STANDBY condition in the MEASURE mode TESTLEAK lt lt Helium signal of the calibrated leak is too small Messages sent by the control processor AUTOTUNE FINISHED OPT 24 finished AUTOZERO FINISHED OPT 25 finished AUTOTUNE MASS x AUTOTUNE for mass x running x 2 3 4 BACKGROUND TOO HIGH Internal background is too high CAL TUNING MASS x During calibration x 2 3 4 CAL PERFORMING ZERO Performing Zero alignm during calibration CAL CALIBRATION Calibration process running CALIBRATION FINISHED Calibration process finished CATHODE 2 Switching to cathode 2 after detecting a faulty cathode 1 GA 10 204 3 02 08 96 CLOSE TESTLEAK EXEC For external calibration Close calibrated leak EMISSION OFF Emission switched of because of a fault NOT AVAILABLE This function has not been implemented OPEN GAS BALLAST The internal background is too high Open gas ballast to reduce it OPEN TESTLEAK EXEC For external calibration Open calibrated leak OPEN VAR LEAK E 5 MS During EMV resistance alignment Open variable leak PERFORMING AUTOZERO Zero alignment performed during run up PLEASE WAIT Wait until the internal process has been completed RUNNING UP The turbomolecular pump is running up SELFTEST WITH ERRORS Fault during initialization hardw
40. See also the function of the key STOP VENT The value of the helium signal is measured in the ranges FINE 3 and PREC and the measured values are stored as Zero references Each further measured leak rate value is corrected by the applicable offset value If negative leak rate values are produced through this correction all stored offset values are changed so that the smallest value will be Zero Thus the values are auto matically adapted to a gradually decreasing background If the helium background increases this cannot be auto matically sensed This increase is only considered after a transition from DETECT to STANDBY 2 8 3 AUTORANGE The UL 500 possesses an automatic measuring range selection which covers the entire leak rate range from 103 to 2 10 10 mbar I s Not only the leak rate signal but also the test object and mass spectrometer pressure are used for control The measuring ranges are switched over as follows Main switchover to the main ranges MASSIVE GROSS FINE and PREC by means of valve switch over MASSIVE Display limit 1 107 mbar I s 37 if p4 gt 100 mbar valve position VH open GROSS Display limit 5 10 mbar I s if p4 gt 0 1 mbar valve position V Vg open FINE Display limit 1 10 mbar I s if p gt 2 10 mbar or not PREC valve position Vg V open PREC Display limit 2 10 mbar I s Valve Ve open Fine range switching within the main ranges by swit
41. UENCE In case of 3 phase mains supply two of the phases are interchanged 48 30H 31H 3CH 3DH 3EH 3FH 40H 41H 42H 43H 44H 45H 46H 47H 48H ER ROUGHING P OVERL Overload of auxiliary pump contact not energized ER TMP VENT V DEF Venting valve VF2 for turbomolecular pump and rough vacuum does not switch ER TESTLEAK V DEF Calibrated leak valve VT does not switch ER COUPLING V DEF Coupling valve VK does not switch ER BYPASS V DEF Bypass valve VB does not switch ER INLET V DEF Inlet valve VE does not switch ER ROUGHING V DEF Auxiliary pump valve VH does not switch ER VENTING V DEF Venting valve VF1 does not switch ER GASBALLAST V DEF Gas ballast valves VG1 VG2 do not switch only with built in option ER COMPRESSOR P lt lt Pressure in the compressor vessel is too low ER1 STATUS CRC ERROR Error during check of status byte ER1 INVALID STATE Invalid equipment status ER1 INVALID STRING Invalid data or commands on the internal V 24 interface ER1 VERSION CONFLICT Software conflict between the two processors ER1 CHECK ERROR E O Error within the internal V 24 connection ER1 CHECK ERROR ID Error within the internal V 24 connection ER1 TIME OUT IDENT Error within the internal V 24 connection Connection not acknowledged by the other end ER1 TIME OUT INIT Error within the internal V 24 connection ER1 DSR INACTIV IN
42. UL 500 1 1 4 Modules The UL 500 comprises three main assemblies see Fig 1 Operating level keypad 1 1 display unit 1 2 work panel 1 3 Measurement and control level valve block 1 4 compressed air supply 1 5 high vacuum plug in 1 9 electronics plug in 1 10 GA 10 204 3 02 08 96 Pump level backing pump 1 6 auxiliary pump 1 7 mains transformer 1 8 peripheral connections 1 2 Technical Data Safety The instrument meets the specifications of protection class 1 according to VDE 0411 IEC 348 1 2 1 Physical Data Max measurable helium leak rate Max indicatable helium leak rate qualitative measurement 10 mbar l s 10 mbar l s Min measurable leak rate 2 10 10 mbar l s with time constant lt 1s Max inlet pressure for quantitative measurement for qualitative measurement 100 mbar 1000 mbar Max total gas flow at inlet with limit of detection Response times up to test object volumes of 10 lt 1s up to test object volumes of 50 lt 5s permissible temperature range 10 to 40 C Display capabilities for leak rate Quasi analog display for leak rate 360 circular indicator with logarithmic scale 1 decade per revolution 45 segments correspond to 5 resolution of indicated value Bar scale for leak rate exponent exponent display from 10 to 3 2 digits 2 digit exponent sign Digital display for leak rate Units displayed ppm
43. are test SENSITIVITY CHECK Sensitivity check during run up SIGNAL IN RANGE During EMV resistance alignment The set leak rate is correct SIGNAL STABLE EXEC During external calibration The operator has to decide whether or not the value is stable after having made changes to the calibrated leak SIGNAL TOO HIGH During EMV resistance alignment The leak rate set on the variable leak has been set too high SIGNAL TOO LOW During EMV resistance alignment The leak rate set on the variable leak has been set too high SNIFF AIR EXEC During external calibration Place the sniffer tip in air SNIFF CONC EXEC During external calibration Place the sniffer tip in the concentration SNIFF TESTLEAK EXEC During external calibration Place the sniffer tip in the calibrated leak 45 STOP PUMP OVERLOAD The leak detector has been in the MASSIVE range for over 10 min and has then switched to STANDBY STOP TM DEFECT TM P1 or P 2 is defective TOTAL FAIL The unit was switched off because of a failure TUNIG MASS x During TUNE OPT 24 while running x 2 3 4 46 ANNEX 4 Error messages The UL 500 is provided with comprehensive selftest rou tines If a fault condition is detected by the control pro cessor a corresponding error message is displayed as far as this is still possible The error message is displayed as clear text on the al phanumerical display 1 2 and as code on the seven segment displ
44. ation fac tor for the leak rate measurement followed by CALIBRATION FINISHED The instrument is now ready for further measurements The CLR key can be used to erase this message Note In order to determine the calibration factor a minimum difference in the signal between cal leak and air is requi red If too small the following error message occurs ER CAL DIFFERENCE lt lt In such a case select PREC and repeat the calibration GA 10 204 3 02 08 96 2 8 Automatic Functions The UL 500 has three automatically executed functions which ensure that the displayed measured values are correct 2 8 1 AUTOTUNE This function automatically aligns the mass spectrometer to the maximum leak rate display For this purpose the UL 500 uses the internal helium filled calibrated leak The control processor varies the accelerating voltage of the ions in the selected mass range until a maximum ion current is registered on the ion collector This is done in two steps Coarse and fine alignment see OPT 24 A fine alignment is performed automatically before each calibration 2 8 2 AUTOZERO This function is employed to define the unit s internal Zero for the leak rate signal in order to prevent the dis play of the internal helium background and offset volt ages as measured values This function is carried out automatically each time the UL 500 is switched from DETECT to STANDBY by pres sing the STOP key
45. aximum is found within the normal range Maximum at the range limit ER SIGNAL NOT STABLE In TUNE mode no stable signal is measured ER TUNE DIFFERENCE In the TUNE mode the minimum maximum voltage difference in the normal range is too small for reliable peak detection ER CAL DIFFERENCE lt lt In the CAL mode the voltage difference maximum minimum is too small ER MSP SUP NOM gt gt Error message from MV if the set value is too high in the suppressor control loop ER MSP ANOD NOM gt gt Error message from MV if the set value is too high in the anode potential control loop ER I CAT HEATER gt gt Error message from MV if the cathode current is too high ER I CAT HEATER lt lt Error message from MV if the cathode current is too low ER FUSE ANO HEAT DEF Fuse of the anode heating circuit has blown on MV ER MSV 24V lt lt Error message from MV when the supply voltage is too low ER NO EMISSION Error message from MV when the emission current fails ER COMPRESSOR I gt gt Current of compressor motor is too high ER COMPRESSOR I lt lt Current of the compressor motor is too low is only measured if the signalling pressure switch indicates that the pressure in the vessel has dropped below 1 5 bar ER ROUGHING P I gt gt Current of auxiliary pump motor too high ER ROUGHING P l lt lt Current of the auxiliary pump motor too low and the auxiliary pump relay is active 1CH 1DH
46. ay on the front panel of the control proces sor assembly 19 3 Listed in the following are all possible error messages together with a brief explanation as to the cause of the fault More details are given in the Service manual SA 10 204 Important When reading B and 6 on the seven segment display reading errors can easily be made The letter B is display ed as lower case b the number 6 is displayed with an additional cross bar Note B 6 6 The seven sgment display is not reset automatically but has to be reset via the pushbutton on the front panel of the STE control assembly 8 2 Alphanum Seven segment display display ER TEMPERATURE gt 55 C 01H Temperature at the cal leak is higher 55 C ER TEMPERATURE lt 10 C 02H Temperature at the calibrated leak is lower than permissible ER RUNNING UP gt 6 min 03H Run up time after switching on the backing pump is too long ER P1 U lt lt 04H Bridge voltage of the P1 gauge head is too low ER P1 U gt gt 05H Bridge voltage of the P1 gauge head is too high ER P2 U lt lt 06H Bridge voltage of the P2 gauge head is too low ER P2 U gt gt 07H Bridge voltage of the P2 gauge head is too high ER l 120V I gt gt 08H Supply voltage VN4 is too high ER I 120V l lt lt 09H Supply voltage VN4 is too low GA 10 204 3 02 08 96 ER MSP ANOD CAT U gt gt Difference between anode potential and cathode potential is t
47. checked The left panel shows the value of the low limit and the right panel that of the high limit The representation of the panels corresponds to that of the digital display of measured values 8 3 A two digit mantissa of the measured value and a two digit exponent with sign are displayed The relationship to the analog display is explained in Section 2 3 1 2 3 4 Status Displays The status displays which are of different colors are used to indicate visually the functions that have been set Yellow displays Orange displays Display statuses Equipment statuses related to the vacuum system Red displays Warnings 2 3 4 1 Description of Status Displays FAST SLOW The FAST display 8 7 lights up when the measured value display is set to react rapidly The SLOW display 8 7 lights up when the measured value display is set for greater damping MAX ACT The MAX display 8 6 lights up as a checkback signal when the function Retain the last maximum has been set The ACT display 8 6 lights up as a checkback signal when the function Display the currently measured value has been set BACKGRND This display 8 12 lights up red when the measured value is not the absolute leak rate but when a helium background was suppressed by operating the ZERO key Section 2 2 6 SNIFF VAC 28 The SNIFF and VAC displays 8 10 respond as follows to a change in the operating mode The display indica
48. ching of the resistors within the amplifier Note If there is a lot of gas and thus a high pressure p at the inlet flange it may be impossible to switch to a higher sensitivity despite of a low helium signal This can occur for the transition MASSIVE 1 to GROSS 1 when p exceeds 100 mbar for the transition GROSS 2 to FINE 1 when p exceeds 0 1 mbar and for the transition FINE 3 to PREC when p exceeds 2 10 mbar The AUTORANGE process can be limited by setting of LIMIT LOW and LIMIT HIGH This permits manual ran ging by the user See Section 2 2 18 3 Fig 18 Oil level glasses of the auxiliary pump and forepump Key to Fig 18 1 Guide pins for bottom front panel 2 Top front panel 3 Oil level glass of auxiliary pump 4 Oil level glass of forepump 5 Gas ballast switch of forepump in zero position 6 Gas ballast switch of auxiliary pump in zero position 7 Bottom support cam 38 GA 10 204 3 02 08 96 3 Maintenance 3 1 Checking the Oil Level and Gas Ballast Switch of the Auxiliary Pump or Forepump Swing down the top front panel 18 4 into a horizontal position Raise the bottom front panel vertically until it can be pul led forward at its bottom edge and lifted off the two sup port cams 18 7 Then pull it forward and down out of two guide pins 18 1 mounted on the center cross strut The auxiliary pump and the forepump are now freely accessible The oil level must be visible betw
49. ction Note If the UL 500 is connected to a vacuum system external calibration must be performed with a calibrated leak mounted at the furthest point of the vacuum system 2 7 1 1 Calibration with Internal Calibrated Leak For leak testing of components a calibration with the inte grated helium test leak is normally initiated by pressing the CAL key see Section 2 2 7 It can only be perfor med in the STANDBY status Then the UL 500 automati cally controls the subsequent operations These are Measurement of Zero Measurement of actual value opening and closing of the calibrated leak Calculation of calibration factor Initiation of internal calibration Press STOP key Press CAL key Press EXEC key Termination of internal calibration Press CLR key 2 7 1 2 Calibration with External Calibrated Leak In order to take proper account of the influence of the test object s pressure and possible pressure conditions in partial flow operation calibration with an external cali brated leak is required The use of calibrated leaks is permissible which produce a reading between 8 10 9 and 9 9 10 4 Note If the volume flow rate of the vacuum system is high the real leak rates of the calibrated leaks must be consider ably higher in order to produce a useful reading GA 10 204 3 02 08 96 For an external calibration it is important that the UL 500 is in the DETECT mode see
50. damaged part has to be replaced please get in touch with the orders department 1 1 2 Transport at the Customer s Site For transport of the instrument pull or push it only at the housing and not at the display unit Special preparations are required for transportation of the UL 500 with a crane The set of crane eyes Ref No Nr 200 59 475 contains an extended crane eye to prevent damage to the display unit through the steel wire Further parts are included for stiffening of the frame Clamping pieces to prevent the dislodging of the crane eyes from the aluminium profile Screws to stiffen the bottom plate From serial No 018700090 and higher the use of these screws it is not required Moreover it is recommended to use a transport frame so that the lifting forces are applied perpendiculary to the work panel of the UL 500 and the profiles of the UL 500 are subjected only to pulling forces The exclusive use of standard crane eyes will result in damage to the display unit The additional strengthening mea sures using the clamping pieces and screws must be introduced to prevent damage to the instrument Caution 1 1 3 Purpose The ULTRATEST UL 500 helium leak detector is a heli um leak indicator based on the mass spectrometric prin ciple of detection It permits leak tests to be carried out on test objects of virtually all sizes and up to the largest volumes All equipment needed for leak detection is supplied with the
51. e external calibration Pressing the CAL key 7 16 in the STANDBY mode Internal calibration If an external calibration is to be performed the calibra ted leak has to be connected to the inlet flange before hand After pressing the CAL key it is still possible to switch over between internal and external calibration by pres sing START 7 15 and STOP 7 14 The sequence varies depending on the operating mode of the UL 500 also see Section 2 7 2 Note After actuating the CAL key 7 16 the initiation of calibration must additionally be acknowledged by pres sing the EXEC key 7 8 This initiation and the running process can be termina ted by pressing the CLR key 7 4 2 2 8 RATE CONC Key The RATE CONC key 7 10 is used to change the measured value presentation from RATE to CONC and vice versa It is effectual only in the SNIFF mode of the UL 500 RATE The measured value is displayed as leak rate in the unit selected 8 5 CONC The helium concentration is shown in ppm 8 4 RATE CONC GA 10 204 3 02 08 96 2 2 9 PREC Key Pressing the PREC key 7 12 influences the meas range of the UL 500 during AUTO RANGING i e with this key the release of the most sensitive measuring range is activated or deactiva ted The measuring range attainable by AUTORANGING nor mally ends at a leak rate of approx 1 109 mbar I s Afte
52. ed off by reselecting OPT 14 Output in logarithmic form Channel 1 Channel 1 pin 5 of recorder socket Output of pres sure with 1 0 V to 10 V in 0 5 V per decade 1 0 V corresponds to a pressure of 1 0 10 mbar and 1 5 V corresponds to 1 0 10 2 mbar The associated ground wire is pin 3 of the recorder socket Channel 2 Channel 2 is not used The options OPT 11 OPT 12 OPT 13 and OPT 14 switch each other over OPT UNAVAILABLE No function assigned yet DISP TMP ROTOR Displays once the current frequency of the rotor of the turbomolecular pump revolutions per second Display TM PUMP ROT xxx RPS For the measurement the turbomolecular pump is switched off briefy DISP TMP GENERAT Displays once only the current generator frequency of the turbomolecular pump revolutions per second Display TM PUMP GEN xxx RPS GA 10 204 3 02 08 96 18 19 20 21 22 23 24 The nominal rotational speed depends on the equip ment see OPT 18 DISP TMP NOMINAL Displays the nominal frequency of the turbomolecu lar pump revolutions per second which varies wi thin a certain range depending on the equipment Display TM PUMP NOM xxx RPS Also see OPT 17 Note The nominal value is also stated on the name plate of the pump DISP TESTLK TEMP Displays once only the current temperature of the integrated calibrated leak in C Display TESTLEAK TEPM xx C DISP INT TESTLK Disp
53. een shifted for the displayed measu red value CAL Indicates that the operator should perform calibration Digital display for indicating and entering the high limit of a restricted measurement interval Marks for LIMIT LOW and LIMIT HIGH on the display in the interval measurement mode Digital display for indicating and entering the low limit of a restricted measurement interval Alphanumeric display line to show messages for the opera tor and to check the input of parameters by the operator 14 GA 10 204 3 02 08 96 Key to Fig 9 Rear panel of UL 500 Terminal strip Plug in jumpers Transparent plastic plate Mains cord Exhaust D 4 B Exhaust D 25 B Connection of air supply option Label giving the set mains voltage on plastic panel 10 Label giving the electrical data 11 Plate with serial number OANDOOARWN Fig 9 Mains connection name plates and exhaust connections 2 1 2 Preparations for Initial Startup The UL 500 is delivered ready for use The integrated rotary vane pumps are filled with oil The mains connec tion has to be matched to the existing mains voltage see Section 2 1 2 1 Caution When operating the UL 500 in rooms and especially when leaktesting large volume test objects or when operating the gas ballast the exhaust connections 9 6 and 9 7 must be lead to the outsi de via suitable hoses As an alternative exhaust filters may be mounted see Section 1 4 2
54. een the two marks on the oil level glasses 18 3 and 18 4 If necessary refill the adequate oil see Operating Instructions GA 01 201 or GA 01 202 A required oil change must be carried out as to the a m operating instructions In addition both gas ballast switches 18 5 and 18 6 must be to the right in the zero position After the check remount the bottom front panel in the reverse order Note Make sure that the bottom front panel is locked home in a vertical position in the bottom support cam 18 7 3 2 Exchanging the Fluorescent Tube Behind the Display Exchanging the fluorescent tube life 1000 to 2000 oper ating hours behind the display should be left to the LEY BOLD service as the display can easily be damaged in the process The exchange must be carried out closely following the service instructions SA 10 204 3 3 Changing the Fuses on the Power Distribution LV Front Panel The fuses are located on the lefthand plug in LV assem bly behind the upper front panel see Fig 19 The fuses are assigned as follows S4 T4A Pump PV S5 T1A Compressor motor S6 T2A Ventilator S7 T1A QUICKTEST connection Plug ST 40 S8 T2A Spare Spare S10 T2A VP 2 24 V valves Key to Fig 19 1 QUICKTEST connection socket 220 V 2 Reset pushbutton for error messages 3 Seven segment error message display 4 Front panel 5 Power distribution assembly LV Fig 19 Fuses on the power distribution LV front pa
55. elatively high hydrogen background may accumulate relative to the detection limit which requires the adapta tion of some automatic sequences especially for operati on on mass 2 The differences are given in Table 1 Besides for measurements on hydrogen mass 3 can be used for the detection of 3He The UL 500 is linear also for this mass but the detection limit is somewhat redu ced because of the existing background Table 1 Difference in operation on mass 2 3 and 4 Mass 2 Mass 3 Run up no no Sensitivity test AUTOTUNE yes with background yes with background ZERO yes yes Lowest display limit VAC mbar l s 2 108 2 109 SNIFF RATE mbar l s t 2 103 2 108 SNIFF CONC ppm 2 102 2 101 CAL INT possible no no CAL EXT possible yes yes GA 10 204 3 02 08 96 Mass 4 yes with internal leak Test pos no Test neg yes with int leak yes 2 10 10 2 107 2 102 yes yes 43 ANNEX 3 Equipment messages Messages for the operator on the text display The following messages on the alphanumeric text dis play inform the user about incorrect entries during cer tain operating modes These are listed in the following together with further explanations where applicable Messages during LIMIT function INVALID KEY An invalid key was operated INVALID INTERVAL The interval selected is too small INVALID ARGUMENT A number should have been entered LIMIT LOW lt lt Value entered for limit
56. erence is too small the following error message occurs ER CAL DIFFERENCE lt lt In such a case select PREC and repeat the calibration 35 2 7 2 Calibration in the SNIFF Mode In the SNIFF mode the UL 500 can only be calibrated externally However it is possible to perform this calibra tion for concentrations ppm and leak rates mbar l s 1 For the calibration the UL 500 must be in the DETECT mode with the sniffer connected Press START key Note In order to obtain the highest possible sensitivity the UL 500 should be set to the PREC mode 2 7 2 1 Calibration with a Known Helium Concentration Range 5 ppm to 9 9 10 ppm In the simplest case the calibration is carried out with air helium 5 ppm This air must not be contaminated by helium i e helium must not have been sprayed in the vicinity If considerably higher concentrations are to be measu red later on it is advisable to produce a corresponding known helium concentration in a bag Special bags with an aluminium coating are used for this purpose Initially the bag is filled with pure inert gas e g Ar N and helium is filled in using a syringe Both the amount of inert gas and helium have to be known precisely It is only then possible to calculate the concentration Switch the UL 500 to CONC with the key RATE CONC The display is now in ppm Starting the calibration Press START key after pumpdown wait for the mes sage
57. esponds to a leak rate of 1 0 10 9 mbar l s etc The associated ground wire is pin 3 of the recorder socket Channel 2 Channel 2 is not used The options OPT 11 OPT 12 OPT 13 and OPT 14 switch each other over LK REC LIN ON OFF Switches on output of the leak rate at the recorder output in linear form The output is switched off by reselecting OPT 12 The recorder output is assigned as follows Channel 1 pin 5 of recorder socket Output of leak rate with 1 0 V to 9 9 V per decade The associated ground wire is pin 3 of the recorder socket 13 14 15 16 17 Channel 2 pin 1 of recorder socket Output of leak rate expo nent in steps of 0 5 V per decade 1 0 V corresponds to the exponent 10 1 5 V corrre sponds to 9 etc P1 REC LOG ON OFF Switches on output of pressure p inlet pressure at the recorder output The output is switched off by reselecting OPT 13 Output in logarithmic form Channel 1 pin 5 of recorder socket Output of pressure with 1 0 V to 10 V in 0 5 V per decade 1 0 V corresponds to a pressure of 1 0 10 mbar and 1 5 V corresponds to a pressure of 1 0 10 2 mbar The associated ground wire is pin 3 of the recorder socket Channel 2 Channel 2 is not used The options OPT 11 OPT 12 OPT 13 and OPT 14 switch each other over P2 REC LOG ON OFF Switches on output of pressure p foreline pressu re at the recorder output The output is switch
58. hese negative leak rates as new zero points To draw the operator s attention to the suppressed back ground the red warning indicator BACKGROUND 8 12 lights up The enhanced resolution is limited by the mea surement accuracy of the UL 500 The zero set through the ZERO function is derived from the actual measured value by Setting the meas value mantissa to 0 0 Shifting the measured value exponent by one decade Example Measured value 7 4 10 3 after pressing the ZERO key Display 0 0 10 4 Exceptions Normal AUTORANGING At leak rates under 1 0 10 8 mbar I s the exponent is not switched over any more AUTORANGING with PRECISION At leak rates under 2 0 10 mbar Is the exponent is not switched over any more 18 The ZERO function is deactivated by pressing the ZERO key again The ZERO function is automatically deactivated if the STOP VENT key 7 14 is actuated Note The Zero function acts only upon the display and not the recorder output 2 2 7 CAL Key Internal or external calibration is initiated by pressing the CAL key 7 16 The UL 500 controls all subsequent steps automatically CAL The UL 500 discerns automatically between internal cali brated leak and external calibrated leak which is connec ted to the inlet flange depending on the operating mode at the point of entering the CAL command Pressing the CAL key 7 16 in the DETECTING mod
59. iliary pump in the UL 500 evacuates a test object down to the pressure at which it can be connected to the pump side of the turbomolecular pump In addition it supports the forepump during leak detec tion in handling large gas quantities coming from the test object ATRIVAC D 25 B rotary vane pump is installed in the UL 500 as auxiliary pump For data of the auxiliary pump see the Operating Instructions GA 01 202 Instead a TRI VAC D 16 B D 40 B or D 65 B can be installed as auxi liary pump 1 3 5 Mass Spectrometer The main components of the mass spectrometer MS are an ion source a magnetic separation system and an ion collector 3 5 The ion source ionizes neutral gas particles thereby generating an ion beam Positively charged ions are accelerated out of the ion source and subsequently reach the magnetic field There they are deflected into an orbit whose radius is dependent on the mass to charge ratio of the ions Only the helium ions meet the separation conditions and reach the ion collector where they can be measured as current by the electrometer amplifier Key to Fig 2 1 Total pressure measuring point at the inlet P1 2 Test connection 3 Bypass valve of inlet valve 4 Inlet valve VE 5 Venting valve for turbomolecular pump VF2 6 Double entry turbomolecular pump 7 Mass spectrometer 8 Forepump TRIVAC D 4B Fig 2 Functional diagram of UL 500 9 Total pressure measuring point forepressure
60. input auto matically moves the input position forward to the ones position Changing the sign of the exponent Arrow left right Shifting the cursor through mantissa and exponent The following are also necessary to input the limit values EXECUTE The EXEC key terminates the input and accepts the number as the limit for measured values The CLR key 7 4 terminates the function of the limit for measured values The number in the display is cleared CLEAR 2 2 18 1 Operation with Only LIMIT LOW Activated The numeric value entered defines the minimum leak rate which can be displayed The AUTORANGE process is limited at the sensitivity associated with this leak rate Normal measurement operation of the UL 500 and the display functions remain unchanged Pressing LIMIT LOW 7 22 and CLR 7 4 one after the other deactivates a low limit that has been set The last numeric value entered remains stored and is shown again whenever LIMIT LOW is pressed 2 2 18 2 Operation with LIMIT LOW and LIMIT HIGH Activated The numeric values entered for the limits define the mini mum and maximum leak rates which will be indicated The LIMIT HIGH function 7 21 can only be called if a lower measurement limit has already been entered with LIMIT LOW 7 22 Deactivating the low limit automati cally deactivates the high limit as well Deactivating the high limit alone initiates the transfer to the LIMIT LOW
61. is deac tivated Note It is not necessary to calibrate the UL 500 For quantita tive leak detection the MEASURE mode has to be sel ected 2 5 4 MEASURE Mode In this case too leak detection is possible as soon as the STANDBY message appears The MEASURE mode can be performed in both the VAC and SNIFF modes The operator can activate the integrated CAL function of the UL 500 at any time Then leaks can be quantitatively determined between 10 mbar I s and 2 1071 mbar I s in the VAC mode in the SNIFF mode this is dependent on the sniffing parameters up to 108 mbar I s It is possible to display the maximum value on the digital display in order to read the precise leak rates during local leak detection see 2 2 10 1 and 2 2 10 2 Test object P 1 bar air Py Pure helium _ gt Q Fig 17 Pressure difference 34 GA 10 204 3 02 08 96 2 6 Shutdown To put the UL 500 out of operation set the main switch 5 1 to OFF No further action is necessary The operating mode of the UL 500 is stored in a battery backed up memory when switching off so that the same operating mode is set up automatically when switching on again see also Section 2 2 1 2 7 Calibration 2 7 1 Calibration in the Vacuum Mode In the vacuum mode VAC the UL 500 can be calibra ted with its integrated calibrated leak or with an external calibrated leak mounted directly at the test conne
62. k rate mbar I s or as the unit which can only be GA 10 204 3 02 08 96 changed in the PARA MODE The RATE CONC 7 10 key is used for the switchover 2 2 3 INSP MEAS Key INSP The INSP MEAS key 7 17 can be pressed MEAS t choose between the INSPECT mode and the MEASURE mode The major difference between them is the measurement accuracy 2 2 3 1 INSPECT Mode Starting from the MEASURE mode the INSPECT mode is activated by pressing the INSP MEAS key 7 17 and acknowledging the function with the EXEC key 7 3 The INSPECT mode gives the operator a quick overview of existing leaks and their location without a quantitative display of a precise measured value The representation is only via the quasi analog display 8 1 and 8 2 The digital display 8 3 is deactivated in this operating mode thus eliminating the possibility of switching over from Retain the last maximum MAX to Display the cur rently measured value ACT see Section 2 2 10 It is not possible to calibrate the UL 500 in the INSPECT mode see also Sections 2 2 7 and 2 7 The PRECISI ON function 7 12 cannot be selected 2 2 3 2 MEASURE Mode Starting from the INSPECT mode the MEASURE mode is activated by pressing the INSP MEAS key 7 17 and acknowledging the function with the EXEC key 7 13 The MEASURE mode is employed for quantitative deter mination of a leak The measured leak ra
63. l calibration process CAL EXTERN Running of the external calibration process CAL INTERN Running of the internal calibration process GAS BALLAST IS ACTIV Option Elektromagnetic gas ballast is open DETECTING lt INSP gt INSPECT measurement mode INVALID ARGUMENT Entry of a wrong key INTERPRETER ERROR Internal software or hardware error DETECTING lt MEAS gt MEASURE measurement mode NO CAL IN lt INSPECT gt Calibration during the INSPECT mode is not possible NO CAL IN lt STANDBY gt In the SNIFF mode only external calibration is possible Switch to MEASURE WARNING MAX IS ACTIV For external calibration the MAX function should be swit ched off NO CONC IN lt VACUUM gt In the VACUUM mode no concentrations can be display ed NO CHANGE IN DETECT Switching to VAC SNIFF is only possible during STANDBY GA 10 204 3 02 08 96 NO INPUT DURING CAL No entries can be made during a calibration NO MAX IN lt STBY gt MAX function is only possible during DETECT NO MAX IN lt INSP gt MAX function is only possible in the MEASURE mode NO PREC IN lt INSPECT gt PREC is only possible MEASURE mode NO ZERO IN lt STBY gt The ZERO function is only possible during DETECT NO ZERO IN INTERVAL The Zero function cannot be selected when displaying intervals NO INPUT IN REMOTE No entries can be made via keys when the V 24 interfa ce is active RESET MAX Resetting of the MAX function PLEASE
64. l liquid was used Is the equipment free from potentially harmful substances yes O no O go to Section go to Section 4 4 Process related Contamination of Vacuum Equipment and Components Oxic corrosive explosive biological hazard radioactive other harmful substances yes yes yes yes yes yes no no no no no OQOQQaYdaduU naan no Vacuum equipment and components which have been contaminated by biological explosive or radioactive substances will not accepted without written evidence of decontamination Please list all substances gases and by products which may have come into contact with the equipment Trade name Product name Manufacturer Chemical name or Symbol Dangerous material class Measures if spillage First aid in case of human contact ae OJN Copies Page 1 white to manufacturer or representative Page 2 yellow attach to consignment packaging securety Page 3 blue copy for file of sender 50 5 Legally Binding Declaration hereby declare that the information supplied on this form is complete and accurate The despatch of the contaminated vacuum equipment and components will be in accordance with the appropriate regulations covering Packaging Transpor tation and Labelling of Dangerous Substances Name of organisation or company Addres
65. lays the leak rate of the integrated calibrated leak mbar l s 1 Display TESTLK x x E yy ML S DISP SEL MASS NO Displays the mass number to which the mass spec trometer is aligned Display MASS x u Possible values for x are 2 3 or 4 Standard value is 4 helium DISP VERS NO STE Displays the number of the software version of the control processor Display STE VERSION x xx Note The first two digits of the software version number must be the same as for the communication pro cessor see OPT 23 To exchange the software see separate instruc tions Exchanging the EPROMs in the helium leak detector ULTRATEST UL 500 DISP VERS NO KOM Displays the number of the software version of the communication processor Display KOM VERSION x xx Note The first two digits of the software version number must be the same as for the control processor see OPT 22 To exchange the software see separate instruc tions Exchanging the EPROMs in the helium leak detector ULTRATEST UL 500 TUNE EXEC CLR This option performs the alignment of the accelera tion voltage for the mass spectrometer in order to GA 10 204 3 02 08 96 25 26 set the sensitivity to maximum for the programmed mass This process is performed in two stages Initially a coarse aligment is performed followed by fine tuning This process can only be started from the STANDBY mode Otherwise the following error message
66. leak e g Cat No 155 88 TL 4 6 a sample of a faulty component filled with helium may also be used for comparative purposes After having entered the set point leak rate and un screwing the blocking valve at the leak the leak is then directly accsessible proceed as follows Switch the UL 500 to RATE with the key RATE CONC The displayed values will then be in the unit whichever was preselected Starting the calibration Press START key after pumpdown wait for the mes sage DETECTING Press CAL key Press EXEC key The running process may be terminated by pressing the CLR key After starting messages appear on the alphanumeric display line 8 17 informing the operator of the se quence and requesting him to perform further operati ons CAL EXT EXEC CLR Press EXEC 7 3 key EXT TLK x xE xx Enter the leak rate of the calibrated leak and then press the EXEC key SNIFF TESTLEAK EXEC GA 10 204 3 02 08 96 Hold the sniffer tip at a defined distance from the cali brated leak and then press the EXEC key SIGNAL STABLE EXEC Wait until the signal is stable then press EXEC key 7 3 SNIFF AIR EXEC Hold the sniffer tip in uncontaminated air then press EXEC key 7 3 SIGNAL STABLE EXEC Wait until the signal is stable then press EXEC key 7 3 The UL 500 automatically determines the calibr
67. low was too low LIMIT LOW gt gt Value entered for limit low was too high LIMIT HIGH lt lt Value entered for limit high was too low LIMIT HIGH gt gt Value entered for limit high was too high NO INTERVAL IN ZERO It is not possible to enter an interval with upper and lower limit when the Zero function is active SET FIRST LIMIT LOW The upper limit can not be entered before entering the lower limit Messages during OPT function CLEAR CAL EMV Termination of the CAL EMV process PERFORMING CAL EMV CAL EMV process is running PERFORMING AUTOTUNE The sensitivity alignment for AUTOTUNE is running PERFORMING AUTOZERO The Zero alignment for AUTOZERO is running 26 NO CALEMV IN STBY OPT 26 CALEMV is not possible during STANDBY switch to DETECT 27 NO EXT V 24 OPT 27 cannot be carried out as the V 24 interface opti on has not been built in 24 NO TUNE IN DETECT OPT 24 TUNE is not possible during DETECT switch to STANDBY 44 10 NO TRIGGER OPT 10 cannot be carried out as the trigger option has not been built in 25 NO ZERO IN DETECT OPT 25 ZERO is not possible during DETECT switch to STANDBY CLEAR AUTOTUNE Termination of the AUTOTUNE process 15 0PT UNAVAILABLE OPT function is not used CLEAR AUTOZERO Termination of the AUTOZERO process Messages when pressing other keys CLEAR CAL EXTERN Termination of the external calibration process CLEAR CAL INTERN Termination of the interna
68. lue from 1 0 to 9 9 The starting point of each decade at 1 0 is identified by a constantly illuminated line at the bottom of the circular display The display within each decade is in logarithmic form thus permitting a more uniform representation when measured values are changing rapidly GA 10 204 3 02 08 96 2 3 1 1 Analog Display in Conjunction with LIMIT LOW LIMIT HIGH Functions The analog display range is limited by entering a low and a high limit value see Section 2 2 18 If both limit values of the measuring range are activated the measuring interval thus defined is no longer indica ted by several revolutions of the indicator The entire interval is shown on a sector of the circular display limi ted by two arrow like markers 8 15 which light up next to the limit value indicators on the circular display The indicated interval always consists of entire measu red value decades with the measured value being indi cated in logarithmic form within this interval 2 3 2 Digital Display In the MEASURE mode the measured value for the leak rate is shown on the analog display and also quantitati vely as a number The digital display 8 3 provides a two digit representa tion of the mantissa of the measured value and a two digit number for the exponent u or o may appear in addition at certain measured values before the displayed number Here the u means that the real measured value is belo
69. ly Initiation of measurement procedure pumpdown PREPARING DETECT Deactivation of status displays STOP and VENT DETECTING INSP 8 Spray test object with helium Display of leak rate on analog display 9 Press STOP VENT key for more than 1 1 s Initiation of STOP procedure PREPARING STOP Activation of status display STOP STANDBY FOR INSP Display of detection limit Initiation of venting procedure PREPARING VENT Vent valve opens after approx 1 1 s Activation of status display VENT STANDBY FOR INSP 10 Disconnect test object 30 GA 10 204 3 02 08 96 2 5 Operating Modes The standard UL 500 is equipped for two basic operating modes vacuum mode VAC and sniffing mode SNIFF In each of these modes the UL 500 can operate in the inspection mode INSP or measurement mode MEAS See Fig 14 2 5 1 Vacuum Mode VAC In the VAC mode a test object is flanged to the inlet of the UL 500 and evacuated by pressing the START key The pressure in the test object may vary between 1000 mbar and less than 108 mbar When the evacuated test object is sprayed with helium helium can enter the test object through any existing leak owing to the pressure difference The helium reaches the mass spectrometer where the gas molecules are ionized and detected Qualitative leak detection is possible as soon as pum ping is started Note If the ambient air is found to be enriched with helium carry out one of the following meas
70. m A magnetic sector field 3 8 with 180 deflection is used as separation system Owing to the inhomogenity of the magnetic field vertically in relation to the ion beam addi tional concentration is achieved in this direction Z focus sing resulting in a high sensitivity The intermediate screen 3 9 ensures additional sepa ration of unwanted ions of other gases 1 3 5 3 lon Collector The ion collector 3 5 consists of a suppressor and its proper collector The suppressor has a positive potential slightly below the anode potential It is designed to prevent scattered ions with a lower energy than required from reaching the collector Resolution at low detection rates is thus impro ved The collector collects the incoming ions and neutralizes them The corresponding current reaches the subse quent amplifier 1 3 6 Electronics Modules See Fig 4 1 3 6 1 Electrometer Amplifier The electrometer amplifier amplifies the current genera ted at the ion collector of the mass spectrometer Its gain can be changed in three stages Changeover and pro cessing of the analog output voltage are accomplished by the control unit The detection limit in the most sensi tive range is approx 4 10 5 A 1 3 6 2 Mass Spectrometer Supply Unit This unit generates all voltages and currents needed for operating the mass spectrometer Anode heating voltage Cathode heating voltage Fig 3 Schematic representation of the
71. m pressure logarithmic 0 5 V per decade starting at 1 V at 108 mbar Channel 1 Pin 5 The corresponding ground connection for channel 1 and channel 2 is the analogue ground pin 3 min 1 kQ Pin 2 ae START Pin 4 Remote control STOP Pin 6 Ground Fig 12 Recommended connection GA 10 204 3 02 08 96 The output to the recorder is always in units of mbar l s resp mbar This is independent of the unit sel ected for the display The recorder output socket can additionally be used for the connection of a remote control unit through which is it possible to control the functions START and STOP VENT Different voltages applied to the input pin 4 provide the following functions DC 12 5 V to 15 V START DC 0 V to 2 5 V for lt 1 1 s STOP DC 0 V to 2 5 V for gt 1 1 s VENT The 15 V available at pin 2 can be used for the above purposes Important The voltage is not short circuit proof The ground available at pin 6 screen must be used for the control inputs A suitable circuit is given in Fig 12 25 Key 1 00000000000 0 0 0000000000 0 0 2 3 4 131211109 8 7 65 43 2 1 5 6 7 8 25 24 23 22 21 20 19 18 17 16 15 14 3 Fig 13 Multi function output to Fig 13 GND TXD RXD RTS CTS DSR Ground conductor Data output Data input Handshake output Handshake input Handshake input Frame ground TRIR TRIM TRIA TR2A TR2M T
72. measured with the UL 500 and set to zero with the aid of the ZERO key Then using a thick PVC foil a sealed volume is esta blished around the point to be tested and the actual hood volume is established Note An error in estimating the hood volume has a linear effect on the leak rate determination i e percentage error in volume percentage error in leak rate After an adequate waiting period At the sniffer is intro duced into the hood and the finally displayed value A Che is recorded Calculation of the actual leak rate Q eax Data needed Vy hood volume in liters Pg atmospheric pressure in mbar t waiting time in seconds AC change in helium concentration in hood Note The displayed change in conncentration is only correct if the initial value air helium concentration was set to zero with the ZERO key Q Vi Po Che 1 LECK Te o Note The determined leak rate of the test object is only valid for the parameters prevailing during the test Other leak rates are obtained if the pressure differential type of gas temperature or liquid charge changes If the test object is not filled with a 100 helium concentration the leak rate must also be corrected with a helium concentration fac tor 33 2 5 2 3 Calculation of Standard Leak Rate as a Function of Pressure Differential The leak rate obtained must be converted to arrive at the standard leak rate Q This is the helium flow in mbar I s that
73. nel GA 10 204 3 02 08 96 39 Exchanging the fuses Caution Before exchanging the fuses switch off the unit and disconnect it from the mains Flip the upper front panel 19 4 down so that it is placed horizontally Use a screwdriver to loosen the required fuse cap by tur ning it to the right Bajonett lock Take out the fuse cap together with the fuse Exchange the fuse Reassemble in the reverse order Note The main fuses of the UL 500 are located on the LV assembly board and can only be changed by removing the board They may only be exchanged by suitably qua lified electricians 3 4 Exchanging the Filter Mat The filter mat 20 4 is located inside the rear panel and has to be exchanged when applicable It is available as an accessory Ref No 200 59 736 Use a screwdriver to turn the quick locks 20 2 by 90 thus loosening them Carefully flip the upper part of the rear panel backwards Pull the plug 20 6 for the ventilators located on the middle bar Carefully pull the rear panel 20 1 up and backwards from the fixing bolts and push slightly to the back Note When pushing back the rear panel take care that the connected mains cable and any possibly connected hoses are not caught by the cut out Remove both clips 20 3 from the holding rods 20 5 Detach the filter mat 20 4 and exchange it After having exchanged the filter mat slightly compress the clips so as to in
74. on power Ps 5 5 kW Mains connection for QUICKTEST 220 V a c Caution A Recorder output This connection always carries 220 V a c independently of the mains voltage For recorder with an internal resistance of min 2 5 KQ 1 Leak rate linear 1 0 9 9 V per decade Leak rate exponent 0 5 V per decade beginning with 1 V at 10 10 mbar l s 1 0 5 V per decade beginning with 1 V at 10 19 mbar l s 1 2 Leak rate logarithmic 3 Inlet pressure and fore pressure logarithmic 0 5 V per decade beginning with 1 V at 10 3 mbar Headset output internal resistance of headset min 8 Q output power max 500 mW 1 3 Technical Description 1 3 1 Principle of Leak Detection The UL 500 operates on the counterflow principle i e helium diffuses against the turbomolecular pump s direc tion of flow into the mass spectrometer while heavy gases especially water vapours are held back mass dependent compression capacity A cold trap in conjunction with liquid nitrogen is thus not needed A special feature of the UL 500 is the double entry tur bomolecular pump whose inlet side at the test object ensures short response times Furthermore as a result the inlet of the UL 500 is not constantly linked to a fore pump hence preventing test objects from becoming con taminated with hydrocarbons The UL 500 thus achieves pumping and response times which are shorter than for the full flow technique invol ving liquid nitrogen
75. on the functions installation operation troubleshooting and maintenance of the ULTRATEST UL 500 Before startup of the detector please read Sections 1 1 and 1 4 For initial startup follow Sections 2 1 and 2 4 to 2 6 Important remarks concerning operational safety and protection are emphasized as follows Warning Indicates procedures that must be strict ly observed to prevent hazards to per A sons Caution Indicates procedures that must be strict ly observed to prevent damage to or destruction of the ULTRATEST UL 500 helium leak detector Note Indicates special technical requirements that the user must comply with The references to diagrams e g 2 5 consist of the Fig No and the Item No in that order 1 1 1 Unpacking Unpack the helium leak detector immediately after deli very even if it is to be put into operation at a later date Caution Pull or push the instrument only at its housing and not at its display unit Examine the shipping container for any external damage and then completely remove the packaging materials Note The shipping container and packaging materials must be kept in the event of complaints about damage Check that the ULTRATEST UL 500 is complete Section 1 4 and carefully examine it visually Examine the display unit to ensure that no damage has occurred during shipment If any damage is discovered report it immediately to the forwarding agent and insurer If the
76. onse Displayed text 1 Close connecting flange 5 5 with blind flange 2 Set power switch LEYBOLD VACUUM 5 1 to ON Start of automatic UL 500 VERSION x x self test PERFORMING SELFTEST Visual check of microprocessor ROM CHECK OK modules RAM TEST OK Visual check of status displays on display unit Fig 8 PERFORMING LCD TEST Activation of auxiliary SELFTEST NO ERRORS pump and forepump RUNNING UP Start of automatic runup of turoomolecular pump up to 4 min Alternate display of turoomolecular pump TM PUMP ACT xxx RPS speed and fore vacuum pressure p P2 x xE yy mbar Tuning of mass spectrometer to maximum sensitivity for helium SENSITIVITY CHECK Determination of electric offsetvoltage and PERFORMING AUTOZERO helium background to correct the measured values Status display STOP on display unit lights up STANDBY FOR INSP 3 Press START key 7 15 briefly Initiation of measurement procedure pumpdown of dead volume at the inlet PREPARING DETECT Deactivation of status display STOP DETECTING INSP Display of leak rate on analog display 4 Press STOP key 7 4 for more than 1 1 s Initiation of STOP procedure PREPARING STOP Activation of status display STOP STANDBY FOR INSP Display of detection limit Initiation of venting procedure PREPARING VENT Vent valve opens after approx 1 1 s Activation of status display VENT STANDBY FOR INSP 5 Open connecting flange 5 5 Connect test object E 7 Press START key 7 15 brief
77. oo high ER MSP ANOD CAT U lt lt Difference between anode potential and cathode potential is too low ER MSP SUP POT gt gt Suppressor potential of the mass spectrometer is too high ER MSP SUP POT lt lt Suppressor potential of the mass spectrometer is too low ER MSP ANOD POT gt gt Anode potential of the mass spectrometer is too high ER MSP ANOD POT lt lt Anode potential of the mass spectrometer is too low ER 15V gt gt Supply voltage VP VN is too high ER 15V lt lt Supply voltage VP VN is too low ER 24V gt gt Supply voltage VP 2 is too high ER 24V lt lt Supply voltage VP 2 is too low ER TMP 15V gt gt Voltage of TMP supply is too high ER TMP 15V lt lt Voltage of TMP supply is too low ER BATTERY U lt lt Voltage of the backup battery is too low applicable only without clock assy ER D A U REF gt gt Reference voltage on control assy STE is too high ER D A U REF lt lt Reference voltage on control assy STE is too low ER A D CONVERTER DEF A D converter on control assy STE is faulty ER STE MUART DEF MUART IC on the CPU of control assy STE is faulty ER EMV OFFSET gt gt Electrical offset of the high impedance input amplifier is too high GA 10 204 3 02 08 96 OAH OBH OCH ODH OEH OFH 10H 11H 12H 13H 14H 15H 16H 17H 18H 19H 1AH 1BH ER PEAK NOT IN RANGE In TUNE mode no m
78. r pressing the PREC key 7 12 maximum sensiti vity is released for the detection of a leak rate of 2 10 19 mbar l s This release must be acknowledged by actuating the EXEC key 7 3 The request for the operator to do so appears in the alphanumeric display line 8 17 while the PREC indicator 8 11 flashes This function can be cleared by operating the CLR key 7 4 The PRECISION function is indicated by the PREC dis play 8 11 staying lit Note The PRECISION function is only possible in the MEA SURE mode 7 17 PREC Leak rates under 1 10 9 mbar I s can not be measured until the test object s pressure is sufficiently low which is reached in the course of evacuation This is noticeable especially when large volumes are involved The function is deactivated by pressing the PREC key 7 12 again and acknowledging via the EXEC key 7 3 2 2 10 MAX ACT Key The MAX ACT key 7 11 can be used to select two functions Retain the last maximum MAX Display the currently measured value ACT Starting from the function just set the function changes every time the key is pressed and this is visually repre sented on the MAX and ACT indicators 8 6 The functions can only be selected in the MEASURE and DETECTING modes The key has no function in the INSPECT mode MAX ACT 2 2 10 1 MAXIMUM Function Pressing the MAX ACT key 7 11 to ob
79. rror message will be displayed NO CALEMV IN STBY The alphanumerical display provides further infor mation for the user As the leak rate of the calibrated leak must be within a certain range the following messages can occur 23 27 24 SIGNAL TOO LOW when the leak rate is too low SIGNAL TOO HIGH when the leak rate is too high The setting of the variable leak has to be changed until the message SIGNAL IN RANGE is displayed After this the setting of the calibrated leak may not be changed any more The calibration process is then performed automatically The process can be terminated by pressing the CLR key 7 4 and this is acknowledged briefly by the display of CLEAR CALEMV Note As the resistance values change only slowly with time this alignment has to be carried out only very rarely However it must be carried out after exchan ging the amplifier or the EPROMs of the control pro cessor SETTING EXT V 24 This permits the setting of the parameters of the optional V 24 RS 232 C interface See GA 10 292 Note These settings can only be made with the interfa ce pcb built in Its presence is automatically detec ted upon switching on the UL 500 If the interface pcb is not sensed and when selec ting OPT 27 the following error message is dis played NO EXT V 24 2 2 20 HELP Key HELP The HELP key 7 1 has no meaning during normal operation 2 2 21 EXEC
80. s Post code Tel Fax Telex Name Job title Date Company stamp Legally binding signature Copyright 1991 by MaschinenbauVerlag GmbH Lyoner Stra e 18 6000 Frankfurt M 71 Order No 2121 GA 10 204 3 02 08 96 This page has been left blank for your com ments GA 10 204 3 02 08 96 51 LEYBOLD VACUUM GmbH Bonner Strasse 498 Bayenthal D 50968 Cologne Tel 49 221 347 0 Fax 49 221 347 1250 GA 10 204 3 02 08 96 RSP 08 96 1 80 6 676 27 Printed in Germany on chlorine free bleached paper
81. s a further display func tion an Acoustic signal 2 3 1 Analog Display The primary function of the analog display of the UL 500 is to indicate the trend of the measured values for the leak rate quickly and clearly during leak detection The circular display 8 1 composed of 45 individual seg ments shows the measured leak rate in a quasi analog form via a rotating illuminated indicator Clockwise revo lution means a rising leak rate and counterclockwise revolution a falling one It is therefore easily possible to localize the maximum leak rate by observing the direc tion in which the indicator is moving which facilitates leak detection especially when great distances are invol ved with test objects In the equipment operating mode INSPECT the leak rate is shown only on the circular display 8 1 Depending on the operating mode selected for the display there are two different types of representation on the circular dis play The exponent associated with the measured value is displayed on the bar scale 8 2 beside it Here one panel with the exponent number lights up in each case If no limit or only the low limit see Section 2 2 18 has been activated to restrict the measuring range of the UL 500 the circular display is in the normal operating mode This means that the leak rate measuring range is shown in decades on the circular display One revolution of the indicator corresponds to one decade of the measured va
82. s the purpose of communication with the operator It receives commands entered at the keypad and outputs measured values and messages via the dis play Like the control unit this unit possesses a microproces sor The two processors are in constant mutual contact for the purpose of exchanging commands and measured values Vacuum System Mains t Mass Spectrometer t y ow i i y Y Y Power distri Power conversion Turbomolecular Mass spectrometer Electrometer bution unit unit pump supply unit supply unit amplfier gt Control unit Microprocessor Displ it Y oa ace iad Microprocessor L y s Keypad Fig 4 Block diagram GA 10 204 3 02 08 96 1 4 Equipment 1 4 1 Standard Specification The ULTRATEST UL 500 helium leak detector is deliver ed ready for use UL 500 with built in display unit and with power cord attached Set of gaskets Set of tools in bag Set of fuses Folder with operating instructions Rotary vane vacuum pump TRIVAC D 4B GA 01 201 Rotary vane vacuum pump TRIVAC D 25 B GA 01 202 Spare parts list ET 10 204 6 way plug for the recorder output Ref No 500 17 119 centering ring with grid insert for the inlet flange Ref No 411 70 121 1 4 2 Accessories Cat No Ref No Calibrated leak TL 9 Calibrated leak
83. sert them between the holding rails Then reassemble in the reverse order Fig 20 Rear Key to fig 20 1 Rear cover 2 Quick lock 3 Clip 4 Filter mat 5 Holding rod 6 Plug for fans 40 GA 10 204 3 02 08 96 3 5 Draining Condensate from the Compressor Buffer Vessel Depending on the operating conditions condensated water may collect in the compressor buffer vessel 21 3 of the compressor assembly 21 1 The buffer vessel has to be drained when applicable Note Each time the oil of the pumps is exchanged the buffer vessel should also be checked Use a screwdriver to turn the quick locks 20 2 by 90 thus loosening them Carefully flip the upper part of the rear panel backwards To drain the buffer vessel 21 3 it has to be unscrewed from the pressure distribution block 21 2 A 17 mm spanner is required for this purpose Note A gasket is placed on the thread of the buffer vessel which may drop off when draining the buffer vessel A lost gasket can be replaced by a new gasket available under Ref No 239 73 136 Next drain the buffer vessel with the opening pointing downwards Before reassembly check the seating of the gasket on the buffer vessel Then reassemble in the reverse order Key to Fig 21 1 Compressor assembly 2 Pressure distribution block 3 Buffer vessel Fig 21 Rear compressor unit GA 10 204 3 02 08 96 41
84. tain the func tion Retain the last maximum has the result that only the maximum measured value which has occurred up to this point is shown in the digital display 8 3 The analog GA 10 204 3 02 08 96 circular display 8 1 and the exponential scale 8 2 are not affected They always show the currently measured value Pressing the START RESET MAX key 7 15 clears the max value being displayed and the currently mea sured value appears The next measurement cycle begins with the max measured value again being stored on the digital display Pressing the STOP VENT key 7 14 clears the MAXI MUM function 2 2 10 2 ACTUAL Function With this type of display the currently measured value is always indicated on the digital display 8 3 and on the quasi analog display 8 1 and 8 2 2 2 11 FAST SLOW Key The FAST SLOW key 7 9 switches over the speed of the measured value display FAST results in the display reacting quickly with SLOW an unsettled measured value reading is damped to a greater degree FAST SLOW Note The FAST function should be selected when wanting to localize leaks The function changes whenever this key is pressed The function just selected is shown on the display 8 7 2 2 12 Numeric Keypad 1 213 The numbers 0 to 9 7 20 are employed to 4l516 enter parameters required to operate the 7il UL 500 0
85. te Control Connection Socket 2 2 24 Pin out of the Multifunction Socket 2 2 25 Headset Output 2 3 Description of Displays 2 3 1 Analog Display 2 3 1 1 Analog Display in Conjunction with LIMIT LOW LIMIT HIGH Functions 2 3 2 Digital Display 2 3 2 1 Digital Display in Conjunction with ACTUAL Function 2 3 2 2 Digital Display in Conjunction with MAXIMUM Function 2 3 3 Limit Value Display Low and High Limits octane cave araa ss 2 3 4 Status Displays 2 3 4 1 Description of Status Displays 2 3 5 Alphanumeric Display 2 3 6 Acoustic Signal 2 4 Startup First Pumpdown Cycle 2 5 Operating Modes 2 5 1 Vacuum Mode VAC 2 5 1 1 Local Leak Detection in the Vacuum Mode 2 5 1 2 Integral Leak Detection in the Vacuum Mode 2 5 2 SNIFF Mode 2 5 2 1 Local Leak Detection in SNIFF Mode 2 5 2 2 Integral Leak Detection in SNIFF Mode 2 5 2 3 Calculation of Standard Leak Rate as a Function of Pressure Differential 2 5 3 INSPECT Mode 2 5 4 MEASURE Mode 2 6 Shutdown 0000000000ee 2 7 Calibration 00005 2 7 1 Calibration in Vacuum Mode
86. te is indicated both on the quasi analog display 8 1 and 8 2 and on the digital display 8 3 If possible the UL 500 should be calibrated before oper ating it in the MEASURE mode also see Sections 2 2 7 and 2 7 2 2 4 START RESET MAX Key START The START RESET MAX key 7 15 RESET MAX assumes either of two functions depen ding on the main status of the UL 500 2 2 4 1 START RESET MAX Key in STANDBY Starting from the STANDBY mode of the UL 500 evacu ation of a test object connected is initiated by pressing the START key The UL 500 operates with automatic measuring range selection the AUTORANGING see Section 2 8 3 GA 10 204 3 02 08 96 The measured values appear on the display in the follo wing fashion The circular display 8 1 in conjunction with the expo nential scale 8 2 shows the current leak rate The digital display 8 3 appears only in the MEASURE mode 7 17 Its function still depends on the type of display selected via MAX ACT 7 11 The message DETECTING INSPECT or DETECTING MEASURE appears on the alphanumeric display 8 17 if no special function of this display has been selected by pressing the OPT key 7 2 2 2 4 2 START RESET MAX Key in DETECT Mode Starting from the DETECT mode already initiated i e after having already pressed the START key once and with display type Retain the last maximum MAX
87. ted in the STANDBY mode The SNIFF VAC key 7 18 is employed to select the basic operating modes SNIFF and VAC Changeover between SNIFF and VAC necessitates a few changes in the control sequence of the UL 500 The changeover is not carried out until acknowledged by pressing the EXEC key 7 3 The operator receives the necessary information via the alphanumeric display line 8 17 and via the display SNIFF and VAC 8 10 The display of the mode still valid is lit that of the mode which can be selected flashes at the same time 2 2 2 1 Vacuum Mode In this operating mode leak detection can be conducted with the basic UL 500 unit The test object is evacuated with the integrated pumps of the UL 500 and sprayed with helium from the outside to localize leaks also see Section 2 5 The mode is indi cated by the display VAC 8 10 lighting up The indicated measured values are always leak rates it is possible for the display to indicate either of the following units 8 4 or 8 5 mbar l s t Atm cc sec USA unit Pa m s These units are default units of the UL 500 and they can only be changed in a special operating mode PARA MODE see Annex 1 2 2 2 2 SNIF Mode In this operating mode the UL 500 is normally operated with an external sniffer unit This mode is indicated in the SNIFF display panel 8 10 It is possible to indicate the measured values as a helium concentration ppm or as a lea
88. ting the previous operating mode remains lit the display for the newly selected mode flas hes If the EXEC key is pressed the display stops flashing and becomes steady while the other is switched off STOP VENT The STOP and VENT displays 8 9 indicate the mode which the unit is in after the STOP VENT key 7 14 has been actuated for a short or long time see Fig 14 In the STANDBY mode of the UL 500 STOP lights up in the VENTED mode VENT always lights up as well PREC The PREC display 8 11 identifies the expanded AUTO RANGE Pressing the PREC key 7 12 causes the PREC dis play 8 11 to start flashing A request appears in the alp hanumeric display line that the activation or deactivation of the PRECISION range will be acknowledged by pres sing the EXEC key 7 3 CAL The CAL display 8 13 signals three statuses Deactivated Always in the INSPECT mode While the unit is warming up during this phase cali bration is not feasible In the MEASURE mode with the unit warmed up and calibration already performed Flashing As the initial request to perform calibration when the war mup phase is over 15 min approx and the unit has been or is being switched to the MEASURE mode This is skipped if a calibration was performed during this time Steady light Further requests to perform calibration whenever the control processor considers this necessary owing to temperature
89. ures Connect hoses to the exhaust lines at the rear of the UL 500 9 6 and 9 7 and lead them to helium free air Feed in fresh air through a hose connected to venting valve VF1 2 15 2 5 1 1 Local Leak Detection in the Vacuum Mode For local leak detection the test object 15 2 connected to the UL 500 must be sprayed with helium at the points where leaks are suspected If possible use a spray gun with a fine nozzle 15 4 In order to detect very small leaks next to leaks already discovered on the test object the latter must be sealed by coating them with alcohol or by preventing the access of helium by screening the leak See Fig 15 In the case of systems with pumps of their own check the sensitivity of the entire system with a calibrated leak Because of the additional pumps the UL 500 measures only a partial flow of the total leak rate i e the detection limit will now be above 2 10 10 mbar I s VAC mode MEAS mode START STOP VENT ZERO selectable not selectable START STOP VENT ZERO CAL SNIFF VAC CAL VAC INSP MEAS INSP RATE CONC CONC PREC MAX ACT RESET MAX PREC MAX RESET MAX FAST SLOW EXP Numeric keypad Pointt Arrow right left Fig 14 Functions in the various operating modes Power On Run up completed INSP mode selectable not selectable SNIFF mode MEAS mode INSP mode START STOP START STOP VENT ZERO VENT ZER
90. w the displayed one underflow This happens at the lowest levels of the measuring ranges and in case of run ning below an adjusted low limit LIMIT LOW The o means that the real measured value is above the displayed one overflow which occurs in case of excee ding an adjusted upper limit The display of the valid measurement unit 8 4 or 8 5 accompanies the digital display In the VACUUM mode the leak rate units can be selec ted see Section 2 2 2 1 In the SNIFF mode the display appears as leak rate or as concentration in ppm depending on whether RATE or CONC was chosen The representation of the numbers varies depending on whether the ACTUAL or MAXI MUM function was selected see Section 2 2 10 2 3 2 1 Digital Display in Conjunction with ACTUAL Function The digital display always indicates the current measu red value This corresponds to the one shown on the analog display 27 2 3 2 2 Digital Display in Conjunction with MAXI MUM Function The digital display shows the maximum leak rate value which has occurred during the measurement cycle initia ted with the START RESET MAX key 7 15 It is reset by again pressing START RESET MAX or by pressing the STOP VENT key 7 14 2 3 3 Limit Value Display Low and High Limits Two displays with digits 8 14 and 8 16 are located below the circular display so that the high and low limits can be entered and
91. when entering a number 7 Arrow pointing to the right Moving the cursor indicating the input position to the right Moving a lengthy display text further to the right 8 Arrow pointing to the left Moving the cursor indicating the input position to the left Moving a lengthy display text back to the left 9 FAST SLOW Switches the display to either fast or slow operating mode 10 RATE CONC Switches the display to indicate either leak rate or helium concen tration 11 MAX ACT Switches the digital display to either Retain the last maximum or Display the currently measured value 12 12 13 14 15 16 17 18 19 20 21 22 PREC Switches the release of the most sensitive measuring range for autoranging either on or off ZERO Transfers the currently measured value to the display as zero STOP VENT Terminates the pumping or measuring operation in progress When pressed for longer than 2 s it opens the inlet venting valve START RESET MAX Starts the pumpdown and measurement operation Transfer of currently measured value to the digital display and search for next maximum CAL Starts the internal or external calibration sequence INSP MEAS Activates either the search mode or the measurement mode of the leak detector SNIFF VAC Activates either the sniffing mode or the vacuum mode of the leak detector Point Input of the decimal point when entering a number

Leybold UL-500 Manual - Pascal Technologies, Inc

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