Filament Replacement for VS Series Leak Detector
Contents
1. atmosphere as the screws are loosened Retain the socket head cap screws item 1 and the Belleville washers item 2 See line item 21 for correct orientation of the Belleville washers Figure 10 Direction of Cone 9 Remove the metal gasket item 3 and discard Do not scratch the mating surface when removing the gasket Do not attempt to reuse the gasket Figure 4 Spectrometer Exploded View 10 Examine the spectrometer cavity for discolored areas If present refer to the service manual for cleaning instruction Screw and Coupler iang Washer Screws Figure 5 Coupler Screws 11 On a clean work surface remove the defective filament s item 4 from the spectrometer by loosening the two coupler screws Then loosen the M2 screw and washer and remove the defective filament Figure 5 Coupler Screws Filament Replacement for VS Series Leak Detector Page 6 of 11 Document No Revision 699909994 A ap VARIAN lt Support Ribs on lon Support Black Filament Figure 6 Coupler and Filament Assembly 12 Inspect the new filament assembly for deformation damage and flaking of the coating prior to installation Do not install if damaged 13 Insert new filament assembly into the coupler 14 Guide the ceramic against the bottom and side ribs of the ion source support block Figure 6 Coupler and Filament Assembly and Figure 7 Filament Position Correct positioning of filament is critical for proper spectrometer oper2. 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Inc Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 2 04 Sales and Service Offices Japan Varian Inc Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Building 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordination through Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 252 Fax 39 011 997 9 316 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Inc Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 0
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4. Locations 26 Place the spectrometer cover over the header and align the holes Figure 12 lon Source Header Pin Locations 27 nstall screws and washers items 5 amp 6 then tighten using a M3 Phillips screw driver Figure 12 lon Source Header Pin Locations 28 Connect the spectrometer ground cable the preamp signal cable and the ion source cable to the spectrometer cover Figure 13 Vent Valve 29 Ensure that the vent valve on the turbo molecular pump if installed is tightened Figure 13 Vent Valve NOTE The vent valve is not installed on most turbo pumps Filament Replacement for VS Series Leak Detector Page 10 of 11 Document No Revision 699909994 A ap VARIAN lt 30 Attach the fan assembly Figure 2 Fan Assembly by fastening two wing nuts and one M4 socket head cap screw Then connect the fan cable to the unit 31 Leak check the spectrometer to ensure a leak free joint 32 Attach the rear cover and secure to the unit using existing hardware 33 Power up the unit 34 Watch the Home screen to verify that the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the user manual if the system fails to reach the System Ready mode The filament emission current normally operates at 0 8mA 35 Use the display menus MENUS SET UP MANUAL TUNING EMISSION to set the emission to 8mA NOTE Varian recommends that you wait a minimum of 30 minutes for the vacuum syst
5. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ie Agilent Technologies FIELD INSTALLATION Filament Replacement 7p re for VS Series Leak Detector Part Number 699909994 Rev A February 2006 Varian Field Instruction Sheet Filament Replacement for VS Series Leak Detector Preface Documentation Standards This manual uses the following documentation standards NOTE Notes contain important information CAUTION Cautions appear before instructions which if not followed could cause damage to the equipment or data loss WARNING Warnings appear for a particular procedure or practice which if not followed correctly could lead to serious injury or death Hazard and Safety Information The common international symbols used in this manual and on the equipment are defined below OFF Supply Power Earth Ground Terminal ON Supply Power Caution Hot Surface AC Alternating Current Caution Risk of Electrical Prf AN Shock Protective Conductor Terminal Filament Replacement for VS Series Leak Detector Page 1 of 11 Warning Risk of danger Frame or chassis Terminal Af Document No Revision 699909994 ap VARIAN 2N Operators and service personnel must be aware of all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous con
6. act with the spectrometer Spectrometer CAUTION Store the lon Source Preamplifier sub assembly in a cool dry area in a tightly sealed ESD protected container Wear non powdered ESD safe Nitride or equivalent gloves when handling the spectrometer Wash hands thoroughly after handling the spectrometer filaments and especially before smoking or eating The spectrometer and PCB s are static sensitive devices Wear a grounding strap when performing any maintenance on these units and especially when performing maintenance of static sensitive parts CAUTION The spectrometer operates at a very high vacuum produced by the high vacuum turbomolecular pump Service of the spectrometer requires that this vacuum be vented to the atmosphere Filament Replacement for VS Series Leak Detector Page 3 of 11 Document No Revision 699909994 A ap VARIAN lt Equipment Required e Filament Service Kit PN VSFLDFR e Extended Length M5 Allen Wrench e Metric Allen Wrench Set e Needle nose pliers or tweezer e M3 Phillips Head Screw Driver e 1 5 mm Hex Driver e 5 mm Hex Driver e Torque Wrench must be adjustable to 40 in lbs 4 5 N m and 90 in lbs 10 2 N m e Digital Multimeter Fluke 187 or equivalent Installation Procedure For clarity some items have been omitted from views ALON ALY Figure 1 Rear Screws 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high v
7. ation 15 While holding the filament in position insert the M2 screw and washer and tighten Figure 7 Filament Position 16 Tighten the coupler screws onto the filament posts Figure 7 Filament Position 17 Verify ceramic is tight against the bottom and right side ribs Ensure that the filament is positioned in the slot of the ion source as shown Figure 7 Filament Position and Figure 8 Filament Alignment Filarnent Post pad M2 screw and Washer w S i Ceramic position Figure 7 Filament Position Filament position see figure 8 Coupler Screw Filament Replacement for VS Series Leak Detector Page 7 of 11 Document No Revision 699909994 A ap VARIAN lt Repeller plate edge Center line of filament should line up with the edge of the repeller plate Figure 8 Filament Alignment 18 Clean the mating surfaces of the spectrometer body and header with Isopropyl alcohol and a clean lint free wipe NOTE Varian recommends that you use the Vac u solv spectrometer cleaning kit PN 670029096 19 Center replacement metal gasket inside the bolt pattern and outside of the body cavity To prevent scratching of any sealing surface do not use metal tools for this task Metal Gasket Detector housing Figure 9 Spectrometer Alignment 20 Guide the spectrometer header into pocket with the detector housing closest to the inlet Figure 9 Spectrometer Alignment Filament Replacement for VS Ser
8. ditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Varian All warning and cautions must be read carefully and strictly observed Consult local state and national agencies regarding specific requirements and regulations Address any safety operation and or maintenance questions to your nearest Varian office Solvents WARNING The mechanical components of leak detectors may be cleaned with one of the recommended solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death Do not use these solvents near a high temperature source Ventilate the working area with a blower and work in a large well ventilated room Solvents are irritants narcotics depressants and or carcinogens Their inhalation and or ingestion may produce serious side effects Prolonged or continued contact with the skin results in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eye shields gloves and protective clothing Due to the effective cleaning nature of VacuSolv solvent and its residue free properties Varian Component and Spectrometer Cleaning Kit Part Nu
9. em to clean up to obtain optimum calibration 36 Calibrate the system per the user manual For proper operation the system must be calibrated after opening the spectrometer or changing a filament 37 f the system fails calibration adjust the filament emission current as follows e If gain is too low there is too much signal reduce emission current by 0 1 0 2mA then calibrate again e If gain is too high there is too little signal increase emission then calibrate again The permitted emission current range is from 0 5 to 1 5 mA When calibration is successful filament replacement is complete Filament Replacement for VS Series Leak Detector Page 11 of 11 Document No Revision 699909994 A ap VARIAN lt Canada Central coordination through Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 1000031 P R China Tel 86 10 6608 1031 Fax 86 10 6608 1541 France and Benelux Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 13 Fax 33 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD
10. ies Leak Detector Page 8 of 11 Document No Revision 699909994 A ap VARIAN lt Figure 10 Direction of Cone 21 Insert a screw with three Belleville washers into each hole and finger tighten Figure 10 Direction of Cone NOTE The cones of the Belleville washers should all point to the head of the screw 22 Following the pattern shown in Figure 10 Direction of Cone torque screws to 40 in lbs 4 5 N m 23 Re torque screws to 90 in lbs 10 2 N m following the same pattern Go through the entire torque pattern twice to ensure the metal gasket is firmly compressed 24 Wait a minimum of five minutes then torque the screws shown in pattern Figure 10 Direction of Cone to 90 in lbs 10 2 N m J EE EE As E lon Source Header Pins Figure 11 lon Source Header Pin Schematic 25 On the PCB use the resistance meter to verify an open circuit between any two of the six ion source header pins except FIL 1 to FIL 1 and FIL 2 to FIL 2 which should be 0 3 Ohms or less Also verify an open circuit between the body of the spectrometer and any of the ion source header pins Figure 11 lon Source Header Pin Schematic If there is continuity short circuit at any of the points remove the header and inspect for shorting Filament Replacement for VS Series Leak Detector Page 9 of 11 Document No Revision 699909994 A ap VARIAN lt Ion Source Header Pins Location Je l Figure 12 lon Source Header Pin
11. mber 670029096 used in accordance with the kit instructions is recommended for cleaning spectrometer components The kit can also be used for fine cleaning of other parts in the leak detector s vacuum system such as valves and fittings No rinsing steps or high temperature drying is required following cleaning with VacuSolv Although appropriate precautions are advised VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs chlorofluorocarbons Other acceptable solvents are isopropyl alcohol IPA or Dow Corning OS 20 To clean the leak detector plastic enclosure the LCD display and Front Panel buttons use only a soft cloth slightly dampened with water or a mild soap Do NOT use excess water or cleaning solvents of any kind Avoid splashing any cleaning solvents into the unit through the ventilation openings or Front Panel buttons Wipe the surface with a dry lint free cloth Vacuum Equipment and Cleanliness Cleanliness is vital when servicing the leak detector or any vacuum equipment There are some techniques that are more important in leak detector servicing than in general vacuum work CAUTION Wear non powdered ESD safe Nitride or equivalent gloves to prevent skin oils from getting on spectrometer internal components Filament Replacement for VS Series Leak Detector Page 2 of 11 Document No Revision 699909994 A ap VARIAN lt O ring Care When removing checking or replacing O ri
12. ngs keep in mind the following NOTE Varian recommends replacing all O rings during routine maintenance or during any maintenance procedure requiring that O rings be removed CAUTION Remove O rings carefully with your fingers Do not use metal tools for this task this prevents scratching of any sealing surfaces e Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal e Do not use grease or any other substance on O rings that will come in contact with the vacuum surfaces e Do not use alcohol methanol or other solvents on O rings Doing so causes deterioration and reduces their ability to hold a vacuum e Varian does not recommend the use of vacuum grease If applicable apply a small amount of Apiezon L grease and wipe the O rings shiny dry Metal Seal Care CAUTION Metal Seals must be replaced any time a spectrometer is opened All fasteners must be installed and torqued per assembly procedure specifications Remove Metal Seals carefully with your fingers or a soft tool Metal tools scratch sealing surfaces e Metal Seals are supplied in pre cleaned condition No cleaning is required If necessary Metal Seals can be cleaned using the recommended solvents Wipe Metal Seals clean with a lint free cloth before installation to ensure that no for eign matter impairs the seal e Do not use grease or any other substance on Metal Seals that will come in con t
13. oltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 1 Rear Screws 4 Detach the rear plastic cover from the unit Filament Replacement for VS Series Leak Detector Page 4 of 11 Document No Revision 699909994 A ap VARIAN lt Fan Assembly Figure 2 Fan Assembly 5 Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts and one M4 socket head cap screw Figure 2 Fan Assembly Pre amp Signal Spectrometer Se Cable Location cover a a Ton Source Cable Location Ground Stud Location Figure 3 Cable Locations CAUTION Static sensitive device ensure that personnel are properly grounded before proceeding 6 Disconnect the spectrometer ground cable the preamp signal cable and the ion source cable from the spectrometer Figure 3 Cable Locations NOTE Cables not shown for clarity Filament Replacement for VS Series Leak Detector Page 5 of 11 Document No Revision 699909994 A ap VARIAN lt 7 Using an M3 Phillips screw driver remove the spectrometer cover Spectrometer Header Spectrometer Body Figure 4 Spectrometer Exploded View CAUTION Wear non powdered ESD safe Nitride or equivalent gloves not included in kit to prevent skin oils from getting on vacuum surfaces 8 Loosen screws item 1 and carefully remove the spectrometer header from the body The vacuum system vents to
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