SIL 8000 wafer loader
Contents
1. manual machine will be ready for the normal use First switch on the system by turning to ON the main switch placed on the front panel Be sure that the EMO switch again on the front panel is released in case release it by turning CCW After having switched on the system Proteus Inspection program will automatically run After launch the first screen displayed is the following l Wafer Loader 1 0 WAFER LOADER MENU Gonfiguration A picture of the interface with the meaning of each area and button is given into the following figure Wafer Loader 1 0 Access the configuration section is R Access the main inspection user interface Counter of manufactured wafers TOTAL WAFER Exit the program To run the inspection press the INSPECTION button will then run the next interface which is the proper user interface Inspection F3 Micro Inspection SINGLE m fi fie e ie qe de m ee Looe Ga Loud call fined Pe ma el i CYCLE I O CONFIGURATION i 9 E A picture of the inspection interface with the meaning of each area and button is given in the following picture m H ou N e ff ait SINGLE m f eh je CL I SIZE 6 CONFIGURATION 6 Full Thickness i HEN po y d y t E 3 Running machine cycle This will be the screen displayed when accessing the normal cycle run interface This scre2. SIL 8000 wafer loader USER MANUAL Rev 1 0 August 2010 SIL 8000 WAFER LOADER FOR VISUAL INSPECTION MICROSCOPES SIL 8000 is a simple and effective tool for wafer visual control It have been especially studied for all that cases where it is required a simple fast and cost effective solution in wafer inspection A simple yet powerful unit featuring a sophisticated and easy to use computer control which have been designed as loading unit for the DM 8000 inspection microscope photo Saceanier 2010 1 Introduction SIL 8000 have been especially designed to be used as a tool to load wafers on inspection microscopes It can be described as composed of three main parts all into the same case Mechanical part Motion and I O controller Computer with display and keyboard All the parts are contained in a single stainless steel body with a granite base for higher stability and better vibration insulation The whole system have been designed to be easy to use and maintain and in particular the provided computer interface have been studied to allow a simple use and configuration In the following we will introduce the basic use of SIL 8000 system with special attention to the operator interface and the use of its configuration software About installation first startup and adjustments refer to the Engineering and Service Manual 2 First run Once the installation and first startup is done see Engineering and service
3. be presented as follows a Exit to Operating w System Cancel 0 Shutdown JESC F6 There are three possibilities The first is leave the computer and restart under Windows This operation is allowed only to service personnel and requires a special password which is not public When pressing this key a next screen will be presented to enter password Logout If password is not correct the system will not be allowed to restart under Windows If password is correct syst down Windows to restore machine at the next restart By pressing SHUTDOWN system will shut down turning the computer off After computer shutdown press the main switch to shut down machine completely By pressing CANCEL system will return to the main screen 10 The Screen Keyboard Normally Simple Loader machine is working without any keyboard connected even if it is possible to work with a standard keyboard connected by one of the available USB connections To input passwords or parameters a screen keyboard is provided and launched together with the machine software to enable the user to type data Screen keyboard is launched at startup is accessible by its icon on any screen given auey E When it is needed to use the keyboard just tap on its icon with the touch pen or the fingertip and it will be opened as follows Laliwbe belke Ly Lu ioke hele alslalrtlolnl alku a jele Ite lye sole la OENE KE Keyboard can be used by
4. ch time 5 2 Changing position and program parameters From the parameters section of recipe editing it is possible to change some control parameters such as positions and some threshold and setup for centering and alignment system This section can be accessed by clicking on the PARAMETERS folder bar from the default editing screen When selected this screen will appear as follows Proteus Inspection Yer 1 0 7 p p 7 CONFIGURATION PARAMETERS Positions Properties Recipe parameters Machine Parameters a are ALT 1 ALT 2 Name WaterPitch A Value 115463 Description TO RECIPE F10 Passo in step tra una fetta e la successiva MACHINE PARAMETERS F9 F MODIFY F4 CONFIGURATION lt 200um tutti gt lt 8 INCH gt ACCEPT F5 DISCARD ESC The parameter section is divided into two sections RECIPE PARAMETERS and MACHINE PARAMETERS To access MACHINE PARAMETERS it is needed to input the password The password required is the same but the request is intended to ask the operator to be sure about his request to access machine parameters It is strongly recommended not to change any value if machine is correctly running and to perform changes by working on a dummy wafers cassette On any machine each value is described into the description section to allow a correct understanding of its meaning In another part of this manual a list of the default recipes for each wafer size is given To chang
5. dition Wafer Loader SYSTEM WAITING If a mapping is running it will be finished before stopping To restart simply press Continue on the message box 4 3 Ending a cassette If a cassette inspection must be aborted simply press the END key Machine will stop after the end of the current wafer and will be ready for a new cassette This will happen also if the cassette is removed from the indexer platform before the normal end 4 4 Emergency STOP It is possible in case of need to stop machine by pressing the EMERGENCY button placed on the left side of the front panel This will force the machine to completely and immediately STOP This will also produce a vacuum or air loss which could result in wafer breakage Machine will detect within about 30 seconds depending on computer status the emergency condition giving a message and then stopping the program from running In this case a message will be given and program will be restarted WARNING USE EMERGENCY STOP BUTTON ONLY IN CASE OF REAL NEED SINCE ITS IMPROPER USE CAN RESULT IN WAFER BREAKAGE 4 5 Changing a configuration It is possible to run a different recipe for inspection Basically differences from a recipe configuration to another can be in wafer size motion parameters or inspection strategies We will describe in the proper section how to modify a configuration but switching from one configuration to another can be done each time an inspection is
6. e There are two possibilities ERROR IS NOT RECOVERABLE click on Shutdown and program will be restarted In this case program is automatically restarted program and the startup screen will appear after some seconds In case there will be problems with boards or controller use the QUIT button and the Shutdown option and then completely restart the system In this case it is possible that a wafer will remain out from cassette PUT MANUALLY THE WAFER BACK TO THE CASSETTE BEFORE RESTARTING ERROR IS RECOVERABLE OR HAVE BEEN ALREADY SOLVED this condition can happen for example in case of a momentary loss in vacuum or other similar conditions click on Continue to make the program continue The dialog box includes also the indication of description number of sensor and hardware module to enable the service to understand what happens Number of line and module are represented into the schematic diagram given with this documentation WARNING BEFORE CONTINUING IN CASE OF ERROR BE ABSOLUTELY SURE THAT MACHINE IS IN A SAFE CONDITION TO AVOID WAFER BREAKAGE IN CASE OF DOUBT QUIT PROGRAM AND RESTART If arm is in a dangerous position such a s inside a full cassette it can be manually moved In this case RESTART MACHINE 9 System shutdown To shutdown the system follow this procedure First of all go to the main machine screen Then press QUIT F6 INCASE OF INSPECTION STATIONS PROGRAM WILL THEN QUIT a shutdown screen will
7. e a value select the desired position or parameter by clicking on it then click MODIFY F4 input new value and then ckick MODIFY F4 again to accept modifications When done click CONFIRM F5 to accept or DISCARD Esc IF THERE ARE DOUBTS IN MODIFYING PARAMETERS CREATE A PAPER COPY OF THE ORIGINAL CONFIGURATION AND ACT ON A NEW RECIPE WITH THE SAME PARAMETERS BEFORE It is also possible to change parameter name and description in the same way used to change values Finally it is possible to move parameters from the Machine section to the Recipe section by pressing the given button F10 during the MODIFY mode This is intended to allow the operator to access easily to parameters which will be often modified 5 3 Creating a new configuration To create a new configuration when accessing in edit mode to the configuration menu press NEW F2 key This will access the dialog box where the name of new configuration can be given New Configuration Insert name my configuration CONFIRM F5 CANCEL ESC Write the name and press CONFIRM to accept CANCEL will abort new configuration creation After this access the Strategies and parameters sections Values will be at this point the same than DEFAULT configuration and can be modified according to needs 5 4 Deleting a configuration To delete a configuration select configuration to delete by clicking on the list and then choose DELETE on the configura
8. e microscope stage in exchange position The screen displayed at this time will include the graphics indication of wafer found in cassette Type of inspection active will be the same given int the recipe It is possible to modify this selection before starting the cycle Bright Light Inspection o F3 Micro Inspection SINGLE CYCLE w N gt f 4 a 3 5 D D ihe j i JLIL SIZE 6 CONFIGURATION 6 Full Thickness a KKR To load the first selected wafer put the microscope stage in exchange position left rear with the XY stage activating the exchange sensor for at least 2 seconds and then loader will proceed extracting the first wafer selected starting from cassette bottom Wafer will be extracted and placed on the macro inspection chuck Once extracted wafer on the graphics will turn the color from light blue to yellow showing that it is during inspection cycle Bright light inspection will be done at first if selected and to proceed to the microscope press the OK button displayed At this point machine will wait to have the exchange sensor not active and then pressed again for at least 2 seconds and then will take wafer to put it back to the cassette If switch will remain pressed loader will take the next wafer and put it again to the chuck If only Bright light mode is selected and microscope inspection is not needed at the first START the first wafer will be extracted and dri
9. en has five different parts button section where all the functional button are placed cassette display section where the current cassette is represented giving information about its status counter bar where the INSPECTED counter will give the status of the present cassette inspection information bar where are given wafer size and configuration recipe name message line where is displayed a message with machine status or operator recommendations Buttons can be accessed by pressing the touch screen display To start machine cycle simply press START System will then ask the operator to load the proper recipe needed to work the cassette The size and recipe selection screen is then displayed SELECT SIZE AND CONFIFURATION Available configurations Select the proper size and recipe and then confirm by pressing Accept Then the inspection screen will be displayed again press START again Indexer platform and loading arm will then be driven to home position to prepare loader to receive the cassette The message Put cassette on stage is now displayed and a box with two buttons is then displayed Load the cassette on indexer platform taking care that it is the proper one size and wafer type and proceed by pressing OK Please N put cassette on stage and press OK Cassette mapping will then be started to identify wafers into cassette When mapping is finished machine will wait for th
10. pressing the buttons with the touch pen or the fingertips and can be reduced by tapping on the reduce key the green keyboard icon Keyboard have some options such as moving it up and down on the screen which can be done by dragging it or by tapping on the light blue keyboard icon There is also the possibility to make it transparent Just tap on one of the four keys with on the right side of the keyboard to obtain different transparency levels TABLE OF CONTENTS 1 Introduction Page 3 2 System startup Page 4 Running machine cycle Page 6 Special modes Page 7 4 1 Single cycle operation Page 7 4 2 Step by step operation Page 8 4 3 Ending a cassette Page 9 4 5 Emergency stop Page 9 4 6 Changing a configuration Page 10 4 7 Going back to startup menu Page 11 5 Editing Configurations Page 12 5 1 Choosing inspection strategies Page 13 5 2 Changing position and program parameters Page 15 5 3 Creating a new configuration Page 17 5 4 Deleting a configuration Page 18 6 Password Change Page 19 7 Parameters Page 20 8 Errors and malfunctions Page 21 9 System shutdown Page 22 10 Screen Keyboard Page 24 NOTE
11. started as explained previously 4 7 Going back to startup menu It is possible to access the startup menu from operator interface screen This can be useful if it is needed to access the recipe editing section To do so press the ESC key in the left down corner of the inspection interface The startup menu will then be displayed 5 Editing Configurations From the Main menu it is possible to access configuration menu To do this press CONFIGURATION F1 key To access the configuration menu in EDIT mode a password will be required A dialog box as showed will then be displayed Please enter your password m CONFIRM CANCEL FS ESC Input the correct password and then the configuration selection display will appear This menu is similar to the one which can be accessed from the CHANGE key on the user interface bu capabilities To select a configuration select before wafer size and then configuration name by clicking on it When configuration is selected press CONFIRM F5 to edit Proteus Simple Loader 1 0 48 CONFIGURATIONS SELECT CONFIGURATION Available configurations SIZE 8 CONFIGURATION Inspection strategies can be selected from the following given options ACCEPT F5 DISCARD ESC There are two sections inside editor The first one is about inspection strategies and the second is about motion parameters 5 1 Choosing inspection s
12. tion selection screen 6 Password change Password is required to access recipe editing menu There is a simple system to manage password change When accessing to the password request box press MODIFY key to access the password change dialog box as follows Please enter your password I MODIFY CONFIRM CANCEL F2 F5 ESC Simply insert the old password in the first line then the new one in the second and confirm it in the last one 2 New Password 3 Confirm Password CONFIRM CANCEL F5 ESC When done press CONFIRM or CANCEL to accept or reject new password 7 Parameters Please note in the following area each parameter of DEFAULT recipe for all the sizes used configurations before making any modification A complete description of recipe parameters is given into the service manual PARAMETER NAME VALUE 6 VALUE 8 COMMENTS 8 Errors and malfunctions There are some conditions which can result in errors These conditions are especially related with sensor verification and especially vacuum sensor and position sensors Basically when an expected sensor is not activated or deactivated within a given time timeout an error occurs In this case a dialog box with the error message like the following will be displayed SYSTEM ERROR ERROR on 4rm Up Check module 1 0 Control Board Portn 7 Continu
13. trategies The inspection strategy can be chosen by the selection screen It is possible to program ALL wafers for inspection and this option will not imply any further choice Proteus Simple Loader 1 0 46 PARAMETERS Wafer selection SPECIFIED RANDOM F7 F8 ACCEPT F5 DISCARD ESC If the SELECTION mode is selected only specified wafers will be inspected and these wafers must be selected in a further screen as follows by selecting it with up down arrows and by pressing the ENABLE or DISABLE key only clicking The screen with wafer selection will then appear as represented into the following figure g E E ae 5 a IE HE E Half E EIE ig Ei E ra oa aia i EE Se fanaa ia Selected wafer will then be marked and will remain until deselected When done press CONFIRM or CLOSE If confirmed modifications will be recorded into the recipe data base If the RANDOM option is selected the user can define a number of wafers to be inspected and each time the recipe is run for each cassette the given number of wafers will be randomly selected within the 25 cassette slots If a selected slot is empty wafer will not be inspected The number of wafers to be inspected will be given in the following dialog box Input wafer number and click OK or press ENTER Wafer positions will be generated by a random number generator to allow inspection of different wafers ea
14. ven to inspection position switching on the illuminator optional pressing OK button will return the wafer to cassette and extract the following one 4 Special modes 4 1 Single Cycle operation It is possible to enable SINGLE CYCLE operation by selecting the proper button The button will then be marked with a yellow dot into its left high corner This will force the machine to process a wafer at a time waiting fora START key before proceeding with the next one Of course microscope stage must anyway be placed to the exchange position activating the stage presence switch for at least 2 seconds but the loading of wafer will not be started until the START button is not pressed SINGLE CYCLE can be disabled by pressing again its key and then START to proceed with normal mode 4 2 Step by step operation It is possible mainly for setup or service purposes to run machine in step by step mode To do so simply press F1 key during operation It can be seen that START button changes to PAUSE when machine is running F2 Bright Light Wafer Lig ee ae Selection ry F3 Micro Inspection Fam SINGLE CYCLE D SIZE 6 CONFIGURATION 6 Full Thickness Pressing PAUSE during operation forces machine to stop at the end of the current phase or movement It is important to remember that this key is not an instant stop key The current movement is anyway finished and then machine stops The next screen shows the Pause con
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