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TV 1001 Navigator - Ideal Vacuum Products, LLC

1. OUJUUULHUJO U U Figure 52 TV 1001 Navigator User Manual 87 900 945 01 1 295 312 17 Technical Information Side Mounting The L shaped bracket P N 969 9298 is available as an option See the following figure 1 Place the L shaped bracket on the controller with the pump cable toward the bracket and fix it by means of the three socket head screws M5 the washers and the nuts The 6 holes on the bracket allows to mount the controller with the rotation angle that you like Turn the pump upside down Place the bracket on the pump bottom the hole on the bracket has the same diameter as the pump bottom flange 4 Screw a little bit the three screws M6 in the holes on the pump bottom Rotate the bracket until the controller is on the chosen position Tighten the
2. INPUT OUTPUT Figure 10 254 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 P3 Vent Figure 11 This is a dedicated 24 Vdc connector to control the optional vent valve P4 External Fan Figure 12 This is a dedicated 24 Vdc connector to supply the optional external fan TV 1001 Navigator User Manual 87 900 945 01 1 255 312 17 Technical Information J1 In Out Figure 13 This connector carries all the input and output sig nals to remote control the TV 1001 Navigator It is a 15 pins D type connector the available sig nals are detailed in the table the following para graphs describe the signal characteristics and use Pin N Signal name In Output O mu No 4 5 SPEED SETTING AN Co a 256 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Signal Description Start Stop input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to
3. Figure 5 250 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 A al Figure 6 TV 1001 Navigator User Manual 87 900 945 01 1 251 312 17 Technical Information Q D Q o 7 o o E a Inlet pressure mbar Figure 7 Graph of nitrogen pumping speed vs inlet pressure Rie aa MN Nitrogen Helium Compression ratio Foreline pressure mbar Figure 8 Graph of compression ratio vs foreline pressure 252 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 N La Q E gt lt o gt O La A c 107 1 Inlet pressure mbar Figure 9 Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump TV 1001 Navigator User Manual 87 900 945 01 1 253 312 17 Technical Information Interconnections The following figure shows the TV 1001 interconnections
4. Figure 56 300 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KQ resistance at 25 C and pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply TV 1001 Navigator User Manual 87 900 945 01 I 301 312 17 Technical Information Pump Used with Corrosive Gases 302 312 To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar I s This value can be exceeded according to the process requirements Please contact Agilent for specific applications The purge gas throughput with the recommended forepump
5. Figure 40 The assembled kit must be screwed into the suita ble holes of the pump body with a recommended closing torque of 5 Nm TV 1001 Navigator User Manual 87 900 945 01 1 285 312 17 Technical Information 286 312 Figure 41 Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles These hoses must be held on the respective nozzles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 10 C and 20 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 1 h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole Is suggested TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation TV 1001 Navigator Controller Compatible Vent Valve mod 969 9834 Figure 42 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up
6. Model 969 8844 1001 NAVIGATOR ie bina HA T T J ee Ce EE i E pi were H Iq vg Ig Iq Ig E ja ja ja Ig Ig Ig El Model 969 8840 Model 969 8841 Model 969 8845 Figure 1 242 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The pumps only are available with the following models Model 969 8931 with ISO 200 high vacuum flange Model 969 8946 with ISO 200 F high vacuum flange Model 969 8932 with ConFlat 10 external di ameter high vacuum flange Model 969 8933 with ISO 160 high vacuum flange Model 969 8934 with ISO 250 high vacuum flange Model 969 8947 with ISO 250 F high vacuum flange TV 1001 Navigator User Manua
7. maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C see the diagram pressure temperature in the appendix Technical Information relative humidity O 95 non condensing Do not remove the adhesive and protective cap before connecting the turbopump to the system Figure 2 In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 1001 Navigator must be connected to a primary pump see Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 231 312 16 Instructions for Use Pump fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the connection is not sufficient to withstand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment Fix the TV 1001 Navigator in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque of 8900 Nm around its axis For example the ISO K flange can be fixed using high strength steel clamps like Agilent model IC63250DCMZ The following table sh
8. 5 Vdc 24 Vdc Controller 5 Vdc Figure 20 Case 2 with transistor utilization TV 1001 Navigator User Manual 87 900 945 01 1 263 312 17 Technical Information How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The figure example refers to the programmable set point signal on pins 11 and 9 Controller g de 8 TN NY J Figure 21 Typical output connection 264 312 TV 1001 Navigator User Manual 87 900 945 01 I Technical Information 17 J2 Serial Figure 22 Typical output connection This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 1001 Tab 5 E PinN Signalname sisi o Ds SPARE Do RBD 3 RX RS232 E po SPARE SS III O DO Mp SS E Po SPARE M O DD Ra TT DO a O e Note that the vent valve can also be controlled by means of the serial connection A serial communication kit with a serial cable and the T Plus software is available optional TV 1001 Navigator User Manual 87 900 945 01 1 265 312 17 Technical Information RS 232 RS 485 Communication Description 266 312
9. default 0 Rotational frequency setting Hz 150 to 646 default 646 122 R W L Maximum rotational frequency in Hz active only in Stop condition Set vent valve on off on closed 150 to 646 default 646 On 1 Off 0 default 1 Reserved to Agilent service R W L Set the vent valve operation Automatic 0 see note 1 On command 1 see note 2 200 272 312 R N Vent valve opening delay expressed in 0 2 sec Reserved to Agilent service 0 to 65535 corresponding to 0 to 13107 sec Pump current in mA dc Pump voltage in Vdc TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 N Read Write Datatype Description Admitted Values 202 R N Pump power in W pump current x pump voltage duty cycle 203 R Driving frequency in Hz 204 R Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 206 R N Error code Bit description see the following figure 300 R N Cycle time in minutes 0 to 999999 zeroed by the reset command 301 R N Cycle number zeroed by the 0 to 9999 reset command 302 R N Pump life in hours zeroed by 0 to 999999 ee the reset command 320 Reserved to Agilent service to E 398 400 R A CRC EPROM QE OEDXXXX where XXXX are variable 402 R A CRC Param PA PADXXXX where XXXX are variable 900 Reserved to Agilent
10. eobecn Informace 185 Uskladn ni 187 Priprava k instalaci 188 Instalace 189 Montaz vyv vy 190 TV 1001 Navigator User Manual 87 900 945 01 I Contents Pouziti 192 Udrzba 195 Likvidace 196 14 N vod na Obsluhu 197 Bezpe nostn pokyny pre Turbomolekul rne v vevy 198 V eobecn Inform cie 199 Uchov vanie 201 Pr prava na in tal ciu 202 In tal cia 203 Upevnenie v vevy 204 Pou itie 206 dr ba 209 Likvid cia 210 15 Priro nik za Navodila 211 Varnostna navodila za Turbomolekularne rpalke 212 Splo ne Informacije 213 Shranjevanje 215 Priprava za montazo 216 Montaza 21 7 Pritrjevanje rpalke 218 Uporaba 220 Vzdrzevanje 223 TV 1001 Navigator User Manual 87 900 945 01 I 11 312 Contents 12 312 16 17 Odlaganje opadkov 224 Instructions for Use 225 Safety Guideline for Turbomolecular Pumps 226 General Information 227 Storage 229 Preparation for installation 230 Installation 231 Pump fixing 232 Use 234 Maintenance 23 7 Disposal 238 Technical Information 239 Description of the TV 1001 Navigator 241 Technical Specification 248 TV 1001 Navigator Outline 250 Interconnections 254 RS 232 RS 485 Communication Description 266 Inlet Screen Installation 275 Heater Band Installation 278 Air Cooling Kit Installation 280 Water Cooling Kit Installation 284 Vent Accessories 28 7 TV 1001 Navigator User Manual 87 900 945 01 I Contents Vibration Isolator Install
11. registered trademarks of Microsoft Corporation Satety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TV 1001 Navigator User Manual 87 900 945 01 I TV 1001 Navigator TV 1001 Navigator TV 1001 Navigator User Manual 87 900 945 01 1 3 312 TV 1001 Navigator 4 312 TV 1001 Navigator User Manual 87 900 945 01 1 Contents Contents 1 Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 20 Installazione 21 Fissaggio della pompa 22 Uso 24 Manutenzione 27 Smaltimento 28 2 Gebrauchsanleitung 29 Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine Informationen 31 Lagerung 33 Vor der Installation 34 Installation 35 Befestigung der Pumpe 36 Gebrauch 38 Wartung 41 TV 1001 Navigator User Manual 87 900 945 01 1 5 312 Conten
12. Both the RS 232 and the RS 485 interfaces are available on the connector J2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE Ze the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 When a data Is indicated between two quotes it means that the indicated data is the corresponding ASCII character lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric char acter indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt C
13. Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A Non Billable _ Billable m New PO hard copy must be submitted with this form 3B JExchange Repair upgrade _ Consignment Demo JCalibration _ Evaluation L Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR LI HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the fallowing information must also be filled out Check boxes for all materials to which product s pumped or was exposed L Toxic C Corrosive C Reactive L Flammable Explosive Biological L Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result
14. eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consump tion by the motor most of which 1s dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radia tion and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the inten sity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum opera tion no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Accessories and Spare Parts Tab 9 Description Part number Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug mlet ms Serial cable and Navigator Software 969 9883 Bracket for controller side mounting 969 9298 U TI as Inlet screen ISO 200 and CFF 10 969 9316 E Inlet sereen ISO250 ggg TO TOO S 4 Heater band 120V 969 9317 Water cooling kit plastic model BAT Tel ee re ae Tyo a E EN E E ee Air cooling
15. for Use 16 Maintenance The TV 1001 Navigator does not require any maintenance Any work performed on the system must be carried out by authorized personnel Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned pump to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a pump is to be scrapped it must be disposed of in accordance with the specific national standards TV 1001 Navigator User Manual 87 900 945 01 1 237 312 16 Instructions for Use Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contac
16. in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S
17. instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima Z bares por encima de la presi n atmosf rica temperatura de 5 U a 35 C v ase gr fico en el anexo Technical Information humedad relativa O 95 no condensadora ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles El TV 1001 Navigator ha de conectarse a una bomba primaria v ase diagrama en Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 63 312 4 Manual de istrucciones Fijaci n de la bomba En caso de danarse el rotor la conexion entre la bomba y el sistema puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexion podria no resistir a dicho par de fuerza y como consecuencia la bomba podria separarse del sistema o el motor podria separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o da os a
18. los aparatos adyacentes Fijar el TV 1001 Navigator en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8900 Nm en torno a su propio eje A modo de ejemplo la brida ISO K puede fijarse con mordazas de acero de alta resistencia como el modelo Agilent IC 63250 DCMZ En la siguiente tabla se indican respecto de cada brida la cantidad de mordazas IC 63250 DCMZ necesarias y el par de apriete con el cual fijarlas oe de A CE a ISO 160 10 35 Nm ISO 200 8 35 Nm En la siguiente tabla se indican respecto de cada brida ISO F la cantidad de los tornillos necesarios y el par de apriete con el cual fijarlas Tab 2 Brida N Par de apriete ISO 250 F 12 5 Nm En el caso de las bridas F los tornillos de acero deben ser de clase gt 8 8 Pre rr rr rr rr rr rr re rr rr rr rr rr rr rr rr rr rr rr r rr rr rr Pr r r rr rr rr rr rr r ECA ORE Pr rn r Pr rr rr ren ren rr r pren rr rr rr rr rr rr rr rr er RCC RO RONCO RO CON CC encon rr rr rr rr rr rr rr rr rr rr rr rr error 64 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 La turbobomba con brida de entrada ConF lat ha de fijarse a la camara de vacio mediante los accesorios mec nicos especificos Agilent Para m s detalles v ase el anexo Technical Information El TV 1001 Navigator puede instalarse en cualquier posici n El TV 1001 Navigator no puede fijarse utiliz
19. of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature 1000000 Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and model understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature 0 sscseesse Pg 2 3 i Agilent Technologies Vacuum Products Division Reguest for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the produci on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clagging in OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High valtage prablem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum syste
20. rotor crash the rotational energy may be released To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 226 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TV 1001 Navigator is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 38000 rpm driven by a high performance 3 phase electric motor The TV 1001 Navigator is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a remote site by means of an host compu
21. screws properly Turn the pump again Plug the line card and connect the pump cable to the pump O co yu GI Connect the mating connector with the jumper on the interlock signal to start the pump 296 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 OOOOOOOOO OO0OU pra ROM BOTTOM Figure 53 TV 1001 Navigator User Manual 87 900 945 01 I 297 312 17 Technical Information Connection A High Vacuum Flange For ISO K flange connections fix the two flanges with the clamps as shown in the figure Figure 54 It is mandatory to connect the pump in such a way to withstand the torque specified in the IN STRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the connections can
22. service 503 R W N RS 485 address 0 to 31 default 0 504 R W L Serial type select 0 RS 232 TV 1001 Navigator User Manual 87 900 945 01 I 213 312 17 Technical Information N Read Write Datatype Description Admitted Values default 0 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 23 Window N 206 Bit Description 214 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Inlet Screen Installation Figure 24 Figure 25 Figure 26 TV 1001 Navigator User Manual 87 900 945 01 1 275 312 17 Technical Information 216 312 The inlet screens mod 969 9304 969 9316 and 969 9350 prevent the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure Figure 27 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 28 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Inform
23. the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump Interlock input signal to control the pump rotation With the supplied cover connector the interlock signal is connected to the 24 Vdc pin and the interlock signal to the GROUND pin Speed setting PWM input signal to set the pump speed The PWM signal characteristics must be the following frequency 100 Hz 20 amplitude 24 V max duty cycle range from 25 to 75 corresponding to an output frequency from 272 Hz to 633 Hz see the following diagram N I gt o c v 3 o 0 9 LL c e o Xx W Figure 14 The duty cycle percentage is referred to the low level portion of the PWM signal TV 1001 Navigator User Manual 87 900 945 01 I 257 312 17 Technical Information 258 312 Programmable analog signal this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the frequency see the following example diagram n gt oa O Frequency Hz Figure 15 Fault this open collector output signal is ON when a system fault condition is detected Programmable set point this open collector output signal is enabled when the reference quantity chose
24. the dedicated channels on the pump body in the second case an external optional fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 40 NW flange 246 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 1001 NAVIGATOR Figure 4 Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip micro computer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase out put converts the single phase AC mains supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the serial connection A Windows based software is available optional TV 1001 Navigator User Manual 87 900 945 01
25. 1 241 312 Rotational speed 17 Technical Information Technical Specification Tab 3 Pumping speed with inlet screen Nz He Ho Compression ratio Nz He Ho Base pressure with recommended forepump Inlet flange Start up time Recommended forepump Operating position Operating ambient temperature Bakeout temperature Vibration level displacement Lubricant Cooling requirements Coolant water Noise level 248 312 ISO 160 CFF 10 ISO 200 ISO 250 790 I s 950 l s 1050 l s 820 I s 8 0 l s 900 l s 860 l s 900 I s 920 1 s gt 1 x 109 1 x 103 9 x 107 1 x 107 2x106 1x106 lt 1 x 10 10 mbar lt 1 x 10 10 Torr According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump ISO 160 ISO 200 ISO 250 CF 10 38000 rpm lt 4 minutes DS 402 TriScroll 300 Any 5 C to 35 C 120 C at inlet flange max CF flange 80 C at inlet flange max ISO flange lt 0 01 um at inlet flange permanent lubrication Forced air or water Minimum flow 200 I7h 0 89 GPM Temperature 10 C to 20 C Pressure 3 to 5 bar 45 to 75 psi lt 45 dB A at 1 meter TV 1001 Navigator User Manual 87 900 945 01 1 Power supply Input voltage Input freg Max input power Stand by power
26. 1 byte 1 byte 1 byte 1 byte Value 0x6 0x15 0x32 0x33 0x34 0x35 Description After a read instruction of a logic window After a read instruction of a numeric window After a read instruction of an alphanumeric window The command execution has been successfully completed The command execution has been failed The specified window in the command is not a valid window The data type specified in the command Logic Numeric or Alphanumeric is not accorded with the specified Window The value expressed during a write command is out of the range value of the specified window The specified window is Read Only or temporarily disabled for example vou can t write the Soft Start when the Pump is running TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Examples Command START Source PC Destination Controller a o o aaa ale fale Source Controller Destination PC fa wo oe os sls Command STOP Source PC Destination Controller fa wo walla s 0 Jela Source Controller Destination PC e o w o TV 1001 Navigator User Manual 87 900 945 01 1 269 312 17 Technical Information 210 312 Command SOFT START ON Source PC Destination Controller a o ala ofa Ta s ala on Source Controller Destination PC oa o o Je Command SOFT START OFF Source PC Destination Control
27. Max operating power Technical Information 17 100 240 Vac 50 60 Hz 600 VA 30 to 35 W 450 W with water cooling 300 W with air cooling Compliance with UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 EN 1012 2 With European or NEMA plug 3 meters long optional RS232 cable with a 9 pin D type male connector and a 9 pin D type kit female connector and Navigator software optional Installation category Pollution degree 2 Weight kg Ibs ISO 160 flange ISO 200 flange ISO 250 flange CF 10 flange 19 41 8 19 4 43 21 2 46 6 25 5 54 2 When the TV 1001 Navigator has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature TV 1001 Navigator User Manual 87 900 945 01 I 249 312 17 Technical Information TV 1001 Navigator Outline The following figures show the TV 1001 Navigator outlines dimensions are in mm inches ELEC CONNECTOR Y
28. OM gt Command 0x80 to read the window 0x81 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 6 Data type Fieldlengh Valid characters Logic L 1 0 OFF V ON ss Numeric N 6 i og A ave 9 right justified with 0 Alphanumeric A 10 from blank to ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type TV 1001 Navigator User Manual 87 900 945 01 I 267 312 17 Technical Information 268 312 When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Tab 7 Type Logic Numeric Alphanumeric ACK NACK Unknown Window Data Type Error Out of Range Win Disabled Length 1 byte 6 bytes 10 bytes
29. a fecha de env o al cliente ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent TV 1001 Navigator User Manual 87 900 945 01 1 61 312 4 Manual de istrucciones Preparacion para la instalacion ATENCI N 62 312 El TV 1001 Navigator se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 1001 Navigator y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada Figura 1 El TV 1001 Navigator no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Instalacion No
30. abel provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 ets Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original
31. ando su base ATENCI N El TV 1001 Navigator pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a El TV 1001 Navigator tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el alslamiento del dispositivo conectado al TV 1001 Navigator mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 65 312 4 Manual de istrucciones Uso ADVERTENCIA ATENCI N ADVERTENCIA 66 312 En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 120 C No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbo bomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesio
32. ation 17 The following figure shows the overall flange di mensions with the protection screen fitted on pump with ISO flange and pump with CFF flange Figure 29 5 Lo Figure 30 The following figure shows the ISO 250 pump flange section with the protection screen fitted on it As you can see the overall dimensions do not change as the inlet screen remains inside the pump profile TV 1001 Navigator User Manual 87 900 945 01 1 277 312 17 Technical Information Figure 31 Heater Band Installation 278 312 Figure 32 The heater band model 969 9317 and 969 9327 can be used to heat the pump casing when a bakeout is needed The heater band is available only for the pump with ConF lat inlet flange model 969 8932 It is applied to the upper part of the pump casing as Shown in the figure and heats it to a temperature of about 80 C The heater band must be mounted such that there is perfect thermal contact with the pump wall to obtain fast and efficient heating TV 1001 Navigato
33. ation 291 Purge Valve Installation 292 Serial Cable Installation 293 TV 1001 Controller Installation 294 Pump Used with Corrosive Gases 302 Pump Used in Presence of Magnetic Fields 304 Accessories and Spare Parts 305 TV 1001 Navigator User Manual 87 900 945 01 1 13 312 Contents 14 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 2090 e 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 58 Almacenamiento 61 Preparaci n para la Instalaci n 62 Instalaci n 63 Fijaci n de la bomba 64 Usob66 Encendido y Uso del TV 1001 Navigator 67 Parada del TV 1001 Navigator 68 Parada de Emergencia 68 Mantenimiento 69 Eliminacion 70 Traduccion de las instrucciones originales Agilent Technologies 57 312 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa especifica de sus rotores En el caso de un dano del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energia de rotaci n podria ser liberada FAV ANA Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el p
34. be made only with the bolt in the lower side Attach the units and tighten each one in turn Re peat the sequential tightening until the flange faces meet 298 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Connection Configurations WITH ISO CLAMP BASEPLATE WITH TAPPED HOLE Figure 55 TV 1001 Navigator User Manual 87 900 945 01 1 299 312 17 Technical Information Connection B Fore Vacuum Pump A flange KF 40 NW is available to connect the Turbo V1001 pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V1001 pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump In order to prevent oil back streaming Connection C Electrical
35. ble Installation 293 TV 1001 Controller Installation 294 Bottom Mounting 294 Side Mounting 296 Connection A High Vacuum Flange 298 Connection B Fore Vacuum Pump 300 Connection C Electrical 300 Pump Used with Corrosive Gases 302 Pump Used in Presence of Magnetic Fields 304 Accessories and Spare Parts 305 240 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Description of the TV 1001 Navigator The TV 1001 Navigator pumping system consists of a pump with a dedicated controller fixed to it The system is available in six models that differ in the high vacuum flange The TV 1001 Navigator kit six models are Model 969 8838 with ISO 200 high vacuum flange Model 969 8844 with ISO 200 F high vacuum flange Model 969 8839 with ConFlat 10 external di ameter high vacuum flange Model 969 8840 with ISO 160 high vacuum flange Model 969 8841 with ISO 250 high vacuum flange Model 969 8845 with ISO 250 F high vacuum flange TV 1001 Navigator User Manual 87 900 945 01 1 241 312 17 Technical Information The following figure shows the six models
36. ci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TV 1001 Navigator User Manual 87 900 945 01 1 59 312 4 Manual de istrucciones Este manual utiliza las convenciones siguientes Oe lO Los mensajes de atenci n se visualizan antes de los procedimientos que al no respetarse podrian provocar da os al equipo LON MATA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n especifica que al no realizarse correctamente podria provocar graves lesiones personales Las notas contienen informacion importante extraida del texto 60 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre O y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de l
37. eipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely CZ J Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc tipo Agilent Technologies e e r 9 6 de 00 e e e e o P Agil
38. ent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 1 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies Is not responsible for returning customer provided packaging or containers s Clearly label package with RA number Using the shipping l
39. exo Technical Information El LED verde LD1 situado en el panel de la base del TV 1001 indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba esta en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema esta en estado de rampa o de frenado o de stop o de Waiting for interlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error TV 1001 Navigator User Manual 87 900 945 01 1 67 312 4 Manual de istrucciones Parada del TV 1001 Navigator ADVERTENCIA Para parar el TV 1001 Navigator nte con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provocar graves da os o incluso resultar fatales Desconectar el cable de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad requerimientos de las normas CE Parada de Emergencia 68 312 Para detener en condiciones de emerge
40. f life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations TV 1001 Navigator User Manual 87 900 945 01 1 229 312 16 Instructions for Use Preparation for installation 230 312 The TV 1001 Navigator is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Figure 1 Normal exposure to the environment cannot damage the TV 1001 Navigator Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected
41. for more infoCLICK HERE deal QO vacuum products www idealvac com 87 900 945 01 1 04 2011 TV 1001 Navigator Pump models 969 8931 969 8932 969 8934 969 8946 969 8933 969 8947 Kit models 969 8838 969 8839 969 8841 969 8844 969 8840 969 8845 Controller models 969 8978 Manual de Instrucciones User Manual 2 Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 945 01 I Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages
42. gar for Molekylara turbopumpar 114 Allman information 115 F rvaring 117 F rberedelser f r installation 118 Installation 119 Fasts ttning av pump 120 Anv ndning 122 Underh ll 125 Bortskaffning 126 Instruksjon Manual 127 Sikkerhetsanvisninger for Turbomolekyl re pumper 128 Generell informasjon 129 TV 1001 Navigator User Manual 87 900 945 01 1 Contents Lagring 131 Klargjgre til installasjon 132 Installasjon 133 Festing av pumpen 134 Bruk 136 Vedlikehold 139 Eliminering 140 10 Ohjek sikirja 141 Turbomolekyylipumppujen Turvaohjeet 142 Yleisi tietoja 143 Varastointi 145 Valmistelut asennusta varten146 Asennus 147 Pumpun kinnitys148 K ytt 150 Huolto 153 H vitt minen 154 11 Felhaszn l i K zik nyv 155 Biztons gi tmutat Turb molekul ris szivatty khoz 156 ltal nos inform ic 157 T rol s 159 El k sz t s telep t sre 160 TV 1001 Navigator User Manual 87 900 945 01 1 9 312 Contents 10 312 12 13 Telep t s 161 A szivatty r gz t se 162 Hasznalat 164 Karbantart s 167 Megsemmis t s 168 Podrecznik Instrukcji 169 Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 170 Informacje ogolne 1 1 Magazynowanie 173 Przygotowanie do instalacji 1 4 Instalacja 1 5 Mocowanie pompy 176 Uzytkowanie 1 8 Konserwacja 181 Przetworstwo odpadow 182 N vod k Pou it 183 Bezpe nostn n vod pro Turbomolekul rn v vevy 184 V
43. ial cable must be installed when the TV 1001 Navigator or the optional vent valve have to be controlled by means of a remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the following figure Figure 51 TV 1001 Navigator User Manual 87 900 945 01 I 293 312 17 Technical Information TV 1001 Controller Installation The controller can be mounted in two position bottom mounting as per the complete system side mounting To install the controller execute the following procedures Bottom Mounting See the following figure 1 Turn the pump upside down 2 Place the three fixing blocks with the through holes toward the inside and fix them with the three M6 screws to the pump bottom 3 Place the controller on the blocks with the pump cable toward the pump body 4 Fix the controller to the blocks by means of the three socket head screws M5 5 Turn the pump again 6 Plug the line card and connect the pump cable to the pump 1 Connect the mating connector with the jumper on the interlock signal to start the pump 294 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 1001 NAVIGATOR
44. inal repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Aust
45. ing procedures Make all electrical and pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become dam aged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Information When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 Switching on and Use of TV 1001 Navigator To switch on the TV 1001 Navigator it is necessary to sup ply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump Soft Start mode is used to start the pump after it has stopped for a long time To start with the S
46. ingapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 901 945 01 1 Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Lein Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
47. kit for standard rack controller BB mini i 7 Cm So Vibration isolator FIO BBB Or aos Vet devic with adjustable delay time for standard rack come 9694881 Vent valve for standard rack controller 969 9843 A uh ae Purge valve with KFI6 ango geese E Purge valve with 7 16 flange BI Purge valve KFI6 M1220 SEM 888924 Purge valve MAZA 88 8242 A Forepump DS 402 with 1 ph 3 ph universal motor 949 9382 Tirol Dry Vacuum Pump PTS 300 single phase universal motor O PTSOSONTUN Triscroll Dry Vacuum Pump PTS 300 3 phase universal motor PTSO3003UNIV TV 1001 Navigator User Manual 87 900 945 01 1 305 312 17 Technical Information Accessories and Spare Parts 306 312 TV 1001 Navigator User Manual 87 900 945 01 1 a Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon rec
48. l 87 900 945 01 I 243 312 17 Technical Information The following figure shows the six models Model 969 8934 Model 969 8947 Figure 2 244 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The controller model 969 8978 is also available as an option Figure 3 Controller model 969 8978 Pump Description The pump consists of a high frequency motor driving a turbine fitted with 8 bladed stages and 4 Macroto
49. ler fa o ajajaja s s fale Source Controller Destination PC m o o Ja TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Start Stop in remote mode the window is a read only Start 1 Stop 0 Remote default or Serial configuration Remote 1 Serial 0 default 1 Soft Start write only in Stop condition 0 Frequency 1 Current 2 Time default 0 Set Point threshold expressed in Hz mA or s Set Point delay time between the pump start and the set point check seconds 0 to 99999 default 0 Set Point signal activation type the signal can be high level active or low level active 0 high level active 1 low level active default 0 Set point hysteresis in of threshold 0 to 100 default 2 Window Meanings Tab 8 N Read Write Datatype 000 R W L 008 R W L 100 R W L 101 R W N 102 R W N 103 R W N 104 R W L 105 R W N 106 R W L 107 R W L Active Stop TV 1001 Navigator User Manual 87 900 945 01 1 write only in stop 271 312 17 Technical Information R W N Read Write Datatype Description Baud rate Admitted Values 600 0 1200 1 2400 2 4800 3 9600 4 default 4 Pump life cycle time cycle number reset Interlock type default 1 Analog output type output voltage signal proportional to frequency or power Impulse 0 Continuous 1 0 frequency 1 power
50. ller 3 Connect the fan supply to the P4 connector of the controller n FAN CONNECTOR Figure 35 TV 1001 Navigator User Manual 87 900 945 01 1 281 312 17 Technical Information TV 1001 Pump with Standard Rack ontroller When the TV 1001 pumps are used with the standard rack controller it is necessary to utilize the air cooling kit model 969 9315 Figure 36 Fan specification air flow 55 l s 120 CFM input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 127 x 127 mm 5 x 5 inches To fix the fan to the pump position it ensuring that the holes in
51. lo v lido s lo para los pa ses miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta 70 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 226 General Information 227 Storage 229 Preparation for installation 230 Installation 231 Pump fixing 232 Use234 Switching on and Use of TV 1001 Navigator 235 TV 1001 Navigator Switching off 236 Emergency Stop 236 Maintenance 23 Disposal 238 Original Instructions s Agilent Technologies 225 312 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a
52. m unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the f
53. n frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz hysteresis 1 activation type high level TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 N A O Le gt gt Q da o dat E Oo U 500 Freguency Hz Figure 16 The set point output stays at 0 Vdc until the fre quency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency be comes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency threshold 643 Hz hysteresis 2 activation type high level delay time O second The Navigator Software optional allows the oper ator to set all the programmable feature When no external input output device is available this connector must be clo
54. ncia el TV 1001 Navigator es necesario desconectar del controlador el cable de alimentaci n TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Mantenimiento ADVERTENCIA El TV 1001 Navigator no necesita ning n mantenimiento Cualquier operaci n deber ser realizada por personal autorizado Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent que permite obtener una bomba regenerada para sustituir la averiada Antes de enviar al fabricante una bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que la bomba se tenga que desguazar eliminarla respetando las normas nacionales espec ficas TV 1001 Navigator User Manual 87 900 945 01 1 69 312 4 Manual de istrucciones Eliminaci n Significado del logotipo WEEE presente en las etiquetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbo
55. nes a las personas Evitense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el anexo Technical Information Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Encendido y Uso del TV 1001 Navigator Para encender el TV 1001 Navigator basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce automaticamente la presencia de las senales de interbloqueo y de arranque y activa la bomba La modalidad Soft Start esta prevista para poner en marcha la bomba luego de un periodo prolongado de inactividad Para utilizar una puesta en marcha Soft Start activa es necesario habilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 485 COMMUNICATION DESCRIPTION en el an
56. nstall the vent device unscrew and remov e the threaded plug see figure below Figure 47 Screw the flange mod 969 9108 on the pump tak ing care of the o ring right position 290 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Assemble the seal ring and lock the vent device in position using the KF klamp KF klamp Figure 48 Vibration Isolator Installation Three vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The three model part numbers are the following model 969 9345 for ISO 160 flange model 969 9346 for ISO 200 flange model 969 9336 for CFF 10 flange They typically reduce the vibration transmitted from the TV 1001 Navigator to the system by a factor of 20 Please refer to the relevant instruction manual TV 1001 Navigator User Manual 87 900 945 01 1 291 312 17 Technical Information Purge Valve Installation 292 312 A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure Figure 49 and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure Figure 50 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Serial Cable Installation The supplied ser
57. of 15 m h 11 CFM allows to achieve a high vacuum pressure in the 107 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo V pump and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Figure 57 Purge layout 1 Purge gas line eee E 2 Pressure regulator 3 Bas purgevve 4 Gas purge port ee Forevacuum pump E RR E 7 Vent valve TV 1001 Navigator User Manual 87 900 945 01 I 303 312 17 Technical Information Pump Used in Presence of Magnetic Fields 304 312 Magnetic fields induce
58. oft Start function on activate the mode in the software see paragraph RS 232 485 COMMUNICATION DESCRIPTION in the Technical Information appendix The green LED located on the TV 1001 Navigator base front panel indicates with its flashing frequency the system operating conditions with no flashing the pump is normally rotating slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition TV 1001 Navigator User Manual 87 900 945 01 1 235 312 16 Instructions for Use TV 1001 Navigator Switching off To switch off the TV 1001 Navigator it is necessary to re move the mains The integrated controller immediately stops the pump WARNING The Turbo V controller must be powered with 3 wire power cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable Emergency Stop To immediately stop the TV 1001 Navigator in an emergency condition it is necessary to remove the supply cable from the mains plug 236 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions
59. ows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torque Tab 1 150160 Cl Lu MO ISO 250 6 35 Nm The following table shows for each ISO F flange the necessary number of screws and the relevant fixing torque Tab 2 FLANGE N FIXING TORQUE l ISO 250 F 12 5 Nm The class of the steel screws for F flange must be gt 8 8 232 312 TV 1001 Navigator User Manual 87 900 945 01 I Instructions for Use 16 The turbopump with ConF lat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TV 1001 Navigator ca be installed in any position The TV 1001 Navigator cannot be fixed by means of its base CAUTION The TV 1001 Navigator belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 1001 Navigator has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 1001 Navigator is adequate even in the case of single fault as per directive EN 61010 1 TV 1001 Navigator User Manual 87 900 945 01 1 233 312 16 Instructions for Use Use 234 312 This paragraph details the fundamental operat
60. r User Manual 87 900 945 01 1 Technical Information 17 Figure 33 Switch on the heater while the turbopump is in operation In the event of turbopump overheat the pump will be automatically cut out by the thermistor sensor The turbopump must be baked only when operat ing with an inlet pressure less than 104 mbar and with water cooling CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C TV 1001 Navigator User Manual 87 900 945 01 1 279 312 17 Technical Information Air Cooling Kit Installation TV 1001 with Navigator Controller An air cooling kit mod 969 9297 is available to improve the TV 1001 cooling during heavy operational conditions optional Figure 34 Fan specifications air flow 200m3 h input voltage 24 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 4 7 W 280 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 The fan bracket is shaped so that it can be mount ed close to the pump To fix the fan to the TV 1001 case execute the fol lowing procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body between the pump and the contro
61. resente manual 58 312 TV 1001 Navigator User Manual 87 900 945 01 1 Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informacion suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El TV 1001 Navigator es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vac o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 38000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El TV 1001 Navigator no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Asimismo el TV 1001 Navigator posee conectores auxiliares con los que se puede alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante l nea serial RS 232 RS 485 A continua
62. ria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 afte Agilent Technologies Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 S
63. rr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium al loy machined from a single block Proceeding from the high vacuum to the for vacu um region the turbine stages sequence is Ist stage with a blade angle of 40 2nd stage with a blade angle of 34 93rd stage with a blade angle of 28 4th and 5th stages with a blade angle of 24 6th stage with a blade angle of 20 th and 8th stages with a blade angle of 16 The Macrotorr stages are in the form of four discs TV 1001 Navigator User Manual 87 900 945 01 1 245 312 17 Technical Information The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately po sitioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy During normal operation the motor is fed with a voltage of 54 Vac three phase at 715 Hz To re duce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio The pump can be water cooled or air cooled in the first case the customer can use
64. sed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input see the following figure TV 1001 Navigator User Manual 87 900 945 01 1 259 312 17 Technical Information mm 0 ya Figure 17 How to Connect the Open Collector Inputs of the Controller Here below there are the typical connections of the open collector input of TV551 701 Navigator to an external system Two cases are considered l the customer supplies the 24 Vdc B the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open col lector pin are available 260 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Customer s device Controller 24 Vdc J PNP Customer s device Controller Figure 18 Case 1 TV 1001 Navigator User Manual 87 900 945 01 1 261 312 17 Technical Information Customers device Customers device 24 Vdc Controller 24 Vdc Controller 5 Vdc Figure 19 Case 2 with relay utilisation 262 312 TV 1001 Navigator User Manual 87 900 945 01 1 Customer s device Customer s device Technical Information 17 24 Vdc Controller
65. t the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale IN C i L NI A IN Y f X i KN IN 73 po L ZN N 238 312 TV 1001 Navigator User Manual 87 900 945 01 1 TV 1001 Navigator User Manual 17 Technical Information Description of the TV 1001 Navigator 241 Pump Description 245 Controller Description 247 Technical Specification 248 TV 1001 Navigator Outline 250 Interconnections 254 P3 Vent 255 P4 External Fan 255 J1 In Out 256 Signal Description 257 HOW to Connect the Open Collector Inputs of the Controller 260 How to Connect the Outputs of the Controller 264 J2 Serial 265 RS 232 RS 485 Communication Description 266 Communication Format 266 Communication Protocol 266 Window Meanings 271 Inlet Screen Installation 275 Heater Band Installation 278 Original Instructions 5 Agilent Technologies 25 312 17 Technical Information Air Cooling Kit Installation 280 TV 1001 with Navigator Controller 280 TV 1001 Pump with Standard Rack Controller 282 Water Cooling Kit Installation 284 Vent Accessories 287 TV 1001 Navigator Controller Compatible Vent Valve mod 969 9834 287 Standard Rack Controller Compatible Vent Valve mod 969 9843 289 Vent Device mod 969 9831 290 Vibration Isolator Installation 291 Purge Valve Installation 292 Serial Ca
66. ter connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information TV 1001 Navigator User Manual 87 900 945 01 1 221 312 16 Instructions for Use This manual uses the following standard protocol CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text 228 312 TV 1001 Navigator User Manual 87 900 945 01 1 Instructions for Use 16 Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range O to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If for any reason the shel
67. the plate line up with those in the pump base Insert the respective washers and screws and tighten with a screwdriver 282 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 Connect the fan to the controller Figure 37 TV 1001 Navigator User Manual 87 900 945 01 1 283 312 17 Technical Information Water Cooling Kit Installation Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9337 metal lic model and 969 9347 plastic model Figure 38 Model 969 9337 Figure 39 Model 969 9347 284 312 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 CAUTION The items of the plastic model kit must be assem bled as shown in the following figure
68. to about 220 min by means of a setting of the Navigator software optional TV 1001 Navigator User Manual 87 900 945 01 1 287 312 17 Technical Information 288 312 To install the vent valve unscrew the threaded plug see figure below Figure 43 Then screw the vent valve into the pump and tight en it using a 16 mm hexagonal spanner with a torque of 2 5 Nm Figure 44 TV 1001 Navigator User Manual 87 900 945 01 1 Technical Information 17 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suita ble connector on the controller see the preceding paragraph INTERCONNECTIONS Standard Rack Controller Compatible Vent Valve mod 969 9843 Figure 45 This vent valve has a fixed delay time of about 5 sec This value can be used only with rack controller To install the vent valve execute the same steps as the vent valve model 969 9834 see the above paragraph TV 1001 Navigator User Manual 87 900 945 01 1 289 312 17 Technical Information Vent Device mod 969 9831 Figure 46 The vent device has adjustable delay time up to 36 min This value can be used only with rack controller To i
69. ts 6 312 Entsorgung 42 Mode d emploi 43 Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 45 Stockage 47 Preparation pour l installation 48 Installation 49 Fixation de la pompe 50 Utilisation 52 Entretien 59 Mise au rebut 56 Manual de istrucciones 57 Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 59 Almacenamiento 61 Preparaci n para la instalaci n 62 Instalaci n 63 Fijaci n de la bomba 64 Uso 66 Mantenimiento 69 Eliminaci n 70 TV 1001 Navigator User Manual 87 900 945 01 1 Contents b Manual de Istru es 71 Indica es de Seguranca para Bombas Turbomoleculares 2 Informa es gerais 73 Armazenagem 75 Prepara o para a instala o 6 Instala o 77 Fixa o da bomba 78 Utiliza o 80 Manuten o 83 Elimina o 84 6 Bedrijfshandleiding 85 Veiligheidsinstructies voor Turbomoleculaire pompen 86 Algemene informatie 87 Opslag 89 Uitpakken 90 Installatie 91 Bevestiging van de pomp 92 Gebruik 94 Onderhoud 97 Afvalverwerking 98 1 Istruktionsbog 99 Sikkerhedsanvisninger for Molekylere turbopumper 100 TV 1001 Navigator User Manual 87 900 945 01 1 7 312 Contents 8 312 Generel information 101 Opbevaring 103 Forberedelser for installation 104 Installation 105 Fastgorelse af pumpe 106 Anvendelse 108 Nodstop 110 Vedligeholdelse 111 Bortskaffelse 112 Bruksanvisning 113 Sakerhetsanvisnin

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