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Ion Pumps Control Unit

1. Controller Outline 27135 87 900 124 01 B Remote I O Connector Pinout a 5 gt REMOTE HI CURRENT STATUS N O 1 1 REMOTE HV2 CURRENT STATUS N 0 RESERVED 1 1 REMOTE HV1 ON OFF STATUS N 0 HH REMOTE HV2 ON OFF STATUS N O RESERVED _ REMOTE FAULT STATUS N C REMOTE HV1 ON OFF COMMAND EXT 24V REMOTE HV2 ON OFF COMMAND EXT 24V RESERVED t REMOTE HV1 ANALOG RECORD QUTPUT O 5V REMOTE HV2 ANALOG RECORD OUTPUT 0 5v HH RESERVED 1 1 REMOTE HV1 CURRENT STATUS COM REMOTE HV2 CURRENT STATUS COM RESERVED REMOTE HV1 ON OFF STATUS COM 1 REMOTE HV2 ON OFF STATUS COM RESERVED REMOTE FAULT STATUS COM 1777 ddddddddd rr RESERVED i ibs eon 6 ii Remote 1 0 Pinout Rear Panel D Shell Female 25P The controller is shipped with a DB25 mating male connector with shielded metal or plastic cover In case there is the need to use the Remote Interlock function or to switch On and Off the HV on the 2 pumps by Remote follow the indications given in the above input commands connection pin out drawing Input Commands Connection Input signals Optically Insulated External Insulate
2. 4 where 0 only Remarks no channel reports 1 reports only channel 1 2 reports only channel 2 4 reports all channels 87 900 124 01 B Report Type Read RT Enter Request Report in NON Continuous Report Mode RR Enter Enable Disable Receiving Input ECO Access Level 1 Required WR space Y space X Enter WR Write Y 29 parameter number X 0 for No input ECO 1 for input ECO default value Enable Disable Remark Line Reporting Access Level 1 Required WR space Y space X Enter WR Write Y 30 parameter number X 0 for No remark lines except the first three 1 for Remark Line default value Enable Disable Value in Floating Point Report Mode Access Level 1 Required WR space Y space X Enter WR Write Y 31 parameter number X 0 for Standard Report Mode default value 1 for Floating Point Report Mode About Report The continuous report sent by the IPCU protocol communication is structured as follow At each main power on start up six remarking lines are sent The first line sent is the firmware release for instance REL 20051117 ICPU The second line is the notification that the EEPROM s parameter are wrote into RAM EVT LOAD EEPROM PARAMETERS INTO RAM he third line is the notification that the calibration of the Analog to Digital Convert used for the measurement of output high voltage and current are done EVT ADC C
3. In 2 3 HV AN HV 1 2 blinkend Fehlerbedingung 1x Blinken alle 4 Sek HVKabelverriegelung 2x Blinken alle 4 Sek Fernverriegelung 3x Blinken alle 4 Sek HV Uberspannung bei diesem Fehler wird die HV nicht abgeschaltet 4x Blinken alle 4 Sek Fehler im ADC 5x Blinken alle 4 Sek Uberstrom auf HV Kurzschluss 6x Blinken alle 4 Sek der Schalter Local Remote wurde bei HV AN bewegt 7x Blinken alle 4 Sek Uberhitzung in der Einheit 8x Blinken alle 4 Sek Uberstrom in Protect I 8 mA f r den 40W Kanal und 1 gt 16 mA f r den 80W Kanal 9x Blinken alle 4 Sek HV Unterspannung Local Remote I O werden der Betriebsart Fehlerbedingungen durch Schalten des betreffenden Kanals auf dem vorderen Bedienfeld in OFF 0 zur ckgesetzt In der seriellen Betriebsart werden Fehlerbedingungen durch bersenden des Befehls FOn vom PC zur ckgesetzt ANMERKUNG Wenn eine der folgenden Bedingungen auftritt w hrend die Hochspannung des Kanals AN ist wird der Ausgang dieses Kanals sofort auf AUS gesetzt Die LED auf dem vorderen Bedienfeld zeigt die Fehler bedingung an und Fehlerinformationen werden zum seriellen Ausgang gesendet Protect Eingriff I gt 8 mA f r den 40W Kanal und 1 gt 16 mA f r den 80W Kanal 8x Blinken der ED HV Kabelverriegelung 1x Blinken der LED Fernverriegelung 2x Blinken der LED Fehler in der HV Erzeugung 4x Blinken der LED Ausgangskurzschluss 5x Blinken der LED
4. UTILISATION Dans ce paragraphe sont report es les principales proc dures op rationnelles Pour de plus amples d tails et pour les informations inh rentes aux connexions facultatives se r f rer au paragraphe UTILISATION de l Annexe Informations Techniques Avant d actionner le contr leur effectuer toutes les connexions lectriques ainsi que vers la pompe et lire le Manuel d Instructions de la pompe branch e mum Afin d viter des l sions personnelles ou des endommagements l appareillage si la pompe est plac e sur une table v rifier que cette derni re soit stable Ne pas actionner la pompe au cas o la relative fiche est d branch e du syst me ou bien obstru e 87 900 124 01 B MODE D EMPLOI Commandes et indicateurs du panneau NOTE ant rieur de l unit contr leur pour pompes ioniques La fonctionnalit et la signification de certaines indi commandes et indicateurs changent selon la position E alles Tableau suivants indiquent Wes de l interrupteur HV ON OFF Le tableau suivant commandes et les indicateurs du panneau ant rieur du 2 Hen montre toutes les fonctions et toutes ignifications contr leur avec les relatives descriptions et fonctions CAO BE eS E des signaux SERIAL LOCAL REM I O ION PUMP Commandes et indicateurs du panneau ant rieur de l unit contr leur pour pompes ioniqu
5. Verkaufsbedingungen gepr ft hat 87 900 124 01 B INDICATIONS GENERALES Cet appareillage a t congu en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Varian avant l utilisation de l appareillage Varian d cline toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Dans l Annexe Informations techniques sont fournis de plus amples d tails Le present manuel conventionnels suivants utilise les signes SR Les messages de danger attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions personnelles HS ATTENTION Les messages d attention sont affich s avant les proc dures dont le non respect pourrait endommager s rieusement l appareillage NOTES Les notes contiennent des renseignements importants extrapol s du texte DESCRIPTION DU CONTROLEUR Contr leur de Varian pour pompes ioniques en mesure d acti
6. Av Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel 54 1 783 5306 Fax 54 1 786 5172 Benelux Varian Vacuum Technologies Rijksstraatweg 269 H 3956 CP Leersum The Netherlands Tel 31 343 469910 Fax 31 343 469961 Brazil Varian Industria e Comercio Ltda Avenida Dr Cardoso de Mello 1644 Vila Olimpia Sao Paulo 04548 005 Brazil Tel 55 11 3845 0444 Fax 55 11 3845 9350 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 100031 P R China Tel 86 10 6641 1530 Fax 86 10 6641 1534 France and Wallonie Varian s a 7 avenue des Tropiques ZA de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 13 Fax 33 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 07 03 Sales and Service Offices India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 F
7. DSR DATA SET READY RTS_REQUEST TO SEND TS CLEAR TO SEND T USED 87 900 124 01 B TECHNICAL INFORMATION D Type 9 Pin No Abbreviation Full Name Pin 3 TXD Transmit Data Pin 2 RXD Receive Data Pin 7 RTS Request To Send Pin 8 CTS Clear To Send Pin 6 DSR Data Set Ready Pin 5 SG Signal Ground Pin 1 DCD Carrier Detect Pin 4 DTR Data Terminal Ready Pin 9 RI Ring Indicator Table 1 D Type 9 Pin FEMALE Connector PIN FUNCTIONS Abbreviation Full Name Function TXD Transmit Data DTE Serial Data Output TXD IPCU Serial Data Input RXD Receive Data DTE Serial Data Input RXD IPCU Serial Data Output CTS Clear to Send This line indicates that the Modem Controller is ready to exchange data DCD Data Carrier When the Modem IPCU detects a Carrier from the other end of the line this Detect line becomes active DSR Data Set This tells the DTE that the Modem IPCU is ready to establish a link Ready DTR Data Terminal This is the opposite of DSR This tells the Modem Controller that the DTE is Ready ready to link RTS Request To This line informs the Modem IPCU is ready to exchange data Send RI Ring Indicator Goes active when Modem detects a ringing signal from the PSTN Not used on the Controller RTS CTS are jumpered together on the Controller connector and DTR is jumpered to DSR DCD on IPCU connector The DTE sees the I
8. Umschalten des Local Remote I O Schalters bei HV AN 6x Blinken der LED berhitzung in der Einheit 7x Blinken der LED 12 35 GEBRAUCHSANLEITUNG Auf dem Remote Stecker auf der R ckseite Fehler Ausgabe ffnerkontakt Leerlauf Der Kontakt ist bei Fehlerbedingung offen Relais aus Der Kontakt ist bei Fehlerbedingung geschlossen Relais an HV 1 2 Ausgabe Schlie erkontakt Leerlauf Der Kontakt ist offen wenn HV in AUS Relais aus Der Kontakt ist geschlossen wenn HV in AN Relais an HV 1 2 Ausgabe Stromeinstellpunkt Schlie erkontakt Leerlauf Der Kontakt ist offen wenn der Ausgangsstrom unter dem Stromeinstellpunkt ist Relais aus Der Kontakt ist geschlossen wenn der Ausgangsstrom ber dem Stromeinstellpunkt ist Relais an Ausgangsrelais 2A Q 125V min Last 10mW 100mV Q 1mA Prellzeit SchlieBer 1msec Offner 3msec ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die
9. Cable interlocks are closed 5 HV2LED It is On when the controller is supplying the HV to the pump 2 It is flashing in case of Fault see paragraph Technical Information for details SERIAL LOCAL REM It allows to select the operating mode YO SWITCH SERIAL all the commands are given through the serial line LOCAL REM I O all the commands are given through the unit front panel or through the 25 pin REMOTE connector on the rear panel 21135 87 900 124 01 B INSTRUCTIONS FOR USE lon Pumps C U Rear Panel The controller rear panel controls and connections are shown in the following figure For detailed information about the connections see the appendix Technical Information 1 O O H HY OUTPUT BATTERY LINE INPUT FUSE HV1 V2 ATA CABLE INTERLOCK SERIAL REMOTE I O lon Pumps C U Rear Panel REF SIGNAL DESCRIPTION HV1 Connector HV Connector for Cable to lon Pump 1 HV2 Connector HV Connector for Cable to lon Pump 2 LINE INPUT Module containing the Line Input cable plug and the Line Switch 6 REMOTE Connector _ DB25 connector for the REMOTE I O connections 7 HViCabemteock 8 HV2Cablentedock 22135 87 900 124 01 B USAGE This paragraph gives a general information on the use of the controller For details refer to the Technical Information paragraph When the controller is p
10. HV Wenn blinkend liegt ein Fehler vor Einzelheiten finden sich im Anhang Technische Informationen 4 HV2ON OFF Wenn auf ON l wird die HV f r die Pumpe 2 geschaltet sofern der Kontroller auf SWITCH LOCAL REMOTE UO Betrieb gesetzt ist und die externen wie die HV Kabel Verriegelungen geschlossen sind 5 HV2LED Wenn an versorgt der Kontroller die Pumpe 2 mit HV Wenn blinkend liegt ein Fehler vor Einzelheiten finden sich im Anhang Technische Informationen SERIAL LOCAL W hlt die Betriebsart REM 1 0 SWITCH SERIAL alle Befehle kommen ber die serielle Leitung LOCAL REM I O alle Befehle werden ber das vordere Bedienfeld der Einheit oder ber den 25 stiftigen Stecker REMOTE auf der R ckseite gegeben 9135 87 900 124 01 B GEBRAUCHSANLEITUNG R ckseite des lonenpumpen Kontrollers Die folgende Abbildung zeigt die Steuerungen und Stecker auf der R ckseite des lonenpumpen Kontrollers Einzelheiten ber die Anschl sse finden sich im Anhang Technische Informationen 1 O O HY OUTPUT BATTERY LINE INPUT FUSE HV1 V2 ATA CABLE INTERLOCK SERIAL REMOTE I O R ckseite des lonenpumpen Kontrollers REF SIGNAL BESCHREIBUNG HV1 Connector HV Stecker f r das Kabel zur lonenpumpe 1 HV2 Connector HV Stecker f r das Kabel zur lonenpumpe 2 LINE INPUT Modul mit dem Stecker f r das Netzkabel und dem
11. Remote I O mode the Reset of the Fault condition is accomplished by switching to Off 0 the front panel switch of the corresponding channel In Serial mode the Reset of the Fault condition is accomplished by sending the FOn command by the computer NOTE If one of the following conditions happens while the HV of the channel is On the output of the channel is immediately set to Off the LED on the front panel indicates the corresponding Fault condition and the Fault information is sent to the Serial output Protect intervention I 8mA for more than 2 seconds for 40 W output 16 mA for 80 W output 8 flashes of the LED HV Cable Interlock open 1 flash of the LED Remote Interlock open 2 flashes of the LED Internal error on the HV generation 4 flashes of the LED Output short circuit 5 flashes of the LED Change of the Local Remote I O switch status while HV was On 6 flashes of the LED Overtemperature inside the unit 7 flashes of the LED 24135 INSTRUCTIONS FOR USE On Remote connector on Rear Panel Fault output N C contact idle state The contact is Open in Fault condition relay Off The contact is Close in normal operation relay On HV 1 2 output N O contact idle state The contact is Open with HV in Off state relay Off The contact is Closed with HV in On state relay On HV 1 2 output current set point N O contact idle state The contact is Open with output current valu
12. Specifications Line Voltage 100 240 Vac 10 Frequency 50 60 Hz 5 Power 200 VA Operating conditions Internal use only Max Altitude 3000 m Max Line Voltage variation 10 Installation category Il Pollution degree 2 External Battery specifications 12 Vdc 24 Ah Lead Acid Type Output for the pumps With Line Supply Output Voltage each channel Output Current each channel Maximum Output Power channel 1 Maximum Output Power channel 2 Default value 5000V 1 5 settable from 3000 to 5000Vdc at steps of 50V by Serial Line command 30 MA 10 for 40 W output 60 mA 10 for 80 W output 40W 80W Current Recorder Output signal 0 to 5 Vdc logarithmic proportional to 1 0e 8 to 1 0e 1 A 1 recorder output for each pump Minimum recorder input impedance 1MOhm Precision Better than 196 Current Measurement Resolution 10nA under 100uA 1uA over 100uA Operating Temperature 5 C to 40 C Storage Temperature 20 C to 70 C Compliance to Norms Radio Interference EN55011 Class A Group 1 Harmonics EN61000 3 2 Flickers EN61000 3 3 ESD EN61000 4 2 Burst EN61000 4 4 Radiated RF Immunity EN61000 4 3 Surge EN61000 4 5 Conducted noise imm EN61000 4 6 Line supply interruptions EN61000 4 11 Safety EN61010 1 Line Cable 3 m long cable 3 wires no plug Line fuse Two T5A High Voltage Connection 2 High Voltage Fis
13. appareillage est en mesure de fournir les prestations suivantes 2 canaux HV ind pendants Tension de sortie maximum 5000 Vcc Puissance de sortie maximum 40W pour le canal 1 Puissance de sortie maximum 80W pour le canal 2 Courant de sortie maximum gt 30 mA condition de court circuit pour le canal 1 e Courant de sortie maximum gt 60 mA condition de court circuit pour le canal 2 e Modalit op rationnelle UO LOCALE A DISTANCE SERIELLE e Modalit op rationnelle START PROTECT MODALITE OPERATIONNELLE Connexion la ligne d alimentation Modalit op rationnelle I O LOCALE A DISTANCE NOTES Les 2 boutons HV dans le panneau ant rieur et les deux entr es HV On Off sur le connecteur DB25 A DISTANCE sur la panneau post rieur fonctionnent en s rie HV On Off du canal l interm diaire du panneau ant rieur 1 par Brancher une alimentation externe isole de 24 Vcc al Pin 8 et au pin 21 du connecteur I O distance et tourn e le bouton HV1 sur le panneau ant rieur HV On Off du canal 2 par l interm diaire du panneau ant rieur Brancher une alimentation externe isole de 24 Vcc au Pin 9 et au pin 22 du connecteur I O distance et tourner le bouton HV2 sur le panneau ant rieur Les interlock correspondants du c ble HV doivent tre ferm s HV On Off du canal distance 1 par l interm diaire du I O Avec le bouton HV1 sur le panneau ant rieur en position On Appliquer On o
14. following environmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing PREPARATION FOR INSTALLATION The controller is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the controller be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 10096 recyclable and complies with EEC Directive 85 399 Packing 87 900 124 01 B INSTALLATION Es The controller is equipped with a 3 wire power cord without plug Install the proper plug foreseen by the country where the controller will be used Note that the Yellow Green wire of the cable is the Ground connection of the controller Use this power cord and the installed plug in conjunction with a properly grounded power socket to avoid electrical shock Verify that the ground connections are properly connected High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the power cable gt CAUTION The controller can be used as a bench unit or as a rack module but it must be positioned so that free air can flow through the holes of the top and the side cover If the controller is used as a rack module it MUST be
15. inserted in a 4 unit height rack adapter chassis to avoid the controller to fall inside the rack The Controller front panel is not designed to support the unit weight Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk NOTE If the controller is installed on a rack remove the four feet and position it with at least 30 mm 1 2 inches of clearance on top and bottom ares The controller must be installed in a way that allows an easy interruption of the line voltage disconnection of the line plug or interruption on the rack general line switch 20135 INSTRUCTIONS FOR USE During operation the following environmental conditions must be respected e temperature from 5 C to 40 C e relative humidity 0 95 non condensing To connect the controller to the pump use the specific cables supplied See the appendix Technical Information for detailed information about the above mentioned and the other connections USE This paragraph describes the fundamental operating procedures Detailed information and operating procedures that involve optional connections or options are supplied in the paragraph USE of the appendix Technical Information Make all vacuum manifold and electrical connections and refer to the connected pump instruction manual prior to operating
16. off the external insulated 24 Vdc supply to pin 9 and pin 22 of the Remote I O connector When the HV is ON the corresponding HV LED on the front panel will be ON 23135 INSTRUCTIONS FOR USE NOTE If the connection between the IPCU and the pump is done by means of an HV Cable with Safety Interlock the cable must be connected to the pump F T and the small banana connector on the cable controller side must be inserted in the corresponding HV Cable Interlock plug on the unit rear panel in order to be able to switch on the HV If the connection is done with a single pole HV Cable without the Safety Interlock ensure that the jumper provided on the unit rear panel is inserted in the HV Cable Interlock plug SERIAL Operation NOTE The SERIAL is set in order to operate by connecting the controller to an external PC that uses the HYPER TERMINAL or equivalent program for example a proprietary user program running under Windows Operating System or other To operate in serial mode connect the serial port to the controller Serial connector on the rear panel run the Windows HYPER TERMINAL program on the PC with the following default settings COMI 9600 baud No parity 8 data bits 1 stop bit This way of operation will allow to verify the functionality of the unit in the SERIAL operating mode give the commands and get all the operating data NOTE In the serial operation depending
17. range the unit sends PARAMETER ERRORJ The unit receives continuously input characters from host but they are hold only if the panel switch Local Remote Serial is on Serial If this switch is on Local Remote and a character is received the unit sends Report TYPE 0 6 TECHNICAL INFORMATION LOCAL MODET to inform that a character is received but it is not possible to execute commands coming from the serial line When a command received is formally correct but can no be executed because the status of the unit does not allow this for instance a command A011 is sent but the cable interlock is not OK the unit sends COMMAND UNEXECUTABLEJ to inform that the request is not coherent with the status of the unit The User Operator Reports Type 0 2 4 and 6 display the continuous average value for the HV Channel Current Voltage and Power both in normal or scientific notation and the instantaneous measured or control values in the hexadecimal format Technical Reports Type 1 3 and 5 report the instantaneous measured values for the HV Channel Current Voltage and Power both in normal or scientific notation and the continuous average measured values in the hexadecimal format User Operator Report Type 0 and User Technician Report Type 1 Report Fields HVc HV Channel c 1 or 2 HV Channel Current in xA nA or uA nano Ampere or micro Ampere HV Channel Voltage in V Volts
18. rie au connecteur Serial du contr leur sur le panneau post rieur proc der au programme HYPER TERMINAL de Windows sur PC avec les saisies suivantes de d faut COMI 9600 baud No parity 8 data bits 1 stop bit Cette modalit op rationnelle permet de v rifier la fonctionnalit de l unit lancer les commandes et acc der toutes les donn es op rationnelles NOTE Durant le fonctionnement s riel selon le cadre o il est utilis le S O employ doit avoir une capacit real time temps r el Pour de plus amples d tails se r f rer au paragraphe Informations techniques Modalit op rationnelle START PROTECT Le contr leur peut fonctionner dans les deux modalit s suivantes Start et Protect En modalit Start les 2 canaux en sortie peuvent fournir toute la puissance n cessaire en sortie sans tenir compte des conditions de la pompe jusqu la condition de court circuit Cette modalit est utilis e pour actionner la pompe une pression lev e En Protect le contr leur limite le courant de sortie et d sactive l HV lorsque le courant d passe la valeur de seuil 8 mA pour le canal de 40W et 16 mA pour le canal de 80W pendant plus de 2 secondes 87 900 124 01 B MESSAGES D ERREUR Sur le panneau ant rieur Durant le fonctionnement du contr leur on a trouv une erreur les voyants LED haute tension sur le panneau ant rieur fourniront les indications n cessaires suiva
19. the controller To avoid injury to personnel and damage to the equipment if the pump is laying on a table make sure it is steady Never operate the pump if the pump inlet is not connected to the system or blanked off 87 900 124 01 B INSTRUCTIONS FOR USE lon Pumps C U Front Panel Controls and NOTE Indicators The figure and the table of the following page illustrate Some controls and indicators change their function and the Controller front panel controls and indicators with meaning according to the position of HV ON OFF relevant description and function switch The table describes all function and meaning SERIAL LOCAL REM UO ION PUMP lon Pumps C U Front Panel Controls and Indicators ner SIGNAL DESCRIPTION 1 MAINSONLED When On it means that the unit is connected to the Power Line and the Line Switch on the rear panel is in ON I position 2 HV1 ON OFF SWITCH When in ON I position it switches On the HV to the pump 1 if the controller is set for LOCAL REMOTE UO operation and the external and HV Cable interlocks are closed 3 HV1LED It is On when the controller is supplying the HV to the pump 1 It is flashing in case of Fault see paragraph Technical Information for details 4 HV2 ON OFF SWITCH When in ON I position it switches On the HV to the pump 2 if the controller is set for LOCAL REMOTE UO operation and the external and HV
20. to grant access level 1 parameter n type OE 0V 0E 0V 0E 0V E 0V 0E 0V E 0V E 0V cC 0E 0V e E 0V RO F 0000 F 0000 F 0000 F 0000 F 0000 F 0000 F 0000 F 0000 F 0000 31 to 1 E 0000 E 0000 E 0000 E 0000 E 0000 E 0000 E 0000 E 0000 E 0000 35 35 TECHNICAL INFORMATION Cleaning For safety reasons before cleaning the controller Turn the controller off disconnect the controller power plug from the electrical outlet disconnect all cables If the exterior of the controller becomes dirty use a dry soft cloth The internal cleaning must be done only by Varian operator 87 900 124 01 B a VARIAN Ce Request for Return Ne 9001 1 A Return Authorization Number RA WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian l
21. 0 1 O Start default 1 Protect 0x20 1 character SPACE current 10 99999nA 100 60000uA 7 characters X 0x20 1 character SPACE voltage 3000 5000V 6 characters CR 0xOD 1 character CR 2 characters HV 1 character 1 character SPACE 5 characters 1 character SPACE 2 characters 1 character SPACE 1 character Controller Commands Mode HV Channel On Off Setting AOns Enter where AO HV Channel Serial Command for Status Set N HV Channel Number 1 or 2 s Ofor OFF 1 for ON HV Channel Start Protect Mode Setting COns Enter where CO HV Channel Serial Command for Start Protect Setting n HV Channel Number 1 or 2 s 0 for START mode 1 for PROTECT mode Clear Fault Reset FOn Enter where FO HV Channel Serial Command for Fault reset n HV Channel number 1 or 2 Bit positional Fault table when HV ON Err Description 0001 Cable Interlock when HV On Front Panel Led 1 blink of 200 ms every 4 s 0002 Remote Interlock when HV On 2 blink of 200 ms every 4 s 0004 HV Over Voltage when HV On 3 blink of 200 ms every 4 s 0008 Bad Current Offset starting HV On 4 blink of 200 ms every 4 s 0010 HV Over Power when HV On 5 blink of 200 ms every 4 s 0020 Panel Switch Moved when HV On 6 blink of 200 ms every 4 s 0040 HV Over Temperature when HV On 7 blink of 200 ms every 4 s 0080 HV Over Current Protect Enable 8 blink of 200 ms every 4 s 0100 HV Under Voltage
22. 80 W 8 lampeggi del LED Interlock del cavo HV aperto 1 lampeggio del LED Interlock remoto aperto 2 lampeggi del LED Errore interno durante la generazione di HV 4 lampeggi del LED Cortocircuito uscita 5 lampeggi del LED Modifica dello stato dello switch I O locale remota mentre HV era On 6 lampeggi del LED Temperatura eccessiva all interno dell unit 7 lampeggi del LED 6 35 ISTRUZIONI PER L USO Sul connettore Remote nel pannello posteriore Uscita Fault contatto N C stato inattivo Il contatto aperto in condizione Fault rel Off Il contatto chiuso durante il normale funzionamento rel On Uscita HV 1 2 contatto N O stato inattivo Il contatto aperto con HV in stato Off rel Off Il contatto chiuso con HV in stato On rel On Punto di regolazione della corrente di uscita HV 1 2 contatto N O stato inattivo Il contatto aperto con un valore di corrente di uscita inferiore al punto di regolazione della corrente rel Off Il contatto chiuso con un valore di corrente di uscita superiore al punto di regolazione della corrente rel On Potenza nominale dei rel di uscita 2A 125Vca Carico minimo 10mW 100mV 1mA Tempo di saltellamento NO 1msec NC 3msec SMALTIMENTO Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo si
23. ALIBRATION The fourth line is reporting that the internal UO BUS are initialized EVT IO BUS INIT The fifth line is the notification that a main power on cold system startup reset is happened EVT COLD RESET SYSTEM STARTUP The sixth and last line reports the number n of Power On Cold Reset happened up to that moment POR n 32 35 TECHNICAL INFORMATION These six lines are sent also if the EEPROM s parameter n 30 are set to 0 Disable Remark Lines After these six lines the normal report sequence starts accordingly to the report type chosen notifying the user about the values of voltage current and power faults and events status for each channel When an ion pump discharge happens the unit performs a warm system start reset automatically bringing to O V the HV to stop the discharge then it sends again the first five remarking lines with the fifth changed to EVT WARM RESET SYSTEM RESTART to inform that a warm reset system restart is happened and the HV output that was in the ON state before the discharge is automatically restarted After these five lines the normal report sequence starts accordingly to the report type chosen Enable Disable Remark Lines These five lines are sent also if the EEPROM s parameter n 30 are set to 0 Disable Remark Lines If the EEPROM s parameter n 30 is set to 1 all the remark lines the lines that begin with the symbol are sen
24. E comandi sono forniti tutti attraverso la linea seriale I O remota locale comandi sono forniti tutti agendo sul pannello anteriore dell unit oppure attraverso il connettore REMOTE a 25 pin presente sul pannello posteriore 5 HV2 LED E On quando il controller fornisce l alta tensione per la pompa 2 Lampeggia in caso di anomalia vedere paragrafo Informazioni tecniche per maggiori dettagli 3 35 87 900 124 01 B ISTRUZIONI PER L USO Pannello posteriore dell unit controller per pompe ioniche La seguente figura illustra i comandi e gli indicatori del pannello posteriore del controller Per le informazioni dettagliate circa i collegamenti fare riferimento all Appendice Informazioni tecniche 1 O O HY OUTPUT BATTERY LINE INPUT FUSE HV1 v2 ATA i CABLE INTERLOCK S SERIAL REMOTE I O Pannello posteriore dell unit controller per pompe ioniche RIF SEGNALE DESCRIZIONE HVT Connector Connettore HV per cavo di collegamento alla pompa ionica 1 HV2 Connector Connettore HV per cavo di collegamento alla pompa ionica 2 LINE INPUT Modulo contenente la spina del cavo di ingresso della linea e l interruttore LINE 6 REMOTE Connector Connettore DB25 per collegamenti WO remota 7 vroemer OOOO s Hv2 Cable inteook OOS 4 35 87 900 124 01 B PROCEDURE DI USO Questo paragr
25. Example RT O Enter 4 HV2 OFF OuA OV F 0000 E 0000 HV1 OFF HV2 OFF OuA OuA OV F 0000 OV F 0000 E 0000 E 0000 HV Channel Status OFF__ ON___ FAULT Hexadecimal representation of HV Channel Faults Hexadecimal representation of HV Channel Events User Operator Report Type 2 and User Technician Report Type 3 Report Format Report Fields HVc HV Channel c 1 or 2 sssss HV Channel Status OFF__ ON___ FAULT iii HV Channel Current in nA or uA VVVV HV Channel Voltage in V ffff Hexadecimal representation of HV Channel Faults eeee Hexadecimal representation of HV Channel Events ppppp HV Channel Power in mW yyyy 16 Bits hexadecimal Current ZZZ 10 Bits hexadecimal Voltage www 12 Bits hexadecimal Control Output 33 35 87 900 124 01 B TECHNICAL INFORMATION Example RT 2 Enter B HV2 OFF 0uA OV F 20000 E 0000 OmW i 0001 v 000 c D80 HV1 OFF 0uA OV F 20000 E 0000 OmW i 0003 v 000 c D80 HV2 OFF 0uA OV F 20000 E 0000 OmW i 0001 v 000 c D80 User Operator Report Type 4 and User Technician Report Type 5 Report Format Report Fields HVc HV Channel c 1 or 2 sssss HV Channel Status OFF ON FAULT iiiii HV Channel Current in nA or uA VVVV HV Channel Voltage in V ffff hexadecimal representation of HV Channel Faults eeee hexadecimal representation of HV Channel Events ppppp HV Channel Power in mW yyyy 16 Bits hexadecimal Current ZZZ 10 Bits hexade
26. INSTALLATION Le contr leur est fourni dans un emballage de protection En cas de signes vidents d endommagements qui ont eu lieu durant le transport contacter le bureau de vente local Pendant la phase d ouverture de l emballage du contr leur veiller ne pas le laisser tomber et viter de le soumettre des chocs ou des vibrations Traiter le mat riel d emballage suivant les proc dures sp ciales autoris es Ces mat riaux sont 100 recyclables et sont conformes la R glementation EEC 85 399 Ouverture de l emballage 87 900 124 01 B INSTALLATION nasca Le contr leur est pourvu d un cable d alimentation 3 fils sans fiche Appliquer une fiche appropri e selon le pays d utilisation du contr leur A remarquer que le fil jaune vert du c ble est la connexion masse du contr leur Utiliser toujours ce c ble d alimentation et introduire la fiche dans une prise avec la connexion appropri e masse afin d viter les d charges lectriques V rifier le bon usage des connexions masse La haute tension g n r e dans le contr leur peut provoquer de graves l sions voire le d c s Avant de proc der toute op ration de maintenance sur l unit d brancher le c ble de l alimentation WS ATTENTION Le contr leur peut tre utilis comme unit de banc ou module rack en tout cas il doit tre positionn de mani re permettre la circulation de l air travers les ouvertu
27. Netzschalter Halter f r die Schmelzsicherungen 2 Sicherungen 6 REMOTE Connector DB25 Stecker f r die REMOTE VO Anschl sse 7 JI Cable mero SS Ce He Cable mero 10 35 87 900 124 01 B GEBRAUCH Dieser Abschnitt enth lt allgemeine Informationen ber den Gebrauch des Kontrollers Einzelheiten finden sich im Anhang Technische Informationen Wenn der Kontroller ans Netz angeschlossen ist und der Netzschalter auf der R cksite auf ON I steht k nnen alle seine Funktionen genutzt werden 2 unabh ngige HV Kan le max 5000 V Ausgangsspannung max 40W Ausgangsleistung f r Kanal 1 max 80W Ausgangsleistung f r Kanal 2 max gt 30 mA Ausgangsstrom Kurzschluss bedingung f r Kanal 1 e max gt 60 mA Ausgangsstrom bedingung f r Kanal 2 e Betriebsarten LOCAL REMOTE V O SERIAL e START PROTECT Betrieb Kurzschluss BETRIEBSARTEN Netzversorgung Betrieb LOCAL REMOTE 1 0 ANMERKUNG Die beiden HV Schalter auf der Vorderkonsole und die beiden HV AN AUS Eing nge auf dem DB25 Fern Stecker auf der R ckwand sind funktionell in Serie HV AN AUS f r Kanal 1 durch Vorderkonsole Die externe isolierte 24 V Versorgung anschlieBen an Pin 8 und Pin 21 des Fern E A Steckers und den HV1 Stecker auf der Vorderkonsole bewegen HV AN AUS f r Kanal 2 durch Vorderkonsole Die externe isolierte 24 V Versorgung anschlie en an Pin 9 und Pin 22 des Fern E A Steckers und den H
28. PCU like a Standard MODEM lon Pump Control Unit Operator Host Serial Communication The Controller Report and Operator Host Command are ASCII strings CR 0D hexadecimal 13 decimal terminated Default Communication Parameters are 9600 bits sec no parity 8 bits data 1 stop bit Usually the human interface of the controller is a terminal emulator Windows HyperTerminal communication program for example running on Personal Computer Software program on PC or PLC can use the same ASCII protocol described below for human interface for doing automatic contro and monitoring of the controller 30 35 Every 100 min to 1000 max msec if the controller is in Report mode default all the 2 Report strings made of 30 characters each corresponding to the 2 HV channels are sent by the IPCU The string is made of different length depending on the report tipe selected for each HV channel independently by the channel status A transmission from the external PC turns the IPCU to the Command Mode To go back to the Report Mode complete the command string with CR 0x0D or ESC 0x1B Every single received character is Echoed back in order to allow a control by the operator 87 900 124 01 B Controller Report Mode TECHNICAL INFORMATION HVn status fault start protect current voltage HV HV n 1 or 2 si 0x20 status OFF FAULT ON aS 0x20 fault 00 FF Da 0x20 start protect
29. ROLLERS VALVES COMPONENTS LI Bad feedthrough L Poor vacuum LI Main seal leak L Bellows leak L Vacuum leak TT High voltage problem L Solenoid failure LI Damaged flange O Error code on display Other TT Damaged sealing area Other Customer application Customer application LEAK DETECTORS INSTRUMENTS L Cannot calibrate L No zero high backround LI Gauge tube not working Display problem L Vacuum system unstable Failed to start LI Cannot reach test mode LI Other L Communication failure Error code on display L Degas not working L Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS LI Pump doesn t start L Doesn t reach vacuum L Pump seized LI Noisy pump describe LI Over temperature L Other TT Heater failure L Doesn t reach vacuum L Vacuum leak Electrical problem Cooling coil damage LI Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich Argentina Varian Argentina Ltd Sucursal Argentina
30. V2 Stecker auf der Vorderkonsole bewegen Die betreffenden HV Kabelverriegelungen m ssen geschlossen sein HV AN AUS f r Kanal 1 HV durch Fern E A Mit dem Schalter HV1 auf der Vorderkonsole auf AN die externe isolierte 24 V Versorgung anlegen AN oder abnehmen AUS von Pin 8 und Pin 21 des Fern E A Steckers HV AN AUS f r Kanal 2 HV durch Fern E A Mit dem Schalter HV2 auf der Vorderkonsole auf AN die externe isolierte 24 V Versorgung anlegen AN oder abnehmen AUS von Pin 9 und Pin 22 des Fern E A Steckers Wenn die HV AN ist ist die betreffende HV LED auf der Vorderkonsole AN 11 35 GEBRAUCHSANLEITUNG ANMERKUNG Wenn die Verbindung zwischen dem Kontroller und der Pumpe mit einem HV Kabel mit Sicherungs verriegelung realisiert ist muss das Kabel mit dem F T der Pumpe verbunden und der kleine Bananenstecker auf der Kontrollerseite des Kabels in die entsprech enden HV Kabel Verriegelungsbuchse auf der R ckseite der Einheit eingesteckt sein um die Hochspannung einschalten zu k nnen Erfolgt der Anschluss mit einem einadrigen HV Kabel ohne Sicherheitsverriegelung sicherstellen dass auf der R ckseite der Einheit die vorgesehene Br cke in die Buchse f r HV Kabelverriegelung eingesteckt ist SERIELLER Betrieb ANMERKUNG Die SERIELLE Verbindung wird eingestellt um bei Anschluss des Controllers an einen externen PC zu arbeiten der HYPER TERMINAL oder ein gleichartiges Programm z B
31. afo fornisce informazioni generiche inerenti l uso del controller Per i dettagli fare riferimento al paragrafo Informazioni tecniche Collegando il cavo di alimentazione del controller alla linea di alimentazione e posizionando l interruttore LINE presente nel pannello posteriore su ON I l apparecchiatura in grado di fornire le seguenti prestazioni 2 canali HV indipendenti Tensione di uscita massima 5000 Vcc Potenza di uscita massima 40W per il canale 1 Potenza di uscita massima 80W per il canale 2 Corrente di uscita massima gt 30 mA condizione di cortocircuito per il canale 1 e Corrente di uscita massima gt 60 mA condizione di cortocircuito per il canale 2 e Modalit operativa I O LOCALE REMOTA SERIALE e Modalit operativa START PROTECT MODALIT OPERATIVE Collegamento alla linea di alimentazione Modalit operativa 1 0 LOCALE REMOTA NOTA I 2 switch HV nel pannello anteriore e i due input HV On Off sul connettore DB25 Remote nel pannello posteriore funzionano in serie HV On Off del anteriore canale 1 mediante il pannello Collegare un alimentazione esterna isolata da 24 Vcc al Pin 8 e al pin 21 del connettore I O remota e spostare lo switch HV1 sul pannello anteriore HV On Off del canale 2 mediante il pannello anteriore Collegare un alimentazione esterna isolata da 24 Vcc al Pin 9 e al pin 22 del connettore I O remota e spostare lo switch HV2 sul pannello anterior
32. ax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support amp Service North America Tel 1 800 882 7426 toll free vtl technical support varianinc com Europe Tel 00 800 234 234 00 toll free vit technical support varianinc com Japan Tel 81 3 5232 1253 dedicated line vtj technical support varianinc com Korea Tel 82 2 3452 2452 dedicated line vtk technical support variani
33. check boxes for any materials that equipment was exposed to check all categories that apply Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name eei eerte Eed Customer Authorized Signature Print Title ea Dates ieri NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA sss Customer ID Equipment H Ar Request for Return VARIAN A8 GE FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS O Does not start O Noise O Vertical Power Rotational Speed L Does not spin freely TT Vibrations L Horizontal Current Inlet Pressure L Does not reach full speed L Leak TT Upside down Temp 1 Foreline Pressure LI Mechanical Contact L Overtemperature Other Temp 2 Purge flow O Cooling defective e OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONT
34. cher connectors Battery Connection 3 pin connector for Lead Acid Battery 12 Vdc 24 Ah HV Battery Back Up Option if available for the model NOTE All connecting cables for remote I O and serial connections if longer than 3 m must be of the shielded type 25135 87 900 124 01 B TECHNICAL INFORMATION Output Voltage V 6000 5000 4000 3000 2000 1000 lon Pump C U Output Curve 40W channel 1 0 5 10 15 20 25 30 35 Pump Current mA Output Voltage Curve for Line Supply Output Voltage V 6000 5000 4000 3000 2000 1000 lon Pump C U Output Curve 80W channel 2 ic Fe sonia de ng le e te rec t vi rir 16 32 64 Pump Current mA Output Voltage Curve for Line Supply 26135 87 900 124 01 B TECHNICAL INFORMATION o o NN E eo HE oAoAo 5 e A gt
35. cimal Voltage www 12 Bits hexadecimal Control Output hhhh 16 Bits hexadecimal Digital Debounced Inputs dd 8 Bits hexadecimal DAC Output Example RT 4 Enter HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 d 7407 r 00 HV1 OFF OuA OV F 0000 E 0000 OmW i 0003 v 000 c D80 d 7407 r 00 HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 d 7407 r 00 HV1 OFF OuA OV F 0000 E 0000 OmW i 0003 v 000 c D80 d 7407 r 00 HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 d 7407 r 00 Old IPCU Releases Compatibility Report Type 6 Report Format Report Fields HVc HV Channel c 1 or 2 sssss HV Channel Status OFF__ ON___ FAULT ff 8 bits HEX representation of HV Channel Faults p 0 Start 1 Protect iii HV Channel Current in xA nA or uA nano Ampere or micro Ampere HV Channel Voltage in V Volts Example RT 6 HV2 OFF 00 0 OuA Du HV1 HV2 OFF OFF 00 0 00 0 QuA OuA OV OV HV1 HV2 OFF OFF 00 0 OuA OuA OV OV 34135 87 900 124 01 B Floating Point Notation The floating point notation follows the ANSI IEEE Standard 754 1985 Binary Floating Point Arithmetic Example AL 1 11111111 Enter x wr 31 1 Enter set RT select report HV2 OFF 0 0E 9A HV1 OFF 0 0E 9A 0 HV2 OFF 0 0E 9A 0 HV1 OFF 0 0E 9A 0 HV2 OFF 0 0E 9A 0 HV1 OFF 0 0E 9A 0 HV2 OFF 0 0E 9A HV1 OFF 0 0E 9A 0 HV2 OFF 0 0E 9A 0 e for
36. d 24 Vdc 10 50 supply for input signal External 24 Vdc pin 8 for channel 1 pin 9 for channel 2 Internal 1k5 1 4W 5 carbon resistor REMOTE HV1 ON OFF COMMAND EXT GND REF REMOTE HV2 ON OFF COMMAND EXT GND REF RECORD OUTPUT GROUND REFERENCE GND RECORD OUTPUT VOLTAGE REFERENCE 5 28 35 TECHNICAL INFORMATION Isolated 24Vdc Reference GND pin 21 or 22 e Remote Interlock Remote HV On off Ch1 HV input Pin 8 Pin 21 Ch2 HV input Pin 9 Pin 22 Output Signals Connection Relay outputs Single contact Output relays rating 2A 125Vac Minimum load 10mW 100mV 1mA Bouncing Time NO 1msec NC 3msec e Set Point Relay Outputs Ch1 Set Point Pin 1 NO Pin 14 COM Ch2 Set Point Pin 2 NO Pin 15 COM Relay contact Closed when I gt Iset point Relay contact Open when l lt lset point Relay Idle State Open when unit in main power OFF condition e HV Status Relay Outputs Ch1 HV status Pin 4 NO Pin 17 COM Ch2 HV Status Pin 5 NO Pin 18 COM Relay contact Closed when HV ON Relay contact Open when HV Off Relay Idle State Open when unit in main power OFF condition e Fault status relay contact Fault status Pin 7 NC Pin 20 COM Relay contact Closed Relay deactivated when unit in normal operation Relay contact Open relay activated when unit in Fault condition Relay Idle State Closed when unit in main power OFF conditi
37. e corrispondenti interlock del cavo HV devono essere chiusi HV On Off del canale 1 mediante I O remota Con lo switch HV1 sul pannello anteriore in posizione On Applicare On o rimuovere off l alimentazione esterna isolata da 24 Vcc al pin 8 e al pin 21 del connettore I O remota HV On Off del canale 2 mediante UO remota Con lo switch HV2 sul pannello anteriore in posizione On Applicare On o rimuovere off l alimentazione esterna isolata da 24 Vcc al pin 9 e al pin 22 del connettore I O remota Quando HV ON il corrispondente LED HV sul pannello anteriore si accende 5 35 ISTRUZIONI PER L USO NOTA Se il collegamento tra l IPCU e la pompa realizzato per mezzo di un cavo ad alta tensione con interlock di sicurezza il cavo deve essere collegato all F T della pompa e il connettore unipolare di dimensioni ridotte deve essere inserito nella relativa spina HV Cable Interlock presente sul pannello posteriore dell unit al fine di poter attivare l alta tensione Se il collegamento realizzato con un cavo alta tensione unipolare senza interlock di sicurezza accertarsi che il ponticello fornito sul pannello posteriore dell unit sia inserito nella spina HV Cable Interlock Funzionamento SERIALE NOTA La modalit SERIALE impostata per utilizzare il prodotto collegando il controller ad un PC esterno che utilizza il programma HYPER TERMINAL o un programma equival
38. e is below the current set point relay Off The contact is Closed with output current value above the current set point relay On Output relays rating 2A Q 125Vac Minimum load 10mW 100mV 1mA Bouncing Time NO 1msec NC 3msec DISPOSAL Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale XI EX 87 900 124 01 B ION PUMP CONTROLLER DESCRIPTION The lon Pump controller is composed of a number of printed circuit boards e 1 board Power Supply it converts the Line Voltage to the 24 Vdc that is used to generate the HV TECHNICAL INFORMATION e 2 boards HV generation they generate the HV for the 2 output channels e 1 board CPU it contains all the digital circuitry and the microprocessor e 1 board Auxiliary Power Supply it generates the and 12 Vdc for the analog circuitry the 5 Vdc for the digital circuitry Controller
39. eaaa aiaia 29 Controller RS232 Standard Serial Pin outs DB9 Female Connector i 29 PIN EUNCGTIONS ot aeree t ERE NER allatta Gela 28 lon Pump Control Unit Operator Host Serial Communication 30 Controller Report Mode AA 31 Controller Commands Mode 31 Bit positional Fault table when HV ON 31 Bit positional Event table when HV On or OFF i 31 AbOUtREPport Cm 32 Enable Disable Remark Lines sise 32 Continuous and NON continuous report mode 32 Enable Disable Input ECO characters 32 ee ger ne EE 33 Report TYPE 0 6 ri e EB na ica canst tin dete kinds 33 User Operator Report Type 0 and User Technician Report Type 1 nnne 33 User Operator Report Type 2 and User Technician Report Type 3 33 User Operator Report Type 4 and User Technician Report Type 5 nnne 34 Old IPCU Releases Compatibility Report Type 6 34 Floating Point Notation strain dec ct ee eee e el 35 eB lai adelaide lana E 35 INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente Manuale di Istruzioni e ogni altra informazione aggiuntiva fornita dalla Varian prima di utilizzare l apparecchiatura La Varian si ritiene sollevata da eventuali responsabilit dovute al inosservanza totale o parziale delle istruzioni all uso improprio da parte di personale non addestrato ad i
40. ec NC 3msec MISE AU REBUT Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en ceuvre le processus de collecte et mise au rebut ke A 87 900 124 01 B GENERAL INFORMATION This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment Varian will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorised interference with the equipment or any action contrary to that provided for by specific national standards The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard pr
41. eckung flieBen kann Wenn der Kontroller in ein Gestell eingebaut ist MUSS er in ein vier Einheiten hohes Adapterchassis eingebaut werden damit er nicht in das Gestell kippen kann Das vordere Bedienfeld ist nicht daf r ausgelegt das Gewicht der Einheit zu halten Den Kontroller nicht in einer Umgebung installieren die Regen Schnee Eis Staub aggressiven Gasen usw ausgesetzt explosionsgef hrdet oder stark feuergef hrdet ist ANMERKUNG Wenn der Kontroller in einem Gestell installiert wird die vier F Be entfernen und oben und unten mindestens 30 mm Raum lassen ae Der Kontroller muss so installiert werden dass er leicht von der Netzspannung getrennt werden kann Abziehen des Netzsteckers oder Hauptschalter des Gestells 8135 GEBRAUCHSANLEITUNG Beim Betrieb m ssen die folgenden Umgebungs bedingungen eingehalten werden e Temperatur 5 C bis 40 C e rel Luftfeuchtigkeit 0 95 nicht kondensierend Zum Anschluss des Kontrollers an die Pumpen die mitgelieferten Kabel benutzen F r Einzelheiten ber die erw hnten und andere Anschl sse den Anhang Technische Informationen zu Rate ziehen BENUTZUNG Dieser Abschnitt beschreibt die fundamentalen Betriebsprozeduren Detaillierte Informationen und Betriebsprozeduren mit optionalen Anschl ssen oder Optionen werden im Abschnitt GEBRAUCH im Anhang Technische Informationen behandelt Vor Inbetriebnahme des Kontrollers alle elektrischen Ansch
42. ein Anwender eignes Programm unter Windows oder einem anderen Betriebssystem benutzt Um im seriellen Modus zu arbeiten die serielle Schnittstelle mit dem SERIELLEN Stecker auf der R ckwand verbinden und WINDOWS HYPER TERMINAL auf dem PC mit folgenden Einstellungen laufen lassen e COMI e 9600 Baud e keine Parit t e 8 Datenbits e 1 Stopbit Bei dieser Betriebsart k nnen die Funktion der Einheit im seriellen Betrieb getestet die Befehle gegeben und alle Betriebsdaten empfangen werden ANMERKUNG Abh ngig von der Anwenderumgebung muss das Betriebssystem bei seriellem Betrieb Echtzeit f hig sein Weitere Einzelheiten finden sich Technische Informationen im Anhang START PROTECT Betrieb Der Kontroller kann in zwei Betriebsarten arbeiten Start und Protect In Start k nnen die 2 Ausgangskan le die ganze Ausgangsleistung unabhangig von dem Pumpen zustand bis zur Kurzschlussleistung liefern Diese Betriebsart muss zum Starten der Pumpen bei hohem Druck benutzt werden Im Protect Betrieb begrenzt der Controller den Ausgangsstrom und schaltet die HV ab wenn der Strom f r mehr als 2 Sekunden den Grenzwert bersteigt 8 mA f r den 40W Kanal und 16 mA f r den 80W Kanal 87 900 124 01 B RMELDUNGEN gt m vo rderen Bedienfeld Wenn w hrend des Kontrollerbetriebs ein Fehler entdeckt wird wird dieser von den HV LEDs auf dem vorderen Bedienfeld angezeigt HV 1 LEDS AN Normalbetrieb LED
43. el paese di utilizzo del controller Si noti che il filo giallo verde del cavo il collegamento a massa del controller Utilizzare sempre questo cavo di alimentazione ed inserire la spina in una presa con adeguato collegamento a massa onde evitare scariche elettriche Verificare la correttezza dei collegamenti a massa L alta tensione generata nel controller pu causare gravi danni o addirittura il decesso Prima di eseguire qualsiasi intervento di manutenzione sull unit scollegare il cavo di alimentazione HS ATTENZIONE Il controller pu essere utilizzato come unit da banco o modulo rack in ogni caso deve essere posizionato in modo tale da consentire la circolazione d aria attraverso le apposite aperture presenti sulla copertura superiore e laterale Se il controller utilizzato come modulo rack DEVE essere inserito in un adattatore per rack a 4 scomparti per evitare che il controller cada all interno del rack Il pannello anteriore del controller non progettato per supportare il peso dell unit Non installare o utilizzare il controller in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o ad elevato rischio di incendio NOTA Se il controller installato su un rack rimuovere i quatto piedini e posizionarlo lasciando uno spazio minimo di 30 mm 1 2 pollici in corrispondenza della superficie superiore e inferiore erg Il controller deve essere i
44. ente ad esempio un programma proprietary user sotto Windows o altro sistema operativo Per utilizzare il prodotto in modalit seriale collegare la porta seriale al connettore Serial del controller sul pannello posteriore eseguire il programma HYPER TERMINAL di Windows sul PC con le seguenti impostazioni di default e COMI e 9600 baud e No parity e 8 data bits e 1 stop bit Questa modalit operativa consentir di verificare la funzionalit dell unit lanciare i comandi e accedere a tutti i dati operativi NOTA Durante il funzionamento seriale a seconda dell ambiente di utilizzo il S O impiegato deve avere una capacit real time Per maggiori dettagli fare riferimento al paragrafo Informazioni tecniche Modalit operativa START PROTECT Il controller pu funzionare nelle due seguenti modalit Start e Protect In modalit Start i 2 canali in uscita possono fornire tutta la potenza in uscita a prescindere dalle condizioni della pompa fino allo stato di cortocircuito Questa modalit viene utilizzata per azionare la pompa a pressione elevata In Protect il controller limita la corrente di uscita e disattiva l HV quando la corrente supera il valore di soglia 8 mA per il canale da 40W e 16 mA per il canale da 80W per pi di 2 secondi 87 900 124 01 B MESSAGGI DI ERRORE Sul pannello anteriore Durante il funzionamento del controller se rilevato un errore i LED alta tensione s
45. es RIF SIGNAL DESCRIPTION 1 MAINS ON LED Lorsqu il y a une condition de On cela veut dire que l unit est branch e la ligne de l alimentation et que l interrupteur Line sur le panneau post rieur est en position ON I HV1 ON OFF SWITCH Lorsqu il est en position ON I il habilite l alimentation haute tension pour la pompe 1 si le contr leur est sur modalit op rationnelle I O distance locale et que les interlock du c ble ext rieur et du c ble haute tension sont ferm s 3 HV1 LED Il est surOn lorsque le contr leur fournit la haute tension pour la pompe 1 Il clignote en cas d anomalie voir paragraphe Informations techniques pour de plus amples d tails HV2 ON OFF SWITCH Lorsqu il est sur ON I il habilite l alimentation haute tension pour la pompe 2 si le contr leur est sur modalit op rationnelle I O distance locale et que les interlock du c ble ext rieur et du c ble haute tension sont ferm s 5 HV2LED Il est sur On lorsque le contr leur fournit la haute tension pour la pompe 2 Il clignote en cas d anomalie voir paragraphe Informations techniques pour de plus amples d tails SERIAL LOCAL REM Il permet de s lectionner la modalit op rationnelle I O SWITCH SERIELLE Les commandes sont fournies travers la ligne s rielle I O distance locale Les commandes sont fournies en agissant sur le panneau ant rieur de l unit ou bien travers le connecteur REMOTE 25 pin pr
46. i La funzionalit e il significato di alcuni comandi e indicatori del pannello anteriore del controller con le indicatori cambia a seconda della posizione relative descrizioni e funzionalit dell interruttore HV ON OFF La seguente tabella riporta tutte le funzionalit e tutti i significati dei segnali SERIAL LOCAL REM I O ION PUMP Comandi e indicatori del pannello anteriore dell unit controller per pompe ioniche RIF SEGNALE DESCRIZIONE 1 MAINS ON LED Quando On significa che l unit collegata alla linea di alimentazione e che l interruttore Line sul pannello posteriore in posizione ON I HV1 ON OFF SWITCH Quando in posizione ON I abilita l alimentazione ad alta tensione per la pompa 1 se il controller impostato in modalit operativa I O remota locale e gli interlock del cavo esterno e del cavo alta tensione sono chiusi HV1 LED On quando il controller fornisce l alta tensione per la pompa 1 Lampeggia in caso di anomalia vedere paragrafo Informazioni tecniche per maggiori dettagli HV2 ON OFF SWITCH Quando in posizione ON I abilita l alimentazione ad alta tensione per la pompa 2 se il controller impostato in modalit operativa I O remota locale e gli interlock del cavo esterno e del cavo alta tensione sono chiusi SERIAL LOCAL REM Consente di selezionare la modalit operativa UO SWITCH SERIAL
47. l sse und diejenigen an das Vakuumsammelrohr vornehmen und das Anleitungshandbuch f r die angeschlossenen Pumpen zu Rate ziehen Eu Wenn die Pumpe auf einem Tisch liegt sicherstellen dass sie ruhig liegt um Verletzungen von Personen und Besch digung des Ger ts zu verhindern Die Pumpe nie betreiben wenn deren Einlass nicht am System angeschlossen oder verschlossen ist 87 900 124 01 B GEBRAUCHSANLEITUNG Steuerungen und Anzeigen auf dem vorderen Bedienfeld des lonenpumpen Kontrollers ANMERKUNG Die Abbildung und die Tabelle auf der folgenden Seite Bei einige Steuerungen und Anzeigen h ngt die zeigen die Steuerungen und Anzeigen auf dem Funktion von der Stellung des Schalters HV ON OFF vorderen Bedienfeld des lonenpumpen Kontrollers mit ab Die Tabelle enth lt all diese Funktionen und ihre Beschreibung und Funktion Bedeutung SERIAL LOCAL REM I O ION PUMP Steuerungen und Anzeigen auf dem vorderen Bedienfeld des lonenpumpen Kontrollers REF SIGNAL BESCHREIBUNG Wenn an ist die Einheit ans Netz angeschlossen und der Netzschalter auf der R ckseite steht auf ON I 2 HV1 ON OFF Wenn auf ON I wird die HV f r die Pumpe 1 geschaltet sofern der Kontroller auf SWITCH LOCAL REMOTE UO Betrieb gesetzt ist und die externen wie die HV Kabel Verriegelungen geschlossen sind 3 HV1LED Wenn an versorgt der Kontroller die Pumpe 1 mit
48. lon Pumps Control Unit Model 629 5001 87 900 124 01 B JUNE 2007 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem HE Agilent Technologies D MANUALE ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL lon Pumps Control Unit A VARIAN gt lt vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us kn
49. lugged to the Power Line and the Line Switch on the rear panel is ON I it is able to operate with its full set of features 2 independent HV channels 5000 Vdc maximum output Voltage 40W maximum output Power for channel 1 80W maximum output Power for channel 2 gt 30 mA maximum output current short circuit condition for channel 1 e gt 60 mA maximum output current short circuit condition for channel 2 e LOCAL REMOTE I O SERIAL operating mode e START PROTECT operation OPERATING MODES Power Line supply LOCAL REMOTE 1 0 Operation NOTE The 2 HV switches on the front panel and the 2 HV On Off inputs on the DB25 Remote connector on the rear panel are functionally in series HV On Off of channel 1 by front panel Connect an external insulated 24 Vdc supply to Pin 8 and pin 21 of the Remote I O connector and move the HV1 switch on the front panel HV On Off of channel 2 by front panel Connect an external insulated 24 Vdc supply to Pin 9 and pin 22 of the Remote I O connector and move the HV2 switch on the front panel The correspondent HV cable Interlocks must be closed HV On Off of channel 1 by Remote I O With the HV1 switch on the Front Panel in On position Apply On or remove off the external insulated 24 Vdc supply to pin 8 and pin 21 of the Remote I O connector HV On Off of channel 2 by Remote I O With the HV2 switch on the Front Panel in On position Apply On or remove
50. mbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita E Be x 87 900 124 01 B ALLGEMEINES Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren von Varian mitgelieferten Zusatzdoku mente genau lesen Bei auch nur teilweisem Nicht beachtung der enthaltenen Hinweise unsachgemaBem Gebrauch durch ungeschultes Personal nicht autori sierten Eingriffen und Missachtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Fa Varian keinerlei Haftung In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei Anwendung des Ger ts angef hrt Ins einzelne gehende Informationen ber das Ger t finden sich im Anhang Technische Informationen In dieser Gebrauchanleitung werden Sicherheits hinweise wie folgthervorgehoben neon Der Gefahrenhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte Vorg nge oder Praktiken die bei falscher Ausf hrung zu schweren Verletzu
51. nc com Taiwan Tel 0 800 051 342 toll free vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries AL S VARIAN
52. ngen f hren k nnen HS ACHTUNG Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam dass bei Nichtbeachten Sch den an der Anlage entstehen k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die im Text hervorgehoben werden BESCHREIBUNG DES KONTROLLERS Der Varian Kontroller dient zur Steuerung von lonen pumpen Er kann gleichzeitig bis zu 2 lonenpumpen unabh ngig voneinander bedienen und ist so ent worfen dass er die lonenpumpen mit HV versorgt wenn er an das Netz angeschlossen ist max Ausgangsspannung 5000 V Weitere Einzelheiten finden sich im Anhang Technische Informationen Der Varian lonenpumpen Kontroller kann in den Betriebsarten LOCAL REMOTE I O oder im seriellen Modus ber eine serielle RS232 Schnittstelle benutzt werden Die Betriebsart wird mit dem Schalter SERIAL LOCAL Remote I O auf dem vorderen Bedienfeld des Kontrollers gew hlt In der Betriebsart LOCAL REMOTE I O werden alle Befehle auf dem vorderen Bedienfeld oder durch Anschl sse an den Stecker DB25 REMOTE auf der R ckseite gegeben Daten ber die Betriebsbedingungen der Pumpen sind in jedem Fall ber den seriellen Anschluss verf gbar Im SERIELLEN Modus kommen die Befehle ber die serielle Verbindung die auch die Daten ber die Betriebsbedingungen der Pumpen liefert 7135 GEBRAUCHSANLEITUNG LAGERUNG Bei Transport und Lagerung des Kontrollers m ssen die folgenden Umgebu
53. ngsbedingungen eingehalten werden Temperatur 20 bis 70 C rel Luftfeuchtigkeit 0 95 nicht kondensierend INSTALLATIONSVORBEREITUNG Der Kontroller wird in einer speziellen Schutz verpackung geliefert Wenn diese Spuren von Besch digung zeigt die bei der Spedition erfolgt sein kann kontaktieren Sie Ihr lokales Verkaufsb ro Beim Auspacken des Kontrollers darauf achten dass er nicht herunterf llt oder St Ben oder Vibrationen ausgesetzt wird Das Verpackungsmaterial umweltfreundlich entsorgen Das Material kann zu 100 recycelt werden und entspricht der EU Richtlinie 85 399 Verpackung 87 900 124 01 B INSTALLATION neon Der Kontroller hat ein dreiadriges Netzkabel ohne Stecker Bringen Sie den richtigen Stecker f r das Land an in dem der Kontroller eingesetzt wird Der gelbgr ne Leiter des Kabels ist der Erdungsanschluss des Kontrollers Benutzen Sie diesen Leiter und den angeschlossenen Stecker zusammen mit einer richtig geerdeten Steckdose um elektrische Schl ge zu verhindern Pr fen Sie dass die Erdungsverbindung richtig funktioniert Die im Kontroller erzeugte Hochspannung kann zu schweren Verleztungen und zum Tode f hren Vor Wartungsarbeiten am Kontroller das Netzkabel abziehen HS ACHTUNG Der Kontroller kann als Tisch oder als Gestellmodul benutzt werden Er muss aber so positioniert sein dass Luft frei durch die L cher in der Seitenwand und der oberen Abd
54. nstallato in modo tale da poter interrompere senza difficolt la tensione scollegamento della spina o interruzione mediante interruttore della linea generale del rack 2 35 ISTRUZIONI PER L USO Durante il funzionamento dell apparecchiatura necessario che siano rispettate le seguenti condizioni ambientali e temperatura da 5 C a 40 C e umidit relativa 0 95 non condensante Per collegare il controller alla pompa utilizzare gli appositi cavi forniti Per le informazioni dettagliate circa i collegamenti sopra indicati o di altra natura fare riferimento all Appendice Informazioni tecniche USO In questo paragrafo sono riportate le principali procedure operative Per ulteriori dettagli e per le informazioni inerenti i collegamenti opzionali fare riferimento al paragrafo USO dell Appendice Informazioni tecniche Prima di azionare il controller eseguire tutti i collegamenti elettrici e verso la pompa e leggere il Manuale di Istruzioni della pompa collegata N KE Per evitare danni personali o all apparecchiatura se la pompa collocata su un tavolo accertarsi che quest ultimo sia stabile Non azionare la pompa qualora la relativa presa sia scollegata dal sistema oppure sia ostruita 87 900 124 01 B ISTRUZIONI PER L USO Comandi e indicatori del pannello anteriore dell unit controller per pompe ioniche NOTA La figura e la tabella seguenti riportano i comandi e gl
55. nterventi non autorizzati o ad un utilizzo non conforme alle normative nazionali specifiche Nei paragrafi seguenti sono riportate tutte le informazioni necessarie per garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Nell Appendice Informazioni tecniche sono forniti maggiori dettagli Il presente manuale utilizza il seguente protocollo standard ern messaggi di pericolo attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali HS ATTENZIONE messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NOTE Le note contengono informazioni importanti estrapolate dal testo DESCRIZIONE DEL CONTROLLER Controller della Varian per pompe ioniche in grado di azionare fino a 2 pompe simultaneamente e in modo indipendente Questo controller progettato per fornire l alta tensione alle pompe ioniche mediante collegamento all alimentazione principale tensione in uscita max 5000 Vcc Per maggiori dettagli vedere paragrafo Informazioni tecniche Questo controller pu essere azionato in modalit operativa I O remota locale oppure in modalit seriale attraverso la porta RS232 La selezione della modalit operativa eseguita per mezzo dell interruttore remote local serial UO presente sul pannello anteri
56. ntes HV 1 2 3 LED ON Fonctionnement normal HV ON Led HV 1 2 clignotant condition d erreur 1 clignotement toutes les 4 secondes c ble Interlock HV 2 clignotements toutes les 4 secondes Interlock distance 3 clignotements toutes les 4 secondes surtension HV cette anomalie ne d shabilite pas HV 4 clignotements toutes les 4 secondes erreur l int rieur de ADC 5 clignotements toutes les 4 secondes surtension sur HV court circuit 6 clignotements toutes les 4 secondes bouton Local A distance a t d plac avec HV ON 7 clignotements toutes les 4 secondes temp rature excessive l int rieur de l unit 8 clignotements toutes les 4 secondes sur tension en Protect I gt 8 mA pour le canal de 40W et 1 gt 16 mA pour le canal de 80W 9 clignotements toutes les 4 secondes surtension HV En modalit I O distance locale la condition d anomalie est remise z ro en positionnant sur Off 0 l interrupteur du canal correspondant pr sent sur le panneau ant rieur En modalit s rlelle la condition d anomalie est remise z ro en envoyant la commande FOn travers l ordinateur NOTE Au cas o une des conditions suivantes s av rent tandis que la haute tension du canal est active la sortie du canal est programm e imm diatement sur OFF le voyant LED sur le panneau ant rieur inique la condition d anomalie correspondante et l information inh rente cette derni re est envoy e la sor
57. ocation nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Lem TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION Company name Salsa seen EUR UR or Ria Contact person Name nennen nes era ip m lg E jd EYE MC T Ship Method ees Shipping Collect 0 lor T Europe only VAT reg Number USA only Taxable Non taxable Customer Ship To ENNEN Customer Bill To PRODUCT IDENTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair LI Warranty Exchange Warranty Repair L Loaner Return Credit LI Shipping Error Evaluation Return O Calibration L Other iecit HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one L HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection
58. on 87 900 124 01 B Analog Recorder Outputs TECHNICAL INFORMATION 5 0000 4 Recorder Out 4 0000 3 0000 IN Voltage V 2 0000 1 0000 0 0000 1 00E 08 1 00E 07 1 00E 06 1 00E 05 1 00E 04 Current A 1 00E 03 1 00E 02 1 00E 01 Analog Recorder Output Ch1 Pin 11 Pin 24 OV Ch2 Pin 12 Pin 24 OV Note At Pin 25 a reference voltage corresponding to the 2 recorder outputs full scale value 5V 5 is given This reference allows getting a more precise reading from the 2 recorder outputs It allows the scaling of the actual reading to the real value of the full scale SERIAL Operation The Controller works on RS232 DCE Mode like a Modem with DB9 FEMALE connector The Host Terminal Personal Computer works always on RS232 DTE Mode like a PC with DB9 MALE connector The Cable Interconnections are 1 to 1 signals DB9 Male Female Standard CABLE Controller RS232 Standard Serial Pin outs DB9 Female Connector DCD CARRIER DETECT RXD RECEIVE TXD TRANSMIT DATA 7 TERMINAL DTR_DATA SG SIGNAL G READY OUND gt DATA a Fi IS Q DI A RS232 D Shell Female 9P 29 35 SR
59. on the user environment the O S used must have real time capability See the Technical Information paragraph for details START PROTECT Operation The controller can operate in two modes Start and Protect In Start the 2 output channels can provide all the output power regardless of the pump condition up to the short circuit condition This operating mode must be used to start the pump at high pressure In Protect the controller limits the output current and switches off the HV when the current exceeds the threshold value 8 mA for 40W channel and 16 mA for 80W channel for more than 2 seconds 87 900 124 01 B ERROR MESSAGES On Front Panel During the controller operation if an error condition is detected the HV LEDs on the front panel will give the indication HV 1 2 LEDS ON Normal Operation HV ON Led HV 1 2 flashing error condition 1 flash every 4 seconds Interlock HV cable 2 flashes every 4 seconds remote Interlock 3 flashes every 4 seconds HV Over voltage This Fault doesn t switch off the HV 4 flashes every 4 seconds error inside ADC 5 flashes every 4 seconds overcurrent on HV short circuit 6 flashes every 4 seconds the Local Remote switch was moved with HV ON 7 flashes every 4 seconds temperature inside unit 8 flashes every 4 seconds overcurrent in Protect I 8 mA for 40W channel and 1 gt 16 mA for 80W channel 9 flashes every 4 seconds voltage over HV Under In Local
60. onner jusqu 2 pompes simultan ment et de mani re autonome Ce contr leur est congu pour fournir la haute tension aux pompes ioniques par l interm diaire d une connexion l alimentation principale tension en sortie max 5000 Vcc Pour de plus amples d tails voir le paragraphe Informations Techniques Ce contr leur peut tre actionn en modalit op rationnelle I O a distance locale ou bien en modalit s rielle travers le port s rie RS232 La s lection de la modalit op rationnelle est effectu e au moyen de l interrupteur remote local serial I O pr sent sur le panneau ant rieur du contr leur En modalit l O distance locale les commandes sont effectu es en agissant sur le panneau ant rieur ou bien au moyen d une connexion au connecteur REMOTE DB25 REMOTE pr sent sur le panneau post rieur Les donn es inh rentes aux conditions op rationnelles de la pompe sont disponibles sur la connexion s rielle En modalit s rielle les commandes sont effectu es travers la connexion s rielle et toutes les donn es relatives aux conditions op rationnelles de la pompe sont disponibles sur la connexion s rielle 13135 MODE D EMPLOI EMMAGASINAGE Durant le transport et l emmagasinage du contr leur il faudra veiller respecter les conditions environnementales suivantes temp rature de 20 70 C humidit relative 0 95 non condensante PREPARATION POUR L
61. ore del controller Nella modalit I O remota locale i comandi sono eseguiti agendo sul pannello anteriore oppure mediante collegamento al connettore REMOTE DB25 REMOTE presente nel pannello posteriore dati inerenti le condizioni operative della pompa sono disponibili sulla linea seriale Nella modalit seriale i comandi sono eseguiti attraverso il collegamento seriale e tutti i dati relativi alle condizioni operative della pompa sono disponibili sul collegamento seriale 1 35 ISTRUZIONI PER L USO IMMAGAZZINAMENTO Durante il trasporto e l immagazzinamento del controller non devono essere superate le seguenti condizioni ambientali temperatura da 20 a 70 C umidit relativa 0 95 non condensante PREPARAZIONE PER L INSTALLAZIONE Il controller fornito all interno di un apposito imballo protettivo In caso di segni evidenti di danneggiamento accorsi durante il trasporto contattare l ufficio vendite locale In fase di disimballaggio del controller fare attenzione a non lasciarlo cadere ed evitare di sottoporlo ad urti o vibrazioni Trattare il materiale di imballaggio secondo le apposite procedure autorizzate Tali materiali sono 100 riciclabili e rispondono alla Direttiva EEC 85 399 Disimballaggio 87 900 124 01 B INSTALLAZIONE Ex Il controller dotato di un cavo di alimentazione a 8 fili senza spina Applicare una spina appropriata a seconda d
62. otocol ares The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury HS CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text CONTROLLER DESCRIPTION Varian s controller is an ion pumps controller It can drive up to 2 lon Pumps simultaneously and independently The controller is designed to give the HV to the lon Pumps when it is connected to the Mains supply Max Output Voltage 5000 Vdc See the paragraph Technical Informations for details Varian s lon Pump controller can be driven in Local Remote UO operating mode or in the Serial mode via the RS232 port The selection of the operating mode is done by means of the SERIAL LOCAL Remote I O switch on the controller front panel In the LOCAL REMOTE I O mode all the commands are given by the front panel or by the connections to the DB25 REMOTE connector on the rear panel The pump operating conditions data are anyway available on the serial connection In the SERIAL mode all the commands are given through the serial connection and all the pump operating conditions data are available on the serial connection 19 35 INSTRUCTIONS FOR USE STORAGE When transporting and storing the controller the
63. ow how we can improve Sincerely 4 OVI NN Wi n s did Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Leini Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc ap VARIAN gt lt ISTRUZIONI PER CUSO EE 1 GEBRAUGHSANEETTUN Gaia 7 MODE ERUN 13 INSTRUCTIONS FOR USE sarai i RR i Riario 19 TECHNICAL INFORMATION i 25 ION PUMP CONTROLLER DESGSCHIDTION i 25 Controller Specifications ii 25 Remote I O Connector PinOuUt sise 28 Input Commands Connection iii 28 Output Signals Conn ection aiar e ie aa 28 Analog Recorder Outputs sise 29 Setial Operation niim e IR ee ee
64. res appropri es pr sentes sur le cache sup rieur et lat ral Si le contr leur est utilis comme module rack DIL DOIT ETRE introduit dans un adaptateur pour rack 4 compartiments afin d viter que le contr leur ne tombe l int rieur du rack Le panneau ant rieur du contr leur n est pas conu pour supporter le poids de l unit Ne pas installer ou utiliser le contr leur dans des milieux expos s aux agents atmosph riques pluie gel e neige aux poussi res aux gaz agressifs dans des milieux risque d explosion ou d incendie NOTE Si le contr leur est install sur un rack enlever les quatre pieds et le positionner en laissant un espace minimum de 30 mm 1 2 pouces en correspondance de la superficie sup rieure ou inf rieure Wm Le contr leur doit tre install de mani re pouvoir interrompre sans probl mes la tension d branchement de la fiche ou interruption au moyen de l interrupteur de la ligne g n rale du rack 14 35 MODE D EMPLOI Durant le fonctionnement de l appareillage il est n cessaire que soient respect es les conditions environnementales suivantes e temp rature de 5 C 40 C e humidit relative 0 95 non condensante Pour brancher le contr leur la pompe utiliser les c bles appropri s fournis Pour les informations d taill es propos des connexions ci dessus indiqu es ou d une autre nature se r f rer l annexe Informations Techniques
65. sent sur le panneau post rieur 15 35 87 900 124 01 B MODE D EMPLOI Panneau post rieur de l unit contr leur pour pompes ioniques La figure suivante montre les commandes et les indicateurs du panneau post rieur du contr leur Pour de plus amples renseignements d taill s propos des connexions se r f rer l annexe Informations techniques 1 O O HY OUTPUT BATTERY LINE INPUT FUSE HV1 N V2 A EE amp HV1 9A 5 SERIAL 6 REMOTE I O Panneau post rieur de l unit contr leur pour pompes ioniques RIF SIGNAL DESCRIPTION HV1 Connector Connecteur HV pour c ble de connexion la pompe 1 HV2 Connector Connecteur HV pour c ble de connexion la pompe inique 2 LINE INPUT Module contenant la fiche du c ble d entr e de la ligne et l interrupteur LINE FUSE Support fusibles 2 fusibles 6 REMOTE Connector _ Connecteur DB25 pour connexion VO a distanse 7 tivi cable mero C s tvecebe mero Jl 16 35 87 900 124 01 B PROCEDURES D UTILISATION Ce paragraphe fournit les informations g n rales relatives l utilisation du contr leur Pour les d tails se r f rer au paragraphe Informations techniques en branchant le cable d alimentation du contr leur la ligne d alimentation et en positionnant l interrupteur LINE pr sent dans le panneau post rieur sur ON I l
66. t For EEPROM s parameter n 30 0 all the remark lines are NOT sent except the first six lines at the main power on reset cold reset and the first five lines after an ion pump discharge reset warm reset sent anyway Continuous and NON continuous report mode IPCU is able to send report only on request To do this it is necessary to set the report mode with the time rate 0 After the enter the continuous report mode stops immediately According to the report type and mode the unit sends one instantaneous report each time a Request Report RR command is received To return in the continuous report mode it is necessary to send a new Report Setting RT command with time rate O After the enter the continuous report mode starts immediately Enable Disable Input ECO characters By default the unit transmits the ECO of all characters received from the host If required It is possible to disable this feature See the command Enable Disable Receiving Input ECO to do this The ECO of input characters may be used to understand that the physical communication between the unit and host is good so disabling the ECO this feature is lost 87 900 124 01 B About commands When the unit receives a command it transmits the plus symbol to confirm the command is executable If the command is not correct the unit transmits the minus symbol When the parameter of a command is out of
67. tie s rielle Intervention en Protect I gt 8mA pendant plus de 2 secondes pour la sortie 40 W 16 mA pour la sortie 80 W 8 clignotements du LED Interlock du c ble HV ouvert 1 clignotement du LED Interlock distance ouvert 2 clignotements du LED Erreur interne durant la production de HV 4 clignotements du LED Court circuit sortie 5 clignotements du LED Modification de la condition du bouton I O local distance tandis que HV tait sur On 6 clignotements du LED Temp rature excessive l int rieur de l unit 7 clignotements du LED 18 35 MODE D EMPLOI Sur le connecteur Remote dans le panneau post rieur Sortie Fault contact N C condition inactive Le contact est ouvert en condition Fault relais Off Le contact est ferm durant le fonctionnement normal relais On Sortie HV 1 2 contact N O condition inactive Le contact est ouvert avec HV en condition Off relais Off Le contact est ferm avec HV en condition de On relais On Point de r glage du courant de sortie HV 1 2 contact N O condition inactive Le contact est ouvert avec une valeur du courant de sortie inf rieure au point de r glage du courant relais Off Le contact est ferm avec une valeur du courant de sortie sup rieure au point de r glage du courant relais On Puissance nominale des relais de sortie 2A Q 125Vca Chargement minimum 10mW 100mV 1mA Temps de sautillement NO 1ms
68. u enlever off l alimentation externe isole de 24 Vcc au pin 8 et au pin 21 du connecteur I O distance HV On Off du canal 2 par l interm diaire du I O distance Avec le bouton HV2 sur le panneau ant rieur en position On Appliquer On ou enlever off l alimentation externe isole de 24 Vcc au pin 9 et au pin 22 du connecteur I O distance Lorsque HV est sur ON le LED HV correspondant sur le panneau ant rieur s allume 17 35 MODE D EMPLOI NOTE Si la connexion entre le IPCU et la pompe se fait par l interm diaire d un c ble haute tension avec interlock de s curit le c ble doit tre connect au F T de la pompe et le connecteur unipolaire aux dimensions r duites doit tre introduit dans la relative fiche HV Cable Interlock pr sente sur le panneau post rieur de l unit afin de pouvoir activer la haute tension Si la connexion est r alis e avec un c ble haute tension unipolaire sans interlock de s curit v rifier que le shunt fourni sur le pannneau post rieur de l unit soit ins r dans la fiche HV Cable Interlock Fonctionnement SERIEL NOTE La modalit SERIELLE est saisie pour utiliser le produit en tranchant le contr leur un PC externe qui utilise le programme HYPER TERMINAL ou un programme quivalent par exemple un programme proprietary user sous Windows ou autre syst me op rationnel Pour utiliser le produit en modalit s rielle brancher le port s
69. ul pannello anteriore forniranno le seguenti indicazioni HV 1 2 3 LEDON Funzionamento normale HV ON Led HV 1 2 lampeggiante condizione di errore 1 lampeggio ogni 4 secondi cavo Interlock HV 2 lampeggi ogni 4 secondi Interlock remoto 3 lampeggi ogni 4 secondi sovratensione HV questa anomalia non disattiva l HV 4 lampeggi ogni 4 secondi errore all interno dell ADC 5 lampeggi ogni 4 secondi 2 sovracorrente su HV cortocircuito 6 lampeggi ogni 4 secondi lo switch Locale Remoto stato spostato con HV ON 7 lampeggi ogni 4 secondi temperatura eccessiva all interno dell unit 8 lampeggi ogni 4 secondi sovracorrente in Protect I gt 8 mA per il canale da 40W e 1 gt 16 mA per il canale da 80W 9 lampeggi ogni 4 secondi sottotensione In modalit I O remota locale la condizione di anomalia resettata posizionando su Off 0 l interruttore del canale corrispondente presente sul pannello anteriore In modalit seriale la condizione di anomalia resettata inviando il comando FOn attraverso il computer NOTA Nel caso in cui si verifichi una delle seguenti condizioni mentre l alta tensione del canale attiva l uscita del canale impostata immediatamente su Off il LED sul pannello anteriore indica la condizione di anomalia corrispondente e l informazione inerente l anomalia inviata all uscita seriale Intervento in Protect I 8mA per pi di 2 secondi per l uscita 40 W 16 mA per l uscita
70. when HV On 9 blink of 200 ms every 4 s Bit positional Event table when HV On or OFF Err Description Front Panel Led 0001 Cable Interlock when HV Off No blink 0002 Remote Interlock when HV Off No blink 0004 HV Over Voltage when HV On No blink 0008 Bad Current Offset when HV Off No blink 0010 HV Over Power when HV On No blink 0020 Spare No blink 0040 Over Temperature No blink 0080 HV Over Current Protect Disable No blink 0100 HV Under Voltage when HV On No blink 0200 Current Below Threshold when HV On No blink Max Output Voltage setting HOnxxxx Enter where HO HV Channel Serial Command for Voltage Target n HV Channel number 1 or 2 xxxx Voltage Target min 3000V max 5000V in 50 V steps Set Point Current Threshold Setting Minimum Access Level Required 0 WR space Y space oooo Enter WR Write Y 14 for channel 1 15 for channel 2 XXXXXX Current Set Point value in nA from 0 to 100000000 Set Point Current Threshold reading RD space Y Enter RD Read Y 14for Channel 1 15 for Channel 2 Report Setting RT space X or RT space X space Y Enter or RT space X space Y space Z Enter X type 0 5 see detailed description on About Report chapter Y time rate O 255 based on 100 msec tick default is 3 For time rate 0 to stop continuous reporting mode and start report on request see Request Report Command Z mode O

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